Isolation valve assembly and single crystal growth equipment

Abstract

The invention discloses an isolating valve assembly and single crystal growth equipment, the isolating valve assembly is used for the single crystal growth equipment, and the isolating valve assembly comprises a valve seat, a valve plate mechanism and a driving assembly. A communicating channel and a containing cavity are formed in the valve seat, the valve plate mechanism comprises a valve plate and a valve plate rotating shaft, the valve plate rotating shaft extends in the vertical direction and penetrates through the valve seat, the upper end of the valve plate rotating shaft extends to the position above the valve seat, the lower end of the valve plate rotating shaft is located in the containing cavity and connected with the valve plate, and the driving assembly is installed on the valve seat and located outside the valve seat. The valve plate is provided with a closing position and an opening position, the valve plate is contained in the containing cavity to open the communicating channel at the opening position, and the valve plate is located in the communicating channel to close the communicating channel at the closing position. According to the isolation valve assembly provided by the embodiment of the invention, the influence of the isolation valve assembly on the growth length of the crystal bar is small, and the arrangement of the driving component of the isolation valve assembly is flexible.

Description

Technical Field

[0001] This invention relates to the field of monocrystalline silicon preparation equipment, and in particular to an isolation valve assembly and a monocrystalline growth device. Background Technology

[0002] Single crystal growth furnaces typically consist of a main furnace chamber and a secondary furnace chamber, positioned vertically. An openable isolation valve is usually installed between the main and secondary furnace chambers. In related technologies, the isolation valve plate is a flap-type. When the flap is opened, it enters the space of the secondary furnace chamber, reducing the effective height of the secondary furnace chamber and significantly impacting the growth length of the crystal rod. Therefore, improvements are needed. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide an isolation valve assembly that, when used in a single crystal growth device, has a minimal impact on the growth length of the crystal rod, and whose drive components are flexibly arranged.

[0004] The present invention also proposes a single crystal growth apparatus having the above-mentioned isolation valve assembly.

[0005] According to a first aspect of the present invention, an isolation valve assembly is used in a single crystal growth apparatus, and the isolation valve assembly includes: a valve seat having a communication channel and a receiving cavity formed therein; and a valve plate mechanism including a valve plate and a valve plate shaft, the valve plate shaft extending in a vertical direction and passing through the valve seat, the upper end of the valve plate shaft extending above the valve seat, the lower end of the valve plate shaft being located in the receiving cavity and connected to the valve plate, the valve plate having a closed position and an open position, wherein in the open position, the valve plate is received in the receiving cavity to open the communication channel, and in the closed position, the valve plate is located in the communication channel to close the communication channel; A drive assembly is mounted on the valve seat and located outside the valve seat. The drive assembly is located on the outer periphery of the valve plate shaft and connected to the upper end of the valve plate shaft to drive the valve plate to move between the closed position and the open position.

[0006] According to the isolation valve assembly of the present invention, by driving the valve plate between the closed and open positions using the drive assembly, and by retracting the valve plate into the receiving cavity of the valve seat when the valve plate is in the open position to open the communication channel, the space occupied by the valve plate in the height direction when the valve plate is in the open position can be reduced, allowing the crystal rod to grow from the communication channel. This avoids the space entering the auxiliary furnace chamber when the valve plate is open, which reduces the effective height of the auxiliary furnace chamber, thereby reducing the impact on the growth length of the crystal rod. Furthermore, by positioning the drive assembly on the outer periphery of the valve plate's rotating shaft, the position of the drive assembly can be arranged more flexibly according to the installation requirements of the isolation valve assembly.

[0007] According to some embodiments of the present invention, the valve plate further has an intermediate position. The driving assembly includes a lifting mechanism and a rotating mechanism. The lifting mechanism includes a lifting driving mechanism and a connecting assembly. The lifting driving mechanism is connected to the upper end of the valve plate rotating shaft through the connecting assembly. The lifting driving mechanism drives the valve plate rotating shaft to rise and fall through the connecting assembly, thereby causing the valve plate to move between the closed position and the intermediate position. The rotating mechanism is connected to the upper end of the valve plate rotating shaft to drive the valve plate rotating shaft to rotate around its own central axis, thereby causing the valve plate to move between the intermediate position and the open position.

[0008] According to some embodiments of the present invention, the lifting drive mechanism is located on the outer periphery of the valve seat. And / or, at least a portion of the lifting drive mechanism is lower than the upper end face of the valve plate shaft.

[0009] According to some embodiments of the present invention, the connecting assembly includes a connecting arm and a pressure block. The output end of the lifting drive mechanism is a first output end, which is movable in the vertical direction. The pressure block is fixed to the first output end. The two ends of the connecting arm are a first connecting end and a second connecting end, respectively. The first connecting end is fixedly connected to the upper end of the valve plate shaft. A mating groove is formed in the pressure block. The second connecting end is adapted to be accommodated in the mating groove and can rotate relative to the pressure block around the valve plate shaft.

[0010] According to some embodiments of the present invention, the pressure block includes a pressure block base and a pressure block top cover, the pressure block top cover being connected to the upper side of the pressure block base and defining the mating groove together with the pressure block base; and / or, the bottom wall and top wall of the mating groove are provided with anti-wear pads, the anti-wear pads being located between the pressure block and the second connecting end of the connecting arm, and the anti-wear pads being fixed to the connecting arm or the pressure block.

[0011] According to some embodiments of the present invention, the mating groove extends through one side of the pressure block along the rotation direction of the connecting arm to form a clearance opening, and the second connecting end enters and exits the mating groove through the clearance opening; wherein, when the valve plate is in the closed position and the intermediate position, the second connecting end is accommodated in the mating groove; when the valve plate is in the open position, the second connecting end disengages from the mating groove.

[0012] According to some embodiments of the present invention, the isolation valve assembly further includes a safety guard plate, which is supported on the top of the valve seat by a column, and at least a portion of the safety guard plate is located above the pressure block and covers the mating area between the second connection end and the pressure block.

[0013] According to some embodiments of the present invention, the rotating mechanism includes a rotating drive mechanism and a swing arm. The two ends of the swing arm are a first end and a second end, respectively. The first end is fixedly connected to the upper end of the valve plate rotating shaft. The output end of the rotating drive mechanism is a second output end, which can move in the horizontal direction. The second end is connected to the second output end. The second output end is provided with a connecting shaft extending in the vertical direction. The connecting shaft passes through the second end, and the second end can move vertically relative to the connecting shaft.

