Vacuum transfer device adaptive to GatanPIPs system
By designing a suitable vacuum transfer device, the problems of oxidation and contamination during sample transfer were solved, achieving precise adaptation and real-time monitoring with the GatanPIPS system. This ensured the accuracy of TEM observations and sample safety, while reducing operational complexity and cost.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-01-07
- Publication Date
- 2026-04-03
AI Technical Summary
In existing technologies, samples thinned by the GatanPIPS system are prone to contact with oxygen, water vapor, and contaminants in the air during transfer, forming an oxide layer or adhering impurities. Furthermore, vacuum transfer devices cannot be precisely adapted to the GatanPIPS system, resulting in poor sealing performance and a lack of real-time vacuum monitoring, which affects the accuracy of TEM observations and sample safety.
A vacuum transfer device adapted to the GatanPIPS system was designed, including a vacuum box body, an adapter interface component, a sample carrier component, a sealing cover and a cap. The locking thread and the sealing cover are matched to ensure accurate adaptation with the GatanPIPS system. The vacuum level is monitored in real time and seamlessly sealed by the observation window and vacuum gauge to avoid sample oxidation and contamination.
It achieves vacuum sealing protection during sample transfer, avoiding oxidation contamination, ensuring the accuracy of TEM observation and sample safety, while simplifying the operation process, reducing manufacturing costs, and making it suitable for large-scale laboratory applications.
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Figure CN121778320A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of sample preparation technology for material testing, specifically a vacuum transfer device adapted to the GatanPIPs system. Background Technology
[0002] In research fields such as materials science and microelectronics, TEM observation is a core method for analyzing the microstructure of materials, and the quality of sample preparation directly determines the accuracy of the observation results. The GatanPIPS argon ion thinner is currently the mainstream TEM sample thinning device. It achieves high-precision sample thinning by bombarding the sample surface with argon ions, meeting the sample thickness requirements of TEM observation.
[0003] However, existing technologies for sample transfer after thinning using the GatanPIPS system have significant drawbacks: First, traditional transfer methods require removing the sample from the vacuum chamber of the GatanPIPS system, exposing it to the atmosphere, and then transferring it to the TEM stage. During this process, the sample surface is easily exposed to oxygen, water vapor, and pollutants in the air, forming an oxide layer or adhering impurities. This is especially problematic for nanoscale, highly reactive materials (such as metal nanoparticles and graphene-based composites), where oxidation and contamination are more pronounced, directly leading to artifacts during TEM observation and affecting the accuracy of microstructure analysis. Second, existing vacuum transfer devices are mostly general-purpose structures that cannot be precisely adapted to the vacuum interface of the GatanPIPS system, resulting in poor sealing performance and a tendency for vacuum leaks during transfer, which also leads to sample contamination. Third, existing devices lack real-time vacuum monitoring capabilities, making it impossible to detect vacuum leaks in a timely manner. Once a leak occurs, operators cannot address it immediately, further increasing the risk of sample damage. Fourth, some dedicated transfer devices have complex structures, are cumbersome to operate, and have high manufacturing costs, hindering large-scale laboratory applications.
[0004] Currently, industry solutions to these problems are limited: some laboratories use glove boxes for sample transfer, but glove boxes are bulky, lack operational flexibility, and cannot directly interface with the GatanPIPS system, still posing a risk of sample exposure; a few customized transfer devices only focus on improving the sealing structure, failing to address interface compatibility and real-time vacuum monitoring issues, resulting in poor overall performance. Therefore, developing a highly adaptable, reliably sealed, real-time monitoring, and easy-to-operate vacuum transfer device has become a key requirement for addressing the pain points of existing technologies. Summary of the Invention
[0005] To address the shortcomings of existing technologies, this invention provides a vacuum transfer device adapted to the GatanPIPS system, which solves at least one of the following problems: sample surfaces are easily exposed to oxygen, water vapor and contaminants in the air, forming an oxide layer or adhering impurities; the device cannot be accurately adapted to the vacuum interface of the GatanPIPS system, resulting in poor sealing performance; and the device lacks real-time vacuum monitoring functionality.
