Electronic-grade hydrochloric acid purification system and method

By setting up position adjustment and pressure regulation mechanisms in the distillation column, the dynamic adaptation problem of the packing assembly was solved, achieving efficient and stable purification of electronic-grade hydrochloric acid, simplifying the packing replacement operation, and meeting the requirements of high precision and continuous production.

CN121754908APending Publication Date: 2026-03-31XIAN JI-LI ELECTRONIC & CHEM ENG CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-04
Publication Date
2026-03-31

AI Technical Summary

Technical Problem

In existing electronic-grade hydrochloric acid purification systems, the packing components cannot achieve dynamic adaptation of axial spacing and precise circumferential alignment of discharge holes, making it difficult to balance mass transfer efficiency and stability. Furthermore, the packing replacement operation is cumbersome and inefficient, failing to meet the requirements for continuous and high-precision purification.

Method used

A position adjustment mechanism is installed inside the distillation column. The axial spacing and circumferential positioning of the packing assembly are adjusted by a rotary drive and an electromagnet. Combined with a vibration component and a pressure regulating mechanism, this ensures smooth mass transfer between the gas and liquid phases and facilitates packing replacement without disassembling the distillation column.

Benefits of technology

It enables flexible and precise adjustment of the packing assembly under different operating conditions, improves mass transfer efficiency and system stability, simplifies the packing replacement process, and meets the needs of efficient and continuous purification.

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Abstract

The invention discloses an electronic-grade hydrochloric acid purification system and method, and relates to the technical field of hydrochloric acid preparation, the electronic-grade hydrochloric acid purification system comprises a liquid storage tank, a reboiler, a rectifying tower and a condenser, the liquid storage tank, the reboiler, the rectifying tower and the condenser are sequentially connected through pipelines, and a first support and a second support are arranged at the upper end and the lower end in the rectifying tower respectively; compared with an existing hydrochloric acid purification system, the hydrochloric acid purification system is provided with the position adjusting mechanism with a bidirectional adjusting function, and the position adjusting mechanism not only can drive the filler assembly to ascend and descend in the axial direction, but also can drive the filler assembly to rotate in the axial direction according to needs; therefore, flexible and accurate switching of the packing assembly between the two working modes of axial spacing adjustment and circumferential positioning is achieved, the convenience and efficiency of operation are greatly improved, a pressure adjusting mechanism is arranged in the reboiler, the pressure adjusting mechanism has a passive response mechanism and an active intervention mechanism, and the pressure adjusting mechanism has the advantages that the pressure adjusting mechanism is simple in structure and convenient to operate. In this way, a relatively high and stable operating pressure at the bottom of the reboiler is maintained.
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Description

Technical Field

[0001] This invention relates to the field of hydrochloric acid preparation technology, specifically to an electronic-grade hydrochloric acid purification system and method. Background Technology

[0002] Electronic-grade hydrochloric acid is an indispensable key material in semiconductor manufacturing, photovoltaic industry and high-end electronic chemicals. Its purity is directly related to the performance and reliability of microelectronic devices. Traditional electronic-grade hydrochloric acid purification processes mainly rely on distillation technology, with the core equipment being packed distillation columns or plate distillation columns.

[0003] In this system, the raw material hydrochloric acid is heated and vaporized in a reboiler, and the vapor enters the distillation column. Gas-liquid mass transfer occurs between the vapor and the packing surface inside the column, achieving efficient separation of hydrogen chloride from impurities such as water and metal ions. Finally, the high-purity vapor is condensed to obtain the product. However, in the existing electronic-grade hydrochloric acid purification process, the packing components used in the distillation column usually cannot achieve integrated and flexible switching between dynamic adaptation of axial spacing to working conditions and precise circumferential alignment of discharge holes. This makes it difficult to balance mass transfer efficiency and stability when the working conditions fluctuate. Moreover, packing replacement requires disassembling the distillation column, which is cumbersome and inefficient, and cannot meet the high-efficiency operation and maintenance requirements of continuous and high-precision purification. Summary of the Invention

