Hydrogen analyzer and control method

Abstract

The invention discloses a hydrogen analyzer and a control method thereof.The hydrogen analyzer comprises an analyzer body, a sensor probe and a wire harness, one end of the sensor probe is connected with the analyzer body through the wire harness, an air inlet and an air outlet are formed in a port of the other end of the sensor probe, and the sensor probe comprises an electromagnetic micro-switch, a gas inlet and a gas outlet, the electromagnetic micro switch is fixedly arranged at the port of the sensor probe, and an air inlet channel and an air outlet channel are arranged in the electromagnetic micro switch; elastic diaphragms are arranged on ports of one ends, close to the air inlet and the air outlet, of the air inlet channel and the air outlet channel; the opening degree of the elastic membrane is controlled through a control circuit. The gas detection cavity is communicated with the gas inlet channel and the gas outlet channel, and a gas flow sensor and a thermal conductivity hydrogen sensor are fixedly arranged in the gas detection cavity. According to the hydrogen analyzer, gas passes through the electromagnetic micro switch and the gas flow sensor, the electromagnetic micro switch can be accurately controlled, and the purpose of controlling the gas flow rate is achieved.

Description

Technical Field

[0001] This invention relates to the field of gas detection and analysis technology, and more specifically, to a hydrogen analyzer and control method. Background Technology

[0002] Industrial hydrogen analyzers are currently widely used in industries such as semiconductors, chemicals, environmental protection, and petroleum refining. They are used for the detection of hydrogen in hydrogen-nitrogen pipelines, hydrogen-oxygen pipelines, and hydrogen-argon pipelines. Online hydrogen analyzers can ensure the normal production activities of factories and the safety of workers.

[0003] Online hydrogen analyzers typically consist of a thermal conductivity cell, a signal transmission system, and a housing. They detect hydrogen concentration by utilizing the difference in thermal conductivity between hydrogen and a mixed gas. Hydrogen analyzers are usually affected by temperature, humidity, and gas flow rate. Temperature and humidity can be compensated for by temperature and humidity sensors, but gas flow rate compensation is more complex, and the solenoid valve for gas flow rate control is bulky, making it unsuitable for portable on-site detection and analysis. Because gas flow rate changes irregularly, online hydrogen analyzers need to be calibrated in real time according to the new gas flow rate, which presents many inconveniences and difficulties in practical operation.

[0004] In summary, it is necessary to provide a portable online hydrogen analyzer that does not require manual real-time calibration to solve the aforementioned technical problems. Summary of the Invention

[0005] Therefore, it is necessary for the present invention to provide a hydrogen analyzer and control method to solve the above-mentioned technical problems.

[0006] One technical solution of the present invention is: A hydrogen analyzer includes an analyzer body, a sensor probe, and a wiring harness. One end of the sensor probe is connected to the analyzer body via the wiring harness, and the other end has an inlet and an outlet. The sensor probe comprises: An electromagnetic microswitch is fixedly mounted at the sensor probe port. The microswitch contains an air inlet channel and an air outlet channel. The air inlet channel communicates with an air inlet hole, and the air outlet channel communicates with an air outlet hole. An elastic diaphragm is provided at the end of the air inlet channel near the air inlet hole; an elastic diaphragm is also provided at the end of the air outlet channel near the air outlet hole. The opening and closing of the elastic diaphragms is controlled by a control circuit to control the gas flow rate. A gas detection chamber is provided, which is connected to the inlet channel and the outlet channel. A gas flow sensor and a thermal conductivity hydrogen sensor are fixedly installed in the gas detection chamber, and the gas flow sensor and the thermal conductivity hydrogen sensor are electrically connected to the control circuit.

[0007] As one specific embodiment, it also includes a sensor probe housing, which encloses the electromagnetic microswitch, control circuit and gas detection chamber inside the housing.

[0008] In one specific embodiment, the air intake channel and the air outlet channel are cylindrical with a diameter of Rt; the elastic diaphragm is circular with a diameter of Rm, and Rm < Rt.

[0009] As one specific implementation, two spiral electromagnetic coils are respectively provided in the air intake channel and the air outlet channel.

[0010] In one specific embodiment, the elastic diaphragm is provided with a ring magnet on the side away from the air inlet and outlet channels.

[0011] In one specific implementation, the two helical electromagnetic coils are wound in the same direction.

