Light emitting device and distance measuring device

Abstract

[Problem] To provide a light-emitting device and a distance measuring device in which the structure of wiring for a light-emitting element can be optimized and the resolution of a measured value can be increased. [Solution] A light-emitting device according to the present disclosure comprises: a plurality of light-emitting elements arranged in a two-dimensional array and each having a first terminal and a second terminal; a plurality of first terminal wirings electrically connected to the first terminals of the light emitting elements, and each first terminal wiring includes a first wiring extending in the first direction and a second wiring each electrically connected to the first wiring; a plurality of second terminal wirings electrically connected to second terminals of the light emitting elements, each of the second terminal wirings electrically connected to P of the light emitting elements; a plurality of selection circuits electrically connected to one of the first terminal wiring and the second terminal wiring to select a light emitting element to generate light; a plurality of driving circuits electrically connected to the other of the first terminal wiring and the second terminal wiring to drive the light emitting elements; an optical system that causes the light emitted by the plurality of light-emitting elements to illuminate the plurality of illumination positions; and a first driving unit driving the optical system to change the plurality of illumination positions.

Description

Technical Field

[0001] This disclosure relates to light-emitting devices and distance measuring devices. Background Technology

[0002] As a type of semiconductor laser, surface-emitting lasers, such as vertical-cavity surface-emitting lasers (VCSELs), are known. Typically, in light-emitting devices using surface-emitting lasers, multiple light-emitting elements are arranged in a two-dimensional array on the front or rear surface of a substrate.

[0003] Reference List

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2020-96169 Summary of the Invention

[0006] The technical problem to be solved by the present invention

[0007] When the light-emitting elements of a VCSEL emit light individually, as the number of light-emitting elements increases, the wiring of the light-emitting elements becomes longer. As a result, there is a problem that the impedance of each wiring increases and the impedance difference between wirings increases. In addition, it is desirable to increase the resolution of the measured values ​​in ranging.

[0008] Therefore, this disclosure provides a light-emitting device and a ranging device that can optimize the wiring structure for the light-emitting element and improve the resolution of the measurement value.

[0009] Technical solutions to technical problems

[0010] To address the aforementioned problems, according to this disclosure, a light-emitting device is provided, comprising: Multiple light-emitting elements are arranged in a two-dimensional array, and each light-emitting element includes a first terminal and a second terminal; Multiple first terminal wirings include M first wirings (M is an integer greater than 2) extending in a first direction and N second wirings (N is an integer greater than 2) extending in a second direction intersecting the first direction and electrically connected to the M first wirings respectively. The multiple first terminal wirings are electrically connected to the first terminal of the light-emitting element. Multiple second-terminal wirings are electrically connected to the second terminals of the light-emitting elements, and each of the multiple second-terminal wirings is electrically connected to P (P is an integer greater than 2) of the light-emitting elements. Multiple selection circuits are electrically connected to one of multiple first terminal wirings and multiple second terminal wirings, and select the light-emitting element as the light-emitting object; Multiple driving circuits are electrically connected to the other side of multiple first terminal wirings and multiple second terminal wirings, and drive multiple light-emitting elements; An optical system that uses light emitted by multiple light-emitting elements to illuminate multiple illumination positions; and The first drive unit drives the optical system and changes multiple illumination positions. Where N is an integer that is the same as or different from M, and P is an integer that is the same as or different from at least one of M or N.

[0011] Optical systems may include mirrors, and

[0012] The first drive unit can rotate the reflector around the rotation axis.

[0013] The first drive unit can rotate to irradiate between multiple irradiation positions.

[0014] A mirror can include multiple axes of rotation, and

[0015] The first drive unit can generate rotation so that the reflector reciprocates periodically around multiple rotation axes.

[0016] The optical system may include a lens, and the first drive unit may move the optical axis of the lens relative to a plurality of light-emitting elements.

[0017] The first drive unit can move the optical axis of the lens to illuminate between multiple illumination positions.

[0018] The first drive unit can cause the optical axis of the lens to reciprocate periodically, so as to illuminate between multiple illumination positions.

[0019] A microlens array can be configured, which corresponds to each of a plurality of light-emitting elements and collects the light emitted by the plurality of light-emitting elements.

[0020] The first driving unit may include any one of a voice coil motor, a piezoelectric element, a shape memory alloy, and a liquid crystal.

[0021] To address the aforementioned problems, according to this disclosure, a ranging device is provided, comprising: The light source generates light and illuminates the subject; and Control Department The light source section includes: Multiple light-emitting elements are arranged in a two-dimensional array, and each light-emitting element includes a first terminal and a second terminal; Multiple first terminal wirings include M first wirings (M is an integer greater than 2) extending in a first direction and N second wirings (N is an integer greater than 2) extending in a second direction intersecting the first direction and electrically connected to the M first wirings respectively. The multiple first terminal wirings are electrically connected to the first terminal of the light-emitting element. Multiple second-terminal wirings are electrically connected to the second terminals of the light-emitting elements, and each of the multiple second-terminal wirings is electrically connected to P (P is an integer greater than 2) of the light-emitting elements. Multiple selection circuits are electrically connected to one of multiple first terminal wirings and multiple second terminal wirings, and select the light-emitting element as the light-emitting object; Multiple driving circuits are electrically connected to the other side of multiple first terminal wirings and multiple second terminal wirings, and drive multiple light-emitting elements; An optical system that uses light emitted by multiple light-emitting elements to illuminate multiple illumination positions; and The first drive unit drives the optical system and changes multiple illumination positions. The control unit controls the selection circuit, the drive circuit, and the first drive unit. N is an integer that is the same as or different from M, and P is an integer that is the same as or different from at least one of M or N.

[0022] The control unit can change the light illumination method according to the area to be measured.

[0023] The control unit can change the number of scans based on the area to be measured, which is the number of times irradiation is performed between multiple irradiation positions.

[0024] The control unit can change the frame rate according to the area to be measured. The frame rate is the number of times the light-emitting element emits light per predetermined time interval.

[0025] The control unit can change the light-emitting element among multiple light-emitting elements according to the area to be measured.

[0026] The control unit can change the number of times multiple light-emitting elements emit light according to the area to be measured.

[0027] The control unit can change the luminous intensity of multiple light-emitting elements according to the area to be measured.

[0028] You can set: A light receiving unit receives light reflected from the subject; and The ranging unit measures the distance to the subject based on the light received by the light receiving unit; The optical receiver may include multiple optical receiving elements arranged in a matrix array and included in the target area, and The control unit can specify the summing region of two or more optical receiving elements from a plurality of optical receiving elements, and perform scanning control on a unit of the specified summing region. Attached Figure Description

[0029] Figure 1This is a schematic layout diagram showing an example of the configuration of the ranging device 1 according to the first embodiment.

[0030] Figure 2 This is a block diagram showing a configuration example of the ranging device 1 according to the first embodiment.

[0031] Figure 3 This is a diagram used to describe the structured light (STL) method of the first embodiment.

[0032] Figure 4A This is a schematic diagram showing the structure of the light source unit 2 according to the first embodiment.

[0033] Figure 4B This is a cross-sectional view showing the structure of the light-emitting part 11 in the first embodiment.

[0034] Figure 5 This is a circuit diagram showing the structure of the light source unit 2 according to the first embodiment.

[0035] Figure 6 This is a graph used to describe the performance of the light source unit 2 in the first embodiment.

[0036] Figure 7 These are cross-sectional and plan views showing the structure of the light source unit 2 according to the first embodiment.

[0037] Figure 8 This is a perspective view schematically showing the structure of the light source unit 2 in the first embodiment.

[0038] Figure 9 This is a circuit diagram showing the structure of the light source unit 2 in the first modified example of the first embodiment.

[0039] Figure 10 This is a circuit diagram showing the structure of the light source unit 2 in a second variation of the first embodiment.

[0040] Figure 11 This is a circuit diagram showing the structure of the light source unit 2 in the third variation of the first embodiment.

[0041] Figure 12 This is a circuit diagram showing the structure of the light source unit 2 in the fourth variation of the first embodiment.

[0042] Figure 13 This is a circuit diagram showing the structure of the light source unit 2 in the fifth variation of the first embodiment.

[0043] Figure 14 This is another circuit diagram showing the structure of the light source unit 2 in the fifth variation of the first embodiment.

[0044] Figure 15This is a circuit diagram showing various examples of the structure of the light source unit 2 according to the sixth variation of the first embodiment.

[0045] Figure 16 This is a circuit diagram showing the structure of the light source unit 2 in the seventh variation of the first embodiment.

[0046] Figure 17 This is a timing diagram showing the operation of the light source unit 2 in the seventh variation of the first embodiment.

[0047] Figure 18 This shows a cross-sectional view and a plan view of the structure of the light source unit 2 according to the eighth variation of the first embodiment.

[0048] Figure 19 This is a circuit diagram showing the structure of the light source unit 2 according to the second embodiment.

[0049] Figure 20 This is a schematic plan view showing the structure of the light source unit 2 in the third embodiment.

[0050] Figure 21 This is a diagram showing the irradiation position of the irradiation light La, which is slightly changed by the micro-scanning unit 10.

[0051] Figure 22 This is a schematic diagram showing an example of the arrangement of the light-emitting element 2a in the light source section 2.

[0052] Figure 23 It shows Figure 21 The timing diagram shows an example of illumination control at the illumination location.

[0053] Figure 24 This is a diagram showing the illumination positions of four points of the illuminating light La.

[0054] Figure 25 This is a diagram showing an example of the overall structure of the ranging module in the light-emitting device 1b according to the second embodiment.

[0055] Figure 26 This is a diagram illustrating an example of a frame region where the irradiation position is changed by actuator 170.

[0056] Figure 27 This is a diagram showing an example of the configuration of the light source unit 2 according to the third embodiment.

[0057] Figure 28 This is a block diagram showing a configuration example of the ranging device 1 according to the fourth embodiment.

[0058] Figure 29 This is a schematic diagram showing the recognition result of the recognition unit 600.

[0059] Figure 30 This is a schematic diagram illustrating an example of the generated signal of the recognition unit 600.

[0060] Figure 31 This diagram shows a more specific example of the configuration of the pixel array section 100 in the light receiving section 7 according to the fifth embodiment.

[0061] Figure 32 This is a block diagram showing a configuration example of the ranging unit 9a.

[0062] Figure 33 This is a schematic diagram illustrating the ranging method according to the fifth embodiment.

[0063] Figure 34 This is a schematic diagram illustrating the ranging method according to the fifth embodiment.

[0064] Figure 35 This is a schematic diagram illustrating the ranging method according to the fifth embodiment.

[0065] Figure 36 This is a schematic diagram illustrating the ranging method according to the fifth embodiment.

[0066] Figure 37 This is a block diagram of an example of an indirect time-of-flight sensor that applies this technology.

[0067] Figure 38 This is a circuit diagram illustrating a configuration example of pixel 10230 according to the present technology.

[0068] Figure 39 This is a block diagram illustrating an example of a schematic configuration of a vehicle control system.

[0069] Figure 40 This is an explanatory diagram showing an example of the installation location of the vehicle exterior information detection unit and the imaging unit. Detailed Implementation

[0070] In the following description, embodiments of the present disclosure will be described with reference to the accompanying drawings.

[0071] (First Implementation)

[0072] (1) Distance measuring device 1 of the first embodiment

[0073] (1.1) Configuration of ranging device 1

[0074] Figure 1 This is a schematic layout diagram showing an example of the configuration of the ranging device 1 according to the first embodiment. Figure 2This is a block diagram illustrating a configuration example of the ranging device 1 according to the first embodiment. For example, the ranging device 1 of this embodiment is mounted on a car. Figure 1 and Figure 2 As shown, the ranging device 1 includes a light-emitting device 1a, a power supply circuit 4, a light-receiving optical system 6, a light-receiving unit 7, a signal processing unit 8, a control unit 9, and an optical element m2. The light-emitting device 1a includes a light source unit 2, a light-emitting optical system 5, a micro-scanning unit 10, and an optical element m4. Furthermore, the light source unit 2 includes a light-emitting unit 11 and a driving unit 3. Note that the light-emitting optical system 5 and the optical element m4 according to this embodiment can be referred to as an optical system.

[0075] The light source unit 2 emits light through multiple light sources in the light emission unit 11. In this example, the light emission unit 11 includes light emission elements 2a of vertical cavity surface emitting lasers (VCSELs) as each light source, and these light emission elements 2a are arranged in a predetermined pattern (such as a matrix).

[0076] The driving unit 3 is, for example, a driver, and includes a power supply circuit for driving the light-emitting unit 11.

[0077] The power supply circuit 4 generates the power supply voltage for the drive unit 3 based on an input voltage from a battery (not shown) installed in the ranging device 1. The drive unit 3 drives the light-emitting unit 11 based on the power supply voltage.

[0078] The subject S, which is the ranging target, is illuminated by illumination light La emitted from the light-emitting unit 11 via the light-emitting side optical system 5 and optical element m2. The illumination light La is transmitted through the light-emitting side optical system 5 and incident on the optical element m4. The optical element m2 is, for example, a semi-reflective mirror. The illumination light La can illuminate the entire illumination frame area SS or a portion thereof. That is, all the multiple light-emitting elements 2a of the light-emitting unit 11 can emit light simultaneously, or they can emit light selectively. The light-emitting side optical system 5 includes, for example, a single lens or multiple lenses.

[0079] The optical element m4 includes a reflective surface that reflects multiple illumination lights La. The multiple illumination lights La are illuminated by the emission of light from multiple light-emitting elements 2a. For example, the reflective surface can rotate around two intersecting rotation axes r2 and r4. The micro-scanning unit 10 can periodically and minutely change the two rotation axes r2 and r4. That is, the micro-scanning unit 10 is a mechanism for periodically and minutely changing the two rotation axes r2 and r4, and it is assumed that a magnetic circuit or piezoelectric element is used. Alternatively, a voice coil motor, piezoelectric body, shape memory alloy, liquid crystal, etc., can be used to minutely change the illumination position of the measurement light La. Therefore, the optical element m4 periodically and minutely changes the illumination position of the illumination light La. Furthermore, the illumination density of the illumination light La can be increased. Note that the micro-scanning unit 10 according to this embodiment corresponds to the first driving unit. Details of the minute changes will be described later.

[0080] Reflected light from the subject S is reflected by optical element m4, then by optical element m2, and incident on the light-receiving surface of the light-receiving unit 7 via the light-receiving side optical system 6. The light-receiving unit 7 is, for example, a light-receiving element such as a charge-coupled device (CCD) sensor or a complementary metal-oxide-semiconductor (CMOS) sensor, and receives the reflected light from the subject S incident via the light-receiving side optical system 6 as described above, converts the reflected light into an electrical signal, and outputs an electrical signal. The light-receiving side optical system 6 includes, for example, a single lens or multiple lenses.

[0081] The light receiving unit 7 performs processes such as correlated double sampling (CDS) and automatic gain control (AGC) on the electrical signal obtained by photoelectric conversion of the received light, and also performs analog-to-digital (A / D) conversion. Then, the signal as digital data is output to the subsequent signal processing unit 8.

[0082] In addition, the optical receiver 7 in this example outputs a frame synchronization signal Fs to the driver 3. As a result, the driver 3 causes the light-emitting element 2a in the light-emitting unit 11 to use a timing signal TRIG_O based on the frame period of the optical receiver 7 (see the description below). Figure 24 Light emission. Therefore, the light-emitting element 2a can emit light according to the timing of the frame period of the light receiving unit 7.

[0083] The signal processing unit 8 is configured as a signal processing processor, such as a digital signal processor (DSP). The signal processing unit 8 performs various signal processing operations on the digital signals input from the optical receiving unit 7.

[0084] The control unit 9 includes, for example, a microcomputer including a central processing unit (CPU), read-only memory (ROM), random access memory (RAM), or an information processing device such as a DSP, and performs control of the drive unit 3 for controlling the light emission operation of the light-emitting unit 11, as well as control related to the light receiving operation of the light receiving unit 7. Furthermore, the control unit 9 performs drive control of the micro-scanning unit 10.

[0085] The control unit 9 functions as a distance measuring unit 9a. The distance measuring unit 9a measures the distance to the subject S based on a signal input via the signal processing unit 8 (i.e., a signal obtained by receiving reflected light from the subject S). In this example, the distance measuring unit 9a measures the distance to each part of the subject S so that the three-dimensional shape of the subject S can be specified.

[0086] The specific distance measuring method in the distance measuring device 1 will be described again here later.

[0087] (1.2) Distance measurement method

[0088] As a ranging method in ranging device 1, for example, a ranging method based on structured light (STL) or time-of-flight (ToF) can be used.

