Adjusting assembly, motion table and semiconductor device
By combining the design of adjusting components and fasteners, height adjustment and position locking can be achieved independently. By utilizing the cooperation of limiting grooves and limiting protrusions and elastic components to compensate for vibration, the problems of poor adjustment accuracy and fastening effect of existing adjusting components are solved, achieving high precision and long-term stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHENZHEN SICARRIER IND MACHINES CO LTD
- Filing Date
- 2026-03-13
- Publication Date
- 2026-04-17
AI Technical Summary
Existing adjustment components rely on the same bolt to achieve both height adjustment and locking, resulting in poor adjustment accuracy, inadequate tightening effect, and potential long-term stability issues.
The design employs a combination of adjusting components and fasteners, achieving height adjustment and position locking through independent adjusting components and fasteners respectively. The cooperation of limiting grooves and limiting protrusions enhances adjustment accuracy and stability, and the elastic element provides pre-tightening force to compensate for vibration effects.
The adjustment accuracy and fastening effect of the adjustment components have been improved, enhancing long-term stability and ensuring high precision and stability under high acceleration and high frequency vibration conditions.
Smart Images
Figure CN121876307A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor equipment technology, and in particular to an adjustment component, a motion stage, and a semiconductor device. Background Technology
[0002] In semiconductor metrology equipment, a stage drives a chuck to carry the sample being tested, moving along a set trajectory below the metrology system. The chuck's bearing surface needs to maintain and remain stable with extremely high precision in parallelism, perpendicularity, and spacing with the metrology system over a long period. This is fundamental to the realization of key processes such as metrology and defect detection. The leveling device is the core mechanical subsystem that ensures this precision, and its performance directly determines the yield, productivity, and reliability of semiconductor metrology. Existing leveling devices achieve chuck leveling by adjusting the height of different positions of the chuck using multiple adjustment components.
[0003] However, existing adjustment components rely on the same bolt to achieve both height adjustment and locking simultaneously. Small changes in locking torque can directly affect the height adjustment status of the adjustment component, resulting in poor adjustment accuracy. Furthermore, in order to ensure the stable maintenance of the height adjustment status of the adjustment component, there are situations where the bolt cannot reach the preset force and is not fully tightened, affecting the fastening effect and posing a potential risk to long-term stability. Summary of the Invention
[0004] This application discloses an adjustment assembly, a motion table, and a semiconductor device to solve the problem that existing adjustment assemblies rely on the same bolt to achieve both height adjustment and locking, which affects the adjustment accuracy and fastening effect.
[0005] In a first aspect, this application provides an adjustment assembly, including: an adjustment member and a fastener; the adjustment member is used to thread-connect the member to be adjusted to adjust the height of the member to be adjusted from the motion axis platform; the fastener includes a stop and a connecting body, the connecting body and the stop are connected, the connecting body is used to connect to the motion axis platform, and the stop is used to press the member to be adjusted and the adjustment member against the motion axis platform.
[0006] In this embodiment, the height of the component to be adjusted relative to the motion axis platform is adjusted by turning the adjusting component. After the height of the component to be adjusted is in place, the connecting body and the stop part rotate synchronously by turning the fastener, so that the stop part presses against the component to be adjusted and the adjusting component, and the connecting body is locked on the motion axis platform, thereby fixing the relative position of the component to be adjusted and the motion axis platform, that is, locking the height of the component to be adjusted relative to the motion axis platform. The adjusting component and the fastener can independently realize the height adjustment and position locking of the component to be adjusted, and the height adjustment and position locking of the component to be adjusted are physically decoupled in the structure. This ensures that the force of the fastener when locking the position of the component to be adjusted will not affect the component to be adjusted after the height adjustment has been completed, thus improving the accuracy of the height adjustment of the component to be adjusted. In addition, since the height adjustment and position locking of the component to be adjusted are physically decoupled in the structure, the fastener can be turned to a preset force to completely lock the fastener and the motion axis platform, thereby improving the fastening effect of the fastener. This balances the adjustment accuracy and the fastening effect, and improves the long-term stability of the overall adjustment component.
[0007] In one possible implementation, a first limiting groove is provided on one of the surfaces of the part to be adjusted facing the stop and the surfaces of the stop facing the part to be adjusted, and a first limiting protrusion adapted to the first limiting groove is provided on the other.
[0008] In this embodiment, during the process of the stop pressing against the part to be adjusted, the first limiting protrusion can be correspondingly embedded in the first limiting groove to form a limiting fit. Through the circumferential constraint of the first limiting groove on the first limiting protrusion, the relative displacement between the part to be adjusted and the stop is limited, reducing the possibility of misalignment or displacement between the part to be adjusted and the stop during assembly and locking, so that the fit between the part to be adjusted and the adjustment part is always stable and reliable, and improving the positioning accuracy of the part to be adjusted during the adjustment process.
[0009] In one possible implementation, the groove wall of the first limiting groove and the end face of the first limiting protrusion facing the first limiting groove are both spherical or cylindrical.
