Neon and helium producing device
By designing a neon-helium gas production device in a small-to-medium-sized air separation unit, and utilizing multi-stage purification and cold source pressure control, the problem of unsatisfactory recycling of neon and helium resources has been solved, achieving efficient and low-cost neon-helium gas extraction.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-03-04
- Publication Date
- 2026-04-10
AI Technical Summary
The recovery and utilization of neon and helium resources in small and medium-sized air separation units is not ideal, resulting in low concentrations of rare gas components, making them difficult to utilize efficiently, leading to resource waste and increased production costs.
A neon-helium gas production device was designed, including a cold box, a primary neon-helium tower, a secondary neon-helium tower, and a main heat exchanger. Through multi-stage purification and cold source pressure control, the extraction rate and purity of neon-helium gas are improved, while the energy consumption of the cold source is reduced.
It improves the extraction rate and purity of neon and helium, reduces production costs, decreases the energy consumption of nitrogen compressors, and achieves efficient recycling of rare gases.
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Figure CN121829036A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of air separation and preparation technology, specifically to a neon-helium gas production apparatus. Background Technology
[0002] Air separation units are key industrial facilities that separate air into products such as oxygen, nitrogen, and argon through methods such as cryogenic distillation. In recent years, with the rapid development of downstream industries such as metallurgy, petrochemicals, coal chemicals, and electronics, the demand for industrial gases has been increasing daily, driving air separation units towards large-scale and high-efficiency designs. Ultra-large air separation units have become the mainstream trend. Under this trend, due to the enormous scale of air separation units and their massive feed air processing capacity, extracting higher-value rare gases, especially neon and helium, from the air has become economically feasible. Therefore, configuring corresponding extraction units in ultra-large air separation units to obtain crude neon-helium mixtures has become a common and important technological trend. This not only improves the overall efficiency of air separation units but also enhances the security of this strategic resource of rare gases.
[0003] However, in stark contrast to large-scale air separation plants, the recovery and utilization of neon and helium resources in numerous small and medium-sized air separation plants that have been built and are in operation is far from ideal. Due to their limited scale, these plants handle smaller volumes of raw air, resulting in lower concentrations of rare gas components such as neon and helium within the plant. This makes it difficult to create effective cold source recovery conditions, hindering precise control and efficient utilization of cooling capacity. Consequently, the nitrogen compressor must bear a greater load to maintain system operation, leading to higher power consumption and increased overall production costs. Therefore, non-condensable gases rich in neon and helium (usually from the main condenser-evaporator) are typically simply discharged directly into the atmosphere as waste gas.
[0004] This disposal method results in a huge waste of non-condensable gases rich in neon and helium. Neon and helium play an irreplaceable role in high-end manufacturing, aerospace, scientific research and medical treatment, and the electronics industry. Helium, in particular, is a non-renewable strategic resource, and its supply has long relied on imports. Directly releasing neon and helium that could have been enriched and recovered in small air separation units not only means a loss of economic value but also an inefficient use of scarce resources.
[0005] Therefore, there is a need to design an economical and efficient crude neon-helium gas processing unit suitable for existing small and medium-sized air separation units. Summary of the Invention
[0006] The purpose of this invention is to provide a neon-helium gas production device to solve the problem in the prior art that existing small and medium-sized air separation devices cannot recover and utilize neon-helium gas.
[0007] To achieve the above objectives, the present invention proposes a neon-helium gas production apparatus, comprising a cold box, a primary neon-helium tower, a secondary neon-helium tower, and a main heat exchanger disposed within the cold box; the main heat exchanger is provided with an inlet pipe and a heat exchange outlet pipe, the heat exchange outlet pipe being connected to the primary neon-helium tower, and the gas source flowing in the inlet pipe being non-condensable gas generated by an air separation unit; the primary neon-helium tower, the secondary neon-helium tower, and the main heat exchanger are provided with a cold source transmission pipe assembly; the primary neon-helium tower is also provided with a connecting pipe connected to the secondary neon-helium tower; the cold source transmission pipe assembly is provided with a pressure control component for controlling the cold source pressure.
