Air exhaust assembly and semiconductor thin film deposition equipment

Abstract

The embodiment of the invention provides an air exhaust assembly and semiconductor thin film deposition equipment. The air exhaust assembly comprises a first body and a second body, the first body is provided with a ring body, and the ring body is provided with a first gap extending in the circumferential direction of the ring body; the second body is formed by splicing a plurality of sliding blocks in the circumferential direction of the ring body; the sliding blocks are detachably arranged on the ring body, and each sliding block is provided with a thickness direction limited in the radial direction of the ring body and a width direction limited in the circumferential direction of the ring body; wherein two adjacent sliding blocks jointly define an air exhaust hole in a spliced state, the air exhaust hole is a first air exhaust hole or a second air exhaust hole, the opening area of the first air exhaust hole is smaller than that of the second air exhaust hole, and the air exhaust hole penetrates through the thickness direction of the first sliding block and is communicated with the first gap; and / or the two adjacent sliding blocks do not form the air exhaust hole in the spliced state.

Description

Technical Field

[0001] This application relates to the field of semiconductor thin film deposition technology, and more specifically, to a vacuum assembly and a semiconductor thin film deposition apparatus. Background Technology

[0002] In semiconductor device manufacturing, chemical vapor deposition (CVD) is used to prepare polycrystalline silicon (POLY) thin films. It involves the chemical deposition of reactive gases (such as silane gases) on the substrate surface to form a thin film that meets device performance requirements. The uniformity of the film thickness affects the electrical performance and reliability of the device, while the spatial distribution of the flow field within the reaction chamber influences the film uniformity.

[0003] To improve the uniformity of the airflow field in the reaction chamber, existing technologies typically incorporate an air extraction ring with extraction holes on the sidewall of the CVD reaction chamber. Reducing the number of extraction holes by plugging them attempts to improve the uniformity of the airflow field. However, existing technologies cannot flexibly adjust the size and number of extraction holes (by increasing the number of extraction holes), making it difficult to match the different extraction requirements of different areas (such as the area near the wafer transfer channel versus the conventional area) and different process types (such as low-pressure processes requiring weak air extraction uniformity adjustment, and atmospheric pressure processes requiring strong air extraction disturbance suppression).

[0004] In view of this, it is necessary to provide a new technical solution to solve the above-mentioned technical defects in the existing technology. Summary of the Invention

[0005] The purpose of this application is to provide a vacuum assembly and a semiconductor thin film deposition apparatus.

[0006] According to a first aspect of this application, a vacuum assembly is provided. The vacuum assembly includes: A first body, the first body having a ring body, the ring body being provided with a first slit extending circumferentially thereon; The second body is formed by splicing together multiple sliders along the circumference of the ring body; In the second body, each of the sliders is detachably disposed on the ring body, and each slider has a thickness direction defined radially along the ring body and a width direction defined circumferentially along the ring body; wherein, When two adjacent sliders are joined together, they form an air extraction hole. The air extraction hole is either a first air extraction hole or a second air extraction hole. The opening area of ​​the first air extraction hole is smaller than the opening area of ​​the second air extraction hole. The air extraction hole extends through the thickness direction of the first slider and is connected to the first gap. Or, when two adjacent sliders are joined together, the air extraction hole is not formed.

[0007] Optionally, the second body includes at least: A plurality of first sliders, each first slider having a splicing surface formed at both ends along its width direction, and at least one of the splicing surfaces having a recessed portion.

[0008] Optionally, the second body further includes at least: a plurality of second sliders, each of the second sliders having splicing surfaces formed at both ends along its width direction, and neither splicing surface of the second slider having the recessed portion; The first slider and the second slider are joined together to form the second body.

[0009] Optionally, the second body further includes at least a plurality of third sliders; Each of the third sliders has a through-hole along its thickness direction, and the third air extraction hole is connected to the first gap. The assembly method of the second body can be selected from any of the following: The third slider is spliced ​​with the first slider and / or the second slider along the circumferential direction of the ring body; The third slider is spliced ​​along the circumference of the ring body.

[0010] Optionally, the plurality of sliders may include at least two sets of sliders with different width dimensions.

[0011] Optionally, the ring body is provided with a second slit extending circumferentially thereon, and the second slit and the first slit are spaced apart along the axial direction of the ring body; Each of the sliders has a first surface facing away from the inner side of the ring body, and the first surface is provided with a mounting part, which is detachably embedded in the second gap.

[0012] Optionally, the ring body is provided with two second gaps, and the first gap is located between the two second gaps; The first surface is provided with two mounting parts, each of which is detachably embedded in the corresponding second gap.

[0013] Optionally, the second gap includes a first half-ring and a second half-ring, which are spaced apart in the circumferential direction.

[0014] Optionally, the slider has two mounting portions along its width direction, and the spacing between the first half-ring and the second half-ring is smaller than the width of the slider. One of the two mounting parts is disposed in the first half-ring, and the other mounting part is disposed in the second half-ring.

[0015] Optionally, the slider includes a first body and a second body arranged in a staggered manner along its width direction, wherein the surface of the first body facing the second body is a first splicing surface, and the surface of the second body facing the first body is a second splicing surface.

