High-precision large-range polarization spectrum measurement system and polarization spectrum measurement method

Abstract

The invention discloses a high-precision large-range polarization spectrum measurement system and a polarization spectrum measurement method, and solves the technical problems of low measurement precision, complex regulation and control, weak degree of freedom and large energy loss of the existing polarization spectrum measurement system. The light source module is adopted for active illumination, the incident light intensity can be increased, and external environment interference is avoided; meanwhile, the light source module is used for generating measurement light beams with different wavelengths, the micro-polarization array is combined, simultaneous measurement of spectral information and polarization information is achieved, and the problem that the polarization spectrum measurement precision is limited due to the fact that a traditional discrete polarization spectrum measurement system is low in information acquisition dimension can be solved; besides, reflected light beams of different wavelengths of the to-be-measured sample are respectively focused to the micro-polarization array by using the zoom lens, so that real-time polarization spectrum measurement of the to-be-measured sample in the depth direction is realized, the regulation and control precision is high, and the size is small.

Description

Technical Field

[0001] This invention relates to polarization spectroscopy measurement systems and methods, specifically to a high-precision, wide-range polarization spectroscopy measurement system and method. Background Technology

[0002] Polarization spectroscopy has the advantage of simultaneously detecting polarization, spectral, and spatial information, and has important applications in the field of target recognition and detection, and has always received widespread attention from academia and industry.

[0003] Currently, numerous studies have been conducted on polarization spectral measurement systems. Chinese patent CN120063491A proposes a discrete polarization spectral measurement system, which acquires polarization spectral information through independent polarization and spectral channels, achieving joint imaging of polarization, spectrum, and space. Chinese patent CN119901376A proposes a channel-modulated polarization spectral detection system, acquiring polarization spectral information through the splitting and re-interference of two polarization signals. Chinese patent CN118857466A uses an coded aperture to achieve imaging detection of polarized S-beams and P-beams. Chinese patent CN118243231A uses prism dispersion combined with a polarization module to achieve polarization spectral imaging.

[0004] However, the aforementioned polarization spectral measurement systems all achieve polarization spectral imaging through discrete polarization spectral structures and by combining techniques such as interference and dispersion. They are highly susceptible to interference from the external environment. Furthermore, their polarization spectral information control is complex, has weak controllability, and suffers significant energy loss, making it difficult to meet the application requirements of high-precision, large-range polarization spectral imaging technology. Summary of the Invention

[0005] The purpose of this invention is to solve the technical problems of low measurement accuracy, complex control and weak degree of freedom, and large energy loss in existing polarization spectroscopy measurement systems, and to provide a high-precision, wide-range polarization spectroscopy measurement system and polarization spectroscopy measurement method.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] A high-precision, wide-range polarization spectroscopy measurement system includes a light source module for generating at least two different wavelength measurement beams, and a homogenization module, a beam splitter, a zoom lens, a micro-polarization array, and a detector arranged sequentially along the transmission direction of the measurement beams. The homogenization module is used to homogenize the measurement beam in the XY plane, where the XY plane is a plane perpendicular to the transmission direction of the measurement beam. The reflected light path of the beam splitter is used to set the sample to be tested, and the zoom lens, micro-polarization array and detector are arranged in sequence along the transmission direction of the reflected beam of the sample to be tested; The micro-polarization array includes N×N polarization elements arranged in an array, which are used to modulate the polarization state of the reflected light beams of different wavelengths of the sample under test to obtain reflected polarization information of different wavelengths, where N is an integer and N≥2; The detector is used to detect and image reflected polarized light information of different wavelengths to obtain polarization spectral signals.

[0008] Optionally, the light source module includes M lasers for generating measurement beams of different wavelengths and M-1 beam splitters, where M is an integer and M≥2; The M-1 beam splitters and homogenization modules are arranged sequentially along the transmission direction of the measurement beam generated by one of the lasers, and the remaining M-1 lasers are respectively arranged in the reflected light paths of the M-1 beam splitters.

[0009] Optionally, the light source module has M=3, and the three lasers are a red laser, a green laser, and a blue laser, respectively. The beam splitter has a beam splitting ratio of 50:50.

