Vacuum actuator, method for manufacturing vacuum actuator, rotation introduction machine, and robot

Abstract

The invention provides a vacuum actuator, a vacuum actuator manufacturing method, a rotation introduction machine, and a robot. This vacuum actuator is provided with: a partition wall that partitions a vacuum-side space and an atmosphere-side space; a shaft member that passes through the partition wall and transmits driving force; a sealing member that is provided on the partition wall, slides with respect to a sliding surface formed on the outer periphery of the shaft member, and seals the space between the vacuum-side space and the atmosphere-side space; and a friction reduction part formed on the sliding surface.

Description

TECHNICAL FIELD

[0001] The present application relates to a vacuum actuator, a manufacturing method of a vacuum actuator, a rotary lead-through machine, and a robot. BACKGROUND

[0002] In the manufacture of FPD (flat panel display) such as liquid crystal display, organic EL display, or the manufacture of semiconductor devices, a substrate or the like is moved to a processing portion of a device to be processed in a vacuum such as a vacuum chamber. At this time, a vacuum actuator such as a rotary lead-through machine that leads through a driving force from a driving source disposed outside the vacuum to the inside of the chamber is known.

[0003] In such a vacuum actuator, in order to maintain the vacuum, it is required to maintain the seal of both sides of the partition wall and to transmit the driving force from the outside of the chamber to the inside of the chamber. Therefore, in the vacuum actuator, it is required to have the vacuum tightness on the sliding surface.

[0004] In order to exhibit the sealability on the sliding surface in a state exposed to the vacuum atmosphere, it is known to use a lubricant such as polytetrafluoroethylene (PTFE). For example, in Patent Literature 1, it is described that a resin such as polytetrafluoroethylene that is oil repellent is applied to the outer peripheral surface of a dust-proof lip of a sealing member.

[0005] PRIOR ART DOCUMENTS

[0006] PATENT LITERATURE

[0007] Patent Literature 1: Japanese Patent Application Laid-Open No. 11-166632 SUMMARY

[0008] PROBLEMS TO BE SOLVED BY THE INVENTION

[0009] However, when a solid lubricating layer composed of polytetrafluoroethylene is formed on the sliding surface, a firing process is required. Since there is a possibility that the resin is deteriorated by the firing process and thus the sealability cannot be maintained, there is a problem that a solid lubricating layer composed of polytetrafluoroethylene cannot be formed with respect to the sealing material using a resin or the like.

[0010] SOLUTION TO THE PROBLEM

[0011] A vacuum actuator of one aspect of the present application has: a partition wall that separates a vacuum side space and an atmospheric side space; a shaft member that penetrates the partition wall and transmits a driving force; a sealing member that is provided to the partition wall and seals between the vacuum side space and the atmospheric side space by sliding against a sliding surface formed on the outer periphery of the shaft member; and a friction reducing portion that is formed on the sliding surface. Thereby, the above problem is solved.

[0012] By so constituting, the sealing member which becomes the boundary of the vacuum and the atmosphere at the sealing portion in contact with the sliding surface, for example, reduces the friction between the sealing member and the sliding surface in contact with the circumferential direction of the shaft member by the friction reducing portion. Also, the temperature rise of the sealing portion is suppressed by the friction reducing portion. Thus, the vacuum sealing state of the sealing portion can be maintained.

[0013] Also, by forming the friction reducing portion in the sliding surface, the coefficient of friction between the sealing member and the sliding surface at the sealing portion can be reduced compared with the case where the friction reducing portion is not provided, for example, the wear of the sealing member made of resin by the shaft member made of metal can be prevented. Thus, the generation of particles which become the source of contamination to the vacuum side space and the reduction of the sealing property can be prevented. Here, the vacuum side space can be 10 Pa or less.

[0014] In the vacuum actuator of one aspect of the present application, the friction reducing portion can also be a transfer attachment source supply portion which supplies a transfer attachment source which reduces the friction by being transferred and attached to the sliding sealing member.

[0015] In the vacuum actuator of one aspect of the present application, the friction reducing portion can also be formed in the sliding surface with a thickness of 25 μm or more.

[0016] In the vacuum actuator of one aspect of the present application, the surface roughness of the sliding surface where the friction reducing portion is formed can be 1.6 μm or less.

[0017] In the vacuum actuator of one aspect of the present application, the hardness of the sliding surface where the friction reducing portion is formed can be Vickers hardness (HV) 544 or more.

[0018] In the vacuum actuator of one aspect of the present application, the friction reducing portion can have a solid lubricant layer containing a solid lubricant and a semi-solid lubricant layer formed between the surface of the solid lubricant layer and the sealing member.

[0019] In the vacuum actuator of one aspect of the present application, the solid lubricant layer can contain a solid lubricant with a particle diameter of 10 μm or less.

[0020] In the vacuum actuator of one aspect of the present application, the solid lubricant can contain polytetrafluoroethylene.

[0021] In the vacuum actuator of one aspect of the present application, the shaft member can contain nitrogenated stainless steel, chromium-molybdenum steel iron, or carbon steel.

[0022] In the vacuum actuator of one aspect of the present application, the seal member can have a metal ring that surrounds the outer periphery of the shaft member along the sliding surface, and a seal lip that is in linear contact with the sliding surface.

[0023] The manufacturing method of the vacuum actuator of one aspect of the present application has a friction reduction portion forming step of forming a friction reduction portion on a sliding surface of an outer periphery of a shaft member that penetrates a partition wall that separates a vacuum side space and an atmospheric side space, and an assembling step of assembling the seal member in contact with the sliding surface on which the friction reduction portion is formed.

[0024] With this configuration, the seal member can be assembled after the friction reduction portion having a prescribed characteristic is formed, and a vacuum actuator that can reduce the coefficient of friction can be manufactured.

[0025] In the manufacturing method of the vacuum actuator of one aspect of the present application, the friction reduction portion forming step can have a preparation step of making the surface roughness of the sliding surface on which the friction reduction portion is formed be 1.6 μm or less.

[0026] In the manufacturing method of the vacuum actuator of one aspect of the present application, the friction reduction portion forming step can have a solid lubrication layer raw material coating step of coating a raw material of a solid lubrication layer on the friction reduction portion, and a solid lubrication layer firing step of firing the coated raw material, and the friction reduction portion having the solid lubrication layer is formed by the friction reduction portion forming step.

[0027] In the manufacturing method of the vacuum actuator of one aspect of the present application, the firing temperature of the solid lubrication layer firing step can be 200°C to 250°C.

[0028] In the manufacturing method of the vacuum actuator of one aspect of the present application, the friction reduction portion forming step can have a semi-solid lubricant coating step of forming a semi-solid lubricant layer between the surface of the solid lubrication layer and the seal member, and the consistency of the semi-solid lubricant layer coated in the semi-solid lubricant coating step can be higher than the consistency of the raw material of the solid lubrication layer coated in the solid lubrication layer raw material coating step.

[0029] A rotating introduction machine according to one aspect of the present invention includes a partition wall that separates a vacuum-side space and an atmospheric-side space, a shaft member that penetrates the partition wall and transmits a driving force, an input portion that is disposed in the atmospheric-side space and inputs the driving force to the shaft member, a sealing member that is provided to the partition wall and seals between the vacuum-side space and the atmospheric-side space by sliding against a sliding surface formed on an outer circumference of the shaft member, and a friction reduction portion that is formed on the sliding surface. The friction reduction portion is a transfer-attached source supply portion that supplies a transfer-attached source that reduces friction by being transferred and attached to the sliding sealing member. The friction reduction portion includes a solid lubricant layer that includes a solid lubricant, and a semi-solid lubricant layer that is formed between a surface of the solid lubricant layer and the sealing member. The input portion outputs rotation of a driving source that is disposed in the atmospheric-side space and generates a rotational force to the shaft member. The shaft member transmits the rotational driving force to the vacuum-side space.

[0030] With this configuration, in the rotating introduction machine that introduces the rotational driving force from the atmospheric-side space to the vacuum-side space, the sealability of the sealing portion is prevented from being reduced when the rotational driving force is transmitted to the vacuum-side space. In a state where this is maintained, the solid lubricant of the solid lubricant layer can be transferred and attached to the sealing member as a transfer-attached particle, and the solid lubricant can be attached to the sealing member. Thus, the friction coefficient of the sealing portion can be reduced using the solid lubricant layer of the sliding surface and the solid lubricant that is transferred and attached to the sealing member. By reducing the friction coefficient of the sealing portion, the temperature of the sealing portion can be prevented from rising. By reducing the friction coefficient of the sealing portion, the wear of the sealing member can be prevented. By preventing the wear of the sealing member, the generation of particles can be prevented. Furthermore, using the semi-solid lubricant layer, these effects can be improved. Thus, the durability of the rotating introduction machine can be improved in a state where the vacuum seal performance is maintained. When the rotational driving force is transmitted to the vacuum-side space, the torque of the rotating introduction machine can be prevented from increasing.

[0031] A rotating introduction machine according to one aspect of the present invention includes a partition wall that separates a vacuum-side space and an atmospheric-side space, a shaft member that penetrates the partition wall and transmits a driving force, an input portion that is disposed in the atmospheric-side space and inputs the driving force to the shaft member, a sealing member that is provided to the partition wall and seals between the vacuum-side space and the atmospheric-side space by sliding against a sliding surface formed on an outer circumference of the shaft member, and a friction reduction portion that is formed on the sliding surface. The friction reduction portion is a transfer-attached source supply portion that supplies a transfer-attached source that reduces friction by being transferred and attached to the sliding sealing member. The friction reduction portion includes a solid lubricant layer that includes a solid lubricant and a semi-solid lubricant layer that is formed between a surface of the solid lubricant layer and the sealing member. The input portion outputs rotation of a driving source that is disposed in the atmospheric-side space and generates a rotational force to the shaft member. The shaft member transmits the rotational driving force to the vacuum-side space. The input portion includes a housing, an internal tooth gear that is provided inside the housing and has internal teeth, a swing gear that has external teeth that mesh with the internal teeth of the internal tooth gear and swings and rotates, a crankshaft that has an eccentric portion that supports the swing gear so as to be rotatable and transmits the rotational force of the driving source to the swing gear, and a gear carrier that is an output portion that transmits the rotational force of the swing gear and outputs to the shaft member.

