ATE equipment calibration system and method

Abstract

The invention provides a calibration system and method for ATE equipment, and belongs to the technical field of semiconductor testing. The control signal is sent to the power supply measurement circuit, the test circuit and the calibration control circuit through the control module, the operation state of each circuit is accurately controlled, the test and calibration time is shortened, and the calibration efficiency is improved. And the power supply measuring circuit switches circuit channels according to the control signal so as to realize respective connection with the test circuit and the calibration control circuit. The state of the connecting end of the power supply measuring circuit is tested through the test circuit to know whether the state of the connecting end of the power supply measuring circuit is stable. When the state of the connecting end of the power supply measuring circuit is stable, the power supply measuring circuit is switched to the calibration control circuit, so that the power supply measuring circuit measures voltage or current generated by the ATE equipment in real time while applying an excitation signal to the ATE equipment, parallel calibration of the ATE equipment is realized, the method can be suitable for a large-current or high-voltage scene, and the calibration precision is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor testing, and particularly relates to a calibration system and method of an ATE device. BACKGROUND

[0002] The ATE device is a highly automated semiconductor testing device, which is a precision testing and measuring system for testing the functions and performance parameters of integrated circuits (ICs). In order to ensure the precision, stability and reliability of the testing and measuring of the ATE device, a calibration device is needed to calibrate the ATE device, especially for the large-current and high-voltage testing scenarios of the chip to be tested. In the large-current and high-voltage testing scenarios of the chip to be tested, the testing precision of the ATE device is easily deviated by multiple factors, and therefore, the calibration of the ATE device by the calibration device can ensure the accuracy and effectiveness of the testing results.

[0003] The conventional calibration device adopts a combination of a multimeter and a resistance network to calibrate the ATE device. However, before calibrating the ATE device each time, a multimeter needs to be switched to both ends of the resistance network for measurement, which is prone to measurement timing errors. Meanwhile, in the large-current or high-voltage testing scenarios, more resistors need to be added or resistors with larger power need to be used by the conventional calibration device, otherwise, the power added to both ends of the resistor is too large to cause the resistor to heat up, thereby causing the resistance value to change, resulting in a change in the actual testing current and a calibration deviation, and causing the ATE device to produce a measurement deviation. SUMMARY

[0004] The application aims to provide a calibration system and method of an ATE device, which aims to solve the above problems existing in the conventional calibration device.

[0005] The application provides a calibration system of an ATE device, which comprises: a control module configured to send a control signal; a power supply measurement circuit connected to the control module and configured to switch a circuit channel according to the control signal; a testing circuit connected to the control module and the power supply measurement circuit, and configured to test the connection end state of the power supply measurement circuit according to the control signal when the power supply measurement circuit is switched to the testing circuit; a calibration control circuit connected to the control module, the power supply measurement circuit and the ATE device; The calibration control circuit is configured to, when the connection end of the power supply measurement circuit is stable and the power supply measurement circuit is switched to the calibration control circuit, control the power supply measurement circuit to apply the excitation signal to the ATE device and simultaneously measure the voltage or current generated by the ATE device in real time according to the control signal, so as to calibrate the ATE device.

[0006] In some embodiments, the test circuit comprises: a reference module configured to provide a reference voltage; a first switch circuit connected with the reference module and the feedback connection end of the power supply measurement circuit, the first switch circuit being configured to control the reference module to test the state of the feedback connection end of the power supply measurement circuit according to the control signal; a second switch circuit connected with the reference module and the excitation connection end of the power supply measurement circuit, the second switch circuit being configured to control the reference module to test the state of the excitation connection end of the power supply measurement circuit according to the control signal.

[0007] In some embodiments, the power supply measurement circuit comprises: a source switch circuit connected with the source measurement module and the control module, the source switch circuit being configured to control the source measurement module to switch to the test circuit or control the source measurement module to switch to the calibration control circuit according to the control signal; a source measurement module configured to, when the connection end of the source measurement module is stable and the source measurement module is switched to the calibration control circuit, apply the excitation signal to the ATE device and simultaneously measure the voltage or current generated by the ATE device in real time. wherein the excitation signal comprises the supply voltage and supply current applied by the source measurement module.

[0008] In some embodiments, the calibration control circuit comprises: at least one first calibration switch circuit connected with the control module, the power supply measurement circuit and the ATE device, respectively, the first calibration switch circuit being configured to, when the connection end of the power supply measurement circuit is stable and the power supply measurement circuit is switched to the first calibration switch circuit, control the power supply measurement circuit to calibrate the device power supply unit and the board-level device power supply unit of the ATE device according to the control signal.

[0009] In some embodiments, the calibration control circuit comprises: at least one second calibration switch circuit, connected with the control module, the power supply measurement circuit and the ATE device respectively, for controlling the power supply measurement circuit to calibrate the board-level measurement unit and the pin measurement unit of the ATE device according to the control signal when the connection end state of the power supply measurement circuit is stable and the power supply measurement circuit switches to the second calibration switch circuit.

[0010] In some embodiments, the system further comprises: a verification load; a verification switch circuit, connected with the verification load, the control module and the power supply measurement circuit; the verification switch circuit is configured to control the verification load to verify the ATE device according to the control signal when the connection end state of the power supply measurement circuit is stable and the power supply measurement circuit switches to the calibration control circuit.

[0011] The present application provides a calibration method of an ATE device, which calibrates the ATE device by using the calibration system of the ATE device in the above embodiments, and the method comprises: sending a control signal by the control module; testing the connection end state of the power supply measurement circuit by the test circuit according to the control signal when the power supply measurement circuit switches to the test circuit; controlling the power supply measurement circuit to apply an excitation signal to the ATE device and simultaneously measuring the voltage or current generated by the ATE device in real time to calibrate the ATE device according to the control signal when the connection end state of the power supply measurement circuit is stable and the power supply measurement circuit switches to the calibration control circuit.

[0012] In some embodiments, the test circuit tests the connection end state of the power supply measurement circuit according to the control signal, which comprises: receiving the control signal by the first switch circuit in the test circuit, and connecting the feedback connection end of the reference module in the test circuit with the source measurement module in the power supply measurement circuit according to the control signal; setting the source measurement module to FNMV mode, and measuring the reference voltage provided by the reference module by the source measurement module to obtain a first measurement voltage; determining the feedback connection end state of the source measurement module according to the first measurement voltage and the reference voltage; setting the source measurement module to FIMV mode, and providing an excitation current to the excitation connection end of the source measurement module by the reference module; measuring, by the source measurement module, a voltage under the action of the excitation current to obtain a second measurement voltage; determining, according to the second measurement voltage and an expected voltage corresponding to the excitation current, a state of an excitation connection end of the source measurement module.

[0013] In some embodiments, the calibration control circuit controls the power supply measurement circuit to measure, in real time, a voltage or a current generated by the ATE device while the excitation signal is applied to the ATE device according to the control signal, so as to calibrate the ATE device, including: The first calibration switch circuit in the calibration control circuit controls the connection of the source measurement module and the device power supply unit of the ATE device according to the control signal; setting the source measurement module to the FNMV mode, measuring, by the source measurement module, a plurality of voltages generated by the device power supply unit to obtain a plurality of third measurement voltages; performing voltage calibration on the device power supply unit according to the plurality of third measurement voltages and the plurality of voltages generated by the device power supply unit; setting the source measurement module to the FVMI mode, measuring, by the source measurement module, a plurality of currents generated by the device power supply unit to obtain a plurality of first measurement currents; performing current calibration on the device power supply unit according to the plurality of first measurement currents and the plurality of currents generated by the device power supply unit.

