Multi-layer gas chamber optical absorption cell capable of keeping stable gas parameters for long time and operation method of multi-layer gas chamber optical absorption cell

Abstract

The invention discloses a multi-layer gas chamber optical absorption cell capable of keeping gas parameters stable for a long time and an operation method. The absorption cell comprises a gas chamber group, a valve assembly and a monitoring assembly. The gas chamber group comprises an inner-layer gas chamber and at least one outer-layer gas chamber surrounding the outer side of the inner-layer gas chamber layer by layer, the valve assembly is provided with an inner-layer gas chamber valve communicated with the inner-layer gas chamber and an outer-layer gas chamber valve communicated with the outer-layer gas chamber, the monitoring assembly can monitor target gas parameters, and the absorption cell is further provided with a reflector group and a light-passing window. The method is applied to the absorption cell, the gas parameters are monitored in real time through the monitoring assembly after vacuumizing and gas filling are conducted till the gas parameters of the gas chambers are consistent, differential gas pumping and filling regulation and control are conducted, and pumped gas can be recycled after being treated. According to the invention, stable gas parameters of the inner-layer gas chamber can be maintained for a long time, the continuous working time of the absorption cell is prolonged, the consumption of target gas is reduced, economy and environmental protection are realized, the structure and the method are simple, and the application value is relatively high.

Description

Technical Field

[0001] This invention relates to the field of gas absorption cell technology, and more specifically, to a multi-layer gas chamber optical absorption cell and its operation method for maintaining stable gas parameters over a long period of time. Background Technology

[0002] The core requirement for optical gas absorption cells is to fill them with target gases of specific pressure, purity, and composition ratios, and to maintain the stability of these gas parameters during use. Through the interaction between the laser beam and the target gas in the chamber, applications such as gas absorption spectroscopy, gas spectral analysis, and gas concentration detection can be achieved. In some scenarios, they also need to be used as chemical reaction vessels to provide a stable gaseous environment for various chemical reactions.

[0003] Existing optical gas absorption cells and similar gas containers mostly employ a single-layer gas chamber structure design. Due to factors such as their structural design, sealing methods, and number of interfaces, gas leakage occurs at a certain rate during use. After filling the container with the target gas that meets the usage requirements, parameters such as gas pressure, purity, and composition ratio inside the container will continuously change due to gas leakage, making it difficult to maintain within the range required for application in the long term. When the gas parameters inside the container exceed the set range, the entire container needs to be evacuated and refilled. This process of evacuating the mixed gas and refilling with the target gas to the required operating conditions takes time, during which the gas parameters inside the container may not meet the usage requirements, causing interruptions in the manufacturing, production, or testing process. Furthermore, existing gas containers lack a dedicated buffer and isolation structure design, making it impossible to control gas parameters in stages. There is also no effective recycling method for high-value toxic or rare gases, which not only increases gas usage costs but also easily causes environmental pollution, making it difficult to meet the needs of practical application scenarios.

[0004] Therefore, there is an urgent need for an optical gas absorption cell device and operating method to solve the problems of traditional optical gas absorption cells and similar gas containers being unable to maintain stable internal gas pressure, purity, and composition ratio for a long time, requiring overall evacuation and refilling when gas parameters exceed the standard, resulting in interruption of operation, low gas control accuracy, high consumption of target gas and inability to recycle, so as to improve the continuous working time of gas containers, reduce gas usage costs, and adapt to the diverse needs of various fields for stable gas environments. Summary of the Invention

[0005] Based on existing technology, the objective of this invention is to provide a multi-layer gas chamber optical absorption cell and its operation method that maintain stable gas parameters for a long time. This invention can solve the problem that traditional optical gas absorption cells cannot maintain stable gas parameters for a long time from both structural and methodological perspectives. It effectively improves the stability and control accuracy of gas pressure, purity, and composition ratio in the absorption cell, extends the continuous working time of the device, reduces the consumption of target gas, and realizes gas recycling. It is economical, environmentally friendly, and safe to use. At the same time, its device structure and operation method are simple.

[0006] A first aspect of the present invention provides a multi-layer gas chamber optical absorption cell that maintains stable gas parameters for a long time, the absorption cell comprising: The air chamber assembly includes: An inner air chamber, wherein a mirror assembly is arranged inside the inner air chamber; and At least one outer air chamber, which is arranged to surround the inner air chamber layer by layer along the outside of the inner air chamber; Valve assembly, including: At least two inner chamber valves are arranged on the outer side of the inner chamber wall and communicate with the inner chamber; and At least one outer chamber valve is arranged on the outside of the chamber wall of the outer chamber and communicates with the outer chamber; as well as The monitoring component includes a chamber monitoring device corresponding to each layer of chambers in the chamber group.

[0007] Furthermore, the air chamber assembly includes an inner air chamber and an outer air chamber, the outer air chamber completely surrounding the inner air chamber, and the volume of the outer air chamber is smaller than the volume of the inner air chamber.

[0008] Furthermore, the valve assembly includes: A first inner chamber valve connects the inner chamber and the outer chamber and is configured to control the gas flow between the inner chamber and the outer chamber. A second inner chamber valve, connecting the inner chamber to the outside of the absorption tank, and configured to control gas flow between the inner chamber and the outside of the absorption tank; and An outer gas chamber valve connects the outer gas chamber to the outside of the absorption tank and is configured to control the gas flow between the outer gas chamber and the outside of the absorption tank.