[0089] The STL method is a method of measuring distance based on an image of a subject S illuminated with a predetermined light / dark pattern, such as a dot pattern or a grid pattern.

[0090] Figure 3 This is a diagram illustrating the STL method of the first embodiment.

[0091] In STL methods, for example, through methods such as Figure 3 The dot pattern shown in A is illuminated on the subject S by a patterned light Lp. The patterned light Lp is divided into multiple blocks BL, and different dot patterns are assigned to each block BL (the dot patterns do not overlap between blocks BL).

[0092] Figure 3 B is an illustration of the ranging principle of the STL method.

[0093] Here, an example is shown where wall W and box BX arranged in front of wall W serve as the subject S, and the subject S is illuminated by patterned light Lp. "G" in the figure schematically indicates the viewing angle of light receiving unit 7.

[0094] Furthermore, in the figure, “BLn” represents the light of a specific block BL in the pattern light Lp, and “dn” represents the dot pattern of block BLn projected onto the light receiving image of the light receiving unit 7.

[0095] Here, when the box BX in front of the wall W is absent, the dot pattern of block BLn is projected onto position "dn'" in the light-received image. That is, the position onto which the pattern of block BLn is projected in the light-received image differs between the presence and absence of box BX, and specifically, pattern distortion occurs.

[0096] The STL method is a method for obtaining the shape and depth of a subject S by using the distortion of the projected pattern caused by the shape of the subject S. Specifically, the STL method is a method for obtaining the shape and depth of a subject S based on pattern distortion.

[0097] In the case of using the STL method, for example, an infrared (IR) light receiver using the global shutter method is used as the light receiver 7. Then, in the case of the STL method, the ranging unit 9a controls the driving unit 3 to cause the light emitting unit 11 to emit pattern light, detects the pattern distortion of the image signal obtained by the signal processing unit 8, and calculates the distance based on the pattern distortion.

[0098] Subsequently, the ToF method measures the distance to the object by detecting the time of flight (time difference) of light from the light-emitting unit 11 to the light-receiving unit 7 via reflection from the object.

[0099] In the case where the so-called direct ToF (dToF) method is used as the ToF method, a single-photon avalanche diode (SPAD) is used as the light receiver 7, and the light emitter 11 is pulse-driven. In this case, the ranging unit 9a calculates the time difference between light emission and light reception of light emitted from the light emitter 11 and received by the light receiver 7 based on the signal input via the signal processing unit 8, and calculates the distance to each part of the subject S based on the time difference and the speed of light. In the dToF method, since the distance to the subject S is calculated by calculating the time from light emission to light reception, the time resolution is improved as the emission pulse width becomes narrower, and more accurate ranging becomes possible. Therefore, the dToF method is more suitable for this embodiment that realizes high-power and short-pulse emission.

[0100] Furthermore, when employing the so-called indirect ToF (iToF) method (phase difference method) as the ToF method, for example, a light receiver capable of receiving IR is used as the light receiver 7. In the iToF method, since the distance to the subject is calculated based on the phase difference between the emitted light and the light reflected and received from the subject, it is desirable that the waveform of the LDD output current during emission has a steep rise and fall. This embodiment is also suitable for the iToF method because the waveform characteristics are improved by reducing the inductance of the wiring in the light-emitting element 2a.

[0101] (2) Detailed description of the configuration of the light source unit 2 and the light-emitting side optical system 5 in the light-emitting device 1a according to the first embodiment.

[0102] Figure 4 is a diagram showing the structure of the light-emitting part 11. Figure 4A It shows the light source unit 2 and the light-emitting side optical system 5 (see Figure 1 A diagram illustrating a configuration instance of ). Figure 4A The light-emitting device 1a includes a light-emitting part (VCSEL chip) 11 contained in the light source part 2, a laser diode driver (LDD) substrate 12 including the driving part 3, a mounting substrate 13, a heat dissipation substrate 14, a correction lens holding part 15, one or more correction lenses 16, and wiring 17. The VCSEL chip 11 is also referred to as a VCSEL substrate. The VCSEL chip 11 is an example of the first substrate of this disclosure, and the LDD substrate 12 is an example of the second substrate of this disclosure. That is, the one or more correction lenses 16 are a configuration example of the light receiving side optical system 6, and the LDD substrate 12 is a configuration example including the driving part 3. Furthermore, the mounting substrate 13, the heat dissipation substrate 14, the correction lens holding part 15, and the wiring 17 are configured as a package.

[0103] Figure 4A The X, Y, and Z axes are shown as perpendicular to each other. The +Z direction corresponds to the upward direction, and the -Z direction corresponds to the downward direction. Note that the -Z direction may or may not exactly coincide with the direction of gravity.

[0104] The VCSEL chip 11 is mounted on the mounting substrate 13 via a heat sink 14, and the LDD substrate 12 is also mounted on the mounting substrate 13. The mounting substrate 13 is, for example, a printed circuit board. The light receiving unit 7 and the signal processing unit 8 described above may be further mounted on the mounting substrate 13. The heat sink 14 is, for example, a ceramic substrate such as an alumina substrate or an aluminum nitride substrate.

[0105] A correction lens holding portion 15 is disposed on the heat dissipation substrate 14 to surround the VCSEL chip 11, and holds one or more correction lenses 16 above the VCSEL chip 11. These correction lenses 16 are included in the light-emitting side optical system 5 described above. The light emitted from the light-emitting portion 2 in the VCSEL chip 11 is corrected by these correction lenses 16 and then applied to the subject S described above. Figure 4A Two correction lenses 16 held by the correction lens holding part 15 are shown as an example.

[0106] Wiring 17 is disposed on the front surface, rear surface, and interior of the mounting substrate 13, and electrically connects the VCSEL chip 11 and the LDD substrate 12. Wiring 17 may be, for example, printed wiring disposed on the front or rear surface of the mounting substrate 13 or through-hole wiring passing through the mounting substrate 13. In this embodiment, wiring 17 further passes through or near the heat sink 14.

[0107] Figure 4B This is a diagram showing a cross-sectional example of a VCSEL chip 11 including multiple light-emitting elements. Figure 4B The VCSEL chip 11 includes a substrate 21, a laminated film 22, and a plurality of light-emitting elements 23. The light-emitting elements 23 are, for example, VCSEL emitters and correspond to the portion that emits laser light. These light-emitting elements 23 are specific examples of the light-emitting element 2a described above.

[0108] Here, substrate 21 is a compound semiconductor substrate, such as a gallium arsenide (GaAs) substrate. Figure 4 shows the front surface S1 of substrate 21 facing the -Z direction and the rear surface S2 of substrate 21 facing the +Z direction. The front surface S1 and the rear surface S2 are perpendicular to the Z direction. The front surface S1 is the lower surface of substrate 21, and the rear surface S2 is the upper surface of substrate 21.

[0109] The laminated film 22 includes multiple layers stacked on the front surface S1 of the substrate 21. Examples of these layers include an n-type semiconductor layer, an active layer, a p-type semiconductor layer, a light-reflecting layer, and an insulating layer including a light-emitting window. The laminated film 22 includes multiple pillars P protruding in the -Z direction. A portion of these pillars P is a plurality of light-emitting elements 23.

[0110] The light-emitting element 23 is disposed on the front surface S1 of the substrate 21 as a portion of the laminated film 22. In this embodiment, the light-emitting element 23 has a VCSEL structure and emits light in the +Z direction. Light emitted from the light-emitting element 23 passes through the substrate 21 from the front surface S1 to the rear surface S2 and is incident on the correction lens 16 from the substrate 21. As described above, the VCSEL chip 11 in this embodiment is a back-emitting VCSEL chip. The light-emitting element 23 is also referred to as the mesa portion.

[0111] Each light-emitting element 23 is disposed between an anode wiring (anode electrode) and a cathode wiring (cathode electrode) (not shown). Each light-emitting element 23 emits light when current flows between the anode wiring and the cathode wiring. Further details of the anode wiring and the cathode wiring will be described later.

[0112] Figure 5 This is a circuit diagram showing the structure of the light source unit 2 according to the first embodiment.

[0113] like Figure 5As shown, the light source unit 2 according to the first embodiment includes a plurality of light-emitting elements 23 arranged in a two-dimensional array and a plurality of transistors 24 electrically connected to the light-emitting elements 23. These transistors 24 are, for example, N-type metal-oxide-semiconductor (MOS) transistors. Figure 5 An example is shown where the light source unit 2 according to the first embodiment includes 9×9 light-emitting elements 23 and 9×9 transistors 24. Therefore, Figure 5 The light source unit 2 shown includes a 9ch × 9ch array of light-emitting elements. Note that the number of channels in the light-emitting element array is arbitrary.

[0114] like Figure 5 As shown, the light source unit 2 according to the first embodiment further includes a first anode wiring 31, a second anode wiring 32, a third anode wiring 33, a plurality of first capacitors 34, a plurality of second capacitors 35, a plurality of third capacitors 36, a first selection circuit 37, a second selection circuit 38, a third selection circuit 39, a plurality of cathode wirings 41, and a plurality of gate wirings 42. The first to third anode wirings 31 to 33 are examples of the first terminal wirings of this disclosure, and the cathode wiring 41 is an example of the second terminal wirings of this disclosure. Furthermore, the first to third capacitors 34 to 36 are examples of the first to Mth capacitors of this disclosure, and the first to third selection circuits 37 to 39 are examples of the first to Mth selection circuits of this disclosure (M is an integer greater than or equal to 2). Figure 5 An example with M=3 is shown.

[0115] The first terminal wiring includes M first wirings 31a, 32a and 33a extending in the first direction X, and N second wirings 31b, 32b and 33b extending in the second direction Y intersecting the first direction X and electrically connected to the M first wirings 31a, 32a and 33a respectively (M is an integer greater than 2). Figure 5 An example with M=3 and N=3 is shown. First terminal wiring is electrically connected to the first terminals of multiple light-emitting elements 23. Here, the first wiring 31a and second wiring 31b connected to each other are referred to as the first anode wiring 31, the second wiring 32a and second wiring 32b connected to each other are referred to as the second anode wiring 32, and the third wiring 33a and third wiring 33b connected to each other are referred to as the third anode wiring 33. Furthermore, in this document, the first direction X can be referred to as the horizontal direction, and the second direction Y can be referred to as the vertical direction. Additionally, in the following text, one of the first terminal wiring and the multiple second terminal wirings can be referred to as the anode wiring, and the other of the first terminal wiring and the multiple second terminal wirings can be referred to as the cathode wiring.

[0116] According to the first embodiment, the light source unit 2 includes L groups of first to third anode wirings 31 to 33 (L is an integer greater than or equal to 1), each including a group of first to third anode wirings 31 to 33. Figure 5 An example with L=5 is shown.

[0117] The five sets of first anode wirings 31 include: multiple (e.g., five) first wirings 31a, each extending in a first direction X (horizontal direction) and arranged in a second direction Y (vertical direction); and multiple (e.g., five) second wirings 31b, each extending in the second direction Y (vertical direction) and arranged in the first direction X (horizontal direction). Here, the first wirings 31a may be referred to as first horizontal wirings 31a, and the second wirings 31b may be referred to as first vertical wirings 31b.

[0118] The five sets of second anode wirings 32 include: multiple (e.g., five) first wirings 32a, each extending in a first direction X (horizontal direction) and arranged in a second direction Y (vertical direction); and multiple (e.g., five) second wirings 32b, each extending in the second direction Y (vertical direction) and arranged in the first direction X (horizontal direction). Here, the first wirings 32a may be referred to as second horizontal wirings 32a, and the second wirings 32b may be referred to as second vertical wirings 32b.

[0119] The five sets of third anode wirings 33 include: multiple (e.g., five) first wirings 33a, each extending in a first direction X (horizontal direction) and arranged in a second direction Y (vertical direction); and multiple (e.g., five) second wirings 33b, each extending in the second direction Y (vertical direction) and arranged in the first direction X (horizontal direction). Here, the first wirings 33a may be referred to as third horizontal wirings 33a, and the second wirings 33b may be referred to as third vertical wirings 33b.

[0120] Figure 5 An example is shown of a light source unit 2 according to the first embodiment, which includes five first horizontal wirings 31a, five first vertical wirings 31b, five second horizontal wirings 32a, five second vertical wirings 32b, five third horizontal wirings 33a, and five third vertical wirings 33b. Figure 5 An example of setting up L groups of M first wirings and N second wirings is shown. Figure 5 The number of light-emitting elements 23 shown is M(L-2)×N(L-2) when represented by N and L.

[0121] Note that the first to third anode wirings 31 to 33 may include the first to Mth horizontal wirings of the La group and the first to Nth vertical wirings of the Lb group (La and Lb are integers greater than 2 that satisfy La ≠ Lb). In this case, the number of light-emitting elements 23 in the light-emitting section 11 is M(La-2)×N(Lb-2).

[0122] The first selection circuit 37 includes transistors 37a and 37b connected in series. Similarly, the second selection circuit 38 includes transistors 38a and 38b connected in series. Similarly, the third selection circuit 39 includes transistors 39a and 39b connected in series. Transistors 37a, 38a, and 39a are, for example, P-channel MOS transistors. Transistors 37b, 38b, and 39b are, for example, N-channel MOS transistors. Transistors 37a, 38a, and 39a are examples of the first switch of this disclosure. Transistors 37b, 38b, and 39b are examples of the second switch of this disclosure.

[0123] [First to third anode wiring 31 to 33]

[0124] exist Figure 5 In order to distinguish the first to third anode wirings 31 to 33 from each other, the first anode wiring 31 is represented by a thick solid line, the second anode wiring 32 is represented by a thick dashed line, and the third anode wiring 33 is represented by a thin solid line.

[0125] The first anode wiring 31 has a structure in which a plurality of first horizontal wirings 31a and a plurality of first vertical wirings 31b are arranged in a mesh pattern. The first horizontal wirings 31a and the first vertical wirings 31b are electrically connected to each other at the points where they intersect. Similarly, the second anode wiring 32 includes a plurality of second horizontal wirings 32a and a plurality of second vertical wirings 32b that are electrically connected to each other, and the third anode wiring 33 includes a plurality of third horizontal wirings 33a and a plurality of third vertical wirings 33b that are electrically connected to each other. On the other hand, the first to third anode wirings 31 to 33 are electrically isolated from each other.

[0126] The first to third horizontal wirings 31a to 33a extend in the first direction X (horizontal direction) and are adjacent to each other in the second direction Y (vertical direction). Figure 5 In this configuration, the first to third horizontal wirings 31a to 33a extend linearly in the first direction X, but may extend in a curved shape in the first direction X. That is, the first to third horizontal wirings 31a to 33a may include curved portions.

[0127] On the other hand, the first to third vertical wirings 31b to 33b extend in the second direction Y and are adjacent to each other in the first direction X. Figure 5 In this configuration, the first to third vertical wirings 31b to 33b extend linearly in the second direction Y, but may extend in a curved shape in the second direction Y. That is, the first to third vertical wirings 31b to 33b may also have curved portions.

[0128] Figure 5 Five groups of first to third horizontal wirings (first wirings) 31a to 33a are shown. Figure 5In the middle, the first to third horizontal wirings 31a to 33a of the first group, second group, third group, fourth group, and fifth group are arranged sequentially from top to bottom. In each group, the first horizontal wiring 31a, second horizontal wiring 32a, and third horizontal wiring 33a are arranged sequentially from top to bottom. The first to third horizontal wirings 31a to 33a of the first group and the first to third horizontal wirings 31a to 33a of the fifth group are arranged in a 9×9 array sandwiching the light-emitting elements 23. Each group of the first to third horizontal wirings 31a to 33a of the second to fourth groups is arranged along the row of (nine) light-emitting elements 23.

[0129] Figure 5 Five sets of first to third vertical wiring (second wiring) 31b to 33b are also shown. Figure 5 In the middle, the first to third vertical wirings 31b to 33b of the first group, second group, third group, fourth group, and fifth group are arranged sequentially from left to right. In each group, the first vertical wiring 31b, second vertical wiring 32b, and third vertical wiring 33b are arranged sequentially from left to right. The first to third vertical wirings 31b to 33b of the first group and the first to third vertical wirings 31b to 33b of the fifth group are arranged in a 9×9 array sandwiching the light-emitting elements 23. Each group of the first to third vertical wirings 31b to 33b of the second to fourth groups is arranged along the column of (nine) light-emitting elements 23.

