Optical device for calibrating parallelism, centering and perpendicularity and testing method

Abstract

The invention discloses an optical device for calibrating parallelism, centering and perpendicularity and a test method. The optical device for calibrating parallelism, centering and perpendicularity comprises a light source, a cross division plate, a first beam splitter prism, a parallel beam tube, a second beam splitter prism, a third beam splitter prism, a first industrial camera and a second industrial camera, a first measured surface and a second measured surface are configured above and below the third beam splitter prism, whether a first parallelism cursor and a second parallelism cursor projected on the first industrial camera are completely overlapped is observed, the parallelism of the first measured surface and the second measured surface is corrected, and meanwhile, the parallelism of the first measured surface and the second measured surface is corrected; the centering degree of the first measured surface and the second measured surface is corrected by observing whether a first centering cursor and a second centering cursor projected on the second industrial camera completely coincide, a third measured surface is configured beside the left side of the third beam splitter prism, whether a vertical cursor is perpendicular to the collimator is observed, the perpendicularity of the third measured surface is corrected, and the centering degree of the first measured surface and the second measured surface is corrected. Correction functions are diversified, and operation is convenient.

Description

TECHNICAL FIELD

[0001] The present application relates to an optical device for calibrating parallelism, centering and perpendicularity and a testing method. BACKGROUND

[0002] When calibrating the flatness of a plane, a collimator is usually used for calibration, but since the collimator can only calibrate the flatness of a single plane, it cannot calibrate the flatness of two planes, and it also cannot calibrate the centering of two planes. Therefore, an instrument that can calibrate the perpendicularity of a single plane, the parallelism of two planes and the centering of two planes is needed to be developed. SUMMARY

[0003] The present application aims to provide an optical device for calibrating parallelism, centering and perpendicularity to solve the problem that the existing collimator can only calibrate the flatness of a single plane, cannot calibrate the flatness of two planes, and also cannot calibrate the centering of two planes.

[0004] The present application is implemented by the following technical solutions: The optical device for calibrating parallelism, centering and perpendicularity comprises a light source, a cross division plate, a first light splitting prism, a parallel light beam tube, a second light splitting prism, a third light splitting prism, a first industrial camera and a second industrial camera. The first industrial camera, the first light splitting prism, the parallel light beam tube, the second light splitting prism and the third light splitting prism are sequentially arranged from right to left. The cross division plate and the light source are arranged above the first light splitting prism and sequentially arranged in a direction away from the first light splitting prism. The second industrial camera is arranged above the second light splitting prism. The light emitted by the light source passes through the cross division plate, is reflected by the first light splitting prism, passes through the parallel light beam tube to form a parallel light beam, a part of the parallel light beam is emitted from the upper side and the lower side of the third light splitting prism after being transmitted by the second light splitting prism and reflected by the third light splitting prism, and another part of the parallel light beam is emitted from the left side of the third light splitting prism after being transmitted by the second light splitting prism and transmitted by the third light splitting prism.

[0005] Further, the third light splitting prism is used for placing a first measured member above, the first measured member has a first measured surface facing the upper side of the third light splitting prism, a part of the light reflected by the first measured surface is emitted from the upper side of the second light splitting prism after being reflected by the third light splitting prism and reflected by the second light splitting prism, and is received by the second industrial camera. Another part of the light reflected by the first measured surface is emitted from the right side of the first light splitting prism after passing through the parallel light beam tube, being transmitted by the first light splitting prism, and is received by the first industrial camera.

[0006] Further, a second measured member is placed below the third beam splitter prism, and the second measured member has a second measured surface facing the lower side of the third beam splitter prism. Part of the light reflected by the second measured surface is reflected by the third beam splitter prism and the second beam splitter prism, and then is emitted from the upper side of the second beam splitter prism and received by the second industrial camera. Part of the light reflected by the second measured surface is reflected by the third beam splitter prism and transmitted by the second beam splitter prism, and then passes through the parallel light beam tube, is transmitted by the first beam splitter prism, and is emitted from the right side of the first beam splitter prism and received by the first industrial camera.

