Installation and debugging method suitable for particle accelerator extremely-high vacuum system

Abstract

The invention relates to the technical field of particle accelerators, in particular to an installation and debugging method suitable for an extremely high vacuum system of a particle accelerator. The installation and debugging method comprises the following steps: setting an overall installation sequence of the extremely high vacuum system in the particle accelerator; the machining and delivery sequence of the non-standard elements is adjusted according to the installation sequence; the positioning element is pretreated in the clean room; calibrating the mounting position of the positioning element by using a laser tracker; and connecting pieces are used for communicating the positioning elements. According to the method, the sequence of firstly installing the positioning elements and then installing the connecting pieces is set, meanwhile, the machining and delivery sequence of the non-standard elements is reasonably planned, and the mode that a clean room installation task and a tunnel installation task are parallel and all vacuum units are installed in parallel is adopted; therefore, a plurality of similar elements in the particle accelerator extremely-high vacuum system can be assembled and debugged at the same time, and the construction process of the whole system is accelerated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of particle accelerators, in particular to a kind of installation and debugging method suitable for particle accelerator ultra-high vacuum system. BACKGROUND

[0002] Particle accelerator is not only an important tool to promote the frontiers of basic science, but also an indispensable driving force for medicine, industry and future technology development. It is mainly composed of ion source, vacuum system, magnet system, high frequency system and beam diagnosis system. As one of the core components, the vacuum system reduces the pressure inside the accelerator to a very low level to minimize the collision between particle beam and residual gas molecules, thereby ensuring the stable transmission and life of the beam. Therefore, the performance of vacuum system directly affects the running efficiency of accelerator, beam quality and reliability of experimental results. The installation and debugging time of vacuum system is closely related to the length of beam line and the running vacuum. For example, the Large Hadron Collider (LHC) of European Center for Nuclear Research (CERN) is about 54Km long, and the running vacuum is 10 -8 Pa~10 -9 Pa. Its installation and debugging cycle is about 10 years. The Heavy Ion Accelerator (HIAF) is about 2Km long, and the running vacuum is 1×10 -5 Pa~5×10 -10 Pa. Its installation and debugging cycle is 18 months.

[0003] The installation and debugging of accelerator vacuum system is a complex, precise and time-consuming project. Before installation, the first thing to ensure is the temperature, humidity and cleanliness of the installation site, followed by the cleanliness of the vacuum cavity itself. At the same time, strict requirements are also made on the wearing and operation specifications of the installation personnel. In this way, the contamination of particles, dust and oil stains to the cavity can be minimized. On the other hand, the installation precision of particle accelerator beam channel connection position is usually high. For example, the installation precision of HIAF vacuum system in X, Y and Z directions of beam should be controlled within ±0.5mm, and the installation precision of light source type accelerator is required to be higher, generally controlled in micrometer level. Based on the above factors, the traditional sequential connection method is used for installation and debugging of accelerator vacuum system, which will result in low installation efficiency and slow construction process of entire accelerator vacuum system. SUMMARY

[0004] The present application aims to solve the technical problems existing in the related art. To this end, the present application proposes a kind of installation and debugging method suitable for particle accelerator ultra-high vacuum system, to realize the purpose of improving installation efficiency and accelerating the construction process of accelerator vacuum system.

[0005] The application provides a kind of installation debugging method suitable for particle accelerator ultra-high vacuum system, comprising: setting the overall installation sequence of the ultra-high vacuum system in the particle accelerator; According to the installation sequence, the processing and delivery sequence of non-standard components are adjusted; The positioning components are pretreated in the clean room; The installation position of the positioning components is calibrated using a laser tracker; Each positioning component is connected using a connecting piece.

