X-ray detection equipment capable of detecting chips in all directions

Abstract

The invention relates to the field of x-ray detection of chips, particularly discloses x-ray detection equipment capable of detecting chips in all directions, and solves the problems that when the existing x-ray detection of chips is carried out, the chips are inconvenient to efficiently place in the middle for detection imaging, and detection dead angles possibly exist. The device comprises a base, an x-ray identification and analysis device, a bidirectional telescopic piece, a sliding frame, a conveying belt, a first telescopic piece, a supporting plate, a sliding way, a first sliding seat, a first sliding rod frame, a sliding plate, a first rotating plate, a second sliding rod frame, a push plate, a calibration assembly, a stabilizing assembly, a second sliding seat, a bearing seat, a rotating shaft and an x-ray detection device. And the deflection assembly is used for controlling the x-ray detection equipment to deflect when the x-ray detection equipment moves to the edge of the chip so as to ensure that the edge of the chip is effectively shot. According to the device, chips can be automatically placed in the middle, deflection and inclination imaging can be achieved, detection dead angles are avoided, and detection comprehensiveness and accuracy are improved.

Description

Technical Field

[0001] This invention relates to the field of x-ray inspection of chips, and in particular to an x-ray inspection device capable of inspecting chips from all angles. Background Technology

[0002] X-ray inspection of chips is a core inspection technology that uses X-rays to penetrate the chip's interior, achieving non-destructive imaging. The principle behind X-ray inspection lies in the fact that materials of different densities and thicknesses absorb X-rays differently when they penetrate an object. A detector captures the transmitted X-ray signal, converting it into a grayscale image that reveals details of the internal structure. Furthermore, it can be combined with existing image fusion algorithms to intelligently identify and automatically analyze internal chip defects.

[0003] However, existing X-ray inspections typically require manual placement of the chip at a designated location before imaging and analysis to determine the inspection result. This manual placement method is prone to positional errors. While automated chip placement devices exist, they may obstruct the view above the chip, preventing comprehensive chip inspection. Therefore, this paper proposes an X-ray inspection device capable of omnidirectional chip inspection. Summary of the Invention

[0004] To overcome the shortcomings of existing technologies, this invention proposes an x-ray inspection device that can inspect chips from all angles. It can automatically calibrate the position of the chip, improve the inspection accuracy, and at the same time ensure comprehensive and effective inspection of the chip, avoiding the formation of blind spots.

[0005] To solve the above-mentioned technical problems, the basic technical solution proposed by this invention is as follows: An X-ray inspection device capable of omnidirectional chip inspection includes a base, an X-ray identification and analysis device mounted on the rear side of the base, bidirectional telescopic components symmetrically mounted on both sides of the base, and a slide connected to the front and rear output ends of the bidirectional telescopic components on both sides. A conveyor belt is mounted on one side of the front and rear slides that are close to each other. The chip is placed on the two conveyor belts. A telescopic component is mounted on the base, and a tray is connected to the upper output end of the telescopic component, with the tray directly below the chip. Slide tracks are symmetrically opened on both sides of the tray, and a slide seat is slidably fitted in the slide tracks. A slide rod frame is symmetrically connected to the left and right sides of the lower end of the tray. A slide plate is slidably fitted on the outer side of the slide rod frame. Each slide plate is rotatably connected to a rotating plate on its respective side slide seat, and the two ends of the slide plate abut against the front and rear slides. A sliding rod bracket 2 is mounted through the sliding base 1. Push plates are connected to the sliding rod brackets 2 on both sides of the sliding base 1, with the sides closest to each other. A calibration component is mounted on the sliding base 1 for calibrating the chip on the support plate. A stabilizing component is also mounted on the push plate to stably press the chip onto the support plate. A sliding base 2 is mounted on the x-ray recognition and analysis device. A bearing seat is connected to the sliding base 2. A rotating shaft is rotatably mounted inside the bearing seat, and an x-ray detection device is installed below the rotating shaft. A deflection component is also mounted on the sliding base 2 to control the x-ray detection device to deflect when it moves to the edge of the chip, ensuring effective imaging of the chip edge.

[0006] Preferably, slide rails are installed on both the left and right sides of the base, and sliders are connected to both sides of the slide frame. The sliders are slidably disposed in the slide rails. The slide frame has a frame structure, and an abutment seat is connected to the upper inner wall of the slide frame. The lower end face of the abutment seat of the slide plate abuts against the slide.