[0010] In this embodiment, the groove wall of the first limiting groove and the end face of the first limiting protrusion facing the first limiting groove are both cylindrical. During the interaction between the first limiting groove and the first limiting protrusion, the stop portion can produce a slight adaptive deflection relative to the part to be adjusted. During the height adjustment and locking process of the adjusting assembly, the posture deviation is automatically compensated, thereby improving the height adjustment accuracy and stability of the part to be adjusted. Furthermore, the groove wall of the first limiting groove and the end face of the first limiting protrusion facing the first limiting groove are both spherical. The spherical structure enables a stable surface contact between the first limiting groove and the first limiting protrusion, reducing local stress concentration caused by line contact or point contact between the first limiting groove and the first limiting protrusion. This prevents the part to be adjusted from twisting or deforming due to uneven force, further improving the adjustment accuracy and stability of the adjusting assembly when adjusting the part to be adjusted, thereby enhancing the adjustment reliability of the adjusting assembly.
[0011] In one possible implementation, the adjusting member is provided with a first through hole, the member to be adjusted is provided with a second through hole, the second through hole and the first through hole are connected, and the connecting body passes through the second through hole and the first through hole in sequence.
[0012] In this embodiment, the connection body, in cooperation with the first through hole and the second through hole, forms a radial limiting constraint on the adjusting member and the member to be adjusted, that is, it limits the offset of the adjusting member relative to the member to be adjusted in the radial direction, so that during the process of adjusting the height of the member to be adjusted by turning the adjusting member, the adjusting member always maintains an aligned cooperative posture with the member to be adjusted in the radial direction, thereby improving the accuracy of the height adjustment of the member to be adjusted.
[0013] In one possible implementation, a second limiting groove is provided on one of the surfaces of the motion axis platform facing the adjusting member and the end face of the adjusting member facing the motion axis platform, and a second limiting protrusion adapted to the second limiting groove is provided on the other of the surfaces of the motion axis platform facing the adjusting member and the end face of the adjusting member facing the motion axis platform.
[0014] In this embodiment, during the process of the adjusting member pressing against the motion shaft platform, the second limiting protrusion can be correspondingly embedded in the second limiting groove to form a limiting fit. Through the circumferential constraint effect of the second limiting groove on the second limiting protrusion, the relative displacement between the motion shaft platform and the adjusting member is limited, reducing the occurrence of skewness or displacement between the motion shaft platform and the adjusting member during assembly and locking, thereby ensuring that the fit between the motion shaft platform and the adjusting member is always stable and reliable.
[0015] In one possible implementation, the groove wall of the second limiting groove and the end face of the second limiting protrusion facing the second limiting groove are both spherical or cylindrical.
[0016] In this embodiment, during the interaction between the second limiting groove and the second limiting protrusion, the adjusting component is allowed to undergo a slight adaptive deflection relative to the motion axis platform. This automatically compensates for relative posture deviations during the height adjustment and locking process of the component to be adjusted, thereby improving the height adjustment accuracy and stability of the component. Furthermore, by setting the groove wall of the second limiting groove and the end face of the second limiting protrusion facing the second limiting groove to a spherical shape, the spherical structure ensures a stable surface contact between the second limiting groove and the second limiting protrusion, reducing localized stress concentration caused by line or point contact. This prevents the component to be adjusted from twisting or deforming due to uneven force, further improving the adjustment accuracy and stability of the adjusting component and enhancing its adjustment reliability.
[0017] In one possible implementation, a cylindrical groove is provided on one of the surfaces of the part to be adjusted facing the adjusting member and the end face of the adjusting member facing the part to be adjusted, and a cylindrical protrusion is provided on the other of the surfaces of the part to be adjusted facing the adjusting member and the end face of the adjusting member facing the part to be adjusted, which is threadedly connected to the cylindrical groove.
[0018] In this embodiment, the cylindrical protrusions are inserted into the cylindrical groove to form a threaded fit, increasing the mating area between the part to be adjusted and the adjusting part. This results in higher coaxiality and more uniform force distribution of the part to be adjusted during height adjustment, thereby reducing radial sway and other issues during adjustment. This makes the height adjustment of the part to be adjusted more stable, improves the connection stability and structural reliability between the part to be adjusted and the adjusting part, and ultimately improves the adjustment accuracy of the overall adjusting assembly.
[0019] In one possible implementation, a first elastic member is provided between the stop and the member to be adjusted, with one end of the first elastic member abutting the stop and the other end of the first elastic member abutting the member to be adjusted; and / or, a second elastic member is provided between the adjusting member and the motion axis platform, with one end of the second elastic member abutting the adjusting member and the other end of the second elastic member abutting the motion axis platform.
[0020] In this embodiment, the first elastic element and / or the second elastic element can continuously provide a stable and uniform elastic preload after the fastener is locked onto the part to be adjusted. This elastic preload can compensate in real time for the attenuation of the threaded pair preload caused by vibration and impact on the part to be adjusted. This allows the adjustment assembly to maintain a tight fit between the part to be adjusted and the stop part, as well as between the motion shaft platform and the adjacent parts of the adjustment component, even under harsh dynamic conditions such as high acceleration and high frequency vibration. This reduces problems such as loosening, increased gaps, and height adjustment failure, improves the relative positional accuracy between the part to be adjusted and the motion shaft platform, and further enhances the overall structural stability, vibration resistance, and long-term reliability of the adjustment assembly.
