Motion table control method and device, electronic equipment and storage medium
By constructing a mapping table that corresponds to the position of the motion stage and the compensation force, the compensation force is obtained and output to counteract the parasitic force, thus solving the positioning accuracy and vibration problems of the motion stage during high-speed motion and achieving higher positioning accuracy and system performance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-15
- Publication Date
- 2026-04-03
AI Technical Summary
When a motion table performs high-speed, multi-degree-of-freedom motion, the misalignment between the center of mass and the center of mechanics causes parasitic forces to be generated in the actuator, affecting positioning accuracy, inducing vibration, increasing workload, and limiting performance improvement.
By constructing a mapping table that corresponds to the position of the motion table and the compensation force in each direction, the compensation force at the current position is obtained, and the actuator is controlled to output the compensation force to counteract the parasitic force. This includes the preprocessing, discretization, and correction of trajectory data and parasitic force data, and the construction of the mapping table to determine the compensation force.
It effectively suppresses parasitic forces, improves the positioning accuracy of the motion table, enhances dynamic response capabilities, reduces residual vibration, strengthens system stiffness and robustness, and reduces energy waste.
Smart Images
Figure CN121785378A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of motion control technology, and in particular to a motion table control method, device, electronic device, and storage medium. Background Technology
[0002] As the core system for achieving nanometer-level precise positioning and high-speed motion, the motion stage's actuators undertake the driving and control functions. When the motion stage performs high-speed, multi-degree-of-freedom motion, if the center of mass and the center of mechanics are not aligned, the actuator input will not only act in the desired direction but also produce displacement or vibration in unexpected directions. Therefore, achieving independent control of each degree-of-freedom channel through decoupling is a prerequisite for ensuring precise nanometer-level positioning.
[0003] However, even with independent control of each degree of freedom channel achieved through decoupling, the actuator may still generate parasitic forces pointing in directions other than the target direction during operation. The presence of these parasitic forces can lead to a series of problems, including affecting positioning accuracy, inducing vibrations in the motion table and its supporting structure, increasing the workload of the actuator, amplifying sensor noise, and limiting further improvements in overall performance. Therefore, how to compensate for these parasitic forces has become an urgent problem to be solved. Summary of the Invention
[0004] In view of this, embodiments of this application provide a motion table control method, device, electronic device, and storage medium, which effectively suppress the generation of parasitic forces and improve the positioning accuracy of the motion table.
[0005] This application mainly includes the following aspects: In a first aspect, embodiments of this application provide a motion table control method, the motion table control method comprising: When the motion table moves along the target direction, obtain the current position of the motion table; Based on the mapping table that characterizes the correspondence between the position of the motion table and the compensation force in each direction, the compensation force corresponding to the current position in each direction is determined; The actuators used to drive the motion table output compensating forces in each direction to counteract parasitic forces generated in each direction at the current position; wherein the parasitic forces are the disturbance forces generated in each direction when the motion table moves along the target direction.
[0006] Furthermore, the mapping table characterizing the relationship between the position of the motion table and the compensation force in each direction is constructed in the following way: Acquire trajectory data of the motion table as it moves along the target direction, as well as parasitic force data in each direction; The trajectory data and the parasitic force data in each direction are preprocessed separately; For each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction. Each discrete parasitic force data in this direction is corrected, and each corrected discrete parasitic force data is determined as the compensation force in this direction; Each discrete trajectory data in each direction is associated with the corresponding compensation force to construct a mapping table that characterizes the relationship between the position of the motion table and the compensation force in each direction.
[0007] Furthermore, the preprocessing of the trajectory data and the parasitic force data in each direction includes: Filter out duplicate data from the trajectory data; The parasitic force data in each direction are filtered.
[0008] Furthermore, for each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction, including: The processed trajectory data is discretized according to a preset sampling frequency to obtain multiple discrete trajectory data. For each direction, based on the multiple discrete trajectory data, the processed parasitic force data in that direction is discretized to obtain multiple discrete parasitic force data in that direction.