[0014] In some embodiments, the calibration control circuit controls the power supply measurement circuit to measure, in real time, a voltage or a current generated by the ATE device while the excitation signal is applied to the ATE device according to the control signal, so as to calibrate the ATE device, and further including: setting the source measurement module to the FVMI mode; measuring, by the device power supply unit, a plurality of power supply voltages applied by the source measurement module to obtain a plurality of device end measurement voltages; performing measurement voltage calibration on the device power supply unit according to the plurality of power supply voltages and the plurality of device end measurement voltages; measuring, by the device power supply unit, a plurality of power supply currents applied by the source measurement module to obtain a plurality of device end measurement currents; performing measurement current calibration on the device power supply unit according to the plurality of device end measurement currents and the plurality of power supply currents.

[0015] Compared with the prior art, the embodiments of the present application have the following beneficial effects: The control module sends control signals to the power supply measurement circuit, the test circuit and the calibration control circuit, so as to accurately control the running state of each circuit, shorten the test and calibration time, and improve the calibration efficiency. The power supply measurement circuit can switch the circuit channel according to the control signal, so as to be connected with the test circuit and the calibration control circuit respectively. The test circuit tests the connection end state of the power supply measurement circuit, so as to know whether the connection end state of the power supply measurement circuit is stable, or whether the connection is normal. Then, when the connection end state of the power supply measurement circuit is stable, the calibration control circuit can be further switched, so as to ensure the stable connection of the power supply measurement circuit and the calibration control circuit, thereby ensuring the stable connection between the power supply measurement circuit, the calibration control circuit and the ATE device. The stable connection between the power supply measurement circuit, the calibration control circuit and the ATE device can improve the accuracy of voltage calibration and current calibration of the power supply measurement circuit on the ATE device, and avoid calibration failure caused by abnormal connection. Therefore, the calibration system of the ATE device provided by the present application solves the problem of poor contact caused by the external multimeter in the prior art, and improves the calibration accuracy.

[0016] When the connection end state of the power supply measurement circuit is stable and the power supply measurement circuit is switched to the calibration control circuit, the calibration control circuit controls the power supply measurement circuit to apply an excitation signal to the ATE device while measuring the voltage or current generated by the ATE device in real time according to the control signal, so as to realize parallel calibration of the ATE device, eliminate the measurement timing error of the traditional calibration device, and effectively improve the calibration accuracy.

[0017] Meanwhile, the excitation signal applied by the power supply measurement circuit to the ATE device and the real-time measurement of the voltage or current generated by the ATE device can be a large current signal or a high voltage signal, which can be applied to a large current or high voltage test scene without the need to additionally increase more resistors or use larger power resistors, thereby avoiding the calibration deviation caused by the heating of the resistors in the resistor network of the traditional calibration device, and further improving the calibration accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiments or exemplary technical descriptions will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0019] Figure 1 The overall structure schematic diagram of the calibration system of the ATE device in some embodiments of the present application.

[0020] Figure 2Fig. 1 shows a schematic diagram of the connection structure of the reference module, the first switch circuit, the second switch circuit, the source measurement module, and the source switch circuit in some embodiments of the present application.

[0021] Figure 3 Fig. 2 shows a schematic diagram of the connection structure of the first calibration switch circuit and the second calibration switch circuit in some embodiments of the present application.

[0022] Figure 4 Fig. 3 shows a schematic diagram of the structure of the control module in some embodiments of the present application.

[0023] Figure 5 Fig. 4 shows a schematic diagram of the connection structure of the verification load and the verification switch circuit in some embodiments of the present application.

[0024] Figure 6 Fig. 5 shows a schematic diagram of the steps of the calibration method of the ATE device in some embodiments of the present application. DETAILED DESCRIPTION

[0025] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not intended to limit the present application.

[0026] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0027] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0028] In addition, the terms "first", "second", etc. are used only for descriptive purposes and are not to be construed as indicating or implying relative importance or an indicated number of technical features. Therefore, the features defined as "first", "second", etc. can explicitly or implicitly include one or more of the features. In addition, in the embodiments of the present application, the same items or similar items with substantially the same functions and effects are distinguished by using "first", "second", etc. The skilled in the art can understand that "first", "second", etc. do not limit the number and execution order, and "first", "second", etc. do not necessarily mean different.

[0029] In the description of the present application, unless otherwise specified, " / " represents that the objects before and after are in an "or" relationship, for example, A / B can represent A or B; "and / or" in the present application is only a description of the association of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent: A exists alone, A and B exist together, and B exists alone, where A and B can be singular or plural. And in the description of the present application, unless otherwise specified, "multiple" means two or more than two. "At least one (one)" or the like means any combination of the items, including any combination of single (one) or multiple items. For example, at least one of a, b, or c can represent: a, b, c, a-b, a-c, b-c, or a-b-c, where a, b, and c can be single or multiple.

[0030] See Figure 1 The present application provides an ATE device calibration system 100. The ATE device calibration system 100 includes a control module 10, a power supply measurement circuit 20, a test circuit 30, and a calibration control circuit 40. The control module 10 is used to send a control signal. The power supply measurement circuit 20 is connected with the control module 10, and is used to switch the circuit channel according to the control signal.

[0031] The test circuit 30 is connected with the control module 10 and the power supply measurement circuit 20, and is used to test the connection end state of the power supply measurement circuit 20 according to the control signal when the power supply measurement circuit 20 is switched to the test circuit 30.

[0032] The calibration control circuit 40 is connected with the control module 10, the power supply measurement circuit 20, and the ATE device 200. The calibration control circuit 40 is used to control the power supply measurement circuit 20 to apply an excitation signal to the ATE device 200 while measuring the voltage or current generated by the ATE device 200 in real time according to the control signal when the connection end state of the power supply measurement circuit 20 is stable and the power supply measurement circuit 20 is switched to the calibration control circuit 40, so as to calibrate the ATE device 200.

[0033] In this embodiment, the control module 10 sends control signals to the power supply measurement circuit 20, the test circuit 30 and the calibration control circuit 40, so as to accurately control the running state of each circuit, shorten the test and calibration time, and improve the calibration efficiency. The power supply measurement circuit 20 can switch the circuit channel according to the control signal to realize connection with the test circuit 30 and the calibration control circuit 40 respectively. By testing the connection end state of the power supply measurement circuit 20 through the test circuit 30, it can be known whether the connection end state of the power supply measurement circuit 20 is stable, which can also be understood as whether the connection is normal. Further, when the connection end state of the power supply measurement circuit 20 is stable, it can be further switched to the calibration control circuit 40, so as to ensure the stable connection between the power supply measurement circuit 20 and the calibration control circuit 40, thereby ensuring the stable connection between the power supply measurement circuit 20, the calibration control circuit 40 and the ATE device 200. The stable connection between the power supply measurement circuit 20, the calibration control circuit 40 and the ATE device 200 can improve the accuracy of voltage calibration and current calibration of the power supply measurement circuit 20 on the ATE device 200, and avoid calibration failure caused by abnormal connection. Therefore, the calibration system 100 of the ATE device provided in the present application solves the problem of poor contact caused by the external multimeter in the prior art, and improves the calibration accuracy.

