Robot operation path generation method and robot operation path generation device

Abstract

In a method for generating an operation path of a robot (10), when one of two-dimensional data (IDa) and three-dimensional data (IDb) is changed on the basis of an operation by a user, the other of the two-dimensional data (IDa) and the three-dimensional data (IDb) is caused to reflect the change. At least one of a two-dimensional virtual image (VIa) and a three-dimensional virtual image (VIb) including the robot (10) and the arrangement area (20) is displayed on a display unit (220).

Description

Technical Field

[0001] This disclosure relates to a method for generating motion paths for a robot and a device for generating motion paths for a robot. Background Technology

[0002] Previously, robot trajectory generation methods were known to derive robot motion paths based on prescribed conditions. For example, Japanese Patent Application Publication No. 2019-193975 discloses a robot trajectory generation method that derives the robot's motion path in a way that prevents interference between the robot arm and other robot arms or obstacles. In the robot trajectory generation method of Japanese Patent Application Publication No. 2019-193975, when setting the prescribed conditions for deriving the robot trajectory, the robot arm and obstacles are virtually displayed in three dimensions on a display screen.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2019-193975

[0004] However, in the robot trajectory generation method disclosed in Japanese Patent Application Publication No. 2019-193975, when the conditions for generating the robot trajectory are set as described above, although the robot arm and obstacles are virtually displayed on the display in a three-dimensional manner, they are not virtually displayed in a two-dimensional manner. Therefore, the robot trajectory generation method disclosed in Japanese Patent Application Publication No. 2019-193975 is not suitable for improving user operability and visibility when the conditions for deriving the motion path are set so that the configuration area where the robot arm and robot are configured are virtually displayed not only in a three-dimensional manner but also in a two-dimensional manner. Therefore, it is desirable to have a robot motion path generation method and a robot motion path generation device that can improve user operability and visibility when setting the conditions for deriving the robot's motion path within the configuration area. Summary of the Invention

[0005] This disclosure was made to solve the problems described above. One of the purposes of this disclosure is to provide a robot motion path generation method and a robot motion path generation apparatus that can improve user operability and visibility when setting specified conditions for generating the robot's motion path within a configuration area.

[0006] To achieve the above objectives, the robot motion path generation method according to the first aspect of this disclosure includes the following steps: based on predetermined conditions, simulating and deriving the motion path of a robot comprising an end effector holding a workpiece and a robot arm consisting of multiple links connected to the end effector in a configuration area where the robot and the workpiece are configured; and when a change occurs in one of the two-dimensional data and three-dimensional data in the integrated data based on user operation, causing the other of the two-dimensional data and three-dimensional data to reflect the change, and displaying at least one of a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, which includes the robot and the configuration area, on a display unit, wherein the integrated data is obtained by integrating robot CAD data, which is computer-aided design data for the robot, and configuration area CAD data, which is computer-aided design data for the configuration area, used to derive the motion path.

[0007] In the robot motion path generation method according to the first aspect of this disclosure, as described above, when one of the two-dimensional data and three-dimensional data in the integrated data obtained by integrating robot CAD data (which serves as computer-aided design data for the robot) and configuration area CAD data (which serves as computer-aided design data for the configuration area) used to derive the robot's motion path within a configuration area containing the robot and the workpiece changes based on user operation, the other of the two-dimensional and three-dimensional data reflects this change, and at least one of a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, containing the robot and the configuration area, is displayed on the display unit. Therefore, if one of the two-dimensional and three-dimensional data changes, the other of the two-dimensional and three-dimensional data is reflected, so regardless of how the user changes the two-dimensional and three-dimensional data, at least one of the two-dimensional virtual image and the three-dimensional virtual image based on the changed data can be displayed on the display unit at the expected time. As a result, user operability and visibility are improved when setting the prescribed conditions for deriving the robot's motion path within the configuration area.

[0008] Furthermore, to achieve the above objectives, the robot motion path generation apparatus according to the second aspect of this disclosure includes: a display unit; and a control unit, which, based on predetermined conditions, simulates and derives the motion path of a robot, including an end effector holding a workpiece and a robot arm on which the end effector is mounted and connected by multiple links, within a configuration area in which the robot and the workpiece are configured. When a change occurs in either the two-dimensional data or the three-dimensional data in the integrated data based on user operation, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, including the robot and the configuration area, is displayed on the display unit. The integrated data is obtained by integrating robot CAD data, which is computer-aided design data for the robot, and configuration area CAD data, which is computer-aided design data for the configuration area, used to derive the motion path.

