Installation and construction method for ultra-clean room of high-tech plant

Abstract

The invention discloses an installation and construction method for an ultra-clean room of a high-tech plant. The method is divided into a preparation stage, a general cleaning stage, a very clean stage and a super clean stage and comprises the steps of drawing examination, material preparation, drawing deepening design and mechanical preparation, and determination of a pipe comprehensive arrangement deepening drawing, a suspended ceiling arrangement deepening drawing, a clean plate arrangement deepening drawing, an FFU deepening drawing and a raised floor arrangement deepening drawing. Construction of a building structure main body; construction of a ground base layer and epoxy spraying of a beam bottom; installation of an electric bridge, installation of a smoke exhaust pipeline, installation of a fire sprinkler and installation of an air conditioner water pipe; installation of a clean board wall; installing a clean air pipe, a clean suspended ceiling, a raised floor, a DCC and an air shower; installing a delivery window, a clean lamp, performing film tearing and gluing operation, performing aluminum strip edge closing operation, installing an eye washer; performing positive pressure air supply; mounting a high-efficiency filter; and mounting a process pipeline. The problem that in the prior art, the construction quality of an ultra-clean room is poor can be solved.

Description

Technical Field

[0001] This invention relates to the field of building construction technology, and in particular to a method for installing and constructing a high-tech cleanroom in a factory. Background Technology

[0002] Cleanrooms (or ultra-clean spaces) are spaces where harmful physical and chemical substances, microorganisms, and other contaminants are eliminated, and their temperature, humidity, airflow velocity and distribution, pressure, static electricity, vibration, and cleanliness are controlled within the required process range. In other words, their internal parameters are stringently stable and unaffected by external environmental interference. Cleanrooms are primarily used in semiconductor, biochemical laboratories, precision machinery, pharmaceuticals, medical, aerospace, and nuclear energy fields. To quantify their cleanliness level, the maximum permissible concentration of particles larger than or equal to the particle size of interest per unit volume of air within the clean space is measured to classify its air cleanliness level. According to current national and domestic standards (ISO 14644-1, GB / T 25915.1-2021), air cleanliness levels can be classified into ISO 1-9 grades.

[0003] Currently, there is a considerable amount of research on cleanroom cleanliness control, mainly focusing on system design, material development and selection, equipment selection and layout, and economic analysis. Overall, the control measures are diverse and effective. However, research on the construction phase in the building sector is relatively limited. Construction processes are complex, involving numerous participants and influencing factors. Quality control during construction is crucial throughout the entire project, as secondary contamination of the cleanroom can easily occur, affecting its construction quality. This is especially true for cleanrooms with high parameter requirements, where quality control during construction is paramount to cleanliness. Therefore, there is a need for a high-tech cleanroom installation and construction method that can address the problem of poor construction quality in existing cleanroom technologies. Summary of the Invention

[0004] The purpose of this invention is to provide a high-tech factory cleanroom installation and construction method that can solve the problem of poor construction quality of cleanrooms in the prior art.

[0005] This invention is implemented as follows:

[0006] A high-tech factory cleanroom installation and construction method, the entire construction process is divided into four stages: preparation stage, general cleanroom stage, very cleanroom stage and super cleanroom stage.

[0007] The construction process in the preparation stage includes: drawing review → material preparation, drawing detailing and mechanical preparation → determining the detailed drawings of pipe network layout, ceiling layout, cleanroom panel layout, FFU layout, and raised floor layout.

[0008] The general construction process for the cleanroom phase includes: main building structure construction → ground base construction and epoxy spraying of beam bottom → installation of power cable trays, smoke exhaust ducts, fire sprinklers, and air conditioning water pipes → cleanroom wall panel installation → epoxy flooring construction.

[0009] The construction process for the very clean stage includes: clean air duct installation, clean ceiling installation, raised floor installation, DCC installation, air shower installation → pass-through window installation, clean lighting installation, film removal and caulking, aluminum strip edge finishing, eyewash station installation → positive pressure air supply → FFU installation.

[0010] The construction process for the ultra-clean phase includes: HEPA filter installation → process pipeline installation.

[0011] During the preparation phase:

[0012] Material preparation: After the material requirements of each major are clarified, imported materials and domestic materials are classified; before purchasing materials, parameters and samples are confirmed.

[0013] Equipment preparation: Vacuum cleaners are standard equipment in cleanroom projects. After entering the general cleanroom stage, the construction site needs to be cleaned daily with vacuum cleaners.

[0014] Detailed design: After completing the pipe layout, net height analysis, and ceiling layout, the installation position of the FFU equipment is verified by airflow organization simulation in combination with the installation status of process equipment to avoid unreasonable airflow organization, which may lead to substandard cleanliness.

[0015] Identification of key indicators and influencing factors.

[0016] The general cleanroom phase is divided into the routine construction phase and the primary cleanroom phase.

[0017] The conventional construction phase mainly involves completing the civil engineering work that may generate a lot of dust or residue, including the main building structure, brick wall enclosure, and ground pouring, namely the main building structure construction, ground base construction, and epoxy spraying on the bottom of the beams; the completion of the conventional construction phase is marked by the fact that the building has been basically enclosed.

[0018] The initial cleanroom stage mainly involves completing and accepting the electromechanical installation of water, electricity, and air ducts within the technical mezzanine. Subsequently, the construction of the decorative cleanroom wall panels, doors, windows, and epoxy flooring is carried out, including the installation of power cable trays, smoke exhaust ducts, fire sprinklers, air conditioning water pipes, cleanroom wall panels, and epoxy flooring. The completion of the initial cleanroom stage is marked by the completion of the epoxy flooring construction and the establishment of a buffer zone, indicating that the cleanroom has been initially formed and access to the cleanroom begins to be restricted.

[0019] The key points for installation process control of the aforementioned cleanroom panel wall installation include:

[0020] 1) Unified reference points: By unifying the installation starting points of cleanroom wall panels, raised floors and cleanroom ceilings, the joints of cleanroom wall panels, raised floors and FFU keels are controlled to be flush, which improves the overall visual quality of the cleanroom and enhances its sealing performance.

[0021] 2) Select the layout sequence: Cleanroom wall panels include inner wall panels and outer wall panels; after verifying that the ground elevation error meets the requirements, first lay out the outer perimeter partition wall line of the cleanroom, and use a theodolite to check the straightness of this line. Then, use this as a reference to lay out the inner wall axis. According to the marked inner wall axis line, use plastic expansion bolts to fix the floor groove aluminum. The spacing of the plastic expansion bolts is 400-500mm, arranged in a quincunx pattern.