[0004] The purpose of this invention is to provide an electronic-grade hydrochloric acid purification system and method to solve the problem of difficulty in dynamically adjusting the spacing of the packing area and aligning the discharge holes in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an electronic-grade hydrochloric acid purification system, comprising a storage tank, a reboiler, a distillation column, and a condenser. The storage tank, reboiler, distillation column, and condenser are sequentially connected by pipelines to form a continuous purification process. The distillation column has a first support and a second support at its upper and lower ends, respectively. A position adjustment mechanism is provided between the first and second supports. The position adjustment mechanism is equipped with several packing assemblies, each filled with packing material. The distillation column has several first discharge holes on its side wall, each with a first sealing cap. Each packing assembly is associated with one discharge hole. The reboiler has aligned orifices and is equipped with a heating mechanism, a mounting plate, and a pressure regulating mechanism. The mounting plate has several mounting slots, each housing a pressure regulating mechanism. During operation, hydrochloric acid feedstock from a storage tank is quantitatively pumped into the reboiler via a feed pump or other liquid transport equipment. The heating mechanism within the reboiler provides energy for the vaporization of the hydrochloric acid feedstock. Once vaporized, the hydrochloric acid passes through the pressure regulating mechanism, which adjusts the pressure at the bottom of the reboiler to maintain a relatively high pressure, thereby reducing the evaporation rate of moisture and impurities. After the hydrochloric acid vapor exits the reboiler, it enters a distillation column. The packing material moves upwards along several packing assemblies, where it intercepts impurities in the hydrochloric acid vapor. After exiting the top of the distillation column, the hydrochloric acid vapor enters the condenser for condensation and recovery, allowing for secondary purification until it meets usage requirements. This invention includes a position adjustment mechanism within the distillation column. This mechanism allows for direct control of the distance between the packing assemblies during operation and adjustment of the alignment between the packing assemblies and the discharge port. Specifically, if the amount of hydrochloric acid raw material to be processed increases within a certain timeframe, the distance between adjacent packing assemblies can be adjusted accordingly. The distance between the packing assemblies reduces gas flow resistance, alleviates mist entrainment, and ensures smooth mass transfer between the gas and liquid phases. Similarly, if the amount of hydrochloric acid feedstock to be processed decreases during a certain period, the staff can promptly reduce the distance between two adjacent packing assemblies to enhance gas-liquid turbulence and ensure mass transfer efficiency. Finally, when the work is finished, if the packing in the packing assembly needs to be replaced, the staff can first remove the first sealing cap from the first discharge hole, and then drive the packing assembly to rotate through the position adjustment mechanism to send the packing to be replaced to the first discharge hole, so that the staff can remove and replace the packing in the packing assembly without disassembling the distillation column.

[0006] Furthermore, the position adjustment mechanism includes a rotary drive, an outer shaft, and an inner shaft. The rotary drive is mounted on a first support, and the inner shaft is located inside the outer shaft. The rotary drive is connected to the outer and inner shafts via a linkage assembly. The outer shaft has several lifting grooves, and the inner shaft has several spiral grooves. Each lifting groove corresponds to one spiral groove, and each spiral groove contains a slider. Each slider is connected to a packing assembly. When it is necessary to change the distance between several packing assemblies, the operator can activate the linkage assembly and the rotary drive. The linkage assembly connects the rotary drive to the inner shaft, and the rotary drive drives the inner shaft to rotate within the outer shaft. At this time, the rotation of the inner shaft causes the spiral grooves to move the sliders along a spiral trajectory. Since the sliders are also constrained by the lifting grooves of the outer shaft, the sliders will move up and down with the packing assemblies outside the outer shaft, thereby achieving the purpose of dynamically adjusting the spacing of several packing assemblies according to the hydrochloric acid distillation conditions.

[0007] Furthermore, the linkage assembly includes a connecting seat, a first transmission block, and a second transmission block. The connecting seat is connected to the working end of the rotary drive component. The first transmission block is mounted on the inner shaft, and the second transmission block is mounted on the outer shaft. A first electromagnet is mounted on the end of the connecting seat near the first transmission block, and a second electromagnet is mounted on the end of the connecting seat near the second transmission block. This invention controls the energization and de-energization of the first and second electromagnets to facilitate the selective transmission of power from the rotary drive component to the inner or outer shaft. That is, when the operator needs to change the spacing of several packing assemblies, the first electromagnet will magnetically attract the first transmission block, thereby facilitating the rotation of the drive component. The moving part drives the inner shaft to rotate. When the operator needs to adjust the alignment area between the packing assembly and the discharge hole, the first electromagnet and the second electromagnet will work simultaneously and magnetically attract the first transmission block and the second transmission block. At this time, the rotating drive will drive the inner shaft and the outer shaft to rotate coaxially and in the same direction. The packing assembly will rotate around the axis together with the inner shaft and the outer shaft. By controlling the rotation angle, the packing to be replaced will be continuously fed to the first discharge hole, thus providing the operator with a direct operation window for replacing the packing. Through the above technical solution, the present invention realizes flexible and precise switching between the two working modes of axial spacing adjustment and circumferential positioning of the packing assembly, which greatly improves the convenience and efficiency of operation.

