Vacuum hole plugging machine based on semiconductor packaging

Abstract

The invention relates to the technical field of semiconductors, and discloses a vacuum hole plugging machine based on semiconductor packaging, which comprises a machine base, a vacuum machine cover is arranged on the outer side of the machine base, and a limiting cavity for an upper feeding tool group and a lower feeding tool group to move is upwards formed in the inner side of the machine base. The upper end of the machine base is provided with a rail assembly acting on the upper feeding tool set and the lower feeding tool set, and a lifting net plate base is movably arranged in the vacuum machine cover. The two sets of rotating air cylinders are synchronously started, on one hand, the two sets of rotating air cylinders respectively drive the rotating rollers to rotate by 90 degrees, so that the two sets of extrusion protruding parts on the rotating rollers move downwards at the same time and make contact with the surface of the screen plate to jointly extrude and limit the screen plate, and the problem that the screen plate is not firmly fixed is solved; on the other hand, when the rotating roller rotates, the locking cam on the short shaft rotates along with the rotating roller, the protruding part of the locking cam makes contact with the brake pad on one side, the brake pad is pressed to the corresponding belt wheel, and the purpose of locking the whole belt structure is achieved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a vacuum plugging machine based on semiconductor packaging. Background Technology

[0002] Semiconductor chip packaging requires PCB boards, also known as printed circuit boards, which are important electronic components. They serve as the support for electronic components and the carrier for electrical connections. Resin plugging is a key process for achieving high density and high reliability in PCBs. Its core is to transform through-holes into flat, insulating pillars by filling them with resin. This serves two purposes: first, it frees up valuable surface space for wiring (especially in BGA pads); second, it plugs the holes to prevent solder leakage and contamination, ensuring soldering quality and long-term stability. It transforms through-holes from "channels" into "foundations," supporting precision interconnects. Therefore, vacuum resin plugging machines are used. Driven by the demand for high-density PCBs in 5G communications, new energy vehicles, and AI servers, the vacuum plugging machine market continues to grow, with a compound annual growth rate of 15%-20% for the global market size from 2020 to 2024. Vacuum plugging machines use vacuum negative pressure technology to achieve bubble-free, tight filling of micro- and nano-sized pores, meeting the conductivity and mechanical stability requirements of high-density interconnects in semiconductor packaging.

[0003] Existing vacuum resin via plugging machines have several technical drawbacks. First, different PCB structures require different stencil patterns, necessitating regular stencil replacement. Currently, stencil replacement is done manually, which is time-consuming and labor-intensive, and the stencil is prone to loosening, interfering with the via plugging process. Second, during resin feeding, the resin material easily carries a large number of air bubbles, which cannot be effectively removed using vacuuming. After the material cures, permanent voids are formed, directly weakening the mechanical support and electrical connection reliability of the vias. Third, due to the high viscosity and poor fluidity of the resin, as well as excessively fast separation speed or improper angle between the stencil and the PCB, resulting in a "stringing" phenomenon, resin residue easily remains on the bottom of the stencil, affecting the subsequent via plugging quality. The existing cleaning method is to scrape off the residual resin with a scraper, but during the scraping process, resin is easily squeezed into adjacent clean mesh holes, causing further contamination and resulting in poor cleaning effectiveness.

[0004] In summary, considering that existing facilities cannot meet the needs of operation, we propose a vacuum plugging machine based on semiconductor packaging. Summary of the Invention

[0005] The main objective of this invention is to provide a vacuum plugging machine based on semiconductor packaging, which can effectively solve the problems in the background art.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows: A vacuum plugging machine based on semiconductor packaging includes a base, a vacuum chamber on the outer side of the base, and a limiting chamber on the inner side of the base for the movement of an upper feeding fixture assembly and a lower feeding fixture assembly. Track assemblies acting on the upper and lower feeding fixture assemblies are installed at the upper end of the base. A lifting screen plate seat is movably disposed inside the vacuum chamber, and lifting rods are connected to the four corners of the lower end of the lifting screen plate seat. The lifting rods extend into the base, and there are four sets of lifting rods.

[0007] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the bottom of the lifting stencil seat is provided with a screen printing port, and guide grooves acting on the stencil are symmetrically provided on both sides of the screen printing port. Each set of guide grooves is provided with a mounting groove on the left side, and each set of mounting grooves includes two sets of clamping belts distributed vertically. The two sets of clamping belts work together vertically on the edge of the stencil.

[0008] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, each set of clamping belts is provided with two sets of pulleys inside, the pulleys are sleeved on the ends of the belt shafts, and there are a total of 4 sets of belt shafts. Both ends of the belt shafts are connected by a first bearing seat and the inner wall of the mounting groove. One set of belt shafts extends outward and is connected to a No. 1 servo motor by a coupling. The ends of the two sets of belt shafts are sleeved with meshing reversing gears.

[0009] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the following features: symmetrically arranged rotating rollers are positioned above and below the stencil; the roller surfaces of the rotating rollers are provided with extrusion protrusions that interact with the stencil; short shafts are welded to both ends of the rotating rollers; the ends of the short shafts are connected to the inner wall of the mounting groove via a second bearing seat; one set of short shafts on each group of rotating rollers extends outward and is connected to a rotating cylinder; there are two sets of rotating cylinders; a locking cam is sleeved on the other set of short shafts; a brake pad is movably arranged inside the clamping belt and located on one side of the locking cam; the brake pad acts on the pulley; the upper end of the brake pad is connected to a fixed bracket via a bent spring steel section; and the fixed bracket is installed in the mounting groove.

