Mode switching method and device of intelligent equipment

Abstract

The invention relates to a mode switching method and device of intelligent equipment, computer equipment, a storage medium and a computer program product. The method is applied to an intelligent machine, the intelligent machine is used for storing a wafer transfer box, and the method comprises the steps of starting a detection program in response to a triggered mode switching operation; detecting the state of the target sensor through the detection program; under the condition that the state meets the mode switching condition, switching the current mode to a second mode, and reporting the related information of the wafer conveying box and the current mode to a server, so that the server controls a crown block to execute goods taking operation based on the related information of the wafer conveying box; the current mode is a first mode; after the crown block completes the goods taking operation, the state of the target sensor continues to be detected through the detection program, and under the condition that the state is updated to be the initial state, the second mode is recovered to the first mode. By adopting the method, the accuracy of mode switching can be effectively ensured while the mode switching efficiency of the intelligent equipment is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of computer, in particular to a mode switching method and device of intelligent equipment. BACKGROUND

[0002] With the development of computer technology and semiconductor handling equipment technology, the advent of 5G era and the Internet has brought great convenience to modern life. Different semiconductor processes usually need to be carried out on different types of wafer processing equipment. Sometimes, each process needs to wait, so it is necessary to transfer materials between these processing equipment or between storage equipment and processing equipment. The overhead hoist transportation (OHT) is a system for transporting materials, mainly including a track suspended on the ceiling (ceiling) and an overhead transportation vehicle (also known as OHT trolley) running along the track. The material transported by the overhead hoist transportation system is mainly a front opening unified pod (Foup), that is, a wafer box.

[0003] However, in the current mode switching method of intelligent equipment, the operator usually needs to manually disable the loading port provided at the front end of the wafer processing equipment, which can be docked with the OHT trolley, before switching the mode of the intelligent machine to realize the transfer of the pod between the OHT trolley and the wafer processing equipment. Obviously, the above-mentioned processing method which relies on manual operation for switching not only needs tedious manual switching, but also is prone to errors, thereby leading to poor efficiency and errors of the mode switching of the intelligent equipment. Therefore, how to improve the efficiency of the mode switching of the intelligent equipment while effectively ensuring the accuracy of the mode switching has become a problem to be solved. SUMMARY

[0004] Therefore, it is necessary to provide a mode switching method and device of intelligent equipment to improve the efficiency of the mode switching of the intelligent equipment while effectively ensuring the accuracy of the mode switching.

[0005] In a first aspect, a mode switching method of a smart device is provided. The method is applied to a smart machine table used for storing a FOUP. The method comprises: in response to a triggered mode switching operation, starting a detection program; detecting a state of a target sensor through the detection program; in a case where the state meets a mode switching condition, switching a current mode to a second mode, and reporting related information of the FOUP and the current mode to a server, so that the server controls a crane to perform a picking operation based on the related information of the FOUP; the current mode is a first mode; after the crane performs the picking operation, continuing to detect the state of the target sensor through the detection program, and in a case where the state is updated to an initial state, recovering from the second mode to the default first mode.

[0006] In a second aspect, a mode switching device of a smart device is provided. The device is applied to a smart machine table used for storing a FOUP. The device comprises: a starting module configured to start a detection program in response to a triggered mode switching operation; a detection module configured to detect a state of a target sensor through the detection program; a switching module configured to switch a current mode to a second mode in a case where the state meets a mode switching condition, and report related information of the FOUP and the current mode to a server, so that the server controls a crane to perform a picking operation based on the related information of the FOUP; the current mode is a first mode; a recovery module configured to, after the crane performs the picking operation, continue to detect the state of the target sensor through the detection program, and in a case where the state is updated to an initial state, recover from the second mode to the default first mode.

[0007] In a third aspect, a computer device is provided. The computer device comprises a memory and a processor. The memory stores a computer program. The processor implements the following steps when executing the computer program: the computer device is applied to a smart machine table used for storing a FOUP. In response to a triggered mode switching operation, a detection program is started. A state of a target sensor is detected through the detection program. In a case where the state meets a mode switching condition, a current mode is switched to a second mode. Related information of the FOUP and the current mode are reported to a server, so that the server controls a crane to perform a picking operation based on the related information of the FOUP. The current mode is a first mode. After the crane performs the picking operation, the state of the target sensor is continued to be detected through the detection program. In a case where the state is updated to an initial state, the second mode is recovered to the default first mode.

[0008] In a fourth aspect, the present application also provides a computer readable storage medium. The computer readable storage medium has a computer program stored thereon, and the computer program, when executed by a processor, implements the following steps: applied to an intelligent machine, the intelligent machine is used for storing a FOUP, in response to a triggered mode switching operation, starting a detection program; through the detection program, detecting a state of a target sensor; in a case where the state meets a mode switching condition, switching a current mode to a second mode, and reporting related information of the FOUP and the current mode to a server, so that the server controls a crane to perform a picking operation based on the related information of the FOUP; the current mode is a first mode; after the crane performs the picking operation, continuing to detect the state of the target sensor through the detection program, and in a case where the state is updated to an initial state, recovering from the second mode to a default first mode.

[0009] In a fifth aspect, the present application also provides a computer program product. The computer program product comprises a computer program, and the computer program, when executed by a processor, implements the following steps: applied to an intelligent machine, the intelligent machine is used for storing a FOUP, in response to a triggered mode switching operation, starting a detection program; through the detection program, detecting a state of a target sensor; in a case where the state meets a mode switching condition, switching a current mode to a second mode, and reporting related information of the FOUP and the current mode to a server, so that the server controls a crane to perform a picking operation based on the related information of the FOUP; the current mode is a first mode; after the crane performs the picking operation, continuing to detect the state of the target sensor through the detection program, and in a case where the state is updated to an initial state, recovering from the second mode to a default first mode.

[0010] The mode switching method and device of the smart device are applied to a smart machine, the smart machine is used for storing a wafer transfer box, a detection program is started by responding to a triggered mode switching operation, and the state of a target sensor is detected through the detection program; in the case that the state of the target sensor meets a mode switching condition, the current mode is switched to a second mode, and the related information of the wafer transfer box and the current mode are reported to a server, so that the server controls a crane to perform a picking operation based on the related information of the wafer transfer box; the current mode is a first mode; after the crane performs the picking operation, the state of the target sensor is continuously detected through the detection program, and in the case that the state is updated to an initial state, the second mode is restored to the default first mode. Since the state of the target sensor can be automatically detected through the detection program, in the case that the state of the target sensor meets the mode switching condition, the current mode can be automatically switched to the second mode, and the related information of the wafer transfer box and the current mode are reported to the server, so that the server controls the crane to perform the picking operation based on the related information of the wafer transfer box, and after the crane performs the picking operation, the state of the target sensor can be continuously detected through the detection program, and in the case that the state is updated to the initial state, the second mode is automatically restored to the default first mode, forming a complete operation closed loop without manual intervention, that is, without manual intervention, reducing the error-prone situation of manual intervention, realizing the mode switching of the automatic smart machine, and improving the mode switching efficiency of the smart machine while effectively ensuring the accuracy of the mode switching. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 An application environment diagram of the mode switching method of the smart device in an embodiment;

[0012] Figure 2 A flowchart of the mode switching method of the smart device in an embodiment;

[0013] Figure 3 A schematic diagram of the overall architecture of the smart machine in an embodiment;

[0014] Figure 4 A schematic diagram of the overall flow of the mode switching method of the smart device provided in an embodiment;

[0015] Figure 5 A schematic diagram of the processing of an abnormal flow in the mode switching method of the smart device provided in an embodiment;

[0016] Figure 6 A schematic diagram of the processing flow in the Input mode in an embodiment;

[0017] Figure 7 A schematic diagram of the processing flow in the Output mode in an embodiment;

[0018] Figure 8 An abnormal processing flow diagram for a mode switching method of a smart device in an embodiment, in which a CarrierID is not read;

[0019] Figure 9 A structural block diagram of a mode switching device of a smart device in an embodiment;

[0020] Figure 10 An internal structural diagram of a computer device in an embodiment. DETAILED DESCRIPTION

[0021] In order to make the purposes, technical solutions and advantages of the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0022] It should be noted that in the following description, the terms "first", "second" and "third" are only used to distinguish similar objects, and do not represent a specific order or sequence of the objects. It can be understood that "first", "second" and "third" can be interchanged in a specific order or sequence as allowed, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0023] The mode switching method of the smart device provided by the embodiments of the present application can be applied to an application environment as shown in Figure 1 The terminal 102 communicates with the server 104 through a network. The data storage system can store data required to be processed by the server 104. The data storage system can be integrated on the server 104, or placed on a cloud or other network server. The terminal 102, i.e. the smart machine, responds to the mode switching operation triggered by the user, starts the detection program, and detects the state of the target sensor through the detection program. In the case that the state of the target sensor meets the mode switching condition, the current mode is switched to the second mode, and the related information of the wafer transfer box and the current mode are reported to the server 104 (such as the upper computer), so that the server 104 controls the crane to perform the picking operation based on the related information of the wafer transfer box, wherein the current mode is the first mode. After the crane performs the picking operation, the terminal 102 continues to detect the state of the target sensor through the detection program, and in the case that the state of the target sensor is updated to the initial state, the terminal 102 is restored to the default first mode from the second mode.