[0022] 3) Installation control points: The interior wall panels are connected using a tongue and groove joint. They are installed from a fixed point and spliced ​​one by one. One side of the interior wall panel has a tongue and groove protrusion, and the other side has a tongue and groove recess. The tongue and groove protrusion can be inserted into the tongue and groove recess, so that two adjacent interior wall panels can be spliced ​​flat. The lower end of the interior wall panel is inserted into the aluminum groove. At the corner of the interior wall, the corner side of the interior wall panel is cut into a 45° bevel, so that two vertically connected interior wall panels can be spliced ​​vertically through the 45° bevel.

[0023] The exterior wall panels are connected using a tongue and groove joint, starting from a fixed point and splicing one panel at a time. The splicing method of the exterior wall panels is the same as that of the interior wall panels. At the corners of the exterior wall, the inner edges of two vertically connected exterior wall panels are joined together, and the outer edges of two vertically connected exterior wall panels are connected by a corner radius.

[0024] When installing interior and exterior wall panels, ensure they are vertically and horizontally aligned. The gap between panels should be less than 0.5mm. Fill the tongue and groove joints with special polystyrene resin foam until fully sealed to ensure tightness. For minor scratches and dents, apply putty first, then spray with the original factory paint. The removal of the protective film and application of adhesive to cleanroom wall panels should be done after the very clean or super cleanroom stage.

[0025] 4) Detailed details: The bottom of the exterior wall panel is connected to the raised floor through a ground arc corner, which is covered with aluminum ground groove; the top of the exterior wall panel is connected to the bottom of the ceiling panel through an upper groove, and the top of the exterior wall panel is connected to the ceiling panel through a ceiling arc corner. Support reinforcements are provided between the ceiling arc corner, the exterior wall panel and the ceiling panel.

[0026] In the aforementioned highly clean phase:

[0027] (I) Cleanroom Duct Fabrication and Installation Process

[0028] 1) Clean air ducts and their components are made of galvanized steel sheets. The zinc coating of the galvanized steel sheets is above No. 100, and the average value of the three-point test on both sides is not less than 100g / ㎡. Galvanized steel sheets with large areas of white spots on the surface or powdering of the coating are strictly prohibited from use.

[0029] 2) When the clean air duct is fabricated on site, a rainproof canopy or enclosure should be set up in advance and the site should be kept clean. The processing site should be covered with rigid rubber and plastic boards. Before the clean air duct is unloaded, the oil stains on the surface of the board should be cleaned. During the cleaning process, a professional engineer should supervise the process to ensure that the oil stains on the surface of the board are completely removed.

[0030] 3) The joints of clean air ducts are mechanically joined, and sealant must be applied to the joints, rivet joints, and the four corners of the flange.

[0031] 4) After the bite joint is completed, wipe the bite joint area with a new bleached cloth to prevent oil stains from accumulating;

[0032] 5) After the clean air duct sheets are assembled and formed, they are riveted to the air duct flange. The spacing of the bolts and rivet holes of the air duct flange should meet the specifications. After riveting, the gaps or holes are filled by applying glue or soldering. For clean air ducts that need to be reinforced, the reinforcing ribs are placed on the outer surface of the clean air duct.

[0033] 6) After the clean air duct is made, wipe it inside and out with a diluted neutral detergent, then wipe it with a neutral detergent, and finally clean the clean air duct a second time with clean water. Wipe the inner wall with a silk cloth until there is no dirt, then the cleanliness requirement is considered met. Seal the end of the clean air duct and store it in a clean room to avoid dust accumulation, moisture and deformation.

[0034] 7) Locate and measure the route of the clean air duct to be installed, and install the hangers, brackets and supports to be erected in advance. The thickness of the duct flange gasket is 5~8mm. At the same time, the connection between the clean air duct and the support should be made of galvanized iron sheet overlap insulation transition or plastic pipe support transition. When using wooden supports, use wooden supports soaked in hot asphalt for more than 8 hours and wrap them with zebra tape before use.

[0035] 8) After the clean air duct is installed, wipe and clean the inside of the clean air duct again with a diluted neutral cleaning agent to prevent dust from accumulating inside the clean air duct during construction and to prevent the cleanliness of the clean room from being affected when positive pressure air supply is used.

[0036] (II) Elevated floor installation process

[0037] 1) By unifying the reference points, the joints of the raised floor are made flush with the joints of the cleanroom wall panels, thereby improving the visual quality and sealing performance of the cleanroom.

[0038] 2) By adjusting the arrangement ratio of perforated plates and blind plates in the raised floor, the opening rate of the clean room can meet the ventilation requirements, while avoiding dead corners in the airflow organization.

[0039] 3) Mark out the floor division lines of the raised floor and pop out the horizontal control lines on the wall. Check whether the support components conflict with the process pipelines. If they do, they need to be adjusted. Apply adhesive to the base of the support rod of the raised floor.

[0040] 4) Adjust the height of the support feet of the raised floor by pulling horizontal and vertical alignment lines, and level each point with a level. Then, use threaded rods and threaded sleeves to raise or lower the leveling operation. After reaching the design elevation requirements, add a leveling nut and a leveling nut with anti-vibration displacement to the threaded rod to ensure the consistency and stability of the support foot height.

[0041] 5) Before installing the decorative panels of the raised floor, draw lines around the assembly of the panels to ensure they fit together. The gap between the panel and the vertical surface of the clean wall should not exceed 3mm. Clean the panels, supports, and other areas that will be concealed as you install.

[0042] 6) After the raised floor is laid, use a vacuum cleaner to thoroughly clean it. After it passes the acceptance inspection, first cover it with a thin film, and then cover it tightly with a hard plastic sheet to prevent dust accumulation and damage during construction.

[0043] (III) Cleanroom Ceiling Installation Process

[0044] 1) Based on the completed cleanroom wall panel, establish the ceiling baseline. The ceiling screws are arranged uniformly according to the screws of the electromechanical pipelines to ensure that the overall layout direction of the ceiling screws is in the same direction as the screws of the electromechanical pipelines, so as to facilitate the later installation of FFUs.

[0045] 2) Calculate the length of the ceiling screw according to the floor height, cut and process it, and then pre-assemble the screw that meets the requirements with accessories such as square adjusters to form the ceiling hanger.

[0046] 3) The spacing between the hangers is less than 1.5m, and the distance between the hanger and the end of the main keel of the ceiling is no more than 300mm. At the same time, the square adjuster on the hanger is set at more than 500mm to facilitate later adjustment and balance. The hangers are installed over a large area according to their position. The hangers are fixed to the T-shaped keel of the main keel by flange anti-slip nuts.

[0047] 4) The fixing and hanging parts of the ceiling should be connected to the main structure of the building. When there is no load-bearing point above, C-shaped steel conversion parts should be installed. The installation direction of the conversion parts should ensure that the net height of the FFU installation is more than 500mm.

[0048] 5) When prefabricating the ceiling joists, the protective film should not be removed first. Use hexagonal screws to fasten them. The pre-assembled area should be controlled within 2.4 meters * 2.4 meters to facilitate installation.

