Clothing buttonhole opening machine with anti-wrinkle function

Abstract

The invention discloses a garment buttonholing machine with an anti-wrinkle function, and relates to the technical field of buttonholing machines, the garment buttonholing machine comprises a bottom plate and a buttonholing machine body arranged at the upper end of the bottom plate, and further comprises a workbench arranged at the upper end of the bottom plate; the partitioned dynamic air flotation assembly is arranged on the inner side of the workbench and comprises a base plate arranged in the workbench, a microwell plate is fixed to the upper end of the base plate, a machining opening is formed in the center of the plate face of the microwell plate, an air distribution cavity plate is fixed between the base plate and the microwell plate, and the machining opening is formed in the center of the plate face of the microwell plate. The space between the substrate and the microporous plate is divided into a plurality of independent air cavities by the air cavity dividing plates, and the plurality of independent air cavities are divided into a central operation air cavity, a peripheral stable air cavity and an edge auxiliary air cavity which are arranged from inside to outside. According to the device, the functions of non-contact fixing and unstressed conveying are achieved, extrusion wrinkles, stretching wrinkles and pushing wrinkles around buttonholes are effectively eradicated, and the problem of wrinkles generated when buttonholes are formed in high-grade clothes is fundamentally solved.

Description

Technical Field

[0001] This invention relates to the field of buttonhole opening machine technology, and more particularly to a garment buttonhole opening machine with anti-wrinkle function. Background Technology

[0002] Making buttonholes is a crucial step in garment manufacturing, and its quality directly affects the appearance and grade of the garment. Traditional buttonhole machines rely primarily on presser feet to press the fabric firmly against the feed dog, and the reciprocating motion of the feed dog moves the fabric, combined with the cutting and sewing actions of the machine head to complete the buttonhole process. This "pressing + pulling" method has significant inherent defects when dealing with lightweight, soft, highly elastic, or smooth high-end fabrics (such as silk and chiffon): Wrinkle problem: The pressure of the presser foot and the pulling force of the feed dog work together on the fabric in a local area, which can easily cause the fabric to be pushed, stretched and deformed around the buttonhole, forming permanent wrinkles that are difficult to iron out, seriously affecting the quality of the garment.

[0003] Damage to fabric: Rigid presser feet and feed dogs can cause indentations, scratches, or snags on delicate fabric surfaces.

[0004] Therefore, there is an urgent need for a garment buttonhole opening machine with anti-wrinkle function to fundamentally solve the problem of wrinkles when opening buttonholes in fabrics. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a garment buttonhole opening machine with anti-wrinkle function.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A garment buttonhole opening machine with anti-wrinkle function includes a base plate, a buttonhole opening machine body disposed on the upper part of the base plate, and further includes: A workbench is located at the upper end of the base plate; A partitioned dynamic air flotation component is disposed inside the worktable. The partitioned dynamic air flotation component includes a base plate disposed inside the worktable. A microporous plate is fixed at the upper end of the base plate. A processing port is provided at the center of the surface of the microporous plate. An air distribution chamber plate is fixed between the base plate and the microporous plate. The air distribution chamber plate divides the area between the base plate and the microporous plate into several independent air chambers. The several independent air chambers are divided into a central working air chamber, a peripheral stabilizing air chamber, and an edge auxiliary air chamber arranged from the inside out. A multi-channel air supply assembly is disposed on one side of the base plate, and the multi-channel air supply assembly is connected to several independent air chambers; A dynamic tension field actuator is disposed at the upper end of the substrate; The main controller is located on the side wall of the workbench; By using a partitioned dynamic air flotation component to form a uniform air film under the fabric, the fabric is slightly lifted. In conjunction with a dynamic tension field actuator, the contact position and force on the fabric are dynamically adjusted to actively smooth the fabric and prevent wrinkles.

[0007] As a further improvement of the present invention, the multi-channel air supply assembly includes an air pump, a filter, a dryer, and a pressure regulating valve connected in sequence. The outlet of the pressure regulating valve is connected to an air supply pipe, and the end of the air supply pipe away from the pressure regulating valve is connected to three air distribution pipes. The three air distribution pipes correspond to the positions of the central working air chamber, the peripheral stabilizing air chamber, and the edge auxiliary air chamber, respectively. Each air distribution pipe is provided with an independent air path pipe communicating with the independent air chamber. Each independent air path pipe is provided with an air pressure sensor and an electric proportional valve.