[0010] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, a dust cover is movably disposed above the lifting mesh plate base. The dust cover is connected to the left end of the lifting mesh plate base via a hinged bracket. A strip-shaped moving groove is formed through the left side of the interior of the dust cover. A lead screw is horizontally disposed within the strip-shaped moving groove. Both ends of the lead screw are connected to the groove wall of the strip-shaped moving groove via a third bearing seat. A large gear is sleeved on one end of the lead screw, and a small gear is meshed on the upper end of the large gear. The small gear is sleeved on the output shaft of the lead screw motor. Both the small gear and the lead screw motor are located inside the motor housing.

[0011] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, wherein: a plugging resin injector is movably mounted on the lead screw and moves within a strip-shaped moving groove; a lead screw nut sleeve acting on the lead screw is installed inside the plugging resin injector near its edge; a resin box is provided at the upper end of the plugging resin injector; a metering pump acting on the resin box is provided inside the plugging resin injector; a filling control pipe is provided extending from the output end of the metering pump to the bottom of the plugging resin injector; and a filling port is opened at the lower end of the filling control pipe.

[0012] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, wherein: a horizontal rack is provided on one side of the bottom of the strip-shaped moving groove, one side of the horizontal rack is meshed with a traveling gear, the traveling gear is sleeved on the end of the gear shaft, the gear shaft extends into the interior of the injection control tube, a sealed bearing is sleeved at the connection position between the gear shaft and the injection control tube, a needle sleeve is welded to the end of the gear shaft away from the traveling gear, and several groups of bubble needles of different lengths are distributed on the needle sleeve, the number of bubble needles is preferably 8-16 groups, and the length of the bubble needles is preferably 2-10cm.

[0013] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the top of the lifting screen plate seat and connected to the screen printing port are provided with a scraping cavity. A motion chain is symmetrically and movably arranged on both sides of the scraping cavity. Guide rails are horizontally installed on both sides of the scraping cavity and inside the motion chain. A double-headed scraping seat is movably arranged in the middle of the scraping cavity. Slider blocks acting on the guide rails are symmetrically connected to both ends of the double-headed scraping seat. The upper end of the slider is connected to a buckle that engages with the motion chain.

[0014] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the double-headed scraper seat has a first lifting groove and a second lifting groove sequentially opened on its left and right end faces. A pusher plate and a scraper plate are movably arranged in the first and second lifting grooves, respectively. A pushing part is provided at the bottom of the pusher plate, and a scraping part is provided at the bottom of the scraper plate. Both the pushing part and the scraping part contact the mesh plate by moving downward. A driving block extending into the interior of the double-headed scraper seat is provided in the middle of both the pusher plate and the scraper plate. Teeth are evenly distributed on the inner side of the driving block. A bidirectional gear is rotatably arranged between the two sets of driving blocks. The bidirectional gear is sleeved on the positioning shaft. The positioning shaft is connected to the inner wall of the double-headed scraper seat by a damping bearing seat.

[0015] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, wherein: the end of one set of drive blocks is connected to an annular sliding sleeve by a connecting rib, a drive rod is slidably arranged inside the annular sliding sleeve, the drive rod is welded to a crank, the crank is connected to the output shaft of a second servo motor, and the second servo motor is horizontally fixed inside the double-head scraper seat.

[0016] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the push plate and the scraper are both provided with mud-removing blades at their lower outer sides. Both ends of the top of the mud-removing blades are welded with a cutter shaft. The cutter shaft is connected to the inner walls of the first lifting groove and the second lifting groove by means of an inner bearing. The cutter shaft is fixed to the groove walls of the first lifting groove and the second lifting groove by means of a torsion spring.

[0017] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the following features: two sets of motion track grooves are symmetrically provided at the bottom edge of the lifting screen plate base; a cleaning moving fixture is movably arranged below the lifting screen plate base; L-shaped connecting arms extending into the motion track grooves are riveted to both ends of the cleaning moving fixture; track wheels that move in the motion track grooves are provided at the outer ends of the L-shaped connecting arms; a storage groove is provided upward in the middle of the cleaning moving fixture; a sludge collection seat is movably arranged in the storage groove; a square sealing cover that contacts the screen plate is provided at the upper end of the sludge collection seat; and a suction chamber is provided upward inside the sludge collection seat.

[0018] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the bottom of the cleaning moving fixture is fixed with a suction fan, the suction port of the suction fan is connected to a corrugated telescopic tube, the upper end of the corrugated telescopic tube extends into the suction chamber and is connected to a diversion tube, both sides of the diversion tube are provided with connecting holes, the number of connecting holes is preferably 3-8 sets, and two sets of inclined dirt collection plates are symmetrically installed on the top of the diversion tube.

[0019] As a preferred embodiment of the vacuum plugging machine based on semiconductor packaging described in this invention, the cleaning moving fixture is symmetrically equipped with two sets of hydraulic cylinders inside, and each of the two sets of hydraulic cylinders has a hydraulic rod movably arranged extending into the receiving groove inside, with the upper end of the hydraulic rod fixed to the bottom of the dirt collection seat.

[0020] This invention provides an improved vacuum via plugging machine based on semiconductor packaging, which has the following significant improvements and advantages compared with the prior art: Start the first servo motor, which drives one set of belt shafts to rotate. The four sets of pulleys move together, causing the two lower clamping belts to rotate. At the same time, through the meshing and reversing action of two sets of gears, the other set of belt shafts rotates. The four sets of pulleys move together, causing the two upper clamping belts to rotate in the opposite direction. The four clamping belts push the screen plate to continue moving linearly towards the inside or outside of the screen printing port through friction, achieving the purpose of automatic installation or removal, saving time and effort.

