A miniature needle hub and miniature needle stage

Abstract

This application provides a miniature pin holder and a miniature pin stage, relating to the field of chip testing technology. The miniature pin holder includes: a first sliding mechanism, a second sliding mechanism, and a third sliding mechanism; the first sliding mechanism includes a first slide block, a first slide plate, a first driving part, and a second driving part, the first driving part being linked to the first slide plate, and an external force driving the second driving part to move along a third direction, thereby driving the first slide plate to move along a first direction; the second sliding mechanism includes a second slide block, a second slide plate, a third driving part, and a fourth driving part, the third driving part being linked to the second slide plate, and an external force driving the fourth driving part to move along a third direction, thereby driving the second slide plate to move along a second direction; the fixed end of the third sliding mechanism is fixedly connected to the second slide plate, and the output end reciprocates along a third direction, the output end of the third sliding mechanism being used to connect a probe. This miniature pin holder is small in size and requires less space for installation.

Description

Technical Field

[0001] This application relates to the field of chip testing technology, and more specifically, to a micro pin header and a micro pin station. Background Technology

[0002] In semiconductor manufacturing, it is common to test the electrical parameters of semiconductor chips. A probe station is a common device used for this testing. During testing, the device under test (DUT) is placed on the probe station's support, and then the probes are inserted into the test points to detect electrical parameters such as voltage, current, resistance, and capacitance of the integrated circuit.

[0003] The probes used in the test are mounted on probe holders. To allow the probes to remain at any position within a preset space, the probe holders are equipped with X-axis, Y-axis, and Z-axis sliding mechanisms. These three mechanisms drive the probes to move along the X, Y, and Z directions, respectively. However, in existing probe holder sliding mechanisms, the driving component that drives the slide plate moves in the same direction as the slide plate. That is, in the X-axis sliding mechanism, both the slide plate and the driving component move along the X direction; in the Y-axis sliding mechanism, both the slide plate and the driving component move along the Y direction; and in the Z-axis sliding mechanism, both the slide plate and the driving component move along the Z direction. This configuration requires increasing the dimensions of the probe holders in the X, Y, and Z directions to allow sufficient space for the driving component to move. Sufficient space also needs to be reserved in the X, Y, and Z directions during probe holder installation for the user to drive the operating components. This results in a larger size for each probe holder and a larger installation space. With a fixed probe holder installation space, the total number of probe holders that can be installed is limited, leading to low testing efficiency and making it difficult to meet the needs of high-efficiency batch testing of relatively small chips. Summary of the Invention

[0004] The purpose of this application is to address the shortcomings of the prior art by providing a miniature needle holder and a miniature needle stage, which are smaller in size and require less space for installation.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:

[0006] In one aspect of this application, a miniature needle holder is provided, comprising: a first sliding mechanism, a second sliding mechanism, and a third sliding mechanism; the first sliding mechanism includes a first slide block, a first slide plate, and a first driving assembly, the first slide plate being slidably engaged with the first slide block, the first driving assembly including a first driving member, the first driving member including a first driving part and a second driving part connected to the first driving part, the first driving part extending along a first direction, the second driving part extending along a third direction, the first driving part being linked with the first slide plate, an external force driving the second driving part to move along the third direction, thereby driving the first slide plate to move along the first direction through the first driving part; the second sliding mechanism includes a second slide block, a second slide plate, and a third sliding mechanism. The second drive assembly has a second slide block fixedly connected to a first slide block, and a second slide block slidably engaged with the second slide block. The second drive assembly includes a second drive member, which includes a third drive part and a fourth drive part connected to the third drive part. The third drive part extends along a second direction, and the fourth drive part extends along a third direction. The third drive part is linked to the second slide block, and an external force drives the fourth drive part to move along the third direction, thereby driving the second slide block to move along the second direction through the third drive part. The fixed end of the third sliding mechanism is fixedly connected to the second slide block, and the output end reciprocates along the third direction. The output end of the third sliding mechanism is used to connect a probe. The first direction, the second direction, and the third direction are perpendicular to each other.

[0007] Optionally, the first drive unit has a first inclined surface, the first slide has a second inclined surface, the first inclined surface and the second inclined surface are in contact, and the angle between the first inclined surface and the first direction is an acute angle; and / or, the third drive unit has a third inclined surface, the second slide has a fourth inclined surface, the third inclined surface and the fourth inclined surface are in contact, and the angle between the third inclined surface and the second direction is an acute angle.

[0008] Optionally, the first sliding mechanism further includes a first sliding sleeve fixed on the first sliding plate, the first sliding sleeve having a first sliding groove extending in a third direction, and the second driving part being slidably disposed in the first sliding groove.

