Anti-adhesion blocking assembly for MEMS sensor

Abstract

The invention discloses an anti-adhesion blocking assembly for an MEMS (micro-electromechanical system) sensor, which comprises a supporting component, a blocking component and a control component, and is characterized in that the supporting component is used for providing support; one end of the elastic part is fixedly arranged on the supporting part; the movable part is fixedly connected with the other end of the elastic part, at least one stop block is arranged on the movable part, and at least the surface, making contact with the limiting part, of the stop block is an arc-shaped surface; and the limiting component is arranged corresponding to the stop block, and the limiting component and the movable component are arranged at an interval. The failure rate of adhesion of the moving parts of the MEMS sensor can be reduced.

Description

Technical Field

[0001] This invention relates to the field of MEMS sensors, and more particularly to an anti-adhesion blocking component for MEMS sensors. Background Technology

[0002] Common MEMS sensors, such as capacitive accelerometers or gyroscopes, have moving parts in their internal structure. When subjected to external impacts such as collisions or shaking, these moving parts will undergo large-scale displacement and collide with other structures. At this time, due to microscopic effects such as surface adhesion forces, the parts can easily stick together, causing the sensor to malfunction.

[0003] Therefore, considering the aforementioned technical problems, it is necessary to propose a new technical solution. Summary of the Invention

[0004] To at least address one of the technical problems existing in the prior art, this invention provides an anti-adhesion blocking component for MEMS sensors, reducing the failure rate of adhesion of moving parts in MEMS sensors. The specific technical solution is as follows: This invention provides an anti-adhesion blocking component for MEMS sensors, comprising: Support component, wherein the support component provides support; An elastic member, wherein one end of the elastic member is fixedly disposed on the support member; A movable component is fixedly connected to the other end of an elastic component, wherein at least one blocking block is provided on the movable component, and the surface of the blocking block that contacts the limiting component is an arc-shaped surface. A limiting component is provided, which is corresponding to the blocking block, and the limiting component and the moving component are spaced apart.

[0005] As a preferred embodiment of the anti-adhesion blocking assembly of the present invention, the blocking block includes at least one first blocking block and / or at least one second blocking block, wherein the second blocking block is connected to the movable component via an elastic member.

[0006] As a preferred embodiment of the anti-adhesion blocking component described in this invention, the distance between the first blocking block and the limiting component is less than or equal to the distance between the second blocking block and the limiting component.

[0007] As a preferred embodiment of the anti-adhesion blocking component of the present invention, the surface of the movable component is provided with a groove, and the elastic element is fixed in the groove; and / or The elastic component and the blocking block are disposed on opposite sides or inside and outside sides of the movable component.

[0008] As a preferred embodiment of the anti-adhesion blocking component of the present invention, a plurality of elastic components are provided on the supporting component; and / or Multiple elastic components are provided on the movable part, and each elastic component is connected to the same or different support components.

[0009] As a preferred embodiment of the anti-adhesion blocking component described in this invention, the side of the movable component is further provided with an N-terminal capacitor component and a P-terminal capacitor component, which are disposed on opposite sides of the outer surface or opposite sides of the inner surface of the movable component.

[0010] As a preferred embodiment of the anti-adhesion blocking component described in this invention, the N-terminal capacitor component is provided with a plurality of N-terminal capacitor plates, which are arranged in parallel. The movable component, corresponding to the N-terminal capacitor plates, is also provided with a plurality of first capacitor plates, which are staggered and correspond one-to-one with the plurality of N-terminal capacitor plates; and / or The P-end capacitor component has several P-end capacitor plates arranged in parallel. The movable component also has several second capacitor plates at positions corresponding to the P-end capacitor plates. The second capacitor plates and the P-end capacitor plates are arranged alternately and in one-to-one correspondence.

[0011] As a preferred embodiment of the anti-adhesion blocking component of the present invention, the direction of the first capacitor plate located on its corresponding N-terminal capacitor plate is opposite to the direction of the second capacitor plate located on its corresponding P-terminal capacitor plate.

[0012] As a preferred embodiment of the anti-adhesion blocking component of the present invention, the movable component is a ring-shaped component, and elastic components are provided on both opposite sides of the inner side of the movable component, with the other end of the elastic component being fixedly connected to the supporting component.

