Quartz tube fine burning device and fine burning method

Abstract

The invention discloses a quartz tube fine burning device and a fine burning method.The quartz tube fine burning device comprises a device body provided with a universal fixing clamp assembly, a three-axis displacement and angle adjusting type external welding gun mechanism is arranged on the device body, and a three-axis displacement and angle adjusting type internal welding gun mechanism is arranged outside the device body; the internal welding gun mechanism extends to the inner side of the external welding gun mechanism in the axial direction of the device body, and an internal and external welding gun synchronous fine burning mechanism is formed. The internal welding gun mechanism comprises an internal welding gun adjusting mechanism and an internal welding gun assembly. The external welding gun mechanism comprises an external welding gun adjusting mechanism and an external welding gun assembly. According to the quartz tube fine burning device, synchronous automatic fine burning of the inner wall and the outer wall of the quartz tube can be achieved, through synchronous operation of the inner welding gun and the outer welding gun, the phenomenon of heating deformation or incomplete burning of the quartz tube caused by out-of-synchronization of the inner welding gun and the outer welding gun is avoided, and the fine burning precision and the production efficiency are effectively improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor device technology, and specifically to a quartz tube fine sintering apparatus and fine sintering method. Background Technology

[0002] With the rapid development of the chip industry, the semiconductor device industry has also developed rapidly. As an important component in semiconductor devices, the demand for quartz glass products is increasing day by day. Among them, when quartz tubes are precision-fired on the device, manually adjusting the welding torch is time-consuming and labor-intensive, affecting production efficiency. Moreover, manual adjustment cannot be quantified, and it is more complicated for employees to cooperate. Often, even with multiple people working together, there are still cases of heating deformation or incomplete firing.

[0003] To achieve automated operation, existing technologies, such as Chinese patent document CN118343979A, disclose a fully automatic vertical calcining device for quartz tubes. This device includes: a base plate, a first support frame on the left side of the base plate, a second support frame at the upper end of the first support frame, a third support frame on the right side of the base plate, and a third support block inside the third support frame. It also includes: a first support block installed inside the second support frame, with a first connecting plate inside the first support block. A first motor is located on the right side of the first connecting plate, and connecting teeth are located on the rear side of the first connecting plate. A guide block is located on the right side of the second support frame, and a second support block is located on the right side of the first support block. This fully automatic vertical calcining device for quartz tubes facilitates the limiting and fixing of quartz tubes during use, ensuring the safety of the calcination process. It also facilitates the lifting and adjusting of the calcining torch, improving the calcination efficiency of the device and exhibiting better adaptability.

[0004] However, the above technical solution can only achieve calcination of the outer wall of the quartz tube, but cannot achieve simultaneous fine calcination of the inner and outer walls.

[0005] To address the current issues of complex quartz tube sintering operations and problems such as heating deformation or incomplete sintering during the sintering process, it is necessary to design a quartz tube sintering device that can effectively solve the problem that the internal welding torch cannot quantitatively and uniformly coordinate with the external welding torch during the current quartz tube sintering process. Summary of the Invention

[0006] The purpose of this invention is to solve the problem that the internal welding torch cannot coordinate with the external welding torch at a quantitative and uniform speed during the fine firing of quartz tubes on the equipment, resulting in poor fine firing effect. The invention provides a fine firing device and method for quartz tubes. By setting an internal and external welding torch adjustment mechanism, the internal and external welding torches can be operated synchronously, which can ensure the synchronous fine firing of the internal and external welding torches, effectively improving the precision of fine firing and production efficiency.

[0007] The technical solution adopted by this invention to achieve its objective is as follows: a quartz tube fine sintering device, comprising a device body equipped with a universal fixing clamp assembly, an external welding torch mechanism with three-axis displacement and angle adjustment on the device body, and an internal welding torch mechanism with three-axis displacement and angle adjustment on the outside of the device body, the internal welding torch mechanism extending along the axial direction of the device body to the inside of the external welding torch mechanism, forming a synchronous fine sintering mechanism for the internal and external welding torches; the internal welding torch mechanism includes an internal welding torch adjustment mechanism and an internal welding torch assembly; the external welding torch mechanism includes an external welding torch adjustment mechanism and an external welding torch assembly. This quartz tube precision firing device features an external welding torch mechanism adjustable in three axes and circumferential angles, and an internal welding torch mechanism also adjustable in three axes and circumferential angles. These two mechanisms form a synchronous precision firing mechanism, enabling simultaneous automatic precision firing of the inner and outer walls of the quartz tube. Synchronous operation of the internal and external welding torches avoids heating deformation or incomplete firing caused by asynchrony. The universal fixing fixture assembly can clamp and fix quartz tubes of various specifications, thus achieving synchronous precision firing of quartz tubes of various sizes. This effectively improves the precision firing accuracy and production efficiency. Furthermore, the device is simple in structure, easy to operate, and highly versatile.

