Adsorption roller

Abstract

A suction roller is provided. In a negative pressure roller which sucks air in a plurality of air passages together, suction of air cannot be individually adjusted in each of the air passages. A suction roller (100) is provided with: a shaft part (110) having a central axis (CA); and a roller part (120) which can rotate relative to the shaft part with the central axis as the center. The shaft portion defines a plurality of first flow paths (50), one end of which opens on the outer peripheral surface of the shaft portion. The roller portion defines a plurality of second flow paths (70) extending from the inner peripheral surface to the outer peripheral surface of the roller portion. When either the outer peripheral surface of the shaft portion or the inner peripheral surface of the roller portion is set as a specific peripheral surface, the specific peripheral surface has a plurality of annular grooves extending annularly about the central axis. The plurality of annular grooves are arranged at intervals in the direction along the central axis. Each of the first flow paths is connected to a different second flow path via a different annular groove.

Description

Technical Field

[0001] This invention relates to adsorption rollers. Background Technology

[0002] The negative pressure roller of Patent Document 1 comprises a negative pressure roller body, an attraction block, and an attraction blower.

[0003] The negative pressure roller body is cylindrical. Multiple air passages extending along the central axis of the negative pressure roller body are divided within it. Each air passage opens at one end face but not at the other. Furthermore, the air passages are arranged at equal intervals circumferentially around the central axis of the negative pressure roller body. Multiple suction ports branch off from the middle of each air passage. Each suction port opens on the outer circumferential surface of the negative pressure roller body.

[0004] The suction block is installed on the end face of the air passage opening on both end faces of the negative pressure roller body. The suction block divides the suction space. The suction space is a space recessed from the surface of the suction block on the side facing the negative pressure roller body. The suction space extends in an arc shape in the circumferential direction centered on the central axis of the negative pressure roller body. Moreover, the opening of the suction space faces several openings of the air passage on the end face of the negative pressure roller body.

[0005] Furthermore, the suction blower can draw in air. The suction port of the suction blower is connected to the suction space of the suction block through the internal space of the pipe. Thus, when the suction blower draws in air, the air in the suction space of the suction block is drawn in, and consequently, the air in a portion of the air passage of the negative pressure roller body is drawn in. Additionally, the negative pressure roller body can rotate about its central axis. On the other hand, the suction block is fixed. Therefore, as the negative pressure roller body rotates, the opening of the air passage facing the opening of the suction space gradually changes. Thus, the air passage through which air is drawn in also gradually changes with the rotation of the negative pressure roller body.

[0006] Patent Document 1: Japanese Patent Application Publication No. 2002-160857

[0007] In the negative pressure roller described in Patent Document 1, the suction block simultaneously attracts air from multiple opposing air passages. Therefore, in the negative pressure roller described in Patent Document 1, it is not possible to individually adjust the intensity, duration, or timing of air attraction in each air passage. Summary of the Invention

[0008] To address the aforementioned issues, the present invention provides an adsorption roller comprising: a cylindrical shaft having a central axis; and a roller having an inner circumferential surface facing the outer circumferential surface of the shaft and being rotatable relative to the shaft about the central axis. The shaft divides a plurality of first flow paths with one end opening at the outer circumferential surface of the shaft, and the roller divides a plurality of second flow paths extending from the inner circumferential surface of the roller to the outer circumferential surface. When either the outer circumferential surface of the shaft or the inner circumferential surface of the roller is designated as a specific circumferential surface, the specific circumferential surface has a plurality of annular grooves extending in a ring shape about the central axis. The plurality of annular grooves are spaced apart in a direction along the central axis, and each of the first flow paths is connected to a different second flow path via a different annular groove.

[0009] For each airflow path, the intensity, duration, and timing of air intake can be adjusted individually. Attached Figure Description

[0010] Figure 1 This is a three-dimensional view of the stripping device.

[0011] Figure 2 It is a 3D view of the workbench and the lifting device.

[0012] Figure 3 It is a 3D view of the worktable and the clamping mechanism.

[0013] Figure 4 It is a three-dimensional view of a portion of the shaft.

[0014] Figure 5 This is a side view of the shaft.

[0015] Figure 6 This is a 3D view of the adsorption roller.

[0016] Figure 7 This is a side view of the adsorption roller.

[0017] Figure 8 This is a partial sectional view of the roller section.

[0018] Figure 9 This is a partial sectional view of the roller section.

[0019] Figure 10 This is a 3D diagram of an adhesive joint.

[0020] Figure 11 This is a top view of the workbench.

[0021] Figure 12 This is a three-dimensional view of the stripping device.

[0022] Figure 13 This is a three-dimensional view of the stripping device.

[0023] Figure 14 This is a three-dimensional diagram of the support mechanism.

[0024] Figure 15 This is a diagram showing a modified example of the adsorption roller.

[0025] Explanation of reference numerals in the attached figures

[0026] CA...Central axis; 12A...End face; 50...First flow path; 52...First annular groove; 53...Second annular groove; 55...Sealing ring; 70...Second flow path; 100...Adsorption roller; 110...Shaft; 120...Roller; 170...Second flow path; 270...Second flow path; 370...Second flow path; 470...Second flow path. Detailed Implementation

[0027] Hereinafter, a peeling apparatus equipped with the adsorption roller of the present invention will be described with reference to the accompanying drawings. Furthermore, structural elements are schematically shown in the drawings for ease of understanding. Therefore, there may be situations where the dimensional ratios of structural elements differ from the actual dimensions or from the dimensional ratios in other drawings.

[0028] <Overall structural outline of the stripping device>

[0029] like Figure 1 As shown, the peeling device 200 has a worktable 10, a lifting device 40 and a clamping mechanism 20.

[0030] The worktable 10 has a mounting surface 11 capable of holding object A. Although not shown in the figure, object A has a main body and a sheet covering its surface. The main body is a square plate when viewed from above. The material of the main body is, for example, stainless steel. The sheet is adhered to one main surface of the main body. Here, "main surface" refers to the plane with the largest area on the outer surface of the plate-shaped object. The material of the sheet is, for example, aluminum alloy.

[0031] like Figure 2 As shown, the worktable 10 has a top plate 12 and four legs 13.

[0032] The top plate 12 is square. Furthermore, one of the main surfaces of the top plate 12 becomes the aforementioned mounting surface 11. Therefore, when viewed from above, the mounting surface 11 is square. Moreover, the area of ​​the mounting surface 11 of the top plate 12 is larger than the area of ​​the main surface of the object A.

[0033] Each leg 13 is generally cylindrical. Each leg 13 extends parallel to each other from the main surface of the top plate 12 opposite to the mounting surface 11. Each leg 13 is located at one of the four corners of the top plate 12. The worktable 10 is fixed to the factory floor or other location, with the legs 13 positioned below and the top plate 12 positioned above. The specific construction of each leg 13 will be described below.

[0034] Hereinafter, the axis orthogonal to the mounting surface 11 of the worktable 10 will be defined as the vertical axis X. Furthermore, the direction in which the mounting surface 11 of the worktable 10 faces along the vertical axis X will be defined as the first positive direction X1, and the opposite direction of the first positive direction X1 will be defined as the first negative direction X2. Also, the "vertical" and "upper" here are for convenience and do not necessarily refer to the vertical direction of gravity.

[0035] Furthermore, when object A is placed on the mounting surface 11 of the worktable 10, object A is positioned such that when viewed from a direction orthogonal to the mounting surface 11, the diagonal of the main surface of object A overlaps with the diagonal of the mounting surface 11 of the worktable 10. Additionally, when viewed from a direction orthogonal to the mounting surface 11, object A is positioned within the area of ​​the mounting surface 11 of the worktable 10.

[0036] like Figure 2 As shown, the lifting device 40 is located on the first negative direction X2 side relative to the top plate 12 of the worktable 10. The lifting device 40 is a device for adjusting the position of the top plate 12 of the worktable 10 in the direction along the vertical axis X. Therefore, the mounting surface 11 of the worktable 10 can move up and down along the vertical axis X. Furthermore, the structure of the lifting device 40 and the manner of vertical movement of the worktable 10 will be described below.

[0037] like Figure 3 As shown, the clamping mechanism 20 has a fixing part 21 and a driving part 22. The fixing part 21 is generally rectangular in shape. The fixing part 21 is connected to one of the four end faces 12A of the top plate 12. The fixing part 21 is located at the end of the end face 12A in the direction of its long side. In addition, the end face of the top plate 12 referred to here refers to the plane of the top plate 12 facing the direction parallel to the main surface.

[0038] The drive unit 22 is elongated in one direction. Furthermore, the length of the drive unit 22 along its long side is longer than the length from one edge of the main surface of the object A placed on the mounting surface 11 of the worktable 10 to the edge of the worktable 10 closest to that edge. One end of the drive unit 22 is connected to the fixing part 21 via a rotation axis (not shown). This rotation axis is parallel to the end face 12A of the worktable 10 where the fixing part 21 is fixed. Therefore, the drive unit 22 can rotate relative to the fixing part 21 about the aforementioned rotation axis. Moreover, if the drive unit 22 rotates downwards towards the mounting surface 11 of the worktable 10, the drive unit 22 contacts the object A on the worktable 10. In other words, the clamping mechanism 20 can press the object A onto the worktable 10. On the other hand, if the drive unit 22 rotates upwards relative to the worktable 10, the drive unit 22 moves away from the object A on the worktable 10. In this state, object A on workbench 10 can be removed from workbench 10, or a new object A can be placed on workbench 10.

