Coating film diffusion preparation method and tubular equipment

Abstract

The invention relates to the technical field of solar photovoltaics, in particular to a coating diffusion preparation method and tubular equipment, and in the coating diffusion preparation method, a first tube structure is used for depositing a film layer on a battery piece loaded on a slide glass boat; the first conveying device is used for transferring the slide glass boat loaded with the battery pieces in the first pipe structure into the second pipe structure; and performing diffusion doping on the battery piece by using the second tube structure. The first conveying device is used for conveying the slide glass boat in the first pipe structure into the second pipe structure, so that one-time feeding and one-time discharging of the battery pieces during transfer between the two working procedures are saved, the working efficiency of the two working procedures of film layer deposition and diffusion doping can be improved, and the production efficiency and the equipment cost of the solar battery are further improved; and one-time feeding and one-time discharging are saved, so that the carrying frequency of the battery pieces can be reduced, and the fragment rate is reduced.

Description

Technical Field

[0001] This invention relates to the field of solar photovoltaic technology, and in particular to a coating diffusion preparation method and a tubular device. Background Technology

[0002] The fabrication of solar cells typically involves several crucial steps, including film deposition and diffusion doping. For example, the process typically involves basket loading, insertion of the first quartz boat, film deposition (low-pressure chemical vapor deposition, LPCVD), unloading of the first quartz boat, and basket unloading to complete the film deposition. Then, the process repeats with basket loading, insertion of the second quartz boat, diffusion doping, unloading of the second quartz boat, and basket unloading to complete the diffusion doping process. This complex process contributes to the relatively low production efficiency of solar cells. Summary of the Invention

[0003] In view of this, the present invention proposes a tubular device and a coating diffusion preparation method, aiming to partially or completely solve the technical problem of low production efficiency of existing solar cells.

[0004] To achieve the above objectives, the technical solution of the present invention is implemented as follows: In a first aspect, embodiments of the present invention provide a method for preparing a film by diffusion, the method comprising: The first tube structure is used to deposit film layers on the solar cells loaded on the wafer carrier boat; The first conveying device transfers the carrier boat containing the battery cells in the first tube structure to the second tube structure; The second tube structure is used to diffuse-dope the solar cell.

[0005] In some embodiments, the process of depositing a film layer on the solar cell mounted on the carrier boat using the first tubular structure further includes, The cells to be processed in the first basket are taken out and loaded into the cell carrier boat. Multiple cell carrier boats are transported to the boat support, which is used to load the cell carrier boats into the first tube structure. The process of diffusion doping the solar cell using a second tube structure also includes... The plurality of the wafer carrier boats are moved out of the carrier boat, and the battery cells in the wafer carrier boats are transferred to the second basket.

[0006] In some embodiments, the method of depositing a film layer on the solar cell mounted on the wafer carrier boat using the first tubular structure further includes: The battery cells to be processed are taken out of the first basket and loaded into the carrier boat; The multiple slide carriers are transported to the boat support; The boat carrier is transported to the paddle structure, and the paddle structure loads the boat carrier into the first tube structure; The process of diffusion doping the solar cell using a second tube structure also includes... The boat support is moved out of the paddle structure, then the multiple solar cell carriers in the boat support are moved out, and the solar cells in the solar cell carriers are transported to the second basket.

[0007] In some embodiments, depositing a film layer on a solar cell mounted on a carrier boat using a first tube structure includes: The first tube structure is heated to a first preset temperature to deposit the film layer. The diffusion doping of the solar cell using a second tube structure includes: Within the second tube structure, the solar cell is heated from a third preset temperature to a second preset temperature to perform diffusion doping, wherein the third preset temperature is greater than room temperature.

[0008] In some embodiments, the first conveying device transfers the wafer carrier boat containing the battery cells within the first tubular structure to the second tubular structure, including: The first conveying device transfers the battery cells, which are at a first preset temperature, from the first tube structure to the second tube structure.

[0009] In some embodiments, the first conveying device further includes transferring the wafer carrier boat containing the battery cells within the first tubular structure to the second tubular structure: The first conveying device transfers the carrier boat containing the battery cells from a target first tube structure among a plurality of first tube structures to one or more second tube structures; or, The first conveying device transfers one or more of the cell carrier boats loaded with the battery cells in the first tube structure to a target second tube structure among a plurality of second tube structures.

[0010] In some embodiments, the first conveying device includes a first conveying mechanism and a second conveying mechanism, and the first conveying device further includes: transferring the wafer carrier boat loaded with the battery cells in the first tubular structure to the second tubular structure. The first conveying mechanism removes the wafer carrier boat, which has loaded the deposited film layer of the battery cell inside the first tube structure, from the first tube structure. The second conveying mechanism moves the first conveying mechanism to the corresponding second tube structure; The first conveying mechanism moves the wafer carrier boat loaded with the deposited film layer into the second tube structure.

[0011] In some embodiments, the first conveying device further includes transferring the wafer carrier boat containing the battery cells within the first tubular structure to the second tubular structure: The first conveying mechanism corresponding to the first tube structure moves the carrier boat of the battery cell after the film layer has been deposited inside the first tube structure out of the first tube structure; The second conveying mechanism transports the solar cell carrier boat loaded with the deposited film layer from the first conveying mechanism corresponding to the first tube structure to the first conveying mechanism corresponding to the second tube structure. The first conveying mechanism corresponding to the second tube structure moves the carrier boat loaded with the deposited film layer into the second tube structure.

[0012] Secondly, embodiments of the present invention also provide a tubular device, the tubular device comprising: The first tube structure is used to deposit film layers on the solar cells loaded on the carrier boat; A first conveying device is used to transfer the carrier boat carrying the battery cells in the first tube structure to the second tube structure; The second tube structure is used for diffusion doping of the deposited film layer on the battery cell.

[0013] In some embodiments, the first tube structure and the second tube structure are arranged side by side along a first direction and / or a second direction, the first direction and the second direction intersecting.

