Auxiliary mounting device for electrostatic chuck

Abstract

The invention relates to the technical field of semiconductors, and provides an electrostatic chuck auxiliary mounting device which comprises an adjusting unit and a fixing unit. The adjusting unit is connected with the fixing unit, and the adjusting unit is used for fixing an electrostatic chuck and driving the electrostatic chuck to move in the axial direction of the electrostatic chuck; the fixing unit is used for being fixed to a base, and the central axis of the electrostatic chuck fixed by the adjusting unit and the central axis of the base are collinear. The device can assist the installation of the electrostatic chuck, and can improve the installation efficiency and the installation precision.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, and in particular to an electrostatic chuck auxiliary installation device. BACKGROUND

[0002] An electrostatic chuck (ESC) is often used to fix a substrate in a semiconductor manufacturing process.

[0003] For example, in an etching device, the electrostatic chuck is used to adsorb and fix the substrate to ensure the position accuracy and stability of the substrate during the process.

[0004] The electrostatic chuck is often removed during the maintenance or PM (preventive maintenance) of a semiconductor device, and needs to be reinstalled after the maintenance is completed. In particular, the installation accuracy of the electrostatic chuck needs to be ensured during the installation process.

[0005] The existing installation method of the electrostatic chuck is usually to manually place the ESC on the pedestal in the process cavity, align the electrostatic chuck with the pedestal by visual inspection, and then use simple measuring tools such as a plug gauge and a level to repeatedly fine-tune the position and levelness of the ESC. Some semiconductor devices are designed with positioning columns, limiting edges or shallow grooves on the pedestal, which are used to roughly limit the position area of the ESC to avoid excessive position deviation of the ESC. However, this positioning structure cannot achieve accurate positioning of the ESC. Moreover, this installation method requires the cooperation of multiple workers, for example, one person observes the gap or level, and another person or several people slowly lift or move the ESC to seek a more appropriate centering and level state, resulting in a cumbersome installation process and low installation efficiency. Moreover, the installation process is highly dependent on the experience and proficiency of the operator, and the installation standard is difficult to unify, resulting in poor repeatability of the center positioning of the electrostatic chuck and the pedestal. Moreover, the accuracy of this installation method is difficult to guarantee, and when the electrostatic chuck is not accurately centered, the position of the substrate is prone to deviation. At this time, affected by the electric field, airflow, temperature distribution, etc., the etching uniformity will be poor, and the product yield will be affected.

[0006] Another installation method of the electrostatic chuck is to use a simple lifting tool or a mechanical arm to lift or suspend the ESC above the pedestal, and then manually observe and operate to align the electrostatic chuck with the pedestal. The lifting device is usually a general lifting structure, which generally only provides a simple lifting function and is difficult to meet the adjustment requirements during the installation process of the ESC. Manual detection and adjustment are still required during the installation process, and the line of sight is limited by the space of the process cavity, making it difficult to accurately center.

[0007] Therefore, an electrostatic chuck auxiliary installation device is needed to improve the above-mentioned cumbersome installation process and low installation efficiency. SUMMARY

[0008] The application provides an electrostatic chuck auxiliary installation device which can assist the installation of an electrostatic chuck to improve installation efficiency and installation accuracy.

[0009] The application provides an electrostatic chuck auxiliary installation device which can assist the installation of an electrostatic chuck to improve installation efficiency and installation accuracy.

[0010] The adjustment unit is connected with the fixing unit, and is used for fixing the electrostatic chuck and driving the electrostatic chuck to move along the axial direction of the electrostatic chuck.

[0011] The fixing unit is used for fixing the base, and makes the central axis of the electrostatic chuck fixed by the adjustment unit and the central axis of the base collinear.

[0012] Optionally, when the fixing unit is fixed to the base, the central axis of the fixing unit and the central axis of the base are collinear.

[0013] When the adjustment unit fixes the electrostatic chuck, the central axis of the electrostatic chuck and the central axis of the fixing unit are collinear.

[0014] Optionally, the fixing unit comprises a fixing base and a plurality of clamping assemblies, the fixing base is provided with a clamping cavity for accommodating the base, each clamping assembly is arranged on the fixing base and surrounds the central axis of the fixing unit, and each clamping assembly is used for clamping the outer periphery of the base and making the central axis of the base and the central axis of the fixing unit collinear.

[0015] Optionally, the fixing base comprises a first ring body and a second ring body.

[0016] The first ring body and the second ring body are coaxially arranged, the first ring body is rotatably arranged on the second ring body around the central axis thereof, and the inner cavity of the first ring body and / or the inner cavity of the second ring body serves as the clamping cavity.

[0017] The clamping assembly comprises a clamping arm, one end of the clamping arm is rotatably connected to the first ring body, the other end of the clamping arm serves as a clamping end, and the middle part of the clamping arm is arranged in the second ring body.

[0018] When the first ring body rotates relative to the second ring body, the clamping arm of each clamping assembly is driven to rotate relative to the first ring body, and the clamping end moves along the center of the first ring body to clamp the base or moves away from the center of the first ring body to release the base.

[0019] Optionally, the clamping assembly further comprises a clamping arm support rotatably arranged on the second ring body; the clamping arm support is provided with a sliding hole, and the clamping arm is slidably arranged through the sliding hole.

