Multi-degree-of-freedom optical path focusing mechanism and low-temperature sample table

Abstract

The invention relates to a multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage, and relates to the technical field of ultrahigh vacuum experiment equipment, and the multi-degree-of-freedom optical path focusing mechanism comprises a base module which is of an integrated plate-shaped structure; the sample seat control module can realize linkage control of a sample seat on three translational degrees of freedom of x, y and z and a polar angle rotational degree of freedom; the sample seat supporting module is used for supporting a sample seat in a sample transferring or changing process; the ellipsoidal mirror control module can realize control of the ellipsoidal mirror on three translational degrees of freedom of x, y and z and two rotational degrees of freedom of a tilt angle and a polar angle; wherein the sample seat control module and the ellipsoidal mirror control module are spatially arranged in parallel. According to the invention, the focusing light wave band range can be expanded, the light spot stability can be improved, the worm and gear driven sample table top interior angle rotation function is integrated, and the requirements of advanced condensed state physical research on broadband, high flux and high precision angle resolution photoelectron spectroscopy experiments are met.

Description

Technical Field

[0001] This invention relates to the field of ultra-high vacuum experimental equipment technology, specifically to a spot and sample position adjustment system for an angle-resolved photoelectron spectrometer. Background Technology

[0002] Angle-resolved photoemission spectroscopy (ARPES) is an experimental technique capable of revealing the most fundamental physical properties of matter, playing an irreplaceable role in the field of condensed matter physics. For example, research on superconductivity mechanisms, two-dimensional materials, observation of electronic states in topological insulators and topological half-metals, exploration of topological superconductivity, theoretical verification of the quantum anomalous Hall effect, exploration of Majorana fermions, and research on electron-phonon coupling—the experimental progress in these novel physical phenomena is inseparable from the application of angle-resolved photoemission spectroscopy.

[0003] As a third-generation synchrotron radiation source, the Shanghai Synchrotron Radiation Facility (SSRF) provides users with higher-quality beamlines. Combining synchrotron radiation with angle-resolved photoelectron spectroscopy (ARPES) offers significant advantages for studying novel physical phenomena. This combination has already been implemented in the nano-ARPES device at the S2 beamline of the SSRF 07U mainline. Compared to many conventional ARPES, it boasts a spatial resolution of less than 1 μm, enabling the study of a wider variety of smaller samples, such as twisted graphene and WTe2. The Nano-ARPES beamline employs a combination of Fresnel zone plates and open-circuit sieve apertures (OSA) for beamline focusing, achieving a spatial resolution superior to 200 nm. Furthermore, the device possesses all the features of conventional ARPES: extremely low temperature, non-magnetic operation, four electrodes, a five-DOF motion mechanism at the sample (nanometer-level precision), and a sample stage fixation structure. However, the focusing method of zone plates can only focus light within a certain range of wavelengths, while some ARPES experiments require the use of synchrotron radiation light with a wider range of wavelengths. Therefore, new focusing methods for synchrotron radiation beamlines are waiting to be developed. Summary of the Invention

[0004] This invention provides a multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage, aiming to solve the problem of limited wavelength range in existing zone plate focusing methods in angle-resolved photoelectron spectroscopy systems, and to achieve nanometer-precision control of five degrees of freedom: x, y, z, tilt, and polar. This invention can expand the focused light wavelength range and improve the stability of the light spot, while integrating a worm gear-driven internal angle rotation function for the sample stage, meeting the needs of advanced condensed matter physics research for wide-bandwidth, high-throughput, and high-precision angle-resolved photoelectron spectroscopy experiments.

