Ultra-short pulse laser welding system and method for welding composite materials
By using an ultrashort pulse laser welding system with a laser beam of 50–500 fs and precise scanning control, the problem of insufficient welding strength of composite materials has been solved, achieving high-precision transparent welding and a small heat-affected zone.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2026-03-27
AI Technical Summary
Existing technologies are insufficient to effectively improve the welding strength of composite materials, especially in glass welding. Traditional welding methods tend to result in thermal deformation and large heat-affected zones, making it difficult to achieve high-precision transparent welding.
An ultrashort pulse laser welding system is used, including a laser generation module, a beam splitting module, a measurement module, an analysis module, a galvanometer scanning module, and a load-bearing module. The laser beam has a pulse width of 50–500 fs, a repetition frequency of 0.5–10 GHz, and a pulse energy of 100–1000 μJ. Composite materials are welded by precisely controlling the laser parameters and scanning angle.
It improves the strength and precision of composite material welds, reduces the heat-affected zone, and achieves high-precision transparent welding results.
Smart Images
Figure CN121732979A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to a welding system and method, in particular to an ultra-short pulse laser welding system and method for welding composite materials. BACKGROUND
[0002] Glass has been an indispensable material in industry, and its potential applications include optical components, microelectronics, microfluidics, and display technology. In recent years, many products have been miniaturized to the micron and nanometer level, which means that the precision requirements for glass processing will be more stringent than in the past.
[0003] Femtosecond laser is a very important technical breakthrough in recent years. Femtosecond laser refers to laser pulse width in the order of femtosecond (fs, 10 -15 -12 seconds). Laser beam can generate extremely high power density through focusing, and the heat-affected zone is extremely small when femtosecond laser is used for material processing, and it can process the inside of transparent materials. Welding is one of the most popular technologies in laser applications, and when femtosecond laser is used for welding, it has many advantages, such as no need for prior thermal processing, high spatial resolution, no significant thermal deformation, melting and recrystallization only near the focal point, etc. In addition, compared with traditional welding, femtosecond laser glass welding can effectively realize complete transparency of the welding point, which is absolutely a great leap for glass welding.
[0004] Therefore, how to use femtosecond laser to improve the strength of glass welding has become the direction of the industry. SUMMARY
[0005] The technical problem to be solved by the present application is to provide an ultra-short pulse laser welding system and method for welding composite materials to improve the welding strength of composite materials.
[0006] To solve the above technical problems, one of the technical solutions adopted by the present application is to provide an ultra-short pulse laser welding system for welding composite materials, which comprises a laser generating module, a first laser light splitting module, a laser measuring module, a laser analyzing module, a laser galvo scanning module and a bearing module. The laser generating module is used to provide a laser beam. The first laser light splitting module is used to receive the laser beam to distinguish the laser beam into a first penetrating laser beam and a first reflected laser beam. The laser measuring module is used to receive the first reflected laser beam to convert the first reflected laser beam into laser measuring information. The laser analyzing module is electrically connected between the laser measuring module and the laser generating module, and is used to analyze the laser measuring information to obtain laser parameters related to the first reflected laser beam, and transmit the laser parameters to the laser generating module. The laser galvo scanning module is used to reflect the first penetrating laser beam according to a plurality of rotation angles of the laser galvo scanning module to reflect the first penetrating laser beam to the composite material. The bearing module is used to bear the composite material. Wherein, the laser generating module, the first laser light splitting module, the laser measuring module, the laser analyzing module, the laser galvo scanning module and the bearing module are arranged in the same optical path, the pulse width of the laser beam is between 50-500 fs, the repetition frequency of the laser beam is between 0.5-10 GHz, and the pulse energy of the laser beam is between 100-1000 μJ.
[0007] To solve the above technical problems, another technical solution adopted by the present application is to provide a method for welding composite materials, which comprises: providing a laser beam; receiving the laser beam to distinguish the laser beam into a first penetrating laser beam and a first reflected laser beam; receiving the first reflected laser beam to convert the first reflected laser beam into laser measuring information; analyzing the laser measuring information to obtain laser parameters related to the first reflected laser beam; and reflecting the first penetrating laser beam according to a plurality of rotation angles of the laser galvo scanning module to reflect the first penetrating laser beam to the composite material, the pulse width of the laser beam is between 50-500 fs, the repetition frequency of the laser beam is between 0.5-10 GHz, and the pulse energy of the laser beam is between 100-1000 μJ.
[0008] One of the beneficial effects of the present application is that the ultra-short pulse laser welding system and method disclosed in the embodiments of the present application use a laser beam with a pulse width of 70 fs to weld the welding position of the composite material, thereby improving the welding strength of the welding position of the composite material.
[0009] The other effects and embodiments of the present application will be described in detail below with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS
[0010] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the accompanying drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the accompanying drawings in the following description only represent some embodiments described in the present application, and for those skilled in the art, other drawings can also be obtained without creative effort based on these drawings.
