Exhaust equipment and vacuum pump system

Abstract

The invention discloses exhaust equipment and a vacuum pump system. The exhaust equipment is used for communicating the vacuum pump with the tail gas treatment device and comprises a first pipe body, a second pipe body, a first connector and a supporting piece, the first pipe body is used for communicating an exhaust port of the vacuum pump with the tail gas treatment device, the second pipe body is arranged outside the first pipe body in a sleeving mode, and a closed clearance space is formed between the first pipe body and the second pipe body; the first connector is arranged on the second pipe body and used for vacuumizing the gap space to be in a vacuum state to form a vacuum heat insulation layer, and the supporting piece is arranged in the gap space to support the first pipe body and the second pipe body. The heat preservation efficiency can be improved, and meanwhile the manufacturing cost is reduced.

Description

Technical Field

[0001] This application relates to the field of vacuum pump technology, and more particularly to an exhaust device and a vacuum pump system. Background Technology

[0002] This section provides only background information relevant to this application and is not necessarily prior art.

[0003] With increasing environmental awareness and technological advancements, vacuum pumps are finding increasingly widespread applications in various fields, including pharmaceuticals, food, chemicals, and electronics. The demand for vacuum pumps will further increase, especially with the continuous expansion of the new energy vehicle market. Furthermore, the rapid development of the semiconductor industry will also drive continued growth in demand for vacuum pumps in industries such as integrated circuits, photovoltaics, LEDs, flat panel displays, and lithium batteries.

[0004] Currently, vacuum pumps require the extracted gas to be discharged into a tail gas treatment device during operation. This device processes the discharged gas, and the vacuum pump and tail gas treatment device are connected by a pipeline. If the gas experiences a rapid temperature drop within the pipeline, it will condense and deposit, causing blockage. In related technologies, insulation materials are typically used to wrap the pipeline; however, these materials have poor insulation performance and, after aging, produce pollutants that contaminate the environment, increasing both the manufacturing and operating costs of the pipeline. Summary of the Invention

[0005] The purpose of this application is to at least address the problem of how to improve thermal insulation efficiency while reducing manufacturing costs. This purpose is achieved through the following means: The first aspect of this application discloses an exhaust device for connecting a vacuum pump and an exhaust gas treatment device. The exhaust device includes a first pipe body, a second pipe body, a first interface, and a support member. The first pipe body connects the exhaust port of the vacuum pump to the exhaust gas treatment device. The second pipe body is sleeved outside the first pipe body, forming a sealed gap space between the first and second pipe bodies. The first interface is disposed in the second pipe body and is used to evacuate the gap space to a vacuum state to form a vacuum insulation layer. The support member is disposed within the gap space to support the first and second pipe bodies.

[0006] In the exhaust equipment of this application, when heat insulation of the first pipe body is required, a vacuum can be evacuated through the first interface to maintain the gap space in a constant vacuum state. This improves the temperature consistency between the inside of the first pipe body and the exhaust gas, ensuring that the exhaust gas always enters the exhaust gas treatment device in gaseous form through the first pipe body. This reduces the risk of pipe blockage and equipment downtime caused by condensation and deposition, and extends the service life of the vacuum pump. Furthermore, the use of vacuum insulation eliminates the need for traditional insulation materials, reducing environmental pollution caused by the aging and shedding of insulation materials, while also reducing the need for insulation material replacement, thus lowering operating and manufacturing costs.

[0007] In some embodiments, the exhaust device further includes a first conduit for connecting the first interface and the suction port of the vacuum pump.

[0008] In some embodiments, the exhaust device further includes a second interface and a third interface, both of which are disposed on the second pipe body. The second interface and the third interface are respectively disposed at both ends of the second pipe body along its own extension direction. One of the second interface and the third interface is used to deliver heat exchange fluid into the gap space, and the other is used to discharge heat exchange fluid from the gap space.

[0009] In some embodiments, the exhaust device further includes a second conduit for connecting a third interface and an exhaust gas treatment device.