[0008] Optionally, the secondary neon-helium tower is equipped with a neon-helium product pipe; the raw material gas enters the main heat exchanger through the inlet pipe, then enters the primary neon-helium tower for preliminary purification, and then enters the secondary neon-helium tower for further purification through the connecting pipe. At the same time, the cold source enters from the primary neon-helium tower through the cold source transmission pipe group, and then passes through the secondary neon-helium tower and the main heat exchanger.
[0009] Optionally, a primary condenser-evaporator is provided on the primary neon-helium tower, and the top of the primary neon-helium tower is connected to the primary condenser-evaporator.
[0010] Optionally, the secondary neon-helium tower is equipped with a secondary condenser-evaporator, and the top of the primary neon-helium tower is connected to the secondary condenser-evaporator.
[0011] Optionally, one end of the connecting pipe is connected to the primary condenser-evaporator, and the other end is connected to the secondary neon-helium tower.
[0012] Optionally, the cold source transmission pipe assembly includes a main cold source pipe, a first cold source inlet pipe, a second cold source inlet pipe, a first cold source outlet pipe, and a second cold source outlet pipe; the main cold source pipe is connected to the first-stage condenser-evaporator in the first-stage neon-helium tower; both ends of the first cold source inlet pipe are connected to the second cold source inlet pipe and the first-stage condenser-evaporator in the first-stage neon-helium tower, respectively; both ends of the second cold source inlet pipe are connected to the second-stage condenser-evaporator in the first-stage neon-helium tower and the second-stage neon-helium tower, respectively; the first cold source outlet pipe is connected to the first-stage neon-helium tower and undergoes heat exchange through the main heat exchanger; the second cold source outlet pipe is connected to the second-stage neon-helium tower and undergoes heat exchange through the main heat exchanger; a pressure control component is installed on the first cold source inlet pipe and the second cold source inlet pipe.
[0013] Optionally, the pressure control assembly includes a first pressure regulating valve disposed on the first cold source inlet pipe and a second pressure regulating valve disposed on the second cold source inlet pipe.
[0014] Optionally, the connection point between the first cold source inlet pipe and the second inlet pipe is located between the first-stage neon-helium tower and the second pressure regulating valve; the connection point between the first-stage cold source outlet pipe and the main cold source pipe is located at the liquid outlet end of the first pressure regulating valve.
[0015] Optionally, the operating pressure of the primary condenser-evaporator is greater than that of the secondary condenser-evaporator.
[0016] Optionally, the evaporation-side pressure of the first-stage condenser-evaporator is greater than that of the second-stage condenser-evaporator.
[0017] Optionally, the evaporation side pressure of the primary condenser-evaporator is 3-3.5 bar, and the evaporation side pressure of the secondary condenser-evaporator is 1.2-1.5 bar.
[0018] Optionally, the second cold source inlet pipe is connected to the bottom of the first-stage neon-helium tower.
[0019] Optionally, the cold source flow rate in the primary cold source pipe is greater than the cold source flow rate in the secondary cold source inlet pipe.
[0020] Optionally, a nitrogen compressor is connected to the end of the first cold source outlet pipe, and a third pressure regulating valve is also provided on the first cold source outlet pipe, which is located at the inlet of the nitrogen compressor.
[0021] Optionally, a fourth pressure regulating valve is provided on the intake pipe, through which the air source in the intake pipe enters the main heat exchanger.
[0022] Optionally, a first temperature element and a second pressure transmitter are provided on the outlet pipe of the second cold source.
[0023] Optionally, a first pressure transmitter is installed on the outlet pipe of the first cold source.
[0024] Optionally, a second temperature element is provided on the secondary neon-helium tower.
[0025] Optionally, a third temperature element is provided on the connecting pipe.
[0026] Optionally, a fourth temperature element is provided on the primary neon-helium tower.
[0027] Compared with the prior art, the present invention provides a neon-helium gas production apparatus, which has the following beneficial effects: This neon-helium gas production device uses the neon-helium-rich non-condensable gas emitted from the air separation unit as the production gas source. This not only ensures a sufficient gas source but also results in a high neon-helium content, thereby increasing the extraction rate and output of neon-helium gas. Furthermore, this application uses a primary neon-helium tower and a secondary neon-helium tower to purify the neon-helium gas multiple times, thereby increasing the purity of the neon-helium gas. In addition, by setting up the pressure control component, the pressure of the cold source can be adjusted and controlled, increasing the pressure after the cold source leaves the cold box, reducing the energy consumption required by the subsequent nitrogen compressor, and lowering the extraction cost. Attached Figure Description
[0028] Figure 1 This is a schematic diagram of the neon-helium gas production device of the present invention.
