Optical detection equipment based on semiconductor electronic component production and processing

Abstract

The invention discloses optical detection equipment based on production and processing of semiconductor electronic components, and relates to the technical field of optical detection of silicon single crystal rods, the optical detection equipment comprises a control cabinet, and two supporting plates are fixed at the top of the control cabinet; the single crystal silicon rod rotating mechanism is connected with the supporting plate; the anti-reflection sheet is driven by the anti-reflection mechanism to move downwards, the anti-reflection sheet is bent to wrap the top and is attached to reduce light reflection, the quality and accuracy of optical detection photos are improved, the push rod motor pushes the supporting frame to move downwards, the first sphere, the second sphere, the rod body and the connecting block are driven to move downwards, the center of the anti-reflection sheet is limited, the edge of the anti-reflection sheet forms an arc shape, and the connecting block and other structures are pulled to incline. Due to the design, hard pulling is avoided, and the device is suitable for single crystal silicon rods with different sizes; the anti-reflection piece cleaning mechanism controls a second motor to drive a gear to rotate reversely, a second one-way gear drives a second reciprocating screw to rotate and drives a fourth sliding block and a scraper to move horizontally, the scraper cleans impurities at the bottom of an anti-reflection piece, and the detection precision is prevented from being affected.

Description

Technical Field

[0001] This invention relates to the field of optical inspection technology for single-crystal silicon rods, and more particularly to an optical inspection device based on the production and processing of semiconductor electronic components. Background Technology

[0002] In existing technologies, single-crystal silicon rods are highly susceptible to surface scratches, edge chipping, and particle contamination during growth, shaving, and polishing. These surface defects not only cause wire breakage and wafer chipping during subsequent diamond wire slicing, resulting in decreased production yield and equipment wear and tear; more seriously, the microcracks formed by scratches and edge chipping become stress concentration sources and impurity diffusion channels, which can induce dislocation initiation when semiconductor devices are manufactured, directly leading to device failure.

[0003] Traditional optical inspection of single-crystal silicon rods uses a single-side light source and a single camera for shooting. The cylindrical curved surface causes specular reflection and local overexposure / underexposure, resulting in a high rate of missed defects. Summary of the Invention

[0004] This invention proposes an optical inspection device based on the production and processing of semiconductor electronic components to overcome the above-mentioned shortcomings in the prior art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: An optical inspection device based on semiconductor electronic component manufacturing and processing includes a control cabinet, the top of which is fixed with two support plates; Also includes: A single-crystal silicon rod rotating mechanism is connected to a support plate. The single-crystal silicon rod rotating mechanism includes two rotating shafts, and multiple rubber wheels are fixed to the outside of the rotating shafts. A single-crystal silicon rod, which is mounted on a single-crystal silicon rod rotation mechanism; A defect detection mechanism connected to a support plate, the defect detection mechanism including a moving mechanism and an optical microscopy mechanism, the optical microscopy mechanism including an industrial camera, a microscope objective and a light source; An anti-reflection mechanism, which is connected to a support plate, includes an anti-reflection sheet, the anti-reflection sheet including a transparent sheet, the transparent sheet being coated with an anti-reflection film on both sides; A reversible film cleaning mechanism, which is connected to a support plate, includes a scraper; The drive mechanism is mounted on one side of the support plate.

[0006] Furthermore, the single-crystal silicon rod rotating mechanism also includes pulleys fixed to one end of two rotating shafts respectively, and the two pulleys are externally connected to a belt; One of the support plates is fixed to one side of a motor, and the output end of the motor is fixedly connected to one of the rotating shafts; The two shafts are rotatably connected inside the two support plates.

[0007] Furthermore, the moving mechanism includes a reciprocating screw 1 rotatably connected inside the two support plates. One end of the reciprocating screw 1 is equipped with a one-way gear 1. A slider 1 is threaded onto the external side of the reciprocating screw 1. One side of the slider 1 is fixedly connected to an optical microscopy mechanism. A slider 2 is fixed to one side of the optical microscopy mechanism. A guide rod 1 is threaded onto the inside of the slider 2. The guide rod 1 is fixedly connected to the two support plates.

[0008] Furthermore, the anti-reflection mechanism also includes multiple push rod motors, one side of which is fixed with a mounting plate, which is fixedly connected to a support plate, and the output ends of the multiple push rod motors are fixed with support frames.