[0007] Preferably, a spring is sleeved on the outside of the slide bar frame and connected between the lower end face of the slide plate and the lower end of the slide bar frame. The upper and lower ends of the slide block extend through the slide rail to the upper and lower sides of the tray, and the lower end of the slide block is rotatably connected to the turntable. The tray is located between the front and rear conveyor belts.

[0008] Preferably, the x-ray recognition and analysis device is equipped with a telescopic component two, the lower output end of the telescopic component two is connected to a y-axis guide rail, and an x-axis guide rail is slidably arranged on the lower side of the y-axis guide rail, and the upper end of the slide block two is slidably arranged inside the x-axis guide rail.

[0009] Preferably, the calibration assembly includes a rack, a cylinder, a lever, and a gear. The rack is connected to the front and rear ends of the left and right push plates on opposite sides, and extends through the slide block to opposite ends of the slide blocks. The cylinder is rotatably mounted on the front and rear sides of the slide block. The lever is connected to the outside of the cylinder. The gear is mounted on the outside of the cylinder and meshes with the extended end of the rack.

[0010] Preferably, the slide block one has an L-shaped cross-section, and the slide rod frame two slides through the upper end of the L-shaped slide block one. The push plates on the left and right sides are connected to the upper end of the L-shaped slide block one by a spring two sleeved on the outside of the slide rod frame two. The upper end of the L-shaped slide block one has through holes on both the front and rear sides. The rack one extends through the through holes to the upper end of the L-shaped slide block one on the left and right sides, which are far apart from each other. The rack one on the front and rear sides is located on the side where the front and rear gears one are close to each other, and the side where the front and rear racks one are far apart from each other is meshed with the front and rear gears one.

[0011] Preferably, the stabilizing component includes an opening, a flap, a limiting seat, and an inclined block. The opening is formed on the push plate. The flap is centrally mounted on the inner wall of the opening via a spring hinge. The limiting seat is connected to the two push plates on opposite sides and is inclined to limit the flap. The flaps on both sides are connected to an inclined block at one end close to each other, and the inclined block is located above the rotation center of the two flaps.

[0012] Preferably, the deflection assembly includes a guide rod, a top plate, a collar seat, a rack, and a gear. The guide rod is arranged parallel to each other and connected to the front and rear sides of the lower end of the slide block. The top plate is arranged symmetrically on the left and right sides and is symmetrically slidably sleeved on the left and right ends of the guide rod. The collar seat is centrally connected to the lower side of the slide block and sleeved on the outside of the guide rod. The top plates on both sides are close to each other and connected to the collar seat with springs on the outside of the guide rod. The two ends of the rack are connected to the top plates on both sides close to each other. The gear is sleeved on the outside of the rotating shaft and meshes with the rack above it.

[0013] Preferably, a sliding frame is slidably sleeved on the bearing housing, and a U-shaped sleeve is connected to the lower end of the sliding frame. The lower end of the U-shaped sleeve is fitted and limited to the outer side of the x-ray detection equipment.

[0014] Preferably, guide rods two are connected to both the left and right sides of the bearing seat, and the two sides of the sliding frame are slidably sleeved on the outside of the guide rods two. A spring four sleeved on the outside of the guide rods two is connected to the upper end of the sliding frame and the guide rods two.