[0011] Figure 1 is a method flow chart for welding composite materials for the first embodiment;
[0012] Figure 2 is a schematic structural diagram of an ultra-short pulse laser welding system for welding composite materials of the first embodiment of the present application;
[0013] Figure 3 is a schematic structural diagram of an ultra-short pulse laser welding system for welding composite materials of the second embodiment of the present application;
[0014] Figure 4 is a schematic structural diagram of an ultra-short pulse laser welding system for welding composite materials of the third embodiment of the present application;
[0015] Figure 5 is a schematic structural diagram of a monitoring module for the ultra-short pulse laser welding system of the present application;
[0016] Figure 6 is a functional block diagram of an artificial intelligence system for the ultra-short pulse laser welding system of the present application;
[0017] Figure 7 is a schematic structural diagram of a cleaning module for the ultra-short pulse laser welding system of the present application.
[0018] Symbol explanation
[0019] 200, 300A, 300B: ultra-short pulse laser welding system
[0020] 202, 302: laser generation module 204: first laser light splitting module
[0021] 206, 308: laser measurement module 208, 310: laser analysis module
[0022] 210, 304: laser galvanometer scanning module 212, 312: bearing module
[0023] 214, 314: composite material 216, 316: welding site
[0024] 218: second laser light splitting module 306: laser light splitting module
[0025] 400: monitoring module 402: light emitting unit
[0026] 404: first light receiving unit 406: second light receiving unit
[0027] 408: image device 410: control device
[0028] 500: artificial intelligence system 502: database unit
[0029] 504: learning training unit 506: parameter optimization setting unit
[0030] 508: monitoring module setting unit 600: cleaning module
[0031] 602: gas source 604: gas nozzle
[0032] 606: cleaning substance L0, L1, L6: laser beam
[0033] L2: first penetrating laser beam L3: first reflected laser beam
[0034] L4: second penetrating laser beam L5: second reflected laser beam
[0035] L7: penetrating laser beam L8: reflected laser beam
[0036] La: reflected light Lb: penetrating light
[0037] M1, M2: laser measurement information P1, P2: laser parameters
[0038] V: translation speed S1-S5: steps DETAILED DESCRIPTION
[0039] The following is a description of the embodiments of the present application disclosed herein, which are related to "ultra-short pulse laser welding system and method for welding composite materials", by means of specific, concrete examples. Those skilled in the art can understand the advantages and effects of the present application from the disclosure herein. The present application can be implemented or applied by other different specific embodiments, and the details in the present specification can be modified and changed in various ways based on different viewpoints and applications, without departing from the concept of the present application. In addition, the drawings of the present application are only simple schematic illustrations, and are not depictions according to actual dimensions, as previously stated. The following embodiments will further illustrate the relevant technical content of the present application in detail, but the disclosed content is not intended to limit the scope of protection of the present application.
[0040] It should be understood that although the terms "first", "second", "third", etc. can be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein can include any combination of one or more associated listed items as appropriate.
[0041] Referring to Figure 1 , which is a schematic diagram of photoionization and avalanche effect of composite material (e.g., glass) under femtosecond laser irradiation. As shown in Figure 1 , when the ultra-short pulse laser is irradiated at high power density, nonlinear absorption will be generated inside the material. The so-called nonlinear absorption refers to the nonlinear relationship between the energy absorption of the material and the nth power of the laser power density, where n is the number of absorbed photons. Femtosecond laser enables electrons to have enough energy to generate photoionization and avalanche effect, causing electrons to absorb n photons to generate transitions, and then generate free electrons in the conduction band. The free electrons in the conduction band are further absorbed by multiple photon energies to reach higher energy levels, and collide with surrounding atoms to generate other electrons. After multiple collisions and energy absorption, a plasma cloud is generated, and is ejected from the surface. Therefore, when focusing the laser on the underlying glass, multiple water droplet-like structures will be generated between the glass and the glass.
[0042] First embodiment
[0043] Referring to Figure 1 and Figure 2 , the first embodiment of the present application is a schematic diagram of the structure of an ultra-short pulse laser welding system 200 for welding composite materials. The ultra-short pulse laser welding system 200 includes a laser generation module 202, a first laser light splitting module 204, a laser measurement module 206, a laser analysis module 208, a laser galvanometer scanning module 210, and a bearing module 212. The laser generation module 202, the first laser light splitting module 204, the laser measurement module 206, the laser analysis module 208, the laser galvanometer scanning module 210, and the bearing module 212 are arranged in the same optical path, but the present application is not limited thereto.
[0044] The laser generating module 202 is configured to provide a laser beam L1, and the first laser beam splitting module 204 is configured to receive the laser beam L1 to divide the laser beam L1 into a first penetrating laser beam L2 and a first reflected laser beam L3. For example, a beam exit port (not shown) of the laser generating module 202 can face the first laser beam splitting module 204, such that 95% to 99.9% of the energy of the laser beam L1 "projected from the beam exit port (not shown) of the laser generating module 202 to the first laser beam splitting module 204" can pass through the first laser beam splitting module 204 to generate the first penetrating laser beam L2 (i.e., the energy of the first penetrating laser beam L2 can be 95% to 99.9% of the energy of the laser beam L1), and such that 0.1% to 5% of the energy of the laser beam L1 "projected from the beam exit port (not shown) of the laser generating module 202 to the first laser beam splitting module 204" can be reflected by the first laser beam splitting module 204 to generate the first reflected laser beam L3 (i.e., the energy of the first reflected laser beam L3 can be 0.1% to 5% of the energy of the laser beam L1). In addition, the first laser beam splitting module 204 is adjacent to the laser generating module 202, the first laser beam splitting module 204 can be a flat beam splitter, the pulse width of the laser beam L1 is in the order of femtoseconds (fs, 10 -15 seconds), and is between 50 to 300 fs (e.g., any positive integer between 50 to 300 fs). In an embodiment, the pulse width of the laser beam L1 can be between 50 to 100 fs (e.g., any positive integer between 50 to 100 fs). However, the above-mentioned examples are only one possible embodiment and are not intended to limit the present application.