[0009] Furthermore, the anti-reflection mechanism also includes multiple spheres 1 rotatably connected to the bottom, a rod is fixed to the bottom of the sphere 1, a second sphere is fixed to the bottom of the rod, a connecting block is rotatably connected to the outside of the second sphere, and the anti-reflection sheet is fixed to the bottom of the multiple connecting blocks; A fixing block is fixed to the outside of the rod. A connecting rod is rotatably connected to the side of the fixing block near the optical microscope mechanism. A slider three is rotatably connected to the end of the connecting rod away from the fixing block. A sliding rod is sleeved inside the slider three. A spring is sleeved outside the sliding rod. One end of the spring is fixedly connected to the slider three. The bottom of the support frame is provided with multiple sliding grooves, the slider is sleeved inside the sliding grooves, the sliding rod is fixed to the inner wall of the sliding grooves, and the other end of the spring is fixedly connected to the sliding grooves.

[0010] Furthermore, the anti-reflective film cleaning mechanism also includes a reciprocating screw two rotatably connected inside the two support plates. One end of the reciprocating screw two is equipped with a one-way gear two. The external thread of the reciprocating screw two is fitted with a slider four. The inside of the slider four is fitted with a guide rod two. The guide rod two is fixedly connected to the two support plates. The scraper is fixedly connected to the slider four.

[0011] Furthermore, the drive mechanism also includes a second motor fixed to one side of one of the support plates. The output end of the second motor is fixed with a gear. One side of the gear meshes with a first one-way gear, and the other side of the gear meshes with a second one-way gear.

[0012] Compared with existing technologies, the beneficial effects of this invention are: 1. This invention uses a combination of a monocrystalline silicon rod rotation mechanism and an anti-reflection film cleaning mechanism to perform all-round inspection of monocrystalline silicon rods; 2. This invention achieves efficient and automated optical inspection by installing a defect detection mechanism, using an industrial camera for high-resolution image acquisition, a microscope objective for precise magnified observation, and a light source to ensure uniform illumination. This improves the accuracy, speed, and reliability of the inspection, reduces human error, and increases production efficiency. 3. This invention uses a reset control push rod motor to extend the inner rod through an anti-reflection mechanism, pushing the support frame downwards and causing the anti-reflection sheet to move downwards. The center of the anti-reflection sheet first contacts the top of the monocrystalline silicon rod. As it continues to move downwards, the edges are pushed, causing the anti-reflection sheet to bend and wrap around the top, thus reducing reflection and improving the quality and accuracy of optical inspection images. The push rod motor pushes the support frame downwards, causing sphere one, sphere two, the rod, and the connecting block to move downwards. The center of the anti-reflection sheet is limited, and the edges form an arc shape, pulling the connecting block and other structures to tilt, ensuring a complete fit. This design avoids hard pulling and is adaptable to monocrystalline silicon rods of different sizes. 4. The present invention controls the motor two to drive the gear to reverse through the anti-reflective film cleaning mechanism, so that the one-way gear two drives the reciprocating screw two to rotate, which drives the slider four and the scraper to move horizontally. The scraper cleans the impurities at the bottom of the anti-reflective film, thus avoiding affecting the detection accuracy. Attached Figure Description

[0013] Figure 1 This is a first-view structural schematic diagram of an optical inspection device based on semiconductor electronic component manufacturing and processing proposed in this invention.

[0014] Figure 2 This is a schematic diagram of the second-view structure of an optical inspection device based on the production and processing of semiconductor electronic components proposed in this invention.

[0015] Figure 3 This is a schematic diagram of the single-crystal silicon rod rotation mechanism of an optical inspection device based on semiconductor electronic component manufacturing and processing proposed in this invention.

[0016] Figure 4 This is a schematic diagram of the defect detection mechanism of an optical inspection device based on semiconductor electronic component manufacturing and processing proposed in this invention.

[0017] Figure 5 This is a schematic diagram of the anti-reflection mechanism of an optical inspection device based on semiconductor electronic component manufacturing and processing, as proposed in this invention.

[0018] Figure 6 This is a schematic diagram of the antireflective film cleaning mechanism of an optical inspection device based on semiconductor electronic component manufacturing and processing proposed in this invention.