[0039] like Figure 1 As shown, the peeling device 200 includes a linear motion mechanism 61. The linear motion mechanism 61 is generally elongated in a direction orthogonal to the vertical axis X. Here, the axis parallel to the direction in which the linear motion mechanism 61 extends is designated as the movement axis Y. Furthermore, one direction along the movement axis Y is designated as a second positive direction Y1, and the opposite direction of the second positive direction Y1 is designated as a second negative direction Y2. Also, the axis orthogonal to both the vertical axis X and the movement axis Y is designated as the transverse axis Z. Moreover, one direction along the transverse axis Z is designated as a third positive direction Z1, and the opposite direction of the third positive direction Z1 is designated as a third negative direction Z2. Note that the term "transverse" here is for convenience and is not intended to define the transverse direction when viewed from a specific viewpoint. The linear motion mechanism 61 is a mechanism for reciprocating the object connected to it relative to the movement axis Y.

[0040] The linear motion mechanism 61 is adjacent to the worktable 10. More specifically, the linear motion mechanism 61 is positioned such that its extension direction is parallel to one of the two diagonals of the mounting surface 11 of the worktable 10. Furthermore, the linear motion mechanism 61 is located on the third positive direction Z1 side relative to the worktable 10. The linear motion mechanism 61 is composed of known mechanisms such as rack and pinion mechanisms and hydraulic mechanisms. Figure 1 The detailed structure of the linear motion mechanism 61 is omitted, and the figure is shown as an object that is roughly rectangular.

[0041] like Figure 1 As shown, the stripping device 200 includes a support mechanism 80.

[0042] The support mechanism 80 has a trolley section 81, a housing 82, and a tie section 83.

[0043] The trolley section 81 is a rectangular plate. The long side of the trolley section 81 is parallel to the movement axis Y. Furthermore, the trolley section 81 is connected to the linear motion mechanism 61 when one of its main surfaces faces the surface of the linear motion mechanism 61 facing the first positive direction X1. The trolley section 81 can reciprocate along the movement axis Y because the linear motion mechanism 61 is capable of doing so.

[0044] The housing 82 is a long rectangular parallelepiped shape along the transverse axis Z. The housing 82 stores a pump 90 and the like, which are capable of drawing in air. Additionally, Figure 1 The illustration of pump 90 and other components inside housing 82 is omitted.

[0045] The housing 82 is fixed to the surface of the trolley section 81 facing the first positive direction X1. Furthermore, the housing 82 is located near the second negative direction Y2 side of the surface of the trolley section 81 facing the first positive direction X1. The housing 82 is capable of reciprocating along the movement axis Y along with the trolley section 81 due to the linear motion mechanism 61.

[0046] The mooring section 83 is a rectangular plate that bends at right angles at two points in the middle. In other words, the mooring section 83 can be roughly divided into three regions by the bends. These three regions are designated as region 1 83A, region 2 83B, and region 3 83C, starting from one end.

[0047] The first region 83A of the tethering part 83 is fixed to the trolley part 81. The main surface of the first region 83A is orthogonal to the transverse axis Z. In other words, the first region 83A is in the state where the trolley part 81 is upright. The first region 83A is located on the second positive direction Y1 side of the surface of the trolley part 81 facing the first positive direction X1 relative to the housing 82.

[0048] The second region 83B extends from the edge of the first region 83A on the side closest to the second positive direction Y1 toward the third negative direction Z2. The main surface of the second region 83B is orthogonal to the movement axis Y. Furthermore, the length of the second region 83B in the transverse axis Z direction is longer than the length of one diagonal of the mounting surface 11 of the worktable 10.

[0049] The third region 83C extends from the edge of the second region 83B on the side facing the third negative direction Z2 towards the second negative direction Y2. The length dimension of the third region 83C in the direction along the movement axis Y is longer than that of the first region 83A in the direction along the movement axis Y. The main surface of the third region 83C is orthogonal to the transverse axis Z. Therefore, the main surface of the third region 83C faces the main surface of the first region 83A and the housing 82.

[0050] like Figure 1 and Figure 12 As shown, the support mechanism 80 has an arm portion 84 and multiple caster portions 85.

[0051] The arm portion 84 is a rectangular plate. The arm portion 84 is connected to the end face of the third region 83C of the tethering portion 83 facing the first negative direction X2. Moreover, the arm portion 84 extends towards the first negative direction X2.

[0052] Each caster portion 85 is a disc-shaped wheel. Each caster portion 85 is connected to the end of the arm portion 84 on the side facing the first negative direction X2. When two caster portions 85 are arranged as a set of caster portions 85, there are two sets of caster portions 85. The two caster portions 85 constituting a set of caster portions 85 are arranged along the transverse axis Z. Furthermore, each set of caster portions 85 is arranged in the direction along the movement axis Y. Each caster portion 85 is supported so that it can rotate about an axis parallel to the transverse axis Z. Moreover, the outer peripheral surface of each caster portion 85 is in contact with the ground on which the worktable 10 and the linear motion mechanism 61 are placed. Therefore, each caster portion 85 supports the tie portion 83. Furthermore, when the tie portion 83 moves along the movement axis Y, each caster portion 85 rotates and moves together with the tie portion 83.

[0053] like Figure 1 As shown, the peeling device 200 includes an adsorption roller 100.

[0054] like Figure 1 As shown, the adsorption roller 100 has a shaft portion 110 and a roller portion 120.

[0055] The shaft portion 110 is cylindrical. The central axis CA of the shaft portion 110 is parallel to the transverse axis Z. One end of the shaft portion 110 is supported by the housing 82. Specifically, the shaft portion 110 penetrates the wall of the housing 82. Moreover, a portion of the shaft portion 110, including one end, extends into the interior of the housing 82. The other end of the shaft portion 110 is connected to the third region 83C of the mooring portion 83.

[0056] The roller section 120 is a cylindrical shape coaxial with the central axis CA of the shaft section 110. The length of the roller section 120 in the transverse axis Z direction is shorter than the length of the shaft section 110 in the transverse axis Z direction.

[0057] The inner circumferential surface of the roller portion 120 faces the outer circumferential surface of the shaft portion 110. In other words, the shaft portion 110 extends through the roller portion 120. Therefore, one end of the shaft portion 110 extends relative to the roller portion 120 in the third positive direction Z1, and the other end of the shaft portion 110 extends relative to the roller portion 120 in the third negative direction Z2. Moreover, the roller portion 120 is capable of rotating about its central axis CA. In other words, the roller portion 120 is capable of rotating relative to the shaft portion 110 about its central axis CA. Specifically, a drive mechanism (not shown) located inside the housing 82 enables the roller portion 120 to rotate relative to the shaft portion 110. An example of such a drive mechanism is a pinion that can rotate on the rack of a linear motion mechanism 61, which is a rack and pinion mechanism.

[0058] Furthermore, on one hand, the end face of the roller portion 120 on the side closest to the third positive direction Z1 is located on the third positive direction Z1 side of the four vertices of the mounting surface 11 of the worktable 10. On the other hand, the end face of the roller portion 120 on the side closest to the third negative direction Z2 is located on the third negative direction Z2 side of the four vertices of the mounting surface 11 of the worktable 10.

[0059] The roller portion 120 has a plurality of suction ports 70B. The plurality of suction ports 70B open at the outer peripheral surface of the roller portion 120. Furthermore, the outer peripheral surface of the roller portion 120 is the outer peripheral surface of the adsorption roller 100. Therefore, the adsorption roller 100 has a plurality of suction ports 70B opening outwards toward the outer peripheral surface. Additionally, Figure 1 In the figure, only a portion of the suction ports 70B are marked with the attached diagram labels.

[0060] The adsorption roller 100 draws air from multiple suction ports 70B, enabling it to peel the sheet from the main body of the object A on the mounting surface 11 of the worktable 10. At this time, the sheet is wound around the outer peripheral surface of the roller portion 120 of the adsorption roller 100 and is peeled off. Figure 1 and Figure 6 In this illustration, it is hypothetically shown that the area where the sheet is wound around the outer peripheral surface of the roller 120 is assumed to be the winding area C when the sheet is peeled off. Furthermore, a more specific construction of the adsorption roller 100 will be described below.

[0061] like Figure 1 As shown, the peeling device 200 includes an adhesive joint 160 and a pressing mechanism 190.

[0062] like Figure 10As shown, the adhesive joint 160 is installed in the second region 83B of the tethering part 83. The adhesive joint 160 has an adhesive surface 160A that can contact the object A on the worktable 10. As described above, the mounting surface 11 of the worktable 10 can move up and down along the vertical axis X, therefore, the adhesive joint 160 can move relative to the worktable 10 along the vertical axis X. If the adhesive joint 160 moves relative to the worktable 10 in a direction closer to it, the adhesive surface 160A of the adhesive joint 160 contacts the sheet of the object A. Next, if the adhesive joint 160 moves relative to the worktable 10 in a direction away from it, the sheet of the object A is partially peeled off from the main body together with the adhesive surface 160A of the adhesive joint 160.

[0063] The pressing mechanism 190 is mounted on the adhesive joint 160. Therefore, the pressing mechanism 190 can move relative to the worktable 10 along the vertical axis X together with the adhesive joint 160. The pressing mechanism 190 has a contact surface 192A that can contact the object A on the worktable 10. In the absence of external force, the contact surface 192A of the pressing mechanism 190 is located closer to the worktable 10 than the adhesive surface 160A of the adhesive joint 160 in the direction along the vertical axis X. Furthermore, when the contact surface 192A of the pressing mechanism 190 is subjected to a force toward the first positive direction X1, it can move in the direction along the vertical axis X to the same position as the adhesive surface 160A of the adhesive joint 160. This pressing mechanism 190 is a component used to press the sheet when the adhesive joint 160 partially peels the sheet from the main body of the object A, preventing the sheet from peeling above the contact area of ​​the contact surface 192A of the pressing mechanism 190. The detailed construction of the adhesive joint 160 and the pressing mechanism 190 will be described below.