[0045] The laser measurement module 206 is configured to receive the first reflected laser beam L3 to convert the first reflected laser beam L3 into laser measurement information M1, wherein the laser measurement module 206 is adjacent to the first laser beam splitting module 204, and the laser measurement information M1 can be the reflection angle, pulse width, pulse energy, repetition frequency, etc. of the first reflected laser beam L3, but the present application is not limited thereto.
[0046] The laser analysis module 208 is electrically connected between the laser measurement module 206 and the laser generation module 202, and is used to analyze the laser measurement information M1 to obtain laser parameters P1 related to the first reflected laser beam L3, so as to transmit the laser parameters P1 to the laser generation module 202, so that the laser generation module 202 adjusts the laser beam L1 according to the laser parameters P1. Wherein the laser parameters P1 include the reflection angle, pulse width, pulse energy and repetition frequency of the first reflected laser beam L3, the laser beam L1 can be a tunable wavelength laser source, the pulse energy of the laser beam L1 is between 22-27μJ (for example, any positive integer between 22-27μJ), the repetition frequency of the laser beam L1 is between 100-2000KHz (for example, any positive integer between 100-2000KHz), so as to maintain a small heat affected zone (HAZ) and effectively improve the precision of laser welding.
[0047] The carrying module 212 is used to carry the composite material 214, and the laser galvanometer scanning module 210 is used to reflect the first penetrating laser beam L2 to the composite material 214 according to a plurality of rotation angles (for example, 0°, 30°, 60°, …) (not shown) of the laser galvanometer scanning module 210, that is, the laser galvanometer scanning module 210 generates a plurality of rotation angles by rotating, so that the laser galvanometer scanning module 210 reflects the first penetrating laser beam L2 at different angles of mirror surface to project to the composite material 214. Wherein the laser galvanometer scanning module 210 is adjacent to the first laser beam splitting module 204, but the present application is not limited thereto.
[0048] Therefore, when the pulse width of the laser beam L1 is 70fs, the first penetrating laser beam L2 contacts different angle mirror surfaces of the laser galvanometer scanning module 210 to project to the welding position 216 of the composite material 214 at different angle reflection optical paths, that is, the first penetrating laser beam L2 reflected by the different angle mirror surfaces of the laser galvanometer scanning module 210 projects to the welding position 216 of the composite material 214 at a translation speed V, so that the welding position 216 of the composite material 214 is welded. Wherein the translation speed V is between 30-3000mm / s (for example, any positive integer between 30-3000mm / s), the composite material 214 includes at least two substrates to be welded, each substrate can be a glass, a metal, a ceramic or a semiconductor wafer, and the first penetrating laser beam L2 is reflected to the welding position 216 between the at least two substrates, but the present application is not limited thereto.
[0049] Therefore, the ultrashort pulse laser welding system 200 of the first embodiment of the present application can improve the welding strength of the welding portion 216 of the composite material 214 by using the laser beam L1 with a pulse width of 70 fs to weld the welding portion 216 of the composite material 214.
[0050] In addition, the method for welding the composite material of the first embodiment includes: step S1, the laser generation module 202 provides the laser beam L1; step S2, the first laser beam splitting module 204 receives the laser beam L1 to distinguish the laser beam L1 into the first penetrating laser beam L2 and the first reflected laser beam L3; step S3, the laser measurement module 206 receives the first reflected laser beam L3 to convert the first reflected laser beam L3 into the laser measurement information M1; step S4, the laser analysis module 208 analyzes the laser measurement information M1 to obtain the laser parameter P1 related to the first reflected laser beam L3; and step S5, the laser galvanometer scanning module 210 reflects the first penetrating laser beam L2 according to the rotation angles of the laser galvanometer scanning module 210 to reflect the first penetrating laser beam L2 to the composite material 214.
[0051] Second embodiment
[0052] Please refer to Figure 3 The difference between the ultrashort pulse laser welding system 300A of the second embodiment of the present application and the ultrashort pulse laser welding system 200 is that the second laser beam splitting module 218 is selectively arranged on the optical path between the laser galvanometer scanning module 210 and the bearing module 212, and the rest components, structure and functional principle of the ultrashort pulse laser welding system 300A are the same as or similar to those of the ultrashort pulse laser welding system 200, which will not be repeated here.
[0053] The second laser beam splitting module 218 is used to distinguish the reflected first penetrating laser beam L2 into a second penetrating laser beam L4 and a second reflected laser beam L5, and the second reflected laser beam L5 is transmitted to the laser measurement module 206. For example, the first penetrating laser beam L2 reflected by the laser generation module 202 is projected to the second laser beam splitting module 218, so that 95% to 99.9% of the energy of the reflected first penetrating laser beam L2 passes through the second laser beam splitting module 218 to generate the second penetrating laser beam L4 (that is, the energy of the second penetrating laser beam L4 can be 95% to 99.9% of the energy of the reflected first penetrating laser beam L2), and so that 0.1% to 5% of the energy of the reflected first penetrating laser beam L2 is reflected by the second laser beam splitting module 218 to generate the second reflected laser beam L5 (that is, the energy of the second reflected laser beam L5 can be 0.1% to 5% of the energy of the reflected first penetrating laser beam L2), so as to transmit the second reflected laser beam L5 to the laser measurement module 206. However, the above example is only one possible embodiment and is not intended to limit the present application.