[0032] With this configuration, in the rotating introduction machine that introduces a rotational driving force from the atmospheric-side space to the vacuum-side space via the swing transmission, the sealability of the sealing portion is prevented from being reduced when the rotational driving force is transmitted to the vacuum-side space. In a state where this is maintained, the solid lubricant of the solid lubricant layer can be transferred and attached to the sealing member as transfer-attached particles, and the solid lubricant can be attached to the sealing member. Thus, the friction coefficient of the sealing portion can be reduced using the solid lubricant layer of the sliding surface and the solid lubricant that is transferred and attached to the sealing member. By reducing the friction coefficient of the sealing portion, the temperature of the sealing portion can be prevented from rising. By reducing the friction coefficient of the sealing portion, the wear of the sealing member can be prevented. By preventing the wear of the sealing member, the generation of particles can be prevented. These effects can be improved using the semi-solid lubricant layer. Thus, the durability of the rotating introduction machine and the swing transmission can be improved in a state where the vacuum seal performance is maintained. When the rotational driving force is transmitted to the vacuum-side space, the torque of the rotating introduction machine and the swing transmission can be prevented from increasing.

[0033] A robot according to one aspect of the present application includes: a partition wall that separates a vacuum-side space and an atmospheric-side space; a shaft member that penetrates the partition wall and transmits a driving force; an input portion that is disposed in the atmospheric-side space, and inputs the driving force to the shaft member; a seal member that is provided to the partition wall, and seals between the vacuum-side space and the atmospheric-side space by sliding against a sliding surface formed on an outer circumference of the shaft member; and a friction reduction portion that is formed on the sliding surface. The friction reduction portion is a transfer-attached source supply portion that supplies a transfer-attached source that reduces friction by being transferred and attached to the seal member that slides. The friction reduction portion has: a solid lubricant layer that contains a solid lubricant; and a semi-solid lubricant layer that is formed between a surface of the solid lubricant layer and the seal member. The input portion outputs rotation of a driving source that is disposed in the atmospheric-side space and generates a rotational force to the shaft member. The shaft member transmits the rotational driving force to the vacuum-side space.

[0034] By so configuring, in a robot in which a rotational driving force is introduced from an atmospheric-side space to a vacuum-side space via a swing transmission, a decrease in the sealability of a seal portion when transmitting the rotational driving force to the vacuum-side space is prevented. In a state in which this is maintained, the solid lubricant of the solid lubricant layer can be transferred and attached to the seal member as a transfer-attached particle, and the solid lubricant can be attached to the seal member. Thus, the friction coefficient of the seal portion can be reduced by the solid lubricant layer of the sliding surface and the solid lubricant that is transferred and attached to the seal member. By reducing the friction coefficient of the seal portion, an increase in the temperature of the seal portion can be prevented. By reducing the friction coefficient of the seal portion, wear of the seal member can be prevented. By preventing the wear of the seal member, the generation of particles can be prevented. Furthermore, by the semi-solid lubricant layer, these effects can be improved. Thus, the durability of the robot can be improved in a state in which the vacuum seal performance is maintained. When transmitting the rotational driving force to the vacuum-side space, an increase in the torque of a rotation introduction machine and the swing transmission of the robot can be prevented.

[0035] Effects of the Invention

[0036] An object of the present application is to provide a vacuum actuator that can maintain a vacuum seal and reduce friction, a manufacturing method of a vacuum actuator, a rotation introduction machine, and a robot. BRIEF DESCRIPTION OF DRAWINGS

[0037] Figure 1 FIG. 1 is a side view that shows a partial cross section of a rotation introduction machine according to a first embodiment of the present application.

[0038] Figure 2 FIG. 3 is an enlarged cross-sectional view that shows a seal portion of the rotation introduction machine according to the first embodiment of the present application.

[0039] Figure 3is a cross-sectional view showing a rotation input portion in a rotation introducing machine of Embodiment 1 of the present invention.

[0040] Figure 4 is Figure 3 a cross-sectional view at IV-IV line.

[0041] Figure 5 is a flowchart showing a manufacturing method of a rotation introducing machine of Embodiment 1 of the present invention.

[0042] Figure 6 is a schematic view showing a vacuum processing apparatus provided with a rotation introducing machine of Embodiment 2 of the present invention.

[0043] Figure 7 is a schematic side view showing a substrate transport robot provided with a rotation introducing machine of Embodiment 2 of the present invention.

[0044] Explanation of Reference Numerals

[0045] 10, rotation introducing machine; 20, sealed partition wall (partition wall); 21, through hole; 30, rotation member (shaft member); 30S, outer peripheral surface; 30SS, sliding surface; 32, connecting member (shaft member); 34, friction reduction portion; 34a, solid lubricating layer; 34b, semi-solid lubricant layer; 50, sealing mechanism; 51A, 51B, sealing device (sealing member); 52, core bone (metal ring); 55, sealing lip portion; 58, ring-shaped coil spring (metal ring); 100, rotation input portion (input portion, transmission, speed reducer); 1000, vacuum processing apparatus; 1100, transport robot (robot); F0, rotation axis; A, atmospheric side space; V, vacuum side space. DETAILED DESCRIPTION

[0046] Hereinafter, a rotation introducing machine of Embodiment 1 of the present invention is explained based on the drawings. The rotation introducing machine is an example of a vacuum actuator.

[0047] Figure 1 is a side view showing a partial cross-section of the rotation introducing machine of the present embodiment. In Figure 1 , reference numeral 10 is a rotation introducing machine.

[0048] As Figure 1 shown, the rotation introducing machine 10 of the present embodiment is provided with a sealed partition wall 20, a rotation member 30, a sealing mechanism 50, and a rotation input portion 100. The rotation member 30 is an example of a shaft member. The rotation input portion 100 is an example of each of an input portion, a transmission, and a speed reducer. The sealed partition wall 20 is an example of a partition wall.

[0049] The sealed partition wall 20 is, for example, a partition wall of a vacuum chamber.

[0050] The sealed partition wall 20 separates Figure 1 the upper space from the lower space. In Figure 1 this embodiment, the sealed partition wall 20 separates the atmospheric side space (1st space) A on the lower side than the sealed partition wall 20 from the vacuum side space (2nd space) V on the upper side than the sealed partition wall 20. The atmospheric side space A is, for example, an atmospheric pressure. The vacuum side space V is, for example, a vacuum atmosphere or a reduced pressure state compared to the atmospheric side space A. The vacuum side space V is at least reduced to about 10 Pa. The vacuum side space V can be reduced to about 10 -5 Pa, for example. Alternatively, the vacuum side space V can be reduced to about 10 -6 Pa.

[0051] The sealed partition wall 20 seals (closes) between the atmospheric side space A and the vacuum side space V so that gas or the like does not move between the atmospheric side space A and the vacuum side space V. In addition, although not shown, the sealed partition wall 20 can extend to the outside in the left and right directions. Figure 1

[0052] The rotary input portion 100 is disposed in the atmospheric side space A on the lower side than the sealed partition wall 20.

[0053] The through-hole 21 is formed in the sealed partition wall 20.

[0054] The sealed partition wall 20 has a through member 22 in which the through-hole 21 is formed, and a wall portion 23 that separates between the atmospheric side space A and the vacuum side space V. The portion between the through member 22 and the wall portion 23 can also be sealed. In this case, a sealing member 25 such as an O-ring is disposed between the through member 22 and the wall portion 23.

[0055] The rotary member 30 penetrates the through-hole 21.

[0056] The rotary member 30 is a shaft for transmitting a rotary force to an apparatus disposed in a vacuum chamber. The rotary member 30 penetrates the sealed partition wall 20 that separates the inside of the vacuum chamber from the outside. The rotary member 30 penetrates the through-hole 21 from the vacuum side space V inside the vacuum chamber to the atmospheric side space A that is the outside of the vacuum chamber.

[0057] As shown in Figure 1 , the rotation axis F0 of the rotary member 30 extends in the up and down directions. The rotary member 30 is rotationally driven by the rotary input portion 100. The rotary member 30 is connected to the rotary input portion 100 in the atmospheric side space A on the lower side than the sealed partition wall 20. The rotation axis F0 of the rotary member 30 coincides with the rotation axis F0 of the gear housing portion 204 of the rotary input portion 100 described later.

[0058] ​The rotating member 30 is surrounded by the seal partition wall 20 inside the through-hole 21. A ring-shaped space T is formed between the rotating member 30 and the seal partition wall 20. The ring-shaped space T includes at least the inside of the through-hole 21.

[0059] As shown in Figure 1 The rotating member 30 has a connecting member 32 close to the atmospheric side space A and a rotating end portion 33 closer to the vacuum side space V than the seal partition wall 20. The connecting member 32 is connected to the rotation input portion 100 in the atmospheric side space A. The connecting member 32 protrudes toward the vacuum side space V along the rotation axis FO compared to the seal partition wall 20. The connecting member 32 and the rotating end portion 33 are fastened by a bolt 33b parallel to the rotation axis FO. The portion between the connecting member 32 and the rotating end portion 33 is sealed. A seal member 35 such as an O-ring is arranged between the connecting member 32 and the rotating end portion 33.

[0060] The connecting member 32 is housed inside the through-hole 21 in the direction along the rotation axis FO. A seal mechanism 50 is arranged between the connecting member 32 and the through-hole 21. The connecting member 32 has a friction reducing portion 34 in contact with the seal mechanism 50 on the outer peripheral surface 30S. The area of the outer peripheral surface 30S in contact with the seal mechanism 50 is a sliding surface 30SS. The friction reducing portion 34 is formed on the sliding surface 30SS of the connecting member 32. The seal mechanism 50 seals the portion between the atmospheric side space A and the vacuum side space V. The friction reducing portion 34 and the seal mechanism 50 are described later.

[0061] The outer periphery of the rotating end portion 33 is opposed to the inner periphery of the through member 22 at a position closer to the vacuum side space V than the seal mechanism 50 in the direction along the rotation axis FO.

[0062] As described later, the rotation input portion 100 is a speed reducer. Hereinafter, the rotation input portion 100 is sometimes referred to as the speed reducer 100. As described later, the connecting member 32 is connected to a gear carrier portion 204 of the speed reducer 100. As described later, a housing 202 of the speed reducer 100 is integrated with the wall portion 23 of the seal partition wall 20. The housing 202 is an example of an outer cylinder.

[0063] Figure 2 is an enlarged sectional view showing the seal mechanism 50 of the present embodiment.

[0064] The seal mechanism 50 separates the ring-shaped space T formed between the rotating member 30 and the seal partition wall 20 in a sealed state. The seal mechanism 50 separates the through-hole 21 into the atmospheric side space A and the vacuum side space V in the through-hole 21. The seal mechanism 50 separates the through-hole 21 in the axis (rotation axis) FO direction.