[0008] Furthermore, a limiting element is provided inside the second bracket. The end of the outer shaft away from the rotary drive component is connected to the limiting element. The limiting element circumferentially limits the outer shaft to prevent the inner shaft from causing the outer shaft to rotate unexpectedly due to friction or other reasons during operation, thereby ensuring the accuracy and stability of several packing assemblies during the spacing adjustment process.

[0009] Furthermore, the packing assembly includes a packing disc with several storage chambers for accommodating the packing. Each storage chamber has a second discharge hole at one end near the inner wall of the distillation column, and each second discharge hole has a second sealing cap. The cooperation between the second discharge hole and the first discharge hole allows the staff to clean and replace the packing in a specific storage chamber individually. Each storage chamber has a first filter plate and a second filter plate at its upper and lower ends. The first and second filter plates allow gas and liquid to pass through but block the packing. The first filter plate is movably installed in the storage chamber by a vibration component, thereby achieving active unblocking of the first filter plate and avoiding local blockage of the first filter plate due to liquid tension or impurities, which would affect the gas-liquid mass transfer efficiency.

[0010] Furthermore, a movable groove is provided at the upper end of the storage chamber. The vibration assembly includes a third electromagnet and a vibration spring, both of which are disposed within the movable groove. The first filter plate is connected to the movable groove via the vibration spring. During operation, the present invention can apply a periodically changing current to the third electromagnet, causing it to generate intermittent magnetic attraction. With the cooperation of the vibration spring, the first filter plate will generate high-frequency, small-amplitude reciprocating vibration. This vibration can effectively break the surface tension film formed by the liquid at the micropores of the first filter plate, forcing the retained droplets to fall off. At the same time, the vibration will also shake off impurity particles attached to the micropores of the first filter plate, so as to ensure that the pores of the first filter plate are unobstructed.

[0011] Furthermore, the pressure regulating mechanism includes a movable cover and an adjusting cylinder. The adjusting cylinder is located at the end of the movable cover near the heating mechanism. The adjusting cylinder has several air holes. The movable cover is connected to the mounting groove via an adjusting spring. When the pressure at the bottom of the reboiler is high, under the action of the air pressure, the movable cover drives the adjusting cylinder to move upward against the elastic force of the adjusting spring, causing most of the air holes on the adjusting cylinder to rise from the mounting groove, thereby increasing the effective flow area of ​​the airflow. When the pressure at the bottom of the reboiler decreases, the air pressure acting on the movable cover and the adjusting cylinder weakens. At this time, the restoring force of the adjusting spring will drive the movable cover and the adjusting cylinder to move downward as a whole, causing the air holes on the adjusting cylinder to gradually retract below the mounting groove. At this time, the effective flow area of ​​the airflow will be reduced. The above technical solution can compensate for and buffer the pressure drop inside the reboiler, which helps to maintain a relatively high pressure at the bottom of the reboiler and reduce the proportion of water and impurities evaporating.

[0012] Furthermore, a sliding groove is provided on the side end of the movable cover, and an adjusting block is provided inside the sliding groove. The pressure regulating mechanism also includes a linear drive component, the working end of which is connected to the adjusting block. When controlling the pressure inside the reboiler, the present invention can push the adjusting block to move in the sliding groove through the linear drive component, so that the operator can actively control the position of the movable cover and the regulating cylinder, thereby adjusting the opening of the air vent on the regulating cylinder. Through the above technical solution, the present invention not only relies on passive pressure feedback, but also can actively and accurately preset and dynamically intervene in the reference point of pressure regulation according to actual process requirements, significantly improving the anti-interference ability and dynamic response speed of the system.

[0013] Furthermore, the movable cover and the adjusting cylinder are connected by a threaded detachable connection, which facilitates the replacement or cleaning of the adjusting cylinder and prevents impurities from clogging the air holes on the adjusting cylinder during long-term operation, thereby improving the maintainability of the system.

