Carbon dioxide supercritical state constant temperature cooler

Abstract

The invention relates to the field of semiconductor temperature control equipment, in particular to a carbon dioxide supercritical state constant-temperature cooler which comprises a front shell, a rear shell, a plurality of heat exchange plates, a cooling circulation assembly, a carbon dioxide treatment assembly and a heat exchange control assembly. When a plurality of heat exchange plates are overlapped and combined, independent circulation of cooling water, independent input of carbon dioxide and state change of a heat exchange medium are realized through a blocking flange, a spacing flange, a first connection convex ring and a second connection convex ring which are arranged on the heat exchange plates, a continuous and effective heat exchange effect is realized, and a pressure connection stopping box of the heat exchange control assembly is matched, so that the heat exchange efficiency is improved. Self-adaptive adjustment can be achieved, n-pentane in the heat exchange medium cavity is always in a gas-liquid mixed state, the temperature is stabilized at 36.1 DEG C, heat exchange is conducted through gasification latent heat and carbon dioxide, and it is ensured that the temperature is stable in the whole heat exchange process.

Description

Technical Field

[0001] This invention relates to the field of semiconductor temperature control equipment, specifically a carbon dioxide supercritical state constant temperature cooler. Background Technology

[0002] The sensible heat transfer efficiency of supercritical carbon dioxide fluid in a gas cooler is affected by temperature fluctuations. This phenomenon mainly stems from the unique variation of the physical properties of carbon dioxide under supercritical conditions. In transcritical carbon dioxide refrigeration cycles, the gas cooler is a key component on the high-pressure side.

[0003] The high-temperature, high-pressure supercritical carbon dioxide fluid (pressure > 7.38 MPa, temperature > 31.1 °C) discharged from the compressor enters the gas cooler. Through heat exchange with the external cooling medium, it releases heat via sensible heat transfer, lowering its own temperature while maintaining a supercritical state. The heat transfer characteristics of supercritical carbon dioxide mainly depend on two factors: specific heat change and boundary layer properties. Unlike subcritical cycles, supercritical carbon dioxide does not undergo a phase change within the gas cooler; heat transfer is entirely achieved through sensible heat exchange. This makes its heat transfer efficiency extremely sensitive to temperature changes. When the temperature of carbon dioxide approaches the critical temperature (31.1℃), the specific heat capacity reaches a maximum near the critical point. Small changes in temperature can cause drastic fluctuations in the specific heat capacity. The thermal conductivity changes nonlinearly in the critical region. Temperature fluctuations lead to unstable heat transfer rates and significant changes in the density gradient, affecting the formation and development of the flow boundary layer. Temperature fluctuations can also cause uneven distribution of physical properties (viscosity, thermal conductivity, etc.) within the boundary layer. The boundary layer thickness fluctuates with temperature, affecting heat transfer resistance and potentially causing local "boiling-like" phenomena, exacerbating heat transfer instability and leading to a decrease in heat exchanger efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a supercritical carbon dioxide isothermal cooler to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a supercritical carbon dioxide isothermal cooler, comprising: The front shell, the rear shell, and a plurality of heat exchange plates are provided between the front shell and the rear shell. The heat exchange plates are welded and fixedly connected to the side of the heat exchange plates that contacts the front shell and the rear shell and to adjacent heat exchange plates. The cooling circulation assembly includes a pressure check box and several cooling water chambers. A cooling water inlet connector and a cooling water outlet connector are provided on one side of the front housing. The pressure check box is connected to the cooling water outlet connector, and the cooling water chambers are connected to the cooling water inlet connector. A carbon dioxide treatment assembly, comprising several carbon dioxide chambers, with a carbon dioxide inlet connector and a carbon dioxide outlet connector provided on one side of the front housing, both of which are connected to the carbon dioxide chambers. A heat exchange control assembly includes a pressure connecting pipe and several heat exchange medium chambers. One side of the pressure connecting pipe is connected to one of the heat exchange medium chambers, and a pressure check box is connected to one end of the pressure connecting pipe.

