A raw material sampling device for photoresist production

Abstract

The application relates to the field of photoresist production devices, and discloses a raw material sampling device for photoresist production, which comprises a base, a storage box for storing raw materials, a sampling mechanism for sampling, and a plurality of material pipes for receiving raw materials; the base is provided with a supporting assembly for supporting the plurality of material pipes; the plurality of material pipes are arranged in a ring array based on the supporting assembly; and the base is provided with a control assembly for driving the sampling mechanism. Through cooperation between the control assembly, the supporting assembly, the storage box and the like, automatic movement switching of the plurality of material pipes can be realized during the resetting process of the sampling mechanism, the next material pipe can be automatically adjusted to correspond to the sampling mechanism, excessive intervention of workers is not needed, the overall sampling processing efficiency can be effectively improved, and the risk of pollution during the production process can be reduced.

Description

Technical Field

[0001] This invention relates to the field of photoresist production equipment technology, and in particular to a raw material sampling device for photoresist production. Background Technology

[0002] The production of photoresist requires a variety of raw materials. These raw materials need to be sampled and tested for their physical and chemical properties to ensure that they meet the prescribed standards. Because the raw materials used in the production are characterized by high purity, easy oxidation, easy volatility, and some being viscous fluids, the core of the sampling device lies in the absence of impurities, sealing to prevent volatilization, and accurate measurement.

[0003] For example, Chinese patent CN119510049B discloses a sampling device for raw materials in photoresist production, relating to the field of photoresist production. It includes a base plate and a storage box fixedly installed on one side of its top. During sampling, a drive motor drives a first crank via a belt drive, causing a first push rod to rotate, which in turn drives a first drive block to slide. This mechanism ensures the swing of the swing rod, thereby triggering a counterforce from the second drive block, causing the second crank to move as well. The rotating rod transmits force to the sliding block, causing the movable rod to swing. This action directly controls the movement of the second fixed rod and the sampling component, ensuring that the sampling tube can accurately cut into the storage box, achieving stable and consistent sampling. Each sampling is performed under the same standards and conditions, thus ensuring the consistency of the sampling amount and improving the reliability of the data.

[0004] The sampling tube in this application is fixed in position relative to the sampling component. This means that when sampling multiple sampling tubes continuously, it is necessary to repeatedly replace the sampling tube with a new one and remove the previous one. This greatly increases the number of operation steps and reduces the overall sampling efficiency, thus limiting its application.

[0005] Therefore, it is necessary to provide a raw material sampling device for photoresist production to solve the above-mentioned technical problems. Summary of the Invention

[0006] The purpose of this invention is to provide a raw material sampling device for photoresist production, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, a raw material sampling device for photoresist production is designed that can automatically switch between multiple feed tubes, thereby enabling continuous sampling from multiple feed tubes.

[0008] Based on the above ideas, the present invention provides the following technical solution: a raw material sampling device for photoresist production, comprising a base, a storage box for storing raw materials, a sampling mechanism for sampling, and a plurality of material tubes for receiving raw materials. The base is provided with a support component for supporting the plurality of material tubes, and the plurality of material tubes are arranged in a circular array based on the support component. The base is provided with a control component for driving the sampling mechanism; when the control component is activated to drive the sampling mechanism to move toward the storage box, the plurality of material tubes can be driven to move circumferentially along the base through the support component.

[0009] As a further embodiment of the present invention: the support assembly includes a bracket rotatably mounted on the base and a cover that rotates synchronously with the bracket, a plurality of material tubes are arranged in an array on the bracket, a top shaft is fixedly installed on the inner wall of the cover, and a ratchet corresponding to the position of the control assembly is fixedly installed at the bottom of the top shaft.

[0010] As a further aspect of the present invention: the top of the bracket is provided with a groove, and the bottom of the cover is fixedly installed with a plug that matches the groove, and the bracket and the cover rotate synchronously through the groove and the plug.

[0011] As a further embodiment of the present invention: the top shaft is located at the center of the inner top wall of the cover, and the storage box is located at the inner center of the base.

[0012] As a further embodiment of the present invention: the control component includes a column fixedly mounted on a base, a horizontal cylinder fixedly mounted on the top of the column, a vertical cylinder and a partition fixedly mounted on the output shaft of the horizontal cylinder, the output shaft of the vertical cylinder being fixedly connected to a sampling mechanism, and a pawl corresponding to the position of the ratchet being rotatably mounted on the surface of the partition via a rotating shaft and a torsion spring.