[0006] According to the installation debugging method suitable for the particle accelerator ultra-high vacuum system provided by the application, the positioning components include a magnetic element vacuum chamber; The pretreatment of the positioning components in the clean room includes: vacuum leak detection of the magnetic element vacuum chamber in the clean room, installation of a baking sleeve on the outer wall of the magnetic element vacuum chamber after passing the leak detection, and then transferring and installing the magnetic element vacuum chamber to the corresponding magnet.

[0007] According to the installation debugging method suitable for the particle accelerator ultra-high vacuum system provided by the application, the positioning components also include a vacuum pump chamber; The pretreatment of the positioning components in the clean room includes: assembling the vacuum pump chamber, vacuum leak detection of the vacuum pump chamber, and then transferring and installing the assembled and leak detection passed vacuum pump chamber to the tunnel support.

[0008] According to the installation debugging method suitable for the particle accelerator ultra-high vacuum system provided by the application, the pretreatment of the positioning components in the clean room also includes: After passing the leak detection, the two ends of the positioning component are sealed with a blind plate and saved by filling nitrogen.

[0009] According to the installation debugging method suitable for the particle accelerator ultra-high vacuum system provided by the application, the calibration of the installation position of the positioning components using a laser tracker includes: The installation position of the positioning components is calibrated according to the three coordinate axes of the Cartesian coordinate system using a laser tracker, and the positioning accuracy of the positioning components in each direction is ensured to be less than or equal to 0.5 mm.

[0010] According to the installation debugging method suitable for the particle accelerator ultra-high vacuum system provided by the application, the connection of each positioning component using a connecting piece includes: The surface of the connecting piece is cleaned before connection, and the sealing surface of the connecting piece is inspected and alcohol wiped during connection to ensure the cleanliness of the sealing surface.

[0011] According to the installation debugging method suitable for the particle accelerator ultra-high vacuum system provided by the application, it also includes: After the installation of the ultra-high vacuum system is completed, the system-level vacuum leak detection, vacuum baking and limit vacuum obtaining are sequentially performed.

[0012] According to the installation and debugging method for the ultra-high vacuum system of the particle accelerator provided by the application, the system-level vacuum leak detection comprises the following steps: The rough pumping is performed on the ultra-high vacuum system by using the molecular pump and the dry pump set, and the vacuum leak detection is performed on the ultra-high vacuum system by using the helium mass spectrum leak detector.

[0013] According to the installation and debugging method for the ultra-high vacuum system of the particle accelerator provided by the application, the vacuum baking comprises the following steps: The rough pumping is performed on one vacuum unit in the ultra-high vacuum system, so that the pressure of the vacuum unit is reduced to 1*10 -5 Pa or below; The temperature of each component in the vacuum unit is raised to a specific temperature according to the temperature raising rate, and the specific temperature is maintained for 48 hours; The sputtering ion pump and the separation gauge in the vacuum pump chamber of the vacuum unit are started, and the interval gas of the ultra-high vacuum gauge is excluded.

[0014] According to the installation and debugging method for the ultra-high vacuum system of the particle accelerator provided by the application, the limit vacuum obtaining comprises the following steps: After the vacuum baking is completed, the temperature of each component in the vacuum unit is lowered according to the temperature lowering rate; When the temperature is lowered to 190 DEG C, the titanium sublimation pump in the vacuum pump chamber of the vacuum unit is sublimated once; When the pressure displayed by the ultra-high vacuum gauge is about 5*10 -8 Pa, the all-metal manual plug-in valve in the vacuum pump chamber of the vacuum unit is closed; After 12 hours, the reading of the separation gauge is observed to determine whether the internal part of the vacuum unit reaches the ultra-high vacuum range, and if not, the titanium sublimation pump is sublimated once.

[0015] The above one or more technical solutions in the application have at least one of the following technical effects: In the application, the sequence of first installing the positioning element and then installing the connecting element is set, the processing and delivery sequence of the non-standard element is reasonably planned, the clean room installation task and the tunnel installation task are parallel, and each vacuum unit is installed in parallel, so that multiple similar elements in the ultra-high vacuum system of the particle accelerator can be simultaneously assembled and debugged, and the construction process of the overall system is accelerated.

