Winding evaporation coating equipment suitable for flexible base material

Abstract

The invention discloses winding evaporation coating equipment suitable for a flexible base material, and belongs to the technical field of vacuum coating, the winding evaporation coating equipment comprises a base, an evaporation bin is fixedly connected above the base, the top end of the evaporation bin is fixedly connected with a coating bin, and two sides of the coating bin are fixedly connected with two winding bins respectively; according to the invention, the evaporation mechanisms are arranged, the two evaporation mechanisms perform reverse synchronous translation along the guide sliding rails under the traction of the toothed belt, and the pulleys slide in the guide grooves and are dragged by the bent parts of the pulleys to drive the sliding plates to realize transverse dislocation on the translation sliding rails through the translation sliding blocks; at the moment, the roller is in contact with the inclined surface of the top block to push the top plate to finish the lifting action, so that the crucible is accurately aligned with the evaporation opening to realize alternate coating, ordered alternate deposition of two different materials is realized, collision interference of the crucible at the intersection is avoided, and the coating position precision is guaranteed through accurate linkage of guiding and lifting actions.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, specifically to a roll-to-roll evaporation coating apparatus suitable for flexible substrates. Background Technology

[0002] As one of the core processes for surface functionalization of flexible substrates, roll-to-roll evaporation coating technology can deposit uniform functional films on the surface of flexible substrates, endowing the substrates with special properties such as conductivity, heat insulation, and corrosion resistance. Its processing efficiency and coating quality directly determine the performance and competitiveness of downstream products. At present, roll-to-roll evaporation coating equipment has become a key piece of equipment in the field of flexible material processing.

[0003] However, existing roll-to-roll evaporation coating equipment has shortcomings in practical applications: In the coating process, most equipment has a fixed layout of coating units, which can only achieve coating of a single material. If multi-material composite coating is required, it is often necessary to stop the machine to change the coating source or adjust the equipment parameters. This not only interrupts the continuous operation process and reduces production efficiency, but also easily affects the interlayer adhesion of the film due to parameter fluctuations. On the other hand, the adjustment flexibility of the substrate take-up and untake-down unit is insufficient, and the clamping adaptability to rolls of different diameters is poor. The adjustment process is complicated and time-consuming. Moreover, there is a lack of effective buffering and positioning mechanisms during the substrate transmission process. The substrate is prone to displacement and wrinkling due to friction loss and tension fluctuations, which in turn affects the coating uniformity. In addition, the substrate leveling unit mostly adopts a rigid adjustment method, which cannot adaptively adjust the pressure according to the changes in substrate thickness. This can easily cause substrate damage or incomplete leveling, and the defects after subsequent coating are amplified, affecting the finished product qualification rate.

[0004] Based on this, the present invention designs a roll-to-roll evaporation coating device suitable for flexible substrates to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a roll-to-roll evaporation coating equipment suitable for flexible substrates, in order to solve the problems mentioned in the background art. In the coating process, most equipment has a fixed layout of coating units, which can only achieve coating of a single material. If multi-material composite coating is required, it is often necessary to stop the machine to change the coating source or adjust the equipment parameters. This not only interrupts the continuous operation process and reduces production efficiency, but also easily affects the interlayer adhesion of the film due to parameter fluctuations. On the other hand, the substrate take-up and untake-down unit has insufficient adjustment flexibility, poor adaptability to clamping rolls of different diameters, and the adjustment process is complicated and time-consuming. Moreover, there is a lack of effective buffering and positioning mechanisms during the substrate transmission process, which easily leads to substrate displacement and wrinkling due to friction loss and tension fluctuations, thereby affecting the uniformity of coating.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A roll-to-roll evaporation coating apparatus suitable for flexible substrates includes a base, an evaporation chamber fixedly connected to the top of the base, a coating chamber fixedly connected to the top of the evaporation chamber, two winding chambers fixedly connected to each side of the coating chamber, a base plate fixedly connected to the bottom of the evaporation chamber, a support plate fixedly connected to the top of the base plate, a slot formed in the middle of the support plate, two guide rails fixedly connected to each side of the slot on the top of the support plate, and two guide grooves formed on the sides of the two guide rails that are far apart from each other on the top of the support plate. The guide grooves are roughly V-shaped, with the protruding parts of the two guide grooves facing opposite directions. Two evaporation mechanisms are located above the support plate. Each evaporation mechanism includes a sliding plate. Two translation sliders are symmetrically fixedly connected to the lower part of the sliding plate. Two translation rails are located below the two translation sliders, and the two translation sliders slide above the two translation rails respectively. A guide slider is fixedly connected below the two translation rails, and the guide slider slides above one of the guide rails. The sliding direction of the translation slider is perpendicular to the sliding direction of the guide slider. The outer side of the sliding plate is fixedly connected to... The slide has a traction plate with a pulley rotatably connected to its bottom end. The pulley rotates within a guide groove. A traction block is fixedly connected to the other side of the slide. A top plate is provided above the slide, and four support pillars are fixedly connected to the four corners of the top plate. All four support pillars penetrate the slide and are slidably connected to it. Two of the support pillars have return springs fitted onto their outer walls below the slide, and the protruding parts at the bottom of these two support pillars support the return springs. Two rollers are installed at the bottom ends of the other two support pillars. A crucible is installed above the top plate, and a support plate is positioned near one of the top plates. A top block is fixedly installed on the side, and the side of the top block facing the evaporation mechanism is inclined. The two evaporation mechanisms are in opposite positions and face each other. The rollers in the two evaporation mechanisms face the same direction. Two fixed brackets are fixedly connected to the two ends of the empty slot below the support plate. The two fixed brackets are C-shaped and their openings face each other. Gears are rotatably connected between the inner walls of the fixed brackets. Toothed belts are sleeved on the outer walls of the two gears. The two traction blocks in the two evaporation mechanisms pass through the empty slot and are respectively connected to the two opposite ends of the toothed belts. An evaporation port is opened in the middle of the evaporation chamber.

