Gas purification system of radio frequency power supply and mode switching control method thereof

Abstract

The invention belongs to the technical field of radio-frequency power supplies, and particularly relates to a gas purification system of a radio-frequency power supply and a mode switching control method of the gas purification system. The gas purification system comprises a shell, an air valve, a partition plate and a filtering module. An air inlet and an air outlet are formed in the two ends of the shell correspondingly. The air valves are arranged at the two ends of the shell and block the air inlet and the air outlet correspondingly. The partition plate is arranged in the shell, the partition plate is arranged in the circulation direction so as to divide the inner space of the shell into two air channels, the two ends of the partition plate and the air valve are arranged in a spaced mode, gaps are reserved, and the gaps communicate with the two air channels so as to form an inner circulation flow channel; and the filtering module is inserted into the shell and is positioned at the downstream of the circuit board in the radio frequency power supply. The two active ventilation devices are arranged corresponding to the two air channels respectively. The invention is used for solving the problem of pollution caused by leakage of toxic gas in the radio frequency power supply.

Description

Technical Field

[0001] This invention belongs to the field of radio frequency power supply technology, specifically relating to a gas purification system for radio frequency power supplies and its mode switching control method. Background Technology

[0002] Radio frequency (RF) power supplies are devices that use high-frequency electromagnetic waves of radio frequency current to achieve energy transfer. They can generate high-power sine waves or pulse voltages in the radio frequency band to provide stable and controllable high-frequency power output to the load. They are mainly used in semiconductor manufacturing, flat panel display production, and thin-film solar cell processing.

[0003] Currently, high-power RF power supplies face two new sources of internal air pollution during long-term operation: 1. Process residue pollution: Industrial reagents used in the manufacturing process, such as PCB boards, potting compounds, and conformal coatings, continuously release volatile organic compounds (VOCs) such as formaldehyde, benzene, and toluene at the power supply's operating temperature (up to 50-100°C). These accumulate in the enclosed enclosure, posing a chronic health threat to maintenance personnel. 2. Instantaneous pollution during malfunctions: When internal power components (such as MOSFETs, capacitors, and resistors) fail due to overload or aging, their polymer materials undergo pyrolysis and combustion, producing highly toxic gases such as cyanide, ammonia, and trimethylamine, and ejecting conductive carbon black powder.

[0004] In air-circulation designs, these powders diffuse with the airflow, easily causing insulation degradation and short circuits in adjacent healthy components, leading to secondary failures and expanding the damage area. Furthermore, in some RF power supplies with external airflow designs, smoke and dust from internal component failures can spread outside the RF power supply, potentially triggering smoke alarms within the FAB (Feature Air Filter), causing the FAB workshop to shut down for inspection and resulting in significant economic losses. Summary of the Invention

[0005] To address the shortcomings of existing technologies, a gas purification system for radio frequency power supplies and its mode switching control method are provided to solve the problem of toxic gas leakage and pollution inside the radio frequency power supply.

[0006] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: A gas purification system for radio frequency power supplies, comprising: The casing has an air inlet and an air outlet at each end; Two air valves are located at both ends of the housing, respectively sealing the air inlet and air outlet; A partition is disposed in the housing. The partition is arranged along the flow direction to divide the internal space of the housing into two air ducts. The two ends of the partition are spaced apart from the air valve, and the gaps connect the two air ducts to form an internal circulation channel. A filter module is inserted into the housing and located downstream of the circuit board in the RF power supply. The filter module is disposed in the two air ducts and is used to filter the airflow flowing through the two air ducts. At least two active ventilation devices are provided, each corresponding to one of the two air ducts.

[0007] Compared with existing technologies, the above technical solutions have the following beneficial effects: By using a partition to create two air ducts within the housing, the filter module completely intercepts both air ducts, allowing the gas generated by the circuit board inside the housing to pass through the filter module and be discharged to the outside. Furthermore, air valves are located at the air inlets and outlets at both ends of the housing, and the two air ducts are connected by the gap at both ends to form a circulation channel. In extreme cases, the air valves can be completely closed to form an internal circulation. Through the active ventilation device, the toxic gases generated by the circuit board can circulate in the circulation channel, repeatedly passing through the filter module for filtration. Moreover, the air valves are closed to cut off the connection with the outside, preventing polluted gases from being discharged outside the housing.