[0014] A method for using an electronic-grade hydrochloric acid purification system includes the following steps: S1: The hydrochloric acid raw material in the storage tank 1 is quantitatively transported to the reboiler 2, and the hydrochloric acid raw material in the reboiler 2 is heated by the heating mechanism 21; S2: Hydrochloric acid raw material gradually vaporizes to form steam. During the rise of the steam, it drives the pressure regulating mechanism 23, and the hydrochloric acid steam is stably discharged through the pressure regulating mechanism 23. S3: After being discharged from the reboiler 2, the hydrochloric acid vapor enters the distillation column 3 and flows upward along the distillation column 3, passing through several packing assemblies in sequence, through which impurities in the vapor are intercepted. S4: The high-purity hydrochloric acid vapor discharged from the top of the distillation column 3 enters the condenser 4, and the hydrochloric acid vapor is condensed and recovered by the cooling medium of the condenser 4.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. Compared with the current hydrochloric acid purification system, the present invention is equipped with a position adjustment mechanism with bidirectional adjustment function in the distillation column. The position adjustment mechanism can not only drive the packing assembly to move up and down axially, but also dynamically and accurately adjust the distance between each packing assembly according to the amount of hydrochloric acid raw material processed in real time. This ensures that the spacing can be increased in time under high load conditions to reduce flow resistance and prevent flooding, and the spacing can be reduced in time under low load conditions to enhance gas-liquid disturbance and maintain mass transfer efficiency. This allows the system to adapt to a wide range of operating condition fluctuations and always maintain the optimal separation efficiency. At the same time, the position adjustment mechanism can also drive the packing assembly to rotate axially as needed, which makes it convenient for the staff to remove and replace the packing in the packing assembly without disassembling the distillation column. 2. The present invention provides a first filter plate and a vibration assembly at the upper end of the storage chamber. The vibration assembly can effectively break the liquid film or liquid bridge formed at the micropores of the first filter plate due to the surface tension of the liquid and shake off the attached impurities, thereby actively cleaning the first filter plate and ensuring that the gas and liquid phases pass through the packing assembly uniformly and smoothly for a long time. 3. The present invention is equipped with a pressure regulating mechanism in the reboiler. The pressure regulating mechanism has a dual mechanism of passive response and active intervention. By balancing the gas pressure and the regulating spring, it can automatically compensate for the pressure fluctuation at the bottom of the reboiler, which helps to maintain a relatively high and stable operating pressure at the bottom of the reboiler. This effectively suppresses the adverse evaporation of moisture and light impurities. The pressure setpoint can be preset or dynamically adjusted by the linear drive component, realizing precise and rapid feedforward control of the pressure. This greatly enhances the system's ability to resist upstream disturbances such as feeding and heating, ensuring the stability and controllability of the vaporization process and providing stable gas phase conditions for subsequent distillation. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the distillation column of the present invention; Figure 3 This is a schematic diagram of the position adjustment mechanism of the present invention; Figure 4 This is a schematic diagram of the outer and inner shaft structures of the present invention; Figure 5 This is a schematic diagram of the internal structure of the second support of the present invention; Figure 6 This is a schematic diagram of the packing assembly structure of the present invention; Figure 7 This is a schematic diagram of the internal structure of the reboiler of the present invention; Figure 8 This is a schematic diagram showing the position of the pressure regulating mechanism of the present invention; Figure 9 This is a schematic diagram of the pressure regulating mechanism of the present invention.

[0017] In the diagram: 1. Storage tank; 2. Reboiler; 21. Heating mechanism; 22. Mounting plate; 23. Pressure regulating mechanism; 231. Movable cover; 2311. Slide groove; 2312. Adjusting block; 232. Adjusting cylinder; 233. Linear drive component; 3. Distillation column; 31. First support; 311. Rotary drive component; 312. Connecting seat; 3121. First electromagnet; 3122. Second electromagnet; 313. First transmission block; 314. Second transmission block; 32. Second support; 321. Limiting element; 33. First sealing cover; 34. Packing disc; 341. Third electromagnet; 342. First filter plate; 343. Second sealing cover; 344. Storage chamber; 345. Second filter plate; 35. Outer shaft; 351. Lifting groove; 36. Inner shaft; 361. Spiral groove; 362. Sliding block; 4. Condenser. Detailed Implementation