[0024] The terminal 102 can be a smart device, a smart machine, an LPS device (a device for temporarily storing a wafer transfer box), a smart phone, a tablet computer, a notebook computer, a desktop computer, a smart speaker, a smart watch, an Internet of Things device, and a portable wearable device. The Internet of Things device can be a smart speaker, a smart television, a smart air conditioner, and a smart vehicle device. The portable wearable device can be a smart watch, a smart bracelet, and a head-mounted device.

[0025] The server 104 can be a standalone physical server or a service node in a blockchain system. The service nodes in the blockchain system form a peer-to-peer (P2P) network. The P2P protocol is an application layer protocol running on a transmission control protocol (TCP).

[0026] In addition, the server 104 can also be a server cluster composed of multiple physical servers, which can be a cloud server providing cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks (CDNs), and big data and artificial intelligence platforms, and other basic cloud computing services.

[0027] The terminal 102 and the server 104 can be connected through Bluetooth, USB, or a network communication connection mode. The present application does not limit this.

[0028] In one embodiment, as shown in Figure 2 , a mode switching method of a smart device is provided. The method can be executed by the server or the terminal alone, or by the server and the terminal together. The method is applied to the terminal in Figure 1 , for example, to a smart machine for storing a wafer transfer box. The method includes the following steps:

[0029] Step 202: In response to a triggered mode switching operation, a detection program is started.

[0030] The mode switching operation refers to an operation for switching the mode of the smart machine, such as an operation for switching the mode of the Port of the smart machine. That is, the smart machine in the present application can include one or more Ports, and thus the mode switching operation for different Ports can be triggered. The modes of different Ports in the same device do not affect each other.

[0031] The mode switching operation triggered by the user in the present application includes but is not limited to: pressing operation, click operation and the like triggering operation. It can be understood that the triggered mode switching operation in the present application can be the mode switching operation triggered by the hardware control (such as hardware button) of the smart machine, or the mode switching operation triggered by the software control (such as button control displayed in the interface) displayed in the software interface of the smart machine, which is not specifically limited here.

[0032] The detection program refers to a program for detecting the state of each target sensor. For example, the detection program in the present application can be a program pre-configured in each smart machine, which can be triggered to start the automatic running of the detection program in each smart machine through a specific operation.

[0033] The smart machine refers to a smart device for storing a wafer transfer box, and the wafer transfer box contains semiconductor materials. For example, the smart machine in the present application can be an LP device, an LPS (Load Port Station) device, a manual loading and unloading machine and the like. The front-end interface of the smart machine in the present application can display the running state of each platform (Port) in real time, including the running mode, the business state, the sensor state, the external io output state and the Foup related information.

[0034] For example, as shown in Figure 3 , it is a schematic diagram of the overall architecture of the smart machine in the present application. The functional highlights of the smart machine for temporarily storing the wafer transfer box in the present application include but are not limited to: single client architecture, reducing hardware requirements, easy to deploy and maintain, supporting multiple databases. Accurate identification of product information, cooperating with the AMHS system to quickly complete product transfer and realize the best state of on-site product flow operation. At the same time, it can also reduce the risk of manual transportation, reduce the cost of transportation, and ensure the best product quality.

[0035] In step 204, the state of the target sensor is detected by the detection program.

[0036] The target sensor refers to a pre-configured sensor that needs to be detected. The number of target sensors can be one or more, and the type of target sensor can also include different types of sensors. For example, the target sensor in the present application at least includes three types of sensors: pressing sensor, photoelectric sensor and E84 sensor. For example, the number of pressing sensors in the target sensor can be set to 2, that is, the state of the left and right pressing sensors needs to be detected to accurately determine whether the physical placement position of the wafer transfer box is abnormal.

[0037] The state of the target sensor can include a normal state and an abnormal state (i.e. an abnormal state).

[0038] Specifically, taking the artificial loading and unloading machine table (LPS device) as an example, the LPS device cooperates with the OHT (i.e., the overhead crane) to perform Foup loading and unloading through E84 communication, and can perform event communication with the upper system (such as the EAP host computer). Moreover, the LPS device provided in the present application can be configured in a single PORT or a double PORT. The functional highlights of the LPS device at least include: an affinity human-machine interface, stable system integration, Load / UnLoad autonomous switching, and compatibility with multiple EAP communications, etc.

[0039] When a user (such as an operator) wants to use the intelligent machine table, the user can start the intelligent machine table by triggering an operation, and the intelligent machine table automatically initializes the intelligent machine table in response to the start operation triggered by the user, so that each Port port (state) of the intelligent machine table is in a default first mode. For example, the default first mode in the present application can be set as the OutPut mode. Further, the user can trigger a mode switching operation triggered by a hardware control of the current intelligent machine table (for example, the operator presses the mode switching button in the intelligent machine table), so that the intelligent machine table automatically starts a detection program in response to the mode switching operation triggered by the hardware control of the intelligent machine table. Alternatively, the user can also trigger a mode switching operation triggered by a software control of the current intelligent machine table (for example, the operator clicks an interface icon displayed in the front-end interface of the intelligent machine table), so that the intelligent machine table starts a detection program in response to the mode switching operation triggered by the interface icon displayed in the intelligent machine table.

[0040] Further, after the intelligent machine table starts the detection program in response to the mode switching operation triggered by the user, the intelligent machine table can detect the state of the target sensor through the detection program, that is, the state of each sensor is detected in real time through the detection program, and whether the second mode (i.e., the InPut mode) can be switched is determined according to the detected state of each sensor.

[0041] In one embodiment, the target sensor at least includes a pressing sensor, a photoelectric sensor, and an E84 sensor; the intelligent machine table can detect the state of the pressing sensor, the photoelectric sensor, and the E84 sensor through the detection program. For example, the intelligent machine table can detect a first state of the photoelectric sensor through the detection program; the photoelectric sensor is used to detect whether the wafer transfer box exists; at the same time, a second state of the E84 sensor is detected through the detection program; the E84 sensor is used to detect the E84 step sequence state; the E84 step sequence state is used to reflect the safety of the communication state; at the same time, a third state of the pressing sensor is detected through the detection program; the pressing sensor is used to detect whether the physical placement position of the wafer transfer box is abnormal.

[0042] In one of the embodiments, the pressing sensor includes a first pressing sensor and a second pressing sensor; the third state includes an abnormal state and a normal state; the smart machine table can detect the third state of the first pressing sensor through a detection program; and detect the third state of the second pressing sensor through a detection program; if any one of the third state of the first pressing sensor and the third state of the second pressing sensor is an abnormal state, it is determined that the third state is an abnormal state; if the third state of the first pressing sensor and the third state of the second pressing sensor are both normal states, it is determined that the third state is a normal state.

[0043] In one of the embodiments, after it is determined that the third state is an abnormal state if any one of the third state of the first pressing sensor and the third state of the second pressing sensor is an abnormal state, the method further includes: triggering the reporting of an abnormal alarm information to a server, and switching the current port state of the smart machine table to an unusable state; or triggering the sending of an abnormal alarm information to a third-party device, so that a user of the third-party device performs manual abnormal detection, and the current port state of the smart machine table is switched to an unusable state; or in the case where it is detected that the third state of the first pressing sensor and the third state of the second pressing sensor are both normal states, triggering the reporting of a reset abnormal alarm information to a server, and switching the current port state of the smart machine table to an available state.