[0013] As a further aspect of the present invention: the pawl moves horizontally synchronously with the partition, and when the partition drives the pawl to move towards the storage box, the top shaft is rotated by the ratchet.

[0014] As a further aspect of the present invention: a plurality of through holes are provided through the outer surface of the top shaft, and the plurality of through holes are arranged in a ring array along the circumferential direction of the top shaft, and the number and position of the through holes correspond one-to-one with the material tube; a limiting component corresponding to the position of one of the through holes is fixedly installed on the partition plate, and the limiting component corresponds to the position of the sampling mechanism.

[0015] As a further aspect of the present invention: the limiting component includes a cantilever fixedly mounted on the partition plate, a crossbar fixedly mounted on the surface of the cantilever, a guide slope fixedly mounted on the end of the crossbar away from the cantilever, and a short head fixedly mounted on the end of the guide slope away from the crossbar.

[0016] As a further aspect of the present invention: the crossbar, guide slope, and short head are arranged concentrically, and the two ends of the guide slope are equal in size to the adjacent ends of the crossbar and the short head, respectively.

[0017] As a further aspect of the present invention: the diameter of the short head is smaller than the diameter of the through hole, and the diameter of the crossbar is equal to the diameter of the through hole.

[0018] Compared with the prior art, the beneficial effects of the present invention are: by coordinating the control components, support components and storage boxes, the sampling mechanism can be driven to move different distances in the vertical and horizontal directions. First, the different vertical movement distances can make the sampling mechanism correspond effectively with the different amounts of raw materials stored in the storage box. Even if the raw materials in the storage box gradually decrease during the sampling process, the sampling mechanism can increase the descent distance to complete the sampling.

[0019] Secondly, the different vertical movement distances can be adapted to material tubes with different specifications and parameters, and the different horizontal movement distances can also be adapted to material tubes with different specifications and parameters. This makes the process of sampling raw materials from the storage box and dispensing samples into the material tube efficient. The limitations on parameters such as size are reduced, which can effectively improve the overall applicability of the sampling device.

[0020] Meanwhile, during the sampling mechanism reset process, several material tubes can be automatically moved and switched, allowing the next material tube to automatically adjust to correspond with the sampling mechanism without much intervention from staff. This can effectively improve the overall sampling processing efficiency and reduce the risk of contamination during the production process.

[0021] Furthermore, the support components, together with the base, can form a relatively sealed space throughout the sampling process. At this time, the sampling and distribution of raw materials can be carried out in an effectively closed environment, which can further reduce the risk of contamination throughout the process and ensure the reliability of the quality of the sampled raw materials.

[0022] Finally, several material tubes are integrated on the support assembly, allowing the material tubes to be placed on the base at once. After sampling, all material tubes can be removed at once, thereby reducing the number of transfers and improving processing efficiency. At the same time, the base and the support assembly are nested together, making the entire sampling device structure more integrated, occupying less space, and making it more convenient for operators to operate, thus improving its overall practicality. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0024] Figure 1 This is a perspective view of the overall structure of the present invention;

[0025] Figure 2 This is a schematic diagram of the cover and support structure of the present invention;

[0026] Figure 3 This is a schematic diagram of the top shaft and cover structure of the present invention;

[0027] Figure 4 This is a schematic diagram of the horizontal cylinder and vertical cylinder structure of the present invention;

[0028] Figure 5 for Figure 4 Enlarged view of the structure at point A in the middle;

[0029] Figure 6 This is a schematic diagram of the top shaft and limiting assembly structure of the present invention;

[0030] Figure 7 This is a schematic diagram of the crossbar and cantilever structure of the present invention;

[0031] Figure 8 for Figure 7 Enlarged view of the structure at point B in the middle;

[0032] Figure 9 This is a schematic diagram of the top shaft and the inverted frustum structure of the present invention;

[0033] Figure 10 This is a schematic diagram of the connecting rod and cover plate structure of the present invention.