[0009] As described above, the robot motion path generation apparatus according to the second aspect of this disclosure includes a control unit. When a change occurs in either the two-dimensional or three-dimensional data in the integrated data obtained by integrating robot CAD data (which serves as computer-aided design data for the robot) and configuration area CAD data (which serves as computer-aided design data for the configuration area) used to derive the robot's motion path within a configuration area containing the robot and a workpiece, based on user operation, the control unit causes the other of the two-dimensional and three-dimensional data to reflect the change, and displays at least one of a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, containing the robot and the configuration area, on a display unit. Thus, similar to the robot motion path generation method according to the first aspect, regardless of how the user changes the two-dimensional and three-dimensional data, at least one of the two-dimensional and three-dimensional virtual images based on the changed data can be displayed on the display unit at the expected time. As a result, similar to the robot motion path generation method according to the first aspect, a robot motion path generation apparatus can be provided that improves user operability and visibility when setting predetermined conditions for deriving the robot's motion path within a configuration area.

[0010] According to this disclosure, as described above, a robot motion path generation method and a robot motion path generation apparatus can be provided that improve user operability and visibility when setting specified conditions for exporting the robot's motion path within a configuration area. Attached Figure Description

[0011] Figure 1 This is a top view showing a substrate handling system according to one embodiment of the present disclosure.

[0012] Figure 2 This is a block diagram illustrating the configuration of a motion path generation device for a substrate handling robot according to one embodiment of the present disclosure.

[0013] Figure 3 This is a flowchart illustrating the motion path generation of a substrate handling robot according to one embodiment of the present disclosure.

[0014] Figure 4 This diagram illustrates a state in which a virtual image is displayed on a display unit according to one embodiment of the present disclosure.

[0015] Figure 5 This is a diagram showing a configuration in which the size of the gap between the substrate handling robot and the placement area is displayed on a display unit according to an embodiment of this disclosure.

[0016] Figure 6 This is a diagram illustrating the configuration of virtual obstacles based on a minimum threshold of the gap between the substrate handling robot and the configuration area, in one embodiment of this disclosure. Detailed Implementation

[0017] Hereinafter, embodiments embodied in this disclosure will be described based on the accompanying drawings.

[0018] [Motion path generation device for substrate handling robot]

[0019] Reference Figure 1 as well as Figure 2 A motion path generation apparatus 200 for a substrate handling robot 10 according to one embodiment of the present disclosure will be described. The motion path generation apparatus 200 for the substrate handling robot 10 is an apparatus for generating a motion path OP of the substrate handling robot 10 in the substrate handling system 100. In addition, the substrate handling robot 10 is an example of a robot.

[0020] (Substrate handling system)

[0021] like Figure 1 As shown, the substrate handling system 100 includes a substrate handling robot 10 and a configuration area 20. The substrate W is an example of a workpiece.

[0022] The substrate handling robot 10 includes a robotic hand 11 for holding a substrate W, a horizontal multi-joint robotic arm 12 to which the robotic hand 11 is mounted and connected by multiple links 12a, and a base 13 supporting the robotic arm 12. The robotic hand 11 holds the substrate W while it is being handled by the substrate handling robot 10. The robotic hand 11 is mounted at the tip of the robotic arm 12. The substrate W is, for example, a silicon wafer with a disk shape. The substrate W and the robotic hand 11 are examples of a workpiece and an end effector, respectively.

[0023] The configuration area 20 includes a substrate transport chamber 21 and a substrate placement section 22.

[0024] A substrate handling robot 10 is installed in the substrate handling chamber 21. The substrate handling chamber 21 is a space where the substrate W is handled by the substrate handling robot 10. The substrate handling chamber 21 is maintained at atmospheric pressure.

[0025] The substrate placement section 22 is connected to the substrate transport chamber 21. The substrate W is placed on the substrate placement section 22. The substrate placement section 22 includes multiple loading ports 22a, multiple loading locking parts 22b, and an aligner 22c.

[0026] Each of the multiple loading ports 22a includes a container capable of accommodating multiple substrates W, namely FOUP (Front Opening Unify Pod).

[0027] Multiple loading locking parts 22b are connected to the substrate transport chamber 21 at different positions relative to the multiple loading ports 22a. The multiple loading locking parts 22b are connected to the substrate transport chamber VC, which is maintained in a vacuum environment.

[0028] The substrate transport chamber VC is connected to the substrate processing chamber, which performs resist coating, etching, and other treatments on the substrate W, at different locations from the multiple loading locking parts 22b. That is, the substrate transport system 100 is an EFEM (Equipment Front End Module) that transports the substrate W between the FOUP of each of the multiple loading ports 22a and the substrate transport chamber VC connected to the substrate processing chamber.

