Two-dimensional precision rotating mirror based on conical flexible hinge

Abstract

The application discloses a two-dimensional precision rotating mirror based on a conical flexible hinge and is used in the technical field of optical equipment. The rotating mirror comprises a base, a moving platform, a flexible hinge and a mirror. The moving platform is installed on the base. The flexible hinge comprises a flexible piece and a connecting rod. The flexible piece is fixedly connected with the base. The flexible piece comprises a plurality of conical cylinders. The plurality of conical cylinders are connected in sequence. The extension planes of the outer surfaces of the plurality of conical cylinders all intersect at a same rotation point. The connecting rod is fixedly connected with a conical cylinder. The connecting rod is movably connected with a moving part of the moving platform. The axis of the connecting rod passes through the rotation point. The mirror is installed on the connecting rod. The reflection center of the mirror is arranged in coincidence with the rotation point. The moving platform is configured to drive the connecting rod to move away from one end of the rotation point. The flexible piece is configured to drive the connecting rod to rotate around the rotation point when the connecting rod moves away from one end of the rotation point. The rotating mirror achieves the purpose that the rotation center of the mirror is in coincidence with the reflection center.

Description

Technical Field

[0001] This invention relates to the field of optical equipment technology, and in particular to a two-dimensional precision rotating mirror based on a tapered flexible hinge. Background Technology

[0002] Precision rotating mirrors are core components used to control the rapid and precise deflection of light beams and achieve beam pointing adjustment. They are widely used in modern high-precision optical systems. Currently, based on their support structure, precision rotating mirrors can be mainly divided into three categories: rigid support structure, XY frame structure, and flexible support structure. Among them, the rigid support structure has disadvantages such as high frictional resistance, limited dynamic performance, and low precision. The XY frame structure has disadvantages such as angular displacement accuracy limited by the radial clearance of the bearing, as well as rotational friction, low control precision, and low bandwidth. The precision rotating mirror with flexible support structure overcomes the disadvantages of traditional bearings, achieving frictionless and clearance-free rotation, while also having high precision and fast response speed, making it the mainstream choice in current optical systems.

[0003] Although the precision rotating mirror with flexible support structure has significant advantages and wide application, its rotation center is usually located at a spatial floating point determined by the deformation of the flexible structure. It cannot be precisely and stably aligned with the reflecting surface of the mirror. In other words, it is difficult to achieve the requirement that the rotation center and the reflection center of the mirror coincide. Once the rotation center and the reflection center do not coincide, it will lead to problems such as optical path deviation, measurement error and imaging distortion, affecting the normal operation of the system.

[0004] To overcome the problem that the rotation center and reflection center of a two-dimensional precision rotating mirror cannot be accurately and stably aligned, existing technologies typically employ complex drive control strategies combined with symmetrically distributed flexible mechanisms. This not only places extremely high demands on the consistency of the actuator performance but also makes the system susceptible to control errors and inter-axis coupling interference. Summary of the Invention

[0005] This invention provides a two-dimensional precision rotating mirror based on a tapered flexible hinge, aiming to solve the problem of the rotation center and reflection center not coinciding in existing mirrors without employing complex drive control strategies.

[0006] This invention provides a two-dimensional precision rotating mirror based on a tapered flexible hinge, comprising:

[0007] Base;

[0008] A mobile platform, which is mounted on the base;

[0009] A flexible hinge includes a flexible element and a connecting rod; the flexible element is fixedly connected to the base, and the flexible element includes multiple cones that are sequentially nested together, with the extended planes of the outer surfaces of the multiple cones converging at the same rotation point; the connecting rod is fixedly connected to one of the cones, one end of the connecting rod is movably connected to the moving part of the moving platform, and the axis of the connecting rod passes through the rotation point;

[0010] A reflector is mounted on the connecting rod, and the reflection center of the reflector is arranged to coincide with the rotation point;

[0011] The mobile platform is configured to move one end of the connecting rod away from the rotation point along an axis perpendicular to the connecting rod, and the flexible member is configured to cause the connecting rod to rotate around the rotation point when the end of the connecting rod away from the rotation point moves along an axis perpendicular to the connecting rod.

[0012] In one embodiment, the cone is a multi-faceted cone. In two adjacent multi-faceted cones, one of the edges of the inner multi-faceted cone is connected and fixed to one of the edges of the outer multi-faceted cone. The remaining edges of the inner multi-faceted cone are arranged separately from the inner wall or edges of the outer multi-faceted cone to form a deformation gap for deformation of the multi-faceted cone.

[0013] In one embodiment, the innermost polygonal cone is fixedly connected to the connecting rod.

[0014] In one embodiment, one corner of the outermost polygonal pyramid is fixedly connected to the base, and another corner of the outermost polygonal pyramid is fixedly connected to one corner of the inner polygonal pyramid.