[0064] <Structure of the worktable and lifting device>

[0065] The structure of the worktable 10 and the lifting device 40 will be described.

[0066] like Figure 2 As shown, each leg 13 of the worktable 10 is composed of a shaft portion 14, an adjustment portion 15, and a base member 16. Furthermore, the structure of each leg 13 is identical; therefore, one leg 13 will be described as a representative example. The shaft portion 14 is cylindrical. The shaft portion 14 extends from the main surface of the top plate 12 opposite to the mounting surface 11. The adjustment portion 15 is cylindrical, corresponding to the cylindrical shape of the shaft portion 14. The inner diameter of the adjustment portion 15 is slightly larger than the outer diameter of the shaft portion 14. The adjustment portion 15 accommodates a portion of the shaft portion 14 on the side facing the first negative direction X2. Furthermore, the inner circumferential surface of the adjustment portion 15 can slide relative to the outer circumferential surface of the shaft portion 14. In other words, the shaft portion 14 can move relative to the adjustment portion 15 in the direction along the vertical axis X.

[0067] The base member 16 is circular. The diameter of the main surface of the base member 16 is greater than the outer diameter of the adjusting part 15. The base member 16 closes the opening of the adjusting part 15 on the side facing the first negative direction X2. Furthermore, the center of the main surface of each base member 16 is located on the central axis of each adjusting part 15.

[0068] Furthermore, as described above, each shaft portion 14 is not fixed inside the adjustment section 15. Therefore, when no external force is applied relative to the worktable 10, each shaft portion 14 falls towards the first negative direction X2 due to its own weight. Thus, at this time, the end of each shaft portion 14 on the first negative direction X2 side contacts the bottom member 16. On the other hand, for example, when the worktable 10 is pressed towards the first positive direction X1, the worktable 10 can move towards the first positive direction X1.

[0069] The lifting device 40 has a storage section 41, two support sections 42, and an upward pushing section 43.

[0070] The storage section 41 is rectangular in shape. Compared to the top plate 12 of the worktable 10, the storage section 41 is located on the first negative direction X2 side. The storage section 41 has a cavity inside. Moreover, although not shown in the figure, the storage section 41 stores a drive source such as a motor.

[0071] Each support portion 42 is cylindrical. Each support portion 42 extends along the vertical axis X. The length of each support portion 42 is shorter than the length of the leg portion 13 in the long side direction. Each support portion 42 penetrates the wall portion of the storage portion 41 on the side facing the first positive direction X1. That is, a portion of each support portion 42 reaches the interior of the storage portion 41. Moreover, each support portion 42 is connected to a drive source inside the storage portion 41. Based on the power from the drive source, each support portion 42 can move relative to the storage portion 41 along the vertical axis X.

[0072] The push-up portion 43 is a rectangular plate. The main surface of the push-up portion 43 is parallel to the mounting surface 11 of the worktable 10. Furthermore, the push-up portion 43 is connected to the end of each support portion 42 on the side closest to the first positive direction X1. Therefore, the push-up portion 43 can move together with each support portion 42 along the vertical axis X.

[0073] The lifting device 40 enables the mounting surface 11 of the worktable 10 to move up and down. Specifically, on one hand, powered by a drive source within the storage section 41, each support section 42 moves relative to the storage section 41 in a first positive direction X1. At this time, the pushing section 43 contacts the top plate 12 of the worktable 10 and pushes the top plate 12 outward in the first positive direction X1. As a result, the mounting surface 11 of the worktable 10 moves in the first positive direction X1. On the other hand, powered by a drive source within the storage section 41, each support section 42 moves relative to the storage section 41 in a first negative direction X2. At this time, the pushing section 43 moves away from the top plate 12 of the worktable 10 in the first negative direction X2. Accompanyingly, the worktable 10 moves in the first negative direction X2 due to its own weight.

[0074] <Regarding the structure of the adsorption roller>

[0075] like Figure 4 and Figure 5 As shown, the shaft portion 110 of the adsorption roller 100 is cylindrical. The shaft portion 110 is divided into four first flow paths 50 extending from the end face of the shaft portion 110 on the side closest to the first positive direction X1 to the outer peripheral surface of the shaft portion 110. Furthermore, Figure 4 and Figure 5 In the diagram, the shape of the first flow path 50 inside is imaginary, illustrated through the shaft portion 110. (Example) Figure 4 As shown, the opening at the end face of the shaft portion 110 on the side facing the first positive direction X1 of each first flow path 50 will be referred to as the first opening 50A. The first openings 50A of the four first flow paths 50 are arranged at equal intervals in the circumferential direction centered on the central axis CA of the shaft portion 110. Furthermore, the central axis CA is parallel to the transverse axis Z. In addition, the opening areas of the first openings 50A of the four first flow paths 50 are approximately the same. The opening area referred to here is the area when the apparent area of ​​the opening is at its maximum during observation.

[0076] like Figure 5 As shown, the first opening 50A of each of the first flow paths 50 is connected to the pump 90 inside the housing 82 through different flow paths. Furthermore, Figure 5 The diagram of housing 82 is omitted. Furthermore, in each of the first flow paths 50, between the first opening 50A and the pump 90, a separate control valve 91 exists for each first flow path 50. The control valve 91 opens and closes the flow path connecting the first opening 50A of the first flow path 50 to the pump 90.

[0077] like Figure 5As shown, four first flow paths 50 extend parallel to the central axis CA towards the third negative direction Z2 from the first opening 50A to the middle. Furthermore, the lengths of the four first flow paths 50 along the central axis CA are different. Moreover, the four first flow paths 50 extend in a direction orthogonal to the central axis CA from the middle. Furthermore, the four first flow paths 50 open on the outer peripheral surface of the shaft portion 110. Hereinafter, the openings of the first flow paths 50 on the outer peripheral surface of the shaft portion 110 will be referred to as second openings 50B. As described above, the lengths of the four first flow paths 50 are different along the central axis CA. Accordingly, the positions of the second openings 50B of each first flow path 50 are staggered from each other along the central axis CA.

[0078] Except for the tortuous portion of the first flow path 50, the cross-sectional area of ​​each first flow path 50 is approximately constant. Specifically, the cross-sectional area of ​​the straight-extending portion of each first flow path 50 is 90% to 110% of the opening area of ​​the second opening 50B. Furthermore, the cross-sectional area of ​​the straight-extending portion of the first flow path 50 is the area enclosed by the inner circumferential surface of the first flow path 50 in a cross-section orthogonal to the extension direction of the first flow path 50.

[0079] like Figure 5 As shown, the shaft portion 110 has four first annular grooves 52 and five second annular grooves 53. Each first annular groove 52 is recessed relative to the outer peripheral surface of the shaft portion 110. Therefore, in this embodiment, the outer peripheral surface of the shaft portion 110 is a specific peripheral surface. Furthermore, each first annular groove 52 extends 360 degrees around the central axis CA. The first annular grooves 52 are spaced apart in the direction along the central axis CA. Figure 5 In the figure, only a portion of the multiple first annular grooves 52 and second annular grooves 53 are labeled with reference numerals.

[0080] Similar to the first annular groove 52, each second annular groove 53 is recessed relative to the outer peripheral surface of the shaft portion 110. Furthermore, each second annular groove 53 extends 360 degrees around the central axis CA. Compared to the first annular groove 52 closest to the third positive direction Z1, one of the five second annular grooves 53 is located on the third positive direction Z1 side. Compared to the first annular groove 52 closest to the third negative direction Z2 side, another of the five second annular grooves 53 is located on the third negative direction Z2 side. Moreover, along the central axis CA, the remaining three second annular grooves 53 are located between adjacent first annular grooves 52.

[0081] like Figure 5As shown, the adsorption roller 100 has multiple sealing rings 55. The sealing rings 55 are annular. Furthermore, the sealing rings 55 are made of synthetic rubber, silicone resin, etc. That is, the material of the sealing rings 55 is softer than the material of the shaft portion 110. Each sealing ring 55 is fitted into the second annular groove 53. In addition, when fitted into the second annular groove 53, the outer peripheral surface of the sealing ring 55 is located slightly outward from the outer peripheral surface of the shaft portion 110 relative to its periphery. Figure 5 In the figure, only a portion of the multiple sealing rings 55 are marked with the attached diagram.

[0082] like Figure 6 As shown, the adsorption roller 100 has a roller portion 120. The roller portion 120 is generally cylindrical. Furthermore, the inner circumferential surface of the roller portion 120 faces the outer circumferential surface of the sealing ring 55. Specifically, the inner diameter of the roller portion 120 is approximately the same as the outer diameter of the sealing ring 55. Moreover, the roller portion 120 is capable of circumferential rotation about the central axis CA. In other words, the roller portion 120 is capable of rotating relative to the shaft portion 110 about the central axis CA.

[0083] Here, the space enclosed by the inner circumferential surface of the roller portion 120, the inner circumferential surface of the first annular groove 52 of the shaft portion 110, and the outer surface of the sealing ring 55 is defined as the flow path of the first annular groove 52. At this time, the cross-sectional area of ​​the flow path of the first annular groove 52 is within the range of 90% to 110% of the opening area of ​​the second opening 50B of the first flow path 50. Furthermore, the cross-sectional area of ​​the flow path of the first annular groove 52 is the area of ​​the first annular groove 52 when viewed in cross-section including the central axis CA.