[0010] Optionally, the red laser, green laser, and blue laser are arranged sequentially from the light source end to the sample end along the optical path propagation direction of the light source module.

[0011] Optionally, the N of the micro-polarization array is 2 or 16; The polarization elements of the micro-polarization array are 0-degree linear polarization elements, 45-degree linear polarization elements, 90-degree linear polarization elements, and 135-degree linear polarization elements.

[0012] Optionally, the measurement beam generated by the light source module is a pulsed laser or a continuous laser; The zoom lens is a zoom lens; The homogenization module is a single microlens array.

[0013] Optionally, an electronic control module and a data processing module are also provided; The output terminal of the electronic control module is connected to the control terminals of the light source module, the zoom lens, and the detector, respectively. It is used to adjust the wavelength of the measurement beam generated by the light source module and the focal length of the zoom lens so that the reflected beams of different wavelengths of the sample under test are focused onto the micro-polarization array and the detector is triggered synchronously. The output terminal of the detector is connected to the input terminal of the data processing module. The data processing module is used to process and analyze the polarization spectral signal to obtain the polarization spectral information of the sample to be tested.

[0014] A polarization spectroscopy measurement method, employing any of the high-precision, large-range polarization spectroscopy measurement systems described in this invention, is characterized by comprising the following steps: Step 1: The light source module generates a measurement beam of a certain wavelength, adjusts the focal length of the zoom lens, and synchronously triggers the detector. Step 2: The measurement beam is transmitted to the homogenization module for homogenization, and then the reflected beam after being split by the beam splitter is irradiated onto the sample to be tested. Step 3: The reflected light beam of the sample at this wavelength is transmitted to the zoom lens after being transmitted through the beam splitter prism, and the zoom lens focuses it onto the micro-polarization array. Step 4: The micro-polarization array modulates the polarization state of the reflected light beam of the sample under test at that wavelength to obtain the reflected polarization information of that wavelength, and transmits it to the detector for detection and imaging to obtain the polarization signal of that wavelength. Step 5: Repeat steps 1-4 until all wavelength measurement beams generated by the light source module are traversed to obtain the polarization spectral signal.

[0015] Optionally, when the high-precision, wide-range polarization spectroscopy measurement system works collaboratively through the electronic control module and the data processing module: In step 1, the light source module is controlled by the electronic control module to generate a measurement beam of a certain wavelength, while the focal length of the zoom lens is adjusted and the detector is triggered synchronously. In step 4, the polarized light signal from the detector is sent to the data processing module; Step 6, the data processing module, processes the polarization spectral signal to obtain the polarization spectral information of the sample under test, thus completing the polarization spectral measurement.