[0065] As shown in Figure 2As shown, the sealing mechanism 50 of the present embodiment has a sealing device 51A and a sealing device 51B. The sealing devices 51A and 51B are each an example of a sealing member. The sealing device 51A can also be referred to as a first sealing device 51A. The sealing device 51B can also be referred to as a second sealing device 51B. In this case, the sealing device 51A is an example of a first sealing member. The sealing device 51B is an example of a second sealing member.

[0066] The sealing device 51A and the sealing device 51B are the same shape. The sealing device 51A and the sealing device 51B are adjacent to each other in the direction along the rotation axis FO. The sealing device 51A and the sealing device 51B are arranged side by side in the direction along the rotation axis FO.

[0067] In order to improve the sealing performance, the sealing mechanism 50 of the present embodiment is a two-stage sealing of the sealing device 51A and the sealing device 51B.

[0068] In addition, the sealing mechanism 50 can also be a one-stage sealing constituted only by the sealing device 51A. The sealing mechanism 50 can also be a multi-stage sealing having a structure in which three or more sealing devices 51A are arranged.

[0069] As for the structure of the sealing device 51B, in Figure 2 the same reference numerals are attached to the same structures as the sealing device 51A, and the description thereof is sometimes omitted.

[0070] The sealing device 51A has a core 52 and a sealing member 53. The core 52 is an example of a metal ring.

[0071] The core 52 is made of metal. The core 52 is formed in a ring shape that surrounds the rotation axis FO once. The core 52 is formed by press working or the like of a steel sheet such as SPCC. The cross-sectional shape of the core 52 in the radial direction with respect to the rotation axis FO is L-shaped.

[0072] The core 52 has a first cylindrical portion 52a and a first annular portion 52b.

[0073] The first cylindrical portion 52a is in a cylindrical shape that extends in parallel with the inner peripheral surface of the through-hole 21. The first annular portion 52b extends from one end portion of the first cylindrical portion 52a to the radially inner side.

[0074] The sealing member 53 is formed of an elastic material such as rubber. The sealing member 53 is formed by being fixed to the surface of the core 52 by vulcanization adhesion.

[0075] The sealing member 53 has a base portion 54, a sealing lip portion 55, and an auxiliary lip portion 57.

[0076] The base portion 54 covers the outer peripheral surface of the first cylindrical portion 52a of the core 52. The base portion 54 surrounds and covers the end surface of the first cylindrical portion 52a on the side of the atmosphere-side space A. The base portion 54 covers the inner peripheral surface of the first cylindrical portion 52a. Also, the base portion 54 covers the side surface of the first annular portion 52b on the side of the atmosphere-side space A. The base portion 54 is bonded to the outer peripheral surface of the first cylindrical portion 52a, the end surface of the first cylindrical portion 52a, the inner peripheral surface of the first cylindrical portion 52a, and the side surface of the first annular portion 52b.

[0077] The base portion 54 includes a second cylindrical portion 54a that covers the inner peripheral surface of the first cylindrical portion 52a, a second annular portion 54b that covers the inner side surface of the first annular portion 52b, and a third cylindrical portion 54c that covers the outer periphery of the first cylindrical portion 52a of the core 52. The second cylindrical portion 54a, the second annular portion 54b, and the third cylindrical portion 54c are continuous as one body.

[0078] The base portion 54 covers the surface of the core 52 except for the surface that is in contact with the vacuum-side space V.

[0079] The third cylindrical portion 54c is in contact with the inner peripheral surface of the through-hole 21. The core 52 is pressed into the through-hole 21 via the third cylindrical portion 54c of the base portion 54. Thus, the seal device 51A is fixed to the through-hole 21.

[0080] The seal member 53 has a recessed portion 59 that is annular about the rotation axis FO. The annular recessed portion 59 is composed of the second cylindrical portion 54a, the second annular portion 54b, and the seal lip portion 55.

[0081] The auxiliary lip portion 57 extends from the inner peripheral end of the first annular portion 52b toward the inside of the rotation axis FO, like the seal lip portion 55.

[0082] The auxiliary lip portion 57 extends from the inner peripheral end of the first annular portion 52b of the core 52 toward the vacuum-side space V. The auxiliary lip portion 57 gradually reduces in diameter toward the vacuum-side space V about the rotation axis FO. The tip end of the auxiliary lip portion 57 is in contact with the sliding surface 30SS of the rotation member 30. The tip end of the auxiliary lip portion 57 slides on the sliding surface 30SS of the rotation member 30.

[0083] The seal lip portion 55 is an annular member that extends from the inner peripheral end of the first annular portion 52b of the core 52 toward the atmosphere-side space A. The seal lip portion 55 extends from the inner peripheral end of the first annular portion 52b to the radially inner side of the rotation axis FO.

[0084] The seal lip portion 55 is formed with a main seal lip portion 510 on the inner peripheral surface. An angle portion is formed in the cross-sectional shape of the main seal lip portion 510. The main seal lip portion 510 is configured as a tip portion formed by a vacuum-space-side inclined surface 511 and an atmosphere-space-side inclined surface 512.

[0085] The main seal lip 510 is in contact with the sliding surface 30SS of the rotating member 30. The main seal lip 510 slides on the sliding surface 30SS of the rotating member 30.

[0086] The vacuum space side inclined surface 511 extends from the main seal lip 510 toward the vacuum side space V. The vacuum space side inclined surface 511 gradually expands in diameter toward the vacuum side space V about the rotation axis FO.

[0087] The atmospheric space side inclined surface 512 extends from the main seal lip 510 toward the atmospheric side space A. The atmospheric space side inclined surface 512 gradually expands in diameter toward the atmospheric side space A about the rotation axis FO.

[0088] A corner is formed in the cross-sectional shape of the main seal lip 510 with the top formed by the vacuum space side inclined surface 511 and the atmospheric space side inclined surface 512.

[0089] The annular coil spring 58 is installed at a position close to the outer peripheral surface of the seal lip 55. The annular coil spring 58 fastens and presses the seal lip 55 inward in the radial direction of the rotation axis FO. By fastening and pressing the seal lip 55 inward in the radial direction by the annular coil spring 58, the sealability can be improved. The annular coil spring 58 is an example of a metal ring.

[0090] The seal lip 55 is in contact with the sliding surface 30SS of the rotating member 30 in a slidable manner. By the seal lip 55 sliding on the sliding surface 30SS of the rotating member 30, the portion between the atmospheric side space A and the vacuum side space V is sealed so that the pressure of the atmospheric side space A does not leak from the portion between the rotating member 30 and the through-hole 21 to the vacuum side space V.

[0091] As described above, the seal lip 55 extends toward the atmospheric side space A with the inner peripheral end of the first annular portion 52b of the core bone 52 as the base end. Therefore, the end of the seal lip 55 toward the atmospheric side space A can move outward in the radial direction of the rotation axis FO with the end close to the vacuum side space V as the fulcrum.

[0092] When the rotating member 30 is inserted into the inner periphery of the seal lip 55, the end of the seal lip 55 toward the atmospheric side space A moves outward in the radial direction of the rotation axis FO. In the seal lip 55, by the end of the seal lip 55 toward the atmospheric side space A moving outward in the radial direction, the end of the seal lip 55 toward the atmospheric side space A and the main seal lip 510 are elastically deformed in a manner that the diameters slightly expand.

[0093] The inner diameter dimension of the main seal lip 510 in the seal lip 55 in the free state is formed to be a prescribed dimension smaller than the outer diameter dimension of the rotating member 30. In the seal lip 55, the inner diameter dimension of the main seal lip 510 is formed to be a prescribed dimension smaller than the outer diameter dimension of the rotating member 30. Figure 2In the middle, a state is shown in which the rotating member 30 is inserted into the inner periphery of the seal lip 55 and the main seal lip 510 is in contact with the sliding surface 30SS of the rotating member 30 in an elastically deformed state.

[0094] The seal device 51B is disposed in close proximity to the atmospheric side space A of the seal device 51A. The seal device 51B is in a state in which the side of the first annular portion 52b of the core 52 that faces the vacuum side space V is in abutment with the base portion 54 that covers the end surface of the first cylindrical portion 52a of the seal device 51A that faces the atmospheric side space A.

[0095] Thus, a ring-shaped space Q1 is formed by the recess 59 of the seal device 51A, the first annular portion 52b of the seal device 51B, and the sliding surface 30SS of the rotating member 30.

[0096] The space Q1 can function as a holding space for lubricant. The lubricant held in the space Q1 can use a lubricant with a high viscosity. As the lubricant, a grease can be preferable. The lubricant held in the space Q1 can also be supplied to the sliding surface of the main seal lip 510 of the seal device 51A that comes into contact with the sliding surface 30SS of the rotating member 30. Thus, the lubricity of the sliding surface is improved, and wear of the sliding surface is prevented. As a result, the sealability of the seal device 51A is maintained for a long period of time.

[0097] The main seal lip 510 of the seal mechanism 50 is in contact with the friction reducing portion 34 formed in the sliding surface 30SS of the connecting member 32. The portion that slides in contact with each other, that is, the seal lip 55 and the friction reducing portion 34 are referred to as a seal portion. In addition, the seal portion can include the auxiliary lip 57 in addition to the seal lip 55 and the friction reducing portion 34.

[0098] The friction reducing portion 34 has a solid lubricating layer 34a that is closer to the sliding surface 30SS in the radial direction of the rotational axis FO and a semi-solid lubricant layer 34b that is closer to the seal lip 55 than the solid lubricating layer 34a in the radial direction of the rotational axis FO. As described later, the friction reducing portion 34 can also be composed of only the solid lubricating layer 34a without the semi-solid lubricant layer 34b.

[0099] The solid lubricating layer 34a is a coating layer that is formed on the sliding surface 30SS in a manner that covers the region of the outer peripheral surface of the connecting member 32 that comes into contact with the seal device 51A and the seal device 51B.

[0100] The solid lubricating layer 34a is a transfer adhesion source supply portion that supplies a transfer adhesion source that reduces friction by being transferred and adhered to the seal device 51A and the seal device 51B that come into contact with and slide against the solid lubricating layer 34a. Transfer adhesion refers to a phenomenon in which, among two members that slide against each other and the like, one member is sheared due to friction and the like, and the object thereof adheres to the other member.

[0101] The case where a small portion of a surface is attached to the surface of the object when the contact portion in friction is sheared at a position different from the original contact surface is called transfer attachment. The attached piece is called a transfer attachment particle. It is remarkable in agglomeration wear. For example, if a surface of metal or the like is covered with a coating film of oxide or the like, agglomeration is small, and transfer attachment is also small. However, in a vacuum, since repair of the oxide coating film is inhibited, agglomeration and transfer attachment occur violently. The case where a particle once attached to the surface of the object is again transferred and attached to the original surface is called retransfer attachment. Furthermore, if the transfer attachment particle is detached from the surface, it becomes a wear particle.