[0014] In some embodiments, the tubular device includes one or more of the first tubular structures and one or more of the second tubular structures; The target first tube structure in the plurality of first tube structures is matched with one or more second tube structures to perform the deposition film layer and the diffusion doping; or... The deposition film and diffusion doping are performed by matching one or more first tube structures with a target second tube structure among the plurality of second tube structures.

[0015] In some embodiments, the target first tube structure and the matching one or more second tube structures are arranged side by side; or, The target second tube structure and the matching one or more first tube structures are arranged side by side.

[0016] In some embodiments, the target first tube structure and the matching one or more second tube structures are arranged side by side along a first direction, and some of the other first tube structures, excluding the target first tube structure, are arranged side by side with the target first tube structure along a second direction; or, The target second tube structure and the matching one or more first tube structures are arranged side by side along a first direction, and some of the other second tube structures, excluding the target second tube structure, are arranged side by side with the target second tube structure along a second direction.

[0017] In some embodiments, the first tube structure and the second tube structure are arranged opposite to each other.

[0018] In some embodiments, the first conveying device includes: A first conveying mechanism is used to move the wafer carrier boat into or out of the first tube structure, or to move the wafer carrier boat into or out of the second tube structure. The second conveying mechanism is used to move the slide boat along the directions of the first tube structure and the second tube structure.

[0019] In some embodiments, the second conveying mechanism is connected to the first conveying mechanism, and the second conveying mechanism is used to move the first conveying mechanism along the directions of the first pipe structure and the second pipe structure; or, The first conveying mechanism corresponding to the first tube structure is used to move the wafer boat into or out of one of the first tube structures, and the first conveying mechanism corresponding to the second tube structure is used to move the wafer boat into or out of one of the second tube structures. The second conveying mechanism is a robotic arm, which is used to transport the wafer boat on the first conveying mechanism corresponding to the first tube structure to the first conveying mechanism corresponding to the second tube structure.

[0020] In some embodiments, the second conveying mechanism includes a first part and a second part connected together, the first part being disposed corresponding to the regions of the first tube structure and the second tube structure, the second part extending beyond the regions of the first tube structure and the second tube structure, and the second part being used for loading or unloading the slide boat.

[0021] In some embodiments, the tubular device further includes a paddle structure for loading a boat carrier containing the sheet carrier, and the first conveying device moves the paddle structure within the first tubular structure to the second tubular structure.

[0022] In some embodiments, the tubular device further includes a boat support containing the sheet carrier, and the first conveying device moves the boat support within the first tubular structure to the second tubular structure.

[0023] In some embodiments, the tubular device further includes, A buffer platform for cooling the battery cells processed in the second tube structure; A robotic arm is used to move the wafer carrier boat or tray onto the first conveying device, move the wafer carrier boat or tray on the first conveying device to the buffer platform, and remove the wafer carrier boat or tray from the buffer platform from the tubular device.

[0024] In some embodiments, the range of the surface thermal expansion coefficient of the slide boat is the same as the range of the thermal expansion coefficient of the deposited film.

[0025] In some embodiments, the carrier boat is a silicon carbide boat, or a boat coated with a silicon carbide surface layer.

[0026] This invention discloses a diffusion coating preparation method. A first tube structure is used to deposit a film layer on a solar cell loaded on a carrier boat. A first conveying device transfers the carrier boat containing the solar cell from the first tube structure to a second tube structure. The second tube structure is then used for diffusion doping of the solar cell. In this method, the first conveying device transfers the carrier boat from the first tube structure to the second tube structure, saving one loading and one unloading operation during the transfer of the solar cell between the two processes. This improves the efficiency of both the film deposition and diffusion doping processes, thereby increasing the production efficiency of solar cells and reducing equipment costs. Furthermore, saving one loading and one unloading operation also reduces the number of times the solar cell is handled, thus reducing the breakage rate. In addition, the solar cell with the film deposited in the first tube structure is at a higher temperature. When this higher-temperature solar cell is transferred to the second tube structure for the diffusion doping process, it does not require a long heating time to reach the process temperature, which further improves the production efficiency of solar cells.

[0027] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and in order to make the above and other objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention are described below. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0029] Figure 1 This is a schematic diagram of the main view of the coating diffusion system according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the top view of the coating diffusion system according to an embodiment of the present invention; Figure 3 This is a schematic flowchart of the film diffusion preparation method described in the embodiments of the present invention. Figure 1 ; Figure 4This is a schematic flowchart of the film diffusion preparation method described in the embodiments of the present invention. Figure 2 .

[0030] Explanation of reference numerals in the attached figures: 10. Main body of the equipment; 12. First pipe structure; 13. Second pipe structure; 20. First conveying device; 21. Paddle structure; 22. First part; 23. Second part; 30. Second conveying device; 31. First slide mechanism; 32. Second slide mechanism; 40. Robotic arm; 50. Clean Zone; 60. Caching platform; 71. Boat carrying. Detailed Implementation

[0031] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.

[0032] The fabrication of solar cells involves two crucial, sequential processes: film deposition and diffusion doping. Film deposition typically utilizes LPCVD equipment, where SiH4 gas is decomposed to form a polycrystalline silicon film of a certain thickness on the cell surface. Diffusion doping, generally performed in a low-pressure diffusion furnace, introduces atomic-level impurities such as group V elements (e.g., phosphorus) or group III elements (e.g., boron) into the cell after film deposition.

[0033] In conventional techniques, because film deposition and diffusion doping utilize two different pieces of equipment—LPCVD and a low-pressure diffusion furnace—the solar cell fabrication process requires two basket loading and two basket unloading operations. First, the cells produced in the previous process are removed from the transfer basket and placed onto quartz boats. Multiple quartz boats are then placed in a support frame, and the support frame is transported to the LPCVD equipment for film deposition. Depending on the process, the temperature in the LPCVD equipment is typically 550℃-650℃, and the time is typically 3-4 hours. After the process, the quartz boats are removed from the support frame, and the cells are removed from the quartz boats and placed into transfer baskets. The transfer baskets are then transported to the low-pressure diffusion furnace. Again, the cells are removed from the transfer basket and placed onto quartz boats. Multiple quartz boats are placed in a support frame, and the support frame is transported to the low-pressure diffusion furnace for diffusion doping. The temperature in the low-pressure diffusion furnace is typically 750℃-900℃, and the time is typically 2-3 hours. After the process is completed, the same unloading steps as after the deposition film process are followed, that is, the quartz boat is removed from the boat support, and the solar cells inside the quartz boat are removed and inserted into the transfer basket, which then transports the solar cells to the subsequent process equipment.

