Outer circle machining method for tantalum target material

Abstract

The invention provides an outer circle machining method of a tantalum target material. The outer circle machining method comprises the steps that a VCGT160404 cutter is adopted for conducting outer circle cutting on a tantalum target material; wherein the machining path of the outer circle cutting is transverse cutting; and in the outer circle cutting process, the VCGT160404 cutter is replaced once after advancing by a preset distance in the advancing direction of the VCGT160404 cutter until the target tantalum target material is obtained. According to the outer circle machining method of the tantalum target material, the VCGT160404 cutter is adopted to conduct outer circle cutting on the tantalum target material, and in the outer circle cutting process, the VCGT160404 cutter is replaced once after advancing by the preset distance every time, so that the worn VCGT160404 cutter can be replaced in time, the problems of machining resistance increase and product deformation caused by cutter wear are avoided, and the machining quality is improved. And outer circle machining can be continuously carried out until the target tantalum target material is obtained.

Description

Technical Field

[0001] This invention belongs to the field of tantalum target processing technology, and relates to a method for processing the outer circle of tantalum targets. Background Technology

[0002] Tantalum is a rare metal material with a high melting point that is difficult to process. Its hardness can be increased by 3 times after high-temperature sintering, which makes it more difficult to machine, especially for external cylindrical cutting.

[0003] The conventional process for machining the outer diameter of tantalum targets involves using a CCGX120404 tool to cut laterally from the outside in, without interruption. However, this conventional process is prone to increased machining resistance and product deformation due to tool wear, which can ultimately prevent further machining. Therefore, there is an urgent need for a solution to address these issues. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a method for machining the outer diameter of tantalum targets. The method utilizes a VCGT160404 cutting tool for outer diameter cutting of the tantalum target. The VCGT160404 tool has a large clearance angle, resulting in low machining resistance, which is beneficial for machining the outer diameter of tantalum targets with high hardness. Furthermore, during the outer diameter cutting process, the VCGT160404 tool is replaced after advancing a predetermined distance along its forward direction. This ensures timely replacement of worn VCGT160404 tools, preventing increased machining resistance and product deformation due to tool wear, and allowing continuous outer diameter machining until the target tantalum target is obtained.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] In a first aspect, the present invention provides a method for machining the outer diameter of a tantalum target, the method comprising:

[0007] The outer diameter of the tantalum target was cut using a VCGT160404 tool.

[0008] The machining path for the outer circle cutting is transverse cutting. During the outer circle cutting process, the VCGT160404 tool is replaced every preset distance along the forward direction of the tool until the target tantalum target is obtained.

[0009] It should be noted that "replacing the VCGT160404 tool once" means replacing the used VCGT160404 tool with a new VCGT160404 tool.

[0010] This invention provides a method for machining the outer diameter of a tantalum target. A VCGT160404 tool is used for outer diameter cutting of the tantalum target. The VCGT160404 tool has a large clearance angle, resulting in low machining resistance, which is beneficial for machining the outer diameter of tantalum targets with high hardness. Furthermore, during the outer diameter cutting process, the VCGT160404 tool is replaced after advancing a predetermined distance along its forward direction. This allows for timely replacement of worn VCGT160404 tools, preventing increased machining resistance and product deformation due to tool wear, and enabling continuous outer diameter machining until the target tantalum target is obtained.

[0011] Preferably, the tantalum target is prepared by a sintering process.

[0012] For example, the sintering process includes: sealing and sintering tantalum powder under high temperature and high pressure to obtain a tantalum target. The hardness of the tantalum target obtained by the sintering process is three times that of the smelting process.

[0013] Preferably, the Vickers hardness of the tantalum target is 250-320 HV, for example, it can be 250 HV, 260 HV, 270 HV, 280 HV, 290 HV, 300 HV, 310 HV or 320 HV, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0014] The tantalum sputtering outer diameter machining method provided by this invention is applicable to machining tantalum sputtering materials with a Vickers hardness of 250-320HV.

