File updating method and upper computer

Abstract

The invention provides a file updating method and an upper computer, the method executes a data acquisition function by responding to a file updating request, and the data acquisition function comprises obtaining target information of a target file and sending the target information to a bridging program to trigger the bridging program to create or update the target file, the target information comprises candidate device data and data acquisition information and / or data types of the candidate device data, and the target file comprises to-be-updated files in data collection configuration files in the bridging program, so that when the data collection configuration files have updating requirements, the data collection configuration files are updated. According to the invention, the data processing program in the upper computer can automatically obtain the data required when the data collection configuration file is updated, and sends the data to the bridging program to trigger the bridging program to update the data collection configuration file, so that the automatic updating of the data collection configuration file is realized; the updating efficiency of the data collection configuration file and the accuracy of the updating result are improved, and the labor cost is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a document update method and a host computer. Background Technology

[0002] With the increasing informatization of society, the demand for semiconductor process equipment is also growing stronger. To enable users to monitor and analyze the operation of semiconductor process equipment, a Data Collection Plan (DCP) is typically sent from the client (Host) to the Equipment Data Acquisition Service (EDAService). The EDAService then sends the activated DCP to the EDABridge, which registers and collects the equipment data in the DCP and returns the collected data to the client through the EDAService.

[0003] Bridging programs typically register and collect device data based on data collection configuration files. These files can include multiple candidate device data, identification information for each candidate device, data acquisition channels, and data acquisition frequencies. When the category and / or attributes of device data in semiconductor process equipment are updated, the data collection configuration file needs to be updated to ensure effective data collection.

[0004] Currently, data collection configuration files are typically updated manually, which is complex, error-prone, and therefore cannot be updated quickly and effectively, and also incurs high labor costs. Summary of the Invention

[0005] To address the aforementioned technical problems, this application provides a file update method and a host computer to solve the problems of the inability to quickly and effectively update data collection configuration files and the high labor costs in the prior art.

[0006] To achieve the above technical objectives, the embodiments of this application provide the following technical solutions:

[0007] Firstly, this specification provides a file update method applied to a data processing program on a host computer. The host computer further includes a bridging program, which is used to collect device data based on a data collection configuration file and data collection request information sent by a device data collection server. The method includes:

[0008] In response to a file update request, a data acquisition function is executed, the data acquisition function including: obtaining target information corresponding to the target file; the target file includes the file to be updated in each of the data collection configuration files; the target information includes candidate device data and data acquisition information and / or data type of each candidate device data;

[0009] The target information is sent to the bridging program to trigger the bridging program to create or update the target file based on the target information.

[0010] In one implementation, obtaining the target information corresponding to the target file includes:

[0011] Obtain candidate device data corresponding to the target file and model information for each candidate device data; the model information is used to characterize the device components or data interfaces corresponding to the device data.

[0012] Based on the model information of each candidate device data and the predetermined device data configuration file, the data acquisition information and / or data type of each candidate device data are determined; the device data configuration file includes the correspondence between the model information and the data acquisition information and / or data type of the device data.

[0013] In one implementation, the file update request includes one of the following: a file update request sent during the bridging program initialization process, a file update request triggered when device data is updated, and a file update request entered by the user.

[0014] In one implementation, when the file update request is a file update request triggered by device data update or a file update request input by the user, it further includes:

[0015] A file update command is sent to the bridging program, which triggers the bridging program to interrupt the acquisition of device data.

[0016] In one implementation, the candidate device data includes device parameters and device events;

[0017] When the candidate device data is device parameters, the data type includes host computer parameters, slave computer parameters, factory automation parameters, and configuration parameters. The configuration parameters include the host computer parameters, slave computer parameters, and factory automation parameters whose data acquisition frequency is less than or equal to a preset acquisition frequency.

[0018] When the candidate device data is a device event, the data type includes host computer events and factory automation events.

[0019] In one implementation, before performing the data acquisition function in response to a file update request, the method further includes:

[0020] The data acquisition function is activated during initialization, and the bridging program is initialized after the data acquisition function is activated.

[0021] Secondly, this specification provides another file update method applied to a bridging program on a host computer. The bridging program collects device data based on a data collection configuration file and data collection request information sent by a device data collection server. The host computer also includes a data processing program for obtaining target information required when updating the data collection configuration file. The method includes:

[0022] The system receives target information corresponding to a target file sent by the data processing program; the target file includes files to be updated in each of the data collection configuration files; the target information includes candidate device data and data collection information and / or data type of each candidate device data.