[0014] According to some embodiments of the present invention, the rotary drive mechanism is located on the outer periphery of the valve seat; and / or, the outer periphery of the valve seat forms a corner, and the rotary drive mechanism and the lifting drive mechanism are both located adjacent to the same corner of the valve seat.

[0015] According to some embodiments of the present invention, the second output terminal is provided with a first position sensor and a second position sensor. The first position sensor is located above the second end to detect whether the valve plate is located in the middle position or the open position. The second position sensor is located below the second end to detect whether the valve plate is located in the closed position. And / or, a sliding bearing sleeve is sleeved on the outer periphery of the connecting shaft, and the sliding bearing sleeve is fixed to the second end.

[0016] According to some embodiments of the present invention, an mounting plate is sleeved on the upper end of the valve plate rotating shaft. The mounting plate is located below the swing arm. The mounting plate is movable in the vertical direction relative to the valve plate rotating shaft. The mounting plate is fixed in the circumferential direction relative to the valve plate rotating shaft. A first limit switch and a second limit switch are mounted on the upper side of the mounting plate. The first limit switch and the second limit switch are respectively located on both sides of the rotation direction of the second end. The first limit switch is used to detect whether the valve plate is in the closed position or the intermediate position. The second limit switch is used to detect whether the valve plate is in the open position.

[0017] According to some embodiments of the present invention, the inner peripheral wall of the communication channel is provided with a supporting protrusion, the supporting protrusion is located at the bottom of the valve seat and extends circumferentially along the communication channel; wherein, the upper surface of the supporting protrusion is provided with a receiving groove, the receiving groove is provided with a sealing element, and in the closed position, the valve plate is supported on the upper surface of the supporting protrusion, and the sealing element is located between the bottom surface of the valve plate and the supporting protrusion.

[0018] According to some embodiments of the present invention, the valve plate mechanism further includes a lifting arm that extends radially along the valve seat. One end of the lifting arm is connected to the middle of the valve plate, and the other end of the lifting arm is located in the receiving cavity and connected to the lower end of the valve plate pivot. A support member is provided on the bottom surface of the lifting arm. A valve plate lifting block is provided on the upper surface of the valve seat, and a mating groove is provided on the upper side of the valve plate lifting block. In the closed position, the support member is accommodated in the mating groove. When the valve plate is in the open position and between the intermediate position and the open position, the support member is supported on the upper surface of the valve plate lifting block.

[0019] According to a second aspect of the present invention, a single crystal growth apparatus includes: a main furnace chamber; an auxiliary furnace chamber located above the main furnace chamber; and an isolation valve assembly according to a first aspect of the present invention, the isolation valve assembly being disposed between the main furnace chamber and the auxiliary furnace chamber, the communication channel being used to connect the main furnace chamber and the auxiliary furnace chamber.

[0020] According to an embodiment of the present invention, a single crystal growth apparatus is provided with an isolation valve assembly as described in the first aspect of the present invention. The driving component of the isolation valve assembly includes a rotating mechanism that drives the valve plate shaft to rotate around its own central axis, thereby moving the valve plate between an intermediate position and an open position. This reduces the space occupied by the valve plate in the height direction when it is in the open position. When the valve plate is in the open position, it is housed in a receiving cavity to open the communication channel, allowing the crystal rod to grow from the communication channel. This avoids the space entering the auxiliary furnace chamber when the valve plate is open, which reduces the effective height of the auxiliary furnace chamber and thus reduces the impact on the growth length of the crystal rod. Furthermore, by positioning the lifting driving mechanism on the outer periphery of the valve plate shaft and connecting the lifting driving mechanism to the upper end of the valve plate shaft through a connecting component, the lifting driving mechanism indirectly drives the lifting and lowering of the valve plate shaft through the connecting component. This allows for a more flexible arrangement of the lifting driving mechanism's position according to the installation requirements of the isolation valve assembly.

[0021] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0022] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of an isolation valve assembly according to some embodiments of the present invention; Figure 2 yes Figure 1 Enlarged view of the middle W section; Figure 3 yes Figure 1 Side view of the isolation valve assembly in the middle; Figure 4 yes Figure 3 A cross-sectional view of the isolation valve assembly along point AA; Figure 5 yes Figure 1 Top view of the isolation valve assembly in the middle; Figure 6 yes Figure 5 Enlarged view at point X; Figure 7 yes Figure 5 A cross-sectional view of the isolation valve assembly along BB in the middle; Figure 8 yes Figure 5 A cross-sectional view of the isolation valve assembly along the CC direction; Figure 9 yes Figure 5 A cross-sectional view of the isolation valve assembly along line LL; Figure 10 yes Figure 9 Enlarged view of point Y in the middle; Figure 11 yes Figure 5 A cross-sectional view of the isolation valve assembly along the MM point; Figure 12 yes Figure 5 A cross-sectional view of the isolation valve assembly along point NN; Figure 13 yes Figure 12 A magnified view of point Z in the middle.

[0023] Figure label: 100. Isolation valve assembly; 10. Valve seat; 11. Communicating channel; 111. Supporting protrusion; 112. Receiving groove; 113. Seal; 12. Receiving cavity; 13. First anti-rotation post; 14. Anti-rotation protrusion; 15. Valve plate lifting block; 151. Mating groove; 16. Corner; 20. Valve plate mechanism; 21. Valve plate; 22. Valve plate shaft; 23. Mounting plate; 231. First limit switch; 232. Second limit switch; 233. Anti-rotation hole; 24. Lifting arm; 241. Support component; 30. Drive assembly; 31. Lifting mechanism; 32. Lifting drive mechanism; 321. First output end; 33. Connecting assembly; 331. Connecting arm; 332. First connecting end; 333. Second connecting end; 334. Pressure block; 335. Pressure block base; 336. Pressure block cover; 337. Mating groove; 338. Clearance opening; 339. Anti-wear pad; 34. Rotation mechanism; 35. Rotation drive mechanism; 351. Second output end; 352. Connecting shaft; 353. Sliding bearing sleeve; 354. First position sensor; 355. Second position sensor; 36. Swing arm; 361. First end; 362. Second end; 40. Safety guardrail; 41. Column; 50. Cooling water pipe; 51. Water inlet; 52. Water outlet. Detailed Implementation

[0024] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0025] The following is for reference. Figures 1-13 An isolation valve assembly 100 according to an embodiment of the present invention is described.

