Substrate storage container

Abstract

The substrate storage container is provided with: a container main body for storing a plate-shaped substrate (W) having at least one corner section in plan view, forming a substrate storage space (27) in which the substrate (W) can be arranged and stored, one end section having an opening peripheral edge section in which a container main body opening section communicating with the substrate storage space (27) is formed, and the other end section being closed; a lid which can be attached to and detached from the container main body opening and which can close the container main body opening; and side substrate supporting parts (5) which are arranged in pairs in the substrate accommodating space (27) and are capable of supporting the edge parts of the substrates (W) in a state in which the adjacent substrates (W) are arranged at a predetermined interval, the side substrate supporting parts (5) being provided with a plurality of plate parts (51) which are arranged between the adjacent substrates (W), and a plate part supporting part (52) which supports the plate parts (51). The plate support section (52) has: an opening section (53) that opens in a direction intersecting a vertical direction (D2), which is a direction in which the plate sections (51) are arranged; and a non-opening section (54) disposed at least between the plate section (51) and the opening section (53) in the vertical direction (D2).

Description

Technical Field

[0001] This invention relates to a substrate storage container for storing, handling, storing, and transporting plate-shaped (e.g., quadrilateral plate-shaped) substrates that have corners when viewed from above. Background Technology

[0002] As substrate storage containers for storing and transporting substrates such as semiconductor wafers, containers having a main body and a lid are known in the past (see, for example, Patent Document 1). The substrate to be stored is not limited to a circular plate-shaped substrate, but can also be a plate-shaped substrate such as a quadrilateral plate that has corners (top, corners) when viewed from above.

[0003] One end of the container body has an opening periphery forming the container body opening. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed within the container body. The substrate storage space is surrounded by the wall and can store multiple substrates. A cover can be detached from the opening periphery to close the container body opening. Side substrate support portions are provided in pairs on the wall within the substrate storage space. The side substrate support portions include multiple plate portions disposed between adjacent substrates, and plate portion support portions supporting the plate portions. The side substrate support portions can support the edges of multiple substrates in a state where adjacent substrates are separated and arranged at a predetermined interval.

[0004] A front retaining member is provided on a portion of the lid, opposite the substrate storage space when the container body opening is closed. The front retaining member supports the edges of multiple substrates when the container body opening is closed by the lid. Additionally, a rear substrate support is provided on the wall in pair with the front retaining member. The rear substrate support cooperates with the front retaining member when the container body opening is closed by the lid, supporting the edges of multiple substrates while adjacent substrates are separated and arranged at predetermined intervals. Existing technical documents Patent documents

[0005] Patent Document 1: Japanese Patent Publication No. 6445027 Summary of the Invention The technical problem to be solved by the present invention

[0006] However, it is desirable to improve the cleanability and drying performance of the side substrate support when cleaning is performed with the side substrate support mounted on the container body.

[0007] The purpose of this invention is to provide a substrate storage container that improves the cleanability and drying performance of the side substrate support portion when cleaning is performed while the side substrate support portion is mounted on the container body. Technical solutions for solving technical problems

[0008] (1) The present invention relates to a substrate storage container for storing a plate-shaped substrate having at least one corner when viewed from above. The substrate storage container comprises: a container body having a substrate storage space formed inside, capable of arranging and storing a plurality of said substrates, having an opening periphery portion at one end having a container body opening communicating with the substrate storage space, and the other end being closed; a cover detachable from the container body opening and capable of closing the container body opening; and a side substrate support portion arranged in pairs within the substrate storage space, capable of supporting the edge portions of the plurality of said substrates in a state in which adjacent said substrates are separated and arranged at a predetermined interval, the side substrate support portion comprising a plurality of plate portions disposed between adjacent said substrates and a plate portion support portion supporting the plate portions, the plate portion support portion having: an opening portion opening in a direction intersecting the direction of arrangement of the plurality of plate portions, i.e., the vertical direction; and a non-opening portion disposed at least between the plate portions and the opening portion in the vertical direction.