[0034] When the connection end state of the power supply measurement circuit 20 is stable and the power supply measurement circuit 20 is switched to the calibration control circuit 40, the calibration control circuit 40 controls the power supply measurement circuit 20 to apply the excitation signal to the ATE device 200 while measuring the voltage or current generated by the ATE device 200 in real time according to the control signal, so as to realize parallel calibration of the ATE device 200, eliminate the measurement timing error of the traditional calibration device, and effectively improve the calibration accuracy.

[0035] Meanwhile, the excitation signal applied by the power supply measurement circuit 20 to the ATE device 200 and the real-time measurement of the voltage or current generated by the ATE device 200 can be a large current signal or a high voltage signal, which can be applied to a large current or high voltage test scene without the need for additional resistance or the use of larger power resistance, thereby avoiding the calibration deviation caused by resistance heating in the resistance network of the traditional calibration device, and further improving the calibration accuracy.

[0036] Please refer to Figure 2 In some embodiments, the test circuit 30 includes a reference module 310, a first switch circuit 321 and a second switch circuit 322. The reference module 310 is used to provide a reference voltage. The first switch circuit 321 is connected with the reference module 310 and the feedback connection end of the power supply measurement circuit 20, and the first switch circuit 321 is used to test the feedback connection end state of the power supply measurement circuit 20 according to the control signal.

[0037] The second switch circuit 322 is connected with the excitation connection end of the reference module 310 and the power supply measurement circuit 20, and is used for controlling the reference module 310 to test the state of the excitation connection end of the power supply measurement circuit 20 according to the control signal.

[0038] In the embodiment, the test circuit 30 can check whether the power supply measurement circuit 20 is normally connected, which can also be understood as whether the power supply measurement circuit 20 is stably connected. The reference module 310 can be a reference voltage chip (also referred to as a Voltage Reference Chip, VREF chip), which can provide stable and accurate voltage signals and current signals. The two ends of the first switch circuit 321 are respectively connected with the feedback connection end of the power supply measurement circuit 20 and the reference module 310, forming a test link of the feedback connection end. The two ends of the second switch circuit 322 are respectively connected with the excitation connection end of the power supply measurement circuit 20 and the reference module 310, forming a test link of the excitation connection end.

[0039] Further, the control end of the first switch circuit 321 receives the control signal, and according to the control signal, the reference module 310 and the power supply measurement circuit 20 can be controlled to test the state of the feedback connection end. The control end of the second switch circuit 322 receives the control signal, and according to the control signal, the reference module 310 and the power supply measurement circuit 20 can be controlled to test the state of the excitation connection end.

[0040] The first switch circuit 321 is a circuit structure formed by a switching device, and the second switch circuit 322 is also a circuit structure formed by a switching device. The two switch circuits are controlled by the control module 10 to trigger the test circuit 30 to run, and the control of the first switch circuit 321 and the second switch circuit 322 can be accurately realized. The reference module 310 is a chip that provides stable and accurate voltage signals and current signals, which can use accurate voltage and current to determine whether the connection end line of the power supply measurement circuit 20 is stably connected, solves the problem of poor contact caused by the external multimeter in the traditional technology, and is beneficial to improve the calibration accuracy.

[0041] Please refer to Figure 2 In some embodiments, the power supply measurement circuit 20 includes a source measurement module 210 and a source switch circuit 220. The source measurement module 210 is used to measure the voltage or current generated by the ATE device 200 in real time while applying an excitation signal to the ATE device 200 when the state of the connection end of the source measurement module 210 is stable and the source measurement module 210 is switched to the calibration control circuit 40. The excitation signal includes the supply voltage and supply current applied by the source measurement module 210.

[0042] The source switch circuit 220 is connected with the source measurement module 210 and the control module 10, and is used for controlling the source measurement module 210 to switch to the test circuit 30 or the calibration control circuit 40 according to the control signal.

[0043] In the embodiment, the source measurement module 210 can be a source measurement unit (SMU). The SMU can not only provide a voltage source with a measurement resolution less than 1 mV, but also provide a current source with a measurement resolution less than 1 uA, has a high-precision four-quadrant output, can perform data acquisition in parallel and in real time while applying an excitation signal to the ATE device 200, and can measure the voltage or current generated by the ATE device 200 in real time. The SMU is configured in four lines, namely, a Force INPUT+ port, a Force INPUT- port, a Sense INPUT+ port, and a Sense INPUT- port. In the case of setting a voltage and applying a current, the SMU can accurately measure the voltage value output by the ATE device 200 (which can also be referred to as an ATE machine). Meanwhile, the SMU can also accurately set an accurate current. The SMU is not sensitive to the environmental temperature parameters of the outside world, can avoid the influence of the outside environment on the parameters in the calibration process, and is conducive to improving the calibration accuracy.

[0044] The source switch circuit 220 is connected with the Force INPUT+ port and the Sense INPUT+ port of the source measurement module 210, respectively. The Force INPUT- port and the Sense INPUT- port are grounded. The source switch circuit 220 is also connected with the first switch circuit 321 and the second switch circuit 322. The control end of the source switch circuit 220 is used for receiving a control signal. Then, according to the control signal, the source switch circuit 220 can switch the connection channel of the source measurement module 210, and can switch to the first switch circuit 321 and the second switch circuit 322, so as to realize the test on the feedback connection end state and the excitation connection end state of the source measurement module 210, that is, switch to the test circuit 30. Further, according to the control signal, the source switch circuit 220 can switch the connection channel of the source measurement module 210, and can switch to the calibration control circuit 40, so as to realize the voltage calibration and the current calibration of the source measurement module 210 on the ATE device 200.

[0045] Further, by the source measurement module 210 and the source switch circuit 220, switching of different connection channels can be realized, voltage calibration and current calibration of the ATE device 200 can be performed while ensuring the stable state of the connection end of the source measurement module 210, and the calibration accuracy of the calibration system 100 of the ATE device is improved. Therefore, by the precise equipment, accurate switch control and stable connection state in the calibration system 100 of the ATE device provided in the present application, the ATE device 200 is calibrated, compared with the scheme of the traditional multimeter and resistance network, the equipment devices used are precise and less, the calibration error sources are reduced, the calibration data is more reliable, the calibration accuracy is improved, and the measurement accuracy of the ATE device 200 is improved.

[0046] Meanwhile, in the test scene of large current or high voltage, compared with the traditional calibration device, the source measurement module 210 (i.e., SMU) can provide a large current signal or a high voltage signal, without the need to additionally increase more resistors or use larger power resistors, so that the additional error and calibration deviation caused by heating of the resistance network can be avoided, and the calibration accuracy is higher and the system integration is higher.