[0016] Optionally, step 6 specifically includes: Step 6.1: The data processing module calculates the Stokes vectors of polarized light signals of different wavelengths using the following formula: ; ; ; in, , , wavelength The Stokes vectors of the polarized light signals under the given conditions represent the normalized total light intensity, the normalized 0-degree polarization component, and the normalized 45-degree polarization component, respectively. , , , Wavelength The light intensity of polarized light signals at 0 degrees, 45 degrees, 90 degrees and 135 degrees; Step 6.2: Based on the Stokes vectors of polarized light signals at different wavelengths, calculate the degree of polarization for different wavelengths using the following formula to obtain the polarization spectral information of the sample under test: ; in, wavelength The degree of polarization.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. The high-precision, wide-range polarization spectroscopy measurement system provided by the present invention uses a light source module for active illumination, which can increase the incident light intensity. At the same time, it combines a zoom lens to collect the reflected light beam from the sample under test, avoiding the problem of large energy loss and susceptibility to external environmental interference in traditional passive polarization spectroscopy measurement systems, which leads to weak polarization spectral signals. 2. The high-precision, wide-range polarization spectroscopy measurement system provided by this invention utilizes a light source module to generate measurement beams of different wavelengths, combined with a micro-polarization array, to achieve simultaneous measurement of spectral and polarization information. This avoids the problem of limited polarization spectroscopy measurement accuracy caused by the low dimensionality of information acquisition in traditional discrete polarization spectroscopy measurement systems. 3. The high-precision, wide-range polarization spectroscopy measurement system provided by the present invention uses a zoom lens to focus the reflected light beams of different wavelengths of the sample to be tested onto a micro-polarization array, thereby realizing real-time polarization spectral measurement of the sample in the depth direction. This avoids the problems of low control accuracy and bulky system of traditional mechanical scanning imaging methods, and realizes real-time measurement of polarization spectral signals of the sample in three-dimensional space. 4. The high-precision, wide-range polarization spectroscopy measurement system provided by this invention uses an electronic control module to control the light source module, zoom lens, and detector, thereby achieving the modulation and imaging of polarization spectral signals. The control method is simple, avoids the problem of errors caused by complex modulation, and is easy to promote and apply. 5. The high-precision, wide-range polarization spectral measurement system provided by this invention adopts a light source module that is easy to expand into a large-scale integrated system, has good scalability, high energy utilization, and is easy to realize the perception of ultra-high-dimensional polarization spectral information. 6. The high-precision, wide-range polarization spectroscopy measurement system provided by this invention uses red lasers, green lasers, blue lasers, and zoom lenses, all of which can be manufactured using mature semiconductor processes, thus meeting the requirements of mass industrial production. 7. The polarization spectral measurement method provided by the present invention utilizes the polarization information obtained from N×N polarization elements in a micro-polarization array and integrates the polarization degree calculation results of multi-wavelength measurement beams, which can improve the accuracy of obtaining polarization spectral information. Attached Figure Description

[0018] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the structure of Embodiment 1 of the present invention; Figure 2 This is a schematic diagram of the light source module in Embodiment 1 of the present invention; Figure 3 Figure 1 shows the spectral transmission profile of the sample to be tested in Embodiment 1 of the present invention. Figures (a), (b), and (c) are spectral transmission profiles of red, green, and blue lasers in the sample to be tested, respectively. Figure 4 The polarization degree of the sample 4 to be tested in Embodiment 1 of the present invention is measured by red, green and blue lasers. Figure 5 This is a schematic diagram of the structure of Embodiment 2 of the present invention; Figure 6 This is a schematic diagram of the light source module in Embodiment 2 of the present invention; Figure 7 This refers to the polarization degree measured by red, yellow, green, and blue lasers on sample 4 in Embodiment 2 of the present invention.

[0019] The annotations in the attached figures are explained as follows: 1-Light source module, 2-Homogeneous module, 3-Beam splitter prism, 4-Sample to be tested, 5-Sample stage, 6-Zoom lens, 7-Micro polarization array, 8-Detector, 9-Electrical control module, 10-Data processing module, 11-Laser, 12-Beam splitter. Detailed Implementation

[0020] The high-precision, wide-range polarization spectroscopy measurement system and method proposed in this invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Those skilled in the art should understand that these embodiments are merely used to explain the technical principles of this invention and are not intended to limit the scope of protection of this invention.

[0021] The high-precision, wide-range polarization spectroscopy measurement system of the present invention includes a light source module 1 for generating at least two different wavelength measurement beams, a homogenization module 2 and a beam splitter 3 arranged sequentially along the transmission direction of the measurement beams, a zoom lens 6, a micro-polarization array 7, and a detector 8. The homogenization module 2 is used to homogenize the measurement beams in the XY plane, which is a plane perpendicular to the transmission direction of the measurement beams. The reflection path of the beam splitter 3 is used to set the sample to be measured 4. The zoom lens 6, the micro-polarization array 7, and the detector 8 are arranged sequentially along the transmission direction of the reflected beams from the sample to be measured 4. The micro-polarization array 7 includes N×N polarization elements arranged in an array, used to modulate the polarization state of the reflected beams of different wavelengths from the sample to be measured 4 to obtain reflected polarization light information of different wavelengths, where N is an integer and N≥2. The detector 8 is used to detect and image the reflected polarization light information of different wavelengths to obtain polarization spectral signals.