[0020] Optionally, the clamping assembly further comprises a rotating wheel rotatably arranged on the clamping arm, and an axis of rotation of the rotating wheel is parallel to the central axis of the first ring body.

[0021] Optionally, the fixing unit further comprises a clamping driving assembly.

[0022] The clamping driving assembly comprises a first structural member, a second structural member and an adjusting screw rod.

[0023] One of the first structural member and the second structural member is rotatably arranged on the first ring body, and the other is arranged on the second ring body.

[0024] The adjusting screw rod is threadedly connected to the first structural member and the second structural member, and rotation of the adjusting screw rod is used to adjust a distance between the first structural member and the second structural member to drive the first ring body to rotate relative to the second ring body.

[0025] Optionally, the adjusting unit is further used to adjust an angle of the central axis of the electrostatic chuck.

[0026] Optionally, the adjusting unit comprises an adjusting seat, a connecting member and a lifting member.

[0027] The connecting member is arranged on the adjusting seat and is used to connect the electrostatic chuck.

[0028] The lifting member is connected between the adjusting seat and the fixing unit and is used to drive the adjusting seat to move relative to the fixing unit along an axial direction of the electrostatic chuck.

[0029] Optionally, the lifting member comprises a plurality of lifting screw rods, the lifting screw rods are rotatably arranged on the adjusting seat, and the lifting screw rods are threadedly connected to the fixing unit.

[0030] Optionally, the adjusting unit further comprises a plurality of first gears and second gears.

[0031] The first gears are rotatably arranged on the adjusting seat, and one of the first gears is coaxially connected to one of the lifting screw rods.

[0032] The second gears are rotatably and detachably arranged on the adjusting seat, and the second gears are engaged with the first gears.

[0033] The electrostatic chuck auxiliary installation device is first fixed to the base through the fixing unit during installation of the electrostatic chuck, at which time the entire electrostatic chuck auxiliary installation device is installed on the base, and the position of the electrostatic chuck auxiliary installation device is positioned based on the base. Then the electrostatic chuck is installed on the adjusting unit so that the electrostatic chuck is collinear with the central axis of the base, achieving accurate center positioning of the electrostatic chuck relative to the base and improving installation accuracy and installation efficiency of the base. Then the adjusting unit drives the electrostatic chuck to move along the axial direction to approach the base so that the electrostatic chuck is placed on the base, and finally the electrostatic chuck is fixed to the base.

[0034] The use of the electrostatic chuck auxiliary installation device improves the center positioning accuracy during installation of the electrostatic chuck without relying on manual experience, helps to ensure the consistency and repeatability of the installation accuracy of the electrostatic chuck, and further ensures the stability of the process quality and a high yield. Moreover, during installation of the electrostatic chuck, multiple people are not required to cooperate and repeatedly debug, and manual intervention is not required, which on the one hand can simplify the installation process of the electrostatic chuck, reduce the labor intensity, shorten the installation time, improve the installation efficiency, shorten the equipment downtime, and further improve the equipment capacity utilization; on the other hand, it also helps to improve the installation accuracy and improve the process yield.

[0035] Moreover, the electrostatic chuck auxiliary installation device can ensure the coaxiality of the electrostatic chuck and the base during installation, and further ensure the levelness of the electrostatic chuck, which can avoid or shorten the process of manually adjusting the levelness and further improve the installation efficiency.

[0036] The electrostatic chuck auxiliary installation device can be fixed relative to the base, which can make the electrostatic chuck stably move along the axial direction to approach the base while ensuring high coaxiality of the electrostatic chuck, the entire installation process is relatively stable, which improves the knocking phenomenon of the electrostatic chuck and the base due to insufficient stability during the installation process, and also improves the phenomenon of polluting the process cavity during frequent manual adjustment. BRIEF DESCRIPTION OF DRAWINGS

[0037] Figure 1 FIG. 1 is a structural schematic diagram of the electrostatic chuck auxiliary installation device of the present application in cooperation with the electrostatic chuck and the base;

[0038] Figure 2 FIG. 1 is a structural schematic diagram of the electrostatic chuck auxiliary installation device of the present application in cooperation with the electrostatic chuck and the base;

[0039] Figure 3 FIG. 1 is a structural schematic diagram of the electrostatic chuck auxiliary installation device of the present application in cooperation with the electrostatic chuck and the base;

[0040] Figure 4 FIG. 1 is a structural schematic diagram of the electrostatic chuck auxiliary installation device of the present application in cooperation with the electrostatic chuck and the base;

[0041] Figure 5 Structure diagram of lifting screw rod for an embodiment of the present application.

[0042] In the drawings:

[0043] 10 - adjustment unit; 11 - adjustment seat; 12 - connecting piece; 13 - lifting piece; 131 - lifting screw rod; 132 - flat key; 14 - first gear; 141 - key groove; 15 - second gear; 16 - handle;

[0044] 20 - fixing unit; 21 - fixing base; 211 - first ring body; 212 - second ring body; 213 - boss; 214 - third ring body; 22 - clamping assembly; 221 - clamping arm; 222 - clamping arm support; 223 - rotating wheel; 23 - clamping driving assembly; 231 - first structural piece; 232 - second structural piece; 233 - adjustment screw rod; 24 - clamping cavity;

[0045] 30 - electrostatic chuck;

[0046] 40 - base;

[0047] 50 - process cavity. DETAILED DESCRIPTION

[0048] The electrostatic chuck auxiliary installation device of the present application will be further described in detail below in combination with the drawings and specific embodiments. The advantages and features of the present application will be more apparent according to the following description. It should be noted that the drawings are all in a very simplified form and all use non-precise proportions, only for the purpose of facilitating and clearly assisting the description of the embodiments of the present application.