[0005] To achieve the above objectives, the present invention provides a multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage, comprising: The base module is a single, plate-like structure. The sample holder control module is located on the base module. From bottom to top, it includes a polar angle motor, an x-axis motor, a y-axis motor, a z-axis motor, and the sample holder. It can realize the linkage control of the sample holder in the three translational degrees of freedom of x, y, and z, as well as the polar angle rotational degree of freedom. The sample holder support module is located on the support block between the polar angle motor and the x-axis motor, and is used to support the sample holder during sample transfer or sample change. The single capillary ellipsoid control module is located on the base module and on one side of the sample holder. It is equipped with an x-axis motor, a y-axis motor, a tilt angle motor, a polar angle motor, and a z-axis motor, which can realize the control of the ellipsoid in three translational degrees of freedom (x, y, z) and two rotational degrees of freedom (tilt angle, polar angle). The sample holder control module and the ellipsoidal mirror control module are arranged in parallel in space.

[0006] Preferably, the stator of the polar motor in the sample holder control module is connected to the base module, and the rotor rotates to adjust the sample azimuth angle; the x-axis motor, y-axis motor and z-axis motor are connected in sequence through lightweight support blocks to realize the translational movement of the sample holder in three-dimensional space.

[0007] Preferably, the sample holder includes: A worm gear, arranged vertically and capable of rotating only about its own axis; A flexible shaft, coaxially connected to the top of the worm gear, is used to transmit rotational torque and absorb axial and radial deviations; The gripping handle is fixed to the top of the flexible shaft and is suitable for clamping and driving external operating tools. The worm gear is arranged vertically and meshes with the worm. The sample stage, fixedly connected to the worm gear, is used to support the sample holder; The system utilizes an external rotating gripper, which, through a series of transmissions via a flexible shaft, worm gear, and worm wheel, allows for the adjustment of the rotational freedom of the sample stage's interior angle.

[0008] Preferably, the sample holder support module includes: The support structure is made of non-magnetic sheet material and fixed to the support block between the polar angle motor and the x-axis motor. Multiple locking strips, made of non-magnetic material and fixed to the support structure, are provided with grooves to engage the sample holder; The groove structure opening is matched with the sample holder's movement path, so that the weight of the sample holder is borne by the locking strip after it is inserted.

[0009] Preferably, the ellipsoidal mirror control module is arranged in a stacked manner from bottom to top, consisting of an x-axis motor, a y-axis motor, a tilt angle motor, a polar angle motor, and a z-axis motor, wherein the tilt angle motor's rotation axis is arranged horizontally and the polar angle motor's rotation axis is arranged vertically.

[0010] Preferably, the ellipsoidal mirror control module has a motor support block between the polar angle motor and the z-axis motor to maintain a safe distance between the ellipsoidal mirror and the analyzer head during dimming.

[0011] Preferably, the ellipsoid control module also includes an ellipsoid support, which is made in one piece, connected to the top of the z-axis motor and extends horizontally above the sample holder, and the ellipsoid is fixed by multiple set screws.

[0012] Preferably, the tilt motor is positioned at a lower position on the analyzer head, and its rotational motion area maintains a safe, non-contact distance from the analyzer head.

[0013] Preferably, the z-axis motor of the ellipsoidal mirror control module is located close to the bottom of the ellipsoidal mirror support to minimize the upward motion load along the z-axis.

[0014] Preferably, the rotation axis of the tilt motor is arranged at a similar height to the optical axis of the ellipsoidal mirror to meet the requirements for optical path collimation adjustment.

[0015] Compared with the prior art, the present invention has the following beneficial technical effects: This invention achieves efficient focusing of synchrotron radiation over a wider wavelength range by innovatively combining ellipsoidal mirror encapsulation with a five-degree-of-freedom nanometer displacement platform. Compared with traditional zone plate schemes, it significantly expands the experimental photon energy range while ensuring high-throughput and high-stability micron-scale light spots, providing a more flexible detection method for studying the electronic structure of complex material systems.

[0016] This invention adopts a modular and compact design. In addition to achieving four-degree-of-freedom nanometer-precision motion of x, y, z, and polar in the sample holder, it further achieves in-plane angular rotation manipulated from outside the vacuum through a worm gear structure, enabling all-round precise control of sample positioning and orientation adjustment. The five-degree-of-freedom independent adjustment capability of the ellipsoidal mirror support ensures the collimation accuracy of the optical path. The specially optimized tilt axis height and motor support block structure effectively avoid interference with the analyzer head, greatly improving the safety and convenience of the dimming process.

