Semiconductor side pump laser bar inspection device and inspection method

Abstract

The invention discloses a semiconductor side pump laser bar inspection device and method, and belongs to the technical field of semiconductor lasers, the semiconductor side pump laser bar inspection device comprises a base, a rotating shaft is fixedly arranged on the base, the rotating shaft is movably connected with an object placing table, the object placing table is used for bearing a side pump laser module, the rotating shaft vertically penetrates through the center of the object placing table, and a reflector is fixedly arranged at the top of the rotating shaft; the reflecting mirror is arranged in an inclined mode, and during inspection, the reflecting mirror can be adjusted to be located at the intersection point position of emergent light of a to-be-detected bar on the inner circumference of the side pump laser module. The borne side pump laser module rotates around a shaft or vertically moves, and is matched with the inclined reflecting mirror arranged at the intersection point of emergent light of the bars on the inner circumference of the module, so that the emergent light of the bars in an annular or polygonal shell structure can be efficiently reflected, a microscope does not need to be directly stretched into the shell, and the working efficiency is improved. Therefore, the assembled bar can be clearly observed, the applicable scene of bar inspection is greatly expanded, and the convenience and feasibility of inspection operation are improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor laser technology, and in particular to a device and method for testing bar bars of semiconductor side-pumped lasers. Background Technology

[0002] Semiconductor-side-pumped solid-state lasers have advantages such as compact structure, high stability, long lifespan, and high beam quality, and are widely used in military weapons, laser medicine, materials processing, space communication, laser display and other fields.

[0003] The power bar is a core component of a semiconductor laser. Its condition and packaging quality directly affect the quality of the pump laser beam and can even influence the laser's stability and lifespan. Currently, optical microscopes are typically used to inspect the emitting area (cavity surface) for scratches, chipping, contamination, or oxide spots to confirm the power bar's packaging.

[0004] Existing bar inspection methods are only applicable to bar assembly. However, existing semiconductor lasers have various shell structures, such as rings and polygons, to ensure that the bars are evenly distributed around the crystal. Due to the limitations of the ring or polygon shell structure, it is not possible to use a microscope to directly insert into the shell to inspect the bars. Summary of the Invention

[0005] To address the technical problem that existing bar inspection methods in the background art are only applicable before bar assembly, and cannot be directly inspected using a microscope after assembly due to the limitation of the annular or polygonal shell structure, the present invention provides a device and method for inspecting the bar of a semiconductor side-pumped laser.

[0006] The technical solution of this invention is as follows: This invention provides a device for inspecting the bars of a semiconductor side-pumped laser, including a base with a rotating shaft fixedly mounted on it. A stage is movably connected to the rotating shaft, which supports a side-pumped laser module. The rotating shaft vertically passes through the center of the stage, and a reflector is fixedly mounted on the top of the shaft. The reflector is tilted, allowing it to be adjusted to the intersection point of the emitted light from the bar to be inspected within the inner circumference of the side-pumped laser module during inspection. Through the movable connection between the rotating shaft and the stage, the supported side-pumped laser module can rotate or move vertically around the shaft. Combined with the tilted reflector positioned at the intersection point of the emitted light from the bar to be inspected within the module's inner circumference, efficient reflection of the emitted light from the bar inside a ring or polygonal shell structure is achieved. This eliminates the need to directly insert a microscope into the shell, enabling clear observation of the assembled bar, significantly expanding the applicable scenarios for bar inspection and improving the convenience and feasibility of the inspection operation.

[0007] Preferably, the mirror surface of the reflector forms a 45° angle with the surface of the stage, which can change the propagation direction of the light emitted from the bar, allowing the reflected light to enter the observation field of the microscope objective vertically upward, ensuring that the imaging light received by the microscope is stable and clear, providing reliable optical conditions for accurate judgment of the bar's condition, while eliminating the need for additional adjustment of the optical path angle, thus simplifying the pre-inspection debugging process.