[0009] Optionally, the first drive assembly further includes a first operating screw, and the first sliding sleeve is provided with a first through hole. The first operating screw passes through the first through hole, the axis of the first operating screw is parallel to a third direction, the head of the first operating screw protrudes from the first sliding sleeve, and the tail is threadedly engaged with the second drive part.

[0010] Optionally, the second sliding mechanism further includes a second sliding sleeve fixed on the second sliding plate, the second sliding sleeve having a second sliding groove extending in a third direction, and the fourth driving part being slidably disposed in the second sliding groove.

[0011] Optionally, the second drive assembly further includes a second operating screw, and the second sliding sleeve is provided with a second through hole. The second operating screw passes through the second through hole, the axis of the second operating screw is parallel to the third direction, the head of the second operating screw protrudes from the second sliding sleeve, and the tail is threadedly engaged with the fourth drive part.

[0012] Optionally, the first drive assembly further includes a first spring seat and a first return spring, the first spring seat being fixedly connected to the first slide plate, one end of the first return spring being mounted on the first spring seat and the other end being connected to the side of the first slide plate opposite to the first drive member; and / or, the second drive assembly further includes a second spring seat and a second return spring, the second spring seat being fixedly connected to the second slide plate, one end of the second return spring being mounted on the second spring seat and the other end being connected to the side of the second slide plate opposite to the first drive member.

[0013] Optionally, the third sliding mechanism includes a third slide block, a third slide plate, and a third drive assembly. The third slide block is fixedly connected to the second slide plate, and the third slide plate is slidably engaged with the third slide block. The third drive assembly includes a third drive member, which is linked with the third slide plate. An external force drives the third drive member to move in a third direction, thereby driving the third slide plate to move in a third direction.

[0014] Optionally, the third drive assembly further includes a third operating screw, which is rotatably disposed within the third slide. The axial direction of the third operating screw is parallel to the third direction. The third drive component is sleeved on the third operating screw and threadedly engaged with the third operating screw. The third slide plate is fixedly connected to the third drive component.

[0015] Optionally, one of the first slide block and the first slide plate is provided with a first boss, and the other is provided with a first groove that mates with the first boss. The cross-sections of the first boss and the first groove, which are parallel to a third direction and perpendicular to a first direction, are trapezoidal. And / or, one of the second slide block and the second slide plate is provided with a second boss, and the other is provided with a second groove that mates with the second boss. The cross-sections of the second boss and the second groove, which are parallel to a third direction and perpendicular to a second direction, are trapezoidal. And / or, one of the third slide block and the third slide plate is provided with a third boss, and the other is provided with a third groove that mates with the third boss. The cross-sections of the third boss and the third groove, which are perpendicular to a third direction, are trapezoidal.

[0016] In another aspect of the embodiments of this application, a miniature needle station is provided, including at least one miniature needle holder as described above.

[0017] The beneficial effects of this application include:

[0018] This application provides a miniature needle holder, comprising: a first sliding mechanism, a second sliding mechanism, and a third sliding mechanism; the first sliding mechanism includes a first slide block, a first slide plate, and a first driving assembly, the first slide plate being slidably engaged with the first slide block, the first driving assembly including a first driving member, the first driving member including a first driving part and a second driving part connected to the first driving part, the first driving part extending along a first direction, the second driving part extending along a third direction, the first driving part being linked with the first slide plate, an external force driving the second driving part to move along the third direction, thereby driving the first slide plate to move along the first direction through the first driving part; the second sliding mechanism includes a second slide block, a second slide plate, and a second driving assembly. The device comprises a second slide block fixedly connected to a first slide block, and a second slide block slidably engaged with the second slide block. A second driving assembly includes a second driving member, which includes a third driving part and a fourth driving part connected to the third driving part. The third driving part extends along a second direction, and the fourth driving part extends along a third direction. The third driving part is linked to the second slide block, and an external force drives the fourth driving part to move along the third direction, thereby driving the second slide block to move along the second direction via the third driving part. The fixed end of the third sliding mechanism is fixedly connected to the second slide block, and its output end reciprocates along the third direction. The output end of the third sliding mechanism is used to connect a probe. The first, second, and third directions are perpendicular to each other. This miniature needle holder sets the first, second, and third driving members to move along the third direction, thereby reducing the size of the miniature needle holder in the first and second directions and the space required for installation. Compared to the prior art, the miniature needle holder provided in this application embodiment is smaller in size and requires less space for installation. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is one of the structural schematic diagrams of the micro needle hub provided in the embodiments of this application;

[0021] Figure 2 This is the second schematic diagram of the structure of the micro needle hub provided in the embodiments of this application;

[0022] Figure 3 for Figure 2 Sectional view at point AA;

[0023] Figure 4 An exploded view of the first sliding mechanism provided in the embodiments of this application;

[0024] Figure 5for Figure 2 Sectional view at point BB;

[0025] Figure 6 An exploded view of the second sliding mechanism provided in the embodiments of this application;

[0026] Figure 7 An exploded view of the third sliding mechanism provided in the embodiments of this application.