[0013] As a preferred embodiment of the anti-adhesion blocking assembly described in this invention, two or an even number of blocking blocks are provided on the side of the movable part away from the elastic part, and the two or an even number of blocking blocks are symmetrically arranged on both sides of the axis of the elastic part along the axial direction of the elastic part.

[0014] Compared with the prior art, the technical solution of this patent has at least the following beneficial effects: This patent constructs a MEMS blocking structure, which consists of a limiting component and at least two levels of blocking blocks, namely a first blocking block and a second blocking block. The first blocking block is a non-elastic structure, and the second blocking block is an elastic structure.

[0015] When the MEMS moving structure undergoes large displacement, the limiting structure will collide with the blocking block and restrict the displacement of the moving block. The collision time of the first blocking block is before or equal to that of the second blocking block. Since the second blocking block is an elastic structure, it will not stop immediately. The moving block rotates slightly around the first blocking block as a fulcrum, using inertia to achieve a rolling peeling effect and reduce the probability of adhesion. On the other hand, the second blocking block absorbs kinetic energy and converts it into elastic potential energy, which is released when the moving block resumes its motion, further promoting the recovery and thus reducing the probability of adhesion.

[0016] Anti-adhesion blocking structures reduce device failures caused by adhesion and can be used in capacitive MEMS sensors.

[0017] The MEMS process flow of this invention only requires adjustment of the shape of the MEMS structure, without the need to introduce additional processing steps or materials.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] To more clearly illustrate the technical solution of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of a structure of an embodiment of the anti-adhesion blocking component described in this invention; Figure 2 This is a schematic diagram of another embodiment of the anti-adhesion blocking component described in this invention; Figure 3 This is a schematic diagram of a structure of an embodiment of the anti-adhesion blocking component described in this invention; Figure 4 This is a schematic diagram of another embodiment of the anti-adhesion blocking component described in this invention.

[0021] Among them, 1-support component, 2-elastic component, 3-movable component, 4-limiting component, 5-N-end capacitor component, 6-P-end capacitor component, 31-first blocking block, 32-second blocking block, 321-elastic component, 33-first capacitor plate, 34-second capacitor plate, 51-N-end capacitor plate, 61-P-end capacitor plate. Detailed Implementation

[0022] The embodiments of the present invention are described in detail below, providing a comprehensive overview and complete description of the technical solutions. Obviously, the described embodiments are merely a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0023] Please see Figure 1-4 ,like Figure 1-4 As shown, the present invention provides an anti-adhesion blocking component for MEMS sensors, comprising: Support component 1, wherein the support component 1 provides support; Elastic component 2, wherein one end of the elastic component 2 is fixedly disposed on the support component 1; The movable component 3 is fixedly connected to the other end of the elastic component 2, wherein the movable component 3 is provided with at least one blocking block, and the surface of the blocking block that contacts the limiting component 4 is an arc-shaped surface. The limiting component 4 is provided in opposition to the blocking block, and the limiting component 4 is spaced apart from the moving component 3.

[0024] When the sensor is working normally, the movable part 3 is connected to the support part 1 through the elastic part 2. When there is an external physical signal, the movable part responds to the physical signal and generates displacement. This displacement signal is converted into an electrical signal and output to the control system. The support part 1 provides support and potential connection for the movable part, and the elastic part 2 provides connection and restoring force for the movable part to ensure that the movable part returns to its original position after responding to the physical signal.

[0025] When the anti-adhesion blocking component is impacted, the moving part will undergo large displacement. The limiting component will collide with the blocking block and restrict its displacement. If the contact surface between the blocking block and the limiting component generates a surface adhesion force greater than the restoring force of the elastic component, the moving part will be unable to return to its original position. The surface of the blocking block adopts a non-rectangular arc-shaped structure, which facilitates rotation after the impact, resulting in a peeling effect and preventing the moving part from sticking to the limiting component and becoming unable to recover.

[0026] In a preferred embodiment, such as Figure 1-4 As shown, one or more blocking blocks are provided on the movable part 3, and a limiting part 4 is fixedly provided at the corresponding position of the blocking block. Preferably, the elastic part 2 and the blocking block are provided on opposite sides or inner and outer sides of the movable part 3, that is, the blocking block is provided on the side of the movable part 3 away from the elastic part.