[0018] Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Example: Figures 1-9As shown, the present invention provides a technical solution: an electronic-grade hydrochloric acid purification system, comprising a storage tank 1, a reboiler 2, a distillation column 3, and a condenser 4. The storage tank 1, reboiler 2, distillation column 3, and condenser 4 are sequentially connected by pipelines to form a continuous purification process. The distillation column 3 has a first support 31 and a second support 32 at its upper and lower ends, respectively. A position adjustment mechanism is provided between the first support 31 and the second support 32. The position adjustment mechanism is equipped with several packing assemblies, each filled with packing material. The side wall of the distillation column 3 has several first discharge holes, each with a first sealing cap 33. Each packing assembly is associated with one discharge hole. The reboiler 2 is internally equipped with a heating mechanism 21, a mounting plate 22, and a pressure regulating mechanism 23. The mounting plate 22 has several mounting slots, each containing a pressure regulating mechanism 23. During operation, hydrochloric acid raw material from the storage tank 1 is quantitatively transported to the reboiler 2 via a raw material pump or other liquid conveying equipment. The heating mechanism 21 within the reboiler 2 provides energy for the vaporization of the hydrochloric acid raw material. Once the hydrochloric acid vaporizes into steam, it passes through the pressure regulating mechanism 23. The pressure regulating mechanism 23 adjusts the pressure at the bottom of the reboiler 2 to ensure it remains at a relatively high level, thereby reducing the evaporation rate of moisture and impurities. When the hydrochloric acid vapor exits from the reboiler 2... After being discharged, the hydrochloric acid vapor enters distillation column 3 and moves upward along several packed assemblies. The packing within these assemblies intercepts impurities in the hydrochloric acid vapor. Once discharged from the top of distillation column 3, the vapor enters condenser 4 for condensation and recovery, allowing for secondary purification until it meets usage requirements. This invention includes a position adjustment mechanism within distillation column 3. This mechanism allows for direct control of the distance between the packed assemblies during operation and adjustment of the alignment between the packed assemblies and the discharge port. In other words, if the amount of hydrochloric acid raw material to be processed increases within a certain timeframe, the operator can promptly adjust the position. Increasing the distance between two adjacent packing assemblies reduces gas flow resistance, alleviates mist entrainment, and ensures smooth mass transfer between the gas and liquid phases. Similarly, if the amount of hydrochloric acid raw material to be processed decreases during a certain period, the staff can promptly reduce the distance between two adjacent packing assemblies to enhance gas-liquid turbulence and ensure mass transfer efficiency. Finally, when the work is finished, if the packing in the packing assembly needs to be replaced, the staff can first remove the first sealing cover 33 from the first discharge hole, and then drive the packing assembly to rotate through the position adjustment mechanism to send the packing to be replaced to the first discharge hole, so that the staff can remove and replace the packing in the packing assembly without disassembling the distillation column 3.

[0020] like Figures 2-6As shown, the position adjustment mechanism includes a rotary drive 311, an outer shaft 35, and an inner shaft 36. The rotary drive 311 is mounted on the first bracket 31, and the inner shaft 36 is mounted inside the outer shaft 35. The rotary drive 311 is connected to the outer shaft 35 and the inner shaft 36 via a linkage assembly. The outer shaft 35 has several lifting grooves 351, and the inner shaft 36 has several spiral grooves 361. Each lifting groove 351 corresponds to one spiral groove 361. Each spiral groove 361 contains a slider 362, and each slider 362 is connected to a packing assembly. When it is necessary to change several... When adjusting the spacing between packing assemblies, the operator can activate the linkage component and the rotary drive component 311. The linkage component connects the rotary drive component 311 to the inner shaft 36, and the rotary drive component 311 drives the inner shaft 36 to rotate within the outer shaft 35. At this time, the rotation of the inner shaft 36 will cause the spiral groove 361 to drive the slider 362 to move along the spiral trajectory. Since the slider 362 is also restricted by the lifting groove 351 of the outer shaft 35, the slider 362 will carry the packing assembly to move up and down outside the outer shaft 35, thereby achieving the purpose of dynamically adjusting the spacing between several packing assemblies according to the hydrochloric acid distillation conditions.