[0012] In one specific embodiment, there is a gap between the end of the spiral electromagnetic coil near the elastic diaphragm and the elastic diaphragm, and the gap ranges from 1mm to 3mm.

[0013] In one specific embodiment, the diameter of the air intake channel and the diameter Rt of the air outlet channel are the same, and Rt is 0.5mm~5.0mm.

[0014] A control method for a hydrogen analyzer, characterized by comprising the following steps: The gas to be analyzed enters the inlet of the sensor probe of the hydrogen analyzer, and the inlet channel of the electromagnetic micro switch is opened and connected to the inlet. After the gas to be analyzed enters, the gas flow sensor will measure the flow rate V of the gas to be analyzed and compare the flow rate V with the set standard flow rate Vs. When V > Vs, the control circuit will control the opening and closing of the elastic diaphragm at one end of the electromagnetic micro-switch air inlet channel to control the flow rate V of the gas to be analyzed until V = Vs. When V=Vs, the thermal conductivity hydrogen sensor starts working, sampling the gas to be analyzed. The control circuit analyzes the sampled data and finally outputs the parameters of the hydrogen.

[0015] In one specific implementation, when the control circuit controls the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air inlet channel, the control circuit simultaneously controls the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air outlet channel. The opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air outlet channel is equal to the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air inlet channel, so that the amount of gas to be analyzed entering is consistent with the amount of gas to be analyzed flowing out.

[0016] This application provides an online hydrogen analyzer that can automatically complete calibration according to different gas flow rates. The gas acquisition end of the online hydrogen analyzer is equipped with an electromagnetic microswitch and a gas flow sensor, which can accurately control the opening and closing amplitude of the electromagnetic microswitch to achieve the purpose of controlling the gas flow rate. At the same time, the electromagnetic microswitch has the advantages of small size, high sensitivity and low cost. Attached Figure Description

[0017] Other features, objectives, and beneficial effects of this application will become more apparent from the following detailed description of the reference embodiments with reference to the accompanying drawings.

[0018] Figure 1 This is a schematic diagram of the structure of a hydrogen analyzer according to the present invention; Figure 2 This is a schematic diagram of the sensor probe structure of a hydrogen analyzer according to the present invention; Figure 3 This is a schematic diagram of the sensor probe structure of a hydrogen analyzer according to the present invention; Figure 4 This is a schematic diagram of the electromagnetic microswitch structure in the sensing probe of a hydrogen analyzer according to the present invention; Figure 5 This is a schematic diagram of the electromagnetic microswitch structure in the sensing probe of a hydrogen analyzer according to the present invention; Figure 6 This is a schematic diagram of the closed state structure of an electromagnetic microswitch in a hydrogen analyzer sensing probe according to the present invention. Figure 7 This is a schematic diagram of the opening and closing state structure of an electromagnetic microswitch in a hydrogen analyzer sensing probe according to the present invention. Figure 8 This is a flowchart illustrating a control method for a hydrogen analyzer according to the present invention.

[0019] Icon description: 10 - Analyzer body; 20 - Sensor probe; 21 - Air inlet; 22 - Air outlet; 23 - Sensor probe housing; 30, 40 - wire harness; 50-Electromagnetic microswitch; 501-Elastic diaphragm; 502-Ring magnet; 503-Electromagnetic microswitch body; 504-Inlet channel; 505-Outlet channel; 510, 520-Magnetic core; 530, 531-Helical electromagnetic coil; 5011-Slot; 60 - Gas detection chamber; 61 - Gas flow sensor; 62 - Thermal conductivity hydrogen sensor; 63 - Temperature and humidity sensor; 601 - Chamber wall; 70 - Control circuit. Detailed Implementation

[0020] To facilitate understanding of the present invention, a detailed description will be provided below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of the present invention, but the implementation of the present invention is not limited thereto. These embodiments are provided to provide a more comprehensive and thorough understanding of the disclosure of the present invention.

[0021] In the figures, the same reference numerals represent the same or similar structures, and therefore will not be described again. It should be noted that this specification may use directional terms such as "upper," "lower," and "between," which are only for the convenience of describing the orientation shown in the figures and do not limit the actual direction of the invention. Furthermore, the use of terms such as "first" and "second" is only for distinguishing different features and does not constitute a limitation on the number or importance of features.