[0010] In some embodiments, the exhaust equipment further includes a one-way flow control device, which is connected in series between the third interface and the exhaust gas treatment device via a second pipeline.

[0011] In some embodiments, at least one of the second interface and the third interface is disposed on both sides of the second tube body along the radial direction of the second tube body, separate from the first interface.

[0012] In some embodiments, the number of support members includes a plurality of members, which are spaced apart in the gap space along the extension direction of the first tube; wherein at least some of the support members are annular structures and have axially extending through holes; and / or, at least some of the support members are support ribs, which are spaced apart radially along the first tube and extend axially along the first tube.

[0013] In some embodiments, a reflective layer is provided on the side surface of the second tube facing the first tube, and the thermal radiation reflectivity of the reflective layer is greater than the thermal radiation reflectivity of the material of the second tube.

[0014] In some embodiments, the exhaust device further includes a detection element disposed on the outside of the second pipe body, the detection element being configured to detect temperature information of the first pipe body near the exhaust gas treatment device.

[0015] The second aspect of this application provides a vacuum pump system, including a vacuum pump, an exhaust gas treatment device, and an exhaust device as described in the first aspect above. Attached Figure Description

[0016] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. Wherein: Figure 1 This is a cross-sectional structural diagram of a vacuum pump system according to some embodiments of this application; Figure 2 This is a cross-sectional structural diagram of a vacuum pump system according to some embodiments of this application; Figure 3 This is an axonal structural diagram of an exhaust device according to some embodiments of this application; Figure 4 This is an exploded structural diagram of an exhaust device according to some embodiments of this application.

[0017] The labels in the attached diagram are as follows: 100. Exhaust equipment; 200. Vacuum pump; 300. Exhaust gas treatment device; 10. First tube body; 20. Second tube body; E. Gap space; 30. Support component; 31. Through hole; 41. First interface; 42. Second interface; 43. Third interface; 51. First pipeline; 52. Second pipeline; 53. Third pipeline; 60. One-way flow control device; 71. First control unit; 72. Second control unit; 73. Third control unit; 81. Inspection component; 82. Vacuum inspection component. Detailed Implementation

[0018] Exemplary embodiments of this application will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of this application are shown in the drawings, it should be understood that this application may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of this application and to fully convey the scope of this application to those skilled in the art.

[0019] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0020] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0021] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "over," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure rotates, then an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented as "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0022] In the description of the application, the technical terms "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "circumferential", "height direction", "first direction", "second direction", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed, operated or used in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0023] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between components; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] Figure 1 This is a cross-sectional structural diagram of a vacuum pump system according to some embodiments of this application. Figure 2 This is a cross-sectional structural diagram of a vacuum pump system according to some embodiments of this application.

[0025] like Figure 1 and Figure 2 As shown, according to an embodiment of this application, a vacuum pump system is proposed, which includes a vacuum pump 200, an exhaust gas treatment device 300, and an exhaust device 100. The exhaust port of the vacuum pump 200 and the exhaust gas treatment device 300 are connected through the exhaust device 100.

[0026] In some fabrication processes, it is necessary to use a vacuum pump 200 to remove process gases from the process chamber. For example, in semiconductor processes such as chemical vapor deposition (CVD) and dry etching, after reactive gases (such as SiH4, NH3, Cl2, BCl3, WF6, etc.) react in the process chamber, the vacuum pump 200 is used to remove the reactive gases to the exhaust gas treatment device 300.

[0027] Specifically, the vacuum pump 200 has an extraction port and an exhaust port. The process chamber is connected to the extraction port, and the exhaust port is connected to the tail gas treatment device 300 through the exhaust device 100. When the vacuum pump 200 is started, the reactive gas in the process chamber (for ease of understanding, the reactive gas in the exhaust device 100 is referred to as tail gas) enters the vacuum pump 200 through the extraction port and is then discharged into the tail gas treatment device 300 through the exhaust device 100 via the exhaust port.

[0028] Figure 3 This is an axonal structural diagram of an exhaust device according to some embodiments of this application. Figure 4 This is an exploded structural diagram of an exhaust device according to some embodiments of this application.