[0007] Further, a third measured member is placed beside the left side of the third beam splitter prism, and the third measured member has a third measured surface facing the left side of the third beam splitter prism. The light reflected by the third measured surface is transmitted by the third beam splitter prism and the second beam splitter prism, and then passes through the parallel light beam tube, is transmitted by the first beam splitter prism, and is emitted from the right side of the first beam splitter prism and received by the first industrial camera.

[0008] Further, a visual lens is arranged between the second beam splitter prism and the second industrial camera, and the visual lens is used to magnify the light mark emitted from the upper side of the second beam splitter prism.

[0009] Further, the first beam splitter prism comprises two first right-angle prisms, and the two first right-angle prisms are identical in size and have their bevels connected to each other. The right-angle surfaces of the first right-angle prisms are coated with anti-reflection films, and the bevels are coated with beam splitting films.

[0010] Further, the second beam splitter prism comprises two second right-angle prisms, and the two second right-angle prisms are identical in size and have their bevels connected to each other. The right-angle surfaces of the second right-angle prisms are coated with anti-reflection films, and the bevels are coated with beam splitting films.

[0011] Further, the third beam splitter prism comprises four third right-angle prisms connected in sequence in the circumferential direction, and the four third right-angle prisms are identical in size and have their right-angle surfaces connected to each other. The bevels of the third right-angle prisms are coated with beam splitting films, and the right-angle surfaces are respectively coated with anti-reflection films of different wave bands.

[0012] Further, the cross-shaped dividing plate is provided with a cross-shaped transparent part, and the cross-shaped transparent part is used for the light emitted by the light source to pass through. The cross-shaped dividing plate is arranged on the focal plane of the first beam splitter prism.

[0013] In order to solve the problem that the existing collimator can only calibrate the flatness of a single plane, cannot calibrate two planes, and cannot calibrate the angle between the centers of the two planes, the present application provides an optical device for calibrating parallelism, centering and perpendicularity, and correspondingly provides a testing method for calibrating parallelism, centering and perpendicularity, which is based on the optical device for calibrating parallelism, centering and perpendicularity and comprises the following steps: S1, the light source is turned on, the light emitted by the light source passes through the cross division plate, is reflected by the first light splitting prism, and forms a parallel light beam through the parallel light beam tube, a part of the parallel light beam is emitted from the upper side and the lower side of the third light splitting prism through the transmission of the second light splitting prism and the reflection of the third light splitting prism, and a part of the parallel light beam is emitted from the left side of the third light splitting prism through the transmission of the second light splitting prism and the transmission of the third light splitting prism; S2, the parallelism of the first measured surface and the second measured surface is corrected, and / or the centering of the first measured surface and the second measured surface is corrected, and / or the perpendicularity of the third measured surface is corrected: Wherein, the parallelism of the first measured surface and the second measured surface is corrected, and the steps are as follows: S21, a first measured member is placed above the third light splitting prism, the first measured member has a first measured surface facing the upper side of the third light splitting prism, a part of the light reflected back from the first measured surface passes through the parallel light beam tube through the reflection of the third light splitting prism and the transmission of the second light splitting prism, is transmitted through the first light splitting prism, and is emitted from the right side of the first light splitting prism, thereby forming a first parallelism cursor at the receiving end of the first industrial camera; S22, a second measured member is placed below the third light splitting prism, the second measured member has a second measured surface facing the lower side of the third light splitting prism, a part of the light reflected back from the second measured surface passes through the parallel light beam tube through the reflection of the third light splitting prism and the transmission of the second light splitting prism, is transmitted through the first light splitting prism, and is emitted from the right side of the first light splitting prism, thereby forming a second parallelism cursor at the receiving end of the first industrial camera; S23, when the first parallelism cursor and the second parallelism cursor completely coincide, the first measured surface and the second measured surface are parallel to each other, and when the first parallelism cursor and the second parallelism cursor do not completely coincide, the first measured surface or the second measured surface is rotated to make the first parallelism cursor and the second parallelism cursor completely coincide; Wherein, the centering of the first measured surface and the second measured surface is corrected, and the steps are as follows: S2'1, placing a first measured member above the third beam splitter prism, the first measured member having a first measured surface facing the upper side of the third beam splitter prism, a part of the light reflected back by the first measured surface being reflected by the third beam splitter prism and the second beam splitter prism and exiting from the upper side of the second beam splitter prism to form a first pair of centering light marks at the receiving end of the second industrial camera; S2'2, placing a second measured member below the third beam splitter prism, the second measured member having a second measured surface facing the lower side of the third beam splitter prism, a part of the light reflected back by the second measured surface being reflected by the third beam splitter prism and the second beam splitter prism and exiting from the upper side of the second beam splitter prism to form a second pair of centering light marks at the receiving end of the second industrial camera; S2'3, when the first pair of centering light marks and the second pair of centering light marks completely coincide, the first measured surface and the second measured surface are centered, when the first pair of centering light marks and the second pair of centering light marks do not completely coincide, moving the first measured surface or the second measured surface to make the first pair of centering light marks and the second pair of centering light marks completely coincide; Wherein, the perpendicularity of the third measured surface is corrected, and the steps are as follows: S2'1, placing a first measured member above the third beam splitter prism, the first measured member having a first measured surface facing the upper side of the third beam splitter prism, a part of the light reflected back by the first measured surface being reflected by the third beam splitter prism and the second beam splitter prism and exiting from the upper side of the second beam splitter prism to form a first pair of centering light marks at the receiving end of the second industrial camera; S2'2, placing a second measured member below the third beam splitter prism, the second measured member having a second measured surface facing the lower side of the third beam splitter prism, a part of the light reflected back by the second measured surface being reflected by the third beam splitter prism and the second beam splitter prism and exiting from the upper side of the second beam splitter prism to form a second pair of centering light marks at the receiving end of the second industrial camera;