[0023] The target file is created or updated based on the target information.

[0024] In one implementation, it further includes:

[0025] During initialization, obtain the update method of the target file;

[0026] When the target file is updated automatically, a file update request is sent to the data processing program.

[0027] In one implementation, it further includes:

[0028] Upon receiving a file update instruction from the data processing program, the acquisition of device data is interrupted.

[0029] Thirdly, embodiments of this specification provide a host computer, including at least one processor and at least one memory, wherein the memory stores a computer program, and when the computer program is executed by the processor, it implements the file update method as described in any of the preceding claims.

[0030] Fourthly, embodiments of this specification provide a computer-readable storage medium storing a computer program that, when executed by a processor, implements the file update method as described in any of the preceding claims.

[0031] Fifthly, embodiments of this specification provide a computer program product or computer program, the computer program product including a computer program stored in a computer-readable storage medium; a processor of the computer device reads the computer program from the computer-readable storage medium, and when the processor executes the computer program, it implements the file update method as described in any of the preceding claims.

[0032] As can be seen from the above technical solutions, the embodiments of this application provide a file update method and a host computer. The file update method executes a data acquisition function in response to a file update request. The data acquisition function includes obtaining target information of a target file. The target information includes candidate device data and data acquisition information and / or data types of each candidate device data. The target file includes the file to be updated in each data collection configuration file in the bridging program. The target information is sent to the bridging program to trigger the bridging program to create or update the target file based on the target information. Thus, when there is an update requirement for the data collection configuration file in the bridging program, the data required for updating the data collection configuration file can be automatically obtained by the data processing program in the host computer and sent to the bridging program to trigger the bridging program to update the data collection configuration file according to the received data. This realizes the automatic update of the data collection configuration file in the bridging program, improves the update efficiency and accuracy of the update results of the data collection configuration file, and effectively reduces labor costs. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of a data collection system provided for one embodiment of this specification.

[0035] Figure 2 This is a schematic diagram of the data acquisition process in related technologies.

[0036] Figure 3 This is a flowchart illustrating a file update method provided for implementation of this specification.

[0037] Figure 4 This is a flowchart illustrating another file update method provided for implementation of this specification.

[0038] Figure 5This is a flowchart illustrating another file update method provided for implementation of this specification. Detailed Implementation

[0039] Unless otherwise defined, the technical or scientific terms used in the embodiments of this specification shall have the ordinary meaning understood by one of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not indicate any order, quantity, or importance, but are merely used to avoid confusion of constituent elements.

[0040] Unless the context otherwise requires, throughout this specification, "a plurality of" means "at least two," and "including" is interpreted as open-ended or encompassing, that is, "including, but not limited to." In the description of this specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this specification. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example.

[0041] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this specification.

[0042] Overview

[0043] As described in the background section, with the increasing informatization of society, the demand for semiconductor process equipment is also growing stronger. To enable users to monitor and analyze the operation of semiconductor process equipment, data collection systems are typically used to provide users with relevant equipment data. (Reference) Figure 1 , Figure 1A schematic diagram of the data collection system is shown. The client can create a data collection plan through the data acquisition system provided by the factory and send the created data collection plan to the equipment data collection server. The equipment data collection server saves the data collection plan and event alarm triggering conditions. In order to improve data collection efficiency, the equipment data collection server can register the parameters to be collected and / or the events to be triggered through the bridging program of the host computer while saving the data collection plan. During the registration process, it is necessary to search for the corresponding parameters or events in the relevant data collection configuration files. The data collection configuration files can include parameter collection configuration files (e.g., EDAData.xml) and event collection configuration files (e.g., EDAEvent.xml). When registering parameters, if the parameter is included in the parameter collection configuration file, the parameter is saved in the parameter registration list; if the parameter is not included in the parameter collection configuration file, the registration is considered to have failed. When registering events, if the event is included in the event collection configuration file, the event is saved in the event registration list; if the event is not included in the event collection configuration file, the registration is considered to have failed. At the same time, the bridging program can subscribe to the event triggering of each event. That is, when any event in the semiconductor process equipment is triggered, the bridging program is notified. The bridging program can search for the corresponding event in the event registration list based on the event's identifier information. If the event exists in the event registration list, it indicates that an event in the data acquisition plan has been triggered, and the event is sent to the device data collection server. After receiving the event, the device data collection server can obtain the corresponding parameter data from the bridging program according to the data acquisition plan and return it to the client. During the process of the device data collection server obtaining the corresponding parameter data from the bridging program, the bridging program can send the collection frequency and data channel of the corresponding parameters in the parameter collection configuration file to the data processing program. After the data is collected by the data processing program, it is cached in the bridging program. The device data collection server can obtain the corresponding data from the cache area of ​​the bridging program through the corresponding interface and return it to the client.