[0029] like Figures 1 to 4 As shown, according to an embodiment of this application, an exhaust device 100 is proposed. The exhaust device 100 is used to connect a vacuum pump 200 and an exhaust gas treatment device 300. The exhaust device 100 includes a first pipe body 10, a second pipe body 20, a first interface 41, and a support member 30. The first pipe body 10 is used to connect the exhaust port of the vacuum pump 200 and the exhaust gas treatment device 300. The second pipe body 20 is sleeved on the outside of the first pipe body 10, forming a sealed gap space E between the first pipe body 10 and the second pipe body 20. The first interface 41 is disposed in the second pipe body 20, and the first interface 41 is used to evacuate the gap space E to a vacuum state to form a vacuum insulation layer. The support member 30 is disposed within the gap space E to support the first pipe body 10 and the second pipe body 20.

[0030] In the above embodiments, the exhaust device 100 includes a first pipe body 10, which is a conveying channel in the exhaust device 100 for conveying the exhaust gas discharged by the vacuum pump 200. The first pipe body 10 can be a hollow tubular structure.

[0031] Optionally, the extension shape of the first tube 10 can be straight, curved, or a combination of both, as long as it facilitates the installation and connection of field equipment.

[0032] In the above embodiments, the exhaust device 100 includes a second pipe body 20. The second pipe body 20 can be a tubular structure coaxially arranged with the first pipe body 10, or it can be a tubular structure not coaxially arranged with the first pipe body 10. The second pipe body 20 is sleeved on the outside of the first pipe body 10, and together with the first pipe body 10, they enclose a sealed gap space E.

[0033] Optionally, the second tube 20 may completely cover the first tube 10, that is, all the structures of the first tube 10 are located inside the second tube 20; or, along the extending direction of the first tube 10, the second tube 20 is fitted onto a part of the first tube 10, and the other part of the first tube 10 is exposed to the outside; or, the second tube 20 includes a plurality of sub-wall portions, which are arranged around the first tube 10 along the radial direction of the first tube 10.

[0034] The first interface 41 can be connected to an external vacuum pump or to the suction port of the vacuum pump 200. Before the vacuum pump 200 is started, the gas in the gap space E can be discharged through the first interface 41 to make the gap space E a vacuum space (i.e., it is evacuated to a vacuum state). Understandably, heat conduction (i.e., thermal conduction) occurs through the object itself or direct contact between objects, transferring energy from molecule to molecule. Molecules with high kinetic energy vibration transfer energy to those with low kinetic energy. Heat conduction requires a medium. In a vacuum environment, gas molecules are extremely rare (ideally zero). There is no medium between the walls of the first tube 10 and the second tube 20 to transfer heat; therefore, heat conduction is almost completely eliminated. The vacuum insulation layer prevents heat from being conducted from the first tube 10 to the second tube 20, reducing heat loss from the exhaust gas in the first tube 10 and reducing the possibility of condensation and deposition of the exhaust gas within the first tube 10.

[0035] Optionally, the first interface 41 can be a tubular or flange-like interface disposed on the wall of the second pipe body 20.

[0036] Optionally, the first interface 41 may be located in the middle or near the end of the second tube 20 along its own extension direction.

[0037] Optionally, the first interface 41 and the support member 30 are arranged at intervals.

[0038] In the above embodiment, at least a portion of the support member 30 is located within the gap space E. The support member 30 is used to connect and support the first tube 10 and the second tube 20, reducing the possibility of the first tube 10 shifting or shaking, and maintaining the gap space E, thereby reducing the possibility of the tube wall of the second tube 20 collapsing during the process of evacuating the gap space E.

[0039] Optionally, the support member 30 may be arranged around the first tube 10 in the circumferential direction; or, the support member 30 may also extend along the extension direction of the first tube 10. This embodiment of the application does not limit this, as long as it can support the first tube 10 and the second tube 20. For example, the support member 30 may be an annular support ring, a columnar support rib, or a grid-like support frame, etc.