[0049] 6) Hoist the prefabricated ceiling keel as a whole onto the pre-assembled T-bolts on the hanger rods. Offset the square adjuster from the center of the cross joint by more than 15 cm, and tighten the T-bolts and the flange anti-slip nuts.

[0050] 7) After the keel construction of a certain area, use a laser level and receiver to adjust the keel horizontally. The horizontal height difference shall not be higher than the ceiling elevation by 2mm, nor lower than the ceiling elevation.

[0051] 8) After the ceiling joists are completed, install blind panels and FFUs in each partition room according to the arrangement of FFU blind panels and FFU fans in the room.

[0052] (iv) Installation of DCC purification equipment

[0053] 1) The total air volume of MAU, the face velocity of the dry cooling coil, the filter efficiency, and the parameters of the humidifier should be carefully checked, as deviations in these parameters will affect the humidity and positive pressure control of the cleanroom.

[0054] 2) The foundation of the MAU equipment is sealed with epoxy coating;

[0055] 3) Before operating the MAU, the high-efficiency, medium-efficiency, and pre-filters inside the equipment should be removed, and non-woven fabric should be laid down for temporary coarse filtration.

[0056] 4) Before the MAU is put into operation, wipe it clean with alcohol, and at the same time, use the fins to straighten any scratches on the coil fins.

[0057] 5) After the DCC is installed, seal the edges with adhesive to ensure that all return air passes through the DCC area for heat exchange and to prevent short-circuiting of return air at the DCC.

[0058] 6) Before installing DCC, carefully check the inlet and outlet water positions to ensure that the temperature difference for heat exchange meets the design requirements and avoid short-flow of air conditioning water.

[0059] 7) Before installing the FFU, a technical review of the installation clearance should be conducted, and the minimum clearance should not be less than 500mm.

[0060] 8) The entire ceiling system should be leveled before FFU installation, and the ceiling should be leveled again after installation. The square adjuster should be installed above the FFU installation clearance.

[0061] In the aforementioned super-clean phase:

[0062] 1) Prepare cleaning tools such as lint-free cloths, special stain removers, and special mops, and prepare a cleaning solution with 90% deionized water and 10% isopropyl alcohol;

[0063] 2) After changing into special anti-static clothing, wearing a hat and mask, and passing through the air shower to remove dust, enter the clean room;

[0064] 3) Clean the ceiling with a damp cloth or adhesive roller, and clean the fasteners between the filters. Move the cloth, roller or vacuum cleaner in one straight direction.

[0065] 4) Use a mop, roller, or rag to wet-clean clean walls, glass, and floors, overlapping each other in parallel motion, moving from top to bottom. Be careful of switches, sockets, and signal devices when moving.

[0066] 5) After the clean room is cleaned, clean the changing room, material airlock and the furniture therein.

[0067] After the cleanroom is thoroughly cleaned, the air conditioning system is turned on and run continuously for more than 12 hours. Then, the cleanroom is cleaned and wiped down before the high-efficiency filter is installed. Before the high-efficiency filter is installed, an appearance inspection is performed when the packaging is unpacked at the installation site. This includes checking whether the filter paper, sealant, frame, geometric dimensions, and smoothness meet the design requirements. Then, a leak test is performed. If the inspection and leak test are passed, the filter is installed immediately. Unqualified products must not be installed.

[0068] After the high-efficiency filter is installed and runs for 48 hours, the cleanliness of the cleanroom meets the requirements for process pipeline installation. Then, the ultrapure water, special gas, compressed air and vacuum pipelines are installed. Once the process pipelines are installed, the entire cleanroom construction is complete.

[0069] Compared with the prior art, the present invention has the following advantages:

[0070] 1. Because the key indicators and influencing factors are identified in the preparation stage, the risks of acceptance in the later stage are avoided as much as possible during the construction stage. This invention can meet the requirements of cleanrooms for cleanliness, temperature and humidity, light intensity, wind speed, air volume and noise, which is conducive to improving the construction quality of cleanrooms.

[0071] 2. This invention divides the entire construction process into four stages: preparation stage, general clean stage, very clean stage, and ultra-clean stage. This facilitates the management of the construction process. Each construction stage must be strictly controlled. This helps to reduce secondary pollution between processes through construction management, ensure that the construction quality meets the standards on the first attempt, and ensure seamless connection between processes. At the same time, it guarantees the reliability of the overall installation quality.

[0072] 3. This invention addresses the air conditioning systems involved in cleanrooms, such as clean air ducts and purification air conditioning equipment. Through strict construction processes for the fabrication and installation of clean air ducts and purification equipment, the reliability of the air conditioning system installation quality is guaranteed.

[0073] 4. This invention addresses the decorative engineering of cleanrooms, including raised floors, cleanroom wall panels, and cleanroom ceilings. Through strict construction processes for cleanroom wall panel installation, raised floor installation, and cleanroom ceiling installation, it ensures the reliability of the professional installation quality. Attached Figure Description

[0074] Figure 1 This is a flowchart of the high-tech factory cleanroom installation and construction method of the present invention;

[0075] Figure 2 This is a schematic diagram of the splicing of the inner wall panels in the high-tech factory cleanroom installation and construction method of the present invention;

[0076] Figure 3 This is a schematic diagram of the corner node of the exterior wall panel in the installation and construction method of the high-tech factory clean room of the present invention;

[0077] Figure 4 This is a schematic diagram of the connection nodes of the exterior wall panel and the ground in the high-tech factory cleanroom installation and construction method of this invention;

[0078] Figure 5 This is a schematic diagram of the connection nodes of the external wall panel ceiling in the high-tech factory cleanroom installation and construction method of this invention.

[0079] In the diagram, 1 is a plastic expansion bolt, 2 is aluminum ground groove, 3 is an inner wall panel, 31 is a tongue and groove protrusion, 32 is a tongue and groove recess, 4 is an outer wall panel, 5 is a rounded corner, 6 is a raised floor, 7 is a rounded corner of the ground, 8 is a ceiling panel, 9 is a rounded corner of the ceiling, 10 is an upper mounting groove, and 11 is a support reinforcement. Detailed Implementation

[0080] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0081] Please see the appendix Figure 1 A high-tech factory cleanroom installation and construction method, the entire construction process is divided into four stages: preparation stage, general cleanroom stage, very cleanroom stage and super cleanroom stage.

[0082] The main construction processes involved in cleanrooms are categorized according to installation environmental requirements, divided into four construction stages: First, the preparation stage, mainly involving the refinement of various professional drawings and the preparation of personnel, materials, and equipment. Second, the general cleanroom stage, mainly involving construction processes with less stringent environmental requirements, such as sealing the building's external envelope and epoxy dust sealing of the ground. Third, the very cleanroom stage, mainly involving construction processes with high environmental requirements, such as the fabrication and installation of clean air ducts and the installation of purification air conditioning equipment. Fourth, the super cleanroom stage, mainly involving construction processes with extremely high environmental requirements, such as the installation of high-efficiency filters and process pipelines.