[0054] Therefore, when the pulse width of the laser beam L1 is 70 fs, the laser galvanometer scanning module 210 performs a rotational motion to generate a plurality of rotation angles (not shown), so that the first penetrating laser beam L2 is projected to the second laser beam splitting module 218 at different angles of reflection optical paths by contacting different angle mirrors of the laser galvanometer scanning module 210, and the second penetrating laser beam L4 distinguished by the second laser beam splitting module 218 follows the first penetrating laser beam L2 at different angles of reflection optical paths to project to the welding portion 216 of the composite material 214 at different angles of optical paths, that is, the second penetrating laser beam L4 is projected to the welding portion 216 of the composite material 214 according to the translation speed V of the reflected first penetrating laser beam L2, so that the welding portion 216 of the composite material 214 is welded. Wherein, the translation speed V is between 30 to 3000 mm / s (for example, any positive integer between 30 to 3000 mm / s), the composite material 214 includes at least two substrates to be welded, each substrate can be a glass, a metal, a ceramic or a semiconductor wafer, and the first penetrating laser beam L2 is reflected to the welding portion 216 between the at least two substrates, but the present application is not limited thereto.
[0055] Therefore, when the pulse width of the laser beam L1 is 70 fs, the laser galvanometer scanning module 210 performs a rotational motion to generate a plurality of rotation angles (not shown), so that the first penetrating laser beam L2 is projected to the second laser beam splitting module 218 at different angles of reflection optical paths by contacting different angle mirrors of the laser galvanometer scanning module 210, and the second penetrating laser beam L4 distinguished by the second laser beam splitting module 218 follows the first penetrating laser beam L2 at different angles of reflection optical paths to project to the welding portion 216 of the composite material 214 at different angles of optical paths, that is, the second penetrating laser beam L4 is projected to the welding portion 216 of the composite material 214 according to the translation speed V of the reflected first penetrating laser beam L2, so that the welding portion 216 of the composite material 214 is welded. Wherein, the translation speed V is between 30 to 3000 mm / s (for example, any positive integer between 30 to 3000 mm / s), the composite material 214 includes at least two substrates to be welded, each substrate can be a glass, a metal, a ceramic or a semiconductor wafer, and the first penetrating laser beam L2 is reflected to the welding portion 216 between the at least two substrates, but the present application is not limited thereto.
[0056] Third Embodiment
[0057] Please refer to Figure 4Fig. 3B is a structural schematic diagram of a third embodiment of the ultrashort pulse laser welding system 300B for welding composite materials according to the present application, the ultrashort pulse laser welding system 300B comprises a laser generating module 302, a laser galvanometer scanning module 304, a laser beam splitting module 306, a laser measuring module 308, a laser analyzing module 310 and a carrying module 312, wherein the laser generating module 302, the laser galvanometer scanning module 304, the laser beam splitting module 306, the laser measuring module 308, the laser analyzing module 310 and the carrying module 312 are arranged in the same optical path, but the present application is not limited thereto.
[0058] The laser generating module 302 is used to provide a laser beam L6, and the laser galvanometer scanning module 304 is used to reflect the laser beam L6 according to a plurality of rotation angles (for example, 0°, 30°, 60°, …) (not shown) of the laser galvanometer scanning module 304, that is, the laser galvanometer scanning module 304 generates a plurality of rotation angles by rotating motion, so that the laser galvanometer scanning module 304 reflects the laser beam L6 with different angle mirrors. The pulse width of the laser beam L6 is in the femtosecond order and is between 50-300 fs (for example, any positive integer between 50-300 fs). In an embodiment, the pulse width of the laser beam L6 can be between 50-100 fs (for example, any positive integer between 50-100 fs), but the present application is not limited thereto.
[0059] The carrying module 312 is used to carry the composite material 314. The laser light splitting module 306 receives the reflected laser beam L6 and distinguishes the reflected laser beam L6 into the penetrating laser beam L7 and the reflected laser beam L8 to project the penetrating laser beam L7 to the composite material 314. For example, the reflected laser beam L6 reflected by the laser galvanometer scanning module 304 is projected to the laser light splitting module 306, so that 95% to 99.9% energy of the reflected laser beam L6 passes through the laser light splitting module 306 to generate the penetrating laser beam L7 (that is, the energy of the penetrating laser beam L7 can be 95% to 99.9% of the energy of the reflected laser beam L6), and so that 0.1% to 5% energy of the reflected laser beam L6 is reflected by the laser light splitting module 306 to generate the reflected laser beam L8 (that is, the energy of the reflected laser beam L8 can be 0.1% to 5% of the energy of the reflected laser beam L6) to project the penetrating laser beam L7 to the composite material 314. Wherein the laser light splitting module 306 is adjacent to the laser galvanometer scanning module 304, the laser beam L6 can be a tunable wavelength laser source, the pulse energy of the laser beam L6 is between 22 and 27 μJ (for example, any positive integer between 22 and 27 μJ), the repetition frequency of the laser beam L6 is between 100 and 2000 KHz (for example, any positive integer between 100 and 2000 KHz), thereby a small heat affected zone can be maintained and the precision of laser welding can be effectively improved. However, the above-mentioned example is only one possible embodiment and is not intended to limit the present application.