[0044] Step 206, in the case where the state meets the mode switching condition, switching the current mode to the second mode, and reporting the related information of the wafer transfer box and the current mode to the server, so that the server controls the overhead crane to perform a picking operation based on the related information of the wafer transfer box; the current mode is the first mode.

[0045] The mode switching condition is a condition configured in advance for evaluating whether the current port mode can be switched, such as the mode switching condition in the present application, which can be set as: the state of all target sensors meets the target state, i.e., the state of all target sensors is the target state. For another example, the mode switching condition in the present application can also be set as the following conditions in multiple dimensions: a. whether the photoelectric sensor detects the goods; b. whether the E84 step detection is 0 and there is no E84 alarm information; c. whether the pressing sensor detects normally, whether there is no abnormal information and whether the goods are pressed; d. whether the current port is in the OutPut mode, if not, it means that the condition is not met; e. whether the RFID information has been read.

[0046] The current mode refers to the mode of the current port in the current smart machine, for example, in some cases, the smart machine is a single-port device, and the current mode refers to the mode of the single port of the smart machine. In other cases, the smart machine is a double-port device, and the current mode refers to the mode of the current port (one of the ports) of the smart machine. It can be understood that after the smart machine is started, the default port mode set by the initialization can be the first mode, i.e., the OutPut mode.

[0047] It can be understood that the first mode and the second mode in the present application are only used to distinguish different modes, for example, the first mode in the present application can be the OutPut mode (i.e., the machine is taken by a person mode), and the second mode can be the Input mode (i.e., the person is taken by a machine mode).

[0048] The related information of the wafer transfer box refers to the information related to the wafer transfer box, for example, the related information of the wafer transfer box in the present application can be Foup information, and the Foup information at least includes identification information and state information. The identification information is used to identify a unique wafer transfer box, i.e., Foup, for example, the identification information in the present application at least contains port information and timestamp information. The state information refers to the information reflecting the state of the wafer transfer box, i.e., Foup, i.e., the state information whether the Foup is stored or taken away.

[0049] The server refers to a device for receiving the reported information of each smart machine, for example, the server in the present application can be an EAP in the material handling system, i.e., an upper computer.

[0050] The overhead hoist transportation (OHT) refers to an overhead transportation vehicle in a material handling system, which runs along a specific track and is used to transport a wafer transfer box, i.e., Foup.

[0051] In step 208, after the OHT performs the take-out operation, the state of the target sensor is continuously detected by the detection program, and in the case that the state is updated to the initial state, the second mode is restored to the default first mode.

[0052] The initial state refers to the state of each target sensor in the default initial mode. For example, after starting the smart machine, the port of the smart machine is in the default OutPut mode, and the state of each sensor in this OutPut mode is the initial state. When the mode of the port of the smart machine is switched to the second mode, i.e., the Input mode, the state of each sensor will change, until the state of each sensor is restored to the initial state (i.e., the condition for automatically restoring to the first mode is met), and the second mode can be automatically restored to the default first mode.

[0053] Specifically, such as Figure 4 The diagram shows the overall flow of the mode switching method for the intelligent device provided in this application. After the terminal, i.e., the intelligent machine, detects the state of the target sensor through the detection program, the intelligent machine can sequentially determine whether the state of each target sensor meets the mode switching conditions. If the state of each target sensor meets the mode switching conditions, the intelligent machine switches the current mode (e.g., Output mode) to the second mode (Input mode) and reports the relevant information of the wafer transfer box (e.g., reading RFID identification information and CarrierArrived, i.e., detecting that the Foup has been placed) and the current mode to the server. This allows the server to call the overhead crane to perform the picking operation based on the relevant information of the wafer transfer box (e.g., reading RFID identification information and CarrierArrived, i.e. detecting that the Foup has been placed). In this application, the default current mode can be the first mode, i.e., Output mode.

[0054] In one embodiment, the relevant information of the wafer transfer box includes at least identification information and status information. The status information is used to reflect whether the wafer transfer box is stored or retrieved. The intelligent machine can report the identification information, status information and current mode of the wafer transfer box to the server, so that the server can call the overhead crane to perform the retrieval operation at the target time based on the identification information and status information of the wafer transfer box.

[0055] In one embodiment, when it is detected that a wafer transfer box has been placed, the identification information of the wafer transfer box is read; if the identification information of the wafer transfer box fails to be read, the intelligent machine can automatically generate temporary identification information conforming to a preset format, and report the temporary identification information, status information and current mode of the wafer transfer box to the server, so that the server can control the crane to perform a picking operation at a target time based on the temporary identification information and status information of the wafer transfer box. The temporary identification information includes at least port information and timestamp information.

[0056] Furthermore, such as Figure 4 As shown, after the overhead crane completes the picking operation, the intelligent machine can continue to detect the status of each target sensor through the detection program. When the status of each target sensor is updated to the initial state, it automatically recovers from the second mode (Input mode) to the default first mode, i.e., Output mode, and waits for the next mode switch, i.e., enters the automatic loop mode switching process.

[0057] The mode switching method of the intelligent device provided in the embodiment is applied to an intelligent machine, and the intelligent machine is used for storing a wafer transfer box. Through a triggered mode switching operation, a detection program is started, and the state of a target sensor is detected through the detection program. In a case where the state of the target sensor meets a mode switching condition, the current mode is switched to a second mode, and the related information of the wafer transfer box and the current mode are reported to a server, so that the server controls a crane to perform a picking operation based on the related information of the wafer transfer box. The current mode is a first mode. After the crane performs the picking operation, the state of the target sensor is continuously detected through the detection program, and in a case where the state is updated to an initial state, the second mode is restored to the default first mode. Since the state of the target sensor can be automatically detected through the detection program, in a case where the state of the target sensor meets the mode switching condition, the current mode can be automatically switched to the second mode, and the related information of the wafer transfer box and the current mode are reported to the server, so that the server controls the crane to perform the picking operation based on the related information of the wafer transfer box. After the crane performs the picking operation, the state of the target sensor can be continuously detected through the detection program, and in a case where the state is updated to the initial state, the second mode is automatically restored to the default first mode, forming a complete operation closed loop without manual intervention, that is, without manual intervention, reducing the error-prone situation of manual intervention, realizing the mode switching of the automated intelligent machine, and improving the mode switching efficiency of the intelligent machine while effectively ensuring the accuracy of the mode switching.

[0058] In one embodiment, before starting the detection program in response to the triggered mode switching operation, the method further includes:

[0059] initializing the intelligent machine so that the intelligent machine is in the default first mode;

[0060] starting the detection program in response to the triggered mode switching operation includes:

[0061] starting the detection program in response to a mode switching operation triggered by a hardware control of the intelligent machine; or

[0062] starting the detection program in response to a mode switching operation triggered by an interface icon displayed on the intelligent machine.

[0063] Specifically, taking the smart machine as an example, when a user (such as an operator) wants to use the LPS device, the user can start the LPS device by triggering an operation, and the LPS device automatically initializes the LPS device in response to the start operation triggered by the user, so that each Port port (state) of the LPS device is in a default first mode, such as an OutPut mode in the present application. Further, the user can trigger a mode switching operation triggered by a hardware control of the current LPS device (such as an operator pressing a mode switching button in the LPS device), so that the LPS device automatically starts a detection program in response to the mode switching operation triggered by the hardware control of the LPS device. Alternatively, the user can also trigger a mode switching operation triggered by a software control of the current LPS device (such as an operator clicking an interface icon displayed on the front end interface of the LPS device), so that the LPS device starts a detection program in response to the mode switching operation triggered by the interface icon displayed on the LPS device. For example, in the case where a wafer transfer box is placed in the port of the current machine, or after the operator or OHT places the Foup into the Port port of the current LPS device, the operator can press the mode switching button in the LPS device, so that the LPS device automatically starts the detection program for detection in response to the mode switching operation triggered by the operator for the hardware control of the LPS device (i.e. the operation of pressing the mode switching button in the LPS device). Thus, through the external signal triggered, the composite condition verification step based on multiple groups of sensors (including but not limited to position, pressure, RFID) and E84 communication protocol state, after verification, the smart machine OutPut to InPut mode switching can be automatically completed, and after the upstream device takes the goods, it can be automatically detected and restored to the default OutPut mode, realizing the automatic mode switching of the smart machine, without manual intervention, realizing the technical effect of improving the mode switching efficiency of the smart machine while effectively guaranteeing the accuracy of the mode switching.