[0008] Preferably, the internal welding torch adjustment mechanism is configured within an adjustable torch holder mechanism. The internal welding torch assembly achieves three-axis and angular adjustment through the adjustable torch holder mechanism and the internal welding torch adjustment mechanism. The internal welding torch adjustment mechanism is configured within an adjustable torch holder mechanism that can be adjusted in the height direction. The internal welding torch assembly achieves three-axis and angular adjustment through the adjustable torch holder mechanism and the internal welding torch adjustment mechanism, which can meet the requirements of simultaneous fine firing of the inner and outer walls of quartz tubes of different specifications. It can achieve synchronous adjustment and fine firing with the external welding torch assembly, ensuring the quality of fine firing.

[0009] Preferably, the internal welding torch adjustment mechanism includes a Y-axis lead screw module, an X-axis lead screw module mounted on the Y-axis lead screw module, and an angle rotation mechanism mounted on the X-axis lead screw module. The Y-axis and X-axis lead screw modules allow for adjustment of the YX-direction displacement of the internal welding torch assembly, while the angle rotation mechanism allows for adjustment of the internal welding torch assembly's position within the circumference of the quartz tube to be finely fired. This allows for adjustment of the distance between the internal welding torch assembly and the inner wall, satisfying the need for adjusting the firing thickness at different locations on the inner wall. For locations requiring a thicker firing thickness, the internal welding torch assembly can be moved closer to the inner wall; for locations requiring a thinner firing thickness, it can be moved further away, greatly satisfying the requirements for different firing thicknesses at different locations.

[0010] Preferably, the Y-axis lead screw module includes a Y-axis lead screw drive device, a Y-axis lead screw assembly, and a Y-axis digital displacement display; the X-axis lead screw module includes an X-axis lead screw drive device, an X-axis lead screw assembly, and an X-axis digital displacement display. The XY digital displacement display allows for real-time observation of the internal welding torch assembly's displacement in the XY directions, enabling precise control of the internal welding torch assembly's displacement and achieving synchronized precision welding with the external welding torch assembly.

[0011] Preferably, the angle rotation mechanism includes a rotation drive mechanism and an inner welding gun rotation bracket that is driven to rotate by the rotation drive mechanism; the rotation drive mechanism is a worm gear drive mechanism, in which the worm gear is mounted on the inner welding gun rotation bracket. The worm gear drive mechanism provides good stability and ensures accurate adjustment, thereby guaranteeing the quality of the precision firing.

[0012] Preferably, the internal welding torch assembly includes an internal oxygen pipe, an internal hydrogen pipe, and multiple internal welding torches arranged in an arc shape. The internal welding torch assembly mainly includes an internal oxygen pipe and an internal hydrogen pipe for introducing hydrogen and oxygen, as well as multiple internal welding torches arranged in an arc shape. These multiple internal welding torches can be evenly distributed circumferentially, or two sets can be arranged in an arc shape as needed, depending on the requirements for fine sintering of the inner wall.

[0013] Preferably, the external welding torch adjustment mechanism includes a Y-axis sliding adjustment mechanism, a Z-axis lifting mechanism mounted on the Y-axis sliding adjustment mechanism, an X-axis adjustment mechanism mounted on the Z-axis lifting mechanism, and a rotation angle adjustment mechanism. The Y-axis sliding adjustment mechanism, Z-axis lifting mechanism, and X-axis adjustment mechanism are configured to adjust the internal welding torch assembly along its three axes, while the rotation angle adjustment mechanism is configured to adjust the external welding torch assembly radially, i.e., to adjust the precision firing diameter of the multiple external welding torches arranged in a ring, thereby achieving the precision firing requirements for the outer walls of various specifications of quartz tubes through the external welding torch assembly.

[0014] Preferably, the Y-axis sliding adjustment mechanism includes a Y-axis adjustment drive assembly and a Y-axis adjustment slide; the Z-axis lifting mechanism includes a vertical lifting guide rod disposed on the Y-axis adjustment slide, a lifting support plate connected to the vertical lifting guide rod, and a Z-axis lifting drive mechanism; the X-axis adjustment mechanism includes a drive component, a transmission component connected to the drive component, and a pair of transmission seats disposed opposite to each other on the transmission component; the rotation angle adjustment mechanism includes an angle adjustment drive component, an angle adjustment lead screw connected to the angle adjustment drive component, and an angle adjustment gear disposed inside the transmission seat.

[0015] Preferably, the external welding torch assembly includes several external welding torches and welding torch mounting brackets arranged in an arc shape.

[0016] The technical solution adopted by the present invention to achieve its second objective is: a method for fine sintering using a quartz tube fine sintering device, comprising the following steps: S1: Install the quartz tube to be finely sintered onto the main body of the device; S2: Install the internal welding gun mechanism and insert the internal welding gun assembly into the quartz tube product to be finely fired. Adjust the position and angle of the internal welding gun adjustment mechanism in the Y, X and Z directions. S3: The external welding torch assembly's Y-axis, X-axis, and Z-axis positions and circumferential angles are simultaneously adjusted via the external welding torch adjustment mechanism 7; S4: Position the internal welding gun assembly and the external welding gun assembly at corresponding positions on the inner and outer walls of the quartz tube product to be finely fired; S5: Simultaneously activate the internal and external welding gun assemblies to achieve simultaneous fine firing of the inner and outer walls of the quartz round tube product to be finely fired.