[0015] In one embodiment, the polygonal cone includes at least three trapezoidal flexible blades, which are connected sequentially along the circumferential direction of the polygonal cone, with the upper base of the trapezoidal flexible blades arranged close to the rotation point.

[0016] In one embodiment, the cone is a curved cone.

[0017] In one embodiment, the mobile platform includes a frame component, a first driver, and a second driver;

[0018] The frame assembly includes a first mounting frame, a second mounting frame, and a third mounting frame; the first mounting frame is vertically mounted on the base, the second mounting frame is located inside the first mounting frame, the third mounting frame is located inside the second mounting frame, and the connecting rod is hinged to the third mounting frame;

[0019] The first driver is installed in the first mounting frame, and the driving part of the first driver is connected and fixed to the second mounting frame;

[0020] The second driver is installed in the second mounting frame, and the driving part of the second driver is connected and fixed to the third mounting frame;

[0021] The driving direction of the first driver is perpendicular to the driving direction of the second driver.

[0022] In one embodiment, the mobile platform further includes a plurality of elastic elements, which are respectively connected between the first mounting frame and the second mounting frame, and between the second mounting frame and the third mounting frame.

[0023] In one embodiment, along the driving direction of the first driver, a plurality of the elastic elements are located on opposite sides of the second mounting frame;

[0024] Along the driving direction of the second driver, a plurality of the elastic elements are located on opposite sides of the third mounting frame.

[0025] In one embodiment, the connecting rod is provided with a ball head, and the third mounting frame is provided with a receiving groove for accommodating the ball head, the ball head being inserted into the receiving groove.

[0026] As can be seen from the above technical solutions, the present invention has the following advantages:

[0027] (1) The present invention can ensure that the rotation center of the reflector coincides with the reflection center. By fixing the flexible part on the base and sequentially connecting multiple polygonal cylinders of the flexible part, the extended planes of each outer surface of the multiple polygonal cylinders converge at the same rotation point to form a polyhedral geometric configuration. This constrains all translational degrees of freedom and retains only the three-dimensional rotational degrees of freedom around the remote rotation point. This allows the polygonal cylinder to elastically deform after being driven by the connecting rod and enables the connecting rod to rotate around the rotation point. With the reflection center of the reflector on the connecting rod coinciding with the rotation point, the reflector rotates around the rotation point to ensure that the rotation center of the reflector always coincides with the reflection center of the reflector. This fundamentally eliminates the problem of the rotation center of the reflector not coinciding with the reflection center, which causes the beam to generate additional parasitic spatial position translation after being reflected by the reflection center, resulting in spatial position deviation and longitudinal optical path change along the beam transmission direction.

[0028] (2) The present invention does not require a complex driving strategy. It ensures the stability of the rotation center through the inherent mechanical characteristics of the flexible hinge. It does not rely on a complex multi-driver synchronous or differential driving strategy, which reduces the requirements for driver performance consistency and control accuracy, and simplifies the system design and calibration process.

[0029] (3) The present invention has a compact and reasonable structure with high stability. The flexible hinge design effectively utilizes space, and the flexible hinge has high structural stability, high repeatability positioning accuracy, fast response speed and other excellent properties, which are suitable for the high frequency and high precision deflection requirements of precision optical systems.

[0030] (4) The present invention has strong adjustability and adaptability. By adjusting the number of flexible hinges and multi-faceted cones, the deflection range and stiffness distribution of the rotating mirror can be flexibly optimized to meet the specific application requirements in different scenarios. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 A schematic diagram of the overall structure of a two-dimensional precision rotating mirror based on a tapered flexible hinge, provided for an embodiment of the present invention;

[0033] Figure 2 A side view schematic diagram of the overall structure of a two-dimensional precision rotating mirror based on a tapered flexible hinge, provided for an embodiment of the present invention;

[0034] Figure 3 A top view schematic diagram of the overall structure of a two-dimensional precision rotating mirror based on a tapered flexible hinge, provided for an embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the overall structure of the flexible hinge provided in an embodiment of the present invention.

[0036] Figure label:

[0037] Base 1;

[0038] Mobile platform 2; frame assembly 20; first mounting frame 200; second mounting frame 201; third mounting frame 202; receiving slot 2020; first driver 21; second driver 22; elastic element 23;

[0039] Flexible hinge 3; flexible component 30; multi-faceted pyramidal tube 300; mounting base 301; connecting rod 31; ball head 310; rotation point 32;

[0040] Mirror 4; mirror mount 40; mirror body 41. Detailed Implementation

[0041] This invention provides a two-dimensional precision rotating mirror based on a tapered flexible hinge, aiming to solve the technical problem of the non-coincidence of the rotation center and reflection center in the prior art without adopting a complex drive control strategy.