[0022] Unless otherwise expressly stated, the technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for description of specific embodiments only and does not constitute a limitation thereof. The term "and / or" should be interpreted as including any and all combinations of one or more of the associated listed items.

[0023] Please see Figures 1-7 The hydrogen analyzer will be described in detail with reference to the accompanying drawings. A hydrogen analyzer includes an analyzer body 10, a sensor probe 20, and wiring harnesses 30 and 40. The wiring harness 40 is connected to the analyzer body 10 at one end and to an external device at the other end. One end of the sensor probe 20 is connected to the analyzer body 10 via the wiring harness 30. The other end of the sensor probe 20 has an inlet 21 and an outlet 22. The sensor probe 20 is cylindrical, and the outer surface of the other end of the sensor probe 20 is threaded to facilitate connection between the sensor probe 20 and the device under test. The sensor probe housing 23 is made of stainless steel. The sensor probe 20 comprises: An electromagnetic microswitch 50 is fixedly mounted at the port of the sensor probe 20. The electromagnetic microswitch 50 includes an air inlet channel 504 and an air outlet channel 505. The air inlet channel 504 is connected to an air inlet port 21, and the air outlet channel 505 is connected to an air outlet port 22. An elastic diaphragm 501 is provided on the end of the air inlet channel 504 near the air inlet port 21; an elastic diaphragm 501 is also provided on the end of the air outlet channel 505 near the air outlet port 22. The opening and closing of the elastic diaphragm 501 is controlled by a control circuit 70 to control the gas flow rate. A gas detection chamber 60 is configured to communicate with the inlet channel 504 and the outlet channel 505. A gas flow sensor 61 and a thermal conductivity hydrogen sensor 62 are fixedly installed inside the gas detection chamber 60. The gas flow sensor 61 and the thermal conductivity hydrogen sensor 62 are electrically connected to the control circuit 70. Figure 2 As shown, the gas detection chamber 60 is enclosed by a chamber wall 601, and the gas flow sensor 61 and the thermal conductivity hydrogen sensor 62 are housed within it, so that the external gas to be measured can be directly sensed when it enters; from Figure 2 It can also be seen that the sensor probe 20 is equipped with a temperature and humidity sensor 63, which can sense the temperature and humidity of the incoming gas at any time and provide timely temperature and humidity compensation.

[0024] The gas to be tested first enters through the inlet, then the elastic diaphragm of the inlet channel opens, allowing the gas to enter the gas detection chamber. At this point, the gas flow sensor measures the gas velocity and sends feedback to the control circuit. The control circuit then determines whether the gas velocity meets the preset value. If not, the control circuit will adjust the opening and closing of the electromagnetic microswitch until the gas velocity meets the preset value. Once this is achieved, the thermal conductivity hydrogen sensor begins to work, detecting and analyzing the hydrogen. During the adjustment and hydrogen analysis process, the gas continuously flows and exchanges between the inlet and outlet.

[0025] As one specific embodiment, it also includes a sensor probe housing 23, which encloses the electromagnetic microswitch 50, the control circuit 70, and the gas detection chamber 60 within the housing; for example Figure 2 It can be seen that the sensor probe 20 has an air inlet 21 and an air outlet 22 at its port, and the electromagnetic micro switch 50, the control circuit 70 and the gas detection chamber 60 are all enclosed inside the cylindrical sensor probe housing 23.

[0026] In one specific embodiment, the air intake channel 504 and the air outlet channel 505 are cylindrical with a diameter of Rt; the elastic diaphragm 501 is circular with a diameter of Rm, where Rm < Rt. Further, the diameter of the air intake channel 504 and the diameter of the air outlet channel 505 are the same as Rt, and Rt is 0.5mm to 5.0mm.

[0027] In one specific embodiment, two spiral electromagnetic coils 530 and 531 are respectively provided in the air intake channel 504 and the air outlet channel 505. In one specific embodiment, the two spiral electromagnetic coils 530 and 531 are wound in the same direction. In one specific embodiment, an annular magnet 502 is provided on the side of the elastic diaphragm 501 away from the air intake channel 504 and the air outlet channel 505. In one specific embodiment, there is a gap between the spiral electromagnetic coil and the elastic diaphragm at the end near the elastic diaphragm, the gap ranging from 1mm to 3mm. In one specific embodiment, the diameter Rm of the elastic diaphragm is 0.4mm to 4.9mm, and the thickness is 0.05mm to 0.2mm.