[0014] The technical solution has the advantages that the optical devices for calibrating parallelism, centering and perpendicularity are configured as a light source, a cross division plate, a first beam splitter prism, a parallel light beam tube, a second beam splitter prism, a third beam splitter prism, a first industrial camera and a second industrial camera, the first measured surface and the second measured surface are configured above and below the third beam splitter prism, and whether the first parallelism light mark and the second parallelism light mark projected on the first industrial camera completely coincide is observed, so that the parallelism of the first measured surface and the second measured surface is corrected, at the same time, whether the first pair of centering light marks and the second pair of centering light marks projected on the second industrial camera completely coincide is observed, so that the centering of the first measured surface and the second measured surface is corrected, and the third measured surface is configured beside the left side of the third beam splitter prism, and whether the vertical light mark is perpendicular to the collimator is observed, so that the perpendicularity of the third measured surface is corrected, and the correction functions are various and the operation is convenient. BRIEF DESCRIPTION OF DRAWINGS

[0015] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0017] Figure 1 This is a schematic diagram of the structure of the optical device for calibrating parallelism, centering, and perpendicularity according to an embodiment of the present invention; Figure 2 This is a flowchart of the test method for calibrating parallelism, centering, and perpendicularity according to an embodiment of the present invention. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Example: Figure 1 As shown, the optical device for calibrating parallelism, centering, and perpendicularity includes a light source 1, a cross-shaped dividing plate 2, a first beam splitter 3, a parallel beam tube 4, a second beam splitter 5, a third beam splitter 6, a first industrial camera 7, and a second industrial camera 8. The first industrial camera 7, the first beam splitter 3, the parallel beam tube 4, the second beam splitter 5, and the third beam splitter 6 are arranged sequentially from right to left. The cross-shaped dividing plate 2 and the light source 1 are arranged above the first beam splitter 3 and in a direction away from the first beam splitter 3. The second industrial camera 8 is arranged above the second beam splitter 5. The light emitted by the light source 1 passes through the cross-shaped dividing plate 2, is reflected by the first beam splitter 3, and then passes through the parallel beam tube 4 to form a parallel beam. Part of the parallel beam is transmitted through the second beam splitter 5 and reflected by the third beam splitter 6 and exits from the upper and lower sides of the third beam splitter 6. Part of the beam is transmitted through the second beam splitter 5 and transmitted through the third beam splitter 6 and exits from the left side of the third beam splitter 6.