[0029] Figure 2 This is a schematic diagram of an existing neon-helium gas production device.
[0030] Figure 3 This is a schematic diagram of the nitrogen compressor power obtained from a simulation of an existing neon-helium gas production device.
[0031] Figure 4 This is a schematic diagram of the nitrogen compressor power obtained by simulation in this invention.
[0032] The diagram is labeled as follows: 1. Cold box; 2. Primary neon-helium tower; 20. Connecting pipe; 201. Third temperature element; 21. Primary condenser-evaporator; 22. Fourth temperature element; 3. Secondary neon-helium tower; 30. Neon-helium product pipe; 31. Secondary condenser-evaporator; 32. Second temperature element; 4. Main heat exchanger; 41. Inlet pipe; 411. Fourth pressure regulating valve; 42. Heat exchange outlet pipe; 5. Cold source transmission pipe assembly; 51. Main cold source pipe; 52. First cold source inlet pipe; 53. Second cold source inlet pipe; 54. First cold source outlet pipe; 541. Third pressure regulating valve; 542. First pressure transmitter; 55. Second cold source outlet pipe; 551. First temperature element; 552. Second pressure transmitter; 6. Press assembly; 61. First pressure regulating valve; 62. Second pressure regulating valve; 7. Nitrogen compressor. Detailed Implementation
[0033] The invention will now be described in detail with reference to the accompanying drawings and specific embodiments. Many specific details are set forth in the following description to provide a thorough understanding of the invention. However, the invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.
[0034] The neon-helium gas generating apparatus of this application can be used for the preliminary generation of neon-helium gas, and of course it can also be used in other similar application scenarios. The neon-helium gas generating apparatus is described in detail below.
[0035] See appendix Figure 1 The diagram shows a preferred embodiment of the neon-helium gas production apparatus of this application. The apparatus includes a cold box 1, a primary neon-helium tower 2, a secondary neon-helium tower 3, and a main heat exchanger 4, all housed within the cold box 1. The main heat exchanger 4 has an inlet pipe 41 and a heat exchange outlet pipe 42, which is connected to the primary neon-helium tower 2. The gas flowing through the inlet pipe 41 is a non-condensable gas rich in neon and helium, produced by an air separation unit and to be discharged into the air. The primary neon-helium tower 2, the secondary neon-helium tower 3, and the main heat exchanger 4 are equipped with a cold source transmission pipe assembly 5, which includes a pressure control component 6 for controlling the cold source pressure. The primary neon-helium tower 2 has a connecting pipe 20 connected to the secondary neon-helium tower 3. The secondary neon-helium tower 3 has a neon-helium gas product pipe 30. The connecting pipe 20 has a third temperature element 201.
[0036] This application utilizes a cold box 1 to control the ambient temperature of the main heat exchanger 4, the primary neon-helium tower 2, the secondary neon-helium tower, and the cold source transmission pipe assembly 5, preventing excessively high ambient temperatures from affecting heat exchange efficiency. The cold box 1 can be a vacuum-insulated cold box or a perlite-insulated cold box. The primary neon-helium tower 2 performs the first purification of neon-helium-rich non-condensable gases. The secondary neon-helium tower 3 further purifies the gas obtained from the first purification, increasing the purity of the neon-helium product. The main heat exchanger 4 cools the non-condensable gases entering the cold box 1 before entering the primary neon-helium tower 2, reducing the purification difficulty of the subsequent primary neon-helium tower 2. The cold source transmission pipe assembly 5 transmits the cold source into the primary neon-helium tower 2 and between the secondary neon-helium tower 3 and the main heat exchanger 4. The pressure control assembly 6 controls the pressure of the cold source (liquid nitrogen) entering each of the primary neon-helium towers 2 and 3, thereby improving the heat exchange efficiency. It should be noted that non-condensable gases contain approximately 99.82% nitrogen, with the remainder being 0.12% neon, 0.045% helium, and 50 ppm hydrogen, etc.
