Spliced monocrystalline silicon crucible upper and use method thereof

By using a spliced ​​monocrystalline silicon crucible design, the inner crucible and the crucible ring can be replaced individually after corrosion at high temperatures, which solves the material waste problem of the integral structure, reduces costs, increases service life, and ensures high-temperature stability.

CN121853154APending Publication Date: 2026-04-14包头美科硅能源有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-13
Publication Date
2026-04-14

AI Technical Summary

Technical Problem

The existing monolithic structure of the single-crystal silicon crucible leads to material waste and high production costs. Furthermore, it requires complete replacement after localized corrosion, making it impossible to effectively utilize the remaining portion.

Method used

The design adopts a splicing method, dividing the inner crucible side into three arc-shaped segments that are spliced ​​with the outer crucible side. The inner crucible side and the crucible side ring can be replaced separately after corrosion at high temperatures, while the outer crucible side maintains its strength. The design incorporates an exhaust structure and a double positioning structure to ensure stable splicing.

Benefits of technology

Reduce waste of carbon composite materials, lower material costs, ensure high-temperature stability and structural integrity, and extend service life.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of photovoltaic manufacturing, in particular to a spliced monocrystalline silicon crucible upper and a using method thereof.The spliced monocrystalline silicon crucible upper comprises an outer crucible upper body, an inner crucible upper body is arranged in the outer crucible upper body and equally divided into three arc-shaped petal bodies, an inner layer positioning piece is arranged between each arc-shaped petal body and the outer crucible upper body, a crucible upper ring is arranged at the top of the outer crucible upper body, and the outer crucible upper body is provided with an inner layer positioning piece; a locking piece and a sealing piece are arranged between the crucible side ring and the outer crucible side, an exhaust structure is arranged in the outer crucible side, in the high-temperature crystal pulling process, the inner crucible side and the crucible side ring which only directly act on the quartz crucible can be corroded due to the replacement reaction of SiO2 and C, the outer crucible side can keep the original toughness and supporting strength, the whole crucible side does not need to be replaced after use, and the cost is reduced. And only the arc-shaped petal body which is seriously corroded needs to be independently replaced, or the crucible side circular ring which is over-standard corroded is integrally replaced, so that the waste of the carbon composite material is effectively reduced, and the investment of consumables is obviously reduced.
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Description

Technical Field

[0001] This invention relates to the field of photovoltaic manufacturing technology, specifically to a spliced ​​monocrystalline silicon crucible and its usage method. Background Technology

[0002] In the Czochralski method for single crystal growth, the crucible side made of carbon composite material serves as the core support component of the quartz crucible, and its performance directly affects the efficiency and cost of single crystal production. Currently, most single crystal silicon crucible sides on the market adopt an integral structure design, which has revealed many problems that urgently need to be solved in practical applications: In the existing technology, most of the crucible side structures are integral. According to the design drawings, the crucible side is customized through a series of processing steps such as prefabrication, weaving, deposition and impregnation. Such crucible side has high usage costs, and the integral structure means that even if only the inner or upper layer of the crucible side is corroded, the entire crucible side needs to be scrapped and replaced. This not only causes a large amount of carbon composite material to be wasted, but also significantly increases the cost of production consumables. Summary of the Invention

[0003] Therefore, it is necessary to provide a spliced ​​monocrystalline silicon crucible arm and its usage method to address the existing technical problems.

[0004] To address the problems of existing technologies, the present invention adopts the following technical solution: a spliced ​​monocrystalline silicon crucible, comprising an outer crucible in the shape of an annular cylinder, with an open top and a conical opening at the bottom. An inner crucible, fitted to the inner wall of the outer crucible, is provided within the outer crucible. The inner crucible is divided into three arc-shaped lobes, each with an inner positioning element between it and the outer crucible. The three arc-shaped lobes are enclosed by corresponding inner positioning elements to form a complete ring. After the inner crucible is embedded within the outer crucible, their tops are flush. The top of the outer crucible has a detachable crucible ring. A locking element and a sealing element are provided between the crucible ring and the outer crucible. The locking element coaxially fixes the crucible ring and the outer crucible, and the sealing element fills the gap between the crucible ring and the outer crucible. The outer crucible has an exhaust structure for venting gas between it and the inner crucible.

