Dot matrix laser detection device and method

Abstract

The invention relates to a dot matrix laser detection device and method, and the device comprises a first lens which is used for collimating a light source into parallel light; the spectroscope is arranged on a light emitting path of the first lens and is used for dividing the collimated parallel light into a transmission light beam and a reflection light beam; the attenuation assembly is arranged on the path of the reflected light beam; the second lens is arranged on a light emitting path of the attenuation assembly, the focal length of the second lens is the same as that of the first lens, the distance between the second lens and the first lens along the optical axis is twice of the focal length, and the second lens and the first lens form a conjugate imaging relation between an object space conjugate plane and an image space conjugate plane; wherein a power measurement station is arranged between the first lens and the spectroscope, and a light spot measurement station is arranged on the image space conjugate plane. According to the dot matrix laser detection device and method, the size of a light spot can be directly measured under the non-disassembly condition, the energy information and the time domain information of the same pulse string are read at the same time, part and whole machine equipment detection is considered, and the universality is high.

Description

Technical Field

[0001] This invention belongs to the field of laser detection technology, and particularly relates to a dot matrix laser detection device and method. Background Technology

[0002] As an important branch of high-end medical care, the quality of fractional laser equipment directly affects the treatment effect and clinical safety. Fractional lasers often use high energy and short pulses to make dots, which results in the beam energy measured at the equipment outlet is often high. Additional attenuation methods are required before it can be directly incident on signal detection equipment.

[0003] Traditional detection methods for spot size measurement fall into three categories: direct observation, which uses thermal ablation with materials such as photosensitive paper or energy-efficient film to measure the spot size, but this method is limited by ablation energy, measuring tools, and the method itself, resulting in significant errors; direct measurement using a beam analyzer, which is highly accurate and simple to operate, but due to design limitations of the handheld device for fractional laser products or the external mechanical dimensions of the beam analyzer, the measurement location often cannot accommodate the beam analyzer on the same plane, making measurement impossible; and inverse estimation of spot size using the divergence angle, which ignores the Airy limit of spot convergence and has non-negligible errors when measuring small spots.

[0004] For the detection of laser pulse signals, the pulse width is usually detected using a high-speed oscilloscope and photodetector, and the power information is measured using a laser power meter. However, signal detection devices such as photodetectors have significantly different energy requirements than power sensors, necessitating separate attenuation measurements. In other words, accurate energy and pulse information cannot be measured simultaneously for the same pulse.

[0005] The measurement of the above parameters, as well as parameters such as laser wavelength, spot uniformity, and energy stability, and even the testing of the whole equipment and raw materials, all rely on the independent operating procedures of different equipment. At the same time, operators need to have a deep understanding of laser principles, be familiar with optical setup, and be able to operate complex instruments such as oscilloscopes and spectrometers. This greatly limits the testing efficiency and makes it difficult to popularize in the quality inspection process of large-scale production. Summary of the Invention

[0006] In view of this, the present invention provides a fractional laser detection device and method, which solves the problems of existing high-energy fractional laser detection requiring multiple sets of equipment to complete the detection of raw materials and the whole machine, the difficulty in accurately measuring the laser spot on the treatment surface due to space limitations, and the fact that high energy can easily damage the detection equipment and has low detection efficiency.

[0007] To achieve the above objectives, in a first aspect, the technical solution of the present invention to solve the technical problem is to provide a dot matrix laser detection device, comprising: a first lens for collimating a light source into parallel light; a beam splitter disposed on the light output path of the first lens for splitting the collimated parallel light into a transmitted beam and a reflected beam; an attenuation component disposed on the path of the reflected beam for attenuating the energy of the reflected beam; and a second lens disposed on the light output path of the attenuation component, having the same focal length as the first lens, and a spacing along the optical axis twice the focal length, and forming a conjugate imaging relationship between the object-side conjugate plane and the image-side conjugate plane with the first lens, for projecting the laser spot on the object-side conjugate plane onto the image-side conjugate plane with the same size and without distortion; wherein, a power measurement station is disposed between the first lens and the beam splitter, and a spot measurement station is disposed at the image-side conjugate plane.