[0016] Optionally, the slider includes a first slider, and both splicing surfaces of the first slider are provided with recessed portions. The two recessed portions are recessed towards the height direction of the first slider, and the two recessed directions are opposite.

[0017] According to a second aspect of this application, a semiconductor thin film deposition apparatus is provided. The semiconductor thin film deposition apparatus includes a vacuum assembly as described in the first aspect.

[0018] One technical advantage of this application is: In the technical solution provided by this application embodiment, compared with the prior art method of achieving differentiated air extraction by blocking part of the air extraction holes, the air extraction component of this embodiment can not only flexibly adjust the number of effective air extraction holes by detachable arrangement of sliders, but also indirectly adjust the hole diameter and distribution density of air extraction holes by replacing sliders with different widths and different splicing end face shapes (adjusting the slider width). It has stronger adaptability and can simultaneously meet the differentiated air extraction needs of different regions and different processes, effectively solving the problem of insufficient control flexibility in the prior art.

[0019] Other features and advantages of this specification will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0020] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of this specification and, together with their description, serve to explain the principles of this specification.

[0021] Figure 1a The diagram shown is a partial structural diagram of the semiconductor thin film deposition apparatus provided in an embodiment of this application.

[0022] Figure 1b The image shown is a partial enlarged view of the structure of the second body in Figure 1.

[0023] Figure 2 The diagram shown is a structural diagram of the first body provided in an embodiment of this application.

[0024] Figure 3 The diagram shown is a structural diagram of the slider disposed on the first body according to an embodiment of this application.

[0025] Figure 4 The diagram shown is a partial structural diagram of a second body provided in an embodiment of this application.

[0026] Figure 5 The diagram shown is a partial structural diagram of another second body provided in an embodiment of this application.

[0027] Figure 6 The diagram shown is a structural diagram of an air extraction component provided in an embodiment of this application.

[0028] Figure 7 The diagram shown is a structural diagram of a first slider provided in an embodiment of this application.

[0029] Figure 8 The diagram shown is a structural diagram of a second slider provided in an embodiment of this application.

[0030] Figure 9 The diagram shown is a structural diagram of a third slider provided in an embodiment of this application.

[0031] Explanation of reference numerals in the attached figures: 1. First body; 11. Ring body; 12. First gap; 13. Second gap; 131. First half-ring; 132. Second half-ring; 2. Second body; 20. Slider; 21. First slider; 22. Second slider; 23. Third slider; 200. Recessed portion; 201. Air extraction hole; 202. First air extraction hole; 203. Second air extraction hole; 204. First splicing surface; 205. Second splicing surface; 206. Mounting part; 207. Third air extraction hole; Detailed Implementation Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0032] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the scope of this application and its application or use.

[0033] Technologies and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies and equipment should be considered part of the specification.

[0034] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0036] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0037] To achieve automated substrate transfer in various chemical vapor deposition (CVD) reaction chambers, a substrate transfer channel is required. This channel includes substrate inlet / outlet channels, robotic arm movement channels, and substrate support structure clearance channels. Since the temperature in the transfer channel area is lower than in other areas of the chamber, to reduce the airflow in this area (airflow carries away heat, further exacerbating the temperature drop), and to control the temperature in the transfer channel area, the evacuation ports for that area are typically configured differently.

[0038] In existing technologies, to achieve differentiated settings for the evacuation holes corresponding to the film transfer channel area, it is common to block some evacuation holes to reduce the number of evacuation holes in that area. However, this method has obvious drawbacks: it cannot flexibly adjust key parameters such as the aperture size and distribution density of the evacuation holes, which makes it difficult to adapt to the different evacuation requirements of different areas (such as the adjacent area of ​​the film transfer channel and the conventional area of ​​the chamber). At the same time, it cannot meet the differentiated evacuation requirements of different process types (for example, the weak evacuation uniformity adjustment requirement required for low-pressure processes and the strong evacuation disturbance suppression requirement required for atmospheric pressure processes).

[0039] Based on this, embodiments of this application provide a vacuum assembly. The vacuum assembly is disposed on the side wall of the reaction chamber. Specifically, when the wafer chuck moves to a preset working position, the vacuum assembly is located on the outer periphery of the wafer chuck to ensure that the vacuuming action directly acts on the circumferential airflow field of the wafer deposition area.

[0040] This application improves the structure of the extraction component, enabling the number of extraction holes, the opening area (size of the extraction holes), and the density of the extraction holes to be selectively adjusted according to the circumferential flow field distribution requirements of the CVD reaction chamber. This allows for regional control of the circumferential extraction flow field of the reaction chamber, thereby improving the problem of film edge deviation in POLY films.

[0041] Specifically, refer to Figures 1a-6 The air extraction assembly includes: a first body 1, the first body 1 having a ring body 11, the ring body 11 being provided with a first slit 12 extending circumferentially thereon; The second body 2 is formed by splicing together a plurality of sliders 20 along the circumference of the ring body 11; each slider 20 is detachably disposed on the ring body 11, and each slider 20 has a thickness direction defined radially along the ring body 11 and a width direction defined circumferentially along the ring body 11; wherein, In the second body 2, two adjacent sliders 20 together form an air extraction hole 201 when spliced. The air extraction hole 201 is either a first air extraction hole 202 or a second air extraction hole 203. The opening area of ​​the first air extraction hole 202 is smaller than the opening area of ​​the second air extraction hole 203. The air extraction hole 201 extends through the thickness direction of the first slider 21 and is connected to the first gap 12. And / or two adjacent sliders 20 do not form the air extraction hole 201 when spliced.