[0006] To achieve the above objectives, the present invention provides the following technical solution: a vacuum transfer device adapted to the GatanPIPS system, comprising a vacuum chamber body, an adapter interface assembly, a sample carrying assembly, a sealing cover, and a cap. The vacuum chamber body has a hollow cavity structure to provide a vacuum environment for sample transfer. The adapter interface assembly is located at one end of the vacuum chamber body and includes a sealing wall of the sealing cover. The sealing wall matches the gas-lock cover body and gas-lock cover sealing ring of the GatanPIPS system. The gas-lock cover body has an annular groove, and a sealing gasket is disposed within the annular groove. The cover is fitted to the outer wall of the airlock sealing ring. The sample carrying assembly is located inside the vacuum chamber body and includes a sample base, a base body, and an O-ring. The O-ring is located on the outer wall of the base body. The edge platform of the base body surface fits into the limiting boss of the sealing cover. The sealing cover has an observation window, a sliding sealing inner wall, a locking thread, and a limiting boss inside. The cap is made of acrylic material and includes a locking thread, a limiting platform, and a ventilation hole. The thread of the cap engages with the locking thread of the sealing cover to lock it in place. The GatanPIPS system has a working chamber inside.
[0007] The above technical solution achieves precise compatibility between the overall structure and the GatanPIPS system by locking the screw thread and sealing cap, ensuring assembly stability through the limiting platform, and using the vent hole for gas replacement. This ensures vacuum sealing protection during sample transfer, effectively preventing sample oxidation and contamination, and improving operational convenience and versatility.
[0008] Preferably, the sliding sealing inner wall is in contact with the inner wall of the vacuum box body, and the outer wall of the O-ring is in contact with the inner wall of the vacuum box body, which is used to enhance the stability of the sample body after placement and the local sealing of the sealed chamber.
[0009] Preferably, the sample base is detachably connected to the base body, and the O-ring is used to enhance the stability and local sealing of the sample body after it is placed.
[0010] Preferably, the limiting platform of the cap is used to limit the downward pressure position of the sealing cap to ensure assembly stability.
[0011] Preferably, the locking thread inside the sealing cover has a fixed length to limit the locking position, and the limiting boss is used to limit the position of the sample base to prevent excessive compression of the sample body and damage.
[0012] Preferably, the vacuum box body, sealing cover, sample base, and cap cooperate to form an integrated protective structure. The sample base can be vertically placed inside the sample stage of the GatanPIPS system, and the bottom of the sample base is in contact with the sample stage.
[0013] Working Principle: The sample is loaded onto a dedicated sample base, which is then vertically placed onto the sample stage of the argon ion thinner. The sample base is gently pressed to confirm proper placement. Once in place, the bottom of the sample base adheres to the sample platform, and the sealing cover and the airlock cover of the argon ion thinner are tightly sealed together using a sealing ring interface. Next, the Vac button is pressed to evacuate the airlock chamber of the argon ion thinner. The vacuum level inside the chamber is monitored using a vacuum gauge until the preset vacuum level is reached, at which point the vacuum indicator light illuminates. The sealing cover is then pressed, and the AirLockcontrol button is pressed and rotated to the "Lower" position until the sample platform descends. The pressure is then released. The argon ion thinner is then operated to transfer the thinned sample to the sample carrier component inside the vacuum chamber. The AirLockcontrol button is pressed again until the sample stage is fully raised. The sealing cover is then pressed, and the Vent button is pressed to release pressure. The vacuum chamber sealing cover is then vertically removed. At this point, the sample and sample base are adsorbed onto the sealing cover due to negative pressure. This separates the device from the argon ion thinner. The sample base and the sealing cover of the sample are then removed. After screwing on the vacuum box cap, store the device and then take it to the transmission electron microscope or other testing equipment. Open the sealing cap assembly and transfer the sample to the testing equipment under vacuum protection to complete the entire sample transfer process. During this process, the vacuum box body has a hollow cavity structure, which can provide a vacuum transfer environment. The adapter interface assembly is precisely matched with the gas lock cap and gas lock cap sealing ring of the GatanPIPS system (argon ion thinner) through the sealing wall of the sealing cap. The annular groove inside the gas lock cap is embedded with a fluororubber sealing gasket to achieve a seamless sealing connection. The sample carrying assembly consists of a sample base, a base body, and an O-ring. The edge platform of the base body fits and is positioned with the limiting boss of the sealing cap. The sealing cap is equipped with an observation window, a sliding sealing inner wall, a locking thread, and a limiting boss. The cap is locked to the sealing cap through the locking thread. The limiting platform ensures assembly stability. The vent is used for gas replacement. The whole device can be precisely adapted to the GatanPIPS system, ensuring vacuum sealing protection for sample transfer, avoiding sample oxidation and contamination, and improving the ease of operation and versatility.
[0014] This invention provides a vacuum transfer device adapted to the GatanPIPs system. It offers the following advantages: 1. This invention, through a customized adapter interface component, can achieve precise adaptation of the vacuum interface with the GatanPIPs system, ensuring seamless connection between the transfer device and the original system and avoiding vacuum leakage during the connection process.