[0028] Please see Figures 4-7 A detailed structural diagram of the electromagnetic microswitch 50 is provided. The electromagnetic microswitch 50 includes an air inlet channel 504 in the electromagnetic microswitch body 503, with an elastic diaphragm 501 at the gas inlet, and an air outlet channel 505 in the electromagnetic microswitch body 503, with an elastic diaphragm 501 at the gas outlet end. The surface of the elastic diaphragm is provided with an annular magnet 502. As can be seen from the figure, the elastic diaphragm 501 has two symmetrical rotating rods. The elastic diaphragm 501 is set in a slot 5011 on the electromagnetic microswitch body 503 through the rotating rods, ensuring that the elastic diaphragm 501 can rotate around the rotating rods.

[0029] The air intake channel 504 and the air outlet channel 505 are respectively provided with two magnetic cores 510 and 520, and the magnetic cores 510 and 520 are respectively provided with spiral electromagnetic coils 530 and 531; wherein the spiral electromagnetic coils 530 and 531 are wound in the same direction. Figure 6 As shown, the elastic diaphragm 501 is in an open state. The elastic diaphragm 501 has a certain distance from the magnetic cores 510 and 520, which ensures the diaphragm 501 can rotate. Figure 7 As shown, for example, the end of the annular magnet 502 away from the elastic diaphragm 501 is the S pole, and the other end is the N pole. When the spiral electromagnetic coils 530 and 531 are energized, the currents flowing through the spiral inductors 530 and 531 are opposite. According to the law of electromagnetic induction, the magnetic electrodes generated on the magnetic cores 510 and 520 are also opposite. As shown in the figure, the end of the magnetic core 510 closest to the elastic diaphragm 501 is the S pole, and the end of the magnetic core 520 closest to the elastic diaphragm 501 is the N pole. Thus, due to the action of the annular magnet on this magnetic pole, i.e., one side repels and the other side attracts, the elastic diaphragm 501 flips open, and gas enters. The air inlet channel 504 and the air outlet channel 505 are linked together, one responsible for air inlet and the other for air outlet. When gas flows in, the gas flow sensor 61 can quickly sense the changes in the inlet channel 504 and the outlet channel 505. After receiving the signal, the control circuit compares and calculates with the calibration value in the program algorithm. Then, by adjusting the current of the spiral inductor coils 530 and 531, the strength of the magnetism generated by the current of the spiral inductor coil changes, which in turn changes the reversal angle of the elastic diaphragm 501, thereby achieving the purpose of controlling the gas flow rate.

[0030] As one specific implementation, the analyzer body 10 has a square structure, and a display screen is provided in the middle area of ​​the analyzer body 10 to observe the changes in hydrogen in real time.

[0031] like Figure 8 As shown, a control method for a hydrogen analyzer includes the following steps: Gas or gas to be analyzed enters; the gas to be analyzed enters the inlet of the sensor probe of the hydrogen analyzer, and the inlet channel of the electromagnetic micro switch is opened and connected to the inlet. After the gas to be analyzed enters, the gas flow sensor measures the flow velocity V of the gas to be analyzed and compares it with the set standard flow velocity Vs. When V > Vs, the control circuit controls the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air inlet channel to control the flow velocity V of the gas to be analyzed until V = Vs. The opening and closing of the elastic diaphragm of the electromagnetic microswitch is determined by the flow velocity of the gas to be analyzed measured by the gas flow sensor and fed back to the control system or control circuit. The control system or control circuit controls the current of the magnetic coil of the electromagnetic microswitch, thereby controlling the magnitude of the magnetic force to control the opening and closing of the elastic diaphragm. The next step will only be performed when the flow velocity of the gas to be analyzed meets the preset value.

[0032] When V=Vs, that is, when the flow rate of the gas to be analyzed is constant at the preset value, the thermal conductivity hydrogen sensor starts to work, samples the gas to be analyzed, the control circuit analyzes the sampled data, and finally outputs the parameters of the hydrogen.

[0033] In one specific implementation, when the control circuit controls the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air inlet channel, the control circuit simultaneously controls the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air outlet channel. The opening and closing of the elastic diaphragm at the air outlet channel is equal to the opening and closing of the elastic diaphragm at the air inlet channel, ensuring that the amount of gas entering and exiting is consistent. Only when the opening and closing of the elastic diaphragms in the air inlet and outlet channels are consistent will the gas flow be smoother, which is more conducive to the testing and analysis of hydrogen.

