Vertical semiconductor folded plate storage clamp

Abstract

The invention relates to the technical field of electrical components, in particular to a vertical semiconductor folded plate storage clamp which comprises a storage box body, a box cover, a flexible clamping assembly, a circulating dust removal assembly and a limiting connecting assembly, the flexible clamping assembly is installed in the storage box body, and the box cover is installed at the top end of the storage box body in a sealed mode; a circulating dust removal assembly is installed in the box cover, and limiting connecting assemblies are installed on the two sides of the storage box body and the box cover. The flexible clamping assembly comprises a mounting groove; according to the device, the flexible clamping assembly is adopted, the semiconductor folded plate can be flexibly clamped, the device is suitable for the semiconductor folded plates with different fold depths and thicknesses, the phenomenon that clamping is too loose or too tight is avoided, and the storage effect of the semiconductor folded plate is improved; and the circulating dust removal assembly is adopted, dust collection treatment can be conducted on the semiconductor folded plates, manual auxiliary treatment is not needed, and the storage effect of the semiconductor folded plates is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electrical components, in particular to a vertical semiconductor corrugated plate storage clamp. BACKGROUND

[0002] The vertical semiconductor corrugated plate storage clamp is a high-precision, clean level storage device specially designed for corrugated plate components in the semiconductor manufacturing field, mainly used for vertical storage, transfer and access management of corrugated plates in wafer processing, packaging testing and other links. When the vertical semiconductor corrugated plate is stored, the storage clamp is needed to store and process the vertical semiconductor corrugated plate. However, the existing storage clamp generally stores and fixes through the clamping slot of the firmware spacing, which cannot adapt to semiconductor corrugated plates with different corrugation depths and thicknesses, and is prone to loose or tight clamping, resulting in deformation of the plate surface, reducing the storage effect of the semiconductor corrugated plate. Moreover, the semiconductor corrugated plate is highly sensitive to particle pollution, which is prone to dust adsorption, and it is not easy to adsorb and process dust, which reduces the storage effect of the semiconductor corrugated plate. In addition, it is not easy to limit and clamp the sealed equipment, which causes the box cover structure to loosen, causing the semiconductor corrugated plate to loosen, reducing the storage effect of the semiconductor corrugated plate. SUMMARY

[0003] The problem solved by the present application is to provide a vertical semiconductor corrugated plate storage clamp that can flexibly clamp semiconductor corrugated plates and is suitable for semiconductor corrugated plates with different corrugation depths and thicknesses, avoiding loose or tight clamping, improving the storage effect of the semiconductor corrugated plate. Moreover, it can perform dust removal processing on the semiconductor corrugated plate without manual assistance, improving the storage effect of the semiconductor corrugated plate. In addition, it can limit and clamp the sealed equipment, reducing the shaking of the box cover structure, avoiding the loosening of the semiconductor corrugated plate, and improving the storage effect of the semiconductor corrugated plate.

[0004] To achieve the above purpose, the present application adopts the following technical scheme: a vertical semiconductor corrugated plate storage clamp, comprising a storage box main body, a box cover, a flexible clamping assembly, a circulating dust removal assembly and a limiting connection assembly, the flexible clamping assembly is installed in the storage box main body, the box cover is sealingly installed at the top end of the storage box main body, the circulating dust removal assembly is installed in the box cover, and the limiting connection assembly is installed on both sides of the storage box main body and the box cover.

[0005] The flexible clamping assembly comprises a mounting groove, a first air cylinder, a pressing inclined plate, a placing box, a first guide hole, a clamping plate, a flexible clamping pad, a moving rod, a first connecting disc, a first spring, a moving plate and an adjusting plate, the storage box body is internally provided with the mounting groove, the top end of the mounting groove is provided with the placing box in a fixed manner, the clamping plate is symmetrically mounted in the placing box, the flexible clamping pad is fixedly connected to the outer wall of one side of the clamping plate, the moving rod is fixedly connected to the outer wall of one side of the clamping plate, the first guide hole is formed in the two sides of the placing box corresponding to the positions of the moving rod, the moving plate is mounted in the mounting groove in a distributed manner, the outer wall of the moving rod is sleeved on the moving plate, the first connecting disc is fixedly connected to the outer wall of one end of the moving rod, the first spring is fixedly connected to the outer wall of one side of the first connecting disc, and the other end of the first spring is fixedly connected to the outer wall of the moving plate.