[0017] This fine firing method is convenient and quick to operate, achieving simultaneous fine firing of the inner and outer walls of the quartz tube. The fine firing quality is reliable, and there will be no situation where the quartz tube is deformed or not fully fired due to asynchronous heating of the inner and outer walls. It effectively improves the fine firing quality and work efficiency, and is convenient, quick, safe and reliable to operate.

[0018] The beneficial effects of this invention are as follows: This quartz tube fine sintering device, through the internal and external welding gun mechanisms forming a synchronous fine sintering mechanism, can realize the synchronous automatic fine sintering of the inner and outer walls of the quartz tube. By operating the internal and external welding guns synchronously, it avoids the occurrence of quartz tube heating deformation or incomplete sintering caused by asynchronous operation of the internal and external welding guns, effectively improving the precision of fine sintering and production efficiency. Moreover, it has a simple structure, is easy to operate, and has good versatility, and can meet the requirements of synchronous fine sintering of the inner and outer walls of quartz tubes of various specifications. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the quartz tube sintering device of the present invention.

[0020] Figure 2 This is a schematic diagram of the quartz tube sintering device of the present invention from another angle.

[0021] Figure 3 This is a schematic diagram of the internal welding gun mechanism and the external welding gun mechanism in this invention.

[0022] Figure 4 This is a structural schematic diagram of the internal welding gun mechanism and the external welding gun mechanism in this invention from another angle.

[0023] Figure 5 This is a schematic diagram of the internal welding gun mechanism and the external welding gun mechanism from other angles in this invention.

[0024] Figure 6 This is a schematic diagram of one structure of the internal welding gun mechanism in this invention.

[0025] Figure 7 This is a structural schematic diagram of the internal welding gun mechanism in this invention from another angle.

[0026] Figure 8 This is a schematic diagram of one structure of the external welding gun mechanism in this invention.

[0027] Figure 9 , Figure 10 , Figure 11 , Figure 12 These are views from different angles illustrating the structural design of the quartz tube sintering apparatus of this invention.

[0028] In the diagram: 1. Main body of the device; 11. Slide table; 111. Slide table base plate; 112. Slide table frame; 113. Slide table plate; 114. Slide groove; 12. Axial drive rack; 13. Fixture assembly; 131. Fixture bracket; 132. Pipe seat; 133. Grip assembly; 134. Adjustment assembly; 14. Front control panel; 15. Fixture slide; 16. Fixture drive motor; 17. Guide component; 18. Cable chain. 2. Internal welding torch mechanism; 3. External welding torch mechanism; 4. Adjustable gun mount mechanism; 41. Support base plate; 42. Support rod; 421. Outer support rod; 422. Inner support rod; 423. Support rod adjusting and locking component; 43. Supporting platform; 5. Internal welding torch adjustment mechanism; 51. Y-axis lead screw module; 511. Y-axis lead screw drive device; 512, Y-axis lead screw assembly; 5121, Y-axis moving base; 5122, Y-axis slide rail; 5123, Y-axis slide block; 5124, Y-axis ball screw. 513. Y-axis digital displacement display; 52. X-axis lead screw module; 521. X-axis lead screw drive device; 522, X-axis lead screw assembly; 5221, X-axis moving base; 5222, X-axis slide rail; 5223, X-axis slide block; 5224, X-axis ball screw. 523. X-axis digital displacement display; 53. Angle rotation mechanism; 531. Rotating base; 532. Rotary drive mechanism; 5321. Drive component; 5322. Worm gear; 5323. Worm wheel; 533, Inner welding gun rotating bracket; 5331, First arc-shaped bracket; 5332, Second arc-shaped bracket; 5333, Connecting rod; 5334, Arc-shaped limiting ring. 6. Internal welding torch assembly; 61. Internal oxygen pipe; 62. Internal hydrogen pipe; 63. Internal welding torch; 64. Protective sleeve. 7. External welding torch adjustment mechanism; 71. Y-axis sliding adjustment mechanism; 711. Y-axis adjustment drive assembly; 712. Y-axis adjustment slide block; 72. X-axis adjustment mechanism; 721. Drive component; 722. Transmission component; 723. Transmission base; 73. Z-axis lifting mechanism; 731. Vertical lifting guide rod; 732. Lifting support plate; 733, Z-axis lifting drive mechanism; 7331, Z-axis drive component; 7332, Z-axis drive gear assembly; 7333, Z-axis bevel gear assembly; 7334, vertical lead screw; 74. Rotation angle adjustment mechanism; 741. Angle adjustment drive component; 742. Angle adjustment lead screw; 8. External welding torch assembly; 81. External welding torch; 82. Welding torch mounting bracket; 821. Adjusting screw; 822. Fixing base; 823. Arc-shaped base; 9. Quartz round tube products awaiting fine sintering. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Components not specifically described in the present invention are existing components or general components, and the pipeline layout, connection and control methods not specifically described all adopt general existing technologies.

