Near-synchronous dual-mode surface acoustic wave resonator

By employing constant finger period and transition region control in a dual-mode surface acoustic wave resonator, the problems of cavity mode and spurious mode are solved, resulting in smaller size and improved passband performance, overcoming manufacturability limitations and performance enhancements.

CN121753255APending Publication Date: 2026-03-27RF360 SINGAPORE PTE LTD
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Patent Information

Application Number
CN202480055216.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-09-12
Filing Date
2024-08-15
Publication Date
2026-03-27

AI Technical Summary

Technical Problem

Existing dual-mode surface acoustic wave resonators suffer from passband spikes caused by cavity modes and stray parasitic modes between reflectors, which affect filtering performance. Furthermore, conventional designs are manufacturable at high frequencies.

Method used

By designing a dual-mode surface acoustic wave resonator, using a nearly constant finger period and metallization ratio control in the transition region, cavity modes are limited or eliminated. Near-synchronous operation and SiO2 gap filling are used to optimize the reflector and transducer configuration to reduce stray modes.

Benefits of technology

This achieves a smaller filter size and improved passband performance, while addressing manufacturability limitations at high frequencies, reducing insertion loss and increasing bandwidth.

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Abstract

An apparatus for a surface acoustic wave (SAW) apparatus having a dual mode (DMS) resonator configuration with near-synchronous operation is disclosed. One aspect includes a piezoelectric material, a first reflector disposed over the piezoelectric material, a second reflector disposed over the piezoelectric material, and a plurality of interdigital transducers (IDTs) disposed over the piezoelectric material and positioned between the first reflector and the second reflector, wherein a pitch of the electrode fingers in the first reflector and the second reflector is greater than a pitch of the electrode fingers in the plurality of interdigital transducers, and wherein a variation in the pitch of the electrode fingers in the plurality of interdigital transducers is less than 3% across the plurality of interdigital transducers.
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