Heater failure protection detection method and system

Abstract

The invention discloses a heater failure protection detection method and system, and belongs to the technical field of servo control. The method mainly comprises the following steps: when the thin film deposition equipment is switched from a maintenance mode to a standard mode, running a heater to an original point; the heater runs from the original point to the lower limiting sensor at a preset speed, a trigger signal of the lower limiting sensor is obtained, and the trigger position of the trigger signal is recorded; comparing the trigger position with the stored fixed position of the lower limit sensor, if an error between the trigger position and the stored fixed position does not meet a preset error threshold value, judging that the lower limit sensor is invalid, and giving an alarm when the lower limit sensor is invalid; and if the error between the maintenance mode and the standard mode meets a preset error threshold value and the heater runs to the process standby position, the thin film deposition equipment is switched from the maintenance mode to the standard mode, and thin film deposition is carried out according to the corresponding process.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision position detection and servo control of semiconductor wafer processing equipment, in particular to a heater failure protection detection method and system, mainly applied to the heater motion control system of CVD, ALD and other thin film deposition equipment. BACKGROUND

[0002] In the existing heater lifting positioning system of semiconductor CVD (chemical vapor deposition) and ALD (atomic layer deposition) and other thin film deposition equipment, the conventional control scheme of servo motor combined with encoder, coupling and discrete position sensor is generally used. In the existing heater lifting positioning system, the servo motor drives the ball screw through the coupling to realize the up-down movement of the heater, and the motor tail encoder is used to collect the motor rotation angle in real time and convert it into the displacement of the heater; in the sensor layout, the existing heater lifting positioning system is provided with independent Home origin sensor, Transfer displacement sensor, Upper limit position sensor and Low limit position sensor, but each sensor is physically separated and has single function, each sensor only outputs the arrival signal of the corresponding point, and the control system only makes simple logical judgment without cross-checking mechanism. And when the equipment is switched from maintenance mode to standard mode, the conventional process only performs the heater Home homing operation, and after homing is completed, it directly enters the process preparation state without including the effectiveness detection and position checking of the lower limit position sensor, but not performing these detections may produce faulty products.

[0003] The existing traditional architecture exposes multiple inherent defects in long-term continuous production. First, the origin sensor and the position sensor are independent of each other without functional reuse and data association, when the coupling appears loose, wear and slip, or the servo encoder has temperature drift or cumulative error, the motor end feedback position and the actual physical position of the heater will deviate obviously, but the control system cannot identify such transmission failure and feedback distortion through a single sensor, so the existing system is prone to cause the position sensor to deviate from the position, directly triggering the position abnormal alarm, causing the equipment to stop and the process to be interrupted. Secondly, each limit sensor only triggers detection at the corresponding position once without redundant checking logic, if the lower limit sensor appears dirty, loose or hardware failure, the system cannot actively identify after mode switching, which will directly lead to the failure of the lower limit protection, thereby causing the safety risk of the heater overstroke impacting the cavity. In addition, the position is detected by a single fixed sensor at a single point without auxiliary monitoring means in the continuous interval, the detection accuracy completely depends on the installation accuracy of the sensor and the hardware reliability, and the position deviation cannot be corrected and traced in real time.

[0004] The above problems of the existing heater lifting positioning system jointly cause inconsistency between the actual position of the heater and the system set position, which not only greatly increases the false alarm rate and failure rate of the equipment, but also directly affects the relative position stability of the wafer and the heater, causes poor process uniformity in the edge area and reduces the inter-chip consistency, thereby reducing the wafer yield and being difficult to meet the long-term operation requirements of advanced processes on the high reliability and high positioning accuracy of the equipment. SUMMARY

[0005] In view of the inconsistency between the actual position of the heater and the system set position of the existing heater lifting positioning system in the prior art, the present application mainly provides a heater failure protection detection method and system.