[0049] In the present application, "outer diameter" and "inner diameter" correspond to the diameter size for circular structure, for non-circular structure, the inner diameter refers to the diameter of its inscribed circle, and the outer diameter refers to the diameter of its circumscribed circle; "axial direction" corresponds to the direction of its axis for cylindrical rod, and for non-cylindrical rod, the axial direction corresponds to the length direction of the rod.

[0050] As used in the present application, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense of "and / or" unless the context clearly dictates otherwise. The term "plurality" is generally employed in its sense of "two or more" unless the context clearly dictates otherwise. The terms "first," "second," "third," etc. are used only to describe a particular one of the features and do not imply or suggest a relative importance of, or a limitation to, the number of the features indicated. Thus, features defined with "first," "second," "third," etc. can include one or at least two of the features explicitly or implicitly. In addition, as used in the present application, "mounting," "connected," "coupled," an element "disposed" on another element should be broadly interpreted, generally only indicating that there is a connection, coupling, engagement or transmission relationship between two elements, and the two elements can be directly or indirectly connected, coupled, engaged or transmitted through intermediate elements, and cannot be understood as indicating or suggesting the spatial positional relationship between the two elements, i.e. one element can be in any orientation inside, outside, above, below or one side of another element, unless the context clearly indicates otherwise. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the drawings, upward or upward direction is toward the top of the corresponding drawing, and downward or downward direction is toward the bottom of the corresponding drawing.

[0051] The embodiment provides an electrostatic chuck auxiliary mounting device, which comprises an adjusting unit 10 and a fixing unit 20.

[0052] As shown in Figure 1 and Figure 2 The adjusting unit 10 is connected with the fixing unit 20, and the fixing unit 20 is used for being fixed to a base 40 located in a process cavity 50, so that the entire electrostatic chuck auxiliary mounting device is mounted on the base 40, facilitating the mounting of an electrostatic chuck 30.

[0053] The adjusting unit 10 is used for fixing the electrostatic chuck 30, and the adjusting unit 10 can drive the electrostatic chuck 30 to move along the axial direction of the electrostatic chuck 30 to approach or move away from the base 40.

[0054] The fixing unit 20 is used for making the central axis of the electrostatic chuck 30 fixed by the adjusting unit 10 and the central axis of the base 40 to be collinear when the fixing unit 20 is fixed to the base 40.

[0055] The base 40 is used to mount the electrostatic chuck 30. Both the electrostatic chuck 30 and the base 40 are cylindrical structures, and their axial direction extends vertically during actual use. During the installation of the electrostatic chuck 30, the electrostatic chuck auxiliary mounting device is first fixed to the base 40 by the fixing unit 20. At this time, the entire electrostatic chuck auxiliary mounting device is mounted on the base 40, and its position is positioned based on the base 40. Then, the electrostatic chuck 30 is mounted on the adjustment unit 10, making the central axis of the electrostatic chuck 30 collinear with that of the base 40, achieving precise center positioning of the electrostatic chuck 30 relative to the base 40. Then, the adjustment unit 10 drives the electrostatic chuck 30 to move along its axial direction closer to the base 40 (e.g., along...). Figure 1 (Move vertically downwards) so that the electrostatic chuck 30 is placed on the base 40, and finally the electrostatic chuck 30 is fixed to the base 40, and the adjustment unit 10 is removed from the electrostatic chuck 30.

[0056] The use of the aforementioned electrostatic chuck-assisted installation device eliminates the need for manual experience in achieving precise center positioning during the installation of the electrostatic chuck 30. This helps ensure the consistency and repeatability of the installation accuracy, thereby guaranteeing stable process quality and a high yield. Furthermore, the installation of the electrostatic chuck 30 does not require multiple people working together for repeated adjustments or extensive manual intervention. This simplifies the installation process, reduces labor intensity, shortens installation time, improves installation efficiency, and reduces equipment downtime, thus increasing equipment capacity utilization. It also helps improve installation accuracy and process yield.

[0057] Furthermore, the aforementioned electrostatic chuck auxiliary installation device can ensure the coaxiality of the electrostatic chuck 30 and the base 40 during the installation process, thereby ensuring the horizontality of the electrostatic chuck 30. This can avoid or shorten the process of manually adjusting the horizontality, further improving installation efficiency.

[0058] The aforementioned electrostatic chuck auxiliary installation device can be fixed relative to the base 40. While ensuring a high coaxiality of the electrostatic chuck 30, it allows the electrostatic chuck 30 to move stably along its axial direction toward the base 40. The entire installation process is relatively smooth, which improves the phenomenon of collision between the electrostatic chuck 30 and the base 40 caused by insufficient stability during installation. It also improves the phenomenon of contamination of the process cavity during frequent manual adjustments.