[0006] Preferably, a sealing flange is punched on one side of each heat exchange plate near the edge. Two adjacent heat exchange plates are welded and sealed together by the sealing flange. The rear shell is welded and sealed to the heat exchange plates by the sealing flange. The two heat exchange plates are combined to form a heat exchange medium cavity by the spacing of the sealing flanges. The heat exchange medium cavity is filled with n-pentane.

[0007] Preferably, the heat exchange plates are provided with spacer flanges on the side away from the sealing flange, and the spacer flanges of two adjacent heat exchange plates are welded and sealed together.

[0008] Preferably, the spacer flange has a first enclosure groove and a second enclosure groove on one side of the heat exchange plate, and after the spacer flanges of the two heat exchange plates are welded together, the two first enclosure grooves are combined to form a cooling water chamber, and the two second enclosure grooves are combined to form a carbon dioxide chamber.

[0009] Preferably, the heat exchange plate has two through holes in both the first enclosure groove and the second enclosure groove, and the four through holes are respectively set with a cooling water inlet connector, a cooling water outlet connector, a carbon dioxide inlet connector and a carbon dioxide outlet connector.

[0010] Preferably, each heat exchange plate has a second connecting protrusion stamped on one side of the heat exchange medium cavity. The second connecting protrusions of two adjacent heat exchange plates are welded together. Thus, several cooling water cavities are combined and connected through the interval of the spacer flange and the second connecting protrusion. The cooling water cavities are connected to the cooling water inlet connector and the cooling water outlet connector.

[0011] Preferably, the carbon dioxide chambers are connected in combination through the spacing of the spacer flange and the second connecting ring. The carbon dioxide chambers are connected to the carbon dioxide inlet connector and the carbon dioxide outlet connector. The cooling water chamber and the carbon dioxide chamber are isolated from the heat exchange medium chamber and the outside, respectively.

[0012] Preferably, each heat exchange plate is provided with a first connecting protrusion ring stamped on one side of the heat exchange plate located in the first enclosure groove. The first connecting protrusion rings of two adjacent heat exchange plates are welded together. In this way, several heat exchange medium cavities are combined and connected through the interval of the sealing flange and the first connecting protrusion ring. One side of the pressure connecting pipe is inserted into the front shell, and the end of the pressure connecting pipe inserted into the front shell is connected to the heat exchange medium cavity.

[0013] Preferably, the pressure check box has a transfer water tank inside, and a cooling water discharge connector is connected to one side of the transfer water tank. A sealing ball shell is provided inside the transfer water tank, and one side of the sealing ball shell penetrates the pressure check box. The pressure check box has diaphragm grooves at both the upper and lower ends of the transfer water tank. A press-fit sealing ring is inserted into each diaphragm groove, and a sealing diaphragm is press-fitted onto the side of the press-fit sealing ring near the sealing ball shell. The upper and lower ends of the sealing ball shell are connected to a drain channel with a sealing groove. The center of the two sealing diaphragms is jointly sealed with a stop rod. The stop rod is located in the transfer tank and is vertically inserted through the sealing sphere. Both sides of the stop rod are equipped with sealing pistons. The two sealing pistons are respectively inserted into two sealing grooves. The lower end of the pressure stop box is vertically opened with a pressure conveying groove. The upper end of the pressure connecting pipe is sealed and inserted into the lower end of the pressure conveying groove. The upper end of the pressure conveying groove is opened with a piston groove. The lower end of the stop rod is inserted into the piston groove and is equipped with a push piston.

[0014] Preferably, a spring box is vertically provided at the upper end of the pressure stop box, and a stop connecting rod is movably inserted into the spring box through the upper end of the sealing diaphragm and is provided with a lower pressure plate. A prismatic rod is vertically provided at the upper end of the lower pressure plate, and the upper end of the prismatic rod is vertically movably inserted through the spring box. A lower pressure holding spring is sleeved on the side of the prismatic rod located inside the spring box.