[0021] like Figure 3 As shown, the linkage assembly includes a connecting seat 312, a first transmission block 313, and a second transmission block 314. The connecting seat 312 is connected to the working end of the rotary drive component 311. The first transmission block 313 is mounted on the inner shaft 36, and the second transmission block 314 is mounted on the outer shaft 35. A first electromagnet 3121 is mounted on the end of the connecting seat 312 near the first transmission block 313, and a second electromagnet 3122 is mounted on the end of the connecting seat 312 near the second transmission block 314. This invention controls the energization and de-energization of the first electromagnet 3121 and the second electromagnet 3122 to facilitate the rotary drive component 311 to selectively transmit power to the inner shaft 36 or the outer shaft 35. That is, when the operator needs to change the spacing of several packing components, the first electromagnet 3121 will magnetically attract the first... The transmission block 313 enables the rotary drive 311 to drive the inner shaft 36 to rotate. When the operator needs to adjust the alignment area between the packing assembly and the discharge hole, the first electromagnet 3121 and the second electromagnet 3122 will work simultaneously and magnetically attract the first transmission block 313 and the second transmission block 314. At this time, the rotary drive 311 will drive the inner shaft 36 and the outer shaft 35 to rotate coaxially and in the same direction. The packing assembly will rotate around the axis together with the inner shaft 36 and the outer shaft 35. By controlling the rotation angle, the packing to be replaced will be continuously fed to the first discharge hole, thus providing the operator with a direct operating window for replacing the packing. Through the above technical solution, the present invention realizes flexible and precise switching between the two working modes of axial spacing adjustment and circumferential positioning of the packing assembly, greatly improving the convenience and efficiency of operation.

[0022] like Figure 5As shown, a limiting element 321 is provided inside the second bracket 32. The end of the outer shaft 35 away from the rotary drive 311 is connected to the limiting element 321. The limiting element 321 circumferentially limits the outer shaft 35 to prevent the inner shaft 36 from causing the outer shaft 35 to rotate unexpectedly due to friction or other reasons during operation, thereby ensuring the accuracy and stability of several packing assemblies during the spacing adjustment process.

[0023] like Figure 2 , Figure 6 As shown, the packing assembly includes a packing disc 34, which has several storage chambers 344 for accommodating the packing. Each storage chamber 344 has a second discharge hole at one end near the inner wall of the distillation column 3, and each second discharge hole has a second sealing cover 343. The cooperation between the second discharge hole and the first discharge hole allows the staff to clean and replace the packing in a specific storage chamber 344 individually. Each storage chamber 344 has a first filter plate 342 and a second filter plate 345 at its upper and lower ends. The first filter plate 342 and the second filter plate 345 allow gas and liquid to pass through but block the packing. The first filter plate 342 is movably installed in the storage chamber 344 by a vibration component, thereby achieving active unblocking of the first filter plate 342 and avoiding local blockage of the first filter plate 342 due to liquid tension or impurities, which would affect the gas-liquid mass transfer efficiency.

[0024] like Figure 6 As shown, a movable groove is provided at the upper end of the storage chamber 344. The vibration assembly includes a third electromagnet 341 and a vibration spring. Both the third electromagnet 341 and the vibration spring are disposed in the movable groove. The first filter plate 342 is connected to the movable groove through the vibration spring. During operation, the present invention can apply a periodically changing current to the third electromagnet 341 to generate intermittent magnetic attraction. With the cooperation of the vibration spring, the first filter plate 342 will generate high-frequency, small-amplitude reciprocating vibration. This vibration can effectively break the surface tension film formed by the liquid at the micropores of the first filter plate 342, forcing the retained droplets to fall off. At the same time, the vibration will also shake off the impurity particles attached to the micropores of the first filter plate 342, so as to ensure that the pores of the first filter plate 342 are unobstructed.

[0025] like Figures 7-9As shown, the pressure regulating mechanism 23 includes a movable cover 231 and an regulating cylinder 232. The regulating cylinder 232 is located at the end of the movable cover 231 near the heating mechanism 21. The regulating cylinder 232 has several air holes. The movable cover 231 is connected to the mounting groove through an adjusting spring. When the pressure at the bottom of the reboiler 2 is high, under the action of the air pressure, the movable cover 231 drives the regulating cylinder 232 to move upward against the elastic force of the adjusting spring, so that most of the air holes on the regulating cylinder 232 rise from the mounting groove, thereby increasing the effective flow area of ​​the airflow. When the pressure at the bottom of the reboiler 2 decreases, the air pressure acting on the movable cover 231 and the regulating cylinder 232 weakens. At this time, the restoring force of the adjusting spring will drive the movable cover 231 and the regulating cylinder 232 to move downward as a whole, so that the air holes on the regulating cylinder 232 gradually retract below the mounting groove. At this time, the effective flow area of ​​the airflow will be reduced. The above technical solution can compensate for and buffer the pressure drop inside the reboiler 2, which helps to maintain the bottom of the reboiler 2 at a certain high pressure and reduce the proportion of water and impurities evaporating.

