MEMS resonant multifunctional detection device

Abstract

The invention belongs to the technical field of MEMS resonant devices, and particularly discloses an MEMS resonant multifunctional detection device, which comprises a substrate with a plurality of anchor points, a resonant beam capable of exciting a plurality of resonant modes, an electrode unit and at least one physical parameter detection module group, each resonant mode is used for detecting one physical parameter; the resonant beam and each physical parameter detection module group are fixed on the substrate through a plurality of anchor points; each physical parameter detection module group comprises a force application structure, and each force application structure is arranged around the resonant beam according to a corresponding preset distance; the electrode unit is fixed on the substrate and is used for exciting the resonant beam to generate various resonant modes at the same time and detecting the states of the various resonant modes generated by the resonant beam; and each force application structure is used for changing the state of the corresponding resonant mode of the resonant beam under the condition of detecting the corresponding physical parameter. According to the invention, in-situ measurement of multiple physical parameters can be realized, and the measurement precision of the physical parameters is effectively improved.

Description

Technical Field

[0001] This application belongs to the field of MEMS resonant device technology, specifically the field of physical sensor technology, and more specifically, to a MEMS resonant multifunctional detection device. Background Technology

[0002] Microelectromechanical systems (MEMS) sensors have been widely used in consumer electronics, automotive electronics, aerospace, industrial inspection, and medical and health fields due to their advantages such as small size, low power consumption, low cost, ease of mass production and system integration. Currently common MEMS sensors include accelerometers, angular velocity sensors, magnetic field sensors, and temperature sensors, and their detection mechanisms mostly rely on inertial force effects, Coriolis effects, magnetic field effects, and temperature-sensitive material properties.

[0003] However, most of the aforementioned sensors in the existing technology exist as single-function devices. To simultaneously acquire signals of multiple physical quantities, existing multifunctional detection devices typically integrate multiple independent MEMS sensors directly into the system. However, this approach not only increases the system's size and power consumption but also complicates manufacturing and packaging processes, raising overall costs. More seriously, differences between different devices in parameters such as zero bias, sensitivity, and temperature drift can easily cause signal inconsistencies and measurement errors, resulting in lower measurement accuracy.

[0004] Therefore, how to better realize MEMS resonant multifunctional detection devices has become a technical problem that the industry urgently needs to solve. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the purpose of this application is to provide a MEMS resonant multifunctional device capable of achieving in-situ synchronous detection of multiple parameters. This device, through a single integrated resonant structure, can simultaneously respond to and distinguish multiple physical quantities to be measured, aiming to solve the problems of large size, high cost, signal interference, and difficulty in synchronous measurement inherent in traditional multi-sensor solutions. Thus, it achieves high integration while ensuring the accuracy of multi-parameter detection.

[0006] To achieve the above objectives, in a first aspect, this application provides a MEMS resonant multifunctional detection device, comprising: The system comprises a substrate with multiple anchor points, a resonant beam capable of exciting multiple resonant modes, an electrode unit, and at least one physical parameter detection module group; each of the resonant modes is used to detect one physical parameter. The resonant beam and each of the physical parameter detection module groups are fixed to the substrate by the plurality of anchor points; each of the physical parameter detection module groups includes a force-applying structure, and each force-applying structure is arranged around the resonant beam at a corresponding preset distance; The electrode unit is fixed on the substrate and is used to excite the resonant beam to generate multiple resonant modes simultaneously, and to detect the state of the various resonant modes generated by the resonant beam. Each of the force-applying structures is used to change the state of the corresponding resonant mode of the resonant beam while performing corresponding physical parameter detection.

[0007] Optionally, each of the physical parameter detection module groups includes an acceleration detection module group for detecting acceleration parameters; the acceleration detection module group includes a first mass block and a plurality of first spring beams; the force application structure is a first electrode; One end of each of the first spring beams is connected to a corresponding anchor point, and the other end is connected to one end of the first mass block to support the first mass block; each of the first spring beams is symmetrically distributed about the center of the first mass block; The first mass block is located on the side of the resonant beam close to the resonant beam in the resonant direction, and the first electrode is fixed to the end of the first mass block opposite to the resonant beam; the distance between the first electrode and the resonant beam satisfies a first preset distance; the preset distance includes the first preset distance.

[0008] Optionally, each of the physical parameter detection module groups further includes a first angular velocity detection module group for detecting angular velocity parameters and / or a first magnetic field strength detection module group for detecting magnetic field strength parameters; The force-applying structure of the first angular velocity detection module group is positioned on the resonant beam along its resonant direction, close to the other side of the resonant beam; the distance between the force-applying structure of the first angular velocity detection module group and the resonant beam satisfies a second preset distance; the preset distance includes the second preset distance; The force-applying structure of the first angular velocity detection module group is used to change the state of the corresponding resonant mode of the resonant beam through electrostatic force when there is an angular velocity input perpendicular to the vibration plane of the resonant beam; The force-applying structure of the first magnetic field strength detection module group is fixed by corresponding anchor points and connected to both ends of the resonant beam to fix the resonant beam on the substrate; The force-applying structure of the first magnetic field strength detection module group is used to stretch or compress the resonant beam when a change in magnetic field strength is detected, so as to change the state of the corresponding resonant mode of the resonant beam.

[0009] Optionally, each of the physical parameter detection module groups further includes a second angular velocity detection module group for detecting angular velocity parameters and / or a second magnetic field strength detection module group for detecting magnetic field strength parameters; The force-applying structure of the second angular velocity detection module group is fixed by corresponding anchor points and connected to both ends of the resonant beam to fix the resonant beam on the substrate; The force-applying structure of the second angular velocity detection module group is used to stretch or compress the resonant beam when there is an angular velocity input perpendicular to the vibration plane of the resonant beam, so as to change the state of the corresponding resonant mode of the resonant beam; The force-applying structure of the second magnetic field strength detection module group is positioned on the resonant beam along its resonant direction, close to the other side of the resonant beam; the distance between the force-applying structure of the second magnetic field strength detection module group and the resonant beam satisfies a third preset distance; the preset distance includes the third preset distance. The force-applying structure of the second magnetic field strength detection module group is used to change the state of the corresponding resonant mode of the resonant beam through electrostatic force when a change in magnetic field strength is detected.

[0010] Optionally, the first angular velocity detection module group includes a second mass block, a driving electrode, a first spring beam, and a second spring beam; the force application structure is the second electrode; the first spring beam and the second spring beam are symmetrically arranged on the left and right sides of the second mass block; the stiffness of the first spring beam is less than that of the second spring beam. The first end of the first spring beam is connected to the corresponding anchor point, the second end is connected to the second spring beam, and the third end is connected to the second mass block to support the second mass block; The driving electrodes are fixed to the upper and lower sides of the second mass block through corresponding anchor points, and are used to drive the second mass block to make up-down reciprocating motion; The second mass block is located on the resonant direction of the resonant beam, close to the other side of the resonant beam, and the second electrode is fixed to the second spring beam at the end opposite to the resonant beam; the distance between the second electrode and the resonant beam satisfies the second preset distance.