[0008] In one specific embodiment, a part mounting station is provided on the path of the reflected beam, located between the attenuation component and the second lens. The part to be tested can be placed on the part mounting station. The part to be tested can adjust the angle of the reflected beam to form an auxiliary detection beam. A part detection station is provided on the path of the auxiliary detection beam.

[0009] In one specific embodiment, the part inspection station is provided with a first inspection position, a second inspection position and a third inspection position in sequence. The first inspection position, the second inspection position and the third inspection position are horizontally collinear in the direction parallel to the reflected light beam and are level with the light height, for placing optical inspection instruments.

[0010] In one specific embodiment, the part to be inspected at the part mounting station is a scanning galvanometer. A photodetector is provided at both the first and third detection positions. The photodetector is connected to an oscilloscope and is used to measure the movement speed or oscillation frequency of the scanning galvanometer.

[0011] In one specific embodiment, a beam analyzer or a PSD position sensor is provided at the second detection position to measure the position difference before and after the scanning galvanometer swings, calculate the repeatability of the scanning galvanometer, or measure the minimum swing angle of the scanning galvanometer based on the position of the light spot movement.

[0012] In one specific embodiment, the part to be inspected at the part mounting station is a field lens, and a beam analyzer is provided at the second inspection position to measure the focal length of the field lens and the consistency of the light spot under different deflection angles.

[0013] In one specific embodiment, a first linkage detection station, a second linkage detection station, and a third linkage detection station are sequentially arranged along the path of the transmitted beam. An optical lens mounting bracket is provided at the second linkage detection station, on which a lens to be tested can be placed. The optical lens mounting bracket can move along a direction perpendicular to the transmitted beam and can drive the lens to be tested to rotate. The first linkage detection station and the third linkage detection station are used to test the power of the transmitted beam before it enters the lens to be tested and the power after it exits the lens to be tested, respectively.

[0014] Secondly, the present invention provides a dot matrix laser detection method, comprising: collimating a dot matrix laser source into parallel light and measuring the total power of the parallel light; splitting the parallel light into a transmitted beam and a reflected beam using a beam splitter, and attenuating the reflected beam; performing equal-size, distortion-free conjugate imaging on the attenuated reflected beam to obtain a projected spot on the image-side conjugate surface that is consistent with the object-side conjugate surface; acquiring the image, spectrum, and pulse time-domain information of the projected spot on the image-side conjugate surface, and measuring the spot parameters of the dot matrix laser based on the image.

[0015] In one specific embodiment, after attenuating the reflected beam, the method further includes: placing the part under test into the optical path of the attenuated reflected beam, so that the reflected beam, after passing through the part under test, forms an auxiliary detection beam for part detection; when the part under test is a scanning galvanometer, acquiring the pulse signal of the auxiliary detection beam through at least two photodetectors, and calculating the movement speed or oscillation frequency of the scanning galvanometer based on the time difference between the pulses; or, acquiring the spot position of the auxiliary detection beam through a beam analyzer or a position sensor, and calculating the repeatability or minimum oscillation angle of the scanning galvanometer based on the position change; when the part under test is a field lens, acquiring the spot image of the auxiliary detection beam through a beam analyzer, and evaluating the focal length or spot consistency of the field lens based on the spot image.

[0016] In one specific embodiment, after the parallel light is split into a transmitted beam and a reflected beam by a beam splitter, the method further includes: placing the lens to be tested into the optical path of the transmitted beam; measuring the first power of the transmitted beam before it enters the lens to be tested; adjusting the position and / or angle of the lens to be tested, and measuring the second power of the transmitted beam after it is transmitted through the lens to be tested; and calculating the transmittance of the lens to be tested based on the first power and the second power.