[0029] Aligner 22c is a device used for aligning the substrate W and correcting eccentricity.

[0030] (Composition of the motion path generation device for the substrate handling robot)

[0031] like Figure 2 As shown, the motion path generation device 200 of the substrate handling robot 10 includes an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The motion path generation device 200 of the substrate handling robot 10 is, for example, a PC (personal computer) or a tablet computer.

[0032] Input unit 210 accepts input operations from the user. If input unit 210 accepts an input operation from the user, it outputs an input signal corresponding to the input operation to control unit 240. For example, input unit 210 is a keyboard or mouse. Input unit 210 is used to set or change the prescribed conditions when exporting the substrate handling robot 10's motion path OP in the configuration area 20.

[0033] Display unit 220 displays a virtual image VI of a substrate handling robot 10, a configuration area 20, and a substrate W, as well as a derived motion path OP of the substrate handling robot 10 in the configuration area 20. Display unit 220 is, for example, a liquid crystal display or an organic EL display.

[0034] Storage unit 230 is a computer-readable storage medium that stores various programs and data. Storage unit 230 stores a motion path generation program MP for the control unit 240 to execute the motion path generation method of the substrate handling robot 10. Storage unit 230 is formed, for example, a hard disk or other magnetic disk, a CD-ROM or DVD or other optical disk, or a semiconductor memory.

[0035] The control unit 240 simulates and derives the motion path OP of the substrate handling robot 10 in the configuration area 20 based on specified conditions. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit), and semiconductor memory such as RAM (Random Access Memory) and ROM (Read Only Memory).

[0036] The control unit 240 reads in CAD data CD for exporting motion path OP. The CAD data CD includes: transport robot CAD data CD1, which serves as computer-aided design data for the substrate transport robot 10; configuration area CAD data CD2, which serves as computer-aided design data for the configuration area 20; and substrate CAD data CD3, which serves as computer-aided design data for the substrate W. The user can arbitrarily select the transport robot CAD data CD1, configuration area CAD data CD2, and substrate CAD data CD3 read in by the control unit 240. Furthermore, transport robot CAD data CD1 is an example of robot CAD data.

[0037] The control unit 240 displays a virtual image VI containing the substrate handling robot 10, the configuration area 20, and the substrate W on the display unit 220 based on the integrated data ID obtained by integrating the read-in transport robot CAD data CD1, configuration area CAD data CD2, and substrate CAD data CD3.

[0038] [Method for Generating Motion Paths for a Substrate Handling Robot]

[0039] Reference Figures 3 to 5 A method for generating motion paths for a substrate handling robot 10 according to one embodiment of the present disclosure will be described.

[0040] like Figure 3As shown, in step S1, the control unit 240 reads the CAD data CD1 of the transport robot, the CAD data CD2 of the configuration area, and the CAD data CD3 of the substrate for deriving the motion path OP. The CAD data CD2 of the configuration area includes obstacles that become obstacles when the substrate transport robot 10 moves. Figure 4 Obstacle 30 is shown. In Figure 4 In the example of obstacle 30, a columnar object disposed in the substrate transport chamber 21 is shown.

[0041] like Figure 3 As shown, in step S2, the control unit 240 displays a virtual image VI containing the substrate handling robot 10, the configuration area CAD data CD2, and the substrate CAD data CD3 on the display unit 220 based on the integrated data ID obtained by integrating the read-in handling robot CAD data CD1, the configuration area CAD data CD2, and the substrate CAD data CD3. Furthermore, the control unit 240 also displays the virtual image VI on the display unit 220 in steps S3, S4, and S5, which will be described later.

[0042] like Figure 4 As shown, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. Figure 4 The diagram shows an example where the control unit 240 displays both a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220. Furthermore, based on user input to the input unit 210, the control unit 240 switches between states where the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side-by-side on the display unit 220, a state where the two-dimensional virtual image VIa is displayed on the display unit 220, and a state where the three-dimensional virtual image VIb is displayed on the display unit 220.

[0043] When the control unit 240 changes one of the two-dimensional data IDa and the three-dimensional data IDb in the integrated data ID based on the user's operation, it reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb, and displays at least one of the two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb on the display unit 220. For example, when the control unit 240 changes one of the two-dimensional data IDa and the three-dimensional data IDb based on the user's operation, it reflects the change in the other of the two-dimensional data IDa and the three-dimensional data IDb, and displays the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220. That is, when the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, if the user performs an input operation on the input unit 210 in step S3 (described later) and changes the two-dimensional data IDa or the three-dimensional data IDb, the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in conjunction.