[0006] Preferably, the bottom end of the moving plate is fixedly connected with the adjusting plate, the bottom end of the adjusting plate is provided with the pressing inclined plate, the first air cylinder is inlaidly mounted on the inner wall of the top end of the mounting groove, and the bottom end of the telescopic rod of the first air cylinder is fixedly connected to the outer wall of the pressing inclined plate.

[0007] Preferably, the circulating dust removal assembly comprises a dust removal groove, a dust suction hole, an isolation base, a storage battery, an electrostatic net, an activated carbon adsorption plate, a second guide hole, a guide rod, a piston plate and a second air cylinder, the box cover is internally provided with the dust removal groove, the bottom end of the dust removal groove is provided with the dust suction hole in a distributed manner, the isolation base is fixedly connected to the inner wall of the bottom end of the dust removal groove, the storage battery is inlaidly mounted in the isolation base, the isolation base and the dust removal groove are both provided with the electrostatic net, the activated carbon adsorption plate is mounted on the top end of the isolation base and the dust removal groove, the second guide hole is formed in the middle of the activated carbon adsorption plate, the guide rod is sleeved in the second guide hole, the piston plate is fixedly connected to the outer walls of the two ends of the guide rod, and the second air cylinder is inlaidly mounted on the inner wall of one side of the dust removal groove, and one end of the telescopic rod of the second air cylinder is fixedly connected to the outer wall of the piston plate.

[0008] Preferably, the limiting connection assembly comprises a clamping frame, a bolt, a second connecting disc, a second spring, a clamping plate and a limiting hole, the clamping frame is fixedly connected to the outer walls of the two sides of the storage box body, the bolt is sleeved on one side of the clamping frame, the second connecting disc is fixedly connected to the outer wall of one end of the bolt, the second spring is fixedly connected to the outer wall of one side of the second connecting disc, and the other end of the second spring is fixedly connected to the outer wall of the clamping frame, the clamping plate is fixedly connected to the outer walls of the two sides of the box cover, the outer side of the clamping plate is inserted into the inside of the clamping frame, and the limiting hole is formed in the clamping plate corresponding to the position of the bolt.

[0009] Preferably, the display screen is inlaidly mounted on one side of the storage box body, and the operation button is mounted on one side of the storage box body in a distributed manner.

[0010] Preferably, a handle is fixed to one side wall of the storage box body.

[0011] Preferably, a cooler is symmetrically embedded at the top end of the box cover, and the electrical output end of the battery is electrically connected with the electrical input end of the cooler.

[0012] Preferably, the first spring sleeve is connected to the outer wall of the moving rod, and the number of the first springs is eighteen.

[0013] Preferably, the electrical output end of the battery is electrically connected with the electrical input end of the electrostatic net.

[0014] The application has the advantages that: the flexible clamping assembly is adopted to clamping the semiconductor corrugated plate flexibly, and is suitable for semiconductor corrugated plates with different corrugation depths and thicknesses, avoiding the phenomenon of clamping too loose or too tight, and improving the storage effect of the semiconductor corrugated plate;

[0015] The circulating dust removal assembly is adopted to perform dust removal treatment on the semiconductor corrugated plate without manual assistance, improving the storage effect of the semiconductor corrugated plate;

[0016] The limiting connection assembly is adopted to limit the clamping of the sealed equipment, reducing the shaking phenomenon of the box cover structure, avoiding the loosening of the semiconductor corrugated plate, and improving the storage effect of the semiconductor corrugated plate. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a whole three-dimensional structure diagram of the application;

[0018] Figure 2 is a front view cut structure diagram of the application;

[0019] Figure 3 is a side view cut structure diagram of the application;

[0020] Figure 4 is an internal three-dimensional structure diagram of the flexible clamping assembly of the application;

[0021] Figure 5 is an internal three-dimensional structure diagram of the circulating dust removal assembly of the application.

[0022] LEGEND:

[0023] 1, storage box body; 2, box cover; 3, flexible clamping assembly; 4, circulating dust removal assembly; 5, limiting connection assembly; 6, display screen; 7, operation button; 8, handle; 9, cooler; 301, mounting groove; 302, first cylinder; 303, extrusion inclined plate; 304, placing box; 305, first guide hole; 306, clamping plate; 307, flexible clamping pad; 308, moving rod; 309, first connecting disc; 3010, first spring; 3011, moving plate; 3012, adjusting plate; 401, dust removal groove; 402, dust suction hole; 403, isolation base; 404, battery; 405, electrostatic net; 406, activated carbon adsorption plate; 407, second guide hole; 408, guide rod; 409, piston plate; 4010, second cylinder; 501, clamping frame; 502, bolt; 503, second connecting disc; 504, second spring; 505, clamping plate; 506, limiting hole. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0025] Embodiment one