[0005] To improve the stability of the inner crucible after installation, the upper end of each arc-shaped petal is vertical, and its lower end bends inward to form an arc-shaped opening at the inner edge. The inner bottom wall of the outer crucible is coaxially formed with a vertically upward circular boss. When the inner crucible is embedded in the outer crucible, the three arc-shaped openings form a circle and hug the circular boss from the outside to the inside. The conical opening is opened on the circular boss.

[0006] To demonstrate the specific structure of the inner positioning component, the inner positioning component includes several positioning strips evenly distributed along the circumference of the arc-shaped petal. Each positioning strip is vertically arranged and fixedly connected to the outer wall of the corresponding arc-shaped petal. The inner wall of the outer flange has three sets of positioning grooves corresponding to the arc-shaped petal. Each set of positioning grooves includes several strip grooves corresponding to the positioning strips. Each strip groove is vertically arranged. Each arc-shaped petal is positioned and installed by vertically inserting the positioning strip into the strip groove.

[0007] To facilitate the removal of the arc-shaped petal from the outer crucible, the inner wall of the outer crucible near its top is provided with three sets of gripping openings corresponding to the arc-shaped petal. Each set of gripping openings includes several inclined notches, and the upper end of each inclined notch penetrates the top of the outer crucible.

[0008] To improve the strength of the outer crucible side, a pad ring is provided at the top of the outer crucible side near its inner ring. The pad ring is coaxially arranged with the outer crucible side, and the bottom of the pad ring is formed with several insert rods and several triangular insert blocks. Each insert rod is inserted downward into the upper half of the corresponding strip groove, and each triangular insert block is inserted downward into the corresponding inclined notch.

[0009] To demonstrate the specific structure of the seal, the top of the outer crucible side is provided with a sealing ring near its outer ring, and the sealing ring and the gasket ring are coaxially arranged.

[0010] To demonstrate the specific structure of the locking component, a ring groove for inserting a pad ring is provided at the bottom of the crucible side ring. An upper convex ring and a lower convex ring are respectively formed on the outer wall of the crucible side ring and the outer wall of the outer crucible side. When the crucible side ring is spliced ​​downward with the outer crucible side, the upper convex ring and the lower convex ring fit tightly together. The locking component includes several fastening bolts, each of which fixes the upper convex ring and the lower convex ring together.

[0011] To facilitate the hoisting of the assembled crucible side, the upper convex ring has several clearance notches corresponding to the inclined notches, and each clearance notch extends to the outer wall of the outer crucible side. The outer wall of the outer crucible side is fixed with several lifting rings corresponding to the clearance notches, and each lifting ring is located within the corresponding clearance notch.

[0012] To demonstrate how the exhaust structure specifically achieves its exhaust function, the exhaust structure consists of several exhaust slots, each corresponding to a beveled notch. Each exhaust slot is vertically arranged and located on the inner wall of the outer crucible. The upper end of each exhaust slot is connected to the corresponding beveled notch. Each triangular insert has a connecting slot that connects to the beginning and end of the corresponding exhaust slot, and the upper end of each connecting slot leads to the corresponding clearance notch.