[0044] like Figure 3As shown, in step S3, the control unit 240 sets the specified conditions for exporting the motion path OP based on the input operation performed by the user on the input unit 210 to set the specified conditions for exporting the motion path OP. The specified conditions include the start and end points of the motion path OP, the upper limits of the speed and acceleration of the robot hand 11, the upper limits of the speed and acceleration of the robot arm 12, whether the robot hand 11 holds the substrate W, the minimum threshold Ga of the gap G (described later), the size of the components of the substrate handling robot 10, the position of the components of the substrate handling robot 10, the posture of the substrate handling robot 10, the size of the components of the configuration area 20, and the position of the components of the configuration area 20, etc. That is, based on the user's operation, the control unit 240 changes at least one of the following in the integrated data ID: the size of the components of the substrate handling robot 10, the position of the components of the substrate handling robot 10, the posture of the substrate handling robot 10, the size of the components of the configuration area 20, and the position of the components of the configuration area 20. Furthermore, when at least one of the components of the substrate handling robot 10 (two-dimensional data IDa, three-dimensional data IDB) changes based on user operation—namely, the size, position, posture, size, or position of the components of the configuration area 20—the control unit 240 reflects this change in the other of the two-dimensional data IDa and three-dimensional data IDB, and displays at least one of the two-dimensional virtual image VIa and three-dimensional virtual image VIb on the display unit 220. Changes in the size and position of the components of the substrate handling robot 10 integrated with the data ID include changes in the length and position of at least one of the link 12a and robot hand 11, which are components of the substrate handling robot 10, as defined in the integrated data ID. Changes in the size and position of the components of the configuration area 20 integrated with the data ID include changes in the position of the substrate mounting portion 22, which is a component of the configuration area 20, at least one of addition or deletion, and changes in the position and size of at least one of the obstacles 30, which are components of the configuration area 20.

[0045] like Figure 3 As shown, in step S4, the control unit 240 simulates and exports the motion path OP of the substrate handling robot 10 in the configuration area 20 based on predetermined conditions. Figure 5 As shown, the control unit 240 exports multiple motion path operations (OPs). Figure 5 In this example, only two action paths (OPs) are shown for simplification. Additionally, as... Figure 6As shown, the control unit 240 simulates and derives the action path OP in the following state: by configuring virtual obstacles 30a in the virtual image VI displayed on the display unit 220, the outline of the configuration area 20 deviates from the minimum threshold Ga of the gap G (described later) by an amount.

[0046] like Figure 3 As shown, in step S5, the control unit 240 displays the exported motion path OP on the display unit 220. (As...) Figure 5 As shown, the control unit 240 displays the size of the gap G between at least one of the substrate handling robot 10 and the substrate W on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the configuration area 20, on the display unit 220 along with the derived motion path OP. Specifically, the control unit 240 displays the size of the smallest gap G on each of the multiple motion paths OP in the integrated data ID on the display unit 220. That is, the size of the smallest gap G on each of the multiple derived motion paths OP is simultaneously displayed on the display unit 220. Furthermore, the control unit 240 displays the size of the smallest gap G on each of the multiple motion paths OP in the integrated data ID on the display unit 220 in a manner corresponding to the size of the gap G. For example, the control unit 240 displays the size of the smallest gap G on each of the multiple motion paths OP on the display unit 220 in a color corresponding to the size of the gap G.

[0047] If, after step S4 or S5, the user performs an input operation on the input unit 210 to change the conditions specified when exporting the motion path OP, the process returns to step S3. If, after step S5, the user does not perform an input operation on the input unit 210 to change the conditions specified when exporting the motion path OP, the motion path generation of the substrate handling robot 10 ends.

[0048] [Effects of the Implementation Method]

[0049] In this embodiment, the following effects can be achieved.

[0050] (Effect of the motion path generation method for substrate handling robot)

[0051] In this embodiment, when one of the two-dimensional data IDa and three-dimensional data IDb in the integrated data ID obtained by integrating the computer-aided design data CD1 of the substrate handling robot 10 as computer-aided design data of the substrate handling robot 10 and the configuration area CAD data CD2 of the configuration area 20 as computer-aided design data of the configuration area 20, which is used to derive the motion path OP of the substrate handling robot 10 in the configuration area 20 where the substrate handling robot 10 and the substrate W are configured, changes occur, the other of the two-dimensional data IDa and three-dimensional data IDb is made to reflect the change, and at least one of the two-dimensional virtual image Via corresponding to the two-dimensional data IDa and the configuration area 20, which includes the substrate handling robot 10 and the configuration area 20, and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb, is displayed on the display unit 220. Therefore, if either the two-dimensional data IDa or the three-dimensional data IDb is changed, the other of the two-dimensional data IDa and the three-dimensional data IDb will reflect the change. Thus, regardless of how the user changes the two-dimensional data IDa and the three-dimensional data IDb, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at the expected time. As a result, the operability and visibility for the user when setting the prescribed conditions for the motion path OP of the export substrate handling robot 10 within the configuration area 20 can be improved.