[0059] Furthermore, when the fixing unit 20 is fixed to the base 40, the central axis of the fixing unit 20 is collinear with the central axis of the base 40. At this time, the relative positional relationship between the fixing unit 20 and the base 40 is fixed, and the fixing unit 20 is positioned based on the base 40.

[0060] When the adjustment unit 10 fixes the electrostatic chuck 30, the central axis of the electrostatic chuck 30 is collinear with the central axis of the fixing unit 20. This ensures that the relative positional relationship between the electrostatic chuck 30 and the fixing unit 20 is fixed, thereby fixing the relative positional relationship between the electrostatic chuck 30 and the base 40. The central axis of the electrostatic chuck 30 is collinear with the central axis of the base 40 to ensure the relative positional accuracy of the two.

[0061] The following is combined Figure 2 and Figure 3 This section describes the assembly relationship between the fixed unit 20 and the base 40, and the connection... Figure 4 and Figure 5 The connection relationship between the adjustment unit 10 and the electrostatic chuck 30, as well as the connection relationship between the adjustment unit 10 and the fixing unit 20, are described.

[0062] Please refer to Figure 2 and Figure 3 As shown, the fixing unit 20 includes a fixing base 21 and a plurality of clamping assemblies 22. The fixing base 21 is provided with a clamping cavity 24 for accommodating the base 40. Each clamping assembly 22 is disposed on the fixing base 21 and arranged around the central axis of the fixing unit 20. Each clamping assembly 22 is used to clamp the outer periphery of the base 40, such that the central axis of the base 40 is collinear with the central axis of the fixing unit 20.

[0063] The clamping cavity 24 extends along the axial direction of the fixing unit 20 to facilitate the mounting of the fixing base 21 onto the base 40 for clamping the base 40. Preferably, the inner diameter of the clamping cavity 24 is larger than the outer diameter of the base 40 to accommodate clamping bases 40 of more specifications.

[0064] The central axis of the clamping cavity 24 is preferably used as the central axis of the fixing unit 20. Each clamping component 22 is evenly distributed circumferentially around the central axis of the clamping cavity 24, and the clamping end of each clamping component 22 is equidistant from the central axis of the clamping cavity 24 in the radial direction. This ensures that after each clamping component 22 cooperates to clamp the outer periphery of the base 40, the fixing base 21 is naturally centered relative to the base 40. At this time, the central axis of the clamping cavity 24 (i.e., the central axis of the fixing unit 20) is naturally collinear with the central axis of the base 40.

[0065] Furthermore, the fixed base 21 includes a first ring body 211 and a second ring body 212.

[0066] In this embodiment, the outer contours of the first ring body 211 and the second ring body 212 are both cylindrical surfaces. The central axis of the inner cavity of the first ring body 211 is collinear with the central axis of its outer inner contour, and the central axis of the inner cavity of the second ring body 212 is collinear with the central axis of its outer inner contour.

[0067] The first ring body 211 and the second ring body 212 are coaxially arranged, and the inner cavity of the first ring body 211 and / or the inner cavity of the second ring body 212 constitutes the clamping cavity 24.

[0068] In combination Figure 2 and Figure 3 As shown in the drawings, in the embodiment, the second ring body 212 is sleeved in the first ring body 211, and the outer peripheral surface of the second ring body 212 is conformally attached to the inner peripheral surface of the first ring body 211. At this time, the inner cavity of the second ring body 212 serves as the clamping cavity 24 for accommodating the base 40.

[0069] In combination Figure 3 As shown in the drawings, the outer periphery of the second ring body 212 has a boss 213 protruding radially outward, and the boss 213 is attached to the upper end surface of the first ring body 211. The boss 213 cooperates with the first ring body 211 to axially position the second ring body 212 and the first ring body 211.

[0070] In other alternative embodiments, the second ring body 212 can be arranged axially with the first ring body 211, at which time the inner cavity of the first ring body 211 and the inner cavity of the second ring body 212 jointly constitute the clamping cavity 24. Alternatively, the first ring body 211 can be sleeved in the second ring body 212, at which time the inner cavity of the first ring body 211 serves as the clamping cavity 24 for accommodating the base 40.

[0071] Please continue to refer to Figure 2 and Figure 3 As shown in the drawings, the first ring body 211 is rotatably arranged around the central axis of the second ring body 212, i.e. the first ring body 211 can rotate relative to the second ring body 212, so that the second ring body 212 and the first ring body 211 are relatively displaced in the circumferential direction.

[0072] The clamping assembly 22 comprises a clamping arm 221, one end (the end radially away from the central axis of the first ring body 211) of the clamping arm 221 is rotatably connected to the first ring body 211, and the rotation axis of the end is parallel to the central axis of the first ring body 211. The other end (the end radially close to the central axis of the first ring body 211) of the clamping arm 221 serves as a clamping end, and the middle part of the clamping arm 221 is arranged in the second ring body 212. Figure 3 Figure 3 The clamping assembly 22 comprises a clamping arm 221, one end (the end radially away from the central axis of the first ring body 211) of the clamping arm 221 is rotatably connected to the first ring body 211, and the rotation axis of the end is parallel to the central axis of the first ring body 211. The other end (the end radially close to the central axis of the first ring body 211) of the clamping arm 221 serves as a clamping end, and the middle part of the clamping arm 221 is arranged in the second ring body 212.