[0013] A method for using a spliced ​​monocrystalline silicon crucible arm, the method comprising the following steps: S1. Assemble the inner crucible side. Place the outer crucible side with the opening facing upwards and place it stably. Take three arc-shaped petals and insert them vertically by aligning the positioning strips on their outer walls with the corresponding strip grooves on the inner wall of the outer crucible side. At the same time, make the arc-shaped openings at the lower end of the arc-shaped petals surround and hug the circular protrusion on the inner bottom wall of the outer crucible side. This completes the assembly of the inner crucible side. S2. Assemble the crucible side ring. Place the gasket ring on the inner ring of the top of the outer crucible side, insert the rod into the empty area of ​​the strip groove, insert the triangular block into the bevel notch, place the sealing ring on the outer ring of the top of the outer crucible side, fasten the crucible side ring on the top of the outer crucible side, insert the gasket ring into the annular groove, and use the fastening bolt to pass through the upper and lower convex rings to complete the locking. S3. Crucible side lifting: Use a special lifting tool to hook the lifting ring on the outer wall of the outer crucible side, lift the assembled crucible side into the single crystal furnace, and place it stably on the crucible support inside the furnace. S4. Quartz crucible installation: Use a special lifting tool to lift the quartz crucible directly above the crucible side and slowly lower it vertically until the bottom of the quartz crucible makes stable contact with the circular boss and the crucible core inside the crucible support. At the same time, ensure that a thermal expansion gap of 0.8 to 1.2 mm is maintained between the inner wall of the inner crucible side and the outer wall of the quartz crucible. S5. Crystal pulling operation: Start the single crystal furnace to pull crystals. During this process, the gas between the inner and outer crucible sides enters the connecting groove of the triangular insert through the exhaust groove and is finally discharged from the clearance notch. S6. Component replacement and maintenance: The SiO2 contained in the quartz crucible will undergo a displacement reaction with the C element contained in the crucible side at high temperature. This displacement reaction only acts on the inner crucible side and the crucible side ring. The outer crucible side still maintains its supporting strength. After several rounds of crystal pulling, remove the fastening bolts and take off the crucible side ring. Use the beveled notch to clamp the severely corroded arc-shaped petal and replace it individually. If the corrosion of the crucible side ring exceeds the standard, replace the whole thing. After replacement, reassemble and it can be used again.

[0014] The beneficial effects of this invention compared to the prior art are: Firstly, this invention divides the inner crucible side into three independent arc-shaped petals and configures a detachable crucible side ring, forming a spliced ​​structure of outer crucible side, inner crucible side, and crucible side ring. During the high-temperature crystal pulling process, the inner crucible side and crucible side ring, which only interact directly with the quartz crucible, will be corroded due to the substitution reaction between SiO2 and C, while the outer crucible side can maintain its original toughness and support strength. After use, there is no need to replace the entire crucible side. Only the arc-shaped petals with severe corrosion need to be replaced individually, or the crucible side ring with excessive corrosion needs to be replaced as a whole, which effectively reduces the waste of carbon composite materials and significantly reduces the investment in consumables. Secondly, the present invention designs a complete exhaust structure consisting of an exhaust groove and a connecting groove. During high-temperature crystal pulling, the gas generated between the inner and outer crucible sides can rise along the exhaust groove and be discharged through the connecting groove from the clearance gap. This completely solves the problem of gas accumulation and expansion squeezing the crucible sides, effectively preventing the crucible sides from cracking or deforming, ensuring its structural stability under high-temperature conditions, and providing a stable environment for single crystal growth. Third, the positioning strip on the outer wall of the arc-shaped petal and the strip groove on the inner wall of the outer crucible side form a vertical positioning. The arc-shaped opening at the lower end of the arc-shaped petal surrounds and hugs the circular protrusion on the inner bottom wall of the outer crucible side. The double positioning structure effectively restricts the displacement of the arc-shaped petal, so that the inner crucible side forms a flat and stable quartz crucible receiving cavity after assembly. In addition, the pad ring at the top of the outer crucible side fills the empty area of ​​the strip groove through the bottom insert rod. The triangular insert is embedded in the inclined notch, turning the groove and notch required for disassembly and assembly into structural reinforcement points, avoiding stress concentration, and significantly improving the overall strength of the outer crucible side. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 yes Figure 1 A magnified view of the area indicated by A1 in the diagram; Figure 3 This is a planar sectional view of the present invention; Figure 4 yes Figure 3 The enlarged view of the area indicated by A2 in the diagram; Figure 5 This is an exploded three-dimensional structural diagram of the present invention; Figure 6 This is a three-dimensional structural diagram of the circular ring around the edge of the crucible; Figure 7 It is an exploded three-dimensional structural diagram of the inner and outer sides of the crucible; Figure 8 It is a three-dimensional sectional view of the inner and outer crucible sides; Figure 9 This is a schematic diagram of the three-dimensional structure of the arc-shaped valve.