[0130] The anode of each light-emitting element 23 is electrically connected to any one of the first to third vertical wirings 31b to 33b. For example, the leftmost column of light-emitting elements 23 is electrically connected to the first vertical wiring 31b in the second group of first to third vertical wirings 31b to 33b. Furthermore, the rightmost column of light-emitting elements 23 is electrically connected to the third vertical wiring 33b in the fourth group of first to third vertical wirings 31b to 33b. Note that the anode of each light-emitting element 23 may be electrically connected to any one of the first to third horizontal wirings 31a to 33a, rather than to any one of the first to third vertical wirings 31b to 33b. The anode is an example of a first terminal of this disclosure.

[0131] [Cathode Wiring 41]

[0132] Each cathode wire 41 extends in the first direction X and is electrically connected to the cathodes of three light-emitting elements 23. Specifically, each cathode wire 41 is electrically connected to: a light-emitting element 23 electrically connected to the first vertical wire 31b, a light-emitting element 23 electrically connected to the second vertical wire 32b, and a light-emitting element 23 electrically connected to the third vertical wire 33b. These three light-emitting elements 23 are adjacent to each other in the first direction X. Figure 5Twenty-seven cathode wirings 41 are shown for 81 light-emitting elements 23. The cathode is an example of the second terminal of this disclosure. The number of light-emitting elements 23 connected to each cathode wiring 41 is not limited to three. P cathodes of light-emitting elements 23 (P is an integer greater than 2) can be electrically connected to each cathode wiring 41.

[0133] Each light-emitting element 23 is disposed between a corresponding anode wiring (i.e., any one of the first to third anode wirings 31 to 33) and a corresponding cathode wiring (i.e., any one of the plurality of cathode wirings 41). Each light-emitting element 23 emits light when current flows between the corresponding anode wiring and the corresponding cathode wiring.

[0134] [Gate wiring 42]

[0135] Each gate wiring 42 extends in the first direction X and is electrically connected to the gate of three transistors 24. The sources of these three transistors 24 are electrically connected to ground wiring (GND), and their drains are electrically connected to the same single cathode wiring 41. These three transistors 24 form a driving circuit E. Figure 5 The diagram shows 27 gate wirings 42 for 81 transistors 24.

[0136] Each drive circuit E is electrically connected to the cathodes of the three light-emitting elements 23 via a cathode wiring 41. Each drive circuit E (output stage) E is used to drive the light-emitting elements 23 to generate (output) light from the light-emitting elements 23. For example, in the case of generating light from the light-emitting elements 23, a predetermined signal is applied to the gate wiring 42 of the drive circuit E for the light-emitting elements 23. This turns on the source and drain of each transistor 24 in the drive circuit E, thereby allowing current to flow through the light-emitting elements 23. When current flows through the light-emitting elements 23, light is generated from the light-emitting elements 23. Figure 5 The light source unit 2 shown includes 27 driving circuits E for 81 light-emitting elements 23. Note that each driving circuit E according to this embodiment is related to the driving unit 3 (see [link]). Figure 2 )correspond.

[0137] [First to third selection circuits 37 to 39]

[0138] The first to third selection circuits 37 to 39 are respectively electrically connected to the first to third horizontal wirings 31a to 33a of the first to third anode wirings 31 to 33. The first selection circuit 37 is used to select the light-emitting element 23 electrically connected to the first anode wiring 31 as the light-emitting element 23 that generates light. The second selection circuit 38 is used to select the light-emitting element 23 electrically connected to the second anode wiring 32 as the light-emitting element 23 that generates light. The third selection circuit 39 is used to select the light-emitting element 23 electrically connected to the third anode wiring 33 as the light-emitting element 23 that generates light. The first to third selection circuits 37 to 39 can be electrically connected to the first to third vertical wirings 31b to 33b of the first to third anode wirings 31 to 33, instead of the first to third horizontal wirings 31a to 33a of the first to third anode wirings 31 to 33.

[0139] The first selection circuit 37 includes a transistor 37a whose source is electrically connected to a power supply line (VDD) and a transistor 37b whose source is electrically connected to a ground line. The drains of transistors 37a and 37b are electrically connected to a first anode line 31. The first selection circuit 37 is electrically connected to each of the first capacitors 34 via the first anode line 31.

[0140] Transistor 37a is used to accumulate charge in each of the first capacitors 34. Transistor 37b is used to release charge from each of the first capacitors 34. When a predetermined signal is applied to the gate of transistor 37a, charge accumulates in each of the first capacitors 34. When a predetermined signal is applied to the gate of transistor 37b, charge is released from each of the first capacitors 34. Therefore, according to this embodiment, by selectively accumulating charge in the first capacitors 34 of the first to third capacitors 34 to 36 by the first selection circuit 37, current can flow through each light-emitting element 23 electrically connected to the first anode wiring 31.

[0141] like Figure 5 As shown, the second and third selection circuits 38 and 39 are structurally similar to the first selection circuit 37. Therefore, according to this embodiment, by accumulating charge in each second capacitor 35 by the second selection circuit 38, current can flow through each light-emitting element 23 electrically connected to the second anode wiring 32. Furthermore, according to this embodiment, by accumulating charge in each third capacitor 36 by the third selection circuit 39, current can flow through each light-emitting element 23 electrically connected to the third anode wiring 33.

[0142] [First to third capacitors 34 to 36]

[0143] The first to third capacitors 34 to 36 are respectively electrically connected to the first to third anode wirings 31 to 33. Each first capacitor 34 accumulates charge supplied to the light-emitting element 23 electrically connected to the first anode wiring 31. Each second capacitor 35 accumulates charge supplied to the light-emitting element 23 electrically connected to the second anode wiring 32. Each third capacitor 36 accumulates charge supplied to the light-emitting element 23 electrically connected to the third anode wiring 33. According to this embodiment, current can flow through each light-emitting element 23 by supplying charge from the first to third capacitors 34 to 36. Each of the first to third capacitors 34 to 36 includes one electrode electrically connected to any one of the first to third anode wirings 31 to 33 and another electrode electrically connected to the ground wiring.

[0144] Figure 5 The light source unit 2 shown includes an array of light-emitting elements, which comprises 9×9 light-emitting elements 23 arranged in a two-dimensional array. Figure 5 As shown, the array of light-emitting elements has a substantially square shape in the planar view. Figure 5 The light source section 2 shown includes four sets of first to third capacitors 34 to 36 near the four sides of the square. Specifically, Figure 5 The light source unit 2 shown includes a first group of first to third capacitors 34 to 36 near the upper side of the square, a second group of first to third capacitors 34 to 36 near the right side of the square, a third group of first to third capacitors 34 to 36 near the lower side of the square, and a fourth group of first to third capacitors 34 to 36 near the left side of the square. These first to third capacitors 34 to 36 are examples of the K groups of first to M capacitors of this disclosure (K is an integer greater than 2). Figure 5 An example with K=4 is shown.

[0145] The first and third capacitors 34 to 36 of the first and third groups are respectively electrically connected to the first and third horizontal wirings 31a to 33a of the first and third anode wirings 31 to 33. On the other hand, the first and third capacitors 34 to 36 of the second and fourth groups are respectively electrically connected to the first and third vertical wirings 31b to 33b of the first and third anode wirings 31 to 33. As a result, Figure 5 The first to third capacitors 34 to 36 shown are electrically connected to the first to third anode wirings 31 to 33, respectively.

[0146] In each group, the first to third capacitors 34 to 36 are arranged in a clockwise order. For example, in the first group, the first capacitor 34, the second capacitor 35, and the third capacitor 36 are respectively positioned on the left, center, and right sides near the top of the square. Furthermore, in the second group, the first capacitor 34, the second capacitor 35, and the third capacitor 36 are respectively positioned on the upper, center, and lower sides near the right side of the square. As a result, Figure 5 The four groups of first to third capacitors 34 to 36 shown are arranged symmetrically with respect to the center of the square. The center of the square approximately corresponds to the position of the light-emitting elements 23 in the fifth row and fifth column of the 9×9 array of light-emitting elements 23. Figure 5 In the middle, the arrangement of the four groups of first to third capacitors 34 to 36 is quadruple rotational symmetry (90-degree rotational symmetry).

[0147] According to this embodiment, the average distance between each light-emitting element 23 and its corresponding four capacitors can be set to a value close to the average distance between another light-emitting element 23 and its corresponding four capacitors.

[0148] For example, the upper left light-emitting element 23 is close to the upper first capacitor 34 but far from the lower first capacitor 34. On the other hand, the lower right light-emitting element 23 is close to the right third capacitor 36 but far from the left third capacitor 36. Therefore, the average distance between the upper left light-emitting element 23 and the four first capacitors 34 is close to the average distance between the lower right light-emitting element 23 and the four third capacitors 36. The same applies to the other 79 light-emitting elements 23. Therefore, regarding the anode wiring between each light-emitting element 23 and its corresponding four capacitors, the impedance difference between the wirings of different light-emitting elements 23 can be reduced.

[0149] Note that the light-emitting elements 23, indicated by reference numerals P2 to P4, are electrically connected to the first anode wiring 31 and to cathode wirings 41 that are different from each other. When only these light-emitting elements 23 are driven (simultaneously), only the first selection circuit 37 of the first to third selection circuits 37 to 39 is turned on, and only the drive circuit E for these cathode wirings 41 is turned on. As a result, charge accumulates only in the first capacitor 34 of the first to third capacitors 34 to 36, and only the nine light-emitting elements 23 electrically connected to these cathode wirings 41 are driven. Therefore, current flows only in the light-emitting elements 23 indicated by reference numerals P2 to P4, and only these light-emitting elements 23 emit light.

[0150] In this embodiment, the light source unit 2 may include the first to third capacitors 34 to 36 only near one, two, or three of the four sides of the square. However, in this case, it is also desirable that the first to third capacitors 34 to 36 be arranged symmetrically or nearly symmetrically with respect to the center of the square. Therefore, it is desirable that the light source unit 2 of this embodiment includes the first to third capacitors 34 to 36 on two or more of the four sides of the square. For example, by providing two sets of the first to third capacitors 34 to 36 near the upper and lower sides of the square, double rotational symmetry (180-degree rotational symmetry) can be achieved.

[0151] Figure 6This is a graph used to describe the performance of the light source unit 2 in the first embodiment.

[0152] Figure 6 The vertical axis represents the LDD output current (from the LDD substrate 12 to the output current of each light-emitting element 23), and Figure 6 The horizontal axis represents time. Figure 6 The waveform of the LDD output current is shown. Figure 6 The peak value I of the LDD output current is also shown. 峰值 The pulse width W of the LDD output current and the full width at half maximum (W') of the LDD output current.

[0153] To improve the performance of ranging device 1, it is desirable to increase the peak value I. 峰值 And shorten the pulse width W (or full width at half maximum W'). According to this embodiment, the peak value I can be increased by reducing the impedance of each trace and the impedance difference between traces. 峰值 And shorten the pulse width W (or full width at half maximum W').

[0154] Figure 7 These are cross-sectional and plan views showing the structure of the light source unit 2 according to the first embodiment. Figure 7 A shows the XZ cross section of the light source section 2. Figure 7 B shows Figure 7 The planar structure of the light source section 2 shown in Figure A.

[0155] The light source unit 2 in this embodiment may have Figure 7 The structures shown in A and B. Figure 7 In A and B, the light source unit 2 of this embodiment includes a VCSEL chip 11, an LDD substrate 12, a mounting substrate 13, and four sets of first to third capacitors 34 to 36.

[0156] The mounting substrate 13 includes an insulating substrate 51, an insulating film 52, a wiring layer 53, an insulating film 54, a wiring layer 55, and multiple wirings 56. Figure 7 The LDD substrate 12 shown in Figure A is disposed in the insulating substrate 51. An insulating film 52 and a wiring layer 53 are sequentially formed on the upper surface of the insulating substrate 51. An insulating film 54 and a wiring layer 55 are sequentially formed on the bottom surface of the insulating substrate 51. Figure 7 The VCSEL chip 11 shown in Figure A is disposed on the wiring layer 53. Each wiring 56 is formed in the insulating substrate 51, the insulating film 52 and the wiring layer 53, and electrically connects the VCSEL chip 11 and the LDD substrate 12.

[0157] Each of the first to third capacitors 34 to 36 is disposed on the wiring layer 53 via a plurality of solder balls 57 and is electrically connected to the VCSEL chip 11 and the LDD substrate 12 via the solder balls 57 and the wiring layer 53.

[0158] exist Figure 7 In diagram B, the VCSEL chip 11 and the LDD substrate 12 are square in shape in the plan view. Figure 7 The light source section 2 of the light-emitting device 1a shown in Figure B includes four sets of first to third capacitors 34 to 36 near the four sides of a square, which is the planar shape of the VCSEL chip 11. The first to third capacitors 34 to 36 are arranged symmetrically with respect to the center of the square. Note that... Figure 7 The light source section 2 of the light-emitting device 1a shown in B may include the first to third capacitors 34 to 36 only near one, two, or three of the four sides of the square. However, in this case, it is also desirable that the first to third capacitors 34 to 36 be arranged in a shape that is symmetrical or nearly symmetrical with respect to the center of the square. Therefore, it is desirable that... Figure 7 The light source section 2 of the light-emitting device 1a shown in B includes first to third capacitors 34 to 36 on two or more sides of the square.

[0159] exist Figure 7 In A and B, there are multiple light-emitting elements 23, multiple transistors 24, and first to third selection circuits 37 to 39. Figure 5 For example, it can be disposed in VCSEL chip 11 or LDD substrate 12. For example, similar to Figure 4B The light-emitting element 23 shown is disposed in the VCSEL chip 11. On the other hand, the transistor 24 and the first to third selection circuits 37 to 39 can be disposed in the VCSEL chip 11 or in the LDD substrate 12. Note that the first to third capacitors 34 to 36 can be disposed on the VCSEL chip 11 or on the LDD substrate 12.

[0160] Figure 8 This is a perspective view schematically showing the structure of the light source unit 2 in the first embodiment.

[0161] Figure 8 It schematically shows that in Figure 7 The shapes of VCSEL chip 11 and LDD substrate 12 are shown in A and B. Figure 8 Further schematic and partial illustration shows the first to third horizontal wirings 31a to 33a and the first to third vertical wirings 31b to 33b, as well as multiple cathode wirings 41. (See attached diagram.) Figure 8 As shown, the first to third horizontal wirings 31a to 33a and the first to third vertical wirings 31b to 33b have a mesh structure.

[0162] Note that, although Figure 8The first to third anode wirings 31 to 33 and cathode wirings 41 shown are drawn between the VCSEL chip 11 and the LDD substrate 12, but they can be disposed in the VCSEL chip 11, disposed in the LDD substrate 12, or disposed between the VCSEL chip 11 and the LDD substrate 12.

[0163] Next, refer to Figures 9 to 18 The light source unit 2 of various modifications of this embodiment is described. (Refer to...) Figures 1 to 8 The description also applies to these variations.

[0164] (3) Light source section 2 of the first variant

[0165] Figure 9 This is a circuit diagram showing the structure of the light source unit 2 according to a first variation of the first embodiment.

[0166] Figure 9 The light source unit 2 shown has the same Figure 5 The structure is the same as that of the light source unit 2 shown. Here, the driving method of the light-emitting element 23, indicated by reference numerals P1 to P6, will be described.

[0167] The light-emitting element 23, indicated by reference numeral P1, is electrically connected at its upper left end to the first anode wiring 31 and the cathode wiring 41. When only the light-emitting element 23 is driven (driven alone), only the first selection circuit 37 of the first to third selection circuits 37 to 39 is turned on, and only the drive circuit E for the cathode wiring 41 at the upper left end is turned on. As a result, charge accumulates only in the first capacitor 34 of the first to third capacitors 34 to 36, and only the three light-emitting elements 23 electrically connected to the cathode wiring 41 at the upper left end are driven. Therefore, current flows only through the light-emitting element 23 indicated by reference numeral P1, and only this light-emitting element 23 emits light.

[0168] Light-emitting elements 23, indicated by reference numerals P2 to P4, are electrically connected to the first anode wiring 31 and to cathode wirings 41, which are different from each other. When only these light-emitting elements 23 are driven (simultaneously), only the first selection circuit 37 of the first to third selection circuits 37 to 39 is turned on, and only the drive circuit E for these cathode wirings 41 is turned on. As a result, charge accumulates only in the first capacitor 34 of the first to third capacitors 34 to 36, and only the nine light-emitting elements 23 electrically connected to these cathode wirings 41 are driven. Therefore, current flows only in the light-emitting elements 23 indicated by reference numerals P2 to P4, and only these light-emitting elements 23 emit light.