[0034] In the diagram: 1. Base; 2. Material tube; 3. Storage box; 4. Sampling mechanism; 5. Control component; 6. Support component; 7. Limiting component; 8. Sliding component; 501. Column; 502. Horizontal cylinder; 503. Vertical cylinder; 504. Partition; 505. Pawl; 601. Bracket; 602. Cover; 603. Groove; 604. Plug; 605. Top shaft; 606. Ratchet; 607. Through hole; 608. Inverted truncated cone; 701. Cantilever; 702. Crossbar; 703. Guide slope; 704. Short head; 801. Connecting rod; 802. Cover plate; 803. Slope; 804. Spring. Detailed Implementation

[0035] Example 1:

[0036] Please see Figures 1 to 5 This invention provides a raw material sampling device for photoresist production, mainly used to achieve continuous sampling from multiple material tubes 2 in a closed environment, effectively improving the processing efficiency of the entire sampling process. The device includes a base 1, a storage box 3 for storing raw materials, a sampling mechanism 4 for sampling, and several material tubes 2 for receiving raw materials. The storage box 3 is placed at the center of the base 1 and can be connected to an external raw material supply mechanism to ensure that the storage box 3 contains raw materials that can be sampled. The sampling mechanism 4 can extract the raw materials from the storage box 3 and transfer them to the material tubes 2. The storage box 3, sampling mechanism 4, material tubes 2, and raw material supply mechanism are all existing mature technologies and will not be described in detail here.

[0037] Furthermore, such as Figure 1As shown, a support assembly 6 is provided on the base 1 to support several material tubes 2. The material tubes 2 are arranged in a circular array along the base 1 based on the support assembly 6. A control assembly 5 is also provided on the base 1 to drive the sampling mechanism 4 to move. When the control assembly 5 is activated, it can drive the sampling mechanism 4 to move in the horizontal and vertical directions, thereby enabling the sampling mechanism 4 to complete the following steps: descending to sample into the storage box 3, vertically rising after sampling, moving horizontally above the material tubes 2, descending to dispense samples into the material tubes 2, vertically rising after dispensing, and horizontally returning to the storage box 3.

[0038] Meanwhile, when the control component 5 drives the sampling mechanism 4 to horizontally reset above the storage box 3, the support component 6 can drive several material tubes 2 to move circumferentially along the base 1, thereby switching the material tube 2 that corresponds to the sampling mechanism 4 horizontally. After the sampling mechanism 4 moves horizontally, it can then complete the sampling process by corresponding to the next material tube 2, thus completing the overall sampling process of several material tubes 2.

[0039] Reference Figures 1 to 3 In this embodiment, preferably, the support assembly 6 includes a bracket 601 rotatably mounted on the base 1 and a cover 602 that rotates synchronously with the bracket 601. A plurality of material tubes 2 are arrayed on the bracket 601 and can rotate synchronously with the bracket 601. A top shaft 605 is fixedly installed at the center of the inner top wall of the cover 602, and a ratchet 606 corresponding to the position of the control assembly 5 is fixedly installed at the bottom of the top shaft 605. When the control assembly 5 drives the sampling mechanism 4 to horizontally reset above the storage box 3, the ratchet 606 can drive the top shaft 605 and the cover 602 to rotate, thereby driving the bracket 601 and the plurality of material tubes 2 to rotate synchronously. Of course, in other processes of the sampling mechanism 4, the control assembly 5 will not drive the ratchet 606 to rotate.

[0040] In this embodiment, as Figure 2 As shown, a groove 603 is provided on the top of the bracket 601, and a plug 604 adapted to the groove 603 is fixedly installed on the bottom of the cover 602. When the bracket 601 is placed on the base 1 and the cover 602 is placed on the bracket 601, the plug 604 is inserted into the groove 603, thus enabling synchronous rotation of the bracket 601 and the cover 602. Of course, in practical applications, a pin or other structure can also be provided between the bracket 601 and the cover 602 to achieve relative synchronous rotation after assembly. The pin is an existing mature technology and will not be described in detail here.

[0041] Reference Figures 3 to 5In this embodiment, preferably, the control component 5 includes a column 501 fixedly mounted on the base 1. A horizontal cylinder 502 is fixedly mounted on the top of the column 501. A vertical cylinder 503 and a partition 504 are fixedly mounted on the output shaft of the horizontal cylinder 502. The output shaft of the vertical cylinder 503 is fixedly connected to the sampling mechanism 4, which can drive the sampling mechanism 4 to move up and down, and can also move horizontally through the horizontal cylinder 502. A pawl 505 corresponding to the position of the ratchet 606 is rotatably mounted on the surface of the partition 504 via a rotating shaft and a torsion spring (not shown in the figure).