[0016] The following are the labels in the diagram: 1. Outer crucible side; 2. Inner crucible side; 3. Arc-shaped petal; 4. Crucible side ring; 5. Arc-shaped opening; 6. Circular boss; 7. Positioning strip; 8. Strip groove; 9. Beveled notch; 10. Washer ring; 11. Insert rod; 12. Triangular insert block; 13. Sealing ring; 14. Annular groove; 15. Upper convex ring; 16. Lower convex ring; 17. Fastening bolt; 18. Clearance notch; 19. Lifting ring; 20. Vent groove; 21. Connecting groove. Detailed Implementation

[0017] To further understand the features, technical means, and specific objectives and functions achieved by the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

[0018] refer to Figure 1 and Figure 3 The diagram shows a spliced ​​monocrystalline silicon crucible, comprising an annular cylindrical outer crucible 1 with an open top and a conical opening at the bottom. An inner crucible 2, which is fitted to the inner wall of the outer crucible 1, is also present. The inner crucible 2 is divided into three arc-shaped lobes 3. Each arc-shaped lobe 3 is positioned between itself and the outer crucible 1 by an inner positioning element. The three arc-shaped lobes 3 are enclosed by corresponding inner positioning elements to form a complete ring. After the inner crucible 2 is embedded in the outer crucible 1, their tops are flush. The top of the outer crucible 1 has a detachable crucible ring 4. A locking element and a sealing element are provided between the crucible ring 4 and the outer crucible 1. The locking element coaxially fixes the crucible ring 4 and the outer crucible 1 together, and the sealing element fills the gap between the crucible ring 4 and the outer crucible 1. The outer crucible 1 has an exhaust structure for venting gas between itself and the inner crucible 2.

[0019] This device needs to be assembled before use. The specific assembly process is as follows: First, place the outer crucible 1 stably with its opening facing upwards. Then, insert the three arc-shaped petals 3 into the outer crucible 1 in sequence through the inner positioning component. The three arc-shaped petals 3 are then enclosed by the inner positioning component to form a complete ring and an inner crucible 2. The outer wall of the inner crucible 2 is in contact with the inner wall of the outer crucible 1. After the inner crucible 2 is installed, place the sealing component on the top of the outer crucible 1. Then, fix the crucible circumference ring 4 to the top of the outer crucible 1 through the locking component. At this point, the crucible circumference splicing is complete. The assembled crucible sides are transported to the single crystal furnace using a specialized lifting device and placed on a crucible support inside the furnace. The support contains a crucible core, which is inserted upwards into and seals the conical opening at the bottom of the outer crucible side 1. After the crucible sides are placed, the quartz crucible is hoisted directly above the crucible sides using the same device and then slowly lowered vertically until the bottom of the quartz crucible makes stable contact with the supporting surface of the inner bottom wall of the crucible side. At this point, the quartz crucible is supported by the crucible core and the crucible sides within the support. Once the quartz crucible is inside the crucible sides, the three arc-shaped lobes 3 of the inner crucible side 2 enclose it, leaving a thermal expansion gap of 0.8 to 1.2 mm between the inner wall of the inner crucible side 2 and the outer wall of the quartz crucible. After the quartz crucible is in place, normal crystal pulling can begin. Since the crucible sides are made of carbon composite materials, during the Czochralski single crystal growth process, the SiO2 contained in the quartz crucible will undergo a displacement reaction with the C element contained in the crucible sides at high temperatures, thus corroding the crucible sides from the inside out. However, the crucible sides of this device adopt a spliced ​​structure. In actual use, the upper crucible side ring 4 and the inner crucible side 2 will be corroded, while the outer crucible side 1 will not be affected and will still have the toughness of carbon fiber and the supporting strength will remain unchanged. After several rounds of crystal pulling, the crucible side ring 4 and the inner crucible side 2 can be replaced according to the degree of corrosion. Moreover, when replacing the inner crucible side 2, it is not necessary to completely remove it; only the arc-shaped petal 3 with a greater degree of corrosion needs to be replaced, ultimately improving the utilization rate and service life of the crucible sides.

[0020] refer to Figure 8 and Figure 9 As shown, the upper end of each arc-shaped petal 3 is vertical, and its lower end bends inward and forms an arc-shaped opening 5 at the inner edge. The inner bottom wall of the outer crucible 1 is coaxially formed with a vertically upward circular protrusion 6. When the inner crucible 2 is embedded in the outer crucible 1, the three arc-shaped openings 5 ​​form a circle and hug the circular protrusion 6 from the outside to the inside. The conical opening is opened on the circular protrusion 6.