[0073] When the first ring body 211 rotates relative to the second ring body 212, the clamping arm 221 of each clamping assembly 22 is driven to rotate relative to the first ring body 211, and the clamping end moves towards the center of the first ring body 211 to clamp the base 40, or moves away from the center of the first ring body 211 to release the base 40.

[0074] ​In the embodiment, the clamping assembly 22 is provided with three sets and is uniformly distributed around the central axis of the first ring body 211. The relative movement between the second ring body 212 and the first ring body 211 drives the synchronous movement of each clamping arm 221, thereby clamping or releasing the base 40. It should be ensured that the distance between the clamping end of each clamping base 40 and the central axis of the first ring body 211 is equal, so that after the three clamping assemblies 22 are cooperatively clamped to the outer periphery of the base 40, the central axis of the base 40 is naturally collinear with the central axis of the first ring body 211.

[0075] In other alternative embodiments, the clamping assembly 22 can be provided with four sets or more. The specific number of clamping assemblies 22 can be adjusted based on actual use requirements. In other alternative embodiments, the clamping assembly 22 can also adopt a linear driving structure such as a hydraulic push rod. At this time, the second ring body 212 can not be configured, and the clamping assembly 22 can be directly connected to the inner wall of the first ring body 211.

[0076] Please continue to refer to Figure 3 In the embodiment, the clamping assembly 22 further includes a clamping arm support 222, which is rotatably arranged on the second ring body 212. The rotation axis of the clamping arm support 222 and the rotation axis of the clamping arm 221 are parallel to the central axis of the first ring body 211.

[0077] The clamping arm support 222 is provided with a sliding hole, and the clamping arm 221 slidably passes through the sliding hole. The clamping arm support 222 is used to constrain the movement of the clamping arm 221. When the second ring body 212 rotates relative to the first ring body 211, the clamping arm 221 can adaptively swing, and the clamping arm support 222 can adaptively rotate, and the clamping arm 221 can adaptively slide relative to the clamping arm support 222.

[0078] In the embodiment, the cross section of the clamping arm 221 is a rectangular structure, and the clamping arm support 222 is provided as a cuboid block structure, and the sliding hole formed thereon is adapted to the cross section of the clamping arm 221 to form a rectangular hole. In other alternative embodiments, the cross section shape of the clamping arm 221, the shape of the clamping arm support 222, and the shape of the sliding hole can be adjusted based on actual use requirements.

[0079] Further, the clamping assembly 22 further includes a rotating wheel 223, which is rotatably arranged on the clamping end of the clamping arm 221 Figure 3 along the radial end close to the central axis of the first ring body 211, and the rotation axis of the rotating wheel 223 is parallel to the central axis of the first ring body 211.

[0080] The rotating wheel 223 is in a cylindrical structure, and is arranged at the clamping end of the clamping arm 221. Therefore, the rotating wheel 223 is in contact with the outer periphery of the base 40 during the clamping process, and can roll along the outer periphery of the base 40. The configuration of the rotating wheel 223 can make the entire electrostatic chuck auxiliary mounting device rotate around the base 40, thereby adjusting the circumferential direction of the electrostatic chuck 30, facilitating the alignment of the connecting structure on the electrostatic chuck 30 with the connecting structure on the base 40, so as to achieve accurate positioning and installation. In addition, the rotating wheel 223 can also be configured with a brake structure to limit its free rotation, thereby positioning the electrostatic chuck auxiliary mounting device relative to the base 40 in the circumferential direction. The brake structure can adopt an existing disc brake or other existing brake structure.

[0081] Further, the fixing unit 20 further comprises a clamping driving assembly 23.

[0082] The clamping driving assembly 23 comprises a first structural member 231, a second structural member 232 and an adjusting screw 233.

[0083] Among the first structural member 231 and the second structural member 232, one is rotatably arranged on the first ring body 211, and the other is rotatably arranged on the second ring body 212.

[0084] Please refer to Figure 3 In the embodiment, the first structural member 231 is rotatably arranged on the boss 213 of the second ring body 212, and the second structural member 232 is rotatably arranged on the first ring body 211. The rotation axis of the first structural member 231 and the rotation axis of the second structural member 232 are arranged in parallel and parallel to the central axis of the first ring body 211.

[0085] The adjusting screw 233 is threadedly connected to the first structural member 231 and the second structural member 232. By rotating the adjusting screw 233, the rotational motion of the adjusting screw 233 can be converted into the linear motion of the first structural member 231 and the second structural member 232.

[0086] Therefore, the rotation of the adjusting screw 233 can be used to adjust the distance between the first structural member 231 and the second structural member 232, and the adaptive rotation of the first structural member 231 and the second structural member 232, and drive the first ring body 211 to rotate relative to the second ring body 212. When the second ring body 212 and the first ring body 211 rotate relative to each other, the clamping arm 221 can be driven to swing to clamp or release the base 40.

[0087] The arrangement of the adjusting screw 233 facilitates the accurate adjustment of the circumferential relative position of the second ring body 212 and the first ring body 211, and also facilitates self-locking to ensure the stability of the clamping force of the clamping arm 221.