[0008] As a further embodiment of the present invention, a support bracket is fixedly installed at the inner bottom of the winding chamber. The support bracket has an L-shaped design. Two sets of support rings are symmetrically fixedly installed above the horizontal part of the support bracket. Each set of support rings consists of two rings. A support roller is rotatably connected between the two support rings in the same set. A support block is fixedly connected to the middle of the vertical part of the support bracket. A winding mechanism is provided inside the support block. The winding mechanism includes a turntable. The turntable is located on one side of the support block. A rotating shaft is fixedly connected to the center of the turntable. The rotating shaft is rotatably connected to the support block.

[0009] As a further embodiment of the present invention, an adjusting rod is slidably connected to the inner wall of the rotating shaft, and a plurality of traction grooves are equidistantly provided on the outer wall of the adjusting rod. Each group of traction grooves consists of four grooves distributed at the four equidistant points of the adjusting rod. A sliding groove is provided on the outer wall of the rotating shaft at a position corresponding to the traction groove. A plurality of sliding sleeves are fitted onto the outer wall of the rotating shaft. The number of sliding sleeves is the same as the number of groups of traction grooves. A plurality of protrusions are fixedly connected at equal intervals between the inner walls of the sliding sleeves. The number of protrusions on the inner wall of each sliding sleeve is the same as the number of groups of traction grooves. The plurality of protrusions pass through the plurality of sliding grooves and fit into the plurality of traction grooves.

[0010] As a further embodiment of the present invention, the outer wall of the sliding sleeve is rotatably connected to four adjusting arms at its four equal division points, and the other end of the adjusting arm is rotatably connected to an adjusting plate. An arc-shaped plate is fixedly connected to the outer wall of the adjusting plate. A flat groove is opened at the position corresponding to the adjusting plate on the turntable. One end of the adjusting plate passes through the flat groove. Four rotating wheels are rotatably connected to the four corners of the end of the adjusting plate, and the rotating wheels are attached to the side of the turntable.

[0011] As a further embodiment of the present invention, one end of the rotating shaft and the adjusting rod passes through the center of the support block and one side of the winding chamber. An adjusting knob is rotatably connected between the inner wall of the end of the rotating shaft. An adjusting thread is provided on the outer wall of the end of the adjusting rod. The adjusting knob is sleeved on the outer wall of the end of the adjusting rod and threadedly connected to its adjusting thread portion. An output motor is fixedly installed above the support block. The output end of the output motor is connected to the rotating shaft through a reducer.

[0012] As a further embodiment of the present invention, two preset grooves are respectively opened on both sides of the coating chamber, and two leveling components are respectively provided on the inner wall of the coating chamber at positions corresponding to the preset grooves. The leveling components include two fixing frames, both of which are fixedly connected to the coating chamber and distributed at both ends of the preset grooves. A column is fixedly connected to the inner wall of the fixing frame at the middle position, and two pressure blocks are symmetrically slidably connected to the middle position of the column.

[0013] As a further embodiment of the present invention, the outer wall of the column is fitted with two compression springs on opposite sides of the two pressure blocks, and a squeezing roller is rotatably connected between the two pressure blocks located on the same horizontal line. There are two squeezing rollers, and the outer walls of the two squeezing rollers are in contact with each other. A limiting groove is opened on one side of the fixed bracket, and a limiting block is fixedly connected to one side of the pressure block. The limiting block passes through the limiting groove.