[0006] In order to achieve the above-mentioned purpose, the first technical solution adopted by the present application is: a heater failure protection detection method, comprising: running the heater to the origin when switching the thin film deposition equipment from the maintenance mode to the standard mode; running the heater from the origin to the lower limit sensor at a predetermined speed, acquiring the trigger signal of the lower limit sensor, and recording the trigger position of the trigger signal; comparing the trigger position with the stored fixed position of the lower limit sensor, if the error between the two does not meet the predetermined error threshold, determining that the lower limit sensor is failed, and performing lower limit sensor failure alarm; if the error between the two meets the predetermined error threshold and the heater runs to the process standby position, the thin film deposition equipment is switched from the maintenance mode to the standard mode, and the thin film deposition according to the corresponding process is started.

[0007] Optionally, the heater failure protection detection method further comprises: acquiring a first displacement value of the encoder when the thin film deposition equipment performs thin film deposition according to the corresponding process and the displacement and origin composite sensor is triggered during the running of the heater; acquiring a second displacement value of the encoder when the heater is displaced and the displacement sensor is triggered; and determining the equipment state of the coupling and the encoder according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor.

[0008] Optionally, determining the equipment state of the coupling or the encoder according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor comprises: when the difference between the first displacement value and the second displacement value and the difference between the physical displacement value are not greater than a predetermined deviation threshold, determining that the equipment state of the coupling and the encoder is normal, and allowing the wafer transfer action to be performed; and when the difference between the first displacement value and the second displacement value and the difference between the physical displacement value are greater than the predetermined deviation threshold, determining that the coupling is faulty or the encoder has accumulated error, and returning the heater to the origin for encoder zero clearing.

[0009] Optionally, the device state of the coupling and the encoder is determined according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor, including: after a predetermined number of wafer transmission actions are completed, the device state of the coupling and the encoder is determined according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor.

[0010] Optionally, the displacement sensor is located at a predetermined position between the displacement and origin composite sensor and the upper limit position sensor.

[0011] Optionally, the predetermined error threshold is 0.03 mm.

[0012] Optionally, the displacement and origin composite sensor internally integrates an origin sensing chip and a transmission position sensing chip, the origin sensing chip and the transmission position sensing chip share a power supply circuit and a signal conditioning circuit, and output two independent origin signals and first displacement value sensing signals.

[0013] Optionally, the predetermined deviation threshold is 0.05 mm.

[0014] Optionally, the heater is operated from the origin to the lower limit position sensor at a predetermined speed, a trigger signal of the lower limit position sensor is acquired, and a trigger position of the trigger signal is recorded, including: the trigger position of the trigger signal is calculated according to the predetermined speed and the time when the trigger signal of the lower limit position sensor is received.

[0015] The second technical solution adopted in the present application is: a heater failure protection detection system, comprising: a heater origin homing module for running the heater to the origin when switching the thin film deposition device from the maintenance mode to the standard mode; a lower limit position correction module for operating the heater from the origin to the lower limit position sensor at a predetermined speed, acquiring a trigger signal of the lower limit position sensor, and recording a trigger position of the trigger signal; a determination module for comparing the trigger position with a stored fixed position of the lower limit position sensor, if the error between the two does not meet a predetermined error threshold, determining that the lower limit position sensor is failed, and performing a lower limit position sensor failure alarm; if the error between the two meets the predetermined error threshold and the heater is operated to the process standby position, the thin film deposition device is switched from the maintenance mode to the standard mode, and starts to deposit the thin film according to the corresponding process.

[0016] The technical solution of the present application can achieve the beneficial effects that the coupling loosening, the encoder error, and the abnormality of the lower limit position sensor such as dirt, loosening or hardware failure can be identified in real time, and the error movement position deviation alarm can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required by the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0018] Figure 1 is a schematic diagram of one specific embodiment of a heater failure protection detection method of the present application; Figure 2 is a schematic diagram of one specific embodiment of a heater failure protection detection system of the present application.