[0034] The deposition of the film and the diffusion doping process require two loading and unloading operations, as well as corresponding transfers, which leads to low production efficiency of solar cells. Furthermore, the multiple loading and unloading of the cells increases the risk of breakage, affecting the breakage rate of the solar cells.

[0035] This application provides a coating diffusion preparation method and a tubular device, which can solve the above-mentioned technical problems. The following is a description of the accompanying drawings. Figure 1 The following figures illustrate the coating diffusion preparation method and tubular device provided in this application through specific embodiments and application scenarios. The description includes a first direction X and a second direction Y that intersect each other. The angle between the first direction X and the second direction Y can be set according to usage requirements; for example, the first direction X and the second direction Y can be perpendicular to each other. In this application embodiment, the example of the first direction X and the second direction Y being perpendicular to each other is used for illustration.

[0036] In some embodiments, the tubular device includes a first tubular structure 12, a first conveying device 20, and a second tubular structure 13. The first tubular structure 12 is used to deposit a film layer on a solar cell loaded in a carrier boat; the first conveying device 20 is used to transfer the carrier boat carrying the solar cell in the first tubular structure 12 to the second tubular structure 13; and the second tubular structure 13 is used to perform diffusion doping on the deposited film layer on the solar cell.

[0037] According to the tubular equipment of this application, two processes, film deposition and diffusion doping, can be performed. The first conveying device 20 transfers the wafer carrier boat, which carries the solar cells in the first tubular structure 12, to the second tubular structure 13. This saves one loading and one unloading operation during the transfer of solar cells between the two processes, improving the efficiency of both film deposition and diffusion doping processes, and thus increasing the production efficiency of solar cells. Furthermore, saving one loading and one unloading operation also reduces the number of times the solar cells are handled, thus reducing the breakage rate.

[0038] In some embodiments, in the tubular device, the first pipe structure 12 and the second pipe structure 13 can be arranged opposite to each other, that is, the opening of the first pipe structure 12 faces the opening of the second pipe structure 13. The first pipe structure 12 and the second pipe structure 13 can also be arranged side-by-side, with the opening directions of the first pipe structure 12 and the second pipe structure 13 in the same direction, and their extension directions parallel. The side-by-side arrangement of the first pipe structure 12 and the second pipe structure 13 can be along a first direction, along a second direction, or along both directions. For example, the first direction can be horizontal, and the second direction can be vertical. When arranged side-by-side along the vertical direction, one of the first pipe structure 12 and the second pipe structure 13 is located on the upper side, and the other on the lower side.

[0039] In some embodiments, the production cycles of the film deposition and diffusion doping processes may differ depending on the specific manufacturing requirements. To accommodate these different production cycles, the tubular equipment includes one or more first tube structures 12 and one or more second tube structures 13. In this case, a target first tube structure 12 among the plurality of first tube structures 12 is matched with one or more second tube structures 13 for film deposition and diffusion doping; or one or more first tube structures 12 are matched with a target second tube structure 13 among the plurality of second tube structures 13 for film deposition and diffusion doping.

[0040] In some embodiments, to save space in the tubular equipment, the target first tubular structure 12 and one or more matching second tubular structures 13 can be arranged side by side, facilitating the first conveying device 20 to transfer the wafer carrier boat carrying the battery cells in the target first tubular structure 12 to the matching second tubular structure 13. The first conveying device 20 is located on the same side as the target first tubular structure 12 and the one or more matching second tubular structures 13. Compared to a configuration where the first conveying device 20 is located between the target first tubular structure 12 and the matching second tubular structures 13, the first conveying device 20 has a smaller range of movement and occupies less space. Therefore, arranging the target first tubular structure 12 and the one or more matching second tubular structures 13 side by side also saves space in the tubular equipment.

[0041] Correspondingly, the target second tube structure 13 and one or more matching first tube structures 12 are arranged side by side, which also facilitates the first conveying device 20 to transfer the cell carrier boat carrying the battery cells in one or more first tube structures 12 to the target second tube structure 13, and saves space and reduces the area occupied by the tubular equipment.

[0042] In some embodiments, the target first pipe structure 12 and one or more matching second pipe structures 13 are arranged side by side along a first direction. The other first pipe structures 12, excluding the target first pipe structure 12, are arranged side by side with the target first pipe structure 12 along a second direction. This can avoid interference during the conveying of the first conveying device 20. When the second direction is the height direction, it can also reduce the area occupied by the tubular equipment.

[0043] Correspondingly, the target second pipe structure 13 and one or more matching first pipe structures 12 are arranged side by side along the first direction. Among the multiple second pipe structures 13, the other second pipe structures 13 besides the target second pipe structure 13 are arranged side by side with the target second pipe structure 13 along the second direction. This can also avoid interference with the first conveying device 20 during conveying, and when the second direction is the height direction, it reduces the area occupied by the tubular equipment.

[0044] In a specific example, refer to Figure 1 As shown, there is one target first pipe structure 12, matched with one second pipe structure 13. Of the six first pipe structures 12, the other five are arranged side-by-side with the target first pipe structure 12 along the height direction. Each of the other five first pipe structures 12 is matched with one second pipe structure 13. A first conveying device 20 is responsible for matching one first pipe structure 12 and one second pipe structure 13. In this example, the pipe structure is relatively simple.

[0045] Reference Figure 1 As shown, six first tube structures 12 and six second tube structures 13 are stacked to form the main body of the device 10.