[0042] In the above structure, when the horizontal cylinder 502 drives the vertical cylinder 503 and the partition 504 to move towards the material tube 2, the pawl 505 contacts the ratchet 606 and can close towards the partition 504; when the horizontal cylinder 502 drives the vertical cylinder 503 and the partition 504 to move towards the storage box 3, the pawl 505 can drive the ratchet 606, the top shaft 605 and the cover 602 to rotate, and the cover 602 drives the bracket 601 and several material tubes 2 to rotate synchronously through the groove 603 and the plug 604.

[0043] In use, first place several material tubes 2 on the bracket 601 and then put the bracket 601 on top of the base 1. Next, put the cover 602 upside down on the bracket 601 and insert the plug 604 into the groove 603. Then, start the vertical cylinder 503 to drive the sampling mechanism 4 to insert into the storage box 3 to complete the raw material sampling. The vertical cylinder 503 then drives the sampling mechanism 4 to rise and reset. The horizontal cylinder 502 then drives the vertical cylinder 503, the sampling mechanism 4, the partition 504 and the pawl 505 to move horizontally until the sampling mechanism 4 moves above the material tube 2. At this time, the pawl 505 can avoid the ratchet 606 and will not drive the ratchet 606 to rotate. Next, the vertical cylinder 503 drives the sampling mechanism 4 to descend and distribute the raw material into the material tube 2. The vertical cylinder 503 then drives the sampling mechanism 4 to rise and reset. The horizontal cylinder 502 then drives the vertical cylinder 503, the sampling mechanism 4, the partition plate 504, and the pawl 505 to reset horizontally. During this process, the pawl 505 can drive the bracket 601 to rotate through the ratchet 606, the top shaft 605, the cover 602, the plug 604, and the groove 603. The bracket 601 drives several material tubes 2 to rotate synchronously, so that the material tubes 2 that have been sampled are removed, and the next free material tube 2 forms a horizontal correspondence with the sampling mechanism 4.

[0044] In summary, through the cooperation of structures such as the horizontal cylinder 502, the vertical cylinder 503, and the storage box 3, the sampling mechanism 4 can be driven to move different distances in the vertical and horizontal directions. First, the different vertical movement distances can make the sampling mechanism 4 correspond effectively with the different amounts of raw materials stored in the storage box 3. Even if the raw materials in the storage box 3 gradually decrease during the sampling process, the sampling mechanism 4 can increase the descent distance to complete the sampling.

[0045] Secondly, the different vertical movement distances can also be adapted to material tubes 2 with different specifications and parameters. At the same time, the different horizontal movement distances can also be adapted to material tubes 2 with different specifications and parameters. This makes the raw material sampling process from the storage box 3 and the sample dispensing process into the material tube 2 both efficient. The limitations on parameters such as size are reduced, which can effectively improve the overall applicability of the sampling device.

[0046] Through the cooperation of structures such as the top shaft 605, cover 602, bracket 601 and pawl 505, several material tubes 2 can be automatically moved and switched during the reset process of the sampling mechanism 4. This allows the next material tube 2 to be automatically adjusted to correspond with the sampling mechanism 4 without much intervention from staff. This can effectively improve the overall sampling processing efficiency and reduce the risk of contamination during the production process.

[0047] Furthermore, the cover 602 keeps the support 601 closed throughout the entire sampling process, which makes the space between the base 1 and the cover 602 relatively sealed. At this time, the sampling and distribution of raw materials can be carried out in an effectively closed environment, which can further reduce the risk of contamination during the entire process and ensure the reliability of the quality of the sampled raw materials.

[0048] Finally, several material tubes 2 are integrated on the bracket 601, so that the material tubes 2 can be placed on the base 1 at one time. After the sampling is completed, all the material tubes 2 can also be taken out at one time through the bracket 601, thereby reducing the number of transfers and improving processing efficiency. At the same time, the base 1, the bracket 601 and the cover 602 are connected in an upper and lower nested relationship, so that the structure of the entire sampling device is integrated together, which occupies less space and is more convenient for the staff to operate, thus making the overall practicality higher.