[0052] Furthermore, in this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes: when one of the two-dimensional data IDa and the three-dimensional data IDb changes based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220. Therefore, regardless of how the user changes the two-dimensional data IDa and the three-dimensional data IDb, the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed simultaneously on the display unit 220 in a recognizable manner. Thus, the user can more comprehensively consider the changes in the virtual image VI when either the two-dimensional data IDa or the three-dimensional data IDb changes.

[0053] Furthermore, in this embodiment, the motion path generation method of the substrate handling robot 10 includes a step of switching between the following states: a state in which two-dimensional virtual image VIa and three-dimensional virtual image VIb are displayed side-by-side on the display unit 220; a state in which two-dimensional virtual image VIa is displayed on the display unit 220; and a state in which three-dimensional virtual image VIb is displayed on the display unit 220. Thus, the user can select the desired state from the states of displaying two-dimensional virtual image VIa and three-dimensional virtual image VIb side-by-side on the display unit 220, displaying two-dimensional virtual image VIa on the display unit 220, and displaying three-dimensional virtual image VIb on the display unit 220.

[0054] Furthermore, in this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes: when at least any one of the following changes occurs based on user operation: the size of the substrate handling robot 10 component, the position of the substrate handling robot 10 component, the posture of the substrate handling robot 10, the size of the configuration area 20 component, or the position of the configuration area 20 component, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220. Therefore, even if the user changes either the two-dimensional data Ida or the three-dimensional data IDb regarding at least one of the size of the components of the substrate handling robot 10, the position of the components of the substrate handling robot 10, the posture of the substrate handling robot 10, the size of the components of the configuration area 20, or the position of the components of the configuration area 20, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can still be displayed on the display unit 220 at the expected time.

[0055] Furthermore, in this embodiment, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes: when at least one of the length and position of at least one of the links 12a and robot arm 11, which are components of the substrate handling robot 10, is changed based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDb is made to reflect the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220. Therefore, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding at least one of the length and position of the links 12a and robot arm 11, which are components of the substrate handling robot 10, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can still be displayed on the display unit 220 at an expected time.

[0056] Furthermore, in this embodiment, the configuration area 20 includes a substrate mounting portion 22 for mounting the substrate W. Moreover, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes: when, based on user operation, at least one of the positions of the substrate mounting portion 22, which is a component of the configuration area 20, is changed, added, or deleted, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220. Therefore, even if the user changes the position of the substrate mounting portion 22, which is a component of the configuration area 20, either the two-dimensional data IDa or the three-dimensional data IDb, the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can still be displayed on the display unit 220 at the expected time.

[0057] Furthermore, in this embodiment, the configuration area 20 includes an obstacle 30 that serves as an obstacle during the movement of the substrate handling robot 10. Moreover, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes: when at least one of the position or size of the obstacle 30, which constitutes the configuration area 20, is changed based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects this change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220. Therefore, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb regarding at least one of the position or size of the obstacle 30, which constitutes the configuration area 20, one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can still be displayed on the display unit 220 at the expected time.

[0058] (The effect of the motion path generation device for the substrate handling robot)

[0059] In this embodiment, a control unit 240 is provided. When a change occurs in one of the two-dimensional data IDa and three-dimensional data IDb in the integrated data ID obtained by integrating the computer-aided design data CD1 of the substrate handling robot 10 as computer-aided design data of the substrate handling robot 10 and the configuration area CAD data CD2 of the configuration area 20 as computer-aided design data of the configuration area 20, based on the user's operation, the control unit 240 causes the other of the two-dimensional data IDa and three-dimensional data IDb to reflect the change, and displays at least one of the two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb, which includes the substrate handling robot 10 and the configuration area 20, on the display unit 220. Therefore, similar to the motion path generation method of the substrate handling robot 10 described above, when the prescribed conditions for generating the motion path OP of the substrate handling robot 10 in the configuration area 20 are set, regardless of how the user changes the two-dimensional data Ida and the three-dimensional data IDb, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 at the expected time. As a result, similar to the motion path generation method of the substrate handling robot 10 described above, a motion path generation apparatus 200 for a substrate handling robot 10 can be provided that improves the operability and visibility for the user when setting the prescribed conditions for generating the motion path OP of the substrate handling robot 10 in the configuration area 20.