[0017] The overall structure uses ultra-high vacuum compatible non-magnetic materials, and the locking strip protection design effectively avoids damage to the piezoelectric ceramic motor during sample transfer, extending the service life of the core components. The integrated ellipsoidal mirror support design reduces space occupation, allowing the ellipsoidal mirror with an extremely short working distance to get as close to the sample surface as possible. While ensuring the harsh experimental environment of extremely low temperature, non-magnetic, and four electrodes, it achieves efficient collection of photoelectrons at a large emission angle. Attached Figure Description

[0018] Figure 1 This is a three-dimensional perspective view of a multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage according to the present invention. Figure 2 This is an exploded view of the modules in the multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage of the present invention; Figure 3 This is a three-dimensional perspective view of a multi-degree-of-freedom optical path focusing mechanism and a sample holder in a low-temperature sample stage according to the present invention. Figure 4 This is a diagram of a multi-degree-of-freedom optical path focusing mechanism and an ellipsoidal mirror control module in a low-temperature sample stage according to the present invention. Figure 5 This invention relates to a multi-degree-of-freedom optical path focusing mechanism and the relative position of the ellipsoidal mirror control module and the analyzer in a low-temperature sample stage; Figure 6 This is an exploded view of a multi-degree-of-freedom optical path focusing mechanism and an ellipsoidal mirror support in a low-temperature sample stage according to the present invention. Figure 7 This is a top view of a multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage according to the present invention.

[0019] Reference numerals: 1. Base module; 2. Sample holder control module; 21. Sample holder; 211. Worm gear; 212. Worm; 213. Flexible shaft; 214. Sample stage; 215. Grip handle; 3. Sample holder support module; 31. Positioning strip; 4. Ellipsoid mirror control module; 41. X-axis motor; 42. Y-axis motor; 43. Tilt angle motor; 44. Polar angle motor; 45. Z-axis motor; 46. Ellipsoid mirror bracket; 47. Ellipsoid mirror; 48. Motor support block; 51. Sample holder; 52. Sample; 53. Beamline; 54. Analyzer head; 55. Photoelectron emission angle. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] This invention discloses a novel multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage. The system consists of four core modules: a base module 1, a sample holder control module 2, a sample holder support module 3, and an ellipsoidal mirror control module 4.

[0022] The base module 1, serving as the mechanical foundation of the entire system, is integrally machined from ultra-high vacuum compatible and non-magnetic materials, providing a stable mounting surface and reference positioning for the other three modules. The geometry of the base module 1 is specially designed; its main body is a flat plate structure used to support the sample holder control module 2. Simultaneously, a plate-like extension structure extends horizontally to one side from the mounting area of ​​the sample holder control module 2. The upper surface of this extension structure is used to mount the ellipsoidal mirror control module 4, ensuring a compact parallel arrangement of the sample holder control module 2 and the ellipsoidal mirror control module 4 in spatial layout. This guarantees the overall stability of the system structure while reserving ample operating space for subsequent optical debugging.

[0023] The sample holder control module 2 is directly fixedly mounted on the main load-bearing area of ​​the base module 1. This module integrates four nanometer-precision piezoelectric ceramic motors and a sample holder 21, arranged in a stacked manner from bottom to top. Specifically, the bottom layer is a polar angle motor 44. The stator of this motor is connected to the base module 1, and its rotor can rotate with nanometer-precision rotation, thereby achieving azimuth adjustment of the sample in the horizontal plane. Above the polar angle motor 44, it is fixedly connected to the x-axis motor 41 via a support block. This support block adopts a lightweight design, minimizing the overall weight while ensuring structural rigidity. The x-axis motor 41 can achieve nanometer-precision translation of the sample holder in the horizontal x-direction. Above the x-axis motor 41, it is connected to the y-axis motor 42 via a support block. The y-axis motor 42 also adopts the piezoelectric ceramic driving principle to achieve nanometer-precision translation of the sample holder in the horizontal y-direction. Above the y-axis motor 42, it is connected to the z-axis motor 45 via a support block. The z-axis motor 45 is driven in the vertical direction, enabling nanometer-precision lifting and lowering of the sample holder in the vertical direction. The sample holder 21 is fixed at the top of the z-axis motor 45, and achieves precise positioning in three-dimensional space as the z-axis motor 45 moves. This bottom-up stacked arrangement makes the motion degrees of freedom of each motor independent and does not interfere with each other. Through the coordinated drive of the control system, the sample holder 21 can achieve nanometer-level precision linkage control in the x, y, z translational degrees of freedom and polar rotational degrees of freedom.