[0008] Based on the above technical solution, the embodiments of this application can be further improved as follows: In one embodiment, the air duct includes a first air duct and a second air duct, and the circuit board inside the radio frequency power supply is disposed in the first air duct; The active ventilation device includes: At least one first ventilation device is provided, which is arranged corresponding to the first air duct and located on the side of the filter module away from the circuit board; At least one second ventilation device is provided, which is arranged corresponding to the second air duct and is located on the side of the filter module close to the circuit board.

[0009] In one embodiment, the active ventilation device further includes at least one third ventilation device, which is arranged corresponding to the second air duct and is offset from the second ventilation duct.

[0010] In one embodiment, the filtering module includes: A slot is provided in the housing, the slot's socket is connected to the outside of the housing, the slot blocks and intercepts the two air ducts, and the slot has several ventilation openings corresponding to the two air ducts; The adsorption filter box is fitted into the slot. Several electrostatic dust collection units are respectively arranged on the ventilation openings on the side of the slot away from the active ventilation device.

[0011] In one embodiment, the electrostatic dust collection unit includes a dust collection mesh, an insulating layer coated on the dust collection mesh, and a slow discharge layer coated on the insulating layer, wherein the slow discharge layer is grounded.

[0012] In one embodiment, the system further includes a controller connected to a sensor module disposed on the circuit board, the sensor module being used to monitor abnormal gas release from the circuit board and generate a first signal. The controller is connected to the air valve and is used to close the air valve and send an alarm signal when it receives the first signal.

[0013] This invention also discloses a mode switching control method for a gas purification system utilizing the above-mentioned radio frequency power supply, which includes the following steps: Data is collected from the inside of the housing using a sensor array to establish a multi-sensor data vector, which includes: a pollutant data sub-vector, a particulate matter data sub-vector, a physical parameter data sub-vector, and an equipment status data sub-vector. Anomaly score is calculated for each subvector separately, and then a comprehensive anomaly score is obtained by combining a scoring function with a time-enhancing factor model. The rate of change of pollutant data subvectors is monitored, and then the failure probability model is combined to determine the failure of components; A comprehensive verification result was obtained by verifying the sensor's consistency, time continuity, and physical rationality from multiple dimensions. When the results of the comprehensive anomaly score, rate of change monitoring and failure probability model reach the preset emergency triggering conditions, the emergency mode triggering conditions are generated. When the result of the comprehensive anomaly score remains lower than the preset normal trigger condition within the preset recovery time condition, a normal mode recovery condition is generated; When the emergency mode triggering conditions, comprehensive verification results, and switching time interval conditions are met, switch to emergency mode; When the normal mode recovery conditions and the switching time interval conditions are met, switch to normal mode.

[0014] In one implementation, the anomaly degree is calculated for each sub-vector separately, and then the comprehensive anomaly score is calculated by combining the scoring function with the time-enhancing factor model. The comprehensive anomaly score is calculated using the following formula: ； The anomaly degree for each sub-vector is calculated using the following formula: ； The parameter x takes values ​​in the range [0,1], and is used to represent the degree to which the parameter deviates from the normal baseline. The baseline value of parameter x. : The maximum safety limit for parameter x; The pollutant data subvectors are calculated using the scoring function as follows: ； The particulate matter data subvectors are calculated using the scoring function as follows: ； The subvectors of physical parameter data are calculated using the scoring function as follows: ； The subvector of device status data is calculated using the scoring function as follows: ； in, This is the total weight coefficient for the scoring item, with a value range of (0,1), used to indicate the importance of this scoring item in the overall score; The time-enhancing factor model is as follows: ； Indicates the past number i The overall anomaly score of the system at each moment, This is the current time. It is the sampling time interval.

[0015] In one embodiment, the rate of change of pollutant data subvectors is calculated using the following formula: ； Used to detect the instantaneous rate of change in the concentration of hydrogen cyanide (HCN) and ammonia (NH3) in pollutants; The failure probability model is calculated and determined using the following formula: ； in, Used to indicate the degree of malfunction caused by the release of any pollutant gas; Used to indicate the degree of ozone concentration abnormality. Used to indicate the degree of failure in a power system.