[0009] Furthermore, the step of correcting each discrete parasitic force data point in that direction and determining each corrected discrete parasitic force data point as a compensation force in that direction includes: Determine the difference between the discrete parasitic force data corresponding to the target discrete trajectory data and the preset parasitic force; The result of adding each discrete parasitic force data in that direction to the difference is determined as the compensation force in that direction, so as to correct each discrete parasitic force data in that direction.
[0010] Furthermore, determining the compensation force corresponding to the current position in each direction based on the mapping table characterizing the correspondence between the position of the motion table and the compensation force in each direction includes: Query the mapping table that represents the correspondence between the position of the motion table and the compensation force in each direction, and determine whether the current position exists in the discrete trajectory data of the mapping table; If the current position exists in the discrete trajectory data of the mapping table, then determine the compensation force corresponding to the current position in each direction; If the current position is not found in the discrete trajectory data of the mapping table, then the current position is used for interpolation calculation to obtain the compensation force corresponding to the current position in each direction.
[0011] Secondly, embodiments of this application also provide a motion table control device, the motion table control device comprising: The acquisition module is used to acquire the current position of the motion table when it moves along the target direction; The mapping module is used to determine the compensation force corresponding to the current position in each direction based on a mapping table that characterizes the correspondence between the position of the motion table and the compensation force in each direction. A control module is used to control the actuator used to drive the motion table to output a compensating force in each direction to counteract the parasitic force generated in each direction at the current position; wherein the parasitic force is the disturbance force generated in each direction when the motion table moves along the target direction.
[0012] Furthermore, the device also includes a construction module, which is specifically used for: Acquire trajectory data of the motion table as it moves along the target direction, as well as parasitic force data in each direction; The trajectory data and the parasitic force data in each direction are preprocessed separately; For each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction. Each discrete parasitic force data in this direction is corrected, and each corrected discrete parasitic force data is determined as the compensation force in this direction; Each discrete trajectory data in each direction is associated with the corresponding compensation force to construct a mapping table that characterizes the relationship between the position of the motion table and the compensation force in each direction.
[0013] Thirdly, embodiments of this application also provide an electronic device, including: a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory through the bus. The machine-readable instructions are executed by the processor to perform the steps of the motion table control method described in the first aspect or any possible implementation of the first aspect.
[0014] Fourthly, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the motion table control method described in the first aspect or any possible implementation of the first aspect.
[0015] This application provides a motion table control method, device, electronic device, and storage medium. When the motion table moves along a target direction, the current position of the motion table is obtained; based on a mapping table characterizing the correspondence between the position of the motion table and the compensation force in each direction, the compensation force corresponding to the current position in each direction is determined; the actuator used to drive the motion table outputs the compensation force in each direction to counteract the parasitic force generated in each direction at the current position; wherein, the parasitic force is the interference force generated in each direction when the motion table moves along the target direction.
[0016] This effectively suppresses the generation of parasitic forces and improves the positioning accuracy of the motion table.
[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This invention provides a flowchart of one of the motion table control methods according to an embodiment of the present application. Figure 2 A second flowchart of a motion table control method provided in an embodiment of this application is shown; Figure 3 An example diagram of the trajectory curve of the motion table moving along the Y-axis provided in the embodiment of this application is shown; Figure 4 An example diagram of the Rx-axis parasitic force curves before and after filtering, provided in an embodiment of this application, is shown. Figure 5 This paper shows an example diagram of the discrete trajectory curve of the motion table moving along the Y-axis provided in an embodiment of this application; Figure 6 An example diagram of the Rx-axis compensation force provided in an embodiment of this application is shown; Figure 7 An example diagram of the parasitic forces on the six axes before compensation provided in the embodiments of this application is shown; Figure 8 An example diagram of the compensated six-axis parasitic force provided in the embodiments of this application is shown; Figure 9 This paper shows a schematic diagram of the structure of a motion table control device provided in an embodiment of this application; Figure 10 A schematic diagram of the structure of an electronic device provided in an embodiment of this application is shown. Detailed Implementation
[0020] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the drawings in this application are for illustrative and descriptive purposes only and are not intended to limit the scope of protection of this application. Furthermore, it should be understood that the schematic drawings are not drawn to scale. The flowcharts used in this application illustrate operations implemented according to some embodiments of this application. It should be understood that the operations in the flowcharts may not be implemented in sequence, and steps without logical contextual relationships may be reversed or implemented simultaneously. In addition, those skilled in the art, guided by the content of this application, may add one or more other operations to the flowcharts, or remove one or more operations from the flowcharts.