[0084] Roller section 120 has a small-diameter section 121 and a large-diameter section 122. The small-diameter section 121 is the portion of roller section 120 including the end facing the third positive direction Z1. The small-diameter section 121 is cylindrical with its central axis CA as its center. Although not shown in the figure, the small-diameter section 121 is connected to an electric motor via a power transmission mechanism consisting of a gear mechanism, pulleys, and a belt. Therefore, roller section 120 can rotate based on power from this electric motor. The large-diameter section 122 is the portion of roller section 120 excluding the small-diameter section 121. The large-diameter section 122 is cylindrical with its central axis CA as its center. On one hand, the outer diameter of the large-diameter section 122 is larger than the outer diameter of the small-diameter section 121. On the other hand, the inner diameter of the large-diameter section 122 is the same as the inner diameter of the small-diameter section 121. That is, the inner circumferential surface of roller section 120 has no clear boundary between the small-diameter section 121 and the large-diameter section 122. In addition, the large diameter portion 122 is the portion for winding up the sheet material placed on the mounting surface 11 of the worktable 10 in the object A.

[0085] like Figure 7 As shown, the large-diameter portion 122 of the roller portion 120 divides four second flow paths 70 extending from the inner circumferential surface to the outer circumferential surface of the roller portion 120. Furthermore, Figure 7 The diagram shows, hypothetically, each of the second flow paths 70 inside the large-diameter portion 122. Each second flow path 70 opens at a location on the inner circumferential surface of the roller portion 120 facing the first annular groove 52. Each second flow path 70 is connected to a different first annular groove 52. Therefore, each first flow path 50 of the shaft portion 110 is connected to a different second flow path 70 via a different first annular groove 52. Furthermore, the second flow paths 70 open at the outer circumferential surface of the roller portion 120. Hereinafter, the opening on the inner circumferential surface of the roller portion 120 is designated as an internal opening 70A, and the opening on the outer circumferential surface is designated as a suction port 70B. Each second flow path 70 extends radially from the internal opening 70A, centered on the central axis CA, and extends parallel to the central axis CA from the middle. Furthermore, each second flow path 70 extends radially again from the portion extending parallel to the central axis CA, centered on the central axis CA, and reaches the suction port 70B.

[0086] Excluding the tortuous portion of the second flow path 70 and the vicinity of the suction port 70B of the second flow path 70, the flow path cross-sectional area of ​​the second flow path 70 is approximately constant. Specifically, in each second flow path 70, excluding the vicinity of the suction port 70B, the flow path cross-sectional area of ​​the straight-extending portion is within the range of 90% to 110% of the opening area of ​​the second opening 50B on the outer peripheral surface of the shaft portion 110. The definitions of opening area and flow path cross-sectional area are the same as in the case of the first flow path 50.

[0087] Here, the four second circulation paths 70 are respectively designated as second circulation path 170, second circulation path 270, second circulation path 370, and second circulation path 470. Alternatively, when it is not necessary to distinguish them, they are collectively referred to as second circulation path 70.

[0088] like Figure 7 As shown, the second flow path 170 branches into two branches from the internal opening 70A. That is, the second flow path 170 has two suction ports 170B. In the direction along the central axis CA, the two suction ports 170B are located at the center of the large diameter portion 122. Furthermore, the two suction ports 170B are arranged circumferentially with respect to the central axis CA.

[0089] like Figure 8 As shown, the second flow path 270 branches into two branches from the internal opening 70A. That is, the second flow path 270 has two suction ports 270B. The two suction ports 270B are located at a position offset from the suction port 170B in the circumferential direction centered on the central axis CA. Furthermore, the two suction ports 170B are arranged along the central axis CA. Additionally, Figure 8The illustrations of the suction disc 111 and the cylindrical body 112 described below are omitted.

[0090] Although not illustrated, the second flow path 370 branches into three branches from the internal opening 70A. That is, the second flow path 370 has three suction ports 370B. The three suction ports 370B are located at a position offset from suction port 270B in the circumferential direction centered on the central axis CA. Furthermore, in the circumferential direction centered on the central axis CA, each suction port 370B is located on the opposite side of suction port 170B, separated from suction port 270B. Moreover, the three suction ports 170B are arranged along the central axis CA.

[0091] like Figure 7 As shown, the outer circumferential surface of the adsorption roller 100 is divided into two parts in a 180-degree circumferential angle region centered on the central axis CA. Specifically, taking the adsorption port 170B on the side furthest from adsorption port 270B as the starting point, the 180-degree range towards adsorption port 270B is defined as the first angular region R1, and the remaining 180-degree range is defined as the second angular region R2. At this time, the total number of adsorption ports 70B in the first angular region R1 is six, while the total number of adsorption ports 70B in the second angular region R2 is one. That is, the number of adsorption ports 70B is greater on the first angular region R1 side.

[0092] like Figure 9 As shown, the adsorption roller 100 has an adsorption disk 111 and a cylindrical body 112.

[0093] The suction disk 111 is generally cylindrical. Specifically, the suction disk 111 has a mounting body 111A and a disk portion 111B. In this embodiment, the mounting body 111A and the disk portion 111B are integral. The mounting body 111A is generally cylindrical. The mounting body 111A is inserted into the suction port 70B of the roller portion 120. The disk portion 111B is a cylindrical shape integral with the mounting body 111A. The disk portion 111B has an inverted conical shape in which the inner and outer diameters increase upward from the central axis of the disk portion 111B as it moves away from the mounting body 111A. That is, the inner and outer diameters of the suction disk 111, including the radially outer end centered on the central axis CA, increase as it moves outward in that radial direction. The material of the suction disk 111 has a smaller Young's modulus than the material of the roller portion 120. Specifically, the material of the suction disk 111 is synthetic rubber, silicone resin, elastomer, etc.

[0094] The cylindrical body 112 is cylindrical. Specifically, the cylindrical body 112 is a hollow bolt. The cylindrical body 112 is located inside the suction plate 111. The cylindrical body 112 extends radially along the central axis of the suction plate 111, that is, centered on the central axis CA. Moreover, a portion of the cylindrical body 112 is screwed into the interior of the second flow path 70 via the suction port 70B. Here, the circumferential surface obtained by extending the outer circumference of the roller portion 120 towards the suction port 70B is designated as the imaginary circumferential surface S. At this time, the radially outer end of the cylindrical body 112 centered on the central axis CA is located on the aforementioned imaginary circumferential surface S. In addition, the phrase "located on the imaginary circumferential surface S" means that an error of less than 1 mm is allowed in the radial direction centered on the central axis CA.

[0095] <Structure for adhesive joints>

[0096] like Figure 10 As shown, the adhesive joint 160 has a first mounting member 161 and a head body 162.

[0097] The first mounting member 161 is a rectangular plate. The first mounting member 161 is mounted on the main surface of the second region 83B of the mooring section 83, facing the second positive direction Y1. The main surface of the first mounting member 161 contacts the main surface of the mooring section 83. Furthermore, the first mounting member 161 is mounted at the center of the second region 83B in the transverse axis Z direction. As described above, the mooring section 83 can reciprocate along the movement axis Y. Accordingly, the first mounting member 161 can reciprocate along the movement axis Y together with the mooring section 83.

[0098] The head body 162 is mounted on the surface of the first mounting member 161 facing the second positive direction Y1. The head body 162 is generally truncated pyramidal in shape. Specifically, the head body 162 has a tapering shape at its end, with the area of ​​the cross-section parallel to the vertical axis X decreasing as it approaches the first negative direction X2. The head body 162 has an opposing surface 162B facing the worktable 10. The opposing surface 162B is the end face of the head body 162 on the first negative direction X2 side. Furthermore, in the direction along the vertical axis X, the opposing surface 162B of the head body 162 is located between the edge of the first mounting member 161 on the first negative direction X2 side and the surface of the outer peripheral surface of the roller portion 120 on the first negative direction X2 side. That is, compared to the first mounting member 161, a portion of the head body 162, including the opposing surface 162B, extends towards the first negative direction X2 side. Furthermore, when viewed in the first negative direction X2, the opposing surface 162B of the head body 162 lies on an imaginary straight line on the diagonal of the mounting surface 11 containing the worktable 10, which is parallel to the movement axis Y.

[0099] like Figure 10As shown, the adhesive joint 160 has a first take-up body 163 and a second take-up body 165. The first take-up body 163 has a core portion 163A and a take-up main body 163B. The core portion 163A is cylindrical. The take-up main body 163B is approximately cuboid in shape. The length of the diagonal of the main surface of the take-up main body 163B is approximately the same as the inner diameter of the core portion 163A. The take-up main body 163B is fitted into the core portion 163A. At this time, the main surface of the take-up main body 163B is orthogonal to the central axis of the core portion 163A.

[0100] The first take-up body 163 is mounted on the surface of the main face of the first mounting member 161 on the side facing the second positive direction Y1. Furthermore, the first take-up body 163 is mounted so as to be able to rotate relative to the first mounting member 161 about an axis passing through the geometric center of the main face of the take-up body 163B. The central axis of rotation of the first take-up body 163 is parallel to the movement axis Y. Moreover, compared to the head body 162, the first take-up body 163 is located on the side facing the first positive direction X1 and the side facing the third positive direction Z1.