[0014] As a further embodiment of the present invention, two sets of support rods are fixedly connected to the inner top of the coating chamber, with two support rods in each set. A tension roller is rotatably connected between the ends of the two support rods in the same set. A vacuum pump is fixedly installed at the top of the coating chamber, and the position between the two sets of support rods corresponds to the position of the evaporation port.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention, by setting up a support plate, guide groove, and evaporation mechanism, allows two evaporation mechanisms to move synchronously in opposite directions above the support plate via a guide slider and toothed belt, relying on the connection between the traction block and the toothed belt. During the translation of the evaporation mechanism, the pulley of the evaporation mechanism slides in the guide groove and is pulled by its bent part, causing the slide plate to achieve lateral misalignment on the translation rail via the translation slider. At the same time, when the crucible moves to the evaporation port, the roller contacts the top block. Affected by the inclined surface of the top block, the top plate is pushed to complete the lifting action, so that the crucible is accurately aligned with the evaporation port to achieve alternating coating. In this way, the orderly alternating deposition of two different materials can be achieved, which not only effectively avoids the collision interference problem of the crucible at the intersection, but also ensures the coating position accuracy through the precise linkage of the guiding and lifting actions, significantly improving the stability and diversity of continuous coating operations on flexible substrates, and meeting the processing requirements of composite coating. 2. This invention, by setting up a winding assembly, allows the adjustment knob to be turned during use. The adjustment screw drives the adjustment rod to slide along the inner wall of the rotating shaft. The traction groove of the adjustment rod pulls the protrusion, causing the sliding sleeve to move axially along the rotating shaft. Then, the adjustment arm pushes the adjustment plate to move radially along the turntable groove, allowing the arc plate to clamp and fix the material roll from the inside. The output motor drives the rotating shaft to rotate the turntable, and the support rollers work together to achieve smooth release and winding of the substrate. In this way, it can flexibly adapt to material rolls of different diameters. The adjustment process is precise and convenient. At the same time, the support rollers below the winding mechanism provide auxiliary support for the material roll and rotate with the material roll, reducing friction damage and speed fluctuations during substrate transmission. This ensures the consistency of substrate winding and coating rhythm, and improves the equipment's adaptability to various flexible substrates and processing efficiency. 3. By setting up a flattening component, the fixed frame provides stable support to the column when the equipment is used. The pressure block on the column, under the elastic force of the compression spring, drives the two extrusion rollers to fit tightly together. When the substrate passes between the two extrusion rollers, it is flattened under the pressure of the extrusion rollers. At the same time, the pressure block slides along the limiting groove through the limiting block to ensure the stability of its own movement trajectory. In conjunction with the tension roller in the coating chamber, it provides a continuous straightening force to the substrate. In this way, wrinkles generated during the substrate transportation process can be eliminated, and the compression spring can adapt to changes in substrate thickness, always maintaining uniform extrusion force. This not only avoids damage to the substrate caused by uneven force, but also ensures that the substrate is always in a flat state in the coating area, thus ensuring the quality of the finished product. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of the internal structure of the coating chamber and winding chamber of the present invention;

[0019] Figure 3 This is a schematic diagram of the connection between the evaporation chamber and the base plate of the present invention;

[0020] Figure 4 This is a schematic diagram of the connection between the support plate and the evaporation mechanism of the present invention;

[0021] Figure 5 This is a schematic diagram of the evaporation mechanism of the present invention;

[0022] Figure 6 This is a schematic diagram of the distribution of the guide grooves in this invention;

[0023] Figure 7 This is a schematic diagram of the connection between the toothed belt and the traction block in this invention;

[0024] Figure 8 This is a schematic diagram of the connection between the coating chamber and the leveling component of the present invention;

[0025] Figure 9 This is a schematic diagram of the connection between the winding chamber and the winding mechanism of the present invention;

[0026] Figure 10 This is a schematic diagram of the winding mechanism of the present invention;

[0027] Figure 11 This is a schematic diagram of the structure of the leveling component of the present invention.

[0028] The attached diagram lists the components represented by each number as follows: 1. Base; 2. Evaporation chamber; 3. Coating chamber; 4. Winding chamber; 5. Base plate; 6. Support plate; 7. Empty slot; 8. Guide rail; 9. Guide groove; 10. Evaporation mechanism; 1001. Slide plate; 1002. Translation slider; 1003. Translation rail; 1004. Guide slider; 1005. Traction plate; 1006. Pulley; 1007. Traction block; 1008. Top plate; 1009. Support column; 1010. Return spring; 1011. Roller; 1012. Crucible; 11. Top block; 12. Fixed bracket; 13. Gear; 14. Toothed belt; 15. Evaporation port; 16. Support bracket; 17. Support ring; 18. Support roller; 19. Support block; 20. Winding plate 2001. Winding mechanism; 2002. Turntable; 2003. Shaft; 2004. Adjusting rod; 2005. Traction groove; 2006. Sliding groove; 2007. Protrusion; 2008. Adjusting arm; 2009. Adjusting plate; 2010. Arc plate; 2011. Flat groove; 2012. Rotary wheel; 2013. Adjusting knob; 2014. Adjusting thread; 2015. Output motor; 21. Preset groove; 22. Leveling component; 2201. Fixing frame; 2202. Column; 2203. Pressure block; 2204. Compression spring; 2205. Extrusion roller; 2206. Limiting groove; 2207. Limiting block; 23. Support rod; 24. Tensioning roller; 25. Vacuum pump. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] Please see Figures 1-11 The present invention provides a technical solution: A roll-to-roll evaporation coating device suitable for flexible substrates includes a base 1, an evaporation chamber 2 fixedly connected above the base 1, a coating chamber 3 fixedly connected to the top of the evaporation chamber 2, two roll-to-roll chambers 4 fixedly connected to the two sides of the coating chamber 3, a base plate 5 fixedly connected to the bottom of the evaporation chamber 2, a support plate 6 fixedly connected above the base plate 5, a slot 7 opened in the middle of the support plate 6, two guide rails 8 fixedly connected to the two sides of the slot 7 above the support plate 6, and two guide grooves 9 opened on the side of the two guide rails 8 that are far apart from each other above the support plate 6. The guide grooves 9 are designed in a roughly V shape, and the protruding parts of the two guide grooves 9 face opposite directions. Two evaporation mechanisms 10 are provided above the support plate 6. The two evaporation mechanisms 10 are positioned opposite each other and face each other. Each evaporation mechanism 10 includes a slide plate 1001. Two translation sliders 1002 are symmetrically fixedly connected below the slide plate 1001. Two translation rails 1003 are provided below the two translation sliders 1002. The two translation sliders 1002 slide above the two translation rails 1003 respectively. A guide slider 1004 is fixedly connected below the two translation rails 1003. The guide slider 1004 slides above one of the guide rails 8. The sliding direction of the translation slider 1002 is perpendicular to the sliding direction of the guide slider 1004.