[0019] In the diagram: 1. Control cabinet; 2. Support plate; 3. Single crystal silicon rod rotation mechanism; 31. Rotating shaft; 32. Rubber wheel; 33. Pulley; 34. Belt; 35. Motor 1; 4. Single crystal silicon rod; 5. Defect detection mechanism; 51. Reciprocating screw 1; 52. One-way gear 1; 53. Slider 1; 54. Optical microscopic mechanism; 55. Slider 2; 56. Guide rod 1; 6. Anti-reflection mechanism; 61. Support frame; 62. Slide groove; 63. Slide rod 64. Slider 3; 65. Spring; 66. Connecting rod; 67. Fixing block; 68. Rod body; 69. Ball 1; 610. Ball 2; 611. Connecting block; 612. Anti-reflection sheet; 613. Push rod motor; 614. Mounting plate; 7. Anti-reflection sheet cleaning mechanism; 71. Reciprocating screw 2; 72. One-way gear 2; 73. Slider 4; 74. Guide rod 2; 75. Scraper; 8. Drive mechanism; 81. Motor 2; 82. Gear. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0021] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0022] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified. Furthermore, the terms "installed," "connected," and "linked" should be interpreted broadly; for example, they may refer to a fixed connection, a detachable connection, or an integral connection; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; and they may refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0023] Example: Refer to Figures 1-6An optical inspection device based on the production and processing of semiconductor electronic components includes a control cabinet 1, and two support plates 2 are fixed on the top of the control cabinet 1; Also includes: The single crystal silicon rod rotation mechanism 3 is connected to the support plate 2. The single crystal silicon rod rotation mechanism 3 includes two rotating shafts 31, and multiple rubber wheels 32 are fixed to the outside of the rotating shafts 31. A single-crystal silicon rod 4 is mounted on a single-crystal silicon rod rotating mechanism 3; The defect detection mechanism 5 is connected to the support plate 2. The defect detection mechanism 5 includes a moving mechanism and an optical microscopy mechanism 54. The optical microscopy mechanism 54 includes an industrial camera, a microscope objective lens and a light source. The anti-reflection mechanism 6 is connected to the support plate 2 and includes an anti-reflection sheet 612. The anti-reflection sheet 612 includes a transparent sheet, and the transparent sheet is coated with an anti-reflection film on both sides. The anti-reflective film cleaning mechanism 7 is connected to the support plate 2 and includes a scraper 75; The drive mechanism 8 is installed on one side of the support plate 2.

[0024] The single-crystal silicon rod rotation mechanism 3 also includes pulleys 33 fixed at one end of two rotating shafts 31 respectively, and belts 34 are externally connected to the two pulleys 33. One of the support plates 2 has a motor 35 fixed to one side, and the output end of the motor 35 is fixedly connected to one of the rotating shafts 31. Two rotating shafts 31 are rotatably connected inside two support plates 2.

[0025] The moving mechanism includes a reciprocating screw 51 rotatably connected inside the two support plates 2. One end of the reciprocating screw 51 is equipped with a one-way gear 52. A slider 53 is threaded onto the outside of the reciprocating screw 51. One side of the slider 53 is fixedly connected to the optical microscopy mechanism 54. A second slider 55 is fixed to one side of the optical microscopy mechanism 54. A guide rod 56 is fitted inside the second slider 55. The guide rod 56 is fixedly connected to the two support plates 2.

[0026] The anti-reflection mechanism 6 also includes multiple push rod motors 613. A mounting plate 614 is fixed to one side of each push rod motor 613. The mounting plate 614 is fixedly connected to the support plate 2. A support frame 61 is fixed to the output end of each push rod motor 613.

[0027] The anti-reflection mechanism 6 also includes multiple spheres 69 rotatably connected to the bottom. A rod 68 is fixed to the bottom of the spheres 69, and a second sphere 610 is fixed to the bottom of the rod 68. A connecting block 611 is rotatably connected to the outside of the second sphere 610, and an anti-reflection sheet 612 is fixed to the bottom of the multiple connecting blocks 611. A fixing block 67 is fixed to the outside of the rod 68. A connecting rod 66 is rotatably connected to the side of the fixing block 67 near the optical microscopy mechanism 54. A slider 64 is rotatably connected to the end of the connecting rod 66 away from the fixing block 67. A slider 63 is sleeved inside the slider 64. A spring 65 is sleeved outside the slider 63. One end of the spring 65 is fixedly connected to the slider 64. The bottom of the support frame 61 is provided with multiple sliding grooves 62, the slider 64 is sleeved inside the sliding groove 62, the sliding rod 63 is fixed to the inner wall of the sliding groove 62, and the other end of the spring 65 is fixedly connected to the sliding groove 62. Spring 65 pushes slider 64, connecting rod 66 and fixing block 64 to pull rod 68 to pull the edge of anti-reflection film 619 so that it always keeps it in a horizontal state.

[0028] The anti-reflective film cleaning mechanism 7 also includes a reciprocating screw 71 rotatably connected inside the two support plates 2. One end of the reciprocating screw 71 is equipped with a one-way gear 72. The external thread of the reciprocating screw 71 is fitted with a slider 73. The inside of the slider 73 is fitted with a guide rod 74. The guide rod 74 is fixedly connected to the two support plates 2. The scraper 75 is fixedly connected to the slider 73.