[0017] Compared with the prior art, the dot matrix laser detection device and method provided by the present invention have the following beneficial effects: Through a synergistic optical path design that combines beam splitting and attenuation, high-energy fractional lasers are safely adapted to standard testing units. The F-2F conjugate imaging system overcomes spatial limitations, enabling equal-size, distortion-free projection and precise measurement of the treatment surface spot. Simultaneously, by utilizing the transmitted and reflected beams after beam splitting in the same optical path, lens transmittance measurement, component performance testing, and light source spot parameter acquisition are supported respectively. This allows for comprehensive testing of power, spectrum, pulse, spot morphology, and optical component performance on an integrated platform, significantly reducing equipment dependence and optical path switching, improving testing efficiency and operational convenience, and making it suitable for large-scale production quality inspection. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the optical path structure of a dot matrix laser detection device provided in the first embodiment of the present invention; Figure 2 for Figure 1 A schematic diagram of the component inspection station module; Figure 3 A flowchart illustrating the steps of a dot matrix laser detection method provided in the second embodiment of the present invention; Explanation of reference numerals in the attached figures: 1. First lens; 2. Beam splitter; 3. Attenuation assembly; 31. Attenuator; 4. Second lens; A1. Power measurement station; A2. Spot measurement station; A3. Parts installation station; A4. Parts inspection station; A41. First inspection position; A42. Second inspection position; A43. Third inspection position; A5. First linkage inspection station; A6. Second linkage inspection station; A7. Third linkage inspection station. Detailed Implementation

[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0020] It should be noted that all directional indications in the embodiments of this application are only used to explain the relative positional relationship and movement of each component in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0021] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed in this application.

[0022] like Figures 1 to 2 As shown, the first embodiment of this application provides a dot matrix laser detection device, which includes: The first lens 1 is used to collimate the light source into parallel light. Beam splitter 2 is positioned on the light exit path of first lens 1 and is used to split collimated parallel light into transmitted beam and reflected beam. Attenuation component 3 is positioned in the path of the reflected beam to attenuate the energy of the reflected beam. The second lens 4 is disposed on the light output path of the attenuation component 3, has the same focal length as the first lens 1, and the distance along the optical axis is twice the focal length. It forms a conjugate imaging relationship between the object-side conjugate surface and the image-side conjugate surface with the first lens 1, and is used to project the laser spot on the object-side conjugate surface onto the image-side conjugate surface in a large and distortion-free manner. Among them, a power measurement station A1 is set between the first lens 1 and the beam splitter 2, and a spot measurement station A2 is set at the image-side conjugate surface.

[0023] Specifically, after the first lens 1 collimates the divergent light of the light source into parallel light, it passes through the power measurement station A1, and then the beam splitter 2 splits the parallel light into a transmitted beam and a reflected beam. A power meter can be set at the power measurement station A1 along the path of the parallel light transmission to the beam splitter 2 to measure the power of the light source before beam splitting and obtain the total power of the light source. After the beam splitter 2 splits the parallel light into a transmitted beam and a reflected beam, the reflected beam is attenuated by the attenuation component 3. The attenuated reflected beam enters the second lens 4. The first lens 1 and the second lens 4 constitute an F-2F optical conjugate system, which can project the laser spot on the object-side conjugate surface onto the image-side conjugate surface with the same size and without distortion. For example, the spot of the light source emission reference surface or the surface of the part to be tested can be projected onto the image-side conjugate surface with the same size and without distortion. Then, by configuring a beam analyzer, a high-resolution CCD camera or a dedicated detection module for dot matrix lasers at the spot measurement station A2, the projected spot image can be acquired, and the core parameters of the dot matrix laser can be accurately measured, including the overall size of the dot matrix, the size and shape of each sub-spot, the spacing and uniformity of the arrangement between sub-spots, and the consistency of the energy distribution of the spot.