[0008] As a further improvement of the present invention, the dynamic tension field execution component includes a device base fixed to the upper end of the substrate. A mounting frame is slidably installed inside the device base. An electric cylinder is installed at the inner bottom of the device base. The telescopic end of the electric cylinder is fixedly connected to the mounting frame. An annular bracket is fixed at the end of the mounting frame away from the device base. The lower end of the annular bracket is provided with a plurality of distance and topography sensors and a plurality of miniature high-response linear actuators evenly distributed along the circumference of the annular bracket. The end of each miniature high-response linear actuator is connected to a flexible contact through a miniature two-dimensional force sensor. The flexible contact includes an elastic connection part connected to the miniature two-dimensional force sensor and a contact end connected to the elastic connection part.

[0009] As a further improvement of the present invention, the main controller includes an embedded motion controller and a sensor integration module electrically connected to the embedded motion controller. The sensor integration module is electrically connected to a barometric pressure sensor, a distance and shape sensor, and a miniature two-dimensional force sensor.

[0010] As a further improvement of the present invention, it also includes an XY servo motion component, the XY servo motion component including a first electric linear guide rail installed inside the worktable, a first guide rail seat provided on the first electric linear guide rail, a second electric linear guide rail fixedly installed on the first guide rail seat, a second guide rail seat provided on the second electric linear guide rail, and the second guide rail seat fixedly connected to the bottom of the substrate.

[0011] As a further improvement of the present invention, the distance and topography sensor is a confocal white light sensor, the miniature high-response linear actuator is a voice coil motor, the elastic connection part is a silicone pillar, and the contact end is a ceramic disk.

[0012] As a further improvement of the present invention, an elastic connecting membrane is connected between the substrate and the worktable.

[0013] The beneficial effects of this invention are: It fundamentally eliminates the wrinkle-generating mechanism of "compression + stretching". The fabric is in a low-stress or micro-stress controlled state throughout the processing, effectively eliminating compression wrinkles, stretch wrinkles, and push wrinkles around the buttonholes. It is especially suitable for high-end lightweight fabrics and significantly improves product quality.

[0014] Through independent control of air pressure zones, real-time feedback from multiple sensors, and closed-loop control of micro-actuators, the system can automatically adapt to fabrics of different thicknesses, elasticities, and textures, and automatically adjust the optimal "suspend-contact-smoothing" strategy, reducing reliance on operator experience and improving production consistency and automation.

[0015] Non-contact air-float support and micro-force flexible contact avoid damage and snagging to the fabric surface. This allows for high-quality buttonhole opening of fabrics such as silk, lace, ultra-thin synthetic fibers, and elastic knits, which are originally difficult to process with traditional equipment, thus expanding the application range of the equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a garment buttonhole opening machine with anti-wrinkle function proposed in this invention; Figure 2 This is a schematic diagram of the worktable, base plate, microperforated plate, processing port, and elastic connecting membrane of a garment buttonhole opening machine with anti-wrinkle function proposed in this invention. Figure 3 This is a schematic diagram of the base plate, air supply pipe, air distribution pipe, independent air circuit pipe, air pressure sensor, electric proportional valve, and XY servo motion component of a garment buttonhole opening machine with anti-wrinkle function proposed in this invention. Figure 4 for Figure 3 Enlarged view of point A in the middle; Figure 5 This is a schematic diagram of the air supply pipe, base plate, air distribution plate, edge auxiliary air chamber, peripheral stabilizing air chamber and central working air chamber of a garment buttonhole opening machine with anti-wrinkle function proposed in this invention. Figure 6 This is a schematic diagram of the dynamic tension field execution component of a garment buttonhole opening machine with anti-wrinkle function proposed in this invention. Figure 7 This is a schematic diagram of the mounting frame, ring bracket, and electric cylinder of a garment buttonhole opening machine with anti-wrinkle function proposed in this invention.