[0101] The second take-up body 165 is shaped like a cylinder with circular plate-shaped protruding edges connected to both ends. The second take-up body 165 is mounted on the surface of the main face of the first mounting member 161 on the side facing the second positive direction Y1. Furthermore, the second take-up body 165 is mounted so that it can rotate relative to the first mounting member 161 about an axis centered on the center of the cylindrical portion of the second take-up body 165. The axis of rotation of the second take-up body 165 is parallel to the movement axis Y. Moreover, compared to the head body 162, the second take-up body 165 is located on the side facing the first positive direction X1 and on the side facing the third negative direction Z2. Additionally, although not shown in the figures, the adhesive joint 160 has a drive device for rotating the second take-up body 165 in a predetermined direction and an anti-reverse mechanism to prevent the second take-up body 165 from rotating in the opposite direction to the predetermined direction. In this embodiment, when viewed from the direction facing the second negative direction Y2, the drive device rotates the second take-up body 165 counterclockwise.

[0102] like Figure 10 As shown, the adhesive joint 160 has a columnar portion 167 and a clamp 168.

[0103] The columnar portion 167 is cylindrical. The columnar portion 167 is mounted on the surface of the main face of the first mounting member 161 on the side facing the second positive direction Y1. The central axis CA of the columnar portion 167 is parallel to the movement axis Y. Furthermore, in the transverse axis Z direction, the columnar portion 167 is located on the side facing the third positive direction Z1 compared to the opposing surface 162B. Additionally, in the vertical axis X direction, the columnar portion 167 is located between the opposing surface 162B and the first winding body 163.

[0104] The clamp 168 is mounted on the surface of the main face of the first mounting member 161 on the side facing the second positive direction Y1. Specifically, the clamp 168 has a housing 168A, a pair of piston rods 168B, and a crimping portion 168C. ​​The housing 168A is cuboid in shape. The housing 168A is mounted on the first mounting member 161. Furthermore, the housing 168A has an internal cavity. The pair of piston rods 168B extend parallel to the transverse axis Z. Each piston rod 168B protrudes from the housing 168A toward the third negative direction Z2. Furthermore, each piston rod 168B penetrates through the wall of the housing 168A. Therefore, a portion of each piston rod 168B reaches into the interior of the housing 168A. Each piston rod 168B is subjected to force toward the third negative direction Z2 by an elastic member stored within the housing 168A. The crimping portion 168C is connected to the end of each piston rod 168B on the side facing the third negative direction Z2. The crimping portion 168C is a quadrilateral plate. The main surface of the crimping portion 168C is orthogonal to the third negative direction Z2. Compared to the columnar portion 167, the clamp 168 thus configured is located on the third positive direction Z1 side. Therefore, the crimping portion 168C of the clamp 168 presses against the columnar portion 167 from the third positive direction Z1 side toward the third negative direction Z2 side.

[0105] The adhesive joint 160 includes an adhesive tape 164. The adhesive tape 164 is strip-shaped. The width of the adhesive tape 164 is shorter than the length of the aforementioned columnar portion 167. On one hand, one side of the adhesive tape 164 is adhesive. On the other hand, the other side of the adhesive tape 164 is not adhesive. Relative to the first winding body 163, the adhesive tape 164 is wound from the outside to the core portion 163A of the first winding body 163. In other words, the adhesive tape 164 is wound in a loop. Moreover, the adhesive tape 164 is led out from the looped portion to the opposing surface 162B via the crimping portion 168C of the clamp 168 and the columnar portion 167. Therefore, a portion of the adhesive tape 164 is clamped between the columnar portion 167 and the crimping portion 168C of the clamp 168.

[0106] The non-adhesive side of the adhesive tape 164 contacts the opposing surface 162B of the head body 162. Therefore, the adhesive side of the adhesive tape 164 on the opposing surface 162B of the head body 162 faces the same direction as the opposing surface 162B. Hereinafter, the adhesive side of the adhesive tape 164 on the opposing surface 162B of the head body 162 will be designated as the adhesive surface 160A. In other words, the adhesive surface 160A faces the mounting surface 11 of the object A on the worktable 10. Therefore, an adhesive surface 160A exists on the opposing surface 162B of the head body 162. In other words, the adhesive joint 160 has an adhesive surface 160A that can contact the object A on the worktable 10.

[0107] The end of the adhesive tape 164 opposite to the side of the first winding body 163 is fixed to the second winding body 165. Therefore, if the second winding body 165 rotates, the adhesive tape 164 is wound up into the second winding body 165. Simultaneously, an extension of the adhesive tape 164 of the same length as the wound adhesive tape is pulled out from the first winding body 163 toward the opposing surface 162B. That is, with the rotation of the second winding body 165, a new portion of the adhesive tape 164 becomes the adhesive surface 160A.

[0108] <Structure of the pressing mechanism>

[0109] like Figure 10 As shown, the peeling device 200 has a pressing mechanism 190.

[0110] The pressing mechanism 190 includes an extension portion 193, a pair of movable shafts 194, a pair of force-applying portions 191, and a pressing portion 192. The extension portion 193 is mounted on the first mounting member 161. The extension portion 193 is plate-shaped. The main surface of the extension portion 193 is orthogonal to the upper and lower axes X. In the direction along the movement axis Y, the extension portion 193 extends to the side closer to the second positive direction Y1, relative to the head body 162.

[0111] A pair of movable shafts 194 are cylindrical. Each movable shaft 194 extends through the extension portion 193 in the direction along the vertical axis X. Furthermore, each movable shaft 194 is arranged along the transverse axis Z. The movable shaft 194 is movable relative to the extension portion 193 in the direction along the vertical axis X. Specifically, the movable shaft 194 slides relative to the inner circumferential surface of the through hole in the extension portion 193 and is movable along the vertical axis X. Additionally, although not shown in the figure, the movable shaft 194 is designed to prevent detachment to prevent it from falling off relative to the extension portion 193 in the first negative direction X2.

[0112] The pressing part 192 is generally rectangular. The pressing part 192 is connected to the ends of the pair of force-applying parts 191 on the side facing the first negative direction X2. Therefore, the surface of the pressing part 192 facing the side facing the first negative direction X2 becomes the contact surface 192A.

[0113] Each force-applying part 191 is a helical spring. The force-applying part 191 surrounds the movable shaft 194 from the outside between the pressing part 192 and the extension part 193. In other words, the movable shaft 194 passes through the force-applying part 191. One end of each force-applying part 191 is connected to the pressing part 192. The other end of each force-applying part 191 is connected to the extension part 193.

[0114] As the movable shaft 194 moves relative to the extension portion 193, the position of the contact surface 192A of the pressing portion 192 changes in the direction along the vertical axis X. In the direction along the vertical axis X, the contact surface 192A can move from the same position as the adhesive surface 160A of the head body 162 between the lower end of the outer peripheral surface of the roller portion 120 closest to the worktable 10. In other words, the contact surface 192A can move relative to the adhesive surface 160A from the same position as the adhesive surface 160A to a position closer to the worktable 10 than the adhesive surface 160A. Furthermore, by raising and lowering the worktable 10, the contact surface 192A of the pressing mechanism 190 can come into contact with the object A on the worktable 10.

[0115] A pair of force-applying parts 191 are sandwiched between the pressing part 192 and the extension part 193, so the pressing part 192 is force-applied towards the first negative direction X2. When the worktable 10 pushes the pressing part 192 upward towards the first positive direction X1, each force-applying part 191 is in an elastically compressed state. Moreover, if the worktable 10 moves towards the first negative direction X2, each force-applying part 191 elastically resets, causing the contact surface 192A to move towards the first negative direction X2. In addition, the pressing mechanism 190 is mounted on the head body 162 of the adhesive joint 160, so it can move relative to the worktable 10 along the movement axis Y together with the adhesive joint 160.

[0116] <Regarding the action of the adhesive joint and pressing mechanism>

[0117] The operation of the adhesive joint 160 will be explained. First, the adhesive joint 160 moves towards the side of the main surface of the object A where the vertex closest to the second negative direction Y2 is located. Therefore, as... Figure 11 As shown, the adhesive surface 160A of the adhesive joint 160 faces the object A near the vertex on the side of the second negative direction Y2. Then, as described above, a pressing mechanism 190 is present on the side of the adhesive joint 160 on the side of the second positive direction Y1. Therefore, the contact surface 192A of the pressing mechanism 190 is opposite to the area on the main surface of the object A on the side of the second positive direction Y1, compared to the area opposite the opposing surface 162B of the adhesive joint 160. Furthermore, Figure 11 The location of the bonding surface 160A and the contact surface 192A is shown in the hypothetical map.

[0118] In this state, the mounting surface 11 of the worktable 10 moves towards the first positive direction X1 via the lifting device 40. At this time, in the vertical axis X direction, the contact surface 192A of the pressing part 192 is located from the same position as the adhesive surface 160A of the head body 162 to the mounting surface 11 of the worktable 10. Therefore, the contact surface 192A contacts the mounting surface 11 of the worktable 10 before the opposing surface 162B of the head body 162. Subsequently, the pair of force-applying parts 191 are elastically compressed, and the contact surface 192A moves together with the worktable 10 towards the first positive direction X1. Moreover, the opposing surface 162B of the adhesive joint 160 contacts the mounting surface 11 of the worktable 10. At this time, the adhesive surface 160A of the head body 162 is bonded to the sheet of the object A. Moreover, the position where the adhesive surface 160A is bonded to the sheet of the object A is a corner area of ​​the rectangular object A. Furthermore, the pair of force-applying parts 191 of the pressing mechanism 190 are in a state of elastic compression in the X direction of the vertical axis.