[0011] Optionally, the first magnetic field strength detection module group includes a Lorentz force generator; the force application structure includes the Lorentz force generator; the Lorentz force generator includes two crossbeams; One end of the resonant beam is connected to the middle part of a crossbeam, and the other end is connected to the middle part of another crossbeam; both ends of each crossbeam are fixed to corresponding anchor points.

[0012] Optionally, the second angular velocity detection module group includes two angular velocity sensing sub-units symmetrically arranged at both ends of the resonant beam; Each of the angular velocity sensing subunits includes a second mass block, a driving electrode, a first spring beam, a second spring beam, and a lever structure; the force application structure is the lever structure; the stiffness of the first spring beam is less than that of the second spring beam; In each of the angular velocity sensing subunits, the first spring beam and the second spring beam are symmetrically arranged on the left and right sides of the second mass block; the first end of the first spring beam is connected to the corresponding anchor point, the second end is connected to the second spring beam, and the third end is connected to the second mass block to support the second mass block; one end of the lever structure is connected to the second spring beam near the resonant beam, and the other end is connected to one end of the resonant beam; the lever structure is connected to the corresponding anchor point through the support beam; and the driving electrode is fixed to the upper and lower sides of the second mass block through the corresponding anchor point to drive the second mass block to perform up-and-down reciprocating motion.

[0013] Optionally, the second magnetic field strength detection module group includes a Lorentz force generator and a third electrode; the force application structure includes the third electrode; the Lorentz force generator includes a crossbeam; The crossbeam of the Lorentz force generator is fixed to the side of the resonant beam close to the resonant beam in the resonant direction by corresponding anchor points. The third electrode is fixed to the middle part of the crossbeam at the end opposite to the resonant beam. The distance between the third electrode and the resonant beam satisfies the third preset distance.

[0014] Optionally, the resonant beam is a double cosine beam structure, wherein the two cosine beams in the double cosine beam structure are symmetrically arranged and connected.

[0015] Optionally, the electrode unit includes an excitation electrode and a detection electrode; the excitation electrode is disposed on one side of the resonant beam, and the detection electrode is disposed on the other side of the resonant beam; The excitation electrode is used to excite the resonant beam to generate multiple resonant modes simultaneously under the action of blue sideband excitation; the detection electrode is used to detect the state of the various resonant modes generated by the resonant beam.

[0016] Overall, the technical solutions conceived in this application have the following beneficial effects compared with the prior art: This application provides a MEMS resonant multifunctional detection device. By designing a shared resonant sensing structure and utilizing ingenious mechanical design and multimodal excitation and detection technology, the force-applying structures of each physical parameter detection module group are simultaneously arranged around the sensing structure. This allows the sensing structure to simultaneously respond to changes in multiple parameters, including acceleration, angular velocity, magnetic field, and temperature, and convert these changes in physical quantities into frequency offset signals of different characteristic resonant modes for signal separation and decomposition. This enables comprehensive detection of multiple physical parameters based on a single chip, allowing for in-situ measurement of multiple physical parameters and effectively improving the measurement accuracy of physical parameters. Compared with traditional multifunctional detection devices, it has the advantages of high integration, low power consumption, low cost, high data synchronization, and high signal consistency. Attached Figure Description

[0017] Figure 1 This is one of the structural schematic diagrams of the MEMS resonant multifunctional detection device provided in the embodiments of this application; Figure 2 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting acceleration and temperature, provided in an embodiment of this application. Figure 3 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting angular velocity and temperature, provided in an embodiment of this application. Figure 4 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting magnetic intensity and temperature, provided in an embodiment of this application. Figure 5 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting acceleration, angular velocity and temperature, provided in an embodiment of this application. Figure 6 This is one of the structural schematic diagrams of a MEMS resonant multifunctional detection device for simultaneously detecting acceleration, angular velocity, magnetic field strength, and temperature provided in the embodiments of this application; Figure 7 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting acceleration, magnetic field strength, and temperature, provided in an embodiment of this application. Figure 8 This is the second schematic diagram of the structure of the MEMS resonant multifunctional detection device for simultaneously detecting acceleration, angular velocity, magnetic field strength and temperature provided in the embodiments of this application. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0019] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. In this application, the symbol " / " indicates that the related objects are in an "or" relationship, for example, A / B means A or B.

[0020] The terms "first" and "second," etc., used in the specification and claims of this application are used to distinguish different objects, not to describe a specific order of objects. For example, "first angular velocity detection module group" and "second angular velocity detection module group," etc., are used to distinguish different angular velocity detection module groups, not to describe a specific order of angular velocity detection module groups.

[0021] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0022] In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more, for example, multiple processing units means two or more processing units, multiple elements means two or more elements, etc.

[0023] In existing technologies, when it is necessary to simultaneously detect multiple physical quantities such as acceleration, angular velocity, magnetic intensity, and temperature, it is usually necessary to integrate multiple different types of sensors. This results in a large system size, high power consumption, complex manufacturing and packaging processes, and increased costs. More importantly, it is difficult for different sensors to maintain consistency in sampling timing, phase response, and temperature drift, which can easily lead to asynchronous detection data and thus affect the accuracy and reliability of multi-physical quantity measurements.

[0024] To address the aforementioned technical deficiencies, this application provides a MEMS resonant multifunctional detection device.

[0025] The embodiments of this application are described below with reference to the accompanying drawings.

[0026] Figure 1 This is one of the structural schematic diagrams of the MEMS resonant multifunctional detection device provided in the embodiments of this application, such as... Figure 1 As shown, it includes: The system comprises a substrate 2 with multiple anchor points 1, a resonant beam 3 capable of exciting multiple resonant modes, an electrode unit 4, and at least one physical parameter detection module group 5; each resonant mode is used to detect one physical parameter. The resonant beam 3 and each physical parameter detection module group 5 are fixed to the substrate by multiple anchor points 1; each physical parameter detection module group 5 includes a force application structure 501, and each force application structure 501 is set around the resonant beam 3 at a corresponding preset distance. Electrode unit 4 is fixed on substrate 2 and is used to excite resonant beam 3 to generate multiple resonant modes simultaneously, and to detect the state of various resonant modes generated by resonant beam 3. Each force-applying structure 501 is used to change the state of the corresponding resonant mode of the resonant beam 3 while performing corresponding physical parameter detection.

[0027] Specifically, in the embodiments of this application, the MEMS resonant multifunctional detection device includes a silicon-based resonator core structure, namely a resonant beam, as well as electrode units integrated on a chip substrate, and at least one physical parameter detection module group. Here, the MEMS resonant beam in the embodiments of this application is fixed to the substrate by anchor points, and the substrate includes, but is not limited to, a silicon-doped substrate.