[0083] The construction process in the preparation phase includes: drawing review → material preparation, detailed design of drawings, and machinery preparation → determination of detailed drawings for pipework layout, ceiling layout, cleanroom panel layout, FFU (Fan Filter Unit) layout, and raised floor layout.

[0084] The design drawings are refined to understand the design intent, clarify the construction process requirements, and assess the main influencing factors in the construction of the cleanroom. By controlling the main influencing factors, the overall construction quality of the cleanroom is improved.

[0085] The general construction process for the cleanroom phase includes: main building structure construction → ground base construction and epoxy spraying of beam bottom → installation of power cable trays, smoke exhaust ducts, fire sprinklers, and air conditioning water pipes → cleanroom wall panel installation → epoxy flooring construction.

[0086] The construction process for the very clean stage includes: clean air duct installation, clean ceiling installation, raised floor installation, DCC (Dry Coil Case) installation, air shower installation → pass-through window installation, clean lighting installation, film removal and caulking, aluminum strip edge finishing, eyewash station installation → positive pressure air supply → FFU installation.

[0087] The construction process for the ultra-clean phase includes: HEPA filter installation → process pipeline installation.

[0088] In the preparation phase, cleanroom projects in factories generally share common characteristics such as short construction periods, multiple professional disciplines, and high technical barriers. Therefore, the work done in the preparation phase is particularly important for the success of such projects. The following will detail the various tasks involved in the preparation phase:

[0089] 1. Material preparation: After the material requirements of each major are clarified, imported materials and domestic materials are classified; before purchasing materials, parameters and samples are confirmed.

[0090] 2. Equipment preparation: Vacuum cleaners are standard equipment in cleanroom projects. After entering the general cleanroom stage, the construction site needs to be cleaned daily with vacuum cleaners.

[0091] 3. Detailed design: After completing the pipe layout, net height analysis, and ceiling layout, the installation position of the FFU equipment is verified by airflow organization simulation in combination with the installation status of process equipment to avoid unreasonable airflow organization, which may lead to substandard cleanliness.

[0092] 4. Identification of key indicators and influencing factors: The influencing factors of process requirements are shown in Table 1.

[0093] Table 1. Identification of Factors Affecting Process Requirements

[0094] Serial Number Key Indicators Indicator Function Influencing factors 1 cleanliness Used to check whether a cleanroom has reached the required cleanliness level. Air conditioning and decoration 2 Temperature and relative humidity Used to check whether the air conditioning system can maintain a specified range. air conditioner 3 Illuminance and wavelength Used to check whether the illuminance and wavelength meet the requirements. Electrical and Decoration 4 AMC (airborne molecular contamination) test Used to check the content of specified chemicals in the air. Air conditioning and ultrapure water 5 wind speed Used to check if the airflow velocity of the filter meets the requirements. air conditioner 6 air volume Used to check whether the air volume in a cleanroom meets design requirements. ventilation 7 pressure difference Used to determine whether the pressure gradient in a cleanroom meets the requirements. Air conditioning and ventilation 8 airflow parallelism Used to check whether the airflow parallelism in a cleanroom meets the requirements. ventilation 9 noise Used to measure whether the noise level in a cleanroom meets the requirements. Air conditioning and ventilation 10 floor resistance value Used to check whether the system's grounding value meets the requirements. decorate 11 Self-cleaning time Used to detect the recovery time of the system air conditioner

[0095] The general cleanroom phase, as described above, can be further divided into the routine construction phase and the primary cleanroom phase, depending on the different control requirements.

[0096] The conventional construction phase mainly involves completing the civil engineering work that may generate a lot of dust or residue, including the main building structure, brick wall enclosure, and ground pouring, namely the main building structure construction, ground base construction, and epoxy spraying of the beam bottom; the completion of the conventional construction phase is marked by the fact that the building has been basically enclosed.

[0097] The initial cleanroom stage mainly involves completing and inspecting the electromechanical installations, such as water, electricity, and air ducts, within the technical mezzanine. This is followed by the installation of decorative elements, including cleanroom wall panels, doors, windows, and epoxy flooring. Specifically, this includes the installation of electrical cable trays, smoke exhaust ducts, fire sprinklers, air conditioning water pipes, cleanroom wall panels, and epoxy flooring. The completion of the initial cleanroom stage is marked by the completion of the epoxy flooring and the establishment of a buffer zone, indicating that the cleanroom has been initially formed and access to the cleanroom begins to be restricted.

[0098] The main building structure construction, ground base construction, epoxy spraying of beam bottoms, installation of power cable trays, installation of smoke exhaust ducts, installation of fire sprinklers, installation of air conditioning water pipes, and epoxy flooring construction all adopted conventional construction processes, which will not be described in detail here.

[0099] The key points for installation process control of the aforementioned cleanroom panel wall installation include:

[0100] 1. Unified reference points: By unifying the installation starting points of cleanroom wall panels, raised floors, and cleanroom ceilings, the joints of cleanroom wall panels, raised floors, and FFU keels are controlled to be flush, improving the overall visual quality of the cleanroom while enhancing its sealing performance.

[0101] 2. Select the layout sequence: The cleanroom wall system includes inner wall panels 3 and outer wall panels 4. After verifying that the ground elevation error meets the requirements, first lay out the outer perimeter partition wall line of the cleanroom, and use a theodolite to check the straightness of this line. Then, use this as a reference to lay out the inner wall axis. According to the marked inner wall axis line, fix the aluminum groove 2 with plastic expansion bolts 1. (See attached...) Figure 2 As shown. Preferably, the plastic expansion bolts 1 are spaced 400-500mm apart and arranged in a quincunx pattern.

[0102] 3. Installation Control Points: Interior wall panel 3 can be made of color steel plate. The connection of interior wall panel 3 adopts a tongue-and-groove type, starting from one fixed point and splicing each panel one by one. (See attached...) Figure 2 As shown, one side of the inner wall panel 3 has a tongue-and-groove protrusion 31, and the other side of the inner wall panel 3 has a tongue-and-groove recess 32. The tongue-and-groove protrusion 31 can be fitted into the tongue-and-groove recess 32, allowing two adjacent inner wall panels 3 to be joined planarly. The lower end of the inner wall panel 3 is inserted into the aluminum groove 2. At the corner of the inner wall, the corner side of the inner wall panel 3 is cut into a 45° bevel, allowing two vertically connected inner wall panels 3 to be joined vertically through the 45° bevel.