[0119] From the above state, the mounting surface 11 of the worktable 10 moves in the first negative direction X2. At this time, the contact surface 192A of the pressing part 192 presses against the worktable 10 until the force-applying part 191 reaches its maximum length in the vertical axis X direction. On the other hand, the worktable 10 separates from the head body 162 and the adhesive surface 160A, and after the area of ​​the sheet adhered to by the adhesive surface 160A is partially peeled from the body, the adhesive surface 160A detaches from the sheet. More specifically, the adhesive surface 160A partially peels the sheet at a corner area of ​​the object A from the body. In addition, the pressing part 192 presses against the sheet, so when viewed in the vertical axis direction, the area of ​​the sheet that is closer to the second negative direction Y2 than the pressing part 192 is partially peeled from the body. The worktable 10 moves further in the first negative direction X2, so that the pressing part 192 leaves the worktable 10.

[0120] <Regarding the action of the adsorption roller>

[0121] The operation of the adsorption roller 100 will be explained. Furthermore, the adhesive joint 160 and the pressing mechanism 190 achieve a state where the sheet is partially peeled off from the object A.

[0122] First, such as Figure 12As shown, the adsorption roller 100 moves along the moving axis Y to be positioned on the first positive direction X1 side relative to the object A. Furthermore, the worktable 10 moves in the first positive direction X1, thereby bringing the adsorption roller 100 into contact with the sheet material of the object A. At this time, the area of ​​initial contact in the adsorption roller 100 is the suction disk 111 mounted outside the suction port 170B. Additionally, at this time, the suction disk 111 contacts the portion of the sheet material of the object A that has been partially peeled off by the adhesive joint 160. The suction port 170B is connected to the pump 90 via the flow path of the second flow path 70, the flow path of the first annular groove 52, and the first flow path 50. Therefore, the pump 90 draws air from the first flow path 50, allowing the suction port 170B to draw air located outside the outer peripheral surface of the roller portion 120. Through this suction force, the suction disk 111 at the suction port 170B adsorbs the partially peeled portion of the sheet material. Moreover, as... Figure 13 As shown, the adsorption roller 100 rotates while moving towards the second positive direction Y1. When viewed from the direction towards the third negative direction Z2, the rotation direction of the adsorption roller 100 is counterclockwise. The roller section 120 rotates, and the suction ports 170B, 270B, 370B, and 470B sequentially adsorb the sheet material. In this way, the roller section 120 can wind up the sheet material.

[0123] Furthermore, even if the roller 120 rotates relative to the shaft 110, the connection between the first flow path 50 and the second flow path 70 is maintained via the flow path of the first annular groove 52. Therefore, the suction port 70B can attract the sheet regardless of the angular position of the roller 120 relative to the shaft 110. Moreover, by fitting a sealing ring 55 at the second annular groove 53 of the shaft 110, even if a gap occurs between the first annular groove 52 and the inner circumferential surface of the roller 120, the entry and exit of air between the flow path of the first annular groove 52 and the flow paths of adjacent first annular grooves 52 is suppressed. Therefore, the pump 90 can independently attract air for each of the first flow path 50 and the second flow path 70.

[0124] Furthermore, while the adsorption roller 100 is winding and rotating the sheet, the clamping mechanism 20 on the worktable 10 fixes the vertex of the main surface of the object A on the side facing the second negative direction Y2 onto the worktable 10. This prevents the object A from shifting during the rotation of the adsorption roller 100.

[0125] <Effects of the implementation method>

[0126] The effects of this implementation method will be explained.

[0127] (1) In the above embodiment, the outer peripheral surface of the shaft portion 110 has a first annular groove 52. Therefore, even when the roller portion 120 rotates, the first flow path 50 of the shaft portion 110 and the second flow path 70 of the roller portion 120 are connected via the flow path of the first annular groove 52. As a result, regardless of the angular position of the roller portion 120 relative to the shaft portion 110, the second flow path 70 can maintain communication with the first flow path 50. Furthermore, each first flow path 50 is connected to a different second flow path 70. Therefore, for example, by adjusting the opening degree of the control valve 91 of each first flow path 50, the intensity, time, and timing of air suction for each first flow path 50 can be adjusted.

[0128] (2) In the above embodiment, a sealing ring 55 is fitted into the second annular groove 53. This prevents air leakage between adjacent first annular grooves 52. As long as air leakage between the first annular grooves 52 can be prevented, concerns about air being drawn in from the accidental suction port 70B can be reduced.

[0129] (3) Suppose that the opening of the first flow path 50 on the side connected to the pump 90 is set to open at the outer peripheral surface of the shaft portion 110. In this case, depending on the configuration of the pipe connected to the pump 90, the pipe of the pump 90 may become an obstruction when the roller portion 120 rotates. In addition, if the opening is concentrated in a specific area in the circumferential direction on the outer peripheral surface of the shaft portion 110, that part may become brittle.

[0130] In this respect, in the above embodiment, the other end of the first flow path 50 is open at one end face of the shaft portion 110. According to this structure, the possibility of the tube connected to the first flow path 50 becoming an obstruction when the roller portion 120 rotates is low. Furthermore, since there is no opening of the first flow path 50 on the outer peripheral surface of the shaft portion 110, the situation where such an opening would cause a reduction in the strength of the outer peripheral surface of the shaft portion 110 is avoided.

[0131] (4) In the above embodiment, the second flow path 70 opens at multiple locations on the outer peripheral surface of the roller 120. Moreover, the multiple openings of the second flow path 70 on the outer peripheral surface of the roller 120 are arranged along the central axis CA.

[0132] With this structure, the suction discs 111 arranged along the central axis CA simultaneously adsorb the sheet. Therefore, when the sheet is adsorbed onto the roller 120, the load applied to the sheet along the central axis CA is less likely to be uneven. Consequently, the sheet is less prone to breakage.

[0133] (5) In the above embodiment, the second flow path 70 opens at multiple locations on the outer peripheral surface of the roller portion 120. The multiple suction ports 70B of the second flow path 70 at the outer peripheral surface of the roller portion 120 are arranged in a circumferential direction centered on the central axis CA. According to this structure, for example, in the region where the sheet is initially wound, the load acting on the sheet during winding is less likely to be uneven, and therefore, the sheet is less likely to break.

[0134] (6) In the above embodiment, regarding the straight-line extensions in each flow path, the cross-sectional areas of the first flow path 50 and the second flow path 70 are within the range of 90% to 110% of the opening area of ​​the first flow path 50 at the outer peripheral surface of the shaft portion 110. When the cross-sectional area of ​​the flow path does not change significantly, the air velocity at each location in each flow path is uniform, and therefore, the losses associated with airflow are less likely to increase.

[0135] (7) In the above embodiment, the flow path cross-sectional area of ​​the first annular groove 52 is within the range of 90% to 110% of the opening area of ​​the first flow path 50 at the outer peripheral surface of the shaft portion 110. In other words, the flow path cross-sectional area of ​​the first annular groove 52 is not significantly different from the flow path cross-sectional area of ​​the first flow path 50. Therefore, airflow turbulence at the boundary between the first annular groove 52 and the first flow path 50 is prevented.

[0136] (8) In the above embodiment, the peeling device 200 has an adhesive joint 160 that can contact the object A on the worktable 10.

[0137] By bringing the adhesive joint 160 into contact with the object A on the worktable and moving the adhesive joint, the sheet of object A can be partially peeled off. In particular, the adhesive joint 160 partially peels off the sheet in a corner area of ​​object A. This partially peeled area is the area initially adsorbed by the adsorption roller 100. Since the peeling continues from this area by the adsorption roller 100, the sheet of object A can be peeled off even without excessive force applied from the suction port 70B of the adsorption roller 100. Moreover, since the sheet is gradually peeled off while being wound to the outer peripheral surface of the adsorption roller 100, the force is less likely to concentrate on specific areas of the sheet. As a result, the sheet is less likely to break when being wound up.

[0138] (9) In the above embodiment, the pressing mechanism 190 can move relative to the worktable 10 along the vertical axis X together with the adhesive joint 160. In the direction along the vertical axis X, the contact surface 192A of the pressing mechanism 190 can move relative to the adhesive surface 160A from the same position as the adhesive surface 160A to the side closer to the worktable 10 than the adhesive surface 160A, and is subjected to force towards the worktable 10.

[0139] Therefore, when the adhesive joint 160 peels off the sheet, the pressing part 192 presses down on the sheet. This allows the pressing part 192 to define the area of ​​the sheet peeled off by the adhesive joint 160. Since the area of ​​partial peeling of the sheet can be consistently defined in this way, the alignment between the partially peeled portion of the sheet and the adsorption roller 100 is simpler.

[0140] (10) In the above embodiment, it is generally believed that the adhesive force of the adhesive surface 160A decreases due to repeated bonding between the adhesive surface 160A and the sheet. In the above embodiment, on the one hand, the second winding body 165 winds up the portion of the adhesive tape 164 where the adhesive force has decreased, and on the other hand, the adhesive tape 164 is newly pulled out from the first winding body 163. In this way, the adhesive surface 160A can maintain a constant adhesive force.

[0141] (11) In the above embodiment, the mounting surface 11 can move along the above-mentioned vertical axis. By moving the worktable 10 in the vertical axis X direction, the adhesive joint 160 can contact the sheet and peel the sheet off from the main body. Therefore, it is not necessary to use a design that moves in the vertical axis X direction, such as a support mechanism 80, which would have a more complex structure.