[0030] Example 1: exist Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5In the illustrated embodiment, a quartz tube fine sintering apparatus includes a main body 1 equipped with a universal fixing clamp assembly 13, an external welding torch mechanism 3 with three-axis displacement and angle adjustment on the main body, and an internal welding torch mechanism 2 with three-axis displacement and angle adjustment outside the main body. The internal welding torch mechanism 2 is independent of the main body 1 and extends along the axial direction of the main body to the inside of the external welding torch mechanism 3, forming a synchronous fine sintering mechanism of internal and external welding torches. The internal welding torch mechanism 2 includes an internal welding torch adjustment mechanism 5 and an internal welding torch assembly 6. The external welding torch mechanism 3 includes an external welding torch adjustment mechanism 7 and an external welding torch assembly 8.

[0031] The internal welding torch mechanism 2 and the external welding torch mechanism 3 operate synchronously to achieve simultaneous fine firing of the inner and outer walls of the quartz tube to be finely fired.

[0032] The internal welding torch adjustment mechanism 5 is set in an adjustable torch holder mechanism 4, and the internal welding torch assembly 6 achieves adjustment of the three axes and angles through the adjustable torch holder mechanism 4 and the internal welding torch adjustment mechanism 5.

[0033] like Figure 6 , Figure 7 As shown, the internal welding torch adjustment mechanism 5 includes a Y-axis lead screw module 51, an X-axis lead screw module 52 mounted on the Y-axis lead screw module 51, and an angle rotation mechanism 53 mounted on the X-axis lead screw module 52. The Y-axis lead screw module 51 includes a Y-axis lead screw drive device 511, a Y-axis lead screw assembly 512, and a Y-axis digital displacement display 513; the X-axis lead screw module 52 includes an X-axis lead screw drive device 521, an X-axis lead screw assembly 522, and an X-axis digital displacement display 523. In this embodiment, the Y-axis lead screw module and the X-axis lead screw assembly are preferred for adjusting the YX directions, resulting in high adjustment accuracy and reliability. Simultaneously, the digital displacement display allows for real-time observation of the displacement in the XY directions, ensuring precise displacement control.

[0034] The angle rotation mechanism 53 includes a rotation drive mechanism 532 and an inner welding gun rotation bracket 533 that is driven to rotate by the rotation drive mechanism; the rotation drive mechanism 532 adopts a worm gear drive mechanism, and the worm gear in the worm gear drive mechanism is set on the inner welding gun rotation bracket 533.

[0035] The internal welding torch assembly 6 includes an internal oxygen pipe 61, an internal hydrogen pipe 62, and multiple internal welding torches 63 arranged in an arc shape. In this embodiment, the internal welding torches 63 are evenly distributed circumferentially outside the internal oxygen pipe 61 and the internal hydrogen pipe 62. During fine firing, the internal welding torches 63 can be axially fed or retracted to achieve axial movement relative to the inner diameter of the quartz tube, completing the fine firing of the entire inner diameter of the quartz tube. They can also be radially displaced, deviating from the axis of the inner diameter of the quartz tube, bringing the internal welding torch closer to one side of the inner wall to increase the fine firing thickness. The internal welding torches can also rotate to achieve uniform fine firing of the inner diameter, etc. In other embodiments, the internal welding torches can also be grouped and arranged in an arc shape, or other structural arrangements can be made according to the fine firing requirements.

[0036] like Figure 8 As shown, the external welding torch adjustment mechanism 7 includes a Y-axis sliding adjustment mechanism 71, a Z-axis lifting mechanism 73, an X-axis adjustment mechanism 72, and a rotation angle adjustment mechanism 74, all mounted on the main body 1 of the device.

[0037] The Y-axis sliding adjustment mechanism 71 includes a Y-axis adjustment drive assembly 711 and a Y-axis adjustment slide block 712; the Z-axis lifting mechanism 73 includes a vertical lifting guide rod 731 disposed on the Y-axis adjustment slide block 712, a lifting support plate 732 connected to the vertical lifting guide rod 731, and a Z-axis lifting drive mechanism 733; the X-axis adjustment mechanism 72 includes a drive component 721, a transmission component 722 connected to the drive component, and a pair of transmission seats 723 disposed opposite to each other on the transmission component 722; the pair of transmission seats 723 are driven to move relative to each other or move in opposite directions through the drive component and the transmission component, thereby realizing the adjustment of the relative spacing of the external welding torch components in the X-axis.

[0038] The rotation angle adjustment mechanism 74 includes an angle adjustment drive 741, an angle adjustment lead screw 742 connected to the angle adjustment drive 741, and an angle adjustment gear disposed inside the transmission seat.

[0039] The external welding torch assembly 8 includes several external welding torches 81 arranged in an arc shape and a welding torch mounting frame 82. In this embodiment, two sets of external welding torches 81 are arranged symmetrically, each set being arc-shaped. The size of the arc can be adjusted according to the outer diameter of the quartz tube to be finely fired. The adjustment is achieved through a Z-axis lifting mechanism 73, an X-axis adjusting mechanism 72, and a rotation angle adjusting mechanism 74. The external welding torches 81 can achieve axial feed or return, radial displacement, increase or decrease the relative distance between the two sets of external welding torches, and rotate the angle to meet the fine firing requirements of quartz tubes with different outer diameters. The three axes and angles can be adjusted synchronously or separately. In other embodiments, the external welding torches can also be evenly distributed in a ring around the perimeter, or arranged in other structures according to the fine firing requirements.