[0021] Two sets of rotary cylinders are activated simultaneously. On one hand, each cylinder drives the rotary roller to rotate 90°, causing the two sets of extrusion protrusions on the rotary roller to move downwards at the same time and contact the surface of the mesh plate, thus extruding and limiting the mesh plate and solving the problem of the mesh plate not being firmly fixed. On the other hand, while the rotary rollers are rotating, the locking cam on the short shaft also rotates. The protrusion of the locking cam contacts the brake pad on one side, pressing the brake pad onto the corresponding pulley, thereby locking the entire belt structure, improving the fixing effect of the mesh plate, and achieving a high degree of automation.

[0022] Powered by the movement of the plugging resin injector, the traveling gear moves and rotates along the horizontal rack, causing the gear shaft and needle sleeve to rotate at high speed. This causes several sets of bubble needles to move within the injection control tube, randomly contacting the downward-moving resin material, puncturing the large number of air bubbles contained in the material, and automatically removing the air bubbles. This saves time and effort and significantly improves the quality of material feeding.

[0023] During the upward movement of the pusher or scraper, the pushing or scraping section approaches the mud-removing blades, which scrape away the residue on the outer side of the pushing or scraping section. When the pushing or scraping section is fully inside the lifting groove, the torsion of the torsion spring causes the mud-removing blades to rotate around the two sets of inner bearings at a certain angle, moving against the bottom of the pushing or scraping section to scrape away the residue at the bottom. Timely cleaning prevents residual contamination on the pusher or scraper.

[0024] Simultaneously, oil is introduced into two sets of hydraulic cylinders, causing the hydraulic rods to extend and drive the sludge collection seat upwards. The square sealing cover then covers and seals a certain area of ​​the screen. The suction fan is activated, creating a momentary negative pressure state in the suction chamber. This allows external airflow to flow into the suction chamber through several sets of mesh holes, absorbing the residual resin at the bottom of the screen and leaving it on the inclined sludge collection plate, achieving automatic cleaning. This cycle repeats, allowing the square sealing cover to cover a certain area of ​​the screen sequentially for suction until the entire screen is cleaned. Compared to scraper cleaning, this method is simpler and more efficient. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of a vacuum plugging machine based on semiconductor packaging according to the present invention; Figure 2 This is a top view structural schematic diagram of the lifting mesh plate base of the present invention; Figure 3 This is a structural schematic diagram of the lifting mesh plate base of the present invention from a bottom view. Figure 4 This is a schematic diagram of the specific structure of the screen printing port of the present invention; Figure 5 This is a schematic diagram of the overall structure of the belt clamping structure of the present invention; Figure 6 This is a schematic diagram of the specific structure of the left end of the belt clamping structure of the present invention; Figure 7 This is a schematic diagram of the specific structure of the right end of the belt clamping structure of the present invention; Figure 8 This is a schematic diagram of the specific structure of the rotating roller of the present invention; Figure 9 This is a schematic diagram showing the specific connection of the brake pads of the present invention; Figure 10 This is a schematic diagram of the external structure of the dust cover of the present invention; Figure 11 This is a schematic diagram of the internal structure of the strip-shaped moving groove of the present invention; Figure 12 This is a schematic diagram of the external structure of the plugging resin injector of the present invention; Figure 13 This is a schematic diagram of the transmission structure of the bubble needle of the present invention; Figure 14 This is a schematic diagram of the external structure of the double-headed scraper seat of the present invention; Figure 15 This is a schematic diagram of the internal structure of the double-headed scraper seat of the present invention; Figure 16 This is a schematic diagram of the transmission structure of the drive block of the present invention; Figure 17 This is a schematic diagram of the connection structure of the mud-removing blade of the present invention; Figure 18 This is a schematic diagram showing the installation position of the cleaning mobile tool in Embodiment 2 of the present invention; Figure 19 This is a schematic diagram of the external structure of the cleaning mobile tooling of the present invention; Figure 20 This is a cross-sectional view of the sludge collection seat of the present invention.

[0026] In the diagram: 1. Machine base; 2. Track assembly; 3. Limiting chamber; 4. Upper feeding fixture assembly; 5. Lower feeding fixture assembly; 10. Lifting screen plate seat; 11. Lifting rod; 12. Screen printing port; 13. Guide groove; 14. Screen plate; 15. Mounting groove; 20. Clamping belt; 21. Pulley; 22. Belt shaft; 23. First bearing seat; 24. Servo motor No. 1; 25. Reversing gear; 30. Rotating roller; 31. Extrusion protrusion; 32. Short shaft; 33. Second bearing seat; 34. Rotary cylinder; 35. Locking cam; 36. Brake pad; 37. Spring steel bent part; 38. Fixed bracket; 41. Dust cover; 42. Hinge bracket; 43. Strip moving groove; 44. Lead screw; 45. Third bearing seat; 46. Large gear; 47. Small gear; 48. Lead screw motor; 59. Motor housing; 50. Plug resin injector; 51. Lead screw nut sleeve; 52. Resin box; 53. Metering pump; 54. Injection control tube; 55. Injection port; 56. Horizontal rack; 60. Gear shaft; 61. Sealed bearing; 62. Traveling gear; 63. Needle sleeve; 64. Bubble needle; 71. Scraping chamber; 72. Motion chain; 73. Guide rail; 74. Double-headed scraper seat; 75. Slider; 86. Buckle; 87. First lifting groove; 88. Second lifting groove; 89. Push plate; 80. Scraper; 81. Pushing part; 82. Scraper; 83. Drive block; 94. Tooth; 95. Bidirectional gear; 96. Damping bearing seat; 97. Connecting rib; 98. Annular sleeve; 99. Drive rod; 90. Crank; 91. Servo motor No. 2; 100. Mud removal blade; 101. Cutter shaft; 102. Inner bearing; 103. Torsion spring; 110. Motion track groove; 111. Cleaning mobile fixture; 112. L-shaped connecting arm; 113. Track wheel; 114. Storage trough; 115. Sludge collection seat; 116. Square sealing cover; 117. Suction chamber; 120. Suction fan; 121. Corrugated telescopic pipe; 123. Diversion pipe; 124. Connecting hole; 125. Inclined sludge collection plate; 130. Hydraulic cylinder; 131. Hydraulic rod. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Example 1