[0024] In this way, the attenuated reflected beam avoids damage to subsequent detection components by high-energy lasers and is compatible with the detection range of the spot measurement station. At the same time, it can overcome the spatial limitations of detection modules or dot matrix equipment, and directly measure the spot at the spot measurement station A2 without disassembly.

[0025] Understandably, the light source configuration is universal and can be flexibly selected according to the object being tested. When testing fractional laser equipment, such as medical laser treatment equipment or industrial laser processing equipment, the light source is the laser handpiece that comes with the equipment being tested or the original laser emission component of the equipment. The fractional laser output from it is directly used as the beam to be tested, without the need for an additional independent light source.

[0026] Through the integrated design of power measurement and precise spot imaging measurement, the total power of the light source and the multi-dimensional parameters of the array spot can be obtained simultaneously without complicated optical path switching. Moreover, with the same size and distortion-free characteristics of F-2F conjugate imaging, the spot measurement results are completely consistent with the actual spot on the object side, meeting the precise detection requirements of array laser equipment quality inspection.

[0027] In this embodiment, the focal length of both the first lens 1 and the second lens 4 is 100mm, the sum of the distance between the first lens 1 and the beam splitter 2 and the distance between the second lens 4 and the beam splitter 2 is 200mm, and the distance between the power detection station A1 and the beam splitter 2 is 65mm.

[0028] During the overall equipment testing, the main measurements are of the output beam's energy, pulse, and spot size. A second lens 4 is installed in the reflected light path at a distance of twice the focal length (200mm) from the collimating lens of the first lens 1. The installation conditions of the second lens 4 are the same as those of the first lens 1. Fine-tuning is used to compensate for lens manufacturing errors, ensuring that the distance from the treatment surface of the equipment to the principal point of the first lens 1 and the distance from the principal point of the second lens 4 to the spot measurement station A2 are consistent. At this point, the laser treatment surface (object surface) and the beam analyzer test surface (image surface) form a conjugate relationship, achieving precise measurement of the spot size. The spot measurement station A2 can also be modified by replacing the spectrometer's optical head and the oscilloscope's photodetector with structural components, thereby allowing for the measurement of the spectral and pulse time-domain information of the beam directly output from the equipment's handpiece.

[0029] In one embodiment, a part mounting station A3 is provided on the path of the reflected beam, located between the attenuation component 2 and the second lens 4. The part to be tested can be placed on the part mounting station A3. The part to be tested can adjust the angle of the reflected beam to form an auxiliary detection beam. A part detection station A4 is provided on the path of the auxiliary detection beam.

[0030] Specifically, when a part to be inspected is placed on the part mounting station A3, the reflected beam is attenuated and then incident on the part to be inspected. The part to be inspected reflects the reflected beam, causing it to deviate from its original path and form an auxiliary inspection beam. At the same time, by setting up a part inspection station A4 on the path of the auxiliary inspection beam, an inspection module can be set up on the part inspection station A4 to collect data of the auxiliary inspection beam formed after being reflected by the part to be inspected, thereby realizing the inspection of the part to be inspected.

[0031] It is understandable that when a part to be inspected is set on the part mounting station A3, the path of the reflected beam is deflected. Instead of passing through the second lens 4 to reach the spot measurement station A2, it deviates and reaches the part inspection station A4, where the part to be inspected is inspected.

[0032] By setting up a part mounting station A3, the versatility of the dot matrix laser inspection device can be increased, enabling it to inspect both the entire machine and individual parts. Specifically, when inspecting the entire machine, the part to be inspected is not placed at mounting station A3; in this case, the reflected beam, after attenuation, directly enters the second lens 4. However, when inspecting a single part, the part is placed at mounting station A3, and the reflected beam is deflected to form an auxiliary inspection beam, thus allowing for individual part inspection.

[0033] It should be noted that the parts to be inspected can be scanning galvanometers and field lenses, which can be set at the parts mounting station by a fixed mounting bracket. A photodetector, beam analyzer or PSD position sensor can be set at the parts inspection station A4.