[0008] Preferably, the surface of the reflector is coated with a silver layer and a protective layer. The protective layer is located outside the silver layer. The silver layer can effectively improve the light reflection efficiency and reduce the loss of light signal during the reflection process, making the image captured by the microscope brighter and clearer. The outer protective layer can effectively protect the silver layer, prevent the silver layer from being corroded or worn by the external environment during long-term use, extend the service life of the reflector, ensure the long-term stable operation of the device, and maintain the consistency of inspection accuracy.

[0009] Preferably, the protective layer is a SiO2 protective film, which has excellent chemical stability and light transmittance. While protecting the silver layer from external corrosion, it will not cause additional absorption or refraction interference to the reflected light, ensuring the stability of the reflected light path and the imaging quality. At the same time, the SiO2 material has high hardness and can resist minor scratches in daily operation, further extending the service life of the reflector and reducing the maintenance cost of the device.

[0010] Preferably, the upper surface of the platform is fixed with two positioning pins, which are distributed opposite each other on both sides of the reflector. This allows for quick positioning of the side-pumped laser module, ensuring that the reflector is precisely positioned at the intersection of the emitted light from the circumferential bar each time the module is placed. This avoids optical path deviation caused by module placement errors, reduces the time spent on repeated adjustments, improves the efficiency and standardization of inspection operations, and ensures that the inspection conditions for different batches of modules remain consistent.

[0011] Preferably, a through hole is provided at the center of the platform. The through hole is movably connected to the rotating shaft through a bushing. This can reduce the frictional resistance during the rotation or vertical movement of the platform, making the movement of the platform more stable and smooth. At the same time, the bushing can protect the connection between the rotating shaft and the platform, reduce wear between the two, extend the mechanical service life of the device, and ensure the stability of rotational accuracy during long-term use.

[0012] Preferably, a lifting mechanism is provided between the base and the stage. The lifting mechanism includes a guide sleeve and a lifting rod. The guide sleeve is vertically fixed at the bottom of the base and located on one side of the rotating shaft. The lifting rod is vertically movable inside the guide sleeve, with its upper end abutting against the lower surface of the stage. The vertical movement of the lifting rod within the guide sleeve can drive the stage to achieve stable up-and-down displacement, thereby adjusting the relative distance between the side pump laser module and the reflector. This meets the observation requirements for bar strips of different lengths and specifications, ensuring that all parts of the bar strip are clearly presented in the microscope's field of view, thus improving the comprehensiveness and accuracy of the inspection.

[0013] Preferably, a guide groove is provided on the lower surface of the platform. The guide groove is arranged in a circumferential direction. The top end of the lifting rod is inserted into the guide groove. The top end of the lifting rod is provided with a ball bearing. This can provide a stable guiding effect for the rotation of the platform, ensuring that the platform remains horizontal when rotating and avoiding the module tilting from affecting the optical path. It can also convert the sliding friction between the lifting rod and the platform into rolling friction, further reducing the resistance during the rotation of the platform and making the operation more effortless and smooth.

[0014] A testing method, comprising: Place the semiconductor side-pumped laser bar strip inspection device under a high-power microscope and align the objective lens observation center with the center of the reflecting mirror. Place the side-pumped laser module on the platform and adjust its position so that the reflector is located at the intersection of the emitted beams from the circumferential bar. Adjust the positions of the objective lens and the mirror until a clear image is observed through the eyepiece; Manually adjust the vertical position of the platform to move the side-pumped laser module up and down relative to the reflector, observe the status of the entire bar through the eyepiece, and clean it.

[0015] Through standardized operating procedures, a stable and clear observation optical path can be quickly constructed. With the help of adjusting the vertical position of the platform, the entire bar can be observed and cleaned in a comprehensive and detailed manner without disassembling the module housing. The bar inspection can be completed without damaging the laser assembly structure, ensuring that the assembly accuracy of the laser is not affected. At the same time, the inspection process is simplified and the time required for a single inspection is shortened.