[0021] Secondly, this application provides a motion table, including a motion axis platform, a component to be adjusted, and at least two of the above-mentioned adjustment components. The at least two adjustment components are spaced apart from the component to be adjusted and the motion axis platform, and the motion axis platform is used to drive the adjustment components and the component to be adjusted to move.
[0022] In this embodiment, the height of the workpiece at different horizontal coordinate positions is adjusted by adjusting the components to achieve leveling of the workpiece. This ensures that the leveling of the workpiece remains consistent before and after locking, thereby improving the success rate of leveling. Furthermore, since the force exerted by the fasteners when locking the position of the workpiece does not affect the workpiece after its height adjustment, the accuracy of the leveling adjustment can be improved after the height adjustment of the corresponding horizontal position on the workpiece is completed by the various adjusting components. Moreover, since the height adjustment and position locking of the workpiece are physically decoupled in structure, the fasteners can be tightened to a preset force to completely lock the fasteners to the platform, thereby improving the fastening effect of the fasteners and ensuring that the workpiece remains stable after leveling, thus improving the long-term stability of the overall motion table.
[0023] Thirdly, this application provides a semiconductor device, including a chuck and the aforementioned motion stage, with the chuck mounted on the component to be adjusted. The height and level of the chuck are precisely adjusted and reliably locked using adjustment components, ensuring excellent flatness even under dynamic conditions of high acceleration and high-frequency vibration, thus meeting the stringent requirements of semiconductor devices for high-precision and high-stability motion mechanisms. Furthermore, chuck leveling does not require removing the wafer from the chuck, making operation convenient.
[0024] In one possible implementation, the component to be adjusted includes a focusing rotary mover and a focusing rotary stator, with at least two adjusting components spaced apart on the focusing rotary stator, and a chuck mounted on the focusing rotary mover. Multiple adjusting components work together to level the focusing rotary stator, thereby simultaneously leveling the focusing rotary mover and the chuck. This eliminates the need to increase the load on the focusing rotary shaft, improves the motion flexibility of the stage, and ultimately enhances the overall performance of the semiconductor device. Attached Figure Description
[0025] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0026] Figure 1 A three-dimensional structural diagram of the motion table provided in the embodiments of this application; Figure 2This is a cross-sectional schematic diagram of the adjustment component provided in the first embodiment of this application; Figure 3 This is a cross-sectional schematic diagram of the adjustment component provided in the second embodiment of this application; Figure 4 This is a cross-sectional schematic diagram of the adjustment component provided in the third embodiment of this application; Figure 5 This is a schematic diagram of the assembly between the adjusting member and the member to be adjusted, provided in another embodiment of this application.
[0027] Explanation of reference numerals in the attached figures: 10-Sports table; 101 - Adjustment component; 1011 - Adjusting component; 10111 - First through hole; 10112 - Second limiting protrusion; 10113 - Cylindrical protrusion; 1012 - Fasteners; 10121-Stop part; 10122-Connector; 10123-First limiting protrusion; 10124-Matching groove; 1013 - First elastic element; 1014 - Second elastic element; 102 - Items to be transferred; 1021-First limiting groove; 1022-Second through hole; 1023-Cylindrical groove; 1024-Fixing part; 10241-Third through hole; 1025-Fourth through hole; 103-Motion axis platform; 1031 - Second limiting groove; 1032 - Threaded hole; 104-Chuck. Detailed Implementation
[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0029] To enable those skilled in the art to better understand the present application, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0030] In the field of semiconductor equipment technology, the existing adjustment component 101 relies on the same bolt to achieve both height adjustment and locking. However, even a small change in the locking torque can directly affect the height adjustment state of the adjustment component 101, resulting in poor adjustment accuracy. Furthermore, in order to ensure the stable maintenance of the height adjustment state of the adjustment component 101, there is a situation where the bolt cannot reach the preset force and is not fully tightened, which affects the fastening effect and poses a potential risk to long-term stability.
[0031] Based on this, this application provides an adjustment component 101 to solve the problem that the existing adjustment component 101 relies on the same bolt to achieve both height adjustment and locking, which affects the adjustment accuracy and tightening effect.
[0032] In the description of this application, it should be understood that the terms "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the position or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations of this application.
[0033] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a” or “an” are intended to include expressions such as “one or more”, unless the context clearly indicates otherwise.
[0034] Please see Figure 1 , Figure 2 and Figure 3 ,in, Figure 1 A three-dimensional structural diagram of the motion table provided in the embodiments of this application; Figure 2 This is a cross-sectional schematic diagram of the adjustment component provided in the first embodiment of this application; Figure 3 This is a cross-sectional schematic diagram of the adjustment component provided in the second embodiment of this application; Figure 4 This is a cross-sectional schematic diagram of the adjustment component provided in the third embodiment of this application; Figure 5 This is a schematic diagram of the assembly between the adjusting member and the member to be adjusted, provided in another embodiment of this application.