[0029] The drive mechanism 8 also includes a second motor 81 fixed to one side of one of the support plates 2. A gear 82 is fixed to the output end of the second motor 81. One side of the gear 82 meshes with a one-way gear 52, and the other side of the gear 82 meshes with a one-way gear 72.

[0030] Working principle: First, control motor 2 81 to drive gear 82 to reverse. The reverse rotation of gear 82 satisfies the direction of rotation of unidirectional gear 2 72 driving reciprocating screw 2 71. The rotation of reciprocating screw 2 71 drives slider 4 73 and scraper 75 to move horizontally. During the horizontal movement, scraper 75 contacts the bottom of anti-reflection sheet 612 to clean the impurities at the bottom and avoid impurities affecting the accuracy of the test results. After the scraper 75 moves to the end of reciprocating screw 2 71, it returns to its original position. After reset, the synchronous control push rod motor 613 extends the inner rod. When the inner rod extends, it pushes the support frame 61 to move down. When the support frame 61 moves down, it causes the anti-reflective film 612 and other structures to move down. The center of the anti-reflective film 612 first contacts the top of the monocrystalline silicon rod 4. As it continues to move down, the rod body 68 pushes the edge of the anti-reflective film 612 to move down, causing the anti-reflective film 612 to bend down and wrap around the top of the monocrystalline silicon rod 4, so that the anti-reflective film 612 is in contact with the top of the monocrystalline silicon rod 4. By having the anti-reflective film 612 in contact with the top of the monocrystalline silicon rod 4, the situation of severe exposure caused by reflection of the monocrystalline silicon rod 4 during optical inspection can be reduced, thereby improving the image quality and the accuracy of the inspection. When the pusher motor 613 pushes the support frame 61 downward, the support frame 61 pushes the first ball 69, the second ball 610, the rod 68, and the connecting block 611 downward. Because the top of the monocrystalline silicon rod 4 limits the center of the anti-reflection film 612, the edge of the anti-reflection film 612 will gradually approach the monocrystalline silicon rod 4 and form an arc shape as it continues to be pushed downward. During the process of forming the arc shape, the connecting block 611, the second ball 610, the rod 68, and the first ball 69 will be pulled to tilt, thereby ensuring that the anti-reflection film 612 and the monocrystalline silicon rod 4 are completely attached. By designing the structure of the connecting block 611, the second ball 610, the rod 68, and the first ball 69, the situation of hard pulling and attaching when wrapping monocrystalline silicon rods 4 of different sizes can be avoided, thereby meeting the needs of monocrystalline silicon rods 4 of different diameters.

[0031] After bonding, the control motor 81 drives the gear 82 to rotate forward. The forward rotation of the gear 82 satisfies the direction of rotation of the one-way gear 52 driving the reciprocating screw 51. The reciprocating screw 51 drives the slider 53, the optical microscopy mechanism 54 and the slider 55 to translate. During the movement, the optical microscopy mechanism 54 emits a light source. The anti-reflective film 612 initially reduces the reflection of the single crystal silicon rod 4. The anti-reflective mirror on the optical microscopy mechanism 54 further reduces the reflection, avoiding overexposure of the image when the industrial camera and microscope objective are captured, which would affect the accuracy of the detection data. After slider 53 moves to the end of reciprocating screw 51, it returns to the original position. Then, start the push rod motor 613 to drive the anti-reflection sheet 612 to move upward away from the monocrystalline silicon rod 4. Then, start the motor 35 to drive the rotating shaft 31 and the rubber wheel 32 to rotate. The rotating shaft 31 drives another rotating shaft 31 and the rubber wheel 32 to rotate synchronously through the pulley 33 and the belt 34, so that the monocrystalline silicon rod 4 rotates. The detected positions are rotated to one side, and the undetected positions are rotated to face upward. Then, continue to detect according to the above steps until all positions have been detected.

[0032] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

[0033] It should be noted that the device structure and accompanying drawings of this invention mainly describe the principle of the invention. The technical details of the device's power mechanism, power supply system, and control system are not fully described. However, those skilled in the art, understanding the principles of the invention, can clearly understand the specifics of its power mechanism, power supply system, and control system. The control method described in the application is automatic control via a controller, and the controller's control circuit can be implemented through simple programming by those skilled in the art. The above description only illustrates certain exemplary embodiments of the invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of this invention.