[0169] Light-emitting elements 23, indicated by reference numerals P5 and P6, are electrically connected to the first and second anode wires 31 and 32, respectively, and are also electrically connected to the same single cathode wire 41. When only these light-emitting elements 23 are driven (simultaneously), only the first and second selection circuits 37 and 38 of the first to third selection circuits 37 to 39 are turned on, and only the drive circuit E for the cathode wire 41 is turned on. As a result, charge accumulates only in the first and second capacitors 34 and 35 of the first to third capacitors 34 to 36, and only the three light-emitting elements 23 electrically connected to the cathode wire 41 are driven. Therefore, current flows only in the light-emitting elements 23 indicated by reference numerals P5 and P6, and only these light-emitting elements 23 emit light.

[0170] Note that the individual driving associated with the light-emitting element 23 indicated by reference numeral P1 also applies to the other 80 light-emitting elements 23. This also applies to the simultaneous driving of the light-emitting elements 23 indicated by reference numerals P2 to P6. The number of light-emitting elements 23 to be driven simultaneously can be arbitrary. For example, individual driving and simultaneous driving are determined by… Figure 1 The control unit 9 shown in the figure controls the system.

[0171] (4) Light source section 2 of the second variation

[0172] Figure 10 This is a circuit diagram showing the structure of the light source unit 2 according to the second variation of the first embodiment.

[0173] In this modified example, the light source section 2 is... Figure 5 The locations of the first to third anode wirings 31 to 33 shown include the first to third cathode wirings 31' to 33', the locations of the multiple cathode wirings 41 include multiple anode wirings 41', and do not include multiple gate wirings 42. Furthermore, similar to the first to third anode wirings 31 to 33, the first to third cathode wirings 31' to 33' respectively include first to third horizontal wirings 31a' to 33a' and first to third vertical wirings 31b' to 33b'. The first to third cathode wirings 31' to 33' are examples of the first terminal wirings of this disclosure. The anode wiring 41' is an example of the second terminal wirings of this disclosure.

[0174] Each light-emitting element 23 in this variant includes a cathode electrically connected to any one of the first to third cathode wirings 31' to 33' and an anode electrically connected to any one of the plurality of anode wirings 41'.

[0175] In this variation, the light source section 2 is still... Figure 5The locations of the first to third capacitors 34 to 36 shown in the diagram respectively include first to third transistors 61 to 63. The first to third transistors 61 to 63 are, for example, N-type MOS transistors. The gates of the first to third transistors 61 to 63 are electrically connected to the first to third gate wirings 64 to 66, respectively. Each of the first to third transistors 61 to 63 includes a drain electrically connected to any one of the first to third cathode wirings 31' to 33' and a source electrically connected to a ground wiring. Each of the first to third transistors 61 to 63 forms a drive circuit E. The drive circuit E including the first to third transistors 61 to 63 is an example of the first to Mth drive circuits.

[0176] The light source section 2 in this modification also includes... Figure 5 Multiple capacitors 67 are located at the locations of the multiple transistors 24 shown. Each of these capacitors 67 includes one electrode electrically connected to any one of the multiple anode wires 41' and another electrode electrically connected to the ground wire.

[0177] The light source section 2 of this modification further includes a plurality of selection circuits 68 replacing the first to third selection circuits 37 to 39. Each selection circuit 68 is electrically connected to a corresponding anode wiring 41'. Each selection circuit 68 includes a transistor 68a containing a source electrically connected to a power supply wiring and a transistor 68b containing a source electrically connected to a ground wiring. The drains of transistors 68a and 68b are electrically connected to the cathode wiring 41. Each selection circuit 68 is electrically connected to a corresponding capacitor 67 via the anode wiring 41'. Transistor 68a is, for example, a P-type MOS transistor. Transistor 68b is, for example, an N-type MOS transistor. Transistor 68a is an example of the first switch of this disclosure. Transistor 68b is an example of the second switch of this disclosure.

[0178] The functions of capacitor 67, transistor 68a, and transistor 68b are similar to those of the first to third capacitors 34 to 36, transistors 37a to 39a, and transistors 37b to 39b, respectively. Transistor 68a can accumulate charge in its corresponding capacitor 67. Transistor 68b can release charge from its corresponding capacitor 67. Capacitor 67 provides charge to light-emitting element 23 via anode wiring 41', thereby allowing current to flow through light-emitting element 23.

[0179] Furthermore, the functions of the first to third transistors 61 to 63 and their driving circuits E are similar to those of transistor 34 and its driving circuits E. The first to third transistors 61 to 63 can respectively drive the light-emitting elements 23 electrically connected to the first to third cathode wirings 31' to 33'.

[0180] According to the light source unit 2 of this modified example, by having a different structure from the light source unit 2 of the first embodiment, it is possible to achieve control similar to that of the light source unit 2 of the first embodiment.

[0181] (5) Light source section 2 of the third variation

[0182] Figure 11 This is a circuit diagram showing the structure of the light source unit 2 according to the third variation of the first embodiment.

[0183] The light source section 2 in this modification includes Figure 5 The diagram shows the first to third cathode wirings 31' to 33' at the locations of the first to third anode wirings 31 to 33, the multiple anode wirings 41' at the locations of the multiple cathode wirings 41, and the multiple gate wirings 42' at the locations of the multiple gate wirings 42. Furthermore, similar to the first to third anode wirings 31 to 33, the first to third cathode wirings 31' to 33' each include first to third horizontal wirings 31a' to 33a' and first to third vertical wirings 31b' to 33b'. The first to third cathode wirings 31' to 33' are examples of the first terminal wirings of this disclosure. The anode wiring 41' is an example of the second terminal wirings of this disclosure.

[0184] Each light-emitting element 23 of this variant includes a cathode electrically connected to any one of the first to third cathode wirings 31' to 33' and an anode electrically connected to any one of the plurality of anode wirings 41'. Each transistor 24 of this variant includes a gate electrically connected to any one of the plurality of gate wirings 42', a drain electrically connected to any one of the plurality of anode wirings 41', and a source electrically connected to a power supply wiring. Each transistor 24 of this variant is, for example, a P-type MOS transistor. The first to third capacitors 34 to 36 and the first to third selection circuits 37 to 39 of this variant are respectively electrically connected to the first to third cathode wirings 31' to 33'.

[0185] According to the light source unit 2 of this modified example, by having a different structure from the light source unit 2 of the first embodiment, it is possible to achieve control similar to that of the light source unit 2 of the first embodiment.

[0186] (6) Light source section 2 of the fourth variation

[0187] Figure 12 This is a circuit diagram showing the structure of the light source unit 2 according to the fourth variation of the first embodiment.

[0188] In this modified example, the light source section 2 includes six sets of first to third capacitors 34 to 36 to replace... Figure 5The four sets of first to third capacitors 34 to 36 are shown. Since the first to third capacitors 34 to 36 in this variation are disposed within the VCSEL chip 11 (or the LDD substrate 12), they are positioned close to the light-emitting element 23. In this variation, each first capacitor 34 is electrically connected to any one of the horizontal wirings 31a, each second capacitor 35 is electrically connected to any one of the horizontal wirings 32a, and each third capacitor 36 is electrically connected to any one of the horizontal wirings 33a.

[0189] According to the light source unit 2 of this modified example, by having a different structure from the light source unit 2 of the first embodiment, it is possible to achieve control similar to that of the light source unit 2 of the first embodiment.

[0190] (7) The light source part 2 of the fifth variation

[0191] Figure 13 This is a circuit diagram showing the structure of the light source unit 2 according to the fifth variation of the first embodiment.

[0192] The light source section 2 of this modification does not include the first to third capacitors 34 to 36. The light source section 2 of this modification accumulates the charge to be supplied to each light-emitting element 2a in the parasitic capacitance described later, instead of the first to third capacitors 34 to 36.

[0193] Figure 14 This is another circuit diagram showing the structure of the light source unit 2 in the fifth variation of the first embodiment.

[0194] Figure 14 A set of light-emitting elements 23 and transistors 24 included in the light source section 2 of this modified example are shown. Figure 14 The parasitic capacitance 23' of the light-emitting element 23 and the parasitic capacitance 24' of the transistor 24 are further shown. In this modified example, the light source section 2 accumulates the charge to be supplied to each light-emitting element 2a in these parasitic capacitances 23' and 24'. This makes it possible for current to flow through each light-emitting element 23 and for each light-emitting element 23 to emit light. The accumulation in the parasitic capacitances 23' and 24' is controlled by the first to third selection circuits 37 to 39.

[0195] According to the light source unit 2 of this modified example, by having a different structure from the light source unit 2 of the first embodiment, it is possible to achieve control similar to that of the light source unit 2 of the first embodiment.

[0196] (8) Light source section 2 of the sixth variation

[0197] Figure 15 This is a circuit diagram showing various examples of the structure of the light source unit 2 according to the sixth variation of the first embodiment.

[0198] The light source unit 2 in this variant has a structure similar to that of the light source unit 2 in the first embodiment. However, each drive circuit E in the first embodiment has Figure 15 The structure shown in A, and each drive circuit E in this variant example has Figure 15 The structure shown is any one of B to D.

[0199] Figure 15 The drive circuit E shown in Figure B includes three transistors 24 electrically connected to the cathode wiring 41 and three transistors 25 electrically connected to these transistors 24. Figure 15 Transistors 24 and 25 shown in section B are, for example, N-type MOS transistors. The gates of transistors 24 are electrically connected to a common gate wiring 42, and the gates of transistors 25 are electrically connected to a common gate wiring 43. Transistors 24 and 25 are examples of the first and second transistors of this disclosure, respectively.

[0200] Each transistor 24 is used to select the light-emitting element 23 that generates light. Each transistor 25 serves as a current source. For example, in the case of light being generated from a specific light-emitting element 23, a predetermined signal is applied to the gate wiring 42 of the driving circuit E for the light-emitting element 23, and a predetermined signal (DC bias) is applied to the gate wiring 43 of the driving circuit E for the light-emitting element 23. Therefore, the source and drain of each transistor 24 in the driving circuit E are electrically connected, and the source and drain of each transistor 25 in the driving circuit E are electrically connected, so that current can flow through the light-emitting element 23. At this time, each transistor 25 serves as a current source.

[0201] Figure 15 The drive circuit E shown in C includes three transistors 24 electrically connected to the cathode wiring 41. Figure 15 The transistor 24 shown in C is, for example, an NPN bipolar transistor. In this case, wiring 42 is not a "gate wiring" but a "base wiring". Figure 15 The operation of the drive circuit E shown in C is similar to Figure 15 The operation of the drive circuit E shown in A is similar.

[0202] Figure 15 The driving circuit E shown in Figure D includes three transistors 24 electrically connected to the cathode wiring 41 and three transistors 25 electrically connected to these transistors 24. Figure 15 Transistors 24 and 25 shown in D are, for example, NPN bipolar transistors. In this case, wirings 42 and 43 are not "gate wirings" but "base wirings". Figure 15 The operation of the drive circuit E shown in D is similar to Figure 15 The operation of the drive circuit E shown in B is similar.

[0203] According to the light source unit 2 of this modified example, by having a different structure from the light source unit 2 of the first embodiment, it is possible to achieve control similar to that of the light source unit 2 of the first embodiment.

[0204] (9) Light source section 2 of the seventh variation

[0205] Figure 16 This is a circuit diagram showing the structure of the light source unit 2 according to the seventh variation of the first embodiment.

[0206] Apart from Figure 5 In addition to the components shown, the light source unit 2 of this variant also includes first to third voltage detection circuits 71 to 73. The first voltage detection circuit 71 is electrically connected to the first horizontal wiring 31a of the first anode wiring 31 and the gate of transistor 37a. The second voltage detection circuit 72 is electrically connected to the second horizontal wiring 32a of the second anode wiring 32 and the gate of transistor 38a. The third voltage detection circuit 73 is electrically connected to the third horizontal wiring 33a of the third anode wiring 33 and the gate of transistor 39a.

[0207] The first voltage detection circuit 71 detects the voltage of the first anode wiring 31 from the first horizontal wiring 31a of the first anode wiring 31. This voltage indicates the amount of charge accumulated in the four first capacitors 34. Therefore, the first voltage detection circuit 71 controls the gate voltage of the transistor 37a based on the voltage detected from the first anode wiring 31. For example, if the detected voltage is lower than a predetermined voltage, the transistor 37a is turned on to begin charge accumulation. On the other hand, if the detected voltage is higher than the predetermined voltage, the transistor 37a is turned off to terminate charge accumulation. According to this variation, the output power of the light-emitting element 2a can be changed by changing the value of the predetermined voltage. For example, by... Figure 1 The control unit 9 shown adjusts the value of the predetermined voltage.

[0208] Similarly, the second voltage detection circuit 72 detects the voltage of the second anode wiring 32 and controls the gate voltage of transistor 38a based on the detected voltage. The third voltage detection circuit 73 detects the voltage of the third anode wiring 33 and controls the gate voltage of transistor 39a based on the detected voltage.

[0209] Figure 17 This is a timing diagram showing the operation of the light source unit 2 in the seventh variation of the first embodiment.

[0210] Curves A1 and A2 indicate the gate voltage of the PMOS (i.e., transistors 37a to 39a) on the anode side. Curve B indicates the gate voltage of the NMOS (i.e., transistors 37b to 39b) on the anode side. Curve C indicates the gate voltage of the NMOS (i.e., transistor 24) on the cathode side. Curves D1 and D2 indicate the voltages (anode voltages) of the first to third anode wirings 31 to 32. Curves E1 and E2 indicate the output current (LDD output current) from the LDD substrate 12 to the light-emitting element 23.

[0211] Curve A1 illustrates the case where the gate voltage pulse width is short for each of transistors 37a to 39a. In this case, transistors 37a to 39a are cut off at a low anode voltage (curve D1) and achieve low-power emission (curve E1).

[0212] Curve A2 illustrates the case where the gate voltage pulse width of transistors 37a to 39a is long. In this case, transistors 37a to 39a are cut off at a high anode voltage (curve D2) and achieve high power emission (curve E2).

[0213] As described above, according to this modified example, the output power of the light-emitting element 2a can be freely changed.

[0214] (10) Light source section 2 of the eighth variation

[0215] Figure 18 This shows a cross-sectional view and a plan view of the structure of the light source unit 2 according to the eighth variation of the first embodiment.

[0216] The light source section 2 in this modified example has Figure 18 The structures shown in A and B instead of Figure 7 The structures shown in A and B. Figure 18 A shows the XZ section of the light source section 2 in this modified example. Figure 18 B shows Figure 18 The planar structure of the light source section 2 shown in Figure A.

[0217] In this modified example, the LDD substrate 12 is disposed on the wiring layer 53 via a plurality of solder balls 58, and is electrically connected to the first to third capacitors 34 to 36 via the solder balls 58 and the wiring layer 53. Furthermore, the VCSEL chip 11 is mounted on the LDD substrate 12 via a plurality of bumps 59, and is electrically connected to the LDD substrate 12 via these bumps 59. These bumps 59 may include, for example, a metal such as gold (Au). Other structures of the light source section 2 in this modified example are similar to... Figure 7 The structures shown in A and B are similar.

[0218] According to the light source unit 2 of this modified example, by having a different structure from the light source unit 2 of the first embodiment, it is possible to achieve control similar to that of the light source unit 2 of the first embodiment.

[0219] As described above, the light source unit 2 of this embodiment includes first to third anode wirings 31 to 33 arranged in a mesh pattern, and first to third capacitors 34 to 36 electrically connected to the first to third anode wirings 31 to 33 and arranged symmetrically. Therefore, according to this embodiment, the impedance and impedance difference problems described above can be suppressed, and the performance of the ranging device 1 can be improved. Furthermore, according to this embodiment, by providing cathode wirings 41 for every three light-emitting elements 23, problems related to cathode wirings 41 can be suppressed. As described above, according to this embodiment, the structure of the wiring for the light-emitting elements 23 can be optimized.

[0220] (11) Regarding microscanning

[0221] Reference Figures 21 to 24 Simultaneously refer to Figure 1 and Figure 2 Describe a tiny scan. Figure 21 This is a diagram showing the illumination position of the illumination light La, which is slightly changed by the micro-scanning unit 10. As described above, according to the synchronization signal F_SYNC provided from the control unit 9, the micro-scanning unit 10 causes the optical element m4 to rotate around two intersecting rotation axes r2 and r4 of the optical element m4 (see...). Figure 1 It rotates at a tiny angle.