[0016] In one embodiment, the comprehensive verification result obtained by verifying sensor consistency, time duration, and physical rationality from multiple dimensions is as follows: ; Sensor consistency is verified using the following formula: ; The duration of time is verified by the following formula: ; The physical plausibility is verified by the following formula: .

[0017] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages: 1. Through a composite chemical filter cartridge, chronic health hazards are absorbed and decomposed internally, protecting the health of long-term workers.

[0018] 2. By combining sensor data collection with mode switching control methods and physical isolation after the air valve is closed, acute poisoning is prevented, secondary faults are suppressed, and fault safety is achieved. At the same time, the pollution source is isolated, and the spread of pollutants to the FAB workshop outside the radio frequency power supply is blocked, avoiding smoke and dust alarms in the FAB workshop, workshop shutdown for inspection, and economic losses.

[0019] 3. Optimized electrostatic dust collection can adsorb the sprayed conductive carbon black powder, reducing the risk of short circuits caused by contamination and controlling the scope of damage.

[0020] 4. Real-time monitoring and remote alarms prevent personnel from opening high-risk equipment under unknown circumstances, thus improving operational safety. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0023] Figure 2 for Figure 1 A structural diagram from another perspective.

[0024] Figure 3 This is a schematic diagram of the structure in this invention with the side of the shell removed.

[0025] Figure 4 for Figure 3 A structural diagram from another perspective.

[0026] Figure 5 This is an exploded view of the filter module in this invention.

[0027] Figure 6This is a flowchart of the control logic of the present invention.

[0028] Figure 7 This is a flowchart of the switching control method in Embodiment 2 of the present invention.

[0029] Figure label: 1. Housing; 2. Air inlet; 3. Air outlet; 4. Air valve; 5. Partition; 6. First air duct; 7. Second air duct; 8. Gap; 9. Filter module; 10. Circuit board; 11. First ventilation device; 12. Second ventilation device; 13. Third ventilation device; 901, slot; 902, vent; 903, adsorption filter box; 904, electrostatic dust collection unit; 905, socket. Detailed Implementation

[0030] The embodiments of the technical solution of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are merely illustrative of the technical solution of the present invention and are therefore intended to limit the scope of protection of the present invention. It should be noted that, unless otherwise stated, the technical or scientific terms used in this application should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains.

[0031] In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0032] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly defined.

[0033] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0034] Example 1 like Figure 1-5 As shown, the present invention provides a gas purification system for radio frequency power supplies, which includes: a housing 1, two air valves 4, a partition 5, a filter module 9, and two active ventilation devices.

[0035] The housing 1 has an air inlet 2 and an air outlet 3 at its two ends. The air inlet and air outlet 3 of the housing 1 are respectively located at the left and right ends of the housing 1, so that external air enters from the air inlet 2 at the left end of the housing 1, flows through the interior of the housing 1, and is discharged from the air outlet 3 at the right end, thereby cooling the circuit board 10 inside. The gas circulation inside the housing 1 can be achieved through an active ventilation device.

[0036] Two air valves 4 are located at both ends of the housing 1, respectively sealing the air inlet 2 and the air outlet 3. When the air valves 4 are closed, they cooperate with the housing 1 to form a closed space inside. When the air valves 4 are open, they connect the inside and outside of the housing 1.

[0037] The partition 5 is disposed in the housing 1. The partition 5 is disposed along the flow direction. Since the left and right ends of the housing 1 are air inlets and outlets 3, the flow direction is horizontal from the left end to the right end, thus dividing the interior of the housing 1 into upper and lower air ducts. The two ends of the partition 5 are spaced apart from the air valve 4 with gaps 8. The gaps 8 connect the two air ducts to form an internal circulation channel. The filter module 9 is inserted into the housing 1 and is located downstream of the circuit board 10 in the radio frequency power supply, so that the gas emitted from the circuit board 10 can be adsorbed and filtered by the filter module 9. The filter module 9 is disposed in the two air ducts, that is, the filter module 9 completely intercepts the gas in the two air ducts and is used to filter the airflow flowing through the two air ducts.

[0038] Two active ventilation devices are respectively set for the two air ducts to drive the air flow in the two air ducts. Since the filter module 9 is arranged in the two air ducts, when switching to the inner circulation channel, the gas needs to circulate through the filter module 9 in the two air ducts in sequence. Therefore, an active ventilation device is set in each air duct. The air outlet directions of the two active ventilation devices are opposite, so as to actively drive the air circulation. The active ventilation device can be implemented by a fan.