[0034] In this embodiment, the distance between the part installation station A3 and the attenuation component 3 is 20mm.

[0035] In one embodiment, a first detection position A41, a second detection position A42, and a third detection position A43 are sequentially provided at the part inspection station A4. The first detection position A41, the second detection position A42, and the third detection position A43 are horizontally collinear in the direction parallel to the reflected light beam and are level with the light height, and are used to place optical inspection instruments.

[0036] Understandably, different optical inspection instruments can be set at the first inspection position A41, the second inspection position A42, and the third inspection position A43 according to the inspection requirements, so as to inspect different parts to be tested respectively. The distance between the three and the distance from the part installation station A3 can be set according to the specific inspection requirements.

[0037] In this embodiment, the distances between the first detection position A41, the second detection position A42, and the third detection position A43 along the direction of the auxiliary detection beam and the part mounting station A3 are all 102mm.

[0038] In one embodiment, the part to be inspected at part mounting station A3 is a scanning galvanometer. Photodetectors are provided at both the first inspection position A41 and the third inspection position A43. The photodetectors are connected to an oscilloscope and are used to measure the movement speed or oscillation frequency of the scanning galvanometer.

[0039] Specifically, during the scanning galvanometer test, the auxiliary detection beam moves back and forth between the first detection position A41 and the third detection position A43 as the scanning galvanometer periodically oscillates, passing through the detector elements of the photodetector in sequence to read the time delay between the two pulses. This allows for the measurement of the scanning galvanometer's movement speed at the oscillation angle, or the calculation of the pulse period to read the oscillation frequency of the scanning galvanometer.

[0040] In one embodiment, a beam analyzer or a PSD position sensor is provided at the second detection position A42 to measure the position difference before and after the scanning galvanometer swings, calculate the repeatability of the scanning galvanometer, or measure the minimum swing angle of the scanning galvanometer based on the position of the light spot movement.

[0041] It is understandable that photodetectors can be set at both the first detection position A41 and the third detection position A43, and a beam analyzer or PSD position sensor can be set at the second detection position A42.

[0042] It should be noted that when the part under test is a laser source, the part under test does not need to be placed at the part mounting station A3. Instead, the laser can be used as the output light source. That is, the output beam of the laser is first collimated by the first lens 1, and then split into a transmitted beam and a reflected beam by the beam splitter 2. After the reflected beam is attenuated by the attenuation component, it enters the second lens 4 after passing through the part inspection station A3. At this time, a beam analysis instrument can be set at the part inspection station A3 and the spot measurement station A2 to measure the size and divergence of the laser source's emitted spot. At the same time, a spectrometer fiber optic probe can be set at the spot measurement station A2 to measure the wavelengths of the indicator light and the working light.

[0043] In one embodiment, the part to be inspected at part mounting station A3 is a field lens, and a beam analyzer is provided at the second inspection position A2 to measure the focal length of the field lens and the consistency of the light spot under different deflection angles.

[0044] Specifically, the beam analyzer can directly detect whether the focal length of the field lens design meets the requirements based on the size of the light spot. At the same time, in conjunction with the swing of the galvanometer, the consistency of the light spot on the design plane (the detection surface of the beam analyzer) can be measured within the design angle.

[0045] In one embodiment, a first linkage detection station A5, a second linkage detection station A6, and a third linkage detection station A7 are sequentially arranged along the path of the transmitted beam. An optical lens mounting bracket is provided at the second linkage detection station A6, on which a lens to be tested can be placed. The optical lens mounting bracket can move along a direction perpendicular to the transmitted beam and can drive the lens to be tested to rotate. The first linkage detection station A5 and the third linkage detection station A7 are used to test the power of the transmitted beam before it enters the lens to be tested and the power after it exits the lens to be tested, respectively.