[0026] refer to Figures 1-8 According to a first aspect of the present invention, an isolation valve assembly 100 is used in a single crystal growth apparatus, and the isolation valve assembly 100 includes: a valve seat 10, a valve plate mechanism 20, and a drive assembly 30.

[0027] The valve seat 10 has a connecting channel 11 and a receiving cavity 12. For example, the connecting channel 11 extends through the valve seat 10 in the vertical direction, and the receiving cavity 12 is located on the outer periphery of the connecting channel 11 and is connected to the connecting channel 11.

[0028] The valve plate mechanism 20 includes a valve plate 21 and a valve plate shaft 22. The valve plate shaft 22 extends in the vertical direction and passes through the valve seat 10. The upper end of the valve plate shaft 22 extends above the valve seat 10, and the lower end of the valve plate shaft 22 is located in the receiving cavity 12. The lower end of the valve plate shaft 22 is connected to the valve plate 21. The valve plate 21 has a closed position and an open position. In the open position, the valve plate 21 is received in the receiving cavity 12 to open the connecting channel 11. In the closed position, the valve plate 21 is located in the communicating channel 11 to close the communicating channel 11.

[0029] For example, the valve plate pivot 22 is located on the outer periphery of the valve plate 21.

[0030] The drive assembly 30 is mounted on the valve seat 10 and is located outside the valve seat 10. The drive assembly 30 is located on the outer periphery of the valve plate shaft 22 and is connected to the upper end of the valve plate shaft 22 to drive the valve plate 21 to move between the closed position and the open position.

[0031] For example, when valve plate 21 is in the closed position and it needs to be opened, drive assembly 30 drives valve plate 21 from the closed position to the open position and stores it in the storage cavity 12, so that the communication channel 11 is connected; when valve plate 21 is in the open position and it needs to be closed, drive assembly 30 drives valve plate 21 from the open position to the closed position, so that valve plate 21 closes the communication channel 11.

[0032] For example, the isolation valve assembly 100 may also include a cooling water pipe 50, which runs through the inside of the valve plate shaft 22 and is fixed to the outer periphery of the valve plate 21 to cool the valve plate 21. In this case, the drive assembly 30 is located on the outer periphery of the valve plate shaft 22 and can avoid the outlet 52 and inlet 51 of the cooling water pipe 50, which facilitates the arrangement of the cooling water pipe 50.

[0033] The drive assembly 30 is located on the outer periphery of the valve plate shaft 22. The position of the drive assembly 30 can be arranged more flexibly according to the installation requirements of the isolation valve assembly 100, so that the drive assembly 30 can be placed in more positions. The drive assembly 30 can be arranged according to the actual installation requirements, which is conducive to the drive assembly 30 avoiding other components of the isolation valve assembly 100, making the arrangement of other components more convenient.

[0034] According to the embodiments of the present invention, the isolation valve assembly 100 drives the valve plate 21 to move between the closed position and the open position by driving the drive assembly 30, and when the valve plate 21 is in the open position, it is housed in the receiving cavity 12 of the valve seat 10 to open the communication channel 11. This reduces the space occupied by the valve plate 21 in the height direction when it is in the open position, allowing the crystal rod to grow from the communication channel 11. It also avoids the space of the auxiliary furnace chamber when the valve plate 21 is open, which reduces the effective height of the auxiliary furnace chamber, thereby reducing the impact on the growth length of the crystal rod. Furthermore, by positioning the drive assembly 30 on the outer periphery of the valve plate rotating shaft 22, the position of the lifting drive assembly 30 can be arranged more flexibly according to the installation requirements of the isolation valve assembly 100.

[0035] refer to Figures 1-8According to some embodiments of the present invention, the valve plate 21 also has an intermediate position. The drive assembly 30 includes a lifting mechanism 31 and a rotating mechanism 34. The lifting mechanism 31 includes a lifting drive mechanism 32 and a connecting assembly 33. The lifting drive mechanism 32 is located on the outer periphery of the valve plate rotating shaft 22, and the lifting drive mechanism 32 is connected to the upper end of the valve plate rotating shaft 22 through the connecting assembly 33. The lifting drive mechanism 32 drives the valve plate rotating shaft 22 to rise and fall through the connecting assembly 33, so as to drive the valve plate 21 to move between the closed position and the intermediate position. The rotating mechanism 34 is connected to the upper end of the valve plate rotating shaft 22 to drive the valve plate rotating shaft 22 to rotate around its own central axis, so as to drive the valve plate 21 to move between the intermediate position and the open position.

[0036] For example, the lifting drive mechanism 32 can be a linear cylinder.

[0037] Among them, the valve plate 21 and the connecting channel 11 are concentric in the axial direction and the highest position in the vertical direction is the middle position.

[0038] For example, when the rotating mechanism 34 drives the valve plate 21 along... Figure 6 When the valve plate 21 rotates in the a1 direction, it rotates from the middle position to the open position. When the rotating mechanism 34 drives the valve plate 21 along the a1 direction, it rotates from the middle position to the open position. Figure 6 When rotating in the a2 direction, the valve plate 21 rotates from the open position to the middle position, wherein the a1 direction is opposite to the a2 direction.

[0039] For example, when valve plate 21 is in the closed position and needs to be opened, lifting drive mechanism 32 drives connecting assembly 33 to move upward, thereby causing valve plate shaft 22 to move upward in the vertical direction, thus causing valve plate 21 to move upward. When valve plate 21 moves to the middle position, lifting drive mechanism 32 stops driving, and rotation mechanism 34 drives valve plate shaft 22 to rotate around its own central axis and in the direction a1, thereby causing valve plate 21 to rotate around the central axis of valve plate shaft 22 from the middle position to the open position, so that valve plate 21 moves to the open position and is stored in storage cavity 12. When valve plate 21 is in the open position and needs to be closed, the rotating mechanism 34 drives the valve plate shaft 22 to rotate around its own central axis and in the direction a2, thereby causing valve plate 21 to rotate around the central axis of valve plate shaft 22 from the open position to the middle position. When valve plate 21 moves to the middle position, the rotating mechanism 34 stops driving, and the lifting driving mechanism 32 drives the connecting assembly 33 to move downward to drive valve plate shaft 22 to move downward in the vertical direction, thereby causing valve plate 21 to move downward. When valve plate 21 moves to the closed position, the lifting driving mechanism 32 stops driving.