[0026] Reference Figures 2-4 A vertical semiconductor crease plate storage clamp, comprising a storage box body 1, a box cover 2, a flexible clamping assembly 3, a circulating dust removal assembly 4 and a limiting connection assembly 5, the flexible clamping assembly 3 is installed in the storage box body 1, the box cover 2 is sealingly installed at the top end of the storage box body 1, the circulating dust removal assembly 4 is installed in the box cover 2, and the limiting connection assembly 5 is installed on both sides of the storage box body 1 and the box cover 2; the display screen 6 is embeddedly installed on one side of the storage box body 1, the operation buttons 7 are distributedly installed on one side of the storage box body 1, the storage box body 1 is operated and processed through the operation buttons 7, and then the storage process is displayed and processed through the display screen 6; the handle 8 is fixedly connected to the outer wall of one side of the storage box body 1, the storage box body 1 can be transferred and processed through the handle 8, and the stored equipment is conveniently moved; the coolers 9 are symmetrically embeddedly installed at the top end of the box cover 2, the electrical output end of the battery 404 is electrically connected with the electrical input end of the cooler 9, the electrostatic net 405 is powered and processed through the battery 404, and the cooler 9 is operated, so that the air in the dust removal groove 401 is conveniently cooled and processed;

[0027] The flexible clamping assembly 3 comprises a mounting groove 301, a first air cylinder 302, a pressing inclined plate 303, a placing box 304, a first guide hole 305, a clamping plate 306, a flexible clamping pad 307, a moving rod 308, a first connecting disc 309, a first spring 3010, a moving plate 3011 and an adjusting plate 3012. The mounting groove 301 is arranged in the storage box body 1. The placing box 304 is fixedly arranged at the top of the mounting groove 301. The clamping plate 306 is symmetrically arranged in the placing box 304. The flexible clamping pad 307 is fixedly arranged on one side of the outer wall of the clamping plate 306. The moving rod 308 is fixedly arranged on one side of the outer wall of the clamping plate 306. The first guide hole 305 is arranged on the both sides of the placing box 304 corresponding to the positions of the moving rod 308. The moving plate 3011 is arranged in the mounting groove 301 and is sleeved on the outer wall of the moving rod 308. The first connecting disc 309 is fixedly arranged on one end of the outer wall of the moving rod 308. The first spring 3010 is fixedly arranged on one side of the outer wall of the first connecting disc 309 and the other end of the first spring 3010 is fixedly arranged on the outer wall of the moving plate 3011. The adjusting plate 3012 is fixedly arranged on the bottom of the moving plate 3011. The pressing inclined plate 303 is arranged on the bottom of the adjusting plate 3012. The first air cylinder 302 is inlaidly arranged on the inner wall of the top of the mounting groove 301 and the telescopic rod of the first air cylinder 302 is fixedly arranged on the outer wall of the pressing inclined plate 303. The pressing inclined plate 303 is lifted by starting the first air cylinder 302. The adjusting plate 3012 is pressed by the pressing inclined plate 303, so that the moving plate 3011 is moved to the placing box 304.

[0028] Working principle: first, the vertical semiconductor crease plate is placed in the placing box 304. At this time, the pressing inclined plate 303 is lifted by starting the first air cylinder 302. The adjusting plate 3012 is pressed by the pressing inclined plate 303, so that the moving plate 3011 is moved to the placing box 304. Then, the moving rod 308 on the first connecting disc 309 is moved along the first guide hole 305 on the placing box 304 under the action of the first spring 3010. The vertical semiconductor crease plate is flexibly clamped by the flexible clamping pad 307 on the clamping plate 306. The first spring 3010 is stretched. The vertical semiconductor crease plate is clamped and fixed by the first spring 3010 through the reaction force of the first spring 3010. The semiconductor crease plate can be flexibly clamped. It is suitable for semiconductor crease plates with different crease depths and thicknesses. The phenomenon of clamping too loose or too tight is avoided. The storage effect of the semiconductor crease plate is improved.