[0046] Specifically, after the parallel light passes through beam splitter 2, the transmitted beam first propagates to the first linkage detection station A5 located after beam splitter 2. The power detection module at this station accurately collects the original power data of the transmitted beam before it enters the lens under test, providing a benchmark for subsequent transmittance calculation. The beam then continues to propagate to the second linkage detection station A6, where the lens to be additionally tested can be fixed on the optical lens mounting bracket. By moving the mounting bracket perpendicular to the direction of the transmitted beam (e.g., fine-tuning left, right, forward, and backward), and by driving the rotation of the lens under test, the incident simulation of the beam in different areas of the lens under test (e.g., center, edge, and offset position) is achieved. Finally, after being transmitted through the lens under test, the beam propagates to the third linkage detection station A7, where the power detection module collects the power data of the transmitted beam. By comparing the pre-incident power of the first linkage detection station A5 with the post-transmission power of the third linkage detection station A7, the transmittance parameters of the lens under test at different incident positions can be quickly calculated. This allows the device to not only perform the original testing functions but also to have the additional capability to perform specialized testing on the transmittance performance of a single lens under test, without the need to build an independent lens detection optical path, thus improving the device's versatility and testing efficiency.

[0047] In one embodiment, the distances from the beam splitter 2 along the path of the transmitted beam are 15mm, 65mm, and 90mm, respectively, for the first linkage detection station A5, the second linkage detection station A6, and the third linkage detection station A7.

[0048] Understandably, the first linkage testing station A5, the second linkage testing station A6, and the third linkage testing station A7 are located 15mm, 65mm, and 90mm behind the beam splitter, respectively. This compact and reasonable spacing reduces beam transmission loss and divergence in the air, ensuring that the pre-incident power collected by the first linkage testing station A5 accurately reflects the actual received power of the lens under test. The post-transmission power collected by the third linkage testing station A7 truly reflects the light transmission effect of the lens, providing a reference data without additional errors for transmittance calculation. Furthermore, this arrangement is adaptable to the installation requirements of each station. The first linkage testing station A5, at 15mm, allows for flexible placement of small power detection components without conflicting with the beam splitter structure. The second linkage testing station A6, at 65mm, can accommodate optical components with movement / rotation capabilities. The lens mounting bracket provides ample operating space. Maintaining an appropriate distance between the third linkage testing station A7 (90mm) and the second linkage testing station A6 avoids interference from stray light reflected from the lens. At the same time, the fixed distance ensures that the optical path lengths of the first linkage testing station A5, the second linkage testing station A6, and the third linkage testing station A7 remain constant, ensuring consistent testing conditions at different incident positions of the lens and making the data comparable. Furthermore, the standardized spacing design facilitates process consistency and result reproduction for different batches of tests and operations by different personnel, eliminating the need for additional adjustments to optical path parameters. This improves testing accuracy and efficiency while enhancing the practicality and reproducibility of the device.

[0049] It should be noted that the first linkage detection station A5 can also measure the power-related parameters of the whole machine through the transmitted beam, and the power-related parameters of the equipment can be measured through the transmitted light in the reflected beam, so as to simultaneously read the energy information and time domain information of the same pulse train.

[0050] In this embodiment, the intensity of the transmitted beam is approximately 97% of the input beam intensity, and the intensity of the reflected beam is approximately 3% of the input beam intensity. Depending on the specific requirements for light intensity, the beam splitter 2 can be replaced to achieve different transmission-to-reflection ratios, ensuring that the power in the reflected light path is less than 1W.

[0051] In one embodiment, the attenuation component 3 includes three attenuation lenses 31, which are sequentially arranged on the path of the reflected beam and are spaced 10 mm apart.

[0052] Understandably, in the optical path of the reflected beam, the energy of the reflected beam needs to be further attenuated. By setting up a combination of three one-inch reflective attenuating lenses 31, an attenuation rate of up to OD6 (10E-6) can be achieved.