[0027] Icons: 10-Miniature needle seat; 11-First sliding mechanism; 111-First slide; 1111-Second inclined surface; 1112-First spring groove; 112-First slide plate; 113-First drive assembly; 1131-First drive element; 1131a-First inclined surface; 1131b-First drive part; 1131c-Second drive part; 1132-First operating screw; 1133-First spring seat; 1134-First return spring; 114-First sliding sleeve; 1141-First sliding groove; 1142-First through hole; 115-First boss; 116-First groove; 12-Second sliding mechanism; 121-Second slide; 1211-Fourth inclined surface; 1212-Second spring groove; 122-Second slide plate; 123-Second drive assembly; 1231-Second drive element; 1231a-Third inclined surface; 123 1b-Third drive unit; 1231c-Fourth drive unit; 1232-Second operating screw; 1233-Second spring seat; 1234-Second return spring; 124-Second sliding sleeve; 1241-Second sliding groove; 1242-Second through hole; 125-Second boss; 126-Second groove; 13-Third sliding mechanism; 131-Third slide block; 1311-Window; 132-Third sliding plate; 133-Third drive assembly; 1331-Third drive component; 1332-Third operating screw; 134-Bearing; 135-Third boss; 136-Third groove; 14-Seat plate; 151-First fixing component; 152-Second fixing component; 20-Probe; X-First direction; Y-Second direction; Z-Third direction; α-Angle between the first inclined plane and the first direction; β-Angle between the third inclined plane and the second direction. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The mechanisms of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. It should be noted that, unless otherwise specified, the various features in the embodiments of this application can be combined with each other, and the combined embodiments are still within the protection scope of this application.

[0030] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0031] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0032] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0033] Please refer to Figure 1 and Figure 2 This application provides a miniature needle holder 10, including: a first sliding mechanism 11, a second sliding mechanism 12 disposed at the sliding output end of the first sliding mechanism 11, and a third sliding mechanism 13 disposed at the sliding output end of the second sliding mechanism 12. The sliding output end of the third sliding mechanism 13 is used to mount a probe 20. The first sliding mechanism 11, the second sliding mechanism 12, and the third sliding mechanism 13 respectively complete movements in a first direction X, a second direction Y, and a third direction Z. The first direction X, the second direction Y, and the third direction Z are perpendicular to each other, so that the probe 20 can stay at any position within a preset space.

[0034] Specifically, please refer to the following: Figure 3 and Figure 4The first sliding mechanism 11 includes a first slide block 111, a first slide plate 112, and a first drive assembly 113. The first slide block 111 is fixedly disposed, and the first slide plate 112 is slidably engaged with the first slide block 111. It can be understood that the first slide plate 112 is the sliding output end of the first sliding mechanism 11. The first drive assembly 113 includes a first drive member 1131, which includes a first drive part 1131b and a second drive part 1131c connected to the first drive part 1131b. The first drive part 1131b extends along a first direction X, and the second drive part 1131c extends along a third direction Z. The first drive part 1131b is linked to the first slide plate 112. An external force drives the second drive part 1131c to move along the third direction Z, thereby driving the first slide plate 112 to move along the first direction X via the first drive part 1131b.

[0035] Please refer to the reference. Figure 5 and Figure 6 The second sliding mechanism 12 includes a second slide block 121, a second slide plate 122, and a second drive assembly 123. The second slide block 121 is fixed on the first slide plate 112, and the second slide plate 122 is slidably engaged with the second slide block 121. It can be understood that the second slide plate 122 is the sliding output end of the second sliding mechanism 12. The second drive assembly 123 includes a second drive member 1231, which includes a third drive part 1231b and a fourth drive part 1231c connected to the third drive part 1231b. The third drive part 1231b extends along the second direction Y, and the fourth drive part 1231c extends along the third direction Z. The third drive part 1231b is linked to the second slide plate 122. An external force drives the fourth drive part 1231c to move along the third direction Z, thereby driving the second slide plate 122 to move along the second direction Y through the third drive part 1231b.

[0036] Please refer to the reference. Figure 7 The fixed end of the third sliding mechanism 13 is fixedly connected to the second sliding plate 122, and the output end reciprocates along the third direction Z. The output end of the third sliding mechanism 13 is used to connect the probe 20.

[0037] The first drive member 1131, the second drive member 1231 and the third drive member 1331 of the aforementioned micro needle holder 10 all move along the third direction Z. Compared with the three drive members of the prior art that move in three directions respectively, the size of the micro needle holder 10 in the first direction X and the second direction Y and the space required for installation can be reduced.

[0038] Therefore, compared with the prior art, the miniature pin holder 10 provided in this application embodiment is smaller in size and requires less space for installation.