[0042] In the second body 2, the number, density and total opening area of ​​the effective air extraction holes 201 in different circumferential regions of the air extraction component can be adjusted by selectively adjusting the circumferential arrangement of any slider 20.

[0043] Reference Figure 1a and Figure 1b , Figure 3 and Figure 6 The air extraction assembly includes a first body 1 and a second body 2. The first body 1 is the basic load-bearing structure of the air extraction assembly. It can be connected to the CVD reaction chamber structure by bolts or other fastening methods to ensure the structural stability during the air extraction process.

[0044] The second body 2 is an air extraction function adjustment structure, which is detachably assembled to the first body 1 to realize flexible adjustment of the number, density and total opening area of ​​the air extraction holes 201, and adapt to the flow field adjustment needs of different areas.

[0045] Reference Figure 2 The first body 1 has an integrally formed ring body 11, which is a circular ring structure (adapted to the cross-sectional shape of a circular CVD reaction chamber; if the reaction chamber is square, it can be set as a square ring, both of which are within the protection scope of this application), and its axis coincides with the central axis of the CVD reaction chamber.

[0046] In some embodiments, the first body 1 includes a flanged portion located on the upper surface of the ring body 11. The flanged portion is connected to the reaction chamber structure by bolts or other fastening methods when the air extraction assembly is disposed in the reaction chamber.

[0047] In this embodiment, the ring body 11 has a first slit 12 extending in the circumferential direction. The first slit 12 is configured as the air extraction port of the air extraction assembly, and its cross-sectional shape includes a rectangular groove or other geometric shape. When the second body 2 is assembled on the first body 1, the air extraction hole 201 formed by the slider 20 corresponds to and communicates with the first slit 12.

[0048] Refer to 4 and Figure 5 The second body 2 is a ring-shaped structure formed by splicing multiple sliders 20 along the circumference of the ring body 11. For example, multiple sliders 20 are closely laid out and spliced ​​end to end to form a ring-shaped structure.

[0049] In this embodiment, the slider 20 can be a cuboid block structure with a thickness direction set radially along the ring body 11, a width direction set circumferentially along the ring body 11, and a height direction set axially along the ring body 11. The height dimension of the slider 20 is consistent with the axial height of the ring body 11, ensuring that the second body 2 forms a flat annular structure with the first body 1 after assembly. Each slider 20 is detachably connected to the ring body 11, specifically through snap-fit ​​connections or shaft-hole fittings.

[0050] In this embodiment, the second body 2 is composed of multiple sliders 20. When two adjacent sliders 20 are joined circumferentially, they form a suction-related structure through the cooperation of their joining end faces. Specifically, there are two cooperation scenarios, and both scenarios can exist simultaneously in different circumferential regions of the same second body 2. Alternatively, only scenario one may exist in different circumferential regions of the second body 2.

[0051] Scenario 1: A gap is reserved between the splicing end faces of two adjacent sliders 20, and this gap together forms an air extraction hole 201. The air extraction hole 201 is arranged through the thickness direction of the slider 20, so that airflow can pass through the air extraction hole 201 and then connect with the first gap 12 of the first body 1, ultimately realizing the air extraction function.

[0052] Based on the gap shape and enclosure state of the splicing end faces, the air extraction hole 201 can be divided into two types: the first air extraction hole 202 and the second air extraction hole 203. The second air extraction hole 203 is formed by the splicing end faces of the two sliders 20. For example, the second air extraction hole 203 can be a circular air extraction hole, a rectangular air extraction hole, etc.

[0053] The first air extraction hole 202 is formed by the joint end faces of two sliders 20, and can be adapted to the weak air extraction needs of a specific area. For example, the first air extraction hole 202 can be a semi-circular air extraction shape.

[0054] It should be noted that, Figure 1a , Figure 1b ,and Figure 3 The diagram illustrates the specific structures of different types of extraction ports 201, including a second extraction port 203 and a first extraction port 202. Figure 4 The middle section shows the spliced ​​state of the second air extraction port 203.

[0055] In this case, by selectively adjusting the arrangement position of any slider 20, the number, density and total opening area of ​​the first air extraction hole 202 and / or the second air extraction hole 203 in different circumferential regions can be adjusted to adapt to the flow field adjustment requirements of different regions.

[0056] Scenario 2: The splicing end faces of two adjacent sliders 20 are tightly fitted, and the aforementioned air extraction hole 201 is not formed. In this case, no airflow passes through the splicing area, that is, this area is a closed area without air extraction function. Figure 1, point A shows the case where the aforementioned air extraction hole 201 is not formed by splicing two adjacent sliders 20.