[0015] The beneficial effects of this invention are: 1. The technical solution of the present invention uses front and rear conveyor belts to transport the chip to the underside of the X-ray inspection equipment. Then, the telescopic component is controlled to extend and push the tray upward, thereby supporting the chip and lifting it above the front and rear conveyor belts. During the process, when the front and rear sides of the slide plate come into contact with the lower end face of the contact seat, the slide plate will move downward relative to the slide rod frame and the tray, and drive the two side rotating plates to rotate, pulling the two side slides closer to each other. This allows the push plate on the side where the two side slides are close to each other to come into contact with the left and right sides of the chip, thereby driving the chip to gradually slide to the left and right center and be clamped by the left and right side push plates, so as to realize the automatic left and right centering calibration of the chip, so as to facilitate the automatic left and right centering placement, improve the detection efficiency and accuracy. 2. The technical solution of the present invention involves pulling the left and right slide blocks one closer and closer to each other. When the push plate contacts the left and right sides of the chip, the continued close contact of the two slide blocks one will cause the push plates to slide relative to the slide blocks one and compress the spring two. At this time, the slide blocks one will be completely above the front and rear slides and push the rack one to slide, so as to drive the gear one meshing with the rack one to rotate. This will cause the front and rear push plates above the slides to rotate symmetrically to the front and rear sides of the chip until the chip is pushed to the center position of the front and rear sides, so as to realize the centering of the chip. During the process, the push plate will keep the chip in a limited position, thereby realizing the automatic centering of the chip. At the same time, through the contact between the chip and the lower end of the flip plate, the inclined block connected to the upper end of the flip plate will gradually rotate to the top of the chip to limit the chip. This ensures that the chip will not move when the push plate slides relative to the slide block one and compresses the spring two, thereby improving the stability and reliability of the centering and ensuring detection efficiency and accuracy. 3. The technical solution of the present invention, through the control of the telescopic component two, the y-axis guide rail and the x-axis guide rail, can adjust the position of the x-ray inspection device to control its movement above the chip supported by the tray, and image the chip according to the set path. During the process, when the x-ray inspection device moves to the edge of the chip, the top plate on the slide block two will abut against the push plate, and push the top plates on both sides and the rack two to slide to the other side. During the process, the gear two will rotate, thereby causing the rotating shaft and the x-ray inspection device to deflect closer to the push plate on this side, so as to achieve tilted imaging of the chip edge, avoid the formation of imaging blind spots, and improve the comprehensiveness of the inspection. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a cross-sectional view of the structure of the present invention; Figure 3 This is a schematic diagram of the relevant structures on the base of the present invention; Figure 4 This is a schematic diagram of the structure between the front and rear side carriages of the present invention; Figure 5 This is a schematic diagram of the relevant structures on the telescopic component of the present invention; Figure 6 This is a schematic diagram of the relevant structures on the slide block of the present invention; Figure 7 This is a cross-sectional view of the relevant structure on the slide block of the present invention; Figure 8 This is a schematic diagram of the relevant structures on the second telescopic component of the present invention; Figure 9 This is a schematic diagram of the relevant structures on the slide block two of the present invention; Figure 10 This is a cross-sectional view of the relevant structure on the slide block 2 of the present invention.

[0017] Explanation of reference numerals in the attached figures: 1. Base; 2. X-ray identification and analysis equipment; 3. Slide rail; 4. Bidirectional telescopic component; 5. Carriage; 6. Slider; 7. Conveyor belt; 8. Chip; 9. Telescopic component one; 10. Support plate; 11. Slide track; 12. Slide seat one; 13. Slide rod frame one; 14. Slide plate; 15. Turning plate one; 16. Spring one; 17. Abutment seat; 18. Slide rod frame two; 19. Push plate; 20. Spring two; 21. Through hole; 22. Rack one; 23. Shaft cylinder; 24. Pulley plate 25. Gear 1; 26. Opening; 27. Flip plate; 28. Limiting seat; 29. ​​Inclined block; 30. Telescopic component 2; 31. Y-axis guide rail; 32. X-axis guide rail; 33. Slide 2; 34. Guide rod 1; 35. Top plate; 36. Collar seat; 37. Spring 3; 38. Rack 2; 39. Bearing seat; 40. Rotating shaft; 41. X-ray inspection equipment; 42. Gear 2; 43. Guide rod 2; 44. Sliding frame; 45. U-shaped sleeve; 46. Spring 4. Detailed Implementation

[0018] The following will be combined with the appendix Figure 1 To be continued Figure 10 The technical solutions in the embodiments of the present invention have been clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0019] Example 1: like Figures 1-10 As shown, this invention discloses an x-ray detection device capable of omnidirectional chip detection, including a base 1, an x-ray identification and analysis device 2 installed on the rear side of the base 1, bidirectional telescopic members 4 symmetrically installed on both sides of the base 1, the front and rear output ends of the bidirectional telescopic members 4 on both sides are respectively connected to a slide 5, and a conveyor belt 7 is installed on the side of the front and rear slides 5 close to each other, and the chip 8 is placed on the two conveyor belts 7. The invention is characterized in that a telescopic member 9 is installed on the base 1, and a support plate 10 is connected to the upper output end of the telescopic member 9, and the support plate 10 is directly below the chip 8. Slide tracks 11 are symmetrically opened on both sides of the support plate 10, and a slide seat 12 is slidably fitted in the slide track 11. A slide rod frame 13 is symmetrically connected to the left and right sides of the lower end of the support plate 10. A slide plate 14 is slidably fitted on the outer side of the slide rod frame 13. Each slide plate 14 is rotatably connected to a rotating plate 15 between itself and its respective slide seat 12, and the two ends of the slide plate 14 cooperate and abut against the front and rear slides 5. A sliding bracket 18 is mounted on a sliding base 12. Push plates 19 are connected to the sliding brackets 18 on both sides of the sliding base 12, with the two sides close to each other. A calibration component is mounted on the sliding base 12 to calibrate the chip 8 on the support plate 10. A stabilizing component is also mounted on the push plate 19 to stably press the chip 8 onto the support plate 10. A sliding base 33 is mounted on the x-ray recognition and analysis device 2. A bearing seat 39 is connected to the sliding base 33. A rotating shaft 40 is rotatably mounted inside the bearing seat 39, and an x-ray detection device 41 is installed below the rotating shaft 40. A deflection component is also mounted on the sliding base 33 to control the x-ray detection device 41 to deflect when it moves to the edge of the chip 8, ensuring effective imaging of the chip 8's edge.