[0031] A traction plate 1005 is fixedly connected to the outer side of the slide plate 1001. A pulley 1006 is rotatably connected to the bottom end of the traction plate 1005, and the pulley 1006 rotates within the guide groove 9. A traction block 1007 is fixedly connected to the other side of the slide plate 1001. A top plate 1008 is provided above the slide plate 1001, and a crucible 1012 is installed above the top plate 1008. Four support pillars 1009 are fixedly connected to the four corners of the top plate 1008. All four support pillars 1009 penetrate the slide plate 1001 and are slidably connected to it. Two of the support pillars 1009 have a return spring 1010 sleeved on their outer walls below the slide plate 1001, and the protruding parts at the bottom of these two support pillars 1009 support the return spring 1010. Two rollers 1011 are installed at the bottom ends of the other two support pillars 1009, and the rollers 1011 in the two evaporation mechanisms 10 face the same direction.

[0032] A top block 11 is fixedly installed on the upper part of the support plate 6 near one side. The side of the top block 11 facing the evaporation mechanism 10 is inclined. Two fixed brackets 12 are fixedly connected at both ends of the empty slot 7 below the support plate 6. The two fixed brackets 12 are C-shaped and their openings face each other. Gears 13 are rotatably connected between the inner walls of the fixed brackets 12. Toothed belts 14 are sleeved on the outer walls of the two gears 13. The two traction blocks 1007 in the two evaporation mechanisms 10 pass through the empty slot 7 and are respectively connected to the two opposite ends of the toothed belts 14. An evaporation port 15 is opened in the middle of the evaporation chamber 2.

[0033] During operation, the gear 13 rotates, driving the toothed belt 14 to operate. Since the traction blocks 1007 of the two evaporation mechanisms 10 are respectively connected to the two opposite sections of the toothed belt 14, the toothed belt 14 drives the two sets of evaporation mechanisms 10 to move synchronously in opposite directions along the guide slide rail 8. During the translation, the guide slider 1004 slides along the guide slide rail 8, and the pulley 1006 is pulled in the guide groove 9, which drives the slide plate 1001 to slide on the translation slide rail 1003 through the translation slider 1002, realizing lateral misalignment and avoiding collision between the two crucibles 1012. When the roller 1011 contacts the inclined surface of the top block 11, the top block 11 pushes the top plate 1008. At the same time, the return spring 1010 is compressed by the bottom end of the support column 1009, causing the crucible 1012 to rise and align with the evaporation port 15. After disengaging from the top block 11, the return spring 1010 drives the crucible 1012 to descend. The two sets of evaporation mechanisms 10 alternately complete the coating. With the help of the guide groove 9 and the top block 11, precise positioning is achieved. This not only ensures the continuity of the alternating coating of the two materials, but also improves the coating position accuracy, adapting to the continuous processing requirements of flexible substrates.

[0034] As a further embodiment of the present invention, a support bracket 16 is fixedly installed at the inner bottom of the winding chamber 4. The support bracket 16 is L-shaped, and two sets of support rings 17 are symmetrically fixedly installed above the horizontal part of the support bracket 16. Each set of support rings 17 consists of two rings, and a support roller 18 is rotatably connected between the two support rings 17 in the same set. A support block 19 is fixedly connected to the middle of the vertical part of the support bracket 16, and a winding mechanism 20 is provided inside the support block 19. The winding mechanism 20 includes a turntable 2001, which is located on one side of the support block 19. A rotating shaft 2002 is fixedly connected to the center of the turntable 2001, and the rotating shaft 2002 is rotatably connected to the support block 19.

[0035] During operation, the rotating shaft 2002 drives the turntable 2001 to rotate, causing the winding mechanism 20 to rotate to release and rewind the substrate. The support bracket 16 provides stable support to the support roller 18 through two sets of support rings 17, so that the support roller 18 rotates synchronously with the substrate transmission, playing an auxiliary supporting role for the substrate. The rolling contact between the support roller 18 and the substrate can reduce transmission friction and avoid scratches on the substrate surface. At the same time, it works with the winding mechanism 20 to ensure the stability of substrate transmission and prevent substrate deviation from affecting the coating effect.

[0036] As a further embodiment of the present invention, an adjusting rod 2003 is slidably inserted into the inner wall of the rotating shaft 2002. A plurality of traction grooves 2004 are equidistantly provided on the outer wall of the adjusting rod 2003, with four traction grooves 2004 in each group distributed at the four division points of the adjusting rod 2003. A sliding groove 2005 is provided on the outer wall of the rotating shaft 2002 at a position corresponding to the traction grooves 2004. A plurality of sliding sleeves 2006 are sleeved on the outer wall of the rotating shaft 2002, with the number of sliding sleeves 2006 being the same as the number of the plurality of traction grooves 2004. A plurality of protrusions 2007 are fixedly connected at equal intervals between the inner walls of the sliding sleeves 2006, with the number of protrusions 2007 on the inner wall of each sliding sleeve 2006 being the same as the number of each group of traction grooves 2004. The plurality of protrusions 2007 pass through the plurality of sliding grooves 2005 and fit into the plurality of traction grooves 2004 respectively.