[0049] Example 2:

[0050] Please see Figures 1 to 8 Based on Embodiment 1, in order to ensure effective correspondence between the material tube 2 and the sampling mechanism 4 during movement, several through holes 607 arranged in a ring array are provided along the circumferential direction on the outer surface of the top shaft 605. The number and position of the through holes 607 correspond one-to-one with the material tube 2. At the same time, a limiting component 7 corresponding to the position of one of the through holes 607 is fixedly installed on the partition plate 504. The limiting component 7 also corresponds to the left and right of the sampling mechanism 4. After the limiting component 7 is inserted into one of the through holes 607, the material tube 2 corresponding to the through hole 607 can form an effective correspondence with the sampling mechanism 4, thereby enabling the subsequent horizontal movement and descent sampling of the sampling mechanism 4 to proceed smoothly.

[0051] Reference Figures 6 to 8In this embodiment, preferably, the limiting component 7 includes a cantilever 701 fixedly mounted on the partition 504, a crossbar 702 fixedly mounted on the surface of the cantilever 701, a guide slope 703 fixedly mounted on the end of the crossbar 702 away from the cantilever 701, and a short head 704 fixedly mounted on the end of the guide slope 703 away from the crossbar 702. During the movement of the cantilever 701 with the partition 504, the short head 704 can be inserted into the through hole 607 first, and then the guide slope 703 and the crossbar 702 are inserted into the through hole 607 in sequence. When the crossbar 702 is inserted into the through hole 607, the top shaft 605 is limited and cannot move further.

[0052] In the above structure, such as Figure 8 As shown, the crossbar 702, guide slope 703, and short end 704 are arranged concentrically, with the two ends of the guide slope 703 corresponding to the adjacent ends of the crossbar 702 and short end 704, respectively. Simultaneously, the diameter of the short end 704 is smaller than the diameter of the through hole 607, while the diameter of the crossbar 702 is equal to the diameter of the through hole 607. During the movement of the cantilever 701, the short end 704 can easily insert into the through hole 607, and then, guided by the guide slope 703, the crossbar 702 can also be inserted into the through hole 607, thereby limiting the top shaft 605, and also limiting the housing 602 and the bracket 601.

[0053] Among them, such as Figure 8 As shown, the outer surface of the through hole 607 may also be chamfered to further facilitate the rapid entry of the short head 704 and to further ensure the effective positioning of the material tube 2.

[0054] In use, the top shaft 605, cover 602, and bracket 601 enable automatic switching of several material tubes 2 to improve overall sampling efficiency. The working process and effect of this part are the same as in Embodiment 1, and will not be repeated here. The difference is that when the horizontal cylinder 502 drives the vertical cylinder 503 and the sampling mechanism 4 to move horizontally towards the material tube 2, the short head 704, guide slope 703, and crossbar 702 are inserted into the through hole 607 in sequence and the top shaft 605 is limited, thereby positioning the bracket 601 and the material tube 2. At this time, the horizontal movement of the sampling mechanism 4 can be stably moved to directly above the material tube 2, thereby completing the sample feeding into the material tube 2. When the horizontal cylinder 502 drives the vertical cylinder 503 to return to its horizontal position and the pawl 505 drives the ratchet 606 to rotate, the short head 704 has already exited from the through hole 607, thus not affecting the rotation of the top shaft 605 and the cover 602, nor affecting the automatic switching of the bracket 601 and the material tube 2.

[0055] Compared to Embodiment 1, the combination of structures such as the top shaft 605, through hole 607, crossbar 702, and short head 704 enables effective positioning of the support 601 and the material tube 2 when the sampling mechanism 4 moves towards the material tube 2. This ensures that the material tube 2 and the sampling mechanism 4 are in effective horizontal alignment, allowing the sampling mechanism 4 to complete the sample dispensing into the material tube 2 and ensuring the orderly progress of the overall sampling process.

[0056] The design of increasing diameters of the short head 704, guide slope 703, and crossbar 702 allows for accurate correction even if the pawl 505 shifts after switching between the support 601 and the material tube 2 via the ratchet 606. This reduces the limitation on the rotation angle of the ratchet 606 and pawl 505, effectively lowering the operational difficulty and ensuring the orderly progress of the overall sampling process.