[0029] Example two

[0030] Referring to Figure 2 , Figure 3 with Figure 5 , the circulating dust removal assembly 4 comprises a dust removal groove 401, a dust suction hole 402, an isolation base 403, a storage battery 404, an electrostatic net 405, an activated carbon adsorption plate 406, a second guide hole 407, a guide rod 408, a piston plate 409 and a second air cylinder 4010. The dust removal groove 401 is arranged in the box cover 2. The dust suction holes 402 are arranged at the bottom end of the dust removal groove 401. The isolation base 403 is fixedly connected to the inner wall of the bottom end of the dust removal groove 401. The storage battery 404 is inlaid and mounted in the isolation base 403. The electrostatic nets 405 are mounted on both sides of the dust removal groove 401 and the isolation base 403. The activated carbon adsorption plate 406 is mounted on the top end of the dust removal groove 401 and the isolation base 403. The second guide hole 407 is arranged in the middle of the activated carbon adsorption plate 406. The guide rod 408 is sleeved in the second guide hole 407. The piston plates 409 are fixedly connected to the outer walls of both ends of the guide rod 408. The second air cylinder 4010 is inlaid and mounted on the inner wall of one side of the dust removal groove 401. One end of the telescopic rod of the second air cylinder 4010 is fixedly connected to the outer wall of the piston plate 409. The electrically conductive output end of the storage battery 404 is electrically connected to the electrically conductive input end of the electrostatic net 405. The storage battery 404 is used for supplying power to the electrostatic net 405, and then the electrostatic net 405 is used for electrostatically adsorbing the dust in the air.

[0031] When the vertical semiconductor creased plate is sealed, the storage battery 404 is started by operating the button 7. Then the storage battery 404 is used for supplying power to the electrostatic net 405, and the cooler 9 is operated. The air in the dust removal groove 401 is cooled. Then the second air cylinder 4010 is started to make the piston plates 409 on the guide rod 408 reciprocate along the second guide hole 407 on the activated carbon adsorption plate 406. The activated carbon adsorption plate 406 reciprocates along the dust removal groove 401 and the isolation base 403. The air in the dust removal groove 401 is extruded and extracted by the activated carbon adsorption plate 406. The air in the storage box main body 1 is circulated. The air is extracted by the dust suction holes 402 on the dust removal groove 401. Then the dust in the air is electrostatically adsorbed by the electrostatic net 405. Then the air is purified by the activated carbon adsorption plate 406. The purified cold air is injected into the storage box main body 1. Thus the vertical semiconductor creased plate is stored at low temperature. The dust in the semiconductor creased plate is removed. Manual assistance is not needed. The storage effect of the semiconductor creased plate is improved.

[0032] Example three

[0033] Referring to Figures 1-2The limiting and connecting assembly 5 comprises a clamping frame 501, a latch 502, a second connecting disc 503, a second spring 504, a clamping plate 505 and a limiting hole 506. The clamping frame 501 is fixed on the outer wall of the storage box body 1. The latch 502 is sleeved on one side of the clamping frame 501. The second connecting disc 503 is fixed on the outer wall of one end of the latch 502. The second spring 504 is fixed on the outer wall of the other end of the second connecting disc 503. The clamping plate 505 is fixed on the outer wall of the two sides of the box cover 2. The limiting hole 506 is formed in the clamping plate 505 corresponding to the position of the latch 502.

[0034] When the vertical semiconductor creased plate is stored, the second connecting disc 503 is pulled, the latch 502 on the second connecting disc 503 is moved along the clamping frame 501, then the box cover 2 is clamped into the storage box body 1, the box cover 2 seals the storage box body 1, then the clamping plate 505 is clamped into the clamping frame 501, at this time the second connecting disc 503 is loosened, then the latch 502 on the second connecting disc 503 is inserted into the limiting hole 506 in the clamping plate 505 under the action of the second spring 504, thereby the box cover 2 is installed on the top of the storage box body 1, the sealed equipment is clamped and limited, the shaking phenomenon of the box cover 2 is reduced, the semiconductor creased plate is prevented from loosening, and the storage effect of the semiconductor creased plate is improved.

