Cover plate conveying device of process cavity and semiconductor thin film deposition equipment

Abstract

The embodiment of the invention provides a cover plate conveying device of a process cavity and semiconductor thin film deposition equipment. The cover plate conveying device of the process cavity is used for driving a cover plate of the process cavity to open and close; the cover plate conveying device of the process cavity comprises a frame and a conveying device, wherein the frame is provided with a supporting main body positioned above a cover plate; the chain box body is arranged on the supporting main body, and the chain box body comprises a box body, a driving gear arranged on the box body and a containing part formed in the box body and located on the side of the driving gear; the chain set is meshed with the driving gear, the first end of the chain set is used for being connected with the cover plate, and the second end of the chain set is contained in the containing part in the state that the driving gear drives the chain set to conduct transmission.

Description

Technical Field

[0001] This application relates to the field of semiconductor thin film deposition technology, and more specifically, to a cover plate conveying device for a process cavity and a semiconductor thin film deposition apparatus. Background Technology

[0002] In semiconductor thin film deposition equipment, the top cover (also known as the "cover plate" or "top cover") of the process chamber needs to be opened and closed frequently for substrate loading, target replacement and routine maintenance.

[0003] Currently, the industry primarily employs two solutions for opening and closing process chamber covers: a screw drive mechanism and a cylinder drive mechanism. The screw drive mechanism uses a motor to drive the screw, converting rotational motion into linear motion to raise and lower the cover. The screw assembly (including the screw, nut, and support bearings) requires a significant axial space along the cover's lifting direction, increasing the overall height of the process chamber. This not only increases the space requirements for equipment installation but also obstructs the operation path during maintenance (such as internal cleaning or component replacement), reducing maintenance convenience. The cylinder drive mechanism uses compressed gas to drive a piston, thus raising and lowering the cover. However, due to limitations in cylinder stroke and pneumatic control characteristics, it is difficult to achieve precise multi-point stopping of the cover at any height, failing to meet the needs of "step-by-step opening and closing" and "mid-process positioning maintenance" in some process scenarios.

[0004] In summary, existing drive devices for process cavity covers generally suffer from drawbacks such as large space occupation, inability to stop at multiple points as needed, and poor maintenance convenience. There is an urgent need to provide a cover conveying solution that can stop at any position within the stroke range and does not obstruct the maintenance area. Summary of the Invention

[0005] The purpose of this application is to provide a cover plate conveying device for a process cavity and a semiconductor thin film deposition equipment.

[0006] According to a first aspect of this application, a cover plate conveying device for a process cavity is provided. The cover plate conveying device is used to drive the opening and closing of the cover plate of the process cavity; the cover plate conveying device for the process cavity includes: The frame has a supporting body located above the cover plate; A chain box is disposed in the support body. The chain box includes a box body, a drive gear disposed thereon, and a receiving part formed in the box body and located next to the drive gear. A chain assembly meshes with the drive gear. The first end of the chain assembly is used to connect with the cover plate. When the drive gear drives the chain assembly to transmit power, the second end of the chain assembly is housed in the receiving part.

[0007] Optionally, the receiving part is a cavity structure adapted to the storage form of the second end of the chain assembly.

[0008] Optionally, a limiting groove is formed on the chain box body, the limiting groove is arranged around the outer circumferential direction of the receiving part, and one end of the limiting groove has a baffle wall; The second end of the chain assembly is provided with a limiting pin that is adapted to the limiting groove, and the limiting pin is slidably embedded in the limiting groove.

[0009] Optionally, the receiving part is provided with an inlet, the horizontal end face of which is a planar structure parallel to the transmission direction of the second end of the chain assembly, for guiding the second end of the chain assembly into the receiving part.

[0010] Optionally, the chain housing is provided with a semi-enclosed accommodating cavity, the drive gear is disposed in the accommodating cavity, and the circumferential teeth of the drive gear are exposed through the opening area of ​​the semi-enclosed accommodating cavity.

[0011] Optionally, a guide portion is provided on the inner side wall of the chain box, and the second end of the chain assembly is received in the receiving portion along the extending direction of the guide portion.

[0012] Optionally, the guide portion includes a guide channel extending in a vertical direction; one end of the guide channel penetrates the bottom wall of the chain box, and the other end is connected to the opening area of ​​the semi-enclosed accommodating cavity, and the meshing section of the chain assembly is at least partially located within the guide channel.

[0013] Optionally, the semi-enclosed accommodating cavity is provided with an enclosing wall near the receiving portion, and a guide portion is constructed on the side of the enclosing wall facing the guide portion and the entrance portion of the receiving portion, and the end face of the guide portion is flush with the horizontal end face of the entrance portion of the receiving portion.

[0014] Optionally, the frame further includes a support column extending in a vertical direction, the support column being connected to the support body; The support column is provided with a guide rail, and the cover plate is provided with a guide block adapted to the guide rail.

[0015] Optionally, the cover plate conveying device includes at least two chain boxes and chain groups corresponding to each chain box; The first end of each chain group is used to connect to the cover plate, and at least two of the chain groups are symmetrically distributed about the geometric center axis of the cover plate.

[0016] Optionally, the cover plate conveying device includes at least two chain boxes and chain groups corresponding to each chain box; The first end of each chain group is used to connect to the cover plate, and at least two of the chain groups are asymmetrically distributed about the geometric center axis of the cover plate.