[0016] In addition to the technical problems solved by the present invention, the technical features of the technical solutions constituted by the present invention, and the advantages brought about by the technical features of these technical solutions as described above, other technical features of the present invention and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings, or will be learned through the practice of the present invention. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram illustrating an installation and commissioning method for an ultra-high vacuum system of a particle accelerator, provided in an embodiment of the present invention.

[0019] Figure 2 The HIAF-SRing ultra-high vacuum system with two vacuum units is provided for embodiments of the present invention.

[0020] Figure 3 This is a structural diagram of the second vacuum pump chamber provided in an embodiment of the present invention.

[0021] Figure label: 1. First high-vacuum pneumatic slide gate valve; 2. First bellows; 3. IPM vacuum chamber; 4. First quadrupole vacuum chamber; 5. Second bellows; 6. First vacuum pump chamber; 7. First vacuum pipeline; 8. Second vacuum pump chamber; 9. Third bellows; 10. Second vacuum pipeline; 11. First BPM chamber; 12. Fourth bellows; 13. Second high-vacuum pneumatic slide gate valve; 14. Third vacuum pump chamber; 15. Fifth bellows; 16. First dipolar vacuum chamber; 17. 18. Sixth bellows; 19. Fourth vacuum pump chamber; 20. Second quadrupole iron vacuum chamber; 21. Second BPM chamber; 22. Seventh bellows; 23. Third quadrupole iron vacuum chamber; 24. Fifth vacuum pump chamber; 25. Eighth bellows; 26. Second dipolar iron vacuum chamber; 27. Ninth bellows; 28. Third high-vacuum pneumatic slide gate valve; 29. ​​Sputter ion pump; 30. All-metal angle valve; 31. Separation gauge; 32. Titanium sublimation pump; 33. All-metal manual slide gate valve; 34. Molecular pump. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0023] In an embodiment of the present invention, an installation and commissioning method suitable for an ultra-high vacuum system of a particle accelerator is described.

[0024] like Figure 1 As shown, the installation and commissioning method includes: S1, setting the overall installation sequence of the ultra-high vacuum system in the particle accelerator; S2, adjusting the processing and delivery sequence of non-standard components according to the installation sequence; S3, pre-processing the positioning components in the clean room; S4, calibrating the installation position of the positioning components using a laser tracker; S5, connecting each positioning component using connectors.

[0025] The positioning elements include a magnetic element vacuum chamber and a vacuum pump chamber.

[0026] The pretreatment of the positioning element in the clean room includes: performing vacuum leak testing on the magnetic element vacuum chamber in the clean room; after the leak test is qualified, installing a baking sleeve on the outer wall of the magnetic element vacuum chamber; and then transferring and installing the magnetic element vacuum chamber into the corresponding magnet.

[0027] And / or, assemble the vacuum pump chamber in the clean room, perform vacuum leak testing on the vacuum pump chamber, and transfer the assembled and leak-tested vacuum pump chamber to the tunnel support for installation.

[0028] The installation and commissioning methods also include: S6, after completing the installation of the ultra-high vacuum system, performing system-level vacuum leak detection, vacuum baking, and ultimate vacuum acquisition in sequence.

[0029] Furthermore, the pretreatment of the positioning element in the clean room also includes: after passing the leak test, sealing both ends of the positioning element with a blind flange and storing it with nitrogen gas.

[0030] The calibration of the installation position of the positioning element using a laser tracker includes: The installation position of the positioning element is calibrated using a laser tracker along the three coordinate axes of the Cartesian coordinate system to ensure that the positioning accuracy of the positioning element in each direction is less than or equal to 0.5 mm.

[0031] The process of connecting the various positioning elements using connectors includes: cleaning the surface of the connectors before connection, and inspecting and wiping the sealing surface of the connectors with alcohol during connection to ensure that the sealing surface is clean.