[0027] Preferably, the blocking block includes at least one first blocking block 31 and / or at least one second blocking block 32, the second blocking block 32 being connected to the movable member 3 via an elastic member 321. More preferably, the movable member 3 has two or an even number of blocking blocks on the side away from the elastic member 2, symmetrically arranged on both sides of the axis of the elastic member 2. Figure 1 As shown, the two first blocking blocks 31 are symmetrically arranged on both sides of the axis of the elastic component 2. Figure 2-3 As shown, the first blocking block 31 and the second blocking block 32 are symmetrically arranged on both sides of the axis of the elastic component 2.

[0028] More preferably, the distance between the first blocking block 31 and the limiting component is less than or equal to the distance between the second blocking block 32 and the limiting component. When the MEMS moving structure undergoes a large displacement, the limiting component will collide with the blocking block and restrict the displacement of the moving component. The collision time of the first blocking block is earlier than or equal to the collision time of the second blocking block. Since the connection between the second blocking block and the elastic element does not stop immediately, the moving component rotates slightly around the first blocking block as a fulcrum, using inertia to achieve a rolling peeling effect to reduce the probability of adhesion. On the other hand, the second blocking block absorbs kinetic energy and converts it into elastic potential energy, which is released when the moving component resumes its movement, further promoting recovery and thus reducing the probability of adhesion.

[0029] Preferably, the surface of the movable component 3 has a groove, and the elastic element 321 is fixed in the groove. In the example, the width of the elastic element 321 is smaller than the width of the groove, and the groove does not affect the movement or rotation of the elastic element 321.

[0030] In a preferred embodiment, a plurality of elastic components 2 are provided on the support component 1.

[0031] In a preferred embodiment, a plurality of elastic components 2 are provided on the movable component 3, and the plurality of elastic components 2 are respectively connected to the same or different support components 1.

[0032] In a preferred embodiment, such as Figure 4 As shown, the side of the movable part 3 is also provided with an N-terminal capacitor 5 and a P-terminal capacitor 6, which are located on opposite sides of the outer surface or on opposite sides of the inner surface of the movable part 3.

[0033] Preferably, the N-terminal capacitor component 5 is provided with a plurality of N-terminal capacitor plates 51, which are arranged in parallel. The movable component 3 is also provided with a plurality of first capacitor plates 33 at positions corresponding to the N-terminal capacitor plates 51, and the plurality of first capacitor plates 33 are staggered with the plurality of N-terminal capacitor plates 51 in a one-to-one correspondence; and / or The P-end capacitor component 6 is provided with a plurality of P-end capacitor plates 61, which are arranged in parallel. The movable component 3 is also provided with a plurality of second capacitor plates 34 at the position corresponding to the P-end capacitor plates 61, and the plurality of second capacitor plates 34 are arranged alternately with the plurality of P-end capacitor plates 61 in a one-to-one correspondence.

[0034] In the example, "several" can be one or more.

[0035] More preferably, the direction of the first capacitor plate 33 on its corresponding N-terminal capacitor plate 51 is opposite to the direction of the second capacitor plate 34 on its corresponding P-terminal capacitor plate 61. That is, as shown... Figure 4 As shown, the direction in which the first capacitor plate 33 and the second capacitor plate 34 are parallel is set as the X direction, and the direction in which the first capacitor plate 33 and the second capacitor plate 34 are perpendicular is set as the Y direction. Each N-end capacitor plate 51 is located in the negative Y-axis direction of its corresponding first capacitor plate 33, and each P-end capacitor plate 61 is located in the positive Y-axis direction of its corresponding second capacitor plate 34.

[0036] like Figure 4 As shown, the movable component 3 is a ring-shaped component, and two elastic components 2 are provided on opposite sides of the inner side of the movable component 3. The other end of the elastic component is fixedly connected to the support component 1. In this example, there are also two support components 1, and each elastic component is connected to the corresponding support component 1.

[0037] Preferably, a first blocking block 31 and a second blocking block 32 are provided on the side of the movable component 3 away from the elastic component 2. Along the axial direction of the elastic component 2, the first blocking block 31 and the second blocking block 32 are located on both sides of the axis of the elastic component 2. In the example, the movable component 3 is an annular rectangular movable component. The elastic component 2 is provided on opposite sides of the inner side of the movable component 3. The other end of the elastic component is fixedly provided on the support component 1. A blocking block is provided on the outer side of the movable component 3 corresponding to the elastic component 2, including a first blocking block 31 and a second blocking block 32. The first blocking block 31 and the second blocking block 32 are provided at the corners of the movable component 3, and each blocking block is provided with a corresponding blocking component 4.