[0088] The adjusting screw 233 in the embodiment can be rotated manually or driven to rotate by a motor.

[0089] In the embodiment, the first structure 231 and the second structure 232 are both cuboid structures, and threaded holes are formed in the first structure 231 and the second structure 232. In other alternative embodiments, the first structure 231 and the second structure 232 can be provided in a cylindrical structure or other shapes, and the specific structures of the first structure 231 and the second structure 232 can be flexibly adjusted based on actual use requirements.

[0090] Please continue to refer to Figure 1 As shown in the figure, the fixed base 21 in the embodiment further includes a third ring body 214, the inner diameter of the third ring body 214 is equal to the inner diameter of the second ring body 212, and the outer diameter of the third ring body 214 is equal to the outer diameter of the second ring body 212. The third ring body 214 is coaxially arranged with the second ring body 212, and the third ring body 214 fixes the second ring body 212 in the axial direction.

[0091] The third ring body 214 can be freely selected in material to facilitate connection with the adjusting unit 10.

[0092] The adjusting unit 10 can be used to drive the electrostatic chuck 30 to move up and down in the axial direction, and can also be used to adjust the angle of the central axis of the electrostatic chuck 30.

[0093] As shown in the figures Figure 4 , Figure 5 and Figure 2 In the embodiment, the adjusting unit 10 includes an adjusting seat 11, a connecting piece 12, and a lifting piece 13.

[0094] The connecting piece 12 is arranged on the adjusting seat 11 to connect and fix the electrostatic chuck 30.

[0095] In the embodiment, the adjusting seat 11 is provided in a disc structure, and the central axis of the adjusting seat 11 is collinear with the central axes of the first ring body 211 and the second ring body 212. Moreover, the adjusting seat 11 is provided in a disc structure, which also facilitates centering with the electrostatic chuck 30, the first ring body 211, and the second ring body 212.

[0096] As shown in the figures Figure 4 and Figure 4 In the embodiment, the connecting piece 12 includes three bolts arranged on the adjusting seat 11, the three bolts are arranged symmetrically around the central axis of the adjusting seat 11, and a through hole is formed in the adjusting seat 11 in the axial direction, and the shank segments of the bolts are inserted into the through hole from top to bottom to be threadedly connected with the threaded holes on the electrostatic chuck 30 below the adjusting seat 11.

[0097] In other alternative embodiments, the number of bolts included in the connecting member 12 can be adjusted based on the actual connection structure of the electrostatic chuck 30, for example, the bolts can be provided as two, four or more. In addition, the specific structural form of the connecting member 12 can be adjusted based on the actual structure of the electrostatic chuck 30, for example, the connecting member 12 can be a clamping structure similar to the clamping assembly 22 described above.

[0098] When the connecting member 12 fixes the electrostatic chuck 30 to the adjusting seat 11, the position of the electrostatic chuck 30 is constrained by the connecting member 12, so that the electrostatic chuck 30 is collinear with the central axis of the adjusting seat 11, and further collinear with the central axes of the first ring body 211, the second ring body 212 and the base body 40.

[0099] Please continue to refer to Figure 4 As shown, the lifting member 13 is connected between the adjusting seat 11 and the fixed unit 20 for driving the adjusting seat 11 to move relative to the fixed unit 20 along the axial direction of the electrostatic chuck 30.

[0100] In this embodiment, the lifting member 13 includes three lifting lead screws 131, which extend along the axial direction of the adjusting seat 11, and are centrally symmetrically arranged around the central axis of the adjusting seat 11. The lifting lead screws 131 are rotatably arranged on the adjusting seat 11 and are threadedly connected with the third ring body 214 of the fixed unit 20. The second ring body 212 is provided with avoiding holes corresponding to the positions of the lifting lead screws 131, so that the lifting lead screws 131 pass through the avoiding holes.

[0101] The arrangement of the three lifting lead screws 131 can realize the lifting movement of the adjusting unit 10 relative to the fixed unit 20, and further adjust the position of the electrostatic chuck 30. For example, when the three lifting lead screws 131 rotate synchronously, the lifting lead screws 131 are lifted relative to the third ring body 214, and further drive the adjusting seat 11 and the electrostatic chuck 30 to move up and down. On the other hand, the three lifting lead screws 131 can realize the angle adjustment of the central axis of the electrostatic chuck 30. For example, the three lifting lead screws 131 are independently adjusted respectively, so as to level the adjusting seat 11, and further adjust the angle of the central axis of the electrostatic chuck 30, so as to correct the posture of the electrostatic chuck 30. In actual process, the installation error of the electrostatic chuck 30 is generally small, so that the above-mentioned fine adjustment of the angle of the central axis of the electrostatic chuck 30 is realized by the lifting lead screws 131. It is not suitable for large angle adjustment. If the angle deviation of the central axis of the electrostatic chuck 30 is large, the assembly precision of each part of the adjusting unit 10 needs to be corrected.

[0102] In other alternative embodiments, the lifting lead screws 131 can be directly threadedly connected to the second ring body 212, and in this case, the third ring body 214 can not be arranged.

[0103] In other alternative embodiments, the number of lifting screws 131 included in the lifting member 13 can be adjusted based on actual usage requirements, for example, the lifting screws 131 can be configured in two, four or more.