[0020] Among them, the x-ray inspection device 41 is an existing device capable of X-ray penetration and imaging of the chip 8, while the x-ray recognition and analysis device 2 is an existing device capable of recognizing and analyzing the image after X-ray penetration and imaging, so as to perform automated and intelligent inspection of the chip 8.

[0021] The base 1 has slide rails 3 installed on both the left and right sides, and sliders 6 are connected to both sides of the slide 5. The sliders 6 are slidably set in the slide rails 3. The slide 5 has a frame structure, and the upper inner wall of the slide 5 is connected to the abutment seat 17. The lower end face of the abutment seat 17 of the slide plate 14 abuts against it. The sliding of the slider 6 on the slide 5 in the slide rails 3 can ensure the stability of the slide 5 when the bidirectional telescopic component 4 is adjusted to extend and retract to adjust the distance between the front and rear slides 5.

[0022] A spring 16 is sleeved on the outside of the slide bar frame 13 and connected between the lower end of the slide plate 14 and the lower end of the slide bar frame 13. The upper and lower ends of the slide block 12 extend through the slide rail 11 to the upper and lower sides of the support plate 10, and the lower end of the slide block 12 is rotatably connected to the turntable 15. The support plate 10 is located between the front and rear conveyor belts 7, so that the slide block 12 can slide stably in the slide rail 11 on the support plate 10.

[0023] The x-ray recognition and analysis device 2 is equipped with a telescopic component 30. The lower output end of the telescopic component 30 is connected to a y-axis guide rail 31, and an x-axis guide rail 32 is slidably arranged on the lower side of the y-axis guide rail 31. The upper end of the slide block 33 is slidably arranged inside the x-axis guide rail 32.

[0024] Among them, the bidirectional telescopic component 4, telescopic component one 9, and telescopic component two 30 all adopt existing mature electric hydraulic rods, electric cylinders, or electric hydraulic cylinders, while the y-axis guide rail 31 and the x-axis guide rail 32 adopt existing electric lead screw guide rails, electric roller guide rails, etc. In this way, the position adjustment of the x-ray detection device 41 can be achieved by controlling the telescopic component two 30, the y-axis guide rail 31, and the x-axis guide rail 32, so as to control it to image the chip 8 according to the specified path.

[0025] Example 2: like Figures 1-10 As shown, the present invention discloses an x-ray inspection device that can inspect chips from all directions. Compared with Embodiment 1, this embodiment discloses the structure of the calibration component.

[0026] The calibration assembly includes a rack 22, a cylinder 23, a lever 24, and a gear 25. The rack 22 is connected to the front and rear ends of the left and right push plates 19 on opposite sides and passes through the slide block 12, extending to the opposite ends of the slide blocks 12 on both sides. The cylinder 23 is rotatably mounted on the front and rear sides of the slide block 12. The lever 24 is connected to the outside of the cylinder 23. The gear 25 is mounted on the outside of the cylinder 23 and meshes with the extended end of the rack 22.