[0064] In one embodiment, the target sensor at least includes a pressure sensor, a photoelectric sensor and an E84 sensor; through the detection program, the step of detecting the state of the target sensor includes:

[0065] Through the detection program, the states of the pressure sensor, the photoelectric sensor and the E84 sensor are detected respectively.

[0066] E84 refers to: semiconductor manufacturing SEMI E84 "Specification for Enhanced Carrier Handoff Parallel I / O Interface", belonging to the GEM300 standard family, used for the "parallel I / O" hardware interface between the 300 mm wafer factory automatic material handling system (AMHS) and the equipment loading port (Load Port). A set of photoelectric / parallel signals (such as VALID, L_REQ, U_REQ, TR_REQ, READY, BUSY, COMPT, etc.) are specified to enable the crane (OHT) or AGV to complete the automatic handover, handshake and exception detection of the FOUP with the equipment, which is one of the key bottom layer protocols for the full automatic "unmanned cargo" of the wafer factory.

[0067] Specifically, the intelligent machine is taken as an example to illustrate the LPS equipment. After the LPS equipment starts the detection program in response to the mode switching operation triggered by the user, the LPS equipment can detect the state of the target sensor through the detection program, that is, the state of each sensor is detected in real time through the detection program. For example, the LPS equipment can detect the state of the pressing sensor, the photoelectric sensor and the E84 sensor through the detection program, and determine whether the second mode, i.e., the InPut mode, can be switched according to the state of the pressing sensor, the photoelectric sensor and the E84 sensor. In this application, the state of the E84 sensor needs to be detected in order to determine whether the E84 step sequence is in an idle state (i.e., the step sequence is 0) and whether there is E84 alarm information through the state of the E84 sensor. Thus, starting from the default OutPut mode of the LPS, the detection is started through external triggering (mode switching button), and after a series of strict switching conditions are met, the InPut mode is automatically converted, and after the task is completed (the crane takes the goods), the initial OutPut mode is automatically and safely returned through real-time monitoring of the sensor state again, forming a complete, non-manual operation closed loop, which effectively improves the mode switching efficiency and accuracy of the LPS equipment.

[0068] In one embodiment, the step of detecting the state of the pressing sensor, the photoelectric sensor and the E84 sensor through the detection program includes:

[0069] detecting the first state of the photoelectric sensor through the detection program; the photoelectric sensor is used to detect whether there is a wafer transfer box;

[0070] detecting the second state of the E84 sensor through the detection program; the E84 sensor is used to detect the E84 step sequence state; the E84 step sequence state is used to reflect the safety of the communication state;

[0071] The third state of the pressing sensor is detected by the detection program; the pressing sensor is used to detect whether the physical placement position of the wafer transfer box is abnormal.

[0072] In the present application, the first state, the second state and the third state are only used to distinguish the detection state of different sensors, for example, the first state refers to the state of the photoelectric sensor, the second state refers to the state of the E84 sensor, and the third state refers to the state of the pressing sensor. The first state, the second state and the third state can be the same or different.

[0073] Specifically, the smart machine is taken as an example to illustrate the LPS equipment. After the LPS equipment starts the detection program in response to the mode switching operation triggered by the user, the LPS equipment can detect the first state of the photoelectric sensor by the detection program; the photoelectric sensor is used to detect whether the wafer transfer box exists; and detect the second state of the E84 sensor by the detection program; the E84 sensor is used to detect the E84 step sequence state; the E84 step sequence state is used to reflect the safety of the communication state; and the third state of the pressing sensor is detected by the detection program; the pressing sensor is used to detect whether the physical placement position of the wafer transfer box is abnormal. Thus, the physical existence and the position state are quickly and accurately judged by combining the photoelectric sensor (confirming whether the foup exists) and the double pressing sensor (confirming whether the foup is placed stably and without tilting). At the same time, the state of the E84 sensor is detected to detect the communication handshake protocol state, that is, it is strictly checked whether the E84 communication step sequence is “0” (idle state), and it is confirmed that there is no E84 related alarm, so as to ensure that the interaction with the OHT is in a safe initial state. This multi-dimensional “and” logic judgment greatly improves the robustness of the system, avoids the process error caused by the misjudgment of a single sensor, and thus effectively improves the accuracy of the mode switching of the LPS equipment.

[0074] In one embodiment, the pressing sensor includes a first pressing sensor and a second pressing sensor; the third state includes an abnormal state and a normal state; the step of detecting the third state of the pressing sensor by the detection program includes:

[0075] The third state of the first pressing sensor is detected by the detection program;

[0076] The third state of the second pressing sensor is detected by the detection program;

[0077] If any one of the third state of the first pressing sensor and the third state of the second pressing sensor is the abnormal state, it is determined that the third state is the abnormal state;

[0078] If the third state of the first pressing sensor and the third state of the second pressing sensor are both normal states, it is determined that the third state is a normal state.

[0079] wherein the third state is an abnormal state, indicating that the wafer transfer box is abnormally placed. As shown in the following table, the third state is an abnormal state when the first press sensor and the second press sensor are not pressed at the same time. Figure 5 As shown in the following table, the third state is an abnormal state when the first press sensor and the second press sensor are not pressed at the same time.

[0080] Specifically, the smart machine is taken as an LPS device as an example. After the LPS device starts the detection program in response to the mode switching operation triggered by the user, the LPS device can detect the first state of the photoelectric sensor through the detection program, detect the second state of the E84 sensor through the detection program, and detect the third state of the press sensor through the detection program. The press sensor is used to detect whether the physical placement position of the wafer transfer box is abnormal. That is, the LPS device can detect the third state of the first press sensor through the detection program and detect the third state of the second press sensor through the detection program. If any one of the third state of the first press sensor and the third state of the second press sensor is an abnormal state, it is determined that the third state is an abnormal state. If the third state of the first press sensor and the third state of the second press sensor are both normal states, it is determined that the third state is a normal state. Thus, by simultaneously detecting the states of at least two press sensors, it is accurately determined whether the FOUP is stably placed, and a specific FoupSensorError alarm is triggered when the states are inconsistent. At the same time, an automatic reset alarm mechanism based on the sensor state is provided, forming a complete, non-manual intervention operation closed loop, and realizing efficient mode switching of the fully automated intelligent device.

[0081] In one embodiment, after it is determined that the third state is an abnormal state if any one of the third state of the first press sensor and the third state of the second press sensor is an abnormal state, the method further comprises:

[0082] triggering reporting of an abnormal alarm information to a server, and switching the current port state of the smart machine to an unusable state; or

[0083] trigger sending an abnormal alarm information to a third-party device, so that a user of the third-party device performs manual abnormal detection, and switches the current port state of the intelligent machine to an unusable state; or

[0084] In a case where the third state of the first pressing sensor and the third state of the second pressing sensor are both normal states, the LPS device can automatically trigger reporting a reset abnormal alarm information to the server, for example, reporting a message as shown in

[0085] Specifically, the intelligent machine is taken as an example of the LPS device. As shown in Figure 5 the LPS device detects the third state of the first pressing sensor through a detection program, and detects the third state of the second pressing sensor through a detection program; if any one of the third state of the first pressing sensor and the third state of the second pressing sensor is an abnormal state, after determining that the third state is an abnormal state, the LPS device can automatically trigger reporting an abnormal alarm information to the server, for example, reporting an alarm message as shown in Figure 5 “S5F1: FoupSensorError Set” for indicating Foup placement abnormality, and switching the current port state of the intelligent machine to an unusable state, and reporting a message as shown in Figure 5 “InServiceToOutOfService” for indicating that the current port state has been switched to an unusable state; or

[0086] The LPS device can also automatically trigger sending an abnormal alarm information to a third-party device (such as a device of an administrator), so that a user of the third-party device performs manual abnormal detection, and switches the current port state of the intelligent machine to an unusable state, and reports a message as shown in Figure 5 “InServiceToOutOfService” for indicating that the current port state has been switched to an unusable state, and reports a message as shown in Figure 5 “OutOfServiceToInService” for indicating that the current port state has been switched to an usable state; or

[0087] In a case where the LPS device detects that the third state of the first pressing sensor and the third state of the second pressing sensor are both normal states, the LPS device can also automatically trigger reporting a reset abnormal alarm information to the server, for example, reporting a message as shown in Figure 5 “FoupSensorError Reset” for indicating that the Foup alarm has been reset, and switching the current port state of the intelligent machine to an usable state.