[0039] It should be noted that the first direction X and the second direction Y in the accompanying drawings can be interchanged. Figure 2 For example, Figure 2 From the given perspective, the first direction X is the up-down direction, and the second direction Y is the left-right direction. However, in other embodiments, from the same perspective, the first direction X can also be the left-right direction, and the second direction Y can be the up-down direction.

[0040] Alternatively, please refer to Figure 3 and Figure 4 The first drive unit 1131b has a first inclined surface 1131a, the first slide block 111 has a second inclined surface 1111, the first inclined surface 1131a and the second inclined surface 1111 are in contact, and the angle α between the first inclined surface and the first direction is an acute angle.

[0041] When the second drive unit 1131c moves along the third direction Z, the first drive unit 1131b follows the second drive unit 1131c and moves along the third direction Z. The first inclined surface 1131a of the first drive unit 1131b slides along the second inclined surface 1111 of the first slide block 111. Since the first slide block 111 is fixed, the first drive unit 1131 moves along the first direction X while moving along the third direction Z. Furthermore, since the first drive unit 1131 is linked to the first slide plate 112 and the first slide plate 112 is slidably mounted on the first slide block 111, the first slide plate 112 follows the first drive unit 1131 and moves along the first direction X. Thus, the movement of the first drive unit 1131 along the third direction Z is converted into the movement of the first slide plate 112 along the first direction X.

[0042] 0° < Angle α between the first inclined plane and the first direction < 90°. When the angle α between the first inclined plane and the first direction is equal to 45°, the second drive unit 1131c moves a preset distance along the third direction Z, and the first slide plate 112 moves a preset distance along the first direction X. In this way, both the moving efficiency and moving accuracy of the first slide plate 112 can be taken into account. When the angle α between the first inclined plane and the first direction is less than 45°, the second drive unit 1131c moves a preset distance along the third direction Z, and the first slide plate 112 moves a larger distance along the first direction X. This can improve the moving efficiency of the first slide plate 112. And when the angle α between the first inclined plane and the first direction is greater than 45°, the second drive unit 1131c moves a preset distance along the third direction Z, and the first slide plate 112 moves a smaller distance along the first direction X. This can improve the moving accuracy of the first slide plate 112.

[0043] Optionally, a first fixing member 151 is fixedly disposed on the side of the first slide plate 112, and a first driving member 1131 is movably disposed on the first fixing member 151. Thus, the first driving member 1131 and the first slide plate 112 can be linked through the first fixing member 151. The first fixing member 151 can be directly fixed to the side of the first slide plate 112 with bolts.

[0044] It should be noted that in this embodiment, there is no limitation on how the second driving unit 1131c is driven to move along the third direction Z. It can be driven by the user directly and manually to move along the third direction Z, or it can be driven by other components to move along the third direction Z.

[0045] Optionally, please refer to the following: Figure 5 and Figure 6 The third drive unit 1231b has a third inclined surface 1231a, and the second slide block 121 has a fourth inclined surface 1211. The third inclined surface 1231a and the fourth inclined surface 1211 are in contact, and the angle β between the third inclined surface and the second direction is an acute angle.

[0046] When the fourth drive unit 1231c moves along the third direction Z, the third drive unit 1231b follows the fourth drive unit 1231c and moves along the third direction Z. The third inclined surface 1231a of the third drive unit 1231b slides along the fourth inclined surface 1211 of the second slide block 121. Since the second slide block 121 is fixed, the second drive unit 1231 moves along the second direction Y while moving along the third direction Z. Furthermore, since the second drive unit 1231 is linked to the second slide plate 122 and the second slide plate 122 is slidably mounted on the second slide block 121, the second slide plate 122 follows the second drive unit 1231 and moves along the second direction Y. Thus, the movement of the second drive unit 1231 along the third direction Z is converted into the movement of the second slide plate 122 along the second direction Y.

[0047] 0° < Angle β between the third inclined plane and the second direction < 90°. When the angle β between the third inclined plane and the second direction is equal to 45°, the fourth drive unit 1231c moves a preset distance along the third direction Z, and the second slide plate 122 moves a preset distance along the second direction Y. This balances the moving efficiency and moving accuracy of the second slide plate 122. When the angle β between the third inclined plane and the second direction is less than 45°, the fourth drive unit 1231c moves a preset distance along the third direction Z, and the second slide plate 122 moves a larger distance along the second direction Y. This improves the moving efficiency of the second slide plate 122. When the angle β between the third inclined plane and the second direction is greater than 45°, the fourth drive unit 1231c moves a preset distance along the third direction Z, and the second slide plate 122 moves a smaller distance along the second direction Y. This improves the moving accuracy of the second slide plate 122.