[0040] Furthermore, the main body 1 of the device includes a device slide 11, an axial transmission rack 12 disposed on the device slide 11, a fixing clamp assembly 13 disposed on the device slide 11, and a front control operation panel 14.

[0041] See Figure 12 The device slide 11 includes a slide base plate 111, a slide frame 112 disposed on the slide base plate 111, and a slide table plate 113 disposed on the slide frame 112. Slide grooves 114 are respectively provided on both sides of the slide frame 112. The fixing clamp assembly 13 is slidably disposed inside the slide groove through a clamp slide block 15.

[0042] The fixing clamp assembly 13 is symmetrically arranged at both ends of the device slide table 11. The fixing fixture assembly 13 includes a fixing fixture bracket 131 mounted on the fixture slide 15, a tube seat 132 mounted on the fixing fixture bracket 131, and a gripper assembly 133 mounted on the tube seat 132. An adjustment assembly 134 is provided on the tube seat 132. The gripper assembly 133 is made of graphite.

[0043] The fixed clamp assembly 13 is driven to move axially along the slide of the device via a clamp drive mechanism 16. The clamp drive mechanism 16 can be manually driven or electrically driven; in this embodiment, it is manually driven. Specifically, the clamp drive mechanism 16 includes a handwheel and a transmission gear.

[0044] The axial transmission rack 12 is arranged along the axial direction of the device slide on the side of the device slide, and the transmission gear on the clamp drive mechanism meshes with the axial transmission rack 12. By driving the transmission gear to mesh with the axial transmission rack 12 through the handwheel, the axial displacement of the fixed clamp assembly 13 can be adjusted.

[0045] A guide member 17 is also provided on the side of the device slide opposite to the axial transmission rack 12. In this embodiment, the guide member is a guide rod.

[0046] A drag chain 18 is also provided on the device slide. The drag chain 18 is slidably connected to the device slide and is provided on the side with the guide 17. At the same time, the drag chain 18 is slidably connected to the guide, and the axial movement is guided by the guide.

[0047] Furthermore, the internal welding torch mechanism 2 mainly includes an adjustable torch holder mechanism 4, an internal welding torch adjustment mechanism 5 disposed on the adjustable torch holder mechanism, and an internal welding torch assembly 6.

[0048] The adjustable gun mount mechanism 4 includes a support base plate 41, a height-adjustable support rod 42 mounted on the support base plate 41, and a support platform 43 mounted on the upper end of the support rod 42. Casters may also be provided on the support base plate to facilitate the overall movement of the adjustable gun mount mechanism. In this embodiment, the support rod 42 includes an outer support rod 421 and an inner support rod 422. The inner support rod 422 is vertically adjustable to the outer support rod 421 via a support rod adjusting locking member 423.

[0049] The internal welding torch adjustment mechanism 5 is mounted on the support platform 43.

[0050] The adjustable gun holder mechanism 4 and the internal welding gun adjustment mechanism 5 work together to achieve precise three-axis adjustment of the internal welding gun position. The x-axis and y-axis lead screw modules are equipped with digital displacement displays to help operators better confirm the adjustment distance.

[0051] Furthermore, the Y-axis lead screw module 51 includes a Y-axis lead screw drive device 511, a Y-axis lead screw assembly 512, and an internal welding torch adjustment mechanism Y-axis digital displacement display 513. The Y-axis lead screw drive device 511 can be manually driven or electrically driven; in this embodiment, the Y-axis lead screw drive device 511 is driven by a handwheel. The internal welding torch adjustment mechanism Y-axis digital displacement display 513 is connected to the Y-axis lead screw drive device 511 and is used to display the displacement of the internal welding torch adjustment mechanism 513 in the Y-axis direction.

[0052] The Y-axis ball screw assembly 512 includes a Y-axis movable base 5121, a Y-axis slide rail 5122 disposed on the Y-axis movable base 5121, a Y-axis slide block 5123 slidably disposed on the Y-axis slide rail 5122, and a Y-axis ball screw 5124. One end of the Y-axis ball screw 5124 is connected to the Y-axis ball screw drive device 511, and the other end of the Y-axis ball screw 5124 is rotatably connected to the Y-axis movable base 5121. The Y-axis slide block 5123 is driven to move by the Y-axis ball screw 5124.

[0053] Furthermore, the X-axis lead screw module 52 includes an X-axis lead screw drive device 521, an X-axis lead screw assembly 522, and an internal welding torch adjustment mechanism X-axis digital displacement display 523. The internal welding torch adjustment mechanism X-axis digital displacement display 523 is used to display the X-axis displacement.

[0054] The X-axis lead screw drive device 521 can be manually driven or electrically driven. In this embodiment, the X-axis lead screw drive device 521 is driven by a handwheel. The X-axis digital displacement display 523 of the internal welding torch adjustment mechanism is connected to the X-axis lead screw drive device 521.

[0055] The X-axis lead screw assembly 522 includes an X-axis movable base 5221 mounted on a Y-axis slide block 5123, an X-axis slide rail 5222 mounted on the X-axis movable base 5221, an X-axis slide block 5223 slidably connected to the X-axis slide rail 5222, and an X-axis ball screw 5224. One end of the X-axis ball screw 5224 is connected to the X-axis lead screw drive device 5221, and the other end of the X-axis ball screw 5224 is rotatably connected to the X-axis movable base 5221. The X-axis slide block 5223 is driven to move by the X-axis ball screw 5224, thereby driving the angle rotation mechanism 53 on it to adjust along the X direction.