[0060] The laser measurement module 308 is used to receive the reflected laser beam L8 to convert the reflected laser beam L8 into laser measurement information M2, wherein the laser measurement module 308 is adjacent to the laser light splitting module 306, and the laser measurement information M2 can be the reflection angle, pulse width, pulse energy, repetition frequency, etc. of the reflected laser beam L8, but the present application is not limited thereto.
[0061] The laser analysis module 310 is electrically connected between the laser measurement module 308 and the laser generation module 302 and is used to analyze the laser measurement information M2 to obtain the laser parameter P2 related to the reflected laser beam L8, so as to transmit the laser parameter P2 to the laser generation module 302, so that the laser generation module 302 adjusts the laser beam L6 according to the laser parameter P2. Wherein the laser parameter P2 includes the reflection angle, pulse width, pulse energy, repetition frequency, etc. of the reflected laser beam L8, but the present application is not limited thereto.
[0062] Therefore, when the pulse width of the laser beam L6 is 70 fs, the laser beam L6 contacts different angle mirror surfaces of the laser galvanometer scanning module 304 to project to the laser beam splitting module 306 with different angle reflected optical paths, and the penetrated laser beam L7 distinguished by the laser beam splitting module 306 projects to the welding position 316 of the composite material 314 with different angle optical paths, that is, the penetrated laser beam L7 projects to the welding position 316 of the composite material 314 according to the translation speed V of the reflected laser beam L6, so that the welding position 316 of the composite material 314 is welded. Wherein, the translation speed V is between 30-3000 mm / s (for example, any positive integer between 30-3000 mm / s), the composite material 314 includes at least two substrates to be welded, each substrate can be a glass, a metal, a ceramic or a semiconductor wafer, and the penetrated laser beam L7 projects to the welding position 316 between the at least two substrates, but the application is not limited thereto.
[0063] After the welding position between the at least two substrates of the glass is welded by the femtosecond laser, the plasma is ejected from the bottom to melt a part of the upper glass first, and after cooling, the glass between the at least two substrates is recrystallized to form a water droplet structure. Therefore, the welded position of the composite material generates a plurality of water droplet structures, and the plurality of water droplet structures are closely arranged along the welding position in sequence (that is, the spacing between the plurality of water droplet structures arranged along the welding position in sequence is extremely small), which indicates that the effect of glass welding has been achieved. Therefore, the larger the water droplet structure and the greater the width of the water droplet structure, the stronger the adhesion of the glass and the stronger the welding strength.
[0064] Therefore, the ultrashort pulse laser welding system 300B of the third embodiment of the application can improve the welding strength of the welding position 316 of the composite material 314 by using the laser beam L6 with a pulse width of 70 fs to weld the welding position 316 of the composite material 314. However, the application is not limited to the above examples.
[0065] Further, the ultrashort pulse laser welding system of the application can further include a monitoring module 400. Please refer to Figure 5The monitoring module 400 can include a light emitting unit 402, a first light receiving unit 404, a second light receiving unit 406, an image device 408, and a control device 410. The light emitting unit 402, the first light receiving unit 404, the second light receiving unit 406, and the image device 408 are electrically connected to the control device 410. The light emitting unit 402 is located on the first side of the composite material and emits a laser beam L0 toward the composite material. The first light receiving unit 404 is located on the first side of the composite material and receives reflected light La reflected by the first laser beam passing through the composite material to generate a reflected light signal. The second light receiving unit 406 is located on the second side of the composite material and receives penetrating light Lb passing through the composite material to generate a penetrating light signal. The image device 408 is electrically connected to the first light receiving unit 404 and the second light receiving unit 406 to receive the reflected light La and the penetrating light Lb and generate a detection result.
[0066] Further, the monitoring module 400 can further include moving devices (not shown in the figure). For example, the first light receiving unit 404 is connected to a first moving device so that the first light receiving unit 404 can move in a three-dimensional space, the second light receiving unit 406 is connected to a second moving device so that the second light receiving unit 406 can move in a three-dimensional space, and the light emitting unit 402 is connected to a laser moving device so that the light emitting unit 402 can move in a three-dimensional space. In this way, the light emitting position of the light emitting unit 402 and the light receiving positions of the first light receiving unit 404 and the second light receiving unit 406 can be adjusted.
[0067] In an embodiment, the light emitting unit 402 can emit a first laser beam and a second laser beam toward the composite material, the first laser beam and the second laser beam have a wavelength range of 300-2000 nm (for example, any positive integer between 300 and 2000 nm), and the first laser beam and the second laser beam have a pulse width range of 50 fs to 50 ns (for example, any positive integer between 50 fs and 50 ns). The first light receiving unit 404 and the second light receiving unit 406 are optical wavefront sensors. The image device 408 is a waveform generator to generate a first detection waveform diagram and a second detection waveform diagram from the reflected light signal and the penetrating light signal received by the first light receiving unit 404 and the second light receiving unit 406.