[0028] Specifically, the physical parameter detection module group may include an acceleration detection module group for detecting acceleration parameters, an angular velocity detection module group (which can also be described as a gyroscope detection module group) for detecting angular velocity parameters, and a magnetic field strength detection module group for detecting magnetic field strength parameters.

[0029] In the embodiments of this application, the resonant beam can specifically adopt a double cosine beam structure, which can be excited to at least four modes simultaneously; or it can adopt other resonator structures that can generate multiple resonant modes.

[0030] like Figure 1 As shown, based on the above embodiments, as an optional embodiment, the resonant beam is a double cosine beam structure, in which the two cosine beams are symmetrically arranged and connected.

[0031] Specifically, in the embodiments of this application, the resonant beam can be a double cosine beam structure, which can be excited to at least four modes simultaneously, and the sensitivity of each mode at different positions is different. The four modes detect four physical parameters: acceleration, angular velocity, magnetic field strength (which can be simply referred to as magnetic intensity), and temperature, respectively, which can achieve a rapid response to changes in acceleration, angular velocity, magnetic field, and temperature simultaneously.

[0032] Here, the sensitivity varies at different locations of the resonator. For example, the pointed part in the middle of the double cosine beam can be used to detect acceleration, the concave and convex parts of the double cosine beam can be used to detect magnetic field strength, and the double cosine beam itself can detect temperature.

[0033] Continue to refer to Figure 1As shown in the embodiments of this application, the electrode unit may specifically include an excitation electrode and a detection electrode; wherein, the excitation electrode is disposed on one side of the resonant beam, and the detection electrode is disposed on the other side of the resonant beam; The excitation electrode is used to excite the resonant beam to generate multiple resonant modes simultaneously under the action of blue sideband excitation; the detection electrode is used to detect the state of the various resonant modes generated by the resonant beam.

[0034] Specifically, in the embodiments of this application, the existing Blue Sideband Excitation (BSE) method is used to excite the excitation electrodes. Blue sideband excitation uses the frequency sum of two fundamental modes as the excitation mode, which excites the sum, difference, and harmonic frequencies of the two fundamental modes. The excitation signal is applied to the excitation electrodes through blue sideband excitation, causing the resonant beam to vibrate. Furthermore, the state and changes of various resonant modes generated by the resonant beam can be detected in real time through detection electrodes.

[0035] Here, the state of the resonant mode can specifically include the frequency and amplitude information of the resonant mode.

[0036] In the embodiments of this application, each physical parameter detection module group includes a force-applying structure. Through mechanical design, each force-applying structure is arranged around the resonant beam at a corresponding preset distance to form a force balance relationship between the force-applying structure and the resonant beam. When the excitation electrode excites the resonant beam to start vibrating and generates multiple resonant modes, when the device is subjected to external forces, such as an angular velocity input perpendicular to the vibration plane, the resonant beam structure will be subjected to a Coriolis force, resulting in a small displacement. This displacement change is equivalent to a change in the electrostatic force between the force-applying structure of the gyroscope detection module group and the resonator, or the force-applying structure directly acts on the axial direction of the resonator. At this time, the resonant frequency or amplitude of the resonant beam changes. By detecting the frequency or amplitude change of the corresponding resonant mode, the corresponding angular velocity value can be calculated.

[0037] For example, when inertial acceleration acts on the device, it causes a change in the electrostatic force between the force-applying structure of the acceleration detection module group and the resonant beam, or the force-applying structure acts directly on the axis of the resonator. This will cause a change in the resonant frequency or amplitude of the resonant beam. The angular velocity value can be calculated by detecting the frequency change or amplitude change of the corresponding resonant mode.

[0038] For example, the force-applying structure of the magnetic field strength detection module will be subjected to the Lorentz force under the action of an external magnetic field. This force will effectively change the stiffness of the resonant beam structure, thereby fine-tuning its resonant frequency or amplitude. By monitoring these frequency or amplitude perturbations related to the magnetic field strength, the strength of the external magnetic field can be calculated.

[0039] It should also be noted that, due to the known thermosensitive properties of the Young's modulus of the silicon material in the resonant beam, changes in ambient temperature directly alter the stiffness of the entire resonant beam structure, thereby causing a drift in the natural frequencies of all resonant modes. Therefore, this frequency drift can be used as a direct measurement of temperature, and can simultaneously provide real-time temperature compensation for measurements of acceleration, angular velocity, and magnetic intensity, eliminating thermal drift errors and ultimately outputting high-precision compensated physical parameters.

[0040] In addition, in the embodiments of this application, the structural method for the four parameters of acceleration, angular velocity, magnetic field strength, and temperature can adopt the following formula: ; ; ; ; in, , The initial modal frequency; , The modal frequencies when the input changes; ( =1,2,3) are physical parameters , , Sensitivity; , , This refers to the change in physical parameters. Here, , , These represent acceleration, angular velocity, magnetic field strength, and temperature, respectively.

[0041] Converting the above formula into matrix form, we get: ; in, , , and .

[0042] The device in this application embodiment achieves synchronous sensing of four physical quantities through a resonant structure, which greatly improves integration, reduces power consumption and size, and fundamentally avoids problems such as the inability to compensate in situ in traditional multi-chip solutions.

[0043] The MEMS resonant multifunctional detection device of this application embodiment designs a common resonant sensing structure. Utilizing ingenious mechanical design and multimodal excitation and detection technology, the force-applying structures of each physical parameter detection module group are simultaneously arranged around the sensing structure. This allows the sensing structure to simultaneously respond to changes in multiple parameters, including acceleration, angular velocity, magnetic field, and temperature, and convert these changes into frequency offset signals of different characteristic resonant modes for signal separation and calculation. This enables comprehensive detection of multiple physical parameters based on a single chip, effectively achieving in-situ measurement of multiple physical parameters and significantly improving the measurement accuracy. Compared to traditional multifunctional detection devices, it has advantages such as high integration, low power consumption, low cost, high data synchronization, and high signal consistency.

[0044] Figure 2 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting acceleration and temperature, as provided in the embodiments of this application. Figure 2 As shown in the embodiments of this application, each physical parameter detection module group 5 includes an acceleration detection module group 51 for detecting acceleration parameters; the acceleration detection module group 51 includes a first mass block 511 and a plurality of first spring beams 512; the force application structure 501 is a first electrode; One end of each first spring beam 512 is connected to a corresponding anchor point (some are not shown), and the other end is connected to one end of the first mass block 511 to support the first mass block 511; each first spring beam 512 is symmetrically distributed about the center of the first mass block 511; The first mass block 511 is located on the side of the resonant beam 3 close to the resonant beam in the resonant direction. The first electrode is fixed to the end of the first mass block 511 opposite to the resonant beam 3. The distance between the first electrode and the resonant beam 3 satisfies the first preset distance. The preset distance includes the first preset distance.