Claims

1. An optical inspection device based on semiconductor electronic component manufacturing and processing, comprising a control cabinet (1), characterized in that, The top of the control cabinet (1) is fixed with two support plates (2); Also includes: A single-crystal silicon rod rotating mechanism (3) is connected to a support plate (2). The single-crystal silicon rod rotating mechanism (3) includes two rotating shafts (31), and multiple rubber wheels (32) are fixed to the outside of the rotating shafts (31). A single-crystal silicon rod (4) is mounted on a single-crystal silicon rod rotating mechanism (3); A defect detection mechanism (5) is connected to a support plate (2). The defect detection mechanism (5) includes a moving mechanism and an optical microscopy mechanism (54). The optical microscopy mechanism (54) includes an industrial camera, a microscope objective, and a light source. An anti-reflection mechanism (6), which is connected to a support plate (2), includes an anti-reflection sheet (612), the anti-reflection sheet (612) including a transparent sheet, the transparent sheet having an anti-reflection film coated on both sides; The anti-reflection film cleaning mechanism (7) is connected to the support plate (2) and includes a scraper (75); The drive mechanism (8) is mounted on one side of the support plate (2).

2. The optical inspection equipment based on semiconductor electronic component manufacturing and processing according to claim 1, characterized in that, The single crystal silicon rod rotating mechanism (3) also includes pulleys (33) respectively fixed at one end of two rotating shafts (31), and the two pulleys (33) are externally connected to belts (34). One of the support plates (2) is fixed with a motor (35) on one side, and the output end of the motor (35) is fixedly connected to one of the rotating shafts (31); The two shafts (31) are rotatably connected inside the two support plates (2).

3. The optical inspection equipment based on semiconductor electronic component manufacturing and processing according to claim 2, characterized in that, The moving mechanism includes a reciprocating screw (51) rotatably connected inside the two support plates (2). One end of the reciprocating screw (51) is equipped with a one-way gear (52). The external thread of the reciprocating screw (51) is fitted with a slider (53). One side of the slider (53) is fixedly connected to an optical microscopy mechanism (54). One side of the optical microscopy mechanism (54) is fixedly fitted with a slider (55). The inside of the slider (55) is fitted with a guide rod (56). The guide rod (56) is fixedly connected to the two support plates (2).

4. The optical inspection equipment based on semiconductor electronic component manufacturing and processing according to claim 3, characterized in that, The anti-reflection mechanism (6) also includes multiple push rod motors (613), one side of which is fixed with a mounting plate (614), which is fixedly connected to the support plate (2), and the output ends of the multiple push rod motors (613) are fixed with a support frame (61).

5. The optical inspection equipment based on semiconductor electronic component manufacturing and processing according to claim 4, characterized in that, The anti-reflection mechanism (6) further includes a plurality of spheres (69) rotatably connected to the bottom. A rod (68) is fixed to the bottom of the spheres (69), and a sphere (610) is fixed to the bottom of the rod (68). A connecting block (611) is rotatably connected to the outside of the spheres (610), and the anti-reflection sheet (612) is fixed to the bottom of the plurality of connecting blocks (611). A fixing block (67) is fixed to the outside of the rod (68). A connecting rod (66) is rotatably connected to the side of the fixing block (67) near the optical microscopic mechanism (54). A slider three (64) is rotatably connected to the end of the connecting rod (66) away from the fixing block (67). A sliding rod (63) is sleeved inside the slider three (64). A spring (65) is sleeved outside the sliding rod (63). One end of the spring (65) is fixedly connected to the slider three (64). The bottom of the support frame (61) is provided with multiple sliding grooves (62), the slider three (64) is sleeved inside the sliding groove (62), the sliding rod (63) is fixed to the inner wall of the sliding groove (62), and the other end of the spring (65) is fixedly connected to the sliding groove (62).

6. The optical inspection equipment based on semiconductor electronic component manufacturing and processing according to claim 5, characterized in that, The anti-reflective film cleaning mechanism (7) also includes a reciprocating screw two (71) rotatably connected inside the two support plates (2). One end of the reciprocating screw two (71) is equipped with a one-way gear two (72). The external thread of the reciprocating screw two (71) is fitted with a slider four (73). The inside of the slider four (73) is fitted with a guide rod two (74). The guide rod two (74) is fixedly connected to the two support plates (2). The scraper (75) is fixedly connected to the slider four (73).

7. An optical inspection device based on semiconductor electronic component manufacturing and processing according to claim 6, characterized in that, The drive mechanism (8) also includes a second motor (81) fixed to one side of one of the support plates (2). The output end of the second motor (81) is fixed with a gear (82). One side of the gear (82) meshes with a one-way gear (52), and the other side of the gear (82) meshes with a one-way gear (72).

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