[0009] Furthermore, the monitoring component includes: An inner gas chamber monitoring device, connected to the inner gas chamber, is configured to monitor gas parameters of the gas in the inner gas chamber; and An outer gas chamber monitoring device is connected to the outer gas chamber and is configured to monitor gas parameters of the gas in the outer gas chamber.

[0010] Furthermore, the absorption cell also includes: A mirror assembly, disposed inside the inner gas chamber, is configured to provide a multi-reflection optical path for a light beam incident on the inner gas chamber; and A light-transmitting window is arranged on the walls of the inner and outer air chambers and configured to provide a light path for the incident and / or exit of a light beam.

[0011] A second aspect of the present invention provides an operating method for a multi-layer gas cell optical absorption cell that maintains stable gas parameters for a long period of time, applied to the absorption cell described in the first aspect of the present invention, the method comprising: The target gas is introduced into the absorption tank through the valve of any outer gas chamber. After the gas parameters of the target gas in each gas chamber reach the preset working conditions, the valves of the inner gas chamber and each outer gas chamber are closed. The gas parameters of the target gas in the inner and outer gas chambers are monitored in real time by a monitoring component; and Based on the gas parameters obtained from real-time monitoring, the inner gas chamber and / or any level of the outer gas chamber of the absorption pool are subjected to differentiated gas extraction and / or gas filling to maintain the gas parameters of the target gas in the inner gas chamber at preset working conditions.

[0012] Furthermore, the gas parameters include the gas pressure, purity, and / or composition ratio.

[0013] Furthermore, the differentiated extraction and / or inflation of the inner gas chamber and / or any level of the outer gas chamber of the absorption pool based on real-time monitoring results includes: If the gas parameters of the target gas in the inner gas chamber and each outer gas chamber are all under preset working conditions, the gas parameters of the target gas are continuously monitored, and the absorption cell remains in working condition. If the gas parameters of the target gas in the inner gas chamber meet the preset working conditions, and the gas parameters of the target gas in one or more outer gas chambers deviate from the preset working conditions, then the one or more outer gas chambers are pumped and / or filled until the gas parameters of the gas in the one or more outer gas chambers meet the preset working conditions. If the gas parameters of the target gas in the inner gas chamber deviate from the preset operating conditions, while the gas parameters of the target gas in each outer gas chamber are within the preset operating conditions, then the operation of the absorption cell is stopped, the problem is investigated, and after the problem is resolved, monitoring of the gas parameters of the target gas in the inner and outer gas chambers, as well as the operation of the absorption cell, are resumed. If the gas parameters of the target gas in the inner gas chamber and at least one outer gas chamber deviate from the preset operating conditions, the operation of the absorption pool is stopped. The inner gas chamber and each outer gas chamber of the absorption pool are evacuated and then refilled with the target gas until the gas parameters of the target gas in the inner gas chamber and each outer gas chamber meet the preset operating conditions. Then, the monitoring of the gas parameters of the target gas in the inner gas chamber and each outer gas chamber and the operation of the absorption pool are resumed.

[0014] Furthermore, the method also includes opening at least one inner chamber valve and each outer chamber valve before filling the target gas, and performing a evacuation operation on the inner chamber and each outer chamber to bring the inner chamber and each outer chamber to a vacuum state.

[0015] Furthermore, the method also includes treating the extracted gas and then refilling it into the corresponding gas chamber in the gas chamber group of the absorption pool, wherein the gas treatment includes separation, purification and / or refining.

[0016] The present invention has at least the following beneficial effects: (1) The present invention can effectively maintain the stability of gas pressure, purity and composition ratio in the inner gas chamber of the absorption cell, greatly improve the continuous working time of the optical absorption cell, and improve the control accuracy of gas pressure, purity and composition ratio in the absorption cell, so that the gas parameters of the inner gas chamber are within the preset working conditions for a long time.

[0017] (2) This invention can control the gas parameters of the inner gas chamber by separately pumping and filling the outer gas chamber of the absorption pool, without needing to pump and fill the gas in the entire absorption pool. This can maintain the gas state of the inner gas chamber within the target range for a long time, effectively reducing the consumption of the target gas and saving the amount of working gas used, thereby reducing the overall operating cost from the gas consumption stage. At the same time, the absorption pool does not need to stop working due to the gas parameters of the outer gas chamber deviating from the preset range, which can meet the needs of continuous operation for a long time without stopping in application scenarios such as experimental testing, production manufacturing, and process processing.

[0018] (3) The present invention can process the gas extracted during the absorption tank and then refill it into the gas chamber to realize the recycling of the target gas. When the gas is used in high-value, toxic or rare gas scenarios, this design can reduce the waste of such gas, avoid the environmental pollution caused by the direct emission of toxic gas, reduce the safety hazards caused by toxic gas leakage, and improve the safety of the device.

[0019] (4) The multi-layer gas chamber optical absorption cell device of the present invention has a simple overall structure design, and the supporting operation method is clear and easy to execute. The device has strong overall adaptability and can flexibly add a third or more gas chambers outside the outer gas chamber according to the actual gas parameter stability requirements without making significant changes to the core structure of the device. The expansion method is convenient and suitable for a variety of application scenarios with stable gas environment requirements.

[0020] (5) The present invention combines the core optical components of the optical absorption cell with a multi-layer gas chamber structure. The reflector group and light-transmitting window configured in the inner gas chamber can ensure the optical path transmission and photo-gas interaction effect required for optical detection. While achieving stable control of gas parameters, it does not affect the core detection function of the optical absorption cell, thus taking into account both the gas parameter stability and optical detection performance of the device.