[0045] Specifically, the first electrode described in this application embodiment refers to the driving electrode used in the force-applying structure of the acceleration detection module group, which can apply electrostatic force to the resonant beam. It is specifically located on one side opposite the middle of the resonant beam; its shape can be symmetrical, such as a "I" shape, a "tuning fork" shape, or an "M" shape, depending on the actual setting position, with its axis of symmetry coaxial with the axis of symmetry of the resonant beam. Preferably, the first electrode can adopt a "tuning fork" shape or an "M" shape structure to match the curvature of the middle curve of the double cosine beam, thereby achieving a more stable and sensitive sensing effect.

[0046] The first preset distance described in this application refers to the pre-set distance between the first electrode and the resonant beam. This distance can be specifically determined according to the actual design parameters of the first electrode and the resonant beam. It can ensure that the resonant beam can maintain its initial resonant mode frequency when there is no inertial acceleration acting on the device; while when there is inertial acceleration acting on the device, the first electrode is displaced, and the resonant mode frequency or amplitude of the resonant beam changes through the change of electrostatic force.

[0047] More specifically, in the embodiments of this application, the values ​​of the first preset distance and the second and third preset distances described below are in the range of 2μm-4μm, and can be uniformly set to 2μm.

[0048] In the embodiments of this application, the acceleration detection module group may specifically consist of a first mass block and multiple first spring beams, with a first electrode as its force-applying structure. Each first spring beam is connected at one end to a corresponding anchor point and at the other end to one end of the first mass block, ensuring that the first mass block is supported on the substrate.

[0049] Meanwhile, each of the first spring beams is symmetrically distributed about the center of the first mass block, and the first mass block is located on the side of the resonant beam closer to the resonant beam in the resonant direction. The first electrode is fixed to the end of the first mass block opposite to the resonant beam, so as to align with the middle region of the resonant beam. This design ensures that when inertial acceleration is applied to the device, the first mass block moves left and right in the vibration direction of the resonant beam, thus ensuring the reliability of the resonant beam's acceleration sensing.

[0050] In the specific acceleration detection process, when inertial acceleration acts on the device, the first mass block moves left and right under the support of the spring beam. The distance between the first electrode and the resonant beam changes, and the electrostatic force between them changes accordingly. This electrostatic force drives a change in the frequency or amplitude of the resonant mode of the resonant beam. Furthermore, by detecting the frequency difference or amplitude difference through an external detection and calculation module, the corresponding acceleration signal can be calculated.

[0051] In the embodiments of this application, since the Young's modulus of the silicon material of the resonant beam has known thermosensitive properties, the device can effectively sense the ambient temperature.

[0052] The device in this embodiment utilizes a mass block, a spring beam, and electrodes to construct an acceleration detection module group. Through ingenious structural design, it is adapted to the structure of a double cosine resonant beam. When inertial acceleration acts on the device, the electrostatic force of the electrodes acts on the axial direction of the resonant beam, causing a change in its structural resonant frequency or amplitude, thus achieving effective sensing of acceleration. At the same time, by introducing the acceleration detection module group, the device can effectively achieve simultaneous detection of two physical parameters, acceleration and temperature, with high detection accuracy and high reliability.

[0053] Figure 3 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting angular velocity and temperature, as provided in the embodiments of this application. Figure 3 As shown in the embodiments of this application, each physical parameter detection module group further includes an angular velocity detection module group for detecting angular velocity parameters. The angular velocity detection module group can be designed as a first angular velocity detection module group 52.

[0054] The first angular velocity detection module group 52 includes a second mass block 521, a driving electrode 522, a first spring beam 523, and a second spring beam 524; the force application structure 501 is the second electrode; the first spring beam 523 and the second spring beam 524 are symmetrically arranged on the left and right sides of the second mass block 521; the stiffness of the first spring beam 523 is less than that of the second spring beam 524. The first end of the first spring beam 523 is connected to the corresponding anchor point, the second end is connected to the second spring beam, and the third end is connected to the second mass block 521 to support the second mass block 521. The driving electrode 522 is fixed to the upper and lower sides of the second mass block 521 through the corresponding anchor point 1, and is used to drive the second mass block 521 to make up-down reciprocating motion. The second mass block 521 is located on the other side of the resonant beam 3 in the resonant direction of the resonant beam 3, and the second electrode is fixed to the end of the second spring beam 524 opposite to the resonant beam 3; the distance between the second electrode and the resonant beam 3 satisfies the second preset distance.

[0055] Specifically, the second electrode described in this application embodiment refers to the driving electrode used in the force-applying structure of the first angular velocity detection module group, which can apply electrostatic force to the resonant beam. It is specifically located on the side opposite to the middle of the resonant beam; its shape can be a symmetrical shape such as an "I", "V", or "M", with its axis of symmetry coaxial with the axis of symmetry of the resonant beam. Preferably, the first electrode can adopt a "V" or "M" shaped structure depending on its setting position to match the curvature of the middle curve of the double cosine beam, achieving a more stable and sensitive sensing effect.

[0056] The second preset distance described in this application refers to the pre-set distance between the second electrode and the resonant beam. This distance can be specifically determined according to the actual design parameters of the second electrode and the resonant beam. It can ensure that when there is no angular velocity perpendicular to the vibration plane acting on the device, the resonant beam can maintain the initial resonant mode frequency; while when there is an angular velocity input perpendicular to the vibration plane, the second electrode is displaced, and the resonant mode frequency or amplitude of the resonant beam changes through the change of electrostatic force.

[0057] In the embodiments of this application, the first angular velocity detection module group can specifically be composed of a second mass block, a driving electrode, a first spring beam, and a second spring beam, with the second electrode serving as the force-applying structure. Multiple first spring beams (some not shown) have their first ends connected to corresponding anchor points, their second ends connected to second spring beams (some not shown), and their third ends connected to the second mass block, ensuring that the second mass block is supported on the substrate. Here, the stiffness of the first spring beams is less than that of the second spring beams. The less stiff first spring beams are used to generate structural deformation, while the more stiff second spring beams are used to fix surrounding parts to prevent deformation.

[0058] Simultaneously, the driving electrodes are fixed to the upper and lower sides of the second mass block via corresponding anchor points, driving the second mass block to perform reciprocating up-and-down motion. The first and second spring beams are symmetrically arranged on the left and right sides of the second mass block, forming a "U"-shaped frame. The second mass block is located on the side closer to the resonant beam in the resonant direction. The second electrode is fixed to the end of the second spring beam opposite to the resonant beam, aligning with the central region of the resonant beam. This design ensures that when an angular velocity perpendicular to the resonant beam's vibration plane is applied to the device, the Coriolis force will cause the resonant beam to move left and right. The second mass block, fixed in the vibration direction of the resonant beam, moves left and right, guaranteeing the reliability of the resonant beam's angular velocity sensing.

