The invention discloses a
control system for detecting
light attenuation and self-compensation of an LED heating lamp panel, and relates to the field of
semiconductor wafer heating and cleaning, the
system collects illumination data of the LED heating lamp panel through a spectrum detection unit, a main
control unit compares real-time illumination data with target illumination data, and then the input power of the lamp panel is adjusted to realize self-compensation; the temperature detection unit and the current detection unit respectively monitor the temperature of the lamp panel and the current of the power supply loop, and stop the self-compensation operation in case of
abnormality; after illumination collection or power adjustment is completed every time, the lamp panel enters a zero-power input stage to be cooled; after the self-compensation is completed, the main
control unit transmits the adaptive power value to the equipment upper computer so as to update the process parameters; according to the
system, automatic detection and accurate compensation of
light attenuation of the LED heating lamp panel are achieved, manual intervention is not needed, the stability of the light
power density of the LED heating lamp panel is guaranteed, the equipment loss is reduced, and the
wafer cleaning quality and the production efficiency are improved.