[0015] Compared with the prior art, the beneficial effects of the present invention are: Several heat exchange plates are arranged between the front and rear shells. When these heat exchange plates are stacked and combined, the independent circulation of cooling water, independent input of carbon dioxide, and changes in the state of the heat exchange medium are achieved through the sealing flange, the spacing flange, the first connecting ring, and the second connecting ring. This ensures continuous and effective heat exchange. In addition, the pressure check box of the heat exchange control component can be used for adaptive adjustment, so that the n-pentane in the heat exchange medium cavity is always in a gas-liquid mixed state and the temperature is stable at 36.1 degrees Celsius. Heat exchange with carbon dioxide through latent heat of vaporization ensures temperature stability throughout the entire heat exchange process. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a side cross-sectional view of the heat exchange plates of the present invention in their combined state; Figure 3 For the present invention Figure 2 Schematic diagram of part A; Figure 4 For the present invention Figure 2 Schematic diagram of part B; Figure 5 This is a side sectional view of the pressure stop box of the present invention in the connected state; Figure 6 For the present invention Figure 5 Schematic diagram of part C; Figure 7 For the present invention Figure 6 Schematic diagram of part D; Figure 8 For the present invention Figure 6 Schematic diagram of part E; Figure 9 This is a schematic diagram of the disassembled structure of the present invention; Figure 10 This is a schematic diagram of the heat exchange plate assembly structure of the present invention; Figure 11 For the present invention Figure 10 Schematic diagram of part F.

[0017] In the diagram: 1. Front shell; 2. Rear shell; 3. Heat exchange plate; 4. Cooling water inlet connector; 5. Cooling water outlet connector; 6. Carbon dioxide inlet connector; 7. Carbon dioxide outlet connector; 8. Pressure connecting pipe; 9. Pressure stop box; 10. Sealing flange; 11. Spacer flange; 12. First enclosure groove; 13. Second enclosure groove; 14. Connecting hole; 15. Cooling water chamber; 16. Carbon dioxide chamber; 17. Heat exchange medium chamber; 18. Transfer water tank; 19. Sealing spherical shell; 20. Drainage groove; 21. Press-fit sealing ring; 22. Sealing diaphragm; 23. Stop rod; 24. Sealing piston; 25. Spring box; 26. Prism rod; 27. Downward retaining spring; 28. Pressure conveying groove; 29. ​​Push piston; 30. First connecting protrusion ring; 31. Second connecting protrusion ring. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the present invention clear and complete, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of the present invention, and are merely illustrative of the embodiments of the present invention. They are not intended to limit the embodiments of the present invention. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figures 1-11 The present invention provides the following technical solutions: A supercritical carbon dioxide constant-temperature cooler includes a front shell 1, a rear shell 2, and several heat exchange plates 3. The heat exchange plates 3 are disposed between the front shell 1 and the rear shell 2. The heat exchange plates 3 are welded and fixed to each other on the side in contact with the front shell 1 and the rear shell 2, and to each adjacent heat exchange plate 3. A sealing flange 10 is stamped on one side of each heat exchange plate 3 near the edge. Adjacent heat exchange plates 3 are welded and sealed together by the sealing flange 10. The rear shell 2 is welded and sealed to the heat exchange plates 3 by the sealing flange 10. The spacing of two heat exchange plates 3 combined by the sealing flange 10 forms a heat exchange medium cavity 17, which is filled with n-pentane. The front shell 1, the rear shell 2, and the heat exchange plates 3 are sealed and combined by welding, which improves the structural strength and durability. The spacing between the chambers is controlled by the stamped shape on the heat exchange plates 3.