[0015] Preferably, the VCGT160404 cutting tool is made of cemented carbide.

[0016] Preferably, the VCGT160404 tool is a detachable tool.

[0017] Preferably, the VCGT160404 tool is mounted on a tool base; and the tool base is connected to a moving mechanism for driving the tool base and the VCGT160404 tool forward or backward.

[0018] In this invention, the VCGT160404 tool is a detachable tool, specifically meaning that the VCGT160404 tool can be detached from the tool base.

[0019] Preferably, the VCGT160404 cutting tool is rhomboid in shape.

[0020] Preferably, the parameters of the VCGT160404 tool include: a cutting edge angle of 107.3° and a tool tip radius of 0.4.

[0021] Preferably, the depth of cut of the VCGT160404 tool when performing external diameter cutting is 0.08-0.12mm, for example, it can be 0.08mm, 0.085mm, 0.09mm, 0.095mm, 0.1mm, 0.105mm, 0.11mm, 0.115mm or 0.12mm, etc., but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0022] In this invention, when the VCGT160404 tool is used for external diameter cutting, if the depth of cut is too small, the machining efficiency will be low; if the depth of cut is too large, the tool will be prone to wear.

[0023] Preferably, the feed rate of the VCGT160404 tool when performing external cylindrical cutting is 0.05-0.07 mm / r, for example, it can be 0.05 mm / r, 0.055 mm / r, 0.06 mm / r, 0.065 mm / r or 0.07 mm / r, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0024] In this invention, when the VCGT160404 tool is used for external cylindrical cutting, if the feed rate is too small, the machining efficiency will be low; if the feed rate is too large, the tool will be prone to wear.

[0025] Preferably, the rotational speed of the VCGT160404 tool during external diameter cutting is 100-120 r / s, for example, it can be 100 r / s, 101 r / s, 102 r / s, 103 r / s, 104 r / s, 105 r / s, 106 r / s, 107 r / s, 108 r / s, 109 r / s, 110 r / s, 111 r / s, 112 r / s, 113 r / s, 114 r / s, 115 r / s, 116 r / s, 117 r / s, 118 r / s, 119 r / s or 120 r / s, but it is not limited to the listed values, and other unlisted values ​​within this range are also applicable.

[0026] In this invention, when the VCGT160404 tool is used for external cylindrical cutting, if the tool speed is too low, the machining efficiency will be low; if the tool speed is too high, the tool will be prone to wear.

[0027] In this invention, when the parameters of the VCGT160404 tool for external diameter cutting simultaneously meet the requirements of a depth of cut of 0.08-0.12 mm, a feed rate of 0.05-0.07 mm / r, and a rotational speed of 100-120 r / s, a target tantalum target with a satisfactory appearance can be obtained.

[0028] Preferably, the preset distance is 2-3mm, such as 2mm, 2.1mm, 2.2mm, 2.3mm, 2.4mm, 2.5mm, 2.6mm, 2.7mm, 2.8mm, 2.9mm or 3mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0029] In this invention, if the preset distance is too small during the external diameter cutting process, the processing efficiency will be low; if the preset distance is too large, the tool will be easily worn.

[0030] Preferably, when the VCGT160404 tool is used for external diameter cutting, it is cooled by a water-soluble cutting fluid.

[0031] The numerical range described in this invention includes not only the point values ​​listed above, but also any point values ​​within the numerical ranges not listed above. Due to space limitations and for the sake of brevity, this invention will not exhaustively list all the specific point values ​​included in the range.