[0102] The solid lubricating layer 34a is formed to a thickness of 25 μm or more.

[0103] The surface roughness of the sliding surface 30SS on which the solid lubricating layer 34a is formed is 1.6 μm or less. In addition, the surface roughness of the sliding surface 30SS is only required to be the above value in at least the region on which the solid lubricating layer 34a is formed. Generally, in the case where a layer for reducing friction is formed on a sliding surface, for example, two methods are used. The first method is to form a concave-convex on the sliding surface, and increase the contact area of the sliding surface with the layer for reducing friction. The second method is to perform pear skin surface treatment or the like for the purpose of reducing the friction of the sliding surface, and for the purpose of improving the adhesion state of the two layers that slide against each other.

[0104] In contrast to this, in the present embodiment, the sliding surface 30SS on which the solid lubricating layer 34a is formed is subjected to mirror surface treatment or the like in advance, and the surface roughness is reduced. That is, in the present embodiment, the sliding surface 30SS is not subjected to pear skin surface treatment or the like. As described later, this mirror surface treatment is performed for the purpose of promoting transfer attachment from a transfer attachment source by making the sliding surface 30SS a smooth state.

[0105] The surface roughness of the sliding surface 30SS on which the solid lubricating layer 34a is formed can be 1.6 μm or less.

[0106] The hardness of the sliding surface 30SS on which the solid lubricating layer 34a is formed is 544 or more in Vickers hardness (HV). In other words, the hardness of the sliding surface 30SS on which the solid lubricating layer 34a is formed is 52 or more in Rockwell hardness (HRC).

[0107] In order to set the hardness of the sliding surface 30SS to the above value, it is preferable that the connecting member 32 be formed of a nitrided steel or a chromium-molybdenum steel of the stainless steel system, a carbon steel. Specifically, nitrided stainless steels such as SUS440C, SUS316L, carbon steels such as SCM440C, S45C, S55C, and the like can be exemplified.

[0108] The solid lubricating layer 34a contains at least a solid lubricant that becomes a transfer-attached source. The solid lubricant can be polytetrafluoroethylene (PTFE). The solid lubricating layer 34a contains the solid lubricant having a particle diameter of 10 μm or less. If the particle diameter of the solid lubricant is greater than this value, the risk of vacuum leakage increases in the case where a solid lubricant having a large particle diameter enters the seal portion, and thus is not preferable. Therefore, the particle diameter of the solid lubricant is set to the above value so as not to impair the sealing performance.

[0109] By setting the particle diameter of the solid lubricant to the above value, transfer-attached particles can be actively generated from the solid lubricating layer 34a. At the same time, the lubricant is easily attached to the seal device 51A and the seal device 51B as transfer-attached particles. The transfer-attached particles refer to particles generated from the solid lubricating layer 34a and attached to the seal lip 55 and the auxiliary lip 57. Furthermore, by setting the particle diameter of the solid lubricant to the above value, the lubricant that is transferred and attached to the seal device 51A and the seal device 51B as transfer-attached particles can effectively reduce the friction coefficient between the seal device 51A and the seal device 51B and the solid lubricating layer 34a.

[0110] The solid lubricating layer 34a is a PTFE coating layer. Therefore, even if exposed to the vacuum-side space V, the environment is not contaminated. Here, the use of PTFE in a vacuum atmosphere, a high vacuum atmosphere, and an ultrahigh vacuum atmosphere is known. Furthermore, the use of PTFE in contact and sliding with rubber (a polymer material) is known.

[0111] The solid lubricating layer 34a can contain polytetrafluoroethylene and polyamide-imide.

[0112] The semi-solid lubricant layer 34b is a layer in which a semi-solid lubricant such as a grease composition is applied in a layer shape. The semi-solid lubricant layer 34b can be applied so as to cover at least a region of the surface of the solid lubricating layer 34a that contacts the seal device 51A and the seal device 51B. Alternatively, the semi-solid lubricant layer 34b can be formed on the entire surface of the solid lubricating layer 34a.

[0113] Alternatively, the semi-solid lubricant layer 34b can be applied so as to cover at least a region of the seal device 51A and the seal device 51B that contacts the solid lubricating layer 34a.

[0114] The semi-solid lubricant layer 34b can be a fluorine grease composition in which polytetrafluoroethylene (PTFE) and perfluoropolyether (PFPE) are main components. For example, the semi-solid lubricant layer 34b can contain polytetrafluoroethylene (PTFE) resin powder, tetrafluoroethylene-hexafluoropropylene copolymer (FEP) powder, perfluoroalkyl resin powder, and the like.

[0115] The fluorine grease composition in the semi-solid lubricant layer 34b can incorporate a thickening agent in a fluorine-based base oil.

[0116] For the semi-solid lubricant layer 34b, the consistency of the semi-solid lubricant is set to NLGI Standard No. 1 (325 ± 15) to No. 3 (235 ± 15). For the semi-solid lubricant layer 34b, the consistency of the semi-solid lubricant can be set to NLGI Standard No. 2 (280 ± 15). The NLGI (National Lubricating Grease Institute) consistency number is based on the JIS consistency number. If the consistency of the semi-solid lubricant is higher and softer than the above value, the sealing property and the assembly property can deteriorate. In addition, if the consistency of the semi-solid lubricant is lower and harder than the above value, the sliding torque of the seal portion increases, and the amount of heat generation can increase. The seal lip portion 55 is formed of a rubber material, and if the temperature of the seal portion is too high, the rubber material deteriorates and the sealing property cannot be maintained, so this is not preferable.

[0117] Hereinafter, the reduction in the coefficient of friction caused by transfer adhesion will be described.

[0118] By sliding the seal device 51A and the seal device 51B as the seal portion with the solid lubricant layer 34a, particles can be actively generated from the solid lubricant layer 34a, and the generated particles can be adhered to the seal member. In this way, the particles generated from the friction reduction portion 34 due to friction are transferred and adhered to the seal device 51A and the seal device 51B.

[0119] Thus, the transferred and adhered particles are solid lubricants that are included in the solid lubricant layer 34a in advance, and thus the coefficient of friction can be reduced as if the solid lubricant layer 34a is formed on the surface of the seal device 51A and the seal device 51B.

[0120] In the case where the solid lubricant is polytetrafluoroethylene, when the polytetrafluoroethylene is coated on the surface of the seal device 51A and the seal device 51B together with a binder and is fired to form a layer that reduces friction. However, since the seal lip portion 55 is a resin such as rubber, it cannot withstand the firing temperature. Therefore, in the past, it was not possible to form the solid lubricant layer 34a on the surface of the seal device 51A and the seal device 51B, and it was not possible to achieve such a friction reduction effect.

[0121] In contrast, in the present embodiment, the transfer-attached particles are actively generated from the solid lubricating layer 34a by previously including the solid lubricant that becomes the transfer-attached particles in the solid lubricating layer 34a as a transfer-attached source. At the same time, the state in which the solid lubricant is attached to the seal devices 51A and 51B is actively formed by the lubricant as the transfer-attached particles. The lubricant that is transferred and attached to the seal devices 51A and 51B as the transfer-attached particles can reduce the coefficient of friction between the seal devices 51A and 51B and the solid lubricating layer 34a.

[0122] In addition, in the present embodiment, the seal lip 55 is fastened to the radially inner side by the annular coil spring 58, and the seal lip 55 pushes the solid lubricating layer 34a, so that the transfer-attachment of the transfer-attached particles from the solid lubricating layer 34a can be promoted.

[0123] Further, the sliding torque can be reduced by the reduction of the coefficient of friction of the seal portion. The heat generation of the seal portion can be suppressed by the reduction of the coefficient of friction of the seal portion. The deterioration of the rubber material such as the seal lip 55 due to high temperature can be prevented by the suppression of the heat generation of the seal portion. The wear of the rubber material such as the seal lip 55 can be prevented by the reduction of the coefficient of friction of the seal portion. Thus, the life of the rotary leadthrough 10 can be extended while maintaining the vacuum tightness.

[0124] Here, generally, the particles generated due to the wear are avoided as a contamination source to the vacuum-side space V. However, in the present embodiment, even if the transfer-attached particles are actively generated from the solid lubricating layer 34a, the transfer-attached particles are attached to the seal devices 51A and 51B as the solid lubricant and do not spread to the vacuum-side space V. Thus, the particle contamination to the vacuum-side space V can be sufficiently suppressed.

[0125] Figure 3 is a schematic cross-sectional view of a rotary input portion 100 of the present embodiment. Figure 4 is Figure 3 is a cross-sectional view at the IV-IV line of

[0126] The rotary input portion 100 of the present embodiment is an eccentric swing reduction machine. As shown in Figure 3 and Figure 4 , the rotary input portion 100 includes a housing 300 and a reduction mechanism portion 200. The housing 300 includes a main body portion 302 and a housing flange portion 304. The housing flange portion 304 is extended to the radially outer side from the main body portion 302 and is connected to the seal partition wall 20.

[0127] In this embodiment, the direction along the rotation axis F0 of the main body 302 is simply referred to as the axial direction. Furthermore, the direction intersecting the rotation axis F0 when viewed from the axial direction is called the radial direction. The direction surrounding the rotation axis F0 is called the circumferential direction. Furthermore, the location near the atmospheric side space A where the reducer 100 is connected to a drive source such as a motor is called the input side. The location near the vacuum side space V where the output of the reducer 100 is received is called the output side. The reducer 100 transmits rotational driving force by changing the rotational speed at a predetermined speed ratio between the drive source and the rotating member 30.

[0128] The main body 302 is formed in a cylindrical shape along the rotation axis F0. An opening is formed on the axial output side of the main body 302. The reduction gear 200 is rotatably accommodated in the opening of the main body 302. A housing flange 304 is integrally formed on the axial input side of the main body 302. The reducer 100 exposes multiple (e.g., three) transmission gears 200A and input gears 200B on the output side.

[0129] The reducer 100 rotates the crankshaft 210A by rotating the input shaft 208 corresponding to the input gear 200B. The reducer 100, in conjunction with the eccentric portions 210a and 210b of the crankshaft 210A, causes the oscillating gears 214 and 216 to oscillate and rotate. Thus, the reducer 100 is configured to obtain a reduced output rotation from the input rotation.

[0130] like Figure 3 , Figure 4 As shown, the reducer 100 of this embodiment includes an outer cylinder 202 corresponding to the main body 302, a gear carrier 204, an input shaft 208, a plurality of (e.g., three) crankshafts 210A, a first oscillating gear 214, a second oscillating gear 216, and a plurality of (e.g., three) transmission gears 220. The transmission gears 220 correspond to the transmission gears 200A.

