Glass wafer grabbing manipulator with buffer mechanism
By installing a buffer assembly and a lubrication system on the robotic arm, the problem of glass wafer positioning error caused by the inertia and vibration of the rotating arm was solved, realizing safe gripping of glass wafers and high-precision transmission of the robotic arm.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-01-13
- Publication Date
- 2026-04-07
AI Technical Summary
During the process of gripping glass wafers, the inertia and vibration of the rotating arm cause the gripping position to shift, resulting in positioning errors of the glass wafers, which in turn leads to quality problems such as edge cracking, surface scratches, or internal stress damage.
A buffer assembly is installed on the robotic arm, which uses two sets of first springs to convert the inertia and vibration kinetic energy of the rotating arm into heat energy, and uses lubricant to reduce friction, thus preventing the rotating arm from shifting position and wearing due to inertial impact or vibration.
It effectively prevents rigid collisions between the glass wafer and the robot arm due to positioning errors, avoiding wafer edge cracking, surface scratches or internal stress damage, while reducing wear at the robot arm connection and improving transmission accuracy.
Smart Images
Figure CN121816010A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of robotic arm technology, specifically to a glass wafer gripping robotic arm with a buffer mechanism. Background Technology
[0002] The glass wafer gripper is an automated device designed specifically for glass wafers. Through the collaboration of mechanical structure and control system, it enables precise gripping, handling and positioning of glass wafers in an ultra-clean environment. Currently, in the glass wafer gripping operation, the rotation of the rotating arm generates inertia and vibration, which can easily cause the gripper's gripping position to deviate. This can lead to rigid collisions between the glass wafer and the gripper due to positioning errors, resulting in quality problems such as wafer edge cracking, surface scratches, or internal stress damage. Summary of the Invention
[0003] The purpose of this invention is to provide a glass wafer gripping robot with a buffer mechanism. The inertial and vibration kinetic energy generated by the rotation of the two sets of rotating arms on the robot is converted into heat energy by two sets of first springs. The two sets of first springs buffer and dampen the two sets of rotating arms on the robot, preventing the gripping position from shifting due to inertial impact or vibration. This avoids rigid collisions between the glass wafer and the robot due to positioning errors, as well as quality problems such as wafer edge cracking, surface scratches, or internal stress damage, thus solving the problems mentioned in the background art.
[0004] To achieve the above objectives, the present invention provides the following technical solution: a glass wafer gripping robot with a buffer mechanism, comprising a robot arm, wherein two sets of buffer components are installed on the robot arm, and the two sets of the robot arm include a fixed tube installed on the outer surface of the telescopic cylinder of the robot arm, a telescopic tube slidably connected inside the fixed tube, the telescopic tube being movably connected to the outer surface of the rotating arm of the robot arm, a first spring being provided inside the fixed tube, and a first flexible tube being connected inside the fixed tube, one end of the first flexible tube being fixedly connected to a nozzle; The robotic arm is equipped with an auxiliary component, which includes a storage box containing lubricating oil and a constant pressure pump fixedly installed inside the storage box. The output end of the constant pressure pump is fixedly connected to an adjusting pipe. A block is slidably connected inside the adjusting pipe, and a telescopic rod is fixedly connected to one side of the block. One side of the telescopic rod is fixedly connected to the output end of the telescopic cylinder of the robotic arm. Two sets of second hoses are connected inside the adjusting pipe, and one end of each second hose is connected to the inside of the fixed pipe.
[0005] Preferably, each of the two sets of fixed tubes and the two sets of telescopic tubes is rotatably connected to a mounting base at one end, and a protrusion is fixedly installed on one side of the mounting base.
[0006] Preferably, the outer surfaces of the two sets of rotating arms of the robot are fixedly fitted with fixing sleeves, and the fixing sleeves are provided with a first groove inside, and the protrusion is slidably connected to the inside of the first groove.
[0007] Preferably, one end of each of the two sets of first springs is fixedly connected to the inside of the fixed tube, and the other end of each of the two sets of first springs is fixedly connected to the other end of the telescopic tube.