[0046] In another specific example, there are six target first tube structures 12, matched with four second tube structures 13. This allows for better matching when the production cycles of the first tube structures 12 and the second tube structures 13 are different, thereby improving production efficiency. A first conveying device 20 is responsible for conveying the wafer carrier boat from one of the target first tube structures 12 to the matched second tube structure 13.

[0047] In some possible implementations, the first conveying device 20 includes a first conveying mechanism and a second conveying mechanism. The first conveying mechanism is used to move the wafer carrier boat into or out of the first tube structure 12, or to move the wafer carrier boat into or out of the second tube structure 13; the second conveying mechanism is used to move the wafer carrier boat along the direction of the first tube structure 12 and the second tube structure 13. In the embodiments of this application, by setting up the first conveying mechanism and the second conveying mechanism, the first conveying device 20 can realize the transfer of the wafer carrier boat carrying the battery cells in the first tube structure 12 to the second tube structure 13, which has the advantage of simple structure. The second conveying mechanism can also move between multiple first tube structures 12 and multiple second tube structures 13.

[0048] In some embodiments, the second conveying mechanism is connected to the first conveying mechanism, and the second conveying mechanism is used to move the first conveying structure along the direction of the first pipe structure 12 and the second pipe structure 13.

[0049] In use, the tubular device involves a first conveying mechanism moving a carrier boat carrying the solar cells into a first tubular structure 12. After the solar cells have a film deposited in the first tubular structure 12, the first conveying mechanism removes the carrier boat from the first tubular structure 12. Then, a second conveying mechanism moves the first conveying mechanism, carrying the carrier boat along the direction of the first tubular structure 12 and the second tubular structure 13. Once the first conveying mechanism reaches the corresponding position in the second tubular structure 13, it stops moving. The first conveying mechanism then moves the carrier boat carrying the solar cells into the second tubular structure 13. After the solar cells undergo diffusion doping in the second tubular structure 13, the first conveying mechanism removes the carrier boat from the second tubular structure 13. This structure, connecting the first and second conveying mechanisms, offers advantages such as simple structure and convenient operation.

[0050] In some possible embodiments, such as Figure 1 As shown, the second conveying mechanism includes a first part 22 and a second part 23 connected to each other. The first part 22 is disposed in the regions corresponding to the first tube structure 12 and the second tube structure 13, and the second part 23 extends beyond the regions of the first tube structure 12 and the second tube structure 13, and is used for loading or unloading the sheet carrier boat. In this embodiment, the provision of the second part 23 can avoid interference with the structures in the corresponding regions of the first tube structure 12 and the second tube structure 13 during the loading or unloading of the sheet carrier boat, such as interference with the structure that moves the gate of the first tube structure 12.

[0051] In other embodiments, each first tube structure 12 is provided with a corresponding first conveying mechanism, and each second tube structure 13 is provided with a corresponding first conveying mechanism. The second conveying mechanism is a robotic arm, which can move the carrier boat on the first conveying mechanism corresponding to the first tube structure 12 along the direction of the first tube structure 12 and the second tube structure 13, and move it to the first conveying mechanism corresponding to the second tube structure 13. The above-described structure of the first conveying device 20 also has the advantages of simple structure and convenient operation. Moreover, it is suitable for structures where there are multiple target first tube structures 12 that are matched with multiple second tube structures 13, or structures where there are multiple target second tube structures 13 that are matched with multiple first tube structures 12.

[0052] In some other embodiments, a first conveying mechanism is provided for the first tube structure 12, and a first conveying mechanism is provided for the second tube structure 13. The second conveying structure is capable of moving the slide boat from the first conveying structure corresponding to the first tube structure to the first conveying structure corresponding to the second tube structure. The second conveying structure may be a conveyor belt, etc.

[0053] In some embodiments, the tubular device further includes a paddle structure 21 for loading a boat support 71, which contains a sheet carrier boat. A first conveying device 20 moves the sheet carrier boat via the paddle structure 21. The first conveying device 20's movement of the sheet carrier boat via the paddle structure 21 offers the advantage of smooth movement. The structure of the paddle structure 21 loading the boat support 71, which contains the sheet carrier boat, offers the advantage of structural stability and reliability.

[0054] It should be noted that the propeller structure 21 needs to enter and exit the first tube structure 12 and the second tube structure 13. The lengths of the first tube structure 12 and the second tube structure 13 need to be matched to avoid collisions between the propeller structure 21 and the first tube structure 12 and the second tube structure 13 or to avoid affecting the process quality.

[0055] It is understood that the film carrier boat can also be a single piece of boat, and when the film carrier boat is a single piece of boat, the boat support 71 may not be provided. The film carrier boat is loaded inside the paddle structure 21, and the film carrier boat serves as the carrier being transported. The embodiments of this application do not specifically limit the paddle structure 21, and the paddle structure 21 is a paddle structure used in conventional technology.

[0056] In other embodiments, the tubular device also includes a boat support 71, which contains a sheet carrier boat. The first conveying device 20 moves the sheet carrier boat via the boat support 71. In this case, the paddle structure 21 is not used, which makes the tubular device simpler in structure.

[0057] In other embodiments, the tubular device further includes a buffer platform 60 and a robot arm 40. The buffer platform 60 is used to cool the solar cells processed in the second tubular structure 13; the robot arm 40 is used to move the wafer carrier boat or tray 71 onto the first conveying device 20, and to remove the wafer carrier boat or tray 71 from the buffer platform 60 out of the tubular device. Using the robot arm 40 to move the wafer carrier boat or tray 71 has the advantages of being simple and convenient.

[0058] In other embodiments, the tubular equipment also includes a purification zone 50, within which the buffer platform 60, the first tubular structure 12, the second tubular structure 13, the first conveying device 20, and the robotic arm 40 are all located. The purification zone 50 refers to a zone with high cleanliness, temperature, humidity, and air pressure, such as a cleanliness level of 10,000 or 100,000. The establishment of the purification zone 50 ensures the quality and safety of solar cell production.