[0028] like Figures 1-17 As shown, this embodiment provides a vacuum plugging machine based on semiconductor packaging, including a base 1. A vacuum shroud is provided on the outside of the base 1, designed according to the appearance of a conventional vacuum plugging machine. A limiting chamber 3 is provided on the inner side of the base 1 to allow the upper feeding tooling group 4 and the lower feeding tooling group 5 to move. A track assembly 2 is installed at the upper end of the base 1, which acts on the upper feeding tooling group 4 and the lower feeding tooling group 5 respectively. The upper feeding tooling group 4 and the lower feeding tooling group 5 are used to place PCB boards and feed them. The two work alternately. A lifting mesh plate seat 10 is movably arranged inside the vacuum shroud. Lifting rods 11 are connected to the four corners of the lower end of the lifting mesh plate seat 10. The four sets of lifting rods 11 extend into the interior of the base 1. The lifting rods 11 drive the lifting mesh plate seat 10 to move downward and connect with the upper feeding tooling group 4 or the lower feeding tooling group 5. A hydraulic or pneumatic device for driving the lifting rods 11 is provided inside the base 1.

[0029] The bottom of the lifting screen plate base 10 is provided with a screen printing opening 12. Symmetrical guide grooves 13 acting on the screen plate 14 are provided on both sides of the screen printing opening 12. Each set of guide grooves 13 has a mounting groove 15 on its left side. Each mounting groove 15 includes two sets of vertically distributed clamping belts 20. The two sets of clamping belts 20 work together to support the edge of the screen plate 14. Figures 3-5 As shown.

[0030] Specifically, each set of clamping belts 20 has two sets of pulleys 21 inside. The pulleys 21 are sleeved on the ends of belt shafts 22. There are four sets of belt shafts 22 in total. Both ends of the belt shafts 22 are connected by the first bearing seat 23 and the inner wall of the mounting groove 15. One set of belt shafts 22 extends outward and is connected to a No. 1 servo motor 24 by a coupling. The ends of two sets of belt shafts 22 extend outward and are sleeved with meshing reversing gears 25. The two gears are the same size. Figures 5-7 As shown.

[0031] The screen plate 14 is symmetrically equipped with rotating rollers 30 on its upper and lower sides. Each rotating roller 30 has pressing protrusions 31 on its surface that interact with the screen plate 14. These pressing protrusions 31 lightly press against the screen plate 14 without causing damage. Figure 8 As shown.

[0032] Furthermore, short shafts 32 are welded to both ends of the rotating roller 30. The ends of the short shafts 32 are connected to the inner wall of the mounting groove 15 via the second bearing seat 33. One set of short shafts 32 on each set of rotating rollers 30 extends outward and is connected to a rotating cylinder 34. The two sets of rotating cylinders 34 operate in opposite directions, therefore the initial positions of the extrusion protrusion 31 and the locking cam 35 are different. This is designed according to the actual situation, such as... Figures 5-8 As shown.

[0033] In this embodiment, a locking cam 35 is sleeved on another set of short shafts 32. A brake pad 36 is movably disposed inside the clamping belt 20 and on one side of the locking cam 35. The brake pad 36 acts on the pulley 21. The upper end of the brake pad 36 is connected to a fixed bracket 38 via a spring steel bent portion 37. The spring steel bent portion 37 bends under pressure and then automatically deforms and returns to its original position. The fixed bracket 38 is installed in the mounting groove 15. Figure 6 , Figure 8 and Figure 9 As shown.

[0034] When it is necessary to install or remove the screen plate 14, first insert the screen plate 14 into the guide groove 13 of the screen printing port 12 and move it in a straight line along the guide groove 13 until the two sets of clamping belts 20 act together on the edge of the screen plate 14. At this time, start the first servo motor 24 to drive one set of belt shafts 22 to rotate. The four sets of pulleys 21 move together, causing the two sets of clamping belts 20 at the bottom to rotate. At the same time, through the meshing and direction-changing action of the two sets of reversing gears 25, the other set of belt shafts 22 rotates. The four sets of pulleys 21 move together, causing the two sets of clamping belts 20 at the top to rotate in the opposite direction. The four sets of clamping belts 20 push the screen plate 14 to continue moving in a straight line into the screen printing port 12 through frictional force until the screen plate 14 completely covers the screen printing port 12 (that is, the right end of the screen plate 14 touches the groove wall of the guide groove 13).