[0056] Furthermore, the angle rotation mechanism 53 is mounted on the X-axis slide block 5223. The angle rotation mechanism 53 includes a rotating base 531, a rotation drive mechanism 532, and an inner welding gun rotation bracket 533 rotatably mounted on the rotating base 531.

[0057] The rotating base 531 has an overall U-shaped structure, and arc-shaped support grooves are provided at both ends of the rotating base 531.

[0058] The internal welding gun rotating bracket 533 includes a first arc-shaped bracket 5331 and a second arc-shaped bracket 5332, which are connected as a whole by a set of connecting rods 5333. Arc-shaped limiting rings 5334 are respectively provided on the first arc-shaped bracket 5331 and the second arc-shaped bracket 5332.

[0059] The rotary drive mechanism 532 employs a worm gear drive mechanism, including a drive component 5321 for driving the worm gear rotation and a worm gear assembly. The drive component 5321 can be manually driven or electrically driven. In this embodiment, the drive component 5321 is a drive handwheel. The worm gear assembly includes a worm 5322 connected to the drive component 5321 and a worm gear 5323 meshing with the worm 5322. The worm gear 5323 is disposed on the arc-shaped bottom surface of the first arc-shaped bracket or the second arc-shaped bracket. The worm 5322 is arranged along the transmission direction parallel to the X-axis ball screw 5224. By driving the worm 5322 to rotate through the drive component 5321, the worm 5322 drives the worm gear 5323 to rotate, which in turn drives the first arc-shaped bracket 5331 and the second arc-shaped bracket 5332 to rotate, thereby realizing the circumferential rotation of the inner welding torch rotating bracket and adjusting the circumferential position of the inner welding torch.

[0060] The worm gear 5322 can be integrally set with the first arc-shaped bracket or the second arc-shaped bracket, or it can be set separately and then fixedly connected as one unit. In this embodiment, the separate setting is adopted.

[0061] Specifically, the worm gear 5322 is disposed on the outer ring surface of the arc-shaped ring, and the arc-shaped ring is connected to the arc-shaped bottom surface of the second arc-shaped bracket.

[0062] See Figure 4 The internal welding torch assembly 6 includes an internal oxygen pipe 61, an internal hydrogen pipe 62, and multiple internal welding torches 63 arranged in an arc shape. The internal oxygen pipe 61 and the internal hydrogen pipe 62 are used to introduce hydrogen and oxygen to achieve fine sintering of the inner wall of the quartz tube to be finely sintered. The internal oxygen pipe 61 and the internal hydrogen pipe 62 are disposed inside a protective sleeve 64.

[0063] Furthermore, the external welding torch adjustment mechanism 7 includes a Y-axis sliding adjustment mechanism 71, an X-axis adjustment mechanism 72, a Z-axis lifting mechanism 73, and a rotation angle adjustment mechanism 74.

[0064] The Y-axis sliding adjustment mechanism 71 is mounted on the device slide, the Z-axis lifting mechanism 73 is mounted on the Y-axis sliding adjustment mechanism 71, the X-axis adjustment mechanism 72 is mounted on the Z-axis lifting mechanism 73, the rotation angle adjustment mechanism 74 is mounted on the Z-axis lifting mechanism 73, and the external welding torch assembly 8 is mounted on the rotation angle adjustment mechanism 74.

[0065] The Y-axis sliding adjustment mechanism 71 includes a Y-axis adjustment drive assembly 711 and a Y-axis adjustment slide block 712, wherein the Y-axis adjustment slide block 712 is slidably connected to the slide groove 114.

[0066] The Y-axis adjustment drive assembly 711 can be driven manually or electrically. In this embodiment, the Y-axis adjustment drive assembly 711 is driven manually. The Y-axis adjustment drive assembly 711 includes a drive handwheel, a drive linkage connected to the drive handwheel, and a drive gear connected to the drive linkage. The drive gear meshes with a transmission rack, and Y-axis adjustment is achieved through the transmission between the drive gear and the transmission rack.

[0067] The Z-axis lifting mechanism 73 includes a vertical lifting guide rod 731 mounted on a Y-axis adjusting slide block 712, a lifting support plate 732 connected to the vertical lifting guide rod 731, and a Z-axis lifting drive mechanism 733. The Z-axis lifting drive mechanism 733 includes a Z-axis drive member 7331, a Z-axis drive gear assembly 7332 connected to the Z-axis drive member 7331, and a Z-axis bevel gear assembly 7333 that is drively connected to the Z-axis drive gear assembly 7332.

[0068] The Z-axis drive component 7331 is manually or electrically driven. In this embodiment, the Z-axis drive component is manually driven and includes a drive handwheel and a drive rod connected to the drive handwheel. The Z-axis drive gear assembly 7332 includes a drive wheel and a driven wheel connected to the drive rod. The driven wheel is located at one end of a drive connecting rod. The Z-axis bevel gear assembly 7333 has two sets. Each set of Z-axis bevel gear assemblies includes a drive bevel gear located on the drive connecting rod and a driven bevel gear located on a vertical lead screw 7334. The upper end of the vertical lead screw 7334 is connected to the lifting support plate and drives the lifting support plate to rise and fall.