[0008] Preferably, a fixing bracket is fixedly installed at one end of each of the two sets of first hoses, and a second groove is provided at the output end of the telescopic cylinder of the robotic arm, with one end of each of the two sets of fixing brackets slidably connected to the inside of the second groove.
[0009] Preferably, the output end of the constant pressure pump is fixedly connected to a transmission pipe, one end of which penetrates the inside of the storage box and the other end of which is connected to the inside of the regulating pipe.
[0010] Preferably, the output end of the telescopic rod passes through one end of the adjusting tube, and the output end of the telescopic rod is fixedly connected to the outer surface of the block.
[0011] Preferably, one end of the telescopic rod is fixedly connected to a connecting frame, and one end of the connecting frame is fixedly connected to the output end of the telescopic cylinder of the robot arm.
[0012] Preferably, one end of each of the two sets of second hoses is connected to a third hose, and one end of the third hose is connected to the inside of the fixed tube.
[0013] Preferably, the two sets of third hoses are equipped with one-way valves, and the telescopic rod is equipped with a second spring inside.
[0014] Compared with the prior art, the beneficial effects of the present invention are: 1. Both sets of telescopic tubes reciprocate within the two sets of fixed tubes, compressing the two sets of first springs. This causes the inertial and vibrational kinetic energy generated by the rotation of the two sets of rotating arms on the robotic arm to be converted into heat energy through the two sets of first springs. The two sets of first springs buffer and dampen the two sets of rotating arms on the robotic arm, preventing the robotic arm's rotating arms from shifting their gripping position due to inertial impact or vibration. This avoids rigid collisions between the glass wafer and the robotic arm due to positioning errors, as well as quality problems such as wafer edge cracking, surface scratches, or internal stress damage.
[0015] 2. Both sets of telescopic tubes squeeze the lubricant inside the two sets of fixed tubes. The lubricant is then transmitted to the two sets of nozzles through the first hose. The two sets of nozzles spray the lubricant evenly at the connection between the telescopic cylinder of the robot and the two sets of rotating arms, reducing the friction between the telescopic cylinder of the robot and the two sets of rotating arms. This prevents long-term high-frequency movement from causing increased wear on the metal surface at the connection between the telescopic cylinder of the robot and the two sets of rotating arms, thus reducing the transmission accuracy. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the overall structure of a glass wafer gripping robot with a buffer mechanism according to the present invention. Figure 2 This is a schematic diagram of the buffer assembly structure of a glass wafer gripping robot with a buffer mechanism according to the present invention. Figure 3 This is a cross-sectional view of the fixing sleeve structure of a glass wafer gripping robot with a buffer mechanism according to the present invention. Figure 4 This is a schematic diagram of the auxiliary component structure of a glass wafer gripping robot with a buffer mechanism according to the present invention. Figure 5 This is a cross-sectional view of the telescopic rod structure of a glass wafer gripping robot with a buffer mechanism according to the present invention.