[0024] The sample holder 21, as the core component for supporting and adjusting the sample, integrates a precision transmission mechanism. On the sample holder 21, a worm gear 212 is arranged vertically, ensuring that it can only rotate around its own axis and cannot produce radial displacement. The top of the worm gear 212 is coaxially connected to a flexible shaft 213. This flexible shaft 213 has good flexibility, capable of transmitting rotational torque while absorbing certain axial and radial deviations. A gripping handle 215 is fixedly installed at the top of the flexible shaft 213. This gripping handle 215 is designed for easy clamping by a rocker arm, allowing the rocker arm to rotate externally, driving the worm gear 212 to rotate, thereby achieving the purpose of rotating the sample stage 214 in the in-plane angular degrees of freedom. A worm wheel 211 is vertically arranged on the sample holder 21, meshing with the worm gear 212, and is relatively fixed to the sample stage 214.

[0025] The sample stage 214 is used to mount the sample holder 51. A boss is machined in the middle of the sample holder 51 for placing the sample 52. The sample holder 51 is detachably connected to the sample stage 214 for easy and quick sample replacement. When it is necessary to adjust the in-plane angle of the sample, the experimenter can operate the rocker arm fixed to the top cover of the vacuum chamber to extend into the chamber, clamp the gripping handle 215, and apply a rotational torque. This torque is transmitted to the worm gear 212 through the flexible shaft 213. The rotation of the worm gear 212 drives the worm wheel 211 to rotate, thereby driving the sample stage 214, sample holder 51, and sample 52 to achieve precise rotation of the in-plane angle. This unique transmission design places the rotational drive source outside the vacuum, effectively saving costs and space, reducing the load on other motors, and extending the service life of other motors.

[0026] The sample holder support module 3 consists of a support structure and multiple locking strips 31. The support structure is made of non-magnetic sheet material and is fixed to a support block between the polar angle motor 44 and the x-axis motor 41. The locking strips 31 are made of wear-resistant non-magnetic material and have grooves to engage the sample holder 21, fixing them to the support structure. The main function of the sample holder support module 3 is to provide support for the sample holder 21 during sample transfer or replacement. The specific operation is as follows: when a sample needs to be replaced, the x, y, and z motors are first driven to move in tandem to precisely position the sample holder 21 at the opening of the groove in the locking strip 31. Then, the sample holder 21 is moved further to engage with the groove in the locking strip 31. At this point, the weight of the sample holder 21 is mainly borne by the locking strip 31, rather than solely by the z-axis motor 45. Subsequently, the sample transfer mechanism can be safely operated to remove the sample holder 51 for sample replacement. This design minimizes damage to the piezoelectric ceramic motor during sample transfer and replacement, significantly extending the service life of the piezoelectric ceramic motor.