[0009] (2) In the substrate storage container described in (1), the non-opening portion has a height on the upper and / or lower side of the opening portion that restricts the movement of the substrate that abuts against the non-opening portion.

[0010] (3) In the substrate storage container described in (1) or (2), the opening has a shape in which the corner of the substrate disposed between adjacent plate portions can be inserted.

[0011] (4) In any of the substrate storage containers described in (1) to (3), the height of the non-opening portion located below the opening portion is 0.5 mm or more.

[0012] (5) In any of the substrate storage containers described in (1) to (4), the height of the non-opening portion located above the opening portion is 0.5 mm or more. Invention Effects

[0013] According to the present invention, a substrate storage container is provided that improves the cleanability and drying performance of the side substrate support portion when cleaning is performed with the side substrate support portion mounted on the container body. Attached Figure Description

[0014] Figure 1 This is an exploded perspective view showing that a plurality of substrates W are housed in a substrate storage container 1 according to one embodiment of the present invention. Figure 2 This is a perspective view of the container body 2 of a substrate storage container 1 according to one embodiment of the present invention, shown from below. Figure 3 yes Figure 2 Cross-sectional view. Figure 4 This is a perspective view of the cover 3 of a substrate storage container 1 according to one embodiment of the present invention. Figure 5 This is a top view representing one way of representing substrate W. Figure 6A This is a perspective view of the left-side side substrate support portion 5 as seen from the right side. Figure 6B This is a right view of the side substrate support portion 5 on the left side. Figure 7 yes Figure 6B A magnified view of a portion of the image. Figure 8 It involves cutting through the plane from the D2-D3 direction when viewed from the rear (D12). Figure 7 The resulting longitudinal section diagram. Figure 9 yes Figure 3 A partial enlarged view of the side substrate support portion 5 on the left side. Figure 10 This is a diagram showing another way of the opening 53 of the plate support portion 52. Figure 7 (Corresponding diagram). Figure 11 This is another way of showing the top view shape of the substrate W (Figure) Figure 5 (Corresponding diagram). Detailed Implementation

[0015] Hereinafter, a substrate storage container 1 according to one embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is an exploded perspective view showing a case in which multiple substrates W are stored in a substrate storage container 1 according to one embodiment of the present invention. Figure 2 This is a perspective view of the container body 2 of a substrate storage container 1 according to one embodiment of the present invention, shown from below. Figure 3 yes Figure 2 Cross-sectional view. Figure 4 This is a perspective view of the cover 3 of a substrate storage container 1 according to one embodiment of the present invention. Figure 5 This is a top view representing one way of representing substrate W. Figure 6A This is a perspective view of the left-side side substrate support portion 5 as seen from the right side. Figure 6BThis is a right view of the side substrate support portion 5 on the left side. Figure 7 yes Figure 6B A magnified view of a portion of the image. Figure 8 It involves cutting through the plane from the D2-D3 direction when viewed from the rear (D12). Figure 7 The resulting longitudinal section diagram. Figure 9 yes Figure 3 A partial enlarged view of the side substrate support portion 5 on the left side. Figure 10 This is a diagram showing another way of the opening 53 of the plate support portion 52. Figure 7 (Corresponding diagram). Figure 11 This is another way of showing the top view shape of the substrate W (Figure) Figure 5 (Corresponding diagram).