[0222] like Figure 21 As shown, firstly, the frame region SS1 is illuminated via the optical element m4. Next, the micro-scanning unit 10 slightly rotates the mirror surface of the optical element m4 in the horizontal direction, for example, around the rotation axis r4, to illuminate the frame region SS2. Then, the micro-scanning unit 10 slightly rotates the mirror surface of the optical element m4 in the vertical direction, for example, around the rotation axis r2, to illuminate the frame region SS3. Next, the micro-scanning unit 10 slightly rotates the mirror surface of the optical element m4 in the horizontal direction, for example, around the rotation axis r4, to illuminate the frame region SS4. In other words, the frame regions SS1 to SS4 correspond to the arrangement positions of the light-emitting elements 2a of the light-emitting unit 11 projected onto the mirror surface of the optical element m4.

[0223] Figure 22 This is a schematic diagram illustrating an example of the arrangement of the light-emitting elements 2a in the light-emitting section 11. Figure 23 In the diagram, the positions of the light-emitting elements 2a are indicated by A1 to G7. In this way, the light-emitting elements 2a are arranged in a matrix. Note that the light-emitting elements 2a will be described as a 7×7 instance, but are not limited to this.

[0224] Figure 23It shows Figure 21 The diagram shows a timing sequence of an example of illumination control at the illumination position. The horizontal axis represents time. From top to bottom, the diagram shows the control signal F_SYNC to the micro-scanning unit 10 of the control unit 9, the selection signal S_SYNC for the light-emitting element 2a, and the light-emitting timing signal TRIG_O.

[0225] The micro-scanning unit 10, according to the control signal F_SYNC, causes the mirror surface of the optical element m4 to rotate around two rotation axes r2 and r4 (see...). Figure 1 (1) Micro-rotation. That is, the micro-scanning unit 10 controls the orientation of the mirror of the optical element m4 at the illumination position in the frame area SS1 to SS4 according to the control signal F_SYNC.

[0226] The driving unit 3 of the light source unit 2 (see Figure 2 The light-emitting element 2a is selected to emit light according to the selection signal S_SYNC. Then, the driving unit 3 of the light source unit 2 (see...) Figure 2 The selected light-emitting element 2a, selected by the selection signal S_SYNC, emits light according to the light-emitting timing signal TRIG_O.

[0227] like Figure 23 As shown, firstly, during the high-level signal Ss1 of the control signal F_SYNC, the micro-scanning unit 10 controls the mirror of the optical element m4 to be oriented corresponding to the frame region SS1. That is, during the high-level signal Ss1 of the control signal F_SYNC, the mirror of the optical element m4 is fixed in the orientation corresponding to the frame region SS1. During the high-level signal Ss1, the selection signal S_SYNC sequentially changes to high-level signals SA1 to SG7. For example, during the high-level signal SA1, the light-emitting element A1 is selected, and during the high-level signal SG7, the light-emitting element G7 is selected.

[0228] The driving unit 3 of the light source unit 2 (see Figure 2 The light-emitting element 2a selected by the selection signal S_SYNC emits light according to the light emission timing signal TRIG_O. The ranging unit 9a generates a distance value according to the selection signal S_SYNC. That is, the light receiving unit 7 is selected according to the selected light-emitting element, and the distance value of the position of each light receiving unit 7 is generated by accumulating the six light emission times of the selected light-emitting element.

[0229] Next, during the high-level signal Ss2 period of the control signal F_SYNC, the micro-scanning unit 10 controls the mirror surface of the optical element m4 to orient itself towards the frame region SS2. During the high-level signal Ss2 period, the selection signal S_SYNC sequentially changes to high-level signals SA1 to SG7. The driving unit 3 of the light source unit 2 (see...) Figure 2The selected light-emitting element 2a, selected by the selection signal S_SYNC, emits light according to the light-emitting timing signal TRIG_O. This process is repeated for the high-level signals Ss3 and Ss4 (not shown) of the control signal F_SYNC.

[0230] Through this control, firstly, the box area SS1 (see...) Figure 21 The positions of the irradiation light La change sequentially from A1 to G7, and six irradiations are performed discretely at each irradiation position. Next, the box region SS2 (see...) Figure 21 The positions of the irradiation light La change sequentially from A1 to G7, and six irradiations are performed discretely at each irradiation position. Next, the box region SS3 (see...) Figure 21 The positions of the irradiation light La change sequentially from A1 to G7, and six irradiations are performed discretely at each irradiation position. Next, the box region SS4 (see...) Figure 21 The positions of the irradiation light La are changed sequentially from A1 to G7, and 6 irradiations are performed discretely at each irradiation position.

[0231] Figure 24 This diagram illustrates an example of four illumination positions of the illumination light La. It shows illumination points Lss1 through illumination frame region SS1, Lss2 through illumination frame region SS2, Lss3 through illumination frame region SS3, and Lss4 through illumination frame region SS4. Through a micro-scan, illumination points Lss2, Lss3, and Lss4 are added, except for Lss1. That is, illumination points Lss2, Lss3, and Lss4 are illuminated between the illumination points without performing a micro-scan.

[0232] In this manner, relative to the micro-scanning unit 10, the control unit 9 causes the mirror surface of the optical element m4 to rotate around two rotation axes r2 and r4 (see...). Figure 1 The light source 2 rotates in a predetermined sequence. Therefore, the control unit 9 causes the light source 2 to illuminate frame region SS1, which is the first frame region, followed by frame regions SS2 and SS3, and finally frame region SS4. Then, the control unit 9 causes the micro-scanning unit 10 to return to the illumination position of frame region SS1, and the light source 2 performs illumination of the first frame region. Therefore, for example, by illuminating frame regions SS1 to SS4, the illumination position relative to the measured object can be increased, and high-resolution ranging can be performed. Note that in this embodiment, an example of four frame regions will be described, but this disclosure is not limited thereto. For example, 8, 16, or 32 frame regions can be used.

[0233] (Column direction scan)

[0234] exist Figure 23In this process, the light-emitting elements 2a are made to emit light sequentially, but this disclosure is not limited to this. For example, during the high-level signal Ss1 of the control signal F_SYNC, the light-emitting elements A1 to G1 in the column direction can be made to emit light simultaneously, followed by the light-emitting elements A2 to G2 in the column direction, then the light-emitting elements A3 to G3 in the column direction, then the light-emitting elements A4 to G4 in the column direction, then the light-emitting elements A5 to G5 in the column direction, then the light-emitting elements A6 to G6 in the column direction, and then the light-emitting elements A7 to G7 in the column direction. In the same case, the emission timing can be controlled according to the emission timing signal TRIG_O. This process can also be repeated for the high-level signals Ss2, Ss3, and Ss4 of the control signal F_SYNC. That is, in this control, the measurement light La can be scanned minutely in the column direction. In the same case, the illumination position is increased by illuminating the frame areas SS1 to SS4 minutely, and the resolution of the measurement value is increased.

[0235] (Line-wise scan)

[0236] For example, during the high-level signal Ss1 of the control signal F_SYNC, the light-emitting elements A1 to A7 in the row direction can be made to light up simultaneously, followed by the light-emitting elements B1 to B7 in the row direction, then the light-emitting elements C1 to C7 in the row direction, then the light-emitting elements D1 to D7 in the row direction, then the light-emitting elements A1 to A7 in the row direction, then the light-emitting elements A6 to G46 in the column direction, and finally the light-emitting elements E1 to E7 in the row direction. Similarly, in this case, the light-emitting timing can be controlled according to the light-emitting timing signal TRIG_O. This process can also be repeated for the high-level signals Ss2, Ss3, and Ss4 of the control signal F_SYNC. That is, in this control, the measurement light La can be scanned minutely in the row direction. Similarly, in this case, the illumination position is increased by the minute scanning illumination of the frame areas SS1 to SS4, and the resolution of the measurement value is increased.

[0237] As described above, according to this embodiment, the light source 2 emits light onto four reflecting surfaces, which are caused by the micro-scanning unit 10 to rotate the mirror surface of the optical element m4 around two rotation axes r2 and r4 (see...). Figure 1The measurement is obtained by rotating the light source in a predetermined sequence. Therefore, the number of measurement points within the same range of the measured object S increases, and the resolution of the measurement value can be increased. In this case, the light source unit 2 includes first to third anode wirings 31 to 33 arranged in a mesh, and first to third capacitors 34 to 36 electrically connected to the first to third anode wirings 31 to 33 and arranged symmetrically. Therefore, according to this embodiment, the resolution of the measurement value can be improved while suppressing the aforementioned problems of impedance and impedance difference. Furthermore, according to this embodiment, by providing cathode wiring 41 for every three light-emitting elements 23, the resolution of the measurement value can be improved while suppressing problems related to cathode wiring 41.

[0238] (Second Implementation)

[0239] The light-emitting device 1b according to the second embodiment differs from the light-emitting device 1a according to the first embodiment in that the micro-scan is controlled by the position drive of the collimating lens. The differences from the light-emitting device 1a according to the first embodiment will be described below.

[0240] Figure 25 This diagram illustrates an example of the overall structure of the ranging module in the ranging device 1 according to the second embodiment. The ranging device 1 according to the second embodiment differs from the ranging device 1 according to the first embodiment in that it employs a light-emitting side optical system that illuminates the subject S with light emitted from the light source unit 2, and a light-receiving side optical system that directs reflected light to the light-receiving unit 7. The ranging device 1 includes an actuator 170, a collimating lens 180, and a lens unit 212. Specifically, the light-emitting device 1b according to the second embodiment differs from the light-emitting device 1a according to the first embodiment in that the light-emitting device 1b includes an actuator 170 and a collimating lens 180.

[0241] The measurement light La from the light source unit 2 is provided to the collimating lens 180. The collimating lens 180 converts the measurement light La into a predetermined illumination angle. That is, the measurement light L is emitted onto the subject S at a predetermined illumination angle. Note that the collimating lens 180 according to this embodiment corresponds to the optical system.

[0242] The actuator 170 is a mechanism for vibrating the optical axis of the collimating lens 180 relative to the light source unit 2, and for example, it is assumed to be a mechanism using a magnetic circuit or a piezoelectric element. Alternatively, a voice coil motor, a piezoelectric element, a shape memory alloy, a liquid crystal, or the like can be used to slightly change the illumination position of the measurement light La. Since the collimating lens 180 is vibrated by the actuator 170, the illumination position of the measurement light La can be changed at a higher speed. Note that the actuator 170 according to this embodiment corresponds to the first drive unit.

[0243] Figure 26This is a diagram illustrating an example of a frame region where the illumination position is changed by actuator 170. Actuator 170 controls the position of collimating lens 180 according to control signal F_SYNC from control unit 9.

[0244] like Figure 26 As shown, firstly, the light source 2 illuminates the frame region SS1 via the collimating lens 180. Next, the actuator 170 slightly moves the position of the optical axis of the collimating lens 180 relative to the light source 2, for example, in the vertical direction, and illuminates the illumination frame region SS4. Next, the actuator 170 slightly moves the position of the optical axis of the collimating lens 180 relative to the light source 2, for example, in the horizontal direction, and illuminates the illumination frame region SS3. Next, the actuator 170 slightly moves the position of the optical axis of the collimating lens 180 relative to the light source 2, for example, in the vertical direction, and illuminates the illumination frame region SS2.

[0245] As described above, for example, by illuminating the frame regions SS1 to SS4, the illumination position relative to the measured object is increased, and ranging with high resolution can be performed. Note that in this embodiment, an example of four frame regions will be described, but this disclosure is not limited thereto. For example, 8, 16, or 32 frame regions can be used. Furthermore, since the collimating lens 180 is vibrated by the actuator 170, the illumination position of the measuring light La can be changed at a higher speed.

[0246] As described above, according to this embodiment, the actuator 170 causes the light source 2 to emit light to four positions, which are obtained by slightly moving the position of the collimating lens 180 in a predetermined sequence. Therefore, the number of measurement points within the same range of the measured object S increases, and the resolution of the measurement values ​​can be increased. Furthermore, according to this embodiment, the resolution of the measurement values ​​can be improved while suppressing the aforementioned problems of impedance and impedance difference. Moreover, according to this embodiment, by providing cathode wiring 41 for every three light-emitting elements 23, the resolution of the measurement values ​​can be improved while suppressing problems related to the cathode wiring 41.

[0247] (Third implementation method)

[0248] The light-emitting device 1c according to the third embodiment differs from the light-emitting device 1a according to the first embodiment in that it further includes a microlens array 31. The differences from the light-emitting device 1a according to the first embodiment will be described below.

[0249] Figure 27 This is a diagram showing an example of the configuration of the light source unit 2 in the light-emitting device 1c according to the third embodiment. (Refer to...) Figure 27 A configuration example of the light source unit 2 according to the third embodiment is described. For example... Figure 27As shown, the light-emitting portion 110 included in the light source portion 2 is an embodiment of a back-emitting VCSEL. For example, a light-emitting element portion 120 is formed on the first main surface 150A side of the substrate 150 of the light-emitting portion 110. Then, the light beam LB from the light-emitting element portion 120 is emitted from the second main surface 150B side, which is opposite to the first main surface 150A. Note that although in Figure 27 Five light-emitting element sections 120 are shown, but the number of light-emitting element sections 120 can be any suitable number. Note that the light-emitting section 110 and the light-emitting section 11 (see [reference]) according to this embodiment... Figure 2 and Figure 25 (Corresponding to) Furthermore, the light-emitting element 120 is, for example, a VCSEL emitter, and corresponds to the part that emits laser light. These light-emitting element parts 120 are examples of the light-emitting element 2a described above.

[0250] A microlens array 31 is formed on the second main surface 150B side. The microlens array 31 is integrally formed as an on-chip lens relative to the substrate 150. The microlens array 31 converges the light beam LB emitted from the light-emitting element 120 at position VP. The collimating lens 130 converges the diverging light beam LB after convergence by the microlens array 31 at the focal point, then diverges the light beam LB, and uses the light beam LB as the illumination light La to illuminate the object. Note that the collimating lens 130 and the optical system according to this embodiment ( Figure 1 The illumination-side optical system 5 and Figure 25 Corresponding to the collimating lens 180 in the substrate. That is, the collimating lens 130 can vibrate slightly relative to the substrate 150. Alternatively, the irradiating light La can vibrate slightly relative to the substrate 150 via the optical element m4.

[0251] The magnification (lateral magnification) of the image formed by the beam LB can be reduced by the microlens array 31. As a result, when illuminating an object beyond the collimating lens 130, the optical density of the beam LB can be increased. The spacing of the beam LB is increased, which can be compensated for by micro-scanning. Therefore, according to this embodiment, both high ranging range and high resolution can be achieved simultaneously, while suppressing the aforementioned problems of impedance and impedance difference.

[0252] (Fourth Implementation)

[0253] The light-emitting device 1d according to the fourth embodiment differs from the light-emitting device 1a according to the first embodiment in that the irradiation density of the measuring light La can be changed according to the characteristics of the measurement area. The differences from the light-emitting device 1a according to the first embodiment will be described below.

[0254] Figure 28This is a block diagram showing a configuration example of the ranging device 1 according to the fourth embodiment. The ranging device 1 of this embodiment also includes an imaging unit 500, and the light-emitting device 1d also includes a recognition unit 600.

[0255] The imaging unit 500 is, for example, a camera using visible light, and can capture two-dimensional digital images under the control of the control unit 9. The recognition unit 600 performs recognition processing on the digital images captured by the imaging unit 500. The recognition unit 600 can also perform recognition processing based on a distance image provided by the ranging unit 9a. The recognition unit 600 performs object recognition, for example, on a pixel-by-pixel basis, and outputs a recognition signal to the control unit 9 containing information about the illumination density and illumination intensity associated with each recognized object. At this time, the recognition signal includes the coordinate information of the object recognized in the image.

[0256] The control unit 9 controls the light source unit 2 and the micro-scanning unit 10 based on an identification signal that includes information such as illumination density, illumination intensity, coordinates, and frame rate provided by the identification unit 600. Note that, without the image capture unit 500, the characteristics of the measurement area and information about the object can also be identified based on information from the signal processing unit 8 or the ranging unit 9a.

[0257] Figure 29 This diagram schematically illustrates the recognition results of the recognition unit 600. This is the object recognition result of the recognition unit 600. For each of the following: pedestrians H1 to H4, vehicles C1 to C4, white lines L1 and L2, traffic light T1, and symbol M1, for example, the coordinate position and recognition name (e.g., person, vehicle, white line, traffic light, symbol, etc.) are set at the centroid position of the pixel area constituting the object. Furthermore, the recognition unit 600 divides the area into blank areas (sky), long-distance areas (fl), short-distance areas (nl), etc., using distance information from preliminary measurements by the ranging device 1 (e.g., measurements of the decrease in the number of light emission times of the light-emitting element 2a in the light-emitting unit 11).