[0026] like Figure 9 As shown, a sliding groove 2311 is provided on the side of the movable cover 231, and an adjusting block 2312 is provided inside the sliding groove 2311. The pressure regulating mechanism 23 also includes a linear drive 233. The working end of the linear drive 233 is connected to the adjusting block 2312. When controlling the pressure inside the reboiler 2, the present invention can push the adjusting block 2312 to move in the sliding groove 2311 through the linear drive 233, so that the operator can actively control the position of the movable cover 231 and the adjusting cylinder 232, thereby adjusting the opening of the air hole on the adjusting cylinder 232. Through the above technical solution, the present invention not only relies on passive pressure feedback, but also can actively and accurately preset and dynamically intervene in the reference point of pressure regulation according to actual process requirements, which significantly improves the anti-interference ability and dynamic response speed of the system.

[0027] like Figure 9 As shown, the movable cover 231 and the adjusting cylinder 232 are connected by a threaded detachable connection, which facilitates the replacement or cleaning of the adjusting cylinder 232 and prevents impurities from clogging the air holes on the adjusting cylinder 232 during long-term operation, thereby improving the maintainability of the system.

[0028] A method for using an electronic-grade hydrochloric acid purification system includes the following steps: S1: The hydrochloric acid raw material in the storage tank 1 is quantitatively transported to the reboiler 2, and the hydrochloric acid raw material in the reboiler 2 is heated by the heating mechanism 21; S2: Hydrochloric acid raw material gradually vaporizes to form steam. During the rise of the steam, it drives the pressure regulating mechanism 23, and the hydrochloric acid steam is stably discharged through the pressure regulating mechanism 23. S3: After being discharged from the reboiler 2, the hydrochloric acid vapor enters the distillation column 3 and flows upward along the distillation column 3, passing through several packing assemblies in sequence, through which impurities in the vapor are intercepted. S4: The high-purity hydrochloric acid vapor discharged from the top of the distillation column 3 enters the condenser 4, and the hydrochloric acid vapor is condensed and recovered by the cooling medium of the condenser 4.

[0029] The working principle of this invention is as follows: During operation, hydrochloric acid raw material in storage tank 1 is quantitatively transported to reboiler 2 via a raw material pump or other liquid conveying equipment. The heating mechanism 21 within reboiler 2 provides energy for the vaporization of the hydrochloric acid raw material. Once vaporized, the hydrochloric acid passes through a pressure regulating mechanism 23, which adjusts the pressure at the bottom of reboiler 2 to ensure it remains at a relatively high level, thereby reducing the evaporation rate of moisture and impurities. After exiting reboiler 2, the hydrochloric acid vapor enters distillation column 3 and moves upward along several packing assemblies. The packing within these assemblies intercepts impurities in the hydrochloric acid vapor. Finally, after exiting the top of distillation column 3, the hydrochloric acid vapor enters condenser 4, where it is condensed and recovered for secondary purification. Subsequently, as the hydrochloric acid vapor moves within the distillation column 3, the operator can adjust the spacing of several packing assemblies in real time according to the amount of gas entering the column. If the hydrochloric acid vapor increases sharply during a certain period, the distance between two adjacent packing assemblies is increased by the position adjustment mechanism to reduce the gas flow resistance. If the hydrochloric acid vapor decreases during a certain period, the distance between two adjacent packing assemblies is reduced by the position adjustment mechanism to enhance gas-liquid turbulence and ensure mass transfer efficiency. When the work is completed, if the packing in the packing assembly needs to be replaced, the operator can first remove the first sealing cover 33 from the first discharge hole, and then drive the packing assembly to rotate through the position adjustment mechanism to continuously send the packing to be replaced to the first discharge hole, so that the operator can remove and replace the packing in the packing assembly without disassembling the distillation column 3.

[0030] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An electronic grade hydrochloric acid purification system comprising a storage tank (1), a reboiler (2), a rectifying tower (3) and a condenser (4), the storage tank (1), the reboiler (2), the rectifying tower (3) and the condenser (4) being connected in sequence by pipes, characterized in that: The rectifying tower (3) is internally provided with a first support (31) and a second support (32) at the upper and lower ends, respectively, a position adjusting mechanism is arranged between the first support (31) and the second support (32), a plurality of filler assemblies are arranged on the position adjusting mechanism, a plurality of first discharge holes are arranged on the sidewall of the rectifying tower (3), a first sealing cover (33) is arranged in each first discharge hole, each filler assembly is aligned with a discharge hole, and the reboiler (2) is internally provided with a heating mechanism (21), a mounting plate (22) and a pressure regulating mechanism (23), a plurality of mounting grooves are arranged on the mounting plate (22), and the pressure regulating mechanism (23) is arranged in each mounting groove.