[0016] For ease of explanation, the direction from the container body 2 towards the lid 3 (described later) will be considered here. Figure 1 The direction from the upper right to the lower left (as described later) is defined as the forward direction D11 or front-side D11, and its opposite direction is defined as the rear direction D12 or rear-side D12. Together, they are defined as the front-rear direction D1. Additionally, the direction from the lower wall 24 to the upper wall 23 (described later) Figure 1 The upward direction (in the context) is defined as the upward direction D21 or upper side D21, and its opposite direction is defined as the downward direction D22 or lower side D22. Together, they define the vertical direction D2. Additionally, the direction from the second sidewall 26 towards the first sidewall 25 (described later) Figure 1 The direction from the bottom right to the top left is defined as left direction D31 or left side D31, and its opposite direction is defined as right direction D32 or right side D32. Together they are defined as left-right direction D3 or horizontal direction D3. Arrows representing these directions are illustrated in some of the accompanying drawings.

[0017] like Figure 1 , Figure 3 as well as Figure 5 As shown, in one embodiment, the substrate W stored in the substrate storage container 1 is a plate-shaped substrate having at least one corner W4 when viewed from above (for example, substrates with an overall circular or elliptical shape are not the object being stored). The top-view shape of such a substrate W is typically a polygon consisting only of multiple straight lines without curved edges, typically a quadrilateral. The corner W4 may not be a perfectly pointed point. Figure 5 As shown in the lower left corner W41, a C-shaped chamfer can also be applied to corner W4. Additionally, as... Figure 5 As shown in the lower right corner W42, a rounded chamfer can also be applied. Furthermore, the rounded chamfer of corner W41 and the rounded chamfer of corner W42 are depicted in an exaggerated manner. Various deburring techniques, such as light chamfering, can also be applied to corner W4. For example... Figure 11As shown, the top view shape of the substrate W may also partially have curved (e.g., circular arc, elliptical arc) edge portions W5. In this embodiment, the top view shape of the substrate W is a rectangle (including a square) with four corner portions W4.

[0018] Substrate W is a thin wafer used in industry, such as a silicon wafer, glass wafer, or sapphire wafer. Substrate W can be a substrate cut from a circular top view shape to a top view shape with at least one corner. Substrate W can also undergo further post-processing after mirror finishing.

[0019] like Figures 1-4 As shown, the substrate storage container 1 is used as a container for storing substrates W and for storing, handling, storing, and transporting substrates W by various methods. It includes a container body 2, a cover 3, a side substrate support 5, and a rear substrate support 6 (see reference). Figure 3 ) and front retaining member 7 (see reference) Figure 4 The cover 3 has a front retaining member 7 (see reference). Figure 4 ).

[0020] The container body 2 has a cylindrical wall 20 with a container body opening 21 at one end and closed at the other end. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is formed by surrounding the wall 20. A side substrate support 5 is disposed on a portion of the wall 20 and the portion forming the substrate storage space 27. Multiple substrates W can be stored within the substrate storage space 27. Figure 1 as well as Figure 3 The substrate W is represented by a double-dotted line.

[0021] Side substrate support portions 5 are provided on the wall portion 20 in pairs in the left-right direction D3 within the substrate storage space 27. By abutting against the edges of the plurality of substrates W, the side substrate support portions 5 can support the edges of the plurality of substrates W in a state where adjacent substrates W are separated from each other at a predetermined interval and arranged. In this embodiment, it can support the two straight sides (edge ​​portions) of a rectangular substrate W that are opposite each other in the left-right direction D3.

[0022] The side substrate support 5 can be configured such that: (1) when the container main body opening 21 is not closed by the cover 3, it can support the edges of the multiple substrates W by abutting against the edges of the multiple substrates W, so that adjacent substrates W are separated from each other and arranged at a predetermined interval (when the container main body opening 21 is closed by the cover 3, the side substrate support 5 does not abut against the edges of the multiple substrates W); and (2) even in any case, whether the container main body opening 21 is closed by the cover 3 or not, it can support the edges of the multiple substrates W by abutting against the edges of the multiple substrates W, so that adjacent substrates W are separated from each other and arranged at a predetermined interval. The side substrate support 5 of this embodiment has the configuration of (2).