[0057] When both Situation 1 and Situation 2 exist in the second body 2, the number, density and total opening area of ​​the first air extraction hole 202 and / or the second air extraction hole 203 in different circumferential regions can be adjusted by selectively adjusting the arrangement position of any slider 20. Of course, the area of ​​the formed closed region can also be adjusted to adapt to the flow field adjustment requirements of different regions.

[0058] In this embodiment, by adjusting the circumferential arrangement of the slider 20, the number, density, and total opening area of ​​the effective air extraction holes 201 in different circumferential regions of the air extraction component can be flexibly controlled.

[0059] The specific adjustment process is as follows: Since each slider 20 is detachably assembled to the ring body 11, the arrangement position of any slider 20 in the circumference of the ring body 11 can be selectively changed according to the different circumferential area requirements of the CVD reaction chamber (such as the film transfer channel area and the conventional area).

[0060] For example, for the low-temperature transfer channel area, the adjacent sliders 20 corresponding to this area can be adjusted to a "tightly fitted" splicing state (i.e., scenario two), or adjusted to splice to form a smaller number of small-diameter air extraction holes 201 (such as the first air extraction hole 202), thereby reducing the number, density and total opening area of ​​the effective air extraction holes 201 in this area, reducing the air flow rate, and avoiding excessive heat loss by the airflow, which would cause the temperature in this area to drop further, thus achieving indirect control of the temperature in the transfer channel area.

[0061] For the conventional area of ​​the chamber (non-transfer channel area), the adjacent sliders 20 corresponding to this area can be adjusted to form a larger number of air extraction holes 201 with larger apertures (such as the second air extraction hole 203) to ensure the air extraction efficiency of this area and meet the air extraction requirements of conventional processes.

[0062] In addition, this adjustment method can also adapt to the evacuation requirements of different process types: for example, for different CVD process requirements, by adjusting the arrangement of the sliders 20 in the local area, the number of effective evacuation holes 201, the opening area of ​​the effective evacuation holes 201, or the density of the evacuation holes 201 in the local area can be adjusted to meet the evacuation requirements of different process types.

[0063] In a further embodiment, the plurality of sliders 20 includes at least two sets of sliders 20 with different widths. This allows the second body 2 to be formed by selectively choosing sliders 20 with different widths and splicing them circumferentially along the ring body 11. That is, when the plurality of sliders 20 includes at least two sets of sliders 20 with different widths, the number, density, and total opening area of ​​the effective air extraction holes 201 in different circumferential regions of the air extraction assembly can be adjusted by changing the total number of sliders 20 and the arrangement of each slider 20.

[0064] In this embodiment, the plurality of sliders 20 includes at least two groups of sliders 20 with different width dimensions. The sliders 20 in the same group have the same width dimension along the circumference of the ring body 11, while the sliders 20 in different groups have different width dimensions along the circumference of the ring body 11. All sliders 20 (including the first slider 21, the second slider 22, and the third slider 23 mentioned below) are divided into multiple groups according to their width specifications.

[0065] In this embodiment, the design of sliders 20 with different widths essentially adds a "width adjustment" dimension to the existing "quantity adjustment" and "position adjustment" dimensions. Using narrow-width sliders 20 increases the number of sliders 20 available; for example, it increases the number of first and third suction holes 202 and 203, thereby increasing the number and density of suction holes 201 and strengthening the suction intensity in that area. Conversely, using wide sliders 20 reduces the number of sliders 20 available, thereby decreasing the number and density of suction holes 201 and weakening the suction intensity in that area.

[0066] In this embodiment, by selectively using narrow-width or wide-width sliders 20, the number and density of air extraction holes 201 in the corresponding area can be precisely adjusted, thereby achieving circumferential zone control of the air extraction component.

[0067] In this embodiment, compared to the prior art method of achieving differentiated air extraction by blocking some air extraction holes, the air extraction component of this embodiment, through the detachable arrangement and adjustment of the sliders 20, can not only flexibly adjust the number of effective air extraction holes 201, but also indirectly adjust the hole diameter and distribution density of the air extraction holes 201 by replacing sliders 20 with different widths and different splicing end face shapes (adjusting the width of the sliders 20). It has stronger adaptability and can simultaneously meet the differentiated air extraction needs of different regions and different processes, effectively solving the problem of insufficient control flexibility in the prior art.

[0068] In one specific embodiment, the second body 2 includes at least a plurality of first sliders 21, each of which has a splicing surface formed at both ends along its width direction, and at least one of the splicing surfaces has a recess 200. In this embodiment, the plurality of first sliders 21 are spliced ​​together to form the second body 2. In the spliced ​​state, the recess 200 formed on the first slider 21 is used to cooperate with other adjacent first sliders 21 to form an air extraction hole 201.

[0069] In this embodiment, in the specific structure of the second body 2, two adjacent first sliders 21 can be joined together to form a first air extraction hole 202 or a second air extraction hole 203, and / or two adjacent first sliders 21 may not form an air extraction hole 201 in the joined state.