[0057] Example 3:

[0058] Please see Figures 1 to 10 Based on Embodiment 2, in order to further ensure the reliability of the quality of the sampled raw materials, a sliding component 8 for sealing the storage box 3 is provided in the base 1, and an inverted cone 608 corresponding to the position of the sliding component 8 is fixedly installed on the outer surface of the top shaft 605. After the cover 602 and the bracket 601 are assembled, the inverted cone 608 drives the sliding component 8 to slide horizontally along the base 1, thereby releasing the sealing state of the storage box 3, so that the sampling mechanism 4 can smoothly descend from the storage box 3 to completely sample.

[0059] Reference Figure 9 and Figure 10 In this embodiment, preferably, the sliding component 8 includes a connecting rod 801 that is horizontally slidably mounted on the top of the base 1. A cover plate 802 corresponding to the position of the storage box 3 is fixedly mounted on the surface of the connecting rod 801. The bottom of the cover plate 802 is flush with the top of the storage box 3, and can effectively close the storage box 3 after moving with the connecting rod 801.

[0060] Among them, such as Figure 10 As shown, the top of the connecting rod 801 has a slope 803 corresponding to the position of the inverted cone 608. When the inverted cone 608 descends with the cover 602, the slope 803 pushes the connecting rod 801 to slide horizontally along the top of the base 1, thereby causing the cover plate 802 to move away from the storage box 3 and release the seal. Correspondingly, a spring 804 is fixedly installed between the connecting rod 801 and the base 1 or between the connecting rod 801 and the storage box 3. The spring 804 causes the connecting rod 801 to have a tendency to move towards the storage box 3, thereby allowing the cover plate 802 to close the storage box 3.

[0061] In the above structure, the annular design of the inverted cone 608 ensures that when the top shaft 605 drives the cover 602 to rotate, the inverted cone 608 can still effectively contact the slope 803, thereby ensuring the stability of the connecting rod 801 after it is pushed. In this embodiment, to prevent the cover 602 from separating from the bracket 601 in the vertical direction after assembly, the plug 604 and the groove 603 can be replaced with existing pins or other relatively fixed structures.

[0062] In use, the automatic switching of several material tubes 2 can be achieved through the structure of top shaft 605, cover 602 and bracket 601. The material tube 2 can be effectively positioned when the sampling mechanism 4 moves towards the material tube 2 through the structure of top shaft 605, through hole 607 and crossbar 702. The working process and effect of this part are the same as in embodiment 2, and will not be repeated here. The difference is as follows: In the initial state, the connecting rod 801, under the action of the spring 804, drives the cover plate 802 to be in the closed storage box 3 state; after the cover 602 and the bracket 601 are assembled, the top shaft 605 drives the inverted cone 608 to descend vertically through the slope 803 to push the connecting rod 801. The connecting rod 801 drives the cover plate 802 to move synchronously and stretch the spring 804. At this time, the cover plate 802 separates from the storage box 3 and is unsealed. The sampling mechanism 4 can descend normally to complete the sampling. In the subsequent process of the top shaft 605 driving the cover 602 to rotate, the inverted cone 608 can still maintain contact with the connecting rod 801, so that the position of the cover plate 802 remains stable.

[0063] Compared to Embodiment 2, through the cooperation of structures such as connecting rod 801, cover plate 802, top shaft 605 and inverted truncated cone 608, after the cover 602 and bracket 601 are assembled to form a relatively closed space, the cover plate 802 can be moved to release the seal on the storage box 3. At this time, the sampling mechanism 4 can descend normally to complete the sampling. At the same time, it can also ensure that a relatively closed space is formed between the cover 602 and the base 1 after assembly, thereby ensuring the reliability of the quality of the sampled raw materials.

[0064] Furthermore, after the entire sampling process is completed and the cover 602 is removed, the cover plate 802 can automatically reset and reseal the storage box 3. At this time, the raw materials in the storage box 3 can be effectively protected, avoiding the impact of the external environment on the raw materials, and further ensuring the reliability of the quality of the sampled raw materials.