[0016] Preferably, after one bar is inspected and cleaned, the platform is manually rotated to align the next adjacent bar with the reflector, and the above operation is repeated. This allows for the sequential inspection of all bars around the perimeter without the need for disassembly or significant adjustments to the device and module positions, significantly improving the efficiency of continuous inspection of multiple bars while ensuring consistent inspection conditions for each bar, thus guaranteeing the objectivity and comparability of the inspection results.

[0017] As can be seen from the above technical solutions, the advantages of the present invention are: 1. By means of the movable connection between the rotating shaft and the stage, the side-pumped laser module can be driven to rotate around the axis or move vertically. With the tilted reflector placed at the intersection of the emitted light from the bar to be tested on the inner circumference of the module, the emitted light from the bar inside the annular or polygonal shell structure can be efficiently reflected. Clear observation of the assembled bar can be achieved without inserting the microscope directly into the shell, which greatly expands the applicable scenarios of bar inspection, improves the convenience and feasibility of inspection operation, and avoids heat sink scratches on the laser.

[0018] 2. Through standardized operating procedures, a stable and clear observation optical path can be quickly constructed. With the help of adjusting the vertical position of the stage, the entire bar can be observed and cleaned comprehensively and meticulously without disassembling the module housing. The bar inspection can be completed without damaging the laser assembly structure, ensuring that the laser assembly accuracy is not affected. At the same time, the inspection process is simplified and the time for a single inspection is shortened. With the help of the rotation of the stage around the axis, the inspection of all bars around the perimeter can be completed sequentially without reassembly or significant adjustment of the device and module position. This significantly improves the efficiency of continuous inspection of multiple bars, while ensuring that the inspection conditions of each bar are consistent, ensuring the objectivity and comparability of the inspection results. Attached Figure Description

[0019] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional structural schematic diagram of the semiconductor side-pumped laser bar bar inspection device according to one or more embodiments of the present invention; Figure 2 This is a front view structural schematic diagram of the semiconductor side-pumped laser bar bar inspection device according to one or more embodiments of the present invention; Figure 3 This is a cross-sectional structural schematic diagram of the semiconductor side-pumped laser bar bar inspection device according to one or more embodiments of the present invention; Figure 4 This is a schematic diagram illustrating the working principle of the semiconductor side-pumped laser bar bar inspection device according to one or more embodiments of the present invention. Figure 5 This is a schematic diagram of the structure of an existing side-pumped laser module; The components represented by the various reference numerals in the diagram are: 1. Base; 2. Display platform; 21. Through hole; 3. Rotating shaft; 4. Reflector; 5. Positioning pin; 6. Lifting mechanism; 61. Guide sleeve; 62. Lifting rod; 7. Bushing; 8. Side-pumped laser module; 9. Bar; 10. Microscope; 11. Positioning pin hole. Detailed Implementation

[0021] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings of the specific embodiments. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this patent, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this patent.

[0022] Example 1 In a typical embodiment of the present invention, such as Figures 1-4 As shown, a semiconductor side-pumped laser bar bar inspection device is proposed, including: a base 1, a stage 2, a rotating shaft 3, and a reflector 4. The stage 2 is rotatably mounted on the base 1 via the rotating shaft 3, which vertically passes through the center of the stage 2. The reflector 4 is fixedly mounted on the top of the rotating shaft 3. When inspecting the bar bar 9, the side-pumped laser module 8 is placed on the upper surface of the stage 2, so that the reflector 4 is located within the space enclosed by the bar bar 9. During inspection, the reflector 4 can be adjusted to be located at the intersection of the emitted light from the bar bar 9 to be inspected. The reflector 4 is tilted so that the light emitted by the bar bar 9 observed by the microscope 10 is incident vertically onto the surface of the reflector 4, and the reflected light is emitted horizontally. The side-pumped laser module 8 can also be rotated around the axis by rotating the stage 2, thereby realizing the inspection of the bar bar 9 around the reflector 4.