[0039] By using a partition 5 to separate the housing 1 into two air ducts, the filter module 9 completely intercepts the two air ducts, allowing the gas generated by the circuit board 10 inside the housing 1 to be discharged to the outside after passing through the filter module 9. The air valve 4 is set at the air inlet and outlet 3 at both ends of the housing 1, and the two air ducts are connected by the gap at both ends to form a circulation channel. In extreme cases, the air valve 4 can be completely closed to form an internal circulation. The toxic gas generated by the circuit board 10 can be circulated in the circulation channel through the active ventilation device, and repeatedly filtered by the filter module 9. The air valve 4 is closed to cut off the connection with the outside, preventing the polluted gas from being discharged outside the housing 1.

[0040] Specifically, the air duct includes a first air duct 6 and a second air duct 7, that is, the upper air duct is the first air duct 6 and the lower air duct is the second air duct 7. The circuit board 10 in the radio frequency power supply is disposed in the first air duct 6. Specifically, the circuit board 10 can be disposed on the partition 5. A heat dissipation device can be disposed in the second air duct 7 in conjunction with the partition 5 to play a heat dissipation role.

[0041] In this embodiment, the active ventilation device includes a first ventilation device 11 and a second ventilation device 12, which are used to activate the first ventilation device 11 and the second ventilation device 12 when switching to the internal circulation channel, at which time the air valve 4 is in the closed device.

[0042] The first ventilation device 11 is provided corresponding to the first air duct 6 and is located on the side of the filter module 9 away from the circuit board 10. It is used to blow the airflow in the first air duct 6 from the air inlet 2 toward the air outlet 3, thereby driving the gas in the circuit board 10 through the filter module 9. The first ventilation device 11 is provided on the side of the circuit board 10 so that the gas after passing through the filter module 9 passes through the first ventilation device 11, avoiding the first ventilation device 11 from being contaminated by unfiltered gas.

[0043] The second ventilation device 12 is provided corresponding to the second air duct 7 and is located on the side of the filter module 9 near the circuit board 10. It is used to blow the gas in the second air duct 7 in the opposite direction to the first air duct 6 to form a circulating flow. Since the gas entering the second air duct 7 will enter the second air duct 7 through the gap 8, the gas will first come into contact with the filter module 9 for filtration and then pass through the second ventilation device 12, thus avoiding contamination of the second ventilation device 12.

[0044] When the circulating flow channel is not used, that is, when both the first air duct 6 and the second air duct 7 are from left to right, from the air inlet 2 to the air outlet 3, the airflow in the second air duct 7 needs to be equipped with an additional active ventilation device, at which time the air valve 4 is opened. Specifically, the active ventilation device further includes at least one third ventilation device 13, which is provided corresponding to the second air duct 7 and is used to blow the gas in the second air duct 7 from left to right. Since the blowing direction is from left to right, the third ventilation device 13 can be set on the side of the filter module 9 away from the circuit board 10. The third ventilation device 13 is offset from the second ventilation device to avoid conflict between the second ventilation device 12 and the third ventilation device 13 under different states.

[0045] Three of the ventilation devices can be implemented using PWM fans, which facilitates speed control of the three ventilation devices.

[0046] To facilitate the replacement of the filter module 9, the filter module 9 includes: a slot 901, an adsorption filter box 903, and several electrostatic dust collection units 904.

[0047] The slot 901 is provided in the housing 1, and the insertion port 905 of the slot 901 is connected to the outside of the housing 1, so that the adsorption filter box 903 can be inserted from the insertion port 905, that is, the adsorption filter box 903 can be inserted from the outside of the housing 1 into the slot 901.

[0048] The slot 901 blocks and intercepts the two air ducts. The slot 901 can be located at any position downstream of the circuit board 10 in the air duct. In this embodiment, to facilitate the setting of the partition 5, the slot 901 is set at the end of the partition 5 near the air outlet 3. The surface of the slot 901 intercepts the two air ducts. The slot 901 has a number of ventilation openings 902 corresponding to the two air ducts. The ventilation openings 902 can be formed by a number of ventilation holes or directly opened through holes corresponding to ventilation devices. The ventilation openings 902 are opened on both sides of the slot 901 to facilitate the adsorption filter box 903 to pass through the two ventilation openings 902.

