The application provides a heating control method and device, a temperature controller, a
semiconductor device and a medium, and relates to the field of control. When there is a
firmware upgrade requirement for a target temperature controller, a first
temperature control program is started to control the working of a heating component, and then the
firmware upgrade of the target temperature controller is performed. During the
firmware upgrade of the target temperature controller, the heating component can perform heating work based on the first
temperature control program, so that the
temperature drop of a heating object is avoided. Before the first
temperature control program is started, the current
control parameters of the target temperature controller are determined. After the firmware upgrade of the target temperature controller is completed, the normal working control of the heating component is restored according to the pre-determined
control parameters and a second temperature control program. Through the setting and starting of the first temperature control program, the
temperature drop of the heating object is effectively avoided, so that the problem that the internal region of the
semiconductor device and the like is polluted due to the
temperature drop is prevented, the normal implementation of the CVD process is ensured, and the increase of the process implementation cost and the reduction of the efficiency are avoided.