[0035] Then, the two sets of rotary cylinders 34 are started simultaneously, each driving the rotary roller 30 to rotate 90°, so that the two sets of extrusion protrusions 31 on the rotary roller 30 move downward at the same time and contact the surface of the mesh plate 14, and together extrude and limit the mesh plate. While the rotary roller 30 is rotating, the locking cam 35 on the short shaft 32 also rotates. The protrusion of the locking cam 35 contacts the brake pad 36 on one side, pressing the brake pad 36 onto the corresponding pulley 21, thereby achieving the purpose of locking the entire belt structure. The operation of disassembling the mesh plate 14 is the same as above and will not be described again.

[0036] Furthermore, a dust cover 40 is movably installed above the lifting mesh plate base 10. The dust cover 40 serves to prevent dust and provide protection. The dust cover 40 is connected to the left end of the lifting mesh plate base 10 via a hinged bracket 41. A strip-shaped moving groove 42 is formed through the left side of the interior of the dust cover 40. A lead screw 43 is horizontally installed within the strip-shaped moving groove 42. Figure 1 , Figure 2 and Figure 10 As shown.

[0037] Specifically, both ends of the lead screw 43 are connected by the third bearing seat 44 and the groove wall of the strip-shaped moving groove 42. One end of the lead screw 43 extends outward and is fitted with a large gear 45. A small gear 46 is meshed on the upper end of the large gear 45. The small gear 46 is fitted onto the output shaft of the lead screw motor 47. Both the small gear 46 and the lead screw motor 47 are located inside the motor housing 48. Figure 11 As shown.

[0038] The lead screw 43 is movably mounted with a plugging resin injector 50 that moves within a strip-shaped moving groove 42. A lead screw nut sleeve 51 (containing a helical nut) is installed inside the plugging resin injector 50 near its edge, acting on the lead screw 43. A resin box 52 is located at the upper end of the plugging resin injector 50. Figure 11 and Figure 12 As shown.

[0039] The plugging resin injector 50 is internally equipped with a metering pump 53 that acts on the resin cartridge 52 (the metering pump 53 meteres and injects the resin evenly). An injection control pipe 54 extends from the output end of the metering pump 53 towards the bottom of the plugging resin injector 50. The injection control pipe 54 is preferably square, and its lower end has an injection port 55. Figure 11 and Figure 12 As shown.

[0040] Furthermore, a horizontal rack 56 is provided on one side of the bottom of the strip-shaped moving groove 42. One side of the horizontal rack 56 is meshed with a traveling gear 62, which is sleeved on the end of the gear shaft 60. Figure 10 and Figure 13 As shown.

[0041] In this embodiment, the gear shaft 60 extends into the injection control tube 54. A sealed bearing 61 is sleeved at the connection between the gear shaft 60 and the injection control tube 54. A needle sleeve 63 is welded to the end of the gear shaft 60 away from the traveling gear 62. The needle sleeve 63 serves as a carrier, and several groups of bubble needles 64 of different lengths are distributed on the needle sleeve 63. The shape and thickness of the bubble needles 64 are designed according to actual conditions. The several groups of bubble needles 64 of different lengths are used to improve the processing range, such as... Figure 13 As shown.

[0042] When resin material needs to be injected onto the screen plate 14, the lead screw motor 47 is started first, driving the small gear 46 to rotate. Through meshing and deceleration, the large gear 45 rotates accordingly, and the lead screw 43 rotates at a low speed, causing the plugging resin injector 50 to move at a constant speed from one end to the other along the strip moving groove 42 (the lead screw nut sleeve 51 on the plugging resin injector 50 and the thread on the lead screw 43 interact). During the movement of the plugging resin injector 50, the metering pump 53 is started to press the resin material in the resin box 52 into the injection control tube 54, and spray it from the injection port 55 onto the upper left position of the screen plate 14. The resin material is evenly covered on the screen plate 14 while moving and discharging.

[0043] As the plugging resin injector 50 moves, the traveling gear 62 travels and rotates along the horizontal rack 56, causing the gear shaft 60 and the needle sleeve 63 to rotate at high speed. This causes several sets of bubble needles 64 to move within the injection control tube 54, randomly contacting the downward-moving resin material, puncturing the large number of air bubbles contained in the material, and improving the quality of material feeding.

[0044] Furthermore, a scraping chamber 70 is provided on the top of the lifting screen plate seat 10 and connected to the screen printing port 12. A motion chain 71 is symmetrically and movably arranged on both sides of the scraping chamber 70. The motion chain 71 is part of the chain assembly. Guide rails 72 are horizontally installed on both sides of the scraping chamber 70 and inside the motion chain 71. The guide rails 72 serve as limiting and guiding mechanisms, improving the movement stability of the double-headed scraping seat 73. A double-headed scraping seat 73 is movably arranged in the middle of the scraping chamber 70. Slider blocks 74 that act on the guide rails 72 are symmetrically connected to both ends of the double-headed scraping seat 73. The sliders 74 move linearly along the guide rails 72. The upper end of the sliders 74 is connected to a buckle 75 that engages with the motion chain 71. Figure 1 , Figure 2 and Figure 14 As shown.

[0045] The double-headed scraper seat 73 has a first lifting groove 80 and a second lifting groove 81 sequentially opened on its left and right end faces. A push plate 82 and a scraper 83 are movably arranged in the first lifting groove 80 and the second lifting groove 81, respectively. A pushing part 84 is provided at the bottom of the push plate 82, and a scraping part 85 is provided at the bottom of the scraper 83. Both the pushing part 84 and the scraping part 85 contact the mesh plate 14 by moving downwards. Figure 14 and Figure 16 As shown.