[0019] Through the above drawings, the specific embodiments of the present application have been shown, and will be described in more detail hereinafter. These drawings and textual descriptions are not intended to limit the scope of the concept of the present application by any means, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0020] The preferred embodiments of the present application will be described in detail hereinafter with reference to the drawings, so that the advantages and features of the present application can be more easily understood by those skilled in the art, and the scope of protection of the present application can be more clearly defined.

[0021] It should be noted that, in this document, relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action, without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without more limitations, an element preceded by "comprises... " does not, without more limitations, foreclose the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0022] The application provides a method for sensor function multiplexing, transmission error correction and limit failure protection scene of semiconductor equipment, and advanced integrated circuit chip manufacturing process.

[0023] The sensors of the heater lifting positioning system of the thin film deposition equipment in the prior art are independent without multiplexing and cross checking, the looseness of the coupling and the error of the encoder cannot be identified in real time, and the position deviation is easy to trigger an alarm; after the maintenance mode is switched to the standard mode, there is no lower limit position sensor effectiveness detection, and there is a safety hazard that the lower limit position detection failure is not found; the position sensor only performs single point position detection and cannot perform real-time and accurate monitoring, and therefore, the heater positioning of the heater lifting positioning system is inaccurate, the equipment alarm is frequent, and the operation safety and stability are insufficient. In view of the problems of the prior art, the present application proposes a heater position multi-sensor multiplexing and failure protection detection system, thereby solving the above technical problems.

[0024] In the following, the technical solutions of the present application and how the technical solutions of the present application solve the above technical problems are described in detail with specific embodiments. The specific embodiments described below can be combined with each other to form new embodiments. For the same or similar ideas or processes described in one embodiment, they can not be described again in other embodiments.

[0025] Figure 1 An embodiment of a heater failure protection detection method of the present application is shown.

[0026] Figure 1 The heater failure protection detection method shown includes: step S101, when the thin film deposition equipment is switched from the maintenance mode to the standard mode, running the heater to the origin; step S102, running the heater from the origin to the direction of the lower limit position sensor at a predetermined speed, acquiring the trigger signal of the lower limit position sensor, and recording the trigger position of the trigger signal; step S103, comparing the trigger position with the stored fixed position of the lower limit position sensor, if the error of the two does not satisfy the predetermined error threshold, determining that the lower limit position sensor is failed, and performing lower limit position sensor failure alarm; step S104, if the error of the two satisfies the predetermined error threshold and the heater runs to the process standby position, the thin film deposition equipment is switched from the maintenance mode to the standard mode, and starts to perform thin film deposition according to the corresponding process.

[0027] The specific embodiment reduces the number of independent sensors through function multiplexing, reduces the structural complexity and cost; the double displacement detection mechanism can identify the displacement deviation caused by the encoder and the coupling in real time, so as to control the positioning deviation within ±0.05mm; the lower limit position checking after mode switching can accurately identify sensor failure, looseness and dirtiness and other abnormalities; the whole closed loop detection can reduce the occurrence rate of transmission position abnormal alarm, at the same time, improve the heater repeated positioning accuracy, ensure the wafer transmission and process position consistency, and meet the long-term stable operation requirements of advanced processes.

[0028] Specifically, this application addresses the technical problems of existing heater position detection systems, such as positioning deviation, sensor failure, and limited functionality. It proposes a multi-functional, multi-segment verification, and closed-loop heater position detection and control solution. The system consists of three parts: hardware sensing structure, mode switching control logic, and real-time position detection algorithm. Through functional integration, layout optimization, and software logic coordination, it achieves integrated control of origin, positioning, transmission position detection, limit validity verification, and error correction. Furthermore, this application is directly compatible with 12-inch wafer CVD and ALD equipment without significant modifications to the cavity mechanical structure. The software logic is implemented using PLC ladder diagrams and function blocks, offering strong portability. Ordinary technicians can directly complete hardware assembly and program debugging based on the aforementioned layout dimensions, control flow, and parameter thresholds, making the technology widely applicable.