[0032] Specifically, once the installation sequence of the particle accelerator construction is determined, the parallel installation of cleanroom facilities and on-site installation, as well as the parallel installation and commissioning, can be achieved by planning the delivery sequence of non-standard components.

[0033] During the installation process, the positioning elements are installed first, and the installation positions of the positioning elements are calibrated using a laser tracker in the X, Y, and Z directions of the Cartesian coordinate system. Then, the positioning elements are connected using connectors.

[0034] After installation, timely procedures such as system-level vacuum leak detection, baking sleeve installation, baking cable sorting, vacuum baking, and obtaining ultimate vacuum should be performed.

[0035] In this embodiment, the order of installing positioning elements first and then connecting parts is set. At the same time, the processing and delivery order of non-standard components is reasonably planned, and the clean room installation task and tunnel installation task are carried out in parallel, and the various vacuum units are installed in parallel. This allows multiple similar components in the particle accelerator ultra-high vacuum system to be assembled and debugged at the same time, which speeds up the construction process of the overall system.

[0036] Specifically, the system-level vacuum leak detection includes: performing a rough pumping of the ultra-high vacuum system using molecular pumps and dry pump units, and performing a vacuum leak detection of the ultra-high vacuum system using a helium mass spectrometer.

[0037] The vacuum baking process includes: performing a rough evacuation on a vacuum unit in the ultra-high vacuum system, reducing the pressure of the vacuum unit to 1×10⁻⁶. -5 Below Pa; heat each component in the vacuum unit to a specific temperature according to the heating rate, and maintain the specific temperature for 48 hours; start the sputtering ion pump and separation gauge in the vacuum pump chamber of the vacuum unit, and degas the ultra-high vacuum gauge at intervals.

[0038] The process of achieving ultimate vacuum includes: after vacuum baking, cooling each component in the vacuum unit according to a cooling rate; when the temperature drops to 190°C, performing a sublimation operation on the titanium sublimation pump in the vacuum pump chamber of the vacuum unit; and ensuring the pressure displayed on the ultra-high vacuum gauge is at 5 × 10⁻⁶. -8 When the pressure reaches approximately 100 Pa, close the all-metal manual slide valve in the vacuum pump chamber of the vacuum unit. After 12 hours, observe the reading of the separation gauge to determine whether the vacuum unit has reached the extremely high vacuum range. If not, perform another sublimation on the titanium sublimation pump.

[0039] Specifically, particle accelerator vacuum systems can be divided into ultra-high vacuum systems and extremely high vacuum systems, depending on the operating vacuum level. From an installation perspective, extremely high vacuum systems have more components than ultra-high vacuum systems. From a commissioning perspective, extremely high vacuum systems require vacuum preheating, while ultra-high vacuum systems do not. Therefore, the installation and commissioning process of an ultra-high vacuum system generally includes the installation and commissioning process of an ultra-high vacuum system.

[0040] A vacuum unit mainly consists of a bellows, an IPM chamber (which integrates a sputtering ion pump, a titanium sublimation pump, and an IPM detector), a vacuum pump chamber (which typically integrates a sputtering ion pump, a titanium sublimation pump, an all-metal manual gate valve, an all-metal angle valve, and a separation gauge), vacuum pipes, a quadrupole vacuum chamber, and a dipole vacuum chamber.

[0041] The vacuum unit is separated from the vacuum system by having a high-vacuum pneumatic gate valve at each of its two ends.

[0042] like Figure 2 As shown, the HIAF-SRing ultra-high vacuum system comprises two vacuum units. All components between the first ultra-high vacuum pneumatic slide gate valve 1 and the second ultra-high vacuum pneumatic slide gate valve 13 constitute one vacuum unit, defined here as the first vacuum unit. All components between the second ultra-high vacuum pneumatic slide gate valve 13 and the third ultra-high vacuum pneumatic slide gate valve 27 constitute another vacuum unit, defined here as the second vacuum unit. These two vacuum units are independent of each other.