[0046] Furthermore, both the push plate 82 and the scraper 83 are provided with drive blocks 86 extending into the interior of the double-headed scraper seat 73. The drive blocks 86 move along the vertical inner groove. Teeth 87 are evenly distributed on the inner surface of the drive blocks 86. A bidirectional gear 90 is rotatably arranged between the two sets of drive blocks 86. The bidirectional gear 90 causes the push plate 82 and the scraper 83 to move up and down alternately. The bidirectional gear 90 is sleeved on the positioning shaft. The positioning shaft is connected to the inner wall of the double-headed scraper seat 73 by a damping bearing seat 91. The damping bearing seat 91 provides a certain damping force, such as... Figure 15 and Figure 16 As shown.

[0047] In this embodiment, one set of drive blocks 86 has an annular sliding sleeve 93 connected to its end by a connecting rib 92. A drive rod 94 is slidably disposed inside the annular sliding sleeve 93, and the drive rod 94 reciprocates within the annular sliding sleeve 93. The drive rod 94 is welded to a crank 95, and the crank 95 is connected to the output shaft of a second servo motor 96. The second servo motor 96 is horizontally fixed inside the double-headed scraper seat 73. Figure 15 and Figure 16 As shown.

[0048] Furthermore, both the push plate 82 and the scraper 83 are provided with mud-removing blades 100 on their lower outer sides (when the annular sleeve 93 is on the outer side of the push plate 82 and the scraper 83, the torsion spring 103 has torque), such as Figure 14 and Figure 17 As shown.

[0049] Specifically, both ends of the top of the mud-removing blade 100 are welded with a blade shaft 101. The blade shaft 101 is connected to the inner walls of the first lifting groove 80 and the second lifting groove 81 via an inner bearing 102. The blade shaft 101 is fixed to the groove walls of the first lifting groove 80 and the second lifting groove 81 by a torsion spring 103. Figure 17 As shown.

[0050] Furthermore, several technical solutions in this embodiment can be selectively installed or used on a vacuum plugging machine.

[0051] When pushing and scraping are required, first, precisely align the PCB board and stencil 14 in the upper feeding fixture group 4 or the lower feeding fixture group 5 vertically, and perform a vacuuming operation. Then, let the motion chain 71 drive the double-headed scraper seat 73 to move to the left and approach the resin material. Then, start the second servo motor 96, which drives the crank 95 to rotate half a revolution. The drive rod 94 on the crank 95 moves along the annular sliding sleeve 93. During the movement, the two generate a contact force, causing one set of drive blocks 86 to move downward, making the pusher plate 82 descend along the first lifting groove 80. The pusher part 84 contacts the stencil 14 and moves along the upper surface of the stencil 14, pushing the resin material dispersed on the stencil 14 together. Then, let the crank 95 rotate half a revolution. When the crank 95 rotates another half turn, the drive rod 94 on the crank 95 moves along the annular sliding sleeve 93. During the movement, the two generate a contact force, causing one set of drive blocks 86 to move upward (the push plate 82 rises along the first lifting groove 80). Through the meshing transmission of the bidirectional gear 90 and the teeth 87, the other set of drive blocks 86 moves downward, and the scraper 83 descends along the second lifting groove 81. The scraper part 85 contacts the stencil plate 14 (the scraper 83 moves to the left side of the resin material during the lifting process). Then the scraper part 85 scrapes the resin material that has been pushed together onto the stencil plate 14. The resin material on the stencil plate 14 is squeezed from the mesh on the stencil plate 14 into the through holes and blind holes on the PCB board by the pressure of the scraper 83.

[0052] During the upward movement of the pusher plate 82 or scraper plate 83, the pusher part 84 or scraper part 85 approaches the mud-removing blade 100 and uses the mud-removing blade 100 to scrape away the residue on the outer side of the pusher part 84 and scraper part 85. When the pusher part 84 or scraper part 85 is completely inside the lifting groove, due to the torsion of the torsion spring 103, the mud-removing blade 100 rotates around the two sets of inner bearings 102 at a certain angle and moves to fit against the bottom of the pusher part 84 or scraper part 85 to scrape away the residue at the bottom. Example 2

[0053] Based on Example 1, due to the high viscosity and poor flowability of the resin, as well as excessively fast separation speed or improper angle between the stencil and PCB, resulting in a "stringing" phenomenon, resin residue easily remains at the bottom of the stencil 14, affecting the subsequent hole-filling quality. Existing cleaning methods involve scraping off the residual resin with a scraper, but during the scraping process, resin is easily squeezed into adjacent clean mesh holes, causing further contamination and resulting in poor cleaning effectiveness. To solve these problems, we have the following design, such as... Figures 18-20 As shown.

[0054] Specifically, two sets of motion track grooves 110 are symmetrically provided at the bottom edge of the lifting screen base 10. A cleaning moving fixture 111 is movably installed below the lifting screen base 10. L-shaped connecting arms 112, extending into the motion track grooves 110, are riveted to both ends of the cleaning moving fixture 111. The shape of the motion track grooves 110 is adapted to the L-shaped connecting arms 112. Track wheels 113, which move within the motion track grooves 110, are provided at the outer ends of the L-shaped connecting arms 112. The track wheels 113 have their own motors. Figure 18 and Figure 19 As shown.