[0023] With the movable connection between the rotating shaft 3 and the stage 2, the side-pumped laser module 8 can be driven to rotate around the axis or move vertically. With the tilting mirror 4 placed at the intersection of the emitted light from the bar 9 on the inner periphery of the module, the emitted light from the bar 9 inside the annular or polygonal shell structure can be efficiently reflected. Clear observation of the assembled bar 9 can be achieved without directly inserting the objective lens of the microscope 10 into the shell, which greatly expands the applicable scenarios for bar 9 inspection and improves the convenience and feasibility of inspection operations.

[0024] In this embodiment, the mirror surface of the reflector 4 forms a 45° angle with the surface of the stage 2, and the mirror surface of the reflector 4 is located at the intersection of the light emitted from the peripheral bar 9. This can change the propagation direction of the light emitted from the bar 9, so that the reflected light can enter the observation field of the objective lens of the microscope 10 vertically upward, ensuring that the imaging light received by the microscope 10 is stable and clear, providing reliable optical conditions for accurate judgment of the bar 9's state, while eliminating the need for additional adjustment of the optical path angle, thus simplifying the debugging process before inspection.

[0025] To improve the reflectivity of the reflector 4, a silver layer is plated on its surface, resulting in a reflectivity of over 99%. Simultaneously, a protective layer, a SiO2 protective film, is also plated on the surface of the reflector 4 to prevent oxidation and enhance corrosion resistance. This protective layer is located on the outside of the silver layer, ensuring that it does not affect the penetration of visible and near-infrared light, thus maintaining the reflectivity of the silver layer. It also isolates the silver layer from corrosive substances such as air, moisture, and sulfides, preventing oxidation or blackening due to sulfidation. Furthermore, it improves the wear resistance of the silver layer, preventing scratches during wiping or use.

[0026] Two positioning pins 5 are fixedly provided on the upper surface of the platform 2. The two positioning pins 5 are distributed opposite each other on both sides of the reflector 4, such as... Figure 5 As shown, the side-pumped laser module 8 has two opposing positioning pin holes 11. The positioning pin 5 can be inserted into the positioning pin hole 11 to achieve rapid positioning of the stage 2 and the side-pumped laser module 8. At the same time, it also ensures the fixed position of the side-pumped laser module 8, avoids displacement during rotation, and improves the quality of bar strip 9 inspection.

[0027] The rotating shaft 3 is vertically fixed on the base 1 by welding. A through hole 21 is provided at the center of the shelf 2. The through hole 21 is coaxially arranged with the rotating shaft 3 and rotatably connected to realize the rotatable connection between the shelf 2 and the base 1.

[0028] like Figure 3 As shown, a bushing 7 is fixedly installed in the through hole 21 of the platform 2. The bushing 7 is fixedly installed in the through hole 21 by interference fit or transition fit. The bushing 7 is sleeved on the rotating shaft 3, and the bushing 7 and the rotating shaft 3 are movably connected. The bushing 7 can rotate and reciprocate linearly relative to the rotating shaft 3, which can reduce the frictional resistance during the rotation or vertical movement of the platform 2, making the movement of the platform 2 more stable and smooth. At the same time, the bushing 7 can protect the connection between the rotating shaft 3 and the platform 2, reduce the wear between the two, extend the mechanical service life of the device, and ensure the stability of the rotational accuracy during long-term use.

[0029] The base 1 is used to place it in a designated position. An adjustment mechanism 6 is also provided between the base 1 and the shelf 2. The adjustment mechanism 6 can control the vertical movement of the shelf 2 to adjust the height of the shelf 2, thereby facilitating the adjustment of the height of the bar strip 9 relative to the reflector 4. This makes it easier to observe the state of the entire bar strip 9 using the microscope 10. If dirt or foreign objects are found, they can be cleaned with cotton swabs, adhesive sticks, etc.