[0020] Please refer to Figure 3 , Figure 7 and Figure 10-11 A cooling circulation assembly is provided for the circulation of the cold source for carbon dioxide cooling. The cooling circulation assembly includes a pressure check box 9 and several cooling water chambers 15. A cooling water inlet connector 4 and a cooling water outlet connector 5 are provided on one side of the front housing 1. The pressure check box 9 is connected to the cooling water outlet connector 5, and the cooling water chambers 15 are connected to the cooling water inlet connector 4. The heat exchange plates 3 are all stamped with spacer flanges 11 on the side away from the sealing flange 10. The spacer flanges 11 of two adjacent heat exchange plates 3 are welded and sealed together. The spacer flanges 11 surround a first enclosure groove 12 and a second enclosure groove 13 on one side of the heat exchange plate 3. After the spacer flanges 11 of two heat exchange plates 3 are combined and welded together, the two first enclosure grooves 12 are combined to form the cooling water chamber 15. The connection and sealing between two adjacent heat exchange plates 3, as well as between the heat exchange plates 3 and the front housing 1 and the rear housing 2, are achieved by welding the sealing flanges 10 and the spacer flanges 11 together, thereby forming the cooling water chamber 15 and the heat exchange medium chamber 17 respectively.

[0021] Please refer to Figure 3 , Figure 7 and Figure 9A carbon dioxide treatment assembly is provided for the input and output of carbon dioxide. The carbon dioxide treatment assembly includes several carbon dioxide chambers 16. A carbon dioxide input connector 6 and a carbon dioxide output connector 7 are provided on one side of the front housing 1. Both the carbon dioxide input connector 6 and the carbon dioxide output connector 7 are connected to the carbon dioxide chambers 16. Two second enclosure grooves 13 are combined to form the carbon dioxide chamber 16. Similarly, the first enclosure groove 12 is combined with the front housing 1 to form the cooling water chamber 15. The second enclosure groove 13 is combined with the rear housing 2 to form the carbon dioxide chamber 16. The carbon dioxide chamber 16 and the cooling water chamber 15 are on the same side. The heat exchange plate 3 is located on the other side of the heat exchange medium chamber 17. When placed vertically, the cooling water chamber 15 is located above the carbon dioxide chamber 16, and the inner volume of the cooling water chamber 15 is larger than the volume of the carbon dioxide chamber 16. When the heat exchange medium chamber 17 is filled with n-pentane, the liquid level of n-pentane is higher than the horizontal level of the carbon dioxide chamber 16, which can exchange heat with the carbon dioxide entering the carbon dioxide chamber 16.

[0022] Please refer to Figure 3-4 , Figure 7 and Figure 9-10 Each heat exchange plate 3 has two through holes 14 extending through it within the first enclosure groove 12 and the second enclosure groove 13. These four through holes 14 correspond to the cooling water inlet connector 4, the cooling water outlet connector 5, the carbon dioxide inlet connector 6, and the carbon dioxide outlet connector 7, respectively. A second connecting protrusion ring 31 is stamped on one side of each heat exchange plate 3 within the heat exchange medium cavity 17. The second connecting protrusion rings 31 of adjacent heat exchange plates 3 are welded together. Several cooling water cavities 15 are connected and combined through the spacing of the spacer flanges 11 and the second connecting protrusion rings 31. The cooling water cavities 15 are connected to the cooling water inlet connector 4 and the cooling water outlet connector 5. The carbon dioxide chambers 16 are connected by a combination of spacer flanges 11 and a second connecting ring 31. The carbon dioxide chambers 16 are connected to the carbon dioxide inlet connector 6 and the carbon dioxide outlet connector 7. The cooling water chamber 15 and the carbon dioxide chamber 16 are isolated from the heat exchange medium chamber 17 and the outside, respectively. The cooling water and carbon dioxide in the cooling water chamber 15 and the carbon dioxide chamber 16 are input and discharged through the cooling water inlet connector 4 and the cooling water outlet connector 5, and the carbon dioxide inlet connector 6 and the carbon dioxide outlet connector 7, respectively. Under the cooperation of the second connecting ring 31, they will not be connected to the heat exchange medium chamber 17.