[0017] In the diagram: 1. Robotic arm; 2. Buffer assembly; 201. Fixed tube; 202. Telescopic tube; 203. First spring; 204. Mounting base; 205. Fixed sleeve; 206. Protrusion; 207. First hose; 208. Nozzle; 209. Fixing frame; 3. Auxiliary assembly; 301. Storage box; 302. Constant pressure pump; 303. Transmission tube; 304. Adjusting tube; 305. Block; 306. Telescopic rod; 308. Second spring; 309. Connecting frame; 310. Second hose; 311. Third hose; 312. One-way valve. Detailed Implementation
[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0019] Please see Figures 1 to 3 The present invention provides a glass wafer gripping robot with a buffer mechanism, including a robot 1, on which two sets of buffer components 2 are installed. The two sets of robot 1 include a fixed tube 201 installed on the outer surface of the telescopic cylinder of the robot 1, a telescopic tube 202 slidably connected inside the fixed tube 201, the telescopic tube 202 being movably connected to the outer surface of the rotating arm of the robot 1, a first spring 203 being provided inside the fixed tube 201, a first flexible tube 207 being connected inside the fixed tube 201, and a nozzle 208 being fixedly connected to one end of the first flexible tube 207. When the operator starts the robotic arm 1 to grip the glass wafer, and the two sets of rotating arms on the robotic arm 1 adjust the angle at one end, because the two sets of protrusions 206 slide on the first grooves inside the two sets of fixed sleeves 205, and because the two sets of fixed tubes 201 and the two sets of telescopic tubes 202 have their moving angles adjusted at one end via the mounting base 204, the two sets of rotating arms on the robotic arm 1 will drive the two sets of fixed tubes 201 and the two sets of telescopic tubes 202, as well as the first springs 203 inside the two sets of fixed tubes 201, to move. The inertia and vibration kinetic energy generated by the rotation of the two sets of rotating arms on the robotic arm 1 will be transmitted to the two sets of telescopic tubes 201. The two sets of telescopic tubes 202 reciprocate within the two sets of fixed tubes 201, compressing the two sets of first springs 203. This causes the inertial and vibrational kinetic energy generated by the rotation of the two sets of rotating arms on the robot arm 1 to be converted into heat energy through the two sets of first springs 203. The two sets of first springs 203 buffer and dampen the two sets of rotating arms on the robot arm 1, preventing the rotating arms of the robot arm 1 from shifting their gripping position due to inertial impact or vibration. This avoids rigid collisions between the glass wafer and the robot arm due to positioning errors, as well as quality problems such as wafer edge cracking, surface scratches, or internal stress damage. Please see Figures 4 to 5 The robotic arm 1 is equipped with an auxiliary component 3, which includes a storage box 301 containing lubricating oil. A constant pressure pump 302 is fixedly installed inside the storage box 301. The output end of the constant pressure pump 302 is fixedly connected to the regulating pipe 304. A block 305 is slidably connected inside the regulating pipe 304. A telescopic rod 306 is fixedly connected to one side of the block 305. One side of the telescopic rod 306 is fixedly connected to the output end of the telescopic cylinder of the robotic arm 1. Two sets of second hoses 310 are connected inside the regulating pipe 304. One end of the second hose 310 is connected to the inside of the fixed pipe 201. When the telescopic cylinder of the robotic arm 1 extends and adjusts, the telescopic cylinder drives the telescopic rod 306 upward through the connecting frame 309. The telescopic rod 306 drives the block 305 upward inside the regulating pipe 304, thereby opening the passage between the transmission pipe 303 and the regulating pipe 304. Because the pressure inside the transmission pipe 303 is high when the block 305 blocks the connection between the regulating pipe 304 and the transmission pipe 303, the constant pressure pump 302 automatically stops. At this time, the constant pressure pump 302 senses the low pressure inside the transmission pipe 303 and automatically starts. The constant pressure pump 302 draws lubricating fluid from the storage tank 301. The lubricating fluid is then transmitted through the transmission pipe 303 and the regulating pipe 304 to the two sets of second hoses 310 respectively. Two sets of second hoses 310 transmit lubricant to the two sets of fixed tubes 201 through the third hoses 311. When the two sets of telescopic tubes 202 reciprocate inside the two sets of fixed tubes 201 and reciprocate to compress the two sets of first springs 203, the two sets of telescopic tubes 202 squeeze the lubricant inside the two sets of fixed tubes 201. The lubricant is then transmitted to the two sets of nozzles 208 through the first hoses 207. The two sets of nozzles 208 spray the lubricant evenly at the connection between the telescopic cylinder of the robot 1 and the two sets of rotating arms, reducing the friction between the telescopic cylinder of the robot 1 and the two sets of rotating arms, and preventing long-term high-frequency movement from causing increased wear on the metal surface at the connection between the telescopic cylinder of the robot 1 and the two sets of rotating arms, thus reducing the transmission accuracy. Additionally, the two sets of one-way valves 312 are used to prevent the lubricant from flowing back through the two sets of third hoses 311 when both sets of telescopic tubes 202 squeeze the lubricant inside the two sets of fixed tubes 201, causing unstable lubricant transmission and preventing the auxiliary component 3 from working properly. Since one end of each of the two sets of fixed brackets 209 slides inside the second groove at the output end of the telescopic cylinder of the robot 1, the movement of the two sets of first hoses 207 following the fixed tubes 201 will not affect the normal operation of the telescopic cylinder of the robot 1. When the telescopic cylinder of the robot 1 moves the block 305 to the maximum height of the adjusting tube 304 through the connecting bracket 309 and the telescopic rod 306, the block 305 stops moving. At this time, the elastic force of the second spring 308 driven by the telescopic rod 306 is less than the pulling force of the telescopic cylinder of the robot 1. The telescopic rod 306 drives the second spring 308 to perform telescopic adjustment, which will not affect the normal operation of the telescopic cylinder of the robot 1.