[0021] When installing the inner crucible support 2 into the outer crucible support 1, each arc-shaped petal 3 is positioned and installed through an inner positioning component. During this process, the arc-shaped opening 5 at the lower end of each arc-shaped petal 3 will fit against the outer wall of the circular boss 6. This restricts the displacement of the arc-shaped petal 3 through the circular boss 6, thereby improving the stability of the entire inner crucible support 2 after installation. After the inner crucible support is installed, its inner wall and the circular boss 6 form a flat inner cavity that can accommodate the quartz crucible.

[0022] refer to Figure 7 and Figure 8As shown, the inner positioning component includes several positioning strips 7 evenly distributed along the circumference of the arc-shaped petal 3. Each positioning strip 7 is vertically arranged and fixed to the outer wall of the corresponding arc-shaped petal 3. The inner wall of the outer crucible 1 is provided with three sets of positioning grooves corresponding to the arc-shaped petal 3. Each set of positioning grooves includes several strip grooves 8 corresponding to the positioning strips 7. Each strip groove 8 is vertically arranged. Each arc-shaped petal 3 is positioned and installed by the positioning strips 7 vertically inserted into the strip grooves 8.

[0023] When installing the inner crucible 2, each positioning strip 7 located on the outer wall of the arc-shaped petal 3 will be inserted downward into the corresponding positioning groove. In this way, the displacement of the arc-shaped petal 3 is limited by the cooperation of the positioning strip 7 and the positioning groove, and the positioning installation of the arc-shaped petal 3 is finally achieved.

[0024] refer to Figure 5 and Figure 8 As shown, the inner wall of the outer crucible side 1 near its top has three sets of clamping openings corresponding to the arc-shaped petals 3. Each set of clamping openings includes several inclined notches 9, and the upper end of each inclined notch 9 passes through the top of the outer crucible side 1.

[0025] After the arc-shaped petal 3 is installed inside the outer crucible side 1, the tops of the two are flush, so that the crucible side ring 4 can be stably installed on the top of the outer crucible side 1. When replacing the arc-shaped petal 3, first remove the crucible side ring 4, and then the arc-shaped petal 3 can be clamped out from the outer crucible side 1 through the inclined notch 9.

[0026] refer to Figures 3 to 5 As shown, the top of the outer crucible side 1 is provided with a pad ring 10 near its inner ring. The pad ring 10 is coaxially arranged with the outer crucible side 1, and the bottom of the pad ring 10 is formed with several insert rods 11 and several triangular insert blocks 12. Each insert rod 11 is inserted downward into the upper half of the corresponding strip groove 8, and each triangular insert block 12 is inserted downward into the corresponding inclined notch 9.

[0027] When processing the strip groove 8, in order for the positioning strip 7 to be inserted into the corresponding strip groove 8, the strip groove 8 needs to be longer than the positioning strip 7. Therefore, after the arc-shaped petal 3 is installed in the outer crucible side 1, the strip groove 8 will have a blank area. The blank area of ​​the strip groove 8 will be filled by the insert rod 11 at the bottom of the pad ring 10. At the same time, the triangular insert block 12 at the bottom of the pad ring 10 will be inserted downward into the corresponding inclined notch 9 and fill it. Finally, the strength of the outer crucible side 1 is improved by the insert rod 11 and the triangular insert block 12.

[0028] refer to Figure 4 and Figure 5 As shown, the top of the outer crucible side 1 is provided with a sealing ring 13 near its outer ring, and the sealing ring 13 is coaxially arranged with the gasket ring 10.

[0029] When the crucible side ring 4 is fixed downwards to the top of the outer crucible side 1, the sealing ring 13 and the gasket ring 10 will be sandwiched between them. At this time, both the gasket ring 10 and the sealing ring 13 are fixed, and the gap between the crucible side ring 4 and the outer crucible side 1 is filled by the sealing ring 13.