[0022] An electronic control module 9 and a data processing module 10 are also provided. The output terminal of the electronic control module 9 is connected to the control terminals of the light source module 1, the zoom lens 6, and the detector 8, respectively. It is used to adjust the wavelength of the measurement beam generated by the light source module 1 and to adjust the focal length of the zoom lens 6 so that the reflected beams of different wavelengths of the sample 4 to be tested are focused onto the micro-polarization array 7 and the detector 8 is triggered synchronously. The data processing module 10 is used to process and analyze the polarization spectrum signal to obtain the polarization spectrum information of the sample 4 to be tested.

[0023] The light source module 1 includes M lasers for generating measurement beams of different wavelengths and M-1 beam splitters, where M is an integer and M≥2. The control terminals of the M lasers are connected to the output terminals of the electronic control module. The M-1 beam splitters and homogenization module are sequentially arranged along the propagation direction of the measurement beam generated by one of the lasers. The remaining M-1 lasers are respectively arranged in the reflection paths of the M-1 beam splitters. The lasers of each wavelength are arranged sequentially from the sample end to the light source end along the propagation direction of the light path of the light source module 1, from near to far. For example, to minimize light attenuation, the blue laser is closest, followed by the green laser, and the red laser is furthest. This arrangement minimizes the number of beam splitters the short wavelength (blue light) passes through during beam combining, thereby effectively reducing its additional power attenuation.

[0024] M=3, and the three lasers are a red laser, a green laser, and a blue laser. The splitting ratio of the two beam splitters is 50:50.

[0025] N=2 or 16. When N=2, the 2×2 polarization units are respectively the 0-degree linear polarization unit, the 45-degree linear polarization unit, the 90-degree linear polarization unit, and the 135-degree linear polarization unit.

[0026] The measurement beam generated by the light source module 1 is a pulsed laser or a continuous laser.

[0027] This invention also provides a polarization spectroscopy measurement method, which uses the aforementioned high-precision, wide-range polarization spectroscopy measurement system and includes the following steps: Step 1: Control the light source module to generate a measurement beam of a certain wavelength through the electronic control module, while adjusting the focal length of the zoom lens and triggering the detector simultaneously. Step 2: The measurement beam is transmitted to the homogenization module for homogenization, and then the reflected beam after being split by the beam splitter is irradiated onto the sample to be tested. Step 3: The reflected light beam of the sample at this wavelength is transmitted to the zoom lens after being transmitted through the beam splitter prism, and the zoom lens focuses it onto the micro-polarization array. Step 4: The micro-polarization array modulates the polarization state of the reflected beam of the sample under test at that wavelength to obtain the reflected polarization information of that wavelength, and transmits it to the detector for detection and imaging to obtain the polarization signal of that wavelength, and sends it to the data processing module. Step 5: Repeat steps 1-4 until all wavelength measurement beams generated by the light source module are traversed to obtain the polarization spectrum signal; Step 6: The data processing module processes the polarization spectral signal to obtain the polarization spectral information of the sample under test, thus completing the polarization spectral measurement.

[0028] Further, N=2, and the 2×2 polarization units are respectively a 0-degree linear polarization unit, a 45-degree linear polarization unit, a 90-degree linear polarization unit, and a 135-degree linear polarization unit; step 6 specifically includes: Step 6.1: The data processing module calculates the Stokes vectors of polarized light signals of different wavelengths using the following formula: ; ; ; in, , , wavelength The Stokes vectors of the polarized light signals under the given conditions represent the normalized total light intensity, the normalized 0-degree polarization component, and the normalized 45-degree polarization component, respectively. , , , Wavelength The light intensity of polarized light signals at 0 degrees, 45 degrees, 90 degrees and 135 degrees; Step 6.2: Based on the Stokes vectors of polarized light signals at different wavelengths, calculate the degree of polarization for different wavelengths using the following formula to obtain the polarization spectral information of the sample under test: ; in, wavelength The degree of polarization.