[0044] Taking data collection of parameters with event triggers as an example, the data collection process can be as follows: Figure 2 As shown, the process includes: the client creating and activating a data acquisition plan according to customer requirements, and then sending the activated data acquisition plan to the device data collection server; after receiving the data acquisition plan, the device data collection server parses the data acquisition plan and triggers the bridge program to register events through the RegisterEvents interface; at the same time, the device data collection server waits to start triggering events.

[0045] After receiving the parsing results of the data acquisition plan, the bridging program parses the event collection configuration file and saves the parsing results as host computer events (CTCEvent) and factory automation events (FAEvent) according to the event type. It then checks whether the events to be registered in the data acquisition plan exist in the host computer events and factory automation events. If they exist, the program saves the event in the event registration list and marks the event's identifier variable (e.g., ifSub) in the event registration list as True. When an event is triggered on the host computer, the bridging program is notified of the event. Upon receiving the event, the bridging program searches for the event in the event registration list. If the event is not found in the event registration list (i.e., the event's identifier variable is marked as False), it returns. If the event is found in the event registration list (i.e., the event's identifier variable is marked as True), it sends the event to the device data collection server through the EventTrigger interface. After receiving the event trigger message, the device data collection server determines that the event is a StartTrigger event. If so, it triggers the bridging program to register the parameters carried by the event through the RegisterParameters interface. At the same time, the device data collection server starts collecting data on the parameters carried by the event. During the registration process of the parameters carried by the event, the bridging program parses the parameter collection configuration file and adds unregistered parameters from the parameters carried by the event to a new parameter list (newParamArray). It also adds parameters from the new parameter list to the parameter registration list. For example, the bridging program checks if a parameter in the new parameter list exists in the parsed parameter collection configuration file. If it does, it saves the parameter in the parameter registration list and marks the parameter's identifier variable (e.g., ifSub) in the parameter registration list as True. Simultaneously, it saves the collection frequency of the parameter in the parameter collection configuration file in a dictionary. The dictionary can include an index and the corresponding content, where the parameter's identifier information (e.g., parameter name) can be used as the index, and the parameter's collection frequency can be used as the corresponding content.After registration, the bridging program checks whether the conditions for starting the data acquisition thread are met. If not, the data acquisition thread stops; if so, it generates and starts the data acquisition thread. The data acquisition thread then sends the acquisition frequency of each parameter carried by the start trigger event to the data processing program. The data processing program acquires the corresponding parameters according to their acquisition frequencies and sends them to the bridging program's buffer area. The device data collection server determines the acquisition parameter list based on the data acquisition plan and obtains the parameter values ​​of the corresponding parameters from the bridging program's buffer area through a corresponding interface (e.g., ICTCInterface). It then combines the data acquisition results according to the data acquisition plan and reports them to the client, which can then view the corresponding data acquisition results. Simultaneously, the device data collection server stops data acquisition when it determines that the data acquisition plan meets the stop acquisition conditions, and the client deactivates the data acquisition plan, ending the data acquisition process.

[0046] Currently, data collection configuration files are typically updated manually. These files can include parameter collection configuration files and event collection configuration files. For example, when the data processing program starts, it automatically updates all host computer, slave computer, and factory automation parameters to the factory automation variable list (variable table). The variable list stores attribute information such as parameter identifiers (VIDs) and parameter names for all host computer, slave computer, and factory automation parameters. Therefore, during the update of the parameter collection configuration file, it is necessary to manually export the variable list from the factory automation database to obtain all host computer, slave computer, and factory automation parameters. Then, the parameter name is used to find each parameter in the variable list in the raw data configuration file (e.g., the RawDataConfig.xml file). The raw data configuration file stores all host computer, slave computer, and factory automation parameters, as well as their parameter names and data channels. This ensures a one-to-one match between the variable identifiers in the variable list and the data channels in the raw data configuration file. Simultaneously, the collection frequency of each parameter is set according to its parameter type in the variable list to generate the parameter collection configuration file. Furthermore, upon startup, the data processing program updates the event list in the factory automation database with all host computer events and factory automation events. This event list stores attribute information such as event identifiers (VIDs), event names, and event grouping information for all host computer and factory automation events. Therefore, updating the event collection configuration file requires manually exporting the event list from the factory automation database to obtain all host computer and factory automation events. Then, each event in the event list is searched for in the event configuration file (e.g., EventConfig.xml) using its event name and event grouping information. The event configuration file stores the event names and event grouping information for all current host computer and factory automation events. This process involves creating a one-to-one match between the event identifiers in the event list and the event names in the event configuration file to generate the event collection configuration file. As can be seen, updating the data collection configuration file is extremely complex, error-prone, and cannot be done quickly and effectively, resulting in high labor costs.