[0030] refer to Figure 5 and Figure 6 As shown, a ring groove 14 for inserting a pad ring 10 is provided at the bottom of the crucible side ring 4. An upper convex ring 15 and a lower convex ring 16 are respectively formed on the outer wall of the crucible side ring 4 and the outer wall of the outer crucible side 1. When the crucible side ring 4 is spliced ​​downward with the outer crucible side 1, the upper convex ring 15 and the lower convex ring 16 fit tightly together. The locking component includes several fastening bolts 17, each fastening bolt 17 fixing the upper convex ring 15 and the lower convex ring 16 together.

[0031] When the crucible ring 4 is installed on the top of the outer crucible ring 1, the pad ring 10 located on the top of the outer crucible ring 1 will be embedded upward into the annular groove 14 at the bottom of the crucible ring 4. At the same time, the upper convex ring 15 and the lower convex ring 16 will fit tightly together. Then, the upper convex ring 15 and the lower convex ring 16 will be fixedly connected by several fastening bolts 17, thereby realizing the locking connection between the crucible ring 4 and the outer crucible ring 1.

[0032] refer to Figure 5 and Figure 6 As shown, the upper convex ring 15 has several clearance notches 18 corresponding to the inclined notch 9, and each clearance notch 18 extends to the outer wall of the outer crucible side 1. The outer wall of the outer crucible side 1 is fixedly provided with several lifting rings 19 corresponding to the clearance notches 18, and each lifting ring 19 is located in the corresponding clearance notch 18.

[0033] After the crucible sides are assembled, the complete crucible sides can be lifted and transported using the lifting ring 19, and finally placed stably inside the single crystal furnace.

[0034] refer to Figure 4 and Figure 5 As shown, the exhaust structure consists of several exhaust grooves 20, which correspond to the inclined notch 9. Each exhaust groove 20 is vertically arranged and opened on the inner wall of the outer crucible 1. The upper end of each exhaust groove 20 is connected to the corresponding inclined notch 9. Each triangular insert 12 has a connecting groove 21 that connects to the head and tail of the corresponding exhaust groove 20. The upper end of each connecting groove 21 leads to the corresponding clearance notch 18.

[0035] During the high-temperature crystal pulling process, the gas between the inner crucible side 2 and the outer crucible side 1 will flow upward along the exhaust groove 20 and eventually be discharged from the clearance notch 18 through the connecting groove 21 provided in the triangular insert block 12. The exhaust structure allows the gas between the inner crucible side 2 and the outer crucible side 1 to be discharged in time, preventing the gas from being squeezed by the high temperature and ultimately causing the two to crack.

[0036] A method for using a spliced ​​monocrystalline silicon crucible arm, the method comprising the following steps: S1. Assemble the inner crucible side 2. Place the outer crucible side 1 with its opening facing upwards and place it stably. Take three arc-shaped petals 3 and insert them vertically by aligning the positioning strips 7 on their outer walls with the corresponding strip grooves 8 on the inner wall of the outer crucible side 1. At the same time, make the arc-shaped openings 5 ​​at the lower end of the arc-shaped petals 3 surround and hug the circular protrusions 6 on the inner bottom wall of the outer crucible side 1. This completes the assembly of the inner crucible side 2. S2. Assemble the crucible side ring 4, place the pad ring 10 on the inner ring of the top of the outer crucible side 1, insert the rod 11 into the empty area of ​​the strip groove 8, insert the triangular block 12 into the inclined notch 9, place the sealing ring 13 on the outer ring of the top of the outer crucible side 1, fasten the crucible side ring 4 on the top of the outer crucible side 1, insert the pad ring 10 into the annular groove 14, and use the fastening bolt 17 to pass through the upper convex ring 15 and the lower convex ring 16 to complete the locking. S3. Lifting of the crucible side: Using a special lifting tool, hook the lifting ring 19 on the outer wall of the outer crucible side 1, lift the assembled crucible side into the single crystal furnace, and place it stably on the crucible support inside the furnace. S4. Quartz crucible installation: Use a special lifting tool to lift the quartz crucible directly above the crucible side and slowly lower it vertically until the bottom of the quartz crucible makes stable contact with the circular boss 6 and the crucible core in the crucible support. At the same time, ensure that the inner wall of the inner crucible side 2 and the outer wall of the quartz crucible maintain a thermal expansion gap of 0.8 to 1.2 mm. S5. Crystal pulling operation: Start the single crystal furnace to pull crystals. During this process, the gas between the inner crucible side 2 and the outer crucible side 1 enters the connecting groove 21 of the triangular insert block 12 through the exhaust groove 20 and is finally discharged from the clearance notch 18. S6. Component replacement and maintenance: The SiO2 contained in the quartz crucible will undergo a displacement reaction with the C element contained in the crucible side at high temperature. This displacement reaction only acts on the inner crucible side 2 and the crucible side ring 4. The outer crucible side 1 still maintains its supporting strength. After several rounds of crystal pulling, remove the fastening bolt 17 and take off the crucible side ring 4. Use the inclined notch 9 to clamp the severely corroded arc-shaped petal 3 and replace it separately. If the corrosion of the crucible side ring 4 exceeds the standard, replace the whole thing. After replacement, reassemble and it can be used again.