[0020] Among them, the first industrial camera 7 and the second industrial camera 8 are existing industrial cameras. The first industrial camera 7 is used to observe the parallelism of the first measured surface 101 and the second measured surface 111, and the second industrial camera 8 is used to observe the center coincidence of the first measured surface 101 and the second measured surface 111. The parallel beam tube 4 is an existing parallel beam tube used to refract light into parallel light at infinity. The light source 1 is used to provide light with high brightness and high uniformity. The cross divider 2 is used to provide a clear cross image.

[0021] like Figure 2 As shown, the test method for calibrating the parallelism, alignment, and perpendicularity of the optical device using this calibration method is as follows: S1, turn on the light source 1. The light emitted by the light source 1 passes through the cross divider 2, is reflected by the first beam splitter 3, and passes through the parallel beam tube 4 to form a parallel beam. Part of the parallel beam is transmitted through the second beam splitter 5 and reflected by the third beam splitter 6 and is emitted from the upper and lower sides of the third beam splitter 6. Part of the beam is transmitted through the second beam splitter 5 and transmitted through the third beam splitter 6 and is emitted from the left side of the third beam splitter 6. S2, correct the parallelism of the first measured surface 101 and the second measured surface 111, and / or correct the alignment of the first measured surface 101 and the second measured surface 111, and / or correct the perpendicularity of the third measured surface 121. The parallelism of the first measured surface 101 and the second measured surface 111 is corrected through the following steps: S21, the first test piece 10 is placed above the third beam splitter 6. The first test piece 10 has a first test surface 101 facing the upper side of the third beam splitter 6. A portion of the light reflected from the first test surface 101 is reflected by the third beam splitter 6 and transmitted by the second beam splitter 5. After passing through the parallel beam tube 4 and transmitted by the first beam splitter 3, it is emitted from the right side of the first beam splitter 3 and forms a first parallelism cursor at the receiving end of the first industrial camera 7. S22, a second test piece 11 is placed below the third beam splitter 6. The second test piece 11 has a second test surface 111 facing the lower side of the third beam splitter 6. A portion of the light reflected from the second test surface 111 is reflected by the third beam splitter 6 and transmitted by the second beam splitter 5, then passes through the parallel beam tube 4 and is transmitted by the first beam splitter 3 and emitted from the right side of the first beam splitter 3, forming a second parallelism cursor at the receiving end of the first industrial camera 7. S23, when the first parallelism cursor and the second parallelism cursor are completely overlapped, the first measured surface 101 and the second measured surface 111 are parallel to each other. When the first parallelism cursor and the second parallelism cursor are not completely overlapped, rotate the first measured surface 101 or the second measured surface 111 to make the first parallelism cursor and the second parallelism cursor completely overlapped. Wherein, the steps of correcting the centering of the first measured surface 101 and the second measured surface 111 are as follows: S2'1, placing the first measured member 10 above the third beam-splitting prism 6, the first measured member 10 having the first measured surface 101 facing the upper side of the third beam-splitting prism 6, part of the light reflected by the first measured surface 101 being reflected by the third beam-splitting prism 6 and the second beam-splitting prism 5 and then being emitted from the upper side of the second beam-splitting prism 5, forming a first centering light mark at the receiving end of the second industrial camera 8; S2'2, placing the second measured member 11 below the third beam-splitting prism 6, the second measured member 11 having the second measured surface 111 facing the lower side of the third beam-splitting prism 6, part of the light reflected by the second measured surface 111 being reflected by the third beam-splitting prism 6 and the second beam-splitting prism 5 and then being emitted from the upper side of the second beam-splitting prism 5, forming a second centering light mark at the receiving end of the second industrial camera 8; S2'3, when the first centering light mark and the second centering light mark completely coincide, the centers of the first measured surface 101 and the second measured surface 111 coincide, and when the first centering light mark and the second centering light mark do not completely coincide, moving the first measured surface 101 or the second measured surface 111 to make the first centering light mark and the second centering light mark completely coincide; Wherein, the steps of correcting the perpendicularity of the third measured surface 121 are as follows: S2''1, placing the third measured member 12 beside the left side of the third beam-splitting prism 6, the third measured member 12 having the third measured surface 121 facing the left side of the third beam-splitting prism 6, the light reflected by the third measured surface 121 being transmitted by the third beam-splitting prism 6 and the second beam-splitting prism 5 and then being emitted from the right side of the first beam-splitting prism 3 through the first beam-splitting prism 3, forming a perpendicular light mark at the receiving end of the first industrial camera 7; S2''2, when the perpendicular light mark is perpendicular to the collimator, the third measured surface 121 is perpendicular, and when the perpendicular light mark is not perpendicular to the collimator, rotating the third measured surface 121 to make the perpendicular light mark perpendicular to the collimator.