[0048] Optionally, a second fixing member 152 is fixedly disposed on the side of the second slide plate 122, and the second driving member 1231 is movably disposed on the second fixing member 152. In this way, the second driving member 1231 and the second slide plate 122 can be linked through the second fixing member 152. The second fixing member 152 can be directly fixed to the side of the second slide plate 122 with bolts.

[0049] It should be noted that in this embodiment, there is no limitation on how the fourth drive unit 1231c is driven to move along the third direction Z. It can be driven by the user directly and manually to move along the third direction Z, or it can be driven by other components to move along the third direction Z.

[0050] It is understood that the first driving component 1131 and the second driving component 1231 can both move along the third direction Z, using the cooperation of the inclined plane to change the direction of motion. At this time, the first sliding mechanism 11 and the second sliding mechanism 12 can be interchanged, which is convenient for production and assembly.

[0051] Alternatively, please refer to Figure 1 , Figure 3 and Figure 4 The first sliding mechanism 11 also includes a first sliding sleeve 114 fixed on the first sliding plate 112. The first sliding sleeve 114 is provided with a first sliding groove 1141. The first sliding groove 1141 extends along the third direction Z. The second driving part 1131c is slidably disposed in the first sliding groove 1141.

[0052] The second driving part 1131c of the first driving member 1131 moves along the first slide groove 1141. The first slide groove 1141 constrains and guides the movement of the second driving part 1131c to realize the movement of the first driving member 1131 in the third direction Z. The dimension of the first sliding sleeve 114 in the third direction Z can be set to be larger than the dimension of the first sliding plate 112 in the third direction Z, so that the first slide groove 1141 can be set to be longer, so as to better guide and support the first driving member 1131 and improve the stability of the movement of the first driving member 1131.

[0053] The end of the first drive member 1131 that does not engage with the first slide block 111 can extend out of the first slide sleeve 114 for manual pressing by the user. When the user presses the first drive member 1131 along the third direction Z, the first slide plate 112 can be driven to move along the first direction X.

[0054] Of course, the end of the first driving member 1131 that does not engage with the first slide block 111 can also be operated manually by the user by engaging with other components, with the other components extending out of the first slide sleeve 114. For example, the first driving assembly 113 also includes a first operating screw 1132, and the first slide sleeve 114 is also provided with a first through hole 1142. The first operating screw 1132 passes through the first through hole 1142, and the axis of the first operating screw 1132 is parallel to the third direction Z. The head of the first operating screw 1132 protrudes from the first slide sleeve 114, and the tail is threadedly engaged with the second driving part 1131c. The user can drive the second driving part 1131c to move along the third direction Z by rotating the head of the first operating screw 1132. The first operating screw 1132 and the first driving member 1131 are driven by a threaded pair, which can improve the movement accuracy of the first slide plate 112.

[0055] Optionally, a first fixing member 151 is fixedly provided on the side of the first slide plate 112, and a first sliding sleeve 114 is fixed on the first fixing member 151, thereby indirectly fixing the first sliding sleeve 114 to the first slide plate 112.

[0056] Optionally, please refer to the following: Figure 5 and Figure 6 The second sliding mechanism 12 also includes a second sliding sleeve 124 fixed on the second sliding plate 122. The second sliding sleeve 124 is provided with a second sliding groove 1241. The second sliding groove 1241 extends along the third direction Z. The fourth driving part 1231c is slidably disposed in the second sliding groove 1241.

[0057] The fourth drive unit 1231c moves along the second slide groove 1241. The second slide groove 1241 constrains and guides the movement of the fourth drive unit 1231c to realize the movement of the second drive member 1231 along the third direction Z. The dimension of the second sliding sleeve 124 in the third direction Z can be set to be larger than the dimension of the second sliding plate 122 in the third direction Z, so that the second slide groove 1241 can be set to be longer, so as to better guide and support the second drive member 1231 and improve the stability of the movement of the first drive member 1131.

[0058] The end of the second drive member 1231 that does not engage with the second slide block 121 can extend out of the second slide sleeve 124 for manual pressing by the user. When the user presses the second drive member 1231 along the third direction Z, the second slide plate 122 can be driven to move along the second direction Y.

[0059] Of course, the end of the second drive member 1231 that does not engage with the second slide block 121 can also be operated manually by the user by engaging with other components, with the other components extending out of the second slide sleeve 124. For example, the second drive assembly 123 also includes a second operating screw 1232, and the second slide sleeve 124 is also provided with a second through hole 1242. The second operating screw 1232 passes through the second through hole 1242, and the axis of the second operating screw 1232 is parallel to the third direction Z. The head of the second operating screw 1232 protrudes from the second slide sleeve 124, and the tail is threadedly engaged with the fourth drive part 1231c. The user can drive the fourth drive part 1231c to move along the third direction Z by rotating the head of the second operating screw 1232. The second operating screw 1232 and the second drive member 1231 are driven by a threaded pair, which can improve the movement accuracy of the second slide plate 122.