[0035] Please see Figure 2In a first aspect, this application provides an adjustment assembly 101, including: an adjustment member 1011 and a fastener 1012; wherein, the adjustment member 1011 is used for threaded connection to the member to be adjusted 102, and the adjustment member 1011 and the member to be adjusted 102 are stacked along a first direction. Specifically, the adjustment member 1011 is located below the member to be adjusted 102. By rotating the adjustment member 1011, the member to be adjusted 102 reciprocates relative to the adjustment member 1011 along the first direction to adjust the height of the member to be adjusted 102 from the motion axis platform 103, wherein the first direction refers to the attached... Figure 2 The X direction refers to the height direction of the adjustment component 101. The fastener 1012 includes a stop 10121 and a connector 10122, which are integrally formed. Optionally, the fastener 1012 is a bolt. When the part to be adjusted 102 is laid flat, the lower end of the connector 10122 is used to connect to the motion axis platform 103. Specifically, a threaded hole 1032 is provided on the motion axis platform 103, and the lower end of the connector 10122 is provided with an external thread. The external thread and the threaded hole 1032 are threadedly connected. Alternatively, the connector 10122 can also be snapped into the motion axis platform 103. The stop part 10121 is used to press the workpiece 102 to be adjusted and the adjusting member 1011 against the motion axis platform 103. After the height of the workpiece 102 to be adjusted is in place, by tightening the fastener 1012, the connecting body 10122 and the stop part 10121 rotate synchronously, so that the stop part 10121 presses against the adjusting member 1011, and the connecting body 10122 is locked on the motion axis platform 103, thereby fixing the relative position of the workpiece 102 to be adjusted and the motion axis platform 103, that is, locking the position of the workpiece 102 relative to the motion axis platform 103 in the first direction. The adjusting member 1011 and the fastener 1012 can independently realize the height adjustment and position locking of the workpiece 102, and the height adjustment and position locking of the workpiece 102 are physically decoupled in the structure, so that the force of the fastener 1012 when locking the position of the workpiece 102 will not affect the workpiece 102 that has completed the height adjustment, thus improving the accuracy of the height adjustment of the workpiece 102. In addition, since the height adjustment and position locking of the component to be adjusted 102 are physically decoupled in structure, the fastener 1012 can be screwed to a preset force to completely lock the fastener 1012 and the motion axis platform 103, thereby improving the fastening effect of the fastener 1012. This allows for a balance between adjustment accuracy and fastening effect, and enhances the long-term stability of the overall adjustment component 101.
[0036] In one possible implementation, a first limiting groove 1021 is provided on the side surface of the component to be adjusted 102 facing the stop portion 10121, and a first limiting protrusion 10123 adapted to the shape and size of the first limiting groove 1021 is provided on the side surface of the stop portion 10121 facing the component to be adjusted 102. During the process of the stop portion 10121 pressing against the component to be adjusted 102, the first limiting protrusion 10123 can be correspondingly embedded in the first limiting groove 1021 to form a limiting fit. Through the circumferential constraint effect of the first limiting groove 1021 on the first limiting protrusion 10123, the relative displacement between the component to be adjusted 102 and the stop portion 10121 is limited, reducing the occurrence of skewing or displacement of the component to be adjusted 102 and the stop portion 10121 during assembly and locking, so that the cooperation posture between the component to be adjusted 102 and the adjusting component 1011 is always stable and reliable, and the positioning accuracy of the component to be adjusted 102 during the adjustment process is improved.
[0037] In other embodiments, a first limiting protrusion 10123 is provided on the side surface of the component to be adjusted 102 facing the stop portion 10121, and a first limiting groove 1021 is provided on the side surface of the stop portion 10121 facing the component to be adjusted 102, which is adapted to the shape and size of the first limiting protrusion 10123. Similarly, the circumferential constraint effect of the first limiting groove 1021 on the first limiting protrusion 10123 limits the relative displacement between the component to be adjusted 102 and the stop portion 10121, reducing the occurrence of skewing or shifting between the component to be adjusted 102 and the stop portion 10121 during assembly and locking, thereby ensuring that the cooperation posture between the component to be adjusted 102 and the adjusting component 1011 is always stable and reliable, and improving the positioning accuracy of the component to be adjusted 102 during the adjustment process.
[0038] In one possible implementation, the groove wall of the first limiting groove 1021 and the end face of the first limiting protrusion 10123 facing the first limiting groove 1021 are both cylindrical. During the interaction between the first limiting groove 1021 and the first limiting protrusion 10123, the stop part 10121 can be allowed to produce a slight adaptive deflection relative to the workpiece 102 to be adjusted. During the height adjustment and locking process of the adjusting component 101, the posture deviation is automatically compensated, thereby improving the height adjustment accuracy and adjustment stability of the workpiece 102 to be adjusted.
[0039] In other embodiments, the groove wall of the first limiting groove 1021 and the end face of the first limiting protrusion 10123 facing the first limiting groove 1021 are both set to a spherical shape. The spherical structure can ensure that the first limiting groove 1021 and the first limiting protrusion 10123 always form a stable surface contact, reduce the local stress concentration caused by the first limiting groove 1021 and the first limiting protrusion 10123 due to line contact or point contact, prevent the part to be adjusted 102 from twisting or deforming due to uneven force, further improve the adjustment accuracy and adjustment stability of the adjustment component 101 when adjusting the part to be adjusted 102, and enhance the adjustment reliability of the adjustment component 101.