[0027] The control system allows the front and rear conveyor belts 7 to transport the chip 8 to the underside of the x-ray inspection device 41. Then, the control system extends the telescopic component 9 to push the tray 10 upward, thereby supporting the chip 8 and lifting it above the front and rear conveyor belts 7. During this process, when the front and rear sides of the slide plate 14 move upward and come into contact with the lower end face of the contact seat 17 on the slide 5, the slide plate 14 will move downward relative to the slide rod frame 13 and the tray 10, and drive the two side rotating plates 15 to rotate, pulling the two side slide seats 12 closer to each other. The push plate 19 on the side where the two side slide seats 12 are close to each other can fit and contact the left and right sides of the chip 8, thereby driving the chip 8 to gradually slide to the left and right center and be clamped by the left and right side push plates 19, so as to realize the automatic left and right centering calibration of the chip 8, so as to facilitate the automatic left and right centering placement, improve the inspection efficiency and accuracy. Pulling the left and right slide blocks 12 closer together, and when the push plate 19 comes into contact with the left and right sides of the chip 8, the continued close movement of the two slide blocks 12 will cause the push plate 19 to move the slide rod bracket 18 relative to the slide block 12 and compress the spring 20. At this time, the slide block 12 will be completely above the front and rear slide brackets 5 and push the rack 22 to slide, so that the gear 25 meshing with the rack 22 will rotate. This will cause the front and rear levers 24, which are above the slide brackets 5, to rotate symmetrically to the front and rear sides of the chip 8 until the chip 8 is in the center position, so as to realize the centering of the chip 8. During the process, the push plate 19 will keep the chip 8 in the limit position, thereby realizing the automatic centering of the chip.

[0028] The slide block 12 has an L-shaped cross section. The slide rod bracket 18 slides through the upper end of the L-shaped slide block 12. The push plates 19 on the left and right sides are connected to the upper end of the L-shaped slide block 12 by a spring 20 sleeved on the outside of the slide rod bracket 18. The upper end of the L-shaped slide block 12 has through holes 21 on both the front and rear sides. The rack 22 extends through the through holes 21 to the upper ends of the L-shaped slide block 12 on the left and right sides, which are far apart from each other. The racks 22 on the front and rear sides are close to the front and rear gears 23 on the front and rear sides, and the racks 22 on the front and rear sides are meshed with the front and rear gears 23 on the side far apart from each other.

[0029] The L-shaped design of the slide block 12 facilitates the sliding sleeve of the slide rod bracket 28 and also facilitates the installation of components such as the shaft cylinder 23.

[0030] Example 3: like Figures 1-10 As shown, the present invention discloses an x-ray inspection device that can detect chips from all directions. Compared with Embodiment 2, this embodiment discloses the structure of the stabilizing component.

[0031] The stabilizing component includes an opening 26, a flap 27, a limiting seat 28, and a wedge 29. The opening 26 is opened on the push plate 19. The flap 27 is centrally mounted on the front and rear inner walls of the opening 26 via spring hinges. The limiting seat 28 is connected to the two push plates 19 on opposite sides and is tilted and limited with the flap 27. The two flaps 27 on opposite sides are connected to the wedge 29 at one end, and the wedge 29 is located above the rotation center of the two flaps 27.

[0032] When chip 8 contacts push plate 19, causing push plate 19 and slide rod bracket 2 18 to slide on slide base 12, chip 8 will also contact the lower end of flip plate 27 in opening 26 of push plate 19. The contact flip plate 27 rotates and gradually rotates the inclined block 29 connected to the upper end of flip plate 27 to the top of chip 8 to limit the chip. This ensures that when push plate 19 slides relative to slide base 12 and compresses spring 20, chip 8 will not move, thus improving the stability and reliability of the centered placement, while ensuring detection efficiency and accuracy.

[0033] Example 4: like Figures 1-10 As shown, the present invention discloses an x-ray inspection device that can inspect chips from all directions. Compared with Embodiment 3, this embodiment discloses the structure of the deflection component.

[0034] The deflection assembly includes a guide rod 34, a top plate 35, a collar seat 36, a rack 38, and a gear 42. The guide rod 34 is arranged parallel to each other and is connected to the front and rear sides of the lower end of the slide 33. The top plate 35 is arranged symmetrically on the left and right sides and is symmetrically slidably sleeved on the left and right ends of the guide rod 34. The collar seat 36 is centrally connected to the lower side of the slide 33 and is sleeved on the outside of the guide rod 34. The top plates 35 on both sides are close to each other and connected to the collar seat 26. Springs 37 are sleeved on the outside of the guide rod 34. The two ends of the rack 38 are connected to the two top plates 35 on both sides close to each other. The gear 42 is sleeved on the outside of the rotating shaft 40 and meshes with the rack 38 above it.