[0034] To more clearly illustrate the purpose, features, and advantages of the present invention, the specific embodiments of the invention have been described in detail above with reference to the accompanying drawings, and numerous specific details have been set forth for understanding. However, the present invention can be implemented in many other forms different from those described, and those skilled in the art can make various modifications, variations, or improvements without departing from the core concept of the invention. Furthermore, the technical features in the above embodiments can be combined arbitrarily, and such combinations should be considered within the scope of this specification as long as they do not contradict each other.

[0035] The above embodiments are merely illustrative of several implementations of the present invention, and their descriptions should not be construed as limiting the scope of protection of the present invention. The actual scope of protection of the present invention should be determined by the appended claims.

Claims

1. A hydrogen analyzer, comprising an analyzer body, a sensor probe, and a wiring harness, wherein one end of the sensor probe is connected to the analyzer body via the wiring harness, and the other end of the sensor probe has an inlet and an outlet, characterized in that, The sensor probe includes: An electromagnetic microswitch is fixedly mounted at the sensor probe port. The microswitch contains an air inlet channel and an air outlet channel. The air inlet channel communicates with an air inlet hole, and the air outlet channel communicates with an air outlet hole. An elastic diaphragm is provided at the end of the air inlet channel near the air inlet hole; an elastic diaphragm is also provided at the end of the air outlet channel near the air outlet hole. The opening and closing of the elastic diaphragms is controlled by a control circuit to control the gas flow rate. A gas detection chamber is provided, which is connected to the inlet channel and the outlet channel. A gas flow sensor and a thermal conductivity hydrogen sensor are fixedly installed in the gas detection chamber, and the gas flow sensor and the thermal conductivity hydrogen sensor are electrically connected to the control circuit.

2. The hydrogen analyzer according to claim 1, characterized in that, It also includes a sensor probe housing, which encloses the electromagnetic microswitch, control circuit, and gas detection chamber inside the housing.

3. A hydrogen analyzer according to claim 2, characterized in that, The air intake and air outlet channels are cylindrical with a diameter of Rt; the elastic diaphragm is circular with a diameter of Rm, and Rm < Rt.

4. A hydrogen analyzer according to claim 3, characterized in that, Two spiral electromagnetic coils are respectively installed in the air intake channel and the air outlet channel.

5. A hydrogen analyzer according to claim 3, characterized in that, The elastic diaphragm is provided with a ring magnet on the side away from the air inlet and outlet channels.

6. A hydrogen analyzer according to claim 4, characterized in that, The two helical electromagnetic coils are wound in the same direction.

7. A hydrogen analyzer according to claim 4, characterized in that, There is a gap between the end of the spiral electromagnetic coil near the elastic diaphragm and the elastic diaphragm, and the gap ranges from 1mm to 3mm.

8. A hydrogen analyzer according to claim 3, characterized in that, The diameter of the air intake channel and the diameter Rt of the air outlet channel are the same, and Rt is 0.5mm~5.0mm.

9. A control method for a hydrogen analyzer, characterized in that, Includes the following steps: The gas to be analyzed enters the inlet of the sensor probe of the hydrogen analyzer, and the inlet channel of the electromagnetic micro switch is opened and connected to the inlet. After the gas to be analyzed enters, the gas flow sensor will measure the flow rate V of the gas to be analyzed and compare the flow rate V with the set standard flow rate Vs. When V > Vs, the control circuit will control the opening and closing of the elastic diaphragm at one end of the electromagnetic micro-switch air inlet channel to control the flow rate V of the gas to be analyzed until V = Vs. When V=Vs, the thermal conductivity hydrogen sensor starts working, sampling the gas to be analyzed. The control circuit analyzes the sampled data and finally outputs the parameters of the hydrogen.

10. The control method for a hydrogen analyzer according to claim 9, characterized in that, When the control circuit controls the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air inlet channel, the control circuit simultaneously controls the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air outlet channel. The opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air outlet channel is equal to the opening and closing of the elastic diaphragm at one end of the electromagnetic microswitch's air inlet channel, so that the amount of gas to be analyzed entering is consistent with the amount of gas to be analyzed flowing out.

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