[0023] The rear substrate support 6 is located within the substrate storage space 27 and is held in conjunction with the front retaining member 7 (see reference). Figure 4 The components are arranged in pairs along the front-to-back direction D1. When the container body opening 21 is closed by the cover 3, the rear substrate support 6 cooperates with the front retaining member 7 and abuts against the edges of the multiple substrates W, thereby supporting the rear edges of the multiple substrates W. In this embodiment, it can support the rear edge D12 of the rectangular substrate W.

[0024] like Figure 1 , Figure 4 As shown, the cover 3 can be detached from the periphery 28 of the opening 21 forming the container body opening, and can close the container body opening 21. The front retaining member 7 is provided on a part of the cover 3 and is opposite to the substrate storage space 27 when the container body opening 21 is closed by the cover 3. The front retaining member 7 is arranged inside the substrate storage space 27 in a pair with the rear substrate support 6 in the front-rear direction D1.

[0025] When the container body opening 21 is closed by the cover 3, the front retaining member 7 can support the front portion of the edges of the multiple substrates W by abutting against the edges of the multiple substrates W. In this embodiment, it can support the straight side (edge) of the front side D11 of the rectangular substrates W. When the container body opening 21 is closed by the cover 3, the front retaining member 7 supports the multiple substrates W by cooperating with the rear substrate support 6, and holds the substrates W in a state in which adjacent substrates W are separated from each other at a predetermined interval and arranged.

[0026] The substrate storage container 1 is made of resin such as plastic material. Examples of resins include thermoplastic resins such as polycarbonate, cyclic olefin polymers, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymers, as well as alloys thereof.

[0027] The following is a detailed explanation of each part. For example... Figures 1-3 As shown, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25 (left side wall), and a second side wall 26 (right side wall). The rear wall 22, upper wall 23, lower wall 24, first side wall 25, and second side wall 26 are made of the aforementioned materials and are integrally formed.

[0028] The first sidewall 25 and the second sidewall 26 are opposite each other in the left-right direction D3, and the upper wall 23 and the lower wall 24 are opposite each other in the up-down direction D2. The rear ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 are all connected to the rear wall 22. The front ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 form the opening periphery 28, which is positioned opposite to the rear wall 22, forming a container body opening 21 with a generally rectangular shape.

[0029] An opening periphery 28 is provided at one end of the container body 2, and a rear wall 22 is located at the other end of the container body 2. The container body 2, formed by the outer surface of the wall portion 20, has a box-shaped shape. The inner surfaces of the wall portion 20, namely the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26, form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening periphery 28 communicates with the substrate storage space 27 surrounded by the wall portion 20 and formed inside the container body 2. For example, 25 substrates W can be stored in the substrate storage space 27.

[0030] A portion of the upper wall 23 and the lower wall 24, near the periphery of the opening 28, has latching recesses 231A, 231B, 241A, and 241B recessed outward in the vertical direction D2 toward the substrate receiving space 27. One latching recess 231A, 231B, 241A, and 241B is formed near each of the left and right ends of the upper wall 23 and the lower wall 24, for a total of four.

[0031] A top flange 236 is fixed to the outer surface of the upper wall 23. The top flange 236 is a component that is hooked and suspended on the substrate storage container 1 when it is suspended in AMHS (Automatic Wafer Transport System), PGV (Wafer Substrate Transport Vehicle), etc.

[0032] Next, the side substrate support portion 5 and the rear substrate support portion 6 will be described in detail. The side substrate support portion 5 is an internal part provided on the first sidewall 25 and the second sidewall 26 respectively, and arranged in pairs in the left-right direction D3 within the substrate storage space 27. Specifically, as Figures 6A to 9As shown, the side substrate support portion 5 has a plate portion 51 and a plate portion support portion 52. The plate portion 51 and the plate portion support portion 52 are integrally molded from resin material. The plate portion 51 is supported by the plate portion support portion 52.