[0049] The adsorption filter box 903 is matched and inserted into the slot 901. When the adsorption filter box 903 is matched and inserted into the slot 901, it can seal the inside of the slot 901, so that the gas can only pass through the adsorption filter box 903 through the vent 902 on the slot 901.

[0050] The adsorption filter box 903 contains impregnated activated carbon and potassium permanganate alumina balls for adsorbing acidic gases and VOCs. Due to the side-insertion mechanical structure design, it supports online hot-swappable replacement. The filter box replacement operation time is less than 30 seconds, and there is no need to shut down the machine, ensuring continuous operation of the equipment.

[0051] The electrostatic dust collection unit 904 is correspondingly disposed on the vent 902 on the side of the slot 901 away from the active ventilation device.

[0052] The electrostatic dust collection unit 904 can preferentially pass through the gas before it passes through the adsorption filter box 903 in the filter module 9, adsorbing the carbon black powder therein, thus preventing the carbon black powder from entering the adsorption filter box 903 and the active ventilation device.

[0053] In view of the high conductivity of carbon black powder, in order to prevent electrical short circuits and back corona phenomena caused by carbon black powder adhesion, the electrostatic dust collection unit 904 includes a dust collection mesh, an insulating layer coated on the dust collection mesh, and a slow discharge layer coated on the insulating layer, wherein the slow discharge layer is grounded.

[0054] The dust collection mesh is made of carbon steel or aluminum alloy, and then coated with an insulating layer, such as a dense layer of alumina ceramic by plasma spraying, to ensure absolute insulation from the substrate and prevent short circuits.

[0055] Then, a layer of semiconductor material such as SiC or SnO is sprayed or CVD vapor deposition onto the surface of the insulating layer, such as the ceramic layer, to make its resistivity less than 10. 4 - 10 8 Within the Ω·cm range. This resistance value ensures that the accumulated charge can leak to ground slowly and controllably, thus avoiding re-spreading caused by charge accumulation, while being high enough to prevent current from directly passing through the carbon layer to form a short circuit or back corona discharge.

[0056] In this embodiment, a controller is also included. The controller is connected to a sensor module disposed on the circuit board 10. The sensor module includes a VOCs sensor, an electrochemical formaldehyde sensor, a hydrogen cyanide sensor, an ammonia sensor, a laser dust sensor, and a temperature and humidity sensor.

[0057] The sensor modules are centrally located at key monitoring positions in the power module heat dissipation outlet of the radio frequency power supply, employing a distributed layout to ensure rapid response and accurate location of pollution sources.

[0058] This controller dynamically adjusts the purification mode based on data from the sensor module. The purification modes include a normal mode and an emergency mode. Upon detecting faulty contamination, it activates an emergency response protocol to switch to emergency mode. Its control logic is as follows: Figure 6 As shown.

[0059] The sensor module is used to monitor the abnormal gas release of the circuit board 10 and generate a first signal. The first signal serves as a signal to switch to emergency mode. At this time, the sensor module detects that the value of any pollutant exceeds a preset threshold. The controller is connected to the air valve 4 and is used to close the air valve 4 and send an alarm signal when it receives the first signal. The alarm signal can be sent to a remote terminal through the communication interface to remind the operator to avoid contact with the gas pollution source when the radio frequency power supply housing 1 is turned on.

[0060] In this embodiment, when switching to the emergency mode, the following operations are performed: the air valve 4 is closed to limit the spread of pollution sources.

[0061] The controller is also connected to an active ventilation device. When switching to emergency mode, the first ventilation device 11 and the second ventilation device 12 are started at full speed. With the air valve 4 closed, internal circulation is achieved, and the polluted gas generated by the circuit board 10 is circulated through the filter module 9 for filtration.

[0062] In this embodiment, when switching to the normal mode, the control air valve 4 is opened, and the first ventilation device 11 and the third ventilation device 13 are activated to achieve unidirectional flow from left to right in the two air ducts, and the air speed in the ventilation is reduced.