[0060] Optionally, a second fixing member 152 is fixedly provided on the side of the second slide plate 122, and the second sliding sleeve 124 is fixed on the second fixing member 152, thereby indirectly fixing the second sliding sleeve 124 to the second slide plate 122.

[0061] Optionally, the first drive assembly 113 further includes a first spring seat 1133 and a first return spring 1134. The first spring seat 1133 is fixedly connected to the first slide plate 112. One end of the first return spring 1134 is mounted on the first spring seat 1133, and the other end is connected to the side of the first slide block 111 opposite to the first drive member 1131.

[0062] After installation, the first return spring 1134 needs to be in a compressed state, so that the first spring seat 1133 applies pressure to the first slide plate 112, and the first drive member 1131 is pressed against the first slide block 111 by the first slide plate 112, so as to achieve a gapless fit between the first inclined surface 1131a and the second inclined surface 1111, thereby improving the motion accuracy of the first slide plate 112.

[0063] Furthermore, the extension and retraction direction of the first return spring 1134 is parallel to the first direction X, so that the first return spring 1134 applies only a force along the first direction X to the first slide plate 112, thereby making the movement of the first slide plate 112 more stable and smooth.

[0064] Optionally, the first slide block 111 is provided with a first spring groove 1112, and a first return spring 1134 is disposed in the first spring groove 1112, the first return spring 1134 being adapted to the first spring groove 1112. The first spring groove 1112 provides installation space for the first return spring 1134 and limits its movement to prevent the first return spring 1134 from bending.

[0065] Optionally, the second drive assembly 123 further includes a second spring seat 1233 and a second return spring 1234. The second spring seat 1233 is fixedly connected to the second slide plate 122. One end of the second return spring 1234 is mounted on the second spring seat 1233, and the other end is connected to the side of the second slide block 121 opposite to the first drive member 1131.

[0066] After installation, the second return spring 1234 needs to be in a compressed state, so that the second spring seat 1233 applies pressure to the second slide plate 122. The second slide plate 122 is used to press the second drive member 1231 onto the second slide block 121, so as to achieve a gapless fit between the third inclined surface 1231a and the fourth inclined surface 1211, thereby improving the motion accuracy of the second slide plate 122.

[0067] Furthermore, the extension and retraction direction of the second return spring 1234 is parallel to the second direction Y, so that the second return spring 1234 applies only a force along the second direction Y to the second slide plate 122, thereby making the movement of the second slide plate 122 more stable and smooth.

[0068] Optionally, the second slide block 121 is provided with a second spring groove 1212, and a second return spring 1234 is disposed in the second spring groove 1212, the second return spring 1234 being adapted to the second spring groove 1212. The second spring groove 1212 provides installation space for the second return spring 1234 and limits its movement to prevent the second return spring 1234 from bending.

[0069] Alternatively, please refer to Figure 5 and Figure 7 The third sliding mechanism 13 includes a third slide block 131, a third slide plate 132, and a third drive assembly 133. The third slide block 131 is fixedly connected to the second slide plate 122, and the third slide plate 132 is slidably mounted on the third slide block 131. It can be understood that the third slide plate 132 is the sliding output end of the third sliding mechanism 13. The third drive assembly 133 includes a third drive member 1331, which is linked to the third slide plate 132. An external force drives the third drive member 1331 to move along a third direction Z, thereby driving the third slide plate 132 to move along the third direction Z.

[0070] Optionally, the third drive assembly 133 further includes a third operating screw 1332, which is rotatably disposed in the third slide block 131. The axial direction of the third operating screw 1332 is parallel to the third direction Z. The third drive member 1331 is sleeved on the third operating screw 1332 and threadedly engaged with the third operating screw 1332. The third slide block 132 is fixedly connected to the third drive member 1331.

[0071] By rotating the head of the third operating screw 1332, the user can drive the third driving member 1331 to move along the third direction Z, thereby driving the third slide plate 132 to move along the third direction Z. The third operating screw 1332 and the third driving member 1331 are driven by a threaded pair, which can improve the motion accuracy of the third slide plate 132.

[0072] Furthermore, two bearings 134 are spaced apart inside the third slide block 131. The inner rings of the two bearings 134 mate with the third operating screw 1332, and the outer rings mate with the third slide block 131. The third driving component 1331 is located between the two bearings 134. The third operating screw 1332 is rotatably mounted on the third slide block 131 via the bearings 134, which can reduce the frictional resistance of the third operating screw 1332 during its movement and ensure its accuracy and stability.

[0073] Optionally, the surface of the third slide block 131 facing the third slide plate 132 is provided with a window 1311, which exposes the third drive member 1331 inside the third slide block 131 so as to facilitate the fixed connection between the third drive member 1331 and the third slide plate 132. The third slide plate 132 can be fixed to the third drive member 1331 by bolts.