2. The electronic grade hydrochloric acid purification system according to claim 1, characterized in that: The position adjusting mechanism comprises a rotary driving member (311), an outer shaft (35) and an inner shaft (36), the rotary driving member (311) is arranged on the first support (31), the inner shaft (36) is arranged in the outer shaft (35), the rotary driving member (311) is connected with the outer shaft (35) and the inner shaft (36) through a linkage assembly, a plurality of lifting grooves (351) are arranged on the outer shaft (35), a plurality of spiral grooves (361) are arranged on the inner shaft (36), each lifting groove (351) corresponds to a spiral groove (361), a sliding block (362) is arranged in each spiral groove (361), and each sliding block (362) is connected with a filler assembly.

3. The electronic grade hydrochloric acid purification system according to claim 2, characterized in that: The linkage assembly comprises a connecting seat (312), a first transmission block (313) and a second transmission block (314), the connecting seat (312) is connected with the working end of the rotary driving member (311), the first transmission block (313) is arranged on the inner shaft (36), and the second transmission block (314) is arranged on the outer shaft (35). One end of the connecting seat (312) close to the first transmission block (313) is provided with a first electromagnet (3121), and one end of the connecting seat (312) close to the second transmission block (314) is provided with a second electromagnet (3122).

4. The electronic grade hydrochloric acid purification system of claim 2, wherein: The second support (32) is internally provided with a limiting element (321), and one end of the outer shaft (35) away from the rotary driving member (311) is connected with the limiting element (321).

5. The electronic grade hydrochloric acid purification system of claim 1, wherein: The filler assembly comprises a filler tray (34), a plurality of storage cavities (344) are arranged in the filler tray (34), one end of each storage cavity (344) close to the inner wall of the rectifying tower (3) is provided with a second discharge hole, a second sealing cover (343) is arranged in each second discharge hole, and the upper and lower ends of each storage cavity (344) are provided with a first filter plate (342) and a second filter plate (345). The first filter plate (342) is movably installed in the storage cavity (344) through a vibration assembly.

6. The electronic grade hydrochloric acid purification system according to claim 5, characterized in that: The inner upper end of the storage cavity (344) is provided with a movable groove, the vibration assembly comprises a third electromagnet (341) and a vibration spring, the third electromagnet (341) and the vibration spring are arranged in the movable groove, and the first filter plate (342) is connected with the movable groove through the vibration spring.

7. The electronic grade hydrochloric acid purification system of claim 1, wherein: The pressure regulating mechanism (23) comprises a movable cover (231) and an adjusting cylinder (232), the adjusting cylinder (232) is arranged at one end of the movable cover (231) close to the heating mechanism (21), a plurality of air holes are arranged on the adjusting cylinder (232), and the movable cover (231) is connected with the mounting groove through an adjusting spring.

8. The electronic grade hydrochloric acid purification system of claim 7, wherein: A sliding groove (2311) is arranged at the side end of the movable cover (231), an adjusting block (2312) is arranged in the sliding groove (2311), and the pressure regulating mechanism (23) further comprises a linear driving element (233), and the working end of the linear driving element (233) is connected with the adjusting block (2312).

9. The electronic grade hydrochloric acid purification system of claim 7, wherein: The movable cover (231) and the adjusting cylinder (232) are detachably connected through threads.

10. A method of using the electronic grade hydrochloric acid purification system of claim 1, characterized in that: The method comprises the following steps: S1: quantitatively conveying hydrochloric acid raw materials in a liquid storage tank (1) into a reboiler (2), and heating the hydrochloric acid raw materials in the reboiler (2) through a heating mechanism (21); S2: the hydrochloric acid raw materials are gradually vaporized to form steam, the steam pushes the pressure regulating mechanism (23) during the rising process, and the stable discharge of the hydrochloric acid steam is realized through the pressure regulating mechanism (23); S3: after the hydrochloric acid steam is discharged from the reboiler (2), the hydrochloric acid steam enters a rectifying tower (3) and flows upwards along the rectifying tower (3), and sequentially passes through a plurality of filler assemblies, and the impurities in the steam are intercepted through the filler assemblies; S4: high-purity hydrochloric acid steam discharged from the top of the rectifying tower (3) enters a condenser (4), and the hydrochloric acid steam is condensed and recovered through the cooling medium of the condenser (4).

Citation Information

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