[0035] The control of the telescopic component 30, the Y-axis guide rail 31, and the X-axis guide rail 32 allows adjustment of the position of the X-ray inspection device 41, enabling it to move above the chip 8 supported by the support plate 10 and image the chip 8 according to the set path. During the process, when the X-ray inspection device 41 moves to the edge of the chip 8, the top plate 35 on the slide block 33 will abut against the push plate 19, pushing the top plates 35 on both sides and the rack 38 to slide to the other side. In the process, the gear 42 rotates, causing the rotating shaft 40 and the X-ray inspection device 41 to deflect closer to the push plate 19 on this side, so as to achieve tilted imaging of the edge of the chip 8, avoid the formation of imaging blind spots, and improve the comprehensiveness of the inspection.

[0036] A sliding frame 44 is slidably fitted on the bearing housing 39, and a U-shaped sleeve 45 is connected to the lower end of the sliding frame 44. The lower end of the U-shaped sleeve 45 is fitted and limited to the outer side of the x-ray inspection device 41. Guide rods 43 are connected to both sides of the bearing housing 39. The two sides of the sliding frame 44 are slidably fitted to the outer side of the guide rods 43. Springs 46 are connected to the upper ends of the sliding frame 44 and the guide rods 43 and are fitted to the outer side of the guide rods 43. This design can ensure that the U-shaped sleeve 45 can be stably fitted to the outer side of the x-ray inspection device 41 and limited when the top plate 35 and the push plate 19 do not collide. This prevents the x-ray inspection device 41 from shaking due to inertia or other factors when adjusting its position, which would affect imaging.

[0037] Based on the disclosure and teachings of the foregoing specification, those skilled in the art can make changes and modifications to the above embodiments. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and changes to the present invention should also fall within the protection scope of the claims of the present invention. Furthermore, although some specific terms are used in this specification, these terms are only for convenience of explanation and do not constitute any limitation on the present invention.

Claims

1. An X-ray inspection device capable of omnidirectional chip inspection, comprising a base (1), an X-ray identification and analysis device (2) mounted on the rear side of the base (1), bidirectional telescopic components (4) symmetrically mounted on both sides of the base (1), the front and rear output ends of the bidirectional telescopic components (4) on both sides being connected to a slide (5), and a conveyor belt (7) mounted on one side of the front and rear slides (5) close to each other, the chip (8) being placed on the two conveyor belts (7), characterized in that, The base (1) is equipped with a telescopic component (9), and the upper output end of the telescopic component (9) is connected to a tray (10). The tray (10) is located directly below the chip (8). The tray (10) has symmetrically opened slide rails (11) on both sides, and a slide seat (12) is slidably fitted inside the slide rails (11). The lower left and right sides of the tray (10) are symmetrically connected to a slide rod frame (13). The slide rod frame (13) is slidably fitted with a slide plate (14) on the outside. Each slide plate (14) is rotatably connected to a rotating plate (15) between itself and its respective slide seat (12). The two ends of the slide plate (14) are in contact with the front and rear side slide frames (5). A sliding rod bracket (18) is provided through the sliding base (12). The sliding rod brackets (18) on both sides are connected to push plates (19) on the side of the sliding base (12) that are close to each other. A calibration component is provided on the sliding base (12) for calibrating the chip (8) on the support plate (10). A stabilizing component is also provided on the push plate (19) for stabilizing the chip (8) on the support plate (10). The x-ray identification and analysis device (… 2) A slide block two (33) is provided on the slide block two (33), and a bearing seat (39) is connected on the slide block two (33). A rotating shaft (40) is rotatably fitted inside the bearing seat (39), and an x-ray detection device (41) is installed below the rotating shaft (40). A deflection component is also provided on the slide block two (33). The deflection component is used to control the x-ray detection device (41) to deflect when the x-ray detection device (41) moves to the edge of the chip (8) so as to ensure effective imaging of the edge of the chip (8).

2. The x-ray inspection device for omnidirectional chip inspection according to claim 1, characterized in that, The base (1) is equipped with slide rails (3) on both the left and right sides. The slide frame (5) is connected to sliders (6) on both sides. The sliders (6) are slidably arranged in the slide rails (3). The slide frame (5) is a frame structure, and the upper inner wall of the slide frame (5) is connected to abutment seats (17). The lower end face of the abutment seats (17) of the slide plate (14) abuts against each other.