[0021] In summary, this invention, through a multi-layered gas chamber structure design, precise monitoring, and differentiated control operation, solves the problem of traditional optical gas absorption cells being unable to maintain stable gas parameters for extended periods. It effectively improves the stability and control precision of gas pressure, purity, and composition ratio within the absorption cell, extending the continuous operating time of the device. It also reduces the consumption of target gas, achieving gas recycling and combining economic efficiency, environmental friendliness, and safety. Furthermore, its device structure and operation method are simple, flexibly expandable, and can maintain the core function of optical detection while ensuring stable gas parameters.

[0022] This invention can be applied to the field of scientific research, serving as a gas absorption cell for gas absorption spectroscopy and gas spectral analysis, and as a chemical reaction vessel to provide a long-term, highly stable gas environment for research in chemistry, semiconductors, quantum science, and sensors. It can also be applied to the field of industrial production, providing precise control of reaction gas concentrations for etching and deposition processes in the semiconductor industry, providing a stable vacuum or gas environment for metal coating and optical coating industries, and providing a long-term stable calibration environment for sensors for gas composition, concentration detection, and pressure detection. Furthermore, this invention can be applied to the field of gas storage, enabling safe, long-term storage and real-time monitoring of various gases, including rare and hazardous gases. Attached Figure Description

[0023] To further illustrate the advantages and other features of the various embodiments of the present invention, a more specific description of the embodiments of the present invention will be presented with reference to the accompanying drawings. It is understood that these drawings depict only typical embodiments of the invention and are therefore not intended to limit its scope. In the drawings, identical or corresponding parts will be indicated by the same or similar reference numerals for clarity.

[0024] Figure 1A schematic diagram of an optical absorption cell structure according to one embodiment of the present invention is shown.

[0025] Figure 2 A flowchart illustrating an optical absorption cell operation method according to one embodiment of the present invention is shown.

[0026] Figure 3 The diagram illustrates an operation flowchart of performing corresponding operations based on real-time monitoring results in one embodiment of the present invention.

[0027] List of reference numerals 100 Absorption Pool 1 Inner air chamber 2. Outer air chamber 3. First inner chamber valve 4. Outer chamber valve 5. Second inner chamber valve 6. Outer chamber monitoring device 7. Inner chamber monitoring device 8 Reflector Groups 9. Light-transmitting window Detailed Implementation It should be noted that the components in the various figures may be shown exaggeratedly for illustrative purposes and are not necessarily to scale. In each figure, the same reference numerals are used for components that are identical or have the same function.

[0028] In this invention, the various embodiments are merely intended to illustrate the solutions of the invention and should not be construed as limiting.

[0029] In this invention, unless otherwise specified, the quantifiers “a” and “one” do not exclude scenarios involving multiple elements.

[0030] It should also be noted that, in the embodiments of the present invention, only a portion of the components or parts may be shown for clarity and simplicity. However, those skilled in the art will understand that, under the teachings of the present invention, necessary components or parts can be added as needed for specific scenarios. Furthermore, unless otherwise stated, features in different embodiments of the present invention can be combined with each other. For example, a feature in the second embodiment can replace a corresponding or functionally identical or similar feature in the first embodiment, and the resulting embodiment will also fall within the scope of disclosure or description of this application.

[0031] It should also be noted that within the scope of this invention, the terms "same", "equal", and "equal to" do not mean that the two values ​​are absolutely equal, but allow for a certain reasonable error. In other words, the terms also cover "substantially the same", "substantially equal", and "substantially equal to".

[0032] Furthermore, the numbering of the steps in the methods of the present invention does not limit the execution order of the method steps. Unless otherwise specified, the method steps may be executed in different orders.

[0033] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0034] In one embodiment of the present invention, a multi-layer gas chamber optical absorption cell (hereinafter referred to as "absorption cell") 100 that maintains stable gas parameters for a long time is provided. It includes a gas chamber group, a valve assembly and a monitoring assembly. The components work together to achieve stable control of the target gas parameters inside the absorption cell. It can maintain the pressure, purity and composition ratio of the gas inside the gas chamber at preset working conditions for a long time, and is suitable for various application scenarios that require stable gas environment, such as optical detection, gas storage and process processing.

[0035] In one embodiment of the present invention, the gas chamber group is the core gas-containing structure of the absorption pool 100, configured to provide storage and working space for the target gas. The gas chamber group includes an inner gas chamber 1 and at least one outer gas chamber 2. Each outer gas chamber 2 is arranged to surround the inner gas chamber 1 layer by layer. The inner gas chamber 1 serves as a working gas chamber for filling in the target gas and realizing the interaction between light and gas. Each outer gas chamber 2 serves as a buffer gas chamber for isolating the inner gas chamber 1 from the outside atmosphere, delaying gas leakage in the inner gas chamber 1, thereby slowing down the rate of change of gas parameters in the inner gas chamber 1.

[0036] The structure, function and working principle of the absorption cell 100 will be further explained below with reference to a specific embodiment of the present invention.

[0037] Figure 1 A schematic diagram of an optical absorption cell structure according to one embodiment of the present invention is shown.

[0038] like Figure 1 As shown, in one embodiment of the present invention, the gas chamber group adopts a double-layer gas chamber structure, including an inner gas chamber 1 and an outer gas chamber 2. The outer gas chamber 2 completely surrounds the inner gas chamber 1, and the volume of the outer gas chamber 2 is smaller than the volume of the inner gas chamber 1. This volume design can reduce the amount of target gas consumed when performing pumping and filling operations on the outer gas chamber, while shortening the pumping and filling operation time and improving the efficiency of parameter control of the outer gas chamber 2.