[0032] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0033] This invention provides a method for machining the outer diameter of a tantalum target. A VCGT160404 tool is used for outer diameter cutting of the tantalum target. The VCGT160404 tool has a large clearance angle, resulting in low machining resistance, which is beneficial for machining the outer diameter of tantalum targets with high hardness. Furthermore, during the outer diameter cutting process, the VCGT160404 tool is replaced after advancing a predetermined distance along its forward direction. This allows for timely replacement of worn VCGT160404 tools, preventing increased machining resistance and product deformation due to tool wear, and enabling continuous outer diameter machining until the target tantalum target is obtained. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the tantalum target and backplate provided in Embodiments 1-2 of the present invention;

[0035] Figure 2 A schematic diagram of the VCGT160404 cutting tool provided in Embodiments 1-2 of the present invention;

[0036] Figure 3 This is a schematic diagram of the VCGT160404 cutting tool and tool holder provided in Embodiments 1-2 of the present invention;

[0037] Figure 4 This is a schematic diagram of the CCGX120404 cutting tool provided in Comparative Examples 1 and 3 of the present invention;

[0038] Among them, 1-tantalum target; 2-backplate; 3-VCGT160404 cutting tool; 4-tool base. Detailed Implementation

[0039] The technical solution of the present invention will be further illustrated below through specific embodiments.

[0040] Example 1

[0041] This embodiment provides a method for machining the outer diameter of a tantalum target material, which specifically includes the following steps:

[0042] (1) Tantalum powder is sintered in a sealed manner at 1500℃ to obtain a cylindrical tantalum target 1 with a Vickers hardness of 300HV; one circular surface of the cylindrical tantalum target 1 is connected to and welded to the back plate 2 (e.g., Figure 1 (As shown), and clamp the back plate 2 with a fixture;

[0043] (2) Provide a detachable VCGT160404 tool 3, the structure of which is as follows: Figure 2 As shown, the VCGT160404 tool 3 is made of cemented carbide. It has a rhomboid shape, a cutting edge angle of 107.3°, and a tip radius of 0.4. It was purchased from SANTAK. The VCGT160404 tool 3 is mounted on the tool holder 4, as shown... Figure 3 As shown, the tool base 4 is connected to a moving mechanism to drive the tool base 4 and the VCGT160404 tool 3 forward or backward; the detachable VCGT160404 tool 3 is used to perform outer diameter cutting on the tantalum target 1, wherein the machining path of the outer diameter cutting is transverse cutting; the depth of cut of the VCGT160404 tool 3 during outer diameter cutting is 0.12mm, the feed rate is 0.07mm / r, and the rotational speed is 120r / s; water-soluble cutting fluid is used for cooling during the outer diameter cutting of the VCGT160404 tool 3; during the outer diameter cutting process, the VCGT160404 tool 3 moves towards the back plate 2 along the height direction of the tantalum target 1, and the direction of movement is as follows. Figure 1 As shown by the arrow in the image, advance the VCGT160404 tool 3 along its forward direction, then exit and replace the VCGT160404 tool 3 every 2mm until the target tantalum target is obtained.

[0044] Example 2

[0045] This embodiment provides a method for machining the outer diameter of a tantalum target material, which specifically includes the following steps:

[0046] (1) Tantalum powder is sintered in a sealed manner at 1500℃ to obtain a cylindrical tantalum target 1 with a Vickers hardness of 300HV; one circular surface of the cylindrical tantalum target 1 is connected to and welded to the back plate 2 (e.g., Figure 1 (As shown), and clamp the back plate 2 with a fixture;

[0047] (2) Provide a detachable VCGT160404 tool 3, the structure of which is as follows: Figure 2 As shown, the VCGT160404 tool 3 is made of cemented carbide. It has a rhomboid shape, a cutting edge angle of 107.3°, and a tip radius of 0.4. It was purchased from SANTAK. The VCGT160404 tool 3 is mounted on the tool holder 4, as shown... Figure 3 As shown, the tool base 4 is connected to a moving mechanism to drive the tool base 4 and the VCGT160404 tool 3 forward or backward; the detachable VCGT160404 tool 3 is used to perform outer diameter cutting on the tantalum target 1, wherein the machining path of the outer diameter cutting is transverse cutting; the depth of cut of the VCGT160404 tool 3 during outer diameter cutting is 0.08mm, the feed rate is 0.05mm / r, and the rotational speed is 100r / s; water-soluble cutting fluid is used for cooling during the outer diameter cutting of the VCGT160404 tool 3; during the outer diameter cutting process, the VCGT160404 tool 3 moves towards the back plate 2 along the height direction of the tantalum target 1, and the direction of movement is as follows. Figure 1 As shown by the arrow in the image, along the forward direction of the VCGT160404 tool 3, replace the VCGT160404 tool 3 every 3mm until the target tantalum target material is obtained.