[0033] The plate portion 51 is a plate-shaped part extending in the plane D1-D3 and protruding inward in the transverse direction D3. 25 plate portions 51 are provided on each of the first sidewall 25 and the second sidewall 26 in the vertical direction D2, for a total of 50. Adjacent plate portions 51 are arranged in a parallel position, separated from each other by intervals of 10mm to 12mm in the vertical direction D2. A substrate W is disposed between adjacent plate portions 51. Above the plate portion 51 located at the uppermost D21, another plate-shaped component 59 parallel to the plate portion 51 is disposed (see reference). Figure 6A as well as Figure 6B The plate-shaped component 59 acts as a guide when the substrate W is inserted into the plate portion 51 located at the uppermost side D21.

[0034] The 25 plate portions 51 provided on the first sidewall 25 and the 25 plate portions 51 provided on the second sidewall 26 are positioned opposite each other in the left-right direction D3. Additionally, the 50 plate portions 51 and the plate-shaped member 59 parallel to the plate portions 51, which acts as a plate-shaped guide, are positioned parallel to the D1-D3 plane. A protrusion 511 is provided on the upper surface of the plate portion 51, and a protrusion 512 is disposed at a rearward side D12 of the protrusion 511.

[0035] The protrusion 511 protrudes upward in the direction D21 and extends in the left-right direction D3. The upper end of the protrusion 511 is inclined downward in the direction D22 towards the center of the substrate receiving space 27. As a result, the contact surface between the upper end of the protrusion 511 and the substrate W placed on the protrusion 511 is reduced, which can suppress the generation of particles due to friction between the upper end of the protrusion 511 and the substrate W.

[0036] The protrusion 512 has a portion that protrudes upward in the direction D21 and extends in the left-right direction D3 and abuts against the substrate W, and a plate-shaped portion that extends backward in the direction D12 from the portion. The substrate W supported on the plate portion 51 only contacts the protruding ends of the protrusions 511 and 512, and does not contact the protrusions 511 and 512 in a planar manner.

[0037] The plate support portion 52 is plate-shaped and extends approximately along the D1-D2 plane. The plate support portion 52 has a predetermined length in the long side direction (front-rear direction D1) of the plate portion 51 and is connected to the outer edge of the plate portion 51 in the transverse direction D3. That is, the 25 plate portions 51 provided on the first sidewall 25 are connected to the plate support portions 52 provided on the first sidewall 25. Similarly, the 25 plate portions 51 provided on the second sidewall 26 are connected to the plate support portions 52 provided on the second sidewall 26.

[0038] like Figure 3 , Figure 6A , Figure 6B as well as Figure 9 As shown, the plate support portion 52 has a front fixing portion 56 on the front side D11 and a rear fixing portion 57 on the rear side D12. By engaging the front fixing portion 56 with the wall fixing portions 201 of the first side wall 25 and the second side wall 26, and by engaging the rear fixing portion 57 with the wall fixing portions 202 of the first side wall 25 and the second side wall 26, the left and right side plate support portions 5 are respectively fixed to the first side wall 25 and the second side wall 26.

[0039] The side substrate support 5 can support the edges of multiple substrates W in a state in which adjacent substrates W are separated from each other at a predetermined interval and are in a parallel position to each other.

[0040] like Figure 3 As shown, the rear substrate support portion 6 is disposed within the substrate storage space 27. A pair of rear substrate support portions 6 are separately provided in the left-right direction D3. Each pair of rear substrate support portions 6 is integrally formed with the rear end of the plate portion 51 of the side substrate support portion 5 on both the left and right sides, along with the plate portion 51 and the plate portion support portion 52. Therefore, the side substrate support portions 5 and the rear substrate support portions 6 constitute an internal component that is fixedly connected to the container body 2 within the container body 2.