[0131] The outer cylinder 202 forms the outer surface of the reducer 100. The outer cylinder 202 has a generally cylindrical shape. A plurality of pin grooves 202b are formed on the inner circumferential surface of the outer cylinder 202. The plurality of pin grooves 202b are respectively arranged to extend along the axial direction of the outer cylinder 202. The plurality of pin grooves 202b each have a semi-circular cross-sectional shape in a section orthogonal to the axial direction. These pin grooves 202b are arranged at equal intervals in the circumferential direction on the inner circumferential surface of the outer cylinder 202.

[0132] The outer cylinder 202 has a plurality of inner tooth pins 203. The plurality of inner tooth pins 203 are respectively fitted to the pin grooves 202b. Specifically, the plurality of inner tooth pins 203 are respectively fitted one-to-one to the corresponding pin grooves 202b. The plurality of inner tooth pins 203 are respectively arranged in a posture extending in the axial direction of the outer cylinder 202. Thus, the plurality of inner tooth pins 203 are arranged equidistantly along the circumferential direction of the outer cylinder 202. These inner tooth pins 203 engage with the first outer teeth 214a of the first swing gear 214 and the second outer teeth 216a of the second swing gear 216.

[0133] The gear carrier portion 204 is housed in the outer cylinder 202. The gear carrier portion 204 is arranged coaxially with the outer cylinder 202. The gear carrier portion 204 relatively rotates around the same axis with respect to the outer cylinder 202 (the housing 300). Specifically, the gear carrier portion 204 is arranged on the radially inner side of the outer cylinder 202. The gear carrier portion 204 is supported so as to be relatively rotatable with respect to the outer cylinder 202 in this state. The gear carrier portion 204 is supported by a pair of main bearings 206 provided axially apart from each other.

[0134] The gear carrier portion 204 has a base portion and an end plate portion 204b. The base portion has a base plate portion 204a and a plurality of (for example, three) shaft portions 204c.

[0135] The base plate portion 204a is arranged in the outer cylinder 202 at a position near one end portion in the axial direction. The base plate portion 204a is provided with a circular through-hole 204d at the radially central portion. A plurality of crankshaft mounting holes 204e are provided equidistantly in the circumferential direction around the through-hole 204d. The number of the plurality of crankshaft mounting holes 204e is, for example, three. Hereinafter, the crankshaft mounting holes 204e are sometimes referred to simply as the mounting holes 204e.

[0136] The end plate portion 204b is provided axially apart from the base plate portion 204a. The end plate portion 204b is arranged in the outer cylinder 202 at a position near the other end portion in the axial direction. A through-hole 204f is provided at the radially central portion of the end plate portion 204b. Around the through-hole 204f, a plurality of crankshaft mounting holes 204g are provided at positions corresponding one-to-one to the plurality of mounting holes 204e of the base plate portion 204a. The number of the plurality of crankshaft mounting holes 204g is, for example, three. Hereinafter, the crankshaft mounting holes 204g are sometimes referred to simply as the mounting holes 204g.

[0137] In the inside of the outer cylinder 202, a closed space is formed by the inner surface of the end plate portion 204b opposite to the base plate portion 204a, the inner surface of the base plate portion 204a opposite to the end plate portion 204b, and the inner peripheral surface of the outer cylinder 202.

[0138] The three shaft portions 204c are provided integrally with the base plate portion 204a. The three shaft portions 204c extend linearly from the inner surface of the base plate portion 204a opposite the end plate portion 204b toward the end plate portion 204b. The three shaft portions 204c are arranged equiangularly in the circumferential direction (refer to Figure 4 ). The three shaft portions 204c are fastened to the end plate portion 204b by bolts 204h (refer to Figure 3 ). Thus, the base plate portion 204a, the shaft portions 204c, and the end plate portion 204b are integrated.

[0139] The input shaft 208 is input with a driving force of a motor serving as a driving source. The input shaft 208 functions as an input portion. The input shaft 208 is inserted into the through-hole 204f of the end plate portion 204b. The input shaft 208 is inserted into the through-hole 204d of the base plate portion 204a. The axis of the input shaft 208 coincides with the rotation axis FO of the outer cylinder 202 and the gear carrier portion 204. The input shaft 208 rotates around the rotation axis FO. The input gear 208a of the input shaft 208 is provided to the outer circumferential surface of the tip end portion.

[0140] The three crankshafts 210A are arranged around the input shaft 208 inside the outer cylinder 202. The three crankshafts 210A are arranged equiangularly in the circumferential direction (refer to Figure 4 ). The crankshaft axis of each of the three crankshafts 210A is arranged in parallel with the rotation axis FO. In the following description, the three crankshafts 210A are sometimes simply referred to as crankshafts 210A. The crankshaft 210A is rotatable around the crankshaft axis with respect to the gear carrier portion 204. The crankshaft 210A is supported to the gear carrier portion 204 by a pair of a first crankshaft bearing 212a and a second crankshaft bearing 212b (refer to Figure 3 ).

[0141] Specifically, the first crankshaft bearing 212a is mounted to a portion of the crankshaft 210A that is located at a prescribed length closer to the center from one end of the crankshaft 210A in the direction along the crankshaft 210A. The first crankshaft bearing 212a is mounted to the mounting hole 204e of the base plate portion 204a. The second crankshaft bearing 212b is mounted to the other end portion of the crankshaft 210A in the direction along the crankshaft 210A. Further, the second crankshaft bearing 212b is mounted to the mounting hole 204g of the end plate portion 204b. Thus, the crankshaft 210A is supported to be rotatable by the base plate portion 204a and the end plate portion 204b.

[0142] The crankshaft 210A has a shaft main body 212c, a first eccentric portion 210a, and a second eccentric portion 210b. The first eccentric portion 210a is integrally formed in the shaft main body 212c. The second eccentric portion 210b is integrally formed in the shaft main body 212c. The first eccentric portion 210a and the second eccentric portion 210b are arranged in the direction along the crankshaft axis between the first crankshaft bearing 212a and the second crankshaft bearing 212b. The first eccentric portion 210a and the second eccentric portion 210b are arranged in line in the axial direction.

[0143] The first eccentric portion 210a is a cylindrical shape having an axis along the rotation axis F0. The second eccentric portion 210b is a cylindrical shape having an axis along the rotation axis F0. The first eccentric portion 210a and the second eccentric portion 210b are cylindrical shapes having the same diameter dimension. The first eccentric portion 210a projects to the radially outer side from the shaft main body 212c. The second eccentric portion 210b projects to the radially outer side from the shaft main body 212c. The first eccentric portion 210a is eccentric with respect to the shaft center of the shaft main body 212c. The second eccentric portion 210b is eccentric with respect to the shaft center of the shaft main body 212c. The first eccentric portion 210a and the second eccentric portion 210b are respectively eccentric from the shaft center by a prescribed eccentric amount. The first eccentric portion 210a and the second eccentric portion 210b are arranged in a manner that have a prescribed angle of phase difference from each other.

[0144] The crankshaft 210A has an engaged portion 210c. The engaged portion 210c is provided at one end portion of the crankshaft 210A. The engaged portion 210c is provided at a position on the axially outer side of the crankshaft 210A installed in the mounting hole 204e of the base plate portion 204a. The transmission gear 220 is installed in the engaged portion 210c.

[0145] In addition, the reduction gear 100 of the embodiment is not limited to Figure 3 and Figure 4 Examples. For example, it can be a structure called a reverse group. In the case of being provided as a reverse group, the crankshaft 210A is arranged in the axial direction in reverse. At the same time, the engaged portion 210c is arranged on the axially outer side of the mounting hole 204g of the end plate portion 204b.

[0146] The first swing gear 214 is arranged in the closed space in the outer cylinder 202. The first swing gear 214 is installed in the first eccentric portion 210a of the crankshaft 210A. The first swing gear 214 is installed by means of the first roller bearing 218a. When the crankshaft 210A rotates and the first eccentric portion 210a eccentrically rotates, the first swing gear 214 is linked with this eccentric rotation. The linked first swing gear 214 swings and rotates while being engaged with the inner tooth pin 203.

[0147] The first swing gear 214 has a profile shape slightly smaller than the inner diameter of the outer cylinder 202. The first swing gear 214 has a first external tooth 214a, a central portion through hole 214b, a plurality of (for example, three) first eccentric portion insertion holes 214c, and a plurality of (for example, three) shaft portion insertion holes 214d. The first external tooth 214a has a wave shape that is continuously smooth in the entire circumferential direction of the swing gear 214.

[0148] The central portion through hole 214b is provided in the radial central portion of the first swing gear 214. The input shaft 208 is inserted through the central portion through hole 214b in a state having a play.

[0149] The three first eccentric portion insertion holes 214c are provided in the first swing gear 214. The three first eccentric portion insertion holes 214c are provided around the central portion through hole 214b. The three first eccentric portion insertion holes 214c are arranged with equal intervals from each other in the circumferential direction.

[0150] In the crankshaft 210A, the first eccentric portion 210a is inserted into the first eccentric portion insertion hole 214c. The first eccentric portion 210a is inserted to a position close to the inner wall of the first eccentric portion insertion hole 214c. The first eccentric portion 210a is inserted into the first eccentric portion insertion hole 214c by means of the first roller bearing 218a.

[0151] The three shaft portion insertion holes 214d are provided in the first swing gear 214. The three shaft portion insertion holes 214d are provided around the central portion through hole 214b. The three shaft portion insertion holes 214d are arranged with equal intervals in the circumferential direction. The three shaft portion insertion holes 214d are respectively provided in positions between the three first eccentric portion insertion holes 214c in the circumferential direction. The three shaft portions 204c are respectively inserted into the corresponding shaft portion insertion holes 214d in a state having a play.

[0152] The second swing gear 216 is arranged inside the outer cylinder 202, that is, in the closed space. The second swing gear 216 is mounted to the crankshaft 210A. The second swing gear 216 is mounted to the second eccentric portion 210b. The second swing gear 216 is mounted to the second eccentric portion 210b by means of the second roller bearing 218b.

[0153] The first swing gear 214 and the second swing gear 216 are arranged in the axial direction in correspondence with the arrangement of the first eccentric portion 210a and the second eccentric portion 210b. When the crankshaft 210A rotates and the second eccentric portion 210b eccentrically rotates, the second swing gear 216 is linked with this eccentric rotation. The linked second swing gear 216 rotates while being engaged with the internal tooth pin 203.