[0059] During the acceleration detection process, when the driving electrode applies voltage to the second mass block, the electrostatic force causes the second mass block to undergo vertical displacement. The first spring beam, with its lower stiffness, makes the second mass block prone to vibration, while the second spring beam, with its higher stiffness, serves to constrain and stabilize the structure, preventing deviation from the vibration direction. When an angular velocity perpendicular to the vibration plane occurs, i.e., a z-axis angular velocity, the first angular velocity detection module group will experience a Coriolis force, which can be expressed as: =-2m( × ); In the formula, ; Radial velocity in a rotating system; the symbol "×" represents the vector cross product; m represents the mass of the second mass block.

[0060] The Coriolis force causes the entire first angular velocity detection module assembly to move left and right, resulting in a change in the distance between the second electrode and the resonant beam. This change in the electrostatic force between them drives a change in the frequency or amplitude of the resonant beam's resonant mode. This frequency or amplitude difference can then be detected by an external detection and calculation module and converted into an angular velocity signal.

[0061] Similarly, in the embodiments of this application, since the Young's modulus of the silicon material of the resonant beam has known thermosensitive properties, the device can effectively sense the ambient temperature.

[0062] In another embodiment of this application, the angular velocity detection module group can be designed as a second angular velocity detection module group. For example... Figure 8 As shown, the second angular velocity detection module group includes two angular velocity sensing subunits 53 symmetrically arranged at both ends of the resonant beam; Each angular velocity sensing subunit 53 includes a second mass block 521, a driving electrode 522, a first spring beam 523, a second spring beam 524, and a lever structure; the force application structure 501 is a lever structure; the stiffness of the first spring beam 523 is less than that of the second spring beam 524; In each angular velocity sensing subunit 53, the first spring beam 523 and the second spring beam 524 are symmetrically arranged on the left and right sides of the second mass block 521; the first end of the first spring beam 523 is connected to the corresponding anchor point 1, the second end is connected to the second spring beam 524, and the third end is connected to the second mass block 521 to support the second mass block 521; one end of the lever structure is connected to the second spring beam 524 near the resonant beam 3, and the other end is connected to one end of the resonant beam 3; the lever structure is connected to the corresponding anchor point through the support beam 502; and the driving electrode 522 is fixed to the upper and lower sides of the second mass block 521 through the corresponding anchor point 1 to drive the second mass block 521 to make up-down reciprocating motion.

[0063] Specifically, in the embodiments of this application, the second angular velocity detection module group is designed as two angular velocity sensing subunits symmetrically arranged at both ends of the resonant beam. Each angular velocity sensing subunit can be composed of a second mass block, a driving electrode, a first spring beam, a second spring beam, and a lever structure. It is understood that most of the modules used in each angular velocity sensing subunit are the same as those in the first angular velocity detection module group described above, and the operating principles of each module are similar. For example, the first end of multiple first spring beams is connected to the corresponding anchor point, the second end is connected to the second spring beam, and the third end is connected to the second mass block to ensure that the second mass block is supported on the substrate, etc. Therefore, this application will not elaborate on this further.

[0064] It should be noted that the difference in design lies in the addition of a lever structure in each angular velocity sensing subunit; and, unlike the first angular velocity detection module group which uses electrostatic force to change the modal state of the resonant beam, the lever structure of each angular velocity sensing subunit in the second angular velocity detection module group is directly connected to both ends of the resonant beam. Its function is to increase the axial force, that is, to amplify the input angular velocity, which is beneficial to improving the sensing sensitivity of the device.

[0065] Similarly, during acceleration detection, the driving electrodes cause the second mass block to undergo vertical displacement. When an angular velocity perpendicular to the vibration plane occurs, the second angular velocity detection module group is subjected to the Coriolis force, causing both angular velocity sensing subunits to move horizontally. This force is amplified through the lever structure, stretching or compressing the resonant beam, thereby causing a change in the frequency or amplitude of the resonant beam's resonant mode. This frequency or amplitude difference can then be converted into an angular velocity signal by an external detection and calculation module.

[0066] The device in this embodiment utilizes a mass block, spring beams with different stiffnesses, and electrodes (or lever structures) to construct an angular velocity detection module group. Through ingenious structural design, it is adapted to the structure of a double cosine resonant beam. When angular velocity is applied to the device, the electrostatic force provided by the electrodes or the tensile force provided by the lever structure can act on the axial direction of the resonant beam, causing a change in its structural resonant frequency or amplitude, thus achieving effective sensing of angular velocity. At the same time, by introducing the angular velocity detection module group, the device can effectively achieve simultaneous detection of two physical parameters, angular velocity and temperature, with high detection accuracy and high reliability.

[0067] Figure 4 This is a schematic diagram of the structure of a MEMS resonant multifunctional detection device for simultaneously detecting magnetic intensity and temperature, as provided in the embodiments of this application. Figure 4 As shown in the embodiments of this application, each physical parameter detection module group 5 further includes a magnetic field strength detection module group for detecting magnetic field strength parameters. The magnetic field strength detection module group can be designed as a second magnetic field strength detection module group 54.

[0068] like Figure 4 As shown, the second magnetic field strength detection module group 54 specifically includes a Lorentz force generator and a third electrode; the force application structure 501 includes the third electrode; the Lorentz force generator includes a crossbeam 541; The crossbeam 541 of the Lorentz force generator is fixed to the side of the resonant beam 3 close to the resonant beam 3 in the resonant direction by the corresponding anchor point 1. The third electrode is fixed to the middle part of the crossbeam 541 at the end opposite to the resonant beam 3. The distance between the third electrode and the resonant beam 3 meets the third preset distance.

[0069] Specifically, the third electrode described in this application embodiment refers to the driving electrode used in the force-applying structure of the second magnetic field strength detection module group, which can apply electrostatic force to the resonant beam. It is specifically located on the side opposite to the middle of the resonant beam; its shape can be a symmetrical shape such as an "I", "V", or "M", with its axis of symmetry coaxial with the axis of symmetry of the resonant beam. Preferably, the third electrode can adopt a "V" or "M" shaped structure depending on its placement, to match the curvature of the middle curve of the double cosine beam, achieving a more stable and sensitive sensing effect.

[0070] The third preset distance described in this application refers to the pre-set distance between the third electrode and the resonant beam. This distance can be specifically determined according to the actual design parameters of the third electrode and the resonant beam. It can ensure that the resonant beam can maintain its initial resonant mode frequency when no change in magnetic field strength acts on the device; while when an axial magnetic field perpendicular to the vibration plane is input, the third electrode is displaced, and the resonant mode frequency or amplitude of the resonant beam changes through the change in electrostatic force.