[0047] Further, compared with the traditional calibration device, the source measurement module 210 (i.e., SMU) can adapt to various different test scenes of large current or high voltage, without the need to redesign the related circuit, greatly reducing the subsequent project design of the calibration system, and also reducing the actual procurement cost for the user.

[0048] In some embodiments, the number of the source measurement module 210 (i.e., SMU) and the source switch circuit 220 in the power supply measurement circuit 20 can be multiple, forming a multi-channel SMU. The multi-channel SMU can also be understood as multiple independent SMU channels, which can realize multi-channel calibration of the calibration system, greatly accelerating the calibration speed and improving the calibration efficiency.

[0049] In some embodiments, the first switch circuit 321 includes a first switch device. One end of the first switch device is connected with the reference module 310, and the other end of the first switch device is connected with the Sense INPUT+ port of the source measurement module 210. The second switch circuit 322 includes a second switch device and a resistor. One end of the resistor is connected with the reference module 310, the other end of the resistor is connected with one end of the second switch device, and the other end of the second switch device is connected with the Force INPUT+ port. The Sense INPUT- port and the Force INPUT- port are both grounded. By the two switches and the resistor in the first switch circuit 321 and the second switch circuit 322, the feedback connection end state and the excitation connection end state of the source measurement module 210 can be judged, so that the stability of the connection state before calibration is ensured, which is beneficial to improve the calibration accuracy.

[0050] In some embodiments, the source switch circuit 220 includes a third switch device, a fourth switch device, a fifth switch device, and a sixth switch device. One end of the third switch device is connected with the Sense INPUT+ port, and the other end of the third switch device is connected with the first switch circuit 321. The control end of the third switch device is connected with the control module 10. One end of the fourth switch device is connected with the Force INPUT+ port, and the other end of the fourth switch device is connected with the second switch circuit 322. The control end of the fourth switch device is connected with the control module 10.

[0051] One end of the fifth switch device is connected with the Force INPUT- port, and the other end of the fifth switch device is grounded. The control end of the fifth switch device is connected with the control module 10. One end of the sixth switch device is connected with the Sense INPUT- port, and the other end of the sixth switch device is grounded. The control end of the sixth switch device is connected with the control module 10.

[0052] Please refer to Figure 3 In some embodiments, the calibration control circuit 40 includes at least one first calibration switch circuit 410. The at least one first calibration switch circuit 410 is respectively connected with the control module 10, the power supply measurement circuit 20, and the ATE device 200, and is used to control the power supply measurement circuit 20 to calibrate the device power supply unit and the board-level device power supply unit of the ATE device 200 according to the control signal when the connection end state of the power supply measurement circuit 20 is stable and the power supply measurement circuit 20 is switched to the first calibration switch circuit 410.

[0053] In this embodiment, the number of the first calibration switch circuit 410 can be set according to the actual application scenario. Each first calibration switch circuit 410 corresponds to a calibration resource of the ATE device 200. The first first calibration switch circuit 410 can correspond to the calibration of the device power supply unit. The device power supply unit of the ATE device 200 can also be understood as the DevicePowerSupply resource, that is, the DPS resource. The second first calibration switch circuit 410 can correspond to the calibration of the board-level device power supply unit. The board-level device power supply unit of the ATE device 200 can also be understood as the BoardDevicePowerSupply resource, that is, the BDPS resource. The third first calibration switch circuit 410 can correspond to the calibration of other units, which can realize the expansion of the resource calibration of the calibration system 100 of the ATE device, and can be set according to actual needs, for example, can be expanded to a reference voltage source, that is, a ReferenceVoltageSource resource, which can also be understood as an RVS resource, or a high-density MDGT measurement board, that is, an LCD resource, and the like.

[0054] One end of the first calibration switch circuit 410 is connected with the source measurement module 210 through the source switch circuit 220. The other end of the first calibration switch circuit 410 is connected with the ATE device 200. The control end of the first calibration switch circuit 410 is connected with the control module 10 for receiving the control signal. Then, when the connection end state of the source measurement module 210 in the power supply measurement circuit 20 is stable and the source measurement module 210 is switched to the calibration control circuit 40, the source measurement module 210 can be controlled to calibrate the device power supply unit and the board-level device power supply unit of the ATE device 200 according to the control signal.

[0055] The device power supply unit and the board-level device power supply unit of the ATE device 200 need to be connected with the Sense INPUT+ port, the Force INPUT+ port, the Sense INPUT- port and the Force INPUT- port of the source measurement module 210 through four ports respectively to realize the calibration of the device power supply unit and the board-level device power supply unit of the ATE device 200. Then, through the first calibration switch circuit 410, the device power supply unit or the board-level device power supply unit of the ATE device 200 can be accurately ensured to be switched to the calibration channel of the source measurement module 210, which is beneficial to improve the calibration accuracy.

[0056] In some embodiments, the first calibration switch circuit 410 includes a seventh switch device, an eighth switch device, a ninth switch device and a tenth switch device. One end of the seventh switch device is connected with the DPS resource_Chx_Sense port, and the other end of the seventh switch device is connected with the Sense INPUT+ port through a third switch device. The control end of the seventh switch device is connected with the control module 10. One end of the eighth switch device is connected with the DPS resource_Chx_Force port, and the other end of the eighth switch device is connected with the Force INPUT+ port through a fourth switch device. The control end of the eighth switch device is connected with the control module 10.

[0057] One end of the ninth switch device is connected with the DPS resource_Chx_GND port, and the other end of the ninth switch device is connected with the Force INPUT- port through a fifth switch device. The control end of the ninth switch device is connected with the control module 10. One end of the tenth switch device is connected with the DPS resource_Chx_GND_Sense port, and the other end of the tenth switch device is connected with the Sense INPUT- port through a sixth switch device. The control end of the tenth switch device is connected with the control module 10.

[0058] By controlling the third switch device, the fourth switch device, the fifth switch device and the sixth switch device, the source measurement module 210 can be switched to the calibration channel. Further, by controlling the seventh switch device, the eighth switch device, the ninth switch device and the tenth switch device to be closed, it can be ensured that the DPS resource can be switched to the source measurement module 210 to the calibration channel, so as to realize the calibration of the DPS resource.

[0059] Similarly, the connection structure of the connection port of the BDPS resource is the same as that of the connection port of the DPS resource, which will not be described here.

[0060] In some embodiments, the calibration control circuit 40 comprises at least one second calibration switch circuit 420. The at least one second calibration switch circuit 420 is respectively connected with the control module 10, the power supply measurement circuit 20 and the ATE device 200, and is used to control the power supply measurement circuit 20 to calibrate the board-level measurement unit and the pin-level measurement unit of the ATE device 200 according to the control signal when the connection end state of the power supply measurement circuit 20 is stable and the power supply measurement circuit 20 is switched to the second calibration switch circuit 420.

[0061] In the embodiment, the number of the second calibration switch circuit 420 can be set according to the actual application scenario. The first second calibration switch circuit 420 can correspond to the calibration of the board-level measurement unit. The board-level measurement unit of the ATE device 200 can also be called as the Board power management unit resource, i.e. the BPMU resource. The second second calibration switch circuit 420 can correspond to the calibration of the pin-level measurement unit. The pin-level measurement unit of the ATE device 200 can also be called as the Per Pin Measurement Unit resource, i.e. the PPMU resource.