[0020] In an optional embodiment, each of the two sets of fixed tubes 201 and the two sets of telescopic tubes 202 is rotatably connected to a mounting base 204 at one end, and a mounting protrusion 206 is fixedly mounted on one side of the mounting base 204.
[0021] It should be noted that since the moving angle of one end of each of the two sets of fixed tubes 201 and the two sets of telescopic tubes 202 is adjusted by the mounting base 204, the two sets of rotating arms on the robot arm 1 will drive the two sets of fixed tubes 201 and the two sets of telescopic tubes 202, as well as the first spring 203 inside the two sets of fixed tubes 201, to move.
[0022] In an optional embodiment, a fixing sleeve 205 is fixedly installed on the outer surface of both sets of rotating arms of the robot 1. The fixing sleeve 205 has a first groove inside, and the protrusion 206 is slidably connected to the inside of the first groove.
[0023] It should be noted that since both sets of protrusions 206 slide on the first groove inside the two sets of fixed sleeves 205, the two sets of rotating arms on the robot arm 1 will drive the two sets of fixed tubes 201 and the two sets of telescopic tubes 202, as well as the first springs 203 inside the two sets of fixed tubes 201, to move.
[0024] In an optional embodiment, one end of each of the two sets of first springs 203 is fixedly connected to the inside of the fixed tube 201, and the other end of each of the two sets of first springs 203 is fixedly connected to the other end of the telescopic tube 202.
[0025] It should be noted that both sets of telescopic tubes 202 reciprocate inside the two sets of fixed tubes 201, reciprocatingly compressing the two sets of first springs 203. This causes the inertial and vibrational kinetic energy generated by the rotation of the two sets of rotating arms on the robot arm 1 to be converted into heat energy through the two sets of first springs 203. The two sets of first springs 203 buffer and dampen the two sets of rotating arms on the robot arm 1.
[0026] In an optional embodiment, a fixing bracket 209 is fixedly installed at one end of each of the two sets of first hoses 207, and a second groove is provided at the output end of the telescopic cylinder of the robot arm 1. One end of each of the two sets of fixing brackets 209 is slidably connected to the inside of the second groove.
[0027] It should be noted that since one end of each of the two sets of fixed brackets 209 slides inside the second groove at the output end of the telescopic cylinder of the robot arm 1, the two sets of first hoses 207 will not affect the normal operation of the telescopic cylinder of the robot arm 1 when they move with the fixed tube 201.
[0028] In an optional embodiment, the output end of the constant pressure pump 302 is fixedly connected to a transmission pipe 303, one end of the transmission pipe 303 penetrates the interior of the storage box 301, and the other end of the transmission pipe 303 is connected to the interior of the regulating pipe 304.
[0029] It should be noted that the constant pressure pump 302 draws lubricating fluid from the storage tank 301, and the lubricating fluid is transferred to the two sets of second hoses 310 through the transmission pipe 303 and the regulating pipe 304 respectively.
[0030] In an optional embodiment, the output end of the telescopic rod 306 passes through one end of the regulating tube 304, and the output end of the telescopic rod 306 is fixedly connected to the outer surface of the block 305.
[0031] It should be noted that the telescopic rod 306 drives the block 305 to move upward inside the regulating pipe 304, thereby opening the passage between the transmission pipe 303 and the regulating pipe 304.