[0021] Furthermore, the described embodiments are merely some, not all, of the embodiments of this application. The components of the embodiments of this application described and illustrated herein can typically be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0022] The methods, apparatus, electronic devices, or computer-readable storage media described in this application can be applied to any scenario requiring motion table control. This application does not limit specific application scenarios, and any scheme using the motion table control method and apparatus provided in this application is within the protection scope of this application.
[0023] It is worth noting that the motion stage, as the core system for achieving nanoscale precise positioning and high-speed motion, relies on actuators that perform both driving and control functions. When the motion stage performs high-speed, multi-degree-of-freedom motion, if the center of mass and the center of mechanics are not aligned, the actuator input will not only act in the desired direction but also generate displacement or vibration in unexpected directions. Therefore, achieving independent control of each degree-of-freedom channel through decoupling is a prerequisite for ensuring precise nanoscale positioning. However, even with independent control of each degree-of-freedom channel through decoupling, the actuator may still generate parasitic forces pointing in non-target directions during operation. The presence of parasitic forces brings a series of problems, including affecting positioning accuracy, exciting vibrations in the motion stage and its supporting structure, increasing the workload of the actuator, amplifying sensor noise, and limiting further improvements in overall performance. Therefore, how to compensate for parasitic forces has become an urgent problem to be solved.
[0024] To address the aforementioned issues, this application proposes a motion table control method, device, electronic device, and storage medium, which effectively suppresses the generation of parasitic forces and improves the positioning accuracy of the motion table.
[0025] To facilitate understanding of this application, the technical solutions provided in this application will be described in detail below with reference to specific embodiments.
[0026] In this embodiment, the purpose of decoupling is to ensure that the control channel for each degree of freedom is independent, thereby enabling control commands to act precisely on the predetermined degree of freedom. Although relatively independent control of each degree of freedom channel is achieved through decoupling, the actuator may still generate undesirable internal disturbance torques in non-target directions during operation, i.e., parasitic forces. In complex multi-degree-of-freedom motion table structures, such as three-degree-of-freedom H-type motors or planar motor platforms, the prevalent parasitic force interference severely restricts the ultimate performance improvement of the motion table. Parasitic forces mainly originate from the following factors: 1. Electromagnetic field coupling and asymmetry: The operation of a planar motor depends on the precise interaction between multiple electromagnetic coils (stator) and a permanent magnet array (mover); ideally, the coil current should only generate precise force in the target direction (e.g., the Y-axis); however, in practical applications, due to the influence of geometric asymmetry, magnetic field edge effects, coil mutual inductance and cross-coupling, magnetic circuit saturation and nonlinearity, Lorentz force and edge field, etc., electromagnetic field coupling phenomena can occur. 2. Thermal Deformation and Structural Dynamics: In the drive system, the Joule heat generated by the current causes uneven thermal expansion of the coil, magnet, and supporting structure, altering the original geometric relationships and magnetic field distribution, thus introducing time-varying parasitic forces. 3. Manufacturing and Assembly Errors: Non-uniformity in coil winding, subtle differences in the magnetization intensity of the permanent magnet, and errors in the flatness and parallelism of the magnet and coil mounting surfaces can all disrupt the ideal electromagnetic force generation model, thereby triggering the generation of parasitic forces.