[0017] Optionally, the guide rails and the chain assembly are distributed around the cover plate, and the guide rails and the chain assembly are alternately arranged along the circumference of the cover plate.

[0018] According to a second aspect of this application, a semiconductor thin film deposition apparatus is provided. The semiconductor thin film deposition apparatus includes a cover plate transfer device for the process chamber as described in the first aspect.

[0019] One technical advantage of this application is: In the technical solution provided in this application embodiment, the cover plate conveying device adopts a chain drive technology. The chain group and the drive gear mesh to drive the cover plate to move vertically. Simultaneously, the receiving part on the chain box allows for the retractable storage of the chain group at the end furthest from the cover plate. The cover plate conveying device design provided in this application embodiment not only avoids the chain group occupying the equipment maintenance path, ensuring smooth maintenance operations, but also utilizes the meshing transmission characteristics of gears and chains to achieve cover plate suspension at any height, meeting the needs of "step-by-step opening and closing" and "mid-process positioning maintenance" in process scenarios, effectively solving the technical problems existing in the prior art.

[0020] Other features and advantages of this specification will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of this specification and, together with their description, serve to explain the principles of this specification.

[0022] Figure 1 The diagram shown is a structural diagram of the cover plate conveying device for the process cavity provided in an embodiment of this application.

[0023] Figure 2 The diagram shown is a structural diagram of the chain box and chain assembly provided in an embodiment of this application.

[0024] Figure 3 The image shown is a result of one perspective view of the chain box and chain assembly provided in the embodiment of this application.

[0025] Figure 4 The diagram shown is a structural diagram of the chain box provided in an embodiment of this application.

[0026] Explanation of reference numerals in the attached figures: 1. Frame; 10. Supporting body; 11. Supporting column; 111. Guide rail; 2. Chain box; 21. Box body; 22. Drive gear; 23. Reception section; 230. Entrance section; 231. Reception section body; 24. Limiting groove; 241. Baffle; 25. Receiving cavity; 250. Opening area; 251. Enclosing wall; 252. Guide section; 26. Guiding section; 261. Guiding passageway; 3. Chain assembly; 31. Limit pin; 4. Cover plate; 41. Guide block. Detailed Implementation

[0027] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0028] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the scope of this application and its application or use.

[0029] Technologies and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies and equipment should be considered part of the specification.

[0030] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0032] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0033] In related technologies, the cover plate of the process cavity (which typically weighs tens of kilograms) is relatively heavy, and existing screw drive and cylinder drive solutions generally have technical defects such as large space occupation and inability to achieve multi-point stopping as needed, which affects the convenience of equipment maintenance. This application provides a cover plate conveying device for the process cavity.

[0034] Reference Figures 1-4 The cover plate conveying device for the process cavity includes: a frame 1, having a supporting body 10 located above the cover plate 4; Chain box 2 is disposed on the support body 10. The chain box 2 includes a box body 21, a drive gear 22 disposed on the box body 21, and a receiving part 23 formed in the box body 21 and located next to the drive gear 22. Chain assembly 3 meshes with the drive gear 22. The first end of chain assembly 3 connects to the cover plate 4. When the drive gear 22 drives chain assembly 3, the second end of chain assembly 3 is housed within the receiving portion 23. With the second end of chain assembly 3 housed within the receiving portion 23, chain assembly 3 causes the cover plate 4 to rise vertically, thus opening the cover plate 4.

[0035] In this embodiment, the cover plate conveying device mainly includes a frame 1, a chain box 2, and a chain assembly 3.

[0036] Reference Figure 1 The frame 1 serves as the overall support structure for the entire device, including a horizontally positioned support body 10 located directly above the process chamber cover plate 4. The projected outline of the support body 10 is not smaller than the outline dimensions of the cover plate 4, ensuring a stable and sufficient mounting foundation for subsequent assembly components (such as the chain box 2).

[0037] For example, the frame 1 can be integrally formed from high-strength aluminum alloy or stainless steel, taking into account both structural strength and lightweight requirements, and adapting to the heavy load bearing scenario of the cover plate 4.

[0038] Reference Figure 1 The chain box 2 is detachably fixed to the support body 10 by bolts, screws and other fastening methods, and its installation position can be flexibly selected according to actual space requirements.

[0039] The chain box 2 is fixed to the upper surface of the support body 10. This arrangement maximizes the space below the support body 10, providing more travel margin for the vertical lifting and lowering movement of the cover plate 4. Alternatively, the chain box 2 can be fixed to the lower surface of the support body 10. This arrangement must ensure that the cover plate 4 does not structurally interfere with the chain box 2 during lifting and lowering, and does not affect the transmission stroke of the chain assembly 3.

[0040] The number of chain boxes 2 can be set to one or more depending on the size and weight of the cover plate 4. The number of chain sets 3 adapted to each chain box 2 corresponds one-to-one with the number of chain boxes 2. (Refer to...) Figure 1 In this embodiment, there are two chain boxes 2, which are distributed on both sides of the support body 10. Correspondingly, there are also two chain groups 3 in this embodiment.

[0041] In this embodiment, refer to Figure 3 and Figure 4The chain box 2 includes a box body 21 and a drive gear 22. The box body 21 is used to mount the drive gear 22. The drive gear 22 is used to drive the chain assembly 3 to move the cover plate 4 vertically. For example, the drive gear 22 can be a spur gear.