[0040] Optionally, the number of support members 30 may include one or more.

[0041] Optionally, the support member 30 may include a plurality of sub-supports, which may be spaced apart circumferentially along the first tube body 10.

[0042] In some examples, the entire structure of the support member 30 is located within the gap space E, that is, the support member 30 abuts against the side wall of the first tube 10 facing the second tube 20 and the side wall of the second tube 20 facing the first tube 10.

[0043] In the exhaust device 100 provided in this application embodiment, when it is necessary to insulate the first pipe body 10, a vacuum can be drawn into the gap space E through the first interface 41 to keep the gap space E in a vacuum state. This improves the temperature consistency between the inside of the first pipe body 10 and the exhaust gas, ensuring that the exhaust gas always enters the exhaust gas treatment device 300 in gaseous form through the first pipe body 10. This reduces the risk of pipe blockage and equipment downtime caused by condensation and deposition, and extends the service life of the vacuum pump 200. Furthermore, by using vacuum insulation, there is no need to use traditional insulation materials, reducing environmental pollution caused by the aging and shedding of insulation materials. It also reduces the need for insulation material replacement, lowering usage and manufacturing costs.

[0044] Optionally, the vacuum insulation layer of the exhaust equipment 100 can be evacuated during the no-load warm-up stage of the vacuum pump 200 (generally, the vacuum pump 200 needs to be warmed up for 1 hour after being put into operation to ensure that the vacuum pump 200 can reach the optimal state).

[0045] In some alternative embodiments, such as Figure 1 As shown, the exhaust device 100 also includes a first pipe 51, which is used to connect the first interface 41 and the suction port of the vacuum pump 200.

[0046] For example, the vacuum pump 200's extraction port and the process chamber are connected via a main extraction pipeline. A first pipeline 51 can be connected to this main extraction pipeline, enabling the vacuum pump 200 to evacuate the gap space E. Optionally, a first control unit 71 can be connected in series with the first pipeline 51. During the no-load warm-up phase of the vacuum pump 200, the first control unit 71 controls the first pipeline 51 to open, allowing gas in the gap space E to be extracted through the first pipeline 51 into the vacuum pump 200 chamber and discharged through the first pipe 10 to the exhaust gas treatment device 300. When the vacuum level in the gap space E reaches a preset value, the gap space E reaches the insulation condition (forming an insulation layer), and then the first control unit 71 is controlled to close the first pipeline 51.

[0047] Optionally, the first control unit 71 can be a solenoid valve.

[0048] Optionally, the exhaust device 100 may further include a vacuum detection element 82, which can detect the vacuum level within the gap space E. Optionally, the vacuum detection element 82 may be connected in parallel with the first pipeline 51. Optionally, the preset value of the vacuum level within the gap space E may be 0.5 Pa to 10 Pa.

[0049] Optionally, the vacuum detection element 82 may include a vacuum gauge.

[0050] In the above embodiments, there is no need to set up a separate vacuum unit. The first pipeline 51 directly reuses the air extraction port of the vacuum pump 200, which reduces the manufacturing cost of the exhaust equipment 100. Furthermore, the vacuuming operation of the gap space E is integrated with the air extraction function of the vacuum pump 200 itself, realizing the self-sustaining of the vacuum insulation layer and improving the integration of the equipment.

[0051] In some alternative embodiments, such as Figure 1 As shown, the exhaust device 100 also includes a second interface 42 and a third interface 43. The second interface 42 and the third interface 43 are both disposed on the second pipe body 20. The second interface 42 and the third interface 43 are respectively disposed at both ends of the second pipe body 20 along its own extension direction. One of the second interface 42 and the third interface 43 is used to deliver heat exchange fluid into the gap space E, and the other is used to discharge the heat exchange fluid in the gap space E.