[0065] The entire scheme is combined with the setting of the top shaft 605 and the assembly of the cover 602. When the top shaft 605 drives the cover 602 to rotate, it will not affect the connecting rod 801, which can ensure that the position of the cover plate 802 is always stable, which is conducive to obtaining better sampling results and meeting more needs in actual sampling.

Claims

1. A raw material sampling device for photoresist production, comprising a base, a storage box for storing raw materials, a sampling mechanism for sampling, and a plurality of material tubes for receiving raw materials, characterized in that, The base is provided with a support component for supporting several material tubes. The material tubes are arranged in a circular array based on the support component. The base is provided with a control component for driving the sampling mechanism. When the control component is activated to drive the sampling mechanism to move towards the storage box, the support component can drive the several material tubes to move along the circumference of the base. The support assembly includes a bracket rotatably mounted on a base and a cover that rotates synchronously with the bracket. A plurality of material tubes are arranged in an array on the bracket. A top shaft is fixedly installed on the inner wall of the cover, and a ratchet corresponding to the position of the control assembly is fixedly installed at the bottom of the top shaft. The top of the bracket is provided with a groove, and the bottom of the cover is fixedly installed with a plug that matches the groove. The bracket and the cover rotate synchronously through the groove and the plug. The control component includes a column fixedly mounted on a base, a horizontal cylinder fixedly mounted on the top of the column, a vertical cylinder and a partition fixedly mounted on the output shaft of the horizontal cylinder, the output shaft of the vertical cylinder fixedly connected to the sampling mechanism, and a pawl corresponding to the position of the ratchet rotatably mounted on the surface of the partition via a rotating shaft and a torsion spring. The base is provided with a sliding component for sealing the storage box. The outer surface of the top shaft is fixedly installed with an inverted truncated cone corresponding to the position of the sliding component. When the cover and the bracket are assembled, the inverted truncated cone drives the sliding component to slide horizontally along the base, releasing the sealing state of the storage box. The sliding assembly includes a connecting rod that is horizontally slidably mounted on the top of the base. A cover plate corresponding to the position of the storage box is fixedly mounted on the surface of the connecting rod. The bottom of the cover plate is flush with the top of the storage box and is used to close the storage box. The outer surface of the top shaft is provided with several through holes, which are arranged in a ring array along the circumferential direction of the top shaft. The number and position of the through holes correspond one-to-one with the material tube. A limiting component corresponding to the position of one of the through holes is fixedly installed on the partition plate, and the limiting component corresponds to the position of the sampling mechanism. The limiting component includes a cantilever fixedly mounted on the partition plate, a crossbar fixedly mounted on the surface of the cantilever, a guide slope fixedly mounted on the end of the crossbar away from the cantilever, and a short head fixedly mounted on the end of the guide slope away from the crossbar. When the transverse cylinder drives the sampling mechanism to move horizontally above the material tube, the pawl avoids the ratchet and will not drive the ratchet to rotate; the transverse cylinder drives the sampling mechanism to return to its horizontal position, at which point the pawl can drive the bracket to rotate through the ratchet, top shaft, cover, plug and groove, and the bracket drives several material tubes to rotate synchronously. When the transverse cylinder drives the sampling mechanism to move horizontally toward the material tube, the short head, guide slope and crossbar are inserted into the through hole in sequence and the top shaft is limited, thereby positioning the bracket and the material tube. After the cover and bracket are assembled, the top shaft drives the inverted cone to descend vertically through the slope and push the connecting rod. The connecting rod drives the cover plate to move synchronously and separate from the storage box to release the seal.

2. The raw material sampling device for photoresist production according to claim 1, characterized in that, The top shaft is located at the center of the inner top wall of the cover, and the storage box is located at the center of the interior of the base.

3. The raw material sampling device for photoresist production according to claim 1, characterized in that, The pawl moves horizontally in sync with the partition. When the partition drives the pawl to move toward the storage box, the top shaft rotates via the ratchet.

4. The raw material sampling device for photoresist production according to claim 1, characterized in that, The crossbar, guide ramp, and short end are arranged concentrically, and the two ends of the guide ramp are equal in size to the adjacent ends of the crossbar and the short end, respectively.

5. The raw material sampling device for photoresist production according to claim 1, characterized in that, The diameter of the short end is smaller than the diameter of the through hole, while the diameter of the crossbar is equal to the diameter of the through hole.

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