[0042] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0043] Precision rotating mirrors are core components used to control the rapid and precise deflection of light beams and achieve beam pointing adjustment. They are widely used in modern high-precision optical systems. For example, in space gravitational wave detection missions, precision rotating mirrors are used to achieve inter-satellite laser scanning capture and precise tracking, establishing inter-satellite laser interferometry links; in photoelectric tracking and guidance systems, they are used to precisely control the line of sight; in adaptive optics systems, rotating mirrors can be used to correct the overall tilt of the beam wavefront; in high-resolution optical scanning imaging systems, rotating mirrors are used to achieve beam scanning and positioning; and in lidar, rotating mirrors are used to achieve large-area laser scanning and target capture and tracking. In these optical systems, to improve beam control accuracy and achieve better compensation, tracking, and control effects, extremely high angular deflection accuracy, deflection range, and dynamic stability are required for rotating mirrors.

[0044] Currently, based on their support structure, precision rotating mirrors can be mainly divided into three categories: rigid support structures, XY frame structures, and flexible support structures. In a rigid support structure, the mirror is connected to the base via a spherical pair (such as a ball bearing or crossed roller bearing), which serves as the fulcrum for rotation. A driver (such as a voice coil motor) drives the rotating shaft to rotate around this fulcrum, thus deflecting the mirror. Rigid support structures have a simple configuration and high load-bearing capacity, making them suitable for supporting large-diameter, heavy-duty mirrors. However, they suffer from drawbacks such as high frictional resistance, limited dynamic performance, and lower precision. The XY frame structure consists of two frames, an outer frame connected to the base via bearings, and an inner frame mounted on the outer frame via bearings. The mirror is fixed to the inner frame, and the axes of the inner and outer frames are perpendicular, enabling two-dimensional deflection. XY frame structures offer advantages such as stable rotation center, high load-bearing capacity, and large stroke. However, the angular displacement accuracy of this structure is limited by the radial clearance of the bearings, and it also suffers from drawbacks such as rotational friction, lower control precision, and lower bandwidth. Precision rotating mirrors with flexible support structures utilize the elastic deformation of flexible elements to achieve movement. A typical structure consists of a base on which a mirror is mounted, connected by multiple flexible struts or hinges. A actuator (such as a piezoelectric ceramic or voice coil motor) acts directly on the base or through a lever amplification mechanism, causing a slight elastic deformation in the flexible support structure, which in turn drives the mirror to deflect. Precision rotating mirrors with flexible support structures overcome the shortcomings of traditional bearings, achieving frictionless and backlash-free rotation. They also offer high precision and fast response, making them a mainstream choice in current ultra-precision optical systems (Wang Zhen, Cheng Xuemin. Research Status and Future Development of Fast Reflectors [J]. Applied Optics, 2019, 40 (03):373-379.).

[0045] Although precision rotating mirrors with flexible support structures offer significant advantages and are widely used, their rotation center is typically located at a spatially floating point determined by the deformation of the flexible structure, making it impossible to precisely and stably align with the reflecting surface of the mirror. In ultra-precision optical systems, when the rotation center and reflection center of the rotating mirror do not coincide, the reflected beam, after being reflected by the reflection center, undergoes angular deflection and additional parasitic spatial displacement, resulting in spatial position deviation and longitudinal optical path variation along the beam propagation direction. For example, in laser interferometry systems for space gravitational wave detection missions, when the rotation center and reflection center of the mirror do not coincide, the laser reflected by the mirror will generate a non-ideal additional optical path deviation, which is one of the key noise sources limiting the sensitivity of gravitational wave detection. In laser tracking measurement systems, if the rotation center of the tracking mirror deviates from the reflecting surface, the laser reflection reference point on the reflecting surface will change position in space when the mirror deflects to track the moving target, directly introducing ranging and angle measurement errors. In optical tomography, the ideal mathematical model of the system requires the projection data to be acquired around a fixed rotation center. If the rotation center of the scanning mirror does not coincide with the reflection center, the reconstructed image will have blurred edges and geometric distortion, severely reducing the imaging quality.

[0046] To overcome the problem of flexible-supported rotating mirrors, previous studies have attempted to design rotating mirrors with the rotation center coinciding with the reflection center. Xi'an Jiaotong University proposed a scheme for a laterally symmetrically driven mirror, using four identical drive mechanisms, arranged symmetrically in pairs about the X and Y axes. The X and Y axes are designed within the mirror's surface plane, and the mirror is fixed to the side by a mirror support mechanism. The symmetrically placed drive mechanisms drive synchronously and in the same direction, ensuring the mirror rotates around the mirror's center, thus achieving the coincidence of the rotation center and the reflection center. This method requires that the paired actuators drive strictly synchronously; any slight asynchrony will introduce errors, placing extremely high demands on the control of the drive device. Simultaneously, the drive mechanisms must be completely identical to provide the same driving force, placing high demands on their consistency and the positional accuracy of their symmetrical placement. (Jing Zijian, Xu Minglong, Zhu Jianyang, et al. Control Mechanism and Method for Rapidly Deflecting Reflector with Rotation Center at Reflecting Surface: CN201510254501.7[P].CN104849858A); Xi'an Jiaotong University proposed a scheme using an asymmetric polygonal flexible mechanism as the support structure for the rotating mirror. The asymmetric polygonal structures, with unequal stiffness on the inner and outer sides, are arranged in pairs along the X and Y axes. Each polygon contains a piezoelectric ceramic actuator; when the piezoelectric ceramic drives linear displacement, the polygonal structure undergoes a deflection in addition to the linear displacement. Differential driving of the paired polygonal structures allows the reflector surface to deflect only, thus achieving the coincidence of the mirror's rotation center and the reflection center. This method requires paired actuators to perform counter-directional differential control, which places extremely high demands on the control of the drive device. Furthermore, coupling interference may exist between different motion axes, complicating the control process. (Song Siyang, Shao Shubao, Xu Minglong, et al. A deflecting mirror device and method with the rotation center coinciding with the mirror center: CN201611230843.6[P].CN201611230843.6[2025-11-21].)