[0103] The exterior wall panel 4 can be made of composite color steel plate. The connection of the exterior wall panel 4 uses a tongue-and-groove joint system, starting from a single fixed point and splicing piece by piece. The splicing method of the exterior wall panel 4 is the same as that of the interior wall panel 3, and will not be repeated here. (See attached image) Figure 3 As shown, at the corner of the exterior wall, the inner sides of two vertically connected exterior wall panels 4 are joined together, and the outer sides of the two vertically connected exterior wall panels 4 are connected by a corner arc 5 made of aluminum alloy.

[0104] When installing interior wall panels 3 and exterior wall panels 4, ensure they are vertically and horizontally aligned. The gap between panels should be less than 0.5mm. Fill the joints with a special polystyrene resin foam (this foam is neutral and has low volatile content) until fully filled to ensure tightness. For minor scratches and dents, apply putty first, then spray with the original factory paint. The removal of the protective film and application of adhesive to cleanroom wall panels should be done after entering the very clean or super clean stage.

[0105] 4. Detailed joint construction: The joints between the cleanroom wall panel and the raised floor (ground), and between the cleanroom wall panel and the ceiling panel, shall be connected with r=55mm rounded aluminum material. At the three-sided joints, special three-dimensional rounded corners shall be used to ensure airtightness, aesthetic appearance, and prevent dust accumulation.

[0106] For details, see attached. Figure 4 As shown, the bottom of the exterior wall panel 4 is connected to the raised floor 6 by an aluminum alloy ground arc corner 7, which covers the ground groove aluminum 2. (See attached diagram) Figure 5 As shown, the upper end of the exterior wall panel 4 is connected to the bottom surface of the ceiling panel 8 through the upper groove 10. The top of the exterior wall panel 4 and the ceiling panel 8 are connected by an aluminum alloy ceiling arc corner 9. A support reinforcement part 11 is provided between the ceiling arc corner 9, the exterior wall panel 4 and the ceiling panel 8.

[0107] Preferably, the arc dimensions of the ground arc angle 7 and the ceiling arc angle 9 are r=55mm.

[0108] In the ultra-clean phase, the construction quality is crucial to the success of the cleanroom construction. The installation of cleanroom ducts, raised floors, cleanroom ceilings, and DCC purification equipment in this phase has its own unique characteristics compared to conventional projects. The key control points for each task are as follows:

[0109] (I) Cleanroom Duct Fabrication and Installation Process

[0110] 1. The clean air ducts and their components are made of high-quality galvanized steel sheets. The zinc coating of the galvanized steel sheets is grade 100 or higher, and the average value of the three-point test on both sides is not less than 100g / ㎡. Galvanized steel sheets with large areas of white spots on the surface or powdering of the coating are strictly prohibited from use.

[0111] 2. When fabricating cleanroom ducts on-site, set up rainproof canopies or barriers in advance and keep the site clean. The processing site should be covered with rigid rubber and plastic boards. Before the cleanroom ducts are laid, the oil stains on the surface of the boards should be cleaned. During the cleaning process, a professional engineer should supervise the process to ensure that the oil stains on the surface of the boards are completely removed.

[0112] 3. The joints of clean air ducts shall be mechanically joined. Sealant must be applied to the joints, rivet joints, and the four corners of the flange.

[0113] 4. After the bite joint is completed, wipe the bite joint area with a new bleached cloth to prevent oil stains from accumulating.

[0114] 5. After the clean air duct sheets are assembled and formed, they are riveted to the duct flanges. The spacing of the bolts and rivet holes on the duct flanges should meet the specifications. After riveting, gaps or holes are filled by applying glue or soldering. For clean air ducts that require reinforcement, the reinforcing ribs are placed on the outer surface of the clean air duct.

[0115] During the fabrication of cleanroom ducts, the reliability of the air conditioning system installation quality is ensured by controlling the thickness of the galvanized layer, flange spacing, seam size, cleaning procedures, and key points of purification equipment installation.

[0116] 6. After the clean air duct is manufactured, wipe it inside and out with a diluted neutral detergent, then wipe it again with a neutral detergent. Finally, clean the clean air duct a second time with clean water. Wipe the inner wall with a silk cloth until there is no dirt. This is considered to meet the cleanliness requirements. Then seal the ends of the clean air duct and store it in a clean room to avoid dust accumulation, moisture and deformation.

[0117] 7. Locate and measure the route of the cleanroom duct to be installed, and install the necessary hangers, brackets, and supports in advance. The duct flange gaskets should be made of dust-free, non-aging, airtight, and elastic materials, with a thickness of 5-8mm. At the same time, the connection between the cleanroom duct and the support should use galvanized iron sheet overlap insulation transition or plastic pipe support transition. If wooden supports are used, they must be soaked in hot asphalt for at least 8 hours and wrapped with zebra tape before use.

[0118] 8. After the clean air duct is installed, wipe and clean the inside of the clean air duct again with a diluted neutral cleaning agent to prevent dust from accumulating inside the clean air duct during construction and to prevent the cleanliness of the clean room from being affected when positive pressure air supply is used.

[0119] (II) Elevated floor installation process

[0120] 1. By standardizing reference points, the seams of the raised floor are made flush with the seams of the cleanroom wall panels, thereby improving the aesthetic quality and sealing performance of the cleanroom.

[0121] 2. By adjusting the arrangement ratio of perforated plates and blind plates in the raised floor, the opening rate of the cleanroom can meet the ventilation requirements, while avoiding dead corners in airflow organization.

[0122] 3. Mark the ground division lines of the raised floor and pop up the horizontal control lines on the wall. Check whether the support components conflict with the process pipelines. If there is a conflict, adjustments need to be made. Apply adhesive (preferably epoxy resin) to the support rod base of the raised floor.

[0123] 4. Adjust the height of the support feet of the raised floor by pulling horizontal and vertical alignment lines, and level each point with a level. Then, use threaded rods and threaded sleeves to raise or lower the leveling operation to achieve the design elevation requirements. After that, add a leveling nut and a leveling nut with anti-vibration displacement to the threaded rod (or aluminum column) to ensure the consistency and stability of the support foot height.

[0124] 5. Before installing the decorative panels of the raised floor, draw lines around the perimeter of the panel assembly to ensure a proper fit. The gap between the panel and the vertical surface of the clean wall panel should not exceed 3mm. Clean the panels, supports, and other areas that will be concealed during installation.

[0125] 6. After the raised floor is laid, use a vacuum cleaner to thoroughly clean it. After it passes inspection, first cover it with a thin film, and then cover it tightly with a hard plastic sheet to prevent dust accumulation and damage during construction.

[0126] (III) Cleanroom Ceiling Installation Process

[0127] 1. Based on the completed cleanroom wall panel, establish the ceiling baseline. The ceiling threaded rods should be arranged uniformly according to the threaded rods of the electromechanical pipelines to ensure that the overall layout direction of the ceiling threaded rods is in the same direction as the threaded rods of the electromechanical pipelines, so as to facilitate the later installation of FFUs (the FFU installation must ensure that there are no obstacles on one side).