[0017] In the diagram: 1. Base plate, 2. Button opening machine body, 3. Workbench, 4. Device base, 5. Air supply pipe, 6. Pressure regulating valve, 7. Dryer, 8. Filter, 9. Air pump, 10. Elastic connecting membrane, 11. Substrate, 12. Micro-perforated plate, 13. Processing port, 14. First electric linear guide, 15. First guide rail seat, 16. Second electric linear guide, 17. Second guide rail seat, 18. Air distribution pipe, 19. Main controller, 20. Independent air circuit pipe, 21. Air pressure sensor, 22. Electric proportional valve, 23. Air distribution chamber plate, 24. Edge auxiliary air chamber, 25. Peripheral stabilizing air chamber, 26. Central working air chamber, 27. Mounting bracket, 28. Ring bracket, 29. Distance and morphology sensor, 30. Miniature high-response linear actuator, 31. Miniature two-dimensional force sensor, 32. Elastic connection part, 33. Contact end, 34. Electric cylinder. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0019] See Figures 1-7 A buttonhole opening machine for garments with anti-wrinkle function includes a base plate 1 and a buttonhole opening machine body 2 disposed on the upper end of the base plate 1. The buttonhole opening machine body 2 is a conventional machine head assembly for completing stitch sewing and fabric cutting in the prior art. Its specific structure is not the focus of the improvement of this invention and will not be described in detail here. It also includes: The worktable 3 is located at the top of the base plate 1 and directly below the needle bar of the buttonhole machine body 2. The worktable 3 is the basic platform for realizing the anti-wrinkle function.

[0020] A zoned dynamic air flotation assembly is disposed inside the worktable 3. The assembly includes a substrate 11 disposed inside the worktable 3, with an elastic connecting membrane 10 connecting the substrate 11 and the worktable 3. The elastic connecting membrane 10 is made of high-strength silicone or polyurethane film. The elastic connecting membrane 10 seals the gap between the substrate 11 and the worktable 3. Simultaneously, due to the elastic expansion and contraction characteristics of the elastic connecting membrane 10, it does not impede the movement of the substrate 11, thus achieving a dynamic seal between the substrate 11 and the main body of the worktable 3. This allows the substrate 11 to move in the X and Y directions within a certain range, while ensuring the airtightness of the internal cavity of the worktable 3. A microporous plate 12 is fixed to the upper end of the substrate 11. The microporous plate 12 is made of a high-hardness, high-wear-resistant material (such as hardened tool steel or ceramic). The microperforated plate 12 is constructed with a processing opening 13 at the center of its surface. This processing opening 13 is used to avoid the cutter and sewing needle of the buttonhole machine body 2. The upper surface of the microperforated plate 12 is precisely machined with a matrix of uniformly distributed micro-holes. The hole diameter is preferably 0.1-0.3 mm and the hole spacing is 1-2 mm. A gas distribution plate 23 is fixed between the substrate 11 and the microperforated plate 12. The gas distribution plate 23 is made of engineering plastic or metal through precision machining. The interior of the gas distribution plate 23 is etched or machined with mutually isolating annular grooves. The gas distribution plate 23 divides the substrate 11 and the microperforated plate 12 into several independent gas chambers. The micro-holes on the microperforated plate 12 are connected to each independent gas chamber. The several independent gas chambers are divided into three regions, specifically a central working gas chamber 26, an outer stabilizing gas chamber 25, and an edge auxiliary gas chamber 24 arranged from the inside out.

[0021] It also includes an XY servo moving component, which is used to replace the traditional feed dog to achieve "stress-free fabric delivery". The XY servo moving component includes a first electric linear guide 14 installed inside the worktable 3. The first electric linear guide 14 is provided with a first guide seat 15. A second electric linear guide 16 is fixedly installed on the first guide seat 15. The first electric linear guide 14 and the second electric linear guide 16 are installed vertically. The second electric linear guide 16 is provided with a second guide seat 17. The second guide seat 17 is fixedly connected to the bottom of the substrate 11. Through the coordinated servo drive of the first electric linear guide 14 and the second electric linear guide 16, the substrate 11 and the micro-perforated plate 12 above it can be precisely controlled to perform two-dimensional (XY) movement in the worktable plane. Both the first electric linear guide 14 and the second electric linear guide 16 are selected from HIWIN HGH15CA high-precision ball linear guides.