[0047] Therefore, in order to overcome the problem that the rotation center and reflection center of a two-dimensional precision rotating mirror cannot be accurately and stably coincided, the existing technology usually adopts a complex drive control strategy combined with a symmetrically distributed flexible mechanism. This not only places extremely high demands on the consistency of the driver performance, but also makes the system susceptible to the influence of control errors and inter-axis coupling interference. To this end, this application provides a flexible precision rotating mirror scheme in which the rotation center and reflection center coincide from a mechanical structure perspective, which can greatly reduce the complexity of the system control and improve stability.

[0048] Example 1

[0049] Please see Figures 1 to 4 The present invention provides a two-dimensional precision rotating mirror based on a conical flexible hinge, comprising:

[0050] Base 1;

[0051] Mobile platform 2 is mounted on base 1;

[0052] The flexible hinge 3 includes a flexible element 30 and a connecting rod 31. The flexible element 30 is fixedly connected to the base 1. The flexible element 30 includes multiple polygonal pyramidal cylinders 300, which are sequentially nested and connected. The extended planes of the outer surfaces of the multiple polygonal pyramidal cylinders 300 all converge at the same rotation point 32. Figure 1 and Figure 2 As shown; the connecting rod 31 is fixedly connected to a polygonal pyramid cylinder 300, one end of the connecting rod 31 is movably connected to the moving part of the moving platform 2, and the axis of the connecting rod 31 passes through the rotation point 32;

[0053] Reflector 4 is mounted on connecting rod 31, and the reflection center of reflector 4 is arranged to coincide with the rotation point 32.

[0054] In this configuration, the mobile platform 2 is configured to move the end of the connecting rod 31 away from the rotation point 32 along an axis perpendicular to the connecting rod 31. The flexible component 30 is configured to cause the connecting rod 31 to rotate around the rotation point 32 when the end of the connecting rod 31 away from the rotation point 32 moves along an axis perpendicular to the connecting rod 31. Figure 4 As shown.

[0055] Regarding the technical feature of the polygonal pyramid 300, it should be noted that the number of polygonal pyramids 300 can be adjusted according to the deflection range and stiffness requirements. Connecting two polygonal pyramids 300 can obtain a complete three-dimensional rotational degree of freedom. Increasing the number of polygonal pyramids 300 (such as three or more) can further increase the deflection angle range. That is, each polygonal pyramid 300 includes a fixed edge connected to the outside and a movable actuating edge. The blades containing the fixed edge and the actuating edge of the polygonal pyramid 300 are called main blades. When the main blades of the two connected polygonal pyramids 300 do not overlap, the motion degrees of freedom of the two polygonal pyramids 300 are superimposed to obtain three rotational degrees of freedom around the rotation point 32. Connecting with polygonal pyramids 300 can effectively increase the stroke range of the three rotational degrees of freedom. When the number of edges of the polygonal pyramid increases, the polygonal pyramid will generate over-constraint. This over-constraint is mainly reflected in a significant increase in stiffness in the translational direction and a partial increase in stiffness in the rotational direction. This also achieves the intended function of this application, requiring a larger driving force only when the same angle of deflection occurs; the multi-faceted pyramid 300 is a multi-faceted pyramidal cylindrical structure with open ends. The various faces of the multi-faceted pyramid 300 converge at the same rotation point 32 to form a polyhedral geometry. This rotation point 32 serves as the remote rotation center of each multi-faceted pyramid 300, thereby constraining all translational degrees of freedom and retaining only the three-dimensional rotational degrees of freedom around the remote rotation point 32, forming a stable polyhedral structure with a common rotation point 32. When the reflection center of the reflector 4 coincides with this rotation point 32, reflection can be achieved. The design of the reflection center of mirror 4 coinciding with the rotation center of mirror 4; when the lateral driving force of the connecting rod 31 is transmitted to each polygonal cone 300, the lateral driving force forces each polygonal cone 300 to produce elastic bending deformation around the rotation point 32. This elastic bending deformation is not arbitrary bending, but rather each outer surface undergoes a slight relative deflection around the theoretical center point. Since each polygonal cone 300 rotates around the same rotation point, the slight rotations of multiple polygonal cones 300 around the point accumulate into a large-angle rotation around the point, thereby driving the connecting rod 31 and mirror 4 on it to rotate precisely around the fixed rotation point.