[0055] The cleaning mobile fixture 111 has an upward-facing storage groove 114 in the middle, within which a movable sludge collection seat 115 is installed. The sludge collection seat 115 extends upward out of the storage groove 114, and its upper end is fitted with a square sealing cover 116 that contacts the mesh plate 14 (the contact area between the square sealing cover 116 and the mesh plate 14 is designed according to actual conditions and may not be completely sealed). The interior of the sludge collection seat 115 has an upward-facing suction chamber 117. Figure 19 and Figure 20 As shown.

[0056] Furthermore, a suction fan 120 is fixed to the bottom of the cleaning mobile fixture 111. A high-powered fan is selected. The suction port of the suction fan 120 is connected to a corrugated telescopic pipe 121. The corrugated telescopic pipe 121 can extend and retract with the movement of the sludge collection seat 115. The upper end of the corrugated telescopic pipe 121 extends into the suction chamber 117 and is connected to a diversion pipe 123. Both sides of the diversion pipe 123 are provided with connecting holes 124. Two sets of inclined sludge collection plates 125 are symmetrically installed on the top of the diversion pipe 123. The inclined sludge collection plates 125 collect residual resin in a concentrated manner to avoid clogging the pipe. Figure 19 and Figure 20 As shown.

[0057] The cleaning mobile fixture 111 has two sets of hydraulic cylinders 130 symmetrically installed inside. Each of the two sets of hydraulic cylinders 130 has a hydraulic rod 131 movably installed extending into the collection slot 114. The upper end of the hydraulic rod 131 is fixed to the bottom of the sludge collection seat 115. Figure 20 As shown.

[0058] In this embodiment, when in use, the two sets of track wheels 113 are driven to rotate, causing the L-shaped connecting arm 112 to move along the motion track groove 110. The cleaning moving fixture 111 moves to the bottom of the screen plate 14. The oil pump combination works, allowing the two sets of hydraulic cylinders 130 to simultaneously receive oil. The hydraulic rod 131 extends, driving the sludge collection seat 115 to move upward. The square sealing cover 116 covers a certain range of the screen plate 14 and seals it. Then, the suction fan 120 is started. Through the suction force of the corrugated telescopic pipe 121 and the diversion pipe 123, a momentary negative pressure is formed in the suction chamber 117, so that the external airflow flows into the suction chamber 117 through several sets of mesh holes, absorbing the residual resin at the bottom of the screen plate 14 into the suction chamber 117 and leaving it on the inclined sludge collection plate 125, achieving the purpose of automatic cleaning. This cycle is repeated so that the square sealing cover 116 covers a certain range of the screen plate 14 for suction until the entire screen plate 14 is cleaned.

[0059] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0060] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum plugging machine based on semiconductor packaging, comprising a base (1), characterized in that: A vacuum hood is provided on the outside of the base (1). A lifting screen plate seat (10) is movably provided inside the vacuum hood. Lifting rods (11) are connected to the four corners of the lower end of the lifting screen plate seat (10). A screen printing port (12) is opened at the bottom of the lifting screen plate seat (10). Guide grooves (13) acting on the screen plate (14) are symmetrically opened on both sides of the screen printing port (12). An installation groove (15) is provided on the left side of each set of guide grooves (13). Each set of installation grooves (15) includes two sets of clamping belts (20) distributed vertically. The two sets of clamping belts (20) act together on the edge of the screen plate (14). Two sets of pulleys (21) are provided inside each set of clamping belts (20). Rotary rollers (30) are symmetrically arranged above and below the mesh plate (14). The roller surface of the rotating roller (30) is provided with extrusion protrusions (31) that interact with the mesh plate (14). Both ends of the rotating roller (30) are welded with short shafts (32). The ends of the short shafts (32) are connected to the inner wall of the mounting groove (15) via a second bearing seat (33). One set of short shafts (32) on each set of rotating rollers (30) extends outward and is connected to a rotary cylinder (34). A locking cam (35) is sleeved on the other set of short shafts (32). A brake pad (36) is movably arranged inside the clamping belt (20) and on one side of the locking cam (35). The brake pad (36) acts on the pulley (21). The upper end of the brake pad (36) is connected to a fixed bracket (38) via a spring steel bend (37). The fixed bracket (38) is installed in the mounting groove (15). The top of the lifting screen plate seat (10) and the screen printing port (12) are provided with a scraping cavity (70). A double-headed scraping seat (73) is movably arranged in the middle of the scraping cavity (70). The left and right ends of the double-headed scraping seat (73) are provided with a first lifting groove (80) and a second lifting groove (81) in sequence. A push plate (82) and a scraper (83) are movably arranged in the first lifting groove (80) and the second lifting groove (81) respectively. A push part (84) is provided at the bottom of the push plate (82), and a scraping part (85) is provided at the bottom of the scraper (83). The push part (84) and the scraping part (85) both contact the screen plate (14) by moving downward.

2. The vacuum plugging machine based on semiconductor packaging according to claim 1, characterized in that: The inner side of the machine base (1) is provided with a limiting chamber (3) for the upper feeding tool group (4) and the lower feeding tool group (5) to move. The upper end of the machine base (1) is equipped with a track assembly (2) that acts on the upper feeding tool group (4) and the lower feeding tool group (5) respectively. The four sets of lifting rods (11) extend into the interior of the machine base (1). The pulley (21) is sleeved on the end of the belt shaft (22). There are four sets of belt shafts (22). One set of belt shafts (22) extends outward and is connected to a No. 1 servo motor (24) via a coupling. The ends of the two sets of belt shafts (22) are sleeved with meshing directional gears (25).