[0015] 2. This invention achieves a completely high-vacuum environment during sample transfer through a staged vacuum module, avoiding contact with the atmosphere and effectively ensuring the accuracy of microstructure analysis.
[0016] 3. This invention, through real-time vacuum monitoring and alarm functions, can promptly detect vacuum leaks and ensure the safety of sample transfer.
[0017] 4. This invention simplifies the device structure, improves ease of operation, reduces manufacturing costs, and meets the needs of large-scale laboratory applications. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the sample carrier component structure of the present invention; Figure 3 This is a schematic diagram showing the docking status of the present invention with the GatanPIPs system; Figure 4 This is a schematic diagram of the sealing sampling method of the present invention; Figure 5 This is a schematic diagram of the overall assembled and stored state of the present invention; Figure 6 This is a schematic diagram of the sealing cap of the present invention; Figure 7 This is a schematic diagram of the observation window of the present invention; Figure 8 This is a schematic diagram of the O-ring of the present invention.
[0019] The components include: 1. Sealing cap; 2. Sample base; 3. Cap; 4. Base body; 5. O-ring; 6. Sample body; 7. Airlock cap body; 8. Airlock cap sealing ring; 9. Sample stage; 10. Working chamber; 11. Locking thread; 12. Limiting boss; 13. Sliding sealing inner wall; 14. Observation window; 15. Ventilation hole; 16. Limiting platform. Detailed Implementation
[0020] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0021] Please see the appendix Figure 1 -Appendix Figure 8 This invention provides a vacuum transfer device adapted to the GatanPIPS system, including a vacuum chamber body, an adapter interface assembly, a sample carrier assembly, a sealing cover 1, and a cap 3. The vacuum chamber body has a hollow cavity structure to provide a vacuum environment for the transfer of the sample body 6. The adapter interface assembly is located at one end of the vacuum chamber body and includes a sealing wall of the sealing cover 1. The sealing wall matches the gas lock cover body 7 and the gas lock cover sealing ring 8 of the GatanPIPS system. The gas lock cover body 7 has an annular groove, and a sealing gasket is placed in the annular groove. The sealing cover 1 is attached to the outer wall of the gas lock cover sealing ring 8. The carrier assembly is located inside the vacuum chamber body, including a sample base 2, a base body 4, and an O-ring seal 5. The O-ring seal 5 is located on the outer wall of the base body 4. The edge platform of the base body 4 is in contact with the limiting boss 12 of the sealing cover 1. The sealing cover 1 is provided with an observation window 14, a sliding sealing inner wall 13, a locking thread 11, and a limiting boss 12. The cap 3 is made of acrylic material and includes a locking thread 11, a limiting platform 16, and a ventilation hole 15. The thread of the cap 3 is engaged with the locking thread 11 of the sealing cover 1 to lock it in place. The GatanPIPS system has a working chamber 10 inside.
[0022] Specifically, the vacuum box body has a hollow cavity structure to provide a vacuum transfer environment. The adapter interface component is precisely matched with the gas lock cover body 7 and gas lock cover sealing ring 8 of the GatanPIPS system (argon ion thinner) through the sealing wall of the sealing cover 1. The sealing gasket is embedded in the annular groove in the gas lock cover body 7 to achieve seamless sealing. The sealing gasket is made of fluororubber. The sample carrying component consists of sample base 2, base body 4 and O-ring 5. The edge platform of the base body 4 fits and is positioned with the limiting boss 12 of the sealing cover 1. The sealing cover 1 integrates an observation window 14, a sliding sealing inner wall 13, a locking thread 11 and a limiting boss 12. The cap 3 is made of acrylic and is locked with the sealing cover 1 through the locking thread 11. The limiting platform 16 ensures assembly stability. The vent 15 is used for gas replacement. This achieves precise matching between the overall structure and the GatanPIPS system, ensures vacuum sealing protection during sample transfer, effectively avoids sample oxidation and contamination, and improves the ease of operation and versatility.
[0023] Please see the appendix Figure 1 -Appendix Figure 8The sliding sealing inner wall 13 fits against the inner wall of the vacuum box body, and the outer wall of the O-ring 5 fits against the inner wall of the vacuum box body to enhance the stability of the sample body 6 after placement and the local sealing of the sealed chamber; the sample base 2 is detachably connected to the base body 4, and the O-ring 5 is used to enhance the stability of the sample body 6 after placement and the local sealing; the limiting platform 16 of the cap 3 is used to limit the downward pressure position of the sealing cover 1 to ensure assembly stability; the locking thread 11 inside the sealing cover 1 has a fixed length to limit the locking position, and the limiting boss 12 is used to limit the position of the sample base 2 to prevent excessive compression of the sample body 6 and damage; the vacuum box body, the sealing cover 1, the sample base 2 and the cap 3 cooperate to form an integrated protective structure, and the sample base 2 can be vertically placed into the sample stage 9 of the GatanPIPS system, and the bottom of the sample base 2 fits against the sample stage 9.