[0039] In one embodiment of the present invention, the valve assembly is a gas flow control structure for the absorption tank 100, configured to realize the pumping and filling operations of each gas chamber and the on / off control of gas flow. The valve assembly includes two inner gas chamber valves connected to the inner gas chamber 1 and one outer gas chamber valve connected to the outer gas chamber 2. Each valve is an airtight valve, which can ensure the sealing performance of the corresponding gas chamber in the closed state and avoid additional gas leakage caused by valve gaps.

[0040] In one embodiment of the present invention, the structure of the valve assembly is adapted and refined for the gas chamber group with a double-layer gas chamber structure. The valve assembly includes a first inner gas chamber valve 3, a second inner gas chamber valve arranged on the gas chamber wall of the inner gas chamber 1, and an outer gas chamber valve 4 arranged on the gas chamber wall of the outer gas chamber 2. The first inner gas chamber valve 3 connects the inner gas chamber 1 and the outer gas chamber 2 and is configured to control the gas flow between the inner gas chamber 1 and the outer gas chamber 2 to realize gas exchange between the two gas chambers. The second inner gas chamber valve connects the inner gas chamber 1 and the outside of the absorption tank 100 and is configured to control the gas flow between the inner gas chamber 1 and the outside of the absorption tank 100, and can independently realize the evacuation or inflation operation of the inner gas chamber 1. The outer gas chamber valve 4 connects the outer gas chamber 2 and the outside of the absorption tank 100 and is configured to control the gas flow between the outer gas chamber 2 and the outside of the absorption tank 100, and can independently realize the evacuation or inflation operation of the outer gas chamber 2.

[0041] In one embodiment of the present invention, the monitoring component is a gas parameter detection structure of the absorption cell 100, configured to monitor the gas parameters of the target gas in the gas chamber group in real time, providing accurate data support for the gas chamber pumping and filling control operations. The gas parameters include gas pressure, purity, and composition ratio. The monitoring component includes an inner gas chamber monitoring device 7 and an outer gas chamber monitoring device 6. The inner gas chamber monitoring device 7 is connected to the inner gas chamber 1 and is configured to independently monitor the gas parameters of the target gas in the inner gas chamber 1. The outer gas chamber monitoring device 6 is connected to the outer gas chamber 2 and is configured to independently monitor the gas parameters of the target gas in the outer gas chamber 2. Each monitoring device can provide real-time feedback on the gas parameter changes of the corresponding gas chamber, realizing comprehensive control over the gas state within the gas chamber group.

[0042] In one embodiment of the present invention, the absorption cell 100 further includes a reflector group 8 and a light transmission window 9. These two components serve as the core optical components of the absorption cell, ensuring its optical detection function and achieving stable control of gas parameters without affecting the interaction between light and the target gas. The reflector group 8 is arranged inside the inner gas chamber 1 and configured to provide a multi-reflection optical path for the light beam incident on the inner gas chamber 1, extending the interaction path between the light beam and the target gas within the inner gas chamber 1 and improving the sensitivity of optical detection. The light transmission window 9 is arranged on the walls of the inner gas chamber 1 and the outer gas chamber 2 and configured to provide a light path for the incident and / or emitted laser beam. The light transmission window 9 is made of a highly airtight optical transparent material, ensuring normal transmission of the laser beam while maintaining the sealing performance of the gas chamber group and preventing gas leakage within the gas chamber group due to the opening of the optical path.

[0043] The working principle of this invention will be further explained below.

[0044] In one embodiment of the present invention, the working principle of the absorption cell 100 is designed based on the pressure difference law of gas leakage. As a type of gas container, a traditional optical gas absorption cell usually has a certain pressure difference between the target gas filled inside and the external atmosphere during operation. This pressure difference can cause the gas to leak from leak points on the container that are difficult to seal completely, resulting in continuous changes in parameters such as gas pressure, purity, and composition ratio inside the container over time, making it impossible to maintain within the preset working conditions for a long period of time. In this embodiment, the absorption tank 100 adopts a double-layer gas chamber structure design, with the inner gas chamber 1 as the core working gas chamber, and an outer gas chamber 2 is set on the outer layer to completely surround the inner gas chamber 1. This structural design creates a buffer gas chamber structure, the outer gas chamber 2, between the inner gas chamber 1 and the atmosphere outside the absorption tank 100, so that the target gas in the inner gas chamber 1 no longer comes into direct contact with the outside atmosphere. The original single pressure difference between the inner gas chamber 1 and the outside atmosphere is decomposed into two pressure differences: between the inner gas chamber 1 and the outer gas chamber 2, and between the outer gas chamber 2 and the outside atmosphere. The gas leakage driving force of the inner gas chamber 1 is reduced by the barrier of the buffer gas chamber. Meanwhile, the absorption pool 100 in this embodiment is equipped with an inner gas chamber monitoring device 7 and an outer gas chamber monitoring device 6. The gas pressure, purity and composition ratio inside the inner gas chamber 1 and the outer gas chamber 2 are monitored in real time by means of spectral detection. This non-contact spectral monitoring method does not require opening too many detection interfaces on the gas chamber wall of the gas chamber group. Compared with the traditional gas container monitoring method, it effectively reduces the number of leakage points on the container and further effectively slows down the overall gas leakage rate of the gas chamber group from the structural level.

[0045] In one embodiment of the present invention, a method for operating a multi-layer gas chamber optical absorption cell that maintains stable gas parameters for a long time is provided, the method being applied to the absorption cell 100 described in any of the foregoing embodiments.