[0154] The 2nd oscillating gear 216 has a profile shape slightly smaller than the inner diameter of the outer cylinder 202. The 2nd oscillating gear 216 has the same structure as the 1st oscillating gear 214. That is, the 2nd oscillating gear 216 has a 2nd outer tooth 216a, a central portion through hole 216b, a plurality of (for example, three) 2nd eccentric portion insertion holes 216c, and a plurality of (for example, three) shaft portion insertion holes 216d. They have the same configuration as the 1st outer tooth 214a, the central portion through hole 214b, the plurality of 1st eccentric portion insertion holes 214c, and the plurality of shaft portion insertion holes 214d, corresponding to the 1st oscillating gear 214.

[0155] In the crankshaft 210A, the 2nd eccentric portion 210b is inserted into the 2nd eccentric portion insertion hole 216c. The 2nd eccentric portion 210b is inserted to the inner wall side of the 2nd eccentric portion insertion hole 216c. The 2nd eccentric portion 210b is inserted into the 2nd eccentric portion insertion hole 216c by the 2nd roller bearing 218b.

[0156] The transmission gear 220 transmits the rotation of the input gear 208a to the corresponding crankshaft 210A. The transmission gear 220 is installed to the corresponding crankshaft 210A. The transmission gear 220 is installed to one end portion of the shaft main body 212c. The transmission gear 220 is fitted with the fitted portion 210c. The fitted portion 210c is provided to one end portion of the shaft main body 212c.

[0157] The transmission gear 220 rotates around the same axis as the crankshaft axis of the crankshaft 210A. The transmission gear 220 rotates integrally with the crankshaft 210A. The transmission gear 220 has an outer tooth 220a that engages with the input gear 208a.

[0158] The reduction gear 100 is a gear device that transmits driving force with a prescribed rotational speed ratio between a driving source and a rotating member 30. The reduction gear 100 can have a reduction mechanism portion 200. The reduction mechanism portion 200 has an eccentric portion, an oscillating gear, a 1st cylinder portion, and a 2nd cylinder portion. The oscillating gear has an insertion hole into which the eccentric portion is inserted and has a tooth portion. The 1st cylinder portion is configured to be able to be installed to one of a 1st member and a 2nd member. The 2nd cylinder portion is configured to be able to be installed to the other of the 1st member and the 2nd member. The 1st cylinder portion has an inner tooth that engages with the tooth portion of the oscillating gear. The 2nd cylinder portion is disposed radially inside the 1st cylinder portion while holding the oscillating gear. The 1st cylinder portion and the 2nd cylinder portion are able to rotate in opposition to each other in a concentric manner by the oscillation of the oscillating gear in conjunction with the rotation of the eccentric portion.

[0159] In the rotary introduction machine 10 of the present embodiment, the rotary input portion 100, the sealing mechanism 50, and the sealing portion including the friction reducing portion 34 are arranged in this order from the atmospheric side space A toward the vacuum side space V along the rotation axis F0. Thereby, the coefficient of friction of the sealing portion can be reduced by the transfer-attached particles. In particular, polytetrafluoroethylene, which requires a baking treatment, can be contained in the solid lubricating layer 34a as a solid lubricant and transferred and attached to the sealing lip portion 55 as the transfer-attached particles. Thus, in the rotary introduction machine 10, the coefficient of friction can be further reduced compared to the past.

[0160] Next, the manufacturing method of the rotary introduction machine 10 of the present embodiment will be described.

[0161] Figure 5 is a flowchart showing the manufacturing method of the rotary introduction machine 10 of the present embodiment.

[0162] As shown in Figure 5 , the manufacturing method of the rotary introduction machine 10 has a preparation step S0, a solid lubricating layer raw material coating step S1, a solid lubricating layer baking step S2, a semi-solid lubricant coating step S3, and an assembly step S4.

[0163] In the preparation step S0, before the solid lubricating layer 34a is formed, the rotary member 30 in which the surface roughness of the sliding surface 30SS is set to the above value is prepared.

[0164] First, the connecting member 32 is formed of a material having the above hardness.

[0165] Next, the region of the outer circumferential surface 30S of the connecting member 32 that becomes the sealing portion is set to the sliding surface 30SS. The outer circumference of the connecting member 32 that becomes the sliding surface 30SS is mirror finished to form the above surface roughness.

[0166] Meanwhile, as the sealing mechanism 50, the sealing device 51A is prepared in advance in correspondence with the required number of sealing stages.

[0167] In the solid lubricating layer raw material coating step S1, the raw material that becomes the solid lubricating layer 34a is formed in layers on the sliding surface 30SS prepared in the preparation step S0. The solid lubricating layer raw material can contain a solvent, a binder component, and a solid lubricant. Specifically, the solid lubricating layer raw material contains polytetrafluoroethylene (PTFE) and polyamide-imide as main components. As the solid lubricating layer raw material, a raw material having a particle diameter of the above value is selected.

[0168] At this time, the solid lubricating layer raw material can be lower in consistency and harder than the semi-solid lubricant coated in the semi-solid lubricant coating step S3 described later.

[0169] As the layer formation of the sliding surface 30SS, a solid lubricant layer raw material can be applied to the sliding surface 30SS. As the application method, there are no particular limitations, and for example, a spraying method, a dipping method, a flow coating method, a dispersion method, a spin coating method, and the like can be exemplified. In the application of the solid lubricant layer raw material, the application thickness of the solid lubricant layer raw material is set in a manner such that the film thickness of the formed solid lubricant layer 34a becomes the above-described value, taking into account the change caused by firing.

[0170] In the solid lubricant layer firing step S2, the solid lubricant layer raw material application layer formed in the solid lubricant layer raw material application step S1 is subjected to annealing treatment and firing. At this time, the annealing temperature is set to a range of 200°C to 250°C. The annealing atmosphere can be a vacuum atmosphere, an atmospheric air atmosphere, a non-active gas atmosphere, a nitrogen gas atmosphere. The annealing treatment can be performed in an atmospheric pressure atmosphere. Alternatively, the annealing treatment can be performed in a reduced pressure atmosphere.

[0171] By setting the annealing temperature in the solid lubricant layer firing step S2 to the above-described value, the solid lubricant layer raw material can be fired to form the solid lubricant layer 34a. In a case where the annealing temperature is lower than the above-described value, the firing is insufficient, and it can be impossible to form the solid lubricant layer 34a, and thus this is not preferable.

[0172] By setting the annealing temperature to the above-described value, the hardness change of the connecting member 32 can be avoided. In particular, in a case where the annealing temperature exceeds the above-described value, the connecting member 32 becomes an annealed state, and a hardness reduction can occur, and thus this is not preferable.

[0173] In the semi-solid lubricant application step S3, a semi-solid lubricant is applied to the surface of the solid lubricant layer 34a formed in the solid lubricant layer firing step S2. Alternatively, in the semi-solid lubricant application step S3, a semi-solid lubricant is applied to the surface of the seal lip portion 55. As the application method, there are no particular limitations, but for example, a spraying method, a dipping method, a flow coating method, a dispersion method, a spin coating method can be exemplified.

[0174] The semi-solid lubricant is a fluorine grease in which polytetrafluoroethylene (PTFE) and perfluoropolyether are main components.

[0175] At this time, the consistency of the semi-solid lubricant can be lower and harder than the consistency of the solid lubricant applied in the solid lubricant layer raw material application step S1.

[0176] The consistency of the semi-solid lubricant is set to the above-described value. If the consistency of the semi-solid lubricant is higher and softer than the above-described value, the sealing property and the assembly property can deteriorate. If the consistency of the semi-solid lubricant is lower and harder than the above-described value, application omission can occur.

[0177] In the assembly process S4, the connecting member 32 is inserted into the seal device 51A, and the seal portion is assembled in a manner that exhibits a prescribed sealability. Further, the other portions of the rotary introducer 10 are assembled.

[0178] Thus, the manufacture of the rotary introducer 10 is completed.

[0179] The manufacturing method of the rotary introducer of the present embodiment easily makes the surface roughness of the sliding surface 30SS the prescribed value by preparing the connecting member 32 having the above hardness. By setting the surface roughness of the sliding surface 30SS, the adhesion of the solid lubrication layer 34a to the connecting member 32 can be improved. Further, by setting the surface roughness of the sliding surface 30SS, the transfer adhesion of the solid lubricant as a transfer adhesion particle to the seal lip portion 55 can be promoted in the solid lubrication layer 34a. By forming the above solid lubrication layer raw material coating layer, the solid lubrication layer 34a that can reduce the coefficient of friction can be formed. By forming the above solid lubrication layer raw material coating layer, the solid lubrication layer 34a that can maintain the vacuum sealability can be formed.

[0180] The manufacturing method of the rotary introducer of the present embodiment sets the annealing temperature at which the solid lubrication layer raw material coating layer is fired to the above value. Thus, the firing of the solid lubrication layer 34a can be sufficiently performed, and a PTFE coating layer that can reduce the coefficient of friction can be formed. By setting the annealing temperature at which the solid lubrication layer raw material coating layer is fired to the above value, the hardness of the connecting member 32 can be prevented from decreasing. The solid lubrication layer that needs to be fired is not formed in the seal lip portion 55 while the solid lubrication layer 34a is fired in the sliding surface 30SS, and thus the deterioration of the seal lip portion 55 that is composed of a rubber material and the decrease in the sealability can be prevented. By firing the solid lubrication layer 34a on the mirror-finished sliding surface 30SS, the wear of the seal lip portion 55 can be prevented.

[0181] The manufacturing method of the rotary introducer of the present embodiment can further reduce the coefficient of friction of the seal portion by forming the semi-solid lubricant layer 34b on the surface of the solid lubrication layer 34a. As described above, by forming the semi-solid lubricant layer 34b, a prescribed consistency can be achieved, and the assembly property can be improved. As described above, by setting the consistency of the semi-solid lubricant layer 34b, the reduction in the sliding torque can be achieved.

[0182] As described above, by forming the semi-solid lubricant layer 34b, the wear of the seal lip portion 55 can be further prevented. Further, as described above, by forming the semi-solid lubricant layer 34b, the generation of the fine particles can be further prevented. Thus, the contamination of the vacuum-side space V can be easily suppressed.

[0183] According to the present embodiment, the coefficient of friction of the seal portion can be reduced. Thus, the temperature rise of the seal lip 55 as a rubber material can be prevented, and the occurrence of a blister phenomenon of the seal lip 55 can be prevented. Thus, the sealability of the seal portion can be easily maintained.

[0184] A rotary introduction machine of a second embodiment of the present application will be described below based on the drawings.