[0047] To address the problems of traditional methods failing to quickly and effectively update data collection configuration files and incurring high labor costs, the file update method in this application executes a data acquisition function in response to a file update request. This data acquisition function includes obtaining target information from a target file. The target information includes candidate device data and data acquisition information and / or data types for each candidate device. The target file includes the file to be updated in each data collection configuration file within the bridging program. The target information is then sent to the bridging program to trigger it to create or update the target file based on the target information. Therefore, when there is an update requirement for the data collection configuration file in the bridging program, the data processing program in the host computer can automatically obtain the data needed for updating the data collection configuration file and send it to the bridging program to trigger it to update the data collection configuration file based on the received data. This achieves automatic updating of the data collection configuration file in the bridging program, improving the update efficiency and accuracy of the update results, and effectively reducing labor costs.

[0048] Meanwhile, in order to further improve the efficiency and flexibility of updating the data collection configuration file, the file update method provided in this specification also specifies the specific way of obtaining the target information corresponding to the target file and the specific way of triggering the data processing program to execute the data collection function at different times.

[0049] Based on the above inventive concept, the document update method provided in the embodiments of this specification will be described exemplarily below.

[0050] Exemplary methods

[0051] This specification provides a file update method applied to a data processing program on a host computer. The host computer further includes a bridging program, which collects device data based on a data collection configuration file and data collection request information sent by a device data collection server. Figure 3 As shown, the method includes:

[0052] S301. In response to a file update request, execute a data acquisition function, the data acquisition function including: obtaining target information corresponding to a target file; the target file includes files to be updated in each of the data collection configuration files; the target information includes candidate device data and data acquisition information and / or data types of each candidate device data.

[0053] Specifically, the host computer can include the host computer of semiconductor process equipment, which can be etching equipment, deposition equipment, cleaning equipment, etc.

[0054] The host computer may include a bridging program, which can be used to collect device data based on the data collection configuration file and the data collection request information sent by the device data collection server. The data collection configuration file may include a parameter collection configuration file and an event collection configuration file. The parameter collection configuration file may include attribute information such as parameter names, parameter identifiers, data channels, and acquisition frequencies for host computer parameters, slave computer parameters, and factory automation parameters. The event collection configuration file may include attribute information such as event names, event identifiers, and event types for host computer events and factory automation events. The data collection request information sent by the device data collection server may include the data collection plan sent from the client to the device data collection server.

[0055] The host computer may also include a data processing program. This program performs functions other than those performed by the bridging program, which are part of the functions executed by the host computer. For example, the data processing program can be used for setting equipment parameters, formulating production plans, human-machine interaction, and communicating with external devices. It can also be used for process scheduling, data acquisition and monitoring, and fault diagnosis and alarms during the execution of process tasks on semiconductor process equipment. In other words, the data processing program and the bridging program are two functionally independent programs within the host computer, which can run in parallel and interact with each other.

[0056] File update requests can be used to instruct the host computer to perform data acquisition functions. These file update requests can include those sent from the bridging program to the data processing program, those triggered when the equipment data of the semiconductor process equipment is updated, and those input by the user through a human-machine interface. The equipment data can include equipment parameters and / or equipment events. Equipment parameters can include host computer parameters, slave computer parameters, and factory automation parameters. Host computer parameters can include parameters used by the data processing program, such as interface parameters and RecipeID. Slave computer parameters can include process parameters, such as temperature and air pressure. Factory automation parameters can include parameters issued by the factory automation system, such as CarrierID and WaferID. Equipment events can include host computer events and factory automation events. Host computer events include Ch1ProcessStart and Ch1ProcessComplete, while factory automation events include E87CarrierClosed and E87CarrierIdRead transmitted via the E87 standard data interface. It is understood that equipment events typically do not include slave computer events; however, if slave computer events exist, they can be processed within the host computer events.

[0057] In practice, the data processing program can perform data acquisition functions in response to file update requests. During the data acquisition process, target information corresponding to the target file can be obtained.