[0059] In other embodiments, the tubular device further includes a second conveying device 30 (e.g., Figure 1 and Figure 2 As shown, one end of the second conveying device 30 is located between the tubular device 10 (including the first tubular structure 12 and the second tubular structure 13) and the buffer platform 60, and the other end of the second conveying device 30 extends out of the purification zone 50. The second conveying device 30 is used to convey the film carrier boat or boat holder 71 into or out of the purification zone 50. The robotic arm 40 is also used to move the film carrier boat or boat holder 71 on the second conveying device 30 to the first conveying device 20, or to move the film carrier boat or boat holder 71 on the buffer platform 60 to the second conveying device 30.

[0060] In some possible implementations, the second conveying device 30 includes a first sliding table mechanism 31 and a second sliding table mechanism 32, which are arranged in parallel. The first sliding table mechanism 31 is used to convey a sheet carrier boat or boat support 71 into the purification zone 50, and the second sliding table mechanism 32 is used to remove the sheet carrier boat or boat support 71 from the purification zone 50. In the embodiments of this application, the arrangement of the first sliding table mechanism 31 and the second sliding table mechanism 32 can realize the movement of the sheet carrier boat or boat support 71 in and out, and the structure is simple.

[0061] In some possible implementations, the wafer carrier boat is used multiple times during the film deposition process, and the polycrystalline silicon film deposited on the surface of the wafer carrier boat gradually becomes thicker. In the embodiments of this application, by setting the range of the surface thermal expansion coefficient of the wafer carrier boat to be the same as the range of the thermal expansion coefficient of the deposited film, the polycrystalline silicon film on the surface of the wafer carrier boat will not locally peel off and adhere to the battery cells after the process, thus affecting the process effect, even after multiple uses and multiple temperature changes.

[0062] In conventional technology, the quartz boat is used multiple times during the film deposition process, causing the deposited polycrystalline silicon film on its surface to gradually thicken. Since the expansion coefficients of the quartz boat and the polycrystalline silicon film are different, frequent high and low temperature changes, especially during the loading and unloading steps, cause rapid temperature fluctuations at the furnace opening. This can lead to localized detachment of the polycrystalline silicon film from the quartz boat surface. This detached polycrystalline silicon can randomly adhere to the processed solar cells, affecting the process results. Therefore, cleaning of the quartz boat is necessary. Furthermore, production lines typically use a combination of alkaline washing and acid washing to remove the polycrystalline silicon film from the quartz boat surface. Depending on the cleaning frequency, after a period of use, such as 4-6 months and 6-8 cleanings, the surface of the boat's shaft and teeth will show noticeable unevenness. These pits can affect the process reaction, and the teeth will also experience varying degrees of wear after cleaning, impacting the accuracy of automated loading and unloading. The quartz boats used in diffusion doping also need to be cleaned periodically, for example, after 15 days or 80 cycles of the process. The cleaning method is the same as that used for cleaning the quartz boats in the deposition film process, and wear and tear will occur, affecting the accuracy of automated loading and unloading.

[0063] For example, in the tubular device of this application embodiment, the wafer carrier boat is a silicon carbide boat, or a boat coated with a silicon carbide surface layer. When the wafer carrier boat is used to load the solar cell, a polycrystalline silicon thin film is also formed on the surface of the wafer carrier boat during the deposition of a film layer on the solar cell in the first tubular structure 12. The thermal expansion coefficient range of silicon carbide is the same as that of the deposited film layer. Furthermore, when the solar cell undergoes diffusion doping in the second tubular structure 13, the polycrystalline silicon thin film on the surface of the wafer carrier boat oxidizes to form relatively stable silicon dioxide. Silicon dioxide can avoid the influence of defects on the wafer carrier boat on the solar cell and the influence of diffusion doping on the solar cell, ensuring the stability of the solar cell. Therefore, the wafer carrier boat is suitable for use in this application.

[0064] For example, the coefficient of thermal expansion of a quartz boat is 0.5 × 10⁻⁶. -6 / K-1*10 -6 The coefficient of thermal expansion of a silicon carbide boat is, for example, 4.41 × 10⁻⁶ K. -6 Approximately / K (3~5*10) -6 / K), the coefficient of thermal expansion of the silicon carbide boat is closer to that of the deposited film (e.g., polycrystalline silicon) in the range of 4.0 * 10. -6 Approximately / K (3~5*10) -6 / K).

[0065] In the tubular device of this application embodiment, a silicon carbide boat is used to load the battery cells. The silicon carbide boat, relative to a quartz boat, can be used alternately in the first tubular structure 12 and the second tubular structure 13. In one process cycle, after use in the first tubular structure 12, a polycrystalline silicon film with a thickness of, for example, 300 nm is formed on the surface of the silicon carbide boat. After the silicon carbide boat enters the second tubular structure 13, the polycrystalline silicon film oxidizes and reacts with oxygen introduced into the second tubular structure 13 to generate SiO2. Through long-term on-site testing and monitoring by the inventors, the surface structure of the silicon carbide boat remains very stable after 80 cycles of the two processes: film deposition and diffusion doping. The silicon carbide boat is then cleaned for 6 hours in an alkaline cleaning machine using a 20% NaOH solution at, for example, 70-80°C. This completely removes the adhering SiO2 and polycrystalline silicon, leaving the surface of the cleaned silicon carbide boat indistinguishable from a new boat.

[0066] According to the embodiments of this application, a silicon carbide boat is used to load battery cells in a tubular device. The silicon carbide boat can be used alternately in the first tube structure 12 and the second tube structure 13, and the cleaning cycle of the silicon carbide boat is significantly extended, for example, by at least double, reducing the wear and tear on the silicon carbide boat and the consumption of cleaning reagents during cleaning, thereby increasing the service life of the silicon carbide boat and saving time and material costs. In addition, the silicon carbide boat has a high Mohs hardness, giving it advantages in wear resistance and scratch resistance, and its weight is within the load-bearing range of the paddle structure 21.

[0067] The tubular device of this application embodiment, taking a first tube structure 12 matched with a second tube structure 13 and having multiple identical matching structures, with a silicon carbide boat loaded on a boat support 71 as an example, its working process is as follows.