[0037] The above embodiments only illustrate one or more implementations of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this patent should be determined by the appended claims.

Claims

1. A spliced ​​single-crystal silicon crucible side, characterized in that, The outer crucible (1) is annular cylindrical, with an open top and a conical opening at the bottom. The outer crucible (1) contains an inner crucible (2) that fits against its inner wall. The inner crucible (2) is divided into three arc-shaped petals (3). Each arc-shaped petal (3) is positioned between itself and the outer crucible (1). The three arc-shaped petals (3) are enclosed by corresponding inner positioning elements to form a complete ring. After the inner crucible (2) is embedded in the outer crucible (1), their tops are flush. The top of the outer crucible (1) is provided with a detachable crucible ring (4). The crucible ring (4) and the outer crucible (1) are provided with a locking element and a sealing element. The locking element coaxially connects the crucible ring (4) and the outer crucible (1). The sealing element is used to fill the gap between the crucible ring (4) and the outer crucible (1). The outer crucible (1) contains an exhaust structure for the gas between itself and the inner crucible (2).

2. The spliced ​​single-crystal silicon crucible side according to claim 1, characterized in that, The upper end of each of the arc-shaped petals (3) is vertical, and its lower end is bent inward and forms an arc-shaped opening (5) at the inner edge. The inner bottom wall of the outer crucible (1) is coaxially formed with a vertically upward circular boss (6). When the inner crucible (2) is embedded in the outer crucible (1), the three arc-shaped openings (5) form a circle and hug the circular boss (6) from the outside to the inside. The conical opening is opened on the circular boss (6).

3. The spliced ​​single-crystal silicon crucible side according to claim 1, characterized in that, The inner positioning component includes several positioning strips (7) evenly distributed along the circumference of the arc-shaped petal (3). Each positioning strip (7) is vertically arranged and fixed to the outer wall of the corresponding arc-shaped petal (3). The inner wall of the outer crucible (1) is provided with three sets of positioning grooves corresponding to the arc-shaped petal (3). Each set of positioning grooves includes several strip grooves (8) corresponding to the positioning strips (7). Each strip groove (8) is vertically arranged. Each arc-shaped petal (3) is positioned and installed by the positioning strip (7) vertically inserted into the strip groove (8).

4. The spliced ​​single-crystal silicon crucible side according to claim 3, characterized in that, The inner wall of the outer crucible (1) near its top has three sets of clamping openings corresponding to the arc-shaped petals (3). Each set of clamping openings includes several inclined notches (9), and the upper end of each inclined notch (9) passes through the top of the outer crucible (1).

5. The spliced ​​single-crystal silicon crucible side according to claim 4, characterized in that, The top of the outer crucible side (1) is provided with a gasket (10) near its inner ring. The gasket (10) is coaxially arranged with the outer crucible side (1), and the bottom of the gasket (10) is formed with a number of insert rods (11) and a number of triangular insert blocks (12). Each insert rod (11) is inserted downward into the upper half of the corresponding strip groove (8), and each triangular insert block (12) is inserted downward into the corresponding inclined notch (9).

6. The spliced ​​single-crystal silicon crucible side according to claim 5, characterized in that, The top of the outer crucible side (1) is provided with a sealing ring (13) near its outer ring, and the sealing ring (13) and the gasket ring (10) are coaxially arranged.