[0042] Please continue to refer to Figure 3 and Figure 4 The housing body 21 also has an integrally formed receiving part 23. The receiving part 23 is a cavity structure adjacent to the drive gear 22, which is specifically used to receive the redundant part of the chain assembly 3 that is away from the cover plate 4 and far away from the drive gear 22.

[0043] For example, the box body 21 has a width dimension extending in the vertical direction and a length dimension extending in the horizontal direction. The receiving part 23 and the drive gear 22 are arranged side by side adjacent to each other along the length direction of the box body 21 to ensure that the chain assembly 3 can smoothly enter the receiving part 23 when it is in motion.

[0044] Since the chain housing 2 of this application has a receiving part 23, when the drive gear 22 drives the chain assembly 3 to move the cover plate 4 upward in the vertical direction to open the cover plate 4, since the chain assembly 3 is a rigid structure, the second end of the chain assembly 3 away from the cover plate 4 can be automatically received into the receiving part 23 by its own transmission. In this case, when it is necessary to repair the process cavity, the exposed parts of the chain assembly 3 are avoided from occupying the equipment maintenance path, which significantly improves the convenience of process cavity maintenance operations.

[0045] For example, the inner wall of the receiving part 23 is polished, which can effectively reduce the frictional wear of the chain assembly 3 during the receiving or extending process and extend the service life of the chain assembly 3; at the same time, the cavity volume of the receiving part 23 can be adapted to the maximum receiving length of the chain assembly 3, ensuring that when the cover plate 4 is raised to the limit position, the redundant part of the chain assembly 3 can be completely received therein.

[0046] Reference Figures 1-4 The chain assembly 3 can adopt a roller chain structure, with its link dimensions matching the module of the drive gear 22 to ensure precise meshing transmission. The first end of the chain assembly 3 is fixedly connected to the cover plate 4 via connecting lugs or flanges or other connecting structures. Reinforcing ribs can be added to the connection points between the connecting structures and the cover plate 4 to improve connection strength and adapt to heavy-load transmission. The middle section of the chain assembly 3 meshes with the teeth of the drive gear 22 to form a stable power transmission engagement; the second end of the chain assembly 3 (the end away from the cover plate 4) is in a free state. In the initial state, the second end of the chain assembly 3 can extend to the entrance of the receiving section 23, reserving a guiding foundation for subsequent receiving operations.

[0047] For example, the chain assembly 3 can be a single chain, which meshes with the drive gear 22.

[0048] For example, refer to Figure 1 and Figure 2 The chain assembly 3 can be a double chain, with the two chains arranged opposite each other. The two chains are symmetrically positioned on both sides of the teeth of the same drive gear 22 and mesh synchronously to form a force-balanced structure. This design can improve the load-bearing capacity of the chain assembly 3, making it suitable for large-size, heavy-load (e.g., weight ≥ 50 kg) cover plates 4, and effectively avoiding the side deviation and jamming problems that may occur with single-chain transmission.

[0049] When it is necessary to open the cover plate 4, the drive motor (not shown in the figure) connected to the drive gear 22 is started. The drive motor drives the drive gear 22 to rotate clockwise. Since the chain assembly 3 meshes with the drive gear 22, the rotational motion of the drive gear 22 is converted into the linear transmission of the chain assembly 3. At this time, the first end of the chain assembly 3 is pulled upward by the tension, while the second end of the chain assembly 3 gradually extends into the receiving part 23 for storage, until the cover plate 4 rises to the preset height (completely separated from the opening of the process cavity). The drive motor stops running, and the opening action of the cover plate 4 is completed.

[0050] When the cover plate 4 needs to be closed, the drive motor rotates in the opposite direction, and the drive gear 22 drives the chain group 3 to drive in the opposite direction. At this time, the second end of the chain group 3 is gradually released from the receiving part 23 and extends with the rotation of the drive gear 22. The first end of the chain group 3 drives the cover plate 4 to descend smoothly in the vertical direction until the sealing end face of the cover plate 4 is pressed against the opening end face of the process cavity to achieve sealing and closure, and the drive motor stops working.

[0051] In this embodiment, the cover plate conveying device adopts a chain group 3 transmission technology. The chain group 3 and the drive gear 22 mesh to drive the cover plate 4 to move vertically. At the same time, the receiving part 23 on the chain box 2 is used to retract and store the end of the chain group 3 away from the cover plate 4. The cover plate conveying device design provided in this embodiment not only avoids the chain group 3 from occupying the equipment maintenance path and ensures the smoothness of maintenance operations, but also uses the meshing transmission characteristics of gear and chain to enable the cover plate 4 to be suspended at any height, meeting the needs of "step-by-step opening and closing" and "mid-process positioning maintenance" in the process scenario, effectively solving the technical problems existing in the prior art.

[0052] In an optional embodiment, the gap between the chain assembly 3 and the surface of the receiving portion 23 that houses the chain assembly 3 is about 0.5 mm to 1.0 mm, in which the chain assembly 3 can smoothly retract.

[0053] In one embodiment, refer to Figure 3 and Figure 4 The receiving part 23 is a cavity structure adapted to the storage form of the second end of the chain assembly 3.