[0041] In the left-right direction D3, a pair of rear substrate support portions 6 are provided with a number corresponding to each substrate W that can be accommodated in the substrate storage space 27. Specifically, 25 are provided for each of them, for a total of 50. The rear substrate support portions 6 are positioned in pairs with the front retaining member 7 in the front-back direction D1. The rear substrate support portions 6 can support the edges of multiple substrates W.

[0042] Next, the cover 3 and the front retaining member 7 will be described in detail. For example... Figure 1 as well as Figure 4As shown, the cover 3 has a generally rectangular shape that roughly matches the shape of the opening periphery 28 of the container body 2. The cover 3 can be attached to and detached from the opening periphery 28 of the container body 2. By attaching the cover 3 to the opening periphery 28, the cover 3 can close the opening 21 of the container body. An annular sealing member 4 is installed on the part of the cover 3 opposite to the surface (sealing surface) of the stepped portion formed at the position immediately behind D12 of the opening periphery 28 when the cover 3 closes the opening 21 of the container body. The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin, fluororubber, silicone rubber, etc., which can be elastically deformed. The sealing member 4 is arranged around the outer periphery of the cover 3.

[0043] When the cover 3 is installed on the periphery of the opening 28, the sealing member 4 is elastically deformed by being clamped between the sealing surface and the inner surface of the cover 3, and the cover 3 closes the opening 21 of the container body while sealing the opening 21 of the container body. By removing the cover 3 from the periphery of the opening 28, the substrate W can be taken out or placed in relative to the substrate storage space 27 inside the container body 2.

[0044] The cover 3 has a cover body 30 in the shape of the cover 3, and a latching mechanism is provided on the cover body 30. The latching mechanism is located near the left and right ends of the cover body 30 and includes: two upper latching parts 32A that can protrude upward in a direction D2 from the upper side of the cover body 30; and two lower latching parts 32B that can protrude downward in a direction D22 from the lower side of the cover body 30. The two upper latching parts 32A are located near the left and right ends of the upper side of the cover body 30, and the two lower latching parts 32B are located near the left and right ends of the lower side of the cover body 30.

[0045] An operating part is provided on the outer surface of the lid body 30. By operating the operating part from the front of the lid body 30, the upper latch 32A and the lower latch 32B can be protruded from the upper and lower sides of the lid body 30, respectively, or they can be made not to protrude from the upper and lower sides. The upper latch 32A protrudes upward D21 from the upper side of the lid body 30 and engages with the latch engagement recesses 231A and 231B of the container body 2. The lower latch 32B protrudes downward D22 from the lower side of the lid body 30 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the periphery 28 of the opening of the container body 2.

[0046] A recess 34 is formed on the inner side (rear side D12) of the cover body 30, which is recessed into the outer side (front side D11) of the substrate storage space 27. A front retaining member 7 is fixedly provided in the recess 34.

[0047] The front retaining member 7 is positioned on the part of the cover 3 opposite to the substrate storage space 27 when the container body opening 21 is closed by the cover 3, and is able to support the edge of multiple substrates W.

[0048] The front retaining member 7 has a receiving portion 73. Two receiving portions 73 are arranged in pairs, separated at predetermined intervals in the left-right direction D3. These paired receiving portions 73 are arranged in 25 pairs in the up-down direction D2, each supported by a leg 72 capable of elastic deformation. By storing the substrate W in the substrate storage space 27 and closing the cover 3, the receiving portions 73, utilizing the elastic force of the legs 72, clamp and support the edge of the substrate W by applying a force toward the center of the substrate storage space 27.

[0049] The receiving part 73 has a lower inclined surface and an upper inclined surface, which form a generally V-shaped groove. When the container body opening 21 is closed by the cover 3, the substrate W slides and rises relative to the lower inclined surface. When the substrate W reaches the apex of the V-shaped groove, the edge of the substrate W is supported by the receiving part 73.