[0062] One end of the second calibration switch circuit 420 is connected with the source measurement module 210 through the source switch circuit 220. The other end of the second calibration switch circuit 420 is connected with the ATE device 200. The control end of the second calibration switch circuit 420 is connected with the control module 10 for receiving the control signal. Further, when the connection end state of the source measurement module 210 in the power supply measurement circuit 20 is stable and the source measurement module 210 is switched to the calibration control circuit 40, the source measurement module 210 can be controlled to calibrate the board-level measurement unit and the pin-level measurement unit of the ATE device 200 according to the control signal.

[0063] The board level measurement unit and the pin measurement unit of the ATE device 200 are connected with the Force INPUT+ port and the Force INPUT- port of the source measurement module 210 through two ports respectively, so as to calibrate the board level measurement unit and the pin measurement unit of the ATE device 200. Further, through the second calibration switch circuit 420, the board level measurement unit and the pin measurement unit can be accurately switched to the calibration channel of the source measurement module 210, which is beneficial to improve the calibration accuracy.

[0064] In some embodiments, the second calibration switch circuit 420 includes an eleventh switch device and a twelfth switch device. One end of the eleventh switch device is connected with the BPMU resource_Chx_Force port. The other end of the eleventh switch device is connected with the Force INPUT+ port of the source measurement module 210 through a fourth switch device. The control end of the eleventh switch device is connected with the control module 10.

[0065] One end of the twelfth switch device is connected with the BPMU resource_Chx_GND port. The other end of the twelfth switch device is connected with the Force INPUT- port of the source measurement module 210 through a fifth switch device. The control end of the twelfth switch device is connected with the control module 10. Wherein, when the BPMU resource is calibrated, the feedback connection end, i.e. the Sense port, is not needed, and the Sense port of the source measurement module 210 needs to be short-circuited with the Force port.

[0066] By controlling the seventh switch device, the eighth switch device, the ninth switch device and the tenth switch device to be closed, and controlling the eleventh switch device and the twelfth switch device to be opened, the BPMU resource can be switched to the calibration channel of the source measurement module 210, so as to calibrate the BPMU resource.

[0067] Similarly, the connection structure of the connection ports of the PPMU resource is the same as that of the BPMU resource, which will not be described here. The switch devices in the above embodiments can all be relays.

[0068] Therefore, through the control module 10, the power supply measurement circuit 20, the test circuit 30 and the calibration control circuit 40 in the calibration system 100 of the ATE device provided by the present application, the test channel and the calibration channel can be quickly and accurately switched, without relying on the resistance network and the external multimeter in the traditional technology, so as to avoid the temperature offset problem and the serial calibration problem, and improve the calibration efficiency and the calibration accuracy.

[0069] Meanwhile, through the calibration system 100 of the ATE device provided by the present application, the device devices used are precise and few, and are subjected to stability test, thereby reducing the calibration error sources, making the calibration data very reliable, and effectively improving the reliability and the accuracy of the calibration.

[0070] Please refer to Figure 4 In some embodiments, the control module 10 comprises a control chip 110, at least one interface expansion chip 120, at least one switch control chip 130, a communication chip 140, an electrically erasable programmable read-only memory, and a power module. The control chip 110 is used to send control signals. The at least one interface expansion chip 120 is connected with the control chip 110, and is used to convert and expand the control signals into a plurality of switch control signals. The switch control chip 130 is connected with the interface expansion chip 120 and the calibration control circuit 40, and is used to control the on-off of the switch circuit in the calibration control circuit 40 according to the switch control signals. The communication chip 140 is connected with the control chip 110. The electrically erasable programmable read-only memory is connected with the control chip 110. The power module is connected with the control chip 110, the interface expansion chip 120, the switch control chip 130, the communication chip 140, and the electrically erasable programmable read-only memory respectively, and can supply power for the plurality of chips.

[0071] In the embodiment, the control chip 110 can be a microcontroller unit (MCU). The interface expansion chip 120 can be an I2C expansion IO chip, supports multi-chip cascade control, and can expand more IO. The switch control chip 130 is connected between the interface expansion chip 120 and the switching device. The switch control chip 130 has a multi-channel NMOS driver, which can drive up to 7 relays. The communication chip 140 can be an Ethernet chip, which communicates with the STM32 using SPI and supports TCP / IP communication, and can directly communicate with the ATE device 200 using TCP / IP protocol, thereby speeding up the communication.

[0072] The electrically erasable programmable read-only memory (E2PROM) can store data. The power module is composed of multiple TPS82130, which outputs multiple voltages to supply power for the chips and external circuits. The power module can supply power for the plurality of chips and the reference module 310 (i.e., the VREF chip) at the same time.

[0073] In some embodiments, the control chip 110, the at least one interface expansion chip 120, the at least one switch control chip 130, the communication chip 140, the electrically erasable programmable read-only memory and the power module in the control module 10 can be integrated on the same calibration board. The power module in the ATE device 200 for powering the PIB board can power the power module in the control module 10, or an external power adapter can be used to power the power module in the control module 10, thereby achieving power supply for the control chip 110, the interface expansion chip 120, the switch control chip 130, the communication chip 140 and the electrically erasable programmable read-only memory, and can adapt to different use scenarios and avoid abnormal problems caused by insufficient power supply.

[0074] In some embodiments, the control chip 110 and the source measurement module 210 both communicate with the ATE device 200 through Ethernet.

[0075] Please refer to Figure 5 In some embodiments, the calibration system 100 of the ATE device further includes a verification load 510 and a verification switch circuit 520. The verification switch circuit 520 is connected with the verification load 510, the control module 10 and the power supply measurement circuit 20.

[0076] The verification switch circuit 520 is used to control the verification load 510 to verify the ATE device 200 according to a control signal when the connection end state of the power supply measurement circuit 20 is stable and the power supply measurement circuit 20 is switched to the calibration control circuit 40.

[0077] In this embodiment, the platform expansion of the calibration system 100 of the ATE device is realized by the verification load 510 and the verification switch circuit 520, which can verify the ATE device 200 after the calibration of the ATE device 200 is completed, thereby further ensuring the accuracy of the ATE device 200.

[0078] The two ends of the verification switch circuit 520 are connected with the source measurement module 210 in the power supply measurement circuit 20 and the verification load 510 respectively, forming a verification channel. The control end of the verification switch circuit 520 is connected with the control module 10, which can receive the control signal sent by the control module 10 to control whether the verification channel works. Further, when the connection end state of the power supply measurement circuit 20 is stable and the power supply measurement circuit 20 is switched to the calibration control circuit 40, the verification load 510 is not only connected with the source measurement module 210 in the power supply measurement circuit 20, but also connected with the ATE device 200. Therefore, the source measurement module 210 can be used as a high-speed external meter, which can measure the multi-point sampling voltage and current of the verification load 510 in the verification process of the ATE device 200, assist the verification load 510 in verifying each resource in the ATE device 200, and expand the measurement function of the calibration system 100 of the ATE device. Therefore, by using the calibration system 100 of the ATE device provided in the present application, the calibration and verification of the ATE device 200 can be realized, different test and verification requirements can be met, and various ATE machines, SOC testers and CIS testers can be supported.