[0027] Simply decoupling multiple degrees of freedom without compensating for parasitic forces can lead to the following problems: 1. Affecting positioning accuracy: Parasitic forces act directly on the mass block of the motion stage. According to Newton's second law, even if the actuator does not issue directional commands, it will still cause unexpected displacements in the degrees of freedom. For example, parasitic forces in the Z-axis may cause defocusing. 2. Exciting structural vibrations: Parasitic forces (especially high-frequency components) can easily excite the flexible modes of the motion stage and its supporting structure, causing uncontrollable high-frequency residual vibrations, significantly reducing the effective bandwidth and positioning stability of the system. 3. Increasing control burden and noise: To counteract parasitic forces, the actuator needs additional output force or current, which not only increases the system's power consumption and heat generation but may also amplify sensor noise (because the controller is more sensitive to small errors), and may even lead to actuator saturation. 4. Limiting performance limits: In the pursuit of higher speed and higher precision motion control, the errors and vibrations caused by parasitic forces become critical bottlenecks that cannot be ignored. Without effective compensation, performance improvement will be limited.
[0028] Please see Figure 1 , Figure 1 This is one of the flowcharts for a motion table control method provided in an embodiment of this application.
[0029] like Figure 1 As shown in the figure, the motion table control method provided in this application embodiment includes the following steps: Step S101: When the motion table moves along the target direction, obtain the current position of the motion table.
[0030] The motion table is driven by actuators. These actuators typically consist of multiple motors. When the motion table moves in a certain degree of freedom, at least one motor is engaged. Specifically, based on a predetermined displacement in the target direction, the actuators output a corresponding driving force to propel the motion table along that direction.
[0031] Step S102: Based on the mapping table used to characterize the correspondence between the position of the motion table and the compensation force in each direction, determine the compensation force corresponding to the current position in each direction.
[0032] The following is combined with Figure 2 This will illustrate how to construct a mapping table to characterize the relationship between the position of the motion table and the compensation force in each direction.
[0033] Please see Figure 2 , Figure 2 This is a second flowchart of a motion table control method provided in an embodiment of this application.
[0034] like Figure 2 As shown, the steps for constructing a mapping table to characterize the correspondence between the position of the motion table and the compensation force in each direction are as follows: Step S11: Obtain the trajectory data of the motion table as it moves along the target direction, as well as the parasitic force data in each direction.
[0035] Here, based on a predetermined test displacement in the target direction, the motion stage is driven to move along the target direction according to the predetermined test displacement, and trajectory data and parasitic forces in each direction are acquired during the movement. The parasitic forces are the disturbance forces generated in each direction when the motion stage moves along the target direction. Assuming the motion stage has six axes—X-axis, Y-axis, Z-axis, Rx-axis (rotating around the X-axis), Ry-axis (rotating around the Y-axis), and Rz-axis (rotating around the Z-axis)—when a unit driving force is applied to the target axis, corresponding force or torque components will be generated on the six axes, including the force on the target axis and the parasitic forces on the non-target axes.
[0036] As an example, assuming the target direction is the Y-axis, according to the motion parameters in Table 1, the motion table moves at a constant speed from 0.13m to -0.13m along the Y-axis under closed-loop control. The curve plotted from the collected trajectory data along the Y-axis is shown below. Figure 3 As shown.
[0037] Table 1. Parameters of Uniform Motion
[0038] Step S12: Preprocess the trajectory data and the parasitic force data in each direction respectively.
[0039] Specifically, this step involves filtering out duplicate data from the trajectory data and filtering the parasitic force data in each direction.
[0040] Here, as Figure 3 As shown, due to the excessively long sampling time, the motion platform is stationary at the beginning and end of the trajectory, causing the position sensor to repeatedly acquire the same position value. Therefore, duplicate data is filtered out from the trajectory data. Robust quadratic regression can be used to filter parasitic force data. For example, as... Figure 4 As shown, robust quadratic regression is performed on the parasitic force data along the Rx axis to obtain a smooth filtered curve.
[0041] Step S13: For each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction.
[0042] Here, regarding step S13, as an example in specific implementation, the following steps may be included: Step S131: Discretize the processed trajectory data according to a preset sampling frequency to obtain multiple discrete trajectory data.
[0043] Here, as an example, the preset sampling frequency is 2×10⁻⁵. Continuing with the example above, as... Figure 5 As shown, by discretizing the trajectory data of the Y-axis at a preset sampling frequency of 2×10-5, 12,000 discrete positions, or 12,000 discrete trajectory data, can be obtained.