[0185] Figure 6 is a schematic plan view showing a vacuum processing apparatus provided with the rotary introduction machine of the present embodiment. Figure 7 is a schematic view showing a transport robot provided with the rotary introduction machine of the present embodiment. In the present embodiment, points related to the arrangement of the rotary introduction machine are different from those of the above-described first embodiment, and the same reference numerals are given to structures corresponding to those of the above-described first embodiment except for the points, and the description thereof is omitted.

[0186] As shown in Figure 6 , the rotary introduction machine 10 of the present embodiment is used in a vacuum processing apparatus 1000. The vacuum processing apparatus 1000 is used, for example, for the manufacture of an FPD, and is an apparatus capable of processing a glass substrate of 50 mm or more, 100 mm or more, or 1000 mm or more in one side. The vacuum processing apparatus 1000 is provided with a transfer chamber 1001 and chambers 1002 to 1007 around the same. The chambers 1002 to 1007 are, for example, processing chambers in which prescribed vacuum processing is performed, or are load chambers or unload chambers.

[0187] The rotary introduction machine 10 of the present embodiment is provided to a transport robot (robot) 1100 arranged in the transfer chamber 1001. As shown in Figure 7 , the transport robot 1100 houses the rotary introduction machine 10 in a lower portion, and has a transport portion 1101 that transports a glass substrate in an upper portion. The rotary introduction machine 10 drives the transport portion 1101 to rotate.

[0188] By applying the rotary introduction machine 10 of the present embodiment to the substrate transport robot 1100, the coefficient of friction of the seal portion of the rotary introduction machine 10 can be reduced, and the life of the rotary introduction machine 10 can be greatly extended. At the same time, the generation of particles from the rotary introduction machine 10 can be prevented, and the generation of contamination in the transfer chamber 1001 and the chambers 1002 to 1007 can be greatly reduced.

[0189] As for the members composed of a plurality of objects in the embodiments disclosed in the present specification, the plurality of objects can be integrated, and conversely, the member composed of one object can be divided into a plurality of objects. Whether or not to be integrated, as long as the member is configured to achieve the object of the present application.

[0190] Further, in the above-described embodiment, the rotary introduction machine is described as an example of the vacuum actuator, but the mechanism that introduces linear driving force into the vacuum or the like can also be applied. In this case, in the axial direction of the shaft member, the friction reduction portion can be formed so as to include the portion contacted by the sealing member.

[0191] In order to verify the present application, an experiment for confirming the reduction of the friction coefficient was performed.

[0192] As a test piece corresponding to the rotating member 30 of the sealing portion, a plate composed of S45C was prepared. The surface of the test plate was mirror finished to Rz 1.6 μm in correspondence with the sliding surface 30SS. The surface hardness of the test plate was Vickers hardness (HV) 544.

[0193] Next, a coating layer corresponding to the solid lubricating layer 34a was formed on the surface of the test plate.

[0194] The formation conditions at this time are shown below.

[0195] • Coating liquid composition:

[0196] PTFE

[0197] Polyamide-imide

[0198] • PTFE particle size in the coating liquid: 10 μm or less

[0199] • Firing conditions: atmospheric air

[0200] • Firing pressure: atmospheric pressure

[0201] • Firing temperature: 230°C

[0202] • Firing time: 30 min

[0203] • Coating film thickness: 25 μm

[0204] Further, a lubricating grease corresponding to the semi-solid lubricant layer 34b was applied to the surface of the coating layer.

[0205] The conditions are shown below.

[0206] • Lubricating grease composition: base oil PFPE, thickener PTFE

[0207] • Consistency of the lubricating grease: NLGI standard No. 2 (280 ± 15)

[0208] • Lubricating grease application thickness: 50 μm

[0209] Next, a rubber ball corresponding to the sealing lip portion 55 of the sealing portion was prepared.

[0210] • Rubber ball material: fluorine rubber

[0211] • Rubber ball diameter: R 8.5 mm

[0212] • Rubber ball hardness: A 75

[0213] Next, the coating was slid with the rubber ball at a relative speed of 600 mm / s. At this time, the load was an average surface pressure of 0.8 MPa. Further, the sliding test was performed at room temperature.

[0214] After a prescribed time, the sliding test was ended, and the friction coefficient of the coating surface was measured. As a result, the friction coefficient was reduced by 28% compared to the friction coefficient of the surface of the test plate without the coating.

[0215] Further, the temperature rise of the surface of the test plate was measured before and after the sliding test. As a result, the temperature rise was reduced by 2°C compared to the surface temperature of the test plate without the coating.

[0216] Furthermore, the surface of the test plate was visually confirmed after the sliding test. As a result, in the case without the coating, the rubber ball was worn and wear powder was attached to the surface of the test plate, in contrast to which, in the case with the coating, the rubber wear powder could not be visually confirmed.

[0217] Further, the surface roughness of the coating surface was measured before and after the sliding test. As a result, the surface roughness of the coating surface was Ra 0.31 μm to 0.48 μm or so, Rz 2.04 μm to 2.58 μm or so, and hardly changed before and after the sliding test.

[0218] From these results, it was found that, according to the present application, the friction coefficient of the sealing portion can be reduced. Further, it was found that the heat generation of the sealing portion can be suppressed. Moreover, it was found that the wear of the rubber material can be prevented.

[0219] The friction reducing portion of the present application can be a transfer-attached source supply portion that supplies a transfer-attached source that reduces friction by being transferred and attached to the sliding sealing member.

[0220] By so configuring, the sealing member that is the sealing portion is slid with the friction reducing portion, whereby the particles are actively generated from the friction reducing portion, and the generated particles are attached to the sealing member. The particles that are thus generated by friction from the friction reducing portion and attached to the sealing member are called transfer-attached particles. By previously including the lubricant that becomes the transfer-attached particles as the transfer-attached source in the friction reducing portion, the transfer-attached particles are actively generated from the friction reducing portion. At the same time, by the lubricant as the transfer-attached particles, the state in which the lubricant is attached to the sealing member is actively formed. The lubricant that is transferred and attached to the sealing member as the transfer-attached particles can reduce the friction coefficient between the sealing member and the sliding surface.

[0221] Thus, the lubricant previously contained in the friction reducing portion as a transfer adhesion source is actively transferred and adhered to the seal member as a transfer adhesion particle. Therefore, even if the seal member is not coated with the lubricant, the coefficient of friction between the seal member and the sliding surface can be reduced.

[0222] Thus, the wear of the seal member can be prevented.

[0223] Meanwhile, even if a heat treatment such as baking is required in the formation of the friction reducing portion, the seal member is made of resin that deteriorates due to the heat treatment, and in the case where the friction reducing portion cannot be formed in the seal member, the coefficient of friction of the seal portion can be reduced without performing the heat treatment. Therefore, the temperature of the seal portion does not increase, and the sealability of the seal portion does not decrease.

[0224] Further, the transfer adhesion particle as the lubricant is actively transferred and adhered to the seal member, and therefore does not spread to the vacuum side space. Meanwhile, the seal member does not wear due to the sliding surface, and the generation of particles from the seal member can be prevented. Therefore, the contamination of the vacuum side space can be prevented.

[0225] The friction reducing portion of the present application can be formed in the sliding surface with a thickness of 25 μm or more.

[0226] By so configuring, the friction reducing portion has a volume corresponding to the film thickness, and therefore can contain the transfer adhesion particle as the lubricant that can sufficiently reduce the coefficient of friction as a transfer adhesion source. Thus, the transfer adhesion particle that is transferred and adhered to the seal member and can sufficiently reduce the coefficient of friction as the lubricant can be generated.

[0227] Meanwhile, by the friction reducing portion having a sufficient film thickness, even if the seal member slides with the friction reducing portion, the coefficient of friction of the seal portion can be prevented from increasing due to the wear of the friction reducing portion. Thus, the durability of the friction reducing portion can be improved.

[0228] For the present application, the surface roughness of the sliding surface in which the friction reducing portion is formed can be 1.6 μm or less.

[0229] By so configuring, the lubricant previously contained in the friction reducing portion as a transfer adhesion source can be actively transferred and adhered to the seal member as a transfer adhesion particle. In addition, the film thickness of the friction reducing portion required for the reduction of the coefficient of friction can be reduced.

[0230] For the present application, the hardness of the sliding surface in which the friction reducing portion is formed can be 544 or more in Vickers hardness (HV).

[0231] By so constituting, the lubricant previously contained in the friction reducing portion as a transfer adhesion source of the transfer adhesion particles can be actively transferred and adhered to the seal member. Further, the film thickness of the friction reducing portion required for reducing the friction coefficient can be reduced.

[0232] Meanwhile, by the shaft member having sufficient hardness, even if the seal member slides against the friction reducing portion, the friction reducing portion can be prevented from being worn to increase the friction coefficient of the seal portion.

[0233] The friction reducing portion of the present application can have a solid lubricating layer containing a solid lubricant and a semi-solid lubricant layer formed between the surface of the solid lubricating layer and the seal member.

[0234] By so constituting, the solid lubricant is contained in the solid lubricating layer as a transfer adhesion source of the transfer adhesion particles, and the reduction of the friction coefficient by the transfer adhesion particles can be achieved. Further, by the semi-solid lubricant layer, the friction coefficient between the surface of the solid lubricating layer and the seal member can be further reduced.

[0235] Thus, the reduction of the friction coefficient by the solid lubricant as the transfer adhesion particles and the reduction of the friction coefficient by the semi-solid lubricant layer can be simultaneously achieved.

[0236] The solid lubricating layer of the present application can contain a solid lubricant having a particle diameter of 10 μm or less.

[0237] By so constituting, as the lubricant requiring the transfer adhesion particles, the solid lubricant capable of reducing the friction coefficient can be used as the transfer adhesion source. Thus, the state that the solid lubricating layer contains the solid lubricant capable of being transferred and adhered to the seal member as the transfer adhesion source can be maintained, the transfer adhesion particles can be continuously released from the solid lubricating layer, and the state capable of reducing the friction coefficient can be maintained.

[0238] The solid lubricant of the present application can contain polytetrafluoroethylene.

[0239] By so constituting, the function as the transfer adhesion particles capable of reducing the friction coefficient of the seal portion can be sufficiently exerted. In particular, by the friction of the seal member against the surface of the solid lubricating layer, a sufficient amount of the solid lubricant as the transfer adhesion particles can be generated. The solid lubricant can be appropriately transferred and adhered to the seal member and function as the lubricant. The friction coefficient between the seal member and the surface of the solid lubricating layer can be sufficiently reduced. The transfer adhesion particles can be prevented from diffusing to the vacuum side space. The gas can be prevented from being emitted to the vacuum side space.