7. A spliced ​​single-crystal silicon crucible side according to claim 5, characterized in that, The bottom of the crucible side ring (4) is provided with an annular groove (14) for the pad ring (10) to be inserted. The outer walls of the crucible side ring (4) and the outer crucible side (1) are respectively formed with an upper convex ring (15) and a lower convex ring (16). When the crucible side ring (4) is spliced ​​downward with the outer crucible side (1), the upper convex ring (15) and the lower convex ring (16) fit tightly together. The locking component includes several fastening bolts (17), and each fastening bolt (17) fixes the upper convex ring (15) and the lower convex ring (16) together.

8. The spliced ​​single-crystal silicon crucible side according to claim 7, characterized in that, The upper convex ring (15) has several clearance notches (18) corresponding to the inclined notch (9), and each clearance notch (18) extends to the outer wall of the outer crucible side (1). The outer wall of the outer crucible side (1) is fixedly provided with several lifting rings (19) corresponding to the clearance notches (18), and each lifting ring (19) is located in the corresponding clearance notch (18).

9. A spliced ​​single-crystal silicon crucible side according to claim 8, characterized in that, The exhaust structure consists of several exhaust grooves (20), each exhaust groove (20) corresponding to a sloped notch (9). Each exhaust groove (20) is vertically arranged and opened on the inner wall of the outer crucible side (1). The upper end of each exhaust groove (20) is connected to the corresponding sloped notch (9). Each triangular insert (12) has a connecting groove (21) that is connected to the end of the corresponding exhaust groove (20). The upper end of each connecting groove (21) leads to the corresponding clearance notch (18).

10. A method of using a spliced ​​monocrystalline silicon crucible side, comprising the spliced ​​monocrystalline silicon crucible side as described in claim 9, characterized in that, The method includes the following steps: S1. Assemble the inner crucible (2). Place the outer crucible (1) with its opening facing upwards and place it stably. Take three arc-shaped petals (3) and insert them vertically by aligning the positioning strips (7) on the outer wall with the corresponding strip grooves (8) on the inner wall of the outer crucible (1). At the same time, make the arc-shaped openings (5) at the lower end of the arc-shaped petals (3) surround and hug the circular protrusions (6) on the inner bottom wall of the outer crucible (1). This completes the assembly of the inner crucible (2). S2. Assemble the crucible side ring (4), place the pad ring (10) on the inner ring of the top of the outer crucible side (1), insert the rod (11) into the empty area of ​​the strip groove (8), insert the triangular block (12) into the inclined notch (9), place the sealing ring (13) on the outer ring of the top of the outer crucible side (1), fasten the crucible side ring (4) on the top of the outer crucible side (1), insert the pad ring (10) into the annular groove (14), and use the fastening bolt (17) to pass through the upper convex ring (15) and the lower convex ring (16) to complete the locking; S3. Lifting of the crucible side: Using a special lifting tool, hook the lifting ring (19) on the outer wall of the outer crucible side (1) and lift the assembled crucible side into the single crystal furnace, and place it stably on the crucible support inside the furnace. S4. Quartz crucible installation: Use a special lifting tool to lift the quartz crucible to the top of the crucible side and slowly lower it vertically until the bottom of the quartz crucible makes stable contact with the circular boss (6) and the crucible core in the crucible support. At the same time, ensure that the inner wall of the inner crucible side (2) and the outer wall of the quartz crucible maintain a thermal expansion gap of 0.8 to 1.2 mm. S5. Crystal pulling operation: Start the single crystal furnace to pull crystals. During this process, the gas between the inner crucible side (2) and the outer crucible side (1) enters the connecting groove (21) of the triangular insert (12) through the exhaust groove (20) and is finally discharged from the clearance notch (18). S6. Component replacement and maintenance: The SiO2 contained in the quartz crucible will undergo a displacement reaction with the C element contained in the crucible side at high temperature. This displacement reaction only acts on the inner crucible side (2) and the crucible side ring (4). The outer crucible side (1) still maintains its supporting strength. After several rounds of crystal pulling, remove the fastening bolt (17) and take off the crucible side ring (4). Use the inclined notch (9) to clamp the severely corroded arc-shaped petal (3) and replace it separately. If the corrosion of the crucible side ring (4) exceeds the standard, replace the whole thing. After replacement, reassemble and reuse it.