[0044] Step S133: For each direction, based on the multiple discrete trajectory data, the processed parasitic force data in that direction is discretized to obtain multiple discrete parasitic force data in that direction.
[0045] Here, the processed parasitic force is discretized according to multiple discrete locations, resulting in multiple discrete parasitic force data. Each discrete trajectory data corresponds to a discrete parasitic force data in each direction.
[0046] See again Figure 2 Step S14: Correct each discrete parasitic force data in the direction and determine each corrected discrete parasitic force data as the compensation force in the direction.
[0047] Here, zero-point correction is performed on the discrete parasitic force data.
[0048] Here, regarding step S14, as an example in specific implementation, the following steps may be included: Step S141: Determine the difference between the discrete parasitic force data corresponding to the target discrete trajectory data and the preset parasitic force.
[0049] Here, the target discrete trajectory data is based on the motion table being at the center of its stroke, with a preset parasitic force of 0.
[0050] Step S142: The result of adding each discrete parasitic force data in the direction to the difference is determined as the compensation force in the direction, so as to correct each discrete parasitic force data in the direction.
[0051] Here, when the motion table is at the center of its stroke, the compensation force is set to 0, and the actuator does not output additional torque. Each discrete parasitic force data point is adjusted accordingly based on the parasitic force adjustment at the center of the stroke. As an example, such as... Figure 6 As shown, when the motion table is located at Y=0, that is, when the horizontal coordinate sampling point is 6000, the compensation force is set to zero. Based on the adjustment at Y=0, the other discrete parasitic force data are also adjusted accordingly.
[0052] Step S15: Associate each discrete trajectory data in each direction with the corresponding compensation force to construct a mapping table that characterizes the correspondence between the position of the motion table and the compensation force in each direction.
[0053] Regarding step S102, as an example in specific implementation, it may include the following steps: querying a mapping table that characterizes the correspondence between the position of the motion table and the compensation force in each direction, and determining whether the current position exists in the discrete trajectory data of the mapping table; if the current position exists in the discrete trajectory data of the mapping table, then determining the compensation force corresponding to the current position in each direction; if the current position does not exist in the discrete trajectory data of the mapping table, then using the current position to perform interpolation calculation to obtain the compensation force corresponding to the current position in each direction.
[0054] See again Figure 1 In step S103, the actuator used to drive the motion table outputs a compensating force in each direction to counteract the parasitic force generated in each direction at the current position; wherein the parasitic force is the disturbance force generated in each direction when the motion table moves along the target direction.
[0055] Here, an example diagram of parasitic force compensation for the six axes is shown. Figure 7 As shown in the figure, an example diagram of parasitic force in a six-axis system after parasitic force compensation is as follows. Figure 8 As shown, through comparison Figure 7 and Figure 8 It can be seen that compensatory force effectively reduces the generation of parasitic force.
[0056] In the embodiments of this application, a compensating force is provided to suppress the influence of external disturbance forces on the micro-motion control system of the motion table, resulting in the following technical effects: 1. Enhanced dynamic response capability: By reducing the additional load and interference caused by parasitic forces, the control system can respond to commands more effectively and quickly, thereby improving the bandwidth and dynamic tracking accuracy of the motion stage, especially in applications such as high-speed scanning exposure.
[0057] 2. Reduce residual disturbances: Parasitic forces are often the main source of high-frequency disturbances. After compensation, the residual vibration amplitude and decay time of the motion table are significantly reduced, which is beneficial for achieving fast and stable motion control.
[0058] 3. Enhanced system stiffness and robustness: Effective compensation suppresses coupling effects, making the motion table closer to the ideal "decoupled" state in six degrees of freedom, thus enhancing the system's resistance to external disturbances.
[0059] 4. Reduced energy waste: More precise force control results in less energy being wasted on unnecessary movement and heat generation.
[0060] This application provides a motion table control method that effectively suppresses the generation of parasitic forces and improves the positioning accuracy of the motion table.
[0061] Based on the same application concept, this application also provides a motion table control device corresponding to the motion table control method provided in the above embodiments. Since the principle of the device in this application is similar to the motion table control method in the above embodiments of this application, the implementation of the device can refer to the implementation of the method, and the repeated parts will not be described again.