[0029] In one specific embodiment of this application, the displacement sensor is located at a predetermined position between the displacement and origin composite sensor and the upper limit sensor.

[0030] Specifically, the hardware of the heater position detection system in this application mainly includes a servo drive unit, a ball screw transmission mechanism, a flexible coupling, a displacement and origin composite sensor, an independent displacement sensor, an upper limit sensor, a lower limit sensor, a cavity main control PLC unit, and a human-machine interface (HMI) unit. The servo motor output shaft of the servo drive unit is rigidly connected to the input end of the lifting ball screw transmission mechanism via a flexible coupling. The heater is fixed to the nut of the lifting ball screw transmission mechanism, and the heater rotates with the screw to achieve linear motion on the vertical axis within the cavity. An integrated incremental encoder is connected to the tail of the servo motor, which can provide real-time feedback on the motor's rotation angle and theoretical displacement. The displacement and origin composite sensor, displacement sensor, upper limit sensor, and lower limit sensor are vertically arranged along the heater's movement direction, i.e., along the vertical axis. The signal output of each of these sensors is connected to a high-speed counting module of the PLC, thus forming a physical position detection link independent of the encoder. The PLC communicates with the servo motor via a bus to achieve position data comparison, error judgment, alarm interlocking, and mode switching control.

[0031] In one specific embodiment of this application, the displacement sensor is located at a predetermined position between the displacement and origin composite sensor and the upper limit sensor.

[0032] In the effective stroke interval between the displacement and origin composite sensor and the upper limit position sensor, a dedicated displacement sensor is additionally arranged. The specific installation position of the displacement sensor is determined according to the equipment process displacement station height calibration value. The installation precision should be kept within ±0.01 mm. The dedicated displacement sensor is the main detection point of the heater displacement parameter. The sensor and the transmission position sensing chip in the displacement and origin composite sensor form a double-point detection structure to realize double confirmation of the interval entrance and the target point, thereby determining the physical displacement parameter of the heater. The physical displacement parameter is subjected to difference operation with the theoretical displacement of the encoder, thereby determining the running state of the encoder.

[0033] In a specific embodiment of the present application, the displacement and origin composite sensor internally integrates an origin sensing chip and a transmission position sensing chip. The origin sensing chip and the transmission position sensing chip share a power supply circuit and a signal conditioning circuit, and output two independent origin signals and first displacement value sensing signals.

[0034] Specifically, the displacement and origin composite sensor is based on a traditional photoelectric or magnetoresistive origin sensor and integrates a displacement detection unit, thereby realizing a double-trigger integrated structure of the origin and the displacement. The shell of the sensor is an engineering plastic shielding shell. An origin sensing chip and a transmission position sensing chip are internally integrated. The two chips share a power supply circuit and a signal conditioning circuit, and can output two independent switching signals, which are respectively an origin signal and a first displacement signal.

[0035] The displacement and origin composite sensor is fixed to the side of the heater movement track inside the cavity. The installation tolerance should be controlled within ±0.02 mm corresponding to the standard origin height of the equipment. The sensing surface of the sensor should be parallel to the sensing stop on the heater. The sensing gap is set to 0.5-1.0 mm, thereby ensuring the triggering reliability.

[0036] The displacement and origin composite sensor retains the traditional origin homing reference function while multiplexing the displacement pre-detection point. When the heater passes through the corresponding position detected by the sensor, the origin confirmation and the first displacement signal are synchronously output, thereby providing a reference for subsequent position comparison.

[0037] In a specific embodiment of the present application, the upper limit position sensor is arranged at the highest point of the movement stroke as the upper stroke protection. The lower limit position sensor is arranged at the lowest point of the stroke as the lower stroke protection. Both of them adopt normally closed safety sensors. The response time of both of them should be not greater than 1 ms, and the signal delay should be not greater than 0.5 ms, thereby avoiding triggering lag under high-speed movement. The sensor cables of the upper limit position sensor and the lower limit position sensor need to adopt a shielded twisted pair mode and need to be routed along the cavity metal wire slot, thereby reducing the influence of servo electromagnetic interference on the signal.