[0142] (12) In the above embodiment, the adsorption roller 100 has a cylindrical adsorption disk 111 connected to the adsorption port 70B. The sheet is thus wound onto the adsorption roller 100 via the adsorption disk 111. Furthermore, the disk portion 111B of the adsorption disk 111 is inverted conical in shape. Moreover, the material of the adsorption disk 111 has a smaller Young's modulus than the material of the roller portion 120. Therefore, the load applied to the sheet is reduced when the sheet is wound onto the adsorption roller 100. This helps to suppress damage to the sheet.

[0143] (13) In the above embodiment, the adsorption roller 100 has a radially extending cylindrical body 112 inside the adsorption disk 111. Therefore, the area through which air passes on the outer peripheral surface of the roller portion 120 in the second flow path 70 is narrower than the second flow path 70. Thus, for example, it is possible to prevent the sheet from being sucked into the interior of the second flow path 70. Furthermore, in the radial direction centered on the central axis CA, the outer end of the cylindrical body 112 is located on the imaginary peripheral surface S when the outer peripheral surface of the roller portion 120 is extended into the adsorption port 70B. Thus, it is possible to prevent the sheet from being drawn deeper than the imaginary peripheral surface S, and at the same time, to prevent the outer end of the cylindrical body 112 from damaging the sheet.

[0144] (14) In the above embodiment, the number of suction ports 70B in the first angle region R1 on the outer peripheral surface of the adsorption roller 100 increases. Therefore, if the first angle region R1 faces the sheet when the sheet begins to peel, the sheet can be adsorbed through the multiple suction ports 70B. Moreover, when the sheet begins to peel, peeling requires a large force. By using multiple suction ports 70B to disperse this force for adsorption, the force is avoided from concentrating on a specific part of the sheet.

[0145] (15) In the above embodiment, there is one or more suction ports 70B in each of the two angular regions on the outer peripheral surface of the roller portion 120. According to this structure, the sheet can be attracted for most of the time from the start of sheet peeling to the end of peeling. Therefore, it is prevented that the sheet will shift or fall off during the peeling process by the suction roller 100.

[0146] <Example of Change>

[0147] This embodiment can be modified as follows. This embodiment and the following modifications can be combined and implemented to the extent that they do not contradict each other technically.

[0148] The structure of the peeling device 200, except for the adsorption roller 100, can be appropriately modified. For example, the structure of the support mechanism 80 supporting the adsorption roller 100 is not particularly limited. That is, the support mechanism 80 can be any structure as long as it can support the adsorption roller 100. In addition, the structures of the adhesive joint 160 and the pressing mechanism 190 are not particularly limited, and they can be omitted.

[0149] ○ The shape of the mounting surface 11 of the worktable 10 is not limited to the example of this embodiment. For example, the mounting surface 11 may also be circular. In addition, if the adhesive joint 160 and the worktable 10 can move relative to each other, the worktable 10 may not have a lifting function.

[0150] Alternatively, the clamping mechanism 20 may not be present on the worktable 10. In this case, it is preferable to have a mechanism to prevent the object A from shifting on the worktable 10 during the process of the adsorption roller 100 peeling off the film. For example, if the object A is a strongly magnetic material, fixation based on magnetic force can also be performed. Alternatively, a device that attracts the object A from the back side of the mounting surface 11 of the worktable 10 can be used to fix the object A.

[0151] And, for example, such as Figure 14As illustrated in the example, a roller 210 for pressing the object A may also be present. The roller 210 is a roller capable of rotating about an axis parallel to the transverse axis Z. The roller 210 is mounted on the side of the second region 83B of the tethering portion 83 in the first positive direction X1. More specifically, in the direction along the vertical axis X, the lower end of the outer peripheral surface of the roller 210, closest to the worktable 10, is located on the worktable 10 side compared to the lower end of the outer peripheral surface of the adsorption roller 100. Therefore, the roller 210 can contact the object A placed on the worktable 10. In the above embodiment, the sheet can be wound up by the adsorption roller 100 while the roller 210 is in contact with the object A. Therefore, the roller 210 can press the object A while the adsorption roller 100 is winding up the sheet. Therefore, even if the peeling device 200 does not have a clamping mechanism 20, it prevents the object A from shifting during the winding of the sheet by the adsorption roller 100.

[0152] The lifting device 40 is not limited to the example of this embodiment. Alternatively, in addition to the lifting device 40, a mechanism capable of reciprocating the tethering portion 83 in the vertical axis X direction may be used, or a mechanism capable of reciprocating the tethering portion 83 in the vertical axis X direction may be used instead of the lifting device 40. In other words, one or more components selected from the adsorption roller 100, the adhesive joint 160, and the pressing mechanism 190 may be capable of reciprocating in the vertical axis X direction.

[0153] The linear motion mechanism 61 is not limited to the example of this embodiment. In addition to the linear motion mechanism 61, a mechanism that enables the worktable 10 to reciprocate along the movement axis Y may also be used, or a mechanism that enables the worktable 10 to reciprocate along the movement axis Y may be used instead of the linear motion mechanism 61.

[0154] The support mechanism 80 is not limited to the example of this embodiment. For example, the caster portion 85 may be replaced with a shaft and bushing. Alternatively, the caster portion 85 may be omitted.

[0155] The motor that moves the support mechanism 80, the pump 90 that draws air, and the drive mechanism that rotates the roller 120 are not limited to the examples in this embodiment. For example, one or more components selected from the motor that moves the support mechanism 80, the pump 90 that draws air, and the drive mechanism that rotates the roller 120 may be located outside the housing 82. Furthermore, the housing 82 may not be present at all.

[0156] ○ The embodiment is not limited to the example described in this embodiment as long as the number of suction ports 70B is two or more. In the example described above, the number of suction ports 70B is eight, but the number of suction ports 70B may be more or less than eight. Furthermore, the number of suction ports 70B located in the first angle region R1 and the second angle region R2 may be the same. The number of second flow paths 70 and the number of suction ports 70B may also be increased or decreased accordingly.

[0157] The arrangement of the suction ports 70B on the outer peripheral surface of the suction roller 100 is not limited to the example of this embodiment. For example, the suction ports 70B may only exist in the first angle region R1. Alternatively, a portion of the suction ports 70B in a second flow path 70 may be arranged along the central axis CA, while another portion may be arranged circumferentially.

[0158] Furthermore, an attraction port 70B may also exist near the boundary in the winding region C. For example, in Figure 15 In the adsorption roller 100 shown, the second flow path 270 branches into four branches from the internal opening 70A. That is, the second flow path 270 has four suction ports 270B. The four suction ports 170B are arranged along the central axis CA. Furthermore, all four suction ports 170B are located inside the winding region C. Moreover, the suction port 270B located closest to the third positive direction Z1 is near the boundary line on the third positive direction Z1 side of the boundary line of the winding region C. On the other hand, the suction port located closest to the third negative direction Z2 is near the boundary line on the third negative direction Z2 side of the boundary line of the winding region C. Similarly, in the adsorption roller 100, the second flow path 370 branches into five branches from the internal opening 70A. That is, the second flow path 370 has five suction ports 270B. The five suction ports 370B are arranged along the central axis CA. Furthermore, all five suction ports 370B are located inside the winding region C. Moreover, the suction port 370B located in the third positive direction Z1 is near the boundary line of the winding region C on the side closest to the third positive direction Z1. Conversely, the suction port located in the third negative direction Z2 is near the boundary line of the winding region C on the side closest to the third negative direction Z2. As a result, within the approximately quadrilateral winding region C, a plurality of suction ports 70B are arranged along one side of the winding region C, specifically three suction ports 70B. With a portion of the suction ports 270B and 370B positioned near the boundary along one side of the winding region C, the portion of the sheet that follows the outline of the main surface of the object A can be stably peeled off.

[0159] The roller 120 may not be strictly cylindrical. For example, a portion of the outer peripheral surface of the roller 120 may be raised to match the shape of the main surface of the object A. This partial raising of the outer peripheral surface of the roller 120 allows for the definition of the area of ​​the sheet material that the roller 120 contacts. Thus, on the one hand, the area of ​​the sheet to be peeled off is peeled off, and on the other hand, the roller 120 does not contact the area of ​​remaining sheet material. Therefore, no load on the sheet material is generated in the area of ​​remaining sheet material due to contact with the roller 120.

[0160] The location of the first opening 50A is not limited to the example of this embodiment. For example, it is also possible that, on one hand, a portion of the first openings 50A are located on one end face of the shaft portion 110, and on the other hand, the other first openings 50A open on the other end face. Furthermore, it is also possible that the first openings 50A are not arranged at equal intervals in the circumferential direction centered on the central axis CA of the shaft portion 110. And it is also possible that the opening areas of the first openings 50A are not all substantially the same.

[0161] Alternatively, the first opening 50A may not be located on the end face of the shaft portion 110, but rather on the outer peripheral surface of the shaft portion 110.

[0162] If there are two or more first flow paths 50, the implementation is not limited to the examples in this embodiment. For example, the number of first flow paths 50 may be less than four or more than four. The same applies to the second flow path 70.

[0163] ○ The shape of the flow path cross-section of the first flow path 50 and the second flow path 70 is not limited to the example of this embodiment. For example, it may also be polygonal or elliptical. In addition, the first flow path 50 and the second flow path 70 may bend and extend in the middle.

[0164] ○ The plurality of suction ports 70B of a second flow path 70 may not be arranged in the direction along the central axis CA, or they may not be arranged in the circumferential direction centered on the central axis CA. Alternatively, the second flow path 70 may extend in two different directions: the direction along the central axis CA and the circumferential direction centered on the central axis CA.