[0040] In one possible implementation, the adjusting member 1011 is provided with a first through hole 10111, and the member to be adjusted 102 is provided with a second through hole 1022. Both the first through hole 10111 and the second through hole 1022 extend along a first direction. When the adjusting member 1011 and the member to be adjusted 102 are assembled, the second through hole 1022 is aligned with the first through hole 10111 and they are interconnected. The connecting body 10122 is sequentially inserted through the second through hole 1022 and the first through hole 10111. The connecting body 10122 of the fastener 1012 is sequentially inserted through the second through hole 1022 of the member to be adjusted 102 and the first through hole 10111 of the adjusting member 1011 along its axial direction. At the same time, the end of the connecting body 10122 away from the stop part 10121 is threadedly connected to the motion shaft platform 103, so that the fastener 1012 and the motion shaft platform 103 are stably assembled. Simultaneously, through the cooperation of the connector 10122 with the first through hole 10111 and the second through hole 1022, a radial limiting constraint is formed on the adjusting member 1011 and the member to be adjusted 102, that is, the offset of the adjusting member 1011 relative to the member to be adjusted 102 in the radial direction is limited. This ensures that during the process of adjusting the height of the member to be adjusted 102 by turning the adjusting member 1011, the adjusting member 1011 always maintains an aligned cooperative posture with the member to be adjusted 102 in the radial direction, thereby improving the accuracy of the height adjustment of the member to be adjusted 102 and thus improving the positional stability of the member to be adjusted 102 after adjustment.
[0041] It should be noted that both the first through hole 10111 and the second through hole 1022 have pre-reserved gaps between them and the connecting body 10122 of the fastener 1012. During the height adjustment of the part 102 to be adjusted, these gaps provide room for the orientation deflection of the part 102 relative to the fastener 1012, allowing the part 102 to smoothly complete small-angle adaptive adjustments around the connecting body 10122. This reduces rigid interference between the part 102 and the fastener 1012, making the height adjustment process smoother. Simultaneously, the reserved gaps do not affect the radial limiting effect of the connecting body 10122 on the adjusting part 1011 and the part 102 to be adjusted. While maintaining the freedom of horizontal adjustment, this further improves the accuracy of the height adjustment and the structural stability of the part 102 to be adjusted. The key to this design is its adaptation to the horizontal adjustment of the part 102 in the motion table 10.
[0042] In one possible implementation, please refer to Figure 3 A fourth through hole 1025 is provided on the adjusting component 1011. The fourth through hole 1025 is not coaxial with the adjusting component 1011 and extends along the first direction. A threaded hole 1032 is provided on the motion axis platform 103. After the adjusting component 1011 and the component to be adjusted 102 are assembled, the fourth through hole 1025 and the threaded hole 1032 are coaxially aligned. The fastener 1012 passes through the fourth through hole 1025 and the threaded hole 1032 and is threadedly connected. By tightening the fastener 1012 to a preset force, the fastener 1012 and the motion axis platform 103 are completely locked together, thereby taking into account both adjustment accuracy and fastening effect, and improving the long-term stability of the overall adjusting component 101.
[0043] In one possible implementation, please refer to Figure 4 A fixing part 1024 is provided on the adjusting component 1011. The fixing part 1024 is located between the top and bottom of the adjusting component 1011 along the first direction. A third through hole 10241 is provided on the fixing part 1024. The third through hole 10241 is not coaxial with the adjusting component 1011 and extends along the first direction. A threaded hole 1032 is provided on the motion axis platform 103. After the adjusting component 1011 and the component to be adjusted 102 are assembled, the third through hole 10241 and the threaded hole 1032 are coaxially aligned. The fastener 1012 passes through the third through hole 10241 and the threaded hole 1032 and is threadedly connected. By tightening the fastener 1012 to a preset force, the fastener 1012 and the motion axis platform 103 are completely locked together, thereby taking into account both adjustment accuracy and fastening effect, and improving the long-term stability of the overall adjusting component 101.
[0044] In one possible implementation, a second limiting groove 1031 is provided on the side surface of the motion axis platform 103 facing the adjusting member 1011, and a second limiting protrusion 10112 is provided on the side surface of the adjusting member 1011 facing the motion axis platform 103, which is adapted to the shape and size of the second limiting groove 1031. During the process of the adjusting member 1011 pressing against the motion axis platform 103, the second limiting protrusion 10112 can be correspondingly embedded in the second limiting groove 1031 to form a limiting fit. Through the circumferential constraint effect of the second limiting groove 1031 on the second limiting protrusion 10112, the relative displacement between the motion axis platform 103 and the adjusting member 1011 is limited, reducing the occurrence of skewing or displacement of the motion axis platform 103 and the adjusting member 1011 during assembly and locking, so that the cooperation posture between the motion axis platform 103 and the adjusting member 1011 is always stable and reliable, and the positioning accuracy of the member to be adjusted 102 is improved during the adjustment process.
[0045] In other embodiments, a second limiting protrusion 10112 is provided on the side surface of the motion axis platform 103 facing the adjusting member 1011, and a second limiting groove 1031 is provided on the side surface of the adjusting member 1011 facing the motion axis platform 103, which is adapted to the shape and size of the second limiting protrusion 10112. Similarly, the circumferential constraint effect of the second limiting groove 1031 on the second limiting protrusion 10112 limits the relative displacement between the motion axis platform 103 and the adjusting member 1011, reducing the occurrence of skewing or displacement of the motion axis platform 103 and the adjusting member 1011 during assembly and locking, thereby ensuring that the cooperation posture between the motion axis platform 103 and the adjusting member 1011 is always stable and reliable, and improving the positioning accuracy of the member 102 to be adjusted during the adjustment process.