[0029] To address the issues of spot drift and low uniformity that arise in existing research when using multiple lasers for multispectral control, or the need to overcome spatial differences in the array even with complex homogenizing modules added to the back of the laser array, this invention proposes an improved solution: a highly stable long-wavelength laser (e.g., red laser) is placed at 90° along the test optical path, while other short-wavelength lasers are deflected at 90° using beam splitters, then coupled to the red laser at the same spatial position and incident together onto the homogenizing module. This homogenizing module can employ a single microlens array, and the output of the red, green, and blue lasers can be directly controlled by an external electronic control system. Finally, combined with a zoom lens, it achieves precise acquisition of light of various wavelengths at different Z-axis spatial positions.

[0030] This system supports further stacking and integration of blue and green lasers on the same side, facilitating convenient expansion of large-scale spectral modules. Furthermore, placing the short-wavelength (blue) laser behind the green laser reduces energy loss when blue light passes through the beam splitter, ensuring that the incident energies of the red, green, and blue lasers remain essentially consistent. This reduces reliance on high-power blue lasers and helps save costs. It is important to note that the stacked blue and green lasers should be located on the same side of the red laser to ensure their incident light direction is precisely on the reflection path of the beam splitter in the main red optical path; if placed on the transmission path or opposite sides, coupling into the optical path will be difficult. Simultaneously, the beam splitter's reflecting surface should maintain a 45° angle with the optical axes of the blue and green lasers to avoid additional energy loss due to angular deviations (such as 43° or 42°).

[0031] The red, green, and blue lasers have identical modulation cycles and work in conjunction with the zoom lens to ensure complete acquisition of spectral information. The entire light source module's operating cycle is synchronized with the zoom lens, thus avoiding the loss of different color laser information during transmission.

[0032] Example 1: The high-precision, wide-range polarization spectroscopy measurement system of this embodiment, such as Figure 1 As shown, it includes a light source module 1 for generating at least two different wavelength measurement beams, a homogenization module 2 and a beam splitter 3 arranged sequentially along the transmission direction of the measurement beams, as well as a zoom lens 6, a micro-polarization array 7, a detector 8, an electronic control module 9 and a data processing module 10.

[0033] The light source module 1 includes M lasers 11 for generating measurement beams of different wavelengths and M-1 beam splitters 12, where M is an integer and M≥2. Figure 2As shown, in this embodiment, M=3, and the three lasers 11 are red, green, and blue lasers, respectively. The measurement beams they generate are pulsed or continuous lasers, and the splitting ratio of the two beam splitters 12 is 50:50. The lasers of each wavelength are arranged sequentially from the sample end to the light source end along the optical path propagation direction of the light source module 1. Specifically, in this embodiment, the blue laser is closest to the sample end, followed by the green laser, and the red laser is furthest away. The two beam splitters 12 and the homogenization module 2 are sequentially arranged along the transmission direction of the measurement beam generated by one of the lasers 11. The remaining two lasers 11 are respectively arranged in the reflection optical paths of the two beam splitters 12, and the measurement beams generated by the corresponding beam splitters 12 are reflected and coupled to the output optical path of one of the lasers 11. Since the red, green, and blue lasers have different ejection depths within the sample 4, as... Figure 3 As shown in (a), (b), and (c), in this embodiment, the red, green, and blue lasers are generated sequentially by the electronic control module 9 to achieve convenient layered control of the depth direction measurement of the sample 4 to be tested.

[0034] The homogenization module 2 is used to homogenize the measurement beam in the XY plane, thereby enabling real-time array-style detection of the sample 4 under test in the XY plane. The XY plane is a plane perpendicular to the transmission direction of the measurement beam. The reflected light path of the beam splitter 3 is used to position the sample 4 under test, which is placed on the sample stage 5. The zoom lens 6, micro-polarization array 7, and detector 8 are arranged sequentially along the transmission direction of the reflected beam from the sample 4. The zoom lens 6 is used to collect the red, green, and blue laser reflected beams from different depth positions of the sample 4 under test onto the surface of the micro-polarization array 7, thereby achieving polarization imaging of the red, green, and blue spectra at different depth positions of the sample 4 under test. In this embodiment, the zoom lens 6 is a zoom lens.