[0040] By including a rotating mechanism 34 in the drive assembly 30, the valve plate shaft 22 is driven to rotate around its own central axis, thereby moving the valve plate 21 between the intermediate position and the open position. This reduces the space occupied by the valve plate 21 in the height direction when it is in the open position. When the valve plate 21 is in the open position, it is housed in the receiving cavity 12 to open the connecting channel 11, allowing the crystal rod to grow from the connecting channel 11. This avoids reducing the effective height of the auxiliary furnace chamber by the valve plate 21 and reduces the impact on the growth length of the crystal rod.

[0041] By having the valve plate 21 in a closed position, an intermediate position, and an open position, lifting the valve plate 21 in the closed position and then rotating it to the open position, compared to opening the valve plate 21 directly from the closed position, helps to reduce the resistance to opening the valve plate 21 and also helps to reduce the wear of the valve plate 21.

[0042] The lifting drive mechanism 32 is located on the outer periphery of the valve plate rotating shaft 22, and the lifting drive mechanism 32 is connected to the upper end of the valve plate rotating shaft 22 through the connecting assembly 33. This allows the lifting drive mechanism 32 to indirectly drive the valve plate rotating shaft 22 to rise and fall through the connecting assembly 33. The position of the lifting drive mechanism 32 can be arranged more flexibly according to the installation requirements of the isolation valve assembly 100, allowing for more placement options. The lifting drive mechanism 32 can be arranged according to actual installation requirements, which helps to avoid other components of the isolation valve assembly 100 and makes the placement of other components more convenient.

[0043] By including a rotating mechanism 34 in the drive assembly 30, the valve plate shaft 22 can be driven to rotate around its own central axis, thereby moving the valve plate 21 between the intermediate position and the open position. This reduces the space occupied by the valve plate 21 in the height direction when it is in the open position. When the valve plate 21 is in the open position, it is housed in the receiving cavity 12 to open the connecting channel 11, allowing the crystal rod to grow from the connecting channel 11. This avoids the space of the auxiliary furnace chamber when the valve plate 21 is open, which reduces the effective height of the auxiliary furnace chamber and thus reduces the impact on the growth length of the crystal rod. Furthermore, by placing the lifting drive mechanism 32 on the outer periphery of the valve plate shaft 22 and connecting the lifting drive mechanism 32 to the upper end of the valve plate shaft 22 through the connecting assembly 33, the lifting drive mechanism 32 indirectly drives the lifting and lowering of the valve plate shaft 22 through the connecting assembly 33. This allows for a more flexible arrangement of the position of the lifting drive mechanism 32 according to the installation requirements of the isolation valve assembly 100.

[0044] refer to Figure 1 According to some embodiments of the present invention, the lifting drive mechanism 32 is located on the outer periphery of the valve seat 10.

[0045] For example, the lifting drive mechanism 32 can be fixed to the outer peripheral sidewall of the valve seat 10 by bolts.

[0046] By positioning the lifting drive mechanism 32 on the outer periphery of the valve seat 10, the space occupied by the lifting drive mechanism 32 in the height direction can be reduced, which helps the lifting drive mechanism 32 to avoid other components of the isolation valve assembly 100 (such as the cooling water pipe 50), making the arrangement of other components more convenient.

[0047] refer to Figure 3 According to some embodiments of the present invention, at least a portion of the lifting drive mechanism 32 is lower than the upper end face of the valve plate shaft 22.

[0048] For example, at least a portion of the lifting drive mechanism 32 may be lower than the upper surface of the valve plate shaft 22. This could mean that a part of the lifting drive mechanism 32 is lower than the upper surface of the valve plate shaft 22, or that the entire lifting drive mechanism 32 is lower than the upper surface of the valve plate shaft 22. If the lifting drive mechanism 32 is higher than the valve plate shaft 22, then the connecting assembly 33 will have difficulty connecting the lifting drive mechanism 32 and the valve plate shaft 22.

[0049] By positioning at least a portion of the lifting drive mechanism 32 below the upper end face of the valve plate shaft 22, the position of the lifting drive mechanism 32 can be arranged more flexibly according to the installation requirements of the isolation valve assembly 100, reducing the space occupied by the lifting drive mechanism 32 in the height direction, making it easier to arrange other components of the isolation valve assembly 100, and also facilitating the connection of the lifting drive mechanism 32 to the valve plate shaft 22 via the connecting assembly 33.

[0050] refer to Figures 1-5 According to some embodiments of the present invention, the connecting assembly 33 includes a connecting arm 331 and a pressure block 334. The output end of the lifting drive mechanism 32 is a first output end 321, which is movable in the vertical direction. The pressure block 334 is fixed to the first output end 321. The two ends of the connecting arm 331 are a first connecting end 332 and a second connecting end 333, respectively. The first connecting end 332 is fixedly connected to the upper end of the valve plate rotating shaft 22. A mating groove 337 is formed in the pressure block 334. The second connecting end 333 is adapted to be accommodated in the mating groove 337, and the second connecting end 333 can rotate relative to the pressure block 334 around the valve plate rotating shaft 22.

[0051] For example, when the lifting drive mechanism 32 drives the first output end 321 to move upward in the vertical direction, the pressure block 334 fixed to the first output end 321 also moves upward. The second connecting end 333, which is contained in the mating groove 337, moves upward with the pressure block 334, thereby driving the connecting arm 331 to move upward. Since the first connecting end 332 of the connecting arm 331 is fixed to the valve plate shaft 22, the valve plate shaft 22 also moves upward, thereby causing the valve plate 21 to move upward in the vertical direction. Similarly, when the lifting drive mechanism 32 drives the first output end 321 to move downward in the vertical direction, the valve plate shaft 22 also moves downward, causing the valve plate 21 to move downward in the vertical direction.

[0052] By forming a mating groove 337 in the pressure block 334 and adapting the second connecting end 333 to be accommodated in the mating groove 337, the second connecting end 333 can more easily mate with the pressure block 334, and the connecting arm 331 can move up and down more stably when the lifting drive mechanism 32 drives the first output end 321 to move up and down.

[0053] refer to Figures 12-13 According to some embodiments of the present invention, the pressure block 334 includes a pressure block base 335 and a pressure block cover 336. The pressure block cover 336 is connected to the upper side of the pressure block base 335, and the pressure block cover 336 and the pressure block base 335 together define a mating groove 337.

[0054] For example, the pressure block cover 336 can be fixed to the upper side of the pressure block base 335 by screw connection.

[0055] By having the upper cover 336 of the pressure block and the base 335 of the pressure block together define the mating groove 337, when the second connecting end 333 of the connecting arm 331 is accommodated in the mating groove 337, the upper cover 336 of the pressure block and the base 335 of the pressure block contact the upper and lower sides of the second connecting end 333 respectively, making it difficult for the second connecting end 333 to come out of the mating groove 337, and making the process of the pressure block 334 driving the second connecting end 333 to move upward more stable.