[0046] The following is based on Figure 1 Taking the double-layer gas chamber structure absorption cell 100 in the illustrated embodiment as an example, the operation method of the absorption cell 100 is further explained.

[0047] Figure 2 A flowchart illustrating an optical absorption cell operation method according to one embodiment of the present invention is shown.

[0048] like Figure 2 As shown, the method includes the following steps: Step S100: Vacuum the inside of the gas chamber: Open the first inner gas chamber valve 3 connected to the inner gas chamber 1 and the outer gas chamber valve 4 connected to the outer gas chamber 2. Use the pumping device connected to the outer gas chamber valve 4 to perform a unified pumping operation on the inner gas chamber 1 and the outer gas chamber 2 of the absorption tank 100, so that the inside of the inner gas chamber 1 and the outer gas chamber 2 are both in a vacuum state, remove the impurity gas inside the two gas chambers, provide a clean gas chamber environment for the subsequent filling of the target gas, and ensure that the purity of the target gas is not affected by the impurity gas.

[0049] Step S200: Inflate the target gas and close the valves: Keep the first inner chamber valve 3 and the outer chamber valve 4 open. Inflate the target gas into the inner chamber 1 and outer chamber 2 of the absorption tank 100 through the outer chamber valve 4. During the inflation process, the open first inner chamber valve 3 ensures gas flow between the inner chamber 1 and the outer chamber 2, allowing the target gas inside the two chambers to mix thoroughly. Continue until the pressure, purity, and composition ratio of the target gas in the inner chamber 1 and the outer chamber 2 are consistent and meet the preset working conditions. Then, close the first inner chamber valve 3 and the outer chamber valve 4 to complete the initial inflation operation of the absorption tank 100. The target gas can be a single gas or a gas mixture with a preset composition ratio, depending on the actual application requirements.

[0050] Step S300: Real-time monitoring of gas parameters in the gas chamber: Start the monitoring component of the absorption cell 100, and monitor the pressure, purity and composition ratio of the target gas inside the inner gas chamber 1 and the outer gas chamber 2 in real time through the inner gas chamber monitoring device 7 connected to the inner gas chamber 1 and the outer gas chamber monitoring device 6 connected to the outer gas chamber 2, respectively.

[0051] Step S400: Perform differentiated control based on real-time monitoring results: Based on the gas parameter data fed back by the monitoring component in step S300, determine whether the gas parameters of the inner gas chamber 1 and the outer gas chamber 2 are under preset working conditions. For different judgment results, perform differentiated pumping and / or filling operations on the inner gas chamber 1 and / or the outer gas chamber 2.

[0052] Figure 3 The diagram illustrates an operation flowchart of performing corresponding operations based on real-time monitoring results in one embodiment of the present invention.

[0053] like Figure 3 As shown, the differentiated vacuuming and / or inflation operations specifically include: (1) If the monitoring results show that the pressure, purity and composition ratio of the target gas in the inner gas chamber 1 and the outer gas chamber 2 are all under the preset working conditions, control the monitoring component to maintain a continuous real-time monitoring state and maintain the normal working state of the absorption pool 100.

[0054] (2) If the monitoring results show that the parameters of the target gas in the inner gas chamber 1 meet the preset working conditions, and the parameters of the target gas in the outer gas chamber 2 deviate from the preset working conditions, then keep the first inner gas chamber valve 3 and the second inner gas chamber valve of the inner gas chamber 1 in the closed state, open the outer gas chamber valve 4 connected to the outer gas chamber 2, and perform pumping and / or filling operations on the outer gas chamber 2 separately through the pumping device and / or filling device until the pressure, purity and composition ratio of the target gas in the outer gas chamber 2 are restored to the preset working conditions, and then close the outer gas chamber valve 4. During this process, the inner gas chamber 1 remains sealed and does not affect the normal operation of the absorption tank 100.

[0055] (3) If the monitoring results show that the parameters of the target gas in the inner gas chamber 1 deviate from the preset working conditions, while the parameters of the target gas in the outer gas chamber 2 are all within the preset working conditions, the operation of the absorption pool 100 shall be stopped immediately, and a comprehensive problem investigation shall be carried out on the absorption pool 100. The investigation shall include the overall sealing status of the gas chamber group, the closing status of each valve, and the connection and sealing status of the gas chamber wall and the light transmission window 9. At the same time, it shall be checked whether the target gas in the inner gas chamber 1 has undergone combination, decomposition or photochemical reaction, resulting in changes in gas parameters. After all problems have been investigated and resolved, the monitoring component shall resume real-time monitoring of the gas parameters of the target gas in the inner gas chamber 1 and the outer gas chamber 2, and the operation of the absorption pool 100 shall be restarted.

[0056] (4) If the monitoring results show that the parameters of the target gas in the inner gas chamber 1 and the outer gas chamber 2 deviate from the preset working conditions, the operation of the absorption tank 100 shall be stopped immediately, the first inner gas chamber valve 3 and the outer gas chamber valve 4 shall be reopened, and the inner gas chamber 1 and the outer gas chamber 2 shall be evacuated as a whole through the evacuation device. After the two gas chambers reach the vacuum state again, the target gas shall be refilled into the gas chamber group through the outer gas chamber valve 4 in accordance with the operation method of step S200 until the parameters of the target gas in the inner gas chamber 1 and the outer gas chamber 2 are restored to the preset working conditions. After closing the first inner gas chamber valve 3 and the outer gas chamber valve 4, the real-time monitoring of the monitoring component and the normal operation of the absorption tank 100 shall be restored.