[0038] In one embodiment of the present application, the heater is run at a predetermined speed from the original point to the lower limit sensor, the trigger signal of the lower limit sensor is acquired, and the trigger position of the trigger signal is recorded, including: calculating the trigger position of the trigger signal according to the predetermined speed and the time when the trigger signal of the lower limit sensor is received.

[0039] In one embodiment of the present application, the predetermined error threshold is 0.03mm.

[0040] Specifically, when the thin film deposition equipment is switched from the maintenance mode to the standard mode, first, the PLC issues a command to return to the original point, at this time the servo motor drives the heater to run at a low speed of 5mm / s to the original point, and the displacement and original point composite sensor will be triggered during the running process, at this time the sensor sends the detected signal to the PLC, and then the PLC controls the heater to run at a low speed of 0.5mm / s in reverse to accurately lock the original point position, and the encoder is zeroed when the heater is accurately positioned at the original point.

[0041] Then, after the heater completes the original point calibration, the PLC automatically drives the heater to run at a speed of 3mm / s to the lower limit sensor, and the trigger signal of the lower limit sensor is collected in real time, after receiving the trigger signal of the lower limit sensor, the actual trigger position of the lower limit sensor is calculated according to the running speed and running time of the heater, and the actual trigger position is compared with the position of the lower limit sensor stored by the system to determine the state of the lower limit sensor, at this time the allowed position deviation range is set to not more than ±0.03mm. And when the calculated deviation is within the deviation threshold, it is determined that the lower limit sensor is normal, the position of the lower limit sensor is recorded, the heater is retreated to the process standby position within the safe interval, and the heater position detection system unlocks the process authority and completes the mode switching; if the calculated deviation exceeds the deviation threshold or there is no signal trigger, it is determined that the lower limit sensor is invalid, a hardware fault alarm of the limit sensor failure is output, and the thin film deposition equipment is prohibited from entering the standard mode, and the sensor installation and hardware state are forced to be checked.

[0042] The above steps realize the effectiveness of the online verification of the lower limit sensor by actively searching for the lower limit sensor and making corresponding threshold determination, and eliminate the risk of overstroke caused by the failure of the lower limit sensor without identification.

[0043] In one embodiment of the present application, the heater failure protection detection method further comprises: obtaining a first displacement value of the encoder when the thin film deposition device is performing thin film deposition according to a corresponding process and the heater is running, and the displacement and origin composite sensor is triggered; obtaining a second displacement value of the encoder when the heater is displaced and the displacement sensor is triggered; and determining the device state of the coupling and the encoder according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor.

[0044] In one embodiment of the present application, the determination of the device state of the coupling or the encoder according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor comprises: when the difference between the first displacement value and the second displacement value and the difference between the physical displacement value are not greater than a predetermined deviation threshold, determining that the device state of the coupling and the encoder is normal, and allowing the wafer transfer action to be performed; and when the difference between the first displacement value and the second displacement value and the difference between the physical displacement value are greater than the predetermined deviation threshold, determining that the coupling is faulty or the encoder has accumulated errors, and causing the heater to return to the origin for encoder zeroing processing. Further, the predetermined deviation threshold is 0.05 mm.

[0045] In one embodiment of the present application, the determination of the device state of the coupling or the encoder according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor comprises: after a predetermined number of wafer transfer actions are completed, determining the device state of the coupling and the encoder according to the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor.