[0056] Regarding the technical feature of the mobile platform 2, it should be noted that the mobile platform 2 is used to drive the end of the connecting rod 31 to move in a direction perpendicular to the connecting rod 31. One end of the connecting rod 31 is movably connected to the moving part of the mobile platform 2 so that this end of the connecting rod 31 is not constrained by the plane and thus does not become over-constrained, allowing this end of the connecting rod 31 to move around the rotation point 32.

[0057] During the operation of this embodiment, when the moving platform 2 drives the end of the connecting rod 31 away from the rotation point 32 to move in a direction perpendicular to the axis of the connecting rod 31, the driving force of the connecting rod 31 will be transmitted to multiple polygonal cones 300 and undergo corresponding elastic deformation. The entire flexible hinge 3 will rotate around the remote rotation center. Therefore, the entire moving platform 2 can drive the reflector 4 on the connecting rod 31 to produce deflection in both pitch and yaw directions.

[0058] As can be seen from the above working process, during the entire deflection process of the reflector 4, since the reflection center of the reflector 4 is stably coincided with the rotation point 32 (i.e., the rotation center) of the flexible hinge 3, the rotation center of the reflector 4 is always kept on the reflection center of the reflector 4, thereby realizing the two-dimensional precision steering function and meeting the various application requirements for high-precision steering.

[0059] Compared with the prior art, the advantages of this embodiment are:

[0060] (1) The present invention ensures that the rotation center of the reflector 4 coincides with the reflection center. By constraining the translational degree of freedom of the flexible hinge 3, only the three-dimensional rotational degree of freedom around the remote rotation point 32 is retained. This allows the polygonal cone 300 to elastically deform after being driven by the connecting rod 31, and the connecting rod 31 to rotate around the rotation point 32. With the reflection center of the reflector 4 on the connecting rod 31 coinciding with the rotation point 32, the reflector 4 rotates around the rotation point 32, ensuring that the rotation center of the reflector 4 always coincides with the reflection center of the reflector 4. This fundamentally eliminates the problem that the rotation center of the reflector 4 does not coincide with the reflection center, which would cause the light beam to generate additional parasitic spatial position translation after being reflected by the reflection center, and thus lead to spatial position deviation and longitudinal optical path change along the beam transmission direction.

[0061] (2) The present invention utilizes the inherent mechanical properties of the flexible hinge 3 to ensure the stability of the rotation center, without relying on complex multi-driver synchronous or differential drive strategies, reducing the requirements for driver performance consistency and control accuracy, and simplifying system design and calibration process.

[0062] (3) The present invention has a compact and reasonable structure with high stability. The use of flexible hinge 3 effectively utilizes space, and the flexible hinge 3 has high structural stability, high repeatability positioning accuracy, fast response speed and other excellent properties, which are suitable for the high frequency and high precision deflection requirements of precision optical systems.

[0063] (4) The present invention has strong adjustability and adaptability. By adjusting the number of flexible hinge 3 multi-faceted cones 300, the deflection range and stiffness distribution of the rotating mirror can be flexibly optimized to meet the specific application requirements in different scenarios.

[0064] In one specific embodiment, such as Figure 1 , Figure 3 and Figure 4 As shown, in order to optimize the deflection range and stiffness distribution of the polygonal pyramid 300, a feasible connection structure for the polygonal pyramid 300 is further provided. The connection between two adjacent polygonal pyramids 300 is configured such that one corner of the inner polygonal pyramid 300 is connected and fixed to one corner of the outer polygonal pyramid 300. The remaining corners of the inner polygonal pyramid 300 are separately arranged from the inner wall or corners of the outer polygonal pyramid 300 to form deformation gaps for deformation of the polygonal pyramid 300. That is, each polygonal pyramid 300 has one and only one corner connected to the outer polygonal pyramid 300. Apart from the connected corner, the other surfaces or corners of the polygonal pyramid 300 are not connected to the outer polygonal pyramid 300. Under the premise of being able to transmit driving force, it is ensured that the inner polygonal pyramid 300 has enough space to deform around the point.

[0065] Understandably, by adopting this connection method, the polygonal pyramid 300 can, on the one hand, increase the deformation space of the inner polygonal pyramid 300, thereby effectively expanding the overall deflection range and meeting the needs of larger angle deflection; on the other hand, this connection method reduces the mutual constraints between the polygonal pyramids 300, reduces stress concentration and mechanical interference caused by the connection, and improves the stability of the structure.