[0056] refer to Figure 13 According to some embodiments of the present invention, the bottom wall and top wall of the mating groove 337 are provided with anti-wear pads 339. The anti-wear pads 339 are located between the pressure block 334 and the second connecting end 333 of the connecting arm 331, and the anti-wear pads 339 are fixed to the connecting arm 331 or the pressure block 334.

[0057] For example, the anti-wear pad 339 can be a polytetrafluoroethylene (PTFE) component.

[0058] By providing anti-wear pads 339 on both the bottom and top walls of the mating groove 337, the frictional force between the connecting arm 331 and the pressure block 334 during relative movement can be reduced. When the second connecting end 333 of the connecting arm 331 rotates around the valve plate shaft 22 into the mating groove 337, the frictional force between the lower side of the second connecting end 333 and the bottom wall of the mating groove 337, and between the upper side of the second connecting end 333 and the top wall can be reduced, thereby reducing the resistance of the connecting arm 331 rotating around the valve plate shaft 22 and also reducing the wear of the connecting arm 331 and the pressure block 334.

[0059] refer to Figure 13According to some embodiments of the present invention, the mating groove 337 extends through one side of the pressure block 334 along the rotation direction of the connecting arm 331 to form a clearance opening 338, and the second connecting end 333 enters and exits the mating groove 337 through the clearance opening 338; wherein, when the valve plate 21 is in the closed position and the intermediate position, the second connecting end 333 is accommodated in the mating groove 337; when the valve plate 21 is in the open position, the second connecting end 333 disengages from the mating groove 337.

[0060] By forming a clearance opening 338 through one side of the pressure block 334 in the direction of rotation of the connecting arm 331 in the mating groove 337, the second connecting end 333 can enter and exit the mating groove 337 through the clearance opening 338. This facilitates the rotation of the second connecting end 333 around the valve plate shaft 22. When the valve plate 21 is in the open position, the second connecting end 333 disengages from the mating groove 337. This reduces the friction between the bottom and top walls of the mating groove 337 and the second connecting end 333 when the second connecting end 333 rotates, thereby reducing the resistance of the connecting arm 331 rotating around the valve plate shaft 22 and also reducing the wear of the connecting arm 331 and the pressure block 334.

[0061] refer to Figures 1-2 According to some embodiments of the present invention, the isolation valve assembly 100 further includes a safety guard plate 40, which is supported on the top of the valve seat 10 by a column 41. At least a portion of the safety guard plate 40 is located above the pressure block 334, and the safety guard plate 40 covers the mating point between the second connection end 333 and the pressure block 334.

[0062] For example, at least a portion of the safety guard plate 40 may be located above the pressure block 334. This could mean that a portion of the safety guard plate 40 is located above the pressure block 334, or that the entire safety guard plate 40 is located above the pressure block 334.

[0063] By providing a safety guard plate 40, which can cover the mating area between the second connecting end 333 and the pressure block 334, foreign objects are prevented from falling into the gap between the second connecting end 333 and the pressure block 334 when the second connecting end 333 moves in the horizontal direction. This also avoids the risk of fingers being pinched during manual operation, thus enhancing the safety of the isolation valve assembly.

[0064] refer to Figures 1-6According to some embodiments of the present invention, the rotating mechanism 34 includes a rotating drive mechanism 35 and a swing arm 36. The two ends of the swing arm 36 are a first end 361 and a second end 362, respectively. The first end 361 is fixedly connected to the upper end of the valve plate rotating shaft 22. The output end of the rotating drive mechanism 35 is a second output end 351, which can move in the horizontal direction. The second end 362 is connected to the second output end 351. The second output end 351 is provided with a connecting shaft 352 extending in the vertical direction. The connecting shaft 352 passes through the second end 362, and the second end 362 can move up and down relative to the connecting shaft 352.

[0065] For example, the rotary drive mechanism 35 can be a linear cylinder.

[0066] For example, when the rotary drive mechanism 35 drives the second output end 351 to move away from the rotary drive mechanism 35 in the horizontal direction, the swing arm 36 rotates in the a1 direction under the push of the second output end 351, so as to drive the valve plate shaft 22, which is fixedly connected to the first end 361 of the swing arm 36, to rotate around its own central axis in the a1 direction, thereby driving the valve plate 21 to rotate from the middle position to the open position; when the rotary drive mechanism 35 drives the second output end 351 to move closer to the rotary drive mechanism 35 in the horizontal direction, the swing arm 36 rotates in the a2 direction under the pull of the second output end 351, so as to drive the valve plate shaft 22 to rotate around its own central axis in the a2 direction, thereby driving the valve plate 21 to rotate from the open position to the middle position.

[0067] For example, when the valve plate shaft 22 moves in the up and down direction, the valve plate shaft 22 moves up and down along with the second end 362 of the connecting shaft 352.

[0068] By providing a connecting shaft 352 extending vertically to the second output end 351 and allowing the second end 362 to move vertically relative to the connecting shaft 352, the swing arm 36 can be made more flexible. Thus, when the rotary drive mechanism 35 drives the second end 362 to rotate, the swing arm 36 rotates with the rotary drive mechanism 35. When the lifting drive mechanism 32 drives the valve plate rotating shaft 22 to move vertically, causing the swing arm 36 to move vertically, the second output end 351 will not move accordingly, thus preventing the rotary drive mechanism 35 from moving when the lifting drive mechanism 32 is driven.

[0069] refer to Figure 1 According to some embodiments of the present invention, the rotary drive mechanism 35 is located on the outer periphery of the valve seat 10.

[0070] For example, the rotary drive mechanism 35 can be fixed to the outer peripheral sidewall of the valve seat 10 by bolts.

[0071] By placing the rotary drive mechanism 35 on the outer periphery of the valve seat 10, the space occupied by the rotary drive mechanism 35 in the height direction can be reduced, which is beneficial for the rotary drive mechanism 35 to avoid other components of the valve plate 21 assembly, making the arrangement of other components more convenient.

[0072] refer to Figure 1 According to some embodiments of the present invention, a corner 16 is formed on the outer periphery of the valve seat 10, and the rotary drive mechanism 35 and the lifting drive mechanism 32 are both located near the same corner 16 of the valve seat 10.