[0104] Further, the adjusting unit 10 further comprises a plurality of first gears 14 and second gears 15.

[0105] The number of first gears 14 is the same as the number of lifting screws 131.

[0106] The first gears 14 are rotatably arranged on the adjusting seat 11, and one of the first gears 14 is coaxially connected with one of the lifting screws 131.

[0107] As shown in Figure 5 The inner wall of the first gear 14 is provided with a key groove 141. As shown in Figure 4 The end of the lifting screw 131 has a radial protruding flat key 132 matched with the key groove 141, which is fitted into the key groove 141, so that the first gear 14 and the lifting screw 131 form a transmission fit. The first gear 14 can drive the lifting screw 131 to rotate synchronously during rotation.

[0108] Among them, the second gear 15 is rotatably and detachably arranged on the adjusting seat 11, and the second gear 15 is engaged with each of the first gears 14.

[0109] As shown in ​ The second gear 15 is collinear with the central axis of the adjusting seat 11. The second gear 15 is provided with a handle 16, which is convenient for driving the second gear 15 to rotate. When the second gear 15 rotates, it can drive each first gear 14 to rotate synchronously to drive each lifting screw 131 to rotate synchronously, so as to realize the lifting movement of the adjusting seat 11.

[0110] The working principle of the electrostatic chuck auxiliary installation device is as follows:

[0111] First, the whole electrostatic chuck auxiliary installation device is fixed on the base 40. Specifically, the electrostatic chuck auxiliary installation device is sleeved on the base 40, wherein the base 40 and the electrostatic chuck 30 installed on the base 40 are located in the inner cavity of the second ring body 212. The distance between the first structure 231 and the second structure 232 is adjusted by rotating the first adjusting lead screw 233. At this time, the first structure 231 and the second structure 232 are adaptively rotated and linearly moved along the first adjusting lead screw 233, and drive the first ring body 211 to rotate relative to the second ring body 212. When the first ring body 211 rotates, it drives each clamping arm 221 to adaptively swing (at the same time, the clamping arm support 222 adaptively rotates, and the clamping arm 221 adaptively slides relative to the clamping arm support 222), so that the clamping end of each clamping arm 221 moves towards the center of the first ring body 211 and is clamped on the outer periphery of the base 40, and the rotating wheel 223 installed on each clamping end is clamped on the outer periphery of the base 40. After the clamping arm 221 is clamped on the outer periphery of the base 40, it should be ensured that the adjustment unit 10 is located directly above the base 40. At this time, the position of the process cavity cleaning device is positioned based on the base 40. At this time, due to the self-locking function of the first adjusting lead screw 233, the relative position of the first ring body 211 and the second ring body 212 is fixed to form a whole.

[0112] Then the electrostatic chuck 30 is fixed on the adjusting seat 11 through the connecting piece 12. At this time, the electrostatic chuck 30 is connected below the adjustment unit 10 and is located directly above the base 40. At this time, the electrostatic chuck 30 is collinear with the central axis of the adjusting seat 11, and then the electrostatic chuck 30 is collinear with the central axes of the first ring body 211, the second ring body 212 and the base 40. After the electrostatic chuck 30 is fixed, the electrostatic chuck 30 needs to be placed on the base 40 to complete the installation of the electrostatic chuck 30. At this time, the second gear 15 is installed and engaged with each first gear 14. The second gear 15 is driven to rotate, so that each first gear 14 and each lifting lead screw 131 rotate synchronously, the lifting lead screw 131 rotates relative to the third ring body 214 of the fixed base 21, and then the lifting lead screw 131 rises and falls relative to the fixed base 21, so as to drive the adjusting seat 11 and the fixed electrostatic chuck 30 to rise and fall, until the electrostatic chuck 30 is placed on the base 40. During the placement of the electrostatic chuck 30, the circumferential direction of the electrostatic chuck 30 can be adjusted, for example, the first ring body 211 is rotated, so that the rotating wheel 223 installed on the clamping arm 221 rotates around the outer periphery of the base 40, and then the whole electrostatic chuck auxiliary installation device and the electrostatic chuck 30 are rotated, so that the connecting structure on the electrostatic chuck 30 is aligned with the connecting structure on the base 40. After alignment is completed, the electrostatic chuck 30 continues to be driven to descend, until the electrostatic chuck 30 is placed on the base 40.

[0113] In addition, before driving the electrostatic chuck 30 to lift, when the angle of the central axis of the electrostatic chuck 30 needs to be adjusted, the second gear 15 is disassembled, each first gear 14 is independently driven to rotate, and then each lifting screw 131 is independently adjusted to lift, so as to correct the posture of the adjusting seat 11, and then the angle of the central axis of the electrostatic chuck 30 is adjusted to correct the posture of the electrostatic chuck 30. This adjustment method is used to correct the position accuracy of the electrostatic chuck 30 when it is installed on the adjusting seat 11, so as to eliminate the phenomenon that the position accuracy of the electrostatic chuck 30 deteriorates due to the assembly error of each part of the adjusting unit 10 becoming larger after a long time of use.