[0068] In another embodiment, the first light receiving unit 404 and the second light receiving unit 406 are photoelastic sensors. The image device 408 generates a first stress distribution map and a second stress distribution map from the light signals received by the first light receiving unit 404 and the second light receiving unit 406. In one embodiment, the first light receiving unit 404 and the second light receiving unit 406 are laser vibrometers, and the image device 408 generates a waveform map from the reflected ultrasonic waves and the penetrating ultrasonic waves received by the first light receiving unit 404 and the second light receiving unit 406. In yet another embodiment, the first light receiving unit 404 and the second light receiving unit 406 are hyperspectral sensors, and the image device 408 generates a detection spectrum map from the penetrating light signals and the reflected light signals received by the first light receiving unit 404 and the second light receiving unit 406. In this embodiment, the spectral range received by the first light receiving unit 404 and the second light receiving unit 406 is 300 nm to 2500 nm (e.g., any positive integer between 300 and 2500 nm), and the spectrum is a continuous spectrum.
[0069] In another aspect, the ultrashort pulse laser welding system of the present application can further include an artificial intelligence system 500, which can be used for learning and pre-training of the welding parameters of the composite material, and can also be used for automatically selecting a suitable monitoring module 400 according to the characteristics of the composite material, and optimizing the setting of the monitoring parameters of the monitoring module 400. For example, the artificial intelligence system 500 can select a suitable monitoring module 400 according to the related data of the type, shape, size, thickness, and density of the composite material.
[0070] In detail, the artificial intelligence system 500 can at least include a database unit 502, a learning and training unit 504, a parameter optimization setting unit 506, and a monitoring module setting unit 508. The database unit 502 is used to store the related data of the composite material, such as the type, shape, size, thickness, and density of the composite material. In addition, the database unit 502 can be connected to the Internet through a wireless network unit (not shown), and can be further connected to a cloud platform to update the related data or provide a deep learning algorithm used by the learning and training unit 504. The learning and training unit 504 is connected to the database unit 502 and learns and pre-trains according to the related data in the database unit 502 through the deep learning algorithm. The parameter optimization setting unit 506 is connected to the database unit 502 and optimizes the setting of the welding parameters according to the related data of the type, shape, size, thickness, and density of the composite material. The monitoring module setting unit 508 is connected to the database unit 502 and selects a suitable monitoring module 400 according to the related data of the type, shape, size, thickness, and density of the composite material.
[0071] In addition, the monitoring module 400 can generate laser light, such as linear laser light or planar laser light, by the light emitting unit 402 through at least one optical component. In this way, during the monitoring of the composite material using the monitoring module 400, the composite material can be scanned using linear laser light or planar laser light, thereby increasing the monitoring efficiency. The monitoring module 400 can also use laser light with different delay times to detect the morphological parameters of the composite material, thereby monitoring the welding state of the composite material in real time. Further, the laser light generating module 302 can be adjusted according to the welding state of the composite material.
[0072] The ultrashort pulse laser welding system of the present application can further include a cleaning module 600, as shown in FIG. 6. Figure 7 The cleaning module 600 can be disposed above the carrier module 312 or adjacent to the carrier module 312. The present application does not particularly limit the arrangement of the cleaning module 600. The cleaning module 600 can at least include a gas source 602 for storing cleaning substances 606 and a gas nozzle 604 for supplying the cleaning substances 606 to the carrier module 312 or the composite material. For example, the gas source 602 stores liquid carbon dioxide and supplies the liquid carbon dioxide to the gas nozzle 604 at a pressure of between about 700 psi and about 900 psi (e.g., any positive integer between 700 psi and 900 psi), so that the liquid carbon dioxide undergoes isenthalpic expansion into a solid carbon dioxide particle stream when exiting the gas nozzle 604 to remove impurities from the carrier module 312 or the composite material. In an embodiment, the distance between the gas nozzle 604 and the composite material can be about 0.5 inches to about 2 inches (e.g., any positive integer between 0.5 inches and 2 inches). In an embodiment, the gas nozzle 604 and the composite material can have an inclination angle of about 15 degrees to 45 degrees (e.g., any positive integer between 15 degrees and 45 degrees) to avoid the momentum of the carbon dioxide particle stream being too high to damage the composite material.
[0073] Advantages of the embodiments of the present application
[0074] In summary, under the premise that the structure of the composite material is not damaged by excessive heat, the welding strength is inversely proportional to the translation speed, and the welding strength is proportional to the repetition frequency, the pulse energy, and the width of the water droplet structure at the welding site. If the same conditions are used (i.e., the repetition frequency of the 70 fs and 300 fs laser beams is 400 Hz, the pulse energy is 24.84 μJ, and the translation speed is 50 mm / s), the welding strength of the 70 fs laser beam is five times that of the 300 fs laser beam, which has a certain degree of advantage in the welding part. Therefore, the ultrashort pulse laser welding system and method disclosed in the embodiments of the present application can improve the welding strength of the welding site of the composite material by using a laser beam with a pulse width of 70 fs to weld the welding site of the composite material.
[0075] In addition, the ultrashort pulse laser welding system and method provided by the application can be used for welding composite materials such as glass-to-glass, glass-to-metal, glass-to-ceramic and glass-to-silicon wafer (silicon chip), and can be applied to 5G power components or semiconductor packaging TGV / TSV.