[0046] In one possible implementation, the groove wall of the second limiting groove 1031 and the end face of the second limiting protrusion 10112 facing the second limiting groove 1031 are both spherical or cylindrical. In another possible implementation, the groove wall of the second limiting groove 1031 and the end face of the second limiting protrusion 10112 facing the second limiting groove 1031 are both cylindrical. During the interaction between the second limiting groove 1031 and the second limiting protrusion 10112, the adjusting member 1011 is allowed to produce a slight adaptive deflection relative to the motion axis platform 103. During the height adjustment and locking process of the adjusting component 101 on the member to be adjusted 102, the relative posture deviation is automatically compensated, thereby improving the height adjustment accuracy and adjustment stability of the member to be adjusted 102.
[0047] In other embodiments, the groove wall of the second limiting groove 1031 and the end face of the second limiting protrusion 10112 facing the second limiting groove 1031 are both set as spherical. The spherical structure can ensure that the second limiting groove 1031 and the second limiting protrusion 10112 always form a stable surface contact, reduce the local stress concentration caused by the second limiting groove 1031 and the second limiting protrusion 10112 due to line contact or point contact, prevent the part to be adjusted 102 from twisting or deforming due to uneven force, and further improve the adjustment accuracy and adjustment stability of the adjustment component 101 when adjusting the part to be adjusted 102, so as to enhance the adjustment reliability of the adjustment component 101.
[0048] Please see Figure 2 In one possible implementation, a cylindrical groove 1023 is provided on the surface of the component to be adjusted 102 facing the adjusting component 1011, and a cylindrical protrusion 10113 is provided on the end face of the adjusting component 1011 facing the component to be adjusted 102. Please refer to [link to relevant documentation]. Figure 5 In another embodiment, a cylindrical protrusion 10113 is provided on the surface of the adjustable member 102 facing the adjusting member 1011, and a cylindrical groove 1023 is provided on the end face of the adjusting member 1011 facing the adjustable member 102. The groove wall of the cylindrical groove 1023 is machined with internal threads, and the outer wall of the cylindrical protrusion 10113 is machined with a matching external thread, achieving a stable threaded connection between the adjustable member 102 and the adjusting member 1011. By having the cylindrical protrusion 10113 correspondingly pass through the cylindrical groove 1023 and form a threaded engagement, the mating area between the adjustable member 102 and the adjusting member 1011 is increased, resulting in higher coaxiality and more uniform force distribution of the adjustable member 102 during height adjustment. This reduces radial sway of the adjustable member 102 during adjustment, making the height adjustment of the adjustable member 102 more stable, improving the connection stability and structural reliability between the adjustable member 102 and the adjusting member 1011, thereby improving the adjustment accuracy of the overall adjusting assembly 101.
[0049] In one possible implementation, a first elastic member 1013 is provided between the stop portion 10121 and the member to be adjusted 102, one end of the first elastic member 1013 abuts against the stop portion 10121, and the other end of the first elastic member 1013 abuts against the member to be adjusted 102; and / or, a second elastic member 1014 is provided between the adjusting member 1011 and the motion axis platform 103, one end of the second elastic member 1014 abuts against the adjusting member 1011, and the other end of the second elastic member 1014 abuts against the motion axis platform 103.
[0050] In one possible implementation, a first elastic member 1013 is provided between the stop portion 10121 and the member to be adjusted 102. Optionally, the first elastic member 1013 is a spring, or it can be an elastic sheet made of metal with a preset elastic deformation capability. The upper end of the first elastic member 1013 abuts against the lower surface of the stop portion 10121, and the lower end of the first elastic member 1013 abuts against the upper surface of the member to be adjusted 102. The first elastic member 1013 can continuously provide a stable and uniform elastic preload after the fastener 1012 is locked to the member to be adjusted 102 and the adjusting member 1011. The force can compensate in real time for the attenuation of the threaded pair preload of the adjustable part 102 and the adjusting part 1011 caused by vibration and impact. This allows the adjusting assembly 101 to maintain a tight fit between adjacent parts of the adjustable part 102 and the stop part 10121, and between the adjusting part 1011 and the motion axis platform 103, even under harsh dynamic conditions such as high acceleration and high frequency vibration. This reduces problems such as loosening, increased gaps, and height adjustment failure, improves the relative positional accuracy between the adjustable part 102 and the motion axis platform 103, and further enhances the overall structural stability, vibration resistance, and long-term reliability of the adjusting assembly 101.
[0051] In other embodiments, a second elastic element 1014 is provided between the adjusting member 1011 and the motion axis platform 103, either simultaneously or alternatively. Optionally, the second elastic element 1014 is a spring, or it can be an elastic sheet made of metal with a preset strength elastic deformation capability. The upper end of the second elastic element 1014 abuts against the lower surface of the adjusting member 1011, and the lower end of the second elastic element 1014 abuts against the upper surface of the motion axis platform 103. Similarly, after the fastener 1012 locks the member to be adjusted 102 and the adjusting member 1011, the second elastic element 1014 continuously provides a stable and uniform elastic preload to compensate for the attenuation of the threaded pair preload of the member to be adjusted 102 and the adjusting member 1011 due to vibration and impact in real time.