[0063] Example 2 like Figure 7 As shown, in order to achieve reasonable switching between normal mode and emergency mode, this patent provides a pollution type identification and decision-making algorithm through sensor sampling parameters to prevent misjudgment in pollution identification and decision-making, which would affect the use of normal mode.

[0064] Specifically, the method utilizes the mode switching control method of the gas purification system in Example 1, which includes the following steps: First, data is collected from the inside of the housing using a sensor array to establish a multi-sensor data vector, which includes: a pollutant data sub-vector, a particulate matter data sub-vector, a physical parameter data sub-vector, and an equipment status data sub-vector. The multi-sensor data vector is as follows: ; The pollutant data subvector is: ; The particulate matter data subvector is: ; The physical parameter data subvectors are: ; Device status data subvector: ; in, This is a multi-sensor data vector, representing the set of all sensor data collected by the system at time t. This vector contains complete information on four sub-vectors: chemical pollutants, particulate matter, physical parameters, and equipment status.

[0065] This is a pollutant data subvector containing real-time concentration measurements of four key chemical pollutants: VOCs, hydrogen cyanide, ammonia, and formaldehyde, used to assess the degree of chemical pollution.

[0066] This is a particulate matter data subvector containing real-time concentration measurements of PM2.5 and PM10 particles, used to assess particulate matter pollution levels.

[0067] This is a subvector of physical parameter data, containing real-time measurements of three environmental physical parameters: temperature (T), humidity (H), and wind pressure (P).

[0068] This is a subvector of device status data, containing three device operating status parameters: ozone concentration (O3), operating current (I) at each node of the device, and operating voltage (V).

[0069] It is expressed as pollutant concentration, and the unit is usually ppm or mg / m³.

[0070] This represents the concentration of fine particulate matter, expressed in μg / m³, indicating particles with an aerodynamic diameter ≤ 2.5 micrometers.

[0071] The concentration of inhalable particulate matter is expressed in μg / m³, representing particulate matter with an aerodynamic diameter ≤ 10 micrometers.

[0072] This represents ozone concentration in ppm, generated by the electrostatic precipitator and is a byproduct that requires monitoring.

[0073] Secondly, the anomaly degree is calculated for each sub-vector, and then the comprehensive anomaly score is calculated by combining the scoring function with the time enhancement factor model. The comprehensive anomaly score is calculated using the following formula: ; The anomaly degree of each parameter in each sub-vector is calculated using the following formula: ; in, The real-time anomaly degree of parameter x is defined as [0,1], which represents the degree to which the parameter deviates from the normal baseline.

[0074] The baseline value of parameter x is the environmental background concentration or normal operating value of the equipment, which is dynamically calculated based on historical data.

[0075] The maximum safety limit for parameter x is a safety threshold determined based on occupational health standards, equipment specifications, and environmental standards.

[0076] Then it is calculated using a scoring function; Specifically, the pollutant data subvector is calculated using the scoring function as follows: ; The particulate matter data subvectors are calculated using the scoring function as follows: ; The subvectors of physical parameter data are calculated using the scoring function as follows: ; The subvector of device status data is calculated using the scoring function as follows: ; in, This is the total weight coefficient for the scoring item, dimensionless, with a value range of (0,1), used to indicate the importance of this scoring item in the overall score.

[0077] The time-enhancing factor model is as follows: ; Indicates the past number i The overall anomaly score of the system at each moment, This is the current time. It is the sampling time interval.

[0078] It is a mathematical symbol that indicates that if the condition inside the parentheses is true, the function returns 1; if the condition is false, it returns 0.

[0079] λ is a gain coefficient that controls the strength of the influence of historical persistence on the current rating.

[0080] When the proportion of historical anomalies is very high It will be significantly greater than 1, thus amplifying the current comprehensive anomaly score. This makes it easier for the system to reach the mode switching threshold.

[0081] When history is normal This has no impact on the current rating.

[0082] Therefore, the final comprehensive anomaly score is: .

[0083] Next, the rate of change of the pollutant data subvectors is monitored, and then the failure probability model is used to determine the failure of the components. The rate of change of pollutant data subvectors is calculated using the following formula to monitor the rate of change when toxic gases surge instantaneously. ; This method is used to detect the instantaneous rate of change in the concentrations of hydrogen cyanide (HCN) and ammonia (NH3) in pollutants; the maximum value between hydrogen cyanide and ammonia is taken, because the rapid release of either highly toxic gas indicates a serious malfunction. The unit is anomaly change per second, reflecting the urgency of pollution spread.