[0052] The second interface 42 and the third interface 43 are ports for the exhaust device 100 to achieve active thermal control. Both are fluid delivery interfaces set on the wall of the second pipe body 20, and are located at both ends of the second pipe body 20 along its own extension direction (e.g., the second interface 42 is located at the end of the second pipe body 20 near the vacuum pump 200, and the third interface 43 is located at the end near the exhaust gas treatment device 300). One of them serves as a heat exchange fluid inlet, used to deliver a heat exchange medium (such as hot water, hot air, coolant, nitrogen, etc.) to the sealed gap space E between the first pipe body 10 and the second pipe body 20; the other serves as a heat exchange fluid outlet, used to discharge the fluid after heat exchange from the gap space E. Active temperature control of the first pipe body 10 is achieved through fluid circulation heat exchange, compensating for the shortcomings of a single vacuum insulation layer in extreme temperature scenarios.

[0053] In this embodiment, the second interface 42 and the third interface 43 can be used to heat and cool the first tube 10. This embodiment uses the second interface 42 as the heat exchange fluid inlet and the third interface 43 as the heat exchange fluid outlet for illustration.

[0054] For example, when the temperature inside the first tube 10 reaches a first preset temperature, an external heat exchange device flows cooling fluid (such as nitrogen) into the gap space E through the second interface 42, and discharges the cooling fluid from the gap space E through the third interface 43. The cooling fluid exchanges heat with the first tube 10 in the gap space E, carrying away the heat of the first tube 10 and causing the temperature of the tube wall of the first tube 10 to drop, so that the temperature of the tube wall of the first tube 10 is maintained within the preset range.

[0055] The first preset temperature can be the critical decomposition temperature of the sealing ring at the connection between the first pipe body 10 and the exhaust port (or exhaust gas treatment device 300) of the vacuum pump 200, that is, when the first pipe body 10 exceeds the first preset temperature, the sealing ring fails due to high temperature. Alternatively, the first preset temperature can be the critical temperature at which the exhaust gas inside the first pipe body 10 can react or decompose, that is, when the first pipe body 10 exceeds the first preset temperature, the exhaust gas inside the first pipe body 10 can react or decompose.

[0056] For example, when the temperature inside the first tube 10 reaches the second preset temperature, the external heat exchange device directs the heating fluid through the second interface 42 into the gap space E, and discharges the heating fluid from the gap space E through the third interface 43. The heating fluid exchanges heat with the first tube 10 within the gap space E, increasing the temperature of the tube wall and thus maintaining the temperature of the first tube 10 within the preset range.

[0057] The second preset temperature can be the condensation temperature of the exhaust gas inside the first pipe 10. That is, when the first pipe 10 is lower than the second preset temperature, the exhaust gas inside the first pipe 10 can condense.

[0058] It is understandable that the temperature of the pipe wall of the first pipe body 10 can be adjusted during the exhaust gas emission process (by heating or cooling the first pipe body 10 using the second interface 42 and the third interface 43), and the temperature of the pipe wall of the first pipe body 10 can also be adjusted before the exhaust gas emission.

[0059] In this embodiment, the vacuum insulation layer can provide heat insulation, but it cannot handle scenarios where exhaust gas needs to be heated for transport (such as low-boiling-point organic solvents) or cooled for transport (such as high-temperature reaction exhaust gas). The active heat exchange system introduced by the second interface 42 and the third interface 43 can maintain the pipe wall temperature of the first pipe 10 within a preset range by switching the exchange fluid type (heating medium / cooling medium) or adjusting the fluid temperature. Furthermore, the second interface 42 and the third interface 43 can reuse the gap space E, so that the gap space E has both passive heat insulation and active temperature control functions, thereby improving the applicability of the exhaust equipment 100.

[0060] In some alternative embodiments, such as Figure 1 As shown, the exhaust device 100 also includes a second pipe 52, which is used to connect the third interface 43 and the exhaust gas treatment device 300.

[0061] For example, the third interface 43 is located at the end near the exhaust gas treatment device 300. The third interface 43 serves as a heat exchange fluid outlet, which can discharge the fluid after heat exchange through the gap space E into the exhaust gas treatment device 300.

[0062] Optionally, the exhaust device 100 also includes a second control unit 72, and the second pipeline 52 may be connected in series with the second control unit 72, which can control whether the second pipeline 52 is open or closed.