[0071] In the embodiments of this application, the second magnetic field strength detection module group can specifically consist of a Lorentz force generator including a crossbeam and a third electrode, with the third electrode serving as the force-applying structure. The crossbeam of the Lorentz force generator is fixed to the side of the resonant beam close to the resonant beam in the resonant direction via corresponding anchor points. The third electrode is fixed to the middle portion of the crossbeam at the end opposite to the resonant beam, so as to align with the central region of the resonant beam.

[0072] In the specific process of magnetic field strength detection, when an axial magnetic field perpendicular to the vibration plane is input, the Lorentz force generator, under the influence of this magnetic field, according to the Ampere force formula F=BIL (where B is the magnetic field strength, I is the current, and L is the length of the Lorentz force generator's beam), experiences a change in Ampere force due to a change in B. This causes the beam of the Lorentz force generator to move left and right, resulting in a change in the distance between the third electrode and the resonant beam. Consequently, the electrostatic force between them changes, driving a change in the frequency or amplitude of the resonant mode of the resonant beam. This frequency or amplitude difference can then be detected by an external detection and calculation module and converted into a magnetic field strength signal.

[0073] In another embodiment of this application, the magnetic field strength detection module group can also be designed as a first magnetic field strength detection module. For example... Figure 6 As shown, the first magnetic field strength detection module 55 includes a Lorentz force generator; the force application structure 501 includes a Lorentz force generator; the Lorentz force generator includes two crossbeams 541; One end of the resonant beam 3 is connected to the middle part of a crossbeam 541, and the other end is connected to the middle part of another crossbeam 541; both ends of each crossbeam 541 are fixed to the corresponding anchor points.

[0074] Specifically, in the embodiments of this application, the first magnetic field strength detection module consists only of a Lorentz force generator; therefore, the force-applying structure is the Lorentz force generator. The Lorentz force generator comprises two beam structures, with one end of a resonant beam connected to the middle of one beam and the other end connected to the middle of the other beam. Both ends of each beam are fixed to corresponding anchor points. Thus, the resonant beam is fixed to the substrate by the anchor points of the Lorentz force generator beams.

[0075] Similarly, in the specific process of magnetic field strength detection, when there is an axial magnetic field input perpendicular to the vibration plane, such as Figure 6 As shown, under the influence of this magnetic field, the Lorentz force generator experiences a change in Ampere force due to the change in the magnetic field. This causes both crossbeams of the Lorentz force generator at both ends of the resonant beam to move up and down, resulting in tension or compression of the resonant beam and a change in its stiffness. Here, the resonant frequency of the resonant beam is formulated as w = (K is the stiffness of the resonant beam, m is the mass of the resonant beam, and w is the resonant frequency of the resonator.) Therefore, a change in the stiffness of the resonant beam will cause a change in the modal frequency of the resonant beam, and the amplitude will also change accordingly. Furthermore, this frequency difference or amplitude difference can be detected by an external detection and calculation module and converted into a magnetic field strength signal.

[0076] The device in this application embodiment constructs a magnetic field strength detection module group by utilizing a Lorentz force generator or a combination of a Lorentz force generator and electrodes. Through ingenious structural design, it is adapted to the structure of a double cosine resonant beam. When an axial magnetic field acts on the device, the electrostatic force provided by the electrodes or the expansion force provided by the Lorentz force generator can act on the axial direction of the resonant beam, causing a change in its structural resonant frequency or amplitude, thereby achieving effective sensing of magnetic field strength. At the same time, by introducing the magnetic field strength detection module group, the device can effectively achieve simultaneous detection of two physical parameters, namely magnetic field strength and temperature, with high detection accuracy and high reliability.

[0077] Based on the above embodiments, as an optional embodiment, each physical parameter detection module group further includes a first angular velocity detection module group for detecting angular velocity parameters and / or a first magnetic field strength detection module group for detecting magnetic field strength parameters. The force-applying structure of the first angular velocity detection module group is positioned on the resonant direction of the resonant beam, close to the other side of the resonant beam; the distance between the force-applying structure of the first angular velocity detection module group and the resonant beam satisfies the second preset distance; the preset distance includes the second preset distance; The force-applying structure of the first angular velocity detection module group is used to change the state of the corresponding resonant mode of the resonant beam through electrostatic force when there is an angular velocity input perpendicular to the vibration plane of the resonant beam. The force-applying structure of the first magnetic field strength detection module group is fixed by corresponding anchor points and connected to both ends of the resonant beam to fix the resonant beam on the substrate. The force-applying structure of the first magnetic field strength detection module group is used to stretch or compress the resonant beam when a change in magnetic field strength is detected, so as to change the state of the corresponding resonant mode of the resonant beam.

[0078] Specifically, in the embodiments of this application, after integrating the acceleration detection module group, the device can further integrate the first angular velocity detection module group and / or the first magnetic field strength detection module group. When the device integrates both the acceleration detection module group and the first angular velocity detection module group, it can be used to simultaneously detect multiple physical parameters such as acceleration, angular velocity, and temperature; when the device integrates both the acceleration detection module group and the first magnetic field strength detection module group, it can be used to simultaneously detect multiple physical parameters such as acceleration, magnetic field strength, and temperature; it can be understood that when the device integrates the acceleration detection module group, the first angular velocity detection module group, and the first magnetic field strength detection module group, it can be used to synchronously detect multiple physical parameters such as acceleration, angular velocity, magnetic field strength, and temperature.

[0079] like Figure 5 As shown in the embodiments of this application, the device integrates both an acceleration detection module group and a first angular velocity detection module group. Here, the acceleration detection module group includes a first mass block 511 and multiple first spring beams 512, with its force-applying structure 501 serving as a first electrode; the first angular velocity detection module group includes a second mass block 521, a driving electrode 522, a first spring beam 523, and a second spring beam 524; the force-applying structure 501 serves as a second electrode; the first spring beams 523 and 524 are symmetrically arranged on the left and right sides of the second mass block. The specific structural design and principles of the acceleration detection module group and the first angular velocity detection module have been described in detail above and will not be repeated here.

[0080] Continue to refer to Figure 5 In the embodiments of this application, the first electrode of the acceleration detection module group adopts a tuning fork shape structure, facing the left side of the resonant beam, while the second electrode of the first angular velocity detection module group adopts an "M" shape structure, facing the right side of the resonant beam. The shapes of the force-applying structures of both detection module groups can perfectly match the double cosine curve of the resonant beam, and the device can realize the synchronous detection of acceleration, angular velocity and temperature.

[0081] like Figure 6As shown in the embodiments of this application, the device integrates an acceleration detection module group, a first angular velocity detection module group, and a first magnetic field strength detection module group. Here, the first magnetic field strength detection module group includes a Lorentz force generator; the force-applying structure includes a Lorentz force generator, which includes two crossbeams 541. The specific structural design and principle of the acceleration detection module group have been described in detail above and will not be repeated here.