[0022] Wherein, the steps S1 and S2 are used to correct the parallelism of the first measured surface 101 and the second measured surface 111, so that the first measured surface 101 and the second measured surface 111 are parallel to each other; The steps S1 and S2' are used to correct the centering of the first measured surface 101 and the second measured surface 111, so that the centers of the first measured surface 101 and the second measured surface 111 coincide; The steps S1 and S2'' are used to correct the perpendicularity of the third measured surface 121.

[0023] Wherein, the first measured member 10, the second measured member 11 and the third measured member 12 can be but are not limited to plane mirrors, and the first measured surface 101, the second measured surface 111 and the third measured surface 121 are all smooth planes.

[0024] In conclusion, the above setting corrects the parallelism of the first measured surface 101 and the second measured surface 111 by configuring the optical devices for calibrating parallelism, centering and perpendicularity as the light source 1, the cross division plate 2, the first light splitting prism 3, the parallel light beam tube 4, the second light splitting prism 5, the third light splitting prism 6, the first industrial camera 7 and the second industrial camera 8, configuring the first measured surface 101 and the second measured surface 111 above and below the third light splitting prism 6, and observing whether the first parallelism cursor and the second parallelism cursor projected on the first industrial camera 7 are completely coincident, corrects the centering of the first measured surface 101 and the second measured surface 111 by observing whether the first centering cursor and the second centering cursor projected on the second industrial camera 8 are completely coincident, and corrects the perpendicularity of the third measured surface 121 by configuring the third measured surface 121 on the left side of the third light splitting prism 6 and observing whether the perpendicular cursor is perpendicular to the collimator, so that the correction function is various and the operation is convenient.

[0025] In the embodiment of the present application, the visual lens 9 is further arranged between the second light splitting prism 5 and the second industrial camera 8, and the visual lens 9 is used for enlarging the cursor projected from the upper side of the second light splitting prism 5. The visual lens 9 can be, but is not limited to, an industrial lens or a digital lens. The above setting enlarges the cursor projected from the upper side of the second light splitting prism 5 by configuring the visual lens 9 between the second light splitting prism 5 and the second industrial camera 8, so that the observation is facilitated.

[0026] In the embodiment of the present application, the first light splitting prism 3 comprises two first right-angle prisms 301, the two first right-angle prisms 301 are consistent in size and connected at the inclined surfaces, the right-angle surfaces of the first right-angle prisms 301 are coated with anti-reflection films, and the inclined surfaces are coated with light splitting films. The two first right-angle prisms 301 are glued at the inclined surfaces.

[0027] In the embodiment of the present application, the second light splitting prism 5 comprises two second right-angle prisms 501, the two second right-angle prisms 501 are consistent in size and connected at the inclined surfaces, the right-angle surfaces of the second right-angle prisms 501 are coated with anti-reflection films, and the inclined surfaces are coated with light splitting films. The two second right-angle prisms 501 are glued at the inclined surfaces.

[0028] In this embodiment of the invention, the third beam splitter 6 includes four third right-angle prisms 601 connected sequentially in its circumference. The four third right-angle prisms 601 are of the same size, and the right-angle faces of adjacent third right-angle prisms 601 are connected. The inclined surfaces of the third right-angle prisms 601 are coated with a beam-splitting film, and the right-angle faces are respectively coated with anti-reflection films of different wavelengths. Adjacent third right-angle prisms 601 are bonded together at their right-angle faces. Because the right-angle faces are respectively coated with anti-reflection films of different wavelengths, the light emitted from the upper, lower, and left sides of the third beam splitter 6 is of different colors, thereby making the cursor colors reflected back by the first measured surface 101, the second measured surface 111, and the third measured surface 121 and falling on the first industrial camera 7 and the second industrial camera 8 different, which is convenient for observation.