[0058] The target file may include files to be updated from various data collection configuration files in the bridging program, such as parameter collection configuration files and / or event collection configuration files. The target information corresponding to the target file, i.e., the data required by the bridging program during the update process, may include candidate device data and attribute information for each candidate device.

[0059] The candidate device data can include all device parameters and all device events. The attribute information of the candidate device data can include data acquisition information and / or data type. The data acquisition information can include the data acquisition frequency, which can be represented by acquisition frequency levels, such as High, Normal, and Low. Data type can include parameter type and event type. Parameter types can include host computer parameters, slave computer parameters, and factory automation parameters, etc., while event types can include host computer events and factory automation events, etc. For example, when the target file is a parameter collection configuration file, the corresponding target information can include all device parameters, as well as the data acquisition frequency and parameter type for each device parameter. When the target file is an event collection configuration file, the corresponding target information can include all device events, as well as the event name and event type for each device event. Additionally, when the target file is a parameter collection configuration file, the corresponding target information can also include parameter identifier (VID), parameter name, parameter model information, and parameter data channel, etc. The data channel can be used to characterize the acquisition path of the corresponding device parameter; when the target file is an event collection configuration file, the corresponding target information can also include event model information, etc.

[0060] The data processing program can pre-configure equipment data configuration files. These files can include the correspondence between equipment data model information and data acquisition information and / or data types. During the process of acquiring target information corresponding to the target file, the program can determine the data acquisition information and / or data types of each candidate device based on its model information and this correspondence. Simultaneously, the program can also obtain parameter identifiers for each device parameter and event identifiers for each device event from the variable list and event list in the factory automation database via a data interaction interface, as well as data channels from the raw data configuration file configured within the program. It is understood that each device parameter and event acquired by the program includes the parameter or event name and its model information. Therefore, the program can automatically acquire the data needed to update the data collection configuration file.

[0061] S302. The target information is sent to the bridging program to trigger the bridging program to create or update the target file based on the target information.

[0062] After obtaining the target information corresponding to the target file, the host computer can send the target information to the bridging program. For example, the target information can be sent to the bridging program in the form of a variable array to trigger the bridging program to create or update the target file based on the target information. This realizes the automatic update of the data collection configuration file in the bridging program without the need to manually export related files and update the data collection configuration file, and without the need to manually configure the data acquisition information of the device parameters. This greatly improves the update efficiency and accuracy of the data collection configuration file and effectively reduces labor costs.

[0063] To quickly and effectively obtain target information corresponding to a target file, in one embodiment of this specification, obtaining the target information corresponding to the target file includes:

[0064] Obtain candidate device data corresponding to the target file and model information for each candidate device data; the model information is used to characterize the device components or data interfaces corresponding to the device data.

[0065] Based on the model information of each candidate device data and the predetermined device data configuration file, the data acquisition information and / or data type of each candidate device data are determined; the device data configuration file includes the correspondence between the model information and the data acquisition information and / or data type of the device data.

[0066] Specifically, the model information of candidate device data can be used to characterize the device components or data interfaces corresponding to the device data. For example, for host computer parameters, slave computer parameters, and host computer events, the model information can be used to characterize device components, such as transmission components, heating components, etc.; for factory automation parameters and factory automation events, the model information can be used to characterize data interfaces, such as data interfaces of the E87 standard, E30 standard, E42 standard, E40 standard, E92 standard, etc.

[0067] During the process of obtaining target information corresponding to the target file, the data processing program can obtain candidate device data and model information of each candidate device data corresponding to the target file, so as to determine the data acquisition information and / or data type of each candidate device data based on the model information of each candidate device data and the predetermined device data configuration file.

[0068] Specifically, device data configuration files can be pre-configured into the data processing program. These configuration files can include the correspondence between model information and device data acquisition information and / or data types. For example, a device data configuration file can include the correspondence between model information, parameter types, and data acquisition frequency, or the correspondence between model information and data acquisition frequency, and may also include the correspondence between model information and event types.

[0069] In implementation, when the candidate device data is device parameters, the data acquisition frequency of the candidate device data can be obtained based on the model information of the device parameters and the correspondence between the model information and the data acquisition frequency. Alternatively, the data acquisition frequency and parameter type of the candidate device data can be obtained based on the model information of the device parameters and the correspondence between the model information, parameter type, and data acquisition frequency. When the candidate device data is device events, the event type of the candidate device data can be obtained based on the model information of the device events and the correspondence between the model information and the event type. This allows for the rapid and effective acquisition of the target information corresponding to the target files. Furthermore, during the update of the data collection configuration file based on the target information corresponding to each target file, the accuracy of the update results can be effectively guaranteed. Finally, the updated data collection configuration file enables the effective acquisition of device data.