[0037] During operation, the adjusting rod 2003 slides along the inner wall of the rotating shaft 2002, and drives the protrusion 2007 to move synchronously through the traction groove 2004 on the outer wall. The protrusion 2007 passes through the sliding groove 2005 of the rotating shaft 2002 and pulls the sliding sleeve 2006 to move axially along the rotating shaft 2002. The precise engagement of the protrusion 2007 with the traction groove 2004 and the sliding groove 2005 ensures the synchronicity of the movement of the adjusting rod 2003 and the sliding sleeve 2006, realizing the precise axial adjustment of the sliding sleeve 2006 and providing stable power transmission for subsequent material roll clamping. At the same time, the traction groove 2004 and the protrusion 2007, which are distributed in four equal parts, are evenly stressed, preventing the sliding sleeve 2006 from shifting during the adjustment process.

[0038] As a further embodiment of the present invention, four adjusting arms 2008 are rotatably connected to the outer wall of the sliding sleeve 2006 at its four equal division points, and an adjusting plate 2009 is rotatably connected to the other end of the adjusting arm 2008. An arc-shaped plate 2010 is fixedly connected to the outer wall of the adjusting plate 2009. A flat groove 2011 is opened at the position corresponding to the adjusting plate 2009 on the turntable 2001. One end of the adjusting plate 2009 passes through the flat groove 2011, and four rotating wheels 2012 are rotatably connected to the four corners of the end of the adjusting plate 2009. The rotating wheels 2012 are attached to the side of the turntable 2001.

[0039] During operation, the axial movement of the sliding sleeve 2006 drives the adjusting arm 2008 to rotate. The adjusting arm 2008 pushes the adjusting plate 2009 to move radially along the flat groove 2011 of the turntable 2001. The adjusting plate 2009 drives the arc plate 2010 to move closer or open simultaneously, realizing the clamping and releasing of the material roll. The roller 2012 at the end of the adjusting plate 2009 slides against the side of the turntable 2001, reducing the frictional resistance when the adjusting plate 2009 moves, and adapting to material rolls of different diameters. At the same time, the flat groove 2011 limits the adjusting plate 2009, ensuring the moving accuracy of the arc plate 2010.

[0040] As a further embodiment of the present invention, one end of the rotating shaft 2002 and the adjusting rod 2003 passes through the center of the support block 19 and one side of the winding chamber 4. An adjusting knob 2013 is rotatably connected between the inner wall of the end of the rotating shaft 2002. An adjusting thread 2014 is provided on the outer wall of the end of the adjusting rod 2003. The adjusting knob 2013 is sleeved on the outer wall of the end of the adjusting rod 2003 and is threadedly connected to the adjusting thread 2014. An output motor 2015 is fixedly installed above the support block 19. The output end of the output motor 2015 is connected to the rotating shaft 2002 through a reducer.

[0041] During operation, rotating the adjustment knob 2013 drives the adjustment rod 2003 to slide along the inner wall of the rotating shaft 2002 via the adjustment thread 2014, thereby adjusting the clamping of the material roll. The output motor 2015 drives the rotating shaft 2002 to rotate via the reducer. The reducer can reduce the speed and increase the torque, ensuring that the rotating shaft 2002 drives the winding mechanism 20 to run smoothly. The threaded transmission has high adjustment accuracy and is easy to quickly adapt to the specifications of the material roll.

[0042] As a further embodiment of the present invention, two preset grooves 21 are respectively opened on both sides of the coating chamber 3. Two leveling components 22 are respectively provided between the inner walls of the coating chamber 3 at positions corresponding to the preset grooves 21. The leveling components 22 include two fixing frames 2201. The two fixing frames 2201 are fixedly connected to the coating chamber 3 and distributed at both ends of the preset grooves 21. A column 2202 is fixedly connected between the inner walls of the fixing frames 2201 at the middle position. Two pressure blocks 2203 are symmetrically slidably connected at the middle position of the column 2202.

[0043] During operation, the fixing frame 2201 supports the column 2202, and the column 2202 provides sliding guidance for the pressure block 2203. The two sets of pressure blocks 2203 slide symmetrically along the column 2202, driving the extrusion roller 2205 of the flattening component 22 to open and close, adapting to flexible substrates of different thicknesses. The fixing frame 2201 is distributed at both ends of the preset groove 21, which can ensure that the substrate is immediately flattened after entering the coating chamber 3. The sliding cooperation between the column 2202 and the pressure block 2203 is smooth, the structure is stable, and it can effectively prevent the substrate from wrinkling due to uneven force during transmission, providing a flat substrate for subsequent coating.

[0044] As a further embodiment of the present invention, the outer wall of the column 2202 is fitted with two compression springs 2204 on opposite sides of the two pressure blocks 2203 respectively. A squeezing roller 2205 is rotatably connected between the two pressure blocks 2203 located on the same horizontal line. There are two squeezing rollers 2205, and the outer walls of the two squeezing rollers 2205 are in contact with each other. A limiting groove 2206 is opened on one side of the fixed bracket 12, and a limiting block 2207 is fixedly connected to one side of the pressure block 2203. The limiting block 2207 passes through the limiting groove 2206.