[0084] The failure probability model is calculated and determined using the following formula: ; in, Used to indicate the severity caused by the release of any pollutant gas; To indicate the degree of ozone concentration abnormality, since ozone is a byproduct of electrostatic discharge, an abnormally high ozone concentration indicates an abnormal corona discharge process, voltage and current parameter imbalance, or possible arc discharge. Therefore, the analysis of the degree of ozone concentration abnormality is included.

[0085] Used to indicate the degree of failure in a power system, especially the operating status of power devices, rectifier circuits, and insulation systems.

[0086] in, This is the failure probability coefficient.

[0087] A comprehensive verification result was obtained by verifying the sensor's consistency, time continuity, and physical rationality from multiple dimensions. Specifically, this is achieved through the following formula: ; Sensor consistency is verified using the following formula: ; The duration of time is verified by the following formula: ; The physical plausibility is verified by the following formula: .

[0088] Then, when the results of the comprehensive anomaly score, rate of change monitoring, and failure probability model reach the preset emergency trigger conditions, the emergency mode trigger conditions are generated. The emergency mode is triggered under the following conditions: ; in, ; ; ; When the result of the comprehensive anomaly score remains lower than the preset normal trigger condition within the preset recovery time condition, a normal mode recovery condition is generated; The recovery conditions for normal mode are: ; in, ; Second.

[0089] Finally, perform the mode switching operation: When the emergency mode triggering conditions, comprehensive verification results, and switching time interval conditions are met, switch to emergency mode; The emergency mode switching is achieved through the following formula: ; When the normal mode recovery conditions and the switching time interval conditions are met, switch to normal mode; Switching to normal mode is achieved using the following formula: ; in, s.

[0090] Additionally, the current state after the switch can be displayed, which can be achieved through the following formula: .

[0091] The emergency mode is triggered when highly toxic gases exceed the standard, such as hydrogen cyanide concentration > 1 ppm or ammonia concentration > 3 ppm; the concentration change rate requirement is that a sudden increase in concentration change rate > 10% / second is detected simultaneously. like Figure 6 As shown, when switching to emergency mode: the emergency protocol is activated, the air valves 4 at both ends are closed, the connection with the outside is cut off, the contaminated area is isolated inside the casing, the active ventilation device is controlled to operate at full power, and alarm signals and maintenance requests are sent out.

[0092] The active ventilation system operates at full power, meaning the fan rotates at high speed to repeatedly filter the internal polluted gas through the filter module. The electrostatic dust collection unit operates under high pressure to efficiently absorb the sprayed carbon black powder.

[0093] When switching to normal mode: control the opening of air valves 4 at both ends, control the active ventilation device to run at low speed, and control the electrostatic dust collection unit to run at low pressure.

[0094] To facilitate understanding of the operation, the recommended values ​​for the control parameters are summarized below:

[0095] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A gas purification system for a radio frequency power supply, characterized by, The application relates to a radio frequency power supply with an active ventilation device, comprising the following parts: a shell with an air inlet and an air outlet at two ends; two air valves arranged at the two ends of the shell and respectively sealing the air inlet and the air outlet; a partition plate arranged in the shell, which is arranged along a flow direction to divide the internal space of the shell into two air channels, and gaps are left between the two ends of the partition plate and the air valves, the gaps being connected with the two air channels to form an internal circulation flow channel; a filter module inserted into the shell and located downstream of a circuit board in the radio frequency power supply, the filter module being arranged in the two air channels and used for filtering airflow flowing through the two air channels; at least two active ventilation devices respectively corresponding to the two air channels.

2. The gas cleaning system of a radio frequency power source according to claim 1, characterized by, The air channels comprise a first air channel and a second air channel, and the circuit board in the radio frequency power supply is arranged in the first air channel; the active ventilation device comprises: at least one first ventilation device corresponding to the first air channel and located on the side of the filter module away from the circuit board; at least one second ventilation device corresponding to the second air channel and located on the side of the filter module close to the circuit board.

3. The gas cleaning system of a radio frequency power source according to claim 2, characterized in that, The active ventilation device further comprises at least one third ventilation device corresponding to the second air channel, and the third ventilation device is arranged in a staggered mode with the second ventilation device.