[0048] As can be seen from Examples 1 and 2, the outer diameter machining method of the tantalum target 1 provided by the present invention uses a VCGT160404 tool 3 to perform outer diameter cutting on the tantalum target 1. The VCGT160404 tool 3 has a large back angle and low machining resistance, which is beneficial for cutting the outer diameter of the tantalum target 1 with high hardness. In addition, during the outer diameter cutting of the tantalum target 1, the VCGT160404 tool 3 is replaced after each preset distance along the forward direction. This can replace the worn VCGT160404 tool 3 in time, which can avoid the problem of increased machining resistance and product deformation caused by tool wear, and can continuously perform outer diameter machining until the target tantalum target is obtained.

[0049] Example 3

[0050] The difference between this embodiment and Embodiment 1 is that the depth of cut of the VCGT160404 tool when performing external diameter cutting is 0.07mm.

[0051] The remaining methods and parameters are consistent with those in Example 1.

[0052] Example 4

[0053] The difference between this embodiment and Embodiment 1 is that the depth of cut of the VCGT160404 tool when performing external diameter cutting is 0.13mm.

[0054] The remaining methods and parameters are consistent with those in Example 1.

[0055] Comparing Examples 1 and 3-4, it can be seen that when the VCGT160404 tool performs external diameter cutting, if the depth of cut is too small, the machining efficiency is low; if the depth of cut is too large, the tool is prone to wear and needs to be replaced frequently.

[0056] Example 5

[0057] The difference between this embodiment and Embodiment 1 is that the rotational speed of the VCGT160404 tool during external diameter cutting is 90 r / s.

[0058] The remaining methods and parameters are consistent with those in Example 1.

[0059] Example 6

[0060] The difference between this embodiment and Embodiment 1 is that the rotational speed of the VCGT160404 tool during external diameter cutting is 130 r / s.

[0061] The remaining methods and parameters are consistent with those in Example 1.

[0062] Comparing Examples 1 and 5-6, it can be seen that when the VCGT160404 tool performs external diameter cutting, if the tool speed is too low, the machining efficiency is low; if the tool speed is too high, the tool is prone to wear and needs to be replaced frequently.

[0063] Example 7

[0064] The difference between this embodiment and Embodiment 1 is that the feed rate of the VCGT160404 tool when performing external diameter cutting is 0.04 mm / r.

[0065] The remaining methods and parameters are consistent with those in Example 1.

[0066] Example 8

[0067] The difference between this embodiment and Embodiment 1 is that the feed rate of the VCGT160404 tool when performing external diameter cutting is 0.08 mm / r.

[0068] The remaining methods and parameters are consistent with those in Example 1.

[0069] Comparing Examples 1 and 7-8, it can be seen that when the VCGT160404 tool performs external diameter cutting, if the feed rate is too small, the machining efficiency is low; if the feed rate is too large, the tool is prone to wear and needs to be replaced frequently.

[0070] Example 9

[0071] The difference between this embodiment and Embodiment 1 is that the VCGT160404 tool is replaced every 1mm of advancement.

[0072] The remaining methods and parameters are consistent with those in Example 1.

[0073] Example 10

[0074] The difference between this embodiment and Embodiment 1 is that the VCGT160404 tool is replaced every 4mm of advancement.

[0075] The remaining methods and parameters are consistent with those in Example 1.