[0240] The shaft member of the present application can contain a nitrogenated stainless steel, a chromium-molybdenum steel iron, or a carbon steel.

[0241] By so configuring, sufficient hardness of the shaft member can be maintained, and the friction reducing portion can release sufficient transfer-attached particles. The coefficient of friction between the sealing member and the sliding surface can be sufficiently reduced. The sealing member can be prevented from being worn, the coefficient of friction of the sliding surface can be maintained to be reduced, and the vacuum tightness can be maintained.

[0242] The sealing member of the present application can have a metal ring that surrounds the outer periphery of the shaft member along the sliding surface, and a sealing lip portion that is in linear contact with the sliding surface.

[0243] By so configuring, the sealing lip portion of the sealing member is pressed against the friction reducing portion, and the improvement of the sealing property of the friction reducing portion and the promotion of the reduction of the friction caused by the transfer-attached particles can be achieved.

[0244] The manufacturing method of the vacuum actuator of the other technical solution of the present application can be the manufacturing method of the vacuum actuator described above, and has a friction reducing portion forming step of forming the friction reducing portion on the sliding surface, and an assembling step of assembling the sealing member in contact with the sliding surface on which the friction reducing portion is formed.

[0245] By so configuring, the sealing member can be assembled after the friction reducing portion having a prescribed property is formed, and the vacuum actuator capable of reducing the coefficient of friction can be manufactured.

[0246] The friction reducing portion forming step of the present application can have a preparation step of making the surface roughness of the sliding surface on which the friction reducing portion is formed be 1.6 μm or less.

[0247] By so configuring, the friction reducing portion capable of previously containing the lubricant as the transfer-attachment source can be easily formed. Thus, the friction reducing portion capable of being actively transferred and attached to the sealing member as the transfer-attached particles can be easily formed. In addition, the coefficient of friction of the friction reducing portion can be reduced. Furthermore, the film thickness of the friction reducing portion required for the reduction of the coefficient of friction can be reduced.

[0248] The friction reducing portion of the present application has a solid lubricating layer containing a solid lubricant. The friction reducing portion forming step can have a solid lubricating layer raw material coating step of coating a raw material of the solid lubricating layer on the friction reducing portion, and a solid lubricating layer firing step of firing the coated raw material. Thus, the friction reducing portion having the solid lubricating layer can be formed by the friction reducing portion forming step. By so configuring, the raw material layer to be the solid lubricating layer can be easily formed by coating, and the raw material layer can be formed by firing. Thus, the solid lubricating layer can be formed on the sealing member, and the friction reducing portion capable of reducing the coefficient of friction by transfer-attachment can be formed. Thus, the deterioration caused by heat can not occur in the sealing member, and the friction reducing portion capable of reducing the coefficient of friction of the sealing portion can be formed.

[0249] For the present application, the firing temperature of the solid lubricating layer firing process can be 200°C to 250°C.

[0250] By so configuring, the solid lubricating layer containing polytetrafluoroethylene as a solid lubricant can be fired and formed. The hardening process of the shaft member composed of metal can be performed, and the shaft member can be prevented from being annealed and reduced in hardness.

[0251] It can be that the friction reducing portion of the present application has a semi-solid lubricant layer formed between the surface of the solid lubricating layer and the sealing member, and the friction reducing portion forming process has a semi-solid lubricant coating process of forming the semi-solid lubricant layer between the surface of the solid lubricating layer and the sealing member, and the consistency of the semi-solid lubricant layer coated in the semi-solid lubricant coating process is higher than the consistency of the raw material of the solid lubricating layer coated in the solid lubricating layer raw material coating process.

[0252] By so configuring, the friction coefficient of the sealing portion can be reduced by the solid lubricating layer, and the friction coefficient of the sealing portion can be further reduced by the semi-solid lubricant layer. Thus, the sealing member can be further prevented from being worn.

[0253] Meanwhile, by increasing the consistency of the semi-solid lubricant near the sealing member, the heat generation of the sealing portion can be suppressed, and by reducing the consistency of the solid lubricating layer near the shaft member, the workability and assemblability in the vacuum actuator manufacturing can be improved.

Claims

1. A vacuum actuator, wherein, This vacuum actuator has: A partition wall that separates the vacuum side space from the atmospheric side space; A shaft member that penetrates the partition wall and transmits driving force; A sealing member, disposed on the partition wall and sliding relative to a sliding surface formed on the outer periphery of the shaft member, seals the space between the vacuum side and the atmospheric side. as well as A friction-reducing portion is formed on the sliding surface.

2. The vacuum actuator according to claim 1, wherein, The friction reduction section is a transfer attachment source supply section that supplies a transfer attachment source, which reduces friction by transferring the attachment to the sliding sealing member.

3. The vacuum actuator according to claim 2, wherein, The friction-reducing portion is formed on the sliding surface with a thickness of 25 μm or more.

4. The vacuum actuator according to claim 2, wherein, The surface roughness of the sliding surface forming the friction reduction part is Rz1.6μm or less.

5. The vacuum actuator according to claim 2, wherein, The Vickers hardness (HV) of the sliding surface forming the friction reduction portion is 544 or higher.

6. The vacuum actuator according to claim 2, wherein, The friction-reducing part has: A solid lubricating layer comprising a solid lubricant; and A semi-solid lubricant layer is formed between the surface of the solid lubricant layer and the sealing member.

7. The vacuum actuator according to claim 6, wherein, The solid lubricating layer contains solid lubricants with a particle size of less than 10 μm.

8. The vacuum actuator according to claim 7, wherein, The solid lubricant contains polytetrafluoroethylene.

9. The vacuum actuator according to claim 5, wherein, The shaft component comprises nitrided stainless steel, chromium-molybdenum steel, or carbon steel.

10. The vacuum actuator according to claim 2, wherein, The sealing member has: A metal ring that surrounds the outer periphery of the shaft member along the sliding surface; and The sealing lip makes linear contact with the sliding surface.

11. A method for manufacturing a vacuum actuator, wherein, The manufacturing method of this vacuum actuator has the following characteristics: In the friction reduction process, for a shaft member that penetrates a partition wall separating the vacuum side space and the atmospheric side space, a friction reduction part is formed on the sliding surface of the outer periphery of the shaft member. and The assembly process involves assembling the sealing member in a manner that it is disposed on the partition wall and in contact with the sliding surface.

12. The method for manufacturing a vacuum actuator according to claim 11, wherein, The friction reduction part forming process includes a preparation step to make the surface roughness of the sliding surface forming the friction reduction part less than Rz1.6μm.

13. The method for manufacturing a vacuum actuator according to claim 11, wherein, The friction reduction section forming process includes: The solid lubricant coating process involves coating the friction-reducing portion with the solid lubricant material. and The solid lubricant layer firing process involves firing the coated raw material. The friction reduction section having the solid lubricating layer is formed using the friction reduction section forming process.

14. The method for manufacturing a vacuum actuator according to claim 13, wherein, The firing temperature for the solid lubricant layer firing process is 200℃~250℃.

15. The method for manufacturing a vacuum actuator according to claim 13, wherein, The friction-reducing part forming process includes a semi-solid lubricant coating process that forms a semi-solid lubricant layer between the surface of the solid lubricant layer and the sealing member. The consistency of the semi-solid lubricant layer coated in the semi-solid lubricant coating process is higher than the consistency of the raw material of the solid lubricant layer coated in the solid lubricant layer raw material coating process.

16. A rotary infeeding machine, wherein, This rotary infusion machine has the following features: A partition wall that separates the vacuum side space from the atmospheric side space; A shaft member that penetrates the partition wall and transmits driving force; An input unit, disposed in the atmospheric side space, inputs driving force to the shaft member; A sealing member, disposed on the partition wall and sliding relative to a sliding surface formed on the outer periphery of the shaft member, seals the space between the vacuum side and the atmospheric side. as well as A friction-reducing portion is formed on the sliding surface. The friction-reducing section is a transfer attachment source supply section that supplies a transfer attachment source, which reduces friction by transferring the attachment to the sliding sealing member. The friction-reducing part has: A solid lubricating layer comprising a solid lubricant; and A semi-solid lubricant layer is formed between the surface of the solid lubricant layer and the sealing member. The input unit outputs the rotation of a drive source disposed in the atmospheric side space and generating rotational force to the shaft member, and the shaft member transmits rotational driving force to the vacuum side space.

17. A rotary infusion machine, wherein, This rotary infusion machine features: A partition wall that separates the vacuum side space from the atmospheric side space; A shaft member that penetrates the partition wall and transmits driving force; An input unit, disposed in the atmospheric side space, inputs driving force to the shaft member; A sealing member, disposed on the partition wall and sliding relative to a sliding surface formed on the outer periphery of the shaft member, seals the space between the vacuum side and the atmospheric side. as well as A friction-reducing portion is formed on the sliding surface. The friction-reducing section is a transfer attachment source supply section that supplies a transfer attachment source, which reduces friction by transferring the attachment to the sliding sealing member. The friction-reducing part has: A solid lubricating layer comprising a solid lubricant; and A semi-solid lubricant layer is formed between the surface of the solid lubricant layer and the sealing member. The input unit outputs rotational force from a drive source disposed in the atmospheric space to the shaft member, and the shaft member transmits rotational driving force to the vacuum space. The input section includes: case; An internal gear, disposed within the housing, has internal teeth; A oscillating gear having external teeth that mesh with the internal teeth of the internal gear, and oscillating and rotating; A crankshaft having an eccentric portion that supports the oscillating gear as a rotatable component and transmits rotational force of a drive source to the oscillating gear; as well as The gear carrier is an output part that transmits the rotational force of the oscillating gear and outputs it to the shaft member.

18. A robot, wherein, The robot has the following features: A partition wall that separates the vacuum side space from the atmospheric side space; A shaft member that penetrates the partition wall and transmits driving force; An input unit, disposed in the atmospheric side space, inputs driving force to the shaft member; A sealing member, disposed on the partition wall and sliding relative to a sliding surface formed on the outer periphery of the shaft member, seals the space between the vacuum side and the atmospheric side. as well as A friction-reducing portion is formed on the sliding surface. The friction-reducing section is a transfer attachment source supply section that supplies a transfer attachment source, which reduces friction by transferring the attachment to the sliding sealing member. The friction-reducing part has: A solid lubricating layer comprising a solid lubricant; and A semi-solid lubricant layer is formed between the surface of the solid lubricant layer and the sealing member. The input unit outputs the rotation of a drive source disposed in the atmospheric side space and generating rotational force to the shaft member, and the shaft member transmits rotational driving force to the vacuum side space.

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