[0053] like Figure 3 As shown, the second embodiment of this application provides a dot matrix laser detection method, which includes: S100 collimates the dot matrix laser source into parallel light and measures the total power of the parallel light; The S200 uses a beam splitter to separate parallel light into a transmitted beam and a reflected beam, and attenuates the reflected beam. S300 performs equal-size, distortion-free conjugate imaging on the attenuated reflected beam to obtain a projected spot on the image-side conjugate plane that is consistent with the object-side conjugate plane. S400 acquires the image, spectrum, and pulse time-domain information of the projected light spot on the image-side conjugate surface, and measures the spot parameters of the array laser based on the image. Specifically, by measuring the total power of parallel light, and by measuring the attenuated reflected beam, the beam parameters, spectrum, and pulse time-domain information can be obtained, thus achieving the effect of simultaneously reading the energy and time-domain information of the same pulse train.

[0054] In one embodiment, after attenuating the reflected beam, the method further includes: The part to be tested is placed in the optical path of the attenuated reflected beam, so that the reflected beam, after passing through the part to be tested, forms an auxiliary detection beam for the detection of the part. When the part under test is a scanning galvanometer, the pulse signal of the auxiliary detection beam is obtained by at least two photodetectors, and the movement speed or oscillation frequency of the scanning galvanometer is calculated based on the time difference between the pulses; or, the spot position of the auxiliary detection beam is obtained by a beam analyzer or a position sensor, and the repeatability or minimum oscillation angle of the scanning galvanometer is calculated based on the position change. When the part under test is a field lens, the spot image of the auxiliary detection beam is obtained by a beam analyzer, and the focal length or spot consistency of the field lens is evaluated based on the spot image.

[0055] In one embodiment, after the parallel light is split into a transmitted beam and a reflected beam by a beam splitter, the method further includes: Place the lens to be tested into the optical path of the transmitted beam; Measure the first power of the transmitted beam before it enters the lens under test; Adjust the position and / or angle of the lens to be tested, and measure the second power of the transmitted beam after it has passed through the lens to be tested; The transmittance of the lens under test is calculated based on the first power and the second power.

[0056] It is understandable that adjusting the position of the lens to be tested specifically involves moving the lens to be tested along a direction perpendicular to the transmitted light beam (such as making slight adjustments left, right, forward, or backward), and adjusting the angle of the lens to be tested specifically involves rotating the lens to be tested.

[0057] Compared with existing technologies, the dot matrix laser detection device and method provided by this invention, through the optical path design of beam splitting and attenuation coordination, safely adapts high-energy dot matrix lasers to standard detection units, and utilizes the F-2F conjugate imaging system to overcome spatial limitations, achieving equal-size, distortion-free projection and accurate measurement of the treatment surface spot. At the same time, by using the transmitted and reflected beams after beam splitting in the same optical path, it supports lens transmittance measurement, component performance testing, and light source spot parameter acquisition, respectively. Thus, it completes comprehensive detection of power, spectrum, pulse, spot morphology, and optical component performance on an integrated platform, greatly reducing equipment dependence and optical path switching, improving detection efficiency and operational convenience, and is suitable for quality inspection in large-scale production.

[0058] The specific embodiments of the present invention described above do not constitute a limitation on the scope of protection of the present invention. Any other corresponding changes and modifications made in accordance with the technical concept of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A dot matrix laser detection device, characterized in that, include: The first lens is used to collimate the light source into parallel light. A beam splitter is positioned on the light exit path of the first lens to split the collimated parallel light into a transmitted beam and a reflected beam. An attenuation component is disposed in the path of the reflected beam to attenuate the energy of the reflected beam; The second lens is disposed on the light output path of the attenuation component, has the same focal length as the first lens, and the distance along the optical axis is twice the focal length. It forms a conjugate imaging relationship between the object-side conjugate plane and the image-side conjugate plane with the first lens, and is used to project the laser spot on the object-side conjugate plane onto the image-side conjugate plane in a manner that is the same size and without distortion. A power measurement station is provided between the first lens and the beam splitter, and a spot measurement station is provided at the image-side conjugate surface.