[0027] The ellipsoidal mirror control module 4 is fixedly mounted on the extension of the base module 1 and located on one side of the sample holder 21. This module integrates five nanometer-precision piezoelectric ceramic motors and an ellipsoidal mirror support 46, arranged sequentially from bottom to top. The bottom layer is the x-axis motor 41, whose stator is connected to the base module 1 to achieve nanometer-precision translation of the ellipsoidal mirror in the horizontal x-direction. Above the x-axis motor 41, it is connected to the y-axis motor 42 via a support block, which achieves nanometer-precision translation of the ellipsoidal mirror in the horizontal y-direction. Above the y-axis motor 42, it is connected to the tilt motor 43 via a support block. The tilt motor 43 has a horizontally arranged rotation axis, which allows for pitch angle adjustment of the ellipsoidal mirror in the vertical plane. Above the tilt motor 43, it is connected to the polar motor 44 via a support block. The polar motor 44 has a vertically arranged rotation axis, which allows for azimuth rotation of the ellipsoidal mirror in the horizontal plane. Most notably, a specially designed motor support block 48 is positioned between the polar angle motor 44 and the z-axis motor 45. This support block 48 ensures that the ellipsoidal mirror 47 and the analyzer head 54 maintain a safe distance during dimming, preventing collision damage. The z-axis motor 45 is directly fixed to the top of the motor support block 48, enabling nanometer-precision vertical movement of the ellipsoidal mirror in the z-direction. During dimming, the tilt angle motor 43 is positioned slightly below the analyzer head 54, preventing any contact or collision and ensuring its safety during dimming.

[0028] The ellipsoidal mirror holder 46 is connected to the top of the z-axis motor 45. This holder 46 is manufactured using an integrated process, resulting in a compact design and small footprint. Connected to the z-axis motor 45, its horizontal arm extends forward above the sample holder 21, and the ellipsoidal mirror 47 is secured by six precision set screws. This integrated design not only ensures the relative positional stability between the ellipsoidal mirror 47 and the holder 46 but also significantly reduces the overall size and weight, allowing the ellipsoidal mirror 47 to be as close as possible to the surface of the sample 52, meeting its short working distance requirements. During experimental light adjustment, the position and angle of the ellipsoidal mirror 47 need to be adjusted. It is important to note that the rotation axis of the tilt motor 43 and the optical axis of the ellipsoidal mirror 47 should be placed at similar heights to adjust the ellipsoidal mirror 47 and achieve the required optical path collimation. The ellipsoidal mirror support 46 can move in five degrees of freedom: x, y, z, tilt, and polar. The z-axis motor 45 is located close to and below the ellipsoidal mirror support 46, which minimizes its load and reduces resistance during upward movement along the z-axis. Because the working distance of the ellipsoidal mirror 47 is very short, this design of the ellipsoidal mirror support 46 allows the ellipsoidal mirror 47 to be as close as possible to the sample 52.

[0029] All four modules work closely together in a compact space, ensuring nanometer-level precision in five degrees of freedom at the ultra-low temperature, non-magnetic, four-electrode, and sample 52 locations, while simultaneously controlling the ellipsoidal mirror 47 in five degrees of freedom. This allows for successful focusing of the beamline 53 without damaging the analyzer, and provides a sufficiently large photoelectron emission angle 55 for the analyzer to collect photoelectrons from the sample 52. All materials used are ultra-high vacuum compatible and non-magnetic.

[0030] This invention represents another successful example of combining synchrotron radiation sources with angle-resolved photoelectron spectroscopy, differing from the nano-ARPES of the S2 beamline in two key aspects. The first difference lies in the different focusing method used for beamline 53: an ellipsoidal mirror 47 is encapsulated and assembled with a nanoscale displacement stage using a special mechanical structure, achieving nanometer-precision mechanical movement in its five degrees of freedom (x, y, z, tilt, and polar) to focus beamline 53 and achieve a spatial resolution of less than 1 μm. Most importantly, the ellipsoidal mirror 47 can focus light across a wider wavelength range, offering advantages such as high throughput and good beam stability. However, this method places extremely high demands on optical path collimation, posing a challenge to the encapsulation of the ellipsoidal mirror 47 and the design of the motion mechanism. The second difference is the method for achieving in-plane rotation of sample 52: a worm gear mechanism is used, manipulating a rocker arm outside a vacuum to achieve rotation of the in-plane angle of sample 52.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage, characterized in that, include: The base module (1) is an integral plate structure; The sample holder control module (2) is located on the base module (1). From bottom to top, it includes a polar angle motor (44), an x-axis motor (41), a y-axis motor (42), a z-axis motor (45), and a sample holder (21). It can realize the linkage control of the sample holder (21) in the three translational degrees of freedom of x, y, and z and the polar angle rotational degree of freedom. The sample holder support module (3) is located on the support block between the polar angle motor (44) and the x-axis motor (41) and is used to support the sample holder (21) during sample transfer or sample change. The ellipsoidal mirror control module (4) is located on the base module (1) and on one side of the sample holder (21). It is equipped with an x-axis motor (41), a y-axis motor (42), a tilt angle motor (43), a polar angle motor (44) and a z-axis motor (45), which can realize the control of the ellipsoidal mirror (47) in the three translational degrees of freedom of x, y and z and the two rotational degrees of freedom of tilt angle and polar angle. The sample holder control module (2) and the ellipsoid mirror control module (4) are arranged in parallel in space.