[0054] In this embodiment, the receiving part 23 is a cavity structure specially adapted to the storage form of the second end of the chain assembly 3. Its inner wall contour fits the natural shape of the chain assembly 3 when it is stored, so as to avoid bending, jamming or excessive compression of the chain assembly 3 during the storage process.

[0055] In some embodiments, the receiving section 23 includes an entrance section 230 (described in detail below) and a receiving section body 231 integrally formed with the entrance section 230, wherein the shape of the receiving section body 231 may be designed according to the shape and structure of the box body 21 and the specific length of the chain assembly 3 to be received.

[0056] In one example, the main body 231 of the housing is a cavity structure that extends spirally in the vertical direction. The spiral structure can accommodate a longer chain in a limited space, improving space utilization. It is especially suitable for large-stroke lifting scenarios and can effectively reduce the horizontal size of the box body 21, making the device structure more compact.

[0057] In another example, the main body 231 of the receiving section can be an arc-shaped, non-spiral receiving section 23, specifically a semi-arc structure or a racetrack-like structure (i.e., an integrated extended structure with semi-circular ends and a straight section in the middle). Its inner wall contour is adapted to the natural motion trajectory of the chain assembly 3 after it is derived from the drive gear 22, ensuring a smooth receiving process. Both the semi-arc and racetrack-like receiving sections 23 are non-spiral, smooth extended structures, and the inner wall has no guiding resistance caused by the helical angle, making them particularly suitable for short-stroke lifting scenarios of the cover plate 4.

[0058] Of course, the shape of the main body 231 of the receiving section includes, but is not limited to, the spiral, semi-circular, and racetrack-like structures listed above. As long as it can achieve orderly reception of the second end of the chain assembly 3, and the inner wall contour is adapted to the storage shape of the chain assembly 3, and prevents the chain assembly 3 from bending, jamming, or being excessively squeezed, the cavity structure falls within the protection scope of this application. For example, multi-segment arc splicing structures and gradually changing diameter cavity structures can also be adopted according to the actual application scenario, as long as the requirements of smooth reception and spatial adaptability are met.

[0059] In one embodiment, refer to Figure 3 The chain box 2 is formed with a limiting groove 24, which is arranged around the outer circumference of the receiving part 23, and one end of the limiting groove 24 has a baffle 241. The second end of the chain assembly 3 is provided with a limiting pin 31 adapted to the limiting groove 24, and the limiting pin 31 is slidably embedded in the limiting groove 24. When the drive gear 22 drives the chain assembly 3 downward, the limiting pin 31 slides along the extension direction of the limiting groove 24 to the baffle 241 and is stopped, thus limiting the extreme position of the cover plate 4's descent. That is, in this embodiment, the baffle 241 cooperates with the limiting pin 31 to limit the extreme position of the cover plate 4's descent, which is the position where the cover plate 4 exactly covers the process cavity.

[0060] In this embodiment, a limiting structure is further added to the chain box 2 to precisely limit the extreme position of the cover plate 4 as it descends, so as to avoid the cover plate 4 descending too far and causing it to collide with or be damaged by the process cavity or other components.

[0061] Specifically, a limiting groove 24 is integrally formed on the body 21 of the chain box 2. The limiting groove 24 is a groove structure that extends circumferentially along the body 21 and is arranged around the outer circumferential of the receiving part 23. The extension trajectory of the limiting groove 24 is adapted to the movement trajectory of the second end of the chain assembly 3 (if the receiving part 23 is spiral, the limiting groove 24 extends spirally in sync; if it is semi-arc or racetrack-like, the limiting groove 24 extends in a corresponding arc shape).

[0062] During the descent transmission of the chain assembly 3, the limiting pin 31 fixed at its second end slides synchronously along the extension direction of the limiting groove 24. The inner wall of the limiting groove 24 forms a bidirectional constraint on the limiting pin 31, preventing the chain assembly 3 from deviating or swaying during the release process, and ensuring the straightness of the cover plate 4 as it descends.

[0063] For example, the width of the limiting groove 24 can be 1mm-2mm larger than the diameter of the limiting pin 31 to ensure that the limiting pin 31 can slide smoothly without significant shaking; the depth of the limiting groove 24 is configured to fully accommodate the main body of the limiting pin 31 to prevent the limiting pin 31 from being exposed and interfering with the receiving action of the chain assembly 3.

[0064] In this embodiment, a baffle 241 is constructed at one end of the limiting groove 24. The baffle 241 is a planar structure perpendicular to the extending direction of the limiting groove 24. The position of the baffle 241 is aligned with the corresponding position of the limiting pin 31 when the cover plate 4 is lowered to the sealing position, ensuring that the cover plate 4 is exactly in contact with the opening of the process cavity when the stop is reached.

[0065] When the cover plate 4 descends to the preset sealing position, the limiting pin 31 slides to the baffle 241 of the limiting groove 24. The baffle 241 forms a rigid stop on the limiting pin 31, restricting the chain assembly 3 from continuing to drive downwards. At this time, the drive motor detects an increase in load (or receives a feedback signal from the position sensor) and automatically stops running. The cover plate 4 remains at its descent limit position, completing the closing action. That is, in this embodiment, when the limiting pin 31 is in contact with the baffle 241, the cover plate 4 is in the state of closing the process cavity. The state of the cover plate 4 closing the process cavity is the limit position of the cover plate's descent.