[0258] Based on this information, the identification unit 600 generates information about the illumination density, illumination intensity, and coordinates of the illumination range of the ranging device 1. More specifically, since traffic lights T1, symbols M1, etc., are high-reflectivity areas, a signal is generated to reduce the luminous intensity of the luminous element 2a in the luminous unit 11. For blank areas (sky), a signal is generated to reduce the number of micro-scans and lower the frame rate. Furthermore, the number of luminous points can be reduced, or a non-luminous identification signal can be generated.

[0259] For the long-distance region (fl) in the direction of travel region a10, signals are generated to increase the number of micro-scans, increase the frame rate, increase the number of light emission cycles, and increase the resolution. On the other hand, signals are generated outside the long-distance region (fl) in the direction of travel region a10 to reduce the number of micro-scans, reduce the frame rate, reduce the number of light emission cycles, and decrease the resolution. Furthermore, for the short-distance region (nl), recognition signals are generated to increase the number of micro-scans, increase the frame rate, reduce the number of light emission cycles, and decrease the light intensity.

[0260] Figure 30 This is a schematic diagram illustrating an example of the generated signal of the recognition unit 600. Figure 30 This diagram schematically illustrates the illumination density of the measurement light La in an example of the identification signal from the identification unit 600. As described above, by changing the illumination density, illumination intensity, and frame rate according to the necessity of monitoring, the measurement time can be shortened, and power consumption can be suppressed. Therefore, according to this embodiment, while suppressing the aforementioned problems of impedance and impedance difference, the illumination density, illumination intensity, and frame rate can be changed according to the necessity of monitoring, and the resolution of the measurement value can be improved.

[0261] (Fifth Implementation)

[0262] The difference between the ranging device 1 according to the fifth embodiment and the ranging device 1 according to the first embodiment is that the ranging device 1 according to the fifth embodiment can further perform resolution enhancement processing in the light receiving unit 7. The differences from the ranging device 1 according to the first embodiment will be described below.

[0263] Figure 31 This diagram shows a more detailed example of the configuration of the pixel array section 100 in the light receiving section 7 according to the fifth embodiment. Figure 31 In the pixel array section 100, there are a total of (x×y) pixel circuits g10, arranged in x columns in the horizontal direction and y rows in the vertical direction. Note that in Figure 31 In the following similar figures, the pixel circuit g10 is shown as a light-receiving element 1000 having a rectangular light-receiving surface included in the pixel circuit g10. That is, the pixel array section 100 includes a configuration in which the light-receiving surfaces of the light-receiving elements of the pixel circuit g10 are arranged in a matrix.

[0264] Furthermore, in each embodiment, each pixel circuit g10 included in the pixel array unit 100 controls each element g11 of a total of nine pixel circuits g10, including three in the horizontal direction and three in the vertical direction. For example, the signal EN_SPAD_H corresponding to the aforementioned signal XEN_SPAD_H, which controls each pixel circuit g10 in the row direction (horizontal direction) (i.e., in column units), is output from the control unit 9 as a 3-bit signal (indicated as [2:0]) in unit of element g11 and is provided to the horizontal control unit 102a. That is, the signals EN_SPAD_H[0], EN_SPAD_H[1], and EN_SPAD_H[2] of the three pixel circuits g10 arranged consecutively in the horizontal direction are combined and transmitted through this one 3-bit signal.

[0265] exist Figure 31 In the example, signals EN_SPAD_H#0[2:0], EN_SPAD_H#1[2:0], ..., and EN_SPAD_H#(x / 3)[2:0] are generated sequentially by the control unit 9 from the left-hand element g11 of the pixel array unit 100 and provided to the horizontal control unit 102a. The horizontal control unit 102a controls each column of the corresponding element g11 according to the 3-bit value (indicated as [0], [1], and [2]) of each of the signals EN_SPAD_H#0[2:0], EN_SPAD_H#1[2:0], ..., and EN_SPAD_H#(x / 3)[2:0].

[0266] Similarly, for example, the signal EN_SPAD_V, which corresponds to the aforementioned signal XEN_SPAD_V, for controlling each pixel circuit g10 in the column direction (vertical direction) (i.e., in row units), is output from the control unit 9 as a 3-bit signal in element 11 units and provided to the vertical control unit 102b. That is, the signals EN_SPAD_V[0], EN_SPAD_V[1], and EN_SPAD_V[2] of the three pixel circuits g10 arranged consecutively in the vertical direction are combined and transmitted through this 3-bit signal.

[0267] exist Figure 31 In this example, signals EN_SPAD_V#0[2:0], EN_SPAD_V#1[2:0], ..., and EN_SPAD_V#(y / 3)[2:0] are generated sequentially by the control unit 9 from the lower element g11 of the pixel array unit 100 and provided to the vertical control unit 102b. The vertical control unit 102b controls each row of the corresponding element g11 according to the 3-bit value of each of the signals EN_SPAD_V#0[2:0], EN_SPAD_V#1[2:0], ..., and EN_SPAD_V#(y / 3)[2:0].

[0268] Note that, although not shown, similar to the signal EN_SPAD_V described above, the signal EN_PR is output from the control unit 9 as a 3-bit signal in units of element g11 and is provided to the vertical control unit 102b. The vertical control unit 102b controls each row of the corresponding element based on the 3-bit value of each signal EN_PR.

[0269] Figure 32 This is a block diagram illustrating a configuration example of the ranging unit 9a. The ranging unit 9a includes a generation unit 111 and a distance generation unit 112. The generation unit 111 generates a histogram for each pixel. The distance generation unit 112 generates distance information for each representative position in each pixel based on the generated histogram.

[0270] Figure 33 , Figure 34 , Figure 35 and Figure 36 This is a schematic diagram illustrating the ranging method according to the fifth embodiment. Figure 33 Examples of pixels 52a1, 52a2, 52a3, and 52a4 of a total of (i×j) pixel circuits g10, comprising i pixel circuits in the column direction and j pixel circuits in the row direction, are shown in the pixel array section 100 in the light receiving section 7. Note that the effective area in the pixel array section 100 is actually the processing object.

[0271] For example, the control unit 9 specifies a scanning area for the pixel array unit 100 including each of pixels 52a1, 52a2, 52a and 52a4, and performs scanning on the specified scanning area.

[0272] For example, the control unit 9 sets signals EN_SPAD_H and EN_SPAD_V according to the size and position of the scanning area to be specified (each of pixels 52a1, 52a2, 52a3, and 52a4). The control unit 9 transmits the setting signals EN_SPAD_H and EN_SPAD_V to the horizontal control unit 102a and the vertical control unit 102b, respectively.

[0273] Based on the transmitted signal EN_SPAD_H, the horizontal control unit 102a generates a signal XEN_SPAD_H and provides the signal XEN_SPAD_H to each pixel circuit g10. This signal XEN_SPAD_H specifies, on a column basis, the pixel circuit g10 included in the pixels to be read out among pixels 52a1, 52a2, 52a3, and 52a4. Similarly, based on the transmitted signal EN_SPAD_V, the vertical control unit 102b generates a signal XEN_SPAD_V and provides the signal XEN_SPAD_V to each pixel circuit g10. This signal XEN_SPAD_V specifies each pixel circuit g10 in the height direction (column direction) of the scan area including each of pixels 52a1, 52a2, 52a3, and 52a4.

[0274] During this scan, in the ranging unit 9a, the generation unit 111 generates a histogram for each of pixels 52a1, 52a2, 52a3, and 52a4. Based on the generated histogram, the distance generation unit 112 acquires distance information at each of the representative positions 53a1, 53a2, 53a3, and 53a4 for each of pixels 52a1, 52a2, 52a3, and 52a4. Each acquired distance information is associated with position information indicating the position of each of the representative positions 53a1 to 53a4, and is stored, for example, in a memory included in the distance generation unit 112.

[0275] When the scanning area of ​​pixels 52a1 to 52a4 is completed, the control unit 9 designates a new pixel at a position offset from the position of each of pixels 52a1 to 52a4 in the row direction. That is, as Figure 34 As shown, the control unit 9 specifies pixels 52b1, 52b2, 52b3, and 52b4 at positions offset by j / 2 pixel circuits g10 in the row direction (indicated by arrow A in the figure) from the positions of pixels 52a1 to 52a4.

[0276] That is, each of pixels 52b1, 52b2, 52b3 and 52b4 partially overlaps with each of the corresponding pixels 52a1, 52a2, 52a3 and 52a4 that were pixels before the position offset.

[0277] Control unit 9 performs a scan of the new scan area for pixels 52b1 to 52b4. During this scan, generation unit 111 generates a histogram for each of pixels 52b1 to 52b4, and distance generation unit 112 acquires distance information at each of the representative positions 53b1 to 53b4 for each of pixels 52b1 to 52b4 based on the generated histogram. Each representative position 53b1 to 53b4 is offset by j / 2 pixel circuits g10 from the position (phase) of each of the aforementioned representative positions 53a1 to 53a4 in the row direction. Each distance information acquired for each of the representative positions 53b1 to 53b4 is associated with position information indicating the position of each of the representative positions 53b1 to 53b4 and stored, for example, in a memory included in distance generation unit 112.

[0278] Note that in Figure 34 In this example, the right half of pixel 52b4 protrudes from pixel array section 100, but this part is not scanned.

[0279] pass Figure 33 and Figure 34 The scan is completed in the row direction of the pixel array section 100. Next, the control section 9 specifies a new pixel in the column direction at a position offset from the position of each of the original pixels 52a1, 52a2, 52a3, and 52a4. That is, as... Figure 35 As shown, the control unit 9 specifies pixels 52c1, 52c2, 52c3, and 52c4 at positions offset by i / 2 pixel circuits g10 in the column direction (indicated by arrow B in the figure) from pixels 52a1 to 52a4.

[0280] That is, each of pixels 52c1, 52c2, 52c3 and 52c4 partially overlaps with each of the corresponding pixels 52a1, 52a2, 52a3 and 52a4 that were pixels before the position offset.

[0281] The control unit 9 performs a scan of the scan area of ​​pixels 52c1 to 52c4. Through this scan, the generation unit 111 generates a histogram for each pixel 52c1 to 52c4, and the distance generation unit 112, based on the generated histogram, acquires distance information at each of the representative positions 53c1 to 53c4 for each of pixels 52c1 to 52c4. Each of the representative positions 53c1 to 53c4 is offset by i / 2 pixel circuits g10 in the column direction from the position (phase) of each of the aforementioned representative positions 53a1 to 53a4. Each distance information acquired for each of the representative positions 53c1 to 53c4 is associated with position information indicating the position of each of the representative positions 53c1 to 53c4 and stored, for example, in a memory included in the distance generation unit 112.

[0282] The control unit 9 sets the scanning areas of pixels 52c1 to 52c4 corresponding to the positions in the row direction as new scanning areas, relative to the reference area. Figure 34 The described position is offset by j / 2 pixels in the row direction. The scanning area of ​​circuit g10 is scanned, and further, relative to the reference... Figure 35 The scanning area of ​​circuit g10, which is offset by i / 2 pixels in the column direction, is scanned (illustration omitted).

[0283] Figure 36 It shows the execution based on Figures 33 to 35 The scan and the position relative to the location Figure 35 Examples of representative positions 53a1, 53a2, 53a3, and 53a4, representative positions 53b1, 53b2, 53b3, and 53b4, representative positions 53c1, 53c2, 53c3, and 53c4, and representative positions 53d1, 53d2, 53d3, and 53d4, in the case of scanning an area further offset by j / 2 pixel circuits g10 in the row direction. As described above, for example, representative positions 53a1 to 53b4 and 53c1 to 53d4 are separated by j / 2 pixel circuits g10 in the row direction and by i / 2 pixel circuits g10 in the column direction. This corresponds to a scanning area whose column direction dimension corresponds to i pixel circuits g10 and whose row direction dimension corresponds to the width of the pixel array section 100, and 16 representative positions 53a1 to 53d4 are included in this scanning area. Therefore, distance information can be acquired at high resolution using the prior art. As described above, the synergistic effect of increasing the number of measurement points on the emitting side enables distance information to be acquired at a higher resolution.

[0284] Furthermore, in the fifth embodiment, based on the circuit g10 including (i×j) pixels in pixel 52a1, such as... Figure 36 The signal Vpls read from each pixel circuit g10 of pixels of the same size (represented by pixel 52a1) is used to generate distance information representing each of positions 53a1 to 53d4. Therefore, based on the above... Figure 10 In the example in B, the four-fold pixel circuit g10 reads the signal Vpls, generates distance information representing each of positions 53a1 to 53d4, and is able to suppress the effects of noise, etc.

[0285] The light source unit 2 in the first to fifth embodiments serves as the light source for the ranging device 1, but it can be used in other modes. For example, the light source unit 2 in these embodiments can be used as the light source for optical devices (such as printers, projectors, or glasses), or it can be used as an illumination device. Furthermore, specific examples of the light-emitting unit 11 and the light-emitting element 23 include, but are not limited to, a VCSEL chip and a VCSEL emitter, and another laser diode can be used, or a superluminescent diode or a light-emitting diode (LED) can be applied.

[0286] While embodiments of the present disclosure have been described above, these embodiments can be implemented with various modifications without departing from the spirit of the disclosure. For example, two or more embodiments can be implemented in combination.

[0287] Figure 37 This is a block diagram illustrating an example of an indirect time-of-flight sensor using this technology.

[0288] [Configuration Example of an Indirect Time-of-Flight Sensor]

[0289] Figure 37 A block diagram of an example of an indirect time-of-flight sensor 10000 applying this technology is shown. The indirect time-of-flight sensor 10000 includes a sensor chip 10001 and a circuit chip 10002 stacked on the sensor chip 10001.

[0290] Pixel region 10020 includes multiple pixels arranged in an array on the sensor chip in a two-dimensional grid pattern. Furthermore, pixel region 10020 can be arranged on a matrix and can include multiple column signal lines. Each column signal line is connected to each pixel. Additionally, vertical drive circuit 10010, column signal processing circuit 10040, timing adjustment circuit 10050, and output circuit 10060 are disposed on circuit chip 10002.

[0291] The vertical drive circuit 10010 is configured to drive pixels and output pixel signals to the column signal processing unit 10040. The column signal processing unit 10040 performs analog-to-digital (AD) conversion processing on the pixel signals and outputs the AD-converted pixel signals to the output circuit. The output circuit 10060 performs correlated double sampling (CDS) processing on the data from the column signal processing circuit 10040 and then outputs the data to the signal processing circuit 10120.

[0292] The timing control circuit 10050 is configured to control the driving timing of each vertical drive circuit 10010. The column signal processing unit and output circuit 10060 are synchronized with the vertical synchronization signal.

[0293] In pixel region 10020, multiple pixels are arranged in a two-dimensional grid pattern, and each pixel is configured to receive infrared light and convert the infrared light into a pixel signal.

[0294] Furthermore, vertical signal lines VSL1 and VSL2 are routed vertically for each column of pixels 10230. Assuming the total number of columns in pixel region 10020 is M (M is an integer), a total of 2×M vertical signal lines are routed. Each pixel includes two taps. Vertical signal line VSL1 is connected to tap A of pixel 10230, and vertical signal line VSL2 is connected to tap B of pixel 10230. Additionally, vertical signal line VSL1 transmits the pixel signal AIN. P1 Furthermore, the vertical signal line VSL2 transmits the pixel signal AIN. P2 .

[0295] The vertical driving circuit 210 sequentially selects and drives rows of pixel blocks 221, and simultaneously outputs pixel signals AINP1 and AINP2 for each pixel block 221 in that row. In other words, the vertical driving circuit 210 simultaneously drives pixels 230 in the 2kth row and the (2k+1)th row. Note that the vertical driving circuit 210 is an example of the driving circuit described in the claims.

[0296] Figure 38 This is a circuit diagram illustrating a configuration example of pixel 10230 according to the present technology. Pixel 230 includes a photodiode 10231, two transfer transistors 10232 and 10237, two reset transistors 10233 and 10238, two taps (floating diffusion layers 10234 and 10239), two amplification transistors 10235 and 10239, and two selection transistors 10236 and 10241.

[0297] The photodiode 10231 converts received light into electrical charge. The photodiode 10231 is disposed on a rear surface relative to the front surface, wherein the surface on which the circuitry is disposed in the semiconductor substrate is used as the front surface. This type of solid-state imaging element is called a back-illuminated solid-state imaging element. Alternatively, a front-illuminated configuration in which the photodiode 10231 is disposed on the front surface can be used instead of a back-illuminated configuration.