[0035] The output of the electronic control module 9 is connected to the control terminals of the three lasers 11, the zoom lens 6, and the detector 8, respectively. It is used to control the switching of the three lasers 11 so that they generate red, green, and blue lasers respectively, and to control the focal length of the zoom lens 6 so that the red, green, and blue laser reflected beams at different depth positions of the sample 4 under test are focused onto the micro-polarization array 7, and the detector 8 is triggered synchronously.

[0036] The micro-polarization array 7 comprises N×N polarization elements arranged in an array, used to modulate the polarization states of the red, green, and blue laser reflected beams at different depth positions of the sample 4 under test, thereby obtaining the reflected polarization information of the red, green, and blue lasers. Here, N is an integer, and N≥2. In this embodiment, N=2, and the 2×2 polarization elements are respectively a 0-degree linear polarization element, a 45-degree linear polarization element, a 90-degree linear polarization element, and a 135-degree linear polarization element. In other embodiments, the micro-polarization array 7 can be expanded into a large-area array structure comprising 16×16 polarization elements.

[0037] The output of detector 8 is connected to the input of data processing module 10, and is used to detect and image the reflected polarization information of red, green, and blue lasers respectively to obtain polarization spectral signals. Data processing module 10 is used to process and analyze the polarization spectral signals to obtain the polarization spectral information of sample 4 under test.

[0038] This embodiment also provides a polarization spectroscopy measurement method, which employs the aforementioned high-precision, wide-range polarization spectroscopy measurement system and includes the following steps: Step 1: Control the light source module 1 to generate red laser through the electronic control module 9, while adjusting the focal length of the zoom lens 6 and triggering the detector 8 simultaneously.

[0039] Step 2: The red laser is transmitted to the homogenization module 2 for homogenization, and then the reflected beam after being split by the beam splitter prism 3 is irradiated onto the sample 4 to be tested.

[0040] Step 3: The reflected beam of the red laser from the sample 4 is transmitted to the zoom lens 6 after being transmitted through the beam splitter prism 3. The zoom lens 6 focuses it onto the micro-polarization array 7.

[0041] Step 4: The micro-polarization array 7 modulates the polarization state of the reflected beam of the red laser from the sample 4 under test, obtaining the reflected polarization information of the red laser, and transmits it to the detector 8 for detection and imaging, obtaining the polarization signals of the red laser at 0 degrees, 45 degrees, 90 degrees, and 135 degrees. I 红0 , I 红45 , I 红90 and I 红135 And send it to the data processing module 10.

[0042] Step 5: Repeat steps 1-4 to obtain the polarized light signals of the green laser at 0 degrees, 45 degrees, 90 degrees, and 135 degrees, respectively. I 绿0 , I 绿45 , I 绿90 and I 绿135 And the polarized light signals of blue laser at 0 degrees, 45 degrees, 90 degrees and 135 degrees. I 蓝0 , I 蓝45 , I 蓝90 and I 蓝135 Thus, polarization spectral signals are obtained.

[0043] Step 6: The data processing module 10 processes the polarization spectral signal to obtain the polarization spectral information of the sample 4 under test, thus completing the polarization spectral measurement. Specifically: Step 6.1: Data processing module 10 calculates the Stokes vectors of the polarization signals of red, green, and blue lasers using the following formulas: ; ; ; in, , , wavelength The Stokes vectors below represent the normalized total light intensity, the normalized 0-degree polarization component, and the normalized 45-degree polarization component, respectively. , , , Wavelength The light intensity of polarized light signals at 0 degrees, 45 degrees, 90 degrees and 135 degrees.

[0044] Will I 红0 , I 红45 , I 红90 and I 红135 , I 绿0 , I 绿45 , I 绿90 and I 绿135 ,as well as I 蓝0 , I 蓝45 , I 蓝90 and I 蓝135 Substituting these values ​​into the above formulas, we can calculate the Stokes vectors of the polarized light signals of the red, green, and blue lasers.

[0045] Step 6.2: Based on the Stokes vectors of the polarization signals of the red, green, and blue lasers, calculate the degree of polarization of the red, green, and blue lasers respectively using the following formulas to obtain the polarization spectrum information of sample 4: ; in, wavelength The degree of polarization.