[0066] In one embodiment, such as Figure 1 , Figure 3 and Figure 4 As shown, in order to optimize the transmission of driving force, the innermost polygonal pyramid 300 is fixedly connected to the connecting rod 31. Specifically, each polygonal pyramid 300 includes a fixed edge connected to the outer side and a movable actuating edge. The connecting rod 31 can be fixedly connected to the actuating edge. In specific implementation, when the moving platform 2 drives the end of the connecting rod 31 close to the moving platform 2 to move, the driving force of the connecting rod 31 will be transmitted from the inside to the outside in sequence, thereby causing each polygonal pyramid 300 to deflect in sequence, realizing the precise angle adjustment of the two-dimensional precision rotating mirror. Therefore, this method of transmitting driving force enables each polygonal pyramid 300 to move in an orderly manner under the drive of the connecting rod 31, ensuring the stability and accuracy of the rotating mirror during the deflection process.

[0067] It should be noted that one corner of the outermost polygonal pyramid 300 is connected and fixed to the base 1 via the mounting seat 301, and the other corner of the outermost polygonal pyramid 300 is connected and fixed to one of the corners of the inner polygonal pyramid 300. That is, in the outermost polygonal pyramid 300, the corner connecting to the base 1 and the corner connecting to the inner polygonal pyramid 300 are not the same corner. These two corners are staggered. In specific implementation, when the moving platform 2 drives the connecting rod 31 to move, and the driving force is transmitted from the inside to the outside to deflect each polygonal pyramid 300, the outermost polygonal pyramid 300 can better distribute and transmit the driving force because one corner is connected and fixed to the base 1, and the other corner is connected and fixed to the inner polygonal pyramid 300 and the two corners are staggered.

[0068] Based on the above embodiments, such as Figure 1 , Figure 3 and Figure 4 As shown, in one embodiment, the number of polygonal pyramidal tubes 300 is at least three. Within any three polygonal pyramidal tubes 300, the connection points of two adjacent inner polygonal pyramidal tubes 300 are staggered from the connection points of two adjacent outer polygonal pyramidal tubes 300. That is, the connection points between the middle polygonal pyramidal tube 300 and the outer polygonal pyramidal tube 300 are staggered from the connection points between the middle polygonal pyramidal tube 300 and the inner polygonal pyramidal tube 300. Specifically, as mentioned above, each polygonal pyramidal tube 300 includes a fixed edge connected to the outer side and a movable actuating edge. When the number of polygonal pyramidal tubes 300 in this embodiment is three, the dimensions of the three polygonal pyramidal tubes 300 gradually increase from the inside to the outside, with the outermost polygonal pyramidal tube 300 having a larger dimension than the middle polygonal pyramidal tube 300. The dimensions of the three polygonal pyramids 300 are as follows: the middle polygonal pyramid 300 is larger than the innermost polygonal pyramid 300. The fixed edge of the outermost polygonal pyramid 300 is fixedly mounted on the mounting base 301 connected to the base 1, while the fixed edge of the middle polygonal pyramid 300 is fixedly mounted on the actuating edge of the outermost polygonal pyramid 300. The fixed edge of the innermost polygonal pyramid 300 is fixedly mounted on the actuating edge of the middle polygonal pyramid 300, and the actuating edge of the innermost polygonal pyramid 300 is connected and fixed to the connecting rod 31, thus forming a three-level nested series structure. The three polygonal pyramids 300 are arranged at a certain angle. The certain angle is mainly set according to how to make the extended planes of each outer surface of the three polygonal pyramids 300 converge at the same rotation point 32.

[0069] In the specific implementation of this embodiment, when the moving platform 2 drives the connecting rod 31 to move, the driving force is transmitted from the innermost polygonal pyramid 300. Since the connection points of the three polygonal pyramids 300 are staggered, the driving force can be more evenly distributed to each polygonal pyramid 300 during the transmission process. Therefore, this arrangement allows each polygonal pyramid 300 to maintain a relatively independent yet cooperative state when subjected to force, avoiding uneven deflection or jamming caused by excessive local force.

[0070] Based on the above embodiments, in this embodiment, as Figure 1 , Figure 3 and Figure 4 As shown, the polygonal pyramid 300 includes at least three trapezoidal flexible blades, which are connected sequentially along the circumference of the polygonal pyramid 300. The upper base of the trapezoidal flexible blades is arranged close to the rotation point 32. In specific implementation, when the polygonal pyramid 300 is deflected by the driving force, the three trapezoidal flexible blades will deform accordingly according to the force. Since the upper base of the trapezoidal flexible blades is arranged close to the rotation point 32, the deformation near the upper base is relatively small during the deflection process, maintaining the stability of the connecting rod 31 near the rotation point 32, while the lower base will deform more significantly, thus better adapting to the change in the deflection angle of the polygonal pyramid 300.