[0062] Please see Figure 9 , Figure 9 This is a schematic diagram of the structure of a motion table control device provided in an embodiment of this application.
[0063] like Figure 9 As shown in the figure, the motion table control device 910 provided in this application embodiment includes: The acquisition module 911 is used to acquire the current position of the motion table when the motion table moves along the target direction; The mapping module 912 is used to determine the compensation force corresponding to the current position in each direction based on a mapping table that characterizes the correspondence between the position of the motion table and the compensation force in each direction. The control module 913 is used to control the actuator used to drive the motion table to output a compensating force in each direction to counteract the parasitic force generated in each direction at the current position; wherein the parasitic force is the disturbance force generated in each direction when the motion table moves along the target direction.
[0064] Furthermore, the device also includes a construction module, which is specifically used for: Acquire trajectory data of the motion table as it moves along the target direction, as well as parasitic force data in each direction; The trajectory data and the parasitic force data in each direction are preprocessed separately; For each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction. Each discrete parasitic force data in this direction is corrected, and each corrected discrete parasitic force data is determined as the compensation force in this direction; Each discrete trajectory data in each direction is associated with the corresponding compensation force to construct a mapping table that characterizes the relationship between the position of the motion table and the compensation force in each direction.
[0065] Furthermore, when the construction module preprocesses the trajectory data and the parasitic force data in each direction, it is specifically used for: Filter out duplicate data from the trajectory data; The parasitic force data in each direction are filtered.
[0066] Furthermore, when the construction module discretizes the processed trajectory data and the processed parasitic force data in each direction to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction, it is specifically used for: The processed trajectory data is discretized according to a preset sampling frequency to obtain multiple discrete trajectory data. For each direction, based on the multiple discrete trajectory data, the processed parasitic force data in that direction is discretized to obtain multiple discrete parasitic force data in that direction.
[0067] Furthermore, the step of correcting each discrete parasitic force data point in that direction and determining each corrected discrete parasitic force data point as a compensation force in that direction includes: Determine the difference between the discrete parasitic force data corresponding to the target discrete trajectory data and the preset parasitic force; The result of adding each discrete parasitic force data in that direction to the difference is determined as the compensation force in that direction, so as to correct each discrete parasitic force data in that direction.
[0068] Furthermore, the mapping module 912 is specifically used for: Query the mapping table that represents the correspondence between the position of the motion table and the compensation force in each direction, and determine whether the current position exists in the discrete trajectory data of the mapping table; If the current position exists in the discrete trajectory data of the mapping table, then determine the compensation force corresponding to the current position in each direction; If the current position is not found in the discrete trajectory data of the mapping table, then the current position is used for interpolation calculation to obtain the compensation force corresponding to the current position in each direction.
[0069] This application provides a motion table control device that effectively suppresses the generation of parasitic forces and improves the positioning accuracy of the motion table.
[0070] Please see Figure 10 , Figure 10 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application.
[0071] like Figure 10 As shown, the electronic device 1000 includes a processor 1010, a memory 1020, and a bus 1030.
[0072] The memory 1020 stores machine-readable instructions executable by the processor 1010. When the electronic device 1000 is running, the processor 1010 communicates with the memory 1020 via the bus 1030. When the machine-readable instructions are executed by the processor 1010, they can perform the operations described above. Figure 1 and Figure 2 The steps of the motion table control method in the illustrated method embodiment can be found in the method embodiment for specific implementation, and will not be repeated here.
[0073] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the above-described actions. Figure 1 and Figure 2 The steps of the motion table control method in the illustrated embodiment can be found in the method embodiment for specific implementation, and will not be repeated here.
[0074] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems and devices described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here. In the several embodiments provided in this application, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. The device embodiments described above are merely illustrative. For example, the division of units is only a logical functional division; in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Another point is that the displayed or discussed mutual coupling or direct coupling or communication connection may be through some communication interfaces; the indirect coupling or communication connection of devices or units may be electrical, mechanical, or other forms.
[0075] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0076] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.
[0077] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.