[0128] 2. Calculate the length of the ceiling rod based on the floor height, cut and process it, and then pre-assemble the processed rod with accessories such as square adjusters to form the ceiling hanger.

[0129] 3. The spacing between the hangers is less than 1.5m, and the distance between the hanger and the end of the main keel of the ceiling is no more than 300mm. At the same time, the square adjuster on the hanger is set at more than 500mm to facilitate later adjustment and balance. The hangers are installed over a large area according to their position. The hangers are fixed to the T-shaped keel of the main keel by flange anti-slip nuts.

[0130] 4. The fixing and hanging parts of the ceiling should be connected to the main structure of the building. When there is no load-bearing point above, C-shaped steel conversion parts should be installed. The installation direction of the conversion parts should ensure that the net height of the FFU installation is more than 500mm.

[0131] 5. When prefabricating the ceiling joists, the protective film should not be removed first. Use hexagonal screws to tighten them. The pre-assembled area should be controlled within 2.4 meters * 2.4 meters to facilitate installation.

[0132] 6. Hoist the prefabricated ceiling keel onto the pre-assembled T-bolts on the hanger rods. Offset the square adjuster from the center of the cross joint by more than 15 cm, and tighten the T-bolts and the flange anti-slip nuts.

[0133] 7. After the keel construction is completed in one area, use a laser level and receiver to adjust the keel level. The level difference shall not be higher than the ceiling elevation by 2mm or lower than the ceiling elevation.

[0134] 8. After the ceiling joists are completed, blind panels and FFUs are installed in each partition room according to the arrangement of FFU blind panels and FFU fans in the room.

[0135] When installing cleanroom wall panels, raised floors, and cleanroom ceilings, the reliability of the professional installation quality is ensured by controlling the reference points, joint spacing, installation sequence, and the details of the corners of the inner wall panel 3 and the outer wall panel 4, the ground connection nodes, and the ceiling connection nodes.

[0136] (iv) Installation of DCC purification equipment

[0137] 1. The total air volume of the MAU (Make-up Air Unit), the face velocity of the dry cooling coil, the filter efficiency, and the parameters of the humidifier should be carefully reviewed, as deviations in these parameters will affect the humidity and positive pressure control of the cleanroom.

[0138] 2. The foundation of the MAU equipment is sealed with epoxy coating.

[0139] 3. Before operating the MAU, the high-efficiency, medium-efficiency, and pre-filters inside the equipment should be removed, and non-woven fabric should be laid down for temporary coarse filtration.

[0140] 4. Before the MAU is put into operation, wipe it clean with alcohol, and at the same time, use the fins to straighten any scratches on the coil fins.

[0141] 5. After the DCC is installed, apply sealant to the edges to ensure that all return air passes through the DCC area for heat exchange and to prevent short-circuiting of return air at the DCC.

[0142] 6. Before installing DCC, carefully check the inlet and outlet water positions to ensure that the temperature difference for heat exchange meets the design requirements and avoid short-circuiting of air conditioning water.

[0143] 7. Before installing the FFU, a technical review of the installation clearance should be conducted. The minimum clearance should not be less than 500mm (considering only the HEPA filter + FFU fan; if a chemical filter needs to be added, the required clearance should be communicated to the manufacturer in advance).

[0144] 8. Before installing the FFU, the entire ceiling system should be leveled (the purpose of the first leveling is to ensure that the ceiling system meets the stress requirements). After installation, the ceiling should be leveled again (the purpose of the second leveling is to ensure that the entire ceiling system will not collapse and affect the aesthetics). It should be noted that the square adjuster should be installed above the FFU installation clearance for easy operation.

[0145] During the very clean phase, the installation of air showers, pass-through windows, cleanroom lighting fixtures, film removal and caulking, aluminum strip edge finishing, eyewash stations, positive pressure air supply, and FFUs are all carried out using conventional construction methods, which will not be elaborated here.

[0146] The ultra-clean phase mainly involves comprehensive cleaning of the cleanroom, installation of HEPA filters, and installation of process piping. The quality of the comprehensive cleaning of the cleanroom largely determines the service life of the HEPA filters. The main cleaning procedures for the cleanroom are as follows:

[0147] 1. Prepare cleaning tools such as lint-free cloths, special stain removers, and special mops, and prepare a cleaning solution using 90% deionized water and 10% isopropyl alcohol.

[0148] 2. Change into special anti-static clothing, wear a hat and mask, and enter the clean room after passing through the air shower for dust removal.

[0149] 3. Clean the ceiling with a damp cloth or adhesive roller, and clean the fasteners (frames) between the filters. Move the cloth, roller or vacuum cleaner in one straight direction.

[0150] 4. Use a mop, roller, or rag to wet clean clean walls, glass, and floors. They should be swept horizontally, overlapping each other, and moved from top to bottom. Special attention should be paid to switches, sockets, and signal devices when moving them.

[0151] 5. After the clean room is cleaned, clean the changing room, material airlock, and the furniture inside.

[0152] After the cleanroom has been thoroughly cleaned, the air conditioning system should be run continuously for at least 12 hours. Then, the cleanroom should be cleaned and wiped down again before the high-efficiency filter can be installed. Before installing the high-efficiency filter, an appearance inspection should be performed when the packaging is unpacked at the installation site. This includes checking whether the filter paper, sealant, frame, geometric dimensions, and smoothness meet the design requirements. Then, a leak test should be performed. If the inspection and leak test are passed, the filter should be installed immediately. Unqualified products must not be installed.

[0153] The high-efficiency filters and process pipelines are installed using conventional methods, which will not be described in detail here.

[0154] After the high-efficiency filter is installed and runs for 48 hours, the cleanliness of the cleanroom basically meets the requirements for the installation of process pipelines. At this time, the installation of ultrapure water, special gas, compressed air and vacuum pipelines can be carried out. After the process pipelines are installed, the construction of the entire cleanroom is completed.

[0155] The above are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the invention. Therefore, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for installing and constructing a high-tech cleanroom in a factory, characterized by: The entire construction process is divided into four stages: preparation stage, general clean stage, very clean stage, and super clean stage; The construction process in the preparation stage includes: drawing review → material preparation, drawing detailing and mechanical preparation → determining the detailed drawings of pipe network layout, ceiling layout, cleanroom panel layout, FFU layout, and raised floor layout. The general construction process for the cleanroom phase includes: main building structure construction → ground base construction and epoxy spraying of beam bottom → installation of power cable trays, smoke exhaust ducts, fire sprinklers, and air conditioning water pipes → cleanroom wall panel installation → epoxy flooring construction. The construction process for the very clean stage includes: clean air duct installation, clean ceiling installation, raised floor installation, DCC installation, air shower installation → pass-through window installation, clean lighting installation, film removal and caulking, aluminum strip edge finishing, eyewash station installation → positive pressure air supply → FFU installation. The construction process for the ultra-clean phase includes: HEPA filter installation → process pipeline installation.