[0046] Specifically, when the thin film deposition equipment performs thin film deposition according to the corresponding process, first, the inlet pre-detection is performed, that is, when the heater moves to the displacement sensor, the heater needs to pass through the displacement and origin composite sensor first. The transmission position sensing chip built in the sensor outputs a first displacement trigger signal. At this time, the PLC records the displacement value corresponding to the encoder after receiving the first displacement trigger signal, and takes the encoder displacement value as the starting reference of the displacement interval recorded by the encoder. Then, the target point fine detection is performed, that is, the heater is moved to the corresponding displacement station at the position of the independent displacement sensor between the upper limit position sensor and the origin. The independent displacement sensor outputs a second displacement trigger signal of the heater in place. The PLC synchronously reads the value of the encoder at this time after receiving the second displacement trigger signal. The difference between the first displacement value and the second displacement value of the encoder is calculated to obtain the theoretical displacement value of the heater recorded by the encoder. The real-time difference value calculation is performed between the theoretical displacement value of the heater and the physical displacement position calculated through the independent displacement sensor position and the origin. Then, it is judged whether the calculated difference value meets the preset deviation threshold value. At this time, the deviation threshold value is set to not more than ±0.05mm. If the calculated difference value is within the deviation threshold value range, it is determined that the position is normal, and the wafer transmission action is allowed to be performed. If the calculated difference value exceeds the deviation threshold value range, it is determined that there is a problem of loose or slipping of the coupling of the wafer deposition equipment, or there is a problem of encoder cumulative error. At this time, the system immediately stops the movement of the heater and other devices, and re-executes the correction processing of returning to the origin to correct the encoder offset and avoid the position deviation causing the transmission alarm.

[0047] In particular, in order to ensure the position accuracy during the deposition process, a cyclic verification processing is performed when the wafer transmission action is performed, that is, after a predetermined number of wafer transmission actions are completed, the system automatically performs a full range position comparison from the origin to the displacement station, thereby continuously monitoring the state of the transmission mechanism and realizing early fault warning.

[0048] The specific embodiment realizes the multiplexing of the origin positioning and the transmission position pre-detection by integrating the displacement detection function in the displacement and origin composite sensor, without adding a new sensor. The displacement signal output by the displacement and origin composite sensor and the displacement signal of the independent displacement sensor are used to construct a verification reference independent of the encoder, so as to realize real-time identification of the loose coupling or the encoder error and avoid the displacement position deviation alarm. Meanwhile, the mode switching logic is optimized. In the process of maintaining the standard mode of the mode switching, after the heater returns to the origin, a lower limit sensor active search and position comparison step is newly added to accurately determine the effectiveness of the lower limit position sensor and eliminate the risk of overstroke caused by failure. Meanwhile, the independent displacement sensor is added between the origin and the upper limit position sensor to form a double-point cooperative detection with the displacement and origin composite sensor, thereby realizing the full range accurate monitoring and error correction of the displacement position, improving the positioning accuracy and process stability, and reducing the equipment failure rate.

[0049] Figure 2 Embodiments of a heater failure protection detection system are shown.

[0050] In Figure 2 In the embodiments shown, the heater failure protection detection system mainly comprises: a heater origin homing module 201, configured to run the heater to an origin point when switching the thin film deposition device from a maintenance mode to a standard mode; a lower limit position correction module 202, configured to run the heater from the origin point to a lower limit position sensor at a predetermined speed, and obtain a trigger signal of the lower limit position sensor and record a trigger position of the trigger signal; a judgment module 203, configured to compare the trigger position with a stored fixed position of the lower limit position sensor, if an error between the two does not satisfy a predetermined error threshold, determine that the lower limit position sensor is failed, and perform a lower limit position sensor failure alarm; if the error between the two satisfies the predetermined error threshold and the heater runs to a process standby position, switch the thin film deposition device from the maintenance mode to the standard mode, and start thin film deposition according to a corresponding process.

[0051] The heater failure protection detection system provided by the present application can be used to perform the heater failure protection detection method described in any of the above embodiments, and has similar implementation principles and technical effects, which will not be described here.

[0052] In the several embodiments provided by the present application, it should be understood that the disclosed system and method can be implemented in other ways. For example, the division of the units described above is only a logical function division, and other division manners can be adopted during actual implementation, for example, a plurality of units or components can be combined or integrated into another device, or some features can be ignored or not executed.