[0023] A heat exchange control component is provided for adaptive heat exchange control. The heat exchange control component includes a pressure connecting pipe 8 and several heat exchange medium chambers 17. One side of the pressure connecting pipe 8 is connected to one of the heat exchange medium chambers 17, and a pressure stop box 9 is connected to one end of the pressure connecting pipe 8. Each heat exchange plate 3 located within the first enclosure groove 12 has a first connecting protrusion ring 30 stamped on one side. The first connecting protrusion rings 30 of adjacent heat exchange plates 3 are welded together. Thus, the several heat exchange medium chambers 17 are connected by the spacing of the sealing flange 10 and the first connecting protrusion rings 30. One side of the pressure connecting pipe 8 is inserted into the front housing 1, and one end of the pressure connecting pipe 8 inserted into the front housing 1 is connected to one of the heat exchange medium chambers 17. The heat exchange medium chambers 17 are connected to the pressure connection pipe 8 through the combination of the first connecting convex ring 30. When carbon dioxide enters the carbon dioxide chambers 16 from the CO2 inlet, the n-pentane in the heat exchange medium chamber 17 exchanges heat with the carbon dioxide through the gaps of the heat exchange plates 3. The boiling point of n-pentane is 36.1 degrees Celsius. The n-pentane in the heat exchange medium chamber 17 is a gas-liquid mixture. The temperature is stable at 36.1 degrees Celsius. The gaseous n-pentane rises to the position of the cooling water chamber 15 and exchanges heat with the cooling water, cooling the gaseous n-pentane in the upper part of the heat exchange medium chamber 17, condensing it into liquid, and flowing to the lower part of the heat exchange medium chamber, thus forming a cycle.

[0024] As carbon dioxide continues to be input, n-pentane evaporates to form more gaseous state, and the pressure in the heat exchange medium chamber 17 rises. The pressure pushes the pressure water valve connected to it to open, and low-temperature cooling water can flow into the cooler to cool the gaseous n-pentane in the upper part of the heat exchange medium chamber, condensing it into liquid state, and flowing to the lower part of the heat exchange medium chamber, thus forming a cycle.

[0025] Please refer to Figure 5-8The pressure check box 9 has a transfer water tank 18 inside. A cooling water discharge connector 5 is connected to one side of the transfer water tank 18. A sealing ball shell 19 is located inside the transfer water tank 18. One side of the sealing ball shell 19 penetrates the pressure check box 9. Diaphragm grooves are located at both the upper and lower ends of the pressure check box 9, and press-fitted sealing rings 21 are inserted into each diaphragm groove. A sealing diaphragm 22 is press-fitted onto the side of the press-fitted sealing ring 21 near the sealing ball shell 19. The upper and lower ends of the sealing ball shell 19 are connected to a drain trough 20 with a sealing groove. A check rod 23 is inserted into the center of both sealing diaphragms 22. The check rod 23 is vertically inserted through the sealing ball shell 19 on one side inside the transfer water tank 18. Sealing pistons 24 are located on both sides of the check rod 23, and each sealing piston 24 is inserted into one of the sealing grooves. A pressure conveying groove 28 is vertically opened through the lower end of the pressure box 9. The upper end of the pressure connecting pipe 8 is sealed and inserted into the lower end of the pressure conveying groove 28. A piston groove is opened in the upper end of the pressure conveying groove 28. The lower end of the stop rod 23 is inserted into the piston groove and a push piston 29 is provided. A spring box 25 is vertically provided in the upper end of the pressure stop box 9. The stop rod 23 is movably inserted into the spring box 25 through the upper end of the sealing diaphragm 22 and a lower pressure plate is provided. A prismatic rod 26 is vertically provided in the upper end of the lower pressure plate. The upper end of the prismatic rod 26 is vertically movably inserted through the spring box 25. A lower pressure holding spring 27 is sleeved on the side of the prismatic rod 26 located in the spring box 25. As carbon dioxide is continuously input, n-pentane evaporates to form more gaseous state. The pressure in the heat exchange medium chamber 17 rises. The generated gas pressure enters the pressure conveying groove 28 from the pressure connecting pipe 8 and then pushes the stop rod 23 to move up and down. The upward-moving stop rod 23 pushes the two blocking pistons 24 away from the two blocking grooves of the blocking ball shell 19. A constraint block is provided on the side of the stop rod 23 near the spring box 25, so that the pushing piston 29 cannot be disengaged from the pressure conveying groove 28, but the blocking piston 24 can be disengaged from the blocking groove. At this time, the transfer water tank 18 is connected to several cooling water chambers 15 and the drain tank 20 through the cooling water discharge connector 5. At this time, the cooling water can be discharged from the cooling water discharge connector 5 and the drain tank 20, realizing the circulation of cooling water in the cooling water chamber 15, thereby continuously cooling the gaseous n-pentane in the upper part of the heat exchange medium chamber 17, condensing it into liquid, thus forming a cycle. During this process, the n-pentane in the heat exchange medium chamber is always in a gas-liquid mixed state, and the temperature is stable at 36.1 degrees Celsius. It exchanges heat with carbon dioxide through the latent heat of vaporization to ensure the temperature stability of the entire heat exchange process. When the heat exchange is used, the pressure connecting pipe 8 is filled with gaseous n-pentane, and the critical pressure value is 101.325 kPa.