[0037] See appendix Figure 1 As shown in this application, the first-stage neon-helium tower 2 is equipped with a first-stage condenser-evaporator 21 connected to the top of the first-stage neon-helium tower 2; the second-stage neon-helium tower 3 is equipped with a second-stage condenser-evaporator 31 connected to the top of the second-stage neon-helium tower 3; wherein, the two ends of the connecting pipe 20 are respectively connected to the condenser-evaporator 21 and the second-stage neon-helium tower 3, and the neon-helium gas product pipe 30 is connected to the second-stage condenser-evaporator 31; the first-stage neon-helium tower 2 is equipped with a fourth temperature element 22; the second-stage neon-helium tower 3 is equipped with a second temperature element 32.
[0038] This application uses a primary condenser-evaporator 21 to reheat the non-condensable gas in the primary neon-helium tower 2, thereby purifying the neon-helium gas; and uses a secondary condenser-evaporator 31 to further purify the purified neon-helium gas in the secondary neon-helium tower 3 to obtain crude neon-helium gas.
[0039] See appendix Figure 1 As shown, in this application, the cold source pipe assembly 5 includes a main cold source pipe 51 for conveying external cold source into the first-stage neon-helium tower 2, a second cold source inlet pipe 53 with one end connected to the bottom of the first-stage neon-helium tower 2 and the other end connected to the second-stage condenser-evaporator 31, a first cold source inlet pipe 52 with both ends connected to the main cold source pipe 51 and the second cold source inlet pipe 53 respectively, a first cold source outlet pipe 54 set at the top of the first-stage neon-helium tower 2, and a second cold source outlet pipe 55 set at the top of the second-stage neon-helium tower 3. The second cold source outlet pipe 55 is provided with a first temperature element 551 and a second pressure transmitter 552. In this application, all temperature elements can be temperature sensors, thermocouples, or resistance temperature detectors. The first cold source outlet pipe 54 is provided with a first pressure transmitter 542.
[0040] This application utilizes a first cold source outlet pipe 54 to transport nitrogen gas generated from heat exchange at the top of the primary neon-helium tower 2 into the main heat exchanger 4. This process further heats the non-condensable gas within the main heat exchanger 4, lowering its temperature. The nitrogen gas, after heat exchange, is then transported out of the cold box 1 and into the nitrogen compressor 7. A second cold source outlet pipe 55 transports nitrogen gas generated from heat exchange at the top of the secondary neon-helium tower 3 into the main heat exchanger 4. This, combined with the cold source input from the first cold source outlet pipe 54, ensures sufficient cold source heat exchange for the non-condensable gas within the main heat exchanger 4, thereby lowering its temperature and reducing the pressure in the primary neon-helium tower 2. A first temperature element 551 detects the temperature of the second cold source outlet pipe 55 and sends the data to an externally connected controller. A first pressure transmitter 542 and a second pressure transmitter 552 monitor the pressures of both cold source outlet pipes 54 and 55 and send the pressure signals to the externally connected controller.
[0041] See appendix Figure 1 As shown, in this application, the pressure control component 6 includes a first pressure regulating valve 61 disposed on the first cold source inlet pipe 52 and a second pressure regulating valve 62 disposed on the second cold source inlet pipe 53; wherein, the connection position between the first cold source inlet pipe 52 and the second inlet pipe 53 is located between the first-stage neon-helium tower 2 and the second pressure regulating valve 62; the connection position between the first-stage cold source outlet pipe 54 and the main cold source pipe 51 is located at the liquid outlet end of the first pressure regulating valve 61.
[0042] This application uses a first pressure regulating valve 61 to control the pressure when mixing with the main cold source pipe 51, ensuring that it can smoothly and safely rejoin the main flow path, avoiding impact on the condenser and evaporator and the entire system, preventing instability or even danger, and also regulating the cold source pressure entering the first-stage condenser and evaporator 21; and uses a second pressure regulating valve 62 to regulate the pressure entering the second-stage condenser and evaporator 31. By regulating the cold source pressure, the pressure exiting the cold box 1 is ensured, reducing the pressure of the nitrogen compressor 7 and lowering the energy consumption of the nitrogen compressor 7.