[0068] The first sliding mechanism 31 transports the boat support 71 to the second part 23 corresponding to the second conveying mechanism. The robot arm 40 grasps the boat support 71 and moves it to the first conveying mechanism at any point in the second part 23. The second conveying mechanism moves, and after moving the first conveying mechanism to the corresponding first tube structure 12, it stops moving. The first conveying mechanism moves the boat support 71 into the first tube structure 12. After the solar cell completes the film deposition, the first conveying mechanism moves the boat support 71 out of the first tube structure 12. The second conveying mechanism moves again, and after moving the first conveying mechanism to the corresponding second tube structure 13, it stops moving. The first conveying mechanism moves the boat support 71 into the second tube structure 13. After the solar cell completes the diffusion doping, the first conveying mechanism moves the boat support 71 out of the second tube structure 13. Then, the second conveying mechanism moves the first conveying mechanism to the second part 23.

[0069] The robotic arm 40 moves the boat tray 71, which is loaded with solar cells that have completed the deposition and diffusion doping processes, from the first conveying mechanism to the buffer platform 60. The hot solar cells are cooled on the buffer platform 60, and the boat tray 71, which is loaded with the cooled solar cells, is moved by the robotic arm 40 to the second sliding mechanism 32, which then removes the boat tray 71 from the purification area 50.

[0070] The tubular equipment of this application embodiment can realize two processes: film deposition and diffusion doping. A first conveying device 20 transfers the silicon carbide boat carrying the solar cells in the first tubular structure 12 to the second tubular structure 13, saving one loading and one unloading operation during the transfer of solar cells between the two processes. This improves the efficiency of both film deposition and diffusion doping processes, thereby increasing the production efficiency of solar cells and reducing equipment costs. Furthermore, saving one loading and one unloading operation also reduces the number of times the solar cells are handled, thus reducing the breakage rate. In addition, the solar cells that have undergone film deposition in the first tubular structure 12 are at a higher temperature. When these higher-temperature solar cells are sent to the second tubular structure 13 for the diffusion doping process, they do not require a long heating time to reach the process temperature, which further improves the production efficiency of solar cells and reduces energy consumption.

[0071] The tubular equipment can also be configured with an appropriate number of first pipe structures 12 and second pipe structures 13, as well as a first conveying device 20, according to the production rhythm of the first pipe structure 12 and the second pipe structure 13, in order to further improve production efficiency and capacity.

[0072] This application also provides a coating diffusion preparation method, which is applied to the tubular device described above, with reference to... Figure 3 As shown, the method includes the following steps: S1, using the first tube structure 12 to deposit a film layer on the solar cell loaded on the carrier boat.

[0073] S2, the first conveying device 20 transfers the cell carrier boat loaded with battery cells in the first tube structure 12 to the second tube structure 13.

[0074] S3 uses the second tube structure 13 to diffuse dope the solar cell.

[0075] According to the coating diffusion preparation method of the present application, the first conveying device 20 transfers the carrier boat in the first tube structure 12 to the second tube structure 13. The same carrier boat is used when the solar cells are transferred between the two processes, that is, the solar cells are loaded and unloaded only once, which can improve the working efficiency of the two processes of film deposition and diffusion doping, thereby improving the production efficiency of solar cells and equipment costs. Since one loading and one unloading are saved, the number of times the solar cells are handled can also be reduced, and the breakage rate can be reduced.

[0076] Reference Figure 4 As shown, the step S1 is preceded by the following step: A1, take out the cells to be processed from the first basket and load them into the cell carrier boat, and transport multiple cell carrier boats to the boat support 71. The boat support 71 is used to load the cell carrier boats into the first tube structure 12.

[0077] In step A1, a robot can be used to remove the battery cells from the first basket and load them into the cell carrier boat, which is then moved to the carrier 71 by a trolley crane.

[0078] A2, the second conveying device 30 conveys the boat carrier 71 to the corresponding first conveying device 20.

[0079] A3, the robotic arm 40 moves the boat support 71 of the second conveying device 30 onto the first conveying device 20.

[0080] The steps preceding step S3 include: A4, the robotic arm 40 transports the boat carrier 71, which is loaded with the deposited film and diffusion-doped solar cells on the first conveying device 20, to the buffer platform 60, where the solar cells are cooled.

[0081] A5, the robotic arm 40 moves the boat tray 71, which is loaded with cooled battery cells on the buffer platform 60, to the second conveying device 30, and the second conveying device 30 removes the boat tray 71.

[0082] A6, remove multiple wafer carriers from the carrier 71, and transfer the battery cells from the wafer carriers to the second basket.

[0083] In step A6, a robotic arm can be used to move the wafer carriers on the carrier 71 one by one onto the platform. After the robot takes the wafers from the wafer carriers, it moves the wafers into the second basket.

[0084] According to the coating diffusion preparation method of the present application, the two processes of film deposition and diffusion doping can be completed in only one loading and one unloading, which can improve the production efficiency and equipment cost of solar cells, reduce the number of times the cells are handled, and thus reduce the breakage rate.

[0085] In some embodiments, the tubular device also includes a paddle structure. In this case, in step A3, the robot arm 40 transports the boat support 71 of the second conveying device 30 onto the paddle structure of the first conveying device 20. The paddle structure is used to load the boat support 71 into the first tubular structure 12. And in step A4, the robot arm 40 removes the boat support 71 from the paddle structure and transports it to the buffer platform 60, where the battery cells are cooled.

[0086] Depending on the different production process requirements, the production cycle times for the film deposition and diffusion doping processes may differ. To accommodate the production cycle times of these two processes, the tubular equipment includes one or more first tubular structures 12 and one or more second tubular structures 13. In step S2, the first conveying device 20 transferring the wafer carrier boat loaded with solar cells from the first tubular structure 12 to the second tubular structure 13 further includes: The first conveying device 20 transfers a carrier boat containing solar cells from a target first tube structure 12 among a plurality of first tube structures 12 to one or more second tube structures 13; or, the first conveying device 20 transfers a carrier boat containing solar cells from one or more first tube structures 12 to a target second tube structure 13 among a plurality of second tube structures 13.