[0070] In order to flexibly and effectively meet the update requirements of data collection configuration files, in one embodiment of this specification, the file update request includes one of the following: a file update request sent during the bridging program initialization process, a file update request triggered when device data is updated, and a file update request entered by the user.

[0071] Specifically, the bridging program can send file update requests to the data processing program during initialization to trigger a callback for updating the data collection configuration file. In implementation, the bridging program can automatically send file update requests to the data processing program during initialization. It can also obtain the update mode of the data collection configuration file and send the file update request to the data processing program when the update mode is automatic. For example, the bridging program can send "GetEDAConfig data (GetEDAConfig)" as a file update request to the data processing program, thus automatically updating the data collection configuration file each time the bridging program initializes, simplifying the data collection configuration file update process.

[0072] Meanwhile, when the data processing program detects updates to device parameters and / or device events during operation, it can automatically trigger a file update request and execute the data acquisition function. This enables timely updates to the data collection configuration file when device data is updated, and effectively ensures the validity of the data collected by the client when the client has a data collection need.

[0073] In addition, when users have a need to update the data collection configuration file, for example, when users update device parameters and / or device events, they can input a file update request to the data processing program through the human-machine interface or control buttons to trigger the data processing program to execute the data acquisition function, thereby effectively meeting the user's data collection configuration file update needs.

[0074] Therefore, by triggering the data processing program to execute the data acquisition function through file update requests sent during the bridging program initialization process, file update requests triggered when device data is updated, or file update requests entered by the user, the update requirements of the data collection configuration file can be flexibly and effectively met.

[0075] In one feasible implementation, when the file update request is a file update request triggered by device data update or a file update request entered by the user, it further includes:

[0076] A file update command is sent to the bridging program, which triggers the bridging program to interrupt the acquisition of device data.

[0077] Specifically, when the data processing program detects that device parameters and / or device events have been updated, or when it receives a file update request from the user, it can also send a file update instruction to the bridging program to trigger the bridging program to interrupt the acquisition of device data, thereby enabling the bridging program to update the data collection configuration file in a timely manner.

[0078] Therefore, when the data processing program detects updates to device parameters and / or device events, or receives user input, it can proactively request the bridging program to update the data collection configuration file.

[0079] In one feasible implementation, the candidate device data includes device parameters and device events;

[0080] When the candidate device data is device parameters, the data type includes host computer parameters, slave computer parameters, factory automation parameters, and configuration parameters. The configuration parameters include the host computer parameters, slave computer parameters, and factory automation parameters whose data acquisition frequency is less than or equal to a preset acquisition frequency.

[0081] When the candidate device data is a device event, the data type includes host computer events and factory automation events.

[0082] Specifically, data types can include parameter types and event types. When the candidate device data is device parameters, the data type of the device parameters includes parameter types. Parameter types can include host computer parameters, slave computer parameters, factory automation parameters, and configuration parameters. Thus, during the parameter registration process, the bridging program can simultaneously match the parameters to be collected in the data acquisition plan in the parameter collection configuration file according to the parameter type and parameter identification code, effectively improving the matching efficiency and thereby improving the data acquisition efficiency of the bridging program.

[0083] The configuration parameters can include parameters from the host computer parameters, slave computer parameters, and factory automation parameters whose data acquisition frequency is less than or equal to a preset acquisition frequency. For example, equipment parameters with a low acquisition frequency level. Considering that low-frequency parameters account for a relatively high proportion of all equipment parameters in semiconductor process equipment, the bridging program can prioritize matching the parameters to be acquired from the host computer parameters, slave computer parameters, and factory automation parameters in the parameter collection configuration file based on the parameter type and parameter identification code during parameter registration. If a match fails, it can perform a match from the configuration parameters based on the parameter identification code, thereby further improving the data acquisition efficiency of the bridging program.

[0084] In addition, when the candidate device data is a device event, the data type of the device event includes the event type. The event type can include host computer events and factory automation events. Therefore, during the event registration process, the bridging program can simultaneously match the events to be triggered in the data acquisition plan in the event collection configuration file according to the event type and event identifier, which effectively improves the matching efficiency and thus improves the data acquisition efficiency of the bridging program.

[0085] In one feasible implementation, prior to performing the data acquisition function in response to a file update request, the method further includes:

[0086] The data acquisition function is activated during initialization, and the bridging program is initialized after the data acquisition function is activated.