[0114] The above-mentioned electrostatic chuck auxiliary mounting device can realize the centering of the fixing unit 20 relative to the base 40 by adjusting the screw 233 to drive the relative rotation of the first ring body 211 and the second ring body 212, and clamping the base 40 by the clamping assembly 22. After clamping is completed, the circumferential relative position of the first ring body 211 and the second ring body 212 is locked by the adjusting screw 233. Then the electrostatic chuck 30 is fixed to the adjusting seat 11 through the connecting piece 12, at this time the handle 16 can be rotated to drive the synchronous rotation of each lifting screw 131, so as to adjust the position of the electrostatic chuck 30 relative to the base 40. At the same time, the first ring body 211 can be rotated, so that the entire electrostatic chuck auxiliary mounting device can be rotated relative to the base 40, so as to adjust the circumferential direction of the electrostatic chuck 30, and the alignment of the connecting structure on the electrostatic chuck 30 and the connecting structure on the base 40.

[0115] The above-mentioned device can make the electrostatic chuck 30 seat on the base 40 in a stable and controllable manner, reduce the risk of collision, scratching and particle generation, and thus achieve the function of accurately and stably installing the electrostatic chuck 30. Moreover, the position of the electrostatic chuck 30 can be adjusted conveniently, so that it can quickly and reliably meet the installation requirements, and the installation efficiency and accuracy are improved.

[0116] The embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts between the embodiments can be referred to each other.

[0117] The above description is only a description of the preferred embodiments of the present application, and does not limit the scope of the present application. Any modification or modification made by a person skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. An electrostatic chuck-assisted installation device, characterized in that, include: Adjustment unit and fixing unit; The adjustment unit is connected to the fixing unit. The adjustment unit is used to fix the electrostatic chuck and drive the electrostatic chuck to move along the axial direction of the electrostatic chuck. The fixing unit is used to fix it to the base, and the central axis of the electrostatic chuck fixed by the adjustment unit is collinear with the central axis of the base.

2. The electrostatic chuck-assisted installation device as described in claim 1, characterized in that, When the fixing unit is fixed to the base, the central axis of the fixing unit is collinear with the central axis of the base; When the adjustment unit fixes the electrostatic chuck, the central axis of the electrostatic chuck is collinear with the central axis of the fixing unit.

3. The electrostatic chuck-assisted installation device as described in claim 2, characterized in that, The fixing unit includes a fixing base and multiple clamping components. The fixing base is provided with a clamping cavity for accommodating the base. Each clamping component is disposed on the fixing base and arranged around the central axis of the fixing unit. Each clamping component is used to clamp the outer periphery of the base, such that the central axis of the base is collinear with the central axis of the fixing unit.

4. The electrostatic chuck-assisted installation device as described in claim 3, characterized in that, The fixed base includes a first ring body and a second ring body; The first ring body and the second ring body are coaxially arranged, and the first ring body is rotatably disposed on the second ring body about its own central axis. The inner cavity of the first ring body and / or the inner cavity of the second ring body serve as the clamping cavity. The clamping assembly includes a clamping arm, one end of which is rotatably connected to the first ring body, the other end of which serves as a clamping end, and the middle part of which is disposed in the second ring body; When the first ring rotates relative to the second ring, the clamping arms of each clamping assembly are used to drive the clamping arms to rotate relative to the first ring, and cause the clamping ends to move along the center of the first ring to clamp the base, or to move away from the center of the first ring to release the base.

5. The electrostatic chuck-assisted installation device as described in claim 4, characterized in that, The clamping assembly further includes a clamping arm support, which is rotatably disposed on the second ring body; the clamping arm support is provided with a sliding hole, through which the clamping arm can slide. And / or, the clamping assembly further includes a rotating wheel, which is rotatably disposed on the clamping arm, and the axis of rotation of the rotating wheel is parallel to the central axis of the first ring body.

6. The electrostatic chuck-assisted installation device as described in claim 4, characterized in that, The fixing unit also includes a clamping drive assembly; The clamping drive assembly includes a first structural component, a second structural component, and an adjusting lead screw; Of the first structural member and the second structural member, one is rotatably disposed on the first ring body, and the other is rotatably disposed on the second ring body; The adjusting screw is threadedly connected to the first structural component and the second structural component. When the adjusting screw rotates, it is used to adjust the distance between the first structural component and the second structural component to drive the first ring body to rotate relative to the second ring body.

7. The electrostatic chuck-assisted installation device as described in claim 1, characterized in that, The adjustment unit is also used to adjust the angle of the central axis of the electrostatic chuck.

8. The electrostatic chuck-assisted installation device as described in claim 7, characterized in that, The adjustment unit includes an adjustment base, a connector, and a lifting component; The connector is disposed on the adjusting base for connecting the electrostatic chuck; The lifting component is connected between the adjusting seat and the fixing unit to drive the adjusting seat to move relative to the fixing unit along the axial direction of the electrostatic chuck.

9. The electrostatic chuck-assisted installation device as described in claim 8, characterized in that, The lifting component includes multiple lifting screws, which are rotatably mounted on the adjusting seat and threadedly connected to the fixing unit.

10. The electrostatic chuck-assisted installation device as described in claim 9, characterized in that, The adjustment unit also includes multiple first gears and second gears; The first gear is rotatably mounted on the adjusting seat, and the first gear is coaxially connected to the lifting screw; The second gear is rotatably and detachably disposed on the adjusting seat, and the second gear meshes with each of the first gears.

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