[0070] Specifically, refer to Figure 4 The second body 2 includes at least a first slider 21 (the first slider 21 is evenly distributed around the circumference of the annular body 11, and the number and distribution position of any first slider 21 in the second body 2 can be adjusted according to the actual flow field requirements). For example... Figure 7 As shown, the first slider 21 has planar splicing surfaces at both ends along its width direction, and at least one of the splicing surfaces has a recessed portion 200. In this embodiment, the recessed portion 200 is a U-shaped groove structure, and its depth along the height direction of the slider 20 is 1 / 7 to 1 / 5 of the height of the slider 20, and along the thickness direction penetrating the slider 20.

[0071] For example, the shape of the recess 200 can be replaced with a V-shape, trapezoid, etc.

[0072] The number of recesses 200 in the first slider 21 can be set according to requirements. The first slider 21 includes a first splicing surface 204 located on the left side of its width direction and a second splicing surface 205 located on the right side of its width direction.

[0073] Based on the difference in the setting of the recessed portion 200 on the first splicing surface 204 and the second splicing surface 205, the multiple first sliders 21 can be divided into three types, which are respectively defined as the first type of first slider 21, the second type of first slider 21 and the third type of first slider 21.

[0074] In one example, the first slider 21 has a recess 200 on the first splicing surface 204, but no recess 200 is provided on the second splicing surface 205. In this embodiment, the first slider 21 is defined as a first type of first slider 21.

[0075] In another example, the first slider 21 has a recess 200 on the second splicing surface 205, but no recess 200 is provided on the first splicing surface 204. In this embodiment, the first slider 21 is defined as a second type of first slider 21.

[0076] In another example, the first slider 21 has recesses 200 on both the first splicing surface 204 and the second splicing surface 205. If both splicing surfaces have recesses 200, air extraction holes 201 are formed on both sides of the first slider 21 in the spliced ​​state. In this embodiment, the first slider 21 is defined as a third type of first slider 21.

[0077] When multiple first sliders 21 of different types are sequentially assembled along the circumference of the ring body 11, the circumferential arrangement position of any type of first slider 21 can be selectively adjusted. By utilizing the combination and matching relationship of the recessed parts 200 of the splicing surfaces of different types of first sliders 21, the number, density and total opening area of ​​the effective air extraction holes 201 in different circumferential regions of the air extraction component can be controlled.

[0078] The following is a detailed description of an embodiment in which multiple first sliders 21 are joined together to form the second body 2: When multiple first sliders 21 are sequentially spliced ​​along the circumference of the ring body 11, the corresponding splicing surfaces of adjacent first sliders 21 are spliced ​​in a face-to-face bonding manner to ensure that the area outside the recess 200 remains airtight. By selecting or combining the above three types of first sliders 21, zero air extraction holes 201, first air extraction holes 202, or second air extraction holes 203 can be generated at any position in the circumference, thereby adjusting the number, density, and total opening area of ​​effective air extraction holes 201 in different areas of the circumference of the air extraction component.

[0079] For example, the first type of first slider 21 and the first type of first slider 21 are joined together, and the two form a first air extraction hole 202 at the joint position.

[0080] The second type of first slider 21 and the second type of first slider 21 are joined together, and a first air extraction hole 202 is formed at the joint position. The opening orientation of the first air extraction hole 202 is opposite to the opening orientation of the first air extraction hole 202 formed by the first type of first slider 21 mentioned above.

[0081] The first type of first slider 21 and the second type of first slider 21 are joined together, and no air extraction hole 201 is formed at the joint position.

[0082] The third type of first slider 21 and the third type of first slider 21 are joined together, and the two form a second air extraction hole 203 at the joint position.

[0083] The two sides of the third type of first slider 21 are combined and spliced ​​with the second type of first slider 21 and the first type of first slider 21 to form a second air extraction hole 203 or a first air extraction hole 202 at the splicing position.

[0084] As can be seen, the second body 2 is composed of multiple first sliders 21. This application can selectively change the circumferential arrangement of any type of first slider 21 to adjust the number of effective air extraction holes 201 and the total opening area of ​​the air extraction component in different circumferential regions.

[0085] If the CVD reaction chamber is equipped with a transfer channel, since the temperature in the area where the transfer channel is located is lower than that in other areas of the chamber, in order to reduce the air flow in this area (the airflow will carry away heat, further exacerbating the temperature drop in this area), the first type of first slider 21 and the second type of first slider 21 can be concentrated in this area to reduce the number of air extraction holes 201 in this area, or reduce the size of the air extraction holes 201 in this area, or reduce the pore density of the air extraction holes 201 in this area; for other conventional areas (where the flow field is relatively uniform), the number of third type of first slider 21 can be increased to appropriately enhance the air extraction strength in this area.

[0086] Since the first slider 21 is detachably connected to the first body 1, when the CVD process parameters (such as substrate size and reaction gas flow rate) or flow field requirements change, the arrangement position and number of the first type of first slider 21, the second type of first slider 21 and the third type of first slider 21 in the second body 2 can be selectively adjusted to adjust the gas extraction characteristics of each region, thereby achieving regional control of the circumferential gas extraction field of the reaction chamber and improving the edge deviation problem of POLY film formation.

[0087] In one embodiment, refer to Figure 1a , Figure 3 and Figure 8 The second body 2 further includes: a second slider 22, wherein the two ends of the second slider 22 along its width direction respectively form splicing surfaces, and neither splicing surface of the second slider 22 is provided with a recess 200; the first slider 21 and the second slider 22 are spliced ​​together to form the second body 2.