[0032] In an optional embodiment, a connecting frame 309 is fixedly connected to one end of the telescopic rod 306, and one end of the connecting frame 309 is fixedly connected to the output end of the telescopic cylinder of the robot arm 1.
[0033] It should be noted that the telescopic cylinder of the robotic arm 1 drives the telescopic rod 306 to move upward through the connecting frame 309. The telescopic rod 306 drives the block 305 to move upward inside the regulating pipe 304, thereby opening the passage between the transmission pipe 303 and the regulating pipe 304.
[0034] In an optional embodiment, one end of each of the two sets of second hoses 310 is connected to a third hose 311, and one end of the third hose 311 is connected to the interior of the fixed tube 201.
[0035] It should be noted that the two sets of second hoses 310 transmit lubricant to the two sets of fixed pipes 201 through the third hoses 311 respectively.
[0036] In an optional embodiment, two sets of third hoses 311 are provided with one-way valves 312, and a second spring 308 is provided inside the telescopic rod 306.
[0037] It should be noted that the two sets of one-way valves 312 are used to prevent the lubricant from flowing back through the two sets of third hoses 311 when both sets of telescopic tubes 202 squeeze the lubricant inside the two sets of fixed tubes 201, resulting in unstable lubricant transmission and the auxiliary component 3 not working properly. When the telescopic cylinder of the robot 1 moves the block 305 to the maximum height of the adjusting tube 304 through the connecting frame 309 and the telescopic rod 306, the block 305 stops moving. At this time, the elastic force of the second spring 308 driven by the telescopic rod 306 is less than the pulling force of the telescopic cylinder of the robot 1. The telescopic rod 306 drives the second spring 308 to perform telescopic adjustment, which will not affect the normal operation of the telescopic cylinder of the robot 1.
[0038] Working principle: When the operator starts the robotic arm 1 to grasp the glass wafer, and the two sets of rotating arms on the robotic arm 1 adjust the angle of one end, since the two sets of protrusions 206 slide on the first groove inside the two sets of fixed sleeves 205, and the two sets of fixed tubes 201 and two sets of telescopic tubes 202 adjust their moving angle through the mounting base 204, the two sets of rotating arms on the robotic arm 1 will drive the two sets of fixed tubes 201 and two sets of telescopic tubes 202, as well as the first springs 203 inside the two sets of fixed tubes 201, to move. The inertia and vibration kinetic energy generated by the rotation of the two sets of rotating arms on the robotic arm 1 will be transmitted to the two sets of telescopic tubes 202. The two sets of telescopic tubes 202 reciprocate inside the two sets of fixed tubes 201, reciprocatingly compressing the two sets of first springs 203. This causes the inertia and vibration kinetic energy generated by the rotation of the two sets of rotating arms on the robotic arm 1 to be converted into heat energy through the two sets of first springs 203. The two sets of first springs 203 buffer and dampen the two sets of rotating arms on the robotic arm 1. When the telescopic cylinder of the robotic arm 1 extends and adjusts, the telescopic cylinder drives the telescopic rod 306 upward through the connecting frame 309. The telescopic rod 306 drives the block 305 upward inside the regulating pipe 304, thereby opening the passage between the transmission pipe 303 and the regulating pipe 304. Because the block 305 blocks the connection between the regulating pipe 304 and the transmission pipe 303, the pressure inside the transmission pipe 303 is relatively high, and the constant pressure pump 302 automatically stops. At this time, the constant pressure pump 302 senses the low pressure inside the transmission pipe 303 and automatically starts. The constant pressure pump 302 draws lubricating fluid from the storage tank 301, and the lubricating fluid passes through the transmission pipe 303 and... The regulating pipe 304 transmits the lubricant to the two sets of second hoses 310 respectively. The two sets of second hoses 310 transmit the lubricant to the two sets of fixed pipes 201 respectively through the third hose 311. When the two sets of telescopic pipes 202 reciprocate inside the two sets of fixed pipes 201, and reciprocate to compress the two sets of first springs 203, the two sets of telescopic pipes 202 squeeze the lubricant inside the two sets of fixed pipes 201. The lubricant is then transmitted to the two sets of nozzles 208 respectively through the first hose 207. The two sets of nozzles 208 spray the lubricant evenly at the connection between the telescopic cylinder of the robot 1 and the two sets of rotating arms, reducing the friction between the telescopic cylinder of the robot 1 and the two sets of rotating arms.