[0030] The lifting mechanism 6 includes a guide sleeve 61 and a lifting rod 62. The guide sleeve 61 is vertically fixed at the bottom of the base 1 and is located on one side of the rotating shaft 3. The axis of the guide sleeve 61 is parallel to the axis of the rotating shaft 3. The lifting rod 62 is vertically movable inside the guide sleeve 61, with both ends of the lifting rod 62 extending outward from the guide sleeve 61. The lower end of the lifting rod 62 is used for manual hand operation, and the upper end of the lifting rod 62 is used to abut against the lower surface of the platform 2, thereby pushing the platform 2 to move vertically through the lifting rod 62. Since the platform 2 is also slidably connected to the rotating shaft 3, it can prevent the platform 2 from tilting under the constraint of the rotating shaft 3.

[0031] To further improve the stability of the platform 2, a guide groove is provided on the lower surface of the platform 2. The guide groove is arranged in a circumferential direction, and the top end of the lifting rod 62 is inserted into the guide groove. Through the cooperation of the lifting rod 62 and the rotating shaft 3, the platform 2 is limited to prevent it from tilting. The top end of the lifting rod 62 is provided with a ball bearing. The lifting rod 62 contacts the lower surface of the platform 2 through the ball bearing, so as to reduce the friction between the lifting rod 62 and the platform 2 by rolling, which facilitates the rotation of the platform 2, reduces the wear between the platform 2 and the lifting rod 62, and also reduces the noise during the rotation of the platform 2.

[0032] In this embodiment, the lifting rod 62 is provided with an external thread, and the guide sleeve 61 is provided with an internal thread, so that they are connected by a threaded connection, thereby adjusting the vertical position by rotating the lifting rod 62; in other embodiments, the lifting rod 62 can also be a smooth rod structure, in which case the guide sleeve 61 and the lifting rod 62 are slidably connected, and the lifting rod 62 is moved vertically by manually pushing it.

[0033] Example 2 In another typical embodiment of the present invention, an inspection method is proposed, employing the aforementioned semiconductor side-pumped laser bar inspection device for inspecting bar 9. The inspection method includes: The semiconductor side-pumped laser bar strip inspection device is placed under a high-power microscope, and the observation center of the objective lens of the microscope 10 is aligned with the center of the reflecting mirror 4. Depending on the observation range, the magnification of the microscope 10 can be adjusted between 50x and 100x. Place the side-pumped laser module 8 on the platform 2 and adjust the position of the side-pumped laser module 8 so that the reflector 4 is located at the intersection of the emitted light from the circumferential bar 9. Adjust the coarse adjustment knob of microscope 10 to adjust the position of objective lens and mirror 4 until the image can be observed through eyepiece. Adjust the fine adjustment knob to make the image in eyepiece clearer. Manually adjust the lifting rod 62 of the lifting mechanism 6 to move the side pump laser module 8 up and down relative to the reflector 4. Observe the condition of the entire bar 9 through the eyepiece. If dirt or foreign objects are found, they can be cleaned with cotton swabs, dust sticks, etc. After cleaning, repeat the above actions and observe the condition of the entire bar 9 through the eyepiece for inspection. If cleaning is completed, proceed to the inspection of the next bar 9. If there is still dirt or foreign objects, continue cleaning and inspection until the entire bar 9 is cleaned. After the first bar 9 has been inspected and cleaned, manually rotate the stage 2 to align the next adjacent bar 9 with the reflector 4, so that the reflector 4 is located at the intersection of the emitted light from the bar 9. Adjust the coarse adjustment knob of the microscope 10 to adjust the position of the objective lens and the reflector 4 until the image can be observed through the eyepiece. Adjust the fine adjustment knob to make the image in the eyepiece clearer. Manually adjust the lifting mechanism 6 to move the side pump laser module 8 up and down relative to the reflector 4. Observe the state of the second bar 9 through the eyepiece. If dirt or foreign objects are found, they can be cleaned with cotton swabs, tack sticks, etc. After the second bar strip 9 has been inspected, manually rotate the platform 2 to align the next adjacent bar strip 9 with the reflector 4, and repeat the above operation to inspect the subsequent bar strips 9. Through standardized operating procedures, a stable and clear observation optical path can be quickly constructed. With the help of adjusting the vertical position of the stage 2, the entire bar 9 can be observed and cleaned in a comprehensive and detailed manner without disassembling the module housing. The inspection of the bar 9 can be completed without damaging the laser assembly structure, ensuring that the assembly accuracy of the laser is not affected. At the same time, the inspection process is simplified and the time for a single inspection is shortened. With the help of the rotation of the stage 2 around the axis, the inspection of all bars 9 around the perimeter can be completed sequentially without reassembly or major adjustment of the device and module position. This significantly improves the efficiency of continuous inspection of multiple bars 9, while ensuring that the inspection conditions of each bar 9 are consistent, ensuring the objectivity and comparability of the inspection results.