[0022] A multi-channel air supply assembly is located on one side of the base plate 1. This assembly provides an independently adjustable clean air source for the zoned dynamic air flotation assembly. The multi-channel air supply assembly is connected to several independent air chambers. The multi-channel air supply assembly includes an air pump 9, a filter 8, a dryer 7, and a pressure regulating valve 6 connected in sequence. The air pump 9 is an oil-free silent air compressor (such as the Osig TC-503) with an output pressure of 0.8MPa. The filter 8 and dryer 7 are SMCAFM30-03D triple units. The pressure regulating valve 6 is an SMCIRV20-01 precision pressure reducing valve for pressure regulation. The outlet of valve 6 is connected to an air supply pipe 5. The end of the air supply pipe 5 away from the pressure regulating valve 6 is connected to three air distribution pipes 18. The three air distribution pipes 18 correspond to the positions of the central working air chamber 26, the peripheral stabilizing air chamber 25, and the edge auxiliary air chamber 24, respectively. Each air distribution pipe 18 is equipped with an independent air passage pipe 20 that communicates with the independent air chamber. Each independent air passage pipe 20 is equipped with a pressure sensor 21 and an electro-proportional valve 22. The electro-proportional valve 22 is used to receive control signals and precisely adjust the gas pressure leading to the corresponding air chamber. Three sets of SMCITV2030-212CL type are selected. This model has an input signal of 0-10V, an output pressure of 0.01-0.7MPa, a response time of <50ms, and a built-in digital pressure display. It is used to independently control the pressure of each independent air chamber. The air pressure sensor 21 is used to monitor the actual air pressure of the air chamber in real time. The air pressure sensor 21 is an SMCPSE550 type pressure sensor with a range of 0-1.0MPa and an accuracy of ±0.5%FS. The signal is fed back to the embedded motion controller to form a closed-loop air pressure control.

[0023] The dynamic tension field actuator is located on the upper end of the substrate 11. This actuator is the core of providing the "active smoothing" function. The dynamic tension field actuator includes a device base 4 fixed on the upper end of the substrate 11. A mounting bracket 27 is slidably installed inside the device base 4. An electric cylinder 34 is installed on the inner bottom of the device base 4. The telescopic end of the electric cylinder 34 is fixedly connected to the mounting bracket 27 and is used to drive the entire actuator to move up and down in the Z-axis (vertical direction). The electric cylinder 34 is a TBIMOTIONMSK060 type miniature electric cylinder.

[0024] A ring bracket 28 is fixed to one end of the mounting bracket 27 away from the device base 4. The central hole of the ring bracket 28 is concentric with the processing port 13 on the micro-perforated plate 12 to ensure that the head of the buttonhole machine body 2 can pass through it. The lower end of the ring bracket 28 is provided with 8-12 distance and shape sensors 29 and 8-12 miniature high-response linear actuators 30 evenly distributed around the circumference of the ring bracket 28. The distance and shape sensors 29 are confocal white light sensors, which can measure the distance to the fabric surface with high precision in a non-contact manner and reconstruct the local three-dimensional shape. The distance and shape sensors 29 are selected from the Precitec CH Rocodile Mini series confocal white light sensors (specifically...). Model: CLS-CL2), the miniature high-response linear actuator 30 is a voice coil motor with millisecond-level response and micron-level positioning accuracy. The miniature high-response linear actuator 30 uses the Akribis XMGV30 voice coil motor module. The end of each miniature high-response linear actuator 30 is connected to a flexible contact via a miniature two-dimensional force sensor 31. The miniature two-dimensional force sensor 31 uses the FFT-M2 miniature two-dimensional force sensor from Fosuntech. The flexible contact includes an elastic connecting part 32 connected to the miniature two-dimensional force sensor 31 and a contact end 33 connected to the elastic connecting part 32. The elastic connecting part 32 is a silicone pillar, and the contact end 33 is a ceramic disk.

[0025] The main controller 19 is located on the side wall of the workbench 3. The main controller 19 includes an embedded motion controller and a sensor integration module electrically connected to the embedded motion controller. The embedded motion controller is a Beckhoff CX5130 embedded motion controller. The sensor integration module is electrically connected to the air pressure sensor 21, the distance and shape sensor 29, and the miniature two-dimensional force sensor 31.