[0088] In the embodiment, the state of at least two pressing sensors is detected simultaneously to accurately determine whether the FOUP is placed stably, a specific FoupSensorError alarm is triggered when the state is detected to be inconsistent, a mechanism for automatically resetting the alarm based on the sensor state is provided, a complete operation closed loop without manual intervention is formed, and efficient mode switching of the fully automated intelligent equipment is realized.

[0089] In one of the embodiments, the mode switching condition includes that the state of the target sensor is a target state; in the case that the state meets the mode switching condition, the current mode is switched to the second mode, and the relevant information of the wafer carrier and the current mode are reported to the server.

[0090] In the case that the first state, the second state and the third state are all target states, the current mode is switched to the second mode, and the relevant information of the wafer carrier and the current mode are reported to the server.

[0091] The target state of the first state can be a state of detecting the presence of goods (i.e. the wafer carrier), the target state of the second state can be a state of E84 step sequence state being 0 (idle state), and the target state of the third state can be a state of detecting that the physical placement position of the wafer carrier is normal, i.e. the state of the two pressing sensors is a pressing state (normal state).

[0092] Specifically, taking the smart machine as an LPS device as an example. After the LPS device initiates the detection program in response to the mode switching operation triggered by the user, the LPS device can detect the first state of the photoelectric sensor through the detection program; the photoelectric sensor is used to detect whether there is a wafer transfer box; and the second state of the E84 sensor is detected through the detection program; the E84 sensor is used to detect the E84 step sequence state; the E84 step sequence state is used to reflect the safety of the communication state; and the third state of the pressing sensor is detected through the detection program; the pressing sensor is used to detect whether the physical placement position of the wafer transfer box is abnormal. In the case that the first state of the photoelectric sensor, the second state of the E84 sensor, and the third state of the two pressing sensors are all target states, that is, the state of each target sensor is a target state, the LPS device can only automatically switch the current mode (i.e. the OutPut mode) to the second mode (i.e. the Input mode), and report the related information (identification information and state information) of the wafer transfer box and the current mode (i.e. the Input mode) to the server. Thus, by designing a multi-sensor fusion verification mechanism, the absolute safety and accuracy of mode switching can be ensured, that is, by using a multi-sensor information fusion strategy for processing, the robustness of the system is greatly improved, avoiding process errors caused by single sensor misjudgment, thereby effectively improving the accuracy of mode switching of the LPS device.

[0093] In one embodiment, the related information of the wafer transfer box at least includes identification information and state information, the state information is used to reflect the state of whether the wafer transfer box is stored or taken away; the related information of the wafer transfer box and the current mode are reported to the server, so that the server controls the crane to perform the taking operation based on the related information of the wafer transfer box, the steps comprising:

[0094] The identification information, the state information and the current mode of the wafer transfer box are reported to the server, so that the server dispatches the crane to perform the taking operation at the target time based on the identification information and the state information of the wafer transfer box.

[0095] In the present application, the identification information at least contains port information and timestamp information, for example, the identification information of each wafer transfer box automatically read in the present application can be in a unified format, for example, the identification information is a string in a preset format: UNKNOWN-PortID-yyyyMMddHHmmssfff.

[0096] The state information refers to information reflecting the real-time state of the wafer transfer box, for example, as shown in Figure 6 The state information of the wafer transfer box reported in the present application can be as shown in Figure 6The "CarrierArrived" shown in FIG. 2 is used to indicate the message that the Foup is put down by (the person). For example, as shown in FIG. Figure 7 The processing flow diagram in the OutPut mode is shown in FIG. 2, i.e., the state information of the FOUP reported in the present application can be as shown in FIG. Figure 7 The "CarrierArrived" shown in FIG. 2 is used to indicate the message that the Foup is put down by (the person).

[0097] Specifically, the smart machine is taken as an example for the LPS device. As shown in FIG. Figure 6 In the case that the state of each target sensor meets the mode switching condition, the LPS device switches the current mode, i.e., the OutPut mode, to the second mode, i.e., the Input mode, and then reports the identification information "CarrierIDRead", the state information "CarrierArrived" and the current mode, i.e., the Input mode "ReadyToUnload" of the FOUP to the server, so that the server calls the crane to perform the pick-up operation at the target time based on the identification information "CarrierIDRead" and the state information "CarrierArrived" of the FOUP, and reports "CarrierRemoved" to indicate the message that the FOUP is taken away by the crane after the crane performs the pick-up operation, and continues to detect the state of each target sensor, and recovers from the second mode, i.e., the Input mode, to the default first mode, i.e., the OutPut mode, in the case that the state of each target sensor is updated to the initial state.

[0098] Further, as shown in FIG. Figure 7As shown in the middle, in the case that the state of each target sensor meets the mode switching condition, after the LPS device switches the current mode, i.e., the Input mode, to the first mode, i.e., the OutPut mode, the LPS device can report the identification information "CarrierIDRead", the state information "CarrierArrived", and the current mode, i.e., the OutPut mode "TranferBlocked", of the wafer transport box to the server, so that the server reminds the operator to perform the pick-up operation at the target time based on the identification information "CarrierIDRead" and the state information "CarrierArrived" of the wafer transport box, and after the operator performs the pick-up operation, reports "CarrierRemoved" to indicate that the wafer transport box is taken away, and continues to detect the state of each target sensor through the detection program and reports "ReadyToLoad" to indicate that it is waiting for the Load. In some cases, the LPS device can report the identification information "CarrierIDRead", the state information "CarrierArrived", and the reminder information "TranferBlocked" of the wafer transport box to the server, so that the server reminds the operator or the overhead crane to perform the pick-up operation at the target time based on the identification information "CarrierIDRead", the state information "CarrierArrived", and the reminder information "TranferBlocked" of the wafer transport box. The reminder information in the present application is used to remind the overhead crane or the operator to perform the pick-up operation or the put-in operation. Thus, the mode automatic switching method of the intelligent machine table provided in the present application has the ability to perform parallel or mutually exclusive scheduling on the dual-port LPS device, can switch the mode of one port to be associated with the state of the other port (mutually exclusive) according to the configuration to allow two ports to perform independent IN / OUT tasks at the same time (parallel), thereby realizing dynamic optimal allocation of the port position resources of the LPS device and effectively improving the utilization rate of the port position resources of the LPS device.

[0099] In one embodiment, the method further comprises:

[0100] In the case that the wafer transport box has been placed, reading the identification information of the wafer transport box;

[0101] In the case that the identification information of the wafer transport box fails to be read, generating temporary identification information conforming to a preset format; the temporary identification information at least contains port information and timestamp information;

[0102] The reporting of the related information of the wafer transport box and the current mode to the server so that the server controls the overhead crane to perform the pick-up operation based on the related information of the wafer transport box comprises:

[0103] The temporary identification information, status information, and current mode of the wafer transfer box are reported to the server, so that the server can control the overhead crane to perform the picking operation at the target time based on the temporary identification information and status information of the wafer transfer box.

[0104] Specifically, such as Figure 8 The diagram illustrates the exception handling process when the CarrierID is not read in the mode switching method of the smart device provided in this application. When the smart machine detects that the wafer transport box has been placed (by a person or vehicle), it can automatically read the identification information of the wafer transport box. If the reading fails, i.e., if the smart machine fails to read the identification information of the wafer transport box, it can automatically generate temporary identification information conforming to a preset format, such as generating... Figure 8 The temporary identifier information “FoupID=UNKNOWN-PortID-yyyyMMddHHmmssfff” shown contains at least port information (PortID) and timestamp information (yyyyMMddHHmmssfff).

[0105] Furthermore, the intelligent machine can report the aforementioned temporary identification information "FoupID=UNKNOWN-PortID-yyyyMMddHHmmssfff", status information "CarrierArrived", and current mode (Input mode "ReadyToUnload") of the wafer transport box to the server. This allows the server to call the overhead crane to perform the pickup operation at the target time based on the temporary identification information "FoupID=UNKNOWN-PortID-yyyyMMddHHmmssfff" and status information "CarrierArrived".