[0046] polarization degree The degree of polarization is related to the roughness of sample 4 and the absolute smoothness of the surface. The maximum value for specular reflection is 1, and the minimum ideal value for an absolutely rough surface is 0. By substituting the Stokes vectors of the polarization signals of red, green, and blue lasers into the above formula, the degree of polarization of the red, green, and blue lasers can be calculated. , , These correspond to the roughness features at different depths of the 4 samples to be tested.

[0047] In this embodiment, red, green, and blue lasers are used to generate red, green, and blue laser beams, respectively. These laser beams are reflected at different depths of the sample 4 under test. The reflected beams of the red, green, and blue laser beams at different depths of the sample 4 under test are collected on the surface of the micro-polarization array 7 by the zoom lens 6. The detector 8 then performs polarization imaging of the red, green, and blue spectra at different depths of the sample 4 under test, obtaining polarization spectral signals in the red, green, and blue spectral bands. The polarization spectral information of the sample 4 under test can then be obtained by calculating the degree of polarization.

[0048] The degree of polarization of sample 4 measured by red, green, and blue lasers is as follows: Figure 4 As shown, the values ​​are 0.582, 0.545, and 0.534, respectively.

[0049] Example 2: This embodiment has the same overall structure and polarization spectroscopy measurement method as the high-precision, large-range polarization spectroscopy measurement system in Embodiment 1, the difference being that, Figure 5 , Figure 6 As shown, this embodiment expands the light source module 1 to include a structure with 4 lasers 11 based on the first embodiment, and completes real-time polarization multispectral imaging and measurement of the depth direction of the sample 4 to be tested. It can acquire polarization multispectral information and achieve more refined polarization spectral information characterization of the depth direction of the sample 4 to be tested through this large-scale integrated light source module 1.

[0050] The degree of polarization of sample 4 measured by red, yellow, green, and blue lasers is as follows: Figure 7 As shown, the values ​​are 0.582, 0.567, 0.545, and 0.534, respectively.

[0051] Although the illustrative specific embodiments of the present invention have been described above to enable those skilled in the art to understand the invention, it should be understood that the invention is not limited to the scope of the specific embodiments. For those skilled in the art, various changes are obvious as long as they are within the spirit and scope of the invention as defined and determined by the appended claims, and all inventions utilizing the concept of the present invention are protected.

Claims

1. A high-precision, wide-range polarization spectroscopy measurement system, characterized in that, It includes a light source module (1) for generating at least two different wavelength measurement beams, a homogenization module (2), a beam splitter (3), a zoom lens (6), a micro-polarization array (7), and a detector (8) arranged sequentially along the transmission direction of the measurement beams. The homogenization module (2) is used to homogenize the measurement beam in the XY plane, where the XY plane is a plane perpendicular to the transmission direction of the measurement beam; The reflected light path of the beam splitter (3) is used to set the sample to be tested (4), and the zoom lens (6), micro-polarization array (7) and detector (8) are arranged in sequence along the transmission direction of the reflected beam of the sample to be tested (4). The micro-polarization array (7) includes N×N polarization elements arranged in an array, which are used to modulate the polarization state of the reflected light beams of different wavelengths of the sample under test to obtain reflected polarization light information of different wavelengths, where N is an integer and N≥2; The detector (8) is used to detect and image reflected polarized light information of different wavelengths to obtain polarization spectrum signals.

2. The high-precision, wide-range polarization spectroscopy measurement system according to claim 1, characterized in that, The light source module (1) includes M lasers (11) for generating measurement beams of different wavelengths and M-1 beam splitters (12), where M is an integer and M≥2; The M-1 beam splitters (12) and homogenization module (2) are arranged sequentially along the transmission direction of the measurement beam generated by one of the lasers (11), and the remaining M-1 lasers (11) are respectively arranged on the reflected light path of the M-1 beam splitters (12).

3. The high-precision, wide-range polarization spectroscopy measurement system according to claim 2, characterized in that, The light source module (1) has M=3, and the three lasers (11) are a red laser, a green laser, and a blue laser, respectively. The beam splitter (12) has a beam splitting ratio of 50:

50.