3. The vacuum plugging machine based on semiconductor packaging according to claim 1, characterized in that: A dust cover (40) is movably installed above the lifting mesh plate seat (10). The dust cover (40) is connected to the left end of the lifting mesh plate seat (10) by a hinge bracket (41). A strip-shaped moving groove (42) is opened through the left side of the interior of the dust cover (40). A lead screw (43) is horizontally installed in the strip-shaped moving groove (42). Both ends of the lead screw (43) are connected to the groove wall of the strip-shaped moving groove (42) by a third bearing seat (44). A large gear (45) is sleeved on one end of the lead screw (43). A small gear (46) is meshed on the upper end of the large gear (45). The small gear (46) is sleeved on the output shaft of the lead screw motor (47).

4. A vacuum plugging machine based on semiconductor packaging according to claim 3, characterized in that: A plugging resin injector (50) is movably mounted on the lead screw (43) and limited to moving within the strip-shaped moving groove (42). A lead screw nut sleeve (51) acting on the lead screw (43) is installed inside the plugging resin injector (50) near the side. A resin box (52) is provided at the upper end of the plugging resin injector (50). A metering pump (53) acting on the resin box (52) is provided inside the plugging resin injector (50). An injection control pipe (54) is provided at the output end of the metering pump (53) extending to the bottom of the plugging resin injector (50). An injection port (55) is opened at the lower end of the injection control pipe (54).

5. A vacuum plugging machine based on semiconductor packaging according to claim 4, characterized in that: A horizontal rack (56) is provided on one side of the bottom of the strip-shaped moving groove (42). One side of the horizontal rack (56) is meshed with a traveling gear (62). The traveling gear (62) is sleeved on the end of the gear shaft (60). The gear shaft (60) extends into the inside of the injection control tube (54). A sealed bearing (61) is sleeved at the connection position between the gear shaft (60) and the injection control tube (54). A needle sleeve (63) is welded to the end of the gear shaft (60) away from the traveling gear (62). Several groups of bubble needles (64) of different lengths are distributed on the needle sleeve (63).

6. A vacuum plugging machine based on semiconductor packaging according to claim 1, characterized in that: Both the push plate (82) and the scraper (83) are provided with a drive block (86) that extends into the interior of the double-head scraper seat (73). The inner side of the drive block (86) is evenly distributed with teeth (87). A bidirectional gear (90) is rotatably arranged between the two sets of drive blocks (86). The bidirectional gear (90) is sleeved on the positioning shaft. The positioning shaft is connected to the inner wall of the double-head scraper seat (73) by means of a damping bearing seat (91). One of the drive blocks (86) has an annular sleeve (93) connected to its end by a connecting rib (92). A drive rod (94) is slidably disposed inside the annular sleeve (93). The drive rod (94) is welded to a crank (95). The crank (95) is connected to the output shaft of a second servo motor (96).

7. A vacuum plugging machine based on semiconductor packaging according to claim 1, characterized in that: The scraping chamber (70) is symmetrically and movably provided with motion chains (71) on both sides. Guide rails (72) are horizontally installed on both sides of the scraping chamber (70) and inside the motion chains (71). The two ends of the double-headed scraping seat (73) are symmetrically connected with sliders (74) that act on the guide rails (72). The upper end of the sliders (74) is connected to a buckle (75) that engages with the motion chains (71). Both the push plate (82) and the scraper (83) are provided with mud-removing blades (100) at the lower outer side. Both ends of the top of the mud-removing blades (100) are welded with a cutter shaft (101). The cutter shaft (101) is connected to the inner wall of the first lifting groove (80) and the second lifting groove (81) by means of an inner bearing (102). The cutter shaft (101) is fixed to the groove wall of the first lifting groove (80) and the second lifting groove (81) by means of a torsion spring (103).

8. A vacuum plugging machine based on semiconductor packaging according to claim 1, characterized in that: Two sets of motion track grooves (110) are symmetrically provided at the bottom edge of the lifting mesh plate base (10). A cleaning moving fixture (111) is movably provided below the lifting mesh plate base (10). The two ends of the cleaning moving fixture (111) are riveted with L-shaped connecting arms (112) that extend into the motion track grooves (110). The outer end of the L-shaped connecting arm (112) is provided with a track wheel (113) that moves in the motion track grooves (110). A storage groove (114) is provided upward in the middle of the cleaning moving fixture (111). A sludge collection seat (115) is movably provided in the storage groove (114). A square sealing cover (116) that contacts the mesh plate (14) is provided at the upper end of the sludge collection seat (115). A suction chamber (117) is provided upward inside the sludge collection seat (115).

9. A vacuum plugging machine based on semiconductor packaging according to claim 8, characterized in that: The bottom of the cleaning mobile fixture (111) is fixed with a suction fan (120). The suction port of the suction fan (120) is connected to a corrugated telescopic pipe (121). The upper end of the corrugated telescopic pipe (121) extends into the suction chamber (117) and is connected to a diversion pipe (123). Both sides of the diversion pipe (123) are provided with connecting holes (124). Two sets of inclined dirt collection plates (125) are symmetrically installed on the top of the diversion pipe (123).

10. A vacuum plugging machine based on semiconductor packaging according to claim 9, characterized in that: The cleaning mobile fixture (111) is symmetrically equipped with two sets of hydraulic cylinders (130). The two sets of hydraulic cylinders (130) are movably equipped with hydraulic rods (131) extending into the storage groove (114). The upper end of the hydraulic rods (131) is fixed to the bottom of the dirt collection seat (115).

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