[0088] In this embodiment, by selectively adjusting the arrangement position and number of the second slider 22 in the circumferential direction, the number of effective air extraction holes 201 and the total opening area of ​​the air extraction component in different circumferential regions can be adjusted.

[0089] In this embodiment, the second body 2 is composed of a plurality of first sliders 21 and at least one second slider 22 spliced ​​together. The two ends of the second slider 22 along the width direction respectively form a first splicing surface 204 and a second splicing surface 205. Both splicing surfaces are smooth and flat (without any recesses 200), and the shape and size of the splicing surfaces are completely adapted to the first splicing surface 204 and the second splicing surface 205 of the first slider 21 (e.g., the height and flatness tolerance of the splicing surfaces are consistent).

[0090] In some embodiments, the thickness and height dimensions of the second slider 22 are consistent with those of the first slider 21 to ensure that when it is spliced ​​with the first slider 21, a flat annular structure is formed along the radial and axial directions of the ring body 11, avoiding airflow disturbance caused by abrupt structural changes. The width dimension of the second slider 22 may be the same as or different from that of the first slider 21. If the widths are different, a finer circumferential region division can be achieved through size combinations.

[0091] In this embodiment, the second body 2 adopts a hybrid splicing structure, specifically composed of a first slider 21 (including the aforementioned first type of first slider 21, second type of first slider 21 and third type of first slider 21) and a second slider 22 spliced ​​along the circumference of the ring body 11; and the splicing surfaces of all adjacent sliders 20 (including adjacent first sliders 21 and first slider 21, first slider 21 and second slider 22, second slider 22 and second slider 22) are assembled by surface-to-surface pressing and fitting to ensure the stability of the splicing structure and the sealing of the airflow channel.

[0092] Based on the above splicing combination method, for any single slider 20, after it is spliced ​​with another adjacent slider 20 in the circumferential direction, the splicing side of the single slider 20 can form different air extraction structures, specifically including three situations: forming a first air extraction hole 202, forming a second air extraction hole 203, or not forming an air extraction hole 201.

[0093] Therefore, when the first slider 21 and the second slider 22 are spliced ​​together to form the second body 2, the pumping parameters can be adjusted through two control methods: one is to selectively adjust the ratio of the number of the first slider 21 and the second slider 22; the other is to selectively adjust the arrangement position of the second slider 22 in the circumferential direction of the ring body 11 (the two methods can be used alone or in combination). Through the above control, the number, density and total opening area of ​​the effective pumping holes 201 in different circumferential regions of the pumping component can be precisely adjusted, thereby achieving precise control of the zonal pumping airflow field in the reaction chamber, ultimately improving the edge deviation problem of polycrystalline silicon (POLY) thin film formation and enhancing the uniformity of thin film formation quality.

[0094] In one embodiment, refer to Figure 1a and Figure 1b , Figure 3 , Figure 6 and Figure 9 The second body 2 also includes a plurality of third sliders 23; the third sliders 23 are provided with through third air extraction holes 207 along their thickness direction, and the third air extraction holes 207 are connected to the first gap 12. The assembly method of the second body 2 is selected from any of the following: Refer to Figure 1 and Figure 3The third slider 23 is spliced ​​with the first slider 21 and / or the second slider 22 along the circumference of the ring body 11; Reference Figure 5 The third slider 23 is spliced ​​along the circumference of the ring body 11.

[0095] By selectively adjusting the arrangement position and number of the third slider 23 in the circumferential direction of the ring body 11, the number, density and total opening area of ​​the effective air extraction holes 201 in different circumferential regions of the air extraction assembly can be adjusted.

[0096] In this embodiment, the second body 2 may further include a plurality of third sliders 23. Each third slider 23 has at least one through-hole 207 along its thickness direction. The third suction hole 207 is a circular through-hole (or a square or elliptical through-hole). For example, the third slider 23 may include a first type of third slider 23, a second type of third slider 23, and a third type of third slider 23. The first type of third slider 23 has one through-hole 207, the second type of third slider 23 has two through-holes 207, and the third type of third slider 23 has three or more through-holes 207.

[0097] The two ends of the third slider 23 along the width direction are the first splicing surface 204 and the second splicing surface 205, respectively. The two splicing surfaces can be smooth and flat, that is, without any recesses 200, to ensure airtight sealing when spliced ​​with other sliders 20.

[0098] Of course, in order to achieve more precise and complex zonal control of the circumferential airflow field of the reaction chamber, a recess 200 can be made on the first splicing surface 204 and / or the second splicing surface 205 of the third slider 23.

[0099] In this embodiment, the splicing and assembly methods of the second body 2 include individual splicing of the third slider 23, mixed splicing with the first slider 21, mixed splicing with the second slider 22, and joint mixed splicing of all three. All splicing surfaces of adjacent sliders 20 are assembled using a face-to-face pressing and bonding method. By selectively adjusting the arrangement position, number, and specifications of the third slider 23 in the circumferential direction of the ring body 11, the adjustment dimensions of the pumping assembly can be further expanded, and the zonal control of the circumferential pumping airflow field of the reaction chamber can be further realized, ultimately improving the problem of film edge deviation in POLY films.