[0039] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A glass wafer gripping robot with a buffer mechanism, comprising a robot (1), characterized in that, The robotic arm (1) is equipped with two sets of buffer components (2). The two sets of robotic arms (1) include a fixed tube (201) installed on the outer surface of the telescopic cylinder of the robotic arm (1). A telescopic tube (202) is slidably connected inside the fixed tube (201). The telescopic tube (202) is movably connected to the outer surface of the rotating arm of the robotic arm (1). A first spring (203) is provided inside the fixed tube (201). A first hose (207) is connected inside the fixed tube (201). A nozzle (208) is fixedly connected to one end of the first hose (207). The robotic arm (1) is equipped with an auxiliary component (3), which includes a storage box (301) containing lubricating oil. A constant pressure pump (302) is fixedly installed inside the storage box (301). The output end of the constant pressure pump (302) is fixedly connected to the regulating pipe (304). A block (305) is slidably connected inside the regulating pipe (304). A telescopic rod (306) is fixedly connected to one side of the block (305). One side of the telescopic rod (306) is fixedly connected to the output end of the telescopic cylinder of the robotic arm (1). Two sets of second hoses (310) are connected inside the regulating pipe (304). One end of the second hose (310) is connected to the inside of the fixed pipe (201).
2. The glass wafer gripping robot with a buffer mechanism according to claim 1, characterized in that, Each of the two sets of fixed tubes (201) and the two sets of telescopic tubes (202) is rotatably connected to a mounting base (204) at one end, and a protrusion (206) is fixedly installed on one side of the mounting base (204).
3. A glass wafer gripping robot with a buffer mechanism according to claim 2, characterized in that, The outer surfaces of the two sets of rotating arms of the robotic arm (1) are fixedly mounted with fixed sleeves (205). The fixed sleeves (205) have a first groove inside, and the protrusions (206) are slidably connected to the inside of the first groove.
4. A glass wafer gripping robot with a buffer mechanism according to claim 1, characterized in that, One end of each of the two sets of first springs (203) is fixedly connected to the inside of the fixed tube (201), and the other end of each of the two sets of first springs (203) is fixedly connected to the other end of the telescopic tube (202).
5. A glass wafer gripping robot with a buffer mechanism according to claim 1, characterized in that, Both sets of the first hoses (207) are fixedly installed with a fixing bracket (209) at one end. The output end of the telescopic cylinder of the robotic arm (1) is provided with a second groove. Both sets of the fixing brackets (209) are slidably connected to the inside of the second groove at one end.
6. A glass wafer gripping robot with a buffer mechanism according to claim 1, characterized in that, The output end of the constant pressure pump (302) is fixedly connected to a transmission pipe (303). One end of the transmission pipe (303) penetrates the inside of the storage box (301), and the other end of the transmission pipe (303) is connected to the inside of the regulating pipe (304).
7. A glass wafer gripping robot with a buffer mechanism according to claim 1, characterized in that, The output end of the telescopic rod (306) passes through one end of the regulating tube (304), and the output end of the telescopic rod (306) is fixedly connected to the outer surface of the block (305).
8. A glass wafer gripping robot with a buffer mechanism according to claim 1, characterized in that, One end of the telescopic rod (306) is fixedly connected to a connecting frame (309), and one end of the connecting frame (309) is fixedly connected to the output end of the telescopic cylinder of the robot (1).
9. A glass wafer gripping robot with a buffer mechanism according to claim 1, characterized in that, Both sets of the second hoses (310) are connected to a third hose (311) at one end, and one end of the third hose (311) is connected to the inside of the fixed tube (201).
10. A glass wafer gripping robot with a buffer mechanism according to claim 9, characterized in that, The two sets of third hoses (311) are equipped with one-way valves (312), and the telescopic rod (306) is equipped with a second spring (308).