[0063] Optionally, the exhaust device 100 may include a third pipe 53 and a third control unit 73. The third pipe 53 is used to connect the second interface 42 to an external heat exchange device. The third pipe 53 may be connected in series with the third control unit 73, which can control whether the third pipe 53 is open or closed.

[0064] For example, the exhaust device 100 has a vacuum mode and a heat exchange mode. During the transition from vacuum mode to heat exchange mode, the first control unit 71 closes the first pipe 51, and the second control unit 72 and the third control unit 73 respectively open the second pipe 52 and the third pipe 53, so that the heat exchange fluid can exchange heat with the first tube 10, thereby maintaining the tube wall temperature of the first tube 10 within a preset range. During the transition from heat exchange mode to vacuum mode, the second control unit 72 and the third control unit 73 respectively close the second pipe 52 and the third pipe 53, and the first control unit 71 opens the first pipe 51, so that the vacuum pump 200 discharges the gas in the gap space E until the vacuum level in the gap space E reaches a preset value.

[0065] Optionally, the second control unit 72 can be a solenoid valve.

[0066] Optionally, the third control unit 73 can be a solenoid valve.

[0067] Optionally, the vacuum detection element 82 can be connected in parallel to the third pipeline 53, and the vacuum detection element 82 can detect the vacuum level in the third pipeline 53 between the third control unit 73 and the gap space E.

[0068] Optionally, the vacuum pump system may also include a control unit that communicates with the vacuum detection element 82 and can control the first control unit 71, the second control unit 72, and the third control unit 73.

[0069] In this embodiment of the application, by setting a second pipeline 52, the heat exchange fluid after heat exchange is transferred to the exhaust gas treatment device 300, and the exhaust gas treatment device 300 treats the heat exchange fluid after heat exchange, thereby reducing the possibility of the heat exchange fluid polluting the environment.

[0070] In some alternative embodiments, such as Figure 1 As shown, the exhaust equipment 100 also includes a one-way flow control device 60, which is connected in series between the third interface 43 and the exhaust gas treatment device 300 via a second pipeline 52.

[0071] The one-way flow control device 60 is a control element of the exhaust equipment 100 to realize one-way fluid flow and reverse sealing. The one-way flow control device 60 is connected in series between the third interface 43 (heat exchange fluid outlet) and the exhaust gas treatment device 300 through the second pipeline 52. It only allows the heat exchange fluid flowing out of the gap space E to be introduced into the exhaust gas treatment device 300 in the forward direction, while blocking the backflow of exhaust gas and condensate in the exhaust gas treatment device 300 to the gap space E, reducing the risk of exhaust gas backflow and improving the system safety and operational reliability of the exhaust equipment 100.

[0072] Optionally, the one-way flow control device 60 can be a one-way valve.

[0073] In some alternative embodiments, such as Figure 1 As shown, at least one of the second interface 42 and the third interface 43 is located on both sides of the second tube 20 along the radial direction of the second tube 20, separate from the first interface 41.

[0074] In some examples, the second interface 42 and the third interface 43 are located on the same side of the second tube 20 along its radial direction, i.e., the line connecting the second interface 42 and the third interface 43 is parallel to the extension direction of the second tube 20, and the second interface 42 and the third interface 43 are located on opposite sides of the second tube 20 along its radial direction, respectively, as is the first interface 41. In other examples, the second interface 42 and the first interface 41 are located on opposite sides of the second tube 20 along its radial direction. Optionally, the third interface 43 and the first interface 41 may be located on the same side of the second tube 20 along its radial direction, i.e., the line connecting the third interface 43 and the first interface 41 is parallel to the extension direction of the second tube 20, or the third interface 43 and the first interface 41 may be located on different sides of the second tube 20 along its radial direction. In still other examples, the third interface 43 and the first interface 41 are located on opposite sides of the second tube 20 along its radial direction. Optionally, the second interface 42 and the first interface 41 can be located on the same side of the second tube 20 along its radial direction, that is, the line connecting the second interface 42 and the first interface 41 is parallel to the extension direction of the second tube 20. Alternatively, the second interface 42 and the first interface 41 can be located on different sides of the second tube 20 along its radial direction. The fact that the second interface 42 and the first interface 41 are respectively located on opposite sides of the second tube 20 along its radial direction can be understood as the second interface 42 and the first interface 41 being arranged opposite each other along the radial direction of the second tube 20.