[0045] During operation, the compression spring 2204 applies opposing pressure to the pressure block 2203, causing the two extrusion rollers 2205 to fit tightly together. When the substrate passes between the two extrusion rollers 2205, it is flattened. When the pressure block 2203 slides, the limiting block 2207 moves synchronously along the limiting groove 2206, which plays a limiting and guiding role for the pressure block 2203. The compression spring 2204 can adapt to changes in substrate thickness and always maintain a stable extrusion pressure. The cooperation between the limiting block 2207 and the limiting groove 2206 prevents the pressure block 2203 from shifting and causing the extrusion rollers 2205 to misalign, ensuring a uniform flattening effect. At the same time, the rolling contact of the extrusion rollers 2205 reduces substrate wear and ensures the integrity of the substrate surface.

[0046] As a further embodiment of the present invention, two sets of support rods 23 are fixedly connected to the inner top of the coating chamber 3, with two support rods 23 in each set. A tension roller 24 is rotatably connected between the ends of the two support rods 23 in the same set. A vacuum pump 25 is fixedly installed at the top of the coating chamber 3. The position between the two sets of support rods 23 corresponds to the position of the evaporation port 15.

[0047] During operation, the tension roller 24 is in contact with the surface of the substrate and rotates synchronously with the substrate to provide continuous tension. The vacuum pump 25 evacuates the coating chamber 3, the evaporation chamber 2 and the winding chamber 4 to create a suitable coating environment. When the substrate is below the tension roller 24, the tension roller 24 can apply pressure to the substrate to keep it taut in the coating area, thereby improving the coating uniformity. In addition, the tension roller 24 rotates with the movement of the substrate to reduce substrate friction and ensure smooth transmission.

[0048] Working principle of the invention: When using the equipment, the roll of material wound with flexible substrate is first installed on the winding mechanism 20 of one side winding chamber 4. By rotating the adjustment knob 2013 in the winding chamber 4, the adjustment knob 2013 and the adjustment thread 2014 at the end of the adjustment rod 2003 are used to drive the adjustment rod 2003 to slide along the inner wall of the rotating shaft 2002. The traction groove 2004 on the outer wall of the adjustment rod 2003 drives the sliding sleeve 2006 to move axially along the rotating shaft 2002 through the protrusion 2007. When the sliding sleeve 2006 moves, it drives the adjustment arm 2008 at its four division points to rotate. The adjustment arm 2008 pushes the adjustment plate 2009 to move radially along the flat groove 2011 on the turntable 2001. The rotating wheel 2012 at the end of the adjustment plate 2009 is in contact with the side of the turntable 2001 to assist in sliding, thereby driving the arc plate 2010 to move closer or open synchronously. The material roll is clamped from the inside of the roll onto the outer wall of the arc plate 2010, and then the free end of the flexible substrate is pulled to pass through the preset groove 21 of the coating chamber 3 on the side corresponding to the winding chamber 4. After entering the coating chamber 3, it passes between the two extrusion rollers 2205 of the corresponding flattening component 22.

[0049] During the substrate transfer process, the compression spring 2204 in the flattening component 22 in the coating chamber 3 provides pressure to the pressure block 2203. The pressure block 2203 slides along the limiting groove 2206 of the fixing frame 2201 through the limiting block 2207, causing the two extrusion rollers 2205 to stick together under the action of the pressure block 2203, so that the flexible substrate is flattened when passing between the two extrusion rollers 2205, avoiding wrinkles from affecting the coating and winding effect. After being flattened by the extrusion roller 2205, the substrate passes under the two sets of tension rollers 24. The tension rollers 24 provide tension to keep the substrate taut. The substrate then continues to extend, passing between the two extrusion rollers 2205 of the flattening component 22 on the other side for flattening again. It then passes through the preset groove 21 of the coating chamber 3 on the corresponding side and enters the winding chamber 4 on the other side. The arc plate 2010 is driven to move closer or open in the same way, so that the empty material roll for collection is sleeved on the outer wall of the arc plate 2010 of the winding mechanism 20, and the free end of the substrate is fixed on the outer wall of the empty material roll.

[0050] The output motors 2015 inside the two winding chambers 4 are started. The output motors 2015 drive their respective rotating shafts 2002 to rotate through the reducers. The two winding mechanisms 20 work together. The side with the roll of substrate material to be coated releases the substrate, while the side with the empty roll simultaneously winds up the coated substrate. At the same time, the tension rollers 24 inside the coating chamber 3 always keep in contact with the surface of the substrate, and together with the leveling component 22, continuously ensure the flatness and tension of the substrate during the transmission process.

[0051] The vacuum pump 25 is then started, and it performs vacuuming on the coating chamber 3 and the connected evaporation chamber 2 and winding chamber 4 to provide a suitable vacuum environment for evaporation coating. The two sets of evaporation mechanisms 10 are equipped with different coating materials, and their initial positions are opposite and their orientations are opposite. The gear 13 rotates to drive the toothed belt 14. Since the traction blocks 1007 of the two sets of evaporation mechanisms 10 are fixedly connected to the two opposite sections of the toothed belt 14, when the toothed belt 14 rotates, it will drive the two sets of evaporation mechanisms 10 to move synchronously in opposite directions along the two guide rails 8 through the guide sliders 1004, forming an alternating movement trajectory to the evaporation port 15.