[0071] In one specific embodiment, such as Figure 1As shown, a feasible structure for the mobile platform 2 is further provided. The mobile platform 2 includes a frame assembly 20, a first driver 21, and a second driver 22. The frame assembly 20 is vertically mounted on the base 1, with its front side aligned with the flexible member 30. The frame assembly 20 includes a first mounting frame 200, a second mounting frame 201, and a third mounting frame 202. The first mounting frame 200 is vertically mounted on the base 1, the second mounting frame 201 is located within the first mounting frame 200, and the third mounting frame 202 is located within the second mounting frame 201. The connecting rod 31 is hinged to the third mounting frame 202. The first driver 21 is mounted within the first mounting frame 200, and its driving portion is connected and fixed to the second mounting frame 201. The second driver 22 is mounted within the second mounting frame 201, and its driving portion is connected and fixed to the third mounting frame 202. The driving direction of the first driver 21 is the same as that of the second driver 22. The driving directions are perpendicular to each other so that the end of the connecting rod 31 can move in two dimensions. In specific implementation, when the first driver 21 is used for driving, it produces a yaw deflection, and when the second driver 22 is used for driving, it produces a pitch deflection. The entire moving platform can produce two deflections: pitch and yaw. That is, when the first driver 21 is started, its driving part pushes the second mounting frame 201 and the third mounting frame 202 inside it and the connecting rod 31 to move linearly in the horizontal direction, so that the reflector 4 produces a yaw deflection. When the second driver 22 is started, its driving part pushes the third mounting frame 202 and the connecting rod 31 inside it to move linearly in the vertical direction, thereby driving this end of the connecting rod 31 to move. The movement of this end of the connecting rod 31 will drive the flexible member 30 to deform, constraining the entire flexible hinge 3 to rotate around the rotation point 32, so that the reflector 4 produces a pitch deflection.

[0072] It is understood that the mobile platform 2 in this embodiment, through the cooperation of the frame component 20, the first driver 21 and the second driver 22, constitutes a stacked two-dimensional motion platform. This stacked structure reduces interference and errors during the motion process, improves the stability and reliability of the entire system, and provides a strong guarantee for the high-performance operation of the two-dimensional precision rotating mirror.

[0073] In this embodiment, the first driver 21 and the second driver 22 can be piezoelectric ceramics, voice coil motors, stepper motors, or inchworm drivers, without further restrictions.

[0074] In one embodiment, such as Figure 1As shown, in order to improve the movement stability of the mobile platform 2, the mobile platform 2 also includes multiple elastic elements 23. The multiple elastic elements 23 are respectively connected between the first mounting frame 200 and the second mounting frame 201, and between the second mounting frame 201 and the third mounting frame 202. In specific implementation, when the first driver 21 drives the second mounting frame 201 to move, the elastic element 23 connected between the first mounting frame 200 and the second mounting frame 201 will undergo elastic deformation to absorb and buffer the impact force generated during the movement, thereby ensuring the smooth movement of the second mounting frame 201. Similarly, when the second driver 22 drives the third mounting frame 202 to move, the elastic element 23 connected between the second mounting frame 201 and the third mounting frame 202 will also play the same role, ensuring the stability of the movement of the third mounting frame 202, thereby effectively improving the stability and reliability of the entire mobile platform 2 in the two-dimensional movement process, and ensuring that the reflector 4 will not be deflected unstably due to excessive movement of the mobile platform 2 during the deflection process.

[0075] In this embodiment, as Figure 1 As shown, along the driving direction of the first driver 21, multiple elastic elements 23 are located on opposite sides of the second mounting frame 201; along the driving direction of the second driver 22, multiple elastic elements 23 are located on opposite sides of the third mounting frame 202. Specifically, the elastic elements 23 can be springs, and are provided at the four corners of the second mounting frame 201 and the four corners of the third mounting frame 202. In specific implementation, when the first driver 21 drives the second mounting frame 201 to move away from the first driver 21, the elastic elements 23 closer to the first driver 21 will be stretched, and the elastic elements 23 farther away from the first driver 21 will be stretched. The third mounting frame 202 will be compressed, and the elastic elements 23 at the four corners will exert a force that moves towards the first driver 21. This force can counteract some of the inertial force generated by the second mounting frame 201 during movement, thereby further reducing the vibration and impact of the second mounting frame 201 during movement and improving the smoothness of movement. The first driver 21 drives the second mounting frame 201 to move towards the first driver 21 in a similar way, so I won't go into details. The second driver 22 can also play a similar role, which can further reduce the vibration and impact of the third mounting frame 202 during movement and improve the smoothness of movement.