[0043] See appendix Figure 1As shown, in this application, the operating pressure of the primary condenser-evaporator 21 is greater than the operating pressure of the secondary condenser-evaporator 31; the evaporation side pressure of the primary condenser-evaporator 21 is greater than the evaporation side pressure of the secondary condenser-evaporator 31; the evaporation side pressure of the primary condenser-evaporator 21 is controlled to be 3-3.5 bar by adjusting the opening of 61, at which time the temperature difference between the third temperature element 201 and the fourth temperature element 22 is maintained at a minimum of 1 K for energy saving; the evaporation pressure of the secondary condenser-evaporator 31 is controlled to be 1.2-1.5 bar by adjusting the opening of 62, at which time the temperature difference between the first temperature element 551 and the second temperature element 32 is maintained at 1 K; the cold source flow rate of the primary cold source pipe 52 is greater than the cold source flow rate of the secondary cold source pipe 53.
[0044] See appendix Figure 1 As shown in this application, the end of the first cold source outlet pipe 54 is connected to a nitrogen compressor 7, and the first cold source outlet pipe 54 is also provided with a third pressure regulating valve 541, which is located at the inlet of the nitrogen compressor 7; the air inlet pipe 41 is provided with a fourth pressure regulating valve 411, and the air source in the air inlet pipe 41 enters the main heat exchanger 4 after passing through the fourth pressure regulating valve 411.
[0045] This application uses a third pressure regulating valve 541 to regulate the nitrogen pressure entering the nitrogen compressor 7, thereby reducing the operating pressure of the nitrogen compressor 7 and reducing its energy consumption. The fourth pressure regulating valve 411 controls the pressure of the non-condensable gas entering the compressor, thereby increasing the pressure of the non-condensable gas and making it easier for the non-condensable gas to be separated at low temperatures.
[0046] See appendix Figure 1 As shown, the neon-helium gas generating apparatus is used in this application as follows: The non-condensable gas containing neon and helium produced by the air separation unit enters the cold box 1 through the inlet pipe 41. Within the cold box 41, the pressure is regulated by the fourth pressure regulating valve 411, resulting in neon and helium gas at a pressure of 4-4.5 barg. This gas then enters the main heat exchanger 4 and exchanges heat with the nitrogen cold source supplied to the main heat exchanger 4 by the first cold source storage tank 54 and the second cold source outlet pipe 55. After passing through the main heat exchanger 4, the non-condensable gas enters the lower half of the first-stage neon-helium tower 2. Simultaneously, liquid nitrogen, serving as the cold source, is input into the first-stage condenser-evaporator 21 through the main cold source pipe 51, exchanging heat with the gas in the first-stage neon-helium tower 2 to purify the neon and helium. The purified neon-helium gas then enters the second-stage neon-helium tower 3 through the connecting pipe 20. Meanwhile, the liquid nitrogen, after heat exchange, enters the second cold source inlet pipe 53 from the bottom of the first-stage neon-helium tower 2. Part of the liquid nitrogen cold source enters... The liquid nitrogen enters the first cold source inlet pipe 52, and then, after being pressurized by the first pressure regulating valve 61, mixes with the liquid nitrogen cold source in the main cold source pipe 51 and re-enters the first-stage cold source evaporator 21 for heat exchange. Part of the cold source enters the second-stage cold source evaporator 31 after being pressurized by the second pressure regulating valve 62 along the second cold source inlet pipe 53. At the same time, the nitrogen formed after heat exchange enters the main heat exchanger 4 through the first cold source outlet pipe 54 for heat exchange. The neon-helium gas is further purified in the second-stage neon-helium tower 3. The purified crude neon-helium gas is discharged through the neon-helium gas product pipe 30 and stored in the storage tank. The nitrogen gas after heat exchange in the second-stage cold source evaporator 31 enters the main heat exchanger for heat exchange through the second cold source outlet pipe 55. After heat exchange in the main heat exchanger 4 through the first cold source outlet pipe 54, the nitrogen gas is pressurized by the third pressure regulating valve 541 and then enters the nitrogen compressor 7 for pressurization.