[0076] Furthermore, the composite material (for example, glass) used in the application has the advantages of low electromagnetic signal shielding, high hardness, low cost, light weight and the like, so that in recent years it has gradually become the material of 3C panels and camera modules, so the value of using femtosecond laser to weld glass is correspondingly improved, the processing efficiency is improved, and the economic cost is reduced, so it has a broad prospect.
[0077] The above-mentioned embodiments and / or implementations are only used to illustrate the preferred embodiments and / or implementations of the application, and do not limit the implementation of the application in any form, and any person skilled in the art can make some changes or modifications to other equivalent embodiments without departing from the technical means disclosed in the application, but should be regarded as the same technology or embodiment as the application.
Claims
1. An ultra-short pulsed laser welding system for welding composite materials, characterized in that, The ultrashort pulse laser welding system for welding composite material comprises: a laser generating module for providing a laser beam; a first laser beam splitting module for receiving the laser beam to distinguish the laser beam into a first penetrating laser beam and a first reflected laser beam; a laser measuring module for receiving the first reflected laser beam to convert the first reflected laser beam into a laser measuring information; a laser analyzing module electrically connected between the laser measuring module and the laser generating module, and used for analyzing the laser measuring information to obtain a laser parameter related to the first reflected laser beam, and transmitting the laser parameter to the laser generating module; a laser galvanometer scanning module for reflecting the first penetrating laser beam according to a plurality of rotation angles of the laser galvanometer scanning module to reflect the first penetrating laser beam to the composite material; a bearing module for bearing the composite material; and a monitoring module for monitoring a welding state of the composite material; wherein the laser generating module, the first laser beam splitting module, the laser measuring module, the laser analyzing module, the laser galvanometer scanning module and the bearing module are arranged in the same optical path, the pulse width of the laser beam is between 50-500 fs, the repetition frequency of the laser beam is between 0.5-10 GHz, and the pulse energy of the laser beam is between 100-1000 μJ.
2. The ultra-short pulsed laser welding system of claim 1, wherein, The ultrashort pulse laser welding system further comprises a second laser beam splitting module for distinguishing the reflected first penetrating laser beam into a second penetrating laser beam and a second reflected laser beam, and the second reflected laser beam is transmitted to the laser measuring module; wherein the reflected first penetrating laser beam is projected to the composite material at a translation speed, and the translation speed is between 30-3000 mm / s; wherein the composite material comprises at least two substrates to be welded, each of the substrates is a glass, a metal, a ceramic or a semiconductor wafer, the first penetrating laser beam is reflected to a welding position between the at least two substrates, and the welding position has a plurality of water droplet structures, and the water droplet structures are closely arranged along the welding position in sequence.
3. The ultra-short pulsed laser welding system of claim 1, wherein, The monitoring module comprises a light emitting unit, a light receiving unit and a waveform generator, the light emitting unit emits a first laser beam and a second laser beam towards the composite material, the wavelength range of the first laser beam and the second laser beam is 300-2000 nm, the pulse width range of the first laser beam and the second laser beam is 50 fs to 50 ns, and the light receiving unit comprises a first light wavefront sensor and a second light wavefront sensor; wherein the first light wavefront sensor is located at a first side of the composite material, and the first light wavefront sensor receives a reflected light of the first laser beam reflected by the composite material to generate a reflected light signal; The second light wave front sensor is located on a second side of the composite material; the light emitting unit emits the second laser beam towards the composite material, and the second light wave front sensor receives a penetrating light of the second laser beam passing through the composite material to generate a penetrating light signal; The wave form generator is electrically connected with the first light wave front sensor and the second light wave front sensor to receive the reflected light signal and generate a first detection wave form diagram, and receive the penetrating light signal and generate a second detection wave form diagram; The first light wave front sensor is connected with a first moving device to move the first light wave front sensor in a three-dimensional space; The second light wave front sensor is connected with a second moving device to move the second light wave front sensor in the three-dimensional space; The laser generating module is connected with a laser moving device to move the laser generating module in the three-dimensional space.
4. The ultra-short pulsed laser welding system of claim 1, wherein, The monitoring module comprises a light emitting unit, a light receiving unit and an image device, the light emitting unit emits a first laser beam and a second laser beam towards the composite material, the wavelength range of the first laser beam and the second laser beam is 300-2000 nm, and the pulse width range of the first laser beam and the second laser beam is 50 fs to 50 ns, the light receiving unit comprises a first photoelastic sensor and a second photoelastic sensor; The first photoelastic sensor is located on a first side of the composite material, and the first photoelastic sensor receives a reflected light of the first laser beam reflected by the composite material to generate a reflected light signal; The second photoelastic sensor is located on a second side of the composite material; the light emitting unit emits the second laser beam towards the composite material, and the second photoelastic sensor receives a penetrating light of the second laser beam passing through the composite material to generate a penetrating light signal; The image device is electrically connected with the first photoelastic sensor and the second photoelastic sensor to receive the reflected light signal and generate a first stress distribution characteristic diagram, and receive the penetrating light signal and generate a second stress distribution characteristic diagram; The first photoelastic sensor is connected with a first moving device to move the first photoelastic sensor in a three-dimensional space; The second photoelastic sensor is connected with a second moving device to move the second photoelastic sensor in the three-dimensional space; The laser generating module is connected with a laser moving device to move the laser generating module in the three-dimensional space.