[0082] In the embodiments of this application, the first electrode of the acceleration detection module group has an "M"-shaped structure facing the right side of the resonant beam, while the second electrode of the first angular velocity detection module group has a "V"-shaped structure facing the left side of the resonant beam. The shapes of the force-applying structures of both detection module groups can achieve a perfect match with the double cosine curve of the resonant beam. Simultaneously, the force-applying structure of the integrated first magnetic field strength detection module group is the Lorentz force generator itself, fixing both ends of the resonant beam to the middle of the two crossbeams of the Lorentz force generator. This device can achieve simultaneous detection of acceleration, angular velocity, magnetic field strength, and temperature.

[0083] Based on the above embodiments, as an optional embodiment, each physical parameter detection module group further includes a second angular velocity detection module group for detecting angular velocity parameters and / or a second magnetic field strength detection module group for detecting magnetic field strength parameters. The force-applying structure of the second angular velocity detection module group is fixed by corresponding anchor points and connected to both ends of the resonant beam to fix the resonant beam on the substrate. The force-applying structure of the second angular velocity detection module group is used to stretch or compress the resonant beam when there is an angular velocity input perpendicular to the vibration plane of the resonant beam, so as to change the state of the corresponding resonant mode of the resonant beam. The force-applying structure of the second magnetic field strength detection module group is located on the resonant direction of the resonant beam, close to the other side of the resonant beam; the distance between the force-applying structure of the second magnetic field strength detection module group and the resonant beam satisfies the third preset distance; the preset distance includes the third preset distance; The force-applying structure of the second magnetic field strength detection module is used to change the state of the corresponding resonant mode of the resonant beam through electrostatic force when a change in magnetic field strength is detected.

[0084] Specifically, in the embodiments of this application, after integrating the acceleration detection module group, the device can further integrate a second angular velocity detection module group and / or a second magnetic field strength detection module group. When the device integrates both the acceleration detection module group and the second angular velocity detection module group, it can be used to simultaneously detect multiple physical parameters such as acceleration, angular velocity, and temperature; when the device integrates both the acceleration detection module group and the second magnetic field strength detection module group, it can be used to simultaneously detect multiple physical parameters such as acceleration, magnetic field strength, and temperature; it is understood that when the device integrates the acceleration detection module group, the second angular velocity detection module group, and the second magnetic field strength detection module group, it can be used to synchronously detect multiple physical parameters such as acceleration, angular velocity, magnetic field strength, and temperature.

[0085] like Figure 7 As shown in the embodiments of this application, the device integrates both an acceleration detection module group and a second magnetic field strength detection module group. Here, the acceleration detection module group includes a first mass block 511 and multiple first spring beams 512, with its force-applying structure 501 serving as a first electrode; the second magnetic field strength detection module group includes a Lorentz force generator and a third electrode; the Lorentz force generator includes a crossbeam 541, with the force-applying structure 501 serving as the third electrode. Similarly, the specific structural design and principles of the acceleration detection module group and the second magnetic field strength detection module group have been described in detail above and will not be repeated here.

[0086] Continue to refer to Figure 7 In the embodiments of this application, the first electrode of the acceleration detection module group adopts a tuning fork shape structure, facing the left side of the resonant beam, while the third electrode of the second magnetic field strength detection module group adopts an "M" shape structure, facing the right side of the resonant beam. The shapes of the force-applying structures of both detection module groups can achieve a perfect match with the double cosine curve of the resonant beam, and the device can realize the synchronous detection of acceleration, magnetic field strength and temperature.

[0087] like Figure 8 As shown in the embodiments of this application, the device integrates an acceleration detection module group, a second angular velocity detection module group, and a second magnetic field strength detection module group. Here, the second angular velocity detection module group includes two angular velocity sensing subunits symmetrically arranged at both ends of the resonant beam. Each angular velocity sensing subunit includes a second mass block 521, a driving electrode 522, a first spring beam 523, a second spring beam 524, and a lever structure; the force application structure 501 is a lever structure. The specific structural design and principle of the second angular velocity detection module group have been described in detail above and will not be repeated here.

[0088] Continue to refer to Figure 8In the embodiments of this application, the resonant beam is horizontally arranged. The first electrode of the acceleration detection module group adopts an "M"-shaped structure, facing the lower side of the resonant beam, while the third electrode of the second magnetic field strength detection module group adopts a "tuning fork" shape, facing the upper side of the resonant beam. The shapes of the force-applying structures of both detection module groups can perfectly match the double cosine curve of the resonant beam. Simultaneously, the force-applying structure of the integrated second angular velocity detection module group uses two internal lever structures, fixing both ends of the resonant beam to the two lever structures respectively. This device can achieve simultaneous detection of acceleration, angular velocity, magnetic field strength, and temperature.

[0089] It should be noted that the scope of protection of this application is not limited to this. Regarding the acceleration detection module group, angular velocity detection module group and magnetic field strength detection module group in the embodiments of this application, they involve different structural deformations. Any easily conceivable changes or replacements in the combination of structures should be included within the scope of protection of this application. This application does not limit each combination structure.

[0090] It is understood that the various numerical designations used in the embodiments of this application are merely for the convenience of description and are not intended to limit the scope of the embodiments of this application.

[0091] It should be understood that expressions such as “comprising” and “may include” used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as “comprising” and / or “having” are to be interpreted as indicating a particular characteristic, number, operation, constituent element, component, or combination thereof, but not to exclude the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0092] Furthermore, in this application, the expression "and / or" includes any and all combinations of the associated listed words. For example, the expression "A and / or B" may include A, may include B, or may include both A and B.

[0093] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. "Fixed connection" refers to a connection where the relative positional relationship remains unchanged after connection. "Rotary connection" refers to a connection where the components can rotate relative to each other after connection. "Sliding connection" refers to a connection where the components can slide relative to each other after connection. The directional terms mentioned in the embodiments of this application, such as "top," "bottom," "inner," "outer," "left," and "right," are only for reference to the directions in the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of this application, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0094] Furthermore, the mathematical concepts mentioned in the embodiments of this application, such as symmetry, equality, parallelism, and perpendicularity, are limitations specific to the current technological level, rather than absolute and strict mathematical definitions. Slight deviations are permissible; approximations of symmetry, equality, parallelism, and perpendicularity are all acceptable. For example, "A and B are parallel" means that A and B are parallel or approximately parallel, and the angle between A and B can be between 0 and 10 degrees. "A and B are perpendicular" means that A and B are perpendicular or approximately perpendicular, and the angle between A and B can be between 80 and 100 degrees.