[0047] It should be specifically noted that in this application, the first temperature element 551, the second temperature element 32, the third temperature element 201, the fourth temperature element 22, the first pressure transmitter 542, and the second pressure transmitter 552 are all connected to an external controller. The controller reads the data from each element and calculates the temperature difference between the second temperature element 32 and the first temperature element 551, maintaining the temperature difference at 1K. That is, the temperature sensed by the first temperature element 551 is lower than the temperature sensed by the second temperature element 32, and the temperature difference is maintained at 1K. When the temperature difference is too large, the opening of the second pressure regulating valve 62 is reduced; when the temperature difference is too large, the opening of the second pressure regulating valve 62 is reduced. Increase the opening of the second pressure regulating valve 62; the temperature difference between the third temperature element 201 and the fourth temperature element 22 is 1K, that is, the temperature sensed by the third temperature element 201 is lower than the temperature sensed by the fourth temperature element 22. When the temperature difference is too large, the opening of the first pressure regulating valve 61 is reduced; if the temperature difference is too small, the opening of the first pressure regulating valve 61 is increased. In addition, the controller controls the opening of the pressure regulating valves on the first cold source outlet pipe 54 and the second cold source outlet pipe 55 by sensing the pressure of the first pressure transmitter 542 and the second pressure transmitter 552, so that the discharge pressure reaches the specified pressure, thereby reducing the energy consumption of subsequent equipment such as nitrogen compressors.
[0048] Example 2 See appendix Figure 1 — Figure 4 As shown, using the same raw material non-condensable gas, the existing device is compared with the device of this application. The composition of the raw material non-condensable gas is: nitrogen content 99.82%, helium content 445ppm, neon content 1200ppm, hydrogen content 50ppm, and the rest are trace components, with a pressure of 5 bara.
[0049] The comparison results are shown in Table 1: Table 1 Comparison between this application and existing devices
[0050] The existing equipment delivers nitrogen from the cold box at a pressure of 1.5 bara, which is then compressed to 5.1 bara by a nitrogen compressor before being sent to the customer's website. This requires a nitrogen compressor power of 87.3 kW (based on Aspen's calculations) and a water consumption of 10 t / h. The nitrogen compressor of this invention has an inlet pressure of 3.5-3.6 bara and an outlet pressure of 5.1 bara. The required compressor power is 22.4 kW (as calculated by Aspen), and the water consumption is 2.5 t / h. The above embodiments are illustrative of this application and are not intended to limit this application. Any simple modifications to this application are within the protection scope of this application.
Claims
1. A neon-helium gas generating apparatus, characterized in that, It includes a cold box (1), a primary neon-helium tower (2), a secondary neon-helium tower (3) and a main heat exchanger (4) installed inside the cold box (1). The main heat exchanger (4) is provided with an inlet pipe (41) and a heat exchange outlet pipe (42). The heat exchange outlet pipe (42) is connected to the first-stage neon-helium tower (2). The gas source flowing in the inlet pipe (41) is non-condensable gas generated by the air separation unit. The primary neon-helium tower (2), the secondary neon-helium tower (3), and the main heat exchanger (4) are equipped with cold source transmission pipe groups (5). The primary neon-helium tower (2) is also provided with a connecting pipe (20) that is connected to the secondary neon-helium tower (3). The secondary neon-helium tower (3) is equipped with a neon-helium product pipe (30). The raw gas enters the main heat exchanger (4) through the inlet pipe (41), and then enters the first-stage neon-helium tower (2) for preliminary purification. Then it enters the second-stage neon-helium tower (3) through the connecting pipe (20) for further purification. At the same time, the cold source enters from the first-stage neon-helium tower (2) through the cold source transmission pipe group (5), and then passes through the second-stage neon-helium tower (3) and the main heat exchanger (4). The cold source transmission pipe assembly (5) is equipped with a pressure control component (6) for controlling the cold source pressure.