[0076] Comparing Examples 1 and 9-10, it can be seen that during the external diameter cutting process, if the preset distance is too small, the processing efficiency is low; if the preset distance is too large, the tool is easily worn and needs to be replaced frequently.

[0077] Comparative Example 1

[0078] The difference between this comparative example and Example 1 is that the VCGT160404 tool is replaced with a CCGX120404 tool, such as... Figure 4 As shown, the tool was purchased from SANTAK; at the same time, the tool was not changed during the external diameter cutting process and the same tool was used continuously, which caused the product to deform during the machining process and made it impossible to continue machining.

[0079] The remaining methods and parameters are consistent with those in Example 1.

[0080] Comparing Example 1 and Comparative Example 1, it can be seen that conventional external cylindrical machining methods use the same CCGX120404 tool for continuous machining, which easily leads to product deformation during the machining process, making it impossible to obtain the target tantalum target material. However, the external cylindrical machining method provided by the present invention can be carried out smoothly, obtaining the target tantalum target material.

[0081] Comparative Example 2

[0082] The difference between this comparative example and Example 1 is that the VCGT160404 tool is not changed during the external diameter cutting process; the same VCGT160404 tool is used throughout.

[0083] The remaining methods and parameters are consistent with those in Example 1.

[0084] Comparing Example 1 and Comparative Example 2, it can be seen that if the same VCGT160404 tool is used continuously during the external diameter cutting process, the machining resistance will increase and the product will be deformed due to tool wear, making it impossible to obtain the target tantalum target material.

[0085] Comparative Example 3

[0086] The difference between this comparative example and Example 1 is that the VCGT160404 tool is replaced with a CCGX120404 tool, such as... Figure 4 As shown, it was purchased from Santak.

[0087] The remaining methods and parameters are consistent with those in Example 1.

[0088] Comparing Example 1 and Comparative Example 3, it can be seen that if the CCGX120404 tool is used for external diameter cutting, the clearance angle of this tool is too small, and even slight wear will lead to increased cutting resistance, making cutting impossible. In contrast, the VCGT160404 tool used in this invention has a larger clearance angle, resulting in lower machining resistance, which is beneficial for external diameter cutting of tantalum targets with high hardness.

[0089] The above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A method for machining the outer diameter of a tantalum target, characterized in that, The outer diameter machining method includes: The outer diameter of the tantalum target was cut using a VCGT160404 tool. The machining path for the outer circle cutting is transverse cutting. During the outer circle cutting process, the VCGT160404 tool is replaced every preset distance along the forward direction of the tool until the target tantalum target is obtained.

2. The method for machining an outer circle according to claim 1, characterized in that, The tantalum target material is prepared by a sintering process; Preferably, the Vickers hardness of the tantalum target is 250-320 HV.

3. The method for machining an outer circle according to claim 1 or 2, characterized in that, The VCGT160404 cutting tool is made of cemented carbide.

4. The method for machining an outer circle according to any one of claims 1-3, characterized in that, The VCGT160404 tool is a detachable tool.

5. The method for machining an outer diameter according to any one of claims 1-4, characterized in that, The VCGT160404 cutting tool is rhomboid in shape.

6. The method for machining an outer diameter according to any one of claims 1-5, characterized in that, The depth of cut of the VCGT160404 tool when performing external diameter cutting is 0.08-0.12mm.

7. The method for machining an outer diameter according to any one of claims 1-6, characterized in that, The feed rate of the VCGT160404 tool when performing external diameter cutting is 0.05-0.07 mm / r.

8. The method for machining an outer diameter according to any one of claims 1-7, characterized in that, The VCGT160404 tool operates at a rotational speed of 100-120 r / s when performing external cylindrical cutting.

9. The method for machining an outer diameter according to any one of claims 1-8, characterized in that, The preset distance is 2-3mm.

10. The method for machining an outer diameter according to any one of claims 1-9, characterized in that, When the VCGT160404 tool is used for external diameter cutting, it is cooled by water-soluble cutting fluid.

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