[0106] In this embodiment, when the RFID information of the FOUP cannot be read, the system can automatically create and assign a unique temporary ID containing the device identifier and timestamp, and use this temporary ID to continue to execute the subsequent event reporting and handling process, so as to ensure the continuity of the production process and prevent the process from being interrupted due to abnormal data reading, forming a complete operation closed loop without human intervention, and realizing the efficient mode switching of fully automated intelligent equipment.

[0107] In one embodiment, this application also provides an application scenario in which the above-described mode switching method for smart devices is applied. Specifically, the mode switching method for smart devices is applied in this scenario as follows:

[0108] like Figure 4The process shown assumes the LPS device's initial port is in Output mode. When an operator or OHT places a Foup into the current port, the operator presses the mode switch button on the LPS device. The detection program automatically starts and monitors the status of each sensor in real time. Based on the sensor status, it determines whether the default mode can be switched to InPut mode. If the detection passes, the switch occurs directly. After switching to InPut mode, the LPS device reports the Foup information to the EAP (Employment Assistant). Upon receiving the Foup information, the EAP dispatches an OHT to retrieve the Foup at an appropriate time. After the overhead crane removes the Foup, the detection program continuously scans the sensor status. If everything is normal, it switches back to the default Output mode, waiting for the next cycle. This enables automatic IN / OUT switching on a single-port LPS device without manual port disabling, reducing manual intervention and errors. It also supports dual-port parallel / mutually exclusive scheduling, effectively improving OHT turnaround efficiency and port utilization in the LPS device.

[0109] In the traditional method, a traditional LPS must have two ports to realize the transfer tasks of the in port and the out port. If there is a single port LPS, it is either an in port or an out port. The mode can only be switched by the operator manually disabling the LPS, which is inefficient and prone to errors.

[0110] Therefore, this solution proposes a switching method for LPS equipment in intelligent mode, which relates to the field of material handling systems. It mainly involves the intelligent mode switching processing of LPS equipment, that is, enabling a single-port LPS to automatically complete IN / OUT bidirectional tasks without relying on manual port disabling or cumbersome manual switching, and providing parallel / mutually exclusive intelligent scheduling capabilities for dual-port LPS, while ensuring the verifiability and traceability of handshake with E84, sensor consistency and anomaly recovery.

[0111] 1. Overall Structure / Architecture / System Introduction:

[0112] like Figure 3 The diagram shown is a schematic representation of the overall structure of the LPS device in this application. Specifically, it includes:

[0113] 1.1 General Modules: Responsible for providing basic and reusable services.

[0114] a. Configuration Management Module (IConfigService): Its core responsibility is to ensure that the system configuration is synchronized with the database, and to provide interfaces for importing, exporting and modifying configurations.

[0115] b. Alarm management module (IAlarmService): Overall management of alarm events of the system, including processing current alarms and archiving historical alarms, providing interfaces for alarm registration, triggering and resetting, etc.

[0116] c. Data collection module (IDataService): Responsible for collecting various data, such as handling records, alarm logs, etc.

[0117] d. User management module (IUserService): Responsible for managing user account systems, providing interfaces for login, logout, and adding, deleting, and modifying user information, etc.

[0118] 1.2 Hardware control module: Focuses on interaction with PCB devices (used to report sensor status), with the core being the Port management module (IPortService), responsible for management and control of hardware serial ports, mainly through RS-485 standard for data interaction, and can trigger corresponding business events, providing interfaces for port query, attribute modification and hardware operation, etc.

[0119] 1.3 Business module: Responsible for processing core business logic

[0120] a. Host control module (IHostService): Responsible for communication with the host computer (MCS, EAP), reporting events and alarms to the host computer, and receiving instructions from the host computer.

[0121] b. Business monitoring module (IMonitorService): Real-time monitoring of user-defined key business parameters, and issuing alarms when parameters are abnormal.

[0122] 2. Event analysis

[0123] a. Input port (put by man, take by machine)

[0124] As shown in Figure 6 , after the LPS detects that the Foup is put down, it will immediately report the CarrierArrived (detects that the Foup is put down), CarrierIDRead (reads the RFID), ReadyToUnload (reminds OHT to take goods) events, and when the goods are taken away by the crane and the E84 step sequence is completed, it starts to report the CarrierRemoved (Foup is taken away), ReadyToLoad (reminds OHT to put goods) events. Among them, after the E84 step sequence is completed, it marks the end of the taking process (no exception).

[0125] b. Output port (put by machine, take by man)

[0126] As shown in Figure 7As shown, after LPS detects that a Foup has been placed, it will immediately report CarrierArrived (Foup has been detected), CarrierIDRead (RFID has been read), and TransferBlocked (notifying OHT that the goods cannot be picked up or placed). When the goods are picked up by the operator, it will start reporting CarrierRemoved (Foup has been picked up) and ReadyToLoad (notifying that the goods can be placed).

[0127] c. Abnormal process - Foup not properly placed

[0128] like Figure 5 As shown, LPS detects that the press sensor has been triggered. There are two press sensors, and both must detect that they have been pressed for the system to be in a normal state. If only one of them is detected as pressed, an abnormal process will be triggered, at which point a FoupSensorError alarm will be reported, and the status will become unavailable.

[0129] There are two solutions:

[0130] 1. When both press sensors are detected to be pressed, the FoupSensorError alarm will be automatically reset, and the status of the port will automatically switch to the available state.

[0131] 2. When goods are taken away (manually), CarrierRemoved (Foup has been taken away) and ReadyToLoad (notification that goods can be placed) events will be reported, and the alarm will be automatically reset. The status of the port will also be automatically switched to the available state.

[0132] d. Abnormal process - CarrierID not read

[0133] like Figure 8 As shown, when LPS detects that the Foup has been correctly placed but the RFID tag is not read, it will automatically create an RFID tag in the format (UNKNOWN-PortID-yyyyMMddHHmmssfff) and then report the CarrierArrived (Foup detected), CarrierIDRead (RFID tag read), and ReadyToUnload (notifying OHT that the goods can be picked up) events normally. When the goods are picked up by the crane and the E84 sequence is completed, it will start reporting the CarrierRemoved (Foup removed) and ReadyToLoad (notifying OHT that the goods can be placed) events.

[0134] 3. Smart mode switching

[0135] like Figure 4The specific steps include, as shown in the middle of the road:

[0136] 1. The default Port mode is OutPut mode;

[0137] 2. Personnel operating Foup to the current machine;

[0138] 3. Personnel press mode switching button;

[0139] 4. The background detection algorithm starts to start, which will cycle detection sensor state, which will be real-time monitoring:

[0140] a. Photoelectric sensor detects goods;

[0141] b. E84 step detection is 0, and there is no E84 alarm information;

[0142] c. Press sensor is detected normally, whether there is no abnormal information and detect the goods are pressed;

[0143] d. Whether the current Port is in OutPut mode, if not, it means that the condition is not met;

[0144] e. Ensure that the RFID information has been read;

[0145] After all the above information is met, the mode will be switched.

[0146] 5. At this time, the Port mode is switched to InPut mode;

[0147] 6. Will automatically report the corresponding event to the host computer;

[0148] 7. Report the current mode and Foup information to the host computer, and the host computer will call the crane to take the goods after receiving the information;

[0149] 8. The crane takes away the goods, at this time the background detection algorithm is still running, if the sensor feedback is normal, it will automatically switch the mode to OutPut mode;

[0150] 9. The background detection algorithm stops running, and the task is completed.

[0151] The core of the present application is a set of LPS intelligent mode switching system and method based on multi-dimensional state monitoring and event driving. The key technical points are reflected in the following aspects:

[0152] A. State-driven closed-loop automatic switching logic: The core of this application is a closed-loop control algorithm. It is not a simple "button-switching" logic, but an intelligent cycle of "state monitoring-condition judgment-execution switching-state feedback" running continuously. The algorithm starts with the default OutPut mode of LPS, detects through external triggering (mode switching button), and automatically switches to InPut mode after meeting a series of strict switching conditions. After the task is completed (the crane takes the goods), the sensor state is monitored again, and the initial OutPut mode is automatically returned safely, forming a complete, non-human intervention operation closed loop.