[0043] The first vacuum unit is mainly composed of the first corrugated pipe 2, the IPM vacuum chamber 3, the first quadrupole vacuum chamber 4, the second corrugated pipe 5, the first vacuum pump chamber 6, the first vacuum pipe 7, the second vacuum pump chamber 8, the third corrugated pipe 9, the second vacuum pipe 10, the first BPM cavity 11, and the fourth corrugated pipe 12 connected in sequence.

[0044] The second vacuum unit is mainly composed of the third vacuum pump chamber 14, the fifth bellows 15, the first dipolar iron vacuum chamber 16, the sixth bellows 17, the fourth vacuum pump chamber 18, the second quadrupole iron vacuum chamber 19, the second BPM cavity 20, the seventh bellows 21, the third quadrupole iron vacuum chamber 22, the fifth vacuum pump chamber 23, the eighth bellows 24, the second dipolar iron vacuum chamber 25, and the ninth bellows 26 connected in sequence.

[0045] like Figure 3 As shown, the second vacuum pump chamber 8 integrates a sputtering ion pump 28, an all-metal angle valve 29, a separation gauge 30, a titanium sublimation pump 31, an all-metal manual slide gate valve 32, and a molecular pump 33.

[0046] Among them, the first high vacuum pneumatic slide gate valve 1 and the second high vacuum pneumatic slide gate valve 13 separate a long section of the vacuum system, which facilitates later debugging and maintenance.

[0047] Separation gauge 30 can achieve 1x10 -2 Pa~2x10 -10 Precise measurement of pressure range (Pa). Sputter ion pump 28 is used to evacuate argon, methane, and other inert gases. Titanium sublimation pump 31 is used to evacuate hydrogen and carbon monoxide. Molecular pump 33 is used for rough evacuation of the vacuum unit and for venting during vacuum baking. All-metal manual gate valve 32 is used to control the on / off state between molecular pump 33 and the vacuum unit. All-metal angle valve 29 is used for nitrogen purging.

[0048] The installation and commissioning of the ultra-high vacuum system of a particle accelerator are generally carried out according to the following steps: 1. Coordination of beam pipe processing: Adjust the sequential production and delivery of each section of equipment according to the installation sequence. Taking the first vacuum unit as an example, the processing and delivery sequence of each vacuum unit is as follows: all baking sleeves involved in this vacuum unit → first quadrupole vacuum chamber 4 → IPM vacuum chamber 3, first vacuum pump chamber 6 and second vacuum pump chamber 8 → first corrugated pipe 2, second corrugated pipe 5, third corrugated pipe 9, fourth corrugated pipe 12, first vacuum pipe 7 and second vacuum pipe 10; 2. Vacuum Leak Detection in the Cleanroom for Magnetic Components: Vacuum leak detection is performed on the first quadrupole vacuum chamber 4, the first dipole vacuum chamber 16, and the second quadrupole vacuum chamber 19 in the cleanroom. It is important to note that after leak detection, the flanges at both ends of the magnetic component vacuum chamber must be sealed with blind flanges and stored with nitrogen gas. 3. Installation of baking sleeve in cleanroom for magnetic component vacuum chamber: After leak detection is passed, install the baking sleeve customized according to the outer dimensions of the magnetic component vacuum chamber at a 1:1 scale. 4. Transferring and installing the magnetic component vacuum chambers into the corresponding magnets: Transferring the pre-treated first quadrupole iron vacuum chamber 4, first dipole iron vacuum chamber 16, and second quadrupole iron vacuum chamber 19 to the tunnel and placing them on the magnet pole surface; 5. Vacuum leak detection in cleanroom: Vacuum leak detection is performed on IPM vacuum chamber 3, first vacuum pump chamber 6, and second vacuum pump chamber 8 in the cleanroom. 6. Cleanroom Assembly of Vacuum Pump Chamber: The assembly and leak testing of the second vacuum pump chamber 8 are completed in the cleanroom. After the second vacuum pump chamber 8 is assembled, the assembly of the first vacuum pump chamber 6 and the IPM vacuum chamber 3 continues. It should be noted that after leak testing, the flanges at both ends of the vacuum pump chamber must be sealed with blind flanges and stored with nitrogen. 7. Transfer and installation of vacuum pump chambers to tunnel supports: The assembled and leak-tested IPM vacuum chamber 3, first vacuum pump chamber 6, and second vacuum pump chamber 8 are transferred and installed in batches to the tunnel supports. It is worth noting that the first ultra-high vacuum pneumatic slide gate valve 1 and the second ultra-high vacuum pneumatic slide gate valve 13 are also positioning components; these valves must also be installed during the installation of the vacuum pump chambers. 8. Positioning of magnetic component vacuum chamber and vacuum pump chamber: A laser tracker is used to accurately position the first quadrupole vacuum chamber 4, IPM vacuum chamber 3, first vacuum pump chamber 6 and second vacuum pump chamber 8 to ensure that their positioning accuracy in the X, Y and Z directions is less than or equal to 0.5 mm. 9. Connect the first quadrupole vacuum chamber 4 and the IPM vacuum chamber 3, and connect the second quadrupole vacuum chamber 19, the fourth vacuum pump chamber 18 and the second BPM chamber 20.