[0165] The cross-sectional area of ​​the linearly extending portion of the first flow path 50 is not limited to the example of this embodiment. Depending on the location, the cross-sectional area of ​​the linearly extending portion of the first flow path 50 may be less than 90% of the opening area of ​​the first opening 50A, or it may be more than 110% of the opening area of ​​the first opening 50A. The same applies to the second flow path 70.

[0166] ○The flow path cross-sectional area of ​​the first annular groove 52 is not limited to the example of this embodiment. Depending on the location, the flow path cross-sectional area of ​​the first annular groove 52 may be less than 90% of the opening area of ​​the first opening 50A, or it may be more than 110% of the opening area of ​​the first opening 50A.

[0167] The number of the second annular grooves 53 is not limited to the example of this embodiment. For example, the number of the second annular grooves 53 may be more or less than four.

[0168] The number of sealing rings 55 is not limited to the example of this embodiment. For example, the number of sealing rings 55 may be more or less than five. In addition, sealing rings 55 may be omitted. Furthermore, if sealing rings 55 are omitted, the second annular groove 53 may also be omitted accordingly.

[0169] The first annular groove 52 can also be located on the inner circumferential surface of the roller portion 120. When either the outer circumferential surface of the shaft portion 110 or the inner circumferential surface of the roller portion 120 is designated as a specific circumferential surface, the specific circumferential surface can be recessed. The same applies to the second annular groove 53.

[0170] Alternatively, the first annular groove 52 and the second annular groove 53 may be located on different circumferential surfaces. For example, the first annular groove 52 may be located on the outer circumferential surface of the shaft portion 110, and the second annular groove 53 may be located on the inner circumferential surface of the roller portion 120. The reverse is also true.

[0171] Alternatively, the radially outer end of the roller portion 120 of the cylindrical body 112 may not be located on the imaginary circumferential surface S when the outer circumferential surface of the roller portion 120 is extended towards the suction port 70B. The end of the cylindrical body 112 may be located inside the outer circumferential surface of the roller portion 120, or it may protrude outward from the outer circumferential surface of the roller portion 120. Furthermore, the cylindrical body 112 is not limited to a hollow bolt, as long as it is a cylindrical shape that allows airflow. Also, the suction roller 100 may not have a cylindrical body 112.

[0172] The shape of the suction disk 111 is not particularly limited. Specifically, the suction disk 111 may not have an inverted conical portion. In the suction disk 111, the mounting body 111A and the disk portion 111B may also be formed separately. Furthermore, the material of the suction disk 111 is not limited to the materials exemplified in the above embodiments. Also, the suction roller 100 may not have the suction disk 111.

[0173] Alternatively, the adhesive joint 160 may not be installed on the first mounting member 161. For example, the adhesive joint 160 may always be located on the first positive direction X1 side of the worktable 10. In this case, the adhesive joint 160 only needs to be able to move from a position that can contact the worktable 10 to a position that does not contact the adsorption roller 100.

[0174] The adhesive joint 160 is not limited to the example of this embodiment. For example, the adhesive tape 164 may not be wound into the first winding body 163. Furthermore, for example, the second winding body 165 may not recycle the adhesive tape 164 that has become unusable due to reduced adhesive strength. For example, the unwanted portion of the adhesive tape 164 may be cut off and discarded.

[0175] Alternatively, the adhesive joint 160 can move along the vertical axis X in the second region 83B of the tethering portion 83. In this case, a known linear motion mechanism can be clamped between the adhesive joint 160 and the second region 83B. Furthermore, the power source for the adhesive joint 160 in this case can be an electric motor or a hydraulic system.

[0176] In this modified example, in addition to the worktable 10, the adhesive joint 160 mounted on the first mounting member 161 and the pressing mechanism 190 mounted on the adhesive joint 160 are also movable in the vertical axis X direction. Here, it is assumed that only the worktable 10 and the first mounting member 161 are movable. In this case, the maximum distance in the vertical axis X direction from the adhesive surface 160A to the contact surface 192A is limited to the distance that the worktable 10 can move. Furthermore, the "maximum distance" mentioned here refers to the maximum distance in the vertical axis X direction from the adhesive surface 160A to the contact surface 192A when the length of the force-applying part 191 in the vertical axis X direction is its natural length. This is because if the maximum distance in the vertical axis X direction from the adhesive surface 160A to the contact surface 192A is greater than the distance that the worktable 10 can move, the adhesive surface 160A and the contact surface 192A will not be able to contact the worktable 10 simultaneously. In such a case, the adhesive joint 160 cannot peel off the sheet.

[0177] In contrast, in the above embodiment, both the worktable 10 and the first mounting member 161 are movable. Therefore, the maximum distance in the X direction along the vertical axis from the adhesive surface 160A to the contact surface 192A is the sum of the distance the worktable 10 can move and the distance the first mounting member 161 can move. That is, from the state where both the adhesive surface 160A and the contact surface 192A are in contact with the worktable 10, the adhesive surface 160A can move at most this total distance. Therefore, the adhesive joint 160 allows for a larger area of ​​sheet peeling. Thus, the adhesive joint 160 more reliably peels the sheet.

[0178] Alternatively, the bonding surface 160A of the adhesive joint 160 may not be composed of adhesive tape 164. For example, adhesive may be applied to the opposing surface 162B of the adhesive joint 160. Furthermore, it is preferable that the adhesive force of the adhesive in this case is a weak force sufficient to peel the sheet from the bonding surface 160A.

[0179] ○The force-applying part 191 is not limited to the example of this embodiment. For example, in addition to using the force-applying part 191, a pneumatic device such as a cylinder may also be used, or a pneumatic device such as a cylinder may be used instead of the force-applying part 191.

[0180] ○The pressing mechanism 190 can also be omitted.

[0181] <Postscript>

[0182] The technical concepts that can be grasped based on the above-described embodiments and modifications are described.

[0183] [1] An adsorption roller includes: a cylindrical shaft portion having a central axis; and a roller portion having an inner circumferential surface facing the outer circumferential surface of the shaft portion and being rotatable relative to the shaft portion about the central axis. In the adsorption roller, the shaft portion divides a plurality of first flow paths with one end opening on the outer circumferential surface of the shaft portion, and the roller portion divides a plurality of second flow paths extending from the inner circumferential surface of the roller portion to the outer circumferential surface. When either the outer circumferential surface of the shaft portion or the inner circumferential surface of the roller portion is designated as a specific circumferential surface, the specific circumferential surface has a plurality of annular grooves extending in a ring shape about the central axis. The plurality of annular grooves are spaced apart in a direction along the central axis. Each of the first flow paths is connected to a different second flow path via a different annular groove.

[0184] [2] In the adsorption roller described in [1], when the above-mentioned annular groove is set as the first annular groove, the above-mentioned specific peripheral surface has a second annular groove extending in an annular shape with the above-mentioned central axis as the center. In the direction along the above-mentioned central axis, the second annular groove is located between adjacent first annular grooves. The adsorption roller has an annular sealing ring that fits into the second annular groove.

[0185] [3] In the adsorption roller described in [1] or [2], the other end of the first flow path is open at one end face of the shaft portion.

[0186] [4] In any one of [1] to [3], the second flow path is opened at multiple locations on the outer peripheral surface of the roller portion, and the multiple openings of the second flow path on the outer peripheral surface of the roller portion are arranged along the central axis.

[0187] [5] In any one of [1] to [4], the second flow path is opened at multiple locations on the outer peripheral surface of the roller portion, and the multiple openings of the second flow path on the outer peripheral surface of the roller portion are arranged circumferentially around the central axis.

Claims

1. An adsorbing roller characterized by comprising: Possessing: a shaft portion that has a central axis; and a roller portion that is a cylindrical shape with an inner peripheral surface facing an outer peripheral surface of the shaft portion, and that is capable of relative rotation with respect to the shaft portion about the central axis, the shaft portion divides a plurality of first flow-through paths that open at one end at the outer peripheral surface of the shaft portion, the roller portion divides a plurality of second flow-through paths that extend from the inner peripheral surface to the outer peripheral surface of the roller portion, when either the outer peripheral surface of the shaft portion or the inner peripheral surface of the roller portion is taken as a specific peripheral surface, the specific peripheral surface has a plurality of annular grooves that extend in a ring shape about the central axis, the plurality of annular grooves are arranged at intervals in a direction along the central axis, the first flow-through paths are each connected to different second flow-through paths via different annular grooves, respectively.

2. The adsorption roller according to claim 1, wherein when the annular grooves are taken as first annular grooves, the specific peripheral surface has a second annular groove that extends in a ring shape about the central axis, in the direction along the central axis, the second annular groove is positioned between adjacent first annular grooves, the adsorption roller possesses a ring-shaped seal ring that is fitted into the second annular groove.

3. The adsorption roller according to claim 1 or 2, wherein the other end of the first flow-through path opens at one end surface of the shaft portion.

4. The adsorption roller according to any one of claims 1 to 3, wherein the second flow-through paths open at a plurality of positions on the outer peripheral surface of the roller portion, the plurality of openings on the outer peripheral surface of the roller portion of one second flow-through path are arranged along the central axis.

5. The adsorption roller according to claim 1, wherein the second flow-through paths open at a plurality of positions on the outer peripheral surface of the roller portion, the plurality of openings on the outer peripheral surface of the roller portion of one second flow-through path are arranged in a circumferential direction about the central axis.

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