[0298] The transfer transistor 10232 transfers charge from the photodiode 10231 sequentially to taps A 10239 and B 10234 according to the transfer signal TRG from the vertical drive circuit 10010. Taps A 10239 and B 10234 accumulate the transferred charge and generate a voltage based on the amount of accumulated charge.

[0299] The overflow transistor 10242 is a transistor that sequentially releases the charge of the photodiode 10231 to VDD and also has the function of resetting the photodiode.

[0300] Reset transistors 10233 and 10238 each extract charge from each of taps A 10239 and B 10234 to initialize the charge amount according to the reset signal RSTp from the vertical drive circuit 210. Amplifying transistors 10235 and 10240 amplify the voltages of taps A 10239 and B 10234, respectively. According to the selection signal SELp from the vertical drive circuit 210, selection transistors 10236 and 10241 output the amplified voltage signals as pixel signals to the column signal processing unit 10040 via two vertical signal lines (e.g., VSL1 and VSL2). VSL1 and VSL2 are connected to the input of an analog-to-digital converter XXX in the column signal processing circuit 10040.

[0301] Note that the circuit configuration of pixel 230 is not limited to... Figure 37 The configuration shown can be achieved as long as the pixel signal can be generated through photoelectric conversion.

[0302] <<Application Examples>>

[0303] The technology disclosed herein can be applied to a variety of products. For example, the technology disclosed herein can also be implemented as a device included in any type of mobile body (such as automobiles, electric vehicles, hybrid electric vehicles, motorcycles, bicycles, personal mobility devices, airplanes, drones, ships, robots, construction machinery, agricultural machinery (tractors), etc.).

[0304] Figure 39 This is a block diagram illustrating a schematic configuration example of a vehicle control system 7000, which is an example of a mobile body control system to which the technology according to this disclosure can be applied. The vehicle control system 7000 includes multiple electronic control units interconnected via a communication network 7010. Figure 39 In the example shown, the vehicle control system 7000 includes a drive system control unit 7100, a body system control unit 7200, a battery control unit 7300, an external information detection unit 7400, an internal information detection unit 7500, and an integrated control unit 7600. For example, the communication network 7010 connecting the multiple control units can be an in-vehicle communication network conforming to any standard, such as Controller Area Network (CAN), Local Area Network (LIN), Local Area Network (LAN), FlexRay (registered trademark), etc.

[0305] Each control unit includes: a microcomputer that performs arithmetic processing according to various programs; a storage unit that stores programs executed by the microcomputer, parameters for various operations, etc.; and a drive circuit that drives various controlled objects. Each control unit also includes: a network interface (I / F) for communicating with other control units via the communication network 7010; and a communication I / F for communicating with devices, sensors, etc., inside and outside the vehicle via wired or wireless communication. Figure 39 In this diagram, a microcomputer 7610, a general communication I / F 7620, a dedicated communication I / F 7630, a positioning unit 7640, a beacon receiver 7650, an in-vehicle device I / F 7660, a voice / image output unit 7670, an in-vehicle network I / F 7680, and a storage unit 7690 are shown as functional components of the integrated control unit 7600. Other control units similarly include a microcomputer, communication I / F, and a storage unit.

[0306] The drive system control unit 7100 controls the operation of devices related to the vehicle's drive system according to various programs. For example, the drive system control unit 7100 functions as a control device for drive force generation devices (such as internal combustion engines or drive motors) that generate drive force for the vehicle, drive force transmission mechanisms that transmit drive force to the wheels, steering mechanisms that adjust the vehicle's steering angle, and braking devices that generate braking force for the vehicle. The drive system control unit 7100 may also function as a control device for systems such as anti-lock braking systems (ABS) and electronic stability control (ESC).

[0307] The drive system control unit 7100 is connected to the vehicle condition detection unit 7110. The vehicle condition detection unit 7110 includes, for example, at least one of the following: a gyroscope sensor for detecting the angular velocity of the axial rotational motion of the vehicle body, an acceleration sensor for detecting the vehicle's acceleration, and sensors for detecting the amount of operation of the accelerator pedal, the amount of operation of the brake pedal, the steering angle of the steering wheel, engine speed, or wheel speed. The drive system control unit 7100 performs arithmetic processing using signals input from the vehicle condition detection unit 7110 and controls the internal combustion engine, drive motor, electric power steering system, braking system, etc.

[0308] The body system control unit 7200 controls the operation of various devices set to the vehicle body according to various programs. For example, the body system control unit 7200 is used as a control device for keyless entry systems, smart key systems, power windows, or various lights such as headlights, reversing lights, brake lights, turn signals, and fog lights. In this case, radio waves emitted from the moving device used as a key or signals from various switches can be input to the body system control unit 7200. The body system control unit 7200 receives these input radio waves or signals and controls the vehicle's door locking devices, power windows, lights, etc.

[0309] The battery control unit 7300 controls the secondary battery 7310, which serves as a power source for driving the motor, according to various programs. For example, information about battery temperature, battery output voltage, battery charging status, etc., is provided to the battery control unit 7300 from the battery device including the secondary battery 7310. The battery control unit 7300 uses these signals to perform arithmetic processing and to perform control for regulating the temperature of the secondary battery 7310, or to control the cooling device supplied to the battery device, etc.

[0310] The exterior information detection unit 7400 detects information about the exterior of the vehicle on which the vehicle control system 7000 is installed. For example, the exterior information detection unit 7400 is connected to at least one of the imaging unit 7410 and the exterior information detection unit 7420. The imaging unit 7410 includes at least one of a time-of-flight (ToF) camera, a stereo camera, a monocular camera, an infrared camera, and other cameras. For example, the exterior information detection unit 7420 includes at least one of an environmental sensor for detecting current atmospheric or weather conditions and a peripheral information detection sensor for detecting other vehicles, obstacles, pedestrians, etc., on the periphery of the vehicle on which the vehicle control system 7000 is installed.

[0311] For example, the environmental sensor can be at least one of a raindrop sensor for detecting rain, a fog sensor for detecting fog, a sunlight sensor for detecting sunlight intensity, and a snow sensor for detecting snowfall. The peripheral information detection sensor can be at least one of an ultrasonic sensor, a radar device, and a light detection and ranging or laser imaging detection and ranging (LIDAR) device. Each of the imaging unit 7410 and the external information detection unit 7420 can be configured as an independent sensor or device, or can be configured as a device integrating multiple sensors or devices.

[0312] Here, Figure 40Examples of the mounting positions of the imaging unit 7410 and the vehicle exterior information detection unit 7420 are shown. Imaging units 7910, 7912, 7914, 7916, and 7918 are provided at least one of the following locations: on the front nose, side mirrors, rear bumper, or rear door of the vehicle 7900, or on the upper part of the windshield inside the vehicle interior. The imaging unit 7910 on the front nose and the imaging unit 7918 on the upper part of the windshield inside the vehicle interior primarily acquire images of the front of the vehicle 7900. The imaging units 7912 and 7914 on the side mirrors primarily acquire images of the sides of the vehicle 7900. The imaging unit 7916 on the rear bumper or rear door primarily acquires images of the rear of the vehicle 7900. The imaging unit 7918 on the upper part of the windshield inside the vehicle interior is mainly used to detect vehicles, pedestrians, obstacles, signals, traffic signs, lanes, etc., ahead.

[0313] Notice, Figure 40 Examples of the imaging ranges of the various imaging units 7910, 7912, 7914, and 7916 are shown. Imaging range a indicates the imaging range of the imaging unit 7910 located at the front nose, imaging ranges b and c indicate the imaging ranges of the imaging units 7912 and 7914 located at the side mirrors, and imaging range d indicates the imaging range of the imaging unit 7916 located at the rear bumper or rear door. A bird's-eye view of the vehicle 7900 viewed from above can be obtained, for example, by overlaying the image data captured by the imaging units 7910, 7912, 7914, and 7916.

[0314] Exterior information detection units 7920, 7922, 7924, 7926, 7928, and 7930, located at the front, rear, sides, corners, and upper part of the windshield inside the vehicle 7900, can be, for example, ultrasonic sensors or radar devices. Exterior information detection units 7920, 7926, and 7930 located at the front nose, rear bumper, rear door, and upper part of the windshield inside the vehicle 7900, can be, for example, LIDAR devices. These exterior information detection units 7920 to 7930 are primarily used to detect vehicles, pedestrians, obstacles, etc., ahead.

[0315] Return to reference Figure 39Continuing the description, the exterior information detection unit 7400 causes the imaging unit 7410 to capture images of the exterior of the vehicle and receives the captured image data. Additionally, the exterior information detection unit 7400 receives detection information from the exterior information detection unit 7420. If the exterior information detection unit 7420 is an ultrasonic sensor, radar device, or LIDAR device, the exterior information detection unit 7400 transmits ultrasonic waves, electromagnetic waves, etc., and receives information about reflected waves. Based on the received information, the exterior information detection unit 7400 can perform processing to detect objects such as people, vehicles, obstacles, signs, and text on the road surface, or to detect the distance to objects. The exterior information detection unit 7400 can perform environmental recognition processing based on the received information, such as identifying rain, fog, and road conditions. The exterior information detection unit 7400 can calculate the distance to objects outside the vehicle based on the received information.

[0316] Furthermore, based on the received image data, the vehicle exterior information detection unit 7400 can perform image recognition processing to identify people, vehicles, obstacles, signs, text on the road surface, etc., or to detect their distance. The vehicle exterior information detection unit 7400 can perform processing such as distortion correction or alignment on the received image data, and combine image data captured by different imaging units 7410 to generate a bird's-eye view or a panoramic view. The vehicle exterior information detection unit 7400 can use image data captured by different imaging units 7410 to perform viewpoint switching processing.

[0317] The in-vehicle information detection unit 7500 detects information about the interior of the vehicle. For example, the in-vehicle information detection unit 7500 is connected to a driver state detection unit 7510 that detects the driver's state. The driver state detection unit 7510 may include a camera that captures images of the driver, a biosensor that detects the driver's biological information, and a microphone that collects sounds within the vehicle. The biosensor is disposed, for example, on the seat surface, steering wheel, etc., and detects the biological information of occupants sitting in the seat or the driver holding the steering wheel. Based on the detection information input from the driver state detection unit 7510, the in-vehicle information detection unit 7500 can calculate the driver's fatigue level or concentration level, or determine whether the driver is drowsy. The in-vehicle information detection unit 7500 can process audio signals acquired by collecting sound through processes such as noise cancellation.

[0318] The integrated control unit 7600 controls the general operation within the vehicle control system 7000 according to various programs. The integrated control unit 7600 is connected to the input unit 7800. The input unit 7800 is implemented by a device operable by an occupant for input, such as a touch panel, button, microphone, switch, or lever. The integrated control unit 7600 may be provided with data obtained through voice recognition of voice input via a microphone. The input unit 7800 may be, for example, a remote control device using infrared or other radio waves, or an external connection device such as a mobile phone or personal digital assistant (PDA) compatible with the operation of the vehicle control system 7000. The input unit 7800 may be, for example, a camera, in which case the occupant can input information via gestures. Alternatively, data obtained by detecting the movement of a wearable device worn by the occupant can be input. Furthermore, the input unit 7800 may include, for example, an input control circuit that generates an input signal based on information input by the occupant using the aforementioned input unit 7800, and outputs the generated input signal to the integrated control unit 7600. Passengers can input various data or instructions to the vehicle control system 7000 through the operation input unit 7800.

[0319] The storage unit 7690 may include a read-only memory (ROM) for storing various programs executed by a microcomputer and a random access memory (RAM) for storing various parameters, operation results, sensor values, etc. Furthermore, the storage unit 7690 may be implemented using magnetic storage devices such as hard disk drives (HDDs), semiconductor storage devices, optical storage devices, magneto-optical storage devices, etc.

[0320] The Universal Communication I / F 7620 is a widely used communication I / F that mediates communication with various devices present in the external environment 7750. The Universal Communication I / F 7620 can implement cellular communication protocols such as GSM (Global System for Mobile Communications), WiMAX (Global Microwave Access Interoperability), LTE (LTE), or LTE-A, or other wireless communication protocols such as Wireless LAN (also known as Wi-Fi) or Bluetooth. The Universal Communication I / F 7620 can, for example, connect to devices (e.g., application servers or control servers) existing on external networks (e.g., the Internet, cloud networks, or carrier-specific networks) via base stations or access points. Furthermore, for example, the Universal Communication I / F 7620 can use peer-to-peer (P2P) technology to connect to terminals present near the vehicle (e.g., terminals belonging to drivers, pedestrians, or shops, or machine-type communication (MTC) terminals).

[0321] The Dedicated Communications I / F 7630 is a communications I / F that supports the development of communication protocols for use in vehicles. For example, the Dedicated Communications I / F 7630 can implement standard protocols such as Wireless Access in a Vehicle Environment (WAVE) (a combination of IEEE 802.11p as the lower layer and IEEE 1609 as the upper layer), Dedicated Short Range Communications (DSRC), or cellular communication protocols. The Dedicated Communications I / F 7630 typically performs vehicle-to-everything (V2X) communication, which includes one or more of the following concepts: vehicle-to-vehicle communication, vehicle-to-infrastructure communication, vehicle-to-home communication, and vehicle-to-pedestrian communication.

[0322] The positioning unit 7640 performs positioning, for example, by receiving Global Navigation Satellite System (GNSS) signals from GNSS satellites (e.g., GPS signals from Global Positioning System (GPS) satellites) and generates location information including the vehicle's latitude, longitude, and altitude. Note that the positioning unit 7640 can identify its current location by exchanging signals with a wireless access point, or by obtaining location information from a terminal such as a mobile phone with positioning capabilities, a Personal Handheld Phone System (PHS), or a smartphone.

[0323] For example, the beacon receiver 7650 receives radio waves or electromagnetic waves transmitted from a radio station installed on a road or similar surface, and thereby obtains information about current location, congestion, road closures, and necessary time. Note that the functionality of the beacon receiver 7650 can be included in the aforementioned dedicated communication I / F 7630.

[0324] The in-vehicle device I / F 7660 is a communication interface that mediates the connection between the microcomputer 7610 and various in-vehicle devices 7760 located within the vehicle. The in-vehicle device I / F 7660 can establish a wireless connection using wireless communication protocols such as Wireless LAN, Bluetooth (registered trademark), Near Field Communication (NFC), or Wireless Universal Serial Bus (WUSB). Furthermore, the in-vehicle device I / F 7660 can establish a wired connection such as Universal Serial Bus (USB), High Definition Multimedia Interface (HDMI (registered trademark)), or Mobile High Definition Link (MHL) via connection terminals (not shown in the figures) (and cables, if necessary). The in-vehicle device 7760 may include, for example, at least one of a mobile device or wearable device owned by an occupant, or an information device carried or attached to the vehicle. Additionally, the in-vehicle device 7760 may include a navigation device for searching routes to any desired destination. The in-vehicle device I / F 7660 exchanges control signals or data signals with these in-vehicle devices 7760.

[0325] The vehicle network I / F7680 is an interface that mediates communication between the microcomputer 7610 and the communication network 7010. The vehicle network I / F7680 sends and receives signals according to predetermined protocols supported by the communication network 7010.

[0326] The microcomputer 7610 of the integrated control unit 7600 controls the vehicle control system 7000 according to various programs based on information acquired via at least one of the following: general communication I / F 7620, dedicated communication I / F 7630, positioning unit 7640, beacon receiver 7650, in-vehicle device I / F 7660, and vehicle network I / F 7680. For example, the microcomputer 7610 can calculate control target values ​​for the drive force generating device, steering mechanism, or braking device based on the acquired information about the vehicle's interior and exterior, and output control commands to the drive system control unit 7100. For example, the microcomputer 7610 can perform cooperative control aimed at realizing functions of advanced driver assistance systems (ADAS), including collision avoidance or shock absorption for the vehicle, following driving based on following distance, maintaining vehicle speed, vehicle collision warning, lane departure warning, etc. Furthermore, the microcomputer 7610 can control the drive force generating device, steering mechanism, braking device, etc., based on the acquired information about the vehicle's surrounding environment to perform cooperative control intended for autonomous driving, enabling the vehicle to drive automatically without relying on the driver's operation.

[0327] The microcomputer 7610 can generate three-dimensional distance information between the vehicle and objects such as surrounding structures and people, and create local map information including information about the vehicle's current location and its surroundings based on information acquired via at least one of a general communication I / F 7620, a dedicated communication I / F 7630, a positioning unit 7640, a beacon receiving unit 7650, an in-vehicle device I / F 7660, and an in-vehicle network I / F 7680. Furthermore, the microcomputer 7610 can predict the risk of vehicle collision, the approach of pedestrians, entry into closed roads, etc., based on the acquired information, and generate warning signals. These warning signals may be, for example, signals used to generate a warning sound or illuminate warning lights.