[0087] In some embodiments, the first conveying device 20 includes a first conveying mechanism and a second conveying mechanism. The first conveying mechanism is used to move the slide boat into or out of the first tube structure 12, or to move the slide boat into or out of the second tube structure 13. The second conveying mechanism is used to move the slide boat along the direction of the first tube structure 12 and the second tube structure 13.

[0088] When the first conveying mechanism and the second conveying mechanism are connected, step S2 further includes: The first conveying mechanism removes the wafer carrier boat, which is loaded with the deposited film layer of the battery cell, from the first tube structure 12; The second conveying mechanism moves the first conveying mechanism to the corresponding second pipe structure 13; The first conveying mechanism moves the carrier boat loaded with the deposited film layer of the solar cell into the second tube structure 13.

[0089] If the first conveying mechanism and the second conveying mechanism are not connected, and the second conveying mechanism is a robotic arm, step S2 further includes: The first conveying mechanism corresponding to the first tube structure 12 moves the wafer carrier boat loaded with the deposited film layer inside the first tube structure 12 out of the first tube structure 12. The second conveying mechanism transports the solar cell carrier boat loaded with the deposited film layer on the first conveying mechanism corresponding to the first tube structure 12 to the first conveying mechanism corresponding to the second tube structure 13. The first conveying mechanism corresponding to the second tube structure 13 moves the carrier boat loaded with the deposited film layer into the second tube structure 13.

[0090] In the film diffusion preparation method, both the film deposition and diffusion doping processes require the solar cell to be carried out at relatively high temperatures. Therefore, it is also necessary to heat the solar cell to the process temperature. Specifically, depositing a film on the solar cell using the first tube structure 12 includes heating the first tube structure 12 to a first preset temperature to deposit the film; diffusion doping on the solar cell using the second tube structure 13 includes heating the solar cell from a third preset temperature to a second preset temperature within the second tube structure 13 to perform diffusion doping, wherein the third preset temperature is greater than room temperature or greater than at least half of the first preset temperature.

[0091] Since the battery cells produced in the first tube structure 12 need to be transferred to the second tube structure 13 via the first conveying device 20, there may be heat loss during the transfer process. The third preset temperature of the battery cells entering the second tube structure 13 may be slightly lower than the first preset temperature in the first tube structure 12. However, since there is no need for one feeding and one unloading, the transfer time is short and the heat loss is small. Therefore, the third preset temperature will be higher than room temperature.

[0092] To further avoid heat loss during the transfer process, the first conveying device transfers the battery cells at a first preset temperature inside the first tube structure 12 to the second tube structure 13. In other words, the battery cells at the first preset temperature are transferred to the second tube structure 13 without needing to be cooled down. That is, in this solution, the first conveying device can transport battery cells at a high temperature (first preset temperature).

[0093] In the coating diffusion preparation method of the present application embodiment, the second tube structure 13 does not need to heat the battery cell from the temperature before entering the first tube structure 12, such as room temperature, which can reduce the temperature difference, save energy and heating time, and improve production efficiency.

[0094] The tubular device and the coating diffusion preparation method in the embodiments of this application can be referred to each other and have the same or similar beneficial effects. To avoid repetition, they will not be described again here.

[0095] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0096] The various embodiments in this specification are described in a related manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. For embodiments of devices, electronic devices, computer-readable storage media, and computer program products containing instructions, the descriptions are relatively simple because they are basically similar to the method embodiments; relevant parts can be referred to the descriptions of the method embodiments.

[0097] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention are included within the scope of protection of the present invention.

Claims

1. A method for preparing a coating by diffusion, characterized in that, include, A film layer is deposited on a solar cell mounted on a carrier boat using the first tube structure (12); The first conveying device (20) transfers the carrier boat containing the battery cells in the first tube structure (12) to the second tube structure (13); The solar cell is diffused and doped using the second tube structure (13).

2. The coating diffusion preparation method according to claim 1, characterized in that, Before depositing the film layer on the solar cell mounted on the carrier boat using the first tube structure (12), the process also includes, The battery cells to be processed are taken out of the first basket and loaded into the carrier boat; Multiple of the said slide boats are transported to a boat carrier (71), which is used to load the slide boats into the first tube structure (12); The process of diffusion doping the solar cell using the second tube structure (13) further includes, The plurality of the wafer carriers in the carrier (71) are removed, and the battery cells in the wafer carriers are transferred to the second basket.

3. The coating diffusion preparation method according to claim 1, characterized in that, The process of depositing a film layer on the solar cell mounted on the carrier boat using the first tube structure (12) further includes: The battery cells to be processed are taken out of the first basket and loaded into the carrier boat; Multiple of the aforementioned film carrier boats are transported to the boat support (71). The boat carrier (71) is transported to the paddle structure, and the paddle structure loads the boat carrier (71) into the first tube structure (12); The process of diffusion doping the solar cell using the second tube structure (13) further includes, The boat support (71) inside the paddle structure is moved out, and then multiple solar cell carriers inside the boat support (71) are moved out, and the solar cells in the solar cell carriers are transported to the second flower basket.

4. The coating diffusion preparation method according to any one of claims 1 to 3, characterized in that, The deposition of a film layer on the solar cell mounted on the carrier boat using the first tube structure (12) includes: The first tube structure (12) is heated to a first preset temperature to deposit the film layer; The diffusion doping of the solar cell using the second tube structure (13) includes: The cell is heated from a third preset temperature to a second preset temperature within the second tube structure (13) to perform diffusion doping, wherein the third preset temperature is greater than room temperature.

5. The coating diffusion preparation method according to claim 4, characterized in that, The first conveying device (20) transfers the wafer carrier boat containing the battery cells within the first tube structure (12) to the second tube structure (13) including: The first conveying device transfers the battery cell, which is at the first preset temperature, inside the first tube structure (12) to the second tube structure (13).