[0060] [Variation Example]

[0061] It should be considered that all aspects of the embodiments disclosed herein are illustrative rather than limiting. The scope of this disclosure is not shown by the description of the above embodiments, but by the technical solutions, and includes all modifications (variations) that are equivalent in meaning and scope to the technical solutions.

[0062] For example, in the above embodiment, an example is shown where displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 includes: when at least one of the position and size of an obstacle 30, which is a component of the configuration area 20, in one of the two-dimensional data IDa and the three-dimensional data IDa changes based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDa reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220. However, this disclosure is not limited to this. In this disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include: when at least one of the position and size of an obstacle 30, which is a component of the configuration area 20, in one of the two-dimensional data IDa and the three-dimensional data IDa changes based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDa reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220.

[0063] Furthermore, in the above embodiments, an example is shown whereby displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 includes: when at least one of the positions of the substrate mounting portion 22, which is a component of the configuration area 20, is changed, added, or deleted based on a user's operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220. However, this disclosure is not limited to this. In this disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include: when at least one of the positions of the substrate mounting portion 22, which is a component of the configuration area 20, is changed, added, or deleted based on user operations, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220.

[0064] Furthermore, in the above embodiments, an example is shown whereby displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes: when at least one of the length and position of at least one of the links 12a and robot arm 11, which are components of the substrate handling robot 10, changes based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220, but this disclosure is not limited thereto. In this disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include: when at least one of the length and position of at least one of the link 12a and the robot hand 11, which are components of the substrate handling robot 10, changes based on the user's operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220.

[0065] Furthermore, in the above embodiments, an example is shown whereby displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 includes: when at least any one of the following changes occurs based on user operation: the size of the component of the substrate handling robot 10, the position of the component of the substrate handling robot 10, the posture of the substrate handling robot 10, the size of the component of the configuration area 20, or the position of the component of the configuration area 20, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220. However, this disclosure is not limited thereto. In this disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may not include: when at least any one of the size of the component of the substrate handling robot 10, the position of the component of the substrate handling robot 10, the posture of the substrate handling robot 10, the size of the component of the configuration area 20, or the position of the component of the configuration area 20 changes based on the user's operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220.

[0066] Furthermore, in the above embodiments, an example is shown where the motion path generation method for the substrate handling robot 10 includes a step of switching between the following states: displaying a two-dimensional virtual image VIa and a three-dimensional virtual image VIb side-by-side on the display unit 220; displaying the two-dimensional virtual image VIa on the display unit 220; and displaying the three-dimensional virtual image VIb on the display unit 220. However, this disclosure is not limited to this. In this disclosure, the motion path generation method for the substrate handling robot 10 may also omit the step of switching between the following states: displaying a two-dimensional virtual image VIa and a three-dimensional virtual image VIb side-by-side on the display unit 220; displaying the two-dimensional virtual image VIa on the display unit 220; and displaying the three-dimensional virtual image VIb on the display unit 220.

[0067] Furthermore, in the above embodiments, an example is shown whereby displaying at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb on the display unit 220 includes: when one of the two-dimensional data IDa and the three-dimensional data IDb changes based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220. However, this disclosure is not limited to this. In this disclosure, displaying at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 may also not include: when one of the two-dimensional data IDa and the three-dimensional data IDb changes based on user operation, the other of the two-dimensional data IDa and the three-dimensional data IDb reflects the change, and the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220.

[0068] Furthermore, in the above embodiments, an example is shown whereby displaying a virtual image VI on the display unit 220 includes: displaying a virtual image VI containing the substrate handling robot 10, the configuration area 20, and the substrate W on the display unit 220 based on an integrated data ID obtained by integrating the read-in handling robot CAD data CD1, the configuration area CAD data CD2, and the substrate CAD data CD3; however, this disclosure is not limited to this. In this disclosure, displaying a virtual image VI on the display unit 220 may also include: displaying a virtual image VI containing the substrate handling robot 10, the configuration area 20, and the substrate W on the display unit 220 based on an integrated data ID obtained by integrating the read-in handling robot CAD data CD1, the configuration area CAD data CD2, and the substrate CAD data CD3.

[0069] Furthermore, in the above embodiments, an example is shown whereby the motion path generation method of the substrate handling robot 10 includes reading substrate CAD data CD3, which is computer-aided design data of the substrate W, used to derive the motion path OP. However, this disclosure is not limited thereto. In this disclosure, the motion path generation method of the substrate handling robot 10 may also not include reading substrate CAD data CD3, which is computer-aided design data of the substrate W, used to derive the motion path OP.