[0100] In one embodiment, refer to Figure 2 The ring body 11 is provided with a second slit 13 extending circumferentially thereon, and the second slit 13 and the first slit 12 are spaced apart along the axial direction of the ring body 11. Each slider 20 has a first surface facing away from the inner side of the ring body 11. The first surface is provided with a mounting part 206, which is detachably embedded in the second gap 13 so that the slider 20 can be detachably mounted on the ring body 11.

[0101] In a further embodiment, refer to Figure 2 The ring body 11 is provided with two second gaps 13, and the first gap 12 is located between the two second gaps 13; The first surface is provided with two mounting portions 206, each mounting portion 206 being detachably embedded in the corresponding second gap 13.

[0102] In this embodiment, in addition to the first slit 12 extending circumferentially, the ring body 11 is also provided with a second slit 13 extending continuously circumferentially. The first slit 12 and the second slit 13 are spaced apart along the axial direction of the ring body 11. The first slit 12 is a slit with an air extraction function, and the second slit 13 is a mounting and fixing slit.

[0103] In this embodiment, each slider 20 (including the first slider 21, the second slider 22, the third slider 23, and all width specifications) has a first surface facing away from the inner side of the ring body 11. A mounting portion 206 is integrally formed on the first surface. The mounting portion 206 is detachably fitted into the second gap 13 to achieve a fixed connection between the slider 20 and the ring body 11. When the suction assembly is installed inside the reaction chamber, corresponding mounting holes corresponding to the mounting portion 206 can be provided within the reaction chamber to further ensure the installation stability of the suction assembly.

[0104] For example, the mounting portion 206 is a strip-shaped protrusion or a cylindrical protrusion. The shape of the mounting portion 206 includes, but is not limited to, a strip-shaped protrusion or a cylindrical protrusion. As long as it can achieve stable insertion and removal of the slider 20 and the second gap 13 and does not affect the air extraction function, it is within the protection scope of this application.

[0105] In one embodiment, refer to Figure 2 The second gap 13 includes a first semi-ring 131 and a second semi-ring 132, which are spaced apart in the circumferential direction to ensure the structural integrity of the first body 1.

[0106] In a further embodiment, the slider 21 is provided with two mounting portions 206 along its width direction, the interval between the first half-ring 131 and the second half-ring 132 is smaller than the width of the slider 20; one of the two mounting portions 206 is disposed on the first half-ring 131, and the other mounting portion 206 is disposed on the second half-ring 132.

[0107] In this embodiment, the second gap 13 is optimized as a circumferentially segmented double-half-ring structure, namely, a first half-ring 131 and a second half-ring 132 arranged circumferentially along the ring body 11. When a mounting portion 206 is provided on the first surface of the slider 20, the first surface may have two mounting portions 206 arranged along its width direction. One of the two mounting portions 206 arranged along the width direction on the slider 20 is located on the first half-ring 131, and the other is located on the second half-ring 132. The two mounting portions 206 arranged along the width direction on the slider 20 bridge the adjacent first half-ring 131 and second half-ring 132, forming a circumferential positioning of the slider 20, preventing the slider 20 from sliding circumferentially along the ring body 11, avoiding misalignment of the suction port 201 due to circumferential sliding, and ensuring the continuity of the suction channel and the stability of the suction efficiency.

[0108] In one embodiment, refer to Figures 7-9 The slider 20 includes a first body and a second body arranged in a staggered manner along its width direction. The surface of the first body facing the second body is a first splicing surface 204, and the surface of the second body facing the first body is a second splicing surface 205.

[0109] In this embodiment, the slider 20 (including the first slider 21, the second slider 22, the third slider 23, and all width specifications) adopts a split staggered design, that is, the first body and the second body are staggered along the width direction of the slider 20. Among them, the surface of the first body facing the second body forms a first splicing surface 204, and the surface of the second body facing the first body forms a second splicing surface 205.

[0110] The first splicing surface 204 and the second splicing surface 205 can be arranged in a staggered manner along the height direction of the slider 20. When the first splicing surface 204 and the second splicing surface 205 are arranged in a staggered manner along the height direction of the slider 20, in order to ensure the splicing compatibility between adjacent sliders 20, the two splicing surfaces of the other slider 20 that it connects with also need to adopt a staggered arrangement in the height direction.

[0111] Alternatively, the first splicing surface 204 and the second splicing surface 205 can be arranged collinearly. Specifically, when the first splicing surface 204 and the second splicing surface 205 are arranged collinearly, the extension trajectory of the first splicing surface 204 along the width direction of the slider 20 can completely overlap with the extension trajectory of the second splicing surface 205. Correspondingly, the two splicing surfaces of the other slider 20 that it connects with also need to be arranged collinearly.

[0112] The slider 20 structure provided in this embodiment can increase the sealing contact area during splicing, significantly improve the reliability of circumferential sealing, and at the same time suppress the deformation of the air extraction hole 201 caused by thermal expansion misalignment at high temperature, ensuring the accuracy of flow field control.