[0069] The Z-axis drive component is located at one end of the Y-axis adjusting slide 712, the drive rod and drive connector are horizontally arranged along the X-axis, and the vertical lead screw is located at the other end of the Y-axis adjusting slide 712. The Z-axis drive component drives the Z-axis active gear assembly, thereby realizing the Z-axis bevel gear assembly. The Z-axis bevel gear assembly drives the vertical lead screw to rise and fall, which in turn drives the rising and falling of the lifting support plate, thus realizing the rising and falling of the external welding torch assembly 8.

[0070] The X-axis adjustment mechanism 72 is mounted on the lifting support plate 732.

[0071] The X-axis adjustment mechanism 72 includes a drive component 721, a transmission component 722 connected to the drive component, and a transmission seat 723 meshing with the transmission component. The drive component can be manually driven or electrically driven; in this embodiment, a handwheel drive is used. A pair of transmission seats 723 are arranged facing each other, with their meshing directions with the drive screw in opposite directions. This allows the drive component to rotate the drive screw, thereby achieving relative or reverse movement of the pair of transmission seats, ultimately adjusting the relative position of the external welding torch assembly.

[0072] The rotation angle adjustment mechanism 74 includes an angle adjustment drive 741, an angle adjustment lead screw 742 connected to the angle adjustment drive 741, and an angle adjustment gear disposed inside the transmission base. The angle adjustment gear disposed inside the two transmission bases meshes with the angle adjustment lead screw in the opposite direction. The angle adjustment gear can be a bevel gear. By rotating the angle adjustment lead screw, the angle adjustment gear is driven to rotate a certain angle, thereby realizing the adjustment of the angle of the external welding torch assembly.

[0073] The external welding torch assembly 8 includes several external welding torches 81 arranged in an arc shape and a welding torch mounting frame 82 for connection with the rotation angle adjustment mechanism 74. The welding torch mounting frame 82 is connected to the transmission base 723. The welding torch mounting frame 82 includes an adjusting screw 821, a fixed base 822 and an arc-shaped base 823. Several external welding torches 81 are arranged on the arc-shaped base 823. The arc-shaped base 823 is connected to the fixed base 822. The fixed base is connected to the adjusting screw 821.

[0074] Example 2: See Figure 9 , Figure 10 , Figure 11 , Figure 12 A method for fine sintering using the quartz tube fine sintering apparatus in Example 1 includes the following steps: S1: Install the quartz tube product to be finely sintered onto the main body of the device; S2: Install the internal welding gun mechanism and insert the internal welding gun assembly into the quartz tube product to be finely fired. Adjust the position and angle of the internal welding gun adjustment mechanism in the Y, X and Z directions. S3: The external welding torch assembly's Y-axis, X-axis, and Z-axis positions and circumferential angles are simultaneously adjusted via the external welding torch adjustment mechanism 7; S4: Position the internal welding gun assembly and the external welding gun assembly at corresponding positions on the inner and outer walls of the quartz tube product to be finely fired; S5: Simultaneously activate the internal and external welding gun assemblies to achieve simultaneous fine firing of the inner and outer walls of the quartz round tube product to be finely fired.

[0075] Specifically, during use, the quartz tube product 9 to be finely sintered is fixed to the main body 1 of the device using the graphite gripper assembly 133 installed on the main body 1 of the device.

[0076] The internal welding torch assembly 6 is fixed to the adjustable torch holder mechanism 4. The internal welding torch 63 is then inserted into the quartz tube product 9 to be finely fired, at the position opposite to the external welding assembly.

[0077] The external welding torch adjustment mechanism 7 on the main body 1 of the operator's operating device at the front control panel 14 adjusts the position of the external welding torch assembly 8 in the Y, X and Z directions, as well as the circumferential angle movement of the external welding torch 81, so that all external welding torches 81 are in the optimal fine-firing position on the outer circumference of the quartz round tube product 9 to be fine-firing.

[0078] The internal welding torch adjustment mechanism 5 on the synchronous adjustment torch holder mechanism adjusts the position and angle of the internal welding torch in the Y, X, and Z directions. This ensures that the internal welding torch and the external welding torch are positioned at the same level on the inner and outer walls of the quartz tube product 9 to be precision-fired.

[0079] Finally, hydrogen and oxygen are introduced into the hydrogen and oxygen pipes, and the internal and external welding torches are turned on to simultaneously achieve the fine sintering of the quartz round tube product 9 to be finely sintered.

[0080] The axial positions of the internal and external welding torches are adjusted according to the set time, thereby completing the fine firing of the inner and outer walls of the entire quartz round tube product 9. The adjustment of the displacement can be displayed in real time on a digital displacement display, improving the accuracy of displacement adjustment.