[0076] In one embodiment, such as Figure 1As shown, a movable connection method between the connecting rod 31 and the mobile platform 2 is further provided. The connecting rod 31 is provided with a ball head 310. The center of the third mounting frame 202 is provided with a receiving groove 2020 for accommodating the ball head 310. The ball head 310 is inserted into the receiving groove 2020. In specific implementation, the ball head 310 can slide in the slotting direction of the receiving groove 2020 to achieve a decoupled movable connection. The two-dimensional translation drive output by the mobile platform 2 can be converted into the spherical rotation motion of the flexible hinge 3 around the rotation point 32. It can be understood that after adopting this setting, the connecting rod 31 and the mobile platform 2 are connected by a decoupled connection mechanism to convert the two-dimensional translation motion output by the mobile platform 2 into a driving force perpendicular to the connecting rod 31, preventing additional bending moment in the connecting rod 31 due to mismatch in motion modes.

[0077] In one specific embodiment, such as Figure 1 As shown, a structure for the reflector 4 is further provided. The reflector 4 includes a mirror base 40 and a mirror body 41. The mirror base 40 is fixedly mounted on one end of the connecting rod 31 near the rotation point 32. The mirror body 41 is mounted inside the mirror base 40, and the reflection center of the mirror body 41 is precisely aligned with the rotation point 32 of the flexible hinge 3.

[0078] Example 2

[0079] The second embodiment of this application provides a two-dimensional precision rotating mirror based on a flexible hinge, which is basically the same as the first embodiment. The difference is that the cone is no longer a multi-faceted cone 300, but a curved cone. That is, the curved cone is similar to the case of increasing the number of edges of a multi-faceted cone, which will produce over-constraint. However, this over-constraint is mainly reflected in a significant increase in stiffness in the translational direction and a partial increase in stiffness in the rotational direction. This can also achieve our expected function, only requiring the application of a larger driving force.

[0080] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0081] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

[0082] Finally, it should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

Claims

1. A two-dimensional precision rotating mirror based on a tapered flexible hinge, characterized in that, include: Base; A mobile platform, which is mounted on the base; A flexible hinge includes a flexible element and a connecting rod. The flexible element is fixedly connected to the base and includes multiple cones that are sequentially nested together. The extended planes of the outer surfaces of the cones all converge at the same rotation point. The connecting rod is fixedly connected to one of the cones, and one end of the connecting rod is movably connected to the moving part of the moving platform. The axis of the connecting rod passes through the rotation point. The cone is a multi-faceted cone. In two adjacent multi-faceted cones, one corner of the inner cone is fixedly connected to one corner of the outer cone. The remaining corners of the inner cone are separately arranged from the inner wall or corners of the outer cone to form a deformation gap for deformation of the multi-faceted cone. A reflector is mounted on the connecting rod, and the reflection center of the reflector is arranged to coincide with the rotation point; The mobile platform is configured to move one end of the connecting rod away from the rotation point along an axis perpendicular to the connecting rod, and the flexible member is configured to cause the connecting rod to rotate around the rotation point when the end of the connecting rod away from the rotation point moves along an axis perpendicular to the connecting rod.

2. The two-dimensional precision rotating mirror according to claim 1, characterized in that, The innermost polygonal cone is fixedly connected to the connecting rod.

3. The two-dimensional precision rotating mirror according to claim 1, characterized in that, One corner of the outermost polygonal pyramid is connected and fixed to the base, and the other corner of the outermost polygonal pyramid is connected and fixed to one of the corners of the inner polygonal pyramid.

4. The two-dimensional precision rotating mirror according to any one of claims 2 to 3, characterized in that, The polygonal cone includes at least three trapezoidal flexible blades, which are connected sequentially along the circumference of the polygonal cone, with the upper base of the trapezoidal flexible blades arranged close to the rotation point.

5. The two-dimensional precision rotating mirror according to claim 1, characterized in that, The cone is a curved cone.

6. The two-dimensional precision rotating mirror according to claim 1, characterized in that, The mobile platform includes a frame assembly, a first driver, and a second driver; The frame assembly includes a first mounting frame, a second mounting frame, and a third mounting frame; the first mounting frame is vertically mounted on the base, the second mounting frame is located inside the first mounting frame, the third mounting frame is located inside the second mounting frame, and the connecting rod is hinged to the third mounting frame; The first driver is installed in the first mounting frame, and the driving part of the first driver is connected and fixed to the second mounting frame; The second driver is installed in the second mounting frame, and the driving part of the second driver is connected and fixed to the third mounting frame; The driving direction of the first driver is perpendicular to the driving direction of the second driver.

7. The two-dimensional precision rotating mirror according to claim 6, characterized in that, The mobile platform also includes multiple elastic elements, which are respectively connected between the first mounting frame and the second mounting frame, and between the second mounting frame and the third mounting frame.

8. The two-dimensional precision rotating mirror according to claim 7, characterized in that: Along the driving direction of the first driver, a plurality of the elastic elements are located on opposite sides of the second mounting frame; Along the driving direction of the second driver, a plurality of the elastic elements are located on opposite sides of the third mounting frame.

9. The two-dimensional precision rotating mirror according to claim 6, characterized in that, The connecting rod is provided with a ball head, and the third mounting frame is provided with a receiving groove for accommodating the ball head, and the ball head is inserted into the receiving groove.

Images