[0035] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A vertical semiconductor corrugated plate storage fixture, characterized in that, The storage box includes a main body (1), a lid (2), a flexible clamping assembly (3), a circulating dust removal assembly (4), and a limiting connection assembly (5). The flexible clamping assembly (3) is installed inside the main body (1). The lid (2) is sealed on the top of the main body (1). The circulating dust removal assembly (4) is installed inside the lid (2). The limiting connection assembly (5) is installed on both sides of the main body (1) and the lid (2). The flexible clamping assembly (3) includes a mounting groove (301), a first cylinder (302), a pressing inclined plate (303), a placement box (304), a first guide hole (305), a clamping plate (306), a flexible clamping pad (307), a moving rod (308), a first connecting plate (309), a first spring (3010), a moving plate (3011), and an adjusting plate (3012). The storage box body (1) is provided with a mounting groove (301). The top of the mounting groove (301) is fixedly connected to a placement box (304). The placement box (304) is symmetrically installed with clamping plates (306) inside the placement box (304). One side of the outer wall of the clamping plate (306) is fixedly connected to... A flexible clamping pad (307) is provided. A movable rod (308) is fixedly connected to one side of the outer wall of the clamping plate (306). A first guide hole (305) is provided on both sides of the placement box (304) corresponding to the position of the movable rod (308). A movable plate (3011) is installed in the mounting groove (301), and the movable plate (3011) is sleeved on the outer wall of the movable rod (308). A first connecting plate (309) is fixedly connected to one end of the outer wall of the movable rod (308). A first spring (3010) is fixedly connected to one side of the outer wall of the first connecting plate (309), and the other end of the first spring (3010) is fixedly connected to the outer wall of the movable plate (3011).

2. The vertical semiconductor corrugated plate storage fixture according to claim 1, characterized in that, An adjusting plate (3012) is fixedly connected to the bottom outer wall of the movable plate (3011). An extrusion inclined plate (303) is installed at the bottom of the adjusting plate (3012). A first cylinder (302) is embedded in the top inner wall of the mounting groove (301), and the bottom end of the telescopic rod of the first cylinder (302) is fixedly connected to the outer wall of the extrusion inclined plate (303).

3. A vertical semiconductor corrugated plate storage fixture according to claim 1, characterized in that, The circulating dust removal assembly (4) includes a dust removal tank (401), a dust suction hole (402), an isolation base (403), a storage battery (404), an electrostatic net (405), an activated carbon adsorption plate (406), a second guide hole (407), a guide rod (408), a piston plate (409), and a second cylinder (4010). The dust removal tank (401) is provided inside the cover (2). The dust suction hole (402) is distributed at the bottom end of the dust removal tank (401). An isolation base (403) is fixedly connected to the inner wall of the bottom end of the dust removal tank (401). A storage battery (404) is embedded in the isolation base (403). An electrostatic mesh (405) is installed on both sides of the base (403) and the dust removal tank (401). An activated carbon adsorption plate (406) is installed at the top of the isolation base (403) and the dust removal tank (401). A second guide hole (407) is opened in the middle of the activated carbon adsorption plate (406). A guide rod (408) is sleeved in the second guide hole (407). A piston plate (409) is fixed on the outer wall of both ends of the guide rod (408). A second cylinder (4010) is embedded in the inner wall of one side of the dust removal tank (401), and one end of the telescopic rod of the second cylinder (4010) is fixed on the outer wall of the piston plate (409).

4. A vertical semiconductor corrugated plate storage fixture according to claim 1, characterized in that, The limiting connection assembly (5) includes a locking frame (501), a pin (502), a second connecting plate (503), a second spring (504), a locking plate (505), and a limiting hole (506). Locking frames (501) are fixedly connected to both outer walls of the storage box body (1). A pin (502) is sleeved on one side of the locking frame (501), and a second connecting plate (503) is fixedly connected to the outer wall of one end of the pin (502). A second spring (504) is fixed to one side of the outer wall of the second connecting plate (503), and the other end of the second spring (504) is fixed to the outer wall of the locking frame (501). Locking plates (505) are fixed to both sides of the outer wall of the box cover (2), and the outer side of the locking plate (505) is inserted into the inside of the locking frame (501). Limiting holes (506) are opened on the locking plate (505) corresponding to the position of the pin (502).

5. A vertical semiconductor corrugated plate storage fixture according to claim 1, characterized in that, A display screen (6) is embedded in one side of the storage box body (1), and operation buttons (7) are distributed on one side of the storage box body (1).

6. A vertical semiconductor corrugated plate storage fixture according to claim 1, characterized in that, A handle (8) is fixed to one side of the outer wall of the main body (1) of the storage box.

7. A vertical semiconductor corrugated plate storage fixture according to claim 3, characterized in that, The top of the cover (2) is symmetrically fitted with a cooler (9), and the electrical output terminal of the battery (404) is electrically connected to the electrical input terminal of the cooler (9).

8. A vertical semiconductor corrugated plate storage fixture according to claim 1, characterized in that, The first spring (3010) is sleeved on the outer wall of the moving rod (308), and there are eighteen first springs (3010).

9. A vertical semiconductor corrugated plate storage fixture according to claim 3, characterized in that, The electrical output terminal of the battery (404) is electrically connected to the electrical input terminal of the electrostatic grid (405).

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