[0095] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A MEMS resonant multi-functional detection device, characterized by, The application relates to a physical parameter detection device, which comprises a substrate with multiple anchor points, a resonant beam capable of exciting multiple resonant modes, an electrode unit and at least one physical parameter detection module group; each of the resonant modes is used for detecting a physical parameter; the resonant beam and each of the physical parameter detection module groups are fixed on the substrate through the multiple anchor points; each of the physical parameter detection module groups comprises a force applying structure, and each of the force applying structures is arranged around the resonant beam according to a corresponding preset distance; the electrode unit is fixed on the substrate and used for exciting the resonant beam to generate multiple resonant modes and detecting the states of the multiple resonant modes generated by the resonant beam; each of the force applying structures is used for changing the state of the corresponding resonant mode of the resonant beam in the case of detecting the corresponding physical parameter. Each of the physical parameter detection module groups comprises an acceleration detection module group used for detecting an acceleration parameter; the acceleration detection module group comprises a first mass block and multiple first spring beams; the force applying structure is a first electrode; one end of each of the first spring beams is connected to a corresponding anchor point, and the other end is connected to one end of the first mass block to support the first mass block; the first spring beams are symmetrically distributed about the center of the first mass block; the first mass block is located on one side of the resonant beam in the resonant direction of the resonant beam, and the first electrode is fixed on the first mass block at an end opposite to the resonant beam; the distance between the first electrode and the resonant beam satisfies a first preset distance; the preset distance comprises the first preset distance. Each of the physical parameter detection module groups further comprises a first angular velocity detection module group used for detecting an angular velocity parameter and / or a first magnetic field intensity detection module group used for detecting a magnetic field intensity parameter; the force applying structure of the first angular velocity detection module group is arranged on the other side of the resonant beam in the resonant direction of the resonant beam; the distance between the force applying structure of the first angular velocity detection module group and the resonant beam satisfies a second preset distance; the preset distance comprises the second preset distance; the force applying structure of the first angular velocity detection module group is used for changing the state of the corresponding resonant mode of the resonant beam through electrostatic force when there is an angular velocity input perpendicular to the vibration plane of the resonant beam; the force applying structure of the first magnetic field intensity detection module group is fixed through a corresponding anchor point and connected with both ends of the resonant beam to fix the resonant beam on the substrate; the force applying structure of the first magnetic field intensity detection module group is used for stretching or compressing the resonant beam to change the state of the corresponding resonant mode of the resonant beam when a change of the magnetic field intensity is detected. Each of the physical parameter detection module groups further comprises a second angular velocity detection module group used for detecting an angular velocity parameter and / or a second magnetic field intensity detection module group used for detecting a magnetic field intensity parameter; the force applying structure of the second angular velocity detection module group is fixed through a corresponding anchor point and connected with both ends of the resonant beam to fix the resonant beam on the substrate. ​ 2. The MEMS resonant multi-functional detection device according to claim 1, wherein, ​ ​ ​ 3. The MEMS resonant multi-functional detection device according to claim 2, wherein, ​ ​ ​ ​ ​ 4. The MEMS resonant multi-functional detection device according to claim 2, wherein, ​ ​ The force applying structure of the second angular velocity detection module group is used to stretch or compress the resonant beam to change the state of the corresponding resonant mode of the resonant beam when there is an angular velocity input perpendicular to the vibration plane of the resonant beam; The force applying structure of the second magnetic field strength detection module group is arranged on the other side of the resonant beam in the resonant direction of the resonant beam; the distance between the force applying structure of the second magnetic field strength detection module group and the resonant beam satisfies a third preset distance; the preset distance includes the third preset distance; The force applying structure of the second magnetic field strength detection module group is used to change the state of the corresponding resonant mode of the resonant beam by electrostatic force when a change in magnetic field strength is detected.

5. The MEMS resonant multi-functional detection device according to claim 3, wherein, The first angular velocity detection module group includes a second mass block, a driving electrode, a first spring beam, and a second spring beam; the force applying structure is a second electrode; the first spring beam and the second spring beam are symmetrically arranged on the left and right sides of the second mass block; the stiffness of the first spring beam is less than that of the second spring beam; The first end of the first spring beam is connected to a corresponding anchor point, the second end is connected to the second spring beam, and the third end is connected to the second mass block to support the second mass block; The driving electrode is fixed on the upper and lower sides of the second mass block through a corresponding anchor point and is used to drive the second mass block to make up-and-down reciprocating motion; The second mass block is located on the other side of the resonant beam in the resonant direction of the resonant beam, and the second electrode is fixed to one end of the second spring beam opposite to the resonant beam; the distance between the second electrode and the resonant beam satisfies the second preset distance.

6. The MEMS resonant multi-functional detection device according to claim 3, wherein, The first magnetic field strength detection module group includes a Lorentz force generator; the force applying structure includes the Lorentz force generator; and the Lorentz force generator includes two cross beams; One end of the resonant beam is connected to the middle part of one cross beam, and the other end is connected to the middle part of the other cross beam; and the two ends of each cross beam are respectively fixed on corresponding anchor points.

7. The MEMS resonant multi-functional detection device according to claim 4, wherein, The second angular velocity detection module group includes two angular velocity sensors symmetrically arranged at the two ends of the resonant beam; Each angular velocity sensor includes a second mass block, a driving electrode, a first spring beam, a second spring beam, and a lever structure; the force applying structure is the lever structure; and the stiffness of the first spring beam is less than that of the second spring beam; In each angular velocity sensor, the first spring beam and the second spring beam are symmetrically arranged on the left and right sides of the second mass block; the first end of the first spring beam is connected to a corresponding anchor point, the second end is connected to the second spring beam, and the third end is connected to the second mass block to support the second mass block; one end of the lever structure is connected to the second spring beam close to the resonant beam, and the other end is connected to one end of the resonant beam; the lever structure is connected to a corresponding anchor point through a support beam; and the driving electrode is fixed on the upper and lower sides of the second mass block through a corresponding anchor point and is used to drive the second mass block to make up-and-down reciprocating motion.

8. The MEMS resonant multi-functional detection device according to claim 4, wherein, The second magnetic field strength detection module group comprises a Lorentz force generator and a third electrode; the force applying structure comprises the third electrode; the Lorentz force generator comprises a crossbeam; The crossbeam of the Lorentz force generator is fixed on one side of the resonant beam in the resonant direction through a corresponding anchor point, and the third electrode is fixed on one end of the crossbeam opposite to the resonant beam; the distance between the third electrode and the resonant beam satisfies the third preset distance.

9. The MEMS resonant multi-functional detection device according to any one of claims 1-8, wherein, The resonant beam is a double cosine beam structure, and two cosine beams in the double cosine beam structure are symmetrically arranged and connected.

10. The MEMS resonant multi-functional detection device according to any one of claims 1-8, wherein, The electrode unit comprises an excitation electrode and a detection electrode; the excitation electrode is arranged on one side of the resonant beam, and the detection electrode is arranged on the other side of the resonant beam; The excitation electrode is used for exciting the resonant beam to generate multiple resonant modes under the action of blue edge band excitation; and the detection electrode is used for detecting the states of various resonant modes generated by the resonant beam.

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