[0066] For example, the retaining wall 241 of the limiting groove 24 is located closer to the receiving portion 23 than to the drive gear 22. For example, the receiving portion 23 has an inlet 230, and the starting end of the limiting groove 24 away from the inlet 230 is located close to the main body of the receiving portion 23.

[0067] The entrance 230 of the receiving section 23 is the channel for the chain group 3 to enter and exit. The baffle 241 of the limiting groove 24 is located away from the entrance 230 and close to the main body of the receiving section 23. Compared with the layout where the baffle 241 is close to the drive gear 22, this design can achieve the guiding constraint of the entire lifting stroke of the cover plate 4 without increasing the length of the limiting groove 24.

[0068] In one embodiment, refer to Figure 3 and Figure 4 The receiving section 23 is provided with an inlet section 230, the horizontal end face of which is a planar structure parallel to the transmission direction of the second end of the chain assembly 3. The horizontal end face of the inlet section 230 is defined as a planar structure to guide the second end of the chain assembly 3 smoothly into the receiving section 23.

[0069] In this embodiment, based on the above-mentioned structural design of the receiving part 23, the entrance part 230 of the receiving part 23 is optimized. The second end of the chain group 3 is guided into the receiving part 23 through the planar structure, so that the second end of the chain group 3 can smoothly enter the receiving part 23 and avoid jamming or displacement during the receiving process.

[0070] Specifically, the receiving section 23 has an inlet section 230 at one end near the drive gear 22. The inlet section 230 is integrally formed on the box body 21. The inlet section 230 is a planar structure, and the planar structure is parallel to the transmission direction of the second end of the chain group 3 (i.e. the movement direction of the chain group 3 entering the receiving section 23).

[0071] Furthermore, the opening width of the inlet 230 can be 3mm-5mm larger than the width of the chain assembly 3, providing sufficient entry space for the chain assembly 3 while preventing excessive clearance that could cause the chain assembly 3 to deviate. There is a gap between the horizontal end face of the inlet 230 and the toothed exit end of the drive gear 22, ensuring that the chain assembly 3 can smoothly transition to the inlet 230 after being engaged and discharged from the drive gear 22, without significant steering impact.

[0072] For example, the main body 231 of the receiving section is a spiral receiving section 23, and the horizontal end face of the inlet 230 is flush with the tangential direction of the spiral starting end to ensure that the chain assembly 3 is smoothly screwed in.

[0073] The main body 231 of the containment section is a semi-circular containment section 23. The horizontal end face of the entrance section 230 is flush with the tangent of the starting end of the arc, and the transition fillet is adapted to the radius of the arc to avoid turning impact.

[0074] The main body of the containment section 231 is a runway-shaped containment section 23. The horizontal end face of the entrance section 230 is flush with the straight section of the runway-shaped section, and the opening length is aligned with the straight section to achieve straight transition guidance.

[0075] In one embodiment, refer to Figure 3 The chain housing 2 has a semi-enclosed cavity 25, and the drive gear 22 is disposed in the cavity 25, with the circumferential teeth of the drive gear 22 exposed through the opening area 250 of the semi-enclosed cavity 25. The teeth exposed by the opening area 250 are used to mesh with the chain assembly 3.

[0076] In this embodiment, the drive gear 22 is stably assembled and precisely meshed through the semi-enclosed accommodating cavity 25, while also taking into account protection and space adaptability.

[0077] Specifically, the chain box 2 has a semi-enclosed cavity 25 integrally constructed on its body 21. The cavity 25 is an open arc-shaped cavity structure, and its inner wall contour is adapted to the outer peripheral contour of the drive gear 22. For example, a "two-thirds enclosure" design is adopted (that is, the inner wall of the cavity 25 covers 2 / 3 of the outer periphery of the drive gear 22), reserving 1 / 3 of the area as an opening area 250 for the meshing transmission between the drive gear 22 and the chain assembly 3.

[0078] In some embodiments, the opening area 250 of the semi-enclosed accommodating cavity 25 is arranged away from the entrance 230 of the receiving section 23, that is, the opening area 250 is not directly opposite the entrance 230 of the receiving section 23, but is opened along the internal space of the box body 21 in a direction away from the entrance 230.

[0079] This layout design creates a preset interval between the opening area 250 and the entrance 230 of the receiving section 23. This interval is specifically designed for the placement of the guide section 252, which will be described later. The two ends of the guide section 252 are smoothly connected to the edge of the opening area 250 and the entrance 230 of the receiving section 23, respectively, forming a continuous transition channel. This ensures that after the chain assembly 3 is engaged and exited from the opening area 250, it can smoothly transition into the receiving section 23 via the guide section 252, avoiding turning impact or jamming caused by misalignment.

[0080] Meanwhile, when the chain box 2 has a guide channel 261 extending vertically (features described in detail below) inside the box body 21, the opening area 250 of the receiving cavity 25 is directly connected to the guide channel 261, that is, the edge of the opening area 250 is aligned with the top end of the guide channel 261, so that the chain group 3 set in the guide channel 261 can directly approach the opening area 250 along the extension direction of the channel and quickly form a meshing engagement with the drive gear 22 located in the opening area 250 without additional steering adjustment, significantly improving the meshing response speed and accuracy.