[0052] In one possible implementation, both the radial cross-section of the fastener 1012 and the radial cross-section of the adjusting component 1011 can adopt polygonal structures such as quadrilaterals, hexagons, and octagons, and are not limited to a single cross-sectional form. Such polygonal cross-sectional structures provide a reliable circumferential force-bearing surface during tightening and locking operations, facilitating tool clamping and application of force without slippage. Simultaneously, a mating groove 10124 adapted to a wrench is provided on the upper surface of the stop portion 10121. The mating groove 10124 and the wrench form a stable mating connection, facilitating the operator to tighten the fastener 1012 using the wrench, thus improving the ease of operation of the adjusting component 101 during debugging and maintenance.
[0053] Secondly, please refer to Figure 1This application provides a motion stage 10, including a motion axis platform 103, an adjustment component 102, and at least two adjustment components 101 as disclosed in the above embodiments. The adjustment component can be a chuck 104, a focusing rotary axis, or an adapter, etc. In this application, the motion axis platform 103 serves as a base, which can drive the chuck 104 to move along the X and Y axes in a horizontal coordinate system to adjust the position of the chuck 104 and the wafer on the chuck 104. The focusing rotary axis is connected to the chuck 104 to drive the chuck 104 to rise, fall, or rotate, thereby completing the wafer quantity detection. The adapter is specifically a connecting component between the focusing rotary axis and the motion axis platform 103.
[0054] In some embodiments, at least two adjustment components 101 are arranged at intervals between the member to be adjusted 102 and the motion axis platform 103. Specifically, when the motion axis platform 103 is arranged horizontally, at least two adjustment components 101 are spaced apart at the horizontal coordinate positions of the member to be adjusted 102. The motion axis platform 103 is used to drive the adjustment components 101 and the member to be adjusted 102 to move synchronously. When two adjustment components 101 are spaced apart between the member to be adjusted 102 and the motion axis platform 103, an additional support needs to be set between the member to be adjusted 102 and the motion axis platform 103. The support is spaced apart from the two adjustment components 101. The height of the corresponding horizontal position on the member to be adjusted 102 is independently adjusted by the two adjustment components 101, and a stable three-point support structure is formed with the support to achieve smooth adjustment of the posture and level of the member to be adjusted 102. When three or more adjustment components 101 are spaced apart between the part to be adjusted 102 and the motion axis platform 103, there is no need to add separate support components. The three or more adjustment components 101 can directly form multi-point support below the part to be adjusted 102. By adjusting the height of the part to be adjusted 102 at different horizontal coordinate positions through the adjustment components 101, the levelness of the part to be adjusted 102 can be adjusted, so that the levelness of the part to be adjusted 102 remains consistent before and after locking, thereby improving the success rate of leveling the part to be adjusted 102. Furthermore, since the force exerted by the fastener 1012 when locking the position of the part to be adjusted 102 will not affect the part to be adjusted 102 after the height adjustment has been completed, the accuracy of the levelness adjustment of the part to be adjusted 102 can be improved after the height adjustment of the corresponding horizontal position on the part to be adjusted 102 is completed through each adjustment component 101. Furthermore, since the height adjustment and position locking of the component to be adjusted 102 are physically decoupled in the structure, the fastener 1012 can be tightened to a preset force to completely lock the fastener 1012 and the platform, thereby improving the fastening effect of the fastener 1012. This allows the component to be adjusted 102 to remain stable after the level adjustment is completed, thus taking into account both adjustment accuracy and fastening effect, and improving the long-term stability of the overall motion table 10.
[0055] This application uses the workpiece 102 as an example to illustrate the focusing rotation axis. A chuck 104 is located at the upper end of the focusing rotation axis and is mainly used to support the wafer. Two adjustment components 101 and one support are evenly distributed at equal angles around the center of the workpiece 102, or three or more adjustment components 101 are evenly distributed at equal angles around the center of the workpiece 102. The adjustment components 101 are located below the chuck 104, making full use of the axial space between the chuck 104 and the motion axis platform 103, reducing the radial dimension of the overall structure, and improving the space utilization and structural compactness of the motion stage 10. Alternatively, the adjustment components 101 can be arranged on the circumferential outer side of the chuck 104, exposing the operating parts of the adjustment components 101 to the periphery of the chuck 104, providing ample adjustment and operating space for operators. This facilitates the screwing and locking of each adjustment component 101 during assembly, debugging, and subsequent maintenance, allowing for leveling adjustments without disassembling the chuck 104. Two layout options can be flexibly selected based on actual usage needs to enhance the practicality and versatility of the overall motion table 10.