[0057] In one embodiment of the present invention, during the gas extraction operation in steps S100 and S400, the mixed gas extracted from the inner gas chamber 1 and / or outer gas chamber 2 of the absorption tank 100 can be treated, and then the treated gas can be refilled into the corresponding inner gas chamber 1 or outer gas chamber 2 of the absorption tank 100 to achieve the recycling of the target gas. The gas treatment includes separation, purification, and / or refining of the mixed gas. Impurities in the mixed gas are removed by a dedicated gas treatment device to extract high-purity target gas. This operation is particularly suitable for application scenarios where the target gas is a high-value, toxic, or rare gas. It can reduce the consumption of target gas, avoid environmental pollution caused by the direct emission of toxic gases, and reduce the overall cost of gas use.

[0058] Due to leakage with the atmospheric environment, the pressure, purity, and composition ratio of the target gas in the outer gas chamber 2 will continuously change over time. Excessive changes may cause the gas parameters in the inner gas chamber 1 to exceed the required operating range. Normally, the gas leakage rate between the inner gas chamber 1 and the outer gas chamber 2 is less than the gas leakage rate between the outer gas chamber 2 and the external atmospheric environment of the absorption tank 100. In one embodiment of the present invention, when the inner gas chamber monitoring device 7 detects that the gas conditions in the inner gas chamber 1 do not meet the preset operating conditions and it is not suitable to directly pump or fill the inner gas chamber 1, a method of multiple pumping and balancing is used to indirectly regulate the gas parameters of the inner gas chamber 1 through the outer gas chamber 2. The specific operating steps are as follows: First, open the outer gas chamber valve 4 and close the first inner gas chamber valve 3. Fill the outer gas chamber 2 with the target gas that meets the preset working conditions of the inner gas chamber 1 through the outer gas chamber valve 4. During the filling process, the gas parameters in the outer gas chamber 2 are monitored in real time by the outer gas chamber monitoring device 6. When the gas pressure, purity and composition ratio all meet the target conditions of the inner gas chamber 1, close the outer gas chamber valve 4 to complete the filling operation of the outer gas chamber 2.

[0059] The second step is to open the valve 3 of the first inner chamber, so that the inner chamber 1 and the outer chamber 2 are connected. By utilizing the diffusion effect of the gas, the gas between the two chambers can flow and mix with each other. During this process, the gas parameters of the two chambers are monitored simultaneously by the inner chamber monitoring device 7 and the outer chamber monitoring device 6. After the monitoring data shows that the gas conditions of the inner chamber 1 and the outer chamber 2 are consistent, the valve 3 of the first inner chamber is closed, thus completing one connection and balancing operation.

[0060] Third, open the outer gas chamber valve 4, start the vacuum pumping device connected to the outer gas chamber valve 4, and pump the outer gas chamber 2 to a vacuum state. After the vacuum is completed, close the vacuum pumping device, and then fill the outer gas chamber 2 with the target gas that meets the target conditions of the inner gas chamber 1 through the outer gas chamber valve 4 again. After monitoring and confirming that the gas parameters of the outer gas chamber 2 meet the standards, close the outer gas chamber valve 4.

[0061] Fourth, repeat the operations of steps two and three, that is, open valve 3 of the first inner gas chamber again, close the valve after the gas conditions of the two gas chambers are consistent, then evacuate the outer gas chamber 2 and refill it with gas, repeat this cycle until the inner gas chamber monitoring device 7 detects that the gas pressure, purity and composition ratio in the inner gas chamber 1 have reached the preset working conditions, stop the control operation, close all valves, and the absorption pool 100 returns to normal working state.

[0062] In one embodiment of the present invention, when the gas parameters in the inner gas chamber 1 deviate slightly, the natural leakage characteristics between the inner gas chamber 1 and the outer gas chamber 2 can be utilized to indirectly regulate the gas parameters of the inner gas chamber 1 by precisely controlling the gas conditions in the outer gas chamber 2. The specific operation steps are as follows: The first step is to keep the valve 3 of the first inner chamber closed to ensure that the inner chamber 1 is sealed and to prevent active communication with the outer chamber 2. Gas exchange is achieved solely through natural leakage between the two chambers.

[0063] The second step is to open the outer gas chamber valve 4 and fill the outer gas chamber 2 with the target gas through the outer gas chamber valve 4. During the filling process, the pressure, purity and composition ratio of the gas in the outer gas chamber 2 are precisely controlled by the outer gas chamber monitoring device 6 to achieve the preset control target.

[0064] Third, when the gas parameters of the outer gas chamber 2 reach the preset control target, the outer gas chamber valve 4 is closed to keep the outer gas chamber 2 sealed. At this time, taking advantage of the characteristic that the gas leakage rate between the inner gas chamber 1 and the outer gas chamber 2 is less than the leakage rate between the outer gas chamber 2 and the outside atmosphere, the target gas in the outer gas chamber 2 is allowed to slowly diffuse into the inner gas chamber 1 through the tiny leakage between the gas chambers.

[0065] The fourth step involves continuously monitoring the gas parameters of the two chambers in real time using the inner chamber monitoring device 7 and the outer chamber monitoring device 6, tracking the parameter changes of the inner chamber 1 in real time. During this period, the outer chamber valve 4 can be opened again based on the monitoring results to fine-tune the gas parameters of the outer chamber 2, ensuring that the parameters of the inner chamber 1 can gradually approach the preset working conditions.