[0078] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A motion table control method, characterized in that, The method includes: When the motion table moves along the target direction, obtain the current position of the motion table; Based on the mapping table that characterizes the correspondence between the position of the motion table and the compensation force in each direction, the compensation force corresponding to the current position in each direction is determined; The actuators used to drive the motion table output compensating forces in each direction to counteract parasitic forces generated in each direction at the current position; wherein the parasitic forces are the disturbance forces generated in each direction when the motion table moves along the target direction.
2. The motion table control method according to claim 1, characterized in that, The mapping table used to characterize the correspondence between the position of the motion table and the compensation force in each direction is constructed in the following way: Acquire trajectory data of the motion table as it moves along the target direction, as well as parasitic force data in each direction; The trajectory data and the parasitic force data in each direction are preprocessed separately; For each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction. Each discrete parasitic force data in this direction is corrected, and each corrected discrete parasitic force data is determined as the compensation force in this direction; Each discrete trajectory data in each direction is associated with the corresponding compensation force to construct a mapping table that characterizes the relationship between the position of the motion table and the compensation force in each direction.
3. The motion table control method according to claim 2, characterized in that, The preprocessing of the trajectory data and the parasitic force data in each direction includes: Filter out duplicate data from the trajectory data; The parasitic force data in each direction are filtered.
4. The motion table control method according to claim 2, characterized in that, For each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction, including: The processed trajectory data is discretized according to a preset sampling frequency to obtain multiple discrete trajectory data. For each direction, based on the multiple discrete trajectory data, the processed parasitic force data in that direction is discretized to obtain multiple discrete parasitic force data in that direction.
5. The motion table control method according to claim 2, characterized in that, The step of correcting each discrete parasitic force data point in that direction and determining each corrected discrete parasitic force data point as a compensating force in that direction includes: Determine the difference between the discrete parasitic force data corresponding to the target discrete trajectory data and the preset parasitic force; The result of adding each discrete parasitic force data in that direction to the difference is determined as the compensation force in that direction, so as to correct each discrete parasitic force data in that direction.
6. The motion table control method according to claim 2, characterized in that, The determination of the compensation force corresponding to the current position in each direction based on the mapping table characterizing the correspondence between the position of the motion platform and the compensation force in each direction includes: Query the mapping table that represents the correspondence between the position of the motion table and the compensation force in each direction, and determine whether the current position exists in the discrete trajectory data of the mapping table; If the current position exists in the discrete trajectory data of the mapping table, then determine the compensation force corresponding to the current position in each direction; If the current position is not found in the discrete trajectory data of the mapping table, then the current position is used for interpolation calculation to obtain the compensation force corresponding to the current position in each direction.
7. A motion table control device, characterized in that, The device includes: The acquisition module is used to acquire the current position of the motion table when it moves along the target direction; The mapping module is used to determine the compensation force corresponding to the current position in each direction based on a mapping table that characterizes the correspondence between the position of the motion table and the compensation force in each direction. A control module is used to control the actuator used to drive the motion table to output a compensating force in each direction to counteract the parasitic force generated in each direction at the current position; wherein the parasitic force is the disturbance force generated in each direction when the motion table moves along the target direction.
8. The motion table control device according to claim 7, characterized in that, The device further includes a construction module, which is specifically used for: Acquire trajectory data of the motion table as it moves along the target direction, as well as parasitic force data in each direction; The trajectory data and the parasitic force data in each direction are preprocessed separately; For each direction, the processed trajectory data and the processed parasitic force data in that direction are discretized to obtain multiple discrete trajectory data and multiple discrete parasitic force data in that direction. Each discrete parasitic force data in this direction is corrected, and each corrected discrete parasitic force data is determined as the compensation force in this direction; Each discrete trajectory data in each direction is associated with the corresponding compensation force to construct a mapping table that characterizes the relationship between the position of the motion table and the compensation force in each direction.
9. An electronic device, characterized in that, include: The device includes a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus, and the machine-readable instructions are executed by the processor to perform the steps of the motion table control method as described in any one of claims 1 to 6.
10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the motion table control method as described in any one of claims 1 to 6.