[0056] Thirdly, this application provides a semiconductor device, including a chuck 104 and a motion stage 10 as disclosed in the above embodiments. The semiconductor device can be a semiconductor metrology device, semiconductor process equipment, etc. This application uses a semiconductor metrology device as an example. The component to be adjusted 102 can be a focusing rotary shaft or a transition component, etc. The chuck 104 is mounted on the upper end of the component to be adjusted 102. The motion stage 10 drives the chuck 104 to achieve high-precision displacement. The adjustment component 101 is used to precisely adjust and reliably lock the height and level of the chuck 104, ensuring that the chuck 104 maintains excellent flatness even under dynamic conditions of high acceleration and high-frequency vibration. This meets the requirements for high-precision positioning and stable support of the workpiece during semiconductor metrology testing, improving the stability of the testing process and the accuracy of the test results. This adapts to the stringent requirements of high-precision and high-stability motion mechanisms in the semiconductor manufacturing and testing fields. Furthermore, when leveling the chuck, it is not necessary to remove the wafer from the chuck, making operation convenient.
[0057] In one possible implementation, such as Figure 1 As shown, the component to be adjusted 102 is a focusing rotary shaft, which includes a focusing rotary mover and a focusing rotary stator. At least two adjusting components 101 are spaced apart on the focusing rotary stator, and a chuck is mounted on the focusing rotary mover. The multiple adjusting components 101 cooperate to level the focusing rotary stator, thereby simultaneously leveling the focusing rotary mover and the chuck. This eliminates the need to increase the load on the focusing rotary shaft, improves the movement flexibility of the motion stage 10, and thus enhances the overall performance of the semiconductor device.
[0058] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.
[0059] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.
[0060] The above-described preferred embodiments have further illustrated the purpose, technical solutions, and advantages of this application. It should be understood that the above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. An adjustment component, characterized in that, include: Adjusting component (1011) and fastener (1012); The adjusting member (1011) is used to thread the member to be adjusted (102) to adjust the height of the member to be adjusted (102) from the motion axis platform (103); The fastener (1012) includes a stop (10121) and a connector (10122), the connector (10122) and the stop (10121) are connected, the connector (10122) is used to connect the motion axis platform (103), and the stop (10121) is used to press the member to be adjusted (102) and the adjusting member (1011) against the motion axis platform (103).
2. The adjustment component according to claim 1, characterized in that, A first limiting groove (1021) is provided on one of the surfaces of the component to be adjusted (102) facing the stop (10121) and the surfaces of the stop (10121) facing the component to be adjusted (102), and a first limiting protrusion (10123) adapted to the first limiting groove (1021) is provided on the other.
3. The adjustment component according to claim 2, characterized in that, The groove wall of the first limiting groove (1021) and the surface of the first limiting protrusion (10123) facing the first limiting groove (1021) are both spherical or cylindrical.
4. The adjustment component according to any one of claims 1-3, characterized in that, The adjusting member (1011) is provided with a first through hole (10111), and the member to be adjusted (102) is provided with a second through hole (1022). The second through hole (1022) and the first through hole (10111) are connected, and the connecting body (10122) is sequentially inserted through the second through hole (1022) and the first through hole (10111).
5. The adjustment component according to any one of claims 1-4, characterized in that, A second limiting groove (1031) is provided on one of the surfaces of the motion axis platform (103) facing the adjusting member (1011) and the surfaces of the adjusting member (1011) facing the motion axis platform (103), and a second limiting protrusion (10112) adapted to the second limiting groove (1031) is provided on the other of the surfaces of the motion axis platform (103) facing the adjusting member (1011) and the surfaces of the adjusting member (1011) facing the motion axis platform (103).
6. The adjustment component according to claim 5, characterized in that, The groove wall of the second limiting groove (1031) and the surface of the second limiting protrusion (10112) facing the second limiting groove (1031) are both spherical or cylindrical.
7. The adjustment assembly according to any one of claims 1-6, characterized in that, A cylindrical groove (1023) is provided on one of the surfaces of the component to be adjusted (102) facing the adjusting component (1011) and the adjusting component (1011) facing the component to be adjusted (102), and a cylindrical protrusion (10113) threadedly connected to the cylindrical groove (1023) is provided on the other of the surfaces of the component to be adjusted (102) facing the adjusting component (1011) and the adjusting component (1011) facing the component to be adjusted (102).
8. The adjustment assembly according to any one of claims 1-7, characterized in that, A first elastic member (1013) is provided between the stop part (10121) and the member to be adjusted (102), one end of the first elastic member (1013) abuts against the stop part (10121), and the other end of the first elastic member (1013) abuts against the member to be adjusted (102); and / or, a second elastic member (1014) is provided between the adjusting member (1011) and the motion axis platform (103), one end of the second elastic member (1014) abuts against the adjusting member (1011), and the other end of the second elastic member (1014) abuts against the motion axis platform (103).
9. A motion table (10), characterized in that, It includes a motion axis platform (103), a component to be adjusted (102), and at least two adjustment components according to any one of claims 1-8, wherein the at least two adjustment components (101) are spaced apart from the component to be adjusted (102) and the motion axis platform (103), and the motion axis platform (103) is used to drive the adjustment components (101) and the component to be adjusted (102) to move.
10. A semiconductor device, characterized in that, It includes a chuck (104) and a motion table (10) as described in claim 9, wherein the chuck (104) is mounted on the component to be adjusted (102).
11. The semiconductor device according to claim 10, characterized in that, The component to be adjusted (102) includes a focus-tracking rotary mover and a focus-tracking rotary stator, the at least two adjustment components (101) are spaced apart on the focus-tracking rotary stator, and the chuck (104) is mounted on the focus-tracking rotary mover.