[0066] The fifth step continues until the inner chamber monitoring device 7 detects that the gas pressure, purity, and composition ratio in the inner chamber 1 have all reached the preset working conditions. This completes the control operation, keeps the gas parameters of the outer chamber 2 stable, continues to play a buffering role, and slows down the changes in the gas parameters of the inner chamber 1.

[0067] In one embodiment of the present invention, since the volume of the outer air chamber 2 is smaller than that of the inner air chamber 1, the required pumping and / or filling time for the outer air chamber 2 is much shorter than the time required for the overall operation of the air chamber group when pumping and / or filling the outer air chamber 2 alone, and the consumption of the target gas is greatly reduced. This enables the absorption tank 100 to be controlled without stopping, effectively improving the continuous working time of the absorption tank 100 and meeting the needs of industrial production, scientific research and other scenarios for long-term continuous operation of equipment.

[0068] The application scenarios of the present invention are further illustrated below through an application embodiment.

[0069] In one application embodiment of the present invention, the absorption cell 100 with a double-layer gas chamber structure is used as the core device and applied to a gas absorption spectroscopy detection scenario. The specific application process is as follows: First, open both the inner chamber valve 3 and the outer chamber valve 4 of the absorption cell 100. Start the vacuum pumping device connected to the outer chamber valve 4 and pump the inner chamber 1 and the outer chamber 2 simultaneously through the outer chamber valve 4 until both chambers reach the high vacuum level required for spectral detection. This completely removes the residual air and impurity gases inside the chambers, preventing the impurity gases from interfering with the subsequent spectral detection of the target gas.

[0070] After the vacuuming operation is completed, the vacuuming device is turned off, and the valve 3 of the first inner chamber is kept open. The target gas with a preset pressure and composition ratio is then introduced into the inner chamber 1 and outer chamber 2 of the absorption tank 100 through the outer chamber valve 4. During the filling process, the valve 3 of the first inner chamber remains open for an extended period to ensure free flow of gas between the inner chamber 1 and the outer chamber 2. This ensures that the gas parameters in the inner chamber 1, including pressure, purity, and composition ratio, are consistent with the gas conditions in the outer chamber 2, guaranteeing that the gas parameters in both chambers reach the preset standards simultaneously.

[0071] During the inflation process, the outer chamber monitoring device 6 and the inner chamber monitoring device 7 are activated simultaneously. These two devices monitor the pressure, purity, and composition ratio of the target gas in the outer chamber 2 and the inner chamber 1 in real time, providing real-time feedback on changes in gas parameters. When the monitoring data shows that the target gas parameters in both the inner chamber 1 and the outer chamber 2 have reached the preset spectral detection working conditions, the first inner chamber valve 3 and the outer chamber valve 4 are immediately closed, completing the vacuuming, inflation, and sealing operations of the absorption tank 100. At this time, the inner chamber 1 serves as the core working chamber, maintaining stable target gas parameters, while the outer chamber 2 acts as a buffer chamber, isolating the inner chamber 1 from the outside atmosphere and mitigating gas leakage.

[0072] After sealing, the spectral detection equipment is activated. The laser beam is injected into the inner gas chamber 1 through the light transmission window 9 of the absorption cell 100. The injected laser beam interacts with the target gas in the inner gas chamber 1 and undergoes multiple reflections through the reflector group 8 inside the inner gas chamber 1, extending the interaction path between the laser beam and the target gas and making the absorption of the laser beam by the target gas more complete. After multiple reflections and absorptions, the laser beam is output again through the light transmission window 9 to the spectral detection equipment, which analyzes the output beam to obtain the absorption spectrum data of the target gas.

[0073] Throughout the entire spectral detection process, the outer gas chamber monitoring device 6 and the inner gas chamber monitoring device 7 continuously maintain real-time monitoring, monitoring the gas parameters of the two gas chambers in real time. If the gas parameters of the outer gas chamber 2 are detected to deviate, the valve 3 of the first inner gas chamber can be kept closed, and the valve 4 of the outer gas chamber can be opened separately for gas extraction and filling control, ensuring that the gas parameters of the inner gas chamber 1 are always at the preset working conditions, thus ensuring the continuity of the spectral detection process and the accuracy of the detection results.

[0074] This application embodiment effectively solves the problems of easy leakage and instability of gas parameters in traditional optical absorption cells, which lead to large spectral detection errors and easy interruptions in the detection process. It achieves long-term stable control of target gas parameters. At the same time, the cooperation of the reflector group 8 and the light transmission window 9 ensures the optical detection effect. It is suitable for various gas absorption spectral detection scenarios and provides a stable and reliable gas environment support for spectral detection.

[0075] In one embodiment of the present invention, in order to make the working environment in the inner gas chamber 1 more stable, multiple layers of outer gas chambers 2 can be added outside the outer gas chamber 2 to form a multi-layer enclosed gas chamber structure. After the unified inflation operation of all layers of gas chambers is completed, the gas pressure of each layer of gas chamber is monitored in real time by the monitoring device corresponding to each layer of gas chamber. According to the monitoring results of each layer of gas chamber, the corresponding gas chamber is ventilated. Through the buffering and blocking effect of the multi-layer gas chambers, the leakage rate of gas in the inner gas chamber 1 is further reduced, and the continuous working time of the absorption pool 100 is effectively increased.