[0029] In this embodiment of the invention, the cross-shaped dividing plate 2 has a cross-shaped transparent part at its center, through which light emitted from the light source 1 passes, and the cross-shaped dividing plate 2 is disposed on the focal plane of the first beam splitter 3.

[0030] It should be understood that the terms "first," "second," etc., are used in this invention to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this invention, "first" information can also be referred to as "second" information, and similarly, "second" information can also be referred to as "first" information. In addition, the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0031] The above description provides one or more embodiments in conjunction with specific content, and does not imply that the specific implementation of the present invention is limited to these descriptions. Any methods or structures that are similar to or identical to those of the present invention, or any technical deductions or substitutions made based on the concept of the present invention, should be considered as protected by the present invention.

Claims

1. An optical device for calibrating parallelism, centering, and perpendicularity, characterized in that, It includes a light source, a cross-shaped dividing plate, a first beam splitter, a parallel beam tube, a second beam splitter, a third beam splitter, a first industrial camera, and a second industrial camera. The first industrial camera, the first beam splitter, the parallel beam tube, the second beam splitter, and the third beam splitter are arranged sequentially from right to left. The cross-shaped dividing plate and the light source are arranged sequentially above the first beam splitter and in a direction away from the first beam splitter. The second industrial camera is arranged above the second beam splitter. The light emitted by the light source passes through the cross-shaped dividing plate, is reflected by the first beam splitter, and then passes through the parallel beam tube to form a parallel beam. Part of the parallel beam is transmitted through the second beam splitter and reflected by the third beam splitter and exits from the upper and lower sides of the third beam splitter. Part of the beam is transmitted through the second beam splitter and transmitted through the third beam splitter and exits from the left side of the third beam splitter.

2. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, The first test piece is placed above the third beam splitter. The first test piece has a first test surface facing the upper side of the third beam splitter. A portion of the light reflected back from the first test surface is reflected by the third beam splitter and the second beam splitter and emitted from the upper side of the second beam splitter, and is received by the second industrial camera. A portion of the light reflected from the first measured surface is reflected by the third beam splitter and transmitted through the second beam splitter, then passes through the parallel beam tube and is transmitted through the first beam splitter before exiting from the right side of the first beam splitter and being received by the first industrial camera.

3. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, The second test piece is placed below the third beam splitter. The second test piece has a second test surface facing the lower side of the third beam splitter. A portion of the light reflected from the second test surface is reflected by the third beam splitter and the second beam splitter and emitted from the upper side of the second beam splitter, and is received by the second industrial camera. A portion of the light reflected from the second measured surface is reflected by the third beam splitter and transmitted through the second beam splitter, then passes through the parallel beam tube and is transmitted through the first beam splitter before exiting from the right side of the first beam splitter and being received by the first industrial camera.

4. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, The third beam splitter is used to place the third test piece on its left side. The third test piece has a third test surface facing the left side of the third beam splitter. The light reflected from the third test surface is transmitted through the third beam splitter and the second beam splitter, passes through the parallel beam tube, is transmitted through the first beam splitter, and exits from the right side of the first beam splitter, and is received by the first industrial camera.

5. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, It also includes a vision lens disposed between the second beam splitter and the second industrial camera, the vision lens being used to magnify the cursor emitted from the upper side of the second beam splitter.

6. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, The first beam splitter includes two first right-angle prisms, which are the same size and have their inclined surfaces connected. The right-angle surfaces of the first right-angle prisms are coated with an anti-reflection film, and the inclined surfaces are coated with a beam splitter film.

7. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, The second beam splitter includes two second right-angle prisms, which are the same size and have their bevels connected. The right-angle faces of the second right-angle prisms are coated with an anti-reflection film, and the bevels are coated with a beam splitting film.

8. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, The third beam splitter includes four third right-angle prisms connected in sequence in its circumference. The four third right-angle prisms are of the same size and the right-angle faces of adjacent third right-angle prisms are connected. The inclined surfaces of the third right-angle prisms are coated with a beam splitting film, and the several right-angle faces are respectively coated with anti-reflection films of different wavelengths.

9. The optical device for calibrating parallelism, centering, and perpendicularity according to claim 1, characterized in that, The cross-shaped dividing plate has a cross-shaped transparent part at its center, through which light emitted from the light source passes. The cross-shaped dividing plate is positioned on the focal plane of the first beam splitter.

10. A method for calibrating parallelism, centering, and perpendicularity, characterized in that, This method, based on the optical device for calibrating parallelism, centering, and perpendicularity as described in any one of claims 1 to 9, comprises the following steps: S1, turn on the light source, the light emitted by the light source passes through the cross-shaped dividing plate, is reflected by the first beam splitter, and passes through the parallel beam tube to form a parallel beam. Part of the parallel beam is transmitted through the second beam splitter and reflected by the third beam splitter and is emitted from the upper and lower sides of the third beam splitter. Part of the beam is transmitted through the second beam splitter and transmitted through the third beam splitter and is emitted from the left side of the third beam splitter. S2, correct the parallelism of the first and second measured surfaces, and / or correct the alignment of the first and second measured surfaces, and / or correct the perpendicularity of the third measured surface. The steps for correcting the parallelism of the first and second measured surfaces are as follows: S21, a first test piece is placed above the third beam splitter. The first test piece has a first test surface facing the upper side of the third beam splitter. A portion of the light reflected from the first test surface is reflected by the third beam splitter and transmitted by the second beam splitter, then passes through the parallel beam tube and is transmitted through the first beam splitter and emitted from the right side of the first beam splitter, forming a first parallelism cursor at the receiving end of the first industrial camera. S22, a second test piece is placed below the third beam splitter. The second test piece has a second test surface facing the lower side of the third beam splitter. A portion of the light reflected from the second test surface is reflected by the third beam splitter and transmitted by the second beam splitter, then passes through the parallel beam tube and is transmitted through the first beam splitter and emitted from the right side of the first beam splitter, forming a second parallelism cursor at the receiving end of the first industrial camera. S23, when the first parallelism cursor and the second parallelism cursor are completely aligned, the first measured surface and the second measured surface are parallel to each other. When the first parallelism cursor and the second parallelism cursor are not completely aligned, rotate the first measured surface or the second measured surface to make the first parallelism cursor and the second parallelism cursor completely aligned. The steps for correcting the alignment of the first and second measured surfaces are as follows: S2'1, A first test piece is placed above the third beam splitter. The first test piece has a first test surface facing the upper side of the third beam splitter. A portion of the light reflected back from the first test surface is reflected by the third beam splitter and the second beam splitter and emitted from the upper side of the second beam splitter, forming a first centering cursor at the receiving end of the second industrial camera. S2'2, A second test piece is placed below the third beam splitter. The second test piece has a second test surface facing the lower side of the third beam splitter. A portion of the light reflected from the second test surface is reflected by the third beam splitter and the second beam splitter and emitted from the upper side of the second beam splitter, forming a second alignment cursor at the receiving end of the second industrial camera. S2'3, When the first centering cursor and the second centering cursor are completely aligned, the centers of the first and second measured surfaces are aligned. When the first and second centering cursors are not completely aligned, move the first or second measured surface to make the first and second centering cursors completely aligned. The steps for correcting the perpendicularity of the third measured surface are as follows; S2”1, a third test piece is placed next to the left side of the third beam splitter. The third test piece has a third test surface facing the left side of the third beam splitter. The light reflected from the third test surface is transmitted through the third beam splitter and the second beam splitter, passes through the parallel beam tube, is transmitted through the first beam splitter, and is emitted from the right side of the first beam splitter, forming a vertical cursor at the receiving end of the first industrial camera. S2”2, when the vertical cursor is perpendicular to the collimator, the third measured surface is perpendicular. When the vertical cursor is not perpendicular to the collimator, rotate the third measured surface to make the vertical cursor perpendicular to the collimator.

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