[0081] This quartz tube precision firing device, through an internal and external welding torch mechanism forming a synchronous precision firing system, enables simultaneous automatic precision firing of the inner and outer walls of the quartz tube. The synchronized operation of the internal and external welding torches avoids heating deformation or incomplete firing of the quartz tube caused by asynchronous operation, effectively improving the precision firing accuracy and production efficiency. Furthermore, it features a simple structure, convenient operation, and good versatility, capable of simultaneously precision firing the inner and outer walls of quartz tubes of various specifications. This reduces labor intensity, increases processing precision, and improves product qualification rate.

Claims

1. A quartz tube refining apparatus, comprising a main body (1) equipped with a universal fixing clamp assembly, characterized in that: A three-axis displacement and angle adjustable external welding gun mechanism (3) is provided on the main body (1) of the device, and a three-axis displacement and angle adjustable internal welding gun mechanism (2) is provided on the outside of the main body of the device. The internal welding gun mechanism (2) extends along the axial direction of the main body of the device to the inside of the external welding gun mechanism (3) to form a synchronous fine firing mechanism for the internal and external welding guns. The internal welding gun mechanism (2) includes an internal welding gun adjustment mechanism (5) and an internal welding gun assembly (6). The external welding gun mechanism (3) includes an external welding gun adjustment mechanism (7) and an external welding gun assembly (8).

2. The quartz tube sintering apparatus according to claim 1, characterized in that: The internal welding torch adjustment mechanism (5) is set in an adjustable torch holder mechanism (4), and the internal welding torch assembly (6) achieves adjustment of the three-axis direction and angle through the adjustable torch holder mechanism (4) and the internal welding torch adjustment mechanism (5).

3. The quartz tube sintering apparatus according to claim 1, characterized in that: The internal welding torch adjustment mechanism (5) includes a Y-axis lead screw module (51), an X-axis lead screw module (52) mounted on the Y-axis lead screw module (51), and an angle rotation mechanism (53) mounted on the X-axis lead screw module (52).

4. The quartz tube sintering apparatus according to claim 3, characterized in that: The Y-axis lead screw module (51) includes a Y-axis lead screw drive device (511), a Y-axis lead screw assembly (512), and a Y-axis digital displacement display (513); the X-axis lead screw module (52) includes an X-axis lead screw drive device (521), an X-axis lead screw assembly (522), and an X-axis digital displacement display (523).

5. The quartz tube sintering apparatus according to claim 3, characterized in that: The angle rotation mechanism (53) includes a rotation drive mechanism (532) and an inner welding gun rotation bracket (533) that is driven to rotate by the rotation drive mechanism; the rotation drive mechanism (532) adopts a worm gear drive mechanism, and the worm gear in the worm gear drive mechanism is set on the inner welding gun rotation bracket (533).

6. The quartz tube sintering apparatus according to claim 1, characterized in that: The internal welding torch assembly (6) includes an internal oxygen pipe (61), an internal hydrogen pipe (62), and multiple internal welding torches (63) arranged in an arc.

7. The quartz tube sintering apparatus according to any one of claims 1 to 6, characterized in that: The external welding torch adjustment mechanism (7) includes a Y-axis sliding adjustment mechanism (71) on the main body (1), a Z-axis lifting mechanism (73) on the Y-axis sliding adjustment mechanism (71), an X-axis adjustment mechanism (72) on the Z-axis lifting mechanism (73), and a rotation angle adjustment mechanism (74).

8. The quartz tube sintering apparatus according to claim 7, characterized in that: The Y-axis sliding adjustment mechanism (71) includes a Y-axis adjustment drive assembly (711) and a Y-axis adjustment slide (712); the Z-axis lifting mechanism (73) includes a vertical lifting guide rod (731) disposed on the Y-axis adjustment slide (712), a lifting support plate (732) connected to the vertical lifting guide rod (731), and a Z-axis lifting drive mechanism (733); the X-axis adjustment mechanism (72) includes a drive component (721), a transmission component (722) connected to the drive component, and a pair of transmission seats (723) disposed opposite to each other on the transmission component (722); the rotation angle adjustment mechanism (74) includes an angle adjustment drive component (741), an angle adjustment screw (742) connected to the angle adjustment drive component (741), and an angle adjustment gear disposed inside the transmission seat.

9. The quartz tube sintering apparatus according to any one of claims 1 to 6, characterized in that: The external welding gun assembly (8) includes several external welding guns (81) arranged in an arc shape and a welding gun mounting bracket (82).

10. A method for fine sintering using the quartz tube fine sintering apparatus according to any one of claims 1 to 9, characterized in that: Includes the following steps: S1: Install the quartz tube product to be finely sintered onto the main body of the device; S2: Install the internal welding gun mechanism and insert the internal welding gun assembly into the quartz tube product to be finely fired. Adjust the position and angle of the internal welding gun adjustment mechanism in the Y, X and Z directions. S3: The external welding torch assembly's Y-axis, X-axis, and Z-axis positions and circumferential angles are simultaneously adjusted via the external welding torch adjustment mechanism 7; S4: Position the internal welding gun assembly and the external welding gun assembly at corresponding positions on the inner and outer walls of the quartz tube product to be finely fired; S5: Simultaneously activate the internal and external welding gun assemblies to achieve simultaneous fine firing of the inner and outer walls of the quartz round tube product to be finely fired.

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