[0026] By using a partitioned dynamic air flotation component to form a uniform air film under the fabric, the fabric is slightly lifted. In conjunction with a dynamic tension field actuator, the contact position and force on the fabric are dynamically adjusted to actively smooth the fabric and prevent wrinkles.

[0027] In use, the operator lays the garment fabric to be processed flat on the microperforated plate 12 of the workbench 3. The equipment is started, and the main controller 19 controls the multi-channel air supply assembly. Clean and stable gas, after being regulated by the various electro-proportional valves 22, enters the central working air chamber 26, the peripheral stabilizing air chamber 25, and the edge auxiliary air chamber 24, and is evenly sprayed upwards from the microperforations of the microperforated plate 12. The gas forms a uniform "air film" between the fabric and the microperforated plate 12, slightly lifting the fabric and placing it in a low-friction "quasi-suspended" state.

[0028] The main controller 19 controls the electric cylinder 34 to descend, causing the dynamic tension field actuator to descend until each contact end 33 (ceramic disc) contacts the fabric surface with a very light pre-pressure (e.g., 5-10 grams). Simultaneously, the distance and shape sensor 29 rapidly scans the fabric surface, establishing an initial three-dimensional shape map of the processing area. Based on this shape data, the main controller 19 fine-tunes the extension of each voice coil motor 30, applying a preliminary, evenly distributed light pressure to the fabric at the contact end 33, eliminating any minor unevenness that may exist during initial placement and forming a stable "anchoring ring."

[0029] The electric cylinder (34), the first electric linear guide (14), and the second electric linear guide (16) are all electrically connected to the main controller (19), and the main controller (19) controls the timing and stroke of the actions.

[0030] The buttonhole machine body 2 begins to descend. Just as the machine head is about to contact the fabric, the main controller 19 issues a command to rapidly close or significantly reduce the electro-proportional valve 22 leading to the central working air chamber 26. The air film in this area weakens instantaneously, and the fabric, under the gentle pressure of the flexible contact element, gently adheres to the surface of the perforated plate 12, providing solid support for cutting and sewing. Meanwhile, the peripheral stabilizing air chamber 25 and the edge auxiliary air chamber 24 maintain or slightly increase the air pressure, continuing to provide levitation force and stabilize the fabric body.

[0031] Throughout the cutting and sewing process at the machine head, the distance and shape sensor 29 continuously scans the microscopic topography around the buttonhole at a high frequency (e.g., kilohertz). Once the algorithm detects a tendency to wrinkle (e.g., a local bulge or depression), the main controller 19 immediately controls one or more miniature high-response linear actuators 30 near that point to perform millisecond-level nanometer-level micro-motions. For example, for a slight bulge, the contact ends 33 on both sides are controlled to perform a tiny, coordinated "pressing and stroking" motion to counteract the wrinkling tendency in its infancy. The miniature two-dimensional force sensor 31 monitors the contact force in real time, ensuring it remains within a set, minute range to prevent excessive force.

[0032] When the fabric needs to be moved to sew the long side of the buttonhole, the main controller 19 controls the first electric linear guide 14 and the second electric linear guide 16 to move in tandem, driving the entire substrate 11, the micro-perforated plate 12, and the fabric in a state of air-float micro-suspension + light pressure from flexible contact parts to perform precise servo movement within the horizontal working plane. Since there is almost no relative sliding between the fabric and the worktable, this process does not produce the pulling and frictional stress caused by traditional feed dogs.

[0033] After one buttonhole is completed, the machine head is lifted. The main controller 19 controls the central working air chamber 26 to resume air supply, lifting the fabric again. The dynamic tension field actuator is lifted as a whole by the electric cylinder 34, detaching from the fabric. The operator can then remove the smooth, wrinkle-free workpiece and place the next piece of fabric to be processed.