[0087] Specifically, the data processing program can activate the data acquisition function during initialization and acquire all device data of the semiconductor process equipment, such as device parameters and device events, after activating the data acquisition function. This enables the program to quickly and effectively acquire the data acquisition information and / or data type of each device when it receives a file update request sent by the bridging program and return it to the bridging program.

[0088] In addition, after activating the data acquisition function, the data processing program can also initialize the bridging program, so that the bridging program can send a file update request to the data processing program when the host computer starts up to retrieve the data required during the data collection configuration file update process, and update the data collection configuration file, thereby ensuring the effective update of the data collection configuration file.

[0089] This specification also provides another file update method applied to a bridging program on a host computer. The bridging program collects device data based on a data collection configuration file and data collection request information sent by the device data collection server. The host computer further includes a data processing program, which obtains the target information required for updating the data collection configuration file, such as... Figure 4 As shown, the method includes:

[0090] S401. Receive target information corresponding to the target file sent by the data processing program; the target file includes the file to be updated in each of the data collection configuration files; the target information includes candidate device data and data collection information and / or data type of each candidate device data.

[0091] Specifically, after sending a file update request to the data processing program, or after receiving a file update instruction from the data processing program, the bridging program can receive the target information corresponding to the target file sent by the data processing program in real time.

[0092] S402. Create or update the target file based on the target information.

[0093] Specifically, when the bridging program receives the target information corresponding to the target file sent by the data processing program, it can cache the target information and determine whether the target file exists. If it exists, it updates the target file based on the target information in the cache. If it does not exist, it creates the target file first and updates the target file based on the target information in the cache.

[0094] Specifically, when updating the target file based on the target information in the cache, the data in the target file can be compared with the data in the cache. If the target information exists in the target file, it can be updated; if the target information does not exist in the target file, it can be inserted. At the same time, if the device data in the target file is not in the cache, the device data and its related attribute information can be deleted from the target file, thereby enabling automatic updates of the data collection configuration file.

[0095] In one feasible implementation, it also includes:

[0096] During initialization, obtain the update method of the target file;

[0097] When the target file is updated automatically, a file update request is sent to the data processing program.

[0098] Specifically, the device data configuration file may include the update method for the data collection configuration file, which may include automatic update and manual update.

[0099] During initialization, the bridging program can read the update mode of the data collection configuration file from the device data configuration file through the data interaction interface between the data processing program and the bridging program. When the update mode is automatic update, it sends a file update request to the data processing program to retrieve the data used to update the data collection configuration file. For example, the bridging program can send "GetEDAConfig data (GetEDAConfig)" as a file update request to the data processing program, thus automatically updating the data collection configuration file each time the bridging program initializes.

[0100] In one feasible implementation, it also includes:

[0101] Upon receiving a file update instruction from the data processing program, the acquisition of device data is interrupted.

[0102] Specifically, when the bridging program receives a file update instruction from the data processing program, if it is collecting device data, it can first interrupt the collection of device data, and when it receives the target information corresponding to the target file sent by the data processing program, it can update the target file based on the target information, thereby enabling timely updates to the data collection configuration file.

[0103] Understandably, once the target file update is complete, the bridging program can re-register device parameters and / or device events according to the data acquisition plan, and then collect device data based on the latest registration results, thereby effectively improving the effectiveness of data acquisition.

[0104] The following example illustrates the implementation process of the document update method of this application. (Reference) Figure 5 File update methods may include:

[0105] During initialization, the data processing program activates the data acquisition function and initializes the bridging program. During initialization, the bridging program reads the update mode of the data collection configuration file from the device data configuration file. If the update mode is automatic, it sends a file update request to the data processing program. Upon receiving the file update request, the data processing program obtains the target information corresponding to the data collection configuration file and sends it to the bridging program. The bridging program then creates or updates the data collection configuration file based on the received target information. Simultaneously, when the data processing program detects an update to the semiconductor process equipment's data or receives a user-inputted file update request, it sends a file update command to the bridging program and obtains the target information corresponding to the data collection configuration file, sending it to the bridging program as well. Upon receiving the file update command, the bridging program interrupts device data acquisition and creates or updates the data collection configuration file based on the received target information. Furthermore, when the data processing program detects an update to the semiconductor process equipment's data, it can also simultaneously update the original data configuration file (e.g., RawDataConfig.xml or CustomVariables.xml) and the event configuration file (e.g., EventConfig.xml).