[0050] Next, refer to Figures 7-9 The arrangement of the plate support portion 52 in the opening 53 and the non-opening portion 54 between adjacent plate portions 51, 51 in the vertical direction D2 will be described in detail. Figures 7-9 As shown, the plate support portion 52 has: an opening portion 53 that opens in a direction that intersects the vertical direction D2, which is the direction in which the plurality of plate portions 51 are arranged; and a non-opening portion 54 that is disposed at least between the plate portion 51 and the opening portion 53 in the vertical direction D2.

[0051] The non-opening portion 54 is an unopened part disposed on the plate support portion 52 between adjacent plate portions 51, 51 in the vertical direction D2.

[0052] The opening 53 has a shape that allows the corner W4 of the substrate W, which is positioned between adjacent plate portions 51, 51 in the vertical direction D2, to pass through. If the opening 53 has this shape, the opening area of ​​the opening 53 can be set larger, thus improving the cleanliness and drying performance of the side substrate support 5 when cleaning is performed with the side substrate support 5 mounted on the container body 2. In order for the corner W4 of the substrate W to pass through the opening 53, the height H53 of the opening 53 (in the vertical direction D2) must be at least greater than the thickness HW of the substrate W (see reference). Figure 8 ).

[0053] In this embodiment, the opening 53 is an elongated groove that extends through the plate support portion 52 in the left-right direction D3 and extends in the front-back direction D1. Furthermore, the opening direction of the opening 53 is not limited as long as it intersects the vertical direction D2.

[0054] The non-opening portion 54 has a height at the upper side D21 and / or lower side D22 of the opening portion 53 that restricts the movement of the substrate W abutting against the non-opening portion 54. In this embodiment, the non-opening portion 54 has a height at the upper side D21 and lower side D22 of the opening portion 53 that restricts the movement of the substrate W abutting against the non-opening portion 54. The height that restricts the movement of the substrate W abutting against the non-opening portion 54 is preferably greater than the thickness HW of the substrate W, but it may be less than the thickness HW of the substrate W as long as the movement of the substrate W can be restricted. The degree to which it is less than the thickness HW of the substrate W is, for example, 0.3 mm or less.

[0055] like Figure 7 As shown, at the position where the opening 53 is provided, a plate portion 51, a non-opening portion 54, an opening 53, a non-opening portion 54 and a plate portion 51 are arranged sequentially in the vertical direction D2.

[0056] The height H542 of the non-opening portion 54 (542) located on the lower side D22 of the opening 53 is preferably 1.0 mm or more, more preferably 0.5 mm or more. The height H541 of the non-opening portion 54 (541) located on the upper side D21 of the opening 53 is preferably 1.0 mm or more, more preferably 0.5 mm or more.

[0057] According to one embodiment of the substrate storage container 1, the following effects can be obtained. The substrate storage container 1 of this embodiment stores a plate-shaped substrate W that has at least one corner W4 when viewed from above, and includes: a container body 2, which has a substrate storage space 27 formed inside, capable of arranging and storing multiple substrates W; an opening periphery 28 at one end having a container body opening 21 communicating with the substrate storage space 27; and a closed end; a cover 3, detachable from the container body opening 21, capable of closing the container body opening 21; and a side substrate support 5, which is positioned within the substrate storage space 27... The pair configuration allows the side substrate support 5 to support the edges of the multiple substrates W in a state where adjacent substrates W are separated and arranged at a predetermined interval. The side substrate support 5 includes: multiple plate portions 51 disposed between adjacent substrates W; and plate portion support 52 supporting the plate portions 51. The plate portion support 52 has: an opening 53 opening in a direction that intersects the vertical direction D2, which is the direction in which the multiple plate portions 51 are arranged; and a non-opening portion 54 disposed at least between the plate portions 51 and the opening 53 in the vertical direction D2.