[0153] B. Multi-sensor fusion verification mechanism: In order to ensure the absolute safety and accuracy of mode switching, this application adopts a multi-sensor information fusion strategy for decision-making. It does not rely on a single signal, but verifies the following key states simultaneously:

[0154] a. Physical existence and position state: combined with photoelectric sensor (confirming FOUP existence) and double pressing sensor (confirming FOUP stable placement, no tilt).

[0155] b. Communication handshake and protocol state: strictly check whether the E84 communication step sequence is "0" (idle state), and confirm that there is no E84 related alarm, to ensure that the interaction with OHT is in a safe initial state.

[0156] c. Data identity state: RFID information must be successfully read to ensure traceability of the material (FOUP).

[0157] d. Self-logic state: check that the current port must be in OutPut mode to prevent triggering switching in the wrong state.

[0158] e. This multi-dimensional "and" logic judgment greatly improves the robustness of the system and avoids process errors caused by single sensor misjudgment.

[0159] C. Multi-trans built-in exception process adaptive processing capability: This application has preset automatic processing schemes for common exceptions, enhancing the fault tolerance of the system, including:

[0160] a. For "FOUP not placed well": by monitoring the state difference of the two pressing sensors, it can actively identify physical placement abnormalities and report accurate FoupSensorError alarms to guide on-site personnel to correct quickly. At the same time, the system has automatic recovery capability, and once it is detected that both sensors are normally pressed, the alarm will automatically reset.

[0161] b. For "CarrierID not read": In the extreme case of RFID reading failure, instead of interrupting the process, the system automatically generates a unique temporary ID (UNKNOWN-PortID-yyyyMMddHHmmssfff) containing the port ID and precise timestamp. This innovation ensures that the material handling process can continue even when RFID reading fails, and guarantees the possibility of subsequent tracking through the temporary ID, reflecting a high degree of process continuity design.

[0162] Based on the above key technologies, the technical solutions provided by the present application have the following beneficial effects:

[0163] 1. The present application proposes an automatic bidirectional mode switching method for single-port LPS, which includes a composite condition verification step triggered by an external signal, based on multiple sensors (including but not limited to position, pressure, RFID) and E84 communication protocol state. After verification, it can automatically complete the switching from OutPut to InPut mode, and automatically detect and restore to OutPut mode after the upstream device takes the goods.

[0164] 2. It has the ability to schedule two-port LPS in parallel or mutually exclusive, allowing two ports to perform independent IN / OUT tasks at the same time (in parallel), or to switch the mode of one port to be associated with the state of the other port (mutually exclusive), thereby achieving dynamic optimal allocation of LPS port position resources.

[0165] 3. An LPS exception handling method is proposed: when the RFID information of the FOUP cannot be read, the system can automatically create and assign a unique temporary ID containing the device identifier and timestamp, and use this temporary ID to continue the subsequent event reporting and handling process, to ensure the continuity of the production process.

[0166] 4. A precise verification method of LPS physical state is proposed, which detects the state of at least two pressing sensors to determine whether the FOUP is placed stably, and triggers a specific FoupSensorError alarm when detecting inconsistent states, while providing a mechanism for automatic reset alarm based on sensor state.

[0167] It should be understood that although each step in the flowchart involved in the embodiments described above is shown in sequence according to the arrow, these steps are not necessarily executed in the order indicated by the arrow. Unless otherwise specified herein, there is no strict order limitation for the execution of these steps, and these steps can be executed in other orders. Moreover, at least part of the steps in the flowchart involved in the embodiments described above can include multiple steps or multiple stages, which are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily sequential, but can be alternately executed with at least part of other steps or steps or stages in other steps.

[0168] Based on the same inventive concept, the embodiments of the present application also provide a mode switching device of a smart device for implementing the mode switching method of the smart device described above. The implementation scheme for solving the problem provided by the device is similar to the implementation scheme described in the above method, so the specific limitations in one or more mode switching device embodiments of the smart device provided below can refer to the limitations of the mode switching method of the smart device described above, which will not be repeated here.

[0169] In one embodiment, as shown in Figure 9 A mode switching device of a smart device is provided, applied to a smart machine for storing a wafer transfer box, comprising: a starting module 902, a detection module 904, a switching module 906 and a recovery module 908, wherein:

[0170] The starting module 902 is configured to start a detection program in response to a triggered mode switching operation.

[0171] The detection module 904 is configured to detect the state of a target sensor through the detection program.

[0172] The switching module 906 is configured to switch the current mode to a second mode if the state meets a mode switching condition, and report the relevant information of the wafer transfer box and the current mode to a server, so that the server controls a crane to perform a picking operation based on the relevant information of the wafer transfer box; the current mode is a first mode.

[0173] The recovery module 908 is configured to continue to detect the state of the target sensor through the detection program after the crane finishes the picking operation, and recover from the second mode to a default first mode if the state is updated to an initial state.

[0174] In one embodiment, the starting module is further configured to initialize the smart machine to a default first mode, start the detection procedure in response to a mode switching operation triggered by a hardware control of the smart machine, or start the detection procedure in response to a mode switching operation triggered by an interface icon displayed on the smart machine.

[0175] In one embodiment, the target sensors include at least a press sensor, a photoelectric sensor, and an E84 sensor, and the detection module is further configured to detect states of the press sensor, the photoelectric sensor, and the E84 sensor respectively through the detection procedure.

[0176] In one embodiment, the detection module is further configured to detect a first state of the photoelectric sensor through the detection procedure, and the photoelectric sensor is configured to detect whether the FOUP exists; detect a second state of the E84 sensor through the detection procedure, and the E84 sensor is configured to detect an E84 step sequence state; and detect a third state of the press sensor through the detection procedure, and the press sensor is configured to detect whether a physical placement position of the FOUP is abnormal.

[0177] In one embodiment, the press sensor includes a first press sensor and a second press sensor, and the third state includes an abnormal state and a normal state; the detection module is further configured to detect the third state of the first press sensor through the detection procedure, detect the third state of the second press sensor through the detection procedure, and the device further includes a determination module configured to determine the third state as the abnormal state if any one of the third state of the first press sensor and the third state of the second press sensor is the abnormal state, or determine the third state as the normal state if the third state of the first press sensor and the third state of the second press sensor are both the normal state.

[0178] In one embodiment, the mode switching condition includes that the states of the target sensors are target states, and the switching module is further configured to switch the current mode to a second mode if the first state, the second state, and the third state are all the target states, and report related information of the FOUP and the current mode to a server.

[0179] In one embodiment, the relevant information of the FOUP includes at least identification information and state information, the state information is used to reflect whether the FOUP is stored or taken away; the device further includes a reporting module, configured to report the identification information, the state information and the current mode of the FOUP to a server, so that the server dispatches a crane to perform a taking operation at a target time based on the identification information and the state information of the FOUP.

[0180] In one embodiment, the device further includes a reading module, configured to read the identification information of the FOUP when it is detected that the FOUP has been placed; a generating module, configured to generate temporary identification information in a preset format when the reading of the identification information of the FOUP fails; the temporary identification information at least includes port information and timestamp information; and the reporting module is further configured to report the temporary identification information, the state information and the current mode of the FOUP to the server, so that the server controls the crane to perform a taking operation at a target time based on the temporary identification information and the state information of the FOUP.

[0181] The above modules of the mode switching device of the intelligent device can be all or partially realized by software, hardware and a combination thereof. The above modules can be embedded in or independent of a processor in a computer device in a hardware form, or stored in a memory in a computer device in a software form, so as to be called and executed by a processor to perform operations corresponding to the above modules.

[0182] In one embodiment, a computer device is provided, which can be a terminal or a server. In this embodiment, the computer device is taken as an example for illustration, and an internal structure diagram thereof can be as shown in FIG. 8. Figure 10The computer device shown in the figure includes a processor, a memory, an input / output interface, a communication interface, a display unit and an input device. Among them, the processor, the memory and the input / output interface are connected through a system bus, and the communication interface, the display unit and the input device are connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capability. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operating system and the computer program in the non-volatile storage medium to run. The input / output interface of the computer device is used to exchange information between the processor and external devices. The communication interface of the computer device is used to communicate with external terminals in a wired or wireless manner. The wireless manner can be realized through WIFI, mobile cellular network, NFC (near field communication) or other technologies. The computer program is executed by the processor to realize a mode switching method of an intelligent device. The display unit of the computer device is used to form a visually visible picture, which can be a display screen, a projection device or a virtual reality imaging device. The display screen can be a liquid crystal display screen or an electronic ink display screen. The input device of the computer device can be a touch layer overlaid on the display screen, or a key, trackball or touchpad arranged on the shell of the computer device, or an external keyboard, touchpad or mouse, etc.