3. The x-ray inspection device for omnidirectional chip inspection according to claim 1, characterized in that, A spring (16) sleeved on the outside of the slide bar frame (13) is connected between the lower end face of the slide plate (14) and the lower end of the slide bar frame (13). The upper and lower ends of the slide seat (12) extend through the slide rail (11) to the upper and lower sides of the pallet (10), and the lower end of the slide seat (12) is rotatably connected to the turntable (15). The pallet (10) is located between the front and rear conveyor belts (7).

4. The x-ray inspection device for omnidirectional chip inspection according to claim 1, characterized in that, The x-ray recognition and analysis device (2) is equipped with a telescopic component two (30), the lower output end of the telescopic component two (30) is connected to a y-axis guide rail (31), and an x-axis guide rail (32) is slidably arranged on the lower side of the y-axis guide rail (31), and the upper end of the slide block two (33) is slidably arranged in the x-axis guide rail (32).

5. The x-ray inspection device for omnidirectional chip inspection according to claim 1, characterized in that, The calibration assembly includes a rack (22), a cylinder (23), a lever (24), and a gear (25). The rack (22) is connected to the front and rear ends of the left and right push plates (19) on opposite sides, and passes through the slide block (12), extending to the opposite ends of the two slide blocks (12). The cylinder (23) is also rotatably mounted on the front and rear sides of the slide block (12). The lever (24) is connected to the outside of the cylinder (23). The gear (25) is mounted on the outside of the cylinder (23) and meshes with the extended end of the rack (22).

6. The x-ray inspection device for omnidirectional chip inspection according to claim 5, characterized in that, The slide block one (12) has an L-shaped cross section. The slide rod frame two (18) slides through the upper end of the L-shaped slide block one (12). The push plates (19) on the left and right sides are connected to the upper end of the L-shaped slide block one (12) with a spring two (20) sleeved on the outside of the slide rod frame two (18). The upper end of the L-shaped slide block one (12) has through holes (21) on both the front and rear sides. The rack one (22) extends through the through holes (21) to the upper end of the L-shaped slide block one (12) on the left and right sides, which are far apart from each other. The rack one (22) on the front and rear sides is close to the front and rear gear one (23) on one side, and the rack one (22) on the front and rear sides is meshed with the front and rear gear one (23) on one side far apart from each other.

7. The x-ray inspection device for omnidirectional chip inspection according to claim 1, characterized in that, The stabilizing component includes an opening (26), a flap (27), a limiting seat (28), and an inclined block (29). The opening (26) is opened on the push plate (19). The flap (27) is centrally mounted on the front and rear inner walls of the opening (26) via a spring hinge. The limiting seat (28) is connected to the two push plates (19) on opposite sides and is inclined to limit the flap (27). The flaps (27) on both sides are connected to an inclined block (29) at one end close to each other, and the inclined block (29) is located above the rotation center of the two flaps (27).

8. The x-ray inspection device for omnidirectional chip inspection according to claim 1, characterized in that, The deflection assembly includes a guide rod (34), a top plate (35), a collar seat (36), a rack (38), and a gear (42). The guide rod (34) is arranged parallel to each other and connected to the front and rear sides of the lower end of the slide seat (33). The top plate (35) is arranged symmetrically on the left and right sides and is symmetrically slidably sleeved on the left and right ends of the guide rod (34). The collar seat (36) is centrally connected to the lower side of the slide seat (33) and sleeved on the outside of the guide rod (34). The top plates (35) on both sides are close to each other on one side and are connected to the collar seat (26) with springs (37) sleeved on the outside of the guide rod (34). The two ends of the rack (38) are connected to the top plates (35) on both sides close to each other on one side. The gear (42) is sleeved on the outside of the rotating shaft (40) and meshes with the rack (38) above it.

9. The x-ray inspection device for omnidirectional chip inspection according to claim 8, characterized in that, The bearing housing (39) is slidably fitted with a sliding frame (44), and the lower end of the sliding frame (44) is connected to a U-shaped sleeve (45). The lower end of the U-shaped sleeve (45) is fitted with the outer side of the x-ray detection device (41) for limiting.

10. An x-ray inspection device for omnidirectional chip inspection according to claim 9, characterized in that, The bearing seat (39) is connected to the left and right sides of the guide rod two (43), and the two sides of the sliding frame (44) are slidably sleeved on the outside of the guide rod two (43). The upper end of the sliding frame (44) and the guide rod two (43) is connected to the spring four (46) sleeved on the outside of the guide rod two (43).

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