[0113] The shape of the slider 20 is not limited to the aforementioned misaligned structure; it can also be a cube, a T-shape, or any geometric shape that can satisfy the splicing and sealing function.

[0114] In some embodiments, the slider 20 as a whole or its splicing surface is made of a temperature-sensitive material, which undergoes controlled dimensional shrinkage / expansion when heated or in a specific gas atmosphere, thereby closing the splicing gaps and allowing gas to pass through without gaps.

[0115] In one embodiment, refer to Figure 7 The first slider 21 has two recessed surfaces, each with a recessed portion 200. The two recessed portions 200 are recessed towards the height direction of the first slider 21, and their recessed directions are opposite.

[0116] In this embodiment, the two recesses 200 are arranged in opposite directions, which expands the arrangement and combination of each slider 20 and significantly improves the degree of freedom in flow field adjustment.

[0117] This application also provides a semiconductor thin film deposition apparatus. The semiconductor thin film deposition apparatus includes the gas extraction component as described above. The semiconductor thin film deposition apparatus is a CVD apparatus, including but not limited to an LPCVD apparatus.

[0118] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0119] While specific embodiments of this application have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of this application. The scope of this application is defined by the appended claims.

Claims

1. A vacuum assembly, characterized in that, The air extraction assembly includes: A first body (1) has a ring body (11) and the ring body (11) is provided with a first slit (12) extending circumferentially thereon. The second body (2) is formed by splicing multiple sliders (20) along the circumference of the ring body (11); each slider (20) is detachably disposed on the ring body (11), and each slider (20) has a thickness direction defined radially along the ring body (11) and a width direction defined circumferentially along the ring body (11); wherein, In the second body (2), two adjacent sliders (20) together form an air extraction hole (201) in the spliced ​​state. The air extraction hole (201) is either a first air extraction hole (202) or a second air extraction hole (203). The opening area of ​​the first air extraction hole (202) is smaller than the opening area of ​​the second air extraction hole (203). The air extraction hole (201) extends through the thickness direction of the slider (20) and is connected to the first gap (12). And / or two adjacent sliders (20) do not form the air extraction hole (201) in the spliced ​​state.

2. The air extraction assembly according to claim 1, characterized in that, The second body (2) includes at least: Multiple first sliders (21), each first slider (21) having a splicing surface formed at both ends along its width direction, and at least one of the splicing surfaces having a recess (200).

3. The air extraction assembly according to claim 2, characterized in that, The second body (2) further includes at least: a plurality of second sliders (22), each of the second sliders (22) having splicing surfaces formed at both ends along its width direction, and neither splicing surface of the second slider (22) having the recessed portion (200). The first slider (21) and the second slider (22) are joined together to form the second body (2).

4. The air extraction assembly according to claim 3, characterized in that, The second body (2) also includes at least a plurality of third sliders (23); Each of the third sliders (23) has a through third air extraction hole (207) along its thickness direction, and the third air extraction hole (207) is connected to the first gap (12); The splicing and assembly method of the second body (2) is selected from any of the following: The third slider (23) is spliced ​​with the first slider (21) and / or the second slider (22) along the circumferential direction of the ring body (11); The third slider (23) is spliced ​​circumferentially along the ring body (11).

5. The air extraction assembly according to any one of claims 1-3, characterized in that, The plurality of sliders (20) includes at least two sets of sliders (20) with different width dimensions.

6. The air extraction assembly according to claim 1, characterized in that, The ring body (11) is provided with a second slit (13) extending circumferentially thereon, and the second slit (13) and the first slit (12) are spaced apart along the axial direction of the ring body (11). Each of the sliders (20) has a first surface facing away from the inner side of the ring body (11), and the first surface is provided with a mounting part (206), which is detachably embedded in the second gap (13).

7. The air extraction assembly according to claim 6, characterized in that, The ring body (11) is provided with two second gaps (13), and the first gap (12) is located between the two second gaps (13); The first surface is provided with two mounting parts (206), each mounting part (206) being detachably embedded in the corresponding second gap (13).

8. The air extraction assembly according to claim 6, characterized in that, The second gap (13) includes a first half-ring (131) and a second half-ring (132), which are spaced apart in the circumferential direction.

9. The air extraction assembly according to claim 8, characterized in that, The slider (20) has two mounting portions (206) along its width direction, and the spacing between the first half-ring (131) and the second half-ring (132) is smaller than the width of the slider (20); One of the two mounting portions (206) is disposed on the first half ring (131), and the other mounting portion (206) is disposed on the second half ring (132).

10. The air extraction assembly according to claim 1, characterized in that, The slider (20) includes a first body and a second body arranged in a staggered manner along its width direction. The surface of the first body facing the second body is a first splicing surface (204), and the surface of the second body facing the first body is a second splicing surface (205).

11. The air extraction assembly according to claim 2, characterized in that, The first slider (21) has two recessed parts (200) on its two splicing surfaces. The two recessed parts (200) are recessed in the height direction of the first slider (21) respectively, and the two recessed directions are opposite.

12. A semiconductor thin film deposition apparatus, characterized in that, The semiconductor thin film deposition apparatus includes an air extraction component as described in any one of claims 1-11.

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