[0049] Before connecting, clean the surface of the connector. During connection, check the sealing surface of the connector and wipe it with alcohol to ensure that the sealing surface is clean and free of oil. 10. Install the first corrugated pipe 2, the second corrugated pipe 5, the third corrugated pipe 9, the fourth corrugated pipe 12, the first vacuum pipe 7, and the second vacuum pipe 10; 11. Install the all-metal manual slide gate valve 32 and titanium sublimation pump 31 in the second vacuum pump chamber 8; 12. System-level vacuum leak detection: Start the molecular pump 33 and dry pump unit to perform rough pumping on the first vacuum unit, and use a helium mass spectrometer leak detector to perform vacuum leak detection on the first vacuum unit; 13. Baking preparation: After confirming that there is no leakage, complete the installation of the baking sleeve for components such as IPM vacuum chamber 3, first vacuum pump chamber 6, first vacuum pipeline 7 and first corrugated pipe 2, and carry out the wiring of baking cables, vacuum gauge and sputtering ion pump 28. 14. Vacuum baking and ultimate vacuum acquisition: The first vacuum unit is roughly evacuated using molecular pump 33 and dry pump unit; the pressure of the vacuum unit is reduced to 1×10 -5 Below Pa; according to the heating rate, the positioning elements such as the first high vacuum pneumatic slide gate valve 1, IPM vacuum chamber 3, and second high vacuum pneumatic slide gate valve 13 are heated to 200℃, while the connecting parts such as the first bellows 2, first quadrupole vacuum chamber 4, second bellows 5, first vacuum pump chamber 6, first vacuum pipeline 7, second vacuum pump chamber 8, third bellows 9, second vacuum pipeline 10, first BPM cavity 11, and fourth bellows 12 are heated to 250℃; after holding at the temperature, the high vacuum sputtering ion pump 28 is started, the separation gauge 30 is opened, and the high vacuum gauge is degassed intermittently; The positioning element is kept at 200℃ for 48 hours, and the connector is kept at 250℃ for 48 hours. Then, vacuum baking is performed, and the various components in the vacuum unit are cooled according to the cooling rate. When the temperature drops to 190℃, the titanium sublimation pump 31 performs the first sublimation, and the ultra-high vacuum gauge displays 5×10⁻⁶. -8 When the pressure is around Pa, close the all-metal manual slide valve 32; After 12 hours, observe the reading of the separation gauge 30 to determine whether the vacuum unit has reached the extremely high vacuum range. If not, perform another sublimation on the titanium sublimation pump 31.