[0070] Furthermore, in the above embodiments, an example is shown where the workpiece is a substrate W, the end effector is a robot hand 11, and the robot arm 12 is a horizontal multi-joint robot arm; however, this disclosure is not limited to this. In this disclosure, the workpiece may also be an object other than the substrate W, the end effector may also be an object other than the robot hand 11, and the robot arm 12 may also be an object other than a horizontal multi-joint robot arm.

[0071] Furthermore, in the above embodiments, an example is shown where the configuration region 20 includes a substrate transport chamber 21 for transporting the substrate W, and a substrate placement portion 22 adjacent to the substrate transport chamber 21 and for placing the substrate W; however, this disclosure is not limited to this. Alternatively, the configuration region 20 may include the substrate transport chamber 21 for transporting the substrate W, but may not include the substrate placement portion 22 adjacent to the substrate transport chamber 21 and for placing the substrate W.

[0072] The functions of the elements disclosed in this specification can be performed using circuitry or processing circuitry comprising a general-purpose processor, a special-purpose processor, an integrated circuit, an ASIC (Application Specific Integrated Circuit), existing circuitry, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor includes transistors and other circuitry, and is therefore considered a processing circuit or circuit. In this disclosure, a circuit, unit, or mechanism is hardware that performs or is programmed to perform the listed functions. The hardware may also be the hardware disclosed in this specification, or it may be other known hardware programmed or configured to perform the listed functions. Where the hardware is considered a processor that is a circuit, the circuit, mechanism, or unit is a combination of hardware and software used in the configuration of the hardware and / or the processor.

[0073] [Way]

[0074] Those skilled in the art will understand that the above exemplary embodiments are specific examples of the following approaches.

[0075] (Method 1)

[0076] A method for generating a robot's motion path includes the following steps: simulating and deriving the motion path of a robot, comprising an end effector holding a workpiece and a robot arm equipped with the end effector and connected by multiple links, within a configuration area containing the robot and the workpiece, based on predetermined conditions; and...

[0077] When one of the two-dimensional data and three-dimensional data in the integrated data changes based on the user's operation, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image corresponding to the two-dimensional data and the three-dimensional virtual image corresponding to the three-dimensional data, which includes the robot and the configuration area, is displayed on the display unit. The integrated data is obtained by integrating robot CAD data, which is computer-aided design data for the robot used to derive the motion path, and configuration area CAD data, which is computer-aided design data for the configuration area.

[0078] (Method 2)

[0079] According to the robot motion path generation method described in Method 1, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when one of the two-dimensional data and the three-dimensional data changes based on the user's operation, the other of the two-dimensional data and the three-dimensional data reflects the change, and the two-dimensional virtual image and the three-dimensional virtual image are arranged and displayed on the display unit.

[0080] (Method 3)

[0081] According to the robot motion path generation method described in method 1 or 2, there is a step of switching between the following states: a state in which the two-dimensional virtual image and the three-dimensional virtual image are arranged and displayed on the display unit; a state in which the two-dimensional virtual image is displayed on the display unit; and a state in which the three-dimensional virtual image is displayed on the display unit.

[0082] (Method 4)

[0083] According to any one of the methods 1 to 3, the method for generating a robot's motion path includes displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit: when at least one of the two-dimensional data and the three-dimensional data changes based on the user's operation, such as the size of the robot's constituent parts, the position of the robot's constituent parts, the robot's posture, the size of the constituent parts of the configuration area, or the position of the constituent parts of the configuration area, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display unit.

[0084] (Method 5)

[0085] According to the robot motion path generation method described in Method 4, displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when at least one of the length and position of at least one of the links and the end effector, which are components of the robot, changes based on the user's operation, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display unit.

[0086] (Method 6)

[0087] According to the robot motion path generation method described in Method 4, the configuration area includes a workpiece placement section for placing the workpiece, and displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display section includes: when at least one of the positions of the workpiece placement section, which is a component of the configuration area, is changed, added, or deleted based on the user's operation, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display section.

[0088] (Method 7)

[0089] According to the robot motion path generation method described in Method 4, wherein the configuration area includes obstacles that become obstacles when the robot moves, and displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when, based on the user's operation, at least one of the position and size of the obstacle that is a component of the configuration area in one of the two-dimensional data and the three-dimensional data changes, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display unit.

[0090] (Method 8)

[0091] According to any one of the methods 1 to 7, the robot motion path generation method is a substrate, the end effector is a robot hand, the robot arm is a horizontal multi-joint robot arm, and the configuration area includes: a substrate transport chamber for transporting the substrate; and a substrate mounting section connected to the substrate transport chamber and for mounting the substrate.