6. The coating diffusion preparation method according to claim 1, characterized in that, The first conveying device (20) further includes: transferring the carrier boat containing the battery cells in the first tube structure (12) to the second tube structure (13); The first conveying device (20) transfers the carrier boat containing the battery cells from a target first tube structure (12) of a plurality of first tube structures (12) to one or more second tube structures (13); or, The first conveying device (20) transfers the wafer carrier boat loaded with the battery cells in one or more of the first tube structures (12) to a target second tube structure (13) among a plurality of second tube structures (13).

7. The coating diffusion preparation method according to any one of claims 1 to 6, characterized in that, The first conveying device (20) includes a first conveying mechanism and a second conveying mechanism. The first conveying device (20) further includes: transferring the carrier boat containing the battery cells in the first tube structure (12) to the second tube structure (13). The first conveying mechanism removes the carrier boat containing the battery cells after the film layer has been deposited from the first tube structure (12). The second conveying mechanism moves the first conveying mechanism to the corresponding second pipe structure (13); The first conveying mechanism moves the carrier boat loaded with the deposited film layer into the second tube structure (13).

8. The coating diffusion preparation method according to any one of claims 1 to 6, characterized in that, The first conveying device (20) further includes: transferring the carrier boat containing the battery cells in the first tube structure (12) to the second tube structure (13); The first conveying mechanism corresponding to the first tube structure (12) moves the carrier boat of the battery cell after the film layer is deposited inside the first tube structure (12) out of the first tube structure (12). The second conveying mechanism transports the solar cell carrier boat loaded with the deposited film layer to the first conveying mechanism corresponding to the second tube structure (13); The first conveying mechanism corresponding to the second tube structure (13) moves the carrier boat loaded with the deposited film layer into the second tube structure (13).

9. A tubular device, characterized in that, include: The first tube structure (12) is used to deposit a film layer on the solar cell loaded on the carrier boat; A first conveying device (20) is used to transfer the carrier boat carrying the battery cell in the first tube structure (12) to the second tube structure (13); The second tube structure (13) is used to diffuse dope the deposited film layer on the battery cell.

10. The tubular device according to claim 9, characterized in that, The first tube structure (12) and the second tube structure (13) are arranged side by side along a first direction and / or a second direction, and the first direction and the second direction intersect.

11. The tubular device according to claim 9, characterized in that, The tubular device includes one or more of the first tubular structures (12) and one or more of the second tubular structures (13); The target first tube structure (12) in a plurality of first tube structures (12) is matched with one or more second tube structures (13) to perform the deposition film layer and the diffusion doping; or, The one or more first tube structures (12) are matched with the target second tube structure (13) of the plurality of second tube structures (13) to perform the deposition film and the diffusion doping.

12. The tubular device according to claim 11, characterized in that, The target first tube structure (12) and the matching one or more second tube structures (13) are arranged side by side; or, The target second tube structure (13) and the matching one or more first tube structures (12) are arranged side by side.

13. The tubular device according to claim 12, characterized in that, The target first tube structure (12) and the matching one or more second tube structures (13) are arranged side by side along a first direction, and some of the other first tube structures (12) besides the target first tube structure (12) are arranged side by side with the target first tube structure (12) along a second direction; or, The target second tube structure (13) and the matching one or more first tube structures (12) are arranged side by side along a first direction, and some of the other second tube structures (13) other than the target second tube structure (13) are arranged side by side with the target second tube structure (13) along a second direction.

14. The tubular device according to claim 9, characterized in that, The first tube structure (12) and the second tube structure (13) are arranged opposite to each other.

15. The tubular device according to any one of claims 9 to 14, characterized in that, The first conveying device (20) includes: A first conveying mechanism is used to move the slide boat into or out of the first tube structure (12), or to move the slide boat into or out of the second tube structure (13). The second conveying mechanism is used to move the slide boat along the direction of the first tube structure (12) and the second tube structure (13).

16. The tubular device according to claim 15, characterized in that, The second conveying mechanism is connected to the first conveying mechanism, and the second conveying mechanism is used to move the first conveying mechanism along the directions of the first tube structure (12) and the second tube structure (13); or, The first conveying mechanism corresponding to the first tube structure (12) is used to move the slide boat into or out of one of the first tube structures (12), and the first conveying mechanism corresponding to the second tube structure (13) is used to move the slide boat into or out of one of the second tube structures (13). The second conveying mechanism is a robot (40), which is used to transport the slide boat on the first conveying mechanism corresponding to the first tube structure (12) to the first conveying mechanism corresponding to the second tube structure (13).

17. The tubular device according to claim 15 or 16, characterized in that, The second conveying mechanism includes a first part (22) and a second part (23) connected to each other. The first part (22) is disposed in the area corresponding to the first tube structure (12) and the second tube structure (13). The second part (23) extends beyond the area of ​​the first tube structure (12) and the second tube structure (13). The second part (23) is used to load or unload the carrier boat.

18. The tubular device according to any one of claims 9 to 17, characterized in that, The tubular device further includes a paddle structure (21) for loading a boat carrier (71), which contains the sheet carrier boat. The first conveying device (20) moves the paddle structure (21) within the first tubular structure (12) to the second tubular structure (13).

19. The tubular device according to any one of claims 9 to 17, characterized in that, The tubular device also includes a boat carrier (71) in which the slide boat is loaded, and the first conveying device (20) moves the boat carrier (71) in the first tubular structure (12) to the second tubular structure (13).

20. The tubular device according to any one of claims 9 to 19, characterized in that, The tubular equipment also includes, A buffer platform (60) is used to cool the battery cells processed in the second tube structure (13); A robotic arm (40) is used to move the wafer carrier boat or the tray (71) onto the first conveying device (20), move the wafer carrier boat or the tray (71) on the first conveying device (20) onto the buffer platform (60), and remove the wafer carrier boat or the tray (71) on the buffer platform (60) from the tubular device.

21. The tubular device according to any one of claims 9 to 20, characterized in that, The range of the surface thermal expansion coefficient of the slide boat is the same as the range of the thermal expansion coefficient of the deposited film.

22. The tubular device according to any one of claims 9 to 20, characterized in that, The carrier boat is a silicon carbide boat, or a boat coated with a silicon carbide surface layer.

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