[0106] Exemplary device

[0107] In one exemplary embodiment of this specification, a host computer is also provided, including: at least one processor and at least one memory, the memory storing a computer program, which, when executed by the processor, implements the file update method as described in any of the above embodiments.

[0108] In another exemplary embodiment of this specification, a semiconductor process apparatus is also provided, including a host computer as described in the above embodiments.

[0109] Exemplary computer program products and storage media

[0110] In addition to the methods and devices described above, the file update methods provided in the embodiments of this specification can also be computer program products, which include computer program instructions that, when executed by a processor, cause the processor to perform the steps in the file update methods according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0111] The computer program product described herein can be written in any combination of one or more programming languages ​​to perform the operations of the embodiments described herein. These programming languages ​​include object-oriented programming languages ​​such as Java and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on a semiconductor process device, partially on the device, as a standalone software package, partially on a semiconductor process device and partially on a remote semiconductor process device, or entirely on a remote semiconductor process device or server.

[0112] Furthermore, embodiments of this specification also provide a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a processor of the steps in the file update methods according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0113] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.

[0114] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0115] The embodiments described above are merely illustrative of several implementation methods outlined in this specification. While the descriptions are specific and detailed, they should not be construed as limiting the scope of the solutions provided in this specification. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this specification, and these all fall within the scope of protection of this specification. Therefore, the scope of protection for this patent should be determined by the appended claims.

Claims

1. A file update method, characterized in that, A data processing program applied to a host computer, the host computer further including a bridging program, the bridging program being used to collect device data based on a data collection configuration file and data collection request information sent by the device data collection server, the method including: In response to a file update request, a data acquisition function is executed, the data acquisition function including: obtaining target information corresponding to the target file; the target file includes the file to be updated in each of the data collection configuration files; the target information includes candidate device data and data acquisition information and / or data type of each candidate device data; The target information is sent to the bridging program to trigger the bridging program to create or update the target file based on the target information.

2. The method according to claim 1, characterized in that, The step of obtaining the target information corresponding to the target file includes: Obtain candidate device data corresponding to the target file and model information for each candidate device data; the model information is used to characterize the device components or data interfaces corresponding to the device data. Based on the model information of each candidate device data and the predetermined device data configuration file, the data acquisition information and / or data type of each candidate device data are determined; the device data configuration file includes the correspondence between the model information and the data acquisition information and / or data type of the device data.

3. The method according to claim 1, characterized in that, The file update request includes one of the following: a file update request sent during the bridging program initialization process, a file update request triggered when device data is updated, or a file update request entered by the user.

4. The method according to claim 3, characterized in that, When the file update request is a file update request triggered when device data is updated or a file update request entered by the user, it also includes: A file update command is sent to the bridging program, which triggers the bridging program to interrupt the acquisition of device data.

5. The method according to claim 1, characterized in that, The candidate device data includes device parameters and device events; When the candidate device data is device parameters, the data type includes host computer parameters, slave computer parameters, factory automation parameters, and configuration parameters. The configuration parameters include the host computer parameters, slave computer parameters, and factory automation parameters whose data acquisition frequency is less than or equal to a preset acquisition frequency. When the candidate device data is a device event, the data type includes host computer events and factory automation events.

6. The method according to any one of claims 1 to 5, characterized in that, Before executing the data collection function in response to a file update request, the following steps are also included: The data acquisition function is activated during initialization, and the bridging program is initialized after the data acquisition function is activated.

7. A file update method, characterized in that, A bridging program applied to a host computer, the bridging program being used to collect device data based on a data collection configuration file and data collection request information sent by the device data collection server, the host computer also including a data processing program, the data processing program being used to obtain target information required when the data collection configuration file is updated, the method including: The system receives target information corresponding to a target file sent by the data processing program; the target file includes files to be updated in each of the data collection configuration files; the target information includes candidate device data and data collection information and / or data type of each candidate device data. The target file is created or updated based on the target information.

8. The method according to claim 7, characterized in that, Also includes: During initialization, obtain the update method of the target file; When the target file is updated automatically, a file update request is sent to the data processing program.

9. The method according to claim 7, characterized in that, Also includes: Upon receiving a file update instruction from the data processing program, the acquisition of device data is interrupted.

10. A host computer, characterized in that, It includes at least one processor and at least one memory, wherein the memory stores a computer program that, when executed by the processor, implements the file update method according to any one of claims 1 to 9.

11. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program, which, when executed by a processor, implements the file update method as described in any one of claims 1 to 9.

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