5. The ultra-short pulsed laser welding system of claim 1, wherein, The monitoring module comprises a light emitting unit, a light receiving unit and an image device, the image device is a light waveform generator, the light emitting unit emits a first laser pulse and a second laser pulse towards the composite material, wherein the wavelength range of the first laser pulse and the second laser pulse is 300nm-2000nm, the pulse width range of the first laser pulse and the second laser pulse is 50fs-50ns, the light receiving unit comprises a first laser vibrometer and a second laser vibrometer; Wherein, the first laser vibrometer is located at a first side of the composite material, the first laser vibrometer receives a reflected light of the first laser pulse reflected by the composite material to generate a reflected ultrasonic wave; Wherein, the second laser vibrometer is located at a second side of the composite material; the light emitting unit emits the second laser pulse towards the composite material, and the second laser vibrometer receives a penetrating light of the second laser pulse penetrating through the composite material to generate a penetrating ultrasonic wave; Wherein, the waveform generator is electrically connected with the first laser vibrometer and the second laser vibrometer to receive the reflected ultrasonic wave and generate a first waveform diagram, and receive the penetrating ultrasonic wave and generate a second waveform diagram; Wherein, the first laser vibrometer is connected with a first moving device to move the first laser vibrometer in a three-dimensional space; Wherein, the second laser vibrometer is connected with a second moving device to move the second laser vibrometer in the three-dimensional space; Wherein, the laser generating module is connected with a laser moving device to move the laser generating module in the three-dimensional space.
6. The ultra-short pulsed laser welding system of claim 1, wherein, The monitoring module comprises a light emitting unit, a light receiving unit and an image device, the image device is a high spectrum generator, the light emitting unit emits a first laser beam and a second laser beam towards the composite material, and the light receiving unit comprises a first high spectrum sensor and a second high spectrum sensor; Wherein, the first high spectrum sensor is located at a first side of the composite material, the first high spectrum sensor receives a reflected light of the first laser beam reflected by the composite material to generate a reflected light signal; Wherein, the second high spectrum sensor is located at a second side of the composite material; the light emitting unit emits the second laser beam towards the composite material, and the second high spectrum sensor receives a penetrating light of the second laser beam penetrating through the composite material to generate a penetrating light signal; Wherein, the high spectrum generator is electrically connected with the first high spectrum sensor and the second high spectrum sensor to receive the reflected light signal and generate a first detection spectrum diagram, and receive the penetrating light signal and generate a second detection spectrum diagram; Wherein, the first high spectrum sensor is connected with a first moving device to move the first high spectrum sensor in a three-dimensional space; Wherein, the second high spectrum sensor is connected with a second moving device to move the second high spectrum sensor in the three-dimensional space; The laser generating module is connected with a laser moving device to move the laser generating module in the three-dimensional space. The first hyperspectral sensor and the second hyperspectral sensor receive a spectrum range of 300 nm to 2500 nm, and the spectrum is a continuous spectrum. The optical result is at least one of shape, size, thickness, composition, and density of the composite material.
7. The ultra-short pulsed laser welding system of claim 1, wherein, The ultrashort pulse laser welding system further comprises an artificial intelligence system for learning and pre-training of the welding parameters of the composite material, and automatically selecting a suitable monitoring module according to the characteristics of the composite material, and optimizing the monitoring parameters of the monitoring module. The artificial intelligence system comprises: a database unit having related data of the types, shapes, sizes, thicknesses, and densities of the composite materials, wherein the database unit is connected to a cloud platform through the Internet to update the related data; a learning and training unit connected with the database unit, which learns and pre-trains according to the related data in the database unit through a deep learning algorithm; a parameter optimization setting unit connected with the database unit to optimize the welding parameters according to the related data of the types, shapes, sizes, thicknesses, and densities of the composite materials; and a monitoring module setting unit connected with the database unit to select a suitable monitoring module according to the related data of the types, shapes, sizes, thicknesses, and densities of the composite materials.
8. The ultra-short pulsed laser welding system of claim 1, wherein, The monitoring module comprises at least a light emitting unit for emitting a laser, and the laser passes through at least one optical component to generate a linear laser or a planar laser. The monitoring module uses the laser with different delay times to detect the morphological parameters of the composite material to monitor the welding state of the composite material in real time.
9. The ultra-short pulsed laser welding system of claim 1, wherein, The ultrashort pulse laser welding system further comprises a cleaning module comprising a gas source and a gas nozzle connected with the gas source to supply a cleaning substance to the carrying module to remove impurities on the carrying module or the composite material.
10. A method for welding a composite material, characterized in that, The method for welding composite materials comprises: providing a laser beam; receiving the laser beam to distinguish the laser beam into a first penetrating laser beam and a first reflected laser beam; receiving the first reflected laser beam to convert the first reflected laser beam into laser measurement information; analyzing the laser measurement information to obtain a laser parameter related to the first reflected laser beam; and reflecting the first penetrating laser beam to the composite material according to the rotation angles of a laser galvanometer scanning module. The pulse width of the laser beam is between 50-500 fs, the repetition frequency of the laser beam is between 0.5-10 GHz, and the pulse energy of the laser beam is between 100-1000 μJ. The first penetrating laser beam is divided into a second penetrating laser beam directed to the composite material and a second reflected laser beam directed to a laser measurement module.