[0073] By placing both the rotary drive mechanism 35 and the lifting drive mechanism 32 at the same corner 16 adjacent to the valve seat 10, the arrangement of the rotary drive mechanism 35 and the lifting drive mechanism 32 is more concentrated, which can reduce the space occupied by the drive assembly 30 around the valve seat 10. This is beneficial for the drive assembly 30 to avoid other components of the isolation valve assembly 100, making the arrangement of other components more convenient. When the isolation valve assembly 100 is used in a single crystal growth equipment, it is also beneficial for the drive assembly 30 to avoid the furnace chamber.

[0074] refer to Figures 9-10 According to some embodiments of the present invention, the second output terminal 351 is provided with a first position sensor 354 and a second position sensor 355. The first position sensor 354 is located above the second end 362 to detect whether the valve plate 21 is in the middle position or the open position, and the second position sensor 355 is located below the second end 362 to detect whether the valve plate 21 is in the closed position.

[0075] For example, when valve plate 21 is in the closed position and needs to be opened, the lifting drive mechanism 32 drives valve plate shaft 22 to move upward, and drives swing arm 36 to move upward, so that the second end 362 of swing arm 36 moves upward relative to the second output end 351. The first position sensor 354 indirectly detects whether valve plate 21 is in the middle position by detecting the distance from the second end 362 to the first position sensor 354. When the first position sensor 354 detects that valve plate 21 is in the middle position, it transmits the position signal to the control system, so that the lifting drive mechanism 32 stops driving, and the rotation drive mechanism 35 drives valve plate shaft 22 to rotate in the a1 direction. When valve plate 21 is in the open position and needs to be closed, the rotary drive mechanism 35 first drives the valve plate shaft 22 to rotate along the a2 direction, causing the valve plate 21 to rotate until it is in the middle position. Then, the lifting drive mechanism 32 drives the valve plate shaft 22 to move downward, causing the second end 362 of the swing arm 36 to move downward relative to the second output end 351. The second position sensor 355 indirectly detects whether the valve plate 21 is in the closed position by detecting the distance from the second end 362 to the second position sensor 355. When the second sensor detects that the valve plate 21 is in the closed position, it transmits the position signal to the control system, causing the lifting drive mechanism 32 to stop moving.

[0076] By providing a first position sensor 354 and a second position sensor 355 at the second output terminal 351, it is possible to detect whether the valve plate 21 has reached the closed position or the intermediate position during its movement in the up and down direction, which facilitates the opening and closing of the lifting drive system and makes the control system more precise in controlling the position of the valve plate 21.

[0077] refer to Figure 10 According to some embodiments of the present invention, a sliding bearing sleeve 353 is sleeved on the outer periphery of the connecting shaft 352, and the sliding bearing sleeve 353 is fixed to the second end 362.

[0078] By providing a sliding bearing sleeve 353, the frictional force when the second end 362 moves up and down relative to the connecting shaft 352 can be reduced, thereby reducing the wear of the second end 362 and the connecting shaft 352 and extending the service life of the swing arm 36 and the connecting shaft 352.

[0079] refer to Figure 6 According to some embodiments of the present invention, an mounting plate 23 is sleeved on the upper end of the valve plate rotating shaft 22. The mounting plate 23 is located below the swing arm 36. The mounting plate 23 is movable in the vertical direction relative to the valve plate rotating shaft 22. The mounting plate 23 is fixed in the circumferential direction relative to the valve plate rotating shaft 22.

[0080] The mounting plate 23 has a first limit switch 231 and a second limit switch 232 installed on its upper side. The first limit switch 231 and the second limit switch 232 are located on both sides of the rotation direction of the second end 362, respectively. The first limit switch 231 is used to detect whether the valve plate 21 is in the closed position or the middle position, and the second limit switch 232 is used to detect whether the valve plate 21 is in the open position.

[0081] Among them, the first limit switch 231 and the second limit switch 232 are a type of position switch. They utilize the collision of moving parts of production machinery to actuate their contacts, thereby connecting or disconnecting the control circuit to achieve a certain control purpose.

[0082] For example, when the valve plate 21 moves to the closed position or the intermediate position, the swing arm 36 contacts the first limit switch 231, and when the valve plate 21 moves to the open position, the swing arm 36 contacts the second limit switch 232.

[0083] For example, when the valve plate 21 is in the closed position and needs to be opened, the lifting drive mechanism 32 drives the valve plate shaft 22 to move upward, so that the valve plate 21 moves upward until the valve plate 21 is in the middle position. The rotation drive mechanism 35 then drives the swing arm 36 to rotate along the a1 direction, and drives the valve plate shaft 22 and the valve plate 21 to rotate. When the swing arm 36 touches the second limit switch 232, the circuit controlling the operation of the rotation drive mechanism 35 is disconnected, so that the rotation drive mechanism 35 stops driving, thereby stopping the valve plate 21 in the open position. When the valve plate 21 is in the open position and needs to be closed, the rotation drive mechanism 35 drives the swing arm 36 to rotate along the a2 direction, and drives the valve plate shaft 22 and the valve plate 21 to rotate. When the swing arm 36 touches the first limit switch 231, the circuit controlling the operation of the rotation drive mechanism 35 is disconnected, so that the rotation drive mechanism 35 stops driving, and the circuit controlling the operation of the lifting drive mechanism 32 is connected, so that the valve plate 21 moves downward in the vertical direction.

[0084] By providing a first limit switch 231 and a second limit switch 232, it is possible to detect whether the valve plate 21 has reached the middle position or the open position during the horizontal rotation process, which facilitates the opening and closing of the rotation drive system and makes the control system more accurate in controlling the position of the valve plate 21.

[0085] refer to Figure 11 According to some embodiments of the present invention, the upper side of the valve seat 10 is provided with a first anti-rotation post 13 and / or a second anti-rotation post, the first anti-rotation post 13 and the first limit switch 231 are located on the same side of the rotation direction of the second end 362, and the second anti-rotation post and the second limit switch 232 are located on the same side of the rotation direction of the second end 362.

[0086] For example, a first anti-rotation post 13 may be provided on the upper side of the valve seat 10, or a second anti-rotation post may be provided on the upper side of the valve seat 10, and the first anti-rotation post 13 and the second anti-rotation post may be provided on the upper side of the valve seat 10 at the same time.

[0087] By providing a first anti-rotation post 13 and / or a second anti-rotation post on the upper side of the valve seat 10, the swing arm 36 can be limited in the horizontal direction, so that the swing arm 36 swings within a preset safety range, avoiding damage to the first limit switch 231 and / or the second limit switch 232 due to the swing arm 36 not stopping in time during the horizontal movement, thus improving the safety of the isolation valve assembly 100.