[0074] Optionally, please refer to the following: Figure 4 One of the first slide block 111 and the first slide plate 112 is provided with a first boss 115, and the other is provided with a first groove 116 that mates with the first boss 115. The cross-sections of the first boss 115 and the first groove 116, which are parallel to the third direction Z and perpendicular to the first direction X, are trapezoidal. The first slide block 111 and the first slide plate 112 are slidably guided by a dovetail groove, which can further improve the motion accuracy of the miniature needle holder 10.

[0075] Furthermore, a first boss 115 is provided on the first slide block 111, and a first groove 116 is provided on the first slide plate 112. In this way, the space within the first boss 115 can be used to house the first drive assembly 113, thereby reducing the overall size of the micro needle holder 10.

[0076] Optionally, one of the second slide block 121 and the second slide plate 122 is provided with a second boss 125, and the other is provided with a second groove 126 that mates with the second boss 125. The cross-sections of the second boss 125 and the second groove 126, which are parallel to the third direction Z and perpendicular to the second direction Y, are trapezoidal. The second slide block 121 and the second slide plate 122 are slidably guided by a dovetail groove, which can further improve the motion accuracy of the miniature needle seat 10.

[0077] Furthermore, a second boss 125 is provided on the second slide block 121, and a second groove 126 is provided on the second slide plate 122. In this way, the space within the second boss 125 can be used to house the second drive assembly 123, thereby reducing the overall size of the micro needle holder 10.

[0078] Optionally, one of the third slide block 131 and the third slide plate 132 is provided with a third boss 135, and the other is provided with a third groove 136 that mates with the third boss 135. The cross-sections of the third boss 135 and the third groove 136 perpendicular to the third direction Z are trapezoidal. The third slide block 131 and the third slide plate 132 are slidably guided by a dovetail groove, which can further improve the motion accuracy of the miniature needle seat 10.

[0079] Furthermore, a third boss 135 is provided on the third slide 131, and a third groove 136 is provided on the third slide plate 132. In this way, the space within the third boss 135 can be used to house the third drive assembly 133, thereby reducing the overall size of the micro needle holder 10.

[0080] It is understandable that when the first slide block 111 and the first slide plate 112, the second slide block 121 and the second slide plate 122, and the third slide block 131 and the third slide plate 132 are all guided by dovetail grooves, the motion accuracy of the miniature needle seat 10 is higher. In addition, with the threaded pair between the operating screw and the driving component, the motion accuracy of the miniature needle seat 10 can be further improved.

[0081] Optionally, the miniature needle holder 10 also includes a base plate 14, on which the first slide 111 is fixed, and the miniature needle holder 10 is mounted via the base plate 14.

[0082] This embodiment also provides a miniature needle station, including at least one miniature needle holder 10 as described above.

[0083] This microneedle station has the same structure and beneficial effects as the microneedle hub 10 in the foregoing embodiments. The structure and beneficial effects of the microneedle hub 10 have been described in detail in the foregoing embodiments and will not be repeated here.

[0084] The above description is merely an optional embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A miniature needle hub, characterized in that, include: First sliding mechanism (11), second sliding mechanism (12) and third sliding mechanism (13); The first sliding mechanism (11) includes a first slide block (111), a first slide plate (112), and a first drive assembly (113). The first slide plate (112) is slidably engaged with the first slide block (111). The first drive assembly (113) includes a first drive member (1131), which includes a first drive portion (1131b) and a second drive portion (1131c) connected to the first drive portion (1131b). The first drive portion (1131b) extends along a first direction (X), and the second drive portion (1131c) extends along a third direction (Z). A drive unit (1131b) has a first inclined surface (1131a), and the first slide (111) has a second inclined surface (1111). The first inclined surface (1131a) and the second inclined surface (1111) are in contact. The angle between the first inclined surface (1131a) and the first direction (X) is an acute angle. The first drive unit (1131b) is linked with the first slide plate (112). An external force drives the second drive unit (1131c) to move along the third direction (Z), and then the first drive unit (1131b) drives the first slide plate (112) to move along the first direction (X). The second sliding mechanism (12) includes a second slide block (121), a second slide plate (122), and a second drive assembly (123). The second slide block (121) is fixedly connected to the first slide plate (112), and the second slide plate (122) is slidably engaged with the second slide block (121). The second drive assembly (123) includes a second drive member (1231), which includes a third drive part (1231b) and a fourth drive part (1231c) connected to the third drive part (1231b). The third drive part (1231b) extends along a second direction (Y), and the fourth drive part (1231c) extends along a second direction (Y). The third drive unit (1231b) extends in the third direction (Z), the third drive unit (1231b) has a third inclined surface (1231a), the second slide (121) has a fourth inclined surface (1211), the third inclined surface (1231a) and the fourth inclined surface (1211) are in contact, the angle between the third inclined surface (1231a) and the second direction (Y) is an acute angle, the third drive unit (1231b) is linked with the second slide plate (122), the external force drives the fourth drive unit (1231c) to move along the third direction (Z), and then drives the second slide plate (122) to move along the second direction (Y) through the third drive unit (1231b); The fixed end of the third sliding mechanism (13) is fixedly connected to the second sliding plate (122), and the output end reciprocates along the third direction (Z). The output end of the third sliding mechanism (13) is used to connect the probe. The first direction (X), the second direction (Y) and the third direction (Z) are perpendicular to each other.