[0034] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A garment buttonhole opening machine with anti-wrinkle function, comprising a base plate (1) and a buttonhole opening machine body (2) disposed on the upper end of the base plate (1), characterized in that, Also includes: The workbench (3) is located at the upper end of the base plate (1); A partitioned dynamic air flotation component is disposed on the inner side of the workbench (3). The partitioned dynamic air flotation component includes a base plate (11) disposed inside the workbench (3). A microporous plate (12) is fixed at the upper end of the base plate (11). A processing port (13) is provided at the center of the surface of the microporous plate (12). A gas distribution plate (23) is fixed between the base plate (11) and the microporous plate (12). The gas distribution plate (23) divides the base plate (11) and the microporous plate (12) into several independent air chambers. The several independent air chambers are divided into a central working air chamber (26), an outer stabilizing air chamber (25), and an edge auxiliary air chamber (24) arranged from the inside to the outside. A multi-channel air supply assembly is disposed on one side of the base plate (1), and the multi-channel air supply assembly is connected to several independent air chambers; A dynamic tension field actuation component is disposed at the upper end of the substrate (11); The main controller (19) is located on the side wall of the workbench (3); By using a partitioned dynamic air flotation component to form a uniform air film under the fabric, the fabric is slightly lifted. In conjunction with a dynamic tension field actuator, the contact position and force on the fabric are dynamically adjusted to actively smooth the fabric and prevent wrinkles.

2. A garment buttonhole opening machine with anti-wrinkle function according to claim 1, characterized in that, The multi-channel air supply assembly includes an air pump (9), a filter (8), a dryer (7), and a pressure regulating valve (6) connected in sequence. The outlet of the pressure regulating valve (6) is connected to an air supply pipe (5). The end of the air supply pipe (5) away from the pressure regulating valve (6) is connected to three air distribution pipes (18). The three air distribution pipes (18) correspond to the positions of the central working air chamber (26), the peripheral stable air chamber (25), and the edge auxiliary air chamber (24), respectively. Each air distribution pipe (18) is provided with an independent air passage pipe (20) that communicates with the independent air chamber. Each independent air passage pipe (20) is provided with a pressure sensor (21) and an electric proportional valve (22).

3. A garment buttonhole opening machine with anti-wrinkle function according to claim 2, characterized in that, The dynamic tension field execution component includes a device base (4) fixed on the upper end of the substrate (11). A mounting frame (27) is slidably installed inside the device base (4). An electric cylinder (34) is installed at the inner bottom of the device base (4). The telescopic end of the electric cylinder (34) is fixedly connected to the mounting frame (27). An annular bracket (28) is fixed at one end of the mounting frame (27) away from the device base (4). The lower end of the annular bracket (28) is provided with a plurality of distance and morphology sensors (29) and a plurality of miniature high-response linear actuators (30) evenly distributed along the circumference of the annular bracket (28). The end of each miniature high-response linear actuator (30) is connected to a flexible contact through a miniature two-dimensional force sensor (31). The flexible contact includes an elastic connection part (32) connected to the miniature two-dimensional force sensor (31) and a contact end part (33) connected to the elastic connection part (32).

4. A garment buttonhole opening machine with anti-wrinkle function according to claim 3, characterized in that, The main controller (19) includes an embedded motion controller and a sensor integration module electrically connected to the embedded motion controller. The sensor integration module is electrically connected to a barometric pressure sensor (21), a distance and shape sensor (29), and a miniature two-dimensional force sensor (31).

5. A garment buttonhole opening machine with anti-wrinkle function according to claim 4, characterized in that, It also includes an XY servo motion component, which includes a first electric linear guide (14) installed inside the worktable (3), a first guide seat (15) provided on the first electric linear guide (14), a second electric linear guide (16) fixedly installed on the first guide seat (15), a second guide seat (17) provided on the second electric linear guide (16), and the second guide seat (17) fixedly connected to the bottom of the base plate (11).

6. A garment buttonhole opening machine with anti-wrinkle function according to claim 3, characterized in that, The distance and shape sensor (29) is a confocal white light sensor, the miniature high-response linear actuator (30) is a voice coil motor, the elastic connection part (32) is a silicone pillar, and the contact end (33) is a ceramic disk.

7. A garment buttonhole opening machine with anti-wrinkle function according to claim 1, characterized in that, An elastic connecting membrane (10) is connected between the substrate (11) and the worktable (3).

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