[0081] In one embodiment, refer to Figure 3 and Figure 4 The box body 21 is provided with a guide portion 26, which extends from the bottom wall of the box body 21 along the circumferential direction of the box body 21 and is integrally formed with the receiving portion 23.

[0082] In this embodiment, a circumferential guide section 26 is added to the circumferential direction of the box body 21. By integrally molding with the receiving section 23, the circumferential positioning and transmission guidance of the chain group 3 are realized, while strengthening the structural strength of the box body 21.

[0083] Specifically, the chain box 2 has a circumferential guide 26 in the circumferential direction of the box body 21. The guide 26 is a recessed structure extending along the inner wall of the box body 21. It is made by integral molding process with the box body 21 and the receiving part 23 (the material is the same as high-strength aluminum alloy or stainless steel) to ensure the integrity of the structure and the connection strength, and to avoid the guide deviation caused by the assembly gap.

[0084] When the chain assembly 3 transitions to the entrance of the receiving part 23 via the guide part 252, it also enters the circumferential constraint range of the guide part 26 and is stored along the inner wall of the receiving part 23 under the drive of the drive gear 22. At this time, the inner side wall of the guide part 26, combined with the overall structure of the receiving part 23, restricts the chain assembly 3 from swaying to both sides, ensuring that it is stored in an orderly manner along the extension direction of the receiving part 23.

[0085] When the chain assembly 3 is released from the housing 23, it maintains a stable motion posture under the circumferential constraint of the guide 26 and smoothly transitions to the guide 252, avoiding meshing deviation caused by circumferential shaking during the release process.

[0086] In some embodiments, the extension trajectory of the guide portion 26 is consistent with the transition direction of the guide portion 252, ensuring that the chain assembly 3 is circumferentially constrained by the guide portion 26 after being led out from the guide portion 252, avoiding circumferential offset during the transition process, and further improving the straightness of the transmission.

[0087] In some embodiments, the distribution position of the guide portion 26 avoids the setting area of ​​the limiting groove 24 to avoid structural interference; at the same time, the extension direction of the guide portion 26 is parallel to the extension direction of the limiting groove 24, ensuring that the chain group 3 has a more accurate motion trajectory under the dual constraints of "circumferential guidance + trajectory limiting".

[0088] In one embodiment, refer to Figures 2-4 The guide portion 26 includes a guide channel 261 extending in a vertical direction; one end of the guide channel 261 penetrates the bottom wall of the chain box 2, and the other end is connected to the opening area 250 of the semi-enclosed accommodating cavity 25, and the meshing section of the chain group 3 is at least partially located within the guide channel 261.

[0089] In this embodiment, the guide channel 261 extends vertically, and its lower end penetrates the bottom wall of the box body 21 of the chain box 2 to form a through opening. The first end of the chain group 3 extends downward through the through opening and connects with the cover plate 4. The upper end of the guide channel 261 is connected to the opening area 250 of the semi-enclosed accommodating cavity 25. There is no step structure at the connection, so as to achieve a smooth transition.

[0090] In some embodiments, one side wall of the guide channel 261 is seamlessly connected to the inner side wall of a portion of the circumferential guide portion 26 to form an integrated structure of "channel + constraint", which together constitutes a full circumferential constraint on the chain group 3.

[0091] In one embodiment, refer to Figure 3 The semi-enclosed accommodating cavity 25 is provided with an enclosing wall 251 near the receiving portion 23. A guide portion 252 is constructed on the side of the enclosing wall 251 facing the guide portion 26 and the entrance portion 230 of the receiving portion 23. The end face of the guide portion 252 is flush with the horizontal end face of the entrance portion 230 of the receiving portion 23. By limiting the end of the guide portion 252 to be flush with the horizontal end face of the entrance portion 230 of the receiving portion 23, the second end of the chain assembly 3 can be smoothly guided into the receiving portion 23.

[0092] In this embodiment, the semi-enclosed accommodating cavity 25 is provided with an enclosing wall 251 near the receiving portion 23 (the enclosing wall 251 is part of the side wall of the semi-enclosed structure of the accommodating cavity 25 and is integrally formed with the accommodating cavity 25). The enclosing wall 251 is integrally constructed with a guide portion 252 on the side facing the guide portion 26 (the guide portion 26 is arranged in the horizontal direction along the box body 21) and the entrance portion 230 of the receiving portion 23, forming an integrated structure of "enclosing wall 251-guide portion 252-receiving portion 23". This embodiment achieves a seamless and smooth transition of the chain assembly 3 from the opening area 250 to the receiving portion 23 by adding the guide portion 252, thereby improving the smoothness of transmission.

[0093] In one embodiment, refer to Figure 1 The frame 1 also includes a support column 11 extending in a vertical direction, the support column 11 being connected to the support body 10; The support column 11 is provided with a guide rail 111, and the cover plate 4 is provided with a guide block 41 that is adapted to the guide rail 111.

[0094] In this embodiment, in addition to the horizontally arranged support body 10, the frame 1 also includes a support column 11 extending in the vertical direction. The support column 11 and the support body 10 are integrally formed or bolted together to form a portal frame 1 structure of "support body 10-support column 11", which provides a stable support foundation for the lifting and lowering of the cover plate 4.