4. The gas cleaning system of a radio frequency power source according to claim 1, characterized by, The filter module comprises: a slot arranged in the shell, a slot opening of the slot being connected with the outside of the shell, the slot being used for sealing and intercepting the two air channels, and a plurality of air vents being arranged on the slot corresponding to the two air channels; an adsorption filter box matched and inserted into the slot; a plurality of electrostatic dust collection units arranged on the air vents on the side of the slot away from the active ventilation device.

5. The gas cleaning system of a radio frequency power source according to claim 4, characterized in that, The electrostatic dust collection unit comprises a dust collection net, an insulating layer coated on the dust collection net and a slow discharge layer coated on the insulating layer, and the slow discharge layer is grounded.

6. The gas cleaning system of a radio frequency power source according to claim 1, characterized by, The application further comprises a controller connected with a sensor module arranged at the circuit board in the radio frequency power supply, the sensor module being used for monitoring abnormal gas release of the circuit board and generating a first signal; the controller is connected with the air valve and used for closing the air valve and sending an alarm signal when the first signal is received.

7. A mode switching control method of a gas cleaning system using the radio frequency power supply according to any one of claims 1 to 6, characterized by, The application comprises the following steps: data acquisition is conducted on the inside of the shell by using a sensor array, and a multi-sensor data vector is established, wherein the data vector comprises a pollutant data sub-vector, a particulate matter data sub-vector, a physical parameter data sub-vector and a device state data sub-vector; abnormal degree calculation is conducted on each sub-vector, and then a comprehensive abnormal score is calculated by combining a time enhancement factor model through a scoring function; change rate monitoring is conducted on the pollutant data sub-vector, and then a failure probability model is combined to judge the failure of components; a comprehensive verification result is obtained by conducting multi-dimensional verification on sensor consistency, time continuity and physical rationality; when the results of the comprehensive abnormal score, the change rate monitoring and the failure probability model reach preset emergency triggering conditions, an emergency mode triggering condition is generated. When the result of the comprehensive anomaly score remains lower than the preset regular trigger condition in the preset recovery time condition, a regular mode recovery condition is generated; When the emergency mode trigger condition, the comprehensive verification result, and the switching time interval condition are met, switching to the emergency mode is performed; When the regular mode recovery condition and the switching time interval condition are met, switching to the regular mode is performed.

8. The mode switching control method according to claim 7, characterized by, The anomaly degree of each sub-vector is calculated, and a comprehensive anomaly score in the comprehensive anomaly score is calculated through a scoring function combined with a time enhancement factor model according to the following formula: ； The anomaly degree of each sub-vector is calculated according to the following formula: ； wherein the parameter x has a value in the range [0, 1] and is used to indicate the degree of deviation of the parameter from the normal baseline, is a baseline value for the parameter x, is a maximum safe limit value for the parameter x; The scoring function is used to calculate the pollutant data sub-vector as follows: ； The scoring function is used to calculate the particulate matter data sub-vector as follows: ； The scoring function is used to calculate the physical parameter data sub-vector as follows: ； The scoring function is used to calculate the equipment state data sub-vector as follows: ； wherein, is the total weight coefficient of the score item, with a value range (0, 1), used to represent the importance of the score item in the overall score; The time enhancement factor model is as follows: ； a system overall anomaly score representing a past time instant, i a system overall anomaly score representing a past time instant, is the current time. is the sampling time interval.

9. The mode switching control method according to claim 7, characterized by, The change rate of the pollutant data sub-vector is monitored according to the following formula: ； The change rate of the concentration of hydrogen cyanide (HCN) and ammonia (NH3) in the pollutant is detected; The failure probability model is calculated and determined according to the following formula: ； wherein, for indicating the degree of failure caused by the release of any kind of pollutant gas; for indicating the degree of abnormality of the ozone concentration, for indicating the degree of failure of the power supply system.

10. The mode switching control method according to claim 7, characterized by, The comprehensive verification result obtained by verifying the sensor consistency, time persistence, and physical rationality in multiple dimensions is as follows: ； The sensor consistency is verified according to the following formula: ； The time persistence is verified according to the following formula: ； The physical rationality is verified according to the following formula: 。

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