2. The installation and construction method for a high-tech factory cleanroom according to claim 1, characterized in that: During the preparation phase: Material preparation: After the material requirements of each major are clarified, imported materials and domestic materials are categorized. Before purchasing materials, confirm the parameters and samples; Equipment preparation: Vacuum cleaners are standard equipment in cleanroom projects. After entering the general cleanroom stage, the construction site needs to be cleaned daily with vacuum cleaners. Detailed design: After completing the pipe layout, net height analysis, and ceiling layout, the installation position of the FFU equipment is verified by airflow organization simulation in combination with the installation status of process equipment to avoid unreasonable airflow organization, which may lead to substandard cleanliness. Identification of key indicators and influencing factors.

3. The installation and construction method for a high-tech factory cleanroom according to claim 1, characterized in that: The general cleanroom phase is divided into the routine construction phase and the primary cleanroom phase.

4. The installation and construction method for a high-tech factory cleanroom according to claim 3, characterized in that: The conventional construction phase mainly involves completing the civil engineering work that may generate a lot of dust or residue, including the main building structure, brick wall enclosure, and ground pouring, namely the main building structure construction, ground base construction, and epoxy spraying of the beam bottom. The completion of the conventional construction phase is marked by the building being essentially enclosed.

5. The installation and construction method for a high-tech factory cleanroom according to claim 3, characterized in that: The initial cleanroom stage mainly involves completing and accepting the electromechanical installation of water, electricity, and air ducts within the technical mezzanine. Subsequently, the construction of the decorative cleanroom wall panels, doors, windows, and epoxy flooring is carried out, including the installation of power cable trays, smoke exhaust ducts, fire sprinklers, air conditioning water pipes, cleanroom wall panels, and epoxy flooring. The completion of the initial cleanroom stage is marked by the completion of the epoxy flooring construction and the establishment of a buffer zone, indicating that the cleanroom has been initially formed and access to the cleanroom begins to be restricted.

6. The installation and construction method for a high-tech factory cleanroom according to claim 5, characterized in that: The key points for installation process control of the aforementioned cleanroom panel wall installation include: 1) Unified reference points: By unifying the installation starting points of cleanroom wall panels, raised floors and cleanroom ceilings, the joints of cleanroom wall panels, raised floors and FFU keels are controlled to be flush, which improves the overall visual quality of the cleanroom and enhances its sealing performance. 2) Select the layout sequence: Cleanroom wall panels include inner wall panels (3) and outer wall panels (4); After verifying that the ground elevation error meets the requirements, first lay out the outer protective partition wall line of the cleanroom, and use a theodolite to check the straightness of this line, and then lay out the inner wall axis based on this. According to the inner wall axis line, fix the ground groove aluminum (2) with plastic expansion rod screws (1). The spacing of the plastic expansion rod screws (1) is 400-500mm, and they are arranged in a quincunx pattern. 3) Installation control points: The connection of the inner wall panel (3) adopts the tongue and groove type. It is installed from a fixed point and spliced ​​piece by piece. One side of the inner wall panel (3) forms a tongue and groove protrusion (31), and the other side of the inner wall panel (3) forms a tongue and groove recess (32). The tongue and groove protrusion (31) can be matched and inserted into the tongue and groove recess (32) so that the two adjacent inner wall panels (3) are spliced ​​in plane. The lower end of the inner wall panel (3) is inserted into the ground groove aluminum (2). At the corner of the inner wall, the corner side of the inner wall panel (3) is cut into a 45° bevel so that the two vertically connected inner wall panels (3) are spliced ​​vertically through the 45° bevel. The connection of the exterior wall panel (4) adopts the tongue and groove type. It is installed from a fixed point and spliced ​​piece by piece. The splicing method of the exterior wall panel (4) is the same as that of the interior wall panel (3). At the corner of the exterior wall, the inner sides of the two vertically connected exterior wall panels (4) are connected together, and the outer sides of the two vertically connected exterior wall panels (4) are connected by the corner arc (5). When installing the interior wall panel (3) and the exterior wall panel (4), the panels should be vertical and horizontal, and the gap between the panels should be less than 0.5mm. The joints should be filled with special polystyrene resin foam until they are fully filled, so as to ensure the tightness of the joints. For minor scratches and pits, putty should be applied first, and then the original paint should be sprayed. The peeling and gluing of the clean wall panel should be carried out in the very clean stage or after entering the super clean stage. 4) Detailed node construction: The bottom of the exterior wall panel (4) is connected to the raised floor (6) through the ground arc corner (7), and the ground arc corner (7) is covered with the ground groove aluminum (2); the upper end of the exterior wall panel (4) is connected to the bottom surface of the ceiling panel (8) through the upper mounting groove (10), and the top of the exterior wall panel (4) is connected to the ceiling panel (8) through the ceiling arc corner (9). A supporting reinforcement part (11) is provided between the ceiling arc corner (9), the exterior wall panel (4) and the ceiling panel (8).