[0024] Specifically, the sliding sealing inner wall 13 is polished and coated with vacuum grease, forming a tight seal with the inner wall of the vacuum box body. The O-ring 5 is 8x1.0mm in size, and its outer wall fits seamlessly with the inner wall of the vacuum box body, enhancing the stability of the sample body 6 after placement and improving the local sealing of the sealed chamber. The sample base 2 and the base body 4 are detachably connected, allowing for the replacement of suitable sample base 2 according to different sizes and shapes of the sample body 6. Combined with the sealing effect of the O-ring 5, this further ensures the stability and sealing of the sample body 6 during transfer. The limiting platform 16 of the cap 3 precisely aligns with the end face of the sealing cap 1. When the cap 3 passes through... When the locking thread 11 is locked to the sealing cover 1, the limiting platform 16 directly restricts the downward stroke of the sealing cover 1 to avoid structural damage caused by over-assembly and ensure the overall assembly stability. The locking thread 11 on the inner side of the sealing cover 1 is set with a fixed length. During assembly, the locking position is restricted by the thread engagement. At the same time, the limiting boss 12 inside the sealing cover 1 fits against the edge platform of the base body 4, thereby limiting the sample base 2 and preventing damage caused by excessive squeezing of the sample body 6 due to improper operation. By vertically placing the sample base 2 into the sample stage 9 of the GatanPIPS system and having its bottom fit against the sample stage 9, the structural stability and vacuum sealing after docking are ensured.
[0025] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A vacuum transfer device adapted to the GatanPIPs system, comprising a vacuum chamber body, an adapter interface assembly, a sample carrier assembly, a sealing cap (1), and a cap (3), characterized in that: The vacuum chamber body is a hollow cavity structure used to provide a vacuum environment for the transfer of the sample body (6). The adapter interface assembly is located at one end of the vacuum chamber body, including the sealing wall of the sealing cover (1). The sealing wall matches the gas lock cover body (7) and the gas lock cover sealing ring (8) of the GatanPIPS system. The gas lock cover body (7) is provided with an annular groove, and a sealing gasket is provided in the annular groove. The sealing cover (1) is attached to the outer wall of the gas lock cover sealing ring (8). The sample carrying assembly is located inside the vacuum chamber body, including the sample base (2), the base body (4), and the O-ring (5). A sealing ring (5) is set on the outer wall of the base body (4). The edge platform of the base body (4) is in contact with the limiting boss (12) of the sealing cover (1). The sealing cover (1) is provided with an observation window (14), a sliding sealing inner wall (13), a locking thread (11) and a limiting boss (12). The cap (3) is made of acrylic material and includes a locking thread (11), a limiting platform (16) and a ventilation hole (15). The thread of the cap (3) is engaged with the locking thread (11) of the sealing cover (1) and locked. The GatanPIPS system has a working chamber (10) inside.
2. The vacuum transfer device adapted to the GatanPIPs system according to claim 1, characterized in that: The sliding sealing inner wall (13) is in contact with the inner wall of the vacuum box body, and the outer wall of the O-ring (5) is in contact with the inner wall of the vacuum box body, which is used to enhance the stability of the sample body (6) after placement and the local sealing of the sealed chamber.
3. The vacuum transfer device adapted to the GatanPIPs system according to claim 1, characterized in that: The sample base (2) is detachably connected to the base body (4), and the O-ring (5) is used to enhance the stability and local sealing of the sample body (6) after placement.
4. The vacuum transfer device adapted to the GatanPIPs system according to claim 1, characterized in that: The limiting platform (16) of the cap (3) is used to limit the downward pressure position of the sealing cap (1) to ensure assembly stability.
5. The vacuum transfer device adapted to the GatanPIPs system according to claim 1, characterized in that: The locking thread (11) inside the sealing cover (1) has a fixed length and is used to limit the locking position. The limiting boss (12) is used to limit the position of the sample base (2) to prevent excessive compression of the sample body (6) and damage.
6. The vacuum transfer device adapted to the GatanPIPs system according to claim 1, characterized in that: The vacuum box body, sealing cover (1), sample base (2) and cap (3) cooperate to form an integrated protective structure. The sample base (2) can be vertically placed inside the sample stage (9) of the GatanPIPS system, and the bottom of the sample base (2) is in contact with the sample stage (9).