[0088] refer to Figure 4 According to some embodiments of the present invention, the upper side of the valve seat 10 is provided with an anti-rotation protrusion 14, and the mounting plate 23 is provided with an anti-rotation hole 233, the anti-rotation protrusion 14 being accommodated in the anti-rotation hole 233.

[0089] By providing an anti-rotation protrusion 14 and having the anti-rotation protrusion 14 accommodated in the anti-rotation hole 233 on the mounting plate 23, the mounting plate 23 can be limited in the horizontal direction, thereby fixing the positions of the first limit switch 231 and the second limit switch 232 in the horizontal direction relative to the valve seat 10. When the valve plate shaft 22 rotates, the mounting plate 23 will not rotate with the valve plate shaft 22, thereby enabling the first limit switch 231 and the second limit switch 232 to accurately detect the position of the swing arm 36.

[0090] refer to Figures 7-8 According to some embodiments of the present invention, the inner peripheral wall of the communication channel 11 is provided with a supporting protrusion 111, the supporting protrusion 111 is located at the bottom of the valve seat 10, and the supporting protrusion 111 extends circumferentially along the communication channel 11; wherein, the upper surface of the supporting protrusion 111 is provided with a receiving groove 112, and a sealing member 113 is provided in the receiving groove 112. In the closed position, the valve plate 21 is supported on the upper surface of the supporting protrusion 111, and the sealing member 113 is located between the bottom surface of the valve plate 21 and the supporting protrusion 111.

[0091] For example, seal 113 can be a rubber component.

[0092] By providing a receiving groove 112 on the upper surface of the supporting protrusion 111 and a sealing element 113 in the receiving groove 112, the sealing effect between the valve plate 21 and the supporting protrusion 111 can be enhanced when the valve plate 21 is in the closed position. When the isolation valve assembly 100 is used in a single crystal growth equipment, the heat loss of the single crystal growth equipment during the heating process can be reduced.

[0093] refer to Figures 7-8According to some embodiments of the present invention, the valve plate mechanism 20 further includes a lifting arm 24, which extends radially along the valve seat 10. One end of the lifting arm 24 is connected to the middle of the valve plate 21, and the other end of the lifting arm 24 is located in the receiving cavity 12 and connected to the lower end of the valve plate rotating shaft 22. The bottom surface of the lifting arm 24 is provided with a support member 241. The upper surface of the valve seat 10 is provided with a valve plate lifting block 15, and the upper side of the valve plate lifting block 15 is provided with a mating groove 151. In the closed position, the support member 241 is accommodated in the mating groove 151. When the valve plate 21 is in the open position and between the intermediate position and the open position, the support member 241 is supported on the upper surface of the valve plate lifting block 15.

[0094] For example, when the valve plate 21 is in the closed position and needs to be opened, the valve plate shaft 22 moves upward under the drive of the drive assembly 30, thereby driving the lifting arm 24 and the valve plate 21 to move upward, and also driving the support member 241 located on the bottom surface of the lifting arm 24 to move upward, so that the support member 241 is disengaged from the mating groove 151. When the valve plate 21 is in the middle position, the valve plate shaft 22 rotates along the a1 direction under the drive of the drive assembly 30, thereby driving the lifting arm 24 and the valve plate 21 to rotate. At this time, the support member 241 is supported on the upper surface of the valve plate lifting block 15 and moves relative to the valve plate lifting block 15 until the valve plate 21 is in the open position.

[0095] By providing a support member 241 on the bottom surface of the lifting arm 24, when the valve plate 21 is in the open position and between the middle and open positions, the support member 241 supports the upper surface of the valve plate lifting block 15, which can support the lifting arm 24 and prevent the valve plate 21 from falling when the drive assembly 30 is closed, thus improving the stability of the valve plate 21 when it is in the middle and open positions.

[0096] refer to Figure 11 According to some embodiments of the present invention, the support member 241 is a support roller, which can roll on the valve plate lifting block 15 along the rotation direction of the valve plate 21.

[0097] By using the support member 241 as a support roller, when the valve plate 21 moves from the middle position to the open position, the support roller can roll on the valve plate lifting block 15 to reduce the friction between the support member 241 and the valve plate lifting block 15, thereby reducing the resistance to the movement of the valve plate 21 and making the opening process of the valve plate 21 easier.

[0098] According to a second aspect of the present invention, a single crystal growth apparatus includes a main furnace chamber, an auxiliary furnace chamber, and an isolation valve assembly 100 according to a first aspect of the present invention. The auxiliary furnace chamber is located above the main furnace chamber, the isolation valve assembly 100 is disposed between the main furnace chamber and the auxiliary furnace chamber, and a communication channel 11 is used to connect the main furnace chamber and the auxiliary furnace chamber.

[0099] According to an embodiment of the present invention, the single crystal growth apparatus includes an isolation valve assembly 100, which is an embodiment of the first aspect of the present invention. The drive component 30 of the isolation valve assembly 100 includes a rotation mechanism 34, which drives the valve plate shaft 22 to rotate around its own central axis, thereby moving the valve plate 21 between the intermediate position and the open position. This reduces the space occupied by the valve plate 21 in the height direction when it is in the open position. When the valve plate 21 is in the open position, it is housed in the housing cavity 12 to open the communication channel 11, allowing the crystal rod to grow from the communication channel 11. This avoids the space of the auxiliary furnace chamber when the valve plate 21 is open, which reduces the effective height of the auxiliary furnace chamber and thus reduces the impact on the growth length of the crystal rod. Furthermore, by positioning the lifting drive mechanism 32 on the outer periphery of the valve plate shaft 22 and connecting the lifting drive mechanism 32 to the upper end of the valve plate shaft 22 through the connecting component 33, the lifting drive mechanism 32 indirectly drives the lifting and lowering of the valve plate shaft 22 through the connecting component 33. This allows for a more flexible arrangement of the position of the lifting drive mechanism 32 according to the installation requirements of the isolation valve assembly 100.

[0100] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0101] In the description of this invention, "first feature" and "second feature" may include one or more of the features.

[0102] In the description of this invention, "a plurality of" means two or more.

[0103] In the description of this invention, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0104] In the description of this invention, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicating that the first feature is at a higher horizontal level than the second feature.