7. The installation and construction method for a high-tech factory cleanroom according to claim 1, characterized in that: in The aforementioned extremely clean stage: (I) Cleanroom Duct Fabrication and Installation Process 1) Clean air ducts and their components are made of galvanized steel sheets. The zinc coating of the galvanized steel sheets is above No. 100, and the average value of the three-point test on both sides is not less than 100g / ㎡. Galvanized steel sheets with large areas of white spots on the surface or powdering of the coating are strictly prohibited from use. 2) When the clean air duct is fabricated on site, a rainproof canopy or enclosure should be set up in advance and the site should be kept clean. The processing site should be covered with rigid rubber and plastic boards. Before the clean air duct is unloaded, the oil stains on the surface of the board should be cleaned. During the cleaning process, a professional engineer should supervise the process to ensure that the oil stains on the surface of the board are completely removed. 3) The joints of clean air ducts are mechanically joined, and sealant must be applied to the joints, rivet joints, and the four corners of the flange. 4) After the bite joint is completed, wipe the bite joint area with a new bleached cloth to prevent oil stains from accumulating; 5) After the clean air duct sheets are assembled and formed, they are riveted to the air duct flange. The spacing of the bolts and rivet holes of the air duct flange should meet the specifications. After riveting, the gaps or holes are filled by applying glue or soldering. For clean air ducts that need to be reinforced, the reinforcing ribs are placed on the outer surface of the clean air duct. 6) After the clean air duct is made, wipe it inside and out with a diluted neutral detergent, then wipe it with a neutral detergent, and finally clean the clean air duct a second time with clean water. Wipe the inner wall with a silk cloth until there is no dirt, then the cleanliness requirement is considered met. Seal the end of the clean air duct and store it in a clean room to avoid dust accumulation, moisture and deformation. 7) Locate and measure the route of the clean air duct to be installed, and install the hangers, brackets and supports to be erected in advance. The thickness of the duct flange gasket is 5~8mm. At the same time, the connection between the clean air duct and the support should be made of galvanized iron sheet overlap insulation transition or plastic pipe support transition. When using wooden supports, use wooden supports soaked in hot asphalt for more than 8 hours and wrap them with zebra tape before use. 8) After the clean air duct is installed, wipe and clean the inside of the clean air duct again with a diluted neutral cleaning agent to prevent dust from accumulating inside the clean air duct during construction and to prevent the cleanliness of the clean room from being affected when positive pressure air supply is used. (II) Elevated floor installation process 1) By unifying the reference points, the joints of the raised floor are made flush with the joints of the cleanroom wall panels, thereby improving the visual quality and sealing performance of the cleanroom. 2) By adjusting the arrangement ratio of perforated plates and blind plates in the raised floor, the opening rate of the clean room can meet the ventilation requirements, while avoiding dead corners in the airflow organization. 3) Mark out the floor division lines of the raised floor and pop out the horizontal control lines on the wall. Check whether the support components conflict with the process pipelines. If they do, they need to be adjusted. Apply adhesive to the base of the support rod of the raised floor. 4) Adjust the height of the support feet of the raised floor by pulling horizontal and vertical alignment lines, and level each point with a level. Then, use threaded rods and threaded sleeves to raise or lower the leveling operation. After reaching the design elevation requirements, add a leveling nut and a leveling nut with anti-vibration displacement to the threaded rod to ensure the consistency and stability of the support foot height. 5) Before installing the decorative panels of the raised floor, draw lines around the assembly of the panels to ensure they fit together. The gap between the panel and the vertical surface of the clean wall should not exceed 3mm. Clean the panels, supports, and other areas that will be concealed as you install. 6) After the raised floor is laid, use a vacuum cleaner to thoroughly clean it. After it passes the acceptance inspection, first cover it with a thin film, and then cover it tightly with a hard plastic sheet to prevent dust accumulation and damage during construction. (III) Cleanroom Ceiling Installation Process 1) Based on the completed cleanroom wall panel, establish the ceiling baseline. The ceiling screws are arranged uniformly according to the screws of the electromechanical pipelines to ensure that the overall layout direction of the ceiling screws is in the same direction as the screws of the electromechanical pipelines, so as to facilitate the later installation of FFUs. 2) Calculate the length of the ceiling screw according to the floor height, cut and process it, and then pre-assemble the screw that meets the requirements with accessories such as square adjusters to form the ceiling hanger. 3) The spacing between the hangers is less than 1.5m, and the distance between the hanger and the end of the main keel of the ceiling is no more than 300mm. At the same time, the square adjuster on the hanger is set at more than 500mm to facilitate later adjustment and balance. The hangers are installed over a large area according to their position. The hangers are fixed to the T-shaped keel of the main keel by flange anti-slip nuts. 4) The fixing and hanging parts of the ceiling should be connected to the main structure of the building. When there is no load-bearing point above, C-shaped steel conversion parts should be installed. The installation direction of the conversion parts should ensure that the net height of the FFU installation is more than 500mm. 5) When prefabricating the ceiling joists, the protective film should not be removed first. Use hexagonal screws to fasten them. The pre-assembled area should be controlled within 2.4 meters * 2.4 meters to facilitate installation. 6) Hoist the prefabricated ceiling keel as a whole onto the pre-assembled T-bolts on the hanger rods. Offset the square adjuster from the center of the cross joint by more than 15 cm, and tighten the T-bolts and the flange anti-slip nuts. 7) After the keel construction of a certain area, use a laser level and receiver to adjust the keel horizontally. The horizontal height difference shall not be higher than the ceiling elevation by 2mm, nor lower than the ceiling elevation. 8) After the ceiling joists are completed, install blind panels and FFUs in each partition room according to the arrangement of FFU blind panels and FFU fans in the room. (iv) Installation of DCC purification equipment 1) The total air volume of MAU, the face velocity of the dry cooling coil, the filter efficiency, and the parameters of the humidifier should be carefully checked, as deviations in these parameters will affect the humidity and positive pressure control of the cleanroom. 2) The foundation of the MAU equipment is sealed with epoxy coating; 3) Before operating the MAU, the high-efficiency, medium-efficiency, and pre-filters inside the equipment should be removed, and non-woven fabric should be laid down for temporary coarse filtration. 4) Before the MAU is put into operation, wipe it clean with alcohol, and at the same time, use the fins to straighten any scratches on the coil fins. 5) After the DCC is installed, seal the edges with adhesive to ensure that all return air passes through the DCC area for heat exchange and to prevent short-circuiting of return air at the DCC. 6) Before installing DCC, carefully check the inlet and outlet water positions to ensure that the temperature difference for heat exchange meets the design requirements and avoid short-flow of air conditioning water. 7) Before installing the FFU, a technical review of the installation clearance should be conducted, and the minimum clearance should not be less than 500mm; 8) The entire ceiling system should be leveled before FFU installation, and the ceiling should be leveled again after installation. The square adjuster should be installed above the FFU installation clearance.

8. The installation and construction method for a high-tech factory cleanroom according to claim 1, characterized in that: in The aforementioned super-clean stage: 1) Prepare cleaning tools such as lint-free cloths, special stain removers, and special mops, and prepare a cleaning solution with 90% deionized water and 10% isopropyl alcohol; 2) After changing into special anti-static clothing, wearing a hat and mask, and passing through the air shower to remove dust, enter the clean room; 3) Clean the ceiling with a damp cloth or adhesive roller, and clean the fasteners between the filters. Move the cloth, roller or vacuum cleaner in one straight direction. 4) Use a mop, roller, or rag to wet-clean clean walls, glass, and floors, overlapping each other in parallel motion, moving from top to bottom. Be careful of switches, sockets, and signal devices when moving. 5) After the clean room is cleaned, clean the changing room, material airlock and the furniture therein.

9. The installation and construction method for a high-tech factory cleanroom according to claim 8, characterized in that: After the clean room is thoroughly cleaned, the air conditioning system is turned on and run continuously for more than 12 hours. Then, the clean room is cleaned and wiped down before the high-efficiency filter is installed. Before installing a high-efficiency filter, perform a visual inspection when unpacking it at the installation site. This includes checking whether the filter paper, sealant, frame, geometric dimensions, and smoothness meet the design requirements. Then, perform a leak test. If the inspection and leak test are passed, install the filter immediately. Unqualified products must not be installed.

10. The installation and construction method for a high-tech factory cleanroom according to claim 9, characterized in that: After the high-efficiency filter is installed and runs for 48 hours, the cleanliness of the cleanroom meets the requirements for process pipeline installation. Then, the ultrapure water, special gas, compressed air and vacuum pipelines are installed. Once the process pipelines are installed, the entire cleanroom construction is complete.

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