2. The multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage according to claim 1, characterized in that, The stator of the polar angle motor (44) in the sample holder control module (2) is connected to the base module (1), and the rotor rotates to adjust the azimuth angle of the sample (52). The x-axis motor (41), y-axis motor (42) and z-axis motor (45) are connected in sequence through lightweight support blocks to realize the translational movement of the sample holder (21) in three-dimensional space.

3. The multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage according to claim 1, characterized in that, Sample holder (21) includes: The worm (212) is arranged vertically and can only rotate about its own axis; A flexible shaft (213) is coaxially connected to the top of the worm (212) and is used to transmit rotational torque and absorb axial and radial deviations; The gripping handle (215) is fixed to the top of the flexible shaft (213) and is suitable for external operation tool clamping and driving; The worm gear (211) is arranged vertically and meshes with the worm (212); The sample stage (214) is fixedly connected to the worm gear (211) and is used to support the sample holder (51). Among them, the rotational degree of freedom of the sample stage (214) is adjusted by means of the external rotating gripping handle (215), which is driven by the flexible shaft (213), worm (212) and worm wheel (211) in sequence.

4. The multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage according to claim 1, characterized in that, The sample holder support module (3) includes: The support structure is made of non-magnetic sheet material and fixed on the support block between the polar angle motor (44) and the x-axis motor (41); Multiple locking strips (31) are made of non-magnetic material and fixed on the support structure, and have grooves to lock the sample holder (21). The groove structure opening position matches the movement path of the sample holder (21), so that the weight of the sample holder (21) is borne by the locking strip (31) after it is inserted.

5. A multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage according to any one of claims 1-4, characterized in that, The ellipsoidal mirror control module (4) is arranged in layers from bottom to top: x-axis motor (41), y-axis motor (42), tilt motor (43), polar motor (44) and z-axis motor (45). The tilt motor (43) has a horizontal rotation axis and the polar motor (44) has a vertical rotation axis.

6. The multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage according to claim 5, characterized in that, The ellipsoid control module (4) has a motor support block (48) between the polar angle motor (44) and the z-axis motor (45) to maintain a safe distance between the ellipsoid (47) and the analyzer head (54) during the dimming process.

7. The multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage according to claim 6, characterized in that, The ellipsoid control module (4) also includes an ellipsoid support (46), which is made in one piece and is connected to the top of the z-axis motor (45) and extends horizontally above the sample holder (21). The ellipsoid (47) is fixed by multi-point set screws.

8. The multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage according to claim 7, characterized in that, The tilt motor (43) is positioned below the analyzer head (54), and its rotational motion area maintains a safe, non-contact distance from the analyzer head (54).

9. The multi-degree-of-freedom optical path focusing mechanism and low-temperature sample stage according to claim 7, characterized in that, The z-axis motor (45) of the ellipsoidal mirror control module (4) is positioned close to the ellipsoidal mirror support (46) to minimize the upward motion load along the z-axis.

10. A multi-degree-of-freedom optical path focusing mechanism and a low-temperature sample stage according to claim 9, characterized in that, The rotation axis of the tilt motor (43) is arranged at a similar height to the optical axis of the ellipsoidal mirror (47) to meet the requirements for optical path collimation adjustment.

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