[0092] (Method 9)

[0093] A robot motion path generation apparatus includes: a display unit; and a control unit that, based on predetermined conditions, simulates and derives the motion path of a robot, comprising an end effector holding a workpiece and a robot arm on which the end effector is mounted and connected by multiple links, within a configuration area in which the robot and the workpiece are configured. When a change occurs in either two-dimensional data or three-dimensional data in integrated data based on user operation, the control unit causes the other of the two-dimensional and three-dimensional data to reflect the change, and displays at least one of a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, which includes the robot and the configuration area, on the display unit. The integrated data is obtained by integrating robot CAD data, which serves as computer-aided design data for the robot, and configuration area CAD data, which serves as computer-aided design data for the configuration area, used to derive the motion path.

Claims

1. A method for generating motion paths for a robot, characterized in that, The following steps are required: Based on the specified conditions, the motion path of a robot, including an end effector holding a workpiece and a robot arm consisting of a robot arm with the end effector installed and multiple links connected to each other, is simulated and the motion path is derived in the configuration area where the robot and the workpiece are configured. as well as When a change occurs in either the two-dimensional or three-dimensional data in the integrated data based on user operations, the other of the two-dimensional and three-dimensional data reflects this change, and at least one of the following is displayed on the display unit: a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, which includes the robot and the configuration area. The integrated data is obtained by integrating robot CAD data, which serves as computer-aided design data for the robot and configuration area CAD data, which serves as computer-aided design data for the configuration area, used to export the motion path.

2. The robot motion path generation method according to claim 1, characterized in that, Displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when one of the two-dimensional data and the three-dimensional data changes based on user operation, causing the other of the two-dimensional data and the three-dimensional data to reflect the change, and arranging the two-dimensional virtual image and the three-dimensional virtual image in an arranged display on the display unit.

3. The robot motion path generation method according to claim 1, characterized in that, It has steps to switch between the following states: The state in which the two-dimensional virtual image and the three-dimensional virtual image are arranged and displayed on the display unit; The state in which the two-dimensional virtual image is displayed on the display unit; as well as The state in which the three-dimensional virtual image is displayed on the display unit.

4. The robot motion path generation method according to claim 1, characterized in that, Displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when at least one of the size of the robot component, the position of the robot component, the robot's posture, the size of the configuration area component, and the position of the configuration area component changes based on user operation, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display unit.

5. The robot motion path generation method according to claim 4, characterized in that, Displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when, based on the user's operation, at least one of the length and position of at least one of the links and the end effector, which are components of the robot, is changed, the other of the two-dimensional data and the three-dimensional data is made to reflect the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display unit.

6. The robot motion path generation method according to claim 4, characterized in that, The configuration area includes a workpiece mounting section for placing the workpiece. Displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when, based on the user's operation, at least one of the positions of the workpiece mounting portion, which is a component of the configuration area, is changed, added, or deleted, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display unit.

7. The robot motion path generation method according to claim 4, characterized in that, The configuration area includes obstacles that would hinder the robot's movements. Displaying at least one of the two-dimensional virtual image and the three-dimensional virtual image on the display unit includes: when, based on the user's operation, at least one of the position and size of the obstacle that is a component of the configuration area in one of the two-dimensional data and the three-dimensional data changes, the other of the two-dimensional data and the three-dimensional data reflects the change, and at least one of the two-dimensional virtual image and the three-dimensional virtual image is displayed on the display unit.

8. The method for generating motion paths for a robot according to claim 1, characterized in that, The workpiece is a substrate. The end effector is a robotic hand. The robotic arm is a horizontal, multi-jointed robotic arm. The configuration area includes: a substrate transport chamber for transporting the substrate; and a substrate placement section connected to the substrate transport chamber and for placing the substrate.

9. A robot motion path generation device, characterized in that, have: Display unit; and The control unit, based on predetermined conditions, simulates and derives the motion path of a robot, including an end effector holding a workpiece and a robot arm on which the end effector is mounted and connected by multiple links, within a configuration area in which the robot and the workpiece are configured. When a change occurs in either the two-dimensional data or the three-dimensional data in the integrated data based on user operation, the control unit makes the other of the two-dimensional data and the three-dimensional data reflect the change, and displays at least one of a two-dimensional virtual image corresponding to the two-dimensional data and a three-dimensional virtual image corresponding to the three-dimensional data, which includes the robot and the configuration area, on the display unit. The integrated data is obtained by integrating robot CAD data, which serves as computer-aided design data for the robot, and configuration area CAD data, which serves as computer-aided design data for the configuration area, used to derive the motion path.

Images