[0183] Those skilled in the art can understand that, Figure 10 The structure shown in the figure is only a block diagram of part of the structure related to the scheme of the present application, and does not constitute a limitation on the computer device to which the scheme of the present application is applied. The specific computer device can include more or fewer components than those shown in the figure, or combine certain components, or have a different component arrangement.

[0184] In one embodiment, a computer device is provided, including a memory and a processor, the memory storing a computer program, and the processor executing the computer program to realize the steps in the above method embodiments.

[0185] In one embodiment, a computer readable storage medium is provided, storing a computer program, and the computer program is executed by a processor to realize the steps in the above method embodiments.

[0186] In one embodiment, a computer program product is provided, including a computer program, and the computer program is executed by a processor to realize the steps in the above method embodiments.

[0187] It should be noted that the user information (including but not limited to user equipment information, user personal information, etc.) and data (including but not limited to data for analysis, stored data, displayed data, etc.) involved in the present application are all information and data authorized by the user or authorized by all parties, and the collection, use and processing of related data need to comply with relevant laws, regulations and standards of countries and regions.

[0188] A person of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing related hardware through a computer program. The computer program can be stored in a non-volatile computer readable storage medium, and when the computer program is executed, the processes of the above-mentioned embodiments of the methods can be included. Any reference to a memory, database or other medium used in the embodiments provided in the present application can include at least one of a non-volatile and volatile memory. The non-volatile memory can include a read-only memory (ROM), a magnetic tape, a floppy disk, a flash memory, an optical storage, a high-density embedded non-volatile memory, a resistive memory (ReRAM), a magnetoresistive random access memory (MRAM), a ferroelectric memory (FRAM), a phase change memory (PCM), a graphene memory, etc. The volatile memory can include a random access memory (RAM) or an external cache memory, etc. As an illustration but not limitation, the RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc. The database involved in the embodiments provided in the present application can include at least one of a relational database and a non-relational database. The non-relational database can include a distributed database based on a block chain, etc., without being limited thereto. The processor involved in the embodiments provided in the present application can be a general-purpose processor, a central processing unit, a graphics processing unit, a digital signal processor, a programmable logic device, etc., without being limited thereto.

[0189] The technical features of the above embodiments can be combined in any manner. To make the description concise, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present disclosure.

[0190] The above-described embodiments are merely illustrative of several embodiments of the present application, and the description is relatively specific and detailed, but should not be understood as a limitation on the scope of the patent. It should be noted that for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the scope of the present application. Therefore, the scope of protection of the present application should be subject to the appended claims.

Claims

1. A mode switching method of a smart device, the method comprising: determining whether a user is present in a predetermined area; and switching a mode of the smart device based on the determination. The application is applied to an intelligent machine table used for storing a wafer transfer box, and the method comprises: starting a detection program in response to a triggered mode switching operation; detecting a state of a target sensor through the detection program; switching a current mode to a second mode and reporting relevant information of the wafer transfer box and the current mode to a server in a case where the state meets a mode switching condition, so that the server controls a crane to perform a picking operation based on the relevant information of the wafer transfer box; the current mode is a first mode; continuing to detect the state of the target sensor through the detection program after the crane performs the picking operation, and restoring from the second mode to the default first mode in a case where the state is updated to an initial state.

2. The method of claim 1, wherein, Before the step of starting the detection program in response to the triggered mode switching operation, the method further comprises: initializing the intelligent machine table so that the intelligent machine table is in the default first mode; the step of starting the detection program in response to the triggered mode switching operation comprises: starting the detection program in response to a mode switching operation triggered for a hardware control of the intelligent machine table; or starting the detection program in response to a mode switching operation triggered for an interface icon displayed on the intelligent machine table.

3. The method of claim 1, wherein, The target sensor at least comprises a pressing sensor, a photoelectric sensor and an E84 sensor; the step of detecting the state of the target sensor through the detection program comprises: detecting the state of the pressing sensor, the photoelectric sensor and the E84 sensor through the detection program respectively.

4. The method of claim 3, wherein, the step of detecting the state of the pressing sensor, the photoelectric sensor and the E84 sensor through the detection program respectively comprises: detecting a first state of the photoelectric sensor through the detection program; the photoelectric sensor is used to detect whether the wafer transfer box exists; detecting a second state of the E84 sensor through the detection program; the E84 sensor is used to detect an E84 step sequence state; the E84 step sequence state is used to reflect the safety of a communication state; detecting a third state of the pressing sensor through the detection program; the pressing sensor is used to detect whether a physical placement position of the wafer transfer box is abnormal.

5. The method of claim 4, wherein, The pressing sensor comprises a first pressing sensor and a second pressing sensor; the third state comprises an abnormal state and a normal state; the step of detecting the third state of the pressing sensor through the detection program comprises: detecting the third state of the first pressing sensor through the detection program; detecting the third state of the second pressing sensor through the detection program; if any one of the third state of the first pressing sensor and the third state of the second pressing sensor is the abnormal state, it is determined that the third state is the abnormal state; if the third state of the first pressing sensor and the third state of the second pressing sensor are both the normal state, it is determined that the third state is the normal state.

6. The method of claim 5, wherein, If any one of the third state of the first pressing sensor and the third state of the second pressing sensor is an abnormal state, after determining that the third state is an abnormal state, the method further comprises: triggering reporting of an abnormal alarm information to a server, and switching a current port state of the intelligent machine platform to an unusable state; or, triggering sending of an abnormal alarm information to a third-party device, so that a user of the third-party device performs manual abnormal detection, and switching the current port state of the intelligent machine platform to an unusable state; or, if the third state of the first pressing sensor and the third state of the second pressing sensor are both normal states, triggering reporting of a reset abnormal alarm information to a server, and switching a current port state of the intelligent machine platform to a usable state.

7. The method of claim 4, wherein, The mode switching condition comprises a state of the target sensor being a target state. If the state meets the mode switching condition, the current mode is switched to a second mode, and related information of the wafer transfer box and the current mode are reported to a server, comprising: If the first state, the second state, and the third state are all target states, the current mode is switched to a second mode, and related information of the wafer transfer box and the current mode are reported to a server.

8. The method of claim 1, wherein, The related information of the wafer transfer box at least comprises identification information and state information, and the state information is used to reflect whether the wafer transfer box is stored or taken away; The related information of the wafer transfer box and the current mode are reported to the server, so that the server controls a crane to perform a picking operation based on the related information of the wafer transfer box, comprising: The identification information, the state information, and the current mode of the wafer transfer box are reported to the server, so that the server dispatches a crane to perform a picking operation at a target time based on the identification information and the state information of the wafer transfer box.

9. The method of claim 8, wherein, The method further comprises: If it is detected that the wafer transfer box has been placed, reading identification information of the wafer transfer box; If the identification information reading of the wafer transfer box fails, generating temporary identification information in a preset format; the temporary identification information at least contains port information and timestamp information; The related information of the wafer transfer box and the current mode are reported to the server, so that the server controls a crane to perform a picking operation based on the related information of the wafer transfer box, comprising: The temporary identification information, the state information, and the current mode of the wafer transfer box are reported to the server, so that the server controls a crane to perform a picking operation at a target time based on the temporary identification information and the state information of the wafer transfer box.

10. A mode switching device for a smart device, characterized in that, The device is applied to an intelligent machine platform, and the intelligent machine platform is used to store a wafer transfer box, and the device comprises: A starting module is configured to start a detection program in response to a triggered mode switching operation; A detection module is configured to detect a state of a target sensor through the detection program; A starting module is configured to start a detection program in response to a triggered mode switching operation; A detection module is configured to detect a state of a target sensor through the detection program; The switching module is configured to switch a current mode to a second mode when the state meets a mode switching condition, and report relevant information of the wafer transfer box and the current mode to a server, so that the server controls a crown to perform a picking operation based on the relevant information of the wafer transfer box; the current mode is a first mode; The recovery module is configured to continue detecting the state of the target sensor through the detection program after the crown performs the picking operation, and recover from the second mode to a default first mode when the state is updated to an initial state.

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