[0105] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0106] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An isolation valve assembly, characterized in that, For use in single crystal growth equipment and including: A valve seat, wherein a communicating channel and a receiving cavity are formed within the valve seat; A valve plate mechanism includes a valve plate and a valve plate shaft. The valve plate shaft extends vertically and passes through the valve seat. The upper end of the valve plate shaft extends above the valve seat, and the lower end of the valve plate shaft is located in the receiving cavity and connected to the valve plate. The valve plate has a closed position and an open position. In the open position, the valve plate is received in the receiving cavity to open the communication channel. In the closed position, the valve plate is located in the communication channel to close the communication channel. A drive assembly is mounted on the valve seat and located outside the valve seat. The drive assembly is located on the outer periphery of the valve plate shaft and connected to the upper end of the valve plate shaft to drive the valve plate to move between the closed position and the open position.

2. The isolation valve assembly according to claim 1, characterized in that, The valve plate also has an intermediate position. The drive assembly includes a lifting mechanism and a rotating mechanism. The lifting mechanism includes a lifting drive mechanism and a connecting assembly. The lifting drive mechanism is connected to the upper end of the valve plate rotating shaft through the connecting assembly. The lifting drive mechanism drives the valve plate rotating shaft to rise and fall through the connecting assembly, thereby causing the valve plate to move between the closed position and the intermediate position. The rotating mechanism is connected to the upper end of the valve plate rotating shaft to drive the valve plate rotating shaft to rotate around its own central axis, thereby causing the valve plate to move between the intermediate position and the open position.

3. The isolation valve assembly according to claim 2, characterized in that, The lifting drive mechanism is located on the outer periphery of the valve seat; and / or, at least a portion of the lifting drive mechanism is lower than the upper end face of the valve plate shaft.

4. The isolation valve assembly according to claim 2, characterized in that, The connecting assembly includes a connecting arm and a pressure block. The output end of the lifting drive mechanism is a first output end, which is movable in the vertical direction. The pressure block is fixed to the first output end. The two ends of the connecting arm are a first connecting end and a second connecting end, respectively. The first connecting end is fixedly connected to the upper end of the valve plate shaft. A mating groove is formed inside the pressure block. The second connecting end is adapted to be accommodated in the mating groove and can rotate relative to the pressure block around the valve plate shaft.

5. The isolation valve assembly according to claim 4, characterized in that, The mating groove extends through one side of the pressure block along the rotation direction of the connecting arm to form a clearance opening, and the second connecting end enters and exits the mating groove through the clearance opening; When the valve plate is in the closed position and the intermediate position, the second connecting end is accommodated in the mating groove; when the valve plate is in the open position, the second connecting end disengages from the mating groove.

6. The isolation valve assembly according to claim 5, characterized in that, It also includes a safety guard plate, which is supported on the top of the valve seat by a column. At least a portion of the safety guard plate is located above the pressure block and blocks the mating area between the second connection end and the pressure block.

7. The isolation valve assembly according to claim 4, characterized in that, The pressing block includes a pressing block base and a pressing block top cover. The pressing block top cover is connected to the upper side of the pressing block base and together with the pressing block base, defines the mating groove. And / or, the bottom and top walls of the mating groove are provided with anti-wear pads, the anti-wear pads are located between the pressure block and the second connecting end of the connecting arm, and the anti-wear pads are fixed to the connecting arm or the pressure block.

8. The isolation valve assembly according to claim 2, characterized in that, The rotating mechanism includes a rotating drive mechanism and a swing arm. The two ends of the swing arm are a first end and a second end, respectively. The first end is fixedly connected to the upper end of the valve plate shaft. The output end of the rotating drive mechanism is a second output end, which can move in the horizontal direction. The second end is connected to the second output end. The second output end is provided with a connecting shaft extending in the vertical direction. The connecting shaft passes through the second end and the second end can move up and down relative to the connecting shaft.

9. The isolation valve assembly according to claim 8, characterized in that, The rotary drive mechanism is located on the outer periphery of the valve seat; and / or, the outer periphery of the valve seat forms a corner, and both the rotary drive mechanism and the lifting drive mechanism are located near the same corner of the valve seat.

10. The isolation valve assembly according to claim 8, characterized in that, The second output terminal is provided with a first position sensor and a second position sensor. The first position sensor is located above the second end to detect whether the valve plate is located in the middle position or the open position. The second position sensor is located below the second end to detect whether the valve plate is located in the closed position. And / or, a sliding bearing sleeve is fitted on the outer periphery of the connecting shaft, and the sliding bearing sleeve is fixed to the second end.

11. The isolation valve assembly according to claim 8, characterized in that, An mounting plate is sleeved on the upper end of the valve plate rotating shaft. The mounting plate is located below the swing arm. The mounting plate moves in the vertical direction relative to the valve plate rotating shaft. The mounting plate is fixed in the circumferential direction relative to the valve plate rotating shaft. The mounting plate has a first limit switch and a second limit switch installed on its upper side. The first limit switch and the second limit switch are located on both sides of the rotation direction of the second end, respectively. The first limit switch is used to detect whether the valve plate is in the closed position or the intermediate position, and the second limit switch is used to detect whether the valve plate is in the open position.

12. The isolation valve assembly according to any one of claims 2-11, characterized in that, The inner peripheral wall of the connecting channel is provided with a supporting protrusion, which is located at the bottom of the valve seat and extends circumferentially along the connecting channel. The upper surface of the supporting convex plate is provided with a receiving groove, and a sealing element is provided in the receiving groove. In the closed position, the valve plate is supported on the upper surface of the supporting convex plate, and the sealing element is located between the bottom surface of the valve plate and the supporting convex plate.

13. The isolation valve assembly according to claim 12, characterized in that, The valve plate mechanism also includes a lifting arm, which extends radially along the valve seat. One end of the lifting arm is connected to the middle of the valve plate, and the other end of the lifting arm is located in the receiving cavity and connected to the lower end of the valve plate pivot. The bottom surface of the lifting arm is provided with a support member. The valve seat has a valve plate lifting block on its upper surface and a mating groove on its upper side. In the closed position, the support is accommodated in the mating groove. When the valve plate is in the open position and between the intermediate position and the open position, the support is supported on the upper surface of the valve plate lifting block.

14. A single crystal growth apparatus, characterized in that, include: Main furnace chamber; A secondary furnace chamber, located above the main furnace chamber; The isolation valve assembly according to any one of claims 1-13 is disposed between the main furnace chamber and the auxiliary furnace chamber, and the communication channel is used to connect the main furnace chamber and the auxiliary furnace chamber.

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