2. The micro needle hub as described in claim 1, characterized in that, The first sliding mechanism (11) further includes a first sliding sleeve (114) fixed on the first sliding plate (112), the first sliding sleeve (114) is provided with a first sliding groove (1141), the first sliding groove (1141) extends along the third direction (Z), and the second driving part (1131c) is slidably disposed in the first sliding groove (1141).

3. The micro needle hub as described in claim 2, characterized in that, The first drive assembly (113) further includes a first operating screw (1132), and the first sliding sleeve (114) is also provided with a first through hole (1142). The first operating screw (1132) passes through the first through hole (1142). The axis of the first operating screw (1132) is parallel to the third direction (Z). The head of the first operating screw (1132) is exposed in the first sliding sleeve (114), and the tail is threadedly engaged with the second drive part (1131c).

4. The micro needle hub as described in claim 1, characterized in that, The second sliding mechanism (12) further includes a second sliding sleeve (124) fixed on the second sliding plate (122), the second sliding sleeve (124) is provided with a second sliding groove (1241), the second sliding groove (1241) extends along the third direction (Z), and the fourth driving part (1231c) is slidably disposed in the second sliding groove (1241).

5. The micro needle hub as described in claim 4, characterized in that, The second drive assembly (123) further includes a second operating screw (1232), and the second sliding sleeve (124) is also provided with a second through hole (1242). The second operating screw (1232) passes through the second through hole (1242). The axis of the second operating screw (1232) is parallel to the third direction (Z). The head of the second operating screw (1232) is exposed in the second sliding sleeve (124), and the tail is threadedly engaged with the fourth drive part (1231c).

6. The micro needle hub as described in claim 1, characterized in that, The first drive assembly (113) further includes a first spring seat (1133) and a first return spring (1134). The first spring seat (1133) is fixedly connected to the first slide plate (112). One end of the first return spring (1134) is mounted on the first spring seat (1133), and the other end is connected to the side of the first slide block (111) away from the first drive member (1131). And / or, the second drive assembly (123) further includes a second spring seat (1233) and a second return spring (1234), the second spring seat (1233) being fixedly connected to the second slide plate (122), one end of the second return spring (1234) being mounted on the second spring seat (1233) and the other end being connected to the side of the second slide (121) away from the first drive member (1131).

7. The micro needle hub as described in claim 1, characterized in that, The third sliding mechanism (13) includes a third slide block (131), a third slide plate (132), and a third drive assembly (133). The third slide block (131) is fixedly connected to the second slide plate (122), and the third slide plate (132) is slidably engaged with the third slide block (131). The third drive assembly (133) includes a third drive member (1331), which is linked with the third slide plate (132). An external force drives the third drive member (1331) to move along the third direction (Z), thereby driving the third slide plate (132) to move along the third direction (Z).

8. The micro needle hub as described in claim 7, characterized in that, The third drive assembly (133) further includes a third operating screw (1332), which is rotatably disposed within the third slide (131). The axial direction of the third operating screw (1332) is parallel to the third direction (Z). The third drive member (1331) is sleeved on the third operating screw (1332) and threadedly engaged with the third operating screw (1332). The third slide plate (132) is fixedly connected to the third drive member (1331).

9. The micro needle hub as described in claim 7, characterized in that, One of the first slide block (111) and the first slide plate (112) is provided with a first boss (115), and the other is provided with a first groove (116) that cooperates with the first boss (115). The cross-section of the first boss (115) and the first groove (116) is trapezoidal, which is parallel to the third direction (Z) and perpendicular to the first direction (X). And / or, one of the second slide block (121) and the second slide plate (122) is provided with a second boss (125), and the other is provided with a second groove (126) that mates with the second boss (125). The cross sections of the second boss (125) and the second groove (126) are trapezoidal, parallel to the third direction (Z) and perpendicular to the second direction (Y). And / or, one of the third slide block (131) and the third slide plate (132) is provided with a third boss (135), and the other is provided with a third groove (136) that cooperates with the third boss (135). The cross section of the third boss (135) and the third groove (136) perpendicular to the third direction (Z) is trapezoidal.

10. A miniature needle stage, characterized in that, It includes at least one micro needle hub as described in any one of claims 1 to 9.

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