2. The dot matrix laser detection device as described in claim 1, characterized in that: A component mounting station is provided on the path of the reflected beam, located between the attenuation component and the second lens. The component to be tested can be placed on the component mounting station. The component to be tested can adjust the angle of the reflected beam to form an auxiliary detection beam. A component detection station is provided on the path of the auxiliary detection beam.

3. The dot matrix laser detection device as described in claim 2, characterized in that: The part inspection station is provided with a first inspection position, a second inspection position and a third inspection position in sequence. The first inspection position, the second inspection position and the third inspection position are horizontally collinear in the direction parallel to the reflected light beam and are level with the light height, for placing optical inspection instruments.

4. The dot matrix laser detection device as described in claim 3, characterized in that: The part to be inspected at the part installation station is a scanning galvanometer. A photodetector is provided at both the first and third inspection positions. The photodetector is connected to an oscilloscope and is used to measure the movement speed or oscillation frequency of the scanning galvanometer.

5. A dot matrix laser detection device as described in claim 3 or 4, characterized in that: A beam analyzer or PSD position sensor is provided at the second detection position to measure the position difference before and after the scanning galvanometer swings, calculate the repeatability of the scanning galvanometer, or measure the minimum swing angle of the scanning galvanometer based on the position of the light spot movement.

6. The dot matrix laser detection device as described in claim 3, characterized in that: The part to be inspected at the part installation station is a field lens, and a beam analyzer is set at the second inspection position to measure the focal length of the field lens and the consistency of the light spot under different deflection angles.

7. The dot matrix laser detection device as described in claim 1, characterized in that: The path of the transmitted beam is sequentially provided with a first linkage detection station, a second linkage detection station, and a third linkage detection station. An optical lens mounting bracket is provided at the second linkage detection station, on which a lens to be tested can be placed. The optical lens mounting bracket can move in a direction perpendicular to the transmitted beam and can drive the lens to be tested to rotate. The first linkage detection station and the third linkage detection station are used to test the power of the transmitted beam before it enters the lens to be tested and the power after it exits the lens to be tested, respectively.

8. A dot matrix laser detection method, characterized in that, include: The dot matrix laser source was collimated into parallel light, and the total power of the parallel light was measured. Parallel light is split into transmitted and reflected beams using a beam splitter, and the reflected beam is attenuated. The attenuated reflected beam is subjected to conjugate imaging of the same size and without distortion, so as to obtain a projected light spot on the image-side conjugate plane that is consistent with the object-side conjugate plane. The image, spectrum, and pulse time-domain information of the projected light spot on the image-side conjugate surface are acquired, and the spot parameters of the array laser are measured based on the image.

9. The dot matrix laser detection method as described in claim 8, characterized in that, After attenuating the reflected beam, the method further includes: The part to be tested is placed in the optical path of the attenuated reflected beam, so that the reflected beam, after passing through the part to be tested, forms an auxiliary detection beam for the detection of the part. When the part under test is a scanning galvanometer, the pulse signal of the auxiliary detection beam is obtained by at least two photodetectors, and the movement speed or oscillation frequency of the scanning galvanometer is calculated based on the time difference between the pulses; or, the spot position of the auxiliary detection beam is obtained by a beam analyzer or a position sensor, and the repeatability or minimum oscillation angle of the scanning galvanometer is calculated based on the position change. When the part under test is a field lens, the spot image of the auxiliary detection beam is obtained by a beam analyzer, and the focal length or spot consistency of the field lens is evaluated based on the spot image.

10. The dot matrix laser detection method as described in claim 8, characterized in that, After the parallel light is split into a transmitted beam and a reflected beam by a beam splitter, the process further includes: Place the lens to be tested into the optical path of the transmitted beam; Measure the first power of the transmitted beam before it enters the lens under test; Adjust the position and / or angle of the lens to be tested, and measure the second power of the transmitted beam after it has passed through the lens to be tested; The transmittance of the lens under test is calculated based on the first power and the second power.

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