[0075] In this embodiment, it is beneficial to reduce the possibility of interference between pipelines, and at the same time reduce the possibility of heat exchange fluid seeping into vacuum pump 200 through first interface 41.

[0076] In some alternative embodiments, such as Figure 3 As shown, the number of support members 30 includes multiple members, which are spaced apart in the gap space E along the extension direction of the first tube 10; wherein, at least some of the multiple support members 30 are annular structures and are provided with axially extending through holes 31; and / or, at least some of the multiple support members 30 are support ribs, which are spaced apart radially along the first tube 10 and extend axially along the first tube 10.

[0077] For example, the support member 30 can be a ring-shaped structure or a support rib. The ring-shaped structure is generally circular and can be fitted to the outer wall of the first tube 10 and the inner wall of the second tube, providing radial support for the first tube 10 and the second tube within the gap space E. There can be multiple through holes 31, which can be arranged at intervals along the circumference of the ring-shaped structure. A support rib is a long, rib-like support member that provides radial support for the first tube 10 and the second tube within the gap space E.

[0078] In some examples, the multiple support members 30 are all annular structures, and the multiple annular structures are spaced apart along the extending direction of the first tube 10. In other examples, the multiple support members 30 are all support ribs, and the multiple support ribs are spaced apart radially along the first tube 10. In some examples, a portion of the multiple support members 30 are annular structures, and another portion of the multiple support members 30 are support ribs. The multiple annular structures and multiple support ribs can be arranged sequentially and spaced apart, or at least one support rib can be provided between two annular structures.

[0079] In this embodiment of the application, through the above-mentioned arrangement, multiple support members 30 are arranged at intervals along the axial direction to provide radial support for the first pipe body 10 and the second pipe body from multiple positions. This can effectively reduce the possibility of the first pipe body 10 shifting or shaking during the exhaust gas transportation process, and reduce the risk of heat insulation failure caused by direct contact between the first pipe body 10 and the second pipe body. At the same time, it simplifies the structural design of the support member 30 and reduces manufacturing and assembly costs.

[0080] In some alternative embodiments, the surface of the second tube 20 facing the first tube 10 is provided with a reflective layer, and the thermal radiation reflectivity of the reflective layer is greater than the thermal radiation reflectivity of the material of the second tube 20.

[0081] Thermal radiation reflectivity is a physical parameter describing the ability of an object's surface to reflect thermal radiation energy. Thermal radiation reflectivity is the percentage of total thermal radiation energy projected onto an object's surface that is reflected by the surface. In a vacuum environment, heat conduction and convection are significantly suppressed, but thermal radiation (transferring heat via electromagnetic waves without a medium) becomes the primary heat loss path within the gap space E. The reflective layer, through its high reflectivity, reflects the heat radiated from the first tube 10 to the second tube 20 back to the first tube 10, further blocking heat transfer and forming a dual insulation system of passive heat resistance and radiation reflection with the vacuum insulation layer.

[0082] Alternatively, the material of the reflective layer may include one or a combination of silver and aluminum.

[0083] In some alternative embodiments, such as Figure 1 As shown, the exhaust device 100 also includes a detection element 81, which is disposed on the outside of the second pipe body 20. The detection element 81 is configured to detect the temperature information of the first pipe body 10 near the exhaust gas treatment device 300.