[0026] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A supercritical carbon dioxide isothermal cooler, characterized in that, include: The front shell (1), the rear shell (2) and a number of heat exchange plates (3) are provided between the front shell (1) and the rear shell (2). The heat exchange plates (3) are welded and fixedly connected to the side of the heat exchange plates (3) that is in contact with the front shell (1) and the rear shell (2) and to two adjacent heat exchange plates (3). The cooling circulation assembly includes a pressure stop box (9) and several cooling water chambers (15). A cooling water inlet connector (4) and a cooling water outlet connector (5) are provided on one side of the front housing (1). The pressure stop box (9) is connected to the cooling water outlet connector (5), and the cooling water chambers (15) are connected to the cooling water inlet connector (4). A carbon dioxide treatment assembly, comprising several carbon dioxide chambers (16), with a carbon dioxide inlet connector (6) and a carbon dioxide outlet connector (7) provided on one side of the front housing (1), both the carbon dioxide inlet connector (6) and the carbon dioxide outlet connector (7) being connected to the carbon dioxide chambers (16). The heat exchange control assembly includes a pressure connecting pipe (8) and several heat exchange medium chambers (17). One side of the pressure connecting pipe (8) is connected to the heat exchange medium chambers (17), and a pressure check box (9) is connected to one end of the pressure connecting pipe (8).

2. The carbon dioxide supercritical state isothermal cooler according to claim 1, characterized in that: One side of each heat exchange plate (3) near the edge is stamped with a sealing flange (10). Two adjacent heat exchange plates (3) are welded and sealed together by the sealing flange (10). The rear shell (2) is welded and sealed to the heat exchange plate (3) by the sealing flange (10). The two heat exchange plates (3) are combined to form a heat exchange medium cavity (17) by the spacing of the sealing flange (10). The heat exchange medium cavity (17) is filled with n-pentane.

3. A supercritical carbon dioxide isothermal cooler according to claim 2, characterized in that: The heat exchange plates (3) are all provided with spacer flanges (11) on the side away from the sealing flange (10), and the spacer flanges (11) of two adjacent heat exchange plates (3) are welded and sealed together.

4. A supercritical carbon dioxide isothermal cooler according to claim 3, characterized in that: The spacer flange (11) surrounds a first enclosure groove (12) and a second enclosure groove (13) on one side of the heat exchange plate (3). After the spacer flange (11) of the two heat exchange plates (3) is welded together, the two first enclosure grooves (12) are combined to form a cooling water chamber (15), and the two second enclosure grooves (13) are combined to form a carbon dioxide chamber (16).