[0034] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for inspecting bar bars of a semiconductor side-pumped laser, comprising: The base (1) is characterized in that a rotating shaft (3) is fixedly provided on the base (1), and a platform (2) is movably connected to the rotating shaft (3). The platform (2) is used to support the side-pumped laser module (8). The rotating shaft (3) passes vertically through the center of the platform (2). A reflector (4) is fixedly provided on the top of the rotating shaft (3). The reflector (4) is tilted. During inspection, the reflector (4) can be adjusted to be located at the intersection of the emitted light from the bar (9) to be tested on the inner circumference of the side-pumped laser module (8).

2. The semiconductor side-pumped laser bar inspection device according to claim 1, characterized in that, The mirror surface of the reflector (4) forms a 45° angle with the surface of the platform (2).

3. The semiconductor side-pumped laser bar inspection device according to claim 1, characterized in that, The surface of the reflector (4) is coated with a silver layer and a protective layer, with the protective layer located on the outside of the silver layer.

4. The semiconductor side-pumped laser bar bar inspection device according to claim 3, characterized in that, The protective layer is a SiO2 protective film.

5. The semiconductor side-pumped laser bar inspection device according to claim 1, characterized in that, Two positioning pins (5) are fixed on the upper surface of the platform (2), and the two positioning pins (5) are distributed on both sides of the reflector (4).

6. The semiconductor side-pumped laser bar bar inspection device according to claim 1, characterized in that, A through hole (21) is provided at the center of the shelf (2), and the through hole (21) is movably connected to the rotating shaft (3) through the bushing (7).

7. The semiconductor side-pumped laser bar bar inspection device according to claim 1, characterized in that, A lifting mechanism (6) is provided between the base (1) and the shelf (2). The lifting mechanism (6) includes a guide sleeve (61) and a lifting rod (62). The guide sleeve (61) is vertically fixed at the bottom of the base (1). The guide sleeve (61) is located on one side of the rotating shaft (3). The lifting rod (62) is vertically movable inside the guide sleeve (61). The upper end of the lifting rod (62) abuts against the lower surface of the shelf (2).

8. The semiconductor side-pumped laser bar strip inspection device according to claim 7, characterized in that, The lower surface of the shelf (2) is provided with a guide groove, which is arranged in a circumferential direction. The top end of the lifting rod (62) is inserted into the guide groove, and the top end of the lifting rod (62) is provided with a ball bearing.

9. A testing method, characterized in that, include: The semiconductor side-pumped laser bar strip inspection device as described in any one of claims 1-8 is placed under a high-power microscope (10), with the objective lens observation center aligned with the center of the reflecting mirror (4); Place the side-pumped laser module (8) on the platform (2), adjust the position of the side-pumped laser module (8) so that the reflector (4) is located at the intersection of the emitted light from the bar (9) to be tested on the inner circumference of the side-pumped laser module (8); Adjust the vertical relative position of the objective lens and the mirror (4) until a clear image is observed through the eyepiece; Manually adjust the vertical position of the platform (2) so that the side pump laser module (8) moves up and down relative to the reflector (4). Observe the state of the entire bar (9) through the eyepiece and clean it manually.

10. The testing method according to claim 9, characterized in that, After one bar strip (9) has been inspected and cleaned, manually rotate the platform (2) to align the next adjacent bar strip (9) with the reflector (4), and repeat the above operation.

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