[0038] like Figure 4As shown, the first capacitor plate 33 is located on the negative Y-axis side of its corresponding N-end capacitor plate 51, and the second capacitor plate 34 is located on the positive Y-axis side of its corresponding P-end capacitor plate 61. When the movable part 3 undergoes a large displacement in the positive Y-axis direction, the first blocking block 31 will collide with the limiting part before the second blocking block 32. At this time, the distance between the N-end capacitor plate 51 and the first capacitor plate 33 decreases, and the electrostatic force between them increases. The distance between the P-end capacitor plate 61 and the second capacitor plate 34 increases, and the electrostatic force between them decreases. Under the action of inertia and unbalanced electrostatic force, the movable part 3 will rotate slightly clockwise. The electrostatic force and kinetic energy are converted into the elastic potential energy of the second blocking block 32, enhancing its recovery ability.

[0039] It should be noted that, unless otherwise specified, the features in the above embodiments or embodiments described herein can be combined.

[0040] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0041] Although embodiments of the invention have been shown and described above, it is to be understood that these embodiments are exemplary, and it will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An anti-adhesion blocking component for MEMS sensors, characterized in that, It includes: Support member (1), wherein the support member (1) provides support; An elastic component (2), wherein one end of the elastic component (2) is fixedly disposed on the support component (1); The movable component (3) is fixedly connected to the other end of the elastic component (2), wherein at least one blocking block is provided on the movable component (3), and the surface of the blocking block that contacts the limiting component (4) is an arc-shaped surface; The limiting component (4) is provided in relation to the blocking block, and the limiting component (4) and the moving component (3) are spaced apart.

2. The anti-adhesion blocking component according to claim 1, characterized in that, The blocking block includes at least one first blocking block (31) and at least one second blocking block (32), the second blocking block (32) being connected to the movable part (3) via an elastic member (321).

3. The anti-adhesion blocking component according to claim 2, characterized in that, The distance between the first blocking block (31) and the limiting component is less than or equal to the distance between the second blocking block (32) and the limiting component.

4. The anti-adhesion blocking component according to claim 1 or 2, characterized in that, The movable part (3) has a groove on its surface, and the elastic element (321) is fixed in the groove; and / or The elastic component (2) and the blocking block are disposed on opposite sides or inside and outside sides of the movable component (3).

5. The anti-adhesion blocking component according to claim 1, characterized in that, Multiple elastic components (2) are provided on the support component (1); and / or Multiple elastic components (2) are provided on the movable component (3), and the multiple elastic components (2) are respectively connected to the same or different support components (1).

6. The anti-adhesion blocking component according to claim 2, characterized in that, The side of the movable part (3) is also provided with an N-terminal capacitor (5) and a P-terminal capacitor (6), which are located on opposite sides of the outer surface or on opposite sides of the inner surface of the movable part (3).

7. The anti-adhesion blocking component according to claim 6, characterized in that, The N-terminal capacitor component (5) is provided with several N-terminal capacitor plates (51), which are arranged in parallel. The movable component (3) is also provided with several first capacitor plates (33) at positions corresponding to the N-terminal capacitor plates (51). The several first capacitor plates (33) are arranged alternately with the several N-terminal capacitor plates (51) in a one-to-one correspondence; and / or The P-end capacitor component (6) is provided with several P-end capacitor plates (61), which are arranged in parallel. The movable component (3) is also provided with several second capacitor plates (34) at the position corresponding to the P-end capacitor plates (61). The several second capacitor plates (34) are arranged alternately with the several P-end capacitor plates (61) in a one-to-one correspondence.

8. The anti-adhesion blocking component according to claim 7, characterized in that, The direction of the first capacitor plate (33) located on its corresponding N-terminal capacitor plate (51) is opposite to the direction of the second capacitor plate (34) located on its corresponding P-terminal capacitor plate (61).

9. The anti-adhesion blocking component according to claim 1, characterized in that, The movable component (3) is a ring-shaped component. Elastic components (2) are provided on both opposite sides of the inner side of the movable component (3). The other end of the elastic component is fixedly connected to the support component (1).

10. The anti-adhesion blocking component according to claim 1, characterized in that, Two or an even number of blocking blocks are provided on the side of the movable part (3) away from the elastic part (2). Along the axial direction of the elastic part (2), the two or an even number of blocking blocks are symmetrically arranged on both sides of the axis of the elastic part (2).

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