5. A supercritical carbon dioxide isothermal cooler according to claim 4, characterized in that: The heat exchange plate (3) has two through holes (14) in both the first enclosure groove (12) and the second enclosure groove (13). The four through holes (14) are respectively set with the cooling water inlet connector (4), the cooling water outlet connector (5), the carbon dioxide inlet connector (6) and the carbon dioxide outlet connector (7).

6. A supercritical carbon dioxide isothermal cooler according to claim 5, characterized in that: Each heat exchange plate (3) is provided with a second connecting protrusion (31) stamped on one side of the heat exchange medium cavity (17). The second connecting protrusions (31) of two adjacent heat exchange plates (3) are welded together. Thus, several cooling water cavities (15) are connected by the interval between the spacer flange (11) and the second connecting protrusion (31). The cooling water cavity (15) is connected to the cooling water inlet connector (4) and the cooling water outlet connector (5).

7. A supercritical carbon dioxide isothermal cooler according to claim 6, characterized in that: Several carbon dioxide chambers (16) are connected by a spacer flange (11) and a second connecting ring (31). The carbon dioxide chambers (16) are connected to the carbon dioxide inlet connector (6) and the carbon dioxide outlet connector (7). The cooling water chamber (15) and the carbon dioxide chamber (16) are isolated from the heat exchange medium chamber (17) and the outside, respectively.

8. A supercritical carbon dioxide isothermal cooler according to claim 7, characterized in that: The heat exchange plates (3) are all stamped with a first connecting protrusion (30) on one side of the first enclosure groove (12). The first connecting protrusions (30) of two adjacent heat exchange plates (3) are welded together. Thus, several heat exchange medium cavities (17) are connected by the interval between the sealing flange (10) and the first connecting protrusion (30). One side of the pressure connecting pipe (8) is inserted into the front shell (1), and one end of the pressure connecting pipe (8) inserted into the front shell (1) is connected to the heat exchange medium cavity (17).

9. A supercritical carbon dioxide isothermal cooler according to claim 1, characterized in that: The pressure check box (9) is provided with a transfer water tank (18). The cooling water discharge connector (5) is connected to one side of the transfer water tank (18). The transfer water tank (18) is provided with a sealing ball shell (19). One side of the sealing ball shell (19) passes through the pressure check box (9) and is provided with a sealing ball shell (19). The pressure check box (9) is provided with diaphragm grooves at both the upper and lower ends of the transfer water tank (18). Each diaphragm groove is sealed with a press-fit sealing ring (21). The side of the press-fit sealing ring (21) near the sealing ball shell (19) is sealed with a sealing diaphragm (22). Both the upper and lower ends of the sealing ball shell (19) are connected to the drain channel (20) and are provided with a sealing ball shell. The center of the two sealing diaphragms (22) is jointly sealed and inserted with a stop rod (23). The stop rod (23) is located in the transfer water tank (18) and vertically penetrates the sealing ball shell (19). Both sides of the stop rod (23) are provided with sealing pistons (24). The two sealing pistons (24) are respectively inserted into the two sealing grooves. The lower end of the pressure stop box (9) is vertically opened with a pressure conveying groove (28). The upper end of the pressure connecting pipe (8) is sealed and inserted into the lower end of the pressure conveying groove (28). The upper end of the pressure conveying groove (28) is opened with a piston groove. The lower end of the stop rod (23) is inserted into the piston groove and is provided with a push piston (29).

10. A supercritical carbon dioxide isothermal cooler according to claim 9, characterized in that: The pressure stop box (9) is vertically provided with a spring box (25) at the upper end. The stop connecting rod (23) passes through the upper end of the sealing diaphragm (22) and is movably inserted into the spring box (25) and is provided with a lower pressure plate. The upper end of the lower pressure plate is vertically provided with a prismatic rod (26). The upper end of the prismatic rod (26) vertically moves through the spring box (25), and a lower pressure holding spring (27) is sleeved on one side of the prismatic rod (26) located inside the spring box (25).

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