[0058] According to the substrate storage container 1 of this embodiment, the plate support portion 52 has a non-opening portion 54 and an opening portion 53 between adjacent plate portions 51 in the vertical direction D2. Therefore, in the substrate storage container 1 for a plate-shaped substrate W with a corner portion W4 when viewed from above, the cleaning performance and drying performance of the side substrate support portion 5 can be improved when cleaning is performed with the side substrate support portion 5 installed in the container body 2. In addition, since the plate support portion 52 has a non-opening portion 54 between adjacent plate portions 51, when it is desired to insert and place a plate-shaped substrate W with a corner portion W4 between a pair of side substrate support portions 5, it is possible to prevent the corner portion W4 of the substrate W from getting stuck in or penetrating the opening portion 53. Therefore, damage to the substrate W (especially damage to the corner portion W4) can be suppressed.

[0059] Furthermore, the non-opening portion 54 has a height on the upper side D21 and / or lower side D22 of the opening portion 53 that restricts the movement of the substrate W abutting against the non-opening portion 54. In particular, the non-opening portion 54 has a height H541 on the upper side D21 and a height H542 on the lower side D22 of the opening portion 53, which serves as a height to restrict the movement of the substrate W abutting against the non-opening portion 54. Therefore, it is difficult for the corner portion W4 of the substrate W to enter the opening portion 53.

[0060] The present invention is not limited to the above embodiments, and modifications can be made within the technical scope described in the claims.

[0061] For example, in the described implementation, such as Figure 7 As shown, at the location where the opening 53 is provided, a plate portion 51, a non-opening portion 54, an opening 53, another non-opening portion 54, and a plate portion 51 are sequentially arranged in the vertical direction D2, but this is not a limitation. For example, as... Figure 10 As shown, the non-opening portion 54 (541) may not be provided on the upper side D21 of the opening portion 53, and the plate portion 51 is adjacent to the upper side D21 of the opening portion 53.

[0062] Alternatively, the rear substrate support portion 6 and the side substrate support portion 5 (plate portion 51) can be separately constructed, forming an internal component fixed relative to the container body 2 inside the container body 2. The rear substrate support portion 6 can also be integrally formed with the container body 2. Explanation of reference numerals in the attached figures:

[0063] 1: Substrate storage container; 2: Container body; 21: Container body opening; 27: Substrate storage space; 28: Opening perimeter; 3: Cover; 5: Side substrate support; 51: Plate; 52: Plate support; 53: Opening; 54: Non-opening; D2: Up and down direction; W: Substrate; W4: Corner.

Claims

1. A substrate storage container, characterized in that, The substrate storage container stores a plate-shaped substrate that has at least one corner when viewed from above. The substrate storage container includes: The container body has an internal substrate storage space that can arrange and store multiple substrates, one end of which has an opening periphery that communicates with the substrate storage space, and the other end is closed. The lid is detachable from the opening of the container body and can close the opening of the container body. as well as The side substrate support portions are arranged in pairs within the substrate storage space, and are capable of supporting the edges of multiple substrates while adjacent substrates are separated and arranged at a predetermined interval. The side substrate support portion includes: a plurality of plate portions disposed between adjacent substrates; and plate portion support portions supporting the plate portions. The plate support portion has: an opening portion that opens in a direction that intersects the vertical direction with the direction in which the plurality of plates are arranged; and a non-opening portion that is disposed at least between the plate portion and the opening portion in the vertical direction.

2. The substrate storage container according to claim 1, characterized in that, The non-opening portion has a height on the upper and / or lower side of the opening portion that restricts the movement of the substrate abutting against the non-opening portion.

3. The substrate storage container according to claim 1 or 2, characterized in that, The opening has a shape that allows the corner of the substrate, which is disposed between adjacent plate portions, to be inserted.

4. The substrate storage container according to any one of claims 1 to 3, characterized in that, The height of the non-opening portion located below the opening is 0.5 mm or more.

5. The substrate storage container according to any one of claims 1 to 4, characterized in that, The height of the non-opening portion located above the opening is 0.5 mm or more.

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