[0079] In some embodiments, the verification load 510 can be an electronic load such as a multifunctional meter, which can be set according to actual requirements.

[0080] Please refer to Figure 6 The present application provides a calibration method of an ATE device, which uses the calibration system 100 of the ATE device in any one of the above embodiments to calibrate and verify the ATE device 200. The calibration method of the ATE device comprises the following steps. Step S10, sending a control signal by the control module 10; Step S20, when the power supply measurement circuit 20 is switched to the test circuit 30, testing the connection end state of the power supply measurement circuit 20 according to the control signal by the test circuit 30; Step S30, when the connection end state of the power supply measurement circuit 20 is stable and the power supply measurement circuit 20 is switched to the calibration control circuit 40, controlling the power supply measurement circuit 20 to apply an excitation signal to the ATE device 200 and simultaneously measuring the voltage or current generated by the ATE device 200 in real time according to the control signal by the calibration control circuit 40, so as to calibrate the ATE device 200.

[0081] In the present embodiment, the related descriptions of steps S10 to S30 can refer to the related descriptions of the control module 10, the power supply measurement circuit 20, the test circuit 30, the calibration control circuit 40 and the ATE device 200 in the calibration system 100 of the ATE device in the above embodiments.

[0082] In some embodiments, in step S20, the test circuit 30 tests the connection end state of the power supply measurement circuit 20 according to the control signal, including: In step S210, the control signal is received by the first switch circuit 321 in the test circuit 30, and the feedback connection end of the reference module 310 in the test circuit 30 is connected to the source measurement module 210 in the power supply measurement circuit 20 according to the control signal; In step S220, the source measurement module 210 is set to the FNMV mode, and the reference voltage provided by the reference module 310 is measured by the source measurement module 210 to obtain a first measurement voltage; In step S230, the feedback connection end state of the source measurement module 210 is determined according to the first measurement voltage and the reference voltage; In step S240, the source measurement module 210 is set to the FIMV mode, and the excitation current is provided by the reference module 310 to the excitation connection end of the source measurement module 210; In step S250, the voltage under the action of the excitation current is measured by the source measurement module 210 to obtain a second measurement voltage; In step S260, the excitation connection end state of the source measurement module 210 is determined according to the second measurement voltage and the expected voltage corresponding to the excitation current.

[0083] In this embodiment, in step S210, the first switch circuit 321 controls the conduction of the circuit according to the control signal, so that the reference module 310 is connected to the feedback connection end of the source measurement module 210. Further, in step S220, the source measurement module 210 is set to the FNMV mode. The reference voltage of the reference module 310 is measured by the source measurement module 210, which can also be understood as the source measurement module 210 can read the reference voltage applied by the reference module 310 to obtain the first measurement voltage. In step S230, the first measurement voltage and the reference voltage are compared to calculate the voltage error. If the voltage error is within the error range, it can be determined that the feedback connection end of the source measurement module 210 is stably connected to the reference module 310, which can also be understood as normally connected, so that the feedback connection end state of the source measurement module 210 is stable and can be used for subsequent calibration process.

[0084] In some embodiments, the reference voltage provided by the reference module 310 can be 4.096V. The error range is -10mV to 10mV. If the voltage error between the first measurement voltage and the reference voltage is within the range of -10mV to 10mV, it is determined that the feedback connection end state of the source measurement module 210 is stable, and the feedback connection end can be normally connected. The error range and the reference voltage provided by the reference module 310 can be set according to the actual application scenario, which is not limited in the present application.

[0085] In step S240, the source measurement module 210 is set to the FIMV mode. By applying the excitation current to the excitation connection end of the source measurement module 210 through the reference module 310, the voltage is measured by the source measurement module 210. At this time, the source measurement module 210 can not only be the measured object, but also be the measuring device. Further, the source measurement module 210 measures the voltage under the action of the excitation current to obtain the second measurement voltage. Thus, in step S260, the second measurement voltage actually measured is compared with the expected voltage corresponding to the excitation current, and the voltage error of the two is calculated. If the voltage error is within the error range, it can be determined that the connection between the excitation connection end of the source measurement module 210 and the reference module 310 is stable, and it can also be understood as being normally connected, so that it can be determined that the excitation connection end of the source measurement module 210 is stable and can be used for the subsequent calibration process.

[0086] Therefore, in steps S210 to S260, whether the four cables of the source measurement module 210 are stably connected or can be understood as being normally connected can be determined by judging the measured voltage value twice. Thus, through steps S210 to S260, the failure in the calibration process can be reduced.

[0087] In some embodiments, in step S30, the calibration control circuit 40 controls the power supply measurement circuit 20 to apply the excitation signal to the ATE device 200 and measure the voltage or current generated by the ATE device 200 in real time according to the control signal, so as to calibrate the ATE device 200, including: In step S310, the first calibration switch circuit 410 in the calibration control circuit 40 controls the connection of the source measurement module 210 and the connection end of the device power supply unit of the ATE device 200 according to the control signal; In step S320, the source measurement module 210 is set to the FNMV mode, and a plurality of third measurement voltages are obtained by measuring a plurality of voltages generated by the device power supply unit through the source measurement module 210 multiple times; In step S330, the device power supply unit is calibrated in voltage according to the plurality of third measurement voltages and the plurality of voltages generated by the device power supply unit; In step S340, the source measurement module 210 is set to the FVMI mode, and a plurality of first measurement currents are obtained by measuring a plurality of currents generated by the device power supply unit through the source measurement module 210 multiple times; In step S350, the device power supply unit is calibrated in current according to the plurality of first measurement currents and the plurality of currents generated by the device power supply unit.

[0088] In this embodiment, steps S310 to S330 are calibration of the driving voltage FV of the DPS resource. In step S310, the first calibration switch circuit 410 is controlled by the control signal to make the circuit conductive, and then the source measurement module 210 is connected to the connection end of the device power supply unit (i.e., the DPS resource) of the ATE device 200. Then, in step S320, the source measurement module 210 is set to the FNMV mode. The device power supply unit of the ATE device 200 outputs a voltage. The voltage value output by the device power supply unit of the ATE device 200 is measured by the source measurement module 210 (i.e., SMU) to obtain a third measurement voltage. The third measurement voltage can be understood as the voltage value actually measured by the source measurement module 210. By replacing the voltage of the device power supply unit of the ATE device 200, a third measurement voltage can be obtained again by the source measurement module 210.

[0089] In step S330, the third measurement voltage each time is compared with the voltage generated by the device power supply unit to calculate the voltage error each time. Thus, by comparing the plurality of third measurement voltages with the plurality of voltages generated by the device power supply unit, a plurality of voltage errors can be calculated. Based on the plurality of third measurement voltages, the plurality of voltages generated by the device power supply unit, and the plurality of voltage errors, an error curve y=kx+b can be obtained. If the gain error k in the error curve is within the gain error range and the bias b is within the bias range, it is determined that the voltage calibration of the device power supply unit is completed, and the result is stored in the memory of the ATE device 200 (i.e., ATE machine). Otherwise, it is considered that the voltage calibration of the device power supply unit is abnormal, and the user needs to be warned to determine the calibration condition.