[0052] When the two sets of evaporation mechanisms 10 are moved to the intersection, their respective pulleys 1006 are pulled by the corresponding guide grooves 9. Since the two guide grooves 9 protrude in opposite directions, the traction force they generate on the pulleys 1006 is also in opposite directions. This traction force is transmitted to the slide plate 1001 through the traction plate 1005, causing the slide plate 1001 to slide along the translation slider 1002 above the translation rail 1003. This causes the two sets of slide plates 1001 to be laterally misaligned at the intersection, thereby causing the crucibles 1012 carrying different materials to be misaligned, avoiding collisions and interference between the two crucibles 1012 at the intersection; at the same time, it ensures that one set of crucibles 1012 is accurately aligned with the evaporation port 15. During the coating process, the other group moves smoothly away in a staggered state. When the bottom roller 1011 of one of the evaporation mechanisms 10 contacts the inclined surface of the top block 11, as the translation continues, the top block 11 pushes the top plate 1008 upward through the roller 1011. The top plate 1008 slides and rises along the four pillars 1009. The return spring 1010 on the outside of the pillar 1009 is compressed, which in turn drives the crucible 1012 on the top plate 1008 to rise to the evaporation port 15 to complete the coating. Meanwhile, the other evaporation mechanism 10 moves in the opposite direction with the toothed belt 14. Its roller 1011 disengages from the top block 11, and the return spring 1010 releases its elastic force to push the top plate 1008 and drive the crucible 1012 to fall and reset. Simultaneously, the first evaporation mechanism 10 is moved to the initial position. After the first evaporation mechanism 10 completes the coating of the corresponding material, the toothed belt 14 continues to operate, driving the two evaporation mechanisms 10 to move in opposite directions. The evaporation mechanism 10 that was originally far away from the evaporation port 15 carries another material to the evaporation port 15 and repeats the above-mentioned actions in cooperation with the top block 11, guide slide rail 8, and guide groove 9. It rises to the evaporation port 15 to perform alternating coating. The evaporation mechanism 10 that has completed coating moves in the opposite direction to reset, forming a continuous alternating coating cycle. After the corresponding coating material in the crucible 1012 is heated and evaporated, the steam enters the coating chamber 3 through the evaporation port 15 and is evenly attached to the surface of the flexible substrate directly above the evaporation port 15.

Claims

1. A roll-to-roll evaporation coating apparatus suitable for flexible substrates, comprising a base (1), characterized in that: An evaporation chamber (2) is fixedly connected above the base (1). A coating chamber (3) is fixedly connected to the top of the evaporation chamber (2). Two winding chambers (4) are fixedly connected to the two sides of the coating chamber (3). A base plate (5) is fixedly connected to the bottom of the evaporation chamber (2). A support plate (6) is fixedly connected above the base plate (5). A slot (7) is provided in the middle of the support plate (6). Two guide rails (8) are fixedly connected to the two sides of the slot (7) above the support plate (6). Two guide grooves (9) are provided on the side of the two guide rails (8) that are far apart from each other above the support plate (6). The guide grooves (9) are designed in a roughly V shape. The protrusions of the two guide grooves (9) are... With some parts facing opposite directions, two evaporation mechanisms (10) are provided above the support plate (6). Each evaporation mechanism (10) includes a sliding plate (1001). Two translation sliders (1002) are symmetrically fixedly connected below the sliding plate (1001). Two translation rails (1003) are provided below the two translation sliders (1002). The two translation sliders (1002) slide above the two translation rails (1003). Guide sliders (1004) are fixedly connected below the two translation rails (1003). The guide sliders (1004) slide above one of the guide rails (8). The sliding direction of the translation sliders (1002) is perpendicular to the sliding direction of the guide sliders (1004). A traction plate (1005) is fixedly connected to the outer side of the slide plate (1001). A pulley (1006) is rotatably connected to the bottom end of the traction plate (1005). The pulley (1006) rotates within the guide groove (9). A traction block (1007) is fixedly connected to the other side of the slide plate (1001). A top plate (1008) is provided above the slide plate (1001). Four pillars (1009) are fixedly connected to the four corners of the top plate (1008). All four pillars (1009) penetrate the slide plate (1001) and are slidably connected to the slide plate (1001). Two of the pillars (1009) have a return spring (1010) sleeved on their outer walls below the slide plate (1001). The protruding part at the bottom of 1009 supports the reset spring 1010. Two rollers (1011) are respectively installed at the bottom of the other two pillars (1009). A crucible (1012) is installed above the top plate (1008). A top block (11) is fixedly installed on one side of the support plate (6). The side of the top block (11) facing the evaporation mechanism (10) is inclined. The two evaporation mechanisms (10) are in opposite positions and facing each other. The rollers (1011) in the two evaporation mechanisms (10) face the same direction. Two fixed brackets (12) are fixedly connected at both ends of the empty groove (7) below the support plate (6). The two fixed brackets (12) are C-shaped and their openings face each other.Gears (13) are rotatably connected between the inner walls of the fixed bracket (12). Toothed belts (14) are fitted onto the outer walls of the two gears (13). Two traction blocks (1007) in the two evaporation mechanisms (10) pass through the slot (7) and are respectively connected to the two opposite ends of the toothed belts (14). An evaporation port (15) is provided in the middle of the evaporation chamber (2).