4. The high-precision, wide-range polarization spectroscopy measurement system according to claim 3, characterized in that, The red, green, and blue lasers are arranged sequentially from the light source end to the sample end along the optical path propagation direction of the light source module (1).

5. The high-precision, wide-range polarization spectroscopy measurement system according to any one of claims 1-4, characterized in that, The micro-polarization array (7) has N=2 or 16; The polarization elements of the micro-polarization array (7) are 0-degree linear polarization element, 45-degree linear polarization element, 90-degree linear polarization element and 135-degree linear polarization element.

6. The high-precision, wide-range polarization spectroscopy measurement system according to any one of claims 1-3, characterized in that, The measurement beam generated by the light source module (1) is a pulsed laser or a continuous laser; The zoom lens (6) is a zoom lens; The homogenization module (2) is a single microlens array.

7. The high-precision, wide-range polarization spectroscopy measurement system according to any one of claims 1-3, characterized in that, It also includes an electronic control module (9) and a data processing module (10); The output terminal of the electronic control module (9) is connected to the control terminals of the light source module (1), the zoom lens (6), and the detector (8) respectively. It is used to adjust the wavelength of the measurement beam generated by the light source module (1) and adjust the focal length of the zoom lens (6) so that the reflected beams of different wavelengths of the sample to be tested are focused onto the micro-polarization array (7) and the detector (8) is triggered synchronously. The output terminal of the detector (8) is connected to the input terminal of the data processing module (10). The data processing module (10) is used to process and analyze the polarization spectral signal to obtain the polarization spectral information of the sample (4) to be tested.

8. A polarization spectroscopy measurement method, employing the high-precision, large-range polarization spectroscopy measurement system as described in any one of claims 1-7, characterized in that, Includes the following steps: Step 1: The light source module (1) generates a measurement beam of a certain wavelength, adjusts the focal length of the zoom lens (6), and synchronously triggers the detector (8). Step 2: The measurement beam is transmitted to the homogenization module (2) for homogenization, and then the reflected beam after being split by the beam splitter (3) is irradiated onto the sample to be tested (4). Step 3: The reflected beam of the sample (4) of the wavelength is transmitted to the zoom lens (6) after being transmitted through the beam splitter (3), and the zoom lens (6) focuses it onto the micro-polarization array (7). Step 4: The micro-polarization array (7) modulates the polarization state of the reflected beam of the sample (4) at this wavelength to obtain the reflected polarization information of this wavelength, and transmits it to the detector (8) for detection and imaging to obtain the polarization signal of this wavelength. Step 5: Repeat steps 1-4 until all wavelength measurement beams generated by the light source module (1) are traversed to obtain the polarization spectrum signal.

9. The polarization spectroscopy measurement method according to claim 8, characterized in that, When the high-precision, wide-range polarization spectroscopy measurement system works in concert through the electronic control module (9) and the data processing module (10): In step 1, the light source module (1) is controlled by the electronic control module (9) to generate a measurement beam of a certain wavelength, while the focal length of the zoom lens (6) is adjusted and the detector (8) is triggered synchronously. In step 4, the polarized light signal of the detector (8) is sent to the data processing module (10). Step 6, data processing module (10), is also set to process the polarization spectrum signal to obtain the polarization spectrum information of the sample to be tested (4) and complete the polarization spectrum measurement.

10. The polarization spectroscopy measurement method according to claim 9, characterized in that, Step 6 specifically involves: Step 6.1, the data processing module (10) calculates the Stokes vectors of polarized light signals of different wavelengths using the following formula: ； ； ； in, , , wavelength The Stokes vectors of the polarized light signals under the given conditions represent the normalized total light intensity, the normalized 0-degree polarization component, and the normalized 45-degree polarization component, respectively. , , , Wavelength The light intensity of polarized light signals at 0 degrees, 45 degrees, 90 degrees and 135 degrees; Step 6.2: Based on the Stokes vectors of polarized light signals of different wavelengths, calculate the degree of polarization for different wavelengths using the following formula to obtain the polarization spectral information of the sample (4) to be tested: ； in, wavelength The degree of polarization.

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