[0090] Steps S340 to S350 are calibration of the driving current FI of the DPS resource. In step S340, the source measurement module 210 is set to the FVMI mode. The device power supply unit of the ATE device 200 outputs a current. The current value output by the device power supply unit of the ATE device 200 is measured by the source measurement module 210 (i.e., SMU) to obtain a first measurement current. The first measurement current can be understood as the current value actually measured by the source measurement module 210. In the same current gear, by replacing the current of the device power supply unit of the ATE device 200, a first measurement current can be obtained again by the source measurement module 210.

[0091] In step S350, the first measured current is compared with the current generated by the device power supply unit in the same current gear, and the current error of each time is calculated. Thus, the plurality of first measured currents are compared with the plurality of currents generated by the device power supply unit, and the plurality of current errors can be calculated. Based on the plurality of first measured currents, the plurality of currents generated by the device power supply unit, and the plurality of current errors, the error curve y=kx+b can be obtained. If the gain error k in the error curve is within the gain error range, and the bias b is within the bias range, it is determined that the current calibration of the device power supply unit is completed, and is stored in the memory of the ATE device 200 (i.e., the ATE machine). Otherwise, it is considered that the current calibration of the device power supply unit is abnormal, and the user needs to be warned to determine the calibration condition.

[0092] Further, by switching different current gears, the error data under different current gears can be continuously obtained through steps S340 to S350. Thus, according to the above method, the gain error k and the bias b of the error curve under each current gear can be determined to realize the current calibration of the device power supply unit.

[0093] In some embodiments, step S30, the calibration control circuit 40 controls the power supply measurement circuit 20 to measure the voltage or current generated by the ATE device 200 in real time while applying the excitation signal to the ATE device 200 according to the control signal, to calibrate the ATE device 200, further comprising: Step S360, setting the source measurement module 210 to FVMI mode; Step S370, measuring a plurality of device end measurement voltages by the device power supply unit through a plurality of power supply voltages applied by the source measurement module 210; Step S380, calibrating the device power supply unit according to the plurality of device end measurement voltages and the plurality of power supply voltages; Step S390, measuring a plurality of device end measurement currents by the device power supply unit through a plurality of power supply currents applied by the source measurement module 210; Step S391, calibrating the device power supply unit according to the plurality of device end measurement currents and the plurality of power supply currents.

[0094] In this embodiment, steps S360 to S380 are calibration of the measurement voltage MV of the DPS resource. In step S360, the source measurement module 210 is set to the FVMI mode, so that the source measurement module 210 outputs a supply voltage. Then, in step S370, the voltage value applied by the source measurement module 210 is measured by the device power supply unit of the ATE device 200 to obtain a device-end measurement voltage. The device-end measurement voltage can be understood as the voltage value actually measured by the device power supply unit of the ATE device 200. By replacing the supply voltage with another supply voltage by the source measurement module 210, another device-end measurement voltage can be obtained by the device power supply unit of the ATE device 200.

[0095] In step S380, the device-end measurement voltage each time is compared with the supply voltage to calculate a voltage error each time. Thus, by comparing the plurality of device-end measurement voltages with the plurality of supply voltages, a plurality of voltage errors can be calculated. Based on the plurality of device-end measurement voltages, the plurality of supply voltages, and the plurality of voltage errors, an error curve y=kx+b can be obtained. If the gain error k in the error curve is within the gain error range and the bias b is within the bias range, it is determined that the calibration of the measurement voltage of the device power supply unit is completed and is stored in the memory of the ATE device 200 (i.e., the ATE machine). Otherwise, it is considered that the calibration of the measurement voltage of the device power supply unit is abnormal, and the user needs to be warned to determine the calibration condition.

[0096] Steps S390 to S391 are calibration of the measurement current MI of the DPS resource. In step S390, a supply current is output by the source measurement module 210, and both the positive and negative segments need to be calibrated. The current value applied by the source measurement module 210 is measured by the device power supply unit of the ATE device 200 to obtain a device-end measurement current. The device-end measurement current can be understood as the current value actually measured by the device power supply unit of the ATE device 200. Within the same current gear, by replacing the supply current with another supply current by the source measurement module 210, another device-end measurement current can be obtained by the device power supply unit of the ATE device 200.

[0097] In step S391, the device end measurement current of each time is compared with the supply current in the same current gear, and the current error of each time is calculated. Thus, the plurality of device end measurement currents are compared with the plurality of supply currents, and the plurality of current errors can be calculated. Based on the plurality of device end measurement currents, the plurality of supply currents and the plurality of current errors, the error curve y=kx+b can be obtained. If the gain error k in the error curve is within the gain error range, and the bias b is within the bias range, it is determined that the measurement current calibration of the device power supply unit is completed, and is stored in the memory of the ATE device 200 (i.e. the ATE machine). Otherwise, it is considered that the measurement current calibration of the device power supply unit is abnormal, and needs to be alarmed to the user to judge the calibration condition.

[0098] Further, by switching different current gears, the error data under different current gears can be continuously obtained through steps S390 to S391. Thus, according to the above method, the gain error k and the bias b can be judged for the error curve under each current gear, so as to realize the calibration of the measurement current MI of the device power supply unit.

[0099] Therefore, through steps S310 to S391, the calibration of the driving voltage FV, the driving current FI, the measurement voltage MV and the measurement current MI of the DPS resource of the ATE device 200 can be completed. After the calibration of the DPS resource is completed, the calibration control circuit 40 can be switched to the calibration of the next BDPS resource, BPMU resource and PPMU resource.

[0100] In some embodiments, the calibration of the BDPS resource is the same as that of the DPS resource, which will not be repeated here, and the calibration process of steps S310 to S391 can be referred to.

[0101] In some embodiments, when the BPMU resource and the DPS resource are calibrated, they are all calibrated from the driving voltage FV, the driving current FI, the measurement voltage MV and the measurement current MI, so as to obtain different calibration parameters, and write different calibration values according to the gears for subsequent use. The specific process can also be referred to the calibration process of steps S310 to S391, which will not be repeated here.

[0102] In some embodiments, the calibration of the PPMU resource is the same as that of the BPMU resource, which will not be repeated here.

[0103] In some embodiments, Figure 4 The calibration channels corresponding to other resources shown can be extended according to actual application requirements, for example, extended to channel calibration of RVS resource or extended to channel calibration of LCD resource, which increases the multiplexing function of the calibration system 100 of the ATE device.

[0104] In the above various embodiments, the control software controls the ATE device 200, the source measurement module 210 and the control module 10 through Ethernet to realize the output voltage and current, the measurement voltage and current and the control of the plurality of switches.

[0105] It should be understood that the size of the serial number of each step in the above embodiments does not mean the order of execution, and the execution order of each process should be determined according to its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0106] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the above division of each functional unit and module is exemplified, and in actual application, the above functions can be completed by different functional units and modules according to needs, that is, the internal structure of the device is divided into different functional units or modules to complete all or part of the functions described above. Each functional unit and module in the embodiment can be integrated in one processing unit, or each unit can exist physically, or two or more units can be integrated in one unit. The above integrated unit can be realized in the form of hardware or in the form of software functional unit. In addition, the specific name of each functional unit and module is only for easy distinction, and does not limit the protection scope of the present application. The specific working process of the unit and module in the above system can be referred to the corresponding process in the foregoing method embodiments, which will not be described here.