2. The roll-to-roll evaporation coating equipment for flexible substrates according to claim 1, characterized in that: The inner bottom of the winding chamber (4) is fixedly installed with a support bracket (16). The support bracket (16) is L-shaped. Two sets of support rings (17) are symmetrically fixedly installed above the horizontal part of the support bracket (16). There are two support rings (17) in each set. The two support rings (17) in the same set are rotatably connected with a support roller (18). The middle part of the vertical part of the support bracket (16) is fixedly connected with a support block (19). The support block (19) is provided with a winding mechanism (20). The winding mechanism (20) includes a turntable (2001). The turntable (2001) is located on one side of the support block (19). The center of the turntable (2001) is fixedly connected with a rotating shaft (2002). The rotating shaft (2002) is rotatably connected to the support block (19).

3. The roll-to-roll evaporation coating equipment for flexible substrates according to claim 2, characterized in that: An adjusting rod (2003) is slidably connected to the inner wall of the rotating shaft (2002). Several sets of traction grooves (2004) are equidistantly provided on the outer wall of the adjusting rod (2003). Each set of traction grooves (2004) consists of four grooves distributed at four equal division points of the adjusting rod (2003). Sliding grooves (2005) are provided on the outer wall of the rotating shaft (2002) at positions corresponding to the traction grooves (2004). Several sliding sleeves are fitted onto the outer wall of the rotating shaft (2002). 2006), the number of the sliding sleeves (2006) is the same as the number of the several groups of traction grooves (2004). The inner walls of the sliding sleeves (2006) are fixedly connected with several protrusions (2007) at equal intervals. The number of protrusions (2007) on the inner wall of each sliding sleeve (2006) is the same as the number of each group of traction grooves (2004). The several protrusions (2007) pass through several sliding grooves (2005) and fit into several traction grooves (2004).

4. The roll-to-roll evaporation coating equipment for flexible substrates according to claim 3, characterized in that: The outer wall of the sliding sleeve (2006) is rotatably connected to four adjusting arms (2008) at its four equal division points. The other end of the adjusting arm (2008) is rotatably connected to an adjusting plate (2009). The outer wall of the adjusting plate (2009) is fixedly connected to an arc plate (2010). The turntable (2001) is provided with a flat groove (2011) at the position corresponding to the adjusting plate (2009). One end of the adjusting plate (2009) passes through the flat groove (2011). Four rotating wheels (2012) are rotatably connected to the four corners of the end of the adjusting plate (2009). The rotating wheels (2012) are attached to the side of the turntable (2001).

5. A roll-to-roll evaporation coating apparatus suitable for flexible substrates according to claim 2, characterized in that: One end of the rotating shaft (2002) and the adjusting rod (2003) passes through the center of the support block (19) and one side of the winding chamber (4). An adjusting knob (2013) is rotatably connected between the inner wall of the end of the rotating shaft (2002). An adjusting thread (2014) is provided on the outer wall of the end of the adjusting rod (2003). The adjusting knob (2013) is sleeved on the outer wall of the end of the adjusting rod (2003) and threadedly connected to its adjusting thread (2014). An output motor (2015) is fixedly installed above the support block (19). The output end of the output motor (2015) is connected to the rotating shaft (2002) through a reducer.

6. The roll-to-roll evaporation coating equipment for flexible substrates according to claim 1, characterized in that: Two preset grooves (21) are respectively opened on both sides of the coating chamber (3). Two leveling components (22) are respectively provided between the inner walls of the coating chamber (3) at positions corresponding to the preset grooves (21). The leveling components (22) include two fixing frames (2201). The two fixing frames (2201) are fixedly connected to the coating chamber (3) and distributed at both ends of the preset grooves (21). A column (2202) is fixedly connected between the inner walls of the fixing frames (2201) at the middle position. Two pressure blocks (2203) are symmetrically slidably connected at the middle position of the column (2202).

7. A roll-to-roll evaporation coating apparatus suitable for flexible substrates according to claim 6, characterized in that: The outer wall of the column (2202) is fitted with two compression springs (2204) on opposite sides of the two pressure blocks (2203). A squeezing roller (2205) is rotatably connected between the two pressure blocks (2203) on the same horizontal line. There are two squeezing rollers (2205), and the outer walls of the two squeezing rollers (2205) are in contact with each other. A limiting groove (2206) is opened on one side of the fixed bracket (12), and a limiting block (2207) is fixedly connected to one side of the pressure block (2203). The limiting block (2207) passes through the limiting groove (2206).

8. The roll-to-roll evaporation coating equipment for flexible substrates according to claim 1, characterized in that: The inner top of the coating chamber (3) is fixedly connected to two sets of support rods (23), each set of support rods (23) consists of two rods, and the ends of the two support rods (23) in the same set are rotatably connected to a tension roller (24). A vacuum pump (25) is fixedly installed at the top of the coating chamber (3), and the position between the two sets of support rods (23) corresponds to the position of the evaporation port (15).

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