2. The neon-helium gas production apparatus according to claim 1, characterized in that, The first-stage neon-helium tower (2) is equipped with a first-stage condenser-evaporator (21), and the top of the first-stage neon-helium tower (2) is connected to the first-stage condenser-evaporator (21); The secondary neon-helium tower (3) is equipped with a secondary condenser-evaporator (31), and the top of the primary neon-helium tower (2) is connected to the secondary condenser-evaporator (31); One end of the connecting pipe (20) is connected to the first-stage condenser-evaporator (21), and the other end is connected to the second-stage neon-helium tower (3); A third temperature element (201) is provided on the connecting pipe (20); The first-stage neon-helium tower (2) is equipped with a fourth temperature element (22). The secondary neon-helium tower (3) is equipped with a second temperature element (32).
3. The neon-helium gas generating apparatus according to claim 1 or 2, characterized in that, The cold source transmission pipe group (5) includes a main cold source pipe (51), a first cold source inlet pipe (52), a second cold source inlet pipe (53), a first cold source outlet pipe (54), and a second cold source outlet pipe (55). The main cold source pipe (51) is connected to the first-stage condenser-evaporator (21) in the first-stage neon-helium tower (2); The two ends of the first cold source inlet pipe (52) are connected to the second cold source inlet pipe (53) and the first-stage condenser-evaporator (21) in the first-stage neon-helium tower (2), respectively; The two ends of the second cold source inlet pipe (53) are connected to the secondary condenser evaporator (31) in the first-stage neon-helium tower (2) and the second-stage neon-helium tower (3), respectively; The first cold source outlet pipe (54) is connected to the first-stage neon-helium tower (2) and undergoes heat exchange through the main heat exchanger (4); The second cold source outlet pipe (55) is connected to the secondary neon-helium tower (3) and undergoes heat exchange through the main heat exchanger (4); The pressure control component (6) is installed on the first cold source inlet pipe (52) and the second cold source inlet pipe (53).
4. The neon-helium gas generating apparatus according to claim 3, characterized in that, The pressure control assembly (6) includes a first pressure regulating valve (61) disposed on the first cold source inlet pipe (52) and a second pressure regulating valve (62) disposed on the second cold source inlet pipe (53). A first temperature element (551) and a second pressure transmitter (552) are installed on the second cold source outlet pipe (55); A first pressure transmitter (542) is installed on the first cold source outlet pipe (54).
5. The neon-helium gas generating apparatus according to claim 4, characterized in that, The connection point between the first cold source inlet pipe (52) and the second inlet pipe (53) is located between the first-stage neon-helium tower (2) and the second pressure regulating valve (62); The connection point between the primary cold source outlet pipe (54) and the main cold source pipe (51) is located at the liquid outlet end of the first pressure regulating valve (61).
6. The neon-helium gas generating apparatus according to claim 2, characterized in that, The operating pressure of the primary condenser-evaporator (21) is greater than that of the secondary condenser-evaporator (31).
7. The neon-helium gas production apparatus according to claim 2, characterized in that, The evaporation side pressure of the primary condenser-evaporator (21) is greater than the evaporation side pressure of the secondary condenser-evaporator (31).
8. The neon-helium gas generating apparatus according to claim 6, characterized in that, The evaporation side pressure of the primary condenser-evaporator (21) is 3-3.5 bar, and the evaporation side pressure of the secondary condenser-evaporator (31) is 1.2-1.5 bar.
9. The neon-helium gas generating apparatus according to claim 3, characterized in that, The second cold source inlet pipe (53) is connected to the bottom of the first-stage neon-helium tower (2); The cold source flow rate in the primary cold source pipe (52) is greater than the cold source flow rate in the secondary cold source inlet pipe (53); The end of the first cold source outlet pipe (54) is connected to a nitrogen compressor (7). The first cold source outlet pipe (54) is also equipped with a third pressure regulating valve (541), which is located at the inlet of the nitrogen compressor (7). The air inlet pipe (41) is equipped with a fourth pressure regulating valve (411), and the air source in the air inlet pipe (41) enters the main heat exchanger (4) after passing through the fourth pressure regulating valve (411).
10. The neon-helium gas generating apparatus according to claim 4, characterized in that, The temperature difference between the connecting pipe (20) and the first-stage neon-helium tower (2) is the first temperature difference; The temperature difference between the secondary neon-helium tower (3) and the second cold source outlet pipe (55) is the second temperature difference, which is equal to the first temperature difference, and the absolute value of the temperature difference is 1K.