[0107] In the above embodiments, the description of each embodiment has its own emphasis, and the parts not described or recorded in a certain embodiment can be referred to the related description of other embodiments.

[0108] Those of ordinary skill in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be realized in electronic hardware or a combination of computer software and electronic hardware. Whether the functions are executed in hardware or software depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0109] In the embodiments of the present application, it should be understood that the disclosed apparatus / terminal device and method can be implemented in other manners. For example, the described apparatus / terminal device embodiments are merely schematic. Taking the division of the modules or units as an example, the division can be split in another manner, for example, a plurality of units can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections can be indirect couplings or communication connections through some interfaces, devices or units, and can be in electrical, mechanical or other forms.

[0110] The units described as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, i.e., can be located in one place, or can be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the embodiments.

[0111] In addition, each functional unit in the various embodiments of the present application can be integrated in one processing unit, or each unit can be physically present separately, or two or more units can be integrated in one unit. The integrated unit can be realized in the form of hardware or in the form of a software functional unit.

[0112] The integrated module / unit, if realized in the form of a software functional unit and sold or used as an independent product, can be stored in a computer readable storage medium. Based on this understanding, all or part of the flow of the above-mentioned embodiment methods can also be completed by a computer program instructing related hardware, and the computer program can be stored in a computer readable storage medium. When the processor executes the computer program, the steps of each method embodiment described above can be implemented. The computer program includes computer program code, which can be in the form of source code, object code, executable file or some intermediate form. The computer readable medium can include any entity or device capable of carrying the computer program code, recording medium, U disk, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signal, telecommunication signal and software distribution medium, etc.

[0113] The above-described embodiments are only used to illustrate the technical solutions of the present application, but not limit them; although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.

Claims

1. A calibration system of an ATE device, characterized by, The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit.

2. The calibration system of an ATE device of claim 1, wherein, The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit.

3. The calibration system of an ATE device of claim 2, wherein, The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit.

4. The calibration system of the ATE device of claim 1, wherein, The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. 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The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to a power supply measurement circuit and a test circuit. The application relates to At least one first calibration switch circuit (410) is connected with the control module (10), the power supply measurement circuit (20) and the ATE device (200) respectively, and is used for controlling the power supply measurement circuit (20) to calibrate the device power supply unit and the board-level device power supply unit of the ATE device (200) according to the control signal when the connection end state of the power supply measurement circuit (20) is stable and the power supply measurement circuit (20) is switched to the first calibration switch circuit (410).

5. The calibration system of the ATE device of claim 1, wherein, The calibration control circuit (40) comprises: At least one second calibration switch circuit (420) is connected with the control module (10), the power supply measurement circuit (20) and the ATE device (200) respectively, and is used for controlling the power supply measurement circuit (20) to calibrate the board-level measurement unit and the pin measurement unit of the ATE device (200) according to the control signal when the connection end state of the power supply measurement circuit (20) is stable and the power supply measurement circuit (20) is switched to the second calibration switch circuit (420).

6. The calibration system of the ATE device of claim 1, wherein, The system further comprises: A verification load (510); A verification switch circuit (520) connected with the verification load (510), the control module (10) and the power supply measurement circuit (20); The verification switch circuit (520) is used for controlling the verification load (510) to verify the ATE device (200) according to the control signal when the connection end state of the power supply measurement circuit (20) is stable and the power supply measurement circuit (20) is switched to the calibration control circuit (40).

7. A method of calibrating an ATE device, characterized by, The calibration system of the ATE device according to any one of claims 1 to 6 is used for calibrating the ATE device (200), and the method comprises: Sending a control signal by the control module (10); When the power supply measurement circuit (20) is switched to the test circuit (30), the test circuit (30) tests the connection end state of the power supply measurement circuit (20) according to the control signal; When the connection end state of the power supply measurement circuit (20) is stable and the power supply measurement circuit (20) is switched to the calibration control circuit (40), the calibration control circuit (40) controls the power supply measurement circuit (20) to apply an excitation signal to the ATE device (200) and simultaneously measures the voltage or current generated by the ATE device (200) in real time according to the control signal, so as to calibrate the ATE device (200).

8. The method of calibrating an ATE device of claim 7, wherein, The test circuit (30) tests the connection end state of the power supply measurement circuit (20) according to the control signal, which comprises: The first switch circuit (321) in the test circuit (30) receives the control signal, and according to the control signal, controls the feedback connection end of the reference module (310) in the test circuit (30) to be connected with the source measurement module (210) in the power supply measurement circuit (20); Setting the source measurement module (210) to FNMV mode, measuring the reference voltage provided by the reference module (310) through the source measurement module (210) to obtain a first measurement voltage; According to the first measurement voltage and the reference voltage, the state of the feedback connection end of the source measurement module (210) is determined; Setting the source measurement module (210) to FIMV mode, providing an excitation current to the excitation connection end of the source measurement module (210) through the reference module (310); Measuring the voltage under the action of the excitation current through the source measurement module (210) to obtain a second measurement voltage; According to the second measurement voltage and the expected voltage corresponding to the excitation current, the state of the excitation connection end of the source measurement module (210) is determined.

9. The method of calibrating an ATE device of claim 8, wherein, The calibration control circuit (40) controls the power supply measurement circuit (20) to apply an excitation signal to the ATE device (200) and simultaneously measures the voltage or current generated by the ATE device (200) in real time according to the control signal, so as to calibrate the ATE device (200), comprising: The first calibration switch circuit (410) in the calibration control circuit (40) controls the connection of the source measurement module (210) and the connection end of the device power supply unit of the ATE device (200) according to the control signal; Setting the source measurement module (210) to FNMV mode, measuring a plurality of voltages generated by the device power supply unit through the source measurement module (210) multiple times to obtain a plurality of third measurement voltages; According to the plurality of third measurement voltages and the plurality of voltages generated by the device power supply unit, the voltage of the device power supply unit is calibrated; Setting the source measurement module (210) to FVMI mode, measuring a plurality of currents generated by the device power supply unit through the source measurement module (210) multiple times to obtain a plurality of first measurement currents; According to the plurality of first measurement currents and the plurality of currents generated by the device power supply unit, the current of the device power supply unit is calibrated.

10. The method of calibrating an ATE device of claim 9, wherein, The calibration control circuit (40) controls the power supply measurement circuit (20) to apply an excitation signal to the ATE device (200) and simultaneously measures the voltage or current generated by the ATE device (200) in real time according to the control signal, so as to calibrate the ATE device (200), further comprising: Setting the source measurement module (210) to the FVMI mode; Measuring a plurality of power supply voltages applied by the source measurement module (210) through the device power supply unit multiple times to obtain a plurality of device end measurement voltages; According to the plurality of device end measurement voltages and the plurality of power supply voltages, the device power supply unit is measured voltage calibrated; Measuring a plurality of power supply currents applied by the source measurement module (210) through the device power supply unit multiple times to obtain a plurality of device end measurement currents; According to the plurality of device end measurement currents and the plurality of power supply currents, the device power supply unit is measured current calibrated.

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