[0084] The outer side of the second tube 20 refers to the side of the second tube 20 facing away from the first tube 10. The detection element 81 is located on the outer side of the second tube 20, which is beneficial for operators to obtain detection information and to maintain and replace the detection element 81. As the exhaust gas moves along the extension direction of the first tube 10 to the exhaust gas treatment device 300, it will transfer its own heat to the first tube 10. This makes the temperature of the exhaust gas lower as it gets closer to the exhaust gas treatment device 300, which makes the exhaust gas more prone to condensation and deposition. The detection element 81 is configured to detect the temperature information of the first tube 10 near the exhaust gas treatment device 300. That is, the detection element 81 detects the temperature of the area of ​​the first tube 10 near the exhaust gas treatment device 300, so that the detection element 81 can obtain the temperature information of the exhaust gas at the lower temperature, thereby determining whether it is necessary to switch from vacuum mode to heat exchange mode through the second interface 42 and the third interface 43, so as to further reduce the possibility of exhaust gas condensation and deposition in the first tube 10.

[0085] Optionally, the detection element 81 may include a temperature sensor. The temperature sensor may be a screw-in temperature sensor or a non-contact infrared temperature sensor, which can be fixed to the second tube 20 for real-time monitoring of the temperature of the second tube 20, which is in direct contact with the exhaust gas.

[0086] According to an embodiment of this application, a vacuum pump system is provided, including a vacuum pump 200, an exhaust gas treatment device 300, and an exhaust device 100 provided in any of the above embodiments. The exhaust port of the vacuum pump 200 and the exhaust gas treatment device 300 are connected through the exhaust device 100.

[0087] The above description is merely a preferred embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An exhaust device for connecting a vacuum pump and an exhaust gas treatment device, characterized in that, The exhaust equipment includes: The first tube is used to connect the exhaust port of the vacuum pump to the exhaust gas treatment device; The second tube is fitted over the outside of the first tube, and a sealed gap space is formed between the first tube and the second tube. A first interface is provided in the second tube body. The first interface is used to evacuate the gap space to a vacuum state to form a vacuum insulation layer. A support member is disposed within the gap space to support the first tube and the second tube.

2. The exhaust device according to claim 1, characterized in that, The exhaust device further includes a first pipe for connecting the first interface and the suction port of the vacuum pump.

3. The exhaust device according to claim 1, characterized in that, The exhaust device further includes a second interface and a third interface, both of which are disposed on the second pipe body. The second interface and the third interface are respectively disposed at both ends of the second pipe body along its own extension direction. One of the second interface and the third interface is used to deliver heat exchange fluid into the gap space, and the other is used to discharge the heat exchange fluid into the gap space.

4. The exhaust device according to claim 3, characterized in that, The exhaust equipment also includes a second pipe for connecting the third interface and the exhaust gas treatment device.

5. The exhaust device according to claim 4, characterized in that, The exhaust equipment also includes a one-way flow control device, which is connected in series between the third interface and the exhaust gas treatment device via the second pipeline.

6. The exhaust device according to claim 3, characterized in that, At least one of the second interface and the third interface is located on both sides of the second tube body along the radial direction of the second tube body, separate from the first interface.

7. The exhaust device according to any one of claims 1-6, characterized in that, The number of the support members includes multiple members, which are spaced apart in the gap space along the extension direction of the first tube. Wherein, at least a portion of the plurality of support members are annular structures and have axially extending through holes; and / or, at least a portion of the plurality of support members are support ribs, wherein the plurality of support ribs are arranged radially spaced along the first tube and extend axially along the first tube.

8. The exhaust device according to any one of claims 1-6, characterized in that, The second tube body has a reflective layer on the side surface facing the first tube body, and the thermal radiation reflectivity of the reflective layer is greater than the thermal radiation reflectivity of the material of the second tube body.

9. The exhaust device according to any one of claims 1-6, characterized in that, The exhaust equipment also includes a detection element disposed on the outside of the second pipe body, and the detection element is configured to detect temperature information of the first pipe body near the exhaust gas treatment device.

10. A vacuum pump system, characterized in that, include: Vacuum pump; Exhaust gas treatment device; The exhaust device according to any one of claims 1-9, wherein the exhaust port of the vacuum pump and the exhaust gas treatment device are connected through the exhaust device.

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