[0076] In one embodiment of the present invention, in order to maintain higher stability of the pressure, purity and composition ratio of the gas in the inner gas chamber 1 and further extend the continuous working time of the absorption pool 100, a third or more layers of gas chambers can be added outside the outer gas chamber 2. By precisely controlling the gas conditions inside the multi-layer gas chambers, a multi-level buffer protection structure is formed, which can more accurately and for a longer period of time control the gas parameters of the inner gas chamber 1 within the range required for actual operation, and adapt to application scenarios with higher requirements for gas environment stability.

[0077] Although various embodiments of the invention have been described above, it should be understood that they are presented by way of example only and not as limitations. It will be apparent to those skilled in the art that various combinations, modifications, and alterations can be made without departing from the spirit and scope of the invention. Therefore, the breadth and scope of the invention disclosed herein should not be limited by the exemplary embodiments disclosed above, but should be defined solely by the appended claims and their equivalents.

Claims

1. A multi-layer gas chamber optical absorption cell that maintains stable gas parameters for a long time, characterized in that, The absorption cell includes: The air chamber assembly includes: An inner air chamber, wherein a mirror assembly is arranged inside the inner air chamber; and At least one outer air chamber, which is arranged to surround the inner air chamber layer by layer along the outside of the inner air chamber; Valve assembly, including: At least two inner chamber valves are arranged on the outer side of the inner chamber wall and communicate with the inner chamber; and At least one outer chamber valve is arranged on the outside of the chamber wall of the outer chamber and communicates with the outer chamber; as well as The monitoring component includes a chamber monitoring device corresponding to each layer of chambers in the chamber group.

2. The absorption cell according to claim 1, characterized in that, The air chamber group includes an inner air chamber and an outer air chamber, the outer air chamber completely surrounds the inner air chamber, and the volume of the outer air chamber is smaller than the volume of the inner air chamber.

3. The absorption cell according to claim 2, characterized in that, The valve assembly includes: A first inner chamber valve connects the inner chamber and the outer chamber and is configured to control the gas flow between the inner chamber and the outer chamber. A second inner chamber valve, connecting the inner chamber to the outside of the absorption tank, and configured to control gas flow between the inner chamber and the outside of the absorption tank; and An outer gas chamber valve connects the outer gas chamber to the outside of the absorption tank and is configured to control the gas flow between the outer gas chamber and the outside of the absorption tank.

4. The absorption cell according to claim 1, characterized in that, The monitoring components include: An inner gas chamber monitoring device, connected to the inner gas chamber, is configured to monitor gas parameters of the gas in the inner gas chamber; and An outer gas chamber monitoring device is connected to the outer gas chamber and is configured to monitor gas parameters of the gas in the outer gas chamber.

5. The absorption cell according to claim 1, characterized in that, The absorption cell also includes: A light-transmitting window is arranged on the walls of the inner and outer air chambers and configured to provide a light path for the incident and / or exit of a light beam.

6. A method for operating a multi-layer gas cell optical absorption cell that maintains stable gas parameters over a long period of time, characterized in that... The method, applied to the absorption cell according to any one of claims 1-5, comprises: The target gas is introduced into the absorption tank through the valve of any outer gas chamber. After the gas parameters of the target gas in each gas chamber reach the preset working conditions, the valves of the inner gas chamber and each outer gas chamber are closed. The gas parameters of the target gas in the inner and outer gas chambers are monitored in real time by a monitoring component; and Based on the gas parameters obtained from real-time monitoring, the inner gas chamber and / or any level of the outer gas chamber of the absorption pool are subjected to differentiated gas extraction and / or gas filling to maintain the gas parameters of the target gas in the inner gas chamber at preset working conditions.

7. The method according to claim 6, characterized in that, The gas parameters include gas pressure, purity, and / or composition ratio.

8. The method according to claim 6, characterized in that, The step of differentially pumping out and / or filling the inner air chamber and / or any level of the outer air chamber of the absorption tank based on real-time monitoring results includes: If the gas parameters of the target gas in the inner gas chamber and each outer gas chamber are all under preset working conditions, the gas parameters of the target gas are continuously monitored, and the absorption cell remains in working condition. If the gas parameters of the target gas in the inner gas chamber meet the preset working conditions, and the gas parameters of the target gas in one or more outer gas chambers deviate from the preset working conditions, then the one or more outer gas chambers are pumped and / or filled until the gas parameters of the gas in the one or more outer gas chambers meet the preset working conditions. If the gas parameters of the target gas in the inner gas chamber deviate from the preset operating conditions, while the gas parameters of the target gas in each outer gas chamber are within the preset operating conditions, then the operation of the absorption cell is stopped, the problem is investigated, and after the problem is resolved, monitoring of the gas parameters of the target gas in the inner and outer gas chambers, as well as the operation of the absorption cell, are resumed. If the gas parameters of the target gas in the inner gas chamber and at least one outer gas chamber deviate from the preset operating conditions, the operation of the absorption pool is stopped. The inner gas chamber and each outer gas chamber of the absorption pool are evacuated and then refilled with the target gas until the gas parameters of the target gas in the inner gas chamber and each outer gas chamber meet the preset operating conditions. Then, the monitoring of the gas parameters of the target gas in the inner gas chamber and each outer gas chamber and the operation of the absorption pool are resumed.

9. The method according to claim 6, characterized in that, The method further includes opening at least one inner chamber valve and each outer chamber valve before filling the target gas, and performing a evacuation operation on the inner chamber and each outer chamber to bring the inner chamber and each outer chamber to a vacuum state.

10. The method according to claim 6, characterized in that, The method further includes treating the extracted gas and then refilling it into the corresponding gas chamber in the gas chamber group of the absorption pool. The gas treatment includes separation, purification and / or refining.

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