[0050] Once these operations are completed, the installation and commissioning of the entire ultra-high vacuum system is finished.

[0051] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0052] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0053] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0054] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms are not limited to the same embodiments or examples. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An installation and commissioning method suitable for ultra-high vacuum systems of particle accelerators, characterized in that, include: Determine the overall installation sequence for the ultra-high vacuum system in the particle accelerator; Adjust the processing and delivery sequence of non-standard components according to the installation sequence; Pre-treatment of positioning elements is carried out in a clean room; The installation position of the positioning element is calibrated using a laser tracker; Connect the various positioning elements using connectors.

2. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 1, characterized in that, The positioning element includes a magnetic element vacuum chamber; The pretreatment of the positioning element in the clean room includes: performing vacuum leak testing on the magnetic element vacuum chamber in the clean room; after the leak test is qualified, installing a baking sleeve on the outer wall of the magnetic element vacuum chamber; and then transferring and installing the magnetic element vacuum chamber into the corresponding magnet.

3. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 2, characterized in that, The positioning element also includes a vacuum pump chamber; The pretreatment of the positioning element in the clean room includes: assembling the vacuum pump chamber in the clean room, performing vacuum leak testing on the vacuum pump chamber, and transferring the assembled and leak-tested vacuum pump chamber to the tunnel support for installation.

4. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 3, characterized in that, The pretreatment of the positioning element in the clean room also includes: After the leak test is passed, the two ends of the positioning element are sealed with a blind flange and stored with nitrogen gas.

5. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 4, characterized in that, The calibration of the installation position of the positioning element using a laser tracker includes: The installation position of the positioning element is calibrated using a laser tracker along the three coordinate axes of the Cartesian coordinate system to ensure that the positioning accuracy of the positioning element in each direction is less than or equal to 0.5 mm.

6. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 5, characterized in that, The method of connecting the various positioning elements using connectors includes: Clean the surface of the connectors before connection. During connection, check and wipe the sealing surface of the connectors with alcohol to ensure that the sealing surface is clean.

7. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to any one of claims 1 to 6, characterized in that, Also includes: After the installation of the ultra-high vacuum system is completed, system-level vacuum leak detection, vacuum baking, and ultimate vacuum are carried out in sequence.

8. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 7, characterized in that, The system-level vacuum leak detection includes: Molecular pumps and dry pump units were used to perform rough evacuation of the ultra-high vacuum system, and a helium mass spectrometer was used to perform vacuum leak detection on the ultra-high vacuum system.

9. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 8, characterized in that, The vacuum baking process includes: A rough pump is performed on a vacuum unit in an ultra-high vacuum system to reduce the pressure in the vacuum unit to 1 × 10⁻⁶. -5 Below Pa; Each component in the vacuum unit is heated to a specific temperature according to the heating rate, and the specific temperature is maintained for 48 hours. Start the sputtering ion pump and separation gauge in the vacuum pump chamber of the vacuum unit, and degas the ultra-high vacuum gauge at intervals.

10. The installation and commissioning method for an ultra-high vacuum system of a particle accelerator according to claim 9, characterized in that, The process of obtaining ultimate vacuum includes: After vacuum baking is completed, the components in the vacuum unit are cooled according to the cooling rate. When the temperature drops to 190℃, the titanium sublimation pump in the vacuum pump chamber of the vacuum unit is sublimated once. The pressure displayed by the ultra-high vacuum gauge is 5 × 10⁻⁶. -8 When the pressure is around Pa, close the all-metal manual slide gate valve in the vacuum pump chamber of the vacuum unit; After 12 hours, observe the reading of the separation gauge to determine whether the vacuum unit has reached the extremely high vacuum range. If not, perform another sublimation on the titanium sublimation pump.

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