[0095] A guide rail 111 is vertically arranged on the side of the support column 11 facing the cover plate 4. A guide block 41 is fixedly arranged on the edge of the cover plate 4 corresponding to the position of the support column 11. During the process of the chain group 3 driving the cover plate 4 to rise / fall, the guide block 41 can slide along the trajectory defined by the guide rail 111. The cooperation between the guide rail 111 and the guide block 41 constrains the movement trajectory of the cover plate 4, ensuring precise vertical lifting and lowering.

[0096] In some embodiments, the extension direction of the guide rail 111 is completely parallel to the transmission direction (vertical direction) of the chain assembly 3, ensuring that the cover plate 4 moves in the vertical direction without rotation or tilting under the traction of the chain assembly 3 and the constraint of the guide rail 111, thus ensuring that the cover plate 4 moves smoothly.

[0097] In some embodiments, when the cover plate conveying device is provided with a guide rail 111, for example, when a guide rail 111 and a chain group 3 are provided, the guide rail 111 and the chain group 3 may be symmetrically distributed relative to the geometric center axis of the cover plate 4.

[0098] In this embodiment, the symmetrical distribution makes the traction force application point of the chain group 3 and the guide constraint point of the guide rail 111 symmetrical about the central axis of the cover plate 4, forming a balanced force system, reducing the force deviation of the cover plate 4 in the horizontal direction, and effectively suppressing the problems of "unilateral tilting" and "torsional swaying" during the lifting and lowering process of the cover plate 4.

[0099] In some embodiments, when the cover plate conveying device is provided with a guide rail 111, for example, when a guide rail 111 and a chain group 3 are provided, the guide rail 111 and the chain group 3 may be asymmetrically distributed relative to the geometric center axis of the cover plate 4.

[0100] In this embodiment, the asymmetrical layout can flexibly adjust the installation positions of the guide rail 111 and the chain group 3 according to the layout of the surrounding equipment and pipelines of the process cavity, avoiding interference areas (such as valves, pipeline interfaces, etc.), without needing to reserve extra space for adapting to the symmetrical layout.

[0101] In addition, for scenarios where the edge of the cover plate 4 has irregular structures (such as avoidance gaps or integrated component mounting positions) or uneven weight distribution (such as an observation window or sensor assembly integrated on one side of the cover plate 4), the asymmetrical layout can balance the force on the cover plate 4 by adjusting the position of the guide rail 111 and the chain group 3, thus avoiding attitude loss of control due to structural limitations.

[0102] When the cover plate conveying device is equipped with guide rails 111, the guide rails 111 and the chain groups 3 are distributed around the cover plate 4, and the guide rails 111 and the chain groups 3 are alternately arranged along the circumference of the cover plate 4. For example, when the total number of guide rails 111 and chain groups 3 is at least three, the guide rails 111 and chain groups 3 are alternately arranged along the circumference of the cover plate 4. The overall arrangement of the guide rails 111 and chain groups 3 can be asymmetrical or symmetrical with respect to the geometric central axis of the cover plate 4, or each guide rail 111 can be symmetrical or asymmetrical with respect to the geometric central axis of the cover plate 4, and each chain group 3 can be a hybrid layout design with symmetrical or asymmetrical with respect to the geometric central axis of the cover plate 4.

[0103] In one specific embodiment, refer to Figure 1 The cover plate conveying device includes two sets of guide rails 111 and two sets of chain groups 3. The two chain groups 3 are symmetrically arranged with respect to the geometric center axis of the cover plate 4, and the two sets of guide rails 111 are asymmetrically arranged with respect to the geometric center axis of the cover plate 4.

[0104] In this embodiment, by adopting a hybrid layout design of "two sets of chain groups 3 symmetrically distributed relative to the geometric center axis of the cover plate 4 + two sets of guide rails 111 asymmetrically distributed relative to the center axis", the advantages of force balance of symmetrical distribution and spatial flexibility of asymmetrical distribution are fully integrated.

[0105] Specifically, the symmetrical distribution of chain group 3 ensures force balance and transmission accuracy, while the asymmetrical distribution of guide rail 111 solves the problems of spatial interference and scene adaptation. The synergy of the two improves scene adaptability compared to a fully symmetrical layout (the asymmetrical distribution of the two guide rails 111 allows for flexible adjustment of the installation position according to the layout of pipelines, sensors, maintenance doors and other equipment around the process cavity), and improves transmission accuracy compared to a fully asymmetrical layout.

[0106] In addition, the hybrid layout of dual chains and dual slide rails creates a redundant design. If one set of chains or slide rails fails, the other set can temporarily take on part of the load and guiding function, avoiding direct shutdown of the equipment.

[0107] In one embodiment, the cover plate conveying device includes at least two chain boxes 2 and chain groups 3 corresponding one-to-one with each of the chain boxes 2; The first end of each chain group 3 is used to connect to the cover plate 4, and at least two chain groups 3 are symmetrically distributed about the geometric center axis of the cover plate 4.

[0108] In this embodiment, the symmetrically distributed multi-chain groups 3 form a "multi-point synchronous traction" system, which, together with synchronous drive control (such as gear linkage and servo motor synchronization), reduces the horizontal error and sway amplitude of the cover plate 4 during the movement process, and improves the posture stability.