[0328] The sound / image output unit 7670 sends an output signal of at least one of sound and image to an output device capable of visually or audibly notifying the vehicle occupants or the outside of the vehicle of information. Figure 39In the example shown, an audio speaker 7710, a display unit 7720, and an instrument panel 7730 are illustrated as output devices. For example, the display unit 7720 may include at least one of an on-board display or a head-up display. The display unit 7720 may have augmented reality (AR) display functionality. The output device may differ from these devices and may be another device such as headphones, a wearable device such as glasses-type displays worn by occupants, a projector, or a lamp. When the output device is a display device, the display device visually displays, in various forms (such as text, images, tables, graphics, etc.), the results obtained through various processes performed by the microcomputer 7610 or information received from another control unit. Furthermore, when the output device is an audio output device, the audio output device converts an audio signal consisting of reproduced audio data or sound data into an analog signal and audibly outputs the analog signal.

[0329] Note that in Figure 39 In the example shown, at least two control units connected to each other via communication network 7010 can be integrated into one control unit. Alternatively, each individual control unit may include multiple control units. Furthermore, the vehicle control system 7000 may include another control unit not shown in the figures. Additionally, some or all of the functions performed by any one control unit as described above can be assigned to another control unit. That is, any control unit can perform predetermined computational processing as long as information is sent and received via communication network 7010. Similarly, sensors or devices connected to any one control unit can be connected to another control unit, and multiple control units can send and receive detection information to each other via communication network 7010.

[0330] Note that this is used to implement the reference. Figure 1 and Figure 2 The computer program for each function of the ranging device 1 according to this embodiment can be installed on any control unit or the like. Furthermore, a computer-readable recording medium storing such a computer program can be provided. The recording medium is, for example, a magnetic disk, optical disk, magneto-optical disk, flash memory, etc. Moreover, the aforementioned computer program can be distributed via, for example, a network without using a recording medium.

[0331] In the aforementioned vehicle control system 7000, refer to Figure 1 and Figure 2 The ranging device 1 described according to this embodiment can be applied to... Figure 39 The example shown is the vehicle exterior information detection unit 7420.

[0332] Note that this disclosure may also have the following configurations. (1)

[0334] A light-emitting device, comprising: Multiple light-emitting elements are arranged in a two-dimensional array, and each light-emitting element includes a first terminal and a second terminal; Multiple first terminal wirings include M first wirings (M is an integer greater than 2) extending in a first direction and N second wirings (N is an integer greater than 2) extending in a second direction intersecting the first direction and electrically connected to the M first wirings respectively. The multiple first terminal wirings are electrically connected to the first terminal of the light-emitting element. Multiple second-terminal wirings are electrically connected to the second terminals of the light-emitting elements, and each of the multiple second-terminal wirings is electrically connected to P (P is an integer greater than 2) of the light-emitting elements. Multiple selection circuits are electrically connected to one of multiple first terminal wirings and multiple second terminal wirings, and select the light-emitting element as the light-emitting object; Multiple driving circuits are electrically connected to the other side of multiple first terminal wirings and multiple second terminal wirings, and drive multiple light-emitting elements; An optical system that uses light emitted by multiple light-emitting elements to illuminate multiple illumination positions; and The first drive unit drives the optical system and changes multiple illumination positions. (2)

[0336] According to the light-emitting device of (1), wherein, The optical system includes mirrors, and The first drive unit causes the reflector to rotate around the rotation axis. (3)

[0338] According to the light-emitting device of (2), the first driving part rotates to irradiate between multiple irradiation positions. (4)

[0340] According to the light-emitting device in (3), wherein, The mirror includes multiple axes of rotation, and The first drive unit generates rotation, causing the reflector to reciprocate periodically around multiple rotation axes. (5)

[0342] According to the light-emitting device of (1), wherein, The optical system includes lenses, and The first driving unit moves the optical axis of the lens relative to the multiple light-emitting elements. (6)

[0344] According to the light-emitting device of (5), the first driving part moves the optical axis of the lens to irradiate between multiple irradiation positions. (7)

[0346] According to the light-emitting device of (5), the first driving part causes the optical axis of the lens to reciprocate periodically so as to irradiate between multiple irradiation positions. (8)

[0348] The light-emitting device according to any one of (1) to (7) further includes a microlens array corresponding to each of the plurality of light-emitting elements and collecting light emitted by the plurality of light-emitting elements. (9)

[0350] The light-emitting device according to any one of (1) to (7) includes the first driving part including any one of a voice coil motor, a piezoelectric element, a shape memory alloy, and a liquid crystal. (10)

[0352] The light-emitting device according to any one of (1) to (8) further includes a control selection circuit, a drive circuit, and a control unit of the first drive unit. (11)

[0354] According to the light-emitting device of (1), wherein, Multiple selection circuits include first to P selection circuits electrically connected to the first to Nth first wirings or the first to Mth second wirings, respectively. Multiple drive circuits are electrically connected to one of the second terminal wirings. (12)

[0356] A ranging device, comprising: The light source generates light and illuminates the subject; and Control Department The light source section includes: Multiple light-emitting elements arranged in a two-dimensional array, each light-emitting element including a first terminal and a second terminal; Multiple first terminal wirings include M first wirings (M is an integer greater than 2) extending in a first direction and N second wirings (N is an integer greater than 2) extending in a second direction intersecting the first direction and electrically connected to the M first wirings respectively. The multiple first terminal wirings are electrically connected to the first terminal of the light-emitting element. Multiple second-terminal wirings are electrically connected to the second terminals of the light-emitting elements, and each of the multiple second-terminal wirings is electrically connected to P (P is an integer greater than 2) of the light-emitting elements. Multiple selection circuits are electrically connected to one of multiple first terminal wirings and multiple second terminal wirings, and select the light-emitting element as the light-emitting object; Multiple driving circuits are electrically connected to the other side of multiple first terminal wirings and multiple second terminal wirings, and drive multiple light-emitting elements; An optical system that uses light emitted by multiple light-emitting elements to illuminate multiple illumination positions; and The first drive unit drives the optical system and changes multiple illumination positions. The control unit controls the selection circuit, the drive circuit, and the first drive unit. N is an integer that is the same as or different from M, and P is an integer that is the same as or different from at least one of M and N. (13)

[0358] According to the ranging device of (12), the control unit can change the light illumination method according to the area to be measured. (14)

[0360] According to the ranging device of (13), the control unit changes the number of scans according to the area to be measured, which is the number of times the light is irradiated between multiple irradiation positions. (15)

[0362] According to the ranging device of (13), the control unit changes the frame rate according to the area to be measured, which is the number of times the light-emitting element emits light per predetermined time. (16)

[0364] According to the ranging device of (13), the control unit changes the light-emitting element among multiple light-emitting elements according to the area to be measured. (17)

[0366] According to the ranging device of (13), the control unit changes the number of times multiple light-emitting elements emit light according to the area to be measured. (18)

[0368] According to the ranging device of (13), the control unit changes the light intensity of multiple light-emitting elements according to the area to be measured. (19)

[0370] The ranging device according to any one of (12) to (18) further includes: A light receiving unit receives light reflected from the subject; and The distance measuring unit measures the distance to the subject based on the light received by the light receiving unit. (20)

[0372] According to the ranging device of (19), where, The optical receiver includes multiple optical receiving elements arranged in a matrix array and included in the target area, and The control unit specifies the summing region of two or more optical receiving elements from a plurality of optical receiving elements, and performs scanning control on a unit of the specified summing region.

[0373] Reference number list

[0374] 1. Distance measuring device

[0375] 1a Light-emitting device

[0376] 1b Light-emitting device

[0377] 1c Light-emitting device

[0378] 1D light-emitting device

[0379] 2. Light source section

[0380] 2a Light-emitting element

[0381] 3 Drive Unit

[0382] 4 Power supply circuit

[0383] 5. Light-emitting side optical system

[0384] 6. Optical system for receiving light

[0385] 7. Optical Receiver

[0386] 8. Signal Processing Department

[0387] 9. Control Department

[0388] 9a Distance measuring unit

[0389] 10 Micro-scanning units

[0390] 11. Light-emitting component, VCSEL chip

[0391] 12 LDD substrate

[0392] 13 Mounting substrate

[0393] 14 Heat dissipation substrate

[0394] 15. Correction lens holding section

[0395] 16 Correction Lens

[0396] 17. Wiring

[0397] 21 substrate

[0398] 22-layer film

[0399] 23 Light-emitting elements

[0400] 23' Parasitic Capacitance

[0401] 24 transistors

[0402] 24' Parasitic Capacitance

[0403] 25 transistors

[0404] 31 First anode wiring

[0405] 31a First Horizontal Routing

[0406] 31b First vertical wiring

[0407] 32 Second anode wiring

[0408] 32a Second Horizontal Wiring

[0409] 32b Second Vertical Wiring

[0410] 33 Third anode wiring

[0411] 33a Third Horizontal Wiring

[0412] 33b Third Vertical Wiring

[0413] 31' First cathode wiring

[0414] 31a' First horizontal wiring

[0415] 31b' First vertical wiring

[0416] 32' Second cathode wiring

[0417] 32a' Second Horizontal Wiring

[0418] 32b' Second Vertical Wiring

[0419] 33' Third cathode wiring

[0420] 33a' Third Horizontal Wiring

[0421] 33b' Third Vertical Wiring

[0422] 34 First Capacitor

[0423] 35 Second capacitor

[0424] 36 Third Capacitor

[0425] 37 First Selection Circuit

[0426] 37a transistor

[0427] 37b transistor

[0428] 38 Second Selection Circuit

[0429] 38a transistor

[0430] 38-bit transistor

[0431] 39 Third Selection Circuit

[0432] 39a transistor

[0433] 39b transistor

[0434] 41 Cathode wiring

[0435] 41' Anode wiring

[0436] 42 Gate wiring

[0437] 42' gate wiring

[0438] 43 Gate wiring

[0439] 51 Insulating substrate

[0440] 52 Insulating film

[0441] 53 Wiring Layer

[0442] 54 Insulating film

[0443] 55 Wiring Layer

[0444] 56. Wiring

[0445] 57 Welding balls

[0446] 58 welding balls

[0447] 59 bumps

[0448] 61 First transistor

[0449] 62 Second transistor

[0450] 63 Third transistor

[0451] 64 First gate wiring

[0452] 65 Second gate wiring

[0453] 66 Third gate wiring

[0454] 67 Capacitor

[0455] 68 Selection Circuit

[0456] 68A transistor

[0457] 68-bit transistor

[0458] 71 First Voltage Detection Circuit

[0459] 72 Second Voltage Detection Circuit

[0460] 73 Third Voltage Detection Circuit

[0461] 81 Fourth Anode Wiring

[0462] 81a Fourth Horizontal Wiring

[0463] 81b Fourth Vertical Wiring

[0464] 82 Fourth capacitor

[0465] 83 Fourth Selection Circuit

[0466] 83a transistor

[0467] 83b transistor

[0468] 170 actuator

[0469] 180 collimating lens.

Claims

1. A light-emitting device, comprising: Multiple light-emitting elements are arranged in a two-dimensional array, and each light-emitting element includes a first terminal and a second terminal; Multiple first terminal wirings include M first wirings (M is an integer greater than 2) extending in a first direction and N second wirings (N is an integer greater than 2) extending in a second direction intersecting the first direction and respectively electrically connected to the M first wirings, the multiple first terminal wirings being electrically connected to the first terminal of the light-emitting element; Multiple second terminal wires are electrically connected to the second terminals of the light-emitting element, and each of the multiple second terminal wires is electrically connected to P of the light-emitting elements (P is an integer greater than 2). Multiple selection circuits are electrically connected to one of the multiple first terminal wirings and the multiple second terminal wirings, and select the light-emitting element as the light-emitting object; Multiple driving circuits are electrically connected to the other of the multiple first terminal wirings and the multiple second terminal wirings, and drive the multiple light-emitting elements; An optical system uses light emitted by the plurality of light-emitting elements to illuminate multiple illumination positions; as well as The first driving unit drives the optical system and changes the plurality of illumination positions. Wherein, N is an integer that is the same as or different from M, and P is an integer that is the same as or different from at least one of M and N.

2. The light-emitting device according to claim 1, wherein, The optical system includes a mirror, and The first driving unit causes the reflector to rotate about the rotation axis.

3. The light-emitting device according to claim 2, wherein, The first drive unit rotates to irradiate between the plurality of irradiation positions.

4. The light-emitting device according to claim 3, wherein, The reflector includes multiple rotation axes, and The first drive unit generates rotation, causing the reflector to periodically reciprocate around the plurality of rotation axes.

5. The light-emitting device according to claim 1, wherein, The optical system includes lenses, and The first driving unit moves the optical axis of the lens relative to the plurality of light-emitting elements.

6. The light-emitting device according to claim 5, wherein, The first driving unit moves the optical axis of the lens to irradiate between the plurality of irradiation positions.

7. The light-emitting device according to claim 5, wherein, The first driving unit causes the optical axis of the lens to reciprocate periodically to irradiate between the plurality of irradiation positions.

8. The light-emitting device according to claim 1 further includes a microlens array, the microlens array corresponding to each of the plurality of light-emitting elements and collecting the light emitted by the plurality of light-emitting elements.

9. The light-emitting device according to claim 2, wherein, The first driving unit includes any one of a voice coil motor, a piezoelectric element, a shape memory alloy, and a liquid crystal.

10. The light-emitting device according to claim 1, wherein, One of the first and second terminals of the light-emitting element is the anode. The other of the first and second terminals of the light-emitting element is a cathode. One of the first terminal wiring and the second terminal wiring is an anode wiring, and The other of the first terminal wiring and the second terminal wiring is a cathode wiring.

11. The light-emitting device according to claim 1, wherein, The plurality of selection circuits include first to P selection circuits electrically connected to the first to Mth first wirings or the first to Nth second wirings, respectively. The plurality of drive circuits are each electrically connected to one of the second terminal wirings.

12. A ranging device, comprising: The light source generates light and illuminates the subject. as well as Control Department The light source unit includes: Multiple light-emitting elements arranged in a two-dimensional array, each light-emitting element including a first terminal and a second terminal; Multiple first terminal wirings include M first wirings (M is an integer greater than 2) extending in a first direction and N second wirings (N is an integer greater than 2) extending in a second direction intersecting the first direction and respectively electrically connected to the M first wirings, the multiple first terminal wirings being electrically connected to the first terminal of the light-emitting element; Multiple second terminal wires are electrically connected to the second terminals of the light-emitting element, and each of the multiple second terminal wires is electrically connected to P of the light-emitting elements (P is an integer greater than 2). Multiple selection circuits are electrically connected to one of the multiple first terminal wirings and the multiple second terminal wirings, and select the light-emitting element as the light-emitting object; Multiple driving circuits are electrically connected to the other of the multiple first terminal wirings and the multiple second terminal wirings, and drive the multiple light-emitting elements; An optical system that uses light emitted by the plurality of light-emitting elements to illuminate multiple illumination positions; and The first driving unit drives the optical system and changes the plurality of illumination positions. The control unit controls the selection circuit, the drive circuit, and the first drive unit. The N is an integer that is the same as or different from the M, and P is an integer that is the same as or different from at least one of M and N.

13. The ranging device according to claim 12, wherein, The control unit can change the light irradiation method according to the area to be measured.

14. The ranging device according to claim 13, wherein, The control unit changes the number of scans according to the area to be measured, where the number of scans is the number of times irradiation is performed between the plurality of irradiation positions.

15. The ranging device according to claim 13, wherein, The control unit changes the frame rate according to the area to be measured, where the frame rate is the number of times the light-emitting element emits light per predetermined time interval.

16. The ranging device according to claim 13, wherein, The control unit changes the light-emitting element among the plurality of light-emitting elements according to the area to be measured.

17. The ranging device according to claim 13, wherein, The control unit changes the number of times the multiple light-emitting elements emit light according to the area to be measured.

18. The ranging device according to claim 13, wherein, The control unit changes the luminous intensity of the plurality of light-emitting elements according to the area to be measured.

19. The ranging device according to claim 12, further comprising: A light receiving unit receives light reflected from the subject; as well as The ranging unit measures the distance to the subject based on the light received by the light receiving unit.

20. The ranging device according to claim 19, wherein, The optical receiver includes multiple optical receiving elements arranged in a matrix array and included in the target area, and The control unit specifies the summing region of two or more optical receiving elements among the plurality of optical receiving elements, and performs scanning control on a unit of the specified summing region.

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