[0053] The above only describes some embodiments of the present application, and does not limit the patent scope of the present application, and any equivalent structure transformation using the content of the specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection scope of the present application.

Claims

1. A method for detecting heater failure protection, characterized in that, include: When switching the thin film deposition equipment from maintenance mode to standard mode, the heater is returned to its origin. The heater is moved from the origin to the lower limit sensor at a predetermined speed, and the trigger signal of the lower limit sensor is acquired and the trigger position of the trigger signal is recorded. The trigger position is compared with the fixed position of the stored lower limit sensor. If the error between the two does not meet the predetermined error threshold, the lower limit sensor is determined to be faulty, and a lower limit sensor failure alarm is triggered. If the error between the two meets the predetermined error threshold and the heater is in the process standby position, the thin film deposition equipment switches from the maintenance mode to the standard mode and begins to perform thin film deposition according to the corresponding process.

2. The heater failure protection detection method according to claim 1, characterized in that, Also includes: When the thin film deposition equipment performs thin film deposition according to the corresponding process and the heater is running, the displacement and origin composite sensor is triggered, and the first displacement value of the encoder is obtained; When the heater shifts and triggers the shift sensor, the second displacement value of the encoder is acquired; The device status of the coupling and the encoder is determined based on the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor.

3. The heater failure protection detection method according to claim 2, characterized in that, The step of determining the equipment status of the coupling or the encoder based on the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor includes: When the difference between the first displacement value and the second displacement value is not greater than the difference between the physical displacement value and the first displacement value, the device status of the coupling and the encoder is determined to be normal, and the wafer transfer operation is allowed. If the difference between the first displacement value and the second displacement value, and the difference between the first displacement value and the physical displacement value, are greater than a predetermined deviation threshold, then the coupling is determined to be faulty or the encoder has accumulated errors, and the heater is reset to the origin to perform encoder zeroing.

4. The heater failure protection detection method according to claim 2, characterized in that, The step of determining the equipment status of the coupling and the encoder based on the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor includes: After completing a predetermined number of wafer transfer operations, the device status of the coupling and the encoder is determined based on the first displacement value, the second displacement value, and the physical displacement value between the displacement and origin composite sensor and the displacement sensor.

5. The heater failure protection detection method according to claim 2, characterized in that, The displacement sensor is located at a predetermined position between the displacement and origin composite sensor and the upper limit sensor.

6. The heater failure protection detection method according to claim 1, characterized in that, The predetermined error threshold is 0.03 mm.

7. The heater failure protection detection method according to claim 2, characterized in that, The displacement and origin composite sensor integrates an origin sensing chip and a transmission position sensing chip. The origin sensing chip and the transmission position sensing chip share a power supply circuit and a signal conditioning circuit, and output independent origin signals and first displacement value sensing signals.

8. The heater failure protection detection method according to claim 3, characterized in that, The predetermined deviation threshold is 0.05 mm.

9. The heater failure protection detection method according to claim 1, characterized in that, The step of moving the heater from the origin towards the lower limit sensor at a predetermined speed, acquiring the trigger signal from the lower limit sensor, and recording the trigger position of the trigger signal includes: The trigger position of the trigger signal is calculated based on the predetermined speed and the time when the trigger signal of the lower limit sensor is received.

10. A heater failure protection detection system, characterized in that, include: The heater origin reset module is used to return the heater to its origin when switching the thin film deposition equipment from maintenance mode to standard mode. The lower limit correction module is used to move the heater from the origin to the lower limit sensor at a predetermined speed, acquire the trigger signal of the lower limit sensor, and record the trigger position of the trigger signal. The judgment module is used to compare the trigger position with the fixed position of the stored lower limit sensor. If the error between the two does not meet the predetermined error threshold, the lower limit sensor is determined to be faulty and a lower limit sensor failure alarm is triggered. If the error between the two meets the predetermined error threshold and the heater is running to the process standby position, the thin film deposition equipment switches from the maintenance mode to the standard mode and starts to perform thin film deposition according to the corresponding process.

Images