[0109] In one embodiment, the cover plate conveying device includes at least two chain boxes 2 and chain groups 3 corresponding one-to-one with each of the chain boxes 2; The first end of each chain group 3 is used to connect to the cover plate 4, and at least two of the chain groups 3 are asymmetrically distributed about the geometric center axis of the cover plate 4.

[0110] In this embodiment, at least two chain groups 3 are asymmetrically distributed, allowing for flexible adjustment of the installation positions of the chain box 2 and chain groups 3 based on the layout of surrounding pipelines, valves, sensors, maintenance channels, and other equipment within the process chamber. The asymmetrical layout eliminates the need for additional space to accommodate symmetrical distribution, thus improving space utilization.

[0111] According to a second aspect of this application, a semiconductor thin film deposition apparatus is provided. The semiconductor thin film deposition apparatus includes a cover plate transfer device for a process cavity as described above. In this embodiment, the semiconductor thin film deposition apparatus includes, but is not limited to, etching equipment, chemical vapor deposition (CVD) equipment, or atomic layer deposition (ALD) equipment.

[0112] The above embodiments mainly describe the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be elaborated here.

[0113] While specific embodiments of this application have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of this application. The scope of this application is defined by the appended claims.

Claims

1. A cover plate conveying device for a process cavity, characterized in that, A cover plate conveying device of a process chamber comprises: a frame (1) having a support body (10) above a cover plate (4); a chain box (2) provided on the support body (10), the chain box (2) comprising a box body (21), a drive gear (22) provided on the box body (21), and a receiving portion (23) formed in the box body (21) and located beside the drive gear (22); a chain set (3) engaged with the drive gear (22), a first end of the chain set (3) being used to connect with the cover plate (4), and a second end of the chain set (3) being received in the receiving portion (23) in a state that the drive gear (22) drives the chain set (3) to transmit.

2. The cover plate transfer apparatus of claim 1, wherein, The receiving portion (23) is a cavity structure adapted to the receiving mode of the second end of the chain set (3).

3. The cover plate transfer apparatus of claim 1, wherein, A limiting groove (24) is formed on the chain box (2) and circumferentially arranged outside the receiving portion (23), and one end of the limiting groove (24) has a blocking wall (241); The second end of the chain set (3) is provided with a limiting pin (31) adapted to the limiting groove (24), and the limiting pin (31) is slidably embedded in the limiting groove (24).

4. The cover plate transfer apparatus of claim 1, wherein, The receiving portion (23) is provided with an inlet portion (230), and a horizontal end face of the inlet portion (230) is a planar structure parallel to the transmission direction of the second end of the chain set (3).

5. The cover plate transfer apparatus of claim 1, wherein, A semi-enclosed accommodating cavity (25) is configured on the chain box (2), the drive gear (22) is arranged in the accommodating cavity (25), and the circumferential tooth portion of the drive gear (22) is exposed through the opening area (250) of the semi-enclosed accommodating cavity (25).

6. The cover plate transfer apparatus of claim 5, wherein, The box body (21) is provided with a guide portion (26) extending from the bottom wall of the box body (21) in the circumferential direction of the box body (21) and integrally formed with the receiving portion (23).

7. The cover plate transfer apparatus of claim 6, wherein, The guide portion (26) comprises a guide channel (261) extending in the vertical direction; one end of the guide channel (261) penetrates the bottom wall of the chain box (2), the other end communicates with the opening area (250) of the semi-enclosed accommodating cavity (25), and the engagement section of the chain set (3) is at least partially located in the guide channel (261).

8. The cover plate transfer apparatus of claim 6, wherein, The semi-enclosed accommodating cavity (25) is provided with an enclosing wall (251) close to the receiving portion (23), the enclosing wall (251) is configured with a guide portion (252) on one side of the inlet portion (230) of the receiving portion (23) towards the guide portion (26), and an end face of the guide portion (252) is flush with the horizontal end face of the inlet portion (230) of the receiving portion (23).

9. The cover plate transfer apparatus of any of claims 1-8, wherein, The frame (1) further comprises a support column (11) extending in the vertical direction, and the support column (11) is connected with the support body (10). A guide slide rail (111) is arranged on the support column (11), and a guide block (41) adapted to the guide slide rail (111) is arranged on the cover plate (4).

10. The cover plate transfer apparatus of any of claims 1-8, wherein, The cover plate conveying device comprises at least two chain box bodies (2) and chain groups (3) corresponding to the chain box bodies (2) one by one. First end portions of the chain groups (3) are used to connect with the cover plate (4), and the at least two chain groups (3) are symmetrically distributed about a geometric center axis of the cover plate (4).

11. The cover plate transfer apparatus of any one of claims 1-8, wherein, The cover plate conveying device comprises at least two chain box bodies (2) and chain groups (3) corresponding to the chain box bodies (2) one by one. First end portions of the chain groups (3) are used to connect with the cover plate (4), and the at least two chain groups (3) are symmetrically distributed about a geometric center axis of the cover plate (4).

12. The cover plate transfer apparatus of claim 9, wherein, The guide slide rails (111) and the chain groups (3) are distributed around the cover plate (4), and the guide slide rails (111) and the chain groups (3) are alternately arranged along a circumferential direction of the cover plate (4).

13. A semiconductor thin film deposition apparatus, characterized by comprising